KR20090130038A - Substrate conveying apparatus - Google Patents

Abstract

When a first support body (14d) is positioned at a first position for transferring a substrate (2) between itself and a conveyor (4), a lift unit (10) lowers a transfer unit (14) to lower the first support body (14d) to a predetermined position lower than the lower surface of the substrate (2) conveyed by the conveyor (4). Then, the transfer unit (14) is raised, and thereby the substrate (2) conveyed by the conveyor (4) is raised from the conveyor (4) by the first support body (14d). After the first support body (14d) is raised to a position higher than the upper surface of the substrate (2) conveyed by the conveyor (4), the transfer unit (14) moves the first support body (14d) in the direction of traversing the conveyor (4) to a second position for transferring the substrate (2) between itself and a processing device (6), and transfers the substrate (2) placed on the first support body (14d) to the processing device (6).

Description

Substrate conveying apparatus

This invention relates to the board | substrate conveying apparatus for transferring a thin plate-like board | substrates, such as liquid crystal glass, from a conveyor to a processing apparatus.

For example, in the manufacturing process of thin board | substrates, such as glass used for a liquid crystal display panel, the conveyance line which conveys a board | substrate is provided. A substrate is conveyed by a conveyance line, and the necessary process is performed with respect to a substrate in the processing station arrange | positioned along a conveyance line. In such a conveying line, the board | substrate conveying apparatus for transferring a board | substrate conveyed by conveyance means, such as a roller conveyor, to a processing apparatus is provided.

One such substrate transfer apparatus is disclosed in Japanese Patent Laid-Open No. 9-58844 (hereinafter referred to as Patent Document 1). In the board | substrate conveying apparatus of patent document 1, the board | substrate conveyed by the conveyance conveyor is once transferred to the subsidiary conveyor for carrying in, and is pulled from the conveyance conveyor to the processing apparatus side. Next, the substrate is taken out of the auxiliary conveyor by a robot hand of a robot disposed in the vicinity of the processing apparatus, and the direction of the robot hand is changed to transfer the substrate to the processing apparatus. Moreover, in the board | substrate conveying apparatus of patent document 1, the board | substrate with which the process was completed by the processing apparatus is taken out from a processing apparatus by a robot hand. Next, the direction of this robot hand is changed, the board | substrate is mounted on a subsidiary conveyor for carrying out, and a board | substrate is returned to a conveyance conveyor.

However, in the case of the substrate conveying apparatus of patent document 1, not only the problem that an auxiliary conveyor is needed other than a conveying conveyor, but also the problem that the space for installing an auxiliary conveyor or a robot, and the moving space of a robot arm must be secured.

Even when an auxiliary conveyor such as the substrate conveying apparatus of Patent Document 1 is not used, there remains a problem that a space for installing a robot for transferring the substrate and a moving space of the robot arm must be secured between the conveying conveyor and the processing apparatus. .

In particular, in the case where the substrate is glass for liquid crystal, with the recent increase in the size of glass substrates, the space required for the robot for transferring them also increases. Thus, the problem as described above becomes more pronounced.

Disclosure of Invention

This invention is made | formed in view of such a subject, Comprising: It aims at providing the board | substrate conveying apparatus which can carry out appropriate transfer of a board | substrate in a smaller space.

In order to achieve the above object, the substrate conveying apparatus of the present invention is a substrate conveying apparatus for conveying a substrate conveyed by a conveyor to a processing apparatus disposed along the conveyor, the substrate conveying apparatus witably traverses the conveyor A first position and the processing apparatus for disposing the substrate between the conveyor and the support, provided with a plurality of supports extending downward in the direction, and disposed above the conveyor. And a transfer means capable of moving the support in a direction traversing the conveyor between the second position for carrying the substrate between the support and the support, and disposed outside the movement trajectory of the substrate conveyed by the conveyor. Connected to the transfer means, when the support is in the first position, by the conveyor Lifting means for elevating the transfer means such that the support is lowered to a predetermined lowered position lower than the lower surface of the substrate to be conveyed, while the support is raised to a predetermined elevated position higher than the upper surface of the substrate conveyed by the conveyor. It is provided.

In the board | substrate conveying apparatus comprised in this way, the transfer means is provided with the some support body under this, and this transfer means is arrange | positioned above the conveyor. The support is extended in a direction crossing the conveyor so as to mount the substrate. Lifting means for raising and lowering the transfer means are disposed outside the movement trajectory of the substrate when conveyed by the conveyor.

When the lifting means lowers the transfer means at the first position for transferring the substrate between the conveyor and the support, the support is lowered to a predetermined lowering position lower than the lower surface of the substrate carried by the conveyor. For this reason, when a board | substrate is conveyed by a conveyor, a board | substrate can pass over the support body without being interfered with a support body.

Further, if the lifting means raises the transfer means when the support is in this state, the support rises with the rise of the transfer means. At this time, the support lifts the substrate conveyed on the upper side of the support by the conveyor from the conveyor. When the elevating means raises the transfer means most, the support is raised to a predetermined raised position higher than the upper surface of the substrate conveyed by the conveyor. For this reason, the board | substrate conveyed by the conveyor from behind the board | substrate lifted by the support body can pass under the support body, without interfering with a support body.

On the other hand, the substrate lifted by the raised support moves to the processing apparatus side by moving the support from the first position to the second position in the direction crossing the conveyor. This enables the transfer of the substrate to the processing apparatus.

Since the transfer means is disposed above the conveyor, if only the space for placing the lifting means outside the movement trajectory of the substrate conveyed by the conveyor is secured, the installation space such as the robot arm or the movement space of the robot arm is secured. There is no need to do it. Therefore, it is possible to transfer a board | substrate with less space compared with the conventional board | substrate conveying apparatus. In addition, by lifting the substrate on the conveyor from the conveyor by the support, the substrate conveyed by the conveyor from the back is transported to the downstream side through the lower side of the substrate while the transfer of the substrate is carried out between the conveyor and the processing apparatus. It is possible. Therefore, conveyance of the board | substrate by a conveyor can be performed more efficiently.

Preferably, the supports each have a rod shape, one end of which is held and held by the transfer means, and a concave portion accommodating each of the supports descended by the lifting means on the conveyor ( An exit is formed in the direction crossing the said conveyor.

In the substrate conveying apparatus comprised in this way, when the transfer means descends by the elevating means, the supports that form a rod shape and one end is held in the transfer means are respectively accommodated in the concave portions formed in the direction crossing the conveyor. Therefore, interference between the substrate and the support carried by the conveyor can be reliably prevented.

Preferably, the support is a plurality of first support that is mounted to the substrate and the substrate located above the upper surface of the substrate mounted on the first support, a substrate separate from the substrate placed on the first support It becomes a 2nd support which can be mounted, The said transfer means is each movable said 1st support body and a 2nd support body independently in the direction crossing a said conveyor.

In the board | substrate conveying apparatus comprised in this way, after lowering a 1st support body from a 1st position to a lowered position, when a lifting means raises a transfer means when the board | substrate conveyed by a conveyor is located above a 1st support body, The substrate is lifted off the conveyor. Next, when the transfer means moves the first support to the second position, the transfer of the substrate becomes possible between the processing apparatus and the first support.

When the first support is in the first position, the second support is placed in the second position, and the transfer of the processed substrate between the processing apparatus and the second support is carried out, so that the first support is moved from the first position to the second position. When moving, the second support can be moved from the second position to the first position. After the second support has reached the first position, the elevating means lowers the transfer means, whereby the substrate having been processed in the processing apparatus can be transferred from the second support to the conveyor. Similarly, when the first support is in the second position and the second support is in the first position, it is possible to transfer the substrate by the first support and the second support as well.

Therefore, transfer of the board | substrate to the processing apparatus from the conveyor by a 1st support body and transfer of the board | substrate to the conveyor from a processing apparatus by a 2nd support body can be performed simultaneously. Moreover, transfer of the board | substrate to the processing apparatus from the conveyor by a 2nd support body and transfer of the board | substrate to the conveyor from the processing apparatus by a 1st support body can be performed simultaneously. As a result, transfer of a board | substrate can be performed more efficiently compared with the case where a board | substrate which processed in the processing apparatus is returned to a conveyor, and a board | substrate is transferred to a processing apparatus from a conveyor.

1 is a plan view schematically showing a part of a production line to which a substrate transfer device of one embodiment of the present invention is applied;

2 is a perspective view of a transfer device used in the substrate transfer device of FIG.

3 is a plan view of a transfer device used in the substrate transfer device of FIG.

4 is a side view of a transfer device used in the substrate transfer device of FIG. 1;

5 is a side view of a transfer device used in the substrate transfer device of FIG. 1;

6 is a front view of a transfer device used in the substrate transfer device of FIG.

7 is a plan view showing an operating state of the substrate transport apparatus of FIG.

8 is a cross-sectional view taken along the line VII-VII in FIG. 7 when the transfer unit is in the lowest state, and FIG.

9 is a cross-sectional view taken along the line VII-VII in FIG. 7 when the transfer unit is in the most elevated state.

Implement the invention  Best form for

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on drawing.

1 is a plan view schematically showing a part of a production line to which a substrate transfer device of one embodiment of the present invention is applied. In this production line, for example, a thin glass substrate (hereinafter referred to as a substrate) 2 used for a liquid crystal display panel, a plasma display, or the like is performed.

As shown in FIG. 1, in this production line, the some board | substrate 2 is conveyed by the conveyor 4 in the direction of arrow A in a figure. A plurality of drive units 4b each having a plurality of conveying rollers 4a are disposed on the conveyor 4 with a gap having a predetermined width along the conveying direction at both sides of the conveyor 4. Each conveyance roller 4a rotates by transmitting power by the power source which is not shown in figure. The substrate 2 is supported by the conveying roller 4a of the drive unit 4b from the lower surface, respectively, and the edge part which becomes a side with respect to a conveyance direction is conveyed on the conveyor 4 by rotation of the conveying roller 4a. .

In the conveyor 4, the some air blowing unit 4c is provided in the drive unit 4b inside as shown in FIG. 1, and each air blowing unit 4c in the conveyance direction of the board | substrate 2 is carried out. ) Is substantially coincident with the position of each drive unit 4b. Therefore, each air blowing unit 4c of each row in the conveyance direction of the board | substrate 2 is arrange | positioned, leaving a predetermined clearance gap in the conveyance direction similarly to each drive unit 4b. Air is supplied to each air blowing unit 4c from the compressed air supply source which is not shown in figure. The upper surface of the air blowing unit 4c is at a position lower than the lower surface of the substrate 2 supported by the conveying roller 4a, and the air is ejected from the upper surface of the air blowing unit 4c toward the lower surface of the substrate 2. As a result, the air blowing unit 4c supports the substrate 2 in a non-contact manner with the substrate 2.

In this production line, the processing apparatus 6 and the processing apparatus 8 which perform a predetermined | prescribed process with respect to the board | substrate 2 conveyed by the conveyor 4 are arrange | positioned to the conveyance direction of the conveyor 4 side. . And on the opposite side of the processing apparatus 6 across the conveyor 4, a pair of lifting units (lifting means) are provided in the position which becomes the outer side of the movement trace of the board | substrate 2 conveyed by the conveyor 4 ( 10) is excreted. Similarly, a pair of elevating units (elevating means) are located on the opposite side of the processing apparatus 8 with the conveyor 4 interposed outside of the movement trajectory of the substrate 2 conveyed by the conveyor 4 ( 12) is excreted.

A transfer unit (transfer means) 14 positioned above the conveyor 4 is connected to the lift unit 10, and the lift unit 10 lifts the transfer unit 14 above the conveyor 4. Similarly, a transfer unit (transfer means) 16 located above the conveyor 4 is connected to the lift unit 12, and the lift unit 12 lifts the transfer unit 16 above the conveyor 4. Strong.

As shown by the broken line on the transfer unit 14 side in FIG. 1, when the substrate 2 is conveyed to the lower side of the transfer unit 14 by the conveyor 4, the transfer unit 14 moves the substrate 2. As shown by a double-dotted line on the processing apparatus 6 side in FIG. 1, it transfers to the processing apparatus 6. In addition, the transfer unit 14 returns the substrate 2, which has been processed in the processing apparatus 6, back to the conveyor 4. Similarly, when the board | substrate 2 is conveyed to the lower side of the transfer unit 16 by the conveyor 4, as shown by a broken line at the transfer unit 16 side in FIG. 1, the transfer unit 16 will transfer this board | substrate 2 ) Is transferred to the processing apparatus 8 as indicated by a double-dotted line on the processing apparatus 8 side in FIG. 1. In addition, the transfer unit 16 returns the substrate 2, which has been processed in the processing apparatus 8, back to the conveyor 4. The detail of the transfer of the board | substrate 2 by such transfer units 14 and 16 is mentioned later.

The transfer unit 14 and the transfer unit 16 are configured in the same manner, and the transfer of the transfer unit 16 by the transfer unit 12 and the transfer unit 16 by the transfer unit 16 is performed by the transfer unit 14. Is performed in the same manner as Therefore, below, the transfer unit 14 is demonstrated typically.

2 is a perspective view of the transfer unit 14, FIG. 3 is a plan view of the transfer unit 14, FIGS. 4 and 5 are side views when the transfer unit 14 is in a different state, and FIG. 6 is a transfer unit 14 Front view.

As shown in these drawings, the transfer unit 14 includes a unit main body 14a, a first sliding member 14b, and a second sliding member 14c. The 1st sliding member 14b has substantially U shape, and both ends are supported by the lower surface of the unit main body 14a. The first sliding member 14b can slide with respect to the arrow B in the figure and the reverse direction with respect to the unit main body 14a. The second sliding member 14c also has a substantially U shape, and both ends are supported by the lower surface of the unit main body 14a. The second sliding member 14c is capable of sliding in the opposite direction to the arrow B in the drawing with respect to the unit body 14a, independently of the first sliding member 14b. The second sliding member 14c is located inside the first sliding member 14b as shown in FIG. 6 when viewed in the sliding direction, so that the first sliding member 14b and the second sliding member 14c are It is possible to slide without interfering with each other. In addition, the first sliding member 14b and the second sliding member 14c can transmit power by a driving source (not shown) incorporated in the unit main body 14a, and can slide as described above.

One end of each of the plurality of first supporting members 14d that forms a rod shape and is directed in a direction orthogonal to the conveying direction of the conveyor 4 is fixed to the first sliding member 14b. Each 1st support body 14d is arrange | positioned so that the upper surface of each 1st support body 14d may correspond to the substantially horizontal coplanar surface, and it is possible to mount the board | substrate 2 as shown by the dashed-dotted line in FIGS. Do. On the other hand, similar to the first support 14d, the second sliding member 14c has one end of each of the plurality of second supports 14e oriented in a rod shape and directed in a direction orthogonal to the conveying direction of the conveyor 4. It is fixed. Similarly to the first support 14d, each second support 14e is also disposed so that the top surface of each second support 14e coincides with a substantially horizontal coplanar surface, as indicated by a dashed line in FIGS. 4 to 6. It is possible to mount the substrate 2.

Moreover, the release end side of the 1st support body 14d and the 2nd support body 14e, ie, the right side in FIG. 3, is the processing apparatus 6 side, and the 1st support body 14d and the 2nd support body are 14e moves closer to the processing apparatus 6 by moving in the direction of arrow B in the figure, respectively. Therefore, FIG. 4 shows the transfer unit 14 when the first sliding member 14b is most separated from the processing apparatus 6 while the second sliding member 14c is in the state closest to the processing apparatus 6. Indicates. 5 shows the transfer unit 14 when the first sliding member 14b is closest to the processing apparatus 6 while the second sliding member 14c is in the most separated state from the processing apparatus 6. ).

As shown in Figs. 4 to 6, the second support 14e is positioned above the first support 14d, and the lower end of the second support 14e is placed on the first support 14d. It is comprised so that it may become a position higher than the upper surface of 2). 6, the width of the inner side of the first sliding member 14b when viewed in the sliding direction is set larger than the width of the substrate 2. For this reason, the 1st sliding member 14b and the 1st support body 14d, and the 2nd sliding member 14c and the 2nd support body 14e do not interfere with the board | substrate 2 mounted in each, It is possible to move in the direction of arrow B and its reverse.

FIG. 7 is a plan view showing the transfer unit 14 and its periphery, and shows the operating state of the substrate transfer device in the present embodiment. Thus, the unit body 14a of the transfer unit 14 is shown only by a broken line. .

7 shows that the first support 14d of the transfer unit 14 is in the first position, which is the position most separated from the processing apparatus 6 in the horizontal direction, while the second support 14e is disposed in the processing apparatus (in the horizontal direction). The state in the 2nd position which is the position closest to 6) is shown. That is, the 1st support body 14d and the 2nd support body 14e are in the state shown in FIG.

As shown in FIG. 7, each of the first supports 14d in the first position is a concave portion 4d formed between the drive units 4b arranged in the conveying direction, and each air lined in the conveying direction. It is arrange | positioned above the recessed part 4e formed between the blowing units 4c. That is, these concave portions 4d and 4e are formed so as to cross the conveyor 4 in correspondence with the respective first supports 14d. Therefore, when the lifting unit 10 lowers the transfer unit 14, the first support 14d is accommodated in these recessed portions 4d and 4e.

FIG. 8 is a cross-sectional view taken along the line VII-VII in FIG. 7 when the transfer unit 14 descends most in this manner. As shown in FIG. 8, the first support 14d enters into the corresponding recessed portions 4d and 4e, respectively, with the lowering of the transfer unit 14, and the substrate 2 conveyed by the conveyor 4. Lower to the lower position (falling position) of the lower surface. In this way, the first support 14d is accommodated in these recesses 4d and 4e so that when the substrate 2 is conveyed by the conveyor 4, the substrate 2 interferes with the first support 14d. It can pass reliably above the 1st support body 14d, without receiving.

When the 1st support body 14d is in the state as shown in FIG. 8, when the board | substrate 2 is conveyed to the upper side of the 1st support body 14d by the conveyor 4, the board | substrate by the conveyor 4 ( After the conveyance of 2) is temporarily stopped, the lifting unit 10 raises the transfer unit 14. Thereby, the 1st support body 14d abuts on the lower surface of the board | substrate 2, and lifts the board | substrate 2 from the conveyor 4. As shown in FIG.

FIG. 9 is a cross-sectional view taken along the line VII-VII in FIG. 7 when the transfer unit 14 is most raised. As shown in FIG. 9, the first support 14d is mounted on the substrate 2 and lifted from the conveyor 4 to a higher position than the upper surface of the substrate 2 conveyed by the conveyor 4 from behind. Raise to (rising position). Therefore, when the board | substrate 2 is conveyed by the conveyor 4, the board | substrate 2 can pass below the 1st support body 14d without being interrupted by the 1st support body 14d.

Thus, when the board | substrate 2 is mounted on the 1st support body 14d, and the transfer unit 14 is in the state which raised most, the transfer unit 14 will move the 1st sliding member 14b of arrow B in FIG. By sliding in the direction, the first support 14d is moved in the direction crossing the conveyor 4 toward the processing apparatus 6. At the same time, the transfer unit 14 slides the second sliding member 14c in the opposite direction to the arrow B in FIG. 7 to move the second support 14e on the processing apparatus 6 side toward the conveyor 4. , The conveyor 4 is moved in the crossing direction. In addition, as described above, when the first sliding member 14b and the second sliding member 14c slide, they are placed on the first support 14d, the second support 14e, and the first support 14d. The substrates 2 do not interfere with each other. In this way, when the 1st support body 14d reaches the 2nd position which becomes the upper side of the processing apparatus 6, and the 2nd support body 14e will reach the 1st position which becomes the upper side of the conveyor 4, it will be transferred. The unit 14 stops sliding of the first sliding member 14b and the second sliding member 14c. At this time, the 1st support body 14d and the 2nd support body 14e are in the state as shown in FIG.

In this state, the lifting unit 10 lowers the transfer unit 14 so that the substrate 2 placed on the first support 14d in the second position is lowered. With the lowering of the board | substrate 2, the some pin 6a arrange | positioned at the upper surface of the processing apparatus 6 abuts the lower surface of the board | substrate 2, and the board | substrate 2 is supported by the pin 6a. . As a result, the transfer of the substrate 2 from the first support 14d to the processing apparatus 6 is completed, and the processing apparatus 6 performs the necessary processing on the substrate 2.

On the other hand, the second support body 14e, which is moved to the conveyor 4 side and is in the first position, is similar to the case of the first support body 14d, and the concave portion 4d between each drive unit 4b, and each air jet It is located above the concave portion 4e between the units 4c. Therefore, when the lifting unit 10 lowers the transfer unit 14, each second support 14e is accommodated in the corresponding recessed portions 4d and 4e. When the transfer unit 14 is in the lowest state, the second support body 14e is lower than the lower surface of the substrate 2 conveyed by the conveyor 4, as indicated by the broken line in FIG. Descends to). In this way, the second support 14e is accommodated in these concave portions 4d and 4e so that when the substrate 2 is conveyed by the conveyor 4, the substrate 2 interferes with the second support 14e. It can pass reliably above the 2nd support body 14e without receiving.

When the second support 14e is in the state shown by the broken line in FIG. 8, the processing of the substrate 2 in the processing apparatus 6 is completed and the processing by the processing apparatus 6 is completed. When the substrate (hereinafter referred to as an unprocessed substrate) 2 is not conveyed by the conveyor 4 to the upper side of the second support 14e, the conveyance of the unprocessed substrate 2 by the conveyor 4 is temporarily stopped. After that, the lifting unit 10 raises the transfer unit 14. Thereby, the 2nd support body 14e abuts on the lower surface of the unprocessed board | substrate 2, and lifts the unprocessed board | substrate 2 from the conveyor 4. As shown in FIG. At this time, on the processing apparatus 6 side, the 1st support body 14d raises with the raise of the transfer unit 14. As shown in FIG. The first support body 14d abuts on the bottom surface of the substrate (hereinafter referred to as a substrate after processing) 2 which has been processed in the processing apparatus 6, and the processed substrate 2 is pinned to the processing apparatus 6. It lifts from (6a).

When the unprocessed substrate 2 is placed on the upper surface of the second support body 14e and the transfer unit 14 is in the most elevated state, the second support body 14e is shown by a broken line in FIG. 2) is lifted from the conveyor 4 and ascends to a position higher than the upper surface of the substrate 2 conveyed by the conveyor 4 from behind. Therefore, when the board | substrate 2 is conveyed by the conveyor 4, the board | substrate 2 can pass under the 2nd support body 14e without being interrupted by the 2nd support body 14e.

In this way, after the transfer unit 14 is in the most elevated state, the transfer unit 14 slides the second sliding member 14c in the direction of the arrow B in FIG. 7 to move the second support 14e to the processing apparatus. Towards (6), it moves in the direction crossing the conveyor (4). At this time, the transfer unit 14 slides the first sliding member 14b in the opposite direction to the arrow B in FIG. 7 to move the first support 14d on the processing apparatus 6 side to the conveyor 4. Towards the end, the conveyor 4 is moved in the crossing direction.

Also in this case, when the first sliding member 14b and the second sliding member 14c slide, the processed substrate placed on the first support 14d, the second support 14e, and the first support 14d is finished. (2) and the unprocessed substrate 2 mounted on the second support 14e do not interfere with each other. In this way, when the 2nd support body 14e reaches the 2nd position which becomes the upper side of the processing apparatus 6, and the 1st support body 14d reaches the 1st position which becomes the upper side of the conveyor 4, a transfer unit ( 14 stops the sliding of the first sliding member 14b and the second sliding member 14c. At this time, the 1st support body 14d and the 2nd support body 14e will be in the state as shown in FIG.

As the lifting unit 10 lowers the transfer unit 14 in such a state, the unprocessed substrate 2 placed on the second support 14e is lowered. With the lowering of the unprocessed board | substrate 2, the some fin 6a arrange | positioned at the upper surface of the processing apparatus 6 abuts the lower surface of the unprocessed board | substrate 2, and the unprocessed board | substrate 2 is the pin 6a. Is supported. This completes the transfer of the unprocessed substrate 2 from the second support 14e to the processing apparatus 6, and the processing apparatus 6 performs the necessary processing on the unprocessed substrate 2.

On the other hand, by the lifting unit 10 lowering the transfer unit 14 on the conveyor 4 side, the processed substrate 2 placed on the first support 14d is lowered. With the lowering of the processed board | substrate 2, the lower surface of the processed board | substrate 2 is mounted on the conveyance roller 4a of each drive unit 4b of the conveyor 4, and the 1st support body 14d ), The transfer of the processed substrate 2 to the conveyor 4 is completed. And when the transfer unit 14 is in the state which descends most, the 1st support body 14d will be lower than the lower surface of the board | substrate 2 conveyed by the conveyor 4 as shown in FIG. 8 (falling position). Descends. Thereby, when the board | substrate 2 is conveyed by the conveyor 4, the board | substrate 2 can pass over the 1st support body 14d without being interrupted by the 1st support body 14d.

Then, by repeating the above-described procedure again, transfer of the unprocessed substrate 2 by the first support 14d and transfer of the substrate 2 processed by the first support 14d are alternately performed. In addition, transfer of the unprocessed board | substrate 2 by the 2nd support body 14e and the transfer of the processed board | substrate 2 by the 2nd support body 14e are performed according to this.

That is, when the transfer unit 14 is raised in the most descending state by the elevating unit 10 when the first support 14d is in the first position and the second support 14e is in the second position, The unprocessed substrate 2 in the conveyor 4 is received by the first support 14d, and the processed substrate 2 in the processing apparatus 6 is received by the second support 14e. When the transfer unit 14 is in the most elevated state, the transfer unit 14 slides the first sliding member 14b from the conveyor 4 side to the processing apparatus 6 side, and at the same time, the second sliding member 14c. ) Is slid from the processing apparatus 6 side to the conveyor 4 side. By sliding of the 1st sliding member 14b and the 2nd sliding member 14c, the 1st support body 14d on which the unprocessed board | substrate 2 was mounted is a 2nd at a 1st position in the direction which traverses the conveyor 4 While moving toward the position, the second support 14e on which the processed substrate 2 is placed moves from the second position toward the first position in the direction crossing the conveyor 4.

When the first support 14d reaches the second position and the second support 14e reaches the first position, the transfer unit 14 is lowered by the lifting unit 10. With the lowering of the moving unit 14, the unprocessed substrate 2 mounted on the first support 14d is received on the pin 6a of the processing apparatus 6, and at the same time, on the second support 14e. The processed substrate 2 placed is received on the conveying roller 4a of the conveyor 4. Thereafter, the processing apparatus 6 performs necessary processing on the unprocessed substrate 2, while the processed substrate 2 received on the conveyor 4 is conveyed to the downstream side by the conveyor 4.

On the other hand, when the transfer unit 14 is lifted by the lifting unit 10 in the most lowered state when the second support 14e is in the first position and the first support 14d is in the second position, The unprocessed substrate 2 in the conveyor 4 is received by the second support 14e, and the processed substrate 2 in the processing apparatus 6 is received by the first support 14d. Then, when the transfer unit 14 is in the most elevated state, the transfer unit 14 slides the second sliding member 14c from the conveyor 4 side to the processing apparatus 6 side, and at the same time, the first sliding member 14b. ) Is slid from the processing apparatus 6 side to the conveyor 4 side. By the sliding of the 1st sliding member 14b and the 2nd sliding member 14c, the 2nd support body 14e which mounted the unprocessed board | substrate 2 crosses the conveyor 4, and is 2nd in a 1st position. While moving toward the position, the first support 14d on which the processed substrate 2 is placed moves from the second position toward the first position in the direction crossing the conveyor 4.

When the second support 14e reaches the second position and the first support 14d reaches the first position, the transfer unit 14 is lowered by the lifting unit 10. With the lowering of the moving unit 14, the unprocessed substrate 2 mounted on the second support 14e is received on the pins 6a of the processing apparatus 6 and at the first support 14d. The processed substrate 2 placed is received on the conveying roller 4a of the conveyor 4. Thereafter, the processing apparatus 6 performs necessary processing on the unprocessed substrate 2, while the processed substrate 2 received on the conveyor 4 is conveyed to the downstream side by the conveyor 4.

The procedure in the case where the board | substrate 2 is conveyed continuously by the conveyor 4 and the process with respect to the board | substrate 2 is performed continuously by the processing apparatus 6 is as above. However, when the conveyance of the board | substrate 2 by the conveyor 4 is not performed continuously, or when conveying the board | substrate 2 to the downstream side with the conveyor 4 as it is, without performing the process by the processing apparatus 6, There may also be. In this case, since the transfer unit 14 is placed in the standby state, both the first sliding member 14b and the second sliding member 14c of the transfer unit 14 slide toward the conveyor 4 side, and the first support body Both 14d and the second support 14e are in the first position. And the board | substrate 2 by which the transfer unit 14 is the lowest state by the lifting unit 10, and both the 1st support body 14d and the 2nd support body 14e are conveyed by the conveyor 4 is carried out. It is lower than the bottom of. Thereby, when the board | substrate 2 is conveyed by the conveyor 4, the board | substrate 2 is not interrupted by the 1st support body 14d and the 2nd support body 14e, and the 1st support body 14d and the 2nd It can pass over the support 14e.

In addition, when transfer of the board | substrate 2 between the conveyor 4 and the processing apparatus 6 is resumed from such a standby state, it is the same procedure as the transfer of the board | substrate 2 by the 1st support body 14d mentioned above. As a result, transfer of the substrate 2 from the conveyor 4 to the processing apparatus 6 is started. After that, transfer of the substrate 2 can be carried out alternately by the second support 14e and the first support 14d as described above.

In the above, the transfer of the board | substrate 2 by the transfer unit 14 was demonstrated. As described above, since the transfer unit 16 is configured similarly to the transfer unit 14, transfer of the substrate 2 between the conveyor 4 and the processing apparatus 8 by the transfer unit 16, and transfer unit The transition to the standby state of (16) is also performed in the same manner as the transfer unit 14 described above.

As described above, the first substrate 14d and the second support 14e are used to move the unprocessed substrate 2 from the conveyor 4 to the processing apparatus 6 while using either of the first and second supports 14e. Any one of the support body 14d and the second support body 14e can be used to move the processed substrate 2 from the processing apparatus 6 to the conveyor 4. Therefore, the movement of the board | substrate 2 between the conveyor 4 and the processing apparatus 6 can be performed efficiently.

In the board | substrate conveying apparatus of this embodiment, the transfer unit 14 is arrange | positioned above the conveyor 4, and this transfer unit 14 is elevated by the elevating unit 10 arrange | positioned at the side outer side of the conveyor 4. As shown in FIG. . Moreover, the 1st support body 14d and the 2nd support body 14e of the transfer unit 14 can move between the 1st position which becomes the upper side of the conveyor 4, and the 2nd position on the processing apparatus 6 side. As a result, if only the space for arranging the elevating unit 10 outside the movement trajectory of the substrate 2 conveyed by the conveyor 4 is secured, an installation space such as a robot arm or a movement space of the robot arm can be obtained. There is no need to secure it. As a result, the board | substrate 2 can be transferred with less space compared with the conventional board | substrate conveyance apparatus.

In addition, when the lifting unit 10 lowers the transfer unit 14 most when the 1st support body 14d or the 2nd support body 14e is in a 1st position, the board | substrate conveyed by the conveyor 4 ( 2) may pass over the first support 14d or the second support 14e without interfering with the first support 14d or the second support 14e. On the other hand, when the lifting unit 10 raises the transfer unit 14 most when the 1st support body 14d or the 2nd support body 14e is in a 1st position, the board | substrate conveyed by the conveyor 4 ( 2) may pass below the first support 14d or the second support 14e without being interfered with the first support 14d or the second support 14e. Therefore, when the transfer unit 14 is in the lowest state or the highest state, the substrate 2 conveyed from the back while the transfer of the substrate 2 is carried out between the conveyor 4 and the processing apparatus 6. ) Can be transported downstream from the transfer unit 14. As a result, the conveyance of the board | substrate 2 by the conveyor 4 can be performed more efficiently.

In addition, the above effects can be obtained similarly in the transfer unit 16 configured in the same manner as the transfer unit 14.

As mentioned above, although the board | substrate conveyance apparatus of one Embodiment of this invention is demonstrated, this invention is not limited to the said embodiment.

In the said embodiment, the transfer unit 14 is connected to the lifting unit 10 arrange | positioned at the side outer side of the conveyor 4, and the lifting unit 10 raises and lowers the transfer unit 14. However, the arrangement of the lifting unit 10 is not limited to the side outside of the conveyor 4. For example, the transfer unit 14 may be elevated by the lifting unit 10 disposed above the conveyor 4 by hanging from the ceiling. When the elevating unit 10 is disposed in this manner, a space for installing the elevating unit 10 on the bottom surface is also unnecessary. Such a configuration is similarly possible in the transfer unit 16 and the lifting unit 12.

Moreover, in the said embodiment, the board | substrate 2 is non-contactedly supported by the air which blows toward the lower surface of the board | substrate 2 from the air blowing unit 4c, and the conveyor 4 which contacts the lower surface of the board | substrate 2 is carried out. Is conveyed by the rotation of the conveyance roller 4a. However, the conveying method of the board | substrate 2 by the conveyor 4 is not limited to this. For example, the air blowing unit 4c may be omitted, and the substrate 2 may be conveyed only by the conveying roller 4a.

In addition, in the said embodiment, although two sets of support bodies which are the 1st support body 14d and the 2nd support body 14e were provided in the transfer unit 14, you may provide only one of them. In this case, by moving two sets of support alternately, the board | substrate 2 cannot be transferred efficiently, but the effect that the space for transferring the board | substrate 2 can be made small can be acquired similarly to the said embodiment.

In addition, in the said embodiment, the board | substrate 2 is efficiently transferred by moving the 1st support body 14d and the 2nd support body 14e alternately. However, according to the conveyance form of the board | substrate 2 by the conveyor 4, you may make it the 1st support body 14d and the 2nd support body 14e move to the same direction. Further, by appropriately adjusting the heights of the conveyor 4 and the processing apparatus 6 or 8 and the heights of the first support 14d and the second support 14e, the first support 14d and the second support 14e are adjusted. It is possible to appropriately change the order of movement.

In addition, the number of the processing apparatus, support body, drive unit, air blowing unit, etc. in the said embodiment can change suitably as showing an example.

As described above, the present invention can be variously modified. Such modifications do not depart from the main spirit and scope of the invention.

Claims (3)

 In the substrate conveying apparatus for conveying the board | substrate conveyed by the conveyor to the processing apparatus arrange | positioned along the said conveyor, A plurality of supports that are laid out in a direction crossing the conveyor so as to mount the substrates on the lower side thereof are disposed above the conveyor, and are disposed between the conveyor and the support. Transfer material which can move the said support body in the direction which traverses the conveyor between a 1st position for carrying out the transfer, and a 2nd position for carrying out the said board | substrate between the said processing apparatus and the said support body. Means, The predetermined lowered position lower than the lower surface of the substrate conveyed by the conveyor when the support is in the first position and is disposed outside the movement trajectory of the substrate conveyed by the conveyor and connected to the transfer means. Lifting means for lifting and lowering the transfer means so that the support is raised to a predetermined lift position higher than the upper surface of the substrate conveyed by the conveyor while the support is lowered until Substrate conveying apparatus comprising a. The method of claim 1, The support bodies each have a rod shape, and one end is held and held by the transfer means. The said conveyance apparatus is a board | substrate conveying apparatus characterized by the recessed part which accommodates each of the said support body lowered by the said lifting means in the direction crossing the said conveyor. The method of claim 1, The support is A plurality of first supports provided such that the substrate is mounted; It is located above the upper surface of the substrate placed on the first support, and is a second support capable of placing a substrate separate from the substrate placed on the first support, The transfer means is a substrate transfer device, characterized in that the first support and the second support are independently movable in the direction crossing the conveyor.

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