KR101199779B1 - Apparatus for processing substrate - Google Patents

Abstract

It is an object of the present invention to provide a substrate processing apparatus for simplifying a structure in which a substrate is transferred from a vertical transfer means to a substrate transfer means while smoothly taking over and taking over the substrate.
Substrate processing apparatus of the present invention for implementing this, horizontal transfer means for receiving the substrate from the outside or the substrate to take over; A vertical transfer means comprising a substrate take-up part which takes over / takes a substrate between the horizontal transfer means and the substrate processing part, and a vertical driving part which supports both ends of the substrate take-up part and transfers the substrate take-up part up and down; And a plurality of rollers and the power of the driving motor through the roller shafts of the rollers in order to take the substrate from the vertical transfer means and transfer the substrate to the substrate processing unit or to transfer the substrate processed in the substrate processing unit to the vertical transfer means. It includes a substrate transfer means having a power transmission means for transmitting to, the substrate take-up portion is spaced apart at regular intervals on the inner surface of the sliding member and the sliding member facing side by side on both sides are fixed at both ends and the upper surface upward And a plurality of arms having a plurality of support pins spaced apart from each other, the power transmission means being vertically disposed between the rotating shaft and the roller shaft of the drive motor, and retracted vertically between the rollers. The support frame for supporting both ends of the roller is provided with a space As the upper side is opened to allow the arm of the platen part to pass and grooves having a predetermined length in the longitudinal direction are formed at regular intervals on both sides of the evacuation space, the substrate is transferred between the vertical transfer means and the substrate transfer means. Substrate take-up part of the vertical transfer means when passing over / retreat downward through the evacuation space, characterized in that to prevent interference.

Description

Substrate Processing Equipment {APPARATUS FOR PROCESSING SUBSTRATE}

The present invention relates to a substrate processing apparatus, and more particularly, a substrate for simplifying a structure in which a substrate is transferred / taken between a vertical transfer means and a substrate transfer means, and at the same time, allowing the substrate to be smoothly and quickly made. It relates to a processing apparatus.

In general, a flat panel display manufacturing process, such as the deposition of a thin film, the formation of a mask, the etching, etc. are selectively repeated on a large glass substrate to manufacture the devices required. In the process of such a process, a cleaning process is performed to remove foreign substances from the substrate before, after, or before and after the process.

In order to shorten the overall manufacturing process time, it is necessary to minimize the moving distance of the substrate. For this purpose, a device is used to withdraw a substrate from a cassette including a plurality of substrates using a single transfer robot, and then perform a specific process again. The substrates need to be loaded and unloaded sequentially sequentially.

That is, the substrate taken out from the cassette is supplied to the first processing apparatus using a single transfer robot, the substrate which has been processed by the first processing apparatus is again supplied to the second processing apparatus, and then the process is performed at the second processing apparatus. A method of storing the finished substrate back in the cassette has been proposed.

As an example of such a device, Korean Patent No. 500170, "Horizontal and vertical conveying apparatus of substrate," has been proposed.

The Republic of Korea Patent No. 500170 is a horizontal transfer means for transporting the loaded substrate in the horizontal direction after the substrate withdrawn from the cassette is disposed, is arranged to be lifted / lowered on the frame and the substrate processing by taking the substrate from the horizontal transfer means Disclosed is a vertical transfer means for supplying a unit, and a transfer unit disposed between the vertical transfer means and the substrate processing unit to take over and transfer a substrate from the vertical transfer means.

The vertical conveying means comprises a pair of upper hands that take up and move the substrate from the horizontal conveying means, and a lower hand that takes over the substrate from the pair of upper hands and takes over the loader, and lowers the lower hand. When the plurality of lower support pins protruding upward in the horizontal frame of the lower hand passes through the conveying rollers of the transfer unit, the lower support pins descend, and when the plurality of lower support pins descend below the substrate pass line, the substrate is separated from the lower hand and conveyed. It is comprised by taking over the upper part of a roller.

According to this structure, however, in order to take over the substrate on the conveying roller in the state where the lower hand is lowered between the conveying rollers and positioned directly above the rotating shaft of the conveying roller in the process of taking over the substrate from the vertical conveying means to the conveying unit, the conveying roller having a large diameter Since it has to be provided, there is a problem that the volume and weight of the conveying roller is increased and thus a lot of load is applied to the driving means for driving the conveying roller.

The present invention has been made to solve the above problems, to provide a substrate processing apparatus for simplifying the structure that the substrate is transferred from the vertical transfer means to the substrate transfer means while smoothly taking over / taking over the substrate. There is a purpose.

Substrate processing apparatus of the present invention for realizing the object as described above, the horizontal transfer means for receiving the substrate from the outside or the substrate to take over; A vertical transfer means comprising a substrate take-up part which takes over / takes a substrate between the horizontal transfer means and the substrate processing part, and a vertical driving part which supports both ends of the substrate take-up part and transfers the substrate take-up part up and down; And a plurality of rollers and the power of the driving motor through the roller shafts of the rollers in order to take the substrate from the vertical transfer means and transfer the substrate to the substrate processing unit or to transfer the substrate processed in the substrate processing unit to the vertical transfer means. It includes a substrate transfer means having a power transmission means for transmitting to, the substrate take-up portion is spaced apart at regular intervals on the inner surface of the sliding member and the sliding member facing side by side on both sides are fixed at both ends and the upper surface upward And a plurality of arms having a plurality of support pins spaced apart from each other, the power transmission means being vertically disposed between the rotating shaft and the roller shaft of the drive motor, and retracted vertically between the rollers. The support frame for supporting both ends of the roller is provided with a space As the upper side is opened to allow the arm of the platen part to pass and grooves having a predetermined length in the longitudinal direction are formed at regular intervals on both sides of the evacuation space, the substrate is transferred between the vertical transfer means and the substrate transfer means. Substrate take-up part of the vertical transfer means when passing over / retreat downward through the evacuation space, characterized in that to prevent interference.

According to the substrate processing apparatus according to the present invention, it is possible to smoothly take over and take over the substrate while simplifying the structure in which the substrate is transferred from the vertical transfer means of the substrate to the substrate transfer means. It is possible to reduce the manufacturing cost and to reduce the load required for driving the roller.

1 is a perspective view showing the overall configuration of a substrate processing apparatus according to the present invention;
Fig. 2 is a front view of Fig. 1,
3 is a left side view of FIG. 1;
4A to 4D are partial perspective views illustrating various embodiments of a power transmission means of a substrate transfer part for loading;
5 is a front view showing a state in which the substrate is horizontally transported by the horizontal transport unit for loading,
6 is a front view illustrating a process in which the substrate is transferred from the horizontal transfer unit for loading to the vertical transfer unit for loading;
7 is a front view showing a state where the substrate is lowered by the vertical transfer unit for loading,
8 is a left side view showing a state in which the substrate is transferred to the loading substrate transfer unit from the vertical transfer unit for loading;
9 is a front view showing a state in which the substrate take-up part is retracted downward after the substrate is turned over to the loading substrate transfer part;
10 is a front view showing a state in which the substrate is transferred by the loading substrate transfer unit and the substrate take-up unit is elevated upward;
11 is a front view illustrating a state in which the substrate is horizontally moved by the unloading substrate transfer unit after passing through the substrate processing unit;
12 is a right side view illustrating a process in which a substrate is turned over from an unloading substrate transfer unit to an unloading vertical transfer unit;
FIG. 13 is a front view illustrating a process in which a substrate is turned over from an unloading vertical transfer part to an unloading horizontal transfer part;
14 is a front view illustrating a state in which the substrate is horizontally moved by the unloading horizontal transfer part and the substrate take-over part of the unloading vertical transfer part is lowered and retracted.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing the overall configuration of a substrate processing apparatus according to the present invention, FIG. 2 is a front view of FIG. 1, and FIG. 3 is a left side view of FIG.

The substrate processing apparatus of the present invention includes a frame 1, a horizontal transfer unit 100 for loading a substrate G from the outside through a loading unit 10 formed on one side of the frame 1, and a substrate processing unit. Horizontal transfer means consisting of an unloading horizontal transfer unit (100 ') for taking over the substrate completed processing in the 400 through the unloading unit 20 formed on the upper side of the loading unit 10, the loading Vertical transfer unit 200 for lifting up and down to take over and take over the substrate between the horizontal transfer unit 100 and the substrate processing unit 400, and the horizontal transfer unit 100 for unloading with the substrate processing unit 400 ') A vertical transfer means consisting of an unloading vertical transfer part 200' which is raised and lowered to take over / take over the substrate, and takes over the substrate from the loading vertical transfer part 200 and the substrate processing part 400 And a substrate transfer part 300 for loading, which includes a plurality of rollers 350 for transferring to the substrate, and the substrate processing part 400. Standing, a number of unloading a substrate for having a roller 350 for conveying a transmit (processing 300 is complete, the substrate on which the unloading 200 'is vertically transmitted for a substrate transfer means consisting of a).

The loading unit 10 and the unloading unit 20 may be provided up and down at different positions, and the loading horizontal transfer unit 100 and the unloading horizontal transfer unit 100 'are respectively loaded. 10 and the unloading part 20 are positioned at a height, and in this embodiment, the case where the unloading part 20 is provided above the loading part 10 will be described as an example.

First, the configuration of the horizontal transfer means will be described.

The loading horizontal transfer unit 100 and the unloading horizontal transfer unit 100 'constituting the horizontal transfer means have different functions in terms of loading and unloading of the substrate, but are made of the same structure. It will be described below with reference to the configuration of the loading horizontal transfer unit 100.

The loading horizontal transfer part 100 supports the substrate loading part 110 on which the substrate inserted through the loading part 10 is seated, and supports both ends of the substrate loading part 110 and horizontally holds the substrate loading part 110. It consists of a horizontal drive unit 120 for conveying in the direction.

The horizontal driving unit 120 is installed at both sides of the frame 1 in a horizontal direction at a height capable of taking over the substrate inserted through the loading unit 10 so that the substrate loading unit 110 can slide in a horizontal direction. And supporting first slide rails 121 and 121a and driving means (not shown in the drawing) for providing power for horizontal movement of the substrate loading part 110.

The substrate loading part 110 may include a first arm 111 having both ends supported by the first slide rails 121 and 121a and a first arm facing in a direction opposite to the conveying direction of the substrate in the substrate processing part 400. A plurality of second arms 112 disposed on one side of the 111 and spaced apart from each other along a longitudinal direction of the first arm 111 and supported by a cantilever on the first arm 111 and the second arm; The upper surface of the 112 is spaced apart by a predetermined interval along the longitudinal direction of the second arm 112 and is composed of a plurality of support pins 113 on which the substrate is seated and supported.

The structure in which the second arm 112 is cantilevered to the first arm 111 is described below when the substrate is transferred / taken over between the horizontal loading means 100 for loading and the vertical vertical means for loading 200 as described below. This is to avoid the interference between the substrate loading part 110 and the substrate taking over part 210.

The first slide rails 121 and 121a may support the bottom surfaces of the free ends of the second arms 112a and 112b positioned close to the first slide rails 121 and 121a, and the first slide rails 121 and 121a may be attached to the first slide rails 121 and 121a. Accordingly, the position alignment means 122a and 122b are horizontally moved together with the substrate loading part 110.

The positioning means 122a and 122b supports the free ends of the second arms 112a and 112b from below to support the free end portions of the second arms 112a and 112b. 110 serves to reinforce the support to prevent the sag down.

In the present exemplary embodiment, the alignment means 122a and 122b support a bottom surface of the free ends of the second arms 112a and 112b and extend / contract up and down to a cylinder capable of adjusting the inclination of the substrate loading part 110. Can be configured.

With this configuration, both ends of the first arm 111 are supported by the first slide rails 121 and 121a on both sides perpendicular to the transfer direction, and both ends parallel to the transfer direction are formed. Since it is supported by one arm 111 and the position alignment means 122a and 122b, it is possible to prevent inclination toward one side during substrate transfer and transfer in a stable state to prevent defects such as bending or damage of the substrate. do.

The unloading horizontal transfer part 100 ′ has the same structure as the loading horizontal transfer part 100, except that the heights of the first slide rails 121 and 121 a are different from each other and the free end of the second arm 112 is disposed. Since there is only a difference in that the directions are located in opposite directions, the description of the structure of the unloading horizontal transfer unit 100 ′ will be omitted.

Hereinafter, the configuration of the vertical transfer means will be described.

The loading vertical transfer unit 200 and the unloading vertical transfer unit 200 'constituting the vertical transfer means have a different function in that the loading and unloading of the substrate are performed, but because they have the same structure. It will be described below based on the configuration of the loading vertical transfer unit 200.

The vertical loading unit 200 for loading may include a substrate take-over unit 210 that takes over / takes a substrate between the substrate loading unit 110 and the substrate transfer unit 210 of the horizontal transfer unit 100 for loading. It supports both ends and consists of a vertical driving unit 220 for reciprocating the substrate take-up portion 210 up and down.

The vertical driving unit 220 slidably supports both ends of the substrate take-over part 210, and is provided with second slide rails 221 and 221a installed vertically on both sides of the frame 1, and the substrate take-up part 210. Height adjusting means for supporting the bottom surface of the sliding member 211a of the substrate take over part 210 to adjust the inclination of the substrate and moving up and down together with the substrate take over part 210 along the second slide rail 221a. 224 and driving means (not shown in the figure) for providing power for moving the substrate take-up unit 210.

The substrate take-up unit 210 includes sliding members 211 and 211a connected to the inner surfaces of the second slide rails 221 and 221a so as to be movable up and down, respectively, and the inner surfaces of the sliding members 211 and 211a to face each other. And a plurality of arms 212 spaced at regular intervals and fixed at both ends thereof, and a plurality of support pins 213 protruding upward from the upper surface of the arm 212 and spaced apart from each other.

The substrate take-up part 210 is always moved up and down at a lower position than the substrate load part 110, the length of the substrate protruding upward of the support pin 213 provided in the substrate take-up part 210 is the substrate loading part It is formed longer than the sum of the upper and lower thicknesses of the second arm 112 of 110 and the height protruding upward of the support pin 113. Accordingly, after the substrate loading part 110 of the loading horizontal transfer part 100 is horizontally transferred to the upper portion of the substrate taking over part 210 of the loading vertical transfer part 200, the substrate taking part 210 is moved. When moved upward, the substrate seated on the support pin 113 of the substrate loading part 110 may be turned over to the support pin 213 of the substrate take-up part 210.

The unloading vertical transfer part 200 ′ has the same structure as the loading vertical transfer part 200, except that the substrate transfer part 210 corresponds to the height of the loading part 10 and the unloading part 20. Since there is only a difference in the height of moving the upper side along the second slide rails (221, 221a), description of the structure of the unloading vertical transfer unit 200 'will be omitted.

Hereinafter, the structure of the substrate transfer part provided below the vertical transfer means will be described.

4A to 4D are partial perspective views illustrating various embodiments of the power transmission means of the substrate transfer part for loading.

The substrate transfer part includes a loading substrate transfer part 300 provided at the front of the substrate processing part 400 and an unloading substrate transfer part 300 'provided at the rear of the substrate processing part 400, Since only the difference is made of the same structure, it will be described below with reference to the configuration of the loading substrate transfer unit 300, a detailed description of the configuration of the unloading substrate transfer unit 300 'will be omitted.

The loading substrate transfer unit 300 receives a substrate from the vertical transfer unit 200 for loading and transfers a plurality of rollers 350 to the substrate processing unit 400 and provides power for rotation of the rollers 350. It consists of a drive means.

The driving means is disposed between the drive motor 310, the rotating shaft 320 is coupled to the drive motor 310, and the rotating shaft 320 and the roller shaft 340 up and down the drive motor 310 It consists of a power transmission means 330 for transmitting the power of the roller shaft 340 to the roller 350.

In the present invention, the substrate taking over part 210 of the loading vertical transfer part 200 when the substrate is transferred from the loading vertical transfer part 200 to the loading substrate transfer part 300 is the roller 350 and the roller shaft. It is characterized in that the driving means is disposed in a position that can prevent the interference during the takeover / takeover of the substrate by passing through the space (S) provided to be opened up and down between the (340).

In order to prevent such interference, as shown in FIGS. 4A to 4D, the power transmission unit 330 is vertically disposed between the rotating shaft 320 and the roller shaft 340 of the motor 310.

In one embodiment of the power transmission means 330, the first gear 331 is coupled to the rotary shaft 320 of the motor 310 at regular intervals along the axial direction, as shown in Figure 4a, respectively The second gear 332 is connected to the first gear 331 of the third gear 334 is coupled to the upper end of the rotating rod 333 is vertically coupled to the second gear 332 is coupled to the bottom In addition, a fourth gear 335 connected to the third gear 334 may be coupled to an intermediate portion of the roller shaft 340.

Here, the gear coupling between the first gear 331 and the second gear 332, the third gear 334 and the fourth gear 335 may be a combination of a worm and a worm gear.

In another embodiment of the power transmission means 330a, the first gear 331a is coupled to the rotational shaft 320 of the motor 310 at regular intervals along the axial direction, as shown in FIG. 4B. A second gear 332a is connected to the first gear 331a, and a third gear 334a is coupled to an upper end of the rotating rod 333a which is vertically coupled to the second gear 332a. The middle portion of the roller shaft 340 may be configured to be coupled to the fourth gear 335a connected to the third gear 334a.

Here, the gear coupling between the first gear 331a and the second gear 332a, the third gear 334a and the fourth gear 335a may be composed of the coupling between the bevel gears.

In another embodiment of the power transmission means (330b), as shown in Figure 4c a plurality of gears 331b, 332b, 333b, 334b stacked up and down in the space between the rotary shaft 320 and the roller shaft 340 , 335b).

In this case, the gear 331b and the gear 332b may be formed by a combination of a worm and a worm gear, and the gears 333b, 334b, and 335b stacked thereon may have a roller shaft 340 horizontally. If it is arranged may be composed of a combination of the spur gear, if the roller shaft 340 is disposed to be inclined to one side as in this embodiment may be composed of a combination of helical gear.

Both ends of the rotation shafts 332b ', 333b' and 334b 'of the gears 332b, 333b and 334b are rotatably supported by the support frame 360.

In another embodiment of the power transmission means 330c, as shown in FIG. 4D, the first gear 331c is coupled to the rotary shaft 320 at regular intervals along the axial direction, and the first gear 331c. The second gear 332c for converting the rotation in the horizontal direction of the rotation shaft 320 to the rotation in the vertical direction is connected, the rotation shaft 332c 'and the roller shaft 340 of the second gear 332c. ) Is spaced apart vertically, and may be configured to be connected between the rotating shaft 332c 'of the second gear 332c and the roller shaft 340 by a pulley and a belt 333c to transmit power.

In addition to the embodiments according to FIGS. 4A to 4D, the rotation direction is changed by the rotation of the roller shaft 340 located in a direction orthogonal to the rotation of the rotation shaft 320 while providing the evacuation space S. If the configuration can transmit power to the power transmission means will be possible to change the design of various other structures.

In addition, when the substrate take-up unit 210 of the vertical transfer unit 200 is lowered to the retraction space (S) during the takeover of the substrate to prevent interference with the support frame 360 for supporting both ends of the roller 350 In order to allow the arm 212 of the substrate take-over part 210 to pass through the support frame 360, grooves 365 having an open shape and a predetermined length cut in the vertical direction are provided at both sides of the evacuation space S. It is formed at regular intervals.

The roller 350 having a small diameter is disposed by arranging the power transmission means 330 of the driving unit to provide a space S for evacuating the substrate transfer part 210 to the lower side of the loading substrate transfer part 300. Even if it is used, it is possible to take over and take over the board, which requires a lot of load for driving the roller and increasing the volume of the device, which is caused by having a large diameter roller to provide a space for evacuation of the vertical transfer part. Can be solved.

On the other hand, in the present embodiment is configured to transfer the substrate to one side inclined to smoothly perform the cleaning and drying process of the substrate in the substrate processing unit 400, the roller 350 of the loading substrate transfer unit 300 is also one side It is arranged to be inclined.

Since the substrate is transferred in an inclined state as described above, when the substrate is turned on the roller 350 to the vertical transfer parts 200 and 200 ′, one side of the substrate take-up part 210 can be stably turned over to meet the inclination angle of the substrate. The height adjusting means 224 is provided to adjust the vertical height of the.

Hereinafter, a loading operation in which the substrate is transferred from the loading unit 10 to the substrate processing unit 400 will be described with reference to FIGS. 5 to 10.

5 is a front view illustrating a state in which the substrate is horizontally transferred by the loading horizontal transfer unit, FIG. 6 is a front view illustrating a process in which the substrate is turned over from the loading horizontal transfer unit to the loading vertical transfer unit, and FIG. 8 is a left side view showing a state in which the substrate descends by the loading vertical transfer unit, FIG. 8 is a left side view showing a state in which the substrate is transferred from the loading vertical transfer unit to the loading substrate transfer unit, and FIG. 10 is a front view showing a state in which the substrate take-up part is retracted to the lower side after being transferred to the sending part, and FIG. 10 shows a state in which the substrate is transferred by the loading substrate transfer part and the substrate take-up part is lifted upward.

First, when the substrate is taken over by the robot from the outside through the loading unit 10 into the substrate processing apparatus of the present invention, the substrate is loaded with the substrate 110 of the horizontal transfer unit 100 for loading as shown in FIG. 2. Is seated on.

In this state, as shown in FIG. 5, the substrate G is transferred along the first slide rail 121a in the horizontal direction by the horizontal driver 120 of the loading horizontal transfer part 100, and in this process, the substrate The free end of the second arm 112b of the loading unit 110 is supported by the alignment means 122b to maintain the horizontal state.

Then, when the substrate is horizontally transferred to the upper side of the substrate take-up portion 210 of the loading vertical transfer unit 200 by the loading horizontal transfer unit 100, as shown in Figure 6 vertical loading unit 200 for loading As the substrate take-up part 210 is moved upward by the vertical driving part 220 of the substrate, the substrate seated on the support pin 113 of the substrate load part 110 is supported by the support pin 213 of the substrate take-up part 210. Is taken over).

When the substrate is seated on the support pin 213 of the substrate take-up portion 210, as shown in Figure 7 by the horizontal transfer portion 100 for loading the substrate loading portion 110 to receive the next loaded substrate The second slide rail is horizontally moved toward the loading unit 10, and immediately after the substrate loading unit 110 is horizontally moved, the substrate is seated on the substrate taking over unit 210 of the loading vertical transfer unit 200. Descend along 221,221a.

At this time, the substrate take-up part 210 is lowered in a horizontal state as shown by the dotted line of FIG. 8 and then lowered by a certain distance, and is shown in solid line to stably take over the substrate to the loading substrate transfer part 300 which is inclined. As described above, the height adjusting means 224 supporting the lower side of the substrate take-over part 210 is extended to match the inclination of the roller 350 of the substrate transfer part 300 for loading to be inclined. The tilt of 210 is adjusted.

While the substrate is turned over to the loading substrate transfer part 300, as shown in FIG. 9, the substrate taking over part 210 is a retraction space S formed between the rollers 350 of the loading substrate transfer part 300. When the substrate is horizontally moved toward the substrate processing unit 400 by the substrate transfer unit 300 for loading, the substrate take-over unit 210 by the vertical transfer unit 200 for loading as shown in FIG. 10. ) Is lifted to take over the next substrate.

Hereinafter, an unloading operation in which the substrate is transferred from the substrate processing unit 400 to the unloading unit 20 will be described with reference to FIGS. 11 to 14.

11 is a front view illustrating a state in which the substrate is horizontally moved by the unloading substrate transfer unit after passing through the substrate processing unit, and FIG. 12 is a process in which the substrate is transferred from the unloading substrate transfer unit to the unloading vertical transfer unit. 13 is a front view illustrating a process in which the substrate is transferred from the unloading vertical transfer unit to the unloading horizontal transfer unit, and FIG. 14 is a horizontal transfer of the substrate by the unloading horizontal transfer unit. It is a front view showing a state in which the substrate take over part of the vertical transfer part for loading is lowered and retracted.

After the cleaning and drying process is completed in the substrate processing unit 400, the substrate is horizontally transferred by the unloading substrate transfer unit 300 ′ as shown in FIG. 11, and the roller of the unloading substrate transfer unit 300 ′ is used. It is horizontally transferred to the upper side of the substrate take-up part 210 which was waiting at the lower side of the evacuation space S provided between the 350.

Subsequently, the substrate takeover unit 210 waiting to take over is seated in an inclined state on the unloading substrate transfer unit 300 'according to the same inclination, as shown by a dotted line in FIG. When the height of the height adjusting means 224 is lifted in a state in which the inclination of the substrate take-up part 210 is adjusted while being lifted up to a certain height after lifting the substrate, the height of the height adjusting means 224 is again shown. The inclination is adjusted so that the substrate take over part 210 becomes horizontal due to the contraction.

As shown in FIG. 13, when the substrate take-up part 210 on which the substrate is seated by the unloading vertical transfer part 200 ′ is transferred to the uppermost side, the substrate loading is performed by the unloading horizontal transfer part 100 ′. The unit 110 is horizontally transferred to be positioned above the substrate takeover unit 210.

Subsequently, as shown in FIG. 14, the substrate take-over part 210 is lowered by the unloading vertical transfer part 200 ′, and the substrate is loaded on the substrate loading part 110 of the unloading horizontal transfer part 100 ′. Subsequently, the substrate take-up part 210 moves to the retraction space S provided under the unloading substrate transfer part 300 'in order to take over the next substrate, and at the same time, the horizontal transfer part for unloading ( The substrate loading part 110 of 110 ′ is horizontally moved toward the unloading part 20 to carry out the substrate to the outside.

In the above description, for convenience of description, each operation state is described by separating the loading operation and the unloading operation of the substrate. However, in the substrate processing apparatus of the present invention, the loading and unloading operations are continuously performed at the same time, thereby processing the substrate. It will be possible to improve.

1 frame 10: loading unit
20: unloading unit 100: horizontal transfer unit for loading
100 ': horizontal transfer part for unloading 110: substrate loading part
111: first arm 112a, 112b: second arm
113: support pin 120: horizontal drive unit
121,121a: First slide rail 122a, 122b: Position alignment means
200: vertical transfer unit for loading 200 ': vertical transfer unit for unloading
210: substrate taking over part 211, 211a: sliding member
212 arm 213 support pin
220: vertical driving unit 221, 221a: second slide rail
224: height adjustment means 300: loading substrate transfer unit
300 ': substrate transfer part for unloading 310: drive motor
320: rotating shaft 330: power transmission means
340: roller shaft 350: roller
400: substrate processing unit

Claims (8)

Horizontal transfer means for taking over the substrate from the outside or taking over the substrate to the outside;
A vertical transfer means comprising a substrate take-up part which takes over / takes a substrate between the horizontal transfer means and the substrate processing part, and a vertical driving part which supports both ends of the substrate take-up part and transfers the substrate take-up part up and down; And
Takes the substrate from the vertical transfer means and transfers the substrate to the substrate processing unit or transfers the power of the driving motor to the rollers through the roller shafts of the rollers and the rollers to transfer the processed substrate to the vertical transfer means. Including a substrate transfer means having a power transmission means for transmitting,
The substrate take-up part is a plurality of arms having a plurality of support pins are spaced apart at regular intervals on the inner surface of the sliding member and the sliding member which is located side by side on both sides and fixed to both ends and protruded upward on the upper surface. Made of
The power transmission means is disposed vertically vertically between the rotating shaft and the roller shaft of the drive motor, while the retraction space is provided between the roller up and down and the support frame for supporting both ends of the roller is the arm of the substrate take-up part As the upper side is opened so as to pass through and grooves having a predetermined length cut in the vertical direction are formed at regular intervals on both sides of the evacuation space, the vertical transfer means and the substrate transfer means take over the substrate between the vertical transfer means and the substrate transfer means. Substrate processing unit, characterized in that the substrate take-up portion of the transfer means through the evacuation space to retreat downward to prevent interference. The method of claim 1,
The horizontal conveying means comprises a loading horizontal conveying portion for taking over the substrate from the loading portion formed on one side of the frame, and an unloading horizontal conveying portion for taking over the processed substrate to the unloading portion formed on the upper side of the loading portion. Substrate processing apparatus characterized by. The method of claim 1,
The substrate transfer means is disposed up and down between a drive motor for providing rotational force to the plurality of rollers and a rotation shaft axially coupled to the drive motor, and the rotation shaft and the roller shaft of the roller to transfer the power of the drive motor through the roller shaft. Substrate processing apparatus comprising a power transmission means for transmitting to the roller. The method of claim 3,
The power transmission means,
The first gear is coupled to the rotation axis of the drive motor at regular intervals in the axial direction, the second gear is connected to the first gear, the second gear is coupled to the lower end of the rotary rod is vertically Three gears are coupled, the roller shaft is made of a fourth gear connected to the third gear is coupled,
The first gear and the second gear transfer the horizontal rotation of the rotary shaft to the vertical rotation of the rotary rod, the third gear and the fourth gear converts the vertical rotation of the rotary rod to the horizontal rotation of the roller shaft. Substrate processing apparatus, characterized in that. 5. The method of claim 4,
The connection between the first gear and the second gear, the connection between the third gear and the fourth gear is a substrate processing apparatus characterized in that the combination of the worm and the worm gear or the coupling between the bevel gear. The method of claim 3,
The power transmission means,
And a combination of a plurality of gears stacked up and down in a space between the rotating shaft and the roller shaft. The method of claim 3,
The power transmission means,
The first gear is coupled to the rotational shaft of the drive motor at regular intervals along the axial direction, and the second gear is connected to the first gear to convert the rotation in the horizontal direction of the rotational axis of the drive motor to the perpendicular rotation. ,
And a rotation shaft of the second gear and the roller shaft are vertically spaced apart from each other, and between the rotation shaft of the second gear and the roller shaft by a pulley and a belt. The method of claim 2,
The horizontal transfer means includes a substrate loading portion on which the substrate is mounted, and a horizontal driving portion supporting both ends of the substrate loading portion and reciprocating the substrate loading portion horizontally.
The horizontal driving unit may include a first slide rail installed horizontally on both sides of the frame to support the substrate loading part slidably in a horizontal direction.
The substrate loading portion is provided along a longitudinal direction of the first arm on one side of the first arm, which is supported at both ends by the first slide rail, and on one side of the first arm facing in a direction opposite to the conveying direction of the substrate in the substrate processing portion. A plurality of second arms having cantilever beams spaced apart from each other and having a plurality of first pins protruded upwardly and spaced apart from each other;
The loading horizontal conveying part and the unloading horizontal conveying part are positioned at the heights at which the loading part and the unloading part are formed, respectively, while the heights of the first slide rails are different and the free end directions of the second arms are opposite to each other. Substrate processing apparatus, characterized in that located toward the.

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