KR20120066113A - Apparatus and method for processing substrate - Google Patents

Abstract

PURPOSE: A substrate processing apparatus and a substrate processing method are provided to shorten substrate processing time by simultaneously loading and unloading a substrate. CONSTITUTION: A horizontal transfer unit(100) for loading receives a substrate through a loading unit formed in one side of a frame(1). A horizontal transfer unit(100') for unloading discharges the completely processed substrate from a substrate processing unit(400) to the outside through an unloading unit. A vertical transfer unit(200) for loading vertically moves between the horizontal transfer unit for the loading and the substrate processing unit. A vertical transfer unit(200') for unloading vertically moves between the substrate processing unit and the horizontal transfer unit for the unloading. A substrate transfer unit(300) for loading includes a roller which receives the substrate from the vertical transfer unit for the loading and transfers the substrate to the substrate processing unit.

Description

Substrate processing apparatus and substrate processing method {APPARATUS AND METHOD FOR PROCESSING SUBSTRATE}

The present invention relates to a substrate processing apparatus and a substrate processing method, and more particularly, to stably transfer and prevent substrate deflection, and to smoothly and quickly transfer the substrate between the substrate transfer means. It relates to a substrate processing apparatus and a substrate processing method that can reduce the time.

In general, a flat panel display manufacturing process, such as the deposition of a thin film, the formation of a mask, the etching, etc. are selectively repeated on a large glass substrate to manufacture the devices required. In the process of such a process, a cleaning process is performed to remove foreign substances from the substrate before, after, or before and after the process.

In order to shorten the overall manufacturing process time, it is necessary to minimize the moving distance of the substrate. For this purpose, a device is used to withdraw a substrate from a cassette including a plurality of substrates using a single transfer robot, and then perform a specific process again. The substrates need to be loaded and unloaded sequentially sequentially.

That is, the substrate taken out from the cassette is supplied to the first processing apparatus using a single transfer robot, the substrate which has been processed by the first processing apparatus is again supplied to the second processing apparatus, and then the process is performed at the second processing apparatus. A method of storing the finished substrate back in the cassette has been proposed.

As an example of such a device, Korean Patent No. 500170, "Horizontal and vertical conveying apparatus of substrate," has been proposed.

The Republic of Korea Patent No. 500170 is a horizontal transfer means for transporting the loaded substrate in the horizontal direction after the substrate withdrawn from the cassette is disposed, is arranged to be lifted / lowered on the frame and the substrate processing by taking the substrate from the horizontal transfer means Disclosed is a vertical transfer means for supplying a unit, and a transfer unit disposed between the vertical transfer means and the substrate processing unit to take over and transfer a substrate from the vertical transfer means.

The vertical conveying means comprises a pair of upper hands that take up and move the substrate from the horizontal conveying means, and a lower hand that takes over the substrate from the pair of upper hands and takes over the loader, and lowers the lower hand. When the plurality of lower support pins protruding upward in the horizontal frame of the lower hand passes through the conveying rollers of the transfer unit, the lower support pins descend, and when the plurality of lower support pins descend below the substrate pass line, the substrate is separated from the lower hand and conveyed. It is comprised by taking over the upper part of a roller.

However, according to this structure, since the substrate is loaded or unloaded from the outside by one horizontal transfer means, when the substrate is loaded by the horizontal transfer means, the unloading operation of the substrate which has been processed cannot be performed. The substrate processing takes a lot of time, there was a problem that the productivity is lowered.

In addition, in the process of taking over the substrate from the vertical transfer means to the transfer unit, in order to take over the substrate on the transfer roller while the lower hand is lowered between the transfer rollers and positioned directly above the rotational axis of the transfer roller, a transfer roller having a large diameter must be provided. There is a problem that the volume and weight of the conveying roller is increased and thus a lot of load is applied to the driving means for driving the conveying roller.

The present invention has been made to solve the above problems, by reducing the substrate processing time by performing the loading and unloading process of the substrate at the same time, while simplifying the structure that the substrate is transferred from the vertical transfer means to the substrate transfer means An object of the present invention is to provide a substrate processing apparatus and a substrate processing method for smoothly taking over and taking over a substrate.

Substrate processing apparatus of the present invention for realizing the object as described above comprises a horizontal transfer unit for taking over the substrate from the loading unit, and a horizontal transfer unit for unloading to take over the completed substrate to the unloading unit Horizontal transfer means; A vertical transfer unit for lifting and lowering for transfer / takeover of the substrate between the loading horizontal transfer unit and the substrate processing unit, and a lowering unit for transfer / takeover of the substrate between the substrate processing unit and the unloading horizontal transfer unit Vertical transfer means consisting of an unloading vertical transfer part; And a loading substrate transfer unit including a plurality of rollers that take over the substrate from the loading vertical transfer unit and transfer the substrate to the substrate processing unit, and transfer the substrate processed by the substrate processing unit to the unloading vertical transfer unit. A substrate transfer means comprising an unloading substrate transfer part having a plurality of rollers, wherein the horizontal transfer means includes a substrate loading portion on which a substrate is seated and supports both ends of the substrate loading portion and horizontally supports the substrate loading portion And a horizontal driving unit configured to reciprocate and transfer the substrate, wherein the vertical transfer unit includes a substrate take-up unit which takes over / takes a substrate between the substrate stacking unit of the horizontal transfer unit, and supports both ends of the substrate take-up unit. It includes a vertical drive for reciprocating up and down.

The substrate processing method of the present invention comprises the steps of: loading the substrate from the loading unit to the horizontal transfer unit for loading at the same time, the processing is completed, the unloading unit from the horizontal transfer unit for unloading; Supporting both ends of the substrate by the loading horizontal transfer unit to transfer the substrate in a direction opposite to the substrate transfer direction of the substrate processing unit; Transferring the substrate from the horizontal transfer unit for loading to the Shanghai transfer unit for loading and transferring the substrate down by the Shanghai transfer unit for loading; After the substrate is transferred to the loading substrate transfer unit from the loading shanghai unit, the loading shanghai unit is lowered to a retreat space provided under the loading substrate transfer unit; And immediately after the substrate is transferred toward the substrate processing unit by the loading substrate transfer unit, the loading and moving unit for lifting up and down moves upward to receive the next substrate from the loading horizontal transfer unit.

According to the substrate processing apparatus and the substrate processing method according to the present invention, it is possible to stably transfer while preventing the substrate from sagging, and can simultaneously process the loading and unloading of the substrate, thereby reducing the substrate processing time, While simplifying the structure that the substrate is transferred from the vertical transfer means to the substrate transfer means, it is possible to smoothly take over and take over the substrate, and also to reduce the manufacturing cost of the substrate processing apparatus by miniaturizing the roller of the substrate transfer part, The load has the effect of reducing it.

1 is a perspective view showing the overall configuration of a substrate processing apparatus according to the present invention;
Fig. 2 is a front view of Fig. 1,
3 is a left side view of FIG. 1;
Figure 4 is a partial perspective view showing the configuration of the substrate transfer portion for loading;
5 is a front view showing a state in which the substrate is horizontally transported by the horizontal transport unit for loading,
6 is a front view illustrating a process in which the substrate is transferred from the horizontal transfer unit for loading to the vertical transfer unit for loading;
7 is a front view showing a state where the substrate is lowered by the vertical transfer unit for loading,
8 is a left side view showing a state in which the substrate is transferred to the loading substrate transfer unit from the vertical transfer unit for loading;
9 is a front view showing a state in which the substrate take-up part is retracted downward after the substrate is turned over to the loading substrate transfer part;
10 is a front view showing a state in which the substrate is transferred by the loading substrate transfer unit and the substrate take-up unit is elevated upward;
11 is a front view illustrating a state in which the substrate is horizontally moved by the unloading substrate transfer unit after passing through the substrate processing unit;
12 is a right side view illustrating a process in which a substrate is turned over from an unloading substrate transfer unit to an unloading vertical transfer unit;
FIG. 13 is a front view illustrating a process in which a substrate is turned over from an unloading vertical transfer part to an unloading horizontal transfer part;
14 is a front view illustrating a state in which the substrate is horizontally moved by the unloading horizontal transfer part and the substrate take-over part of the unloading vertical transfer part is lowered and retracted.

Hereinafter, the configuration and operation of the preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing the overall configuration of a substrate processing apparatus according to the present invention, Figure 2 is a front view of Figure 1, Figure 3 is a left side view of Figure 1, Figure 4 is a partial perspective view showing the configuration of the substrate transfer unit for loading. .

The substrate processing apparatus of the present invention includes a frame 1, a horizontal transfer unit 100 for loading a substrate G from the outside through a loading unit 10 formed on one side of the frame 1, and a substrate processing unit. Horizontal transfer means consisting of an unloading horizontal transfer unit (100 ') for taking over the substrate completed processing in the 400 through the unloading unit 20 formed on the upper side of the loading unit 10, the loading Vertical transfer unit 200 for lifting up and down to take over and take over the substrate between the horizontal transfer unit 100 and the substrate processing unit 400, and the horizontal transfer unit 100 for unloading with the substrate processing unit 400 ') A vertical transfer means consisting of an unloading vertical transfer part 200' which is raised and lowered to take over / take over the substrate, and takes over the substrate from the loading vertical transfer part 200 and the substrate processing part 400 And a substrate transfer part 300 for loading, which includes a plurality of rollers 350 for transferring to the substrate, and the substrate processing part 400. Standing, a number of unloading a substrate for having a roller 350 for conveying a transmit (processing 300 is complete, the substrate on which the unloading 200 'is vertically transmitted for a substrate transfer means consisting of a).

The loading unit 10 and the unloading unit 20 may be provided up and down at different positions, and the loading horizontal transfer unit 100 and the unloading horizontal transfer unit 100 'are respectively loaded. 10 and the unloading part 20 are positioned at a height, and in this embodiment, the case where the unloading part 20 is provided above the loading part 10 will be described as an example.

First, the configuration of the horizontal transfer means will be described.

The loading horizontal transfer unit 100 and the unloading horizontal transfer unit 100 'constituting the horizontal transfer means have different functions in terms of loading and unloading of the substrate, but are made of the same structure. It will be described below with reference to the configuration of the loading horizontal transfer unit 100.

The loading horizontal transfer part 100 supports the substrate loading part 110 on which the substrate inserted through the loading part 10 is seated, and supports both ends of the substrate loading part 110 and horizontally holds the substrate loading part 110. It consists of a horizontal drive unit 120 for conveying in the direction.

The horizontal driving unit 120 is installed at both sides of the frame 1 in a horizontal direction at a height capable of taking over the substrate inserted through the loading unit 10 so that the substrate loading unit 110 can slide in a horizontal direction. And supporting first slide rails 121 and 121a and driving means (not shown in the drawing) for providing power for horizontal movement of the substrate loading part 110.

The substrate loading part 110 may include a first arm 111 having both ends supported by the first slide rails 121 and 121a and a first arm facing in a direction opposite to the conveying direction of the substrate in the substrate processing part 400. A plurality of second arms 112 disposed on one side of the 111 and spaced apart from each other along a longitudinal direction of the first arm 111 and supported by a cantilever on the first arm 111 and the second arm; It is composed of a plurality of first pins 113 are arranged on the upper surface of the 112, spaced apart at predetermined intervals along the longitudinal direction of the second arm 112, on which the substrate is seated and supported.

The structure in which the second arm 112 is cantilevered to the first arm 111 is described below when the substrate is transferred / taken over between the horizontal loading means 100 for loading and the vertical vertical means for loading 200 as described below. This is to avoid the interference between the substrate loading part 110 and the substrate taking over part 210.

The first slide rails 121 and 121a may support the bottom surfaces of the free ends of the second arms 112a and 112b positioned close to the first slide rails 121 and 121a, and the first slide rails 121 and 121a may be attached to the first slide rails 121 and 121a. Accordingly, the position alignment means 122a and 122b are horizontally moved together with the substrate loading part 110.

The positioning means 122a and 122b supports the free ends of the second arms 112a and 112b from below to support the free end portions of the second arms 112a and 112b. 110 serves to reinforce the support to prevent the sag down.

In the present exemplary embodiment, the alignment means 122a and 122b support a bottom surface of the free ends of the second arms 112a and 112b and extend / contract up and down to a cylinder capable of adjusting the inclination of the substrate loading part 110. Can be configured.

With this configuration, both ends of the first arm 111 are supported by the first slide rails 121 and 121a on both sides perpendicular to the transfer direction, and both ends parallel to the transfer direction are formed. Since it is supported by one arm 111 and the position alignment means 122a and 122b, it is possible to prevent inclination toward one side during substrate transfer and transfer in a stable state to prevent defects such as bending or damage of the substrate. do.

The unloading horizontal transfer part 100 ′ has the same structure as the loading horizontal transfer part 100, except that the heights of the first slide rails 121 and 121 a are different from each other and the free end of the second arm 112 is disposed. Since there is only a difference in that the directions are located in opposite directions, the description of the structure of the unloading horizontal transfer unit 100 ′ will be omitted.

Hereinafter, the configuration of the vertical transfer means will be described.

The loading vertical transfer unit 200 and the unloading vertical transfer unit 200 'constituting the vertical transfer means have a different function in that the loading and unloading of the substrate are performed, but because they have the same structure. It will be described below based on the configuration of the loading vertical transfer unit 200.

The vertical loading unit 200 for loading may include a substrate take-over unit 210 that takes over / takes a substrate between the substrate loading unit 110 and the substrate transfer unit 210 of the horizontal transfer unit 100 for loading. It supports both ends and consists of a vertical driving unit 220 for reciprocating the substrate take-up portion 210 up and down.

The vertical driving unit 220 slidably supports both ends of the substrate take-over part 210, and is provided with second slide rails 221 and 221a installed vertically on both sides of the frame 1, and the substrate take-up part 210. Height adjustment means for supporting the bottom surface of the third arm 211a of the substrate take over part 210 to adjust the inclination of the upper and lower with the substrate take over part 210 along the second slide rails 221a. 224 and driving means (not shown in the figure) for providing power for shangdong movement of the substrate take-over portion 210.

The substrate take-up unit 210 may face the third arms 211 and 211a and the third arms 211 and 211a which are connected to the inner surfaces of the second slide rails 221 and 221a so as to be movable up and down, respectively. It includes a plurality of fourth arms 212, which are spaced at regular intervals on the inner surface and fixed at both ends, and a plurality of second pins 213 protruding upward from the upper surface of the fourth arm 212 and disposed to be spaced apart from each other. .

The substrate take over part 210 always moves up and down at a lower position than the substrate load part 110, and the length of the substrate take up part protruding upward from the second pin 213 provided in the substrate take over part 210 is the substrate load part. The upper and lower thicknesses of the second arm 112 of the unit 110 and the height protruding upward of the first pin 113 are formed longer than the sum of the lengths. Accordingly, after the substrate loading part 110 of the loading horizontal transfer part 100 is horizontally transferred to the upper portion of the substrate taking over part 210 of the loading vertical transfer part 200, the substrate taking part 210 is moved. When moved upward, the substrate seated on the first pin 113 of the substrate loading part 110 may be turned over to the second pin 213 of the substrate taking over part 210.

The unloading vertical transfer part 200 ′ has the same structure as the loading vertical transfer part 200, except that the substrate transfer part 210 corresponds to the height of the loading part 10 and the unloading part 20. Since there is only a difference in the height of moving the upper side along the second slide rails (221, 221a), description of the structure of the unloading vertical transfer unit 200 'will be omitted.

Hereinafter, the structure of the substrate transfer part provided below the vertical transfer means will be described.

The substrate transfer part includes a loading substrate transfer part 300 provided at the front of the substrate processing part 400 and an unloading substrate transfer part 300 'provided at the rear of the substrate processing part 400, Since only the difference is made of the same structure, with reference to Figure 4 below with reference to the configuration of the loading substrate transfer unit 300, the detailed description of the configuration of the unloading substrate transfer unit 300 ' Will be omitted.

The loading substrate transfer unit 300 receives a substrate from the vertical transfer unit 200 for loading and transfers a plurality of rollers 350 to the substrate processing unit 400 and provides power for rotation of the rollers 350. It consists of a drive means.

The driving means is disposed between the drive motor 310, the rotating shaft 320 is coupled to the drive motor 310, and the rotating shaft 320 and the roller shaft 340 up and down the drive motor 310 It consists of a power transmission means 330 for transmitting the power of the roller shaft 340 to the roller 350.

In the present invention, the substrate taking over part 210 of the loading vertical transfer part 200 when the substrate is transferred from the loading vertical transfer part 200 to the loading substrate transfer part 300 is the roller 350 and the roller shaft. It is characterized in that the driving means is disposed in a position that can prevent the interference during the takeover / takeover of the substrate by passing through the space (S) provided to be opened up and down between the (340).

In order to prevent such interference, as shown in FIG. 4, the power transmission means 330 is vertically disposed between the rotation shaft 320 and the roller shaft 340 of the motor 310. In one embodiment of the power transmission means 330, the first gear 331 is coupled to the rotary shaft 320 of the motor 310 at regular intervals along the axial direction, the respective first gear 331 The second gear 332 is connected to the third gear 334 is coupled to the upper end of the rotating rod 333 is vertically coupled to the second gear 332 is coupled to the lower end, the roller shaft 340 The middle of the fourth gear 335 connected to the third gear 334 may be configured to be combined.

Here, the gear coupling between the first gear 331 and the second gear 332, the third gear 334 and the fourth gear 335 may be a combination of a worm and a worm gear or a combination of bevel gears. If the rotational direction of the rotational shaft 320 can be changed by the rotation of the roller shaft 340 located in a direction orthogonal to the upper side thereof, the power transmission means may be combined with various other gears or by a combination of pulleys and belts and gears ( 330 may be configured.

In addition, when the substrate take-up unit 210 of the vertical transfer unit 200 is lowered to the retraction space (S) during the takeover of the substrate to prevent interference with the support frame 360 for supporting both ends of the roller 350 In order to allow the fourth arm 212 of the substrate take-over part 210 to pass through the support frame 360, a groove 365 having a shape in which the upper side is opened and cut in a lengthwise direction is formed in the retraction space S. It is formed on both sides at regular intervals.

The roller 350 having a small diameter is disposed by arranging the power transmission means 330 of the driving unit to provide a space S for evacuating the substrate transfer part 210 to the lower side of the loading substrate transfer part 300. Even if it is used, it is possible to take over and take over the board, which requires a lot of load for driving the roller and increasing the volume of the device, which is caused by having a large diameter roller to provide a space for evacuation of the vertical transfer part. Can be solved.

On the other hand, in the present embodiment is configured to transfer the substrate to one side inclined to smoothly perform the cleaning and drying process of the substrate in the substrate processing unit 400, the roller 350 of the loading substrate transfer unit 300 is also one side It is arranged to be inclined.

Since the substrate is transferred in an inclined state as described above, when the substrate is turned on the roller 350 to the vertical transfer parts 200 and 200 ′, one side of the substrate take-up part 210 can be stably turned over to meet the inclination angle of the substrate. The height adjusting means 224 is provided to adjust the vertical height of the.

Hereinafter, a loading operation in which the substrate is transferred from the loading unit 10 to the substrate processing unit 400 will be described with reference to FIGS. 5 to 10.

5 is a front view illustrating a state in which the substrate is horizontally transferred by the loading horizontal transfer unit, FIG. 6 is a front view illustrating a process in which the substrate is turned over from the loading horizontal transfer unit to the loading vertical transfer unit, and FIG. 8 is a left side view showing a state in which the substrate descends by the loading vertical transfer unit, FIG. 8 is a left side view showing a state in which the substrate is transferred from the loading vertical transfer unit to the loading substrate transfer unit, and FIG. 10 is a front view showing a state in which the substrate take-up part is retracted to the lower side after being transferred to the sending part, and FIG. 10 shows a state in which the substrate is transferred by the loading substrate transfer part and the substrate take-up part is lifted upward.

First, when the substrate is taken over by the robot from the outside through the loading unit 10 into the substrate processing apparatus of the present invention, the substrate is loaded with the substrate 110 of the horizontal transfer unit 100 for loading as shown in FIG. 2. Is seated on.

In this state, as shown in FIG. 5, the substrate G is transferred along the first slide rail 121a in the horizontal direction by the horizontal driver 120 of the loading horizontal transfer part 100, and in this process, the substrate The free end of the second arm 112b of the loading unit 110 is supported by the alignment means 122b to maintain the horizontal state.

Then, when the substrate is horizontally transferred to the upper side of the substrate take-up portion 210 of the loading vertical transfer unit 200 by the loading horizontal transfer unit 100, as shown in Figure 6 vertical loading unit 200 for loading As the substrate take-up part 210 is moved upward by the vertical driving part 220 of the substrate, the substrate seated on the first pin 113 of the substrate load part 110 is the second pin of the substrate take-up part 210. It is taken over on 213.

When the substrate is seated on the second pin 213 of the substrate take-over part 210, the substrate loading part 110 receives the next loaded substrate by the loading horizontal transfer part 100 as shown in FIG. In order to horizontally move toward the loading unit 10, and immediately after the substrate loading unit 110 is horizontally moved, the substrate is placed on the substrate taking part 210 of the vertical transfer unit 200 for loading. It descends along the rails 221 and 221a.

At this time, the substrate take-up part 210 is lowered in a horizontal state as shown by the dotted line of FIG. 8 and then lowered by a certain distance, and is shown in solid line to stably take over the substrate to the loading substrate transfer part 300 which is inclined. As described above, the height adjusting means 224 supporting the lower side of the substrate take-over part 210 is extended to match the inclination of the roller 350 of the substrate transfer part 300 for loading to be inclined. The tilt of 210 is adjusted.

While the substrate is turned over to the loading substrate transfer part 300, as shown in FIG. 9, the substrate taking over part 210 is a retraction space S formed between the rollers 350 of the loading substrate transfer part 300. When the substrate is horizontally moved toward the substrate processing unit 400 by the substrate transfer unit 300 for loading, the substrate take-over unit 210 by the vertical transfer unit 200 for loading as shown in FIG. 10. ) Is lifted to take over the next substrate.

Hereinafter, an unloading operation in which the substrate is transferred from the substrate processing unit 400 to the unloading unit 20 will be described with reference to FIGS. 11 to 14.

11 is a front view illustrating a state in which the substrate is horizontally moved by the unloading substrate transfer unit after passing through the substrate processing unit, and FIG. 12 is a process in which the substrate is transferred from the unloading substrate transfer unit to the unloading vertical transfer unit. 13 is a front view illustrating a process in which the substrate is transferred from the unloading vertical transfer unit to the unloading horizontal transfer unit, and FIG. 14 is a horizontal transfer of the substrate by the unloading horizontal transfer unit. It is a front view showing a state in which the substrate take over part of the vertical transfer part for loading is lowered and retracted.

After the cleaning and drying process is completed in the substrate processing unit 400, the substrate is horizontally transferred by the unloading substrate transfer unit 300 ′ as shown in FIG. 11, and the roller of the unloading substrate transfer unit 300 ′ is used. It is horizontally transferred to the upper side of the substrate take-up part 210 which was waiting at the lower side of the evacuation space S provided between the 350.

Subsequently, the substrate takeover unit 210 waiting to take over is seated in an inclined state on the unloading substrate transfer unit 300 'according to the same inclination, as shown by a dotted line in FIG. When the height of the height adjusting means 224 is lifted in a state in which the inclination of the substrate take-up part 210 is adjusted while being lifted up to a certain height after lifting the substrate, the height of the height adjusting means 224 is again shown. The inclination is adjusted so that the substrate take over part 210 becomes horizontal due to the contraction.

As shown in FIG. 13, when the substrate take-up part 210 on which the substrate is seated by the unloading vertical transfer part 200 ′ is transferred to the uppermost side, the substrate loading is performed by the unloading horizontal transfer part 100 ′. The unit 110 is horizontally transferred to be positioned above the substrate take-over unit 210.

Subsequently, as shown in FIG. 14, the substrate take-over part 210 is lowered by the unloading vertical transfer part 200 ′, and the substrate is loaded on the substrate loading part 110 of the unloading horizontal transfer part 100 ′. Subsequently, the substrate take-up part 210 moves to the retraction space S provided under the unloading substrate transfer part 300 'in order to take over the next substrate, and at the same time, the horizontal transfer part for unloading ( The substrate loading part 110 of 110 ′ is horizontally moved toward the unloading part 20 to carry out the substrate to the outside.

In the above description, for convenience of description, each operation state is described by separating the loading operation and the unloading operation of the substrate. However, in the substrate processing apparatus of the present invention, the loading and unloading operations are continuously performed at the same time, thereby processing the substrate. It will be possible to improve.

1 frame 10: loading unit
20: unloading unit 100: horizontal transfer unit for loading
100 ': horizontal transfer part for unloading 110: substrate loading part
111: first arm 112a, 112b: second arm
113: first pin 120: horizontal drive unit
121,121a: First slide rail 122a, 122b: Position alignment means
200: vertical transfer unit for loading 200 ': vertical transfer unit for unloading
210: substrate taking over part 211, 211a: third arm
212: fourth arm 213: second pin
220: vertical driving unit 221, 221a: second slide rail
224: height adjustment means 300: loading substrate transfer unit
300 ': substrate transfer part for unloading 310: drive motor
320: rotating shaft 330: power transmission means
340: roller shaft 350: roller
400: substrate processing unit

Claims (12)

A horizontal transfer unit comprising a loading horizontal transfer unit which takes over the substrate from the loading unit, and an unloading horizontal transfer unit which takes over the processed substrate to the unloading unit;
A vertical transfer unit for lifting and lowering for transfer / takeover of the substrate between the loading horizontal transfer unit and the substrate processing unit, and a lowering unit for transfer / takeover of the substrate between the substrate processing unit and the unloading horizontal transfer unit Vertical transfer means consisting of an unloading vertical transfer part; And
A loading substrate transfer unit having a plurality of rollers to take over the substrate from the vertical transfer unit for loading and transfer the substrate to the substrate processing unit, and a plurality of transfers the substrate processed in the substrate processing unit to the unloading vertical transfer unit Includes; substrate transfer means consisting of an unloading substrate transfer unit having a roller of
The horizontal transfer means includes a substrate loading portion on which the substrate is mounted, and a horizontal driving portion supporting both ends of the substrate loading portion and reciprocating the substrate loading portion horizontally.
The vertical transfer means may include a substrate take-up part that takes over / takes a substrate between the substrate loading part of the horizontal transfer means, and a vertical drive part that supports both ends of the substrate take-up part and reciprocates the substrate take-up part up and down. Substrate processing apparatus, characterized in that. The method of claim 1,
The horizontal driving part includes a first slide rail which supports both ends of the substrate loading part slidably and is positioned horizontally on both sides,
The substrate loading part includes a first arm having both ends supported by the first slide rail, and a cantilever beam supported at one side of the first arm at a predetermined interval, and a plurality of first pins protruded upwardly and spaced apart from each other. A substrate processing apparatus comprising a plurality of second arms. The method of claim 2,
The first slide rail is provided with alignment means for supporting a free end of the second arm positioned adjacent to the first slide rail and moving together with the substrate loading portion, and loading the substrate by the position alignment means. Substrate processing apparatus, characterized in that the deflection of the negative portion is prevented. The method of claim 3,
And the positioning means is a cylinder for supporting the bottom of the free end of the second arm and being extended / contracted to adjust the height of the substrate loading portion. The method of claim 1,
The vertical driving part may include a second slide rail which is slidably supporting both ends of the substrate taking over part, and is positioned vertically on both sides of the substrate driving part,
The substrate take-up part may be spaced apart from each other by a third arm connected to the inner surface facing each other of the second slide rail, and spaced apart at regular intervals from the inner surface of the third arm, and both ends thereof may be fixed upwards. And a plurality of fourth arms having a plurality of second pins spaced apart from each other. The method of claim 5,
And the second pin protrudes upward longer than the upper and lower heights of the sum of the first pin and the second arm. The method of claim 6,
At the time of taking over or taking over the substrate between the substrate loading portion and the substrate taking over portion,
The substrate loading portion is located above the substrate taking over portion,
During loading of the substrate, the substrate seated on the first pin of the substrate loading portion is turned over to the second pin of the substrate taking over portion by lifting of the substrate taking over portion,
And a substrate seated on the second pin of the substrate takeover part when the substrate is unloaded is transferred onto the first pin of the substrate load part by the lowering of the substrate takeover part. The method of claim 5,
The loading substrate transfer part and the unloading substrate transfer part may include a driving motor for providing rotational force to the plurality of rollers, a rotation shaft axially coupled to the driving motor, and a vertical axis between the rotation shaft and the roller shaft of the roller. Is disposed and includes a power transmission means for transmitting the power of the drive motor,
When the substrate is transferred between the substrate take-over part and the substrate transfer means, the fourth arm of the substrate take-up part passes through the evacuation space which is formed up and down between the plurality of roller shafts and between the power transmission means. Substrate processing apparatus, characterized in that the additional movement to the lower side without interference. The method of claim 8,
And the power transmission means is vertically disposed between the rotation shaft of the motor and the roller shaft. The method of claim 1,
The loading part and the unloading part are provided in different positions up and down, and the loading horizontal moving part and the unloading horizontal moving part are positioned at heights corresponding to the heights of the loading part and the unloading part, respectively. Substrate processing apparatus. Taking out the substrate from the unloading horizontal transfer unit to the unloading unit while the substrate is loaded from the loading unit to the horizontal transfer unit for loading;
Supporting both ends of the substrate by the loading horizontal transfer unit to transfer the substrate in a direction opposite to the substrate transfer direction of the substrate processing unit;
Transferring the substrate from the horizontal transfer unit for loading to the Shanghai transfer unit for loading and transferring the substrate down by the Shanghai transfer unit for loading;
After the substrate is transferred to the loading substrate transfer unit from the loading shanghai unit, the loading shanghai unit is lowered to a retreat space provided under the loading substrate transfer unit; And
Immediately after the substrate is transferred toward the substrate processing unit by the loading substrate transfer unit, the loading shanghai unit is lifted upward to take over the next substrate from the loading horizontal transfer unit. . The method of claim 11,
Transferring the substrate, which has been processed in the substrate processing unit, by the unloading substrate transfer unit, and taking over the substrate to the unloading shanghai transfer unit which is lifted from the evacuation space provided under the unloading substrate transfer unit;
Taking up the substrate to the unloading horizontal transfer unit after the unloading substrate transfer unit is elevated upward; And
The unloading vertical transfer part immediately descends toward the retraction space provided below the unloading substrate transfer part so as to take over the next substrate from the unloading substrate transfer part. And horizontally conveying the substrate toward the unloading portion by the same.

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