JPWO2008129603A1 - Substrate transfer system - Google Patents

Abstract

A moving unit (10) that reciprocates on a predetermined trajectory (R) is provided, and among a plurality of devices arranged along the trajectory (R), an unloading destination from an apparatus (210) that is a substrate unloading source In the substrate transport system (100) for transporting the substrate to the device (220), each device (211, 212, 213) that is a substrate carry-out source is arranged from the device (210) that is a substrate carry-out source. A mounting table 20 on which the substrate to be unloaded is mounted; and a lifting unit (30) that is provided on the moving unit (10) and moves up and down the substrate mounted on the mounting table (20). 20) shows a placement unit 21 on which a substrate to be unloaded from a device (210) that is a substrate unloading source is placed, and a placement unit (21) on a trajectory (R) on a moving unit (10). Support that supports above) The mounting unit (21) has a passage space (S) through which the elevating unit (30) passes when the moving unit 10 moves and the elevating unit (30) moves up and down. Features.

Description

  The present invention relates to a technique for transporting a substrate.

  In an FPD (flat panel display) production line such as a liquid crystal display or a plasma display, it is necessary to transport the substrate between cassettes that accommodate the substrate in multiple stages and processing apparatuses that perform various processes.

  In Patent Document 1, a mounting table for mounting a substrate unloaded from a cassette and an arm for loading the substrate mounted on the mounting table into a processing apparatus are integrated. A technique is disclosed in which a mounting table moves on a traveling rail so that a substrate can be conveyed.

Patent Document 2 discloses a technique in which a conveyor on which a substrate unloaded from a cassette is placed moves between a plurality of cassettes and processing devices along a traveling rail.
JP 2005-64432 A Japanese Patent Laid-Open No. 2004-284772 JP 2004-292094 A

  However, in the techniques disclosed in Patent Documents 1 and 2, the mounting table (for example, a conveyor) for mounting the substrate unloaded from the cassette itself moves to the front surface of the processing apparatus or the like to be the next process and moves the substrate. In order to deliver, it takes time for the mounting table to return to the front of the cassette. That is, during that period, the substrate cannot be carried out from the processing apparatus or the like to the mounting table, which may be a factor that hinders improvement in cycle time.

  Accordingly, an object of the present invention is to improve the efficiency of transporting a substrate from a device that is a substrate carry-out source to a device that is a substrate carry-out destination.

  In order to solve the above-described problems, in the present invention, a moving unit that reciprocates on a predetermined track is provided, and among a plurality of devices arranged along the track, the substrate is transferred from a device that is a transfer source. In the substrate transport system for transporting a substrate to the device to be, a placement table on which each substrate serving as a substrate unloading source is disposed and a substrate unloaded from the device serving as a substrate unloading source is placed; An elevating unit that elevates and lowers the substrate placed on the mounting table. The mounting table is a mounting on which a substrate to be unloaded from the apparatus serving as a substrate unloading source is placed. A mounting unit, and a support member that supports the mounting unit on the track and above the moving unit. The mounting unit moves the moving unit and moves the lifting unit. During lifting, the substrate transfer system characterized by having a passage space for the elevating unit passes is provided.

  According to this configuration, the mounting unit has a passing space through which the lifting unit passes when the moving unit moves and the lifting unit moves up and down, so that the mounting unit moves and moves up and down through the mounting table. Can do. That is, the substrate can be unloaded onto the mounting unit even while the moving unit is moving from the device serving as the substrate unloading source to the device serving as the substrate unloading destination. Thereby, the board | substrate carrying efficiency from the said apparatus used as the board | substrate carrying-out origin to the said apparatus used as the board | substrate carrying-out destination can be improved.

1 is an overall perspective view of a substrate transfer system 100 according to a first embodiment of the present invention. It is a top view of the mounting base 20 which concerns on 1st Embodiment. It is a top view of the raising / lowering unit 30 which concerns on 1st Embodiment. It is the figure which piled up Drawing 2A and Drawing 2B. It is a side view of transfer equipment 50 from direction a shown in Drawing 2B. FIG. 5 is a diagram illustrating an operation procedure of the substrate transfer system 100. FIG. 5 is a diagram illustrating an operation procedure of the substrate transfer system 100. FIG. 5 is a diagram illustrating an operation procedure of the substrate transfer system 100. FIG. 5 is a diagram illustrating an operation procedure of the substrate transfer system 100. FIG. 5 is a diagram illustrating an operation procedure of the substrate transfer system 100. It is a figure which shows the operation | movement procedure of the adsorption | suction unit 21b. It is a figure which shows the operation | movement procedure of the adsorption | suction unit 21b. It is a figure which shows the operation | movement procedure of the adsorption | suction unit 21b. It is a figure which shows the operation | movement procedure of the adsorption | suction unit 21b. It is a figure which shows the operation | movement procedure of the adsorption | suction unit 21b. It is a figure which shows the operation | movement procedure of the adsorption | suction unit 21b. It is a top view of the mounting unit 21 which concerns on the modification 1 of 1st Embodiment. It is a whole perspective view of the board | substrate conveyance system 300 which concerns on 2nd Embodiment. FIG. 6 is an exploded perspective view of a substrate housing device 410. It is a figure which shows the operation | movement procedure of the board | substrate carrying-out process of the board | substrate accommodating apparatus. It is a figure which shows the operation | movement procedure of the board | substrate carrying-out process of the board | substrate accommodating apparatus.

<First Embodiment>
FIG. 1 is an overall perspective view of a substrate transfer system 100 according to the first embodiment of the present invention. The substrate transport system 100 includes a moving unit 10 that reciprocates on a predetermined track R, and out of a plurality of substrate processing devices 200 arranged along the track R, from a substrate processing device 210 that is a substrate carry-out source. In this system, the substrate is transferred to the substrate processing apparatus 220 serving as a carry-out destination.

  The substrate processing apparatus 210 is provided with three substrate processing apparatuses 211, 212, and 213 adjacent to each other along the track R. The substrate processing apparatus 220 is provided with three substrate processing apparatuses 221, 222, and 223 adjacent to each other at positions facing the substrate processing apparatuses 211, 212, and 213 along the track R.

  In addition, the substrate transport system 100 includes a transfer device 50 having the moving unit 10 and the lifting unit 30, and a mounting table 20 disposed in front of the substrate processing apparatuses 211, 212, and 213. The moving unit 10 has a drive source 11 such as a motor and travels on the track R. The mounting table 20 includes a mounting unit 21 on which a substrate unloaded from the substrate processing apparatus 210 is mounted, and a support member 22 that supports the mounting unit 21 on the track R and above the moving unit 10. And comprising.

  The elevating unit 30 is fixed to the moving unit 10 and elevates and lowers the substrate placed on the placing table 20, and is composed of, for example, an air type or gas type cylinder. The elevating unit 30 includes a placement unit 31 that extends in a direction orthogonal to the track R and on which the substrate is placed, and a support column 32 that is erected on the moving unit 10 and supports the placement unit 31. .

  2A is a top view of the mounting table 20 according to the first embodiment, FIG. 2B is a top view of the elevating unit 30 according to the first embodiment, and FIG. 2C is a view obtained by superimposing FIGS. 2A and 2B. FIG. 3 is a side view of the transfer device 50 from the direction a shown in FIG. 2B.

  As shown in FIG. 2A, the mounting unit 21 of the mounting table 20 sucks and holds the plurality of roller units 21a including a plurality of rollers 21a ′ on which the substrate W is mounted, and the mounting unit 21. And a suction unit 21b that moves to a predetermined position on 21. The roller 21 a ′ is a driven roller that rotates according to the movement of the substrate W when it is transported in a direction perpendicular to the track R.

  The adsorption unit 21b includes an adsorption unit 21c that adsorbs the substrate W in a vacuum state, an elevating mechanism (not shown) that moves the adsorption unit 21c up and down by an air or gas cylinder, and the adsorption unit 21c as a rail. And a moving mechanism (not shown) for moving in the horizontal direction. According to this configuration, the suction unit 21b can move the suction portion 21c in the vertical direction and the horizontal direction.

  Moreover, the mounting unit 21 has a passage space S formed between the roller units 21a. The passage space S includes a passage space S ′ extending in a direction orthogonal to the direction of the track R and a passage space S ″ extending in the same direction as the track R.

  2B and 3, the placement unit 31 of the elevating unit 30 includes a member 31a extending in the same direction as the track R, and a member 31b fixed to the member 31a and extending in a direction perpendicular to the track R. And a plurality of support pins 31c that are fixed to the upper part of the member 31b and directly support the substrate W, and a slip prevention pin 31d that is fixed to the member 31b and prevents the substrate W from shifting on the support pin 31c. .

  The misalignment prevention pin 31d includes a misalignment prevention pin 31d ′ that prevents misalignment in the direction orthogonal to the track R, and a misalignment prevention pin 31d ″ that prevents misalignment in the same direction as the track R. This embodiment. In this case, the slip prevention pin 31d 'extends up the member 31b to a position beyond the end portion of the substrate W at the regular placement position of the substrate W. The slip prevention pin 31d' stands upright on the upper surface of the member 31b. 31d ″ fixes the member 31e to the member 31a, extends the member 31e to a position beyond the end of the substrate W, and stands on the upper surface of the member 31e.

  As shown in FIG. 2C, the mounting portion 31 of the elevating unit 30 passes through the passing space S ′ formed in a direction orthogonal to the direction of the track R and is formed in the same direction as the direction of the track R. The column portion 32 of the lifting / lowering unit 30 passes through the passing space S ″. Thereby, the moving unit 10 moves and the lifting / lowering unit 30 moves up and down without interfering with the placement unit 21. Can work.

  4A to 4E are diagrams illustrating an operation procedure of the substrate transfer system 100. FIG. As shown in FIG. 4A, the elevating unit 30 has at least the support pins 31 c and the displacement prevention pins 31 d ′ of the mounting unit 21 until the substrate W is carried out to a predetermined position of the mounting unit 21 of the mounting table 20. Waiting at a position that does not protrude from the mounting surface. In the present embodiment, the placement surface of the placement unit 21 is a plane formed by connecting the highest positions of the plurality of rollers 21a 'of the roller unit 21a.

  When the substrate W is carried out to a predetermined position of the placement unit 21, the lifting unit 30 raises the placement unit 31 to a position higher than the placement surface of the placement unit 21, as shown in FIG. Supports the load of W. At this time, as described above, the placement unit 31 can pass through the placement table 20 by passing through the passage space S ′.

  After that, when the lifting of the elevating unit 30 is completed, the moving unit 10 moves along the track R as shown in FIG. 4C and completes the movement to the desired mounting table 20 as shown in FIG. 4D. At this time, as described above, the column portion 32 can pass through the mounting table 20 by passing through the passage space S ″.

  When the movement unit 10 completes the movement to the desired mounting table 20, the lifting unit 10 moves down until the mounting unit 31 is positioned lower than the mounting surface of the substrate W as shown in FIG. 4E. As a result, the substrate W can be delivered onto the placement unit 21.

  5A to 5F are diagrams illustrating an operation procedure of the suction unit 21b. Here, it is assumed that the suction unit adjacent to the substrate processing apparatus 210 is 21b, and the suction unit adjacent to the substrate processing apparatus 220 is 21b '. In addition, the rail on which the moving mechanism moves is the rail 2 provided on the suction unit 21b and the rail 2 ′ provided on the suction unit 21b ′, and the end thereof is from the side close to the substrate processing apparatus 210. 2a, 2b, 2a ′, and 2b ′.

  First, as shown in FIG. 5A, the suction unit 21 b raises the suction portion 21 b that has been waiting at the end 2 a of the rail 2, and sucks and holds the vicinity of the end of the substrate W that is close to the mounting table 20. Next, as illustrated in FIG. 5B, the suction unit 21 b horizontally moves the suction unit 21 c that sucks and holds the substrate W to the end 2 b of the rail 2. Thereafter, the suction unit 21b temporarily releases the suction holding of the substrate W, lowers the suction portion 21c downward, and moves backward by a predetermined distance (for example, 200 mm) in the direction of the end portion 21a. Thereafter, as shown in FIG. 5C, the suction portion 21c is raised again to hold the substrate W by suction.

  After the suction unit 21b moves the holding position of the substrate W, the front end portion of the substrate W further advances above the suction portion 21c 'waiting at the end 2a' of the rail 2 '. Therefore, as shown in FIG. 5D, the carrying-out process of the substrate W is stopped again, and the suction holding of the suction unit 21b is released. The adsorption unit 21b 'raises the adsorption unit 21c before the adsorption of the adsorption unit 21c is released, and adsorbs and holds the adsorption unit 21c' at the same time as the adsorption of the adsorption unit 21c is released. As a result, the substrate W is delivered from the suction unit 21b to the suction unit 21b '.

  When the suction unit 21b releases the holding of the substrate W, the suction unit 21c is moved to the end 2a of the rail 2 again. As shown in FIG. 5E, when the suction unit 21c ′ on which the substrate W is placed is moved to the end of the rail 2 ′, the suction unit 21b ′ releases the suction holding of the suction unit 21c ′, and the suction unit 21c. Is lowered. As a result, the substrate W is placed on the roller 21a '. Finally, the suction unit 21b moves again to the end 2a 'of the rail 2' in order to receive the next substrate W from the suction unit 21b.

  Thereafter, as shown in FIG. 5F, when the elevating unit 30 ascends from below the mounting table 20 and the support pins 31c protrude from the mounting surface of the roller 21a ′, the substrate W is supported by the support pins 31c. become. When the elevating unit 30 transports the substrate to the desired mounting table 20 along the track R by the moving unit 10 and returns to the original position again, the series of substrates W is unloaded as described above. The process is repeated.

  The suction unit 21b is fixed so that the mounting table 20 itself is not moved when the already processed substrate W is waiting in the substrate processing apparatus 210. It is also possible to set so that a new substrate W is carried out on the mounting table 20 even when the is moving.

  According to the structure which concerns on this embodiment, when the moving unit 10 moves on the track | orbit R, and when the mounting part 31 of the raising / lowering unit 30 raises / lowers, the raising / lowering unit 30 is the mounting unit 21 of the mounting base 20. Can pass through without interfering with. That is, the substrate W can be carried out onto the placement unit 21 even while the moving unit 10 is moving between the substrate processing apparatus 210 and the substrate processing apparatus 220. Thereby, the conveyance efficiency of the board | substrate W between the board | substrate W carried out from the substrate processing apparatus 210 used as the carrying-out origin of the board | substrate W to the board | substrate processing apparatus 220 used as the carrying-out destination of the board | substrate W can be improved.

  In this embodiment, the roller unit 21a does not have a drive source for rotating the roller 21a ′, and includes only a driven roller that moves according to the movement of the substrate W. Although the suction unit 21b for transporting to a predetermined position of the mounting table 30 is provided separately from the roller unit 21a, the roller unit 21a has a driving source, and the roller is rotated by the driving source to place the substrate W on the mounting table 20. It is good also as a structure conveyed to a predetermined position.

  According to this configuration, since the drive source is provided instead of the suction unit 21b, the configuration of the mounting unit 21 can be simplified. As a result, the cost can be reduced and the facility operation rate can be improved by reducing the failure.

  In the present embodiment, the suction unit 21b is carried out in a state in which the substrate W is sucked and held. However, the suction unit 21b is configured to carry out the substrate W while holding the load of the substrate W without sucking and holding the substrate W. It does not matter.

  In the present embodiment, a substrate processing apparatus 210 serving as a substrate carry-out source is disposed on one side of the track R, and a substrate processing apparatus 220 serving as a substrate unloading destination is disposed on the other side of the track R. However, the present invention can also be applied to a system in which a substrate processing apparatus serving as a substrate carry-out source and a carry-out destination is disposed only on one side of the track R. In this case, for example, the substrate processing apparatus serving as the substrate unloading source and the substrate processing apparatus serving as the substrate unloading destination are disposed along the track R and adjacent to only one side, and processing by the substrate processing apparatus is performed. Later, a system can be provided in which substrates are sequentially transferred to adjacent substrate processing apparatuses.

  In this embodiment, a system in which a plurality of substrate processing apparatuses 210 and 220 are arranged is assumed. However, the present invention is applied to a system in which at least one substrate storage apparatus and one substrate processing apparatus are arranged. Can do. Furthermore, in the present embodiment, it is assumed that the substrate W is transported between the substrate processing apparatus 210 and the substrate processing apparatus 220 via the mounting table 20, but between the substrate processing apparatus 210 and the mounting table 20, Alternatively, a transport device such as a conveyor may be provided between the substrate processing apparatus 220 and the mounting table 20.

[Modification 1]
In the first embodiment, by placing the substrate W on the roller 21 a ′, the friction generated between the substrate W and the placement table 20 when the substrate W is transported is reduced. Does not include the roller unit 21a, and is different in that this friction is reduced by other means. In this modification, the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  FIG. 6 is a top view of the mounting table 20 according to the first modification of the first embodiment. The mounting unit 21 of the mounting table 20 includes a plurality of air ejection units 21d that have a top surface 21d ″ formed with a plurality of ejection ports 21d ′ through which air is ejected and float the substrate W. Each air ejection A passing space S ′ is formed between the units 21d.

  When unloading the substrate W onto the mounting table 20, high-pressure air is ejected from the ejection port 21 d ′ to float the substrate W, and the suction unit 21 b causes the mounting table 20 to be the same as in the first embodiment described above. The substrate W is unloaded.

  According to the configuration according to this modification, the substrate W is floated and transported by the air ejection unit 21d, thereby reducing the friction between the substrate W and the upper surface 21d "and reducing the damage to the substrate W. can do.

<Second Embodiment>
The substrate transport system 100 according to the first embodiment is a system that transports a substrate between a plurality of substrate processing apparatuses 200 arranged along the track R. However, the substrate transport system 300 according to the present embodiment is arranged along the track R. It differs in that it is a system that transports a substrate between the substrate storage device 410 and the substrate processing device 420 arranged along the same. The substrate transfer system 300 itself has the same configuration as the substrate transfer system 100 of the first embodiment, and thus the same reference numerals are given and description thereof is omitted.

  FIG. 7 is an overall perspective view of the substrate transport system 300 according to the second embodiment, and FIG. 8 is an exploded perspective view of the substrate accommodating device 410. The substrate transport system 300 is a system that transports the substrate W from the substrate storage device 410 that is the source of the substrate W to the substrate processing device 420 that is the destination of the substrate W.

  The substrate accommodation device 410 is provided with three substrate accommodation devices 411, 412, and 413 adjacent to each other along the track R. Further, the substrate processing apparatus 420 is provided with three substrate processing apparatuses 421, 422, and 423 adjacent to each other along the track R at positions facing the substrate receiving apparatuses 411, 412, and 413, respectively.

  As shown in FIG. 8, the substrate storage device 410 includes a cassette 410 ′ for storing substrates W, an elevating mechanism 414 provided on both sides of the cassette 410 ′, and a mounting table 415 provided below the cassette 410 ′. . The cassette 410 ′ has a substrate support portion 416 that supports the substrate W in a horizontal posture. The substrate support portion 416 is a rod-like body disposed between the members 1a and 1b extending in the vertical direction, and is made of, for example, metal or urethane covered with rubber.

  The elevating mechanism 414 guides the horizontal state of the cassette support portion 414a that supports the load of the cassette 410 ′, the drive portion 414b that moves the cassette support portion 414a in the vertical direction, and the cassette support portion 414a that moves in the vertical direction. Part 414c.

  The drive unit 414b has a drive source (not shown) such as a motor, and converts the rotational movement from the drive source into vertical movement by a system such as a rack and pinion. By placing the cassette 410 'on the cassette support 414a, the cassette 410' can be moved up and down as the cassette support 414a moves in the vertical direction.

  The mounting table 415 is a table on which the substrate W accommodated in the cassette 410 ′ is temporarily mounted, and a driving source (not shown) such as a plurality of rollers 415 ″ and a motor for driving the rollers 415 ″. And a roller unit 415 ′ having.

  Since the mounting table 415 is configured to fit inside the cassette 415 in a lowered state, even when the substrate W accommodated in the uppermost substrate support portion 416 is carried out, the cassette 410 ′. The substrate W can be carried out without interfering with.

  FIG. 9A and FIG. 9B are diagrams showing the operation procedure of the substrate carry-out process of the substrate accommodating device 410. First, when the substrate W accommodated in the cassette 410 ′ is carried out onto the mounting table 20, as shown in FIG. 9A, the load of the substrate W is changed from the state in which the load of the substrate W is supported by the substrate supporting unit 416. The raising / lowering mechanism 414 is lowered until it is supported by the roller 415 ″. Thereafter, as shown in FIG. 9B, the roller 415 ″ is driven by a driving source so that the substrate W is transferred from the mounting table 415 to the mounting table 20. Unload.

  According to the configuration according to the present embodiment, the substrate W can be efficiently transported even if the device serving as the carry-out source of the substrate W is the substrate storage device 410.

  In the present embodiment, it is assumed that the roller unit 415 ′ has a drive source. However, if the roller unit 415 ′ does not have a drive source, the mounting unit 21 is provided as in the first embodiment. The substrate W may be carried out from the mounting table 415 to the mounting table 20 by the suction unit 21b.

  In the present embodiment, a substrate container 410 serving as a substrate carry-out source is arranged on one side of the track R, and a substrate processing apparatus 420 serving as a substrate carry-out destination is arranged on the other side of the track R. However, the present invention can also be applied to a system in which both the substrate storage device and the substrate processing apparatus are disposed adjacent to one side of the track R.

  Further, in the present embodiment, a system is assumed in which the substrate storage device 410 serves as a substrate carry-out source and the substrate processing device 420 serves as a substrate carry-out destination. However, the substrate processing device 420 serves as a substrate carry-out source and the substrate storage device 410. May be a system to which the substrate is unloaded.

  In the present embodiment, a system in which a plurality of substrate storage apparatuses 410 and substrate processing apparatuses 420 are arranged is assumed. However, the present invention is not limited to a system in which at least one substrate storage apparatus and one substrate processing apparatus are arranged. Can be applied. Furthermore, in this embodiment, although the case where the board | substrate W was conveyed via the mounting base 415 between the substrate accommodating apparatus 410 and the substrate processing apparatus 420 was assumed, between the substrate accommodating apparatus 410 and the mounting base 415, Alternatively, a transport device such as a conveyor may be provided between the substrate processing apparatus 410 and the mounting table 415.

  Furthermore, even when only a plurality of substrate storage devices are arranged along the track R, by applying the present invention, a process of transferring a substrate between the substrate storage devices can be executed.

Claims (8)

In a substrate transfer system that includes a moving unit that reciprocates on a predetermined track, and that transfers a substrate from a device that is a substrate take-out source to a device that is a take-out destination among a plurality of devices arranged along the track. ,
A placement table on which each of the devices serving as a substrate unloading source is placed, and a substrate unloaded from the device serving as a substrate unloading source is placed;
An elevating unit provided in the moving unit, elevating and lowering a substrate placed on the mounting table,
The table above is
A mounting unit on which a substrate unloaded from the apparatus that is a substrate unloading source is mounted;
A support member that supports the mounting unit on the track and above the moving unit;
The above unit is
A substrate transfer system comprising a passage space through which the lifting unit passes when the moving unit moves and when the lifting unit moves up and down. The lifting unit is
A mounting portion that extends in a direction perpendicular to the trajectory and on which the substrate is mounted;
A supporting column that is erected on the moving unit and supports the placement unit,
The passing space is
A first passage space through which the placement unit passes;
A second passage space through which the support column passes;
The substrate transfer system according to claim 1, further comprising: The placing unit is composed of a plurality of roller units including a plurality of rollers on which the substrate is placed,
The substrate transfer system according to claim 1, wherein the passage space is formed between the roller units. The mounting unit has a top surface on which a plurality of air ejection ports are formed, and is composed of a plurality of air ejection units that float the substrate.
The substrate transfer system according to claim 1, wherein the passage space is formed between the air ejection units.   The substrate transfer system according to claim 3, wherein the roller unit includes a driving unit that rotates at least one of the rollers. The roller is a driven roller;
The above unit is
4. The substrate transfer system according to claim 3, further comprising moving means for holding and moving the substrate to a predetermined position on the mounting unit. The above unit is
5. The substrate transfer system according to claim 4, further comprising moving means for holding and moving the substrate to a predetermined position on the placement unit. A plurality of substrate storage devices each including a moving unit that reciprocally moves on a predetermined track and arranged along the track and supporting a substrate in a horizontal posture in a vertical direction. In a substrate transfer system for transferring a substrate to a substrate processing apparatus arranged in a
A mounting table that is arranged for each of the substrate storage devices and on which a substrate unloaded from the substrate storage device is mounted in a horizontal posture;
An elevating unit provided in the moving unit, elevating and lowering a substrate placed on the mounting table,
The table above is
A mounting unit on which a substrate unloaded from the substrate storage device is mounted;
A support member that supports the mounting unit on the track and above the moving unit;
The above unit is
A substrate transfer system comprising a passage space through which the lifting unit passes when the moving unit moves and when the lifting unit moves up and down.

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