JP4496447B2 - Substrate transfer device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate transfer apparatus for transferring a plasma display substrate or a glass substrate.
[0002]
[Prior art]
In the manufacturing process of the plasma display panel (PDP), the formation of the ribs and the formation of the electrodes are completed through the steps of cleaning, printing, and firing the plasma display substrate. Most of the devices in these processes are processed for each sheet. On the other hand, the substrate is transported to each process by a cassette by transporting a plurality of substrates from the relationship of the transport time. Accordingly, the cassette station shown in FIG. 4 is installed after entering and completing each process, and a substrate transfer machine is used that takes out the substrate from the cassette and stores the substrate in the cassette.
[0003]
As schematically shown in FIG. 5, the cassette horizontally supports the substrate 1 at the outer edge except the take-out side, and stores a plurality (for example, 15 to 20 sheets) at intervals in the vertical direction. Yes. Since the surface of the substrate 1 is subjected to doping and other treatments, it is necessary to completely avoid contact with foreign substances. Therefore, conventionally, an articulated arm robot as shown in FIG. 6 is used as a substrate transfer device, a thin hand 6 is horizontally inserted between the substrates 1, supported from the back, and the substrate is lifted slightly and taken out from the cassette. , Automatic transfer.
[0004]
However, the above-described conventional substrate transfer apparatus has the following problems.
(1) In the manufacture of plasma displays in recent years, the substrate size is increased (for example, 1000 mm × 1400 mm) and the weight is doubled as compared with the conventional liquid crystal display. For this reason, the articulated arm robot used in the manufacture of the conventional liquid crystal display cannot handle this large substrate. In addition, even when the conventional articulated arm robot is increased in size, the arm becomes longer, the space required for arm swinging and the like becomes larger, the size of the clean room needs to be increased, and the equipment cost and operation cost are greatly increased. .
(2) When a substrate is transferred by an articulated arm robot, it is necessary to pull out the substrate with a hand at the tip of the arm and move the hand to a desired position by turning or flipping it horizontally. This not only complicates the operation of the arm, but also makes it difficult to operate at high speed due to the heavy weight of the arm and the like, resulting in a slower operating speed and lower positioning accuracy. In addition, if it is attempted to increase the speed and accuracy forcibly, the apparatus power will be greatly increased.
[0005]
In order to solve these problems, the inventors of the present invention previously created and filed a substrate transfer apparatus shown in FIG. 7 (Japanese Patent Laid-Open No. 11-227943). The substrate transfer apparatus includes a carry-in hand 4 that supports the substrate at the carry-in position and moves it to an intermediate position, and a carry-out hand 5 that supports the substrate at the intermediate position and moves it to the carry-out position. The hand can move horizontally in the substrate take-out direction X at the carry-in position and can move up and down, and can cross each other up and down at the intermediate position, and when one of them is lowered, the other rises. Thus, it can be horizontally moved in the X direction. In this figure, 6 is a horizontal movement device and 7 is a vertical movement device.
[0006]
With this structure, a large substrate can be transferred at high speed with a simple structure with small moving parts, a substrate that can be transferred with high accuracy even when the required installation space is small, and the transfer distance is large, and the required power is small. It became possible to be a device.
[0007]
[Problems to be solved by the invention]
However, the substrate transfer apparatus disclosed in Japanese Patent Application Laid-Open No. 11-227943 has the following problems.
(1) In order to avoid mutual interference between the carry-in hand 4 and the carry-out hand 5, the support portions 4b and 5b that cantilever support the finger portions 4a and 5a that can cross each other vertically at the intermediate position at the X direction outer end. And extra dead space is required.
(2) In addition, support portions 4b and 5b and a horizontal movement device 6 for handling the substrate outside the large substrate 1 are required.
For these reasons, it is difficult to further reduce the required installation space, the space occupied by the entire apparatus is large, and there is a problem that the clean room for storing it becomes large and its cost becomes excessive.
(3) Furthermore, a special device such as a push-up mechanism is required at the unloading position (receiving side) of the substrate 1 in order to avoid interference with the finger portions 4a and 5a, and a normal roller conveyor cannot be used. was there.
(4) Also, the next substrate cannot be taken out until the substrate is taken out from the carry-in position, transferred at the intermediate position, and transferred to the carry-out position, and the handling time for transfer is long and the cycle time is long. was there.
[0008]
In order to solve these problems, the inventors of the present invention have previously created and filed two types of substrate transfer apparatuses that have no intermediate substrate receiver (Japanese Patent Application No. 2000-122034). Unpublished).
[0009]
As schematically shown in FIG. 8, the substrate transfer apparatus without the intermediate substrate receiver includes a transfer hand 8 and an intermediate horizontal conveyor 9, and (A) the transfer hand 8 is placed at the bottom of the cassette 2 under the conveyor. (B) The substrate 1 is placed on the transfer hand 8 and the transfer hand 8 is pulled out on the conveyor. (C) The transfer hand 8 is sewn between the conveyors 9. It descends and the substrate 1 is placed on the conveyor 9. (D) Next, while transferring the substrate 1 on the conveyor 9 to the conveyor device 10 in the transport line, the transfer hand 8 is placed under the conveyor and under the next lowermost substrate 1 of the cassette 2 in parallel. insert. By repeating this step, the substrate 1 can be sequentially taken out from the cassette 2 and transferred to the conveyor device 10 in the transport line.
[0010]
This substrate transfer device has a feature that the operation is simple, but in order to avoid interference between the transfer hand 8 and the intermediate horizontal conveyor 9, the transfer hand 8 can be moved horizontally at the same level as the intermediate horizontal conveyor 9. Can not. Therefore, there is a problem that the clearance between the lowermost substrate 1 in the cassette 2 and the cassette bottom plate becomes large, and the dead space in the cassette 2 is large.
Further, in this substrate transfer apparatus, after the last substrate 1 in the cassette is transferred to the step (C) and then to the step (D), the transfer hand is inserted into the empty cassette. Therefore, the replacement work for the next new cassette is obstructed. For this reason, it is necessary to stop the transfer hand in the step (C) during the cassette replacement work, and accordingly, the waiting time becomes longer and the tact time becomes longer.
[0011]
On the other hand, a substrate transfer apparatus having an intermediate substrate receiver includes an intermediate substrate receiver 11 in addition to the transfer hand 8 and the intermediate horizontal conveyor 9 as schematically shown in FIG. The substrate 1 of the cassette 2 is taken out through (B) the hand 8 is lowered and the substrate receiver 11 is moved up, and the substrate 1 is placed on the substrate receiver 11, and (C) the hand 8 is at a position where it does not interfere with the conveyor 9. (D) The substrate receiver 11 is lowered and the substrate 1 is transferred to the conveyor 9. (E) The substrate 1 is transferred to the conveyor device 10 by the conveyor 9, and then the substrate receiver 11 is raised. Then, the hand 8 is raised and the next substrate is taken out. By repeating this step, similarly, the substrates 1 can be sequentially taken out from the cassette 2 and transferred to the conveyor device 10 in the transport line.
[0012]
In this substrate transfer apparatus, after the last substrate 1 in the cassette is transferred to the step (D), the empty cassette can be replaced with the next new cassette during the step (E). Therefore, the substrate can be transported even when the cassette is replaced. However, there is a problem that the overall height is high and it is necessary to increase the lifting stroke of the hand.
[0013]
The present invention has been made to solve such problems. That is, the main object of the present invention is to transfer a large substrate at high speed (short cycle time), further reduce the required installation space, transfer a substrate to a normal roller conveyor without the need for a special device, and An object of the present invention is to provide a substrate transfer apparatus that can be manufactured at a low cost with a simple structure with few movable parts. Another object of the present invention is to provide a substrate transfer apparatus that can reduce the clearance between the lowermost substrate in the cassette and the cassette bottom plate and can carry the substrate even when the cassette is replaced.
[0014]
[Means for Solving the Problems]
A substrate transfer apparatus for transferring a horizontally supported flat plate-like substrate (1) from a carry-in position to a carry-out position while supporting the lower surface of the substrate, and supporting the substrate at the carry-in position to an intermediate position A transfer hand (8) to be moved, an intermediate horizontal conveyor (9) that supports the substrate at the intermediate position and moves it to the unloading position, and an intermediate substrate receiver (11) that can be raised and lowered to the upper and lower sides of the intermediate horizontal conveyor at the intermediate position The transfer hand can be moved horizontally in the substrate take-out direction X at the loading position and can be moved up and down at the upper part of the intermediate horizontal conveyor, and the intermediate substrate receiver can be crossed up and down with the transfer hand and the intermediate horizontal conveyor. Composed of
The transfer hand (8) is passed over the conveyor (9) and inserted under the lowermost substrate (1) of the cassette (2) at the loading position, and the transfer hand is raised to place the substrate on the hand. Transfer, move the transfer hand horizontally to the middle position, lower the transfer hand and raise the substrate receiver to transfer the substrate onto the substrate receiver, pass the transfer hand between the substrate receiver and the conveyor and move the next substrate There is provided a substrate transfer apparatus characterized in that it moves to a carry-in position for taking out, lowers the substrate receiver, transfers the substrate onto a conveyor, and transfers it to the carry-out position .
[0016]
According to the first invention, since the transfer hand (8) moves up and down only at the upper part of the conveyor, its stroke can be shortened and interference with the conveyor can be avoided, so the hand shape can be set freely. . In addition, large substrates can be transferred at high speed (short cycle time), the required installation space can be reduced, substrates can be transferred to ordinary roller conveyors without the need for special equipment, and there are few moving parts and a simple structure. And can be manufactured at low cost.
[0017]
According to the second invention, there is provided a substrate transfer apparatus for transferring a horizontally supported flat plate-like substrate (1) from the carry-in position to the carry-out position while supporting the lower surface of the substrate. A transfer hand (8) for supporting the substrate and moving it to an intermediate position; and an intermediate horizontal conveyor (9) for supporting the substrate at the intermediate position and moving it horizontally to the unloading position. The substrate can be moved horizontally in the direction X of taking out the substrate, and can be moved up and down to the middle horizontal conveyor, and can be crossed up and down with the middle horizontal conveyor at the middle position. It can be moved up and down,
The transfer hand (8) is passed under the conveyor (9) and inserted under the lowermost substrate (1) of the cassette (2) in the loading position, and the transfer hand is raised to place the substrate on the hand. Reloading, lowering the conveyor, moving the transfer hand horizontally over the conveyor to the middle position, lowering the transfer hand and raising the conveyor to transfer the substrate onto the conveyor and transfer to the unloading position A substrate transfer apparatus is provided.
[0019]
According to the second aspect of the invention, the clearance between the lowermost substrate in the cassette and the cassette bottom plate can be reduced, and the substrate can be transported even when the cassette is replaced. In addition, large substrates can be transferred at high speed (short cycle time), the required installation space can be reduced, substrates can be transferred to ordinary roller conveyors without the need for special equipment, and there are few moving parts and a simple structure. And can be manufactured at low cost.
[0020]
According to the third aspect of the present invention, there is provided a substrate transfer apparatus for transferring a horizontally supported flat plate-like substrate (1) from the carry-in position to the carry-out position while supporting the lower surface of the substrate. A transfer hand (8) for supporting the substrate and moving it to an intermediate position; and an intermediate horizontal conveyor (9) for supporting the substrate at the intermediate position and moving it horizontally to the unloading position. The substrate can be moved horizontally in the direction X of taking out the substrate, and can be moved up and down to the middle horizontal conveyor, and can be crossed up and down with the middle horizontal conveyor at the middle position. It is configured to be retractable in the width direction ,
The transfer hand (8) is passed under the conveyor (9) and inserted under the lowermost substrate (1) of the cassette (2) in the loading position, and the transfer hand is raised to place the substrate on the hand. Repositioning, retracting the conveyor in the width direction, moving the transfer hand horizontally over the conveyor to the intermediate position, returning the conveyor to the transfer position, lowering the transfer hand, transferring the substrate onto the conveyor, and the unloading position To be transferred to.
[0022]
According to the third aspect of the invention, the clearance between the lowermost substrate in the cassette and the cassette bottom plate can be reduced, and the substrate can be transported even when the cassette is replaced. In addition, large substrates can be transferred at high speed (short cycle time), the required installation space can be reduced, substrates can be transferred to ordinary roller conveyors without the need for special equipment, and there are few moving parts and a simple structure. And can be manufactured at low cost.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In each figure, common portions are denoted by the same reference numerals, and redundant description is omitted.
[0024]
FIG. 1 is an operation explanatory diagram of the substrate transfer apparatus according to the first embodiment of the present invention. The substrate transfer apparatus of the present invention is a substrate transfer apparatus that transfers a horizontally supported flat plate-like substrate 1 from the carry-in position to the carry-out position while supporting the lower surface of the substrate.
[0025]
As shown in FIG. 1A, the substrate transfer apparatus of the present invention includes a transfer hand 8, an intermediate horizontal conveyor 9, and an intermediate substrate receiver 11.
The transfer hand 8 can be moved horizontally in the take-out direction X of the substrate 1 at the carry-in position, and can be moved up and down on the upper part of the intermediate horizontal conveyor 9. Therefore, the transfer hand 8 can support and move the substrate 1 at the carry-in position to the intermediate position.
The intermediate horizontal conveyor 9 is composed of a plurality of horizontal rollers fixed below the transfer hand 8, and by rotating each roller, the substrate 1 is supported at the intermediate position and horizontally to the conveyor device 10 at the carry-out position. It is designed to move.
The intermediate substrate receiver 11 is located at an intermediate position, is configured to be able to cross up and down with the transfer hand 8 and the intermediate horizontal conveyor 9, and can move up and down to the upper and lower sides of the intermediate horizontal conveyor 9 at the intermediate position.
[0026]
The substrate transfer apparatus shown in FIG. 1A operates as shown in FIGS. 1A to 1F to transfer a substrate from the carry-in position to the carry-out position. That is, (A) the transfer hand 8 is passed over the conveyor 9 and (B) is inserted under the lowermost substrate 1 of the cassette 2 at the loading position, and the transfer hand 8 is raised to place the substrate on the hand. (C) The transfer hand 8 is moved horizontally to an intermediate position, and the substrate 1 is transferred onto the substrate receiver 11 by lowering the transfer hand 8 and raising the substrate receiver 11, and (D) the transfer hand 8 Is moved to a loading position for taking out the next substrate 1 between the substrate receiver and the conveyor, (E) The substrate receiver 11 is lowered, the substrate 1 is placed on the conveyor, and transferred to the unloading position. (F) Next, the next substrate 1 is moved horizontally to the intermediate position by the transfer hand 8, and the next substrate is transferred onto the substrate receiver by lowering the transfer hand and raising the substrate receiver.
[0027]
In each step of FIG. 1, (E) and (F) are the same steps as (B) and (C), respectively. That is, by sequentially repeating (A) to (D) in FIG. 1, the substrates can be sequentially transferred from the carry-in position to the carry-out position.
[0028]
In the substrate transfer apparatus according to the first embodiment described above, the transfer hand 8 moves up and down only on the upper part of the conveyor 9, so that the stroke can be shortened. In addition, since the interference between the transfer hand 8 and the conveyor 9 can be surely avoided due to the difference in operating height, the hand shape can be set freely. Furthermore, only the large substrate 1 can be transferred at high speed (short cycle time) by repeating only the four steps (A) to (D) in FIG. Further, since only the intermediate position is required, the required installation space can be reduced. Furthermore, since only the substrate receiver 11 that moves up and down is required in addition to the transfer hand 8 and the conveyor 9, the substrate 1 can be transferred to the normal roller conveyor 10 without the need for a special device. Furthermore, the structure of FIG. 1 can be manufactured at low cost with a simple structure with few moving parts.
[0029]
FIG. 2 is an operation explanatory diagram of the substrate transfer apparatus according to the second embodiment of the present invention. Further, as shown in FIG. 2A, the substrate transfer apparatus of the present invention does not have the substrate receiver 11 in the first embodiment, but includes only the transfer hand 8 and the intermediate horizontal conveyor 9.
[0030]
The transfer hand 8 can be moved horizontally in the take-out direction X of the substrate 1 at the carry-in position, and can be moved up and down to the upper and lower sides of the intermediate horizontal conveyor 9. Therefore, the transfer hand 8 can support and move the substrate 1 at the carry-in position to the intermediate position. In this embodiment, the transfer hand 8 is configured to be able to cross up and down with the intermediate horizontal conveyor 9 at an intermediate position.
[0031]
The intermediate horizontal conveyor 9 is composed of a plurality of horizontal rollers, and by rotating each roller, the substrate 1 is supported at the intermediate position and moved horizontally to the conveyor device 10 at the carry-out position. Further, in this embodiment, the intermediate horizontal conveyor 9 is configured to be movable up and down at an intermediate position.
[0032]
The substrate transfer apparatus shown in FIG. 2A operates as shown in FIGS. 2A to 2D to transfer a substrate from the carry-in position to the carry-out position. That is, (A) the transfer hand 8 is inserted under the conveyor 9 and inserted under the lowermost substrate 1 of the cassette 2 at the carry-in position, and (B) the transfer hand 8 is raised and the substrate 1 is placed on the hand. (C) The transfer hand 8 is moved horizontally to the intermediate position through the conveyor 9, the transfer hand 8 is lowered and the conveyor 9 is raised to convey the substrate 1 to the conveyor. (D) The substrate 1 is moved horizontally by the intermediate horizontal conveyor 9 to the conveyor device 10 at the carry-out position.
[0033]
In addition, in each step of FIG. 2, (D) is the same step as (B). That is, by sequentially repeating (A) to (C) in FIG. 1, the substrate can be transferred in order from the carry-in position to the carry-out position.
[0034]
In the substrate transfer apparatus of the second embodiment described above, the transfer hand 8 is inserted under the conveyor 9 in step (A) and inserted under the lowermost substrate 1 of the cassette 2 at the loading position. The clearance between the lowermost substrate 1 in 2 and the cassette bottom plate can be reduced. In step (C), if the cassette is empty, it can be replaced with a new cassette, so that the substrate can be transported even when the cassette is replaced. In addition, as in the first embodiment, a large substrate can be transferred at high speed (short cycle time), the required installation space can be reduced, and a substrate can be transferred to a normal roller conveyor without the need for special equipment. In addition, it can be manufactured inexpensively with a simple structure with few moving parts.
[0035]
FIG. 3 is an operation explanatory diagram of the substrate transfer apparatus according to the third embodiment of the present invention. As shown in FIG. 3A, the substrate transfer apparatus according to the present invention also has no substrate receiver as in the second embodiment, and includes only a transfer hand 8 and an intermediate horizontal conveyor 9.
[0036]
The transfer hand 8 can be moved horizontally in the take-out direction X of the substrate 1 at the carry-in position, and can be moved up and down to the upper and lower sides of the intermediate horizontal conveyor 9. Therefore, the transfer hand 8 can support and move the substrate 1 at the carry-in position to the intermediate position. In this embodiment, the transfer hand 8 is configured to be able to cross up and down with the intermediate horizontal conveyor 9 at an intermediate position.
[0037]
The intermediate horizontal conveyor 9 is composed of a plurality of horizontal rollers, and by rotating each roller, the substrate 1 is supported at the intermediate position and moved horizontally to the conveyor device 10 at the carry-out position. In this embodiment, the intermediate horizontal conveyor 9 is configured to be retractable in the width direction at an intermediate position.
[0038]
The substrate transfer apparatus shown in FIG. 3A operates as shown in FIGS. 3A to 3D to transfer a substrate from the carry-in position to the carry-out position. That is, (A) the transfer hand 8 is inserted under the conveyor 9 and inserted under the lowermost substrate 1 of the cassette 2 at the carry-in position, and (B) the transfer hand 8 is raised and the substrate 1 is placed on the hand. In parallel, the conveyor 9 is retracted in the width direction (indicated by a broken line), (C) the transfer hand 8 is moved horizontally over the conveyor 9 to the intermediate position, the conveyor is returned to the transfer position, and moved. The loading hand 8 is lowered to transfer the substrate 1 onto the conveyor, and (D) the substrate 1 is moved horizontally by the intermediate horizontal conveyor 9 to the conveyor device 10 at the carry-out position.
[0039]
In addition, in each step of FIG. 2, (D) is the same step as (B). That is, by sequentially repeating (A) to (C) in FIG. 1, the substrate can be transferred in order from the carry-in position to the carry-out position.
[0040]
Similarly to the second embodiment, the substrate transfer apparatus of the third embodiment described above passes the transfer hand 8 under the conveyor 9 in step (A), and the lowermost substrate 1 of the cassette 2 at the carry-in position. Since it is inserted below, the clearance between the lowermost substrate 1 in the cassette 2 and the cassette bottom plate can be reduced. In step (C), if the cassette is empty, it can be replaced with a new cassette, so that the substrate can be transported even when the cassette is replaced. In addition, as in the first embodiment, a large substrate can be transferred at high speed (short cycle time), the required installation space can be reduced, and a substrate can be transferred to a normal roller conveyor without the need for special equipment. In addition, it can be manufactured inexpensively with a simple structure with few moving parts.
[0041]
In addition, this invention is not limited to embodiment mentioned above, Of course, it can change variously in the range which does not deviate from the summary of this invention.
[0042]
【The invention's effect】
As described above, the substrate transfer apparatus of the present invention has the following features.
(1) With the combination of the horizontal linear movement and lifting movement of the transfer hand, the substrate can be received from the cassette and directly transferred to the conveyor.
(2) The next substrate can be accessed while the receiving conveyor is transporting.
(3) Substrate conveyance to the cassette can be realized by a reverse process.
(4) Since the substrate is not changed, the dustproof performance is high and the substrate damage (there is no change in the substrate posture) is small.
(5) The sliding part can be concentrated in the lower part of the device, and the dustproof performance is high.
(6) The clearance between the lowermost substrate in the cassette and the cassette bottom plate can be reduced.
(7) The substrate can be transferred even when the cassette is replaced.
[0043]
Therefore, the substrate transfer apparatus of the present invention can transfer a large substrate at a high speed (short cycle time), further reduce the necessary installation space, and transfer the substrate to a normal roller conveyor without requiring a special device. It can be manufactured at low cost with a simple structure with few moving parts, and the clearance between the lowermost substrate and the cassette bottom plate in the cassette can be reduced, and the substrate can be transported even when the cassette is replaced. Has an effect.
[Brief description of the drawings]
FIG. 1 is an operation explanatory diagram of a substrate transfer apparatus according to a first embodiment of the present invention.
FIG. 2 is an operation explanatory diagram of a substrate transfer apparatus according to a second embodiment of the present invention.
FIG. 3 is an operation explanatory diagram of a substrate transfer apparatus according to a third embodiment of the present invention.
FIG. 4 is an overall configuration diagram of a conventional substrate transfer apparatus.
FIG. 5 is a schematic view of a cassette that accommodates a substrate.
FIG. 6 is a schematic view of a conventional substrate transfer apparatus.
FIG. 7 is a configuration diagram of a substrate transfer apparatus according to a prior application.
FIG. 8 is a configuration diagram of another substrate transfer apparatus according to a prior application.
FIG. 9 is a configuration diagram of still another substrate transfer apparatus according to the prior application.
[Explanation of symbols]
1 substrate (glass substrate), 2 cassettes, 3 hands,
4 carry-in hand, 5 carry-out hand, 6 horizontal movement device,
7 Vertical movement device, 8 Transfer hand, 9 Intermediate horizontal conveyor,
10 Conveyor device, 11 Intermediate board receptacle

Claims (3)

A substrate transfer apparatus for transferring a horizontally supported flat plate-like substrate (1) from a carry-in position to a carry-out position while supporting the lower surface of the substrate, and supporting the substrate at the carry-in position to an intermediate position A transfer hand (8) to be moved, an intermediate horizontal conveyor (9) that supports the substrate at the intermediate position and moves it to the unloading position, and an intermediate substrate receiver (11) that can be raised and lowered to the upper and lower sides of the intermediate horizontal conveyor at the intermediate position The transfer hand can be moved horizontally in the substrate take-out direction X at the loading position and can be moved up and down at the upper part of the intermediate horizontal conveyor, and the intermediate substrate receiver can be crossed up and down with the transfer hand and the intermediate horizontal conveyor. Composed of
The transfer hand (8) is passed over the conveyor (9) and inserted under the lowermost substrate (1) of the cassette (2) at the loading position, and the transfer hand is raised to place the substrate on the hand. Transfer, move the transfer hand horizontally to the middle position, lower the transfer hand and raise the substrate receiver to transfer the substrate onto the substrate receiver, pass the transfer hand between the substrate receiver and the conveyor and move the next substrate A substrate transfer apparatus, wherein the substrate transfer device moves to a carry-in position for taking out, lowers the substrate receiver, transfers the substrate onto a conveyor, and transfers the substrate to the carry-out position. A substrate transfer apparatus for transferring a horizontally supported flat plate-like substrate (1) from a carry-in position to a carry-out position while supporting the lower surface of the substrate, and supporting the substrate at the carry-in position to an intermediate position A transfer hand (8) to be moved, and an intermediate horizontal conveyor (9) to support the substrate at an intermediate position and horizontally move it to the carry-out position, and the transfer hand is horizontal in the take-out direction X of the substrate at the carry-in position. It is movable and can be moved up and down to the intermediate horizontal conveyor, and is configured to be able to cross up and down with the intermediate horizontal conveyor at the intermediate position, and the intermediate horizontal conveyor is configured to be movable up and down at the intermediate position ,
The transfer hand (8) is passed under the conveyor (9) and inserted under the lowermost substrate (1) of the cassette (2) in the loading position, and the transfer hand is raised to place the substrate on the hand. Reloading, lowering the conveyor, moving the transfer hand horizontally over the conveyor to the middle position, lowering the transfer hand and raising the conveyor to transfer the substrate onto the conveyor and transfer to the unloading position A substrate transfer apparatus characterized by the above. A substrate transfer apparatus for transferring a horizontally supported flat plate-like substrate (1) from a carry-in position to a carry-out position while supporting the lower surface of the substrate, and supporting the substrate at the carry-in position to an intermediate position A transfer hand (8) to be moved, and an intermediate horizontal conveyor (9) to support the substrate at an intermediate position and horizontally move it to the carry-out position, and the transfer hand is horizontal in the take-out direction X of the substrate at the carry-in position. It is movable and can be moved up and down to the intermediate horizontal conveyor, and can be crossed up and down with the intermediate horizontal conveyor at the intermediate position. The intermediate horizontal conveyor is configured to be retractable in the width direction at the intermediate position. ,
The transfer hand (8) is passed under the conveyor (9) and inserted under the lowermost substrate (1) of the cassette (2) in the loading position, and the transfer hand is raised to place the substrate on the hand. Repositioning, retracting the conveyor in the width direction, moving the transfer hand horizontally over the conveyor to the intermediate position, returning the conveyor to the transfer position, lowering the transfer hand, transferring the substrate onto the conveyor, and the unloading position A substrate transfer apparatus characterized in that it is transferred to a substrate.

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