WO2009090743A1

WO2009090743A1 - Substrate transport device

Info

Publication number: WO2009090743A1
Application number: PCT/JP2008/050539
Authority: WO
Inventors: Makoto Fujiyoshi
Original assignee: Hirata Corporation
Priority date: 2008-01-17
Filing date: 2008-01-17
Publication date: 2009-07-23
Also published as: JP5006411B2; TWI484581B; CN101842302B; JPWO2009090743A1; TW200933800A; KR101186348B1; CN101842302A; KR20100069712A

Abstract

A substrate transport device comprises a first transport means which transports a substrate horizontally in a first transport direction and a second transport means which transports the substrate horizontally in a second transport direction orthogonal to the first transport direction. The first transport means is composed of a plurality of lines of first transport units separated from one another in the first transport direction. The second transport means is composed of a plurality of second transport units separated from one another in the second transport direction. Each second transport unit comprises a supporting unit which is disposed in a gap between the first transport units to support the substrate from its lower side, a vertical movement unit which is disposed under the supporting unit to vertically move the supporting unit, and a drive unit which is disposed below the first transport unit to move the supporting unit and the vertical movement unit in the second transport direction.

Description

Substrate transfer device

The present invention relates to an apparatus for transporting a substrate.

In an FPD (flat panel display) production line typified by a liquid crystal display or a plasma display, it is necessary to transport the substrate between a cassette for accommodating the substrate and the processing apparatus or between the processing apparatuses.

As an apparatus for transporting a substrate, Japanese Patent Application Laid-Open No. 2005-64432 includes a mounting table for mounting a substrate unloaded from a cassette, and a substrate transporting apparatus for transporting the substrate unloaded from the mounting table to a processing apparatus. An apparatus is disclosed. However, in this apparatus, while the substrate transfer device is transferring the substrate, the substrate cannot be transferred from the mounting table to the substrate transfer device, and the transfer efficiency of the substrate is reduced.

Japanese Patent Application Laid-Open No. 2004-292094 discloses an apparatus including a roller conveyor and a transfer device that loads a substrate on the roller conveyor into a cassette and unloads the substrate from the cassette onto the roller conveyor. Yes. In this apparatus, even when the roller conveyor is transporting the substrate, the substrate can be carried out of the cassette onto the roller conveyor by the transfer device. However, since a part of the transfer device is located on the side of the roller conveyor, the entire device is enlarged in order to secure an installation space for the transfer device.

FIG. 11 and FIG. 12 of Japanese Patent Application Laid-Open No. 2004-284772 disclose a device in which two sets of roller conveyors whose transport directions are orthogonal to each other are arranged so as to overlap each other and one of them is moved up and down. Even in this apparatus, even when one roller conveyor is transporting a substrate, the substrate is unloaded from the cassette onto the one roller conveyor, and is conveyed by the other roller conveyor by raising and lowering the other roller conveyor. Is possible. Further, the entire apparatus can be reduced in size by arranging two sets of roller conveyors whose conveying directions are orthogonal to each other so as to overlap each other. However, the roller conveyor has a roller driving mechanism, and it is not easy to reduce its weight. Therefore, it takes time to move the roller conveyor up and down, and the substrate transfer efficiency may decrease.

An object of the present invention is to provide a substrate transfer apparatus capable of improving the transfer efficiency of a substrate while reducing the size of the entire apparatus.

According to the present invention, the first transport means for supporting the substrate from the lower side and transporting it horizontally in the first transport direction, and the substrate on the first transport means from the lower side for supporting the first Second conveying means for horizontally conveying in a second conveying direction orthogonal to the one conveying direction, wherein the first conveying means is composed of a plurality of rows of first conveying units spaced apart from each other in the first conveying direction. The second transport means includes a plurality of second transport units spaced apart from each other in the first transport direction, and each of the second transport units is disposed in a gap between the first transport units, and the substrate A support unit that supports the substrate on the first transport unit, the support unit disposed below the support unit, and connected to the support unit. The support unit supports the substrate on the first transport unit. Lift from unit An elevating unit that raises and lowers the support unit between a raised position and a lowered position where the support unit does not interfere with the substrate on the first transport unit, and is disposed below the first transport unit, There is provided a substrate transfer apparatus comprising: a drive unit that moves the support unit and the elevating unit in the second transfer direction.

In the present invention, with the above-described configuration, the second transport unit is disposed below the first transport unit, so that the size of the entire apparatus can be reduced. Further, the substrate is raised and lowered by raising and lowering the support unit by the raising and lowering unit. The support unit only needs to have a function of supporting the substrate from below, and a driving mechanism for moving the substrate is unnecessary, so that the weight can be reduced. For this reason, the raising / lowering speed of the said board | substrate can be achieved and the conveyance efficiency of a board | substrate can be improved.

It is a top view which shows the layout of the board | substrate conveyance apparatus A which concerns on one Embodiment of this invention. FIG. 2 is an explanatory diagram of the structure of the orthogonal conveyance device 1 along the line II in FIG. 1. FIG. 2 is an explanatory diagram of the structure of the orthogonal conveyance device 1 along the line II-II in FIG. 1. FIG. 6 is a perspective view of a second transport unit 21. 6 is an operation explanatory diagram of the substrate holding unit 34. FIG. 3 is a perspective view of a storage cassette 70. FIG. It is operation | movement explanatory drawing in the case of carrying out the glass substrate W from the storage cassette 70. FIG. 4 is a block diagram of a control device 200 of the substrate transfer apparatus A. FIG. FIG. 10 is an operation explanatory diagram of the substrate transfer apparatus A. FIG. 10 is an operation explanatory diagram of the substrate transfer apparatus A. FIG. 10 is an operation explanatory diagram of the substrate transfer apparatus A. FIG. 10 is an operation explanatory diagram of the substrate transfer apparatus A. FIG. 10 is an operation explanatory diagram of the substrate transfer apparatus A. FIG. 10 is an operation explanatory diagram of the substrate transfer apparatus A. FIG. 10 is an operation explanatory diagram of the substrate transfer apparatus A. FIG. 10 is an operation explanatory diagram of the substrate transfer apparatus A.

<Overall configuration>
FIG. 1 is a plan view showing a layout of a substrate transfer apparatus A according to an embodiment of the present invention, FIG. 2 is a structural explanatory view of the orthogonal transfer apparatus 1 along the line II in FIG. 1, and FIG. It is structure explanatory drawing of the orthogonal conveying apparatus 1 along II-II. In each figure, arrows X and Y indicate horizontal directions orthogonal to each other. When the forward and reverse directions of the X and Y directions are specifically mentioned, the directions of the arrows are + X and + Y, and the opposite directions are -X and -Y. An arrow Z indicates a vertical direction (vertical direction). When the upper and lower sides are distinguished, the upper direction is called + Z and the lower direction is called -Z.

The substrate transfer device A includes an orthogonal transfer device 1,

conveyor devices

2 and 3, a transfer device 4, a plurality of conveyor devices 5, and a plurality of lifting devices 80. The substrate transport apparatus A transports the glass substrate W from the storage cassette 70 that stores the rectangular thin glass substrate W to the processing apparatus (not shown), and transports the glass substrate W from the processing apparatus to the storage cassette 70. The processing apparatus performs cleaning, drying, and other processing of the glass substrate W.

<Orthogonal transfer device 1>
The orthogonal conveyance device 1 includes a first conveyance device 10 that horizontally conveys the glass substrate W in the X direction, a second conveyance device 20 that horizontally conveys the glass substrate W on the first conveyance device 10 in the Y direction, And a gantry 500 that supports the first conveyance device 10 and the second conveyance device 20. The gantry 500 includes a gantry body 501 and legs 502 that support the gantry body 501.

<First transfer device 10>
The first transport device 10 includes a plurality of rows of first transport units 11 that are separated from each other in the X direction. In the present embodiment, four rows of first transport units 11 are provided.

The first transport unit 11 is further composed of a plurality of roller conveyor units 60 arranged in the Y direction. As shown in FIGS. 1 to 3, each roller conveyor unit 60 has a plurality of rollers 61 on which a glass substrate W is placed, a drive box 62 incorporating a driving device for the rollers 61, and the arrival of the glass substrate W. And a sensor 63 (see FIG. 3) such as an optical sensor to detect. The roller 61 is a driven roller provided so as to be rotatable about a rotation axis in the Y direction, and supports the glass substrate W from the lower side thereof and transports it in both the + X direction and the −X direction. Each roller conveyor unit 60 can be driven independently, and is supported upright on the gantry body 501 of the gantry 500 by the legs 601.

In the present embodiment, the first transport unit 11 is configured by the roller conveyor unit 60, but may be another transport unit that supports and transports the glass substrate W from the lower side, for example, a belt conveyor.

<Second transfer device 20>
As shown in FIG. 2, the second transport device 20 is configured by a plurality of second transport units 21 that are controlled synchronously and spaced apart from each other in the X direction, and are provided on the gantry body 501. In the case of this embodiment, three second transport units 21 are provided. Hereinafter, the configuration of each second transport unit 21 will be described in detail with reference to FIGS. 2 to 4. FIG. 4 is a perspective view of the second transport unit 21. The second transport unit 21 includes a support unit 30, an elevating unit 40, and a drive unit 50.

<Support unit 30>
The support unit 30 extends in the Y direction, and the length in the Y direction is slightly longer than the width in the Y direction of the glass substrate W. For this reason, the glass substrate W can be stably supported by the support unit 30 of each second transport unit 21.

The support unit 30 includes a support member 31 extending in the Y direction. In the case of this embodiment, the support member 31 is a hollow square steel pipe. A plurality of rollers 32 are provided on the support member 31 so as to be separated from each other in the Y direction, and are supported by the support member 31 via brackets 33. The roller 32 is rotatably attached to the bracket 33 and can rotate about an axis in the X direction. When the glass substrate W is transported by the second transport unit 21, the glass substrate W is placed on the roller 32, and the roller 32 contacts the lower surface of the glass substrate W to support the glass substrate W from below. In the present embodiment, the case where the roller 32 is provided on the support member 31 via the bracket 33 has been described as an example, but the present invention is not limited to this. For example, the support member 31 may be provided with a pin member having a rolling bearing at the tip.

The support unit 30 includes a pair of substrate holding units 34 that are spaced apart from each other in the Y direction. In the case of this embodiment, the substrate holding units 34 are respectively disposed at both ends in the Y direction of the support member 31 so as to sandwich the rollers 32. The substrate holding unit 34 includes a contact member 35 that contacts the edge of the glass substrate W, a moving unit 36 that reciprocates the contact member 35 in the Y direction, and a cover member 37 that covers the moving unit 36.

In the case of this embodiment, the moving unit 36 is an air cylinder, and includes a main body portion 36a and a movable portion 36b. By the supply and switching of air to the main body 36a, the movable part 36b reciprocates in the Y direction.

In the case of this embodiment, the contact member 35 is a roller supported by the movable portion 36b so as to be rotatable about an axis in the Z direction, and the edge of the glass substrate W is in contact with the peripheral surface thereof. The cover member 37 prevents dust generation due to the operation of the moving unit 36, and a slit 371 is provided on the upper surface thereof in order to avoid interference with the connecting shaft of the contact member 35 and the movable portion 36b.

FIG. 5 is an operation explanatory diagram of the substrate holding unit 34. 5 shows a case where the glass substrate W is placed on the roller 32 and the contact member 35 of the substrate holding unit 34 is in the retracted position. By moving each contact member 35 in the direction approaching each other by the operation of each moving unit 36 from this mode, each contact member 35 is moved to the contact position as shown in the lower side of FIG. The glass substrate W is held in contact with each edge in the Y direction of the glass substrate W. Further, the glass substrate W can be positioned in the Y direction by holding the glass substrate W by the substrate holding unit 34. During the transport of the glass substrate W by the second transport device 20, the glass substrate W is positioned and held by the substrate holding unit 34. Furthermore, the pair of substrate holding units 34 in the second transport units 21 provided in a plurality of rows may be driven simultaneously (moved in the approaching direction) in all rows, but depending on the size of the glass substrate W You may make it select the row | line | column made to select suitably.

When the glass substrate W is held by the substrate holding unit 34, the glass substrate W may move slightly in the Y direction. However, since the roller 32 can rotate around the axis in the X direction, The glass substrate W and the roller 32 are prevented from rubbing, and the glass substrate W can be prevented from being damaged.

Next, as shown in FIG. 2, the support unit 30 is disposed in the gap between the first transport units 11. In the present embodiment, the first transport units 11 are provided in four rows as described above, and there are three gaps between the first transport units 11. In the present embodiment, the support units 30 are arranged in all the gaps, and therefore, the two second transport units 21 are provided. However, it is not necessary to provide the number of second transport units 21 corresponding to all the gaps. For example, in the case of this embodiment, two second transport units 21 are provided corresponding to two gaps on both sides in the X direction. It may be provided.

<Elevating unit 40>
In the case of this embodiment, the elevating unit 40 is an air cylinder, and includes a main body portion 42 and a movable portion 41 as shown in FIG. By the supply and switching of air to the main body 42, the movable part 41 reciprocates in the Z direction. The elevating unit 40 is disposed below the support unit 30, and the movable portion 41 is connected to the lower surface of the support member 31 of the support unit 30.

FIG. 2 shows the lifting operation of the support unit 30 by the lifting unit 40. 2 shows a case where the support unit 30 is in the lowered position so that the glass substrate W placed on the roller 61 of the first transport unit 11 and the support unit 30 do not interfere with each other. From this aspect, when the support unit 30 is raised by the operation of the elevating unit 40, the glass substrate W placed on the roller 61 of the first transport unit 11 is placed on the roller 32 of the support unit 30, and the glass substrate W However, the support unit 30 is positioned at the raised position lifted from the first transport unit 11 (the lower side in FIG. 2).

Thereafter, by holding the glass substrate W by the substrate holding unit 34 described above, the glass substrate W can be transported by the second transport unit 21 instead of the first transport unit 11.

<Drive unit 50>
As shown in FIGS. 2 and 3, the drive unit 50 is disposed below the first transport unit 11 and moves the support unit 30 and the lifting unit 40 in the Y direction. By disposing the drive unit 50 in the space below the first transport unit 11, the orthogonal transport device 1 as a whole can be reduced in size.

The drive unit 50 includes a support plate 51, a slide member 52, and a rail member 53. The elevating unit 40 is mounted on the support plate 51, whereby the elevating unit 40 and the support unit 30 are mounted on the drive unit 50. A control valve that switches the supply of air to the lifting unit 40 can be mounted on the support plate 51. According to this configuration, the control valve can be disposed close to the lifting unit 40, so that the lifting operation of the lifting unit 40 can be made more reliable.

The slide member 52 is fixedly attached to the lower surface of the support plate 51, and a plurality of slide members 52 are provided at predetermined intervals in the Y direction. Each slide member 52 is slidably provided on the rail member 53, and the support plate 51 and the slide member 52 constitute a slider that slides on the rail member 53. The rail member 53 extends in the Y direction, and extends over substantially the entire area from one end to the other end of the first transport unit 11 in the Y direction as shown in FIG. A bearing (or roller) is built in the surface of the slide member (linear guide block) 52 facing the rail member 53. These bearings roll in the groove (contact surface) of the rail member 53 while circulating inside the linear guide block (or these rollers contact the contact surface of the rail member 53 inside the linear guide block. Rolls in contact). Therefore, the slide member 52 can slide on the rail member 53 with almost no frictional resistance.

End members 53a are provided at both ends of the rail member 53 in the Y direction, and bearings 54a are fixed to the end members 53a. A shaft 54 extending in the X direction is supported by the bearing 54 a, and one shaft 54 is provided at each end of the rail member 53 in the Y direction. In the case of this embodiment, the shaft 54 is common to all the second transport units 21, and the shafts 54 provided at the respective ends are connected to one.

A pulley 55 is provided in the vicinity of the rail member 53 around each shaft 54, and a pair of pulleys 55 is disposed for each rail member 53. A belt 56 is wound around the pair of pulleys 55 separated in the Y direction, and both end portions of the belt 56 are respectively fixed to the front and rear of the support plate 51 (see FIG. 4).

A drive source 58 is provided on one of the two shafts 54. The drive source 58 includes a motor 58a and a speed reducer 58b, and rotationally drives the shaft 54. As a result of the rotation of one shaft 54 driven by the drive source 58, the pulley 54 fixed to the one shaft 54 rotates, and the belt 56 travels. As a result, the support plate 51 and the slide member 52 slide on the rail member 53, and the support unit 30 and the lifting unit 40 can be moved in the Y direction and stopped at an arbitrary position.

The weight of the support unit 30 and the lifting unit 40 is borne by the rail member 53. Therefore, the drive source 58 that rotates the pulley 55 and travels the belt 56 is sufficient if it can generate a moving force in the Y direction, and it is sufficient to have a smaller output.

The movement positions in the Y direction of the support unit 30 and the lifting unit 40 by driving the drive source 58 can be controlled by feedback control, for example. In this case, the motor 58a is controlled according to detection results of a sensor for detecting the rotation speed of the motor 58a, a sensor for detecting the position of the slide member 52 on the rail member 53, and the like.

In this embodiment, a belt transmission mechanism is employed as the drive source 58, but other mechanisms may be employed. For example, a ball screw mechanism or a mechanism using a linear motor can be employed.

Further, in the present embodiment, the drive source 58 is made common to each second transport unit 21. However, a drive source 58 may be provided for each second transport unit 21 so as to be controlled synchronously. However, by using the common drive source 58, it is possible to reduce costs, simplify control, and simplify the configuration.

The drive unit 50 includes a pair of cover members 57. As shown in FIG. 2, the pair of cover members 57 has a C-shape disposed on the + X side and the −X side of the rail member 53, and forms hollow spaces S1 and S2. A pulley 55 and a belt 56 are accommodated in the space S1, and wiring and piping (not shown) are arranged in the space S2. The cover member 57 surrounds the rail member 53, the support plate 51, the slide member 52, the pulley 55, and the belt 56, and prevents dust generation due to driving of the drive unit 50. The cover member 57 is provided with a plurality of suction / exhaust means 57a (FIG. 3) for sucking air in the internal spaces S1 and S2 and exhausting the air to the outside. Thereby, dust generation can be prevented more reliably.

<

Conveyor devices

2 and 3>
With reference to FIG. 1, the

conveyor devices

2 and 3 each include a plurality of roller conveyor units 60 in the case of this embodiment. The conveyor device 2 is disposed on the side in the + X direction of the first transport device 10 and transports the glass substrate W from the transport device 4 to the orthogonal transport device 1. The conveyor device 3 is disposed on the + X side of the first transport device 10 and transports the glass substrate W from the orthogonal transport device 1 to the transport device 4.

<Transport device 4>
The transport device 4 transports the glass substrate W transported from the conveyor device 3 to a processing device (not shown), and transports the glass substrate W transported from the processing device to the conveyor device 2. The configuration of the transfer device 4 may be, for example, the same configuration as that of the orthogonal transfer device 1, or an articulated robot that can move in the Y direction.

<Storage cassette 70>
FIG. 6 is a perspective view of the storage cassette 70. The storage cassette 70 is provided above the conveyor device 5 and is a cassette that can store the glass substrates W in a horizontal posture in multiple stages in the Z direction. FIG. 6 shows a state where the glass substrate W is not stored. In the case of this embodiment, the storage cassette 70 forms a substantially rectangular parallelepiped frame body by a plurality of column members 71 and beam members 72. The arrangement interval of the beam members 72 is set so that the conveyor device 5 can enter the storage cassette 70 from below the storage cassette 70, and the beam member 72 forms an opening through which the conveyor device 5 can enter from below. ing.

The plurality of column members 71 are arranged in the X direction, and the same number of the column members 71 are arranged side by side in the Y direction. Between a pair of pillar members 71 spaced apart in the Y direction, wires 73 are stretched in a Z direction and at a predetermined pitch. The space between the upper and lower sides of each wire 73 forms a slot for storing the glass substrate W, and the glass substrates W are placed one by one on the wire 73 in a horizontal posture. Then, as many slots as the number of wires 73 arranged in the Z direction are formed.

In this embodiment, the slot is formed by a wire, but other methods can of course be employed. However, by using the wire, the interval between the substrates to be stored can be reduced, and the storage efficiency of the storage cassette 70 can be increased.

<Conveyor device 5>
In the case of the present embodiment, the conveyor device 5 includes a plurality of roller conveyor units 60. The conveyor device 5 is provided for each storage cassette 70 and is located below the storage cassette 70. Further, as shown in FIG. 1, the conveyor device 5 is disposed on the side of the first transport device 10 in the −X direction, and transports the glass substrate W to and from the orthogonal transport device 1. The glass substrate W is carried into and out of the storage cassette 70.

<Elevating device>
The storage cassette 70 and the conveyor device 5 are relatively moved in the Z direction by raising and lowering the storage cassette 70 in the Z direction by the pair of lifting devices 80. Instead of this, the conveyor device 5 may be configured to move up and down in the Z direction. In addition, when it is set as the structure which raises / lowers the conveyor apparatus 5, it becomes a structure which the 1st conveying apparatus 10 also raises / lowers.

In the case of this embodiment, each lifting device 80 is disposed on both sides of the storage cassette 70 facing each other in the Y direction so as to sandwich the storage cassette 70, and each storage cassette 70 is cantilevered. According to this configuration, the lifting device 80 can be made thinner.

The elevating device 80 includes a beam member 81 on which the beam member 72 at the bottom of the storage cassette 70 is placed. As each beam member 81 of each lifting device 80 moves in the Z direction synchronously, the storage cassette 70 is lifted and lowered. The lifting device 80 includes a driving device (not shown), and the storage cassette 70 is lifted and lowered by lifting and lowering the beam member 81 by the driving device. Between each lifting device 80, a beam member 80a is installed on the upper end of the column.

FIG. 7 is a diagram showing the raising / lowering operation of the storage cassette 70 by the lifting / lowering device 80 when the glass substrate W is carried out of the storage cassette 70. In the figure, the lifting device 80 is not shown. When carrying out from the storage cassette 70, it carries out in order from the glass substrate W accommodated in the lowest slot among the slots in which the glass substrate W was accommodated.

First, as shown in the upper left diagram of FIG. 7, the storage cassette 70 is lowered by the lifting device 80 (not shown in FIG. 7) from the state where the storage cassette 70 is positioned above the conveyor device 5, and the upper right diagram of FIG. 7. As shown in FIG. 3, the glass substrate W to be transported is placed on the conveyor device 5. At this time, the conveyor device 5 enters the storage cassette 70 from below, and the glass substrate W to be transported floats from the wire 73 of the storage cassette 70 and is supported only by the conveyor device 5. Subsequently, the conveyor device 5 is driven to carry out the glass substrate W to be transported from the storage cassette 70 as shown in the lower left diagram of FIG. Hereinafter, similarly, the lowering of the storage cassette 70 and the driving of the conveyor device 5 are repeated (lower right diagram in FIG. 7), and the glass substrates W are sequentially carried out from the lower side.

When the glass substrate W is carried into the storage cassette 70, the operation is almost the reverse of the operation at the time of carrying out. The glass substrate W is carried in in order from the uppermost slot among the slots in which the glass substrate W is not accommodated.

<Control device>
FIG. 8 is a block diagram illustrating a configuration of the control device 200 of the substrate transfer apparatus A. A control device (control means) 200 provides a CPU 201 that controls the entire substrate transport apparatus A, a work area of the CPU 201, a RAM 202 that stores variable data and the like, and a fixed program such as a control program and control data. ROM 203 for storing data. The RAM 202 and the ROM 203 can employ other storage means.

The input interface (I / F) 204 is an interface between the CPU 201 and various sensors (for example, the sensor 63), and the CPU 201 acquires detection results of various sensors via the input I / F 204. An output interface (I / F) 205 includes a CPU 201, various motors (for example, a motor 58a, a motor in the drive box 62, and the like), and control valves (for the substrate holding unit 34 and the lifting unit 40). This is an interface, and the CPU 201 controls various motors and control valves via the output I / F 205.

A communication interface (I / F) 206 is an interface between the host computer 300 that controls the entire substrate processing equipment including the substrate transfer apparatus A and the CPU 201. The CPU 201 controls the substrate transfer apparatus A in response to a command from the host computer 300. To control.

<Example of conveyance of glass substrate by substrate conveyance device A>
With reference to FIG. 9 thru | or FIG. 16, the example of conveyance of the glass substrate W by the substrate conveyance apparatus A is demonstrated. In this embodiment, as shown in FIG. 9, the storage cassette 70 storing the glass substrate W is disposed on the + Y side, and the empty storage cassette 70 is disposed on the −Y side. A case will be described in which an unprocessed glass substrate W is transported to the processing apparatus and the processed glass substrate W is transported from the processing apparatus to the storage cassette 70 located on the −Y side. First, a case where an unprocessed glass substrate W is transported from the storage cassette 70 located on the + Y side to the processing apparatus will be described with reference to FIGS.

As shown in FIG. 10, the glass substrate W is conveyed in the + X direction by the operation of the conveyor device 5 and the lifting device 80 from the + Y side storage cassette 70. At the same time, in the orthogonal conveyance device 1, the operation of the first conveyance unit 10 of the first conveyance device 10 conveys the glass substrate W conveyed from the storage cassette 70 to the + X side, and the X direction of the orthogonal conveyance device 1 The glass substrate W is positioned substantially at the center. At this time, the support unit 30 is positioned at the lowered position, and is positioned directly below the glass substrate W being conveyed. The contact member 35 of the substrate holding unit 34 is positioned at the retracted position.

Whether or not the support unit 30 is located directly below the glass substrate W is basically considered to be located directly below the glass substrate W when the support unit 30 is located at a predetermined position. However, a sensor that detects the glass substrate W may be provided in the support unit 30 to detect the glass substrate W and control the position of the support unit 30.

Next, the support unit 30 is moved to the raised position by the elevating unit 40, and thereby the glass substrate W is supported by the support unit 30 instead of the first transport device 10. Subsequently, the operation of the substrate holding unit 34 moves the contact member 35 to the contact position to hold the glass substrate W.

Next, as shown in FIG. 11, the support unit 30 is moved in the −Y direction by the operation of the drive unit 50, and the glass substrate W is moved to the position on the −X side of the conveyor device 3. Due to the movement of the glass substrate W, an area on the side of the storage cassette 70 on the + Y side of the orthogonal conveyance device 1 becomes empty. Accordingly, the second glass substrate W starts to be unloaded from the + Y side storage cassette 70.

Next, the contact member 35 of the substrate holding unit 34 is positioned at the retracted position, and the support unit 30 is moved to the lowered position. As a result, the first glass substrate W is placed on the first transfer device 10 again. Subsequently, as illustrated in FIG. 12, the first glass substrate W is transported in the + X direction by the first transport device 10 and the conveyor device 3, and the first glass substrate W is transferred to the transport device 4. The transport apparatus 4 transports the first glass substrate W to the processing apparatus.

At the same time, the support unit 30 is moved in the + Y direction by the operation of the drive unit 50 and is positioned directly below the second glass substrate W. At this time, even if the first transport device 10 is in the process of unloading the second glass substrate W from the storage cassette 70, the position is directly below the glass substrate W transported through the support unit 30 (position in FIG. 9). Therefore, it is possible to improve the conveyance efficiency. Thereafter, by repeating the same procedure, the unprocessed glass substrate W can be sequentially and continuously conveyed from the storage cassette 70 located on the + Y side to the processing apparatus. Since the conveyance of the glass substrate W in the orthogonal conveyance apparatus 1 in the X direction and the Y direction can be performed in parallel, the conveyance efficiency of the glass substrate W can be improved.

Next, the case where the processed glass substrate W is transferred from the processing apparatus to the storage cassette 70 located on the −Y side will be described with reference to FIGS.

As shown in FIG. 13, the processed glass substrate W is transported from the processing device to the conveyor device 2 by the transport device 4, and the conveyor device 2 transports the glass substrate W onto the orthogonal transport conveyor 1. At the same time, in the orthogonal conveyance device 1, the operation of the first conveyance unit 10 of the first conveyance device 10 conveys the glass substrate W conveyed from the conveyor device 2 to the −X side, and the X direction of the orthogonal conveyance device 1. The glass substrate W is positioned in the approximate center of (FIG. 14). At this time, the support unit 30 is positioned at the lowered position, and is positioned directly below the glass substrate W being conveyed. The contact member 35 of the substrate holding unit 34 is positioned at the retracted position.

Next, as shown in FIG. 15, the support unit 30 is moved in the −Y direction by the operation of the drive unit 50, and the glass substrate W is moved to the + X side position of the −Y side storage cassette 70. Due to the movement of the glass substrate W, an area on the side of the conveyor device 2 of the orthogonal conveyance device 1 becomes empty. Therefore, the conveyance of the second glass substrate W by the conveyance device 4 and the conveyor device 2 is started.

Next, the contact member 35 of the substrate holding unit 34 is positioned at the retracted position, and the support unit 30 is moved to the lowered position. As a result, the first glass substrate W is placed on the first transfer device 10 again. Subsequently, as shown in FIG. 16, the first glass substrate W is carried into the −Y side storage cassette 70 by the operations of the first transport device 10, the conveyor device 5, and the lifting device 80.

At the same time, the support unit 30 is moved in the + Y direction by the operation of the drive unit 50 and is positioned directly below the second glass substrate W. At this time, even when the conveyor device 2 is in the process of carrying the second glass substrate W onto the first transport device 10, the position is directly below the glass substrate W being transported through the support unit 30 (the position in FIG. 13). ) And can be put on standby, so that the conveyance efficiency can be improved. Thereafter, by repeating the same procedure, the processed glass substrates W can be sequentially and continuously transferred from the processing apparatus to the storage cassette 70 located on the −Y side. Since the conveyance of the glass substrate W in the orthogonal conveyance apparatus 1 in the X direction and the Y direction can be performed in parallel, the conveyance efficiency of the glass substrate W can be improved.

Thus, in this embodiment, since the conveyance of the glass substrate W in the X direction and the Y direction in the orthogonal conveyance device 1 can be performed in parallel, the conveyance efficiency of the glass substrate W can be improved. In particular, the larger the glass substrate W is, the more time is required for loading into the storage cassette 70 and unloading from the storage cassette 70. Therefore, as in this embodiment, the X direction and Y of the glass substrate W are used. The tact time can be shortened by carrying the directions in parallel.

And since the 2nd conveying apparatus 20 is arrange | positioned under the 1st conveying apparatus 10, size reduction of the whole apparatus can be achieved. Further, the glass substrate W is raised and lowered by raising and lowering the support unit 30 by the raising and lowering unit 40. Since the support unit 30 itself does not have a drive mechanism for transporting the glass substrate W and only has a function of supporting the glass substrate W from the lower side, the weight can be reduced. For this reason, the glass substrate W can be moved up and down at high speed, and the conveyance efficiency of the glass substrate W can be improved.

In addition, since the weight of the support unit 30 can be reduced, it can be moved at a higher speed in the Y direction, and the conveyance efficiency of the glass substrate W can be further improved. Further, since the support unit 30 is configured to move, the transport distance of the glass substrate W in the Y direction is defined by the total length of the drive unit 50 in the Y direction, and may be longer or shorter. This increases the degree of freedom of device layout.

Further, since the

conveyor devices

2, 3 and 5 can be arranged on the + X side and the -X side of the orthogonal conveyance device 1, respectively, and the glass substrate W can be transferred between them and the orthogonal conveyance device 1, the degree of freedom in layout of the device Can be enhanced. Further, the second transport unit 21 can be stopped at an arbitrary position in the Y direction of the first transport unit 11. Furthermore, the 1st conveyance unit 11 is comprised by the several roller conveyor unit 60 which can be driven independently. As a result, when the conveyor device 5 and the like are arranged and connected to the side of the orthogonal conveyance device 1 in the X direction, options for the connection position in the Y direction are increased. Therefore, the layout flexibility of the apparatus can be further increased.

In the present embodiment, the roller conveyor units 60 of the first transport unit 11 are arranged at substantially equal pitches in the Y direction, but the present invention is not limited to this. It is sufficient that the roller conveyor unit 60 is located at least on the side of the

conveyor devices

2, 3, and 5 disposed on the side of the orthogonal conveyance device 1.

Claims

First transport means for supporting the substrate from below and transporting it horizontally in the first transport direction;
A second transport unit configured to support the substrate on the first transport unit from below and transport the substrate horizontally in a second transport direction orthogonal to the first transport direction;
The first transport means includes
A plurality of first transport units spaced apart from each other in the first transport direction;
The second conveying means includes
A plurality of second transport units separated from each other in the first transport direction;
Each of the second transport units is
A support unit disposed in a gap between the first transport units and supporting the substrate from below;
A raised position disposed below the support unit and connected to the support unit, the lift unit lifting the substrate on the first transport unit from the first transport unit; and the support unit A lifting unit that lifts and lowers the support unit between a lowering position that does not interfere with the substrate on the first transport unit;
A drive unit that is disposed below the first transport unit and moves the support unit and the elevating unit in the second transport direction;
A substrate transfer apparatus comprising:
The substrate transfer apparatus according to claim 1, wherein the first transfer unit includes a plurality of roller conveyor units that can be driven independently.
Further comprising a pair of substrate holding units provided in the support unit and spaced apart in the second transport direction;
The substrate holding unit is
A contact member that contacts the edge of the substrate;
A moving unit that reciprocates the contact member in the second transport direction;
The substrate transfer apparatus according to claim 2, further comprising:
The support unit is
A support member extending in the second transport direction;
A plurality are provided apart from each other in the second transport direction, are in contact with the lower surface of the substrate, and are supported by the support member via a bracket so as to be rotatable about an axis parallel to a direction orthogonal to the second transport direction. Laura,
The substrate transfer apparatus according to claim 3, further comprising:
The drive unit is
A rail member extending in the second transport direction;
A slider that is slidably movable along the rail member and on which the elevating unit is mounted;
The substrate transfer apparatus according to claim 1, further comprising:
The drive unit is
A pair of pulleys spaced apart in the second transport direction;
A belt wound around the pair of pulleys and coupled to the slider;
A pair of shafts extending in the first transport direction and rotating the pair of pulleys;
A drive source that rotationally drives one of the pair of shafts;
With
Of the pair of shafts in each of the drive units, one shaft and the other shaft are all connected and provided, and one of the drive sources is connected to the one shaft. The substrate transfer apparatus according to claim 5.
The substrate transfer apparatus according to claim 6, further comprising a cover member that surrounds the rail member, the slider, the pair of pulleys, and the belt.
Between the first transport means, the first transport means is disposed laterally in the first transport direction, and supports the substrate from below and transports the substrate horizontally in the first transport direction. The substrate transfer apparatus according to claim 1, further comprising third transfer means for transferring the substrate.
A storage cassette which is disposed above the third transport means and has an opening through which the third transport means can enter; and a plurality of slots in the vertical direction for storing the substrate in a horizontal position; and the third transport 9. The substrate transfer apparatus according to claim 8, further comprising elevating means for elevating and lowering the means relative to each other.
It is arranged on one side of the first transporting direction of the first transporting means, supports the substrate from the lower side thereof, and transports it horizontally in the first transporting direction. A third transport means for transporting the substrate at
It is disposed on the other side of the first transporting direction of the first transporting means, and supports the substrate from the lower side and transports it horizontally in the first transporting direction, so that it is between the first transporting means. A fourth transfer means for transferring the substrate at
The substrate transfer apparatus according to claim 1, further comprising:
2. The substrate transfer apparatus according to claim 1, wherein a length of the support unit in the second transfer direction is longer than a width of the substrate.