CN101616855A - Base board delivery device - Google Patents
Base board delivery device Download PDFInfo
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- CN101616855A CN101616855A CN200880002757A CN200880002757A CN101616855A CN 101616855 A CN101616855 A CN 101616855A CN 200880002757 A CN200880002757 A CN 200880002757A CN 200880002757 A CN200880002757 A CN 200880002757A CN 101616855 A CN101616855 A CN 101616855A
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- China
- Prior art keywords
- supporting mass
- substrate
- belt conveyor
- processing equipment
- transfer unit
- Prior art date
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Specific Conveyance Elements (AREA)
- Robotics (AREA)
- Intermediate Stations On Conveyors (AREA)
Abstract
A kind of base board delivery device, first supporting mass (14d) be in be used for and belt conveyor (4) between when carrying out the primary importance of handing-over of substrate (2), lifting unit (10) descends transfer unit (14), and first supporting mass (14d) is dropped to than the lowering position by the following low regulation of belt conveyor (4) substrate conveying (2).Then, rise by making transfer unit (14), first supporting mass (14d) will be lifted from belt conveyor (4) by belt conveyor (4) substrate conveying (2).First supporting mass (14d) rises to than behind the top high position by belt conveyor (4) substrate conveying (2), transfer unit (14) makes first supporting mass (14d) move along the direction of crosscut belt conveyor (4), up to be used for and processing equipment (6) between carry out the handing-over of substrate (2) the second place, the substrate (2) that will be positioned on first supporting mass (14d) is handed off to processing equipment (6).
Description
Technical field
The present invention relates to be used for liquid crystal for example with laminal substrates such as glass, from transfer on the belt conveyor to the base board delivery device of handling device etc.
Background technology
For example in the Fabrication procedure of this laminal substrates such as glass that display panels uses, be provided with the travel line of conveying substrate.Use the travel line conveying substrate, and substrate is carried out necessary processing at processing station along the travel line configuration.On such travel line, be provided be used for by feedway substrate conveying transfers such as roller conveyors to the base board delivery device of handling on the device.
Disclose such base board delivery device in the Japanese kokai publication hei 9-58844 communique (below be designated as patent documentation 1).The base board delivery device that patent documentation 1 is put down in writing, be with by the temporary transient transfer of transport conveyer belt substrate conveying to the auxiliary conveyor belt of moving into usefulness, be incorporated into the processing equipment side from transport conveyer belt again.Then, utilize the manipulator of the robot be provided in the processing equipment next door, substrate taken out from auxiliary conveyor belt, and the direction that changes this manipulator with substrate transfer to handling on the device.In addition, in the base board delivery device of patent documentation 1, will take out from processing equipment at the substrate that processing equipment has been finished after handling with manipulator.Then, change the direction of this manipulator, substrate-placing is being taken out of on the auxiliary conveyor belt of usefulness, and substrate is sent back to transport conveyer belt.
But, under the situation of the base board delivery device of patent documentation 1, not only exist and except that transport conveyer belt, also need the such problem of auxiliary conveyor belt, also exist and to guarantee to be used to be provided with the space of auxiliary conveyor belt and robot and the such problem of mobile space of mechanical arm.
Even when not using the auxiliary conveyor belt as the base board delivery device of patent documentation 1, still leave between transport conveyer belt and processing equipment, must guarantee for the space of the robot that is provided for the transfer substrate and the such problem of mobile space of mechanical arm.
Especially be liquid crystal with under the situation of glass at substrate, along with the maximization of in recent years glass substrate, the space of robot needs that is used for the transfer glass substrate is also in expansion.Thereby aforesaid problem becomes more outstanding.
Summary of the invention
The present invention develops in view of this problem, its purpose be to provide a kind of in littler space the suitable base board delivery device of transfer substrate.
In order to achieve the above object, base board delivery device of the present invention is to be used for and will to be transplanted on the base board delivery device of the processing equipment that sets along described belt conveyor by the belt conveyor substrate conveying, it possesses: shifting apparatus, it is provided in the top of described belt conveyor, and thereunder have a plurality of supporting masses, described supporting mass is along the direction of the described belt conveyor of crosscut and extend, but and the described substrate of mounting, described shifting apparatus makes described supporting mass removable between the primary importance and the second place, described primary importance is the position that is used to carry out the handing-over of described substrate between described belt conveyor and described supporting mass, and the described second place is the position that is used to carry out the handing-over of described substrate between described processing equipment and described supporting mass; Jacking system, it is provided in by the outside of the motion track of the described substrate of described belt conveyor conveying and with described mobile device and is connected, and make described shifting apparatus lifting, when described supporting mass is positioned at described primary importance, make described supporting mass drop to lowering position than the following low regulation of the described substrate of carrying by described belt conveyor, on the other hand, make described supporting mass rise to hoisting position than the top high regulation of the described substrate of carrying by described belt conveyor.
In the base board delivery device that constitutes like this, below shifting apparatus, be provided with a plurality of supporting masses, this shifting apparatus is provided in the top of belt conveyor.But supporting mass extends and the mounting substrate along the direction of crosscut belt conveyor.Be used to make the jacking system of shifting apparatus lifting, be provided in the outside of the motion track of the substrate when carrying by belt conveyor.
Be used to carry out the primary importance of the handing-over of substrate between belt conveyor and supporting mass, drop to when minimum when jacking system makes shifting apparatus, supporting mass then drops to than the lowering position by the following low regulation of belt conveyor substrate conveying.Therefore, during with the belt conveyor conveying substrate, substrate can be by the top of supporting mass, and does not interfere with supporting mass.
In addition, when supporting mass was in this state, when jacking system rose shifting apparatus, supporting mass was accompanied by the rising of shifting apparatus and rises.At this moment, supporting mass will be lifted on belt conveyor by the substrate that load-transfer device is transported to the top of supporting mass.When jacking system rises to when the highest, supporting mass rises to than the hoisting position by the top high regulation of belt conveyor substrate conveying.Therefore, carry the substrate of coming by belt conveyor after the substrate that lifts by supporting mass, can be by the below of supporting mass, and do not interfere with supporting mass.
On the other hand, shifting apparatus makes supporting mass move to the second place along the direction of crosscut belt conveyor from primary importance, and thus, the substrate that the supporting mass after quilt rises lifts is to the processing equipment side shifting.Thereby realize the handing-over of substrate to processing equipment.
Shifting apparatus is provided in the top of belt conveyor, and therefore, as long as in the outside by the motion track of belt conveyor substrate conveying, the space of guaranteeing to be used to dispose jacking system does not just need to guarantee the mobile space that space and mechanical arm are set of mechanical arm etc.Thereby, than base board delivery device in the past, can be at littler space transfer substrate.In addition, by with supporting mass the substrate on the belt conveyor being lifted from belt conveyor, during carrying out the transfer of substrate between belt conveyor and the processing equipment, the substrate of being come by the belt conveyor conveying after can making it is transported to the downstream by the below of supporting mass.Thereby, can more effectively carry out the conveying of belt conveyor to substrate.
Preferred described supporting mass is made bar-shaped respectively, the one end remains on the described shifting apparatus, on described belt conveyor, on described belt conveyor, along the direction of the described belt conveyor of crosscut, be formed with the recess of taking in the described supporting mass that utilizes described jacking system and descend respectively.
Like this in the base board delivery device of Gou Chenging, shifting apparatus utilizes jacking system and when descending, and is a bar-shaped and end and remains on supporting mass on the shifting apparatus, is accommodated in respectively in the recess that forms along the direction of crosscut belt conveyor.Thereby, can prevent interference reliably by belt conveyor substrate conveying and supporting mass.
Preferred described supporting mass is made of a plurality of first supporting masses and second supporting mass, but the described substrate of the described first supporting mass mounting, described second supporting mass is positioned at than the top position of more leaning on the top that is positioned in the substrate on described first supporting mass, but the different substrate of substrate of institute's mounting on mounting and described first supporting mass, described shifting apparatus moves described first supporting mass and second supporting mass respectively independently along the direction of the described belt conveyor of crosscut.
In the base board delivery device of Gou Chenging, after primary importance made first supporting mass drop to lowering position, when being in the top of first supporting mass by the belt conveyor substrate conveying, jacking system rose shifting apparatus like this, and substrate is lifted from belt conveyor by first supporting mass.Then, when shifting apparatus makes first supporting mass move to the second place, between the processing equipment and first supporting mass, just can carry out the handing-over of substrate.
When first supporting mass is in primary importance, as long as second supporting mass is configured in the second place, and between the processing equipment and second supporting mass, finished the handing-over of the substrate of processing, just can make second supporting mass move to primary importance making first supporting mass when primary importance moves to the second place from the second place.After second supporting mass arrived primary importance, jacking system descended shifting apparatus, thus, the substrate of finishing processing at processing equipment can be handed off on the belt conveyor from second supporting mass.When first supporting mass is in the second place and second supporting mass and is in primary importance, similarly also can carry out by the transfer of first supporting mass and second supporting mass to substrate.
Thereby, can carry out simultaneously by first supporting mass to substrate from belt conveyor to the transfer of processing equipment and by second supporting mass to substrate from the transfer of processing equipment to belt conveyor.In addition, also can carry out simultaneously by second supporting mass to substrate from belt conveyor to the transfer of processing equipment and by first supporting mass to substrate from the transfer of processing equipment to belt conveyor.Consequently, sent back to behind the belt conveyor and and compared to the situation of handling device, can more effectively be carried out the transfer of substrate from transfer on the belt conveyor with substrate with the substrate after finishing processing at processing equipment.
Description of drawings
Fig. 1 is the birds-eye view of a part of manufacturing line of diagrammatically having represented to use the base board delivery device of an embodiment of the present invention;
Fig. 2 is the block diagram of the shifting apparatus that uses of the base board delivery device of Fig. 1;
Fig. 3 is the birds-eye view of the shifting apparatus that uses of the base board delivery device of Fig. 1;
Fig. 4 is the lateral plan of the shifting apparatus that uses of the base board delivery device of Fig. 1;
Fig. 5 is the lateral plan of the shifting apparatus that uses of the base board delivery device of Fig. 1;
Fig. 6 is the front view of the shifting apparatus that uses of the base board delivery device of Fig. 1;
Fig. 7 is the birds-eye view of mode of operation of the base board delivery device of presentation graphs 1;
Fig. 8 is the cutaway view that the transfer unit is in VIII-VIII line when dropping to minimum state, in Fig. 7;
Fig. 9 is the cutaway view that the transfer unit is in VIII-VIII line when rising to the highest state, in Fig. 7.
The specific embodiment
Below, based on accompanying drawing embodiments of the present invention are described.
Fig. 1 is the birds-eye view of a part of manufacturing line of diagrammatically having represented to use the base board delivery device of an embodiment of the present invention.This manufacturing line carries out for example processing of the lamellar glass substrate (hereinafter referred to as substrate) 2 of use such as display panels or plasma display.
As shown in Figure 1, on this manufacturing line, a plurality of substrates 2 are carried along arrow A direction among the figure by belt conveyor 4.On this belt conveyor 4, be equipped with a plurality of driver element 4b that possess a plurality of conveying cylinder 4a respectively, and these a plurality of driver element 4b are provided with the gap of Rack along throughput direction at the side direction both ends of belt conveyor 4.Each conveying cylinder 4a rotates by not shown propulsion source transferring power.The two edges portion that becomes the side with respect to throughput direction of substrate 2 is bearing in from below respectively on the conveying cylinder 4a of driver element 4b, and is transferred by being rotated on the belt conveyor 4 of conveying cylinder 4a.
On belt conveyor 4a, in the inboard of driver element 4b, be arranged side by side a plurality of air ejection unit 4c as shown in Figure 1, the position of each air ejection unit 4c of the throughput direction of substrate 2 and the position of each driver element 4b come down to consistent.Thereby each air ejection unit 4c of each row of the throughput direction of substrate 2 is identical with each driver element 4b, the gap of Rack is set and is arranged at throughput direction.Spray unit 4c air supply from not shown compressed-air supply source to each air.Be in above the air ejection unit 4c than following low position by the substrate of conveying cylinder 4a supporting, from the ejection air below substrate 2 of going up of air ejection unit 4c, thus, air ejection unit 4c and substrate 2 noncontacts and supporting substrates 2.
On this manufacturing line,, dispose carrying the substrate 2 of coming to carry out the processing equipment 6 and the processing equipment 8 of predetermined processing by belt conveyor 4 in the side with respect to the throughput direction of belt conveyor 4.And, across the opposition side of belt conveyor 4,, be equipped with a pair of lifting unit (jacking system) 10 in the position of conduct by the outside of the motion track of belt conveyor 4 substrate conveying 2 at processing equipment 6.Similarly, across the opposition side of belt conveyor 4,, be equipped with a pair of lifting unit (jacking system) 12 in the position of conduct by the outside of the motion track of belt conveyor 4 substrate conveying 2 at processing equipment 8.
Be connected with the transfer unit (shifting apparatus) 14 that is positioned at belt conveyor 4 tops on the lifting unit 10, lifting unit 10 makes transfer unit 14 lifting above belt conveyor 4.Similarly, be connected with the transfer unit (shifting apparatus) 16 that is positioned at belt conveyor 4 tops on the lifting unit 12, lifting unit 12 makes transfer unit 16 lifting above belt conveyor 4.
Shown in the dotted line of transfer unit 14 sides among Fig. 1, when substrate 2 was transported to the below of transfer unit 14 by belt conveyor 4, transfer unit 14 arrived the transfer shown in the long and two-short dash line of 6 sides of the processing equipment among Fig. 1 of this substrate 2 and handles device 6.In addition, transfer unit 14 will be sent back on the belt conveyor 4 once more at the substrate 2 that processing equipment 6 is handled.Similarly, shown in the dotted line of transfer unit 16 sides among Fig. 1, when substrate 2 was transported to the below of transfer unit 16 by belt conveyor 4, transfer unit 16 arrived the transfer shown in the long and two-short dash line of 8 sides of the processing equipment among Fig. 1 of this substrate 2 and handles device 8.And transfer unit 16 will be sent back on the belt conveyor 4 once more at the substrate 2 that processing equipment 8 is handled.About the details of the transfer of such transfer unit 14 and 16 pairs of substrates 2, narrate hereinafter.
Fig. 2 is the block diagram of transfer unit 14; Fig. 3 is the birds-eye view of transfer unit 14; Fig. 4 and Fig. 5 are respectively the lateral plan of transfer unit 14 when being in different states; Fig. 6 is the front view of transfer unit 14.
As shown in these figures, transfer unit 14 possesses unit main body 14a, the first slide unit 14b and the second slide unit 14c.The first slide unit 14b makes roughly U font, and two ends are by the following surface bearing of unit main body 14a.The first slide unit 14b can slide along arrow B among the figure and reversing sense thereof with respect to unit main body 14a.The second slide unit 14c also makes roughly U font, and two ends are by the following surface bearing of unit main body 14a.The second slide unit 14c and the first slide unit 14b are independent, and can slide along arrow B among the figure and reversing sense thereof with respect to unit main body 14a.As shown in Figure 6, when its direction of slip was seen, the second slide unit 14c was positioned at the inboard of the first slide unit 14b, and the first slide unit 14b and the second slide unit 14c can slide and not interfere mutually.In addition, be contained in the not shown drive source in the unit main body 14a in the first slide unit 14b and the second slide unit 14c utilize and transferring power can be slided as mentioned above.
Make a plurality of first supporting mass 14d end separately of direction of the throughput direction quadrature of bar-shaped and sensing and belt conveyor 4, be fixed on the first slide unit 14b.Each first supporting mass 14d is configured on the same plane of approximate horizontal in the mode of the top unanimity of each first supporting mass 14d, can come mounting substrate 2 shown in long and short dash line among Fig. 2 to Fig. 6.On the other hand, identical with the first supporting mass 14d, make a plurality of second supporting mass 14e end separately of direction of the throughput direction quadrature of bar-shaped and sensing and belt conveyor 4, be fixed on the second slide unit 14c.Each second supporting mass 14e is also identical with the first supporting mass 14d, is configured on the same plane of big political affairs level in the mode of the top unanimity of each second supporting mass 14e, can come mounting substrate 2 shown in single-point line among Fig. 2 to Fig. 6.
In addition, the opening of the first supporting mass 14d and the second supporting mass 14e is distolateral, and promptly the right side among Fig. 3 is processing equipment 6 sides, and the first supporting mass 14d and the second supporting mass 14e are respectively by moving along the arrow B direction among the figure near processing equipment 6.Thereby Fig. 4 represents that the first slide unit 14b leaves processing equipment 6 most and the transfer unit 14 of the second slide unit 14c when being in state near processing equipment 6.Transfer unit 14 when in addition, Fig. 5 represents the first slide unit 14b the second slide unit 14c is in the state that leaves processing equipment 6 most near processing equipment 6.
To shown in Figure 6, the second supporting mass 14e constitutes, and is positioned at the top of the first supporting mass 14d as Fig. 4, and the bottom of the second supporting mass 14e is than the top high position that is positioned in the substrate 2 on the first supporting mass 14d.In addition, as shown in Figure 6, the width setup of the inboard of the first slide unit 14b when direction of slip is seen is for bigger than the width of substrate 2.Therefore, the first slide unit 14b and the first supporting mass 14d and the second slide unit 14c and the second supporting mass 14e can move along arrow B among each figure and reversing sense thereof, and can not interfere with the substrate that is positioned in above them.
Fig. 7 is the extremely birds-eye view of periphery of expression transfer unit 14, for the mode of operation of the base board delivery device of representing present embodiment, has only dotted the unit main body 14a of transfer unit 14.
Fig. 7 represents that it is primary importance that the first supporting mass 14d of transfer unit 14 is in the position of leaving processing equipment 6 most in the horizontal direction, and the position that the second supporting mass 14e is in the most in the horizontal direction near processing equipment 6 is the state of the second place.That is, the first supporting mass 14d and the second supporting mass 14e are state shown in Figure 4.
As shown in Figure 7, be in each first supporting mass 14d of primary importance, be configured in along the recess 4d that forms between each driver element 4b of throughput direction arrangement, reach along the top of the recess 4e that forms between each air ejection unit 4c of throughput direction arrangement.That is, corresponding each the first supporting mass 14d of these recesses 4d and 4e arranges formation along the direction of crosscut belt conveyor 4.Thereby when lifting unit 10 descended transfer unit 14, the first supporting mass 14d was incorporated in these recesses 4d and the 4e.
Fig. 8 makes transfer unit 14 be in the cutaway view of VIII-VIII line when dropping to minimum state, in Fig. 7.As shown in Figure 8, the first supporting mass 14d follows the decline of transfer unit 14, enters respectively in corresponding concave part 4d and the 4e, and drops to following low position (lowering position) than belt conveyor 4 substrate conveying 2.Like this, the first supporting mass 14d is incorporated in these recesses 4d and the 4e, and thus, during by belt conveyor 4 conveying substrates 2, substrate 2 can not interfere with the first supporting mass 14d, can pass through the top of the first supporting mass 14d reliably.
When the first supporting mass 14d is in state shown in Figure 8, and substrate 2 is transmitted when being transported to the top of the first supporting mass 14d with 4, and after the conveying of 4 pairs of substrates 2 of belt conveyor temporarily stopped, lifting unit 10 rose transfer unit 14.Thus, the following butt of the first supporting mass 14d and substrate 2 lifts substrate 2 on belt conveyor 4.
Fig. 9 is like this operation and make that transfer unit 14 rises to when the highest, the cutaway view of the VIII-VIII line in Fig. 7.As shown in Figure 9, the first supporting mass 14d mounting substrate 2 also lifts it from belt conveyor 4, rise to than after carry the substrate 2 of coming by belt conveyor 4 top high position (hoisting position).Thereby during with belt conveyor 4 conveying substrates 2, substrate 2 can pass through the below of the first supporting mass 14d, and does not interfere with the first supporting mass 14d.
Like this, when substrate 2 is positioned in that the first supporting mass 14d goes up, transfer unit 14 becomes when rising to the highest state, transfer unit 14 slides along the arrow B direction among Fig. 7 by making the first slide unit 14b, and the first supporting mass 14d is moved towards the direction of processing equipment 6 along crosscut belt conveyor 4.Meanwhile, transfer unit 14 slides the opposite direction of the arrow B among the second slide unit 14c edge and Fig. 7, and the second supporting mass 14c that is in processing equipment 6 sides is moved towards the direction of belt conveyor 4 along crosscut belt conveyor 4.In addition, as mentioned above, when the first slide unit 14b and second slide unit 14c slip, the first supporting mass 14d, the second supporting mass 14e and the substrate 2 that is positioned on the first supporting mass 14d can not interfere mutually.Like this, when the second place of first supporting mass 14d arrival as the top of processing equipment 6, and when the second supporting mass 14e arrived as the primary importance of the top of belt conveyor 4, transfer unit 14 stopped the slip of the first slide unit 14b and the second slide unit 14c.At this moment, the first supporting mass 14d and the second supporting mass 14e become state shown in Figure 5.
In this state, lifting unit 10 descends transfer unit 14, and thus, the substrate 2 that is positioned on the first supporting mass 14d that is in the second place descends.Follow the decline of substrate 2, be provided in the top a plurality of pin 6a of processing equipment 6 and the following butt of substrate 2, substrate 2 is supported by pin 6a.Thus, finish substrate 2, carry out the processing that needs at 6 pairs of substrates of processing equipment 2 from the handing-over of the first supporting mass 14d to processing equipment 6.
On the other hand, move to belt conveyor 4 sides and be in the second supporting mass 14e of primary importance, identical with the situation of the first supporting mass 14d, above the recess 4d of each driver element 4b and the recess 4e between each air ejection unit 4c.Thereby when lifting unit 10 descended transfer unit 14, each second supporting mass 14e was incorporated in cooresponding these recesses 4d and the 4e.When transfer unit 14 becomes when dropping to minimum state, shown in the dotted line among Fig. 8, the second supporting mass 14e drops to than the following low position (lowering position) by belt conveyor 4 substrate conveying 2.Like this, the second supporting mass 14e is incorporated in these recesses 4d and the 4e, and thus, during with belt conveyor 4 conveying substrates 2, substrate 2 can not interfere with the second supporting mass 14e, can pass through the top of the second supporting mass 14e reliably.
When the second supporting mass 14e is in state shown in the dotted line among Fig. 8, finish processing at the substrate 2 of processing equipment 6, and when the substrate (below become untreatment base) 2 of not finishing the processing of being undertaken by processing equipment 6 is transported to the top of the second supporting mass 14e by belt conveyor 4, the conveying of 4 pairs of untreated substrates 2 of belt conveyor temporarily stops, afterwards, lifting unit 10 rises transfer unit 14.Thus, the following butt of the second supporting mass 14e and untreated substrate 2 lifts untreated substrate 2 from belt conveyor 4.At this moment, in processing equipment 6 sides, the first supporting mass 14d follows the rising of transfer unit 14 and rises.The first supporting mass 14d and substrate (below become handle be over substrate) 2 butts of finishing processing at processing equipment 6 lift the processing substrate 2 that is over from the pin 6a that handles device 6.
When untreated substrate 2 be positioned in the second supporting mass 14e above, transfer unit 14 becomes when rising to the highest state, shown in the dotted line among Fig. 9, the second supporting mass 14e lifts untreated substrate 2 from belt conveyor 4, and, rise to the top high position (hoisting position) of carrying the substrate 2 of coming by belt conveyor 4 than afterwards.Thereby during with belt conveyor 4 conveying substrates 2, substrate 2 can not interfere with the second supporting mass 14e, can be by the below of the second supporting mass 14e.
Like this, transfer unit 14 become rise to the highest state after, transfer unit 14 slides along the arrow B direction among Fig. 7 by making the second slide unit 14c, and the second supporting mass 14c is moved towards the direction of processing equipment 6 along crosscut belt conveyor 4.Meanwhile, transfer unit 14 slides the opposite direction of the arrow B among the first slide unit 14b edge and Fig. 7, and the first supporting mass 14d that is in processing equipment 6 sides is moved towards the direction of belt conveyor 4 along crosscut belt conveyor 4.
At this moment, when the first slide unit 14b and the second slide unit 14c slide, the first supporting mass 14d, the second supporting mass 14e, be positioned in the substrate 2 that the processing on the first supporting mass 14d is over and the untreatment base 2 that is positioned on the second supporting mass 14e can not interfere mutually yet.Like this, when the second supporting mass 14e arrives when arriving primary importance as belt conveyor 4 tops as the second place of the top of processing equipment 6 and the first supporting mass 14d, transfer unit 14 stops the slip of the first slide unit 14b and the second slide unit 14c.At this moment, the first supporting mass 14d and the second supporting mass 14e become state shown in Figure 4 once more.
In this state, lifting unit 10 descends transfer unit 14, and thus, the untreatment base 2 that is positioned on the second supporting mass 14e descends.Follow the decline of untreatment base 2, be provided in a plurality of pin 6a above the processing equipment 6 and the following butt of untreatment base 2, untreatment base 2 is supported by pin 6a.Thus, finish untreatment base 2, carry out necessary processing at 6 pairs of untreatment bases of processing equipment 2 from the handing-over of the second supporting mass 14e to processing equipment 6.
On the other hand, in belt conveyor 4 sides, lifting unit 10 descends transfer unit 14, thus, is positioned in substrate 2 declines that the processing on the first supporting mass 14d is over.Follow the decline of handling the substrate 2 be over, handle the substrate 2 that is over below be positioned on the conveying cylinder 4a of each driver element 4b of belt conveyor 4, finish untreatment base 2 from the handing-over of the first supporting mass 14d to belt conveyor 4.Then, when transfer unit 14 becomes when dropping to minimum state, as shown in Figure 8, the first supporting mass 14d drops to than the following low position (lowering position) by belt conveyor 4 substrate conveying 2.Thus, during with belt conveyor 4 conveying substrates 2, substrate 2 can pass through the top of the first supporting mass 14d, and can not interfere with the first supporting mass 14d.
Afterwards, by repeating above-mentioned step once more, the transfer of the substrate 2 that the first supporting mass 14d that hockets is over to processing to the transfer of untreated substrate 2 and the first supporting mass 14d.In addition, match therewith, the transfer of the substrate 2 that the second supporting mass 14e that hockets is over to processing and the second supporting mass 14e are to the transfer of untreated substrate 2.
Promptly, the first supporting mass 14d is in primary importance and the second supporting mass 14e when being in the second place, when transfer unit 14 utilizes lifting unit 10 to begin to rise from dropping to minimum state, 2 of untreatment bases that are on the belt conveyor 4 are handed off on the first supporting mass 14d, simultaneously, being in the substrate 2 that the processing on the processing equipment 6 is over is handed off on the second supporting mass 14e.Then, when transfer unit 14 becomes when rising to the highest state, transfer unit 14 makes the first slide unit 14b slide from belt conveyor 4 side direction processing equipment 6 sides, simultaneously, the second slide unit 14c is slided from processing equipment 6 side direction belt conveyor 4 sides.Slip by the first slide unit 14b and the second slide unit 14c, mounting has the direction of the first supporting mass 14d of untreated substrate 2 along crosscut belt conveyor 4, move to the second place from primary importance, simultaneously, mounting has the second supporting mass 14e that handles the substrate 2 the be over direction along crosscut belt conveyor 4, moves to primary importance from the second place.
When the first supporting mass 14d arrived the second place and second supporting mass 14e arrival primary importance, transfer unit 14 utilized lifting unit 10 to descend.Follow the decline of transfer unit 14, the untreatment base 2 that is positioned on the first supporting mass 14d is handed off on the pin 6a of processing equipment 6, simultaneously, is positioned in processing on the second supporting mass 14e substrate 2 that is over and is handed off on the conveying cylinder 4a of belt conveyor 4.Afterwards, carry out necessary processing at 6 pairs of untreatment bases of processing equipment 2, on the other hand, the substrate 2 that is handed off on the belt conveyor 4 is transported to the downstream by belt conveyor 4.
On the other hand, the second supporting mass 14e is in primary importance and the first supporting mass 14d when being in the second place, when transfer unit 14 utilizes lifting unit 10 to begin to rise from dropping to minimum state, the untreatment base 2 that is on the belt conveyor 4 is handed off on the second supporting mass 14e, simultaneously, being in the substrate 2 that the processing on the processing equipment 6 is over is handed off on the first supporting mass 14d.Then, when transfer unit 14 becomes when rising to the highest state, transfer unit 14 makes the second slide unit 14c slide from belt conveyor 4 side direction processing equipment 6 sides, simultaneously, the first slide unit 14b is slided from processing equipment 6 side direction belt conveyor 4 sides.Slip by the first slide unit 14b and the second slide unit 14c, mounting has the direction of the second supporting mass 14e of untreated substrate 2 along crosscut belt conveyor 4, move to the second place from primary importance, simultaneously, mounting has the first supporting mass 14d that handles the substrate 2 the be over direction along crosscut belt conveyor 4, moves to primary importance from the second place.
When the second supporting mass 14e arrived the second place and first supporting mass 14d arrival primary importance, transfer unit 14 utilized lifting unit 10 to descend.Follow the decline of transfer unit 14, be positioned in the untreatment base 2 on the second supporting mass 14e, be handed off on the pin 6a of processing equipment 6, simultaneously, be positioned in processing on the first supporting mass 14d substrate 2 that is over, be handed off on the conveying cylinder 4a of belt conveyor 4.Afterwards, carry out necessary processing, on the other hand, be handed off to the substrate 2 that the processing on the belt conveyor 4 is over and be transported to the downstream by belt conveyor 4 at 6 pairs of untreatment bases of processing equipment 2.
With belt conveyor 4 conveying substrate 2 continuously, and the step when continuously carrying out processing to substrate 2 with processing equipment 6 as previously discussed.But, also have belt conveyor 4 carry out discontinuously substrate 2 conveying situation or do not handle and substrate 2 directly be transported to the situations in downstream with belt conveyor 4 at processing equipment 6.Under these circumstances, transfer unit 14 is set at readiness for action, therefore, the first slide unit 14b of transfer unit 14 and the second slide unit 14c slide to belt conveyor 4 sides simultaneously, and the first supporting mass 14d and the second supporting mass 14e become primary importance.And transfer unit 14 utilizes lifting unit 10 to become to drop to minimum state, and the first supporting mass 14d and the second supporting mass 14e arrive together than the following low position by belt conveyor 4 substrate conveying 2.Thus, during with belt conveyor 4 conveying substrates 2, substrate 2 can not interfere with the first supporting mass 14d and the second supporting mass 14e, can be by the top of the first supporting mass 14d and the second supporting mass 14e.
In addition, when restarting to carry out the transfer of substrate 2 between belt conveyor 4 and processing equipment 6,, make substrate 2 from the transfer of belt conveyor 4 to processing equipment 6 by the step identical to the transfer of substrate 2 with the second above-mentioned supporting mass 14d from this readiness for action.As mentioned above, can utilize second supporting mass 14e and first supporting mass 14d the hocket transfer of substrate 2 thereafter.
Transfer by the 14 pairs of substrates 2 in transfer unit more than has been described.As mentioned above, transfer unit 16 is identical structure with transfer unit 14, therefore, the transfer of the 16 pairs of substrates 2 in transfer unit between belt conveyor 4 and processing equipment 8, and transfer unit 16 also similarly carry out to the transition of readiness for action with above-mentioned transfer unit 14.
As mentioned above, in using the first supporting mass 14d and the second supporting mass 14e any one, during untreatment base 2 moved to processing equipment 6 from belt conveyor 4, another that can use the first supporting mass 14d and the second supporting mass 14e moved to belt conveyor 4 with the substrate 2 that processing is over from processing equipment 6.Thereby, can carry out substrate 2 moving between belt conveyor 4 and processing equipment 8 effectively.
In the base board delivery device of present embodiment, transfer unit 14 is configured in the top of belt conveyor 4, and this transfer unit 14 utilizes the lifting unit 10 that is provided in the outside, belt conveyor 4 sides to come lifting.In addition, the first supporting mass 14d of transfer unit 14 and the second supporting mass 14e can move between the second place as primary importance above the belt conveyor 4 and processing equipment 6.Thus, as long as in the outside by the motion track of belt conveyor 4 substrate conveying 2, the space of guaranteeing to be used to dispose lifting unit 10 does not just need to guarantee the mobile space that space and mechanical arm are set of mechanical arm etc.Consequently, than base board delivery device in the past, can be at littler spatial movement substrate 2.
In addition, when the first supporting mass 14d or the second supporting mass 14e are in primary importance, lifting unit 10 make transfer unit 14 drop to minimum after, just can not interfere with belt conveyor 4 substrate conveying 2 with the first supporting mass 14d or the second supporting mass 14e, can be by the top of the first supporting mass 14d or the second supporting mass 14e.On the other hand, when the first supporting mass 14d or the second supporting mass 14e are in primary importance, lifting unit 10 make transfer unit 14 rise to the highest after, just can not interfere with belt conveyor 4 substrate conveying 2 with the first supporting mass 14d or the second supporting mass 14e, can be by the below of the first supporting mass 14d or the second supporting mass 14e.Thereby, drop to minimum state or rise to the highest state as long as transfer unit 14 is become, during carrying out the transfer of substrate between belt conveyor 4 and the processing equipment 6, just can will carry the substrate 2 of coming to be transported to the downstream afterwards with transfer unit 14.Consequently, can further carry out the conveying of 4 pairs of substrates 2 of belt conveyor effectively.
In addition, the transfer unit 16 with transfer unit 14 same structures similarly can obtain aforesaid effect.
More than finish explanation, but the present invention is not limited to above-mentioned embodiment to the base board delivery device of an embodiment of the present invention.
In the above-mentioned embodiment, transfer unit 14 is connected with the lifting unit 10 in the outside, side that is configured in belt conveyor 4, and lifting unit 10 makes 14 liftings of transfer unit.But the configuration of lifting unit 10 is not limited to be configured in the outside, side of belt conveyor 4.Also can be for for example: utilize to make and hang the inferior lifting unit 10 that is equipped on the top of belt conveyor 4, come lifting transfer unit 14 from the top.Under the situation that sets lifting unit 10 like this, on the floor, do not need to be used to be provided with the space of lifting unit 10 yet.Transfer unit 16 and lifting unit 12 equally also can be such structure.
In addition, in the above-described embodiment, the air noncontact supporting that substrate 2 is sprayed below substrate 2 from air ejection unit 4c, and the conveying cylinder 4a rotation with the belt conveyor that contacts below 4 of substrate 2 comes conveying substrate 2 thus.But the carrying method of 4 pairs of substrates 2 of belt conveyor is not limited to this.For example, also can omit air ejection unit 4c, only with conveying cylinder 4a conveying substrate 2.
In addition, in the above-mentioned embodiment, on transfer unit 14, be provided with 2 groups of supporting masses that constitute by the first supporting mass 14d and the second supporting mass 14e, but any also can only be set wherein.In this case, identical though impassabitity makes 2 groups of supporting masses alternately move transfer substrate 2 effectively with above-mentioned embodiment, can obtain reducing being used for the effect in the space of transfer substrate 2.
In addition, in the above-mentioned embodiment, alternately move transfer substrate 2 effectively by making the first supporting mass 14d and the second supporting mass 14e.But, also can match with the mode of movement of 4 pairs of substrates 2 of belt conveyor, the first supporting mass 14d and the second supporting mass 14e are moved along equidirectional.In addition, can suitably change the mobile step of the first supporting mass 14d and the second supporting mass 14e by suitably adjusting the height of height, the first supporting mass 14d and the second supporting mass 14e of belt conveyor 4 and processing equipment 6 or 8.
In addition, the quantity of the processing equipment in the above-mentioned embodiment, supporting mass, driver element or air ejection unit etc. is the quantity of an example of expression, can suitably change.
As mentioned above, the present invention can carry out various changes.This change should not exceed purport of the present invention and scope.
Claims (3)
1, a kind of base board delivery device is used for it is characterized in that possessing with being transplanted on the processing equipment that sets along described belt conveyor by the belt conveyor substrate conveying:
Shifting apparatus, it is provided in the top of described belt conveyor, and thereunder have a plurality of supporting masses, described supporting mass is along the direction of the described belt conveyor of crosscut and extend, but and the described substrate of mounting, described shifting apparatus makes described supporting mass removable between the primary importance and the second place, described primary importance is the position that is used to carry out the handing-over of described substrate between described belt conveyor and described supporting mass, and the described second place is the position that is used to carry out the handing-over of described substrate between described processing equipment and described supporting mass;
Jacking system, it is provided in by the outside of the motion track of the described substrate of described belt conveyor conveying and with described mobile device and is connected, and make described shifting apparatus lifting, when described supporting mass is positioned at described primary importance, make described supporting mass drop to lowering position than the following low regulation of the described substrate of carrying by described belt conveyor, on the other hand, make described supporting mass rise to hoisting position than the top high regulation of the described substrate of carrying by described belt conveyor.
2, base board delivery device as claimed in claim 1 is characterized in that,
Described supporting mass is made bar-shaped respectively, and the one end remains on the described shifting apparatus,
On described belt conveyor,, be formed with the recess of taking in the described supporting mass that utilizes described jacking system and descend respectively along the direction of the described belt conveyor of crosscut.
3, base board delivery device as claimed in claim 1 is characterized in that,
Described supporting mass is made of a plurality of first supporting masses and second supporting mass,
But the described substrate of the described first supporting mass mounting,
Described second supporting mass is positioned at more top more by the position of top than what be positioned in substrate on described first supporting mass, but the different substrate of substrate of institute's mounting on mounting and described first supporting mass,
Described shifting apparatus moves described first supporting mass and second supporting mass respectively independently along the direction of the described belt conveyor of crosscut.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007103757A JP5152469B2 (en) | 2007-04-11 | 2007-04-11 | Substrate transfer device |
| JP103757/2007 | 2007-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101616855A true CN101616855A (en) | 2009-12-30 |
Family
ID=39863612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880002757A Pending CN101616855A (en) | 2007-04-11 | 2008-02-04 | Base board delivery device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5152469B2 (en) |
| KR (1) | KR20090130038A (en) |
| CN (1) | CN101616855A (en) |
| TW (1) | TW200844027A (en) |
| WO (1) | WO2008126454A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280397A (en) * | 2010-06-10 | 2011-12-14 | 致茂电子(苏州)有限公司 | Wafer conveying and distributing device and method thereof |
| CN102442542A (en) * | 2010-09-09 | 2012-05-09 | 东京毅力科创株式会社 | Substrate transfer apparatus and substrate transfer method |
| CN102514971A (en) * | 2011-12-08 | 2012-06-27 | 深圳市鑫联达包装机械有限公司 | Transfer system capable of continuously delivering paper and transfer method thereof |
| CN103183233A (en) * | 2011-12-29 | 2013-07-03 | 黄正栋 | Substrate conveying device |
| CN108439781A (en) * | 2014-05-29 | 2018-08-24 | 塔工程有限公司 | Lineation device conveyer belt and the lineation device for having it |
| CN115175880A (en) * | 2020-01-27 | 2022-10-11 | 康宁公司 | Method and apparatus for trimming edge of glass substrate during in-line processing |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101172764B1 (en) | 2009-10-08 | 2012-08-09 | 로체 시스템즈(주) | Substrate processing appartus and substrate transferring method for controlling the same |
| CN102602695A (en) * | 2011-01-25 | 2012-07-25 | 佶新科技股份有限公司 | Substrate conveying and sorting device |
| KR101824571B1 (en) | 2011-04-21 | 2018-03-15 | 주식회사 포틱스 | Apparatus for substrate transfer |
| TWI467687B (en) * | 2011-11-29 | 2015-01-01 | Tera Automation Corp Ltd | Glass substrate transfer device |
| JP6456177B2 (en) * | 2015-02-12 | 2019-01-23 | 株式会社ディスコ | Wafer processing system |
| CN105661603B (en) * | 2015-12-26 | 2017-11-03 | 河南勃达微波装备股份有限公司 | A kind of continuous automatic in-out apparatus of jujube sheet glass and method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01140831U (en) * | 1988-03-22 | 1989-09-27 | ||
| JP4052826B2 (en) * | 2001-10-22 | 2008-02-27 | 株式会社日立ハイテクノロジーズ | Conveying arm that can be used for both conveying a mask and a substrate to be exposed, and an exposure apparatus including the same |
-
2007
- 2007-04-11 JP JP2007103757A patent/JP5152469B2/en active Active
-
2008
- 2008-02-04 CN CN200880002757A patent/CN101616855A/en active Pending
- 2008-02-04 WO PCT/JP2008/051779 patent/WO2008126454A1/en active Application Filing
- 2008-02-04 KR KR1020097021163A patent/KR20090130038A/en not_active Application Discontinuation
- 2008-02-14 TW TW97105129A patent/TW200844027A/en unknown
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280397A (en) * | 2010-06-10 | 2011-12-14 | 致茂电子(苏州)有限公司 | Wafer conveying and distributing device and method thereof |
| CN102442542A (en) * | 2010-09-09 | 2012-05-09 | 东京毅力科创株式会社 | Substrate transfer apparatus and substrate transfer method |
| CN102514971A (en) * | 2011-12-08 | 2012-06-27 | 深圳市鑫联达包装机械有限公司 | Transfer system capable of continuously delivering paper and transfer method thereof |
| CN103183233A (en) * | 2011-12-29 | 2013-07-03 | 黄正栋 | Substrate conveying device |
| CN108439781A (en) * | 2014-05-29 | 2018-08-24 | 塔工程有限公司 | Lineation device conveyer belt and the lineation device for having it |
| CN115175880A (en) * | 2020-01-27 | 2022-10-11 | 康宁公司 | Method and apparatus for trimming edge of glass substrate during in-line processing |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200844027A (en) | 2008-11-16 |
| JP5152469B2 (en) | 2013-02-27 |
| WO2008126454A1 (en) | 2008-10-23 |
| KR20090130038A (en) | 2009-12-17 |
| JP2008260605A (en) | 2008-10-30 |
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Application publication date: 20091230 |