201109255 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種裝卸機(loader unloader)和與搬送車之 裝置間之震卸(load unload)方法。 【先前技術】 習知’在堆疊起重機、無人搬送車等之搬送車，和液晶面 板、電漿顯示器面板、太陽電池面板等之處理裝置之間，係 配置有裝卸機。該裝卸機中，於搬送車侧設有收容複數片面 板之卡匣之緩衝器，在緩衝器和處理裝置之間，設有從卡匣 裝卸基板之單元。然而，在該裝卸時需要有緩衝器和單元之 雙重空間。 如以下相關先前技術所示。專利文獻1(jP2〇〇M3〇708A) 揭示一種使自動倉庫和處理裝置形成一體以使自動倉庫之 棚架兼作處理裝置之裝卸機之緩衝器用。 [先前技術文獻] [專利文獻] [專利文獻 l]JP20〇l-130708A 【發明内容】 (發明所欲解決之問題） 本發明之課題在於提供一種裝卸機及裝卸方法，可以節省 之空間且與處理裝置間之裝卸並行地，在與搬送車之間交接 卡匣。 099129436 3 201109255 本發明之輔助課題係使單元之移動機 本發明之輔助課題係更使單 (解決問題之手段） 構和控制較為容易。 κ移動^間達到最小 品·^卡 品；其特徵 本發明係-種裝却機，其從搬送 匡，在與處找置間交接上述切物 在於，其具備有： 之物 複數單元，沿 著搬送車之移動路范 上述卡匣之載置部、和在與處理裝置 雙而配置，且具備有載置 之 移載裝置 間交接卡匣内物 品 之 及移動機構，使上料數單元沿倾送車之軸_移動； 控制器，控制上述移動機構，以者 理裝置之間移載物品之位置時’使1^小在與處 搬送車之間移載卡H之位置^ 〃個早讀在與 本發明又係-種裂卸方法，其對從搬送車移載 用裝卸機在與處理裝置而利 徵在於， κ針11巾所收谷之物品；其特 配二:卸機係設有:複數單元’沿著搬送車之移動路徑而 卡、備有載置上述卡&之載置部、和在與處理裝置之間 .SIT载裝置;_構，使上述複_沿 裝置；軸路料動；及控㈣，㈣移動機構和移載 099129436 4 201109255 ，並利用上述控制益控制上述移動機構和上述移載裝置，以 當至少1個單元在與處理裝置之間移載物品時，則使其他^ 少1個單元配置在與搬送車之間移載卡£之位置處。至 本說明書中，褒卸機有關記載可直接應用在農钟方法 之’裝卸方法有關記载亦可直接應用在I卸機。本發明中， 於至少1個單元在與處理農置間移載物品之期間，可在复 至少1個單元與搬送車之間交接卡g，因此較為有效。/又他 因=單元兼作卡H之緩衝器，因此可較為節省空間。， 最好，上述複數單元互相實體連結。如此—來 =复數單元個別移動，而係可-體移動，又移動機Γ: 控制亦較為單純。 再t 間移動機構移動複數單元之移動行程為單元 之間距t整數倍。如此—來，行程可較短，因此可在小空 =將複數早①移動至與處理|置間移載物 處、和與搬送車間移载卡£之適合位置處。 =好，上述移動行程係將複數單元數減去i個後而成 在上X且在與處縣置之間移載物品之位置則被配置 2述動路徑長之中央部。如此—來，可在最小空間使複 2= 處縣置間之移載位置、和與搬送車間之移 【實施方式】 、表7^以實^本發明之最佳實施例。本發明之範圍 099129436 5 201109255 根據申請專利範圍之記載，經參酌說明書之記載和該領域之 習知技術後可由所屬領域具通常知識者所限定。 [實施例] 圖1〜圖4係表示實施例之裝卸機2及其變化。圖1〜圖3 中，元件符號2為裝卸機，4、5為單元，實體上互相連結 成一體，並分別具備有升降機6和輥輸送機8。元件符號10 為輥輸送機8之輥軸，元件符號12為輥。輥輸送機8將作 為裝卸對象物品之基板例如每次各一片在與處理裝置20之 裝載口 22之間進行交接。因此，其在搬送方向，沿著水平 面内呈直角方向具備有複數個輥軸10。另外，各個輥軸10 具備有例如複數個之輥12,輥12係接觸移載至基板之底面。 元件符號14為裝卸機2之支柱，元件符號16為台車，其 在行走軌道18上行走。行走軌道18被配置為與搬送車例之 堆疊起重機30之行走軌道38相平行，搬送車除了堆疊起重 機30外亦可為有軌道台車或無人搬送車等。裝卸機2係在 例如潔淨室内使用，因此其由未圖示之蓋體予以覆蓋，最好 設置潔淨空氣之供給機構等，但其圖示被省略。 元件符號20為處理裝置，其為液晶顯示面板、電漿顯示 面板、太陽能面板等之處理裝置，從裝載口 22將基板例如 每次各一片地進行裝卸，元件符號24為其門。另外，搬送 對象之物品並不受限於基板，亦可為收容在卡匣内而進行搬 送之物品。 099129436 6 201109255 堆疊起重機30沿著行走軌道38行走。元件符號32為其 σ車元件付號34為升降台，沿著柱35升降，並具備有滑 動叉36，使卡£在與單元4、5之間進行移載。另外，在移 載時，亦可使用水平多關節機械臂（Selective c〇mpliance201109255 VI. Description of the Invention: [Technical Field] The present invention relates to a loader unloader and a load unloading method between a device and a transport vehicle. [Prior Art] Conventionally, a loader is disposed between a transport vehicle such as a stacking crane and an unmanned transport vehicle, and a processing device such as a liquid crystal panel, a plasma display panel, or a solar battery panel. In the loader, a damper for accommodating a plurality of slabs is provided on the side of the transport vehicle, and a unit for detaching and detaching the substrate from the cassette is provided between the damper and the processing device. However, a double space of the buffer and the unit is required at the time of loading and unloading. As shown in the related prior art below. Patent Document 1 (jP2〇〇M3〇708A) discloses a buffer for integrating an automatic warehouse and a processing apparatus so that the scaffolding of the automatic warehouse serves as a handling device. [Prior Art Document] [Patent Document] [Patent Document 1] JP20〇1-130708A [Disclosure] Problems to be Solved by the Invention An object of the present invention is to provide a loader and a loading and unloading method, which can save space and The loading and unloading between the processing devices is performed in parallel with the transfer of the cassette. 099129436 3 201109255 A supplementary subject of the present invention is a moving machine of a unit. The auxiliary subject of the present invention is easier to construct and control. κ 移动^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ The loading unit of the moving vehicle, the loading unit of the cassette, and the moving mechanism for transferring the contents of the cassette between the loading device and the loading device, so as to move the unit along the loading unit The axis of the dumping car_moving; the controller, controlling the above-mentioned moving mechanism, when the position of the article is transferred between the devices, 'make 1^ small in the position of transferring the card H between the transporting vehicle ^ In addition to the present invention, there is a method for unloading and unloading the same from the handling device, and the article is obtained by the κ needle 11 towel; There is: a plurality of units 'carrying along the moving path of the transport vehicle, and having a mounting portion for placing the card & and a SIT carrying device between the processing device and the processing device; Axle flow; and control (four), (d) moving mechanism and transfer 099129436 4 201109255, and use The control mechanism controls the moving mechanism and the transfer device to transfer the other one unit to the transfer vehicle when the item is transferred between the at least one unit and the processing device. Location. In this manual, the description of the shovel can be directly applied to the agricultural truck method. The description of the loading and unloading method can also be directly applied to the I unloading machine. In the present invention, it is effective to transfer the card g between at least one of the units and the transport vehicle while at least one of the units is transferring the articles between the processing and the farm. / Again, because the = unit doubles as a buffer for the card H, it saves space. Preferably, the plurality of units are physically linked to each other. So - come = the complex unit moves individually, but the system can move - and move the machine: the control is relatively simple. Then, the moving motion of the moving unit moving the complex unit is an integer multiple of the distance between the units. In this way, the stroke can be shorter, so it can be moved in the small space = the first one is moved to the position where the processing is placed at the transfer, and at the appropriate position with the transfer shop. = It is good that the above-mentioned moving stroke is obtained by subtracting i of the number of plural units and forming the position where the article is transferred between the upper and the lower positions, and is disposed at the center of the moving path. In this way, the transfer position of the complex 2= location and the transfer to the transfer shop can be performed in a minimum space. [Embodiment] Table 7 is a preferred embodiment of the present invention. Scope of the Invention 099129436 5 201109255 Depending on the scope of the patent application, the description of the specification and the prior art in the field can be defined by those skilled in the art. [Embodiment] Figs. 1 to 4 show a loader 2 of an embodiment and a variation thereof. In Figs. 1 to 3, the reference numeral 2 is a loader, and the units 4 and 5 are units integrally connected to each other integrally, and are provided with an elevator 6 and a roller conveyor 8, respectively. The symbol 10 is the roller shaft of the roller conveyor 8, and the reference numeral 12 is a roller. The roller conveyor 8 transfers the substrate as the object to be loaded and unloaded, for example, one at a time between the loading port 22 and the loading port 22 of the processing apparatus 20. Therefore, in the conveying direction, a plurality of roller shafts 10 are provided at right angles in the horizontal plane. Further, each of the roller shafts 10 is provided with, for example, a plurality of rollers 12 which are brought into contact with the bottom surface of the substrate. The component symbol 14 is the pillar of the loader 2, and the component symbol 16 is a trolley that travels on the traveling rail 18. The traveling rail 18 is disposed in parallel with the traveling rail 38 of the stacking crane 30 of the transporting vehicle. The transporting vehicle may be a railroad car or an unmanned transporting vehicle in addition to the stacking crane 30. Since the loader 2 is used in, for example, a clean room, it is covered by a cover (not shown), and it is preferable to provide a supply mechanism of clean air or the like, but the illustration thereof is omitted. The component symbol 20 is a processing device which is a processing device such as a liquid crystal display panel, a plasma display panel, or a solar panel. The substrate is detached from the load port 22, for example, one at a time, and the component symbol 24 is a door. Further, the article to be transported is not limited to the substrate, and may be an article that is carried in the cassette and transported. 099129436 6 201109255 The stacking crane 30 travels along the walking track 38. The component symbol 32 is a gradual movement of the yoke component 34, which is raised and lowered along the column 35, and is provided with a slide fork 36 for transferring the card between the units 4 and 5. In addition, horizontal multi-joint manipulators (Selective c〇mpliance) can also be used during transfer.
Assembly Robot Arm)等來代替滑動叉36，除此之外亦可設 置變化卡匣方向之轉台等。 如圖2所示，例如在一對單元_4、5巾，係利用升降機6 來左右支持卡匣42之底部，並沿著支柱14使其進行升降。 並將該升降行程設為h。另外，輥輸送機8例如被設在台4〇 上’台40之高度為升降行程h之程度。利用升降機 6之升 降’可使機送機8進入骨架狀之卡E 42内部，利用親12 將基板44每次各-片在與裝載σ之間進行移載。然後，當 -對單元4、5之-者係位在與㈣口間之移載位置時，則 其他單元位在與堆疊起重機間移載卡匣42之位置，滑動叉 36進入台4〇上部之空出空間，對卡匿42進行移載。另外， .代替輥輸送機8之移載裝置’亦可使崎動叉或水平多 關節機械臂等，當單元4、5間之間距為ρ時，裝卸機2之 全長為大約2Ρ’裝卸機2之移動行程則為Ρ。另外，單元4、 5係沿著堆疊起重機之行走路徑而配置。 ，一係表不#卸機之控制器5G，升降驅動器Η係例如控 制單兀4之升卩_機6之馬達⑷，升降驅動器53則控制單 元5之升降機之馬達M2。輸送機驅動器52例如控制單元4 099129436 201109255 之輥輸送機之驅動馬達M3，輸送機驅動器54控制單元5 之輥輸送機之驅動馬達。行走驅動器55控制台車16之行走。 通信介面56與裝載口之間進行通信，在移載基板時進行 互鎖。通信介面57與堆疊起重機之間進行通信，在移載卡 匣時進行互鎖。通信單元58與未圖示之上位控制器間進行 通信，收信各種指令，報告實行結果。 以下，說明實施例之動作。例如圖1所示，單元4在與裝 載口 22之間，利用輥輸送機8每次移載各一片之基板。與 此同時，堆疊起重機30在滑動叉36與單元5相對向之位置 處保持停止，並移載卡匣。結果，於一者單元在與裝載口 22間移載基板之期間，可將下個卡匣載置在其他單元，或 將經移載基板後之卡匣從其他單元搬出至堆疊起重機。 當單元4、5間之間距為P時，實施例中係對2個單元4、 5，使裝卸機2之移動行程以1個間距P移動一1間距之單 元數。然後，在移動行程之中央部具有裝載口 22。因此， 可使單元4、5以最小空間移動，又各單元4、5可一起移動 到與裝載口 22間之基板交接位置處。另外，堆疊起重機30 對於裝卸機2之停止位置係等於單元4、5之數，在圖1之 情況時，右側之空出空間為與單元4間移載卡匣之位置。 裝卸機2係使載置卡匣之緩衝器（升降機6)與輥輸送機 8(移載裝置）形成一體者，因此可較節省空間。一對單元4、 5係互相實體連結，並利用台車16而可一體移動，因此可 099129436 8 201109255 以例如單一行走馬達M5和單一行走驅動器5 5來移動。 實施例中係連結2個單元4、5而成為1個裝卸機2，但 亦可連結更多個單元。此種變化例以圖4來表示，元件符號 60為新裝卸機，其具備有4個單元4、5、61、62，行走行 程之長度對4個單元為3單元間距，且在行走路徑之中央部 具有處理裝置20。 以上，已說明本發明之一實施形態，但本發明並不受限於 上述實施形態，在不脫離本發明主旨之範圍内可有各種變 更。尤其，本說明書中所記載之複數實施形態及變化例可視 需要而任意組合。 【圖式簡單說明】 圖1係表示實施例之裝卸機和周圍處理裝置及堆疊起重 機之部分局部俯視圖。 圖2係實施例之裝卸機之側視圖。 圖3係表示實施例裝卸機之控制系統之方塊圖。 圖4係變化例裝卸機之俯視圖。 【主要元件符號說明】 2 裝卸機 4、5 XJO — 早兀 6 升降機 8 輥輸送機 10 親轴 099129436 9 201109255 12 輥 14 支柱 16 台車 18 行走軌道 20 處理裝置 22 裝載口 24 門 30 堆疊起重機 32 台車 34 升降台 35 柱 36 滑動叉 38 行走執道 40 台 42 卡匣 44 基板 50 控制器 51-55 驅動器 56、57 通信介面 58 通信單元 60 裝卸機 61 ' 62 — 早兀 099129436 10 201109255 M1-M5Instead of the slide fork 36, the Assembly Robot Arm) or the like can be provided with a turntable that changes the direction of the jam. As shown in Fig. 2, for example, in a pair of units _4, 5, the bottom of the cassette 42 is supported by the elevator 6 to the left and right, and is raised and lowered along the column 14. And set the lifting stroke to h. Further, the roller conveyor 8 is provided, for example, on the table 4', and the height of the table 40 is such that the height of the table 40 is the lifting stroke h. The lifter 8 of the elevator 6 allows the machine 8 to enter the interior of the skeleton card E 42 and utilizes the parent 12 to transfer the substrate 44 between each time and the load σ. Then, when the pair of units 4, 5 are in the transfer position with the (four) port, the other unit positions are moved between the stacking crane and the stacking crane, and the sliding fork 36 enters the upper portion of the table 4 The space is vacated and the card 42 is transferred. In addition, instead of the transfer device 8 of the roller conveyor 8, a satin fork or a horizontal multi-joint robot can be used. When the distance between the units 4 and 5 is ρ, the total length of the loader 2 is about 2 Ρ' loader. The movement of 2 is Ρ. In addition, the units 4, 5 are arranged along the travel path of the stacking crane. For example, the controller 5G of the unloading machine, the lift driver, for example, controls the motor (4) of the lifter_machine 6 of the single turn 4, and the lift drive 53 controls the motor M2 of the lift of the unit 5. The conveyor drive 52 is, for example, the drive motor M3 of the roller conveyor of the control unit 4 099129436 201109255, and the conveyor drive 54 controls the drive motor of the roller conveyor of the unit 5. The travel drive 55 controls the walking of the vehicle 16. The communication interface 56 communicates with the load port and interlocks when the substrate is transferred. The communication interface 57 communicates with the stacking crane and interlocks when the cassette is transferred. The communication unit 58 communicates with an upper controller (not shown), receives various commands, and reports the execution result. Hereinafter, the operation of the embodiment will be described. For example, as shown in Fig. 1, the unit 4 is transferred between the loading port 22 and the substrate 8 by the roller conveyor 8 each time. At the same time, the stacking crane 30 is kept stopped at a position where the slide fork 36 and the unit 5 are opposed to each other, and the cassette is transferred. As a result, during the transfer of the substrate between the unit and the load port 22, the next cassette can be placed on the other unit, or the cassette after the transfer of the substrate can be carried out from the other unit to the stacking crane. When the distance between the units 4, 5 is P, in the embodiment, the two units 4, 5 are used to move the movement stroke of the loader 2 by one pitch P by one unit of the pitch. Then, the load port 22 is provided at the center of the moving stroke. Therefore, the units 4, 5 can be moved with a minimum space, and the units 4, 5 can be moved together to the substrate transfer position between the load ports 22. Further, the stop position of the stacking crane 30 with respect to the loader 2 is equal to the number of the units 4, 5. In the case of Fig. 1, the free space on the right side is the position where the cassette is transferred between the units 4. The loader 2 is such that the damper (elevator 6) on which the cassette is placed is integrated with the roller conveyor 8 (transfer unit), so that space can be saved. The pair of units 4, 5 are physically coupled to each other and can be integrally moved by the carriage 16, so that it can be moved by, for example, a single traveling motor M5 and a single traveling drive 55, 099129436 8 201109255. In the embodiment, two units 4 and 5 are connected to each other to form one loader 2, but a plurality of units may be connected. Such a variation is shown in Fig. 4. The component symbol 60 is a new loader having four units 4, 5, 61, 62. The length of the travel stroke is 3 unit pitches for 4 units, and is in the walking path. The central portion has a processing device 20. The embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit and scope of the invention. In particular, the plural embodiments and variations described in the present specification may be arbitrarily combined as needed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial partial plan view showing the loader and the surrounding processing apparatus and the stacking crane of the embodiment. Figure 2 is a side elevational view of the loader of the embodiment. Figure 3 is a block diagram showing the control system of the embodiment loader. Figure 4 is a plan view of a variant loader. [Description of main components] 2 Loader 4, 5 XJO — early 6 lift 8 roller conveyor 10 shaft 099129436 9 201109255 12 roller 14 pillar 16 trolley 18 travel track 20 processing device 22 load port 24 door 30 stacking crane 32 trolley 34 Elevator 35 Column 36 Sliding fork 38 Walking way 40 Table 42 Cassette 44 Substrate 50 Controller 51-55 Driver 56, 57 Communication interface 58 Communication unit 60 Loader 61 ' 62 — Early 兀 099129436 10 201109255 M1-M5
P Η 馬達 間距 升降行程 099129436P Η Motor Spacing Lifting stroke 099129436