JP5152469B2 - Substrate transfer device - Google Patents

Description

  The present invention relates to a substrate transfer device for transferring a thin plate substrate such as a liquid crystal glass from a conveyor to a processing device or the like.

  For example, in a manufacturing process of a thin plate-like substrate such as glass used for a liquid crystal display panel, a transport line for transporting the substrate is provided, and the substrate is transported at a processing station arranged along the transport line. Necessary processing is performed on the substrate. In such a transfer line, a substrate transfer device is provided for transferring a substrate transferred by a transfer means such as a roller conveyor to a processing apparatus.

As one of such substrate transport apparatuses, the substrate transported by the transport conveyor is temporarily transferred to the carry-in auxiliary conveyor, drawn into the processing apparatus side from the transport conveyor, and then disposed in the vicinity of the processing apparatus. Patent Document 1 discloses that a robot hand of a robot is taken out from an auxiliary conveyor and the substrate is transferred to a processing apparatus by changing the direction of the robot hand. In addition, in the substrate transfer device of Patent Document 1, after the substrate that has been processed by the processing device is taken out of the processing device by the robot hand, the direction of the robot hand is changed and the substrate is placed on the auxiliary conveyor for unloading, It returns to the conveyor.
JP-A-9-58844

However, in the case of the substrate transfer apparatus of Patent Document 1, not only the transfer conveyor is required, but also a space for installing the auxiliary conveyor and the robot and a space for moving the robot arm must be secured. There's a problem.
Even when an auxiliary conveyor such as the substrate transfer apparatus of Patent Document 1 is not used, a space for installing a robot for transferring a substrate between the transfer conveyor and the processing apparatus and a space for moving the robot arm The problem of having to secure it remains.

In particular, when the substrate is a glass for liquid crystal, as the size of the glass substrate increases in size in recent years, the space required for the robot for transferring this also increases, so this problem becomes more prominent. It has become.
The present invention has been made in view of such problems, and an object of the present invention is to provide a substrate transport apparatus that enables appropriate transfer of a substrate in a smaller space.

In order to achieve the above object, a substrate transfer apparatus according to the present invention enables a substrate to be placed in a substrate transfer apparatus for transferring a substrate transferred by a conveyor to a processing apparatus disposed along the conveyor. A plurality of supports extending in a direction crossing the conveyor are provided below, and disposed above the conveyor and across the conveyor, and the substrate is transferred between the conveyor and the support. and a second position for transferring the substrate between the first position and the processing unit and the support for, movable the support so as to traverse the conveyor above the said conveyor And a transfer means disposed on a side of the conveyor and outside a movement locus of the substrate conveyed by the conveyor, coupled to the transfer means, and the support is in the first position. The support is lowered to a predetermined lower position lower than the lower surface of the substrate conveyed by the conveyor, while the support is raised to a predetermined elevated position higher than the upper surface of the substrate conveyed by the conveyor. And elevating means for elevating and lowering the transfer means (claim 1).

According to the substrate transport apparatus configured as described above, the transfer means having a plurality of support members provided below in a direction extending across the conveyor so that the substrate can be placed crosses the conveyor above the conveyor. In addition , the lifting / lowering means for raising / lowering the transfer means is disposed on the side of the conveyor and outside the movement locus of the substrate conveyed by the conveyor.
When the lifting / lowering means lowers the transfer means most in the first position for transferring the substrate between the conveyor and the support body, it reaches a predetermined lowered position lower than the lower surface of the substrate conveyed by the conveyor. The support is lowered. For this reason, the board | substrate conveyed by a conveyor passes the upper direction of a support body, without interfering with a support body.

  Further, when the lifting means raises the transfer means while the support is in such a state, the substrate conveyed above the support by the conveyor is lifted by the support rising as the transfer means rises. Lifted from the conveyor. When the lifting / lowering means raises the transfer means to the highest level, the support rises to a predetermined elevated position higher than the upper surface of the substrate conveyed by the conveyor, so that it is conveyed by the conveyor after the substrate lifted by the support. The incoming substrate passes below the support without being interfered by the support.

On the other hand, the substrate lifted by the raised support is moved to the processing apparatus by the transfer means moving the support from the first position to the second position in the direction crossing the conveyor, to the processing apparatus. The substrate can be delivered.
Further, in the substrate transfer apparatus, each of the supports is formed in a rod shape and one end is held by the transfer means, and the conveyor is provided with a recess for receiving each of the supports lowered by the elevating means. Is formed in a direction crossing the conveyor (claim 2).

According to the substrate transport apparatus configured as described above, when the transfer means is lowered by the elevating means, the support body having a rod shape and one end held by the transfer means is formed in a direction crossing the conveyor. Each is housed in a recess.
Furthermore, in the substrate transport apparatus, the support is positioned above a plurality of first supports provided to be able to place the substrate and an upper surface of the substrate placed on the first support, A second support capable of mounting a substrate different from the substrate mounted on the first support; and the transfer means independently connects the first support and the second support. It is possible to move in a direction crossing the conveyor (claim 3).

  According to the substrate transport apparatus configured as described above, when the substrate transported by the conveyor is above the first support after the first support is lowered to the lowered position at the first position, the elevating means is When the transfer means is raised, the substrate is lifted from the conveyor by the first support. Further, when the transfer means moves the first support to the second position, the substrate can be transferred between the processing apparatus and the first support. On the other hand, if the second support is placed in the second position when the first support is in the first position and the processed substrate is transferred between the processing apparatus and the second support, When moving the support from the first position to the second position, the second support can be moved from the second position to the first position. After the second support reaches the first position, the lifting means lowers the transfer means, so that the substrate that has been processed in the processing apparatus can be transferred from the second support to the conveyor. Similarly, when the first support is in the second position and the second support is in the first position, the substrate can be transferred by the first support and the second support.

  According to the substrate transfer apparatus of the present invention, the substrate between the conveyor and the processing apparatus is moved up and down by the lifting means, and the support is moved between the first position and the second position by the transferring means. Transfer is possible. When the lifting / lowering means lowers the transfer means most in the first position, the substrate transported by the conveyor can pass over the support without being interfered with the support, and the lift / lowering means places the transfer means at the highest. When raised, the substrate conveyed by the conveyor can pass under the support without being interfered by the support.

Since the transfer means is arranged above the conveyor and across the conveyor , the robot arm can be provided as long as the space for arranging the lifting means is secured on the side of the conveyor and outside the movement trajectory of the substrate conveyed by the conveyor. It is no longer necessary to secure an installation space such as the above and a movement space of the robot arm, and the substrate can be transferred in a smaller space than a conventional substrate transfer apparatus. Also, if the substrate on the conveyor is lifted from the conveyor by the support, while the substrate is being transferred between the conveyor and the processing apparatus, the substrate that is subsequently conveyed by the conveyor passes below the support. Thus, the substrate can be transported downstream, so that the substrate can be transported more efficiently by the conveyor.

According to the substrate transfer apparatus of the second aspect, when the transfer means is lowered by the elevating means, the support having a rod shape and one end held by the transfer means is formed in a direction crossing the conveyor. Since each is accommodated in a recessed part, interference with the board | substrate conveyed by a conveyor and a support body can be prevented reliably.
Further, according to the substrate transfer device of claim 3, the transfer of the substrate from the conveyor to the processing device by the first support and the transfer of the substrate from the processing device to the conveyor by the second support are simultaneously performed. Can do. In addition, the transfer of the substrate from the conveyor to the processing apparatus by the second support and the transfer of the substrate from the processing apparatus to the conveyor by the first support can be performed simultaneously. Therefore, the substrate can be transferred more efficiently than when the substrate that has been processed by the processing apparatus is returned to the conveyor and then transferred from the conveyor to the processing apparatus.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a plan view schematically showing a part of a production line to which a substrate transfer apparatus according to an embodiment of the present invention is applied. In this production line, for example, a thin glass substrate (hereinafter referred to as a substrate) 2 used for a liquid crystal display panel or a plasma display is processed.
As shown in FIG. 1, in this production line, a plurality of substrates 2 are conveyed by a conveyor 4 in the direction of arrow A in the figure. A driving unit 4b having a plurality of conveying rollers 4a that are rotated by power transmitted from a power source (not shown) is disposed on the conveyor 4 while a gap having a predetermined width is placed along the conveying direction at both side ends of the conveyor 4. A plurality are arranged. Both edges of the substrate 2 that are lateral to the transport direction are respectively supported by the transport rollers 4a of the drive unit 4b from the lower surface, and are transported on the conveyor 4 by the rotation of the transport rollers 4a. A plurality of air ejection units 4c are arranged in parallel on the conveyor 4 as shown in FIG. 1 inside the drive unit 4b so as to coincide with the position of each drive unit 4b in the transport direction. Accordingly, the air ejection units 4c in each row in the transport direction are arranged with a gap of a predetermined width in the transport direction, like the drive units 4b. Each air ejection unit 4c is supplied with air from a compressed air supply source (not shown), and the substrate 2 extends from the upper surface of the air ejection unit 4c at a position lower than the lower surface of the substrate 2 supported by the transport roller 4a. The substrate 2 is supported in a non-contact manner with the substrate 2 by jetting air toward the lower surface of the substrate.

  In this production line, a processing device 6 and a processing device 8 that perform predetermined processing on the substrate 2 transported by the conveyor 4 are disposed on the side of the transport direction of the conveyor 4. A pair of elevating units (elevating means) 10 is disposed on the opposite side of the processing apparatus 6 across the conveyor 4 at a position outside the movement locus of the substrate 2 conveyed by the conveyor 4. A pair of elevating units (elevating means) 12 is disposed on the opposite side of the processing apparatus 8 across the conveyor 4 at a position outside the movement locus of the substrate 2 conveyed by the conveyor 4.

  A transfer unit (transfer means) 14 located above the conveyor 4 is connected to the elevating unit 10, and the elevating unit 10 moves the transfer unit 14 up and down above the conveyor 4. Further, a transfer unit (transfer means) 16 located above the conveyor 4 is connected to the lifting unit 12 so that the lifting unit 12 moves up and down the transfer unit 16 above the conveyor 4. Yes.

  The transfer unit 14 transfers the substrate 2 conveyed below the transfer unit 14 by the conveyor 4 like the substrate 2 indicated by a broken line on the transfer unit 14 side in FIG. 1. The substrate 2 is transferred to the processing device 6 like the substrate 2 indicated by a two-dot chain line on the side, and the substrate 2 processed by the processing device 6 is returned to the conveyor 4 again. In addition, the transfer unit 16 treats the substrate 2 conveyed below the transfer unit 16 by the conveyor 4 as shown in the broken line on the transfer unit 16 side in FIG. The substrate 2 is transferred to the processing apparatus 8 like the substrate 2 indicated by a two-dot chain line on the apparatus 8 side, and the substrate 2 processed by the processing apparatus 8 is returned to the conveyor 4 again. Details of the transfer of the substrate 2 will be described later.

Since the transfer unit 14 and the transfer unit 16 are configured in the same manner, the transfer of the substrate 2 by the transfer unit 16 and the lifting / lowering of the transfer unit 16 by the lifting unit 12 are performed in the same manner as the transfer unit 14. Below, the transfer unit 14 is demonstrated typically.
2 is a perspective view of the transfer unit 14, FIG. 3 is a plan view of the transfer unit 14, FIGS. 4 and 5 are side views of the transfer unit 14 in different states, and FIG. 3 is a front view of a unit 14. FIG.

  As shown in these drawings, the transfer unit 14 includes a unit main body 14a, and a cross section substantially U provided on the lower surface of the unit main body 14a so as to be slidable with respect to the unit main body 14a in the direction of the arrow B in FIG. The first sliding member 14b having a letter shape and the unit main body 14a are provided on the lower surface of the unit main body 14a so as to be slidable independently of the first sliding member 14b in the direction of the arrow B in FIG. And a second sliding member 14c having a substantially U-shaped cross section. The second sliding member 14c is located inward of the first sliding member 14b as shown in FIG. 6 when viewed in the sliding direction. The first sliding member 14b and the second sliding member 14c can slide without interfering with each other. The first sliding member 14b and the second sliding member 14c are slid as described above when power is transmitted from a driving source (not shown) built in the unit main body 14a.

  One end of each of a plurality of first support bodies 14d that are formed in a rod shape and are oriented in a direction orthogonal to the conveying direction of the conveyor 4 is fixed to the first sliding member 14b. The upper surface of each first support 14d is disposed so as to be on a substantially horizontal and same plane, and the substrate 2 can be placed as shown by a one-dot chain line in FIGS. On the other hand, one end of each of the plurality of second supports 14e that is formed in a rod shape and is oriented in a direction orthogonal to the conveying direction of the conveyor 4 is fixed to the second sliding member 14c, similarly to the first support 14d. ing. Similarly to the first support 14d, the upper surface of each second support 14e is arranged so as to be substantially on the same plane, and the substrate 2 is placed as shown by a one-dot chain line in FIGS. It is possible. Note that the release end sides of the first support 14d and the second support 14e, that is, the right side in FIG. 3 is the processing device 6 side, and each moves in the direction of arrow B in the drawing to approach the processing device 6. .

Therefore, FIG. 4 shows the transfer unit 14 when the first sliding member 14b is most distant from the processing apparatus 6 and the second sliding member 14c is closest to the processing apparatus 6. FIG. 5 shows the transfer unit 14 when the first sliding member 14 b is closest to the processing apparatus 6 and the second sliding member 14 c is most distant from the processing apparatus 6.
As shown in FIGS. 4 to 6, the second support 14e is positioned above the first support 14d, and the lower end of the second support 14e is the upper surface of the substrate 2 placed on the first support 14d. It is comprised so that it may become a higher position. Further, as shown in FIG. 6, the inner width of the first sliding member 14b when viewed from the sliding direction is set to be larger than the width of the substrate 2, and the first sliding member 14b and the first support are supported. The body 14d, the second sliding member 14c, and the second support body 14e are movable in the direction of arrow B in each figure and in the opposite direction without interfering with the substrate 2 placed thereon.

FIG. 7 shows only the broken line in the unit main body 14a of the transfer unit 14 in the plan view showing the transfer unit 14 and its periphery in order to show the operating state of the substrate transfer apparatus in the present embodiment.
In FIG. 7, the first support 14 d of the transfer unit 14 is in the first position, which is the position farthest from the processing apparatus 6 in the horizontal direction, while the second support 14 e is the most in the processing apparatus 6 in the horizontal direction. The state in the second position, which is a close position, is shown. That is, the first support 14d and the second support 14e are in the state shown in FIG.

  As shown in FIG. 7, each first support 14d in the first position has a recess 4d formed by a gap between each drive unit 4b aligned in the transport direction, and each of the first support bodies 14d aligned in the transport direction. It is disposed above the recess 4e formed by the gap between the air ejection units 4b. That is, since these recesses 4d and 4e are formed side by side in a direction crossing the conveyor 4 corresponding to each first support 14d, when the lifting unit 10 lowers the transfer unit 14, the first The support body 14d is accommodated in the recesses 4d and 4e.

  FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 7 when the transfer unit 14 is lowered most in this manner. As shown in FIG. 8, the first support 14 d that has entered the corresponding recesses 4 d and 4 e as the transfer unit 14 descends is positioned lower than the lower surface of the substrate 2 conveyed by the conveyor 4 (lowering position). ). In this way, the first support 14d is accommodated in the recesses 4d and 4e, so that the substrate 2 transported by the conveyor 4 is reliably supported by the first support 14d without being interfered with the first support 14d. It can pass above the body 14d.

When the substrate 2 is transported above the first support 14d by the conveyor 4 when the first support 14d is in the state shown in FIG. 8, the transport of the substrate 2 by the conveyor 4 is temporarily stopped. Thereafter, the lifting unit 10 raises the transfer unit 14. As a result, the first support 14 d comes into contact with the lower surface of the substrate 2 and lifts the substrate 2 from the conveyor 4.
FIG. 9 is a cross-sectional view taken along line VIII-VIII in FIG. 7 when the transfer unit 14 is raised most in this way. As shown in FIG. 9, the first support 14 d on which the substrate 2 is placed and lifted from the conveyor 4 is raised to a position (an elevated position) higher than the upper surface of the substrate 2 that is subsequently conveyed by the conveyor 4. The substrate 2 conveyed by the conveyor 4 can pass under the first support 14d without being interfered with the first support 14d.

  Thus, when the board | substrate 2 is mounted in the 1st support body 14d and the transfer unit 14 will be in the state which raised most, the transfer unit 14 will move the 1st sliding member 14b in the direction of the arrow B in FIG. By sliding, the first support 14 d is directed toward the processing device 6 and moved in a direction crossing the conveyor 4. At the same time, the transfer unit 14 slides the second sliding member 14c in the direction opposite to the arrow B in FIG. 7, and directs the second support 14e on the processing apparatus 6 side toward the conveyor 4, The conveyor 4 is moved in a crossing direction. As described above, when the first sliding member 14b and the second sliding member 14c slide, they are placed on the first support 14d, the second support 14e, and the first support 14d. The substrates 2 are configured so as not to interfere with each other. Thus, when the first support 14d reaches the second position above the processing device 6 and the second support 14e reaches the first position above the conveyor 4, the transfer unit 14 performs the first sliding. The sliding of the member 14b and the second sliding member 14c is stopped. At this time, the first support 14d and the second support 14e are in a state as shown in FIG.

  In this state, the elevating unit 10 lowers the transfer unit 14, whereby the substrate 2 placed on the first support 14 d in the second position is lowered and disposed on the upper surface of the processing apparatus 6. The plurality of pins 6a that are in contact with the lower surface of the substrate 2 support the substrate 2 by the pins 6a. As a result, the delivery of the substrate 2 from the first support 14d to the processing apparatus 6 is completed, and the processing apparatus 6 performs necessary processing on the substrate 2.

  On the other hand, when the second support 14e moved to the conveyor 4 side is in the first position, similarly to the first support 14d, it is between the recesses 4d between the drive units 4b and the air ejection units 4b. It is located above the recess 4e. Therefore, when the lifting / lowering unit 10 lowers the transfer unit 14, each second support 14e is accommodated in the corresponding recesses 4d and 4e. When the transfer unit 14 is in the most lowered state, the second support 14e is lowered to a position (lower position) lower than the lower surface of the substrate 2 conveyed by the conveyor 4, as indicated by a broken line in FIG. Thus, by accommodating the 2nd support body 14e in these recesses 4d and 4e, the board | substrate 2 conveyed by the conveyor 4 does not interfere with the 2nd support body 14e, but it is 2nd support reliably. It can pass above the body 14e.

  When the second support 14e is in the state shown by the broken line in FIG. 8, the processing of the substrate 2 in the processing apparatus 6 is completed and the processing by the processing apparatus 6 is not completed (hereinafter referred to as unprocessed substrate). When the substrate 2 is transported above the second support 14 e by the conveyor 4, the lifting unit 10 raises the transfer unit 14 after temporarily stopping the transport of the unprocessed substrate 2 by the conveyor 4. . As a result, the second support member 14 e comes into contact with the lower surface of the unprocessed substrate 2 and lifts the unprocessed substrate 2 from the conveyor 4.

At this time, on the processing apparatus 6 side, the first support 14d rises as the transfer unit 14 rises, and comes into contact with the lower surface of the substrate (hereinafter referred to as a processed substrate) 2 that has been processed in the processing apparatus 6. The processed substrate 2 is lifted from the pins 6 a of the processing apparatus 6.
When the transfer unit 14 is in the most elevated state, the second support 14e is placed with the unprocessed substrate 2 placed on the upper surface and lifted from the conveyor 4, as shown by a broken line in FIG. It has risen to a position (upward position) higher than the upper surface of the substrate 2 conveyed by the conveyor 4. Therefore, the board | substrate 2 conveyed by the conveyor 4 can pass below the 2nd support body 14e, without interfering with the 2nd support body 14e.

  In this way, after the transfer unit 14 is in the most elevated state, the transfer unit 14 slides the second sliding member 14c in the direction of arrow B in FIG. It moves to the processing apparatus 6 in the direction crossing the conveyor 4. At the same time, the transfer unit 14 slides the first sliding member 14b in the direction opposite to the arrow B in FIG. 7, and directs the first support 14d on the processing apparatus 6 side toward the conveyor 4, The conveyor 4 is moved in a crossing direction.

  Also at this time, when the first sliding member 14b and the second sliding member 14c slide, the processed and placed on the first support 14d, the second support 14e, and the first support 14d have been processed. The unprocessed substrate 2 placed on the substrate 2 and the second support 14e is configured not to interfere with each other. When the second support 14e reaches the second position above the processing device 6 and the first support 14d reaches the first position above the conveyor 4, the transfer unit 14 is moved to the first sliding member. The sliding of 14b and the 2nd sliding member 14c is stopped. At this time, the first support 14d and the second support 14e are again in the state shown in FIG.

  In such a state, the lifting unit 10 lowers the transfer unit 14, whereby the unprocessed substrate 2 placed on the second support 14 e is lowered and disposed on the upper surface of the processing apparatus 6. The plurality of pins 6a abut on the lower surface of the unprocessed substrate 2, whereby the unprocessed substrate 2 is supported by the pins 6a. Thus, the transfer of the unprocessed substrate 2 from the second support 14e to the processing apparatus 6 is completed, and the processing apparatus 6 performs a necessary process on the unprocessed substrate 2.

  On the other hand, on the conveyor 4 side, the lifting unit 10 lowers the transfer unit 14, whereby the processed substrate 2 placed on the first support 14 d is lowered, and the lower surface of the processed substrate 2 is the conveyor 4. The transfer of the processed substrate 2 from the first support 14d to the conveyor 4 is completed. When the transfer unit 14 is in the most lowered state, the first support 14d is lowered to a position (lower position) lower than the lower surface of the substrate 2 conveyed by the conveyor 4 as shown in FIG. Thus, the substrate 2 transported by the step can pass above the first support 14d without being interfered with the first support 14d.

Thereafter, by repeating the above-described procedure again, the transfer of the unprocessed substrate 2 by the first support 14d, the transfer of the processed substrate 2 by the second support 14e, and the first support 14d. The transfer of the processed substrate 2 and the transfer of the unprocessed substrate 2 by the second support 14e are alternately performed.
That is, when the first support 14d is in the first position and the second support 14e is in the second position, the transfer unit 14 is located on the conveyor 4 by being lifted from the lowest position by the lifting unit 10. The unprocessed substrate 2 is transferred to the first support 14d, and the processed substrate 2 in the processing apparatus 6 is transferred to the second support 14e. When the transfer unit 14 is in the most elevated state, the transfer unit 14 slides the first sliding member 14b from the conveyor 4 side to the processing device 6 side, and the second sliding member 14c is moved to the processing device. Slide from 6 side to conveyor 4 side. By such sliding of the first sliding member 14b and the second sliding member 14c, the first support 14d on which the unprocessed substrate 2 is placed is moved from the first position to the second position in the direction crossing the conveyor 4. The second support 14e on which the processed substrate 2 is placed moves from the second position toward the first position in a direction crossing the conveyor 4.

  When the first support 14d reaches the second position and the second support 14e reaches the first position, the transfer unit 14 is lowered by the elevating unit 10 and is placed on the first support 14d. The substrate 2 is transferred onto the pins 6 a of the processing apparatus 6, and the processed substrate 2 placed on the second support 14 e is transferred onto the transport roller 4 a of the conveyor 4. Thereafter, the processing apparatus 6 performs necessary processing on the unprocessed substrate 2, while the processed substrate 2 delivered to the conveyor 4 is conveyed downstream by the conveyor 4.

  On the other hand, when the second support 14e is in the first position and the first support 14d is in the second position, the transfer unit 14 is in the conveyor 4 by being lifted from the lowest position by the lifting unit 10. The unprocessed substrate 2 is transferred to the second support 14e, and the processed substrate 2 in the processing apparatus 6 is transferred to the first support 14d. When the transfer unit 14 is in the most elevated state, the transfer unit 14 slides the second sliding member 14c from the conveyor 4 side to the processing device 6 side and moves the first sliding member 14b to the processing device. Slide from 6 side to conveyor 4 side. By such sliding of the first sliding member 14b and the second sliding member 14c, the second support 14e on which the unprocessed substrate 2 is placed is moved from the first position to the second position in the direction crossing the conveyor 4. And the first support 14 d on which the processed substrate 2 is placed moves from the second position toward the first position in a direction crossing the conveyor 4.

  When the second support 14e reaches the second position and the first support 14d reaches the first position, the transfer unit 14 is lowered by the elevating unit 10 and is placed on the second support 14e. The substrate 2 is transferred onto the pins 6 a of the processing apparatus 6, and the processed substrate 2 placed on the first support 14 d is transferred onto the transport roller 4 a of the conveyor 4. Thereafter, the processing apparatus 6 performs necessary processing on the unprocessed substrate 2, while the processed substrate 2 delivered to the conveyor 4 is conveyed downstream by the conveyor 4.

  In addition, although the board | substrate 2 is conveyed one after another by the conveyor 4 and the process when the process with respect to the board | substrate 2 is performed one after another by the processing apparatus 6 is as above, conveyance of the board | substrate 2 by the conveyor 4 is performed continuously. In some cases, the substrate 2 may be transported downstream by the conveyor 4 without being processed by the processing apparatus 6. In such a case, both the first sliding member 14b and the second sliding member 14c of the transfer unit 14 are slid to the conveyor 4 side in order to place the transfer unit 14 in the standby state, and the first support body. Both 14d and the second support 14e are in the first position. Then, the transfer unit 14 is lowered most by the elevating unit 10, and both the first support 14 d and the second support 14 e are positioned lower than the lower surface of the substrate 2 conveyed by the conveyor 4. Thereby, the board | substrate 2 conveyed by the conveyor 4 can pass above the 1st support body 14d and the 2nd support body 14e, without interfering with the 1st support body 14d and the 2nd support body 14e.

Further, when the transfer of the substrate 2 between the conveyor 4 and the processing device 6 is resumed from such a standby state, the conveyor is carried out in the same procedure as the transfer of the substrate 2 by the first support 14d described above. If the transfer of the substrate 2 from 4 to the processing apparatus 6 is started, then the substrate 2 can be transferred alternately between the second support 14e and the first support 14d as described above. Become.
In the above, the transfer of the substrate 2 by the transfer unit 14 has been described. However, as described above, the transfer unit 16 is also configured in the same manner as the transfer unit 14, and the transfer unit 16 and the conveyor 4 are processed. The transfer of the substrate 2 to and from the apparatus 8 and the transition to the standby state are also performed in the same manner as the transfer unit 14 described above.

  As described above, the first support 14d and the second support 14d are moved while the untreated substrate 2 is moved from the conveyor 4 to the processing device 6 by either the first support 14d or the second support 14e. Since the substrate 2 processed by the other of the supports 14e can be moved from the processing apparatus 6 to the conveyor 4, the substrate 2 can be efficiently moved between the conveyor 4 and the processing apparatus 6.

  In addition, the transfer unit 14 is disposed above the conveyor 4, and the transfer unit 14 is moved up and down by the lifting unit 10 disposed outside the side of the conveyor 4, and the first support 14 d of the transfer unit 14 is also provided. Since the second support 14e is moved between the first position above the conveyor 4 and the second position on the processing apparatus 6 side, the outside of the movement locus of the substrate 2 conveyed by the conveyor 4 If the space for arranging the lifting unit 10 is secured, the installation space for the robot arm and the movement space for the robot arm need not be secured. As a result, the substrate 2 can be transferred in a smaller space than the conventional substrate transfer apparatus.

  Furthermore, when the lifting / lowering unit 10 lowers the transfer unit 14 most when the first support 14d or the second support 14e is in the first position, the substrate 2 conveyed by the conveyor 4 is the first support. It is possible to pass over the first support 14d or the second support 14e without being interfered with the 14d or the second support 14e. On the other hand, when the lifting / lowering unit 10 raises the transfer unit 14 most when the first support 14d or the second support 14e is in the first position, the substrate 2 transported by the conveyor 4 is the first support. It is possible to pass under the first support 14d or the second support 14e without being interfered with the 14d or the second support 14e. Therefore, if the transfer unit 14 is in the lowest or highest state, the substrate 2 conveyed later is transferred during the transfer of the substrate 2 between the conveyor 4 and the processing device 6. It becomes possible to convey the substrate 2 downstream from the unit 14, and the substrate 2 can be conveyed more efficiently by the conveyor 4.

The effects as described above can be similarly obtained in the transfer unit 16 configured in the same manner as the transfer unit 14.
This is the end of the description of the substrate transfer apparatus according to the embodiment of the present invention, but the present invention is not limited to the above embodiment.
For example, in the above-described embodiment, the transfer unit 14 is connected to the lifting unit 10 disposed on the outer side of the conveyor 4 to raise and lower the transfer unit 14, but the lifting unit 10 is disposed on the conveyor 4 side. It is not limited to the outside. For example, the transfer unit 14 may be moved up and down by the lifting unit 10 disposed above the conveyor 4 by being suspended from the ceiling. When the elevating unit 10 is arranged as described above, a space for installing the elevating unit 10 on the floor surface is not necessary. Such a configuration is also possible in the transfer unit 16 and the lifting unit 12.

  In the above embodiment, the substrate 2 is supported in a non-contact manner by the air ejected from the air ejection unit 4c toward the lower surface, and is transported by the rotation of the transport roller 4a of the conveyor 4 in contact with the lower surface. However, the conveyance method of the board | substrate 2 by the conveyor 4 is not restricted to this. For example, the air ejection unit 4c may be omitted, and the conveyance may be performed only by the conveyance roller 4a.

  Furthermore, in the above-described embodiment, the transfer unit 14 is provided with two sets of supports including the first support 14d and the second support 14e. However, only one of them may be provided. In this case, although it becomes impossible to transfer the substrate 2 efficiently by moving the two sets of supports alternately, the effect that the space for transferring the substrate 2 can be reduced is as described above. It can be obtained in the same way as the form.

  Moreover, in the said embodiment, although the 1st support body 14d and the 2nd support body 14e were moved alternately, it was made to transfer the board | substrate 2 efficiently, according to the conveyance form of the board | substrate 2 by the conveyor 4, a 1st support The body 14d and the second support 14e may be moved in the same direction, and the heights of the conveyor 4 and the processing device 6 or 8 and the heights of the first support 14d and the second support 14e are appropriately adjusted. Thus, the moving procedure of the first support 14d and the second support 14e can be changed as appropriate.

  Furthermore, the number of processing devices, supports, drive units, air ejection units, etc. in the above embodiment is an example and can be changed as appropriate.

It is a top view which shows roughly a part of production line to which the board | substrate conveyance apparatus which concerns on one Embodiment of this invention is applied. It is a perspective view of the transfer apparatus used for the board | substrate conveyance apparatus of FIG. It is a top view of the transfer apparatus used for the board | substrate conveyance apparatus of FIG. It is a side view of the transfer apparatus used for the board | substrate conveyance apparatus of FIG. It is a side view of the transfer apparatus used for the board | substrate conveyance apparatus of FIG. It is a front view of the transfer apparatus used for the board | substrate conveyance apparatus of FIG. It is a top view which shows the operation state of the board | substrate conveyance apparatus of FIG. FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 7 when the transfer unit is in the most lowered state. FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 7 when the transfer unit is in the most elevated state.

Explanation of symbols

2 Substrate 4 Conveyor 4d, 4e Recess 6, 8 Processing device 10, 12 Lifting unit (lifting means)
14, 16 Transfer unit (transfer means)
14d 1st support body (support body)
14e Second support (support)

Claims (3)

In the substrate transport apparatus for transferring the substrate transported by the conveyor to the processing apparatus disposed along the conveyor,
A plurality of supports extending in a direction crossing the conveyor so as to be able to place the substrate is provided below, and disposed above the conveyor and across the conveyor, and between the conveyor and the support in between the second position for transferring the substrate between the first position and the processing unit and the support for transferring the substrate so as to cross the conveyor above the said conveyor and transfer means capable of moving the support,
It is arranged on the side of the conveyor and outside the movement locus of the substrate conveyed by the conveyor and connected to the transfer means, and is conveyed by the conveyor when the support is in the first position. The support is lowered to a predetermined lower position lower than the lower surface of the substrate, and the transfer means is moved up and down so that the support rises to a predetermined higher position higher than the upper surface of the substrate conveyed by the conveyor. And a lifting / lowering means. Each of the supports has a rod shape and one end is held by the transfer means,
2. The substrate transfer apparatus according to claim 1, wherein a recess for accommodating each of the supports lowered by the elevating means is formed in the conveyor in a direction crossing the conveyor. The support is
A plurality of first supports provided to be capable of placing the substrate;
It is located above the upper surface of the substrate placed on the first support, and comprises a second support on which a substrate different from the substrate placed on the first support can be placed,
The substrate transfer apparatus according to claim 1, wherein the transfer means is capable of moving the first support and the second support independently in a direction across the conveyor.

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