JP2007186321A - Conveying system for plate material - Google Patents

Conveying system for plate material Download PDF

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JP2007186321A
JP2007186321A JP2006007409A JP2006007409A JP2007186321A JP 2007186321 A JP2007186321 A JP 2007186321A JP 2006007409 A JP2006007409 A JP 2006007409A JP 2006007409 A JP2006007409 A JP 2006007409A JP 2007186321 A JP2007186321 A JP 2007186321A
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conveyor
load port
plate material
arm
workpiece
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JP2006007409A
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Japanese (ja)
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Hiroshi Fukazawa
博 深澤
Daigoro Nakamura
大五郎 中村
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Murata Machinery Ltd
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Murata Machinery Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To efficiently exchange plate materials between a load port and conveyors. <P>SOLUTION: Workpieces 14a, 14b are exchanged between the load port 4 in a processing device side and the vertical two stages of conveyors 22a, 22b in a conveying system side. The workpiece 14a is scooped up from the load port 4 by one arm 26a, and then, the arm 26a is retreated. The other arm 26b out of the vertical two stages of arms is lifted to scoop up the workpiece 14b from the conveyor 26b, and then is advanced. By lowering the arms 26a, 26b, the workpiece 14a is unloaded on the conveyor 22a, and the workpiece 14b is unloaded on the load port 4. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

この発明は板材の搬送システムに関し、特に板材の移載に関する。   The present invention relates to a plate material transport system, and more particularly to transfer of a plate material.

出願人は、液晶パネルやＥＬパネル、半導体ウェハーなどの板状のワークの搬送について検討している。出願人は特許文献１で、ワークを載置して搬送でき、且つワークの出し入れが容易なトレイの構造と、トレイにワークを出し入れするためのコンベヤとを提案した。また特許文献２で、ワークを積層保管し、且つ保管中の任意のワークを切り出し、あるいは受け入れたワークをワークの積層体の任意の位置に挿入できる段ばらし／段積み兼用の装置を提案した。
特開２００５−９３５８５号公報 特開２００５−８９０４８号公報 The applicant is studying the conveyance of plate-like workpieces such as liquid crystal panels, EL panels, and semiconductor wafers. The applicant proposed in Patent Document 1 a structure of a tray on which a workpiece can be placed and conveyed, and the workpiece can be easily taken in and out, and a conveyor for loading and unloading the workpiece into the tray. Further, Patent Document 2 proposes a stacking / stacking apparatus capable of stacking and storing workpieces, cutting out an arbitrary workpiece being stored, or inserting an accepted workpiece into an arbitrary position of a stack of workpieces.
JP 2005-93585 A JP 2005-89048 A

この発明の課題は、ロードポートとコンベヤとの間で効率的に板材を交換できるようにすることにある。
請求項２の発明での追加の課題は、板材の交換をより高速で行えるようにすることにある。
請求項３の発明での追加の課題は、板材をトレイで搬送する際に、トレイからの板材の取り出しと、ロードポートとの間での板材の交換、空のトレイへの板材のセットを効率的に行えるようにすることにある。 The subject of this invention is enabling it to exchange a board | plate material efficiently between a load port and a conveyor.
An additional problem in the invention of claim 2 is to enable replacement of the plate material at a higher speed.
An additional problem in the invention of claim 3 is that when the plate material is transported by the tray, it is efficient to take out the plate material from the tray, exchange the plate material with the load port, and set the plate material to the empty tray. It is to be able to do it.

この発明は、板材を所定の搬送方向に搬送するコンベヤと、ロードポートと、該ロードポートとコンベヤとの間で板材を受け渡しするアームとを備えた板材の搬送システムであって、前記コンベヤと前記ロードポートはアームが上下に通過自在で、前記アームは上下に２組設けられて互いに独立して運動し、かつ各アームはコンベヤの搬送方向と水平面内で直角な方向に延びて、昇降と前記直角な方向への進退の２方向の運動が自在であるように設けられていることを特徴とする。   The present invention is a plate material transport system comprising a conveyor for transporting a plate material in a predetermined transport direction, a load port, and an arm for delivering the plate material between the load port and the conveyor, the conveyor and the conveyor The load port allows the arms to pass up and down, the arms are provided in two sets up and down and move independently of each other, and each arm extends in a direction perpendicular to the conveying direction of the conveyor and in the horizontal plane, It is characterized in that it is provided so that it can freely move in two directions, advancing and retreating in a perpendicular direction.

好ましくは、前記コンベヤを上下に２組設けて、第１のコンベヤを第１のアームが上下に通過自在にし、第２のコンベヤを第２のアームが上下に通過自在にする。上下のアームは互いに独立に昇降と進退とができる。なお第１及び第２の用語は、上下の順序や移載での動作の順序を限定するものではない。
さらに好ましくは上下のコンベヤを昇降自在にする。 Preferably, two sets of the conveyors are provided vertically so that the first arm can pass up and down through the first conveyor and the second arm can pass up and down through the second conveyor. The upper and lower arms can move up and down and advance and retract independently of each other. Note that the first and second terms do not limit the upper and lower order and the order of operations in transfer.
More preferably, the upper and lower conveyors can be raised and lowered.

また好ましくは、前記コンベヤの上流側にトレイから板材を取り出すための取り出し装置を、下流側にトレイに板材をセットするためのセット装置とを設け、前記コンベヤと並列に、例えば板材搬送用のコンベヤの下側に、取り出し装置からセット装置へ空のトレイを搬送するためのコンベヤを設ける。   Preferably, a take-out device for taking out the plate material from the tray is provided on the upstream side of the conveyor, and a setting device for setting the plate material on the tray is provided on the downstream side, for example, a conveyer for conveying the plate material. A conveyor for transporting empty trays from the take-out device to the set device is provided on the lower side.

この発明では、ロードポートへの板材の受け入れとコンベヤから移載装置への板材の受け入れやロードポートや移載装置からの板材の払い出しを並行して行えるので、効率的に板材をロードポートとの間で受け渡しできる。   In this invention, the plate material can be received from the load port and the plate material from the conveyor to the transfer device and the plate material can be discharged from the load port or the transfer device in parallel. You can pass between.

請求項２の発明では、ロードポートの板材を一方のアームで一方のコンベヤに荷下ろしし、他方のコンベヤの板材を他方のアームでロードポートへ荷下ろしするので、受渡をより効率的に行える。   In the invention of claim 2, since the load port plate is unloaded onto one conveyor by one arm and the plate of the other conveyor is unloaded to the load port by the other arm, delivery can be performed more efficiently.

請求項３の発明では、板材のロードポートとの移載と並行して板材を取り出した空のトレイを搬送し、空のトレイにロードポートからの板材をセットできる。   In the invention of claim 3, the empty tray from which the plate material is taken out can be conveyed in parallel with the transfer of the plate material to the load port, and the plate material from the load port can be set in the empty tray.

以下に本発明を実施するための最適実施例を示す。   In the following, an optimum embodiment for carrying out the present invention will be shown.

図１〜図７に、実施例の板材の搬送システム２を示す。搬送システム２は例えばクリーンルームに設けられ、搬送する板材（ワーク）は液晶表示パネルやＥＬパネルなどの基板や、半導体ウェハーなどである。４はロードポートで、図示しない処理装置との間で板材（ワーク）１４を出し入れするステーションである。６，７は上下のトレイコンベヤで、トレイコンベヤ７は例えばトレイコンベヤ６と平行に下側の位置に設けられ、８，９は転換台で、トレイ１０からワーク１４を出し入れすると共にトレイ１０をコンベヤ６，７間で昇降させる。トレイ１０の底部には開口１２が複数設けられ、転換台８，９では開口１２から上側に突き出すように昇降自在なコロコンベヤなどを備えて、トレイ１０上とワークコンベヤ１６上との間で、ワーク１４の受け渡しを行う。   The board | substrate conveyance system 2 of an Example is shown in FIGS. The transport system 2 is provided in, for example, a clean room, and a plate material (work) to be transported is a substrate such as a liquid crystal display panel or an EL panel, a semiconductor wafer, or the like. Reference numeral 4 denotes a load port, which is a station for taking in and out the plate material (workpiece) 14 with a processing apparatus (not shown). 6 and 7 are upper and lower tray conveyors. The tray conveyor 7 is provided at a lower position, for example, parallel to the tray conveyor 6, and 8 and 9 are conversion tables. Go up and down between 6 and 7. A plurality of openings 12 are provided at the bottom of the tray 10, and the conversion tables 8 and 9 are provided with roller conveyors that can be raised and lowered so as to protrude upward from the openings 12, and between the tray 10 and the work conveyor 16, 14 is delivered.

ワークコンベヤ１６は同様にコロコンベヤなどから成り、２０は移載装置で、ロードポート４との間でワーク１４の移載を行う。移載装置２０には例えば上下２段にコロコンベヤなどから成るワークコンベヤ２２を設け、上下のワークコンベヤ２２毎にハンド２４に取り付けたアーム２６を設けて、アーム２６がワークコンベヤ２２を上下方向に通過自在にする。２７は制御部で、搬送システム２を制御し、特に移載装置２０と転換台８，９を制御する。   The work conveyor 16 is similarly composed of a roller conveyor or the like, and 20 is a transfer device for transferring the work 14 to and from the load port 4. For example, the transfer device 20 is provided with work conveyors 22 such as roller conveyors in two upper and lower stages, and an arm 26 attached to a hand 24 is provided for each of the upper and lower work conveyors 22 so that the arm 26 passes the work conveyor 22 in the vertical direction. Make it free. A control unit 27 controls the transport system 2, and in particular controls the transfer device 20 and the conversion tables 8 and 9.

図２などに示すように、転換台８，９は、トレイコンベヤ６の搬送面と、トレイコンベヤ７の搬送面の間でトレイ１０を昇降させる。また移載装置２０には上下２組のユニット２８，３０を設け、上側のユニット２８にはワークコンベヤ２２ａ並びにアーム２６ａ，ハンド２４ａを設ける。同様に下側のユニット３０にはワークコンベヤ２２ｂ，ハンド２４ｂ，アーム２６ｂを設ける。アーム２６ａ，２６ｂはコンベヤ２２ａ，２２ｂの搬送方向と水平面内で直角な方向に延び、ワークコンベヤ２２ａ，２２ｂのコロとコロの隙間を上下に通過自在で、コンベヤ２２ａ，２２ｂの搬送方向に水平面内で直角な方向への進退と昇降とが自在である。さらにアーム２６ａ，２６ｂは互いに独立して昇降及び進退する。   As shown in FIG. 2 and the like, the conversion tables 8 and 9 raise and lower the tray 10 between the conveyance surface of the tray conveyor 6 and the conveyance surface of the tray conveyor 7. Further, the transfer device 20 is provided with two sets of upper and lower units 28 and 30, and the upper unit 28 is provided with a work conveyor 22a, an arm 26a and a hand 24a. Similarly, the lower unit 30 is provided with a work conveyor 22b, a hand 24b, and an arm 26b. The arms 26a and 26b extend in a direction perpendicular to the conveying direction of the conveyors 22a and 22b in the horizontal plane, and can freely pass up and down the gap between the rollers of the work conveyors 22a and 22b. It is possible to move back and forth in a perpendicular direction and to move up and down. Furthermore, the arms 26a and 26b move up and down and advance and retract independently of each other.

各ユニット２８，３０にはそれぞれリニアガイド３４などのガイドを設け、ハンド２４ａ，２４ｂがコンベヤ２２ａ，２２ｂの搬送方向と直角な方向に水平面内で進退できるようにする。またリニアガイド３４を例えば左右一対のシリンダ３６で支持して、リニアガイド３４とハンド２４ａ，２４ｂ並びにアーム２６ａ，２６ｂを昇降自在にする。なおシリンダ３６に代えて、ボールネジなどの任意の昇降部材を用いることができる。アーム２６ａ，２６ｂは互いに干渉せずに独立して昇降と進退ができるようにする。ユニットフレーム３８はユニット２８，３０を支持し、これらが全体のフレーム４０上に設けられている。そして固定フレーム４１に対して、フレーム４０はボールネジ４２などの昇降部材により昇降自在である。   Each unit 28, 30 is provided with a guide such as a linear guide 34 so that the hands 24a, 24b can advance and retreat in a horizontal plane in a direction perpendicular to the conveying direction of the conveyors 22a, 22b. Further, the linear guide 34 is supported by, for example, a pair of left and right cylinders 36 so that the linear guide 34, the hands 24a and 24b, and the arms 26a and 26b can be raised and lowered. Instead of the cylinder 36, any lifting member such as a ball screw can be used. The arms 26a and 26b can move up and down independently without interfering with each other. The unit frame 38 supports the units 28 and 30, and these are provided on the entire frame 40. The frame 40 can be moved up and down by a lifting member such as a ball screw 42 with respect to the fixed frame 41.

図４の下側にワークコンベヤ２２のコロ４４とその軸４６とを示す。複数のコロ４４が軸４６で連結され、軸の回転により所定の搬送方向にワークを搬送する。また図５にロードポート４の要部を平面視で示すと、複数のフリーコンベヤ４８が設けられ、フリーコンベヤ４８，４８間の隙間をアーム２６ａ，２６ｂが上下に通過自在である。   The roller 44 of the work conveyor 22 and its shaft 46 are shown on the lower side of FIG. A plurality of rollers 44 are connected by a shaft 46, and the workpiece is transported in a predetermined transport direction by the rotation of the shaft. Further, when the main part of the load port 4 is shown in a plan view in FIG. 5, a plurality of free conveyors 48 are provided, and the arms 26 a and 26 b can pass vertically through the gaps between the free conveyors 48 and 48.

図６に実施例の動作を示す。ロードポート４上にワーク１４ａを図示しない処理装置から受け入れる。例えば下側のコンベヤ２２ｂ上にワーク１４ｂを受け入れ、ユニット２８がロードポート４との移載に適した高さとなるようにユニット２８，３０を上昇させる。なお最初にコンベヤ２２ａ上にワーク１４ｂを受け入れて、コンベヤ２２ｂを空にしておいてもよい。次いでアーム２６ａをリニアガイドに沿って前進させ、ロードポート４のフリーコンベヤの間を通過するように上昇させて、ワーク１４ａをすくい上げ、コンベヤ２２ａ上へと復帰させる。   FIG. 6 shows the operation of the embodiment. The workpiece 14a is received on the load port 4 from a processing device (not shown). For example, the workpiece 14b is received on the lower conveyor 22b, and the units 28 and 30 are raised so that the unit 28 has a height suitable for transfer with the load port 4. First, the workpiece 14b may be received on the conveyor 22a, and the conveyor 22b may be left empty. Next, the arm 26a is advanced along the linear guide and is lifted so as to pass between the free conveyors of the load port 4 to scoop up the workpiece 14a and return it onto the conveyor 22a.

アーム２６ａを下降させて、ワーク１４ａをコンベヤ２２ａ上に荷下ろしし、これと例えば同時にユニット２８，３０を共に上昇させ、さらにアーム２６ｂをコンベヤ２２ｂを横切るように上昇させて、ワーク１４ｂをすくい上げる。ユニット３０がロードポート４との移載高さまで上昇すると上昇を停止し、アーム２６ｂをロードポート４側に前進させた後に下降させ、ワーク１４ｂをロードポート４に荷下ろしする。次いでアーム２６ｂをコンベヤ２２ｂ側へと復帰させる。   The arm 26a is lowered, the work 14a is unloaded on the conveyor 22a, and simultaneously, for example, the units 28 and 30 are lifted together, and the arm 26b is lifted across the conveyor 22b to scoop up the work 14b. When the unit 30 rises to the load height with the load port 4, the ascent is stopped, the arm 26b is advanced to the load port 4 side and then lowered, and the work 14b is unloaded onto the load port 4. Next, the arm 26b is returned to the conveyor 22b side.

この後ユニット２８，３０を下降させて、ワーク１４ａを図２などのワークコンベヤ１６へと払い出す。この間にロードポート４では図示しない移載装置などにより、フリーコンベヤの隙間などを利用して、ワーク１４ｂをすくい上げて処理装置内へ移載する。次いでユニット２８，３０を上昇させ、コンベヤ２２ｂの搬送面とコンベヤ１６の搬送面を一致させる。   Thereafter, the units 28 and 30 are lowered, and the work 14a is delivered to the work conveyor 16 shown in FIG. In the meantime, the load port 4 picks up the workpiece 14b by using a transfer conveyor (not shown) or the like using a gap of the free conveyor and transfers it into the processing apparatus. Next, the units 28 and 30 are moved up so that the transport surface of the conveyor 22b and the transport surface of the conveyor 16 coincide.

図６では、ワーク１４ａ，１４ｂの交換の各ステップを別々の時間に処理するように示したが、実際にはアーム２６ａの運動とアーム２６ｂの運動を同時に行える区間がある。また実施例ではロードポート４がワークコンベヤ１６の搬送面より高い位置にあるとしたので、最初にユニット２８，３０の上昇が必要であるが、ロードポート４の搬送面とコンベヤ１６の搬送面の高さを一致させても良い。   Although FIG. 6 shows that the steps of exchanging the workpieces 14a and 14b are processed at different times, there is actually a section in which the movement of the arm 26a and the movement of the arm 26b can be performed simultaneously. In the embodiment, since the load port 4 is located at a position higher than the transfer surface of the work conveyor 16, the units 28 and 30 need to be lifted first. However, the load port 4 and the transfer surface of the conveyor 16 need to be lifted. The heights may be matched.

図７に実施例1)とその変形例2)、並びに比較例3)のタイムチャートを示す。1)は実施例に従って、２つのコンベヤ２２ａ，２２ｂと２つのアーム２６ａ，２６ｂを設けたものである。2)の変形例は、コンベヤ２２ａ，２２ｂを共通の１つのコンベヤで代替し、２つのアームが共にこのコンベヤを上下に通過自在で、水平方向に進退自在としてある。この場合、下側のコンベヤが上側のコンベヤよりも低い位置にあるとの条件で、上下２つのコンベヤは互いに独立して干渉せずに昇降と進退とができる。3)の比較例では、１つのコンベヤと１つのアームのみを設ける。図７においてＣＶはコンベヤを意味し、ＬＰはロードポートの略である。   FIG. 7 shows time charts of Example 1), its modification 2), and Comparative Example 3). 1) is provided with two conveyors 22a and 22b and two arms 26a and 26b according to the embodiment. In the modified example of 2), the conveyors 22a and 22b are replaced by a common conveyor, and both arms can pass up and down the conveyor and move forward and backward in the horizontal direction. In this case, on the condition that the lower conveyor is positioned lower than the upper conveyor, the upper and lower conveyors can move up and down independently without interfering with each other. In the comparative example of 3), only one conveyor and one arm are provided. In FIG. 7, CV means a conveyor, and LP is an abbreviation for load port.

実施例ではコンベヤとロードポートとがそれぞれワークを受け入れ、ロードポート上のワークを第１のコンベヤに移載し、次いで第２のコンベヤ上のワークをロードポートに受け渡しする。この後コンベヤとロードポートからワークを払い出すと、１回の移載サイクルが終了する。   In the embodiment, the conveyor and the load port each receive workpieces, transfer the workpiece on the load port to the first conveyor, and then transfer the workpiece on the second conveyor to the load port. Thereafter, when the work is discharged from the conveyor and the load port, one transfer cycle is completed.

2)の変形例では、ロードポート上のワークを第１のコンベヤでピックアップした後、コンベヤに荷下ろしする前に、第２のアームでコンベヤ上のワークをロードポートへ荷下ろしする。この後、第１のアームを下降させてワークをコンベヤに荷下ろしするので、アームの運動が複雑になり、移載がやや遅くなる。   In the modified example of 2), after the workpiece on the load port is picked up by the first conveyor, the workpiece on the conveyor is unloaded to the load port by the second arm before being unloaded onto the conveyor. Thereafter, the first arm is lowered and the work is unloaded onto the conveyor, so that the movement of the arm becomes complicated and the transfer is somewhat slow.

3)の比較例では、ロードポートがワークを受け入れた後、ロードポートからコンベヤへワークを移載する。次いでコンベヤからのワークの払い出しと次のワークのコンベヤへの受け入れを行い、コンベヤからロードポートへワークを移載し、ロードポートからワークを払い出す。このため移載の所要時間は長くなる。   In the comparative example of 3), after the load port receives the workpiece, the workpiece is transferred from the load port to the conveyor. Next, the workpiece is discharged from the conveyor and the next workpiece is received by the conveyor, the workpiece is transferred from the conveyor to the load port, and the workpiece is discharged from the load port. This increases the time required for transfer.

移載装置２０でのワークの移載は、コンベヤ６，１６でのワークやトレイの搬送に比べて遅いので、移載速度により搬送システムの効率が決定される。そこで実施例や変形例のように移載時間を短縮すると、板材の搬送システム２を極めて効率化できる。
Since the transfer of the work by the transfer device 20 is slower than the transfer of the work or tray by the conveyors 6 and 16, the efficiency of the transfer system is determined by the transfer speed. Therefore, if the transfer time is shortened as in the embodiment or the modification, the plate material transport system 2 can be made extremely efficient.

実施例の板材搬送システムの要部レイアウトを示す平面図The top view which shows the principal part layout of the board | plate material conveyance system of an Example. 実施例でのトレイとワークの搬送経路と搬送高さとを示す模式図Schematic diagram showing the tray and workpiece transfer path and transfer height in the embodiment 実施例の移載装置とロードポートとを示す要部側面図Side view of essential parts showing transfer device and load port of embodiment 実施例の移載装置とロードポートの要部平面図Principal part plan view of transfer device and load port of embodiment ロードポートの要部平面図Plan view of main parts of load port 実施例でのワークの移載過程を模式的に示す図The figure which shows typically the transfer process of the workpiece | work in an Example. 移載装置とロードポートの動作を示すタイムチャートで、1)は実施例の動作を、2)は１コンベヤ２アームの変形例の動作を、3)は１コンベヤ１アームの比較例の動作を示す。This is a time chart showing the operation of the transfer device and load port. 1) shows the operation of the embodiment, 2) shows the operation of the modified example of one conveyor and two arms, and 3) shows the operation of the comparative example of one conveyor and one arm. Show.

符号の説明Explanation of symbols

２ 板材の搬送システム
４ ロードポート
６，７ トレイコンベヤ
８，９ 転換台
１０ トレイ
１２ 開口
１４ ワーク
１６ ワークコンベヤ
２０ 移載装置
２２ ワークコンベヤ
２４ ハンド
２６ アーム
２７ 制御部
２８，３０ ユニット
３４ リニアガイド
３６ シリンダ
３８ ユニットフレーム
４０ フレーム
４１ 固定フレーム
４２ ボールネジ
４４ コロ
４６ 軸
４８ フリーコンベヤ 2 Plate Material Transfer System 4 Load Ports 6 and 7 Tray Conveyors 8 and 9 Conversion Table 10 Tray 12 Opening 14 Work 16 Work Conveyor 20 Transfer Device 22 Work Conveyor 24 Hand 26 Arm 27 Controllers 28 and 30 Unit 34 Linear Guide 36 Cylinder 38 Unit frame 40 Frame 41 Fixed frame 42 Ball screw 44 Roller 46 Shaft 48 Free conveyor

Claims (3)

板材を所定の搬送方向に搬送するコンベヤと、ロードポートと、該ロードポートとコンベヤとの間で板材を受け渡しするアームとを備えたシステムであって、
前記コンベヤと前記ロードポートはアームが上下に通過自在で、
前記アームは上下に２組設けられて互いに独立して運動し、かつ各アームはコンベヤの搬送方向と水平面内で直角な方向に延びて、昇降と前記直角な方向への進退の２方向の運動が自在であるように設けられていることを特徴とする、板材の搬送システム。 A system comprising a conveyor that conveys a plate material in a predetermined conveyance direction, a load port, and an arm that transfers the plate material between the load port and the conveyor,
The conveyor and the load port allow arms to pass up and down,
The arms are provided in two sets on the top and bottom and move independently of each other, and each arm extends in a direction perpendicular to the conveying direction of the conveyor and in a horizontal plane, and moves in two directions: raising and lowering and advancing and retreating in the perpendicular direction. Is provided so as to be freely movable. 前記コンベヤを上下に２組設けて、第１のコンベヤを第１のアームが上下に通過自在にし、第２のコンベヤを第２のアームが上下に通過自在にすることを特徴とする、請求項１の板材の搬送システム。 The two conveyors are provided vertically, and the first arm is allowed to pass up and down through the first conveyor, and the second arm is allowed to pass up and down through the second conveyor. 1 plate material transfer system. 前記コンベヤの上流側にトレイから板材を取り出すための取り出し装置を、下流側にトレイに板材をセットするためのセット装置とを設け、
前記コンベヤと並列に取り出し装置からセット装置へ空のトレイを搬送するためのコンベヤを設けたことを特徴とする、請求項１または２の板材の搬送システム。
A take-out device for taking out the plate material from the tray on the upstream side of the conveyor, and a set device for setting the plate material on the tray on the downstream side,
3. The plate material conveying system according to claim 1, wherein a conveyor for conveying empty trays from the take-out device to the set device is provided in parallel with the conveyor.
JP2006007409A 2006-01-16 2006-01-16 Conveying system for plate material Pending JP2007186321A (en)

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* Cited by examiner, † Cited by third party
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KR100952711B1 (en) 2007-12-31 2010-04-13 주식회사 태성기연 Gate conveyor for glass panel
WO2012068745A1 (en) * 2010-11-25 2012-05-31 深圳市华星光电技术有限公司 Double arm type mechanical arm and method for conveying plate thereof
KR101188487B1 (en) 2008-06-04 2012-10-05 도쿄엘렉트론가부시키가이샤 Transfer apparatus and processing apparatus
CN110466984A (en) * 2019-08-12 2019-11-19 苏州富强科技有限公司 A kind of automatic loading and unloading device
CN110562723A (en) * 2019-08-12 2019-12-13 苏州富强科技有限公司 Feeding and discharging mechanism in layered mode

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JPH05301611A (en) * 1992-04-27 1993-11-16 Nkk Corp Automatic high-rise warehouse for sheet material
JPH0970828A (en) * 1995-09-05 1997-03-18 Mitsubishi Heavy Ind Ltd Preform cooling and transporting apparatus
JPH1098087A (en) * 1996-09-25 1998-04-14 Shimadzu Corp Wafer transportation device
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100952711B1 (en) 2007-12-31 2010-04-13 주식회사 태성기연 Gate conveyor for glass panel
KR101188487B1 (en) 2008-06-04 2012-10-05 도쿄엘렉트론가부시키가이샤 Transfer apparatus and processing apparatus
WO2012068745A1 (en) * 2010-11-25 2012-05-31 深圳市华星光电技术有限公司 Double arm type mechanical arm and method for conveying plate thereof
CN110466984A (en) * 2019-08-12 2019-11-19 苏州富强科技有限公司 A kind of automatic loading and unloading device
CN110562723A (en) * 2019-08-12 2019-12-13 苏州富强科技有限公司 Feeding and discharging mechanism in layered mode
CN110562723B (en) * 2019-08-12 2024-05-17 苏州富强科技有限公司 Layered feeding and discharging mechanism
CN110466984B (en) * 2019-08-12 2024-05-17 苏州富强科技有限公司 Automatic feeding and discharging device

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