200933800 九、發明說明 【發明所屬之技術領域】 本發明是關於基板搬運用的裝置。 【先前技術】 於液晶顯示器或電漿顯示器等FPD (平板顯示器）製 造生產線，需要在基板收容用的匣盒和處理裝之間，或在 ❹ 處理裝置間搬運基板。 基板搬運用的裝置，於日本特開2005-64432號公報中 ’已有揭示該裝置具備：可對從匣盒搬出的基板進行載置 的載置台；及可將從載置台搬出的基板搬運往處理裝置的 基板搬運裝置。但是，該裝置，於基板搬運裝置的基板搬 運中，無法從載置台往基板搬運裝置搬出基板，因此基板 的搬運效率低。 日本特開2004-292094號公報中，所揭示的裝置是具 〇 備輥式輸送機，和可將輥式輸送機上的基板搬入匣盒，此 外還可從匣盒將基板搬出至輥式輸送機上的移載裝置。該 裝置’即使是在輥式輸送機的基板搬運中，利用移載裝置 還是能夠在輥式輸送機上從匣盒搬出基板。但是，因移載 裝置的一部份需位於輥式輸送機的側方，爲確保有移載裝 置的設置空間，所以會導致裝置全體大型化。 於日本特開2004-284772號公報的第11圖及第12圖中 ，揭示有將搬運方向正交的2組輥式輸送機配置成上下重 疊’使其中一方昇降的裝置。該裝置，也是同樣地，即使 -4- 200933800 是於一方的輥式輸送機的基板搬運中，還是能夠在該一方 的輥式輸送機上從匣盒搬出基板，利用另一方輥式輸送機 的昇降讓基板由該另一方輥式輸送機進行搬運。此外，因 是將搬運方向正交的2組輥式輸送機配置成上下重疊，所 ' 以還能夠讓裝置全體達到小型化。但是，輥式輸送機需具 ' 備有輥的驅動裝置，所以輥式輸送機不容易輕型化。因此 ，輥式輸送機的昇降較費時，有時會導致基板搬運效率降 ❹ 低。 【發明內容】 [發明欲解決之課題] 本發明目的是在於提供一種能夠實現裝置全體小型化 的同時能夠提昇基板搬運效率的基板搬運裝置。 根據本發明時，其所提供的基板搬運裝置，具備：可 對上述基板從其下側進行支撐，在第1搬運方向進行水平 φ 搬運的第1搬運手段；及可對上述第1搬運手段上的上述基 板從其下側進行支撐，在上述第1搬運方向正交方向的第2 搬運方向進行水平搬運的第2搬運手段，上述第1搬運手段 是由彼此於上述第1搬運方向隔著間隔的複數列第1搬運單 元所構成，上述第2搬運手段是由彼此於上述第2搬運方向 隔著間隔的複數列第2搬運單元所構成，各個上述第2搬運 單元，具備有：配置在上述第1搬運單元間的空隙，可對 上述基板從其下側進行支撐的支撐單元；配置在上述支撐 單元下方，並且，連結設置在上述支撐單元，可使上述支 -5- 200933800 撐單元昇降在上述支撐單元將上述第1搬運單元上的上述 基板從上述第1搬運單元往上抬的上昇位置和上述支撐單 元不會干涉到上述第1搬運單元上的上述基板的降下位置 之間的昇降單元；及配置在比上述第1搬運單元還下方的 位置，可使上述支撐單元及上述昇降單元朝上述第2搬運 方向移動的驅動單元。 本發明是根據上述構成爲上述第2搬運手段配置在上 述第1搬運手段的下方，所以能夠實現裝置全體的小型化 。此外，由上述昇降單元執行上述支撐單元的昇降藉此昇 降上述基板。上述支撐單元只要具有能夠對上述基板從下 側進行支撐的功能即可，並不需要上述基板移動用的驅動 機構，所以能夠實現上述支撐單元的輕型化。因此，能夠 實現上述基板昇降高速化，能夠提昇基板搬運效率。 【實施方式】 Q [發明之最佳實施形態] 〈全體構成〉 第1圖爲表示本發明一實施形態相關的基板搬運裝置 A的平面配置圖，第2圖爲第1圖剖線I-Ι的正交搬運裝置1 構造剖面說明圖，第3圖爲第1圖剖線Π-II的正交搬運裝 置1構造剖面說明圖。於各圖中，箭頭符號X、Y爲彼此 正交的水平方向。在特別說明X、γ方向的正反方向時， 箭頭符號+ X、+ Y爲正方向，箭頭符號一 X、— Y爲反方 向。箭頭符號Z爲表示上下方向（垂直方向）。區分上下 -6- 200933800 進行說明時，上方向稱爲+ z’下方向稱爲一 z。 基板搬運裝置A’具備正交搬運裝置1和輸送裝置2、 3和搬運裝置4和複數輸送裝置5及複數昇降裝置80。基板 搬運裝置A是從方形薄狀玻璃基板W收納用的收納匣盒 7〇將玻璃基板W搬往未圖示的處理裝置，此外，從該處 理裝置將玻璃基板W搬往收納匣盒70。處理裝置是執行 玻璃基板W的洗淨、乾燥、其他的處理。 ❹ 〈正交搬運裝置1〉 正交搬運裝置1，具備：可朝X方向水平搬運玻璃基 板W的第1搬運裝置10 ;可將第1搬運裝置10上的玻璃基 板w朝Y方向水平搬運的第2搬運裝置20;及第1搬運裝 置1〇及第2搬運裝置20支撐用的架台500。架台500是由架 台本體部501和架台本體部501支撐用的腳部502所構成。 〇 〈第1搬運裝置10〉 第1搬運裝置10是以彼此於X方向隔著間隔的複數列 第1搬運單元11構成。本實施形態的狀況，第1搬運單元11 是設置成4列。 第1搬運單元11，又以配列在Y方向的複數輥式輸送 單元60構成。如第1圖至第3圖所示，各輥式輸送單元60, 具備：可載置玻璃基板W的複數輥61;內藏有輥61驅動 裝置的驅動箱62 ;及可對玻璃基板W的到來進行檢測的 光感測器等感測器63 (參照第3圖）。輥61是設置成可繞 200933800 著γ方向旋轉軸轉動自如的從動輥，構成可從玻璃基板 W下側支撐著玻璃基板W朝+ Χ方向及-X方向的兩方 向搬運玻璃基板W。各輥式輸送單元60是可分別獨立驅動 ’此外，各輥式輸送單元60是由腳部601直立支撐在上述 ' 架台5 00的架台本體501上。 ' 於本實施形態，第1搬運單元11是以輥式輸送單元60 構成，但也可以是從玻璃基板W下側支撐著玻璃基板W 0 進行搬運的其他搬運單元，例如皮帶式輸送機等。 〈第2搬運裝置20〉 如第2圖所示，第2搬運裝置20是以同步受到控制，彼 此於X方向隔著間隔的複數第2搬運單元21構成，設置在 各架台本部501上。本實施形態的狀況，第2搬運單元21是 設置3個。以下，參照第2圖至第4圖詳細說明各第2搬運單 元21的構成。第4圖爲第2搬運單元21的透視圖。第2搬運 ❹ 單元21具備支撐單元30、昇降單元40及驅動單元50。 〈支撐單元30〉 支撐單元30是朝Υ方向延伸，其Υ方向的長度是比 玻璃基板W的Υ方向寬度還若干長。因此，由各第2搬運 單元21的支撐單元30讓玻璃基板W能夠穩定支撐。 支撐單元30，具備朝Υ方向延伸的支撐構件31。本 實施形態的狀況，支撐構件31是中空的角型鋼管。在支撐 構件31上，具備有隔著間隔在Υ方向設置成複數，透過 -8- 200933800 托座33支撐在支撐構件31的滾輪32。滾輪32是旋轉自如地 安裝在托座33，可繞著X方向的軸旋轉。在由第2搬運單 元21搬運玻璃基板W時，玻璃基板W是載置在滾輪32上 ，滾輪32是以抵接著玻璃基板W的下面從玻璃基板W下 側支撐著玻璃基板W。本實施形態是以透過托座3 3在支撐 構件31設有滾輪32時的狀況爲例子進行了說明，但並不限 於此，例如也可在支撐構件31設置前端具有轉動自如的軸 承的插銷構件。 支撐單元30，具備隔著間隔配置在Y方向的一對基 板保持單元34。本實施形態的狀況，基板保持單元34,是 以可將各滾輪32夾在中間的狀態分別配置在支撐件3 1的Y 方向兩端。基板保持單元34具備：可抵接著玻璃基板W 端緣的抵接構件35;可將抵接構件35朝Y方向往復移動 的移動單元36;及移動單元36覆蓋用的蓋構件37。 移動單元36，於本實施形態的狀況是氣壓缸筒，具備 本體部36a和活動部36b。透過對本體部36a的空氣供應及 轉換，可讓活動部3 6b在Y方向往復移動。 抵接構件35，於本實施形態的狀況是形成可繞著Z方 向的軸旋轉地支撐在活動部36b的輥，構成爲可在其周面 抵接著玻璃基板W的端緣。蓋構件3 7是可防止移動單元 3 6動作產生的灰塵，爲了避免干涉到抵接構件35的連結軸 及活動部36，在蓋構件37的上面設有窄縫371。 第5圖爲基板保持單元34的動作說明圖。第5圖上側的 形態，圖示著滾輪32上載置有玻璃基板W，基板保持單元 200933800 34的抵接構件34位於退讓位置的狀況。從該形態利用各移 動單元36的動作使各抵接構件35彼此朝接近方向移動位於 抵接位置時，如第5圖下側形態所示各抵接構件35會抵接 於玻璃基板W的Y方向的各端緣，保持著玻璃基板W。 此外，利用基板保持單元34對玻璃基板W的保持，還可 獲得玻璃基板W的Y方向定位。第2搬運裝置20搬運玻璃 基板W時的搬運期間，利用基板保持單元34就可定位及 保持著玻璃基板W。再加上，設置成複數列的第2搬運單 元21的一對基板保持單元34是可全列同時驅動（朝接近方 向移動），也可根據玻璃基板W的尺寸，適當選擇進行 驅動的列。 由基板保持單元34保持著玻璃基板W時，玻璃基板 W有時會稍微往Y方向移動，但因滾動3 2是可繞著X方 向的軸旋轉，所以玻璃基板W的移動能夠防止玻璃基板 W和滾輪32磨擦，能夠防止玻璃基板W損傷。 其次，如第2圖所示，支撐單元30是配置在第1搬運單 元1 1間的空隙。本實施形態的狀況，第1搬運單元1 1是如 以上所述設置成4列，因此第1搬運單元11間的空隙共有3 處。本實施形態是在全部的空隙都配置有支撐單元30’因 此，第2搬運單元21是設置3個。但是，並不需要對應全部 的空隙數量設置第2搬運單元21。例如：本實施形態的狀 況，也可對應X方向兩側的2處空隙設置2個第2搬運單元 21 ° -10- 200933800 〈昇降單元40〉 昇降單元40，於本實施形態的狀況是氣壓缸筒，如第 4圖所示，其具備本體部42和活動部41。透過對本體部42 的空氣供應及轉換，可讓活動部41在Z方向往復移動。昇 降單元40是配置在支撐單元3 0的下方，其活動部41是連結 在支撐單元30的支撐構件31的下面。 第2圖是圖示著昇降單元40昇降支撐單元30時的昇降 _ 動作。第2圖上側的形態是圖示著支撐單元30位於可使第1 〇 搬運單元11的輥61上載置的玻璃基板W和支撐單元30不 會干涉的降下位置時的狀況。當從該形態利用昇降單元40 的動作使支撐單元30上昇時，會讓第1搬運單元11的輥61 上載置的玻璃基板W載置在支撐單元3 0的滾輪32，以致 支撐單元3 0會形成位於將玻璃基板W從第1搬運單元11抬 起的上昇位置〈第2圖下側的形態〉。 然後，透過由上述的基板保持單元3 4保持著玻璃基板 φ W，可取代第1搬運單元11形成由第2搬運單元21搬運玻璃 基板W的狀態。 〈驅動單元50〉 ' 如第2圖及第3圖所示，驅動單元50是配置在比第1搬 運單元11還下方的位置，可驅動支撐單元30及昇降單元40 朝Y方移動。藉由在第1搬運單元11的下方空間配置驅動 單元5 0，能夠實現正交搬運裝置1全體的小型化。 驅動單元50具備支撐板51、滑動構件52及軌道構件53 -11 - 200933800 。支撐板51搭載有昇降單元40，藉此讓昇降單元40和支撐 單元30搭載在驅動單元50。另，支撐板51上也可搭載可對 昇降單元40的空氣供應進行轉換的控制閥。根據該構成時 ，由於能夠將控制閥配置成接近昇降單元40，因此能夠讓 昇降單元40的昇降動作更爲確實。 滑動構件52是固定安裝在支撐板51的下面，以指定間 隔設置複數個在Y方向。各滑動構件52是設置成可滑行 移動自如在軌道構件53上，支撐板51及滑動構件52是構成 爲可滑行移動在軌道構件5 3上的滑件。軌道構件5 3是延伸 設置在Y方向，如第3圖所示，是設置成從第1搬運單元 11的Y方向一方端部延伸至另一端部爲止的整個大致全 區。滑動構件（線性導塊）52的和軌道構件53成相向的面 ，內藏有軸承（或滾柱）。該等軸承是一邊循環在線性導 塊的內部，一邊轉動在軌道構件53的溝槽內（接觸面）（ 或者是該等滾柱是在線性導塊的內部一邊和軌道構件53的 接觸面接觸的同時一邊轉動）。基於此，滑動構件5 2能夠 在幾乎沒有承受摩擦阻力的狀態下滑行移動在軌道構件53 上。 軌道構件53的Y方向兩端部分別設有端部構件53a’ 於各端部構件53a固定著軸承54a。由軸承54a軸支撐著朝 X方向延伸的軸54，軌道構件53的Y方向兩端部分別設有 1個軸54。本實施形態的狀況，軸54是全部的第2搬運單元 21都是共同，設置在各端部的軸54是連結成爲1支。 各軸54周圍的軌道構件53的附近設有皮帶輪55，每個 -12- 200933800 軌道構件53設有一對皮帶輪55。隔著間隔在Y方向的該 一對皮帶輪55捲繞有皮帶56，皮帶56的兩端部是分別固定 在支撐板51的前後（參照第4圖）。 2個軸54的一方，設有驅動源58。驅動源58，具備馬 達58a和減速機58b，可對軸54進行旋轉驅動。如此一來 驅動源58所驅動的一方軸54的旋轉，可使固定在該一方軸 5 4的皮帶輪54旋轉，使皮帶56運轉。其結果，可讓支撐板 5 1及滑動構件53滑行移動在軌道構件53上，使支撐單元30 及昇降單元40能夠朝γ方向移動，並且，停止在任意位 置。 支撐單元30及昇降單元40的重量是由軌道構件53負擔 。因此，旋轉皮帶輪55使皮帶56運轉的驅動源58，只要可 產生往Y方向的移動力即可，因此採用較少功率的驅動 源就能夠滿足驅動。 對於驅動源58驅動造成的支撐單元30及昇降單元40的 Y方向移動位置，例如可利用反饋控制加以控制。於該狀 況時，根據馬達58a轉數檢測用的感測器或軌道構件53上 的滑動構件52位置檢測用的感測器等的檢測結果控制馬達 58a 〇 另，於本實施形態，馬達58a也可採用使用皮帶傳動 機構的其他機構，例如可採用使用滾珠螺桿機構或線性馬 達的機構。 此外，本實施形態對於各第2搬運單元21是採共同的 驅動源58。但是，也可針對每個第2搬運單元21設有驅動 -13- 200933800 源5 8，構成爲同步控制。尤其是當驅動源5 8爲共同時，能 夠實現成本的降低、控制的簡便化、構成的簡化 驅動單元50，具備一對蓋構件57。如第2圖所示，一 對蓋構件57是形成爲分別配置在軌道構件53的+ X側、-X側的C字型，形成在中空的空間S 1、S2。空間S 1內收 納著皮帶輪55及皮帶56，空間S2配置有未圖示的配線、 配管。接著，利用該等蓋構件57包圍著軌道構件53、支撐 0 板51、滑動構件52、皮帶輪55、皮帶56，藉此防止驅動單 元50驅動產生的灰麈。蓋構件57設有可吸引其內部空間 SI、S2內的空氣將空氣排至外部的複數吸引排氣手段57a (第3圖）。如此一來，就能夠確實防止灰塵產生。 〈輸送裝置2及3〉 參照第1圖，輸送裝置2及3，於本實施形態的狀況， 兩者都是以複數的輥式輸送單元60所構成。輸送裝置2是 H 配置在第1搬運裝置10的+ X方向側方，從搬運裝置4往正 交搬運裝置1搬運玻璃基板W。輸送裝置3是配置在第1搬 運裝置10的+ X側，從正交搬運裝置1往搬運裝置4搬運玻 璃基板W。 〈搬運裝置4〉 搬運裝置4是將輸送裝置3所搬運過來的玻璃基板W 往未圖示的處理裝置搬運，將處理裝置所搬運過來的玻璃 基板W往輸送裝置2搬運。搬運裝置4的構成，例如是可 -14- 200933800 和正交搬運裝置1相同的構成，也可以是能朝γ方向移動 的多關節式機器人等。 〈收納匣盒70〉 第6圖爲收納匣盒70的透視圖。收納匣盒70是設置在 輸送裝置5的上方，可使基板W以水平姿勢多段收納在Ζ 方向的匣盒。另，第6圖是圖示著未收納有玻璃基板W時 的狀態。本實施形態的狀況，收納盒70是由複數的柱構件 71和樑構件72形成大致長方體形狀的框架體。樑構件72的 配設間隔是設定成可讓輸送裝置5從收納匣盒70下方進入 收納匣盒70內，樑構件72形成有可讓輸送裝置5從下方進 入的開口。 柱構件7 1是複數配設在X方向的同時，隔著間隔同 數排列設置在Υ方向。在Υ方向隔著間隔的一對柱構件 7 1間，設有排列在Ζ方向並且隔著指定間距的鋼絲73。各 鋼絲73上下間的空間，形成爲玻璃基板W收納用的槽口 ，玻璃基板W是以水平姿勢一片一片地載置在鋼絲73上 。接著，由排列在Ζ方向的鋼絲73數量構成槽口數量。 本實施形態是利用鋼絲形成槽口，但理所當然也可採 用其他的方式。不過，使用鋼絲能夠縮小收納的基板間的 間隔，能夠提高收納匣盒70的收納效率。 〈輸送機裝置5〉 輸送機裝置5，本實施形態的狀況是由複數輥式輸送 -15- 200933800 單元60構成。輸送裝置5是針對每個收納匣盒7〇設置在收 納匣盒70下方。此外，輸送裝置5，如第1圖所示，配置在 第1搬運裝置10的- X方向的側方，在其與正交搬運裝置1 之間進行玻璃基板W的搬運，於此可執行玻璃基板W搬 入收納匣盒70及從收納匣盒70搬出玻璃基板W的搬運。 〈昇降裝置〉 當由一對昇降裝置80朝Z方向昇降收納匣盒70時， 就能夠讓收納匣盒70和輸送裝置5朝Z方向相對移動。但 也可取代該構成，構成由一對昇降裝置8朝Z方向昇降輸 送裝置5。另外，當一對昇降裝置80構成爲輸送裝置5昇降 用的構成時，也可構成爲第1搬運裝置10昇降用的構成。 本實施形態的狀況，各昇降裝置80是以收納匣盒70夾 在中間的狀態分別配設在收納匣盒70彼此相向的Y方向 兩側部，分別以懸臂支撐的方式支撐著收納匣盒70。根據 該構成時，能夠讓昇降裝置8 0更爲薄型化。 昇降裝置80具備有可載置收納匣盒70底部樑構件72的 橫桿構件8 1。各昇降裝置80的各橫桿構件8 1是以同步朝Z 方向移動昇降收納匣盒70。昇降裝置8 0具備驅動裝置（未 圖示），利用該驅動裝置昇降橫桿構件81藉此昇降收納匣 盒70。各昇降裝置80間，在其支柱上端架設有樑構件80a 第7圖爲從收納匣盒70搬出玻璃基板W時的昇降裝置 80昇降收納匣盒70的昇降動作圖。另，該圖中省略圖示昇 -16- 200933800 降裝置80。從收納匣盒70搬出玻璃基板W時，從收納有 玻璃基板W的槽口當中收納在最下方槽口的玻璃基板W 開始依順序搬出玻璃基板W。 首先，如第7圖左上圖所示，從收納匣盒70位於輸送 •裝置5上方的狀態，由昇降裝置80(第7圖中未圖示）降下 收納匣盒70，如第7圖右上圖所示，將搬運對象的玻璃基 板W載置在輸送裝置5上。此時，輸送裝置5是從下方進 入收納匣盒70內，讓搬運對象的玻璃基板W成爲從收納 〇 匣盒70的鋼絲73浮起的狀態，成爲只由輸送裝置5支撐著 的狀態。接著驅動輸送裝置5，如第7圖左下圖所示，從收 納匣盒70搬出搬運對象的玻璃基板W。以下，同樣地，重 覆收納匣盒70的降下及輸送裝置5的驅動（第7圖右下圖） ，從下方側依順序搬出玻璃基板W。 將玻璃基板W往收納匣盒70搬入時，採和上述搬出 時大致相反的動作。玻璃基板W的搬入是從未收納有玻 璃基板W的槽口當中最上方的槽口開始依順序進行搬入 ❹ 〈控制裝置〉 第8圖爲表示基板搬運裝置A的控制裝置200的構成 方塊圖。控制裝置（控制手段）200，具備：可執行基板 搬運裝置A全體控制的CPU201 ;可提供CPU201工作區 域的同時，可變數據等記憶用的RAM202 ;及控制程式、 控制數據等固定數據記憶用的ROM203。對於RAM202、 -17- 200933800 ROM2 03也可採用其他的記憶手段。 輸入界面（I/F) 204是屬於CPU201和各種感測器（ 例如感測器63等）的界面，CPU201是透過輸入I/F取得各 種感測器的檢測結果。輸出界面（I/F ) 205是屬於 CPU201和各種的馬達（例如馬達58a、驅動箱62內的馬達 等）及控制閥（基板保持單元34及昇降單元40用的控制閥 )的界面，CPU201是透過輸出（I/F) 205控制各種的馬達 、控制閥。 通訊界面（I/F) 206是屬於包括基板搬運裝置A的基 板處理設備全體控制用的主電腦300和CPU201的界面， CPU201是根據來自主電腦300的指令控制基板搬運裝置A 〈基板搬運裝置A的玻璃基板搬運例〉 接著，參照第9圖至第16圖，針對基板搬運裝置A的 玻璃基板搬運例進行說明。本實施形態，如第9圖所示， 針對在+ Y方向配置著收納有玻璃基板W的收納匣盒70 ，於—Y方向配置著空的收納匣盒70，從位於+ Y側的收 納匣盒70將未處理的玻璃基板W搬往處理裝置，從處理 裝置將處理完畢的玻璃基板W搬往位於- Y側的收納匣 盒70時的狀況進行說明。首先，參照第10圖至第12圖’說 明從位於+ Y側的收納匣盒70將未處理的玻璃基板W搬 往處理裝置時的狀況。 如第10圖所示，利用輸送裝置5及昇降裝置80的動作 -18- 200933800 從+ γ側的收納匣盒70朝χ方向搬運1片玻璃基板w°於 同時，正交搬運裝置1是利用第1搬運裝置10的第1搬運單 元1 1的動作，將從收納匣盒70搬運過來的玻璃基板W搬 運至+ X側，讓玻璃基板w位於正交搬運裝置1的X方向 大致中央的位置。此時，讓支撐單元3 0位於降下位置’並 且，位於搬運過來的玻璃基板W正下方的位置。基板保 持單元34的抵接構件35是位於退讓位置。 支撐單元3 0是否位於玻璃基板W正下方的位置’基 本上，是以支撐單元3 0位於事先所訂定的位置讓支撐單元 3 0成爲位於玻璃基板W的正下方。但是，也可在支撐單 元3 0設置玻璃基板W檢測用的感測器對玻璃基板W進行 檢測，藉此控制支撐單元30的位置。 其次，由昇降單元40將支撐單元30移動至上昇位置， 如此一來就能夠取代第1搬運裝置10將玻璃基板W由支撐 單元30支撐著。接著，利用基板保持單元34的動作讓抵接 構件35移動至抵接位置對玻璃基板W加以保持。 其次’如第11圖所示，利用驅動單元50的動作將支撐 單元30朝- Y方向移動，讓玻璃基板w移動至輸送裝置3 的- X側的位置。玻璃基板W的移動會讓正交搬運裝置1 空出+ Y側的收納匣盒70側方的區域。因此，就可開始從 + Y側的收納匣盒70搬出第2片玻璃基板W。 接著’讓基板保持單元35的抵接構件35位於退讓位置 ’將支撐單元30移動至降下位置。如此一來，就能夠讓第 1片玻璃基板W再度載置在第1搬運裝置1〇上。然後，如 -19- 200933800 第12圖所示，利用第1搬運裝置10及輸送裝置3將第1片玻 璃基板W朝+ X方向搬運，將第1片玻璃基板W交接至搬 運裝置4。搬運裝置4會將第1片玻璃基板W搬往處理裝置 同時，利用驅動單元50的動作將支撐單元30朝+ Y方 向移動，讓支撐單元30位於第2片玻璃基板W的正下方。 此時，即使是在第2片玻璃基板W由第1搬運裝置10從收 納匣盒70搬出的途中，還是能夠讓支撐單元30待機位於搬 運過來的玻璃基板W的正下方（第9圖的位置），因此能 夠提昇搬運效率。以下，藉由重覆同樣的步驟，就能夠從 位於+ Y側的收納匣盒70依順序將未處理的玻璃基板W 連續搬往處理裝置。由於能夠同時執行正交搬運裝置1的 玻璃基板W的X方向及Y方向的搬運，因此能夠提高玻 璃基板W搬運效率。 其次，參照第13圖至第16圖說明處理完畢的玻璃基板 W從處理裝置搬往位於- Y側的收納匣盒7〇的搬運狀況。 如第13圖所示，處理完畢的玻璃基板W是由搬運裝 置4從處理裝置搬往輸送裝置2，輸送裝置2會將玻璃基板 W搬運至正交搬運輸送機1上。同時’正交搬運裝置1是利 用第1搬運裝置10的第1搬運單元11的動作，將輸送裝置2 所搬運過來的玻璃基板W搬運至一 X側，讓玻璃基板W 位於正交搬運裝置1的X方向大致中央的位置（第14圖） 。此時’讓支撐單元30位於降下位置，並且，位於搬運過 來的玻璃基板W的正下方位置。基板保持單元34的抵接 -20- 200933800 構件34是位於退讓位置。 其次，利用昇降單元40將支撐單元30移動至上昇降， 藉此取代第1搬運裝置10由支撐單元30支撐著玻璃基板W 。接著’利用基板保持單元34的動作將抵接構件35移動至 抵接位置對玻璃基板W加以保持。 其次’第15圖是利用驅動單元50的動作將支撐單元30 朝一 Y方向移動，讓玻璃基板W移動至一 Y側收納匣盒70 的+ X側位置。玻璃基板W的移動，會讓正交搬運裝置1 空出輸送裝置2側方的區域。因此，就可開始搬運裝置4及 輸送裝置2的第2片玻璃基板W搬運。 接著，讓基板保持單元35的抵接構件35位於退讓位置 ’將支撐單元30移動至降下位置。如此一來，就能夠第1 片玻璃基板w再度載置在第1搬運裝置10上。然後，如第 16圖所示，利用第1搬運裝置10、輸送裝置5及昇降裝置80 的動作將第1片玻璃基板W搬入-Y側收納匣盒70。 同時，利用驅動單元50的動作將支撐單元30朝+ Y方 向移動，讓支撐單元3 0位於第2片玻璃基板W的正下方。 此時，即使是在第2片玻璃基板W由輸送裝置2搬往第1搬 運裝置10上的途中，還是能夠讓支撐單元3 0待機位於搬運 過來的玻璃基板W的正下方（第13圖的位置），因此能 夠提昇搬運效率。以下，藉由重覆同樣的步驟，就能夠從 處理裝置將處理完畢的玻璃基板W依順序連續搬往位於 + Y側的收納匣盒70。由於能夠同時執行正交搬運裝置1 的玻璃基板W的X方向及Y方向的搬運，因此能夠提高 -21 - 200933800 玻璃基板W搬運效率。 如上述，本實施形態，因能夠同時執行正交搬運裝置 1的玻璃基板W的X方向及Y方向的搬運，所以就能夠提 高玻璃基板W搬運效率。特別是，因愈是大型的玻璃基 板W，其搬入收納匣盒70及從收納匣盒70搬出時愈需要時 間，所以藉由如本實施形態的同時執行正交搬運裝置1的 玻璃基板W的X方向及Y方向的搬運，就能夠達到生產 間隔時間的縮短。 〇 接著，由於第2搬運裝置20配置在第1搬運裝置的下方 ，因此能夠實現裝置全體的小型化。此外，是由利用昇降 單元40昇降支撐單元30來昇降玻璃基板W，支撐單元30其 本身並不需具有玻璃基板W搬運用的驅動機構，只要具 有可從下側支撐玻璃基板W的功能即可，所以支撐單元 30能夠輕型化。因此，能夠實現玻璃基板W昇降高速化 ，能夠提昇玻璃基板W搬運效率。 0 再加上，由於支撐單元30能夠輕型化，因此就能夠以 更高的高速朝Y方向移動支撐單元30，能夠更加提昇玻 璃基板W搬運效率。此外，因是構成爲移動支撐單元30 ' ，所以玻璃基板W在Y方向的搬運距離是根據驅動單元 ' 50的Y方向全長的加以規定，因此可加長或縮短搬運距 離，能夠提昇裝置的平面配置自由度。 另外，由於能夠在正交搬運裝置1的+ X側、- X側 分別配置輸送裝置2、3及5，在該等置輸送裝置和正交搬 運裝置1之間進行玻璃基板W的交接，因此裝置的平面配 -22- 200933800 置自由度提昇。此外’第2搬運單元21是可停止在第1搬運 單元11的Y方向任意位置。再加上，第1搬運單元11是以 可獨立驅動的複數輥式輸送單元60構成。如此一來，在將 輸送裝置5配置、連接在正交搬運裝置1的X方向側方時 ，Y方向的連接位置選擇性增加。因此，能夠更加提昇裝 置的平面配置自由度。 另，本實施形態是將第1搬運單元11的各輥式輸送單 元60以大致等間距配設在Y方向，但並不限於此。輥式 輸送單元60是只要至少位於配置在正交搬運裝置1側方的 輸送裝置2、3及5側方的位置即可。 【圖式簡單說明】 第1圖爲表示本發明一實施形態相關的基板搬運裝置 A的平面配置圖。 第2圖爲第1圖剖線I-Ι的正交搬運裝置1構造剖面說 明圖。 第3圖爲第1圖剖線II-II的正交搬運裝置1構造剖面說 明圖。 第4圖爲第2搬運單元21的透視圖。 第5圖爲基板保持單元34的動作說明圖。 第6圖爲收納匣盒70的透視圖。 第7圖爲從收納匣盒70搬出玻璃基板W時的動作說明 圖。 第8圖爲基板搬運裝置A的控制裝置20 0方塊圖。 -23- 200933800 第9圖爲基板搬運裝置A的動作說明圖。 第10圖爲基板搬運裝置A的動作說明圖。 第11圖爲基板搬運裝置A的動作說明圖。 第12圖爲基板搬運裝置A的動作說明圖。 第13圖爲基板搬運裝置A的動作說明圖。 第14圖爲基板搬運裝置A的動作說明圖。 第15圖爲基板搬運裝置A的動作說明圖。 第16圖爲基板搬運裝置A的動作說明圖。 【主要元件符號說明】 1 :正交搬運裝置 2 :輸送裝置 3 :輸送裝置 4 :搬運裝置 5 :輸送裝置 10 :第1搬運裝置 1 1 :第1搬運單元 20 :第2搬運裝置 21 :第2搬運單元 3 0 :支撐單元 3 1 :支撐構件 32 :滾輪 3 3 :托座 34 :基板保持單元 -24- 200933800 3 5 :抵接構件 36 :移動單元 3 6 a _本體部 36b :活動部 3 7 :蓋構件 371 :槽口 40 :昇降單元200933800 IX. Description of the Invention Technical Field of the Invention The present invention relates to an apparatus for transporting substrates. [Prior Art] In an FPD (flat panel display) manufacturing line such as a liquid crystal display or a plasma display, it is necessary to transport a substrate between a cassette for receiving a substrate and a processing package or between the processing devices. In the apparatus for transporting a substrate, it is disclosed in Japanese Laid-Open Patent Publication No. 2005-64432 that the apparatus includes a mounting table on which a substrate carried out from the cassette is placed, and a substrate that can be carried out from the mounting table. A substrate transfer device of the processing device. However, in this apparatus, since the substrate cannot be carried out from the mounting table to the substrate transfer device during the substrate transfer of the substrate transfer device, the substrate transfer efficiency is low. In Japanese Laid-Open Patent Publication No. 2004-292094, the apparatus disclosed is a backup roller conveyor, and the substrate on the roller conveyor can be carried into a cassette, and the substrate can be carried out from the cassette to the roller conveyor. Transfer device on the machine. This apparatus' can carry out the substrate from the cassette on the roller conveyor even by the transfer device during the substrate conveyance of the roller conveyor. However, since a part of the transfer device needs to be located on the side of the roller conveyor, in order to secure the installation space of the transfer device, the entire device is enlarged. In the eleventh and twelfth drawings of Japanese Laid-Open Patent Publication No. 2004-284772, there is disclosed a device in which two sets of roller conveyors having orthogonal conveyance directions are arranged to overlap one another. In the same manner, even if -4-200933800 is in the substrate conveyance of one of the roller conveyors, the substrate can be carried out from the cassette on the one roller conveyor, and the other roller conveyor can be used. Lifting and lowering allows the substrate to be carried by the other roller conveyor. In addition, since the two sets of roller conveyors having orthogonal conveyance directions are arranged to be vertically stacked, the entire apparatus can be miniaturized. However, the roller conveyor needs to have a drive device with a roller, so the roller conveyor is not easily lightened. Therefore, the lifting and lowering of the roller conveyor is time consuming, and sometimes the substrate handling efficiency is lowered. [Problem to be Solved by the Invention] An object of the present invention is to provide a substrate transfer device capable of improving the efficiency of substrate transfer while miniaturizing the entire device. According to the present invention, the substrate transporting apparatus provided includes: a first transporting means capable of supporting the substrate from the lower side thereof and transporting the horizontal φ in the first transporting direction; and the first transporting means The second conveyance means that supports the substrate from the lower side and is horizontally conveyed in the second conveyance direction orthogonal to the first conveyance direction, the first conveyance means are spaced apart from each other in the first conveyance direction The first transport unit is configured by the first transport unit, and the second transport unit is configured by a plurality of second transport units that are spaced apart from each other in the second transport direction, and each of the second transport units is disposed a gap between the first transport unit and a support unit for supporting the substrate from the lower side thereof; disposed under the support unit and connected to the support unit, the support unit can be lifted and lowered at the support unit The support unit does not interfere with the support unit by raising the substrate on the first transport unit from the first transport unit a lifting unit between the lowering position of the substrate on the first conveying unit; and a position lower than the first conveying unit, wherein the supporting unit and the lifting unit are movable in the second conveying direction Drive unit. According to the above configuration, the second conveying means is disposed below the first conveying means, so that the entire apparatus can be downsized. Further, the above-described substrate is raised and lowered by the above-described lifting unit to perform the raising and lowering of the above-described supporting unit. The support unit may have a function of supporting the substrate from the lower side, and does not require the drive mechanism for moving the substrate. Therefore, the support unit can be made lighter. Therefore, it is possible to increase the speed of the substrate as described above, and it is possible to improve the substrate transfer efficiency. [Embodiment] Q [Best Embodiment of the Invention] FIG. 1 is a plan view showing a substrate transfer device A according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view of the first figure I-Ι FIG. 3 is a cross-sectional explanatory view showing the structure of the orthogonal conveying device 1 of the first embodiment. In each of the figures, the arrow symbols X and Y are horizontal directions orthogonal to each other. When the forward and reverse directions of the X and γ directions are specifically described, the arrow symbols + X and + Y are positive directions, and the arrow symbols X and Y are opposite directions. The arrow symbol Z indicates the up and down direction (vertical direction). Differentiate up and down -6- 200933800 For the description, the upper direction is called + z' and the lower direction is called a z. The substrate transfer device A' includes a cross conveyance device 1 and transfer devices 2, 3, a transfer device 4, a plurality of transfer devices 5, and a plurality of lift devices 80. The substrate transporting device A is a storage cassette for storing the rectangular thin glass substrate W. The glass substrate W is transported to a processing device (not shown), and the glass substrate W is transferred from the processing device to the storage cassette 70. The processing apparatus performs cleaning, drying, and other processing of the glass substrate W.正交 <Orthogonal conveying device 1> The orthogonal conveying device 1 includes a first conveying device 10 that can horizontally convey the glass substrate W in the X direction, and can horizontally convey the glass substrate w on the first conveying device 10 in the Y direction. The second transport device 20 and the first transport device 1 and the gantry 500 for supporting the second transport device 20 are supported. The gantry 500 is constituted by a leg portion 502 for supporting the gantry main body portion 501 and the gantry main body portion 501.第 <First transport device 10> The first transport device 10 is constituted by a plurality of first transport units 11 that are spaced apart from each other in the X direction. In the case of this embodiment, the first transport unit 11 is provided in four rows. The first transport unit 11 is further constituted by a plurality of roller transport units 60 arranged in the Y direction. As shown in FIGS. 1 to 3, each of the roller transport units 60 includes a plurality of rollers 61 on which the glass substrate W can be placed, a drive case 62 in which the roller 61 is driven, and a glass substrate W. A sensor 63 such as a photo sensor that detects the detection is coming (see Fig. 3). The roller 61 is a driven roller that is rotatably rotatable about the γ-direction rotating shaft in the direction of 200933800, and is configured to carry the glass substrate W in both the + Χ direction and the -X direction from the lower side of the glass substrate W. Each of the roller transport units 60 is independently driveable. Further, each of the roller transport units 60 is supported by the leg portion 601 upright on the gantry body 501 of the above-described gantry 500. In the present embodiment, the first transport unit 11 is constituted by the roller transport unit 60, but may be another transport unit that supports the glass substrate W0 from the lower side of the glass substrate W and is transported, for example, a belt conveyor. <Second conveying device 20> As shown in Fig. 2, the second conveying device 20 is controlled by synchronization, and is constituted by a plurality of second conveying units 21 spaced apart from each other in the X direction, and is provided on each of the gantry main portions 501. In the case of this embodiment, three second transport units 21 are provided. Hereinafter, the configuration of each of the second transport units 21 will be described in detail with reference to Figs. 2 to 4 . Fig. 4 is a perspective view of the second transport unit 21. The second transport unit 21 includes a support unit 30, a lift unit 40, and a drive unit 50. <Support Unit 30> The support unit 30 extends in the Υ direction, and its length in the Υ direction is somewhat longer than the width of the glass substrate W in the Υ direction. Therefore, the glass substrate W can be stably supported by the support unit 30 of each of the second transport units 21. The support unit 30 has a support member 31 that extends in the Υ direction. In the case of this embodiment, the support member 31 is a hollow angular steel pipe. The support member 31 is provided with a roller 32 which is provided in a plurality in the Υ direction with a gap therebetween, and is supported by the support member 31 through the -8-200933800 bracket 33. The roller 32 is rotatably attached to the bracket 33 so as to be rotatable about an axis in the X direction. When the glass substrate W is transported by the second transport unit 21, the glass substrate W is placed on the roller 32, and the roller 32 supports the glass substrate W from the lower side of the glass substrate W against the lower surface of the glass substrate W. In the present embodiment, the case where the roller 32 is provided on the support member 31 through the bracket 33 has been described as an example. However, the present invention is not limited thereto. For example, the support member 31 may be provided with a pin member having a rotatable bearing at the tip end. . The support unit 30 includes a pair of substrate holding units 34 arranged in the Y direction with a space therebetween. In the state of the present embodiment, the substrate holding unit 34 is disposed at both ends of the support member 31 in the Y direction in a state in which the respective rollers 32 are sandwiched. The substrate holding unit 34 includes an abutting member 35 that can abut against the end edge of the glass substrate W, a moving unit 36 that can reciprocate the abutting member 35 in the Y direction, and a cover member 37 that covers the moving unit 36. The moving unit 36 is a pneumatic cylinder in the present embodiment, and includes a main body portion 36a and a movable portion 36b. The movable portion 36b reciprocates in the Y direction by supplying and converting air to the main body portion 36a. In the case of the present embodiment, the contact member 35 is formed by a roller that is rotatably supported by the movable portion 36b around the axis of the Z direction, and is configured to be able to abut against the edge of the glass substrate W on the circumferential surface thereof. The cover member 37 is dust that prevents the movement of the moving unit 36, and a slit 371 is provided on the upper surface of the cover member 37 in order to avoid interference with the connecting shaft and the movable portion 36 of the abutting member 35. FIG. 5 is an operation explanatory view of the substrate holding unit 34. The upper side of Fig. 5 shows a state in which the glass substrate W is placed on the roller 32, and the contact member 34 of the substrate holding unit 200933800 34 is placed at the retracted position. When the respective abutting members 35 are moved in the approaching direction to the abutting position by the operation of each of the moving units 36, the abutting members 35 abut against the glass substrate W as shown in the lower side of Fig. 5 . The glass substrate W is held at each end of the direction. Further, the holding of the glass substrate W by the substrate holding unit 34 can also obtain the positioning of the glass substrate W in the Y direction. The substrate holding unit 34 can position and hold the glass substrate W during the conveyance period when the second transfer device 20 transports the glass substrate W. Further, the pair of substrate holding units 34 of the second transport unit 21 provided in the plurality of rows are simultaneously driven in all directions (moving in the approaching direction), and the rows to be driven may be appropriately selected depending on the size of the glass substrate W. When the glass substrate W is held by the substrate holding unit 34, the glass substrate W may slightly move in the Y direction. However, since the rolling 3 2 is rotatable about the axis in the X direction, the movement of the glass substrate W can prevent the glass substrate W from being moved. Friction with the roller 32 prevents damage to the glass substrate W. Next, as shown in Fig. 2, the support unit 30 is a space disposed between the first transport units 11 . In the case of the present embodiment, since the first transport unit 1 1 is provided in four rows as described above, there are three gaps between the first transport units 11 . In the present embodiment, the support unit 30' is disposed in all the gaps, and therefore, the second transport unit 21 is provided in three. However, it is not necessary to provide the second transport unit 21 for all the number of gaps. For example, in the case of the present embodiment, two second transport units 21 ° -10- 200933800 (elevating unit 40) elevating unit 40 may be provided corresponding to two gaps on both sides in the X direction, and the pneumatic cylinder is in the present embodiment. As shown in FIG. 4, the cylinder includes a main body portion 42 and a movable portion 41. The movable portion 41 can be reciprocated in the Z direction by air supply and conversion to the main body portion 42. The lift unit 40 is disposed below the support unit 30, and the movable portion 41 is coupled to the lower surface of the support member 31 of the support unit 30. Fig. 2 is a view showing the lifting/lowering operation when the lifting unit 40 lifts and lowers the support unit 30. The upper side of Fig. 2 shows a state in which the support unit 30 is located at a lowered position where the glass substrate W on which the roller 61 of the first transport unit 11 can be placed and the support unit 30 do not interfere. When the support unit 30 is raised by the operation of the elevating unit 40 in this manner, the glass substrate W placed on the roller 61 of the first transport unit 11 is placed on the roller 32 of the support unit 30 so that the support unit 30 will The rising position (the lower side of the second drawing) which lifts the glass substrate W from the 1st conveyance unit 11 is formed. Then, the glass substrate φ W is held by the substrate holding unit 34, and the glass substrate W can be transported by the second transport unit 21 instead of the first transport unit 11. <Drive unit 50> ' As shown in Figs. 2 and 3, the drive unit 50 is disposed below the first transport unit 11, and the drive unit 30 and the lift unit 40 are driven to move toward the Y side. By arranging the drive unit 50 in the space below the first transport unit 11, it is possible to reduce the size of the entire orthogonal transport device 1. The drive unit 50 is provided with a support plate 51, a slide member 52, and rail members 53 -11 - 200933800. The support plate 51 is equipped with a lifting unit 40, whereby the lifting unit 40 and the supporting unit 30 are mounted on the driving unit 50. Further, a control valve for switching the air supply of the elevating unit 40 may be mounted on the support plate 51. According to this configuration, since the control valve can be disposed close to the elevation unit 40, the lifting operation of the elevation unit 40 can be made more reliable. The sliding member 52 is fixedly mounted under the support plate 51, and a plurality of positions are set in the Y direction at a predetermined interval. Each of the sliding members 52 is slidably movable on the rail member 53, and the supporting plate 51 and the sliding member 52 are configured as slides that are slidably movable on the rail member 53. The rail member 53 is extended in the Y direction, and as shown in Fig. 3, is provided so as to extend from the one end portion of the first transport unit 11 in the Y direction to the other end portion. A face of the sliding member (linear guide block) 52 facing the rail member 53 has a bearing (or a roller) built therein. The bearings are circulated inside the linear guide block while rotating in the groove (contact surface) of the rail member 53 (or the rollers are in contact with the contact surface of the rail member 53 on the inner side of the linear guide block). While turning sideways). Based on this, the sliding member 52 can slide down on the rail member 53 in a state where it hardly receives frictional resistance. End members 53a' are respectively provided at both end portions of the rail member 53 in the Y direction, and bearings 54a are fixed to the respective end members 53a. A shaft 54 extending in the X direction is supported by the bearing 54a, and one shaft 54 is provided at each end portion of the rail member 53 in the Y direction. In the case of the present embodiment, all of the shafts 54 are common to all of the second transporting units 21, and the shafts 54 provided at the respective end portions are connected to each other. A pulley 55 is provided in the vicinity of the rail member 53 around each of the shafts 54, and each of the -12-200933800 rail members 53 is provided with a pair of pulleys 55. The belt 56 is wound around the pair of pulleys 55 in the Y direction with a gap therebetween, and both end portions of the belt 56 are fixed to the front and rear of the support plate 51 (see Fig. 4). One of the two shafts 54 is provided with a drive source 58. The drive source 58 is provided with a motor 58a and a speed reducer 58b for rotationally driving the shaft 54. As a result, the rotation of the one shaft 54 driven by the drive source 58 can rotate the pulley 54 fixed to the one shaft 54 to operate the belt 56. As a result, the support plate 51 and the sliding member 53 can be slidably moved on the rail member 53, so that the support unit 30 and the elevating unit 40 can be moved in the γ direction and stopped at an arbitrary position. The weight of the support unit 30 and the lifting unit 40 is borne by the rail member 53. Therefore, the drive source 58 that rotates the pulley 55 to operate the belt 56 can generate a moving force in the Y direction, so that the drive can be satisfied with a drive source of less power. The Y-direction moving position of the support unit 30 and the lifting unit 40 caused by the driving of the driving source 58 can be controlled by, for example, feedback control. In this case, the motor 58a is controlled based on the detection result of the sensor for detecting the number of revolutions of the motor 58a or the sensor member for detecting the position of the slide member 52 on the rail member 53. In the present embodiment, the motor 58a is also used in the present embodiment. Other mechanisms using a belt drive mechanism may be employed, for example, a mechanism using a ball screw mechanism or a linear motor may be employed. Further, in the present embodiment, a common drive source 58 is used for each of the second transport units 21. However, it is also possible to provide a drive-13-200933800 source 5 8 for each of the second transport units 21 to be synchronized. In particular, when the drive sources 58 are common, the simplified drive unit 50 having a reduced cost and a simplified control can be provided with a pair of cover members 57. As shown in Fig. 2, the pair of cover members 57 are formed in a C shape which is disposed on the +X side and the -X side of the rail member 53, respectively, and are formed in the hollow spaces S1 and S2. The pulley 55 and the belt 56 are housed in the space S1, and wirings and pipes (not shown) are disposed in the space S2. Then, the rail member 53, the support 0 plate 51, the slide member 52, the pulley 55, and the belt 56 are surrounded by the cover members 57, whereby the ash generated by the driving unit 50 is prevented from being driven. The cover member 57 is provided with a plurality of suction and exhaust means 57a (Fig. 3) for sucking the air in the internal spaces SI and S2 to discharge the air to the outside. In this way, it is possible to surely prevent the generation of dust. <Conveying Apparatus 2 and 3> Referring to Fig. 1, the conveying apparatuses 2 and 3 are both constituted by a plurality of roller conveying units 60 in the state of the present embodiment. The transport device 2 is disposed on the side of the first transport device 10 in the +X direction, and transports the glass substrate W from the transport device 4 to the orthogonal transport device 1. The transport device 3 is disposed on the + X side of the first transport device 10, and transports the glass substrate W from the orthogonal transport device 1 to the transport device 4. <Transporting device 4> The conveying device 4 conveys the glass substrate W conveyed by the conveying device 3 to a processing device (not shown), and conveys the glass substrate W conveyed by the processing device to the conveying device 2. The configuration of the conveying device 4 is, for example, the same configuration as that of the orthogonal conveying device 1 and may be a multi-joint robot that can move in the γ direction. <Storage cassette 70> Fig. 6 is a perspective view of the storage cassette 70. The storage cassette 70 is a cassette that is disposed above the transport device 5 and that can accommodate the substrate W in a plurality of stages in the horizontal direction. In addition, Fig. 6 is a view showing a state in which the glass substrate W is not housed. In the case of the present embodiment, the storage case 70 is a frame body having a substantially rectangular parallelepiped shape formed by a plurality of column members 71 and beam members 72. The arrangement of the beam members 72 is set such that the conveying device 5 can enter the storage cassette 70 from below the storage cassette 70, and the beam member 72 is formed with an opening for allowing the conveying device 5 to enter from below. The column member 71 is disposed in the X direction while being arranged in the X direction, and is arranged in the x direction with the same interval. Between the pair of column members 71 spaced apart in the weir direction, a wire 73 arranged in the weir direction and separated by a predetermined pitch is provided. The space between the upper and lower sides of each of the steel wires 73 is formed as a notch for accommodating the glass substrate W, and the glass substrate W is placed on the wire 73 one by one in a horizontal posture. Next, the number of the slits is constituted by the number of the wires 73 arranged in the Ζ direction. In the present embodiment, the slit is formed by a steel wire, but it is a matter of course that other methods can be employed. However, the use of the steel wire can reduce the interval between the substrates to be housed, and the storage efficiency of the storage cassette 70 can be improved. <Conveyor device 5> The conveyor device 5 is constituted by a plurality of roller conveyors -15-200933800 units 60 in the present embodiment. The conveying device 5 is provided below each of the storage cassettes 70 for each of the storage cassettes 7. Further, as shown in Fig. 1, the transport device 5 is disposed on the side in the -X direction of the first transport device 10, and transports the glass substrate W between the transport device 5 and the orthogonal transport device 1. The substrate W is carried into the storage cassette 70 and conveyed from the storage cassette 70. <Elevating Device> When the cassette 70 is lifted and lowered in the Z direction by the pair of lifting devices 80, the storage cassette 70 and the conveying device 5 can be relatively moved in the Z direction. However, instead of this configuration, the pair of lifting devices 8 may be configured to elevate and lower the conveying device 5 in the Z direction. Further, when the pair of lifting devices 80 are configured to elevate and lower the conveying device 5, the first conveying device 10 may be configured to be used for lifting and lowering. In the state of the present embodiment, each of the lifting and lowering devices 80 is disposed on both sides in the Y direction in which the storage cassettes 70 face each other in a state in which the storage cassettes 70 are interposed therebetween, and each of the lifting and lowering devices 80 supports the storage cassette 70 by cantilever support. . According to this configuration, the lifting device 80 can be made thinner. The lifting device 80 is provided with a crossbar member 81 that can accommodate the bottom beam member 72 of the storage cassette 70. Each of the crossbar members 81 of each of the lifting and lowering devices 80 moves the lifting and receiving cassette 70 in the Z direction in synchronization. The lifting device 80 includes a driving device (not shown), and the driving device elevates and lowers the cross member 81 to lift and store the cassette 70. A beam member 80a is placed between the lifting and lowering devices 80 at the upper end of the pillar. Fig. 7 is a lifting and lowering operation diagram of the lifting device 80 for lifting and lowering the storage box 70 when the glass substrate W is carried out from the storage cassette 70. In addition, the liter-16-200933800 down device 80 is omitted in the figure. When the glass substrate W is carried out from the storage cassette 70, the glass substrate W is sequentially carried out from the glass substrate W accommodated in the lowest notch among the notches in which the glass substrate W is accommodated. First, as shown in the upper left diagram of Fig. 7, the storage cassette 70 is lowered by the lifting device 80 (not shown in Fig. 7) from the state in which the storage cassette 70 is positioned above the transporting device 5, as shown in the upper right diagram of Fig. 7. As shown in the figure, the glass substrate W to be transported is placed on the transport device 5. At this time, the transport device 5 is placed in the storage cassette 70 from below, and the glass substrate W to be transported is in a state of being floated from the wire 73 that houses the cassette 70, and is supported only by the transport device 5. Next, the conveying device 5 is driven, and as shown in the lower left diagram of Fig. 7, the glass substrate W to be conveyed is carried out from the receiving cassette 70. In the same manner, in the same manner, the lowering of the cassette 70 and the driving of the transporting device 5 (Fig. 7 and the lower right drawing) are carried out, and the glass substrate W is sequentially carried out from the lower side. When the glass substrate W is carried into the storage cassette 70, an operation substantially opposite to that at the time of carrying out is taken. The loading of the glass substrate W is carried out in order from the uppermost slot of the notch in which the glass substrate W is accommodated. <Control device> Fig. 8 is a block diagram showing the configuration of the control device 200 of the substrate transfer device A. The control device (control means) 200 includes a CPU 201 that can perform overall control of the substrate transfer device A, a memory RAM 202 for variable data and the like while providing a working area of the CPU 201, and a fixed data memory such as a control program and control data. ROM 203. Other memory means can also be used for RAM202, -17-200933800 ROM2 03. The input interface (I/F) 204 is an interface belonging to the CPU 201 and various sensors (e.g., the sensor 63, etc.), and the CPU 201 obtains the detection results of various sensors through the input I/F. The output interface (I/F) 205 is an interface belonging to the CPU 201 and various motors (for example, the motor 58a, the motor in the drive box 62, and the control valve (the control valve for the substrate holding unit 34 and the lifting unit 40), and the CPU 201 is Various motors and control valves are controlled through an output (I/F) 205. The communication interface (I/F) 206 is an interface between the host computer 300 and the CPU 201 for controlling the entire substrate processing apparatus including the substrate transfer device A. The CPU 201 controls the substrate transfer device A based on the command from the host computer 300. Example of glass substrate conveyance Next, an example of glass substrate conveyance of the substrate transfer apparatus A will be described with reference to FIGS. 9 to 16 . In the present embodiment, as shown in FIG. 9, the storage cassette 70 in which the glass substrate W is housed in the +Y direction is disposed, and the empty storage cassette 70 is disposed in the -Y direction, and is housed on the +Y side. The case 70 in which the unprocessed glass substrate W is carried to the processing apparatus, and the processing apparatus moves the processed glass substrate W to the storage cassette 70 located on the -Y side will be described. First, the state in which the unprocessed glass substrate W is transported from the storage cassette 70 located on the +Y side to the processing apparatus will be described with reference to Figs. 10 to 12'. As shown in Fig. 10, one glass substrate w is transported from the storage cassette 70 on the + γ side in the -18 direction by the operation -18-200933800 of the transport device 5 and the lifting device 80, and the orthogonal transport device 1 is utilized. In the operation of the first transport unit 1 1 of the first transport device 10, the glass substrate W transported from the storage cassette 70 is transported to the +X side, and the glass substrate w is positioned substantially at the center in the X direction of the orthogonal transport device 1. . At this time, the support unit 30 is placed at the lowered position' and located at a position directly below the conveyed glass substrate W. The abutment member 35 of the substrate holding unit 34 is located at the retracted position. Whether or not the support unit 30 is located directly below the glass substrate W is basically such that the support unit 30 is positioned at a predetermined position so that the support unit 30 is positioned directly below the glass substrate W. However, the glass substrate W may be detected by the sensor for detecting the glass substrate W in the support unit 30, thereby controlling the position of the support unit 30. Next, the support unit 30 is moved to the raised position by the elevating unit 40, so that the glass substrate W can be supported by the support unit 30 instead of the first transport device 10. Then, the glass substrate W is held by the movement of the substrate holding unit 34 by moving the contact member 35 to the abutting position. Next, as shown in Fig. 11, the support unit 30 is moved in the -Y direction by the operation of the drive unit 50, and the glass substrate w is moved to the position on the -X side of the transport device 3. The movement of the glass substrate W causes the orthogonal conveyance device 1 to vacate the area on the side of the storage cassette 70 on the Y side. Therefore, the second glass substrate W can be carried out from the storage cassette 70 on the +Y side. Then, the abutting member 35 of the substrate holding unit 35 is placed at the retracted position to move the support unit 30 to the lowered position. In this way, the first glass substrate W can be placed on the first transport device 1 again. Then, as shown in Fig. 12 of -19-200933800, the first sheet glass substrate W is conveyed in the +X direction by the first conveying device 10 and the conveying device 3, and the first sheet glass substrate W is transferred to the conveying device 4. The transport device 4 transports the first glass substrate W to the processing device, and simultaneously moves the support unit 30 in the +Y direction by the operation of the drive unit 50, and the support unit 30 is positioned directly below the second glass substrate W. In this case, even when the second sheet glass substrate W is carried out from the storage cassette 70 by the first conveyance device 10, the support unit 30 can be placed in the immediately below position of the conveyed glass substrate W (the position of FIG. 9). ), so it can improve handling efficiency. Hereinafter, by repeating the same procedure, the unprocessed glass substrate W can be continuously transferred from the storage cassette 70 on the +Y side to the processing apparatus in this order. Since the conveyance of the glass substrate W of the orthogonal conveying device 1 in the X direction and the Y direction can be performed at the same time, the transportation efficiency of the glass substrate W can be improved. Next, the conveyance state of the processed glass substrate W from the processing apparatus to the storage cassette 7 on the -Y side will be described with reference to Figs. 13 to 16 . As shown in Fig. 13, the processed glass substrate W is transported from the processing apparatus to the transport apparatus 2 by the transporting apparatus 4, and the transport apparatus 2 transports the glass substrate W to the orthogonal transport conveyor 1. At the same time, the orthogonal transport device 1 is operated by the first transport unit 11 of the first transport device 10, and transports the glass substrate W transported by the transport device 2 to the X side, and the glass substrate W is placed in the orthogonal transport device 1 The approximate central position of the X direction (Fig. 14). At this time, the support unit 30 is placed at the lowered position, and is located directly below the conveyed glass substrate W. Abutment of the substrate holding unit 34 -20- 200933800 The member 34 is located at the retracted position. Next, the support unit 30 is moved up and down by the lifting unit 40, whereby the glass substrate W is supported by the support unit 30 instead of the first conveying device 10. Then, the glass substrate W is held by the movement of the substrate holding unit 34 by moving the abutting member 35 to the abutting position. Next, Fig. 15 is a view in which the support unit 30 is moved in the Y direction by the action of the driving unit 50, and the glass substrate W is moved to the +X side position of the Y side storage cassette 70. The movement of the glass substrate W causes the orthogonal conveying device 1 to vacate the area on the side of the conveying device 2. Therefore, the transport of the second glass substrate W of the transport device 4 and the transport device 2 can be started. Next, the abutting member 35 of the substrate holding unit 35 is placed at the retracted position to move the support unit 30 to the lowered position. In this way, the first glass substrate w can be placed on the first conveying device 10 again. Then, as shown in Fig. 16, the first sheet glass substrate W is carried into the -Y side storage cassette 70 by the operation of the first conveying device 10, the conveying device 5, and the lifting device 80. At the same time, the support unit 30 is moved in the +Y direction by the action of the drive unit 50, and the support unit 30 is positioned directly below the second glass substrate W. In this case, even when the second glass substrate W is transported to the first transport device 10 by the transport device 2, the support unit 30 can be placed in the immediate vicinity of the transported glass substrate W (Fig. 13). Position), thus improving handling efficiency. Hereinafter, by repeating the same procedure, the processed glass substrate W can be continuously transferred from the processing apparatus to the storage cassette 70 located on the +Y side. Since the conveyance of the glass substrate W of the orthogonal conveyance device 1 in the X direction and the Y direction can be performed at the same time, the transportation efficiency of the -21 - 200933800 glass substrate W can be improved. As described above, in the present embodiment, since the conveyance in the X direction and the Y direction of the glass substrate W of the orthogonal conveying device 1 can be simultaneously performed, the transportation efficiency of the glass substrate W can be improved. In particular, since it takes a long time for the glass substrate W to be carried into the storage cassette 70 and carried out from the storage cassette 70, the glass substrate W of the orthogonal conveying device 1 is simultaneously executed as in the present embodiment. The transportation in the X direction and the Y direction can shorten the production interval. 〇 Next, since the second conveyance device 20 is disposed below the first conveyance device, it is possible to reduce the size of the entire device. Further, the glass substrate W is lifted and lowered by the elevating unit 40 lifting and lowering support unit 30, and the supporting unit 30 does not need to have a driving mechanism for transporting the glass substrate W itself, as long as it has a function of supporting the glass substrate W from the lower side. Therefore, the support unit 30 can be made lighter. Therefore, it is possible to increase the speed of the glass substrate W, and it is possible to improve the transportation efficiency of the glass substrate W. Further, since the support unit 30 can be made lighter, the support unit 30 can be moved in the Y direction at a higher speed, and the efficiency of transporting the glass substrate W can be further improved. Further, since the transport support unit 30' is configured as the mobile support unit 30', the transport distance of the glass substrate W in the Y direction is defined in accordance with the total length of the drive unit '50 in the Y direction. Therefore, the transport distance can be lengthened or shortened, and the plane arrangement of the apparatus can be improved. Degree of freedom. Further, since the transport devices 2, 3, and 5 can be disposed on the +X side and the -X side of the orthogonal transport device 1, the glass substrate W can be transferred between the transport device and the orthogonal transport device 1 The plane of the device is equipped with -22-200933800. Further, the second transport unit 21 can be stopped at an arbitrary position in the Y direction of the first transport unit 11. Further, the first transport unit 11 is constituted by a plurality of roller transport units 60 that can be independently driven. As a result, when the transport device 5 is disposed and connected to the side of the orthogonal transport device 1 in the X direction, the connection position in the Y direction is selectively increased. Therefore, the plane configuration freedom of the device can be further improved. In the present embodiment, each of the roller transport units 60 of the first transport unit 11 is disposed at substantially equal intervals in the Y direction, but the present invention is not limited thereto. The roller transport unit 60 may be located at least at the side of the transport devices 2, 3, and 5 disposed on the side of the orthogonal transport device 1. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a substrate transfer device A according to an embodiment of the present invention. Fig. 2 is a cross-sectional view showing the structure of the orthogonal conveying device 1 taken along the line I-Ι in Fig. 1. Fig. 3 is a cross-sectional view showing the structure of the orthogonal conveying device 1 taken along the line II-II of Fig. 1. Fig. 4 is a perspective view of the second transport unit 21. FIG. 5 is an operation explanatory view of the substrate holding unit 34. Fig. 6 is a perspective view of the storage cassette 70. Fig. 7 is an explanatory view of the operation when the glass substrate W is carried out from the storage cassette 70. Fig. 8 is a block diagram of a control device 20 of the substrate transfer device A. -23- 200933800 Fig. 9 is an operation explanatory diagram of the substrate transfer device A. Fig. 10 is an operation explanatory view of the substrate transfer device A. Fig. 11 is an operation explanatory view of the substrate transfer device A. Fig. 12 is an explanatory view of the operation of the substrate transfer device A. Fig. 13 is an operation explanatory view of the substrate transfer device A. Fig. 14 is an operation explanatory view of the substrate transfer device A. Fig. 15 is an explanatory view of the operation of the substrate transfer device A. Fig. 16 is an operation explanatory view of the substrate transfer device A. [Description of main component symbols] 1 : Orthogonal conveying device 2 : Conveying device 3 : Conveying device 4 : Conveying device 5 : Conveying device 10 : First conveying device 1 1 : First conveying unit 20 : Second conveying device 21 : 2 handling unit 30: support unit 3 1 : support member 32 : roller 3 3 : bracket 34 : substrate holding unit - 24 - 200933800 3 5 : abutment member 36 : moving unit 3 6 a - body portion 36b : movable portion 3 7 : cover member 371 : notch 40 : lifting unit
41 :活動部 42 :本體部 50 :驅動單元 5 1 :支撐板 52 :滑動構件 53 :軌道構件 5 3 a ·_部構件 54 :軸 5 4a :軸承 55 :皮帶輪 56 :皮帶 57 :蓋構件 57a ’·吸引排氣手段 5 8 :驅動源 5 8 a :馬達 58b :減速機 60 :輥式輸送單元 -25- 200933800 61 :輥 6 2 :驅動箱 63 :感測器 7 〇 :收納匣盒 7 1 :柱構件 72 :樑構件 7 3 :鋼絲 80 :昇降裝置 ◎ 8〇a :樑構件 8 1 :橫桿構件41 : movable portion 42 : main body portion 50 : drive unit 5 1 : support plate 52 : sliding member 53 : rail member 5 3 a · _ member 54 : shaft 5 4a : bearing 55 : pulley 56 : belt 57 : cover member 57a '·Attracting exhaust means 5 8 : Drive source 5 8 a : Motor 58b : Reducer 60 : Roller transport unit -25 - 200933800 61 : Roller 6 2 : Drive box 63 : Sensor 7 〇: Storage cassette 7 1 : Column member 72 : Beam member 7 3 : Wire 80 : Lifting device ◎ 8〇a : Beam member 8 1 : Cross member
2 0 0 :控制裝置 20 1 · CPU2 0 0 : Control unit 20 1 · CPU
202 ： RAM202 : RAM
203 ： ROM 2 04 :輸入界面 2 0 5 ·輸出界面 206 :通信界面 3 〇 0 :主電腦 500 :架台 501 :架台本體 502 :腳部 601 :腳部 A :基板搬運裝置 S 1 :空間 -26 200933800 S 2 :空間 W :玻璃基板203 : ROM 2 04 : Input interface 2 0 5 · Output interface 206 : Communication interface 3 〇 0 : Main computer 500 : Stand 501 : Stand body 502 : Foot 601 : Foot A : Substrate transfer device S 1 : Space -26 200933800 S 2 : Space W: glass substrate
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