JP2005145713A - Conveying device of substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conveying device of a substrate which does not generate time loss in delivery of the substrate and can improve production efficiency, when substrate conveyance to a manufacturing device or the like is performed every one substrate. <P>SOLUTION: The conveying device of the substrate performs delivery of the substrates W every one substrate to a manufacturing device 5. A cassette 3A capable of storing the substrates W is mounted to a lifting device 34, the cassette 3A is lifted so as to substantially match the transfer surface of a substrate transferring mechanism 4 disposed between the lifting device 34 and the manufacturing device 5 or the like with a substrate storing position of the cassette 3A, and the substrates W are transferred at substantially the same level between the cassette 3A and the manufacturing device 5 or the like. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a liquid crystal substrate or a semiconductor wafer (hereinafter referred to as a “manufacturing apparatus”) or a liquid crystal or semiconductor manufacturing apparatus or inspection apparatus (hereinafter referred to as “manufacturing apparatus”) installed in a clean room in a liquid crystal or semiconductor manufacturing factory. The present invention relates to a substrate transfer apparatus for transferring a substrate), and more particularly to a substrate transfer apparatus for transferring a substrate in units of one unit with a manufacturing apparatus or the like.

  Conventionally, a substrate is stored in a dedicated substrate storage cassette and is transported to and temporarily stored in a manufacturing apparatus or the like (see Patent Document 1).

  By the way, the method of carrying a substrate with a manufacturing apparatus or the like by storing it in a dedicated substrate storage cassette has an advantage that a large number of substrates can be efficiently carried when the substrate is small. On the other hand, in recent years, as the size of the substrate increases, the mechanism for transferring the substrate between the cassette and the manufacturing apparatus becomes complicated, and time loss or accidents are likely to occur. There was a problem.

  In order to cope with this problem, it has been attempted to transfer a substrate to / from a manufacturing apparatus or the like in units of one substrate in a facility for a large substrate (Patent Document 2). reference).

However, when transferring the substrate including between the manufacturing apparatus and the like in units of one substrate, it is possible to transfer the substrate to any position within the movable range of the hand. There was a problem that a time loss occurred during the delivery of the substrate using the mechanism, and the production efficiency was lowered.
JP-A-11-334810 JP 2003-243482 A

  In view of the problems of the conventional substrate transfer device, the present invention is time-consuming at the time of substrate transfer when the substrate is transferred to and from the manufacturing apparatus or the like in units of one substrate. It is an object of the present invention to provide a substrate transfer apparatus that does not cause loss and can improve production efficiency.

  In order to achieve the above object, a substrate transfer apparatus according to the present invention moves up and down a cassette that can accommodate a substrate in a substrate transfer apparatus that transfers a substrate in units of one unit with a manufacturing apparatus or the like. By placing the cassette up and down, the cassette is moved up and down so that the transfer surface of the substrate transfer mechanism disposed between the lifting device and the manufacturing device etc. and the substrate storage position of the cassette substantially coincide with each other. And a manufacturing apparatus or the like, the substrate is transferred at substantially the same level.

  In this case, a partition wall can be provided between the cassette placed on the lifting device and the substrate transfer mechanism, and a slit portion through which the substrate can pass can be formed in the partition wall.

  Further, the internal pressure of the compartment provided with the manufacturing apparatus etc. and the substrate transfer mechanism partitioned by the partition wall is determined from the internal pressure of the compartment provided with the transfer / transfer machine and a cassette storage shelf that can accommodate a plurality of cassettes. Can be kept high.

  According to the substrate transfer apparatus of the present invention, in the substrate transfer apparatus that transfers the substrate in units of one unit with a manufacturing apparatus or the like, a cassette that can accommodate the substrate is placed on the lifting device. The cassette and the manufacturing apparatus, etc., by moving the cassette up and down so that the transfer surface of the substrate transfer mechanism disposed between the lifting apparatus and the manufacturing apparatus etc. and the substrate storage position of the cassette substantially coincide with each other. Since the substrate is transferred at substantially the same level between the two, there is no time loss when transferring the substrate to and from the manufacturing apparatus, and the production efficiency can be improved. Can be transferred with the deformation of the substrate suppressed even in the case of a large substrate, and the occurrence of accidents can be reduced. it can.

  In addition, a partition wall is provided between the cassette placed on the lifting device and the conveyor mechanism, and a slit portion through which the substrate can pass is formed on the partition wall, so that a manufacturing device that requires a high degree of cleanliness, etc. Can be isolated from a transfer and transfer machine that generates a lot of dust.

  In addition, the internal pressure of the compartment provided with the manufacturing apparatus and the substrate transfer mechanism partitioned by the partition wall is higher than the internal pressure of the compartment provided with the transfer / transfer machine and the cassette storage shelf that can accommodate a plurality of cassettes. By maintaining it, it is possible to maintain a high degree of cleanness in the compartment where the manufacturing apparatus and the conveyor mechanism partitioned by the partition wall are disposed.

  In addition, the lifting device and the substrate transfer mechanism are installed corresponding to the manufacturing device and the like, and the transfer of the cassette between the lifting device and a cassette storage shelf capable of storing a plurality of cassettes is performed by the transfer device. By carrying out the above, it is possible to efficiently carry a large number of substrates.

  Embodiments of a substrate transfer apparatus according to the present invention will be described below with reference to the drawings.

1 to 10 show an embodiment of a liquid crystal manufacturing facility to which the substrate transfer apparatus of the present invention is applied.
This liquid crystal manufacturing facility is intended for a large substrate W, and the substrate W is transferred to and from the manufacturing apparatus 5 or the like in units of one substrate.

  The substrate transfer apparatus applied to this liquid crystal manufacturing facility is capable of transferring and transferring the cassette 3 that can accommodate a plurality of substrates W to any position within at least the movable range of the hand 11. The transfer machine 1 (in this embodiment, the transfer / transfer machine 1 transfers and transfers the cassette 3 between the lifting device 34 and a cassette storage shelf (stocker) S capable of storing a plurality of cassettes 3. However, it is also possible to transport and transfer the substrate W in units of one substrate by the transport / transfer machine 1), and move up and down the cassette 3 </ b> A that can accommodate the substrate W. The transfer surface of the conveyor mechanism 4 as a substrate transfer mechanism placed between the lifting device 34 and the manufacturing device 5 is placed on the device 34 so that the substrate storage position of the cassette 3A substantially coincides. By moving the cassette 3A up and down, 3A to be adapted to transfer the substrate W at substantially the same level (substantially the same height) between the manufacturing apparatus 5.

In this case, a partition wall 7 is disposed between the cassette 3A configured to be moved up and down by being placed on the lifting device 34 and the conveyor mechanism 4, and a slit portion 71 through which the substrate W can pass through the partition wall 7. To form.
Thereby, the manufacturing apparatus 5 etc. in which a high cleanliness degree is required can be isolated from the conveyance transfer machine 1 etc. with much dust generation.
Note that a shutter (not shown) can be provided in the slit portion 71 formed in the partition wall 7, but the shutter is formed by forming the slit portion 71 in a small dimension that allows the substrate W to pass through. The partition R1 in which the manufacturing apparatus 5 and the like partitioned by the partition wall 7 is disposed without being disposed can be maintained at a high degree of cleanliness.

Further, the internal pressure of the section R1 in which the manufacturing apparatus 5 and the conveyor mechanism 4 partitioned by the partition wall 7 are disposed is transferred by, for example, a downflow from the air cleaning mechanism 6 disposed above the conveyor mechanism 4. The pressure is maintained higher than the internal pressure of the section R2 in which the loading mechanism 1 and the cassette storage shelf S are disposed.
Thereby, the inside of division R1 in which the manufacturing apparatus 5 etc. and the conveyor mechanism 4 which were divided by the division wall 7 were arrange | positioned can be maintained at a high cleanliness.

Further, in the present embodiment, a stacker crane is used as the transfer / transfer machine 1, and a rail 2 on which the stacker crane moves is laid across a plurality of manufacturing apparatuses 5, etc. The cassette 3 </ b> A can be transported / transferred to a lifting / lowering device 34 that can be lifted / lowered corresponding to 5.
As described above, the cassettes 3 are transported between the lifting devices 34 arranged corresponding to the respective manufacturing devices 5, and between the lifting devices 34 and the cassette storage shelves S that can store a plurality of cassettes 3. By doing so, a large number of substrates W can be transported efficiently.

Here, a specific example of the transport mechanism of the substrate W accommodated in the cassette 3A including the lifting device 34 disposed corresponding to the manufacturing apparatus 5 used in the liquid crystal manufacturing facility will be described below.
As shown in FIG. 3 and the subsequent drawings, the cassette 3A has a plurality of parallel supporting members 32 extending from the substrate storage portion 31 of the cassette 3A, and a plurality of substrates W are provided by arranging the supporting members 32 vertically in a plurality of stages. (Other cassettes 3 are also the same).
By the way, in this example, the support member 32 of the substrate storage part 31 is extended from the both sides of the substrate storage part 31 in the opposing direction, respectively. Is not limited to this. For example, the support member 32 can be bridged on both sides of the substrate storage unit 31.
The transport mechanism for the substrate W includes a lifting / lowering device 34 for placing the cassette 3 </ b> A, and a substrate W inserted between the support members 32 by the lifting / lowering of the cassette 3 </ b> A, that is, the substrate storage unit 31, and supported by the support member 32. And a feeding mechanism 36 that feeds the received substrate W to the outside of the substrate storage portion 31.

  The substrate storage unit 31 is open at the front and rear, and a plurality of support members 32 arranged in parallel in opposite directions from both sides are extended, and a plurality of substrates W are arranged in a predetermined manner by installing these support members 32 in a plurality of stages up and down. It is designed to be stored at an interval.

The elevating device 34 includes, for example, a plurality of cylinders that support the lower four positions of the substrate storage unit 31 of the cassette 3A, and can elevate and lower the substrate storage unit 31 at least within the height range. .
The lifting device 34 is fixed to a base 37 that is movably provided by a carriage.

The transport support member 35 is composed of a plurality of rod-like members inserted between the support members 32 by raising and lowering the substrate storage portion 31 of the cassette 3A, and is supported by the support member 32 via a feed mechanism 36 provided at the tip. The substrate W is received.
The transport support members 35 have a plurality of transport support members 35 fixed to the base 37 in a predetermined arrangement so that the substrate W can be supported substantially uniformly in the width direction and the length direction.

In this example, the feed mechanism 36 includes a driving roller provided at the tip of the transport support member 35, and is provided on the transport support member 35 so that the substrate W can be supported substantially equally in the width direction and the length direction. It has been.
The feed mechanism 36 rotates the drive roller with a motor (not shown),
The received substrate W can be transported and sent out forward or backward of the substrate storage unit 31.
The substrates W stored in the substrate storage unit 31 are sequentially taken out from the lower one by the transport support member 35 and the feed mechanism 36.

  The transport support member 35 and the feed mechanism 36 transport the substrate W in the forward or backward direction of the substrate storage unit 31 and send it out to the outside, and perform a reverse operation to that at the time of delivery, thereby feeding the substrate from the outside. It can be configured such that W is received in the substrate storage portion 31 and transferred to and supported by the support member 32.

  On the other hand, the transport mechanism for the substrate W in this example is provided so as to be movable up and down between the feeding mechanisms 36, and an air floating mechanism 38 that supports the substrate W while floating the air above the receiving position of the feeding mechanism 36; A positioning mechanism 39 for correcting the position of the substrate W levitated and supported by the air levitating mechanism 38 is provided.

The air levitation mechanism 38 is provided between the feeding mechanisms 36 so as to be lifted and lowered by a driving device (not shown), and supports the substrate W so that the substrate W can be moved horizontally while floating on the air above the receiving position of the feeding mechanism 36. Can do.
Then, after correcting the position of the substrate W by the positioning mechanism 39, the air levitation mechanism 38 directly supports the substrate W by stopping the air ejection, and further descends so that the substrate W is accurately positioned. Can be delivered to the feed mechanism 36.

The positioning mechanism 39 includes, for example, push rods provided on the left and right sides of the substrate storage portion 31 so as to be movable in the horizontal direction, and pushes the substrate W from both the left and right sides when the substrate W is levitated by the air levitation mechanism 38. Thus, the position can be corrected appropriately.
Note that a spring member is disposed at the tip of one of the push rods so that damage to the substrate W can be prevented.

In the substrate transfer direction of the cassette 3A, that is, the direction in which the substrate W is sent out or received by reversing the sent substrate W (the direction in which the manufacturing apparatus 5 is installed), the conveyor mechanism 4 as a substrate transfer mechanism. Is installed.
The conveyor mechanism 4 lifts the substrate W placed on the conveyor mechanism 4 by the feed roller 41 that supports the substrate W at substantially the same level (substantially the same height) as the feed mechanism 36, For example, a hand 42 is provided to be transferred to the substrate table 51 of the manufacturing apparatus 5 or the like.
In the present embodiment, one hand 42 is provided. However, the present invention is not limited to this. For example, the hand 42 superimposed on a plurality of upper and lower stages may be provided.
The feed roller 41 introduces the substrate W fed out by the feed mechanism 36 onto the conveyor mechanism 4 by being rotationally driven.
Further, the hand 42 is provided in the gap between the feed rollers 41, and as shown in FIGS. 10B to 10G, the hand 42 can be moved up and down and moved back and forth by the lift motor 42a and the forward / backward motor 42b. Many vacuum suction mechanisms 43 for adsorbing W are provided.

Next, the operation of the cassette 3A will be described with reference to FIGS.
In FIG. 3A, a substrate W is supported by a support member 32 in the substrate storage portion 31, and a plurality of substrates W are stored vertically.
In this case, as shown in FIG. 3B, the lowest-order substrate W to be taken out is in a position shifted in the substrate storage portion 31.

  For this reason, as shown in FIG. 3B, the substrate storage unit 31 is lowered by the elevating device 34 to support the substrate W by the air levitation mechanism 38 and the air levitation mechanism 38 is operated to air levitate the substrate W. Let

Next, as shown in FIG. 4C, the positioning mechanism 39 is operated to center the substrate W floating in the air.
Then, as shown in FIG. 4D, the air ejection of the air levitation mechanism 38 is stopped, and the substrate W is placed on the air levitation mechanism 38.

  Further, as shown in FIG. 5 (e), the positioning mechanism 39 is retracted and the air floating mechanism 38 is lowered as shown in FIG. Place on top.

Next, as shown in FIG. 6G, the drive roller is driven to move the substrate W onto the conveyor mechanism 4 provided with the cassette 3A and the partition wall 7 therebetween.
As shown in FIG. 6H, when the hand 42 of the conveyor mechanism 4 rises, the substrate W is separated from the conveyor mechanism 4 and placed on the hand 42.

Then, as shown in FIG. 7 (i), the hand 42 moves forward to move the substrate W above the substrate table 51 of the manufacturing apparatus 5 or the like.
Next, as shown in FIG. 7 (j), the hand 42 is lowered and the substrate W is placed on the support bar 52 of the substrate table 51 of the cassette 3A.

As shown in FIGS. 8K and 8L, the hand 42 moves backward, and on the substrate mounting table 51 side, as shown in FIG. It is put on.
Then, as shown in FIG. 9 (m), the substrate table 51 moves into the manufacturing apparatus 5 or the like.

According to this substrate transfer apparatus, no time loss occurs when the substrate W is transferred to and from the manufacturing apparatus 5 or the like, and the production efficiency can be improved.
In addition, the overall height of the cassette 3A can be reduced, and the height of the section R1 in which the manufacturing apparatus 5 and the like are disposed can be reduced, thereby reducing the construction cost of the equipment.

  As mentioned above, although the Example was demonstrated about the board | substrate conveyance apparatus of this invention, the structure of the board | substrate conveyance apparatus of this invention is not limited to description of this Example, In the range which does not deviate from the meaning. It is possible to change appropriately.

  The substrate transfer apparatus of the present invention improves the production efficiency without causing a time loss when transferring the substrate when the substrate is transferred to and from the manufacturing apparatus in units of one substrate. Therefore, it can be suitably used for semiconductor manufacturing equipment as well as liquid crystal manufacturing equipment.

It is a top view which shows one Example of the conveying apparatus of the board | substrate of this invention. It is the same front sectional view. The same operation | movement is shown, (a) is front sectional drawing of a 1st step, (b) is front sectional drawing of a 2nd step. (C) is a front sectional view of the third stage, and (d) is a front sectional view of the fourth stage. The same operation is shown, (e) is a front sectional view of the fifth stage, and (f) is a front sectional view of the sixth stage. The same operation | movement is shown, (g) is a side view of a 7th step, (h) is a side view of an 8th step. The same operation is shown, (i) is a side view of the ninth stage, and (j) is a side view of the tenth stage. The same operation is shown, (k) is a side view of the eleventh stage, and (l) is a side view of the twelfth stage. The same operation is shown, and (m) is a side view of the thirteenth stage. A conveyor mechanism is shown, (a) is the top view, (b)-(g) is a side view which shows operation | movement.

Explanation of symbols

1 Conveyance transfer machine (stacker crane)
DESCRIPTION OF SYMBOLS 11 Hand 2 Rail 3 Cassette 3A Cassette 31 Substrate storage part 32 Support member 34 Elevating device 35 Transfer support member 36 Feed mechanism 37 Base 38 Air floating mechanism 39 Positioning mechanism 4 Substrate transfer machine (conveyor mechanism)
41 Feed roller 42 Hand 43 Vacuum suction mechanism 5 Manufacturing apparatus etc. 51 Substrate table 52 Support bar 6 Air cleaning mechanism 7 Partition wall 71 Slit section R1 Section R2 Section S Cassette storage shelf W Substrate

Claims (4)

  In a substrate transfer apparatus that transfers substrates in units of one sheet with a manufacturing apparatus, etc., a cassette that can accommodate a substrate is placed on the lifting apparatus, and the substrate is placed between the lifting apparatus and the manufacturing apparatus. By moving the cassette up and down so that the transfer surface of the arranged substrate transfer mechanism and the substrate storage position of the cassette substantially coincide with each other, the substrate is transferred at substantially the same level between the cassette and the manufacturing apparatus. A substrate transfer apparatus characterized by comprising:   2. The substrate according to claim 1, wherein a partition wall is disposed between the cassette placed on the lifting device and the substrate transfer mechanism, and a slit portion through which the substrate can pass is formed in the partition wall. Conveying device.   Maintaining the internal pressure of the compartment provided with the manufacturing apparatus and the substrate transfer mechanism partitioned by the partition wall higher than the internal pressure of the compartment provided with the transfer / transfer machine and a cassette storage shelf capable of accommodating a plurality of cassettes. The substrate transfer apparatus according to claim 2, wherein:   The lifting device and the substrate transfer mechanism are installed in correspondence with the manufacturing device and the like, and the transfer of the cassette is carried between the lifting device and a cassette storage shelf capable of storing a plurality of cassettes. 4. The substrate transfer apparatus according to claim 1, wherein the substrate transfer apparatus is configured as described above.

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