CN101882565B - Online processing equipment - Google Patents
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- CN101882565B CN101882565B CN2010101980507A CN201010198050A CN101882565B CN 101882565 B CN101882565 B CN 101882565B CN 2010101980507 A CN2010101980507 A CN 2010101980507A CN 201010198050 A CN201010198050 A CN 201010198050A CN 101882565 B CN101882565 B CN 101882565B
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Abstract
The invention discloses online processing equipment, which comprises a cooling chamber (21) and a platform deck (25), wherein a first carrier plate conveying device (22) and a second carrier plate conveying device (23) are arranged between the cooling chamber and the platform deck; the platform deck can cooperate with the first end of the first or second carrier plate conveying device selectively; and a third carrier plate conveying device (20) is arranged in the cooling chamber and cooperates with the second end of the first carrier plate conveying device and the second carrier plate conveying device selectively. A carrier plate (24) can be returned simply in the cooling chamber and is loaded and unloaded on the platform deck without mounting an unloading platform on the equipment. Therefore, the online processing equipment has the advantages that: the floor area is reduced; the cleaning cost of the operation space is reduced; and the use cost is reduced.
Description
Technical field
The present invention relates to microelectronics technology, particularly a kind of online treatment equipment.
Background technology
Along with China's development of economic construction, online treatment equipment such as online apparatus for processing plasma are applied to microelectronics technology more and more widely.
Please refer to Fig. 1, Fig. 1 is a kind of structural representation of online apparatus for processing plasma.
Online apparatus for processing plasma generally has adjacent successively loading stage 11, preheating chamber 12, processing chamber 13, cooling chamber 14; More than between each adjacent chamber, be respectively arranged with flap valve 15 between chamber and the atmosphere, support plate 16 passes through above-mentioned each chamber successively under the drive of support plate connecting gear 17.In the course of processing of substrate; At first support plate 16 is loaded into support plate connecting gear 17, the flap valve 15 between preheating chamber 12 and the loading stage 11 is opened, and this flap valve 15 cut out after support plate 16 got into preheating chamber 12; And after preheating chamber 12 is evacuated processed substrate is positioned over support plate 16 surfaces; Open the flap valve 15 between preheating chamber 12 and the processing chamber 13, the substrate on support plate 16 and the support plate 16 gets into processing chambers 13 with support plate connecting gear 17, after machining; Open the flap valve 15 between processing chamber 13 and the cooling unloading chamber 14; Substrate, support plate 16 remove the substrate that machines after getting into cooling unloading chamber with support plate connecting gear 17 on support plate 16, support plate connecting gear 17 transfers to relieving platform 18 with support plate 16 and unloads; Support plate 16 after the unloading comes back to loading stage 11 through gigback 19 and loads, and repeats above-mentioned job step.
In above-mentioned online apparatus for processing plasma; After a collection of substrate machines; Need support plate 16 be sent to unloading on the relieving platform 18, relieving platform 18 need occupy enough big usage space, when the output capacity of equipment size big or substrate is big; Relieving platform 18 required usage spaces need corresponding increase, the then corresponding increase of the volume of apparatus for processing plasma.Because microelectronic devices such as apparatus for processing plasma all need be worked under the environment of ultra-clean; Need implement operations such as bactericidal cleaning to the running environment of equipment; The floor space of equipment is big more; The required running space of equipment also just increases thereupon, and the cost required to the cleaning operation in equipment operation space increases thereupon, thereby makes that the use cost of equipment is higher.
Therefore, how to reduce the floor space of online treatment equipment, reduce the cleaning operation cost in equipment operation space, thereby reduce the use cost of equipment, just become the problem that those skilled in the art need solve.
Summary of the invention
The purpose of this invention is to provide a kind of online treatment equipment, the floor space of this online treatment equipment is less, thereby can reduce the cleaning operation cost in equipment operation space, and then can reduce the use cost of equipment.
For solving the problems of the technologies described above; The present invention provides a kind of online treatment equipment; Comprise cooling chamber and microscope carrier; Be provided with the first carrier plate transmission device and the second carrier plate transmission device between said cooling chamber and the said microscope carrier; Said microscope carrier cooperates with first end of the said first carrier plate transmission device or first end of the second carrier plate transmission device, and said cooling chamber set inside has the 3rd carrier plate transmission device, and said the 3rd carrier plate transmission device cooperates with second end of the said first carrier plate transmission device or second end of the said second carrier plate transmission device; Lateral separation between the two elements that matches arbitrarily is less than being transmitted the width of support plate in this direction, and the fore-and-aft distance between the two elements that matches arbitrarily is less than the said length of support plate on this direction that is transmitted.
Preferably, also comprise first leaning device that acts on said the 3rd carrier plate transmission device; The said first carrier plate transmission device is positioned at said second carrier plate transmission device top; Said the 3rd carrier plate transmission device is through being articulated in the cavity of said cooling chamber perpendicular to first jointed shaft of its transmission direction, and can under the effect of said first leaning device, rotate predetermined angular around said first jointed shaft.
Preferably, said first leaning device comprises around drive shaft turns and acts on the cam of said the 3rd carrier plate transmission bottom of device, the transmission direction that is axially perpendicular to said the 3rd carrier plate transmission device of said driving shaft.
Preferably, said first jointed shaft is installed on said the 3rd carrier plate transmission device end away from the said second carrier plate transmission device, said cam on said the 3rd carrier plate transmission device near an end of the said second carrier plate transmission device.
Preferably; The said second carrier plate transmission device is articulated in the fixed part of said online treatment equipment through second jointed shaft; Said second jointed shaft is positioned at the end away from said the 3rd carrier plate transmission device, and it is axially perpendicular to the transmission direction of the said second carrier plate transmission device; The said second carrier plate transmission device is equipped with second leaning device near an end of said the 3rd carrier plate transmission device, and the said second carrier plate transmission device can rotate predetermined angular around said second jointed shaft under the effect of said second leaning device.
Preferably, said second leaning device comprises at least one cylinder.
Preferably, also comprise the elevating mechanism that acts on said the 3rd carrier plate transmission device, the above-below direction motion of said the 3rd carrier plate transmission device said cooling chamber in the effect lower edge of said elevating mechanism; The said first carrier plate transmission device is positioned at directly over the said second carrier plate transmission device.
Preferably, the said second carrier plate transmission device comprises leading portion and back segment at least, and said leading portion and the said back segment actuating unit through separately drives respectively.
Preferably, said online treatment equipment is specially apparatus for processing plasma.
Preferably, said apparatus for processing plasma is an apparatus for plasma chemical vapor deposition.
Online treatment equipment provided by the present invention; Comprise cooling chamber, the first carrier plate transmission device, the second carrier plate transmission device and the 3rd carrier plate transmission device; The first carrier plate transmission device and the second carrier plate transmission device all are arranged between said cooling chamber and the said microscope carrier; Said microscope carrier selectively cooperates with first end of the said first carrier plate transmission device or first end of the second carrier plate transmission device; Said cooling chamber set inside has the 3rd carrier plate transmission device, and said the 3rd carrier plate transmission device selectively cooperates with second end of the said first carrier plate transmission device or second end of the said second carrier plate transmission device.In the course of work of online treatment equipment, support plate is transported to cooling chamber from microscope carrier through preheating cavity, process cavity etc. by the first carrier plate transmission device after loading on the microscope carrier; At this moment; The 3rd carrier plate transmission device cooperates with the first carrier plate transmission device, and support plate transfers on the 3rd carrier plate transmission device, then from the first carrier plate transmission device; The 3rd carrier plate transmission device breaks off with the first carrier plate transmission device and cooperating; After work piece fully cooled off in cooling chamber, the 3rd carrier plate transmission device cooperated with the second carrier plate transmission device, and support plate transfers to the second carrier plate transmission device from the 3rd carrier plate transmission device; And return microscope carrier, thereby accomplish a production cycle through the second carrier plate transmission device.Like this; Support plate only needs in cooling chamber, can realize returning; And on microscope carrier, realize loading and unloading, need not relieving platform to be installed in addition, thereby reduced the floor space of this online treatment equipment for equipment; Reduce the cleaning operation cost in equipment operation space, and then can reduce the use cost of equipment.
In another kind of embodiment; Online treatment equipment provided by the present invention also comprises first leaning device; This first leaning device acts on the appropriate location of the 3rd carrier plate transmission device; The first carrier plate transmission device is positioned at the top of the said second carrier plate transmission device, and the 3rd carrier plate transmission device is through being articulated in the cavity of cooling chamber perpendicular to first jointed shaft of its transmission direction on horizontal plane, and can under the effect of first leaning device, rotate predetermined angular around first jointed shaft.When carrier plate transmission to the second carrier plate transmission device of the 3rd carrier plate transmission device on it; At first make the 3rd carrier plate transmission device rotate predetermined angular to direction near the second carrier plate transmission device through first leaning device; When both positions reach predetermined the relation, start the actuating unit that drives the 3rd carrier plate transmission device and the second carrier plate transmission device, support plate is successfully transferred on the second carrier plate transmission device; Thereby turn back to loading stage with the second carrier plate transmission device; Accomplishing a process-cycle, behind carrier plate transmission to the second carrier plate transmission device, through the counteragent of first leaning device; Realize the 3rd carrier plate transmission device around the first jointed shaft counter motion, so that the 3rd carrier plate transmission device Reversion Level position; Can be when the 3rd carrier plate transmission device and the second carrier plate transmission device have suitable relative position relation through this first tilting gearing; Realize the transmission of support plate; The support plate of having avoided causing owing to both hypertelorisms damages, thereby has improved the job security of online treatment equipment.
In another kind of embodiment, above-mentioned first leaning device comprises around drive shaft turns and acts on the cam of the 3rd carrier plate transmission bottom of device that driving shaft is perpendicular to the transmission direction of the 3rd carrier plate transmission device.In the rotation process of cam; When cam supports the 3rd carrier plate transmission device with its minor axis, the horizontal level that the position of the 3rd carrier plate transmission device is lower than cam when supporting the 3rd carrier plate transmission device with its major axis, like this; Realized the inclination of the 3rd carrier plate transmission device through cam; And the structure of cam is comparatively simple, and manufacturing process is easy, and production cost is lower.
Description of drawings
Fig. 1 is a kind of structural representation of online treatment equipment;
Fig. 2 is the cutaway view of a kind of embodiment of online treatment equipment provided by the present invention;
Fig. 3 is the partial structurtes sketch map of online treatment equipment shown in Figure 2 when tilting;
Fig. 4 overlooks the structural representation of direction for online treatment equipment shown in Figure 2;
Fig. 5 is the structural representation of a kind of embodiment of first leaning device in the online treatment equipment provided by the present invention;
Fig. 6 is the structural representation of online treatment equipment shown in Figure 2 in main apparent direction.
Embodiment
Core of the present invention provides a kind of online treatment equipment, and this online treatment equipment has higher production capacity.
In order to make those skilled in the art person understand the present invention program better, the present invention is done further detailed description below in conjunction with accompanying drawing and embodiment.
Please refer to Fig. 2, Fig. 2 is the structural representation of a kind of embodiment of online treatment equipment provided by the present invention.
In a kind of embodiment, online treatment equipment provided by the present invention is made up of preheating cavity 29, process cavity 26 and cooling chamber 21, in the substrate course of processing; Support plate 24 at first loads on microscope carrier 25; And drive to get into by the first carrier plate transmission device 22 and load preheating cavities 29, utilize vacuum pump will load preheating cavity 29 environment that is evacuated, in this loading preheating cavity 29, have heating source; After getting into support plate 24 in this chamber and being heated to predetermined temperature; Drive entering process cavity 26 by the first carrier plate transmission device 22, through after the plasma process such as deposit or etching, second end of the first carrier plate transmission device 22 cooperates with the 3rd carrier plate transmission device 20 in process cavity 26; Support plate 24 transfers to the 3rd carrier plate transmission device 20 by the first carrier plate transmission device 22, thereby gets into cooling chamber 21; After support plate 24 fully cools off in cooling chamber 21; Second end the 3rd carrier plate transmission device 20 and the first carrier plate transmission device 22 breaks off and cooperating; The 3rd carrier plate transmission device 20 cooperates with second end of the second carrier plate transmission device 23, after support plate 24 transfers to the second carrier plate transmission device 23 by the 3rd carrier plate transmission device 20, is back to microscope carrier 25 by 23 transmission of the second carrier plate transmission device; And unloading on microscope carrier 25, to accomplish a production cycle.
The first carrier plate transmission device 22, the second carrier plate transmission device 23 and the 3rd carrier plate transmission device 20 all can be the roller groups that is made up of some transfer rollers usually; Wherein the axis of each transfer roller can form a transmission group obviously perpendicular to the transmission direction of support plate 24 through transmission board or transport tape between some roller groups.
It is to be noted; " cooperation " described in the literary composition is meant; Have proper level distance and vertical distance between two parts that cooperatively interact; Make support plate 24 between two adjacent parts, to transmit smoothly, for example above-mentioned horizontal range can equal or be slightly less than the distance between adjacent two transfer rollers; Apart from realizing being transmitted as requirement smoothly with support plate 24, both concrete numerical value is not done qualification at this to above-mentioned horizontal range with vertically; Correspondingly, break off cooperation described in the literary composition and be meant that the horizontal range between two parts that match changes with vertical distance, thereby make support plate that situation about transmitting can't take place between two parts.
All can be provided with flap valve between above-mentioned cooling chamber 21 and the process cavity 26 and between the cooling chamber 21 and the second carrier plate transmission device 23, and the above-mentioned action that selectively is communicated with through flap valve realizes.Concrete; Each flap valve can be isolating valve; The opening or closing of realization flap valve under the effect of actuating units such as for example cylinder, thus realize the first carrier plate transmission device 22 and the 3rd carrier plate transmission device 20 and with the second carrier plate transmission device 23 and the 3rd carrier plate transmission device 20 between be communicated with or isolate.
It is to be noted; The number of the 3rd carrier plate transmission device 20 can be one, at this moment, and when cooperating between the 3rd carrier plate transmission device 20 and the first carrier plate transmission device 22; Isolate through flap valve between the 3rd carrier plate transmission device 20 and the second carrier plate transmission device 23; Accordingly, when cooperating between the 3rd carrier plate transmission device 20 and the second carrier plate transmission device 23, isolate through flap valve between the 3rd carrier plate transmission device 20 and the second carrier plate transmission device 23; The number of the 3rd carrier plate transmission device 20 also is not limited to one; Also can be for a plurality of; For example when the number of the 3rd carrier plate transmission device 20 is two; When one of them the 3rd carrier plate transmission device 20 and the first carrier plate transmission device 22 cooperate, also might cooperatively interact between another the 3rd carrier plate transmission device 20 and the second carrier plate transmission device 23.
In the transmission course of support plate 24, the above-mentioned first carrier plate transmission device 22 and the second carrier plate transmission device 23 are all generally along horizontal motion.
The above-mentioned second carrier plate transmission device 23 can comprise leading portion 231 and back segment 232 at least, and leading portion 231 and back segment 232 actuating unit through separately drives respectively.When a plurality of support plates 24 being arranged when second is contained in transmitting device 23 simultaneously; Each support plate 24 be can control and leading portion 231 and back segment 232 laid respectively at; Because leading portion 231 is that the actuating unit that passes through respectively separately drives with back segment 232; Arbitrary section stop motion or change movement velocity and can not impact by each section, thereby mutual interference and influence when having avoided support plate 24 to transport to other.
Above-mentioned leading portion 231 can further include separately-driven multistage, and corresponding, back segment 232 also may further include separately-driven multistage.
In the course of work of online treatment equipment, support plate 24 is transported to cooling chamber 21 from microscope carrier 25 through preheating cavity 29, process cavity 26 etc. by the first carrier plate transmission device 22 after loading on the microscope carrier 25; At this moment; The 3rd carrier plate transmission device 20 cooperates with the first carrier plate transmission device 22, and support plate transfers on the 3rd carrier plate transmission device 20, then from the first carrier plate transmission device 22; The 3rd carrier plate transmission device 20 breaks off with the first carrier plate transmission device 22 and cooperating; After work piece fully cooled off in cooling chamber 21, the 3rd carrier plate transmission device 20 cooperated with the second carrier plate transmission device 23, and support plate 24 transfers to the second carrier plate transmission device 23 from the 3rd carrier plate transmission device 20; And return microscope carrier 25, thereby accomplish a production cycle through the second carrier plate transmission device 23.Like this; 24 need of support plate can be realized returning in cooling chamber 21; And on microscope carrier 25, realize loading and unloading, need not relieving platform to be installed in addition, thereby reduced the floor space of this online treatment equipment for equipment; Reduce the cleaning operation cost in equipment operation space, and then can reduce the use cost of equipment.
In order to realize that said the 3rd carrier plate transmission device 20 selectively cooperates with second end of the said first carrier plate transmission device 22 or second end of the said second carrier plate transmission device 23; Can realize through numerous embodiments; Below be two kinds in the numerous embodiments, all derivatives based on following manner all should fall in the protection range of claim of the present invention.
Please refer to Fig. 3 to Fig. 6, Fig. 3 is the partial structurtes sketch map of online treatment equipment shown in Figure 2 when tilting; Fig. 4 overlooks the structural representation of direction for online treatment equipment shown in Figure 2; Fig. 5 is the structural representation of a kind of embodiment of first leaning device in the online treatment equipment provided by the present invention; Fig. 6 is the structural representation of online treatment equipment shown in Figure 2 in main apparent direction.
In another kind of embodiment, first leaning device that acts on said the 3rd carrier plate transmission device 20 that also comprises provided by the present invention; The first carrier plate transmission device 22 is positioned at the top of the second carrier plate transmission device 23; The 3rd carrier plate transmission device 20 is through being articulated on the cavity of cooling chamber 21 at first jointed shaft 210 perpendicular to its transmission direction on the horizontal plane, and under the effect of first leaning device, rotates around first jointed shaft 210.
When the 3rd carrier plate transmission device 20 transfers to the second carrier plate transmission device 23 with the support plate on it 24; At first the 3rd carrier plate transmission device 20 is rotated to the direction near the second carrier plate transmission device 23 through first leaning device; When both positions reach predetermined the relation; Start the actuating unit that drives the 3rd carrier plate transmission device 20 and the second carrier plate transmission device 23; Support plate 24 is successfully transferred on the second carrier plate transmission device 23, thereby turn back to loading stage 25, to accomplish a process-cycle with the second carrier plate transmission device 23; Can be when the 3rd carrier plate transmission device 20 and the second carrier plate transmission device 23 have suitable relative position relation through this first tilting gearing; Realize the transmission of support plate 24, the support plate of having avoided causing owing to both hypertelorisms 24 damages, thereby has improved the job security of online treatment equipment.
Above-mentioned first leaning device can comprise at least one cam 27, this cam 27 around himself drive shaft turns and act on the bottom of above-mentioned the 3rd carrier plate transmission device 20, its driving shaft is perpendicular to the transmission direction of the 3rd carrier plate transmission device 20; With respect to pivot; The height of cam 27 outlines is different; Thereby can realize the inclination of the 3rd carrier plate transmission device 20 through the rotation of cam 27; The processing of cam 27 is comparatively convenient, and can realize the 3rd carrier plate transmission device 20 inclination in various degree through changing the shape and size of cam 27 outlines.
The outline of above-mentioned cam 27 can be the ellipse of standard, and the length ratio of this oval-shaped major axis and minor axis should be confirmed according to desired inclined degree in 20 work of the 3rd carrier plate transmission device, no longer limit at this.
The outline of cam 27 also is not limited to above-mentioned oval-shaped form, also can have the cam structure of suitable difference in height for other outlines.
Above-mentioned first leaning device also is not limited to the form of cam 27; Also can be other modes that can make an end of the 3rd carrier plate transmission device 20 rotate in this area around first jointed shaft 210; For example; Can be at the 3rd support plate device 20 away from the position of first jointed shaft 210 cylinder or oil cylinder are installed, the stretching out and the inclination of realization the 3rd support plate device 20 of withdraw of the expansion link through cylinder or oil cylinder.
Above-mentioned first jointed shaft 210 can be installed on the 3rd carrier plate transmission device 20 end away from the said second carrier plate transmission device 23; Cam 27 is installed on the 3rd carrier plate transmission device 20 end near the second carrier plate transmission device 23, so that improve the structural stability of the 3rd carrier plate transmission device 20.
The position that is provided with of above-mentioned first jointed shaft 210 and cam 27 also is not limited to above-mentioned concrete mode; Theoretically; When as long as both positions relation can realize that cam 27 rotates; The 3rd carrier plate transmission device 20 can rotate around first jointed shaft 210 with cam 27 and get final product, and both particular location relations should not receive the restriction of this specification embodiment.
The number of above-mentioned cam 27 can be two; On direction perpendicular to said transmission direction; Be installed on the both sides of said the 3rd carrier plate transmission device 20 respectively; Thereby make that the 3rd carrier plate transmission device 20 inclined degree everywhere is identical substantially, improved the transmission stability of the 3rd carrier plate transmission device 20.
The number of above-mentioned cam 27 also is not limited to two, also a cam 27 can only be set, and at this moment, cam 27 should be arranged at the middle part perpendicular to the 3rd carrier plate transmission device 20 on the direction of said transmission direction, so that guarantee tilt stability; Cam 27 also can be provided with several, on the direction perpendicular to said transmission direction, is arranged at the 3rd carrier plate transmission device 20 substantially equably.
On the above-mentioned second carrier plate transmission device 23 second leaning device can be installed; This second leaning device is installed on the end near said the 3rd carrier plate transmission device 20; The second carrier plate transmission device 23 is articulated in the fixed part of said online treatment equipment through second jointed shaft; This second jointed shaft is arranged at the end away from the 3rd carrier plate transmission device 20; And perpendicular to the transmission direction setting of the second carrier plate transmission device 23, the second carrier plate transmission device 23 rotates around said second jointed shaft under the effect of second leaning device.
Above-mentioned second leaning device comprises at least one cylinder 28, stretching out and withdraw and realize the inclination of the second support plate device 23 through cylinder 28 expansion links.This second leaning device also is not limited to through cylinder 28 and realizes its function, also can realize that its concrete installation form is similar with first leaning device with the course of work, repeats no more at this through above-mentioned cam mechanism.
Except above-mentioned first leaning device, online treatment equipment provided by the present invention can also realize in the following manner that the 3rd carrier plate transmission device 20 selectively selectively is communicated with the first carrier plate transmission device 22 or the second carrier plate transmission device 23.
In another kind of embodiment; Online treatment equipment provided by the present invention; When the first carrier plate transmission device 22 be positioned at the said second carrier plate transmission device 23 directly over the time; Can also comprise the elevating mechanism that acts on the 3rd carrier plate transmission device 20, the above-below direction motion of the 3rd carrier plate transmission device 20 cooling chamber 21 in the effect lower edge of elevating mechanism selectively cooperates with the first carrier plate transmission device 22 or the second carrier plate transmission device 23 to realize the 3rd carrier plate transmission device 20; When support plate 24 passes through the first carrier plate transmission device 22 when process cavity 26 gets into cooling chambers 21; The 3rd carrier plate transmission device 20 is in the position of matching with the first carrier plate transmission device 22; Support plate 24 is transferred on the 3rd carrier plate transmission device 20 by the first carrier plate transmission device 22; And after in cooling chamber 21, accomplishing operation; The 3rd carrier plate transmission device 20 rises under the effect of elevating mechanism or descends, and the 3rd carrier plate transmission device 20 is communicated with the second carrier plate transmission device 23, thereby support plate 24 is transferred to the second carrier plate transmission device 23 and returns loading stage 25.
Apparently, when the first carrier plate transmission device 22 was positioned at the top of the second carrier plate transmission device 23, when the 3rd carrier plate transmission device 20 cooperated with the second carrier plate transmission device 23, elevating mechanism moved downward, otherwise elevating mechanism moves upward.
Above-mentioned elevating mechanism can be oil cylinder or cylinder, and the up-down of flexible realization the 3rd carrier plate transmission device 22 of the expansion link through oil cylinder or cylinder.
Online treatment equipment provided by the present invention specifically can be apparatus for processing plasma, and this plasma treatment facility further can be apparatus for plasma chemical vapor deposition, etching apparatus or other equipment.
More than online treatment equipment provided by the present invention has been carried out detailed introduction.Used concrete example among this paper principle of the present invention and execution mode are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof.Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention, can also carry out some improvement and modification to the present invention, these improvement and modification also fall in the protection range of claim of the present invention.
Claims (10)
1. online treatment equipment; Comprise cooling chamber (21) and microscope carrier (25); Be provided with the first carrier plate transmission device (22) and the second carrier plate transmission device (23) between said cooling chamber (21) and the said microscope carrier (25); Said microscope carrier (25) cooperates with first end of the said first carrier plate transmission device (22) or first end of the second carrier plate transmission device (23); It is characterized in that said cooling chamber (21) set inside has the 3rd carrier plate transmission device (20), said the 3rd carrier plate transmission device (20) cooperates with second end of the said first carrier plate transmission device (22) or second end of the said second carrier plate transmission device (23); Lateral separation between the two elements that matches arbitrarily is less than being transmitted the width of support plate (24) in this direction, and the fore-and-aft distance between the two elements that matches arbitrarily is less than the said length of support plate (24) on this direction that is transmitted.
2. online treatment equipment as claimed in claim 1 is characterized in that, also comprises first leaning device that acts on said the 3rd carrier plate transmission device (20); The said first carrier plate transmission device (22) is positioned at the said second carrier plate transmission device (23) top; Said the 3rd carrier plate transmission device (20) is through being articulated in the cavity of said cooling chamber perpendicular to first jointed shaft (210) of its transmission direction on horizontal plane, and can under the effect of said first leaning device, rotate predetermined angular around said first jointed shaft (210).
3. online treatment equipment as claimed in claim 2; It is characterized in that; Said first leaning device comprises around drive shaft turns and acts on the cam (27) of said the 3rd carrier plate transmission device (20) bottom, said driving shaft axially on horizontal plane perpendicular to the transmission direction of said the 3rd carrier plate transmission device (20).
4. online treatment equipment as claimed in claim 3; It is characterized in that; Said first jointed shaft (210) is installed on said the 3rd carrier plate transmission device (20) and goes up the end away from the said second carrier plate transmission device (23), and said cam (27) acts on said the 3rd carrier plate transmission device (20) and goes up the end near the said second carrier plate transmission device (23).
5. like each described online treatment equipment of claim 2 to 4; It is characterized in that; The said second carrier plate transmission device (23) is articulated in the fixed part of said apparatus for processing plasma through second jointed shaft; Said second jointed shaft is positioned at the end away from said the 3rd carrier plate transmission device (20), and its axially on horizontal plane perpendicular to the transmission direction of the said second carrier plate transmission device (23); The said second carrier plate transmission device (23) is equipped with second leaning device near an end of said the 3rd carrier plate transmission device (20), and the said second carrier plate transmission device (23) can rotate predetermined angular around said second jointed shaft under the effect of said second leaning device.
6. online treatment equipment as claimed in claim 5 is characterized in that, said second leaning device comprises at least one cylinder (28).
7. online treatment equipment as claimed in claim 1; It is characterized in that; Also comprise the elevating mechanism that acts on said the 3rd carrier plate transmission device (20), said the 3rd carrier plate transmission device (20) is in the above-below direction motion of the said cooling chamber in the effect lower edge of said elevating mechanism (21); The said first carrier plate transmission device (22) is positioned at directly over the said second carrier plate transmission device (23).
8. like each described online treatment equipment of claim 1 to 4; It is characterized in that; The said second carrier plate transmission device (23) comprises leading portion (231) and back segment (232) at least, and said leading portion (231) and said back segment (232) actuating unit through separately drives respectively.
9. like each described online treatment equipment of claim 1 to 4, it is characterized in that said online treatment equipment is specially apparatus for processing plasma.
10. online treatment equipment as claimed in claim 9 is characterized in that, said apparatus for processing plasma is an apparatus for plasma chemical vapor deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101980507A CN101882565B (en) | 2010-06-03 | 2010-06-03 | Online processing equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101980507A CN101882565B (en) | 2010-06-03 | 2010-06-03 | Online processing equipment |
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| Publication Number | Publication Date |
|---|---|
| CN101882565A CN101882565A (en) | 2010-11-10 |
| CN101882565B true CN101882565B (en) | 2012-04-11 |
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| CN2010101980507A Active CN101882565B (en) | 2010-06-03 | 2010-06-03 | Online processing equipment |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102486988A (en) * | 2010-12-03 | 2012-06-06 | 上海凯世通半导体有限公司 | Vacuum transmission process equipment |
| WO2020149837A1 (en) * | 2019-01-16 | 2020-07-23 | Applied Materials, Inc. | Substrate processing system, substrate chamber for a vacuum processing system, and method of cooling a substrate |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1702023A (en) * | 2004-05-27 | 2005-11-30 | 株式会社岛津制作所 | Base plate carrying device and base plate processing device therewith |
| JP2006054284A (en) * | 2004-08-11 | 2006-02-23 | Shimadzu Corp | Vacuum processing apparatus |
| WO2009060539A1 (en) * | 2007-11-09 | 2009-05-14 | Canon Anelva Corporation | Inline-type wafer conveyance device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100847888B1 (en) * | 2006-12-12 | 2008-07-23 | 세메스 주식회사 | Apparatus for fabricating semiconductor device |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1702023A (en) * | 2004-05-27 | 2005-11-30 | 株式会社岛津制作所 | Base plate carrying device and base plate processing device therewith |
| JP2006054284A (en) * | 2004-08-11 | 2006-02-23 | Shimadzu Corp | Vacuum processing apparatus |
| WO2009060539A1 (en) * | 2007-11-09 | 2009-05-14 | Canon Anelva Corporation | Inline-type wafer conveyance device |
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Address after: No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone, 100176 Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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