KR19990024052A - ELCD cassette transportation transportation truck - Google Patents

Abstract

The present invention relates to a semiconductor device manufacturing method and a semiconductor device manufacturing method that securely move a semiconductor wafer in a multi-stage stacked state in a predetermined cassette to move between respective processes in a semiconductor manufacturing process, And a unloader for unloading a cassette on which the semiconductor wafers having completed the machining process in the apparatus have been loaded, onto a transportation lorry.

The present invention relates to a cassette cassette (50) for loading a cassette (500) on which a wafer is loaded, a fork (46) for lifting the cassette from the cassette stage and transporting it in the horizontal direction, Means 400,

A vertical transfer means 200 for vertically moving the horizontal transfer means upward and downward and a horizontal transfer means 300 for transferring the horizontal transfer means 200 to the upper end of the vertical transfer means 200, (400) is fixed,

The upper and lower conveying means 200 is mounted on the carriage 100 so that the center of the inner diameter of the rotating means 300 is aligned with the central axis of the upper and lower conveying means 200 and is coupled to transmit the rotational force to the horizontal conveying means 400 And the horizontal transporting means can be rotated and lifted.

Description

ELCD cassette transportation transportation truck

The present invention relates to a passenger carriage for wafer transportation used in a semiconductor manufacturing process.

More specifically, in order to move between respective processes in a manufacturing process of a semiconductor, a semiconductor wafer in a multi-stage stacked state in a predetermined cassette is safely moved in space and precisely stopped at a specific point in front of a device of a designated manufacturing process And more particularly, to a passenger carriage for semiconductor wafer transportation, which is capable of accurately loading a cassette mounted on a corresponding manufacturing equipment or unloading a cassette on which a semiconductor wafer having completed the machining process in the apparatus has been placed, onto a transportation bogie.

As is well known, a great deal of effort is being made to create a very clean manufacturing environment in which fine dust is removed to produce high quality semiconductors.

The creation of such a clean environment is essential for high integration of semiconductors and reduction of defect rate.

The semiconductor manufacturing process is manufactured through various steps, and a specific machining apparatus is prepared for each of the manufacturing steps.

Each of these machining apparatuses is provided in a clean room by forming lines for each process.

The semiconductor wafers are stacked in a predetermined cassette at a plurality of stages when moving between the processing apparatuses by proceeding with each of the above-described process steps, and are mounted on a bogie which can move the cassettes unfavorably.

A manual bogie moving in a space between manufacturing equipments according to the prior art will be described as follows.

First of all, if you look at the classification of manual bogies, you can use battery type and AC power type.

On the other hand, in the form of loading the cassette, there is a type in which loading and unloading are performed in one direction on the opposite side of the handle of the manual bogie, and a type in which loading and unloading are performed on the side of the bogie.

The front loading type has a problem that a copper wire of a worker is lengthened.

On the other hand, the side loading type is very useful in terms of work efficiency because the operator can access the manufacturing equipment of the line without having to turn the truck.

Korean Patent Laid-Open No. 95-17598 has been proposed as a prior art in which the side loading type is used.

According to the above-cited prior art, a cassette lifting device and a cassette horizontal transporting device are provided on a manual bogie.

The elevating device includes an elevating shaft for elevating and lowering the slidable fork and a motor for transmitting driving force to the elevating shaft. The motor and the elevating shaft are combined with the eccentric cam and the link so that the rotational force of the motor is transmitted to the elevating shaft As shown in FIG.

However, such an elevating device is severely rubbed due to a difference in direction of force when the elevating operation is performed due to the eccentric cam and the link, and there is a serious problem that the abrasion causes dust due to such friction and adversely affects the wafer.

In addition, the horizontal transfer device for horizontally transferring the cassette includes a multi-stage slide rail superimposed in the vertical direction, a motor for projecting and retracting the slide rail, and a wire for extending and immersing the slide rail when the slide rail projects And has a structure in which the pulling action of the wire and the pulling action of the opposite wire are performed.

The horizontal conveying apparatus has a closed end where the appearance of the apparatus is enlarged due to the protruding and drowing distance being short and the slide rail being vertically overlapped.

According to the above-mentioned prior art, there is a problem that the external shape is large, the weight of the whole manual bogie is heavy, and the fatigue of the worker is increased and the use thereof is avoided. There is a problem in that the semiconductor manufacturing facility, Resulting in defective products.

Disclosure of Invention Technical Problem [8] The present invention has been made to solve the above-mentioned problems of the prior art and has the following objectives.

The present invention relates to a method and apparatus for moving a cassette to both sides of a bogie in moving a manufacturing machine from a line to a worker and loading and unloading a semiconductor wafer, .

SUMMARY OF THE INVENTION It is an object of the present invention to provide a manual bogie for semiconductor wafer transportation that can simplify the components and reduce the fatigue of the operator by providing a lightweight manual bogie.

The present invention forms a power transmission structure that coincides with the direction of motion to eliminate wear of the mechanical elements due to friction and suppress generation of dust due to wear, thereby providing a manual bogie suitable for a high clean environment.

According to another aspect of the present invention, there is provided a cassette apparatus including a cassette stage for loading a cassette on which a wafer is loaded, a fork for lifting the cassette from the cassette stage to transport the cassette in a horizontal direction, ,

A horizontal transfer means for vertically moving the horizontal transfer means in the vertical direction and a horizontal transfer means for vertically moving the horizontal transfer means in the vertical direction,

The upper and lower conveying means being mounted on the upper portion of the carriage so that the center of the inner diameter of the rotating means coincides with the central axis of the upper and lower conveying means,

And the horizontal conveying means is configured to be combined with rotation and elevation.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic diagram showing the present invention. Fig.

2 is a schematic view showing a vertical transfer device of the present invention.

3 is a configuration diagram showing the rotating device of the present invention,

Fig. 3A is a plan view and Fig. 3B is a longitudinal sectional view.

4 is a configuration diagram showing a horizontal transfer device of the present invention.

5 is a planar view showing a horizontal transfer device of the present invention.

6 is a planar view of an operating state showing the horizontal transfer device of the present invention.

Fig. 7 is a schematic view of the main portion of Fig. 4; Fig.

FIG. 8 is a view showing a combined state configuration as an embodiment of the present invention. FIG.

9 is a configuration diagram as a modified embodiment of the present invention.

10 is a configuration view of a rotating device as a modified embodiment of the present invention.

11 is an operational state diagram illustrating the loading step of the present invention.

12 is an operating state diagram showing the unloading state of the present invention.

DESCRIPTION OF THE REFERENCE NUMERALS

100: Bogie housing 200: Up and down transfer device

300: Rotating device 400: Horizontal conveying device

25: first lift shaft 26: second lift shaft

30: rotation ring 31: slider

32, 41: plate 33, 442:

45: Slide block 46: Fork

50: stage 423: chain

Hereinafter, the technical idea of an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, the manual bogie for transporting a semiconductor wafer according to the present invention includes a bogie housing 100 for transportation, an up-down transfer device 200 formed in the bogie housing, A horizontal transfer device 400 for horizontally transferring the mounted wafer cassette 500, which is mounted on the vertical transfer device and the rotary device, and which is turned and raised and raised.

A caster 10 for transportation is formed in the car housing 100 made of the rectangular enclosure, and a handle 12 is formed on one side of the car housing 100.

The upper and lower conveying apparatus 200 includes an up-down power cylinder 23 configured to allow the axis of the lead screw to protrude and retract in the vertical direction by a combination of an electric motor 21 and a lead screw coupled to the electric motor, Fixed to the center of the bottom.

A second lift shaft 26 is axially coupled to the first lift shaft 25 of the power cylinder 23 to extend the lift shaft and a bearing block 27 is interposed between the first lift shaft and the second lift shaft The first elevating shaft 25 and the second elevating shaft 26 are coupled to each other so as to perform simultaneous operation when the first elevating shaft 25 and the second elevating shaft 26 move up and down. When the second elevating shaft 26 rotates, So that they can be maintained in the same state.

A fixing flange 261 is attached to the distal end of the second lifting shaft 26 and the bush 28 supporting the second lifting shaft 26 is engaged with the outer circumferential edge of the second lifting shaft.

And a shock absorbing shock absorber 24 is coupled between the second lift shaft 26 and the bottom surface of the truck housing. This shock absorber acts to prevent the vertical load applied to the second lifting shaft and the vibration caused by the vertical load from being transmitted to the semiconductor wafer from being transmitted to the semiconductor wafer. Up and down.

Here, the up-down power cylinder 23 is formed by a combination of a motor and a lead screw, and the cylinder rod is projected and retracted in accordance with the rotation of the motor. Thus, the power cylinder single unit is a known single unit that is traded as a part.

Next, the rotating device will be described with reference to FIGS. 3A and 3B .

The rotating device 300 is composed of a ring system. The ring system comprises a rotary ring 30 having a circular slider 31 and a ring gear 310 integrally formed with the slider 31 and a journal 33 supporting the rotary ring 30.

The journals 33 are screwed at an equal interval of 120 degrees on the upper surface of the truck housing 100 and are coupled to the journal so that the slider 31 of the ring system is supported.

The driving gear 351 of the driving motor 35 is engaged with the ring gear 310 formed integrally with the slider.

The upper surface of the slider 31 is formed with a hole 321 at the center thereof for penetrating and fastening the bush 28 supporting the second lift shaft 26 and the second lift shaft of the up and down transfer device 200 And a plate 32 formed with a guide 323 for transmitting the rotational force of the slider 31 to the horizontal conveying apparatus while keeping the horizontal conveying apparatus 400 lifted and lowered.

The plate 32 is provided with a position detecting switch and a rotation angle restricting stopper so as to limit the rotation angle of the horizontal transfer device 400 and to stop the rotation drive motor 35 at a predetermined position.

The horizontal conveying apparatus 400 will be described below.

As shown in FIGS. 4 to 7, the horizontal transfer device 400 includes a cassette 500 on which a semiconductor wafer is stacked, and the cassette 500 is loaded into an ordinary semiconductor processing apparatus, So as to unload the cassette.

The horizontal conveying device is provided with a plate 41 for engaging with the flange 261 of the up-and-down conveying device 200 and for mounting various driving elements.

The horizontal driving unit 42 is formed to coincide with the center line of the second elevation shaft 26 of the vertical transfer device 200 and the guide block 43 is formed on both sides of the horizontal driving unit.

The guide block 43 includes a bearing bearing 431 for supporting a driving shaft of the horizontal driving part and a sliding rail 433 which is long in the lateral direction.

A plurality of journals 442 are horizontally joined to each other in two brackets on opposite sides of the guide block, and one side rail 452 of the slide block 45 is connected to the upper side of the guide block. Screwed together.

The fork 46 for transferring the semiconductor wafer cassette 500 is formed of a plate material so that a cassette support 462 is formed at the center of the upper portion and brackets 464 are formed at both sides of the lower portion of the bracket 464, And the other side rail 454 of the slide block 45 is screwed.

In order to compensate the deflection of the cassette, a slope support 466 is coupled to each corner of the upper portion of the fork 46. The slope support 466 is relatively movable relative to a pair of the forks, And the extended inclination angles of the front and rear supporting rods are formed to be about 3 degrees higher than the fork front.

An electric motor 47 is formed as a power for horizontally moving the fork 46 and pulleys 472 and 474 are formed on the driving shaft of the motor and the driving shaft 428 of the horizontal driving unit 42, The electric motor 47 is fixed on the plate 41 so as to be orthogonal to the axis of the vertical transfer device 200 in consideration of the center of gravity of the vertical movement and the horizontal movement.

The horizontal driving part 42 is a power transmission device for protruding and retracting the fork 46. A chain 423 is inserted into a housing 421 having a cochlear refraction groove 422 and the chain driving sprocket 424, Is coupled to the drive shaft (428), and the tip of the chain (423) is connected to the center of the bottom surface of the fork (46).

The chain 423 transmits power for pushing or pulling out the fork 46 so that each chain segment is made of a chain capable of refracting and capable of transmitting power without being refracted in a straight line .

At the same time, the chain 423 and the housing 421 are made of a synthetic resin having excellent abrasion resistance, and a predetermined guide roller 426 is formed in the curved groove in order to exclude friction with the refraction groove 422 when the protrusion is formed .

Next, a cassette stage for mounting and supporting the cassette 500 will be described (see Figs. 3A and 4).

The cassette 500 is transported while being mounted on the cassette stage 50.

The cassette stage 50 includes a plate 52 to which a support 51 conforming to the shape of the bottom plate of the cassette is fixed, a support shaft 53 for supporting the plate 52 and a buffer 54, and the buffer 54 is fixed to the upper surface of the car housing 100.

The cassette stages 50 are formed on the left and right sides of the horizontal transfer device 400, respectively, and are coupled with each other in a truss structure to stably mount the cassettes.

In order to control the rotation of the horizontal conveying device 400 in a right direction, a horizontal conveying device 300 and a vertical conveying device 200 interlocked with the rotating device and a balancing housing 100 are horizontally conveyed And a wire w having a length corresponding to the rotation angle of the device may be fixedly coupled (see Fig. 9).

According to this modified embodiment, the rotating device 300 can be rotated by 90 degrees from the fork position (point a) in the normal state to the left side (point b) and right side (point c) (W) tensile force acts to limit the rotation accurately, so that alignment of the two equipments for loading and unloading of the horizontal transfer device and the semiconductor manufacturing equipment is assuredly ensured.

A weight weight G is fixed to the bush 28 or the second lifting shaft 26 of the vertical transfer device 200 at an appropriate radius around the central axis of the bush 28 or the second lifting shaft 26, May be formed in a direction opposite to the front end (point a) from which the sheet is drawn out (see Fig. 10).

Accordingly, when the manual bogie is constructed in a small and lightweight structure, when the fork is drawn horizontally while the cassette is loaded, the center of gravity is moved to prevent the manual bogie from being transmitted or prevented. So that it is possible to eliminate the problem that the weight of the normal weight is increased by designing the weight heavily.

Reference numeral 16 denotes a control unit, reference numeral 70 denotes a position detecting unit for precisely positioning the manual bogie to a semiconductor manufacturing equipment, reference numeral 72 denotes a sliding roller for sliding the guide rail formed in front of the semiconductor manufacturing equipment, And semiconductor manufacturing equipment, respectively.

An understanding of the present invention will become more apparent from the following detailed description of the operation according to the technical idea of the present invention as described above.

A cassette 500 in which a conventional semiconductor wafer is stacked is mounted on a passenger car of the present invention.

Where the semiconductor wafer and cassette must be handled very carefully and the cassette must be mounted firmly and stably.

The cassette 500 is provided with a frame having a spacer-like shape at the lower part thereof and a plurality of glass plates stacked on the frame.

The cassette 500 can be stably inserted into the cassette 500 without being shaken from side to side.

At the same time, the stage is provided with a buffer 54 so as to mitigate the impact of the impact during carriage on the cassette.

When the worker grasps the handle 12 of the truck and moves the truck to reach a predetermined working position, the position detecting unit 70 detects the correct position and stops the movement of the truck.

When the bogie is stopped in the correct position, the operator operates the control unit 16 to load (600) the cassette 500 into the semiconductor manufacturing equipment.

And the first rotating device is driven under the control of the control unit.

The rotating device 300 corresponds to a useful technical element for improving workability in a line where the running direction of the bogie and the position of the semiconductor manufacturing equipment 600 are orthogonal.

The motor 35 is driven in the determined rotation direction so that the ring gear 310 meshed with the drive gear 351 supports the slider 31 on the journal 33 and rotates.

The rotation angle of the ring system is limited and restricted by the position control switch and the angle limiting stopper by an accurate rotation angle. This rotation angle will be 90 degrees due to the orthogonal state between the two devices described above.

The horizontal transfer device 400 connected to the upper plate 32 of the ring system by the guide shaft 480 rotates together with the rotation of the rotary device 300 so that the orientation of the fork 46 is controlled by the semiconductor manufacturing equipment 600 ).

The vertical transfer device 200 coupled with the horizontal transfer device 400 is rotated by the second lift shaft 26 by the bearing block 27 formed between the first lift shaft 25 and the second lift shaft 26, Are rotated together.

When the fork and the equipment are aligned as described above, the vertical transfer device 200 is driven to withdraw the cassette 500.

In the vertical transfer device, the first elevation shaft 25 is elevated while the motor 21 is driven, so that the horizontal transfer device 400 fixedly coupled to the elevation shaft is pushed up.

At this time, the second lifting shaft 26 coupled with the first lifting shaft 25 is supported by the bush 28 coupled to the top surface of the truck.

The support 462 of the cassette 500 formed on the fork 46 of the horizontal conveying apparatus 400 moves the cassette 500 to the cassette 500 while grasping the support of the cassette 500, So that the cassette is lifted from the cassette stage 50.

At this time, the cassette is mounted on the fork by the inclined surface support 466 in such a state that the front part is raised substantially horizontally by about 3 degrees.

The reason for forming the upward inclination is that the pulling distance of the fork 46 is about 750 mm so that a gradient is formed so that the fork is accurately loaded on the equipment 600 in consideration of a case where the fork is subjected to a load due to sagging. Of course, in most cases, the slide block 45 is firmly supported, so that the tip of the drawn fork is very rarely sagged.

The cassette 500 drawn out of the stage 50 as described above is conveyed to the semiconductor manufacturing equipment by the horizontal driving unit 42 which horizontally feeds the fork 46. [

That is, when the motor 47 of the horizontal conveying apparatus 400 is operated, power is transmitted to the pulley 474 by the timing belt 475, and the drive shaft 428 and the sprocket 424 are rotated.

The sprocket 424 pulls the chain 423 out of the housing 421, so that the fork 46 to which the one end of the chain is fixed is transported horizontally from the truck.

The extracted fork 46 includes a journal 442 coupled to slide rail 433 of the guide block 43, a journal bracket 44 coupled to the journal, and a three- While being supported by the slide block 45 which is made of a plastic material.

When the fork 46 is completely drawn out, the vertical transfer device 200 descends to load the mounted cassette 500 into the semiconductor manufacturing equipment.

When the loading is completed, the horizontal conveying device 400 is reversely driven to rewind the chain 423 so that the chain 423 is immersed in the cochlea-shaped bending grooves 422 and the fork 46 is pulled back to its original position .

As the fork 46 is returned to its original position, the slide block 45 and the advanced journal 442, both of which are supported, are retracted to the original position.

Then, when the cassette is loaded with the wafer which has been moved to the manufacturing equipment of the next process and has undergone the manufacturing process, the mounting is performed through the above-described operation.

The unloading of the cassette 500 from the manufacturing equipment is different in that the elevation control of the horizontal conveying apparatus 400 is reversed.

That is, at the time of unloading, the horizontal conveying apparatus 400 is extended in a fixed position and the access to the semiconductor manufacturing equipment is completed, the elevation is performed by the vertical conveying apparatus 200 to mount the cassette, The vertical transfer device 200 is lowered to load the cassette 500 in the cassette stage 50 after the hoisting fork 46 is horizontally conveyed to a predetermined position.

Meanwhile, the present invention attempts to reduce the overall weight of a truck by making it small and lightweight.

When the weight of the bogie is reduced, the weight lifting shaft 26 is formed so as to prevent the bogie from being shaken or turned by the center of the load when the fork is in the extended position. Thereby holding the load of the fork 46 on the vertical center line of the lift shaft.

As described above, according to the present invention, when a worker moves and unloads a semiconductor wafer from each manufacturing equipment in a line in a clean room for manufacturing the semiconductor, a fork And the worker can be shortened in workability by constituting a rotating device for rotating the worker, thereby maximizing work efficiency.

In addition, the present invention provides a manual bogie that is light in weight by simplifying mechanical components, which can suppress the fatigue of the operator and can be easily carried and operated even with a small force. In particular, To eliminate the wear of the mechanical element due to friction, to suppress generation of dust due to abrasion, to be suitable for a high-clean environment, and to exclude a factor of semiconductor failure.

Claims (19)

1. A manual bogie for loading or unloading a cassette in which semiconductor wafers are stacked and loaded into a semiconductor manufacturing equipment, A cassette stage for mounting the cassette on which the wafer is loaded, A fork lifting the cassette from the cassette stage and transferring the cassette in the horizontal direction, Horizontal transfer means for withdrawing and immersion of the fork, Rotating means for rotating the horizontal conveying means to the left and right, Up and down transfer means for vertically moving the horizontal transfer means up and down, The horizontal conveying means is fixed to the upper end of the upper conveying means, And the horizontal transfer means is coupled to the horizontal transfer means so that the horizontal transfer means can be rotated and elevated by being mounted on the upper portion of the carriage so that the center of the inner diameter of the rotating means coincides with the central axis of the vertical transfer means Wherein the semiconductor wafer is transported by a predetermined distance. The method according to claim 1, The up-down transfer device 200 includes an up-down power cylinder 23, which is formed by a combination of an electric motor 21 and a lead screw connected to the electric motor in a vertical direction, As shown in Fig. A second lift shaft 26 is axially coupled to the first lift shaft 25 of the power cylinder 23 to extend the lift shaft and a bearing block 27 is interposed between the first lift shaft and the second lift shaft The first elevating shaft 25 and the second elevating shaft 26 are coupled to each other so as to perform simultaneous operation when the first elevating shaft 25 and the second elevating shaft 26 move up and down. When the second elevating shaft 26 rotates, Coupled state to maintain the state, A bush 28 for supporting the second lift shaft 26 is fitted to the outer peripheral edge of the second lift shaft by fitting a fixing flange 261 to the tip of the second lift shaft 26, And a shock absorbing shock absorber (24) is coupled between the second lift shaft (26) and the bottom surface of the truck housing. The method according to claim 1, The rotary device 300 includes a rotary ring 30 having a circular slider 31 and a ring gear 310 integrally formed with the slider 31, a journal 33 supporting the rotary ring 30, The drive gear 351 of the drive motor 35 is engaged with the ring gear 310 formed integrally with the slider, A hole 321 is formed at the center of the upper surface of the slider 31 to penetrate and fasten the bush 28 supporting the second lift shaft 26 and the second lift shaft of the up and down transfer device 200, And a plate (32) formed by embedding a guide (323) for transmitting the rotational force of the slider (31) to the horizontal transfer device while maintaining the vertical movement of the horizontal transfer device (400) Balance. The method of claim 3, Wherein the plate (32) is provided with a position detection switch and a rotation angle restricting stopper so as to limit the rotation angle of the horizontal transfer device (400) and to stop the rotation drive motor (35) Manual bogie for wafer transport. The method according to claim 1, The horizontal conveying apparatus 400 includes a plate 41 for engaging with the flange 261 of the up-and-down conveying apparatus 200 and for mounting various driving elements, A horizontal driving unit 42 is formed to coincide with a center line of the second elevation shaft 26 of the vertical transfer device 200 and a guide block 43 fixed to both sides of the horizontal driving unit, The guide block 43 is provided with a bearing bearing 431 for supporting a driving shaft of the horizontal driving part and a laterally long sliding rail 433 is coupled to the outside of the guide block 43, A plurality of journals 442 are horizontally joined to each other in two brackets on opposite sides of the guide block, and one side rail 452 of the slide block 45 is screwed Coupling, And a bracket 464 is formed on both sides of the lower portion and the other rail 454 of the slide block 45 is screwed to the bracket 464. A fork 46, An electric motor 47 is formed as a power for horizontally moving the fork 46 and pulleys 472 and 474 are formed on the driving shaft of the motor and the driving shaft 428 of the horizontal driving unit 42, (47), and the electric motor (47) is fixed on the plate (41) so as to be orthogonal to the axis center of the vertical transfer device (200). 6. The method of claim 5, The horizontal driving part 42 is a power transmission device for protruding and retracting the fork 46. A chain 423 is inserted into a housing 421 having a cochlear refraction groove 422 and the chain driving sprocket 424, Is coupled to the driving shaft (428) and the tip of the chain (423) is connected to the center of the bottom surface of the fork (46) by a pin. 6. The method of claim 5, A slope support 466 is coupled to each corner of the upper portion of the fork 46. The support is formed in such a manner that one pair positioned on the front surface of the fork is relatively higher than one pair positioned on the rear surface, Wherein the extended inclination angle of the supporting base is set so that the front surface of the fork is formed higher by about 3 degrees. The method according to claim 6, The chain 423 and the housing 421 are made of synthetic resin having excellent abrasion resistance and a guide roller 426 is formed in the curved groove to exclude friction with the refraction groove 422 when the protrusion is formed. Manual bogies for transporting semiconductor wafers. The method according to claim 1, The cassette stage 50 includes a plate 52 to which a support 51 conforming to the shape of the bottom plate of the cassette is fixed, a support shaft 53 for supporting the plate 52 and a buffer 54 are fixed to the upper surface of the truck housing 100 and are formed on the left and right sides of the horizontal transfer device 400 and are coupled with each other in a truss structure For manual transport of semiconductor wafers. The method according to claim 2 or 3, A horizontal transfer device 300 for rotating the horizontal transfer device or a vertical transfer device 200 interlocked with the rotary device and a horizontal transfer device And a wire (w) having a length corresponding to the rotation angle is fixedly coupled. 3. The method of claim 2, Characterized in that a weight weight (G) is formed on the second lift shaft of the up-down conveying means so as to face the opposite direction of the fork draw-out direction of the horizontal conveying means. A horizontal transfer device for horizontally transferring a cassette for loading or unloading a cassette in which semiconductor wafers are stacked and loaded into semiconductor manufacturing equipment; a rotary device for horizontally rotating the horizontal transfer device; In a manual bogie consisting of an up-down transfer device and a bogie housing and being moved by a force, The up-and-down conveying device includes a motor for generating an elevating power, a first elevating shaft for elevating and lowering by a motor power, A second lifting shaft to which a fixing bracket for engaging with the horizontal transfer device is welded, A bearing block rotatably connecting a second lift shaft on the first lift shaft, And a bush for supporting the second lift shaft so as to be movable up and down, Wherein the bush is fixed to an upper surface of the bogie housing and a second lift shaft is coupled to penetrate the bush. 13. The method of claim 12, Wherein a buffer shoe is coupled between the second lifting shaft and a bottom plate of the car housing. 13. The method of claim 12, And a weight is coupled to the second lifting shaft in a direction opposite to the leading end of the horizontal transfer device. A horizontal transfer device for horizontally transferring a cassette for loading or unloading a cassette in which semiconductor wafers are stacked and loaded into semiconductor manufacturing equipment; a rotary device for horizontally rotating the horizontal transfer device; In a manual bogie consisting of an up-down transfer device and a bogie housing and being moved by a force, The rotary device includes a slider supported by a journal fixed on a top surface of a carriage, a ring gear integrally formed on the slider, The ring gear driving motor is formed and the driving gear of the ring gear driving motor is engaged with the ring gear, A plate having an elevation shaft hole formed at the center thereof is fitted to the upper portion of the slider, And a horizontal conveying device mounted on an upper portion of the slider is pivotally movable from side to side. 16. The method of claim 15, And a plurality of support shafts passing through the guides are formed on the plate so as to guide the horizontal transporting device mounted on the plate so as to be able to move up and down. A horizontal transfer device for horizontally transferring a cassette for loading or unloading a cassette in which semiconductor wafers are stacked and loaded into semiconductor manufacturing equipment; a rotary device for horizontally rotating the horizontal transfer device; In a manual bogie consisting of an up-down transfer device and a bogie housing and being moved by a force, The horizontal transfer device includes a fork that horizontally transfers a cassette loaded with wafers. A slide block including a multi-stage extension shaft for supporting extension and immersion of the fork, A deflectable straight chain block having one side fixed to one end of the bottom surface of the fork, A drive motor for driving the extension and retraction of the chain block, A sprocket connected to the driving motor by a timing belt, And the sprocket is engaged with the chain block for linear transportation. 18. The method of claim 17, Wherein the guide block is provided with a guide housing forming a movement path of the linear transport chain block, and the chain block is projected and retracted along a movement path in the guide housing. 18. The method of claim 17, A fixing bracket is formed at both ends of a guide housing having the chain block, A slide rail is coupled to the bracket, Coupling the moving brackets to the rails to slide them by the journals, A slide block extending in three stages to the moving bracket; And the fork is joined to the end of the slide block.