CN101512747B - Substrate conveying apparatus, and substrate conveying method - Google Patents

Substrate conveying apparatus, and substrate conveying method Download PDF

Info

Publication number
CN101512747B
CN101512747B CN2007800331888A CN200780033188A CN101512747B CN 101512747 B CN101512747 B CN 101512747B CN 2007800331888 A CN2007800331888 A CN 2007800331888A CN 200780033188 A CN200780033188 A CN 200780033188A CN 101512747 B CN101512747 B CN 101512747B
Authority
CN
China
Prior art keywords
conveyer
branch
substrate
glass plate
mentioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2007800331888A
Other languages
Chinese (zh)
Other versions
CN101512747A (en
Inventor
平田贤辅
水野智夫
村山晋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Publication of CN101512747A publication Critical patent/CN101512747A/en
Application granted granted Critical
Publication of CN101512747B publication Critical patent/CN101512747B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Engineering (AREA)
  • Relays Between Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Attitude Control For Articles On Conveyors (AREA)

Abstract

A substrate transfer apparatus is provided with a main conveyer for individually transferring substrates; a branched conveyer horizontally branched from the main conveyer; a supporting section for supporting the substrates (P) on the main conveyer and the branched conveyer by floating the substrates; and a substrate receiving and transferring section for receiving and transferring the substrates, which are being floated and supported by the supporting section, between the main conveyer and the branched conveyer without changing the posture. A speed of receiving and transferring the substrates between the main conveyer and the branched conveyer is improved by using the substrate transfer apparatus.

Description

Base-board conveying device and substrate transfer method
Technical field
The present invention relates to a kind ofly be used for individual and transport the for example base-board conveying device and the substrate transfer method of the substrate of semiconductor wafer and glass for flat panel display plate etc.
The present invention is based on the spy who filed an application on September 11st, 2006 and be willing to 2006-246134 number and advocate priority, and quote its content at this in Japan.
Background technology
In the base-board conveying device of the factory that is arranged on factory that makes semiconductor device and the flat-panel monitor of making liquid-crystal apparatus, PDP, EL device etc. etc., transport the substrate of semiconductor wafer and glass plate etc. and use loading bin or mechanical arm etc. at the various processing unit of film forming device, Etaching device, experimental rig etc. with transport the handing-over of carrying out substrate between the pathway.In such base-board conveying device, substrate generally is to transport under the state in being accommodated in the box that can take in many substrates.
So, in recent years along with big pictureization of the flat-panel monitor of LCD TV etc. etc. and substrate is maximized.Therefore, make that the box of taking in substrate etc. also maximizes, weightization, travelling speed is reduced, its result for example causes the increase of product inventory etc., is difficult to transport expeditiously.
Therefore, individual that many transports substrate at high speed transports receive publicity (with reference to patent documentation 1).
Patent documentation 1: the spy opens flat 9-58844 communique
But when individual transported substrate, comparing when transporting by box had increased the number of individuals that transports.Therefore, in order to realize and must transport substrate more at high speed with identical or processing speed in the past in the past.
Particularly main conveyer and from this main conveyer handing-over speed of the substrate between branch's conveyer of branch flatly, transport when realizing in the high speed that makes substrate and to become extremely important.Therefore, a kind of technology that makes the handing-over speed lifting of the substrate between main conveyer and the branch's conveyer of expectation.
Summary of the invention
The present invention puts in view of the above-mentioned problems and proposes, and purpose is to make the handing-over speed of the substrate between main conveyer and the branch's conveyer to promote.
In order to reach above-mentioned purpose, being characterized as of base-board conveying device of the present invention has: main conveyer, and individual transports substrate; Branch's conveyer is from above-mentioned main conveyer branch flatly; Support floats aforesaid substrate on the above-mentioned main conveyer and on the above-mentioned branch conveyer and is supporting this substrate; Substrate delivery/reception portion does not make attitude join the aforesaid substrate that is floated supporting by this support between above-mentioned main conveyer and above-mentioned branch conveyer with changing.
According to this base-board conveying device, the substrate portion of being supported floats and is bearing on the main conveyer and on branch's conveyer, and under this state, does not make attitude join substrate with changing.
Therefore, substrate is joined being equal under the state that does not have frictional resistance between main conveyer and branch's conveyer.
In addition, in base-board conveying device of the present invention, can adopt following formation: the aforesaid substrate junction has the parts of controlling, and this is controlled parts and controls the outer rim of aforesaid substrate and can move to the carriage direction of the aforesaid substrate of above-mentioned branch conveyer.
In addition, in base-board conveying device of the present invention, can adopt following formation: above-mentioned support uses compressed air that aforesaid substrate is floated and supporting substrates.
Then; Being characterized as of substrate transfer method of the present invention; Floated and be supported on above-mentioned main conveyer by individual substrate that transports of main conveyer, the aforesaid substrate that is supported floating on the above-mentioned main conveyer is kept the state that floats and be supported and is not made attitude be handover to respect to above-mentioned main conveyer flatly on branch's conveyer of branch with changing.
According to this substrate transfer method, substrate is floated and is supported on main conveyer, keeps this state and attitude is handover on branch's conveyer with changing.
Therefore, substrate is handover on branch's conveyer from main conveyer being equal under the state that does not have frictional resistance.
Then; Being characterized as of substrate transfer method of the present invention; The substrate that is supported flatly floating on branch's conveyer of branch with respect to main conveyer is kept the state that floats and be supported and attitude is handover on the above-mentioned main conveyer with changing.
According to this substrate transfer method, substrate is floated and is supported on branch's conveyer, keeps this state and attitude is handover on the main conveyer with changing.
Therefore, substrate is handover on the main conveyer from branch's conveyer being equal under the state that does not have frictional resistance.
According to the present invention, substrate is joined being equal under the state that does not have frictional resistance between main conveyer and branch's conveyer.Therefore, even when high speed handing-over speed, can not produce the damage of impacting the substrate that causes owing to applying yet.
Therefore, according to the present invention, the handing-over speed of the substrate between main conveyer and the branch's conveyer is promoted.
Description of drawings
Fig. 1 is the sketch map of the base-board conveying device of an expression execution mode of the present invention.
Fig. 2 is the figure of the detailed formation of the main conveyer of expression.
Fig. 3 is the figure of formation of the plate junction of expression branch conveyer.
Description of reference numerals
P glass plate (substrate)
1 base-board conveying device
10 main conveyers
12 air float unit (support)
15 delivery section
20 branch's conveyers
40 plate junctions (substrate delivery/reception portion)
44 control parts
Embodiment
Below, with reference to an execution mode of description of drawings base-board conveying device of the present invention and substrate transfer method.In addition, in the following accompanying drawing, for the size that can discern the engineer's scale of each parts has been carried out change aptly in order to make each parts.
Fig. 1 is the sketch map of the base-board conveying device 1 of this execution mode of expression.
Base-board conveying device 1 be in the factory of the flat-panel monitor of making liquid-crystal apparatus, PDP, EL device etc. many individual transport the device of glass plate P, have: main conveyer 10, with respect to a plurality of branches conveyer 20 of main conveyer 10 branch in horizontal plane, blanket the not shown control part of controlling these etc.
Main conveyer 10 be flatly carry put glass plate P and under certain speed with it to the device that transports along its surperficial direction, comprise utilize air that glass plate P is floated and non-contactly the air of supporting glass plate float (with reference to Fig. 2 and Fig. 3) such as unit 12 (support) and delivery section 15.That is, in this execution mode, the function of the support among the present invention is assembled to be become owner of in the part of conveyer 10.
Main conveyer 10 by the straight wire be configured on the floor in the clean room of factory.And, on a plurality of positions of main conveyer 10 with respect to main conveyer 10 approximate vertical and flatly link the end that branch's conveyer 20 is arranged.
Branch's conveyer 20 be with main conveyer 10 identical ground flatly carry put glass plate P and under certain speed with it to the device that transports along its surperficial direction, comprise that air floats unit 12 and delivery section 15 etc.Promptly in this execution mode, the function of the supporting device among the present invention also is assembled in the part of branch's conveyer 10.
And then; Branch's conveyer 20 is handover to branch's conveyer 20 for the glass plate P that will on main conveyer 10, transport; Or the glass plate P that will on branch's conveyer 20, transport on the contrary is handover to main conveyer 10, and has the plate junction 40 (substrate delivery/reception portion) of between main conveyer 10 and branch's conveyer 20, carrying out the handing-over of glass plate P.
Configuration/binding has various processing unit such as film forming device 5, Etaching device 6, experimental rig 7 on another of branch's conveyer 20 is distolateral.On various processing unit such as film forming device 5, Etaching device 6, experimental rig 7, dispose two branch's conveyers 20 respectively abreast.
For example; In the branch's conveyer 21,22 (branch's conveyer 20) that links with film forming device 5; Branch's conveyer 21 is to be used for glass plate P is transported into to the conveyer of film forming device 5, and branch's conveyer 22 is to be used for conveyer that glass plate P is transported from film forming device 5.
Equally; Branch's conveyer 23,25 (branch's conveyer 20) is to be used for glass plate P is transported into to the conveyer of Etaching device 6, experimental rig 7, and branch's conveyer 24,26 (branch's conveyer 20) is to be used for conveyer that glass plate P is transported from Etaching device 6, experimental rig 7.
In addition, glass plate P is transported into branch's conveyer 21,23,25 to the various processing unit is configured in main conveyer 10 with respect to branch's conveyer that glass plate P is transported 22,24,26 from various processing unit upstream side.
Fig. 2 is the figure of the detailed formation of the main conveyer 10 of expression.
Main conveyer 10 is glass plate P to be floated and with its device that direction is transported on horizontal direction by air as stated, comprises that a plurality of air float unit 12 and delivery section 15 etc.
It is the parts with plane upper surface that air floats unit 12, and surface (carrying the face of putting) upward is provided with the compressed-air actuated a plurality of fluid ejection ports 13 of ejection with the density of approximate equality above that.Air floats unit 12 and is formed and overlooks rectangular-shapedly, and is provided with its length direction mode consistent with the carriage direction of glass plate P.In addition, it is narrow slightly that air floats the Width (direction vertical with carriage direction) that the horizontal direction (Width) of unit 12 forms than glass plate P.
And compressed air is supplied to air by illustrated compressed air feedway never and floats unit 12, thereby makes compressed air from each fluid ejection port 13 ejection.Thereby, make to carry to put by compressed air and float that glass plate P on the unit 12 floats and supporting glass plate P non-contactly at air from 13 ejections of each fluid ejection port.
Delivery section 15 has a plurality of rollers 16 and is with 17 with being installed in around these a plurality of rollers 16.In addition, on 17 surface along with 17 length direction (carriage direction of main conveyer 10) with a plurality of projections 18 of being arranged at intervals with of equalization.
Delivery section 15 is configured in the both sides that air floats unit 12 along the carriage direction of glass plate P.And the configuration space (distance) of a pair of delivery section 15 is roughly the same with the width of glass plate P.
The upper end of each roller 16 of delivery section 15 disposes with the mode that is located in the same horizontal plane, and is configured to be positioned at the position that the upper surface that floats unit 12 than air leans on the top slightly thereby be arranged on 17 lip-deep projection 18.And projection 18 is put outer rim (both end sides of the Width) butt that floats the lower surface of the glass plate P on the unit 12 at air with carrying.
Each roller 16 of delivery section 15 is by not shown motor etc. and rotate to same direction with same rotary speed.Thereby, can float unit 12 supporting glass plate P and can float unit 12 along air by delivery section 15 and transport glass plate P non-contactly by air.
In addition, delivery section 15 constitutes and can move to above-below direction by not shown lowering or hoisting gear.
When delivery section 15 was risen, each projection 18 was positioned at the position that the upper surface that floats unit 12 than air leans on the top slightly.At this moment, the lower surface butt of the projection 18 of delivery section 15 and glass plate P and can transport glass plate P.
On the other hand, when delivery section 15 was descended, each projection 18 is positioned at than air floated the position of the upper surface of unit 12 by the below.At this moment, delivery section 15 (each projection 18) is separated from glass plate P, and glass plate P is in and is bearing in air by noncontact fully and floats the state on the unit 12.Therefore, only otherwise glass plate P is applied external force, glass plate P just can float under the state on the unit 12 and be held stopping at air.
And main conveyer 10 constitutes a plurality of air of binding and floats unit 12 and delivery section 15.That is, make each air float unit 12 and each delivery section 15 reciprocally near and dispose side by side along horizontal direction.At this moment, each air upper surface (carry put face) of floating unit 12 is adjusted into and is located in the same horizontal plane.
Fig. 3 is the figure of the formation of expression branch conveyer 20.
As shown in the drawing, branch's conveyer 20 has air with main conveyer 10 identically and floats unit 12 and delivery section 15, and as stated, has the plate junction 40 of handing-over glass plate P between main conveyer 10 and branch's conveyer 20.
Plate junction 40 comprise a pair of linear actuator 42 and by each linear actuator 42 link drive and move back and forth control parts 44 etc.A pair of linear actuator 42 is configured in branch's conveyer 20 abreast along delivery section 15 air floats between unit 12 and the delivery section 15.In addition; Plate junction 40 is respectively controlled upper surface that parts 44 can float unit 12 at the air with branch conveyer 20 and is roughly in the horizontal plane of sustained height from an end of branch's conveyer 20 and moves the amount with the same length of Width of glass plate P to the carriage direction (Width of glass plate P) of the glass plate P of other end lateral branching conveyer 20.
And, floating in the length direction (carriage direction of glass plate P) of unit 12 at the air of branch's conveyer 20, a pair of parts 44 of controlling are controlled as and always are positioned at same position.
Control parts 44 and constitute, can control the peripheral edge portion of glass plate P, particularly can control near one side of Width of glass plate P.Can keep the side surface of glass plate P and control glass plate P by absorption, also can control glass plate P by the upper surface of clamping glass plate P and lower surface.
According to such formation; Plate junction 40; By a pair of outer rim that parts 44 are controlled glass plate P of controlling, and by near moving back and forth and can between main conveyer 10 and branch's conveyer 20, not make attitude join glass plate P with a changing end of branch's conveyer 20.
So, in this execution mode, substrate delivery/reception portion of the present invention (plate junction 40) is assembled into to branch's conveyer 20.
The action (substrate transfer method) of base-board conveying device 1 then, is described.
The glass plate P that explanation will be transported on main conveyer 10 is handover to the situation (action of branch's conveyer 21,23,25) on branch's conveyer 20.
At first, each air that compressed air is supplied to main conveyer 10 and branch's conveyer 20 floats unit 12, makes compressed air from each fluid ejection port 13 ejection.In addition, drive delivery section 15, make each roller 16 with certain rotary speed rotation.At this moment, by not shown lowering or hoisting gear each delivery section 15 is risen.
And at the upstream side of main conveyer 10, many ground carry puts glass plate P, thereby glass plate P is transported by individual.In addition, glass plate P is for example so that the corresponding to mode of its length direction and carriage direction is carried puts on main conveyer 10.
Moved to the component with branch conveyer 20 if carry the glass plate P put on main conveyer 10, then plate junction 40 control the end that parts 44 move to branch's conveyer 20, control the outer rim of the glass plate P on the main conveyer 10.Meanwhile, the delivery section 15 of main conveyer 10 and branch's conveyer 20 descends by not shown lowering or hoisting gear.
And, makes and control parts 44 and move, and glass plate P is transported on branch's conveyer 20 from main conveyer 10 along branch's conveyer 20.
If glass plate P is transported on branch's conveyer 20, the delivery section 15 of then main conveyer 10 and branch's conveyer 20 rises by not shown lowering or hoisting gear once more.Meanwhile, be disengaged, and glass plate P is transported to the direction of separating from main conveyer 10 by branch's conveyer 20 based on the controlling of glass plate P of controlling parts 44 of plate junction 40.
And glass plate P is transported by branch's conveyer 20 and is handover in the various processing unit such as film forming device 5, Etaching device 6, experimental rig 7.
Be handover to the glass plate P in each processing unit (film forming device 5, Etaching device 6, experimental rig 7 etc.), in various processing unit, implement to be transported to the outside of each processing unit after the set processing.
So, be handover to 20 last times of branch's conveyer at the glass plate P that will on main conveyer, be transported, glass plate P is floated on main conveyer 10 and is supported, and keeps this state and attitude is handover to glass plate P on branch's conveyer 20 with changing.
Therefore, glass plate P is handover on branch's conveyer 20 from main conveyer 10 being equal under the state that does not have frictional resistance.
Then, the situation (action of branch's conveyer 22,24,26) that glass plate P is handover to main conveyer 10 from branch's conveyer 20 is described.
The action that glass plate P is handover to main conveyer 10 from branch's conveyer 20 is the action that action that glass plate P is handover to branch's conveyer 20 from main conveyer 10 is roughly reversed.
At first, each air that compressed air is supplied to main conveyer 10 and branch's conveyer 20 floats unit 12, makes compressed air from each fluid ejection port 13 ejection.In addition, drive delivery section 15, each roller 16 is rotated under certain rotary speed.At this moment, by not shown lowering or hoisting gear delivery section 15 is risen.
Then, glass plate P is handover on branch's conveyer 20 by the various processing unit from film forming device 5, Etaching device 6, experimental rig 7 etc.Glass plate P is transported by branch's conveyer 20, moves to the end of branch's conveyer 20.Meanwhile, the parts 44 of controlling of plate junction 40 are controlled near the outer rim of the glass plate P on branch's conveyer 20 (side surface of carriage direction opposition side).
Then, move an end of controlling parts 44 and moving to branch's conveyer 20, and glass plate P is transported on the main conveyer 10 from branch's conveyer 20 along branch's conveyer 20.
And, remove controlling by the glass plate P that controls parts 44.Meanwhile, the delivery section 15 of main conveyer 10 and branch's conveyer 20 rises by not shown lowering or hoisting gear.
Thus, the Width two ends butt of the projection of the delivery section 15 of main conveyer 10 18 and the lower surface of glass plate P, glass plate P are handover on the main conveyer 10 and are transported by individual.
So, glass plate P is being handover to 20 last times of main conveyer from branch's conveyer 20, glass plate P is floated on branch's conveyer 20 and is supported, and keeps this state and attitude is handover to glass plate P on the main conveyer 10 with changing.
Therefore, glass plate P is handover on the main conveyer 10 from branch's conveyer 20 being equal under the state that does not have frictional resistance.
That kind as described above, the base-board conveying device 1 of this execution mode has: main conveyer 10, individual transports glass plate P; Branch's conveyer 20 is with respect to this main conveyer 10 branch flatly; Air floats unit 12, supports this glass plate P on the main conveyer 10 and on branch's conveyer 20 glass plate P being floated; Plate junction 40 does not make attitude join between main conveyer 10 and branch's conveyer 20 with changing and is floated the glass plate P that unit 12 floats supporting by this air.
According to the base-board conveying device 1 of this such execution mode, glass plate P is joined being equal under the state that does not have frictional resistance between main conveyer 10 and branch's conveyer 20.Therefore, though at high speed during handing-over speed, can not produce by the damage that applies the glass plate P that impacts and cause yet.
Therefore, according to the base-board conveying device 1 of this execution mode, the handing-over speed of the glass plate P between main conveyer 10 and the branch's conveyer 20 is promoted.
In addition, many shapes of each component parts shown in the above-mentioned execution mode or combination or sequence of movement etc. are examples, in the scope that does not break away from aim of the present invention, can carry out all changes based on designing requirement etc.
For example, in the above-described embodiment, explained and used compressed air that glass plate P floated and the situation of supporting glass plate P, but be not limited thereto.For example, also can be applied on the glass plate P and glass plate P is floated and supporting glass plate P by the vibration wave that will in the space, propagate.
In addition, in the above-described embodiment, delivery section 15 constitutes, and descends by not shown lowering or hoisting gear, thereby between main conveyer 10 and branch's conveyer 20, during handing-over glass plate P, can prevent that glass plate P from contacting with delivery section 15.But the present invention is not limited thereto, and also can replace delivery section 15 to descend and floats unit 12 by air and rise and prevent that glass plate P and delivery section 15 from coming in contact.At this moment, the air of conveyer of the handing-over side upper surface that floats unit 12 be positioned at rise after the air upper surface that floats unit 12 be position with one side.
In the above-described embodiment, explained that individual transports the situation of glass plate P, but the object that transports is not limited thereto.For example, if thin plate-shaped member such as semi-simple body wafer also can transport.
In the above-described embodiment, the situation of the various processing unit of another distolateral configuration/binding film forming device 5 at branch's conveyer 20, Etaching device 6, experimental rig 7 etc. has been described, but the configuration of various devices is not limited thereto.For example, also can be the situation that also links branch's conveyer 20 in the downstream of branch's conveyer 20 (another is distolateral).
In addition, except the various processing unit of film forming device 5, Etaching device 6, experimental rig 7 etc., also can dispose the accumulator of the substrate of temporarily preserving a plurality of glass plate P etc.
In above-mentioned execution mode; Explained and on the various processing unit of film forming device 5, Etaching device 6, experimental rig 7 etc., disposed the situation that is transported into branch's conveyer 21,23,25 of glass plate P and transports branch's conveyer 22,24,26 of glass plate P, but the configuration of said apparatus is not limited thereto.For example, also can be the situation that is transported into/transports that branch's conveyer 20 carries out glass plate P.
Utilize possibility on the industry
According to the present invention, for example when individual transports the substrate of semiconductor wafer and glass for flat panel display plate etc., substrate is joined between main conveyer and branch's conveyer being equal under the state that does not have frictional resistance.Therefore, though at high speed during handing-over speed, can not produce by the damage that applies the substrate that impacts and cause yet.Therefore, the handing-over speed of the substrate between main conveyer and the branch's conveyer is promoted.

Claims (4)

1. base-board conveying device has:
Individual transport substrate main conveyer,
From above-mentioned main conveyer flatly branch branch's conveyer,
Support on the above-mentioned main conveyer and on the above-mentioned branch conveyer aforesaid substrate being floated this substrate support,
Between above-mentioned main conveyer and above-mentioned branch conveyer, do not make attitude join the substrate delivery/reception portion of floating the aforesaid substrate of supporting by this support with changing,
The aforesaid substrate junction has the parts of controlling, and this is controlled the outer rim of the only side that parts can control aforesaid substrate and moves to the carriage direction of the aforesaid substrate of above-mentioned branch conveyer.
2. base-board conveying device as claimed in claim 1, above-mentioned support uses compressed air and aforesaid substrate is floated and supporting substrates.
3. the substrate transfer method of a base-board conveying device according to claim 1 is floated and is supported by individual aforesaid substrate that transports of above-mentioned main conveyer quilt on above-mentioned main conveyer,
Outer rim through making an only side of controlling aforesaid substrate above-mentioned controlled parts and upwards states the carriage direction of the aforesaid substrate of branch's conveyer and move, and the aforesaid substrate of the state that will be supported floating on the above-mentioned main conveyer is kept the state that floats and be supported and do not made attitude be handover to from above-mentioned main conveyer flatly on the above-mentioned branch conveyer of branch with changing.
4. the substrate transfer method of a base-board conveying device according to claim 1, aforesaid substrate is flatly being floated on the above-mentioned branch conveyer of branch with respect to above-mentioned main conveyer and is being supported,
Outer rim through making an only side of controlling aforesaid substrate above-mentioned controlled parts and upwards states the carriage direction of the aforesaid substrate of branch's conveyer and move, and will float the state that is supported attitude is handover on the above-mentioned main conveyer with changing keeping for the aforesaid substrate of float state on the above-mentioned branch conveyer.
CN2007800331888A 2006-09-11 2007-02-15 Substrate conveying apparatus, and substrate conveying method Active CN101512747B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006246134A JP5028919B2 (en) 2006-09-11 2006-09-11 Substrate transport apparatus and substrate transport method
JP246134/2006 2006-09-11
PCT/JP2007/052670 WO2008032456A1 (en) 2006-09-11 2007-02-15 Substrate transfer apparatus and substrate transfer method

Publications (2)

Publication Number Publication Date
CN101512747A CN101512747A (en) 2009-08-19
CN101512747B true CN101512747B (en) 2012-04-25

Family

ID=39183525

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007800331888A Active CN101512747B (en) 2006-09-11 2007-02-15 Substrate conveying apparatus, and substrate conveying method

Country Status (5)

Country Link
JP (1) JP5028919B2 (en)
KR (1) KR20090039792A (en)
CN (1) CN101512747B (en)
TW (1) TW200812889A (en)
WO (1) WO2008032456A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100978852B1 (en) * 2008-06-12 2010-08-31 세메스 주식회사 Method and apparatus for transferring substrates, and equipment for processing substrate having the apparatus
CN103158899A (en) * 2011-12-15 2013-06-19 苏州澳昆智能机器人技术有限公司 Packing case turning positioning mechanism of packing case conveyor line
CN104245547B (en) * 2012-04-26 2016-07-27 株式会社Ihi Conveyer device
JP5915358B2 (en) * 2012-04-26 2016-05-11 株式会社Ihi Transport device
JP6106988B2 (en) * 2012-08-23 2017-04-05 株式会社Ihi Transport device
CN104779189B (en) * 2014-01-13 2017-09-01 上海和辉光电有限公司 Glass panel carrying device and transport method after cutting
CN107316834A (en) * 2017-07-31 2017-11-03 武汉华星光电半导体显示技术有限公司 Base plate transfer device
EP3514825B1 (en) * 2018-01-22 2023-11-29 Meyer Burger GmbH Wafer sorting
CN110282433A (en) * 2019-06-14 2019-09-27 中国建材国际工程集团有限公司 A kind of glass Automatic Alignment System and method based on interruption
CN112536786B (en) * 2020-11-17 2022-01-28 宁波金凤焊割机械制造有限公司 Metal slat spouts a yard marking off system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4161273B2 (en) * 2003-12-16 2008-10-08 株式会社ダイフク Transport device

Also Published As

Publication number Publication date
CN101512747A (en) 2009-08-19
JP5028919B2 (en) 2012-09-19
KR20090039792A (en) 2009-04-22
JP2008066675A (en) 2008-03-21
TW200812889A (en) 2008-03-16
TWI329607B (en) 2010-09-01
WO2008032456A1 (en) 2008-03-20

Similar Documents

Publication Publication Date Title
CN101512747B (en) Substrate conveying apparatus, and substrate conveying method
CN101512748B (en) Substrate conveying apparatus, and substrate conveying method
JP6039260B2 (en) Substrate transfer system
KR100861175B1 (en) Roller unit for conveying sheet material and conveyer for sheet material
KR101577481B1 (en) Substrate transfer apparatus and substrate transfer method
KR20130036307A (en) Plate-shaped member transfer facility
TW201837000A (en) Substrate processing device
TW200918428A (en) Conveyance direction turnabout apparatus and levitation conveyance system
JP7363959B2 (en) Goods transfer equipment
KR20090060321A (en) Substrate transfer apparatus
JP2010143733A (en) Substrate handling system and substrate handling method
JP2006176255A (en) Conveying system
JP2006327819A (en) Transfer device and transfer method for glass pane
CN216511427U (en) Glass unloading system and toughened glass production line
CN216738071U (en) Scribing device
JP3976170B2 (en) Thin article positioning device
JP4216029B2 (en) Thin plate conveyor
JP4631433B2 (en) Substrate transport apparatus and substrate transport method
KR101149767B1 (en) Apparatus and method for manufacturing plate
KR100626555B1 (en) Device for Cutting of nonmetal
JP2003292153A (en) Sheet-carrying apparatus of glass substrate
JP5003107B2 (en) Glass plate conveyor
JP2006256846A (en) Substrate receiving device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant