TW200922851A - Substrate transfer system - Google Patents

Substrate transfer system Download PDF

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Publication number
TW200922851A
TW200922851A TW097135654A TW97135654A TW200922851A TW 200922851 A TW200922851 A TW 200922851A TW 097135654 A TW097135654 A TW 097135654A TW 97135654 A TW97135654 A TW 97135654A TW 200922851 A TW200922851 A TW 200922851A
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Taiwan
Prior art keywords
substrate
conveyance
substrates
transport
belt
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TW097135654A
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Chinese (zh)
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TWI403446B (en
Inventor
Toru Gamo
Takehiko Hori
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Hirata Spinning
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Stacking Of Articles And Auxiliary Devices (AREA)

Abstract

Provided is a substrate transfer system for transferring substrates between a substrate storing cassette and a processing apparatus. The substrate transfer system is provided with a first conveyer which transfers a plurality of substrates at the same time; a second conveyer which is continuously arranged from the first conveyer and separately transfers the substrates in the transfer direction; a moving unit, which has a placing section for placing the substrate which is on the second conveyer, and moves the substrate in a direction orthogonally intersecting with the transfer direction on the second conveyer; and a lifting unit which relatively brings up and down the placing section and the second conveyer.

Description

200922851 九、發明說明 【發明所屬之技術領域】 本發明，是有關搬運系統，可在收納玻璃基板、液晶 基板、PDP基板等的基板的收納卡匣、及處理前述基板的 處理裝置之間搬運基板。 【先前技術】 薄型顯示器等的製造設備中，玻璃基板等的基板是被 收納於收納卡匣內。而且，進行基板的處理時基板是朝處 理裝置被搬運’處理終了的話再度收納至收納卡匣。在這 種製造設備中，在收納卡匣及處理裝置之間需要運搬基板 的搬運系統。基板的搬運系統，是要求具有可對應處理裝 置的基板處理能力的搬運能力。例如處理裝置的基板處理 能力若是超過搬運系統的搬運能力的情況時，會產生處理 裝置等待基板的搬運時間，導致製造效率變差。因此，搬 運系統的基板的搬運能力希望是超過處理裝置的基板處理 能力。 在曰本特開2005-60110號公報中，是揭示從複數收 納卡匣選擇性地將基板搬運至處理裝置的系統。在此系統 中，基板的搬運能力是依存於收納卡匣的數量。因此，例 如在一個收納卡匣、及處理裝置之間搬運基板的情況時， 會有基板的搬運能力比處理裝置的處理能力差的情況。 在日本特開平9-132309號公報中’是揭示同時搬運 複數枚基板，在搬運的過程處理複數枚基板的系統。在此 200922851 系統中，處理裝置成爲需要可以同時交接複數枚基板 是，薄型顯示器等的製造設備多採用每次1枚地進行 交接的處理裝置。此系統，欲適用於採用每次1枚地 基板交接的處理裝置的製造設備是困難的。 【發明內容】 本發明的目的，是爲了提供一種基板搬運系統， 應每次1枚地進行基板交接的處理裝置，並提高基板 運能力。 依據本發明，提供一種基板搬運系統，是在收納 的收納卡匣、及處理前述基板的處理裝置之間搬運基 其特徵爲，具備：第1輸送帶，配置於前述收納卡匣 在與前述基板的搬運方向垂直的方向具有可並列載置 枚前述基板的寬度，可將前述複數枚前述基板朝前述 方向同時搬運；及第2輸送帶，在前述處理裝置側與 第1輸送帶連續配置，在與前述搬運方向垂直的方向 可並列載置將前述複數枚前述基板的寬度，可將前述 枚基板個別朝前述搬運方向搬運；及移動組件，具有 前述第2輸送帶上的前述基板的載置部，在前述第2 帶上朝與前述搬運方向垂直的方向移動前述基板；及 組件，將前述載置部及前述第2輸送帶相對地昇降。 在本發明的基板搬運系統中，藉由設置前述第1 帶，在基板的搬運途中，可並列進行複數枚基板的搬 可以提高搬運能力。而且，藉由設置前述第2輸送帶 。但 基板 進行 可對 的搬 基板 板， 側， 複數 搬運 fflj 述 具有 複數 載置 輸送 昇降 輸送 運， 、前 -5- 200922851 述移動組件及前述昇降組件，對於前述處理裝置，可以每 次1枚地進行基板的交接。因此，可以對應每次1枚地進 行基板交接的處理裝置。 且’依據本發明，提供一種基板搬運系統’是在收納 基板的第1及第2收納卡匣、及與前述第1及第2收納卡 匣分離配置供處理前述基板用的處理裝置之間搬運基板， 其特徵爲，具備：第1同時搬運輸送帶，配置於前述第1 收納卡匣側，在與前述基板的搬運方向垂直的方向具有可 並列載置複數枚前述基板的寬度，可將前述複數枚前述基 板朝前述搬運方向同時搬運；及第2同時搬運輸送帶，配 置於前述第2收納卡匣側，在與前述搬運方向垂直的方向 具有可並列載置複數枚前述基板的寬度，可將前述複數枚 前述基板朝前述搬運方向同時搬運；及第1個別搬運輸送 帶，在前述處理裝置側與前述第1同時搬運輸送帶連續配 置，在與前述搬運方向垂直的方向具有可並列載置前述複 數枚前述基板的寬度，可將前述複數枚基板個別朝前述搬 運方向搬運；及第2個別搬運輸送帶，在前述處理裝置側 對於前述第2同時搬運輸送帶連續配置，在與前述搬運方 向垂直的方向具有可並列載置前述複數枚前述基板的寬度 ，可將前述複數枚基板個別朝前述搬運方向搬運；及移動 組件，具有供載置前述第1及第2個別搬運輸送帶上的前 述基板用的載置部，橫跨前述第1及第2個別搬運輸送帶 ，朝與前述搬運方向垂直的方向移動前述基板；及昇降組 件，將前述載置部及前述第1及2個別搬運輸送帶相對地 -6 - 200922851 昇降。 在本發明的基板搬運系統中，藉由設置前述第 2同時搬運輸送帶，在基板的搬運途中，可並列進 枚基板的搬運，可以提尚搬運能力。而且，前述第 2個別搬運輸送帶，藉由設置前述移動組件及前述 件，對於前述處理裝置，是可以每次1枚地進行基 接。因此，可以對應每次1枚地進行基板交接的處 。進一步，前述移動組件藉由橫跨前述第1及第2 運輸送帶移動前述基板，就可在前述處理裝置、及 1及第2收納卡匣之間各別搬運基板，可以提高基 運能力。 且’依據本發明，提供一種基板搬運系統，是 基板的第1及第2收納卡匣、及與前述第1及第2 匣分離配置供處理前述基板用的處理裝置之間搬運 其特徵爲，具備：第1同時搬運輸送帶，配置於前 收納卡匣側，在與前述基板的搬運方向垂直的方向 並列載置複數枚前述基板的寬度，可將前述複數枚 板朝前述搬運方向同時搬運；及第2同時搬運輸送 置於前述第2收納卡匣側，在與前述搬運方向垂直 具有可並列載置複數枚前述基板的寬度，可將前述 前述基板朝前述搬運方向同時搬運；及個別搬運輸 在前述處理裝置側與前述第1同時搬運輸送帶連續 在與前述搬運方向垂直的方向具有可並列載置前述 前述基板的寬度，可將前述複數枚基板個別朝前述 1及第 行複數 1及第 昇降組 板的交 理裝置 個別搬 前述第 板的搬 在收納 收納卡 基板， 述第1 具有可 前述基 帶，配 的方向 複數枚 送帶， 配置， 複數枚 搬運方 -7- 200922851 向搬運；及第3同時搬運輸送帶，在前述處理裝置側與前 述第2同時搬運輸送帶連續配置，在與前述搬運方向垂直 的方向具有可並列載置前述複數枚前述基板的寬度；及移 動組件，具有載置前述個別搬運輸送帶及前述第3同時搬 運輸送帶上的前述基板用的載置部，橫跨前述個別搬運輸 送帶及前述第3同時搬運輸送帶，朝與前述搬運方向垂直 的方向移動前述基板；及昇降組件，將前述載置部及前述 個別搬運輸送帶及前述第3同時搬運輸送帶相對地昇降。 在本發明的基板搬運系統中，藉由設置前述第1及第 2同時搬運輸送帶，在基板的搬運途中，可並列進行複數 枚基板的搬運，可以提高搬運能力。而且，前述個別搬運 輸送帶，藉由設置前述移動組件及前述昇降組件，對於前 述處理裝置，是可以每次1枚地進行基板的交接。因此， 可以對應每次1枚地進行基板交接的處理裝置。進一步， 前述移動組件藉由橫跨前述個別搬運輸送帶及前述第3同 時搬運輸送帶移動前述基板，就可在前述處理裝置、及前 述第1及第2收納卡匣之間各別搬運基板，可以提高基板 的搬運能力。 【實施方式】 [第1實施例] [整體結構] 第1圖是本發明的一實施例的基板搬運系統A的佈 局配置的平面圖，第2圖是基板搬運系統A的側面圖。 -8- 200922851 又，在各圖中，箭頭χ、γ是顯示相互垂直的水平方向， 箭頭Ζ是顯示上下方向（鉛直方向）。本實施例的情況， 基板搬運系統A，是在收納方形薄板狀的玻璃基板W的 收納卡匣1 〇、及處理玻璃基板w的處理裝置2 0 (只有圖 示一部分）之間搬運玻璃基板。又，玻璃基板W於第2 圖中由虛線所示，於第1圖中省略圖示。 處理裝置20，是進行例如玻璃基板的洗淨、乾燥、 其他的處理。處理裝置2 0，是在其內部可收納複數枚玻 璃基板，例如可被收納於收納卡匣1 〇的數板玻璃基板W 。但是，處理裝置20，是每次一枚地進行玻璃基板W的 搬入/搬出。 收納卡匣10及處理裝置20，是於X方向分離配置。 因此，本實施例的情況，基板搬運系統A的基板的搬運 方向爲X方向，垂直於搬運方向的方向爲Y方向。且， 收納卡匣1 0及處理裝置20，是使這些的玻璃基板W的搬 入出部相互面向地配置。 基板搬運系統A，是具備：同時搬運輸送帶30、及 個別搬運輸送帶3 1、及移動組件50、及昇降組件60、及 移載輸送帶32及70、及一對的昇降裝置80。 [收納卡匣] 第3圖是收納卡匣1 0的立體圖。收納卡匣1 0是將玻 璃基板W在Z方向可多段收納的卡匣。又，第3圖是顯 示玻璃基板W未被收納的狀態。本實施例的情況，收納 -9- 200922851 卡匣10是藉由複數柱構件11、及樑構件12形成略直方 體形狀的框架體。柱構件1 1的配設間隔及樑構件1 2的配 設間隔，是設定成讓移載輸送帶3 2可以從收納卡匣1 〇的 下方進入收納卡匣1 〇內。 柱構件11，是在X方向複數配設，並且於Y方向分 離地同數並設。於Y方向分離的一對的柱構件11之間， 是並列於Z方向，且，以預定的間距張設有鋼絲1 3。各 鋼絲1 3的上下間的空間，是形成供收納玻璃基板w用的 槽，玻璃基板W是呈略水平姿勢載置於鋼絲13上。而且 ，槽是形成與並列於Z方向的鋼絲1 3的數量相同。 本實施例的情況，一條槽中的複數玻璃基板W是於 Y方向或是X方向並列地被收納。但是，一條槽中只收納 一枚玻璃基板W也可以。且，本實施例雖是藉由鋼絲形 成槽’但是採用其他的方式也可以。但是，藉由鋼絲的使 用，可以縮小收納基板間的間隔，可以提高收納卡匣10 的收納效率。 [輸送帶] 接者’I兌明同時搬運輸送帶30、個別搬運輸送帶31 及移載輸送帶3 2的結構。本實施例的情況，這些的輸送 帶’皆是將複數滾子輸送帶矩陣狀配置的結構。但是使用 皮帶輸送帶等其他形式的輸送帶也可以。 第4圖是顯示構成各輸送帶3〇、31及32的滾子輸送 帶組件1 0 0及1 1 0的立體圖。如同圖所示，在本實施例中 -10- 200922851 ，藉由大小不同2種類的滾子輸送帶組件1 00及1 1 0，就 可將尺寸不同的玻璃基板W由相同的系統搬運。 滾子輸送帶組件1 〇〇，是具備：載置玻璃基板W (第 4圖中未圖示）用的複數滾子101、及內藏滾子101的驅 動裝置用的驅動盒102、及檢出滾子101上的玻璃基板W 用的感測器103。滾子101，是朝Υ方向的旋轉軸周圍旋 轉，將玻璃基板w朝X方向搬運。 滾子輸送帶組件110，是具備：載置玻璃基板W用的 複數滾子1 1 1、及內藏滾子1 1 1的驅動裝置用的驅動盒 1 1 2、及檢出滾子1 1 1上的玻璃基板W用的感測器1 1 3。 滾子111，是朝Υ方向的旋轉軸周圍旋轉，將玻璃基板W 朝X方向搬運。滾子輸送帶組件11〇的γ方向的寬度， 是滾子輸送帶組件1 0 0的Υ方向的寬度的約一半。各滾 子輸送帶組件100及各滾子輸送帶組件11 〇可分別獨立驅 動。 本實施例的情況，在Υ方向的兩端部各配置一組滾 子輸送帶組件1 0 0，在這些的滾子輸送帶組件1 〇 〇之間配 置2個滾子輸送帶件110。在γ方向並列的這4個滾子輸 送帶件1 00及1 1 〇也稱「滾子輸送帶組件組」。第4圖， 是顯示在X方向並列3個「滾子輸送帶組件組」的態樣 〇 參照第1圖及第2圖，在本實施例中，同時搬運輸送 帶30、個別搬運輸送帶31及移載輸送帶32，皆是在X 方向並列6個「滾子輸送帶組件組」的結構。同時搬運輸 -11 - 200922851 送帶30、及移載輸送帶32 ’是於χ方向連續配置’ 玻璃基板w朝X方向連續搬運。 且，同時搬運輸送帶30、個別搬運輸送帶31及 輸送帶32，皆是在與玻璃基板W的搬運方向（X方 垂直的Υ方向具有可並列載置複數枚玻璃基板W的 (Y方向的寬度）。進一步’同時搬運輸送帶30、 搬運輸送帶31及移載輸送帶32’皆是在玻璃基板W 運方向（X方向）具有可並列載置複數枚玻璃基板 長度（X方向的長度）。第5圖，是收納卡匣10中 璃基板W的收納態樣及移載輸送帶3 2上的玻璃基板 W 1、W2 )的位置的例（2例）的平面圖。 第5圖的上例，是在收納卡匣1 0的各槽收納4 璃基板W1的例，移載輸送帶32，是可在X方向載 枚，在Y方向載置2枚玻璃基板W1。第5圖的下例 在收納卡匣1 〇的各槽收納6枚玻璃基板W 2的例， 輸送帶32，是可在X方向載置2枚，在Y方向載置 玻璃基板W2。玻璃基板W2，是γ方向的寬度比玻 板W 1小的玻璃基板。 搬運玻璃基板W 1的對象的情況，與移載輸送1 同樣，在同時搬運輸送帶30及個別搬運輸送帶31上 Y方向可以載置2枚玻璃基板W 1。且，搬運玻璃基I； 的對象的情況，與移載輸送帶3 2同樣，在同時搬運 帶30及個別搬運輸送帶31上，在γ方向可以載置 玻璃基板W2。 可將 .移載 .向） 1寬度 個別 的搬 W的 的玻 W ( 枚玻 :置2 ，是 移載 3枚 璃基 Ψ 32 ，在 反W2 輸送 3枚 -12- 200922851 在本實施例中’在同時搬運輸送帶30上，在X方 及Y方向可以各別載置複數玻璃基板。在同時搬運輸 帶3 0上’藉由可以載置如此多數的玻璃基板，處理裝 20就不會等待玻璃基板的搬運。且，清空收納卡匣1〇 進行交換的情況時，姑且，將玻璃基板搬出同時搬運輸 帶3 0，交換後再度搬入收納卡匣1 0也可以，收納卡匣 的交換變方便。 回到第1圖及第2圖，移載輸送帶70是由單一個 子輸送帶組件所構成的滾子輸送帶。移載輸送帶70, 在處理裝置2 0及個別搬運輸送帶3 1之間進行玻璃基板 的交接。又，不設置移載輸送帶70，而在個別搬運輸 帶31及處理裝置20之間直接交接玻璃基板W也可以。 [昇降裝置] 第6圖是一對的昇降裝置80的立體圖，第7圖是 降裝置80的分解立體圖。在本實施例中，藉由昇降裝 8 0使收納卡匣1 〇在Z方向昇降’使收納卡匣1 〇及移 輸送帶32朝Z方向相對地移動。但是，將移載輸送帶 朝Z方向昇降的結構也可以。又’昇降移載輸送帶3 2 結構的情況，是成爲同時搬運輸送帶3 0也昇降的結構< 本實施例的情況’昇降裝置8 0是挾住收納卡匣i 〇 方式各別配設於收納卡匣10的相互面對的γ方向的兩 部，懸臂支撐收納卡匣10。依據此結構的話，昇降裝 80可以更薄型化。 向 送 置 之 送 10 滾 是 W 送 昇 置 載 32 的 的 側 置 -13- 200922851 昇降裝置80具備樑構件8 1，可載置收納卡匣1 〇的 底部的樑構件1 2。各昇降裝置80的各樑構件8 1是藉由 同步地朝Ζ方向移動使收納卡匣1 〇昇降。昇降裝置8 0是 具備朝Ζ方向延伸的支柱82，在支柱82的內側表面固定 有朝Ζ方向延伸的一對的軌道構件8 3及齒條8 4。在各昇 降裝置80之間，在支柱82的上端架設樑構件80a。 樑構件81是透過托架85a被固定支撐於支撐板85的 一側面。在支撐板8 5的另一側面固定有可沿著軌道構件 8 3移動的4個滑動構件8 6，樑構件8 1及支撐板8 5是藉 由軌道構件8 3的導引而上下移動。驅動組件8 7是由馬達 8 7a及減速機87b所構成，被固定支撐於支撐板88的一 側面。減速機87b的輸出軸是貫通支撐板88與配設於支 撐板88的另一側面的小齒輪89a連接。 與支撐板8 5支撐的板8 8是隔有預定的間隔地被相互 固定，支撐板85及支撐板88的空隙是配設小齒輪89b至 8 9 d。小齒輪8 9 b至8 9 d是可旋轉地被軸支於支撐板8 5及 支撐板88之間，小齒輪89b及小齒輪89c，是從動於小 齒輪89a的旋轉而旋轉。小齒輪89d是從動於小齒輪89c 的旋轉而旋轉。小齒輪8 9 b至8 9 d是相同規格的小齒輪， 2個小齒輪89b及89d是與各齒條84嚙合。 但是讓驅動組件8 7驅動的話小齒輪8 9 a會旋轉，藉 由其驅動力，使驅動組件8 7、支撐板8 5及8 8、滑動構件 8 6及樑構件81 —體地朝上方或下方移動，就可以昇降被 載置於樑構件8 1上的收納卡匣1 0。在各昇降裝置8 0中 -14- 200922851 ’在樑構件8 1的端部設有感測器8 1 a，供檢出彼此的樑 構件8 1的昇降高度的偏離。 感測器8 1 a是例如具備發光部及受光部的光感測器， 如第6圖所示彼此將光朝γ方向照射來判別是否受光。 若有受光的情況即表示彼此的樑構件81的昇降高度沒有 偏離’受光無情況是有偏離成昇降高度的成爲事。由感測 器8 1 a檢出昇降高度的偏離的話，藉由馬達8 7 a的控制來 消解偏離。藉由設置感測器8 1 a控制樑構件8 1的昇降高 度的偏離，就可防止昇降時收納卡匣1 0傾斜，收納卡匣 1 〇就可以更穩定地昇降。 又，設置於各樑構件81的2個感測器8 1 a，是其一 方是具有發光部及受光部的任一方，另一方是具有發光部 及受光部的另一方的結構也可以。且，不限定於光感測器 ，其他的感測器也可採用。 第8圖是顯示將玻璃基板W從收納卡匣1 0搬出的情 況時的由昇降裝置8 0所產生的收納卡匣1 〇的昇降動作的 圖。又，同圖中省略昇降裝置8 0的圖示。玻璃基板W的 搬出，是在收納有玻璃基板W的槽之中，從被收納於最 下方的槽的玻璃基板W依序進行。 首先，如第8圖的左上圖所示，從收納卡匣1 〇位置 於移載輸送帶32的上方的狀態，藉由昇降裝置80 (第8 圖中未圖示）使收納卡匣10降下，如第8圖的右上圖所 示，在移載輸送帶32上，載置搬運對象的玻璃基板W。 這時，移載輸送帶32是從下方進入收納卡匣內’搬運 -15- 200922851 對象的玻璃基板W是成爲浮於收納卡匣1 0的鋼絲1 3上 的狀態，成爲只有被移載輸送帶32支撐的狀態。接著驅 動移載輸送帶32，如第8圖的左下圖所示，將搬運對象 的玻璃基板W從收納卡匣1 〇搬出。以下，同樣地，返覆 收納卡匣10的降下及移載輸送帶32的驅動（第8圖的右 下圖），從下方側依序搬出玻璃基板W。 構成移載輸送帶32的滾子輸送帶組件1〇〇及11〇’ 是對應搬運對象的玻璃基板的位置及尺寸被選擇性地驅動 。在例如第5圖的上側的例，將位於+Χ側的2枚玻璃基 板W 1搬出的情況時，成爲驅動位於這些的玻璃基板W 1 下方的3個「滾子輸送帶組件組」。且，在例如第5圖的 上側的例，搬出位於+Χ側且位於+Υ側的1枚玻璃基板 W1的情況時，成爲驅動位於此玻璃基板W1下的3個「 滾子輸送帶組件組」之中位於+Υ側的3個滾子輸送帶件 100 及 110 。 將玻璃基板W往收納卡匣1 0搬入的情況時’是成爲 與上述搬出時的動作大致相反的動作。玻璃基板w的搬 入，是從未收納玻璃基板W的槽之中最下方的槽依序進 行。 [移動組件及昇降組件] 參照第1圖及第2圖，移動組件5 0，是具備分別設 在個別搬運輸送帶3 1的Y方向兩側的基座構件5 1。在各 基座構件5 1上，搭載了：由馬達52和馬達52旋轉驅動 -16- 200922851 的一對的驅動帶輪53、及一對的從動帶輪54。驅動帶輪 5 3及從動帶輪5 4的組是合計有4個，在各組的驅動帶輪 53及從動帶輪54之間捲撓有皮帶55。藉由將馬達52驅 動使驅動帶輪5 3旋轉，皮帶5 5就會行走。 皮帶5 5，是將個別搬運輸送帶3 1橫跨Y方向延伸， 每次二個通過相互鄰接的「滾子輸送帶組件組」之間的空 間。在各皮帶55上固定有載置構件56或57。第9圖是 載置構件56及57的立體圖。載置構件56及57，是在與 皮帶55略同寬度的板狀的構件上形成半球狀的突起56a 、57a。在載置構件56的+ Y側的端部形成比突起56a突 出的直方體形狀的定位構件56b ’在載置構件57的-Y側 的端部形成比突起57a突出的直方體形狀的定位構件57b 〇 載置構件56及57，是作爲載置個別搬運輸送帶31 上的玻璃基板W的載置部的功能，將玻璃基板W從其下 側支撐。載置構件5 6及5 7 ’是藉由皮帶5 5的行走’朝 Y方向移動。玻璃基板W是載置於突起56a、57a上。突 起5 6 a、5 7 a藉由形成半球狀，來縮小與玻璃基板W及突 起5 6a、5 7a的接觸面積，降低玻璃基板W的刮傷。 定位構件5 6 b及5 7 b，其側面藉由抵接於玻璃基板W 的端緣，進行玻璃基板w的定位（玻璃基板W的方向及 位置的調整）。本實施例的情況’因爲在4條皮帶5 5上 使載置構件5 6或5 7的任一分別設置1個’所以定位構件 56b及57b合計有4個，在X方向及Y方向分離的4處進 200922851 行玻璃基板W的定位。 接著，參照第2圖說明昇降組件6 0。昇降組件6 0， 是對於各基座構件5 1，配設於各基座構件5 1的下方。因 此’本實施例的情況，昇降組件60各別設在個別搬運輸 送帶3 1的Y方向兩側，合計設有2個。 各昇降組件60是具備基座構件61。在基座構件61 上立設複數支柱62，支柱62是支撐基座構件51。支柱 62，是例如由汽缸、及桿所構成’可朝Z方向伸縮。在基 座構件61上’具備：馬達63、及藉由馬達63的驅動而 轉動一對的凸輪板64。凸輪板64的凸輪面，是抵接於基 座構件51的下面，藉由其轉動使基座構件51昇降。隨著 基座構件5 1的昇降，支柱62被伸縮。 在本實施例中，同步地進行2個昇降組件6 0的昇降 動作，使移動組件5 0昇降。由此，載置構件5 6及5 7朝 Z方向昇降，使載置構件56及57、及個別搬運輸送帶31 相對地朝Z方向移動。但是，將個別搬運輸送帶3 1朝Z 方向昇降，將載置構件5 6及5 7及個別搬運輸送帶3 1朝 Z方向相對地移動也可以。 第1 0圖，是顯示昇降組件60的昇降動作、及隨其的 載置構件5 6的昇降的圖。又，載置構件5 7的昇降也同樣 。在第1 0圖中只有圖示昇降組件60的要部。昇降組件 6〇，是將載置構件56在下降位置及上昇位置的2個位置 之間昇降。 第1 0圖的左側，是顯示載置構件5 6位於下降位置的 -18- 200922851 情況。此情況，昇降組件60，是凸輪板64的頂部朝向 方向的狀態。載置構件56，是使構成個別搬運輸送帶 的滾子輸送帶組件1 〇〇的滾子1 〇 1，位於比搬運玻璃基 W的搬運高度L低的位置。 第10圖的右側，是顯示載置構件56位於上昇位置 情況。此情況，昇降組件60，是凸輪板64的頂部朝向 方向的狀態。即，藉由從第1 〇的左側圖所示的狀態使 達63的驅動凸輪板64被90度轉動，使基座構件51被 起。由此移動組件50上昇。載置構件56的突出部56a 於比搬運高度L高的位置。玻璃基板W遠離滾子101 被載置於突出部56a上。又，皮帶55，是位於比搬運 度L低的位置。 將個別搬運輸送帶31上的玻璃基板W，藉由移動 件5 0朝Y方向移動時，玻璃基板W被載置於載置構 56及載置構件57的雙方。而且，藉由將載置構件56 載置構件5 7朝相互相反的方向（相互接近的方向）移 ，藉由定位構件56b及57b挾持玻璃基板W。在例如 1 0圖的右側的狀態，將定位構件56b朝_Y方向移動， 定位構件5 6b抵接於玻璃基板W的端緣。此時，玻璃 板W成爲滑動於突起56a上。 藉由定位構件5 6b及5 7 b挾持玻璃基板W，玻璃基 W的方向被調整（限定）。由此，在搬運的過程玻璃基 W的方向傾斜的情況時，可以進行方向的修正。接著， 由將載置構件5 6及載置構件5 7相互朝同方向移動，玻, Y 3 1 板 的 + Z 馬 壓 位 並 高 組 件 及 動 第 將 基 板 板 藉 .璃 -19- 200922851 基板w成爲在保持被定位構件5 6b及5 7b挾持的狀態下 朝Y方向移動。 [控制裝置] 第1 1圖是顯示基板搬運系統A的控制裝置200的結 構的方塊圖。控制裝置2 0 0是具備：管理基板搬運系統A 的整體的控制用的C P U 2 0 1、及提供C P U 2 0 1工作區域供 記憶可變資料等用的RAM202、及記憶控制程式和控制資 料等的固定性的資料用的ROM203。RAM202、ROM20 3可 採用其他的記憶手段。 輸入介面（I/F ) 204，是CPU201及各種的感測器（ 例如感測器81 a、1 1 3等）的介面，通過輸入I/F204讓 CPU201取得各種感測器的檢出結果。輸出介面（I/F ) 205 ’是CPU201及各種的馬達（例如馬達52、63、87a、 驅動盒102、1 12內的馬達等）的介面，通過輸出I/F204 讓C P U 2 0 1控制各種馬達。 通訊介面（I/F ) 206，是控制包含基板搬運系統A的 基板處理設備整體的主機電腦3 00及CPU201的介面， C PU2 0 1是依據來自主機電腦3 0 0的指令控制基板搬運系 統A。 [基板搬運系統A的基板的搬運例] [同時搬運輸送帶的搬運例] 第12圖及第13圖是顯示從移載輸送帶32朝同時搬 -20- 200922851 運輸送帶3 0搬運玻璃基板W 1的情況的態樣的例的圖。 藉由同步地驅動各「滾子輸送帶組件組」，可以朝X方 向將複數枚玻璃基板W1並列地同時搬運。 第12圖的例，是顯示將移載輸送帶32上的玻璃基板 W1每次2枚地同時搬運的例。在第1 2圖的例中，將位 於-X側的2枚玻璃基板W1，首先，從移載輸送帶32朝 同時搬運輸送帶30搬運。接著，同時搬運輸送帶30，是 將2枚玻璃基板W1朝+X方向同時搬運，一方面，移載 輸送帶32是將位於-X側的2枚玻璃基板W1朝同時搬運 輸送帶30搬運。最終是4枚玻璃基板W1位於同時搬運 輸送帶30上。 第1 3圖的例，是顯示將移載輸送帶32上的玻璃基板 W1同時搬運4枚例。在第13圖的例中，移載輸送帶32 是4枚同時將玻璃基板W1朝+X方向搬運，同時搬運輸 送帶3 0也4枚同時將玻璃基板w 1朝+X方向搬運。最終 是4枚玻璃基板W1位於同時搬運輸送帶30上。 在第12圖及第13圖中，說明玻璃基板W1的搬運例 ，但是對於尺寸比玻璃基板W1小的玻璃基板W 2也同樣 搬運可能。且，在第12圖及第13圖中，說明從移載輸送 帶3 2朝同時搬運輸送帶3 0將玻璃基板W 1搬出的情況， 但是從同時搬運輸送帶3 0朝移載輸送帶32將玻璃基板 W1搬運的情況，也可以朝γ方向將複數枚玻璃基板w i 並列地同時搬運。 在本實施例中，如此，在同時搬運輸送帶30及移載 -21 - 200922851 輸送帶3 2之間，可以朝Y方向將複數枚玻璃基板並列地 同時搬運，對於收納卡匣1 〇的玻璃基板的搬出搬入的效 率可以提高。 在本實施例中，將同時搬運輸送帶30移載至的輸送 帶32，由獨立被驅動的複數滾子輸送帶組件100及110 所構成，但是只朝Υ方向將複數枚玻璃基板並列地同時 搬運的話，如移載輸送帶70由單一個滾子輸送帶組件分 別構成同時搬運輸送帶30、移載輸送帶32也可以。 但是，如本實施例，將同時搬運輸送帶3 0及移載輸 送帶32，藉由由獨立被驅動的複數滾子輸送帶組件1〇〇 及1 1 0所構成，就有搬運態樣的變形例可增加的優點。例 如將玻璃基板每次一枚搬運的搬運態樣也可以選擇性地採 用。且’例如在+Υ側將玻璃基板朝+Χ方向，在-Υ側將 玻璃基板-朝X方向，即將複數玻璃基板朝相反方向搬運 的搬運態樣也可以選擇性地採用。 [個別搬運輸送帶的搬運例] 在本實施例中，可將從收納卡匣1 0搬出的複數枚玻 璃基板，藉由同時搬運輸送帶3 0並列地搬運。即，朝Υ 方向將複數枚玻璃基板並列，可將這些的玻璃基板同時搬 運。由此’在玻璃基板的搬運途中可以提高搬運能力。 另一方面’處理裝置20是將玻璃基板每次1枚地搬 入/搬出。因此’有需要將搬運枚數從複數枚變換成一枚 。個別搬運輸送帶3 1、移動組件5 0及昇降組件60，是進 -22- 200922851 行此搬運枚數的變換。由此，對於處理裝置20，是可以 每次1枚地進行玻璃基板的交接。 [朝處理裝置的玻璃基板的搬入] 第14圖至第16圖，是顯示從個別搬運輸送帶31朝 處理裝置2 0每次搬運一枚玻璃基板W 1的例的圖。第1 4 圖的上側，是顯示玻璃基板W1是2枚同時被搬運至個別 搬運輸送帶3 1上的態樣。2枚玻璃基板W 1，是被載置 於-X側的3個「滾子輸送帶組件組」上。 從此狀態，將2枚玻璃基板W 1之中的一方的玻璃基 板W1，如第1 4圖的下側所示朝+X方向搬運。此時，各 滾子輸送帶組件100及1 10是對應玻璃基板W1的尺寸被 選擇性地驅動。例如從第1 4圖的上側的態樣朝下側的態 樣搬運玻璃基板W1的情況，位於+ Y側的6個滾子輸送 帶組件1 〇〇及6個滾子輸送帶組件1 1 〇被驅動。 接著’將玻璃基板W1朝Y方向移動至對應處理裝置 2 〇的搬入出位置的位置。因此，首先如第1 5圖的上側所 示，將位於下降位置的載置構件5 6及5 7，位於玻璃基板 W 1的端緣附近。載置構件5 6，是在玻璃基板W 1的+Y方 向側的端緣附近，使載置構件5 7是位於玻璃基板W 1的 -Y方向側的端緣附近。這時，複數突起56a及57a的一 部分，是位於玻璃基板W1的下方，定位構件56b及57b 不位於玻璃基板W 1的下方。 接著’藉由昇降組件60 (無圖示）的驅動，將載置 -23- 200922851 構件56及57朝上昇至上昇位置。由此，玻璃基板W1是 遠離滾子101及111而成爲位於載置構件56及57上的狀 態（第1 0圖的右側的態樣）。將載置構件5 6及5 7往上 昇至上昇位置後，藉由將載置構件56朝-Y方向在，將載 置構件57朝+Y方向移動，由定位構件56b及定位構件 57b挾持玻璃基板W1 (第1 5圖的下側的態樣）。由此， 玻璃基板W1的方向被調整。又，這時，抵接於定位構件 5 6b及定位構件5 7b的側面（玻璃基板W1的端緣的面） 的間隔，是與玻璃基板W 1的寬度略相同或若干寬較佳。 接著，將載置構件5 6及5 7朝Y方向彼此朝同方向 移動，將玻璃基板W1搬運直到對應處理裝置20的搬入 出位置的位置爲止（第1 6圖的上側的圖）。由此，對於 處理裝置2 0的玻璃基板W1的定位被進行。本實施例的 情況’對應處理裝置2 0的搬入出位置的位置，雖是個別 搬運輸送帶31的Y方向的略中央，但是不限定於此，例 如Y方向的端部爲搬入出位置也可以。 接著，藉由昇降組件60 (無圖示）的驅動，將載置 構件5 6及5 7下降至下降位置。而且，如第〗6圖的下側 所示’驅動位於玻璃基板W1的下方的6個滾子輸送帶組 件110'及移載輸送帶7〇，將玻璃基板W1朝處理裝置20 搬運。 殘留於個別搬運輸送帶3 1上的另一方的玻璃基板W 1 也同樣朝處理裝置20搬運。如此，玻璃基板W1可以每 次一枚地朝處理裝置20搬運。 -24- 20 200922851 所 搬 的 被 狀 方 20 件 藉 56 件 而 行 置 側 組 20 基 將第5圖的下圖所示的玻璃基板W2朝處理裝置 搬入情況也可以採用同樣的程序，如第1 7圖至第2 0圖 示的程序也可以採用。第1 7圖至第20圖是顯示從個別 運輸送帶31朝處理裝置20每次搬運一枚玻璃基板W2 例的圖。 第17圖的上側，是顯示玻璃基板W2是3枚同時 搬運於個別搬運輸送帶3 1上的態樣。3枚玻璃基板W2 是載置於-X側的3個「滾子輸送帶組件組」上。從此 態，將3枚玻璃基板W2，如第1 7圖的下側所示朝+X 向同時搬運。 接著，將中央的玻璃基板W2定位於對應處理裝置 的搬入出位置的位置。因此，位於下降位置的載置構 56及57，位於中央的玻璃基板W2的端緣附近之後， 由上昇至上昇位置使中央的玻璃基板W2由載置構件 及5 7載置。而且，如第1 8圖的上側所示，將載置構 56朝-Y方向’藉由將載置構件57朝+Y方向移動，就 由定位構件56b及定位構件5 7b挾持玻璃基板W2，進 玻璃基板W 2的定位。 接著’藉由昇降組件60 (無圖示）的驅動，將載 構件5 6及5 7下降至下降位置。而且，如第1 8圖的下 所示’驅動位於玻璃基板W2的下方的6個滾子輸送帶 件110、及移載輸送帶7〇，將玻璃基板W2朝處理裝置 搬運。 接著’將殘留於個別搬運輸送帶3 1上的2枚玻璃 -25- 200922851 板W2依序朝處理裝置20搬運。首先，將一方的 板W2載置於載置構件56及57上，由定位構件 5 7b挾持如第1 9圖的上側所示，移動至對應處理| 的搬入出位置的位置。之後，如第1 9圖的下側所 動位於玻璃基板W2的下方的6個滾子輸送帶組件 及移載輸送帶70，將玻璃基板W2朝處理裝置20拥 接著，將殘留於個別搬運輸送帶31上的1枚 板W2朝處理裝置20搬運。首先，將玻璃基板W2 於載置構件56及57上，由定位構件56b及57b挾 2〇圖的上側所示，移動至對應處理裝置20的搬入 的位置。之後，驅動在第2 0圖的下側位於玻璃基 下方的6個滾子輸送帶組件110、及移載輸送帶70 璃基板W2朝處理裝置20搬運。 [從處理裝置的玻璃基板的搬出] 第21圖至第24圖，是顯示從處理裝置20朝 運輸送帶31每次搬運一枚玻璃基板W1，在個別搬 帶3 1上，朝Y方向並列複數玻璃基板W1的例的圖 第21圖的上側，是顯示第1枚玻璃基板W1 裝置20搬出的態樣。此情況，驅動：移載輸送帶 個別搬運輸送帶3 1的+X側的6個滾子輸送帶組件 使玻璃基板W 1位於個別搬運輸送帶3 1的+X側的 子輸送帶組件1 1 0上。 接著，將玻璃基板W1朝Y方向移動。因此， 玻璃基 56b及 专置20 示，驅 110、 ί運。 玻璃基 ，載置 持如第 出位置 板 W2 ，將玻 個別搬 運輸送 丨。 從處理 70、及 110, 6個滾 首先， -26- 200922851 如第2 1圖的下側所示，將位於下降位置白 5 7，位置成玻璃基板W 1的端緣附近。而 件6 0 (無圖示）的驅動，將載置構件5 6 昇位置。由此，玻璃基板W1是成爲遠離 而位於載置構件5 6及5 7上的狀態。將載 上昇至上昇位置後，藉由將載置構件5 6 ^ 置構件57朝+Y方向移動，由定位構件 5 7b挾持玻璃基板W1的（第22圖的上側 ，玻璃基板W1的方向被調整。[Technical Field] The present invention relates to a transport system capable of transporting a substrate between a storage cassette for accommodating a substrate such as a glass substrate, a liquid crystal substrate, or a PDP substrate, and a processing device for processing the substrate . [Prior Art] In a manufacturing apparatus such as a thin display, a substrate such as a glass substrate is housed in a storage cassette. Further, when the substrate is processed, the substrate is transported toward the processing device. When the processing is finished, the substrate is again stored in the storage cassette. In such a manufacturing facility, a transport system for transporting substrates is required between the storage cassette and the processing apparatus. The substrate transport system is required to have a handling capability capable of handling the substrate of the processing device. For example, when the substrate processing capability of the processing apparatus exceeds the transport capability of the transport system, the processing apparatus waits for the transport time of the substrate, resulting in deterioration of manufacturing efficiency. Therefore, it is desirable that the transport capacity of the substrate of the transport system exceeds the substrate processing capability of the processing apparatus. In Japanese Laid-Open Patent Publication No. 2005-60110, a system for selectively transporting a substrate to a processing apparatus from a plurality of receiving cassettes is disclosed. In this system, the carrying capacity of the substrate depends on the number of storage cassettes. Therefore, for example, when a substrate is transported between a storage cassette and a processing device, the handling capacity of the substrate may be inferior to the processing capability of the processing device. In Japanese Laid-Open Patent Publication No. Hei 9-132309, a system for processing a plurality of substrates at the same time and processing a plurality of substrates during transportation is disclosed. In the system of 200922851, the processing device needs to be able to transfer a plurality of substrates at the same time. A manufacturing device such as a thin display is often used for processing one piece at a time. This system is difficult to apply to a manufacturing apparatus using a processing apparatus in which one floor substrate is transferred at a time. SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transport system that processes a substrate to be transferred one at a time and improves the substrate transport capability. According to the present invention, there is provided a substrate transporting system comprising: a storage cassette between a storage cassette and a processing device for processing the substrate, wherein the first transport belt is disposed on the substrate and the substrate The vertical direction of the conveyance direction has a width in which the plurality of substrates can be placed in parallel, and the plurality of substrates can be simultaneously conveyed in the direction described above; and the second conveyor is continuously disposed on the processing device side and the first conveyor. The width of the plurality of substrates may be placed in parallel with the direction perpendicular to the conveyance direction, and the plurality of substrates may be individually transported in the conveyance direction; and the moving unit may have a mounting portion of the substrate on the second conveyor. The substrate is moved in a direction perpendicular to the conveyance direction on the second belt, and the assembly is configured to raise and lower the mounting portion and the second conveyor. In the substrate transfer system of the present invention, by providing the first tape, it is possible to carry out the transfer of a plurality of substrates in parallel during the conveyance of the substrate, thereby improving the transportability. Further, the second conveyor belt is provided by the second conveyor. However, the substrate can be moved to the substrate, the side, and the plurality of transports have a plurality of loading and transporting transports, and the moving components and the lifting assembly of the former-5-200922851 can be used one at a time for the processing device. The transfer of the substrate is performed. Therefore, it is possible to correspond to a processing apparatus for performing substrate transfer one at a time. Further, according to the present invention, a substrate transfer system is provided between a first and a second storage cassette that accommodates a substrate, and a processing device that is disposed separately from the first and second storage cassettes for processing the substrate. The substrate is characterized in that: the first simultaneous conveyance belt is disposed on the first storage cassette side, and has a width in which a plurality of the substrates can be placed in parallel in a direction perpendicular to a conveyance direction of the substrate, and the a plurality of the substrates are simultaneously transported in the transport direction; and the second simultaneous transport belt is disposed on the second storage cassette side, and has a width in which a plurality of the substrates can be placed in parallel in a direction perpendicular to the transport direction. The plurality of substrates are simultaneously conveyed in the conveyance direction; and the first individual conveyance belt is continuously disposed on the processing apparatus side and the first simultaneous conveyance belt, and is juxtaposed in a direction perpendicular to the conveyance direction. The width of the plurality of substrates may be carried by the plurality of substrates individually in the transport direction; and the second individual transport The feeding belt is continuously disposed on the second simultaneous conveyance belt on the processing device side, and has a width in which the plurality of substrates can be placed in parallel in a direction perpendicular to the conveyance direction, and the plurality of substrates can be individually transported And a moving component having a mounting portion for mounting the substrate on the first and second individual transporting conveyors, and straddle the first and second individual transporting conveyors, perpendicular to the transporting direction Moving the substrate in the direction; and lifting the assembly, and moving the loading portion and the first and second individual conveyance belts relative to each other -6 - 200922851. In the substrate conveyance system of the present invention, by providing the second simultaneous conveyance belt, the conveyance of the substrate can be performed in parallel while the substrate is being conveyed, and the conveyance capability can be improved. Further, the second individual transporting conveyor belt is provided with the moving unit and the above-mentioned moving member, and the processing device can be grounded one at a time. Therefore, the substrate can be transferred one at a time. Further, by moving the substrate across the first and second transport belts, the moving unit can transport the substrates between the processing device and the first and second storage cassettes, thereby improving the base capacity. Further, according to the present invention, there is provided a substrate transport system characterized in that a first and a second storage cassette of a substrate and a processing device for separating and disposing the first and second sides are disposed between the processing devices for processing the substrate, The first conveyor belt is disposed on the front storage cassette side, and a plurality of the substrates are placed in parallel in a direction perpendicular to the conveyance direction of the substrate, and the plurality of sheets can be simultaneously conveyed in the conveyance direction; And the second simultaneous conveyance conveyance is placed on the second storage cassette side, and the width of the plurality of substrates can be placed in parallel with the conveyance direction, and the substrate can be simultaneously transported in the conveyance direction; The processing device side and the first simultaneous transporting conveyor have a width in which the substrate can be placed in parallel in a direction perpendicular to the transport direction, and the plurality of substrates can be individually directed to the first and the first plurality and the first The transporting device of the lifting and lowering panel is configured to carry the storage of the storage card substrate, and the first substrate has the baseband. In the direction of the plurality of feeding belts, the arrangement, the plurality of transporting sides -7-200922851, and the third simultaneous transporting conveyor, and the second processing conveyance belt is continuously disposed on the processing device side, and is perpendicular to the conveying direction The direction of the plurality of substrates is parallel to each other; and the moving unit has a mounting portion for placing the substrate on the individual transporting conveyor and the third simultaneous transporting conveyor, and traversing the individual transport The conveyor belt and the third simultaneous conveyance belt move the substrate in a direction perpendicular to the conveyance direction, and the lifting unit moves the loading unit, the individual conveyance belt, and the third simultaneous conveyance belt relatively upward. In the substrate transfer system of the present invention, by providing the first and second simultaneous conveyance belts, a plurality of substrates can be transported in parallel during the conveyance of the substrate, and the conveyance capability can be improved. Further, in the individual transporting conveyor, by providing the moving unit and the lifting unit, the substrate can be transferred one at a time to the processing apparatus. Therefore, it is possible to perform a processing apparatus for transferring substrates one at a time. Further, the moving unit can move the substrate between the processing device and the first and second storage cassettes by moving the substrate across the individual conveyance belt and the third simultaneous conveyance belt. The handling capacity of the substrate can be improved. [Embodiment] [First Embodiment] [Overall Configuration] Fig. 1 is a plan view showing a layout of a substrate transport system A according to an embodiment of the present invention, and Fig. 2 is a side view showing a substrate transport system A. -8- 200922851 In each figure, the arrows χ and γ are horizontal directions perpendicular to each other, and the arrow Ζ is the vertical direction (vertical direction). In the case of the present embodiment, the substrate transfer system A transports the glass substrate between the storage cassette 1 that accommodates the glass plate W of the square thin plate shape and the processing device 20 (only a part of which shows the glass substrate w). Further, the glass substrate W is indicated by a broken line in the second drawing, and is not shown in the first drawing. The processing apparatus 20 performs, for example, washing, drying, and other processing of a glass substrate. The processing device 20 is configured to accommodate a plurality of glass substrates therein, for example, a plurality of glass substrates W that can be accommodated in the cassette 1 . However, in the processing apparatus 20, the glass substrate W is carried in and out one at a time. The storage cassette 10 and the processing device 20 are disposed apart from each other in the X direction. Therefore, in the case of the present embodiment, the conveyance direction of the substrate of the substrate conveyance system A is the X direction, and the direction perpendicular to the conveyance direction is the Y direction. Further, the cassette 10 and the processing apparatus 20 are disposed such that the loading and unloading portions of the glass substrates W are faced to each other. The substrate transporting system A includes a transporting belt 30, an individual transporting conveyor 31, a moving unit 50, a lifting unit 60, and transfer conveyors 32 and 70, and a pair of lifting and lowering devices 80. [Storage Card] FIG. 3 is a perspective view of the cassette 10 . The storage cassette 10 is a cassette in which the glass substrate W can be accommodated in a plurality of stages in the Z direction. Further, Fig. 3 is a view showing a state in which the glass substrate W is not stored. In the case of this embodiment, the housing -9-200922851 cassette 10 is a frame body having a substantially rectangular shape by the plurality of column members 11 and the beam members 12. The arrangement interval of the column members 1 1 and the arrangement interval of the beam members 1 2 are set such that the transfer conveyor belt 3 2 can enter the storage cassette 1 from the lower side of the storage cassette 1 . The column member 11 is disposed in plural in the X direction and is provided in the same number in the Y direction. The pair of column members 11 separated in the Y direction are juxtaposed in the Z direction, and the wires 13 are stretched at a predetermined pitch. The space between the upper and lower sides of each of the wires 13 is a groove for accommodating the glass substrate w, and the glass substrate W is placed on the wire 13 in a slightly horizontal posture. Moreover, the grooves are formed in the same number as the wires 13 which are juxtaposed in the Z direction. In the case of this embodiment, the plurality of glass substrates W in one of the grooves are accommodated in parallel in the Y direction or the X direction. However, it is also possible to store only one glass substrate W in one groove. Further, in the present embodiment, the groove is formed by the steel wire, but other methods may be employed. However, by the use of the steel wire, the interval between the storage substrates can be reduced, and the storage efficiency of the storage cassette 10 can be improved. [Conveyor Belt] The receiver "I" is configured to simultaneously convey the conveyor belt 30, the individual transport conveyor belt 31, and the transfer conveyor belt 32. In the case of this embodiment, these conveyor belts are all arranged in a matrix arrangement of a plurality of roller conveyor belts. However, other types of conveyor belts such as belt conveyor belts are also available. Fig. 4 is a perspective view showing roller conveyor belt assemblies 100 and 110 of the respective conveyor belts 3, 31 and 32. As shown in the figure, in the present embodiment, -10-200922851, the glass substrates W having different sizes can be transported by the same system by the roller conveyor belt assemblies 100 and 1 10 of different sizes. The roller conveyor belt unit 1 includes a plurality of rollers 101 for mounting a glass substrate W (not shown in FIG. 4), a drive box 102 for driving the built-in roller 101, and a drive. A sensor 103 for the glass substrate W on the roller 101. The roller 101 rotates around the rotation axis in the Υ direction, and conveys the glass substrate w in the X direction. The roller conveyor belt unit 110 includes a plurality of rollers 1 1 1 for mounting a glass substrate W, and a drive case 1 1 2 for driving the built-in roller 1 1 1 and a detecting roller 1 1 A sensor 1 1 3 for the glass substrate W on the 1st. The roller 111 rotates around the rotation axis in the Υ direction, and conveys the glass substrate W in the X direction. The width of the roller conveyor belt assembly 11 in the γ direction is about half of the width of the roller conveyor belt assembly 100 in the Υ direction. Each of the roller conveyor belt assemblies 100 and each of the roller conveyor belt assemblies 11 can be independently driven. In the case of this embodiment, a plurality of roller conveyor belt assemblies 100 are disposed at both end portions in the weir direction, and two roller conveyor belt members 110 are disposed between the roller conveyor belt assemblies 1 and 这些. The four roller conveyor belt members 1 00 and 1 1 并 which are juxtaposed in the γ direction are also referred to as "roller belt assembly group". Fig. 4 is a view showing a state in which three "roller belt assembly groups" are arranged in the X direction. Referring to Figs. 1 and 2, in the present embodiment, the conveyor belt 30 and the individual conveyance belt 31 are simultaneously conveyed. And the transfer conveyor belt 32 is a structure in which six "roller conveyor belt assembly groups" are juxtaposed in the X direction. Simultaneous transportation -11 - 200922851 The conveyor belt 30 and the transfer conveyor belt 32' are continuously arranged in the χ direction. The glass substrate w is continuously conveyed in the X direction. Further, the conveyance belt 30, the individual conveyance belt 31, and the conveyance belt 32 are both placed in the conveyance direction of the glass substrate W (the X direction is perpendicular to the X direction). Width) Further, the simultaneous conveyance belt 30, the conveyance belt 31, and the transfer conveyor belt 32' have a plurality of glass substrate lengths (length in the X direction) that can be placed side by side in the glass substrate W direction (X direction). Fig. 5 is a plan view showing an example (two examples) of the positions of the glass substrate W in the cassette 10 and the positions of the glass substrates W1 and W2 on the transfer belt 32. In the example of Fig. 5, the four glass substrates W1 are accommodated in the respective grooves of the cassette 10, and the transfer belt 32 is placed in the X direction, and two glass substrates W1 are placed in the Y direction. In the following example of the fifth embodiment, six glass substrates W 2 are accommodated in each of the storage cassettes 1 , and the conveyor belt 32 is placed in the X direction and the glass substrate W2 is placed in the Y direction. The glass substrate W2 is a glass substrate having a smaller width in the γ direction than the glass plate W1. In the case of transporting the glass substrate W1, in the same manner as the transfer conveyance 1, the two glass substrates W1 can be placed in the Y direction on the simultaneous conveyance belt 30 and the individual conveyance belt 31. Further, in the case of transporting the glass substrate I; similarly to the transfer conveyor belt 3 2, the glass substrate W2 can be placed on the simultaneous conveyance belt 30 and the individual conveyance belt 31 in the γ direction. It is possible to transfer the glass W of a single width W (a glass: set 2, transfer 3 pieces of glass base 32, and convey 3 sets of anti-W2 -12- 200922851 in this embodiment) 'On the simultaneous conveyance belt 30, a plurality of glass substrates can be placed in the X and Y directions. At the same time, the transport belt 30 can be placed. Waiting for the conveyance of the glass substrate. When the storage cassette is emptied and exchanged, the glass substrate is carried out and the transport belt 30 is transported. After the exchange, the storage cassette 10 0 can be loaded again. Conveniently. Returning to Figures 1 and 2, the transfer conveyor 70 is a roller conveyor belt composed of a single sub-belt assembly. The transfer conveyor 70, in the processing device 20 and the individual conveyor belt The glass substrate is transferred between the three substrates. Further, the transfer substrate 70 is not provided, and the glass substrate W may be directly transferred between the individual transport belt 31 and the processing device 20. [Elevation device] Fig. 6 is a A perspective view of a pair of lifting devices 80, and FIG. 7 is a descending device 80 In the present embodiment, the storage cassette 1 is lifted and lowered in the Z direction by the lifting and lowering device 80, and the storage cassette 1 and the transfer belt 32 are relatively moved in the Z direction. However, the transfer is carried out. The structure with the lifting in the Z direction is also possible. In the case of the structure of the lifting and lowering conveyor belt 3 2 , the structure of the conveyor belt 30 is also raised and lowered at the same time. < In the case of the present embodiment, the lifting device 80 is disposed in the gamma direction in which the storage cassettes 10 are disposed in the gamma direction, and the cantilever supports the storage cassette 10. According to this configuration, the elevating device 80 can be made thinner. The feed 10 to the feed is the side of the W lift load 32. -13- 200922851 The lift device 80 is provided with a beam member 181 for placing the beam member 1 2 at the bottom of the cassette 匣1. Each of the beam members 81 of each of the lifting and lowering devices 80 moves up and down in the direction of the weirs in the same direction. The lifting device 80 is provided with a stay 82 extending in the weir direction, and a pair of rail members 836 and racks 8 extending in the weir direction are fixed to the inner surface of the strut 82. A beam member 80a is placed between the respective lifting devices 80 at the upper end of the strut 82. The beam member 81 is fixedly supported by a side surface of the support plate 85 through the bracket 85a. On the other side of the support plate 85, four sliding members 8 are movable along the rail member 83, and the beam member 81 and the support plate 85 are vertically moved by the guide of the rail member 83. The drive unit VIII is constituted by a motor 87a and a speed reducer 87b and is fixedly supported by a side surface of the support plate 88. The output shaft of the reduction gear 87b is connected to the pinion gear 89a disposed on the other side of the support plate 88 through the support plate 88. The plates 8 8 supported by the support plate 85 are fixed to each other with a predetermined interval, and the gaps of the support plate 85 and the support plate 88 are provided with pinions 89b to 89d. The pinion gears 8 9 b to 8 9 d are rotatably supported between the support plate 85 and the support plate 88, and the pinion gear 89b and the pinion gear 89c are driven to rotate by the rotation of the pinion gear 89a. The pinion gear 89d is rotated by the rotation of the pinion gear 89c. The pinion gears 8 9 b to 8 9 d are pinion gears of the same specification, and the two pinion gears 89b and 89d are meshed with the respective racks 84. However, if the driving assembly 87 is driven, the pinion gear 8 9 a will rotate, and by the driving force thereof, the driving assembly 87, the supporting plates 8 5 and 8 8 , the sliding member 86 and the beam member 81 may be physically upward or Moving downward, the storage cassette 10 loaded on the beam member 81 can be raised and lowered. In each of the lifting devices 80, -14-200922851' is provided with a sensor 8 1 a at the end of the beam member 81 to detect the deviation of the height of the beam members 8 1 from each other. The sensor 8 1 a is, for example, a photosensor including a light-emitting portion and a light-receiving portion, and as shown in FIG. 6 , the light is irradiated toward the γ direction to determine whether or not the light is received. If there is light, it means that the height of the lifting and lowering of the beam members 81 does not deviate from the light. When the deviation of the lift height is detected by the sensor 8 1 a , the deviation is resolved by the control of the motor 87 7 a. By providing the sensor 8 1 a to control the deviation of the height of the lifting and lowering of the beam member 81, it is possible to prevent the storage cassette 10 from tilting during lifting, and to store the cassette 1 〇 to move up and down more stably. Further, the two sensors 8 1 a provided in the respective beam members 81 may have either one of the light-emitting portion and the light-receiving portion, and the other may have the other configuration of the light-emitting portion and the light-receiving portion. Moreover, it is not limited to the photo sensor, and other sensors can also be used. Fig. 8 is a view showing a lifting operation of the storage cassette 1 产生 by the lifting device 80 when the glass substrate W is carried out from the storage cassette 10 . In addition, the illustration of the lifting device 80 is omitted in the same figure. The glass substrate W is carried out in a groove in which the glass substrate W is accommodated, and is sequentially carried out from the glass substrate W accommodated in the lowermost groove. First, as shown in the upper left diagram of Fig. 8, the storage cassette 10 is lowered by the lifting device 80 (not shown in Fig. 8) from the state in which the storage cassette 1 is positioned above the transfer conveyor 32. As shown in the upper right diagram of Fig. 8, the glass substrate W to be transported is placed on the transfer conveyor 32. At this time, the transfer conveyance belt 32 enters the storage cassette from below. The glass substrate W of the conveyance -15-200922851 is in a state of being floated on the wire 13 of the storage cassette 10, and is only the conveyed conveyor belt. 32 support status. Then, the transfer conveyance belt 32 is driven, and as shown in the lower left diagram of Fig. 8, the glass substrate W to be conveyed is carried out from the storage cassette 1匣. In the same manner, in the same manner, the lowering of the storage cassette 10 and the driving of the transfer conveyance belt 32 (the lower right diagram of Fig. 8) are carried out, and the glass substrate W is sequentially carried out from the lower side. The roller conveyor belt units 1A and 11'' constituting the transfer conveyor belt 32 are selectively driven in accordance with the position and size of the glass substrate to be transported. For example, when the two glass substrates W 1 located on the +Χ side are carried out, the three "roller belt assembly groups" located below the glass substrate W 1 are driven. In the case of the upper side of the fifth figure, for example, when one glass substrate W1 located on the +Χ side and located on the +Υ side is carried out, three "roller belt assembly groups" located under the glass substrate W1 are driven. Among the three roller conveyor belts 100 and 110 on the +Υ side. When the glass substrate W is carried into the storage cassette 10, it is an operation that is substantially opposite to the operation at the time of the above-described carry-out. The loading of the glass substrate w is performed in the order of the lowest groove among the grooves in which the glass substrate W is not accommodated. [Moving unit and lifting unit] Referring to Figs. 1 and 2, the moving unit 50 is provided with a base member 51 which is provided on both sides of the Y-transporting belt 31 in the Y direction. Each of the base members 51 is mounted with a pair of drive pulleys 53 that are rotationally driven by the motor 52 and the motor 52 from -16 to 200922851, and a pair of driven pulleys 54. The total number of the driving pulleys 5 3 and the driven pulleys 5 4 is four, and the belt 55 is wound between the driving pulleys 53 and the driven pulleys 54 of the respective groups. By driving the motor 52 to rotate the drive pulley 53, the belt 5 5 will travel. The belt 5 5 is a space in which the individual conveyance belts 3 1 extend in the Y direction, and each time passes between the "roller belt assembly groups" adjacent to each other. A mounting member 56 or 57 is fixed to each of the belts 55. Fig. 9 is a perspective view of the placing members 56 and 57. The placing members 56 and 57 are formed with hemispherical projections 56a and 57a on a plate-like member having a width similar to that of the belt 55. A positioning member 56b that forms a rectangular parallelepiped shape protruding from the projection 56a at the end portion on the +Y side of the mounting member 56 forms a positioning member of a rectangular parallelepiped shape protruding from the projection 57a at the end portion on the -Y side of the mounting member 57. The 57b crucible mounting members 56 and 57 function as a mounting portion for placing the glass substrate W on the individual conveyance belt 31, and support the glass substrate W from the lower side thereof. The placing members 5 6 and 5 7 ' are moved in the Y direction by the walking of the belt 55. The glass substrate W is placed on the projections 56a and 57a. When the protrusions are formed into a hemispherical shape, the contact area with the glass substrate W and the projections 5 6a and 57a is reduced, and the scratch of the glass substrate W is reduced. The positioning members 5 6 b and 5 7 b have their side faces abutting on the edge of the glass substrate W to position the glass substrate w (adjustment of the direction and position of the glass substrate W). In the case of the present embodiment, since one of the mounting members 56 or 57 is provided on each of the four belts 5 5, the positioning members 56b and 57b have a total of four, and are separated in the X direction and the Y direction. 4 places the positioning of the glass substrate W in 200922851. Next, the lifting unit 60 will be described with reference to Fig. 2 . The lifting unit 60 is disposed below each of the base members 51 for each of the base members 51. Therefore, in the case of the present embodiment, the lifting and lowering units 60 are respectively provided on both sides of the Y-direction of the individual transporting conveyor belts 3, and a total of two are provided. Each of the lifting and lowering assemblies 60 is provided with a base member 61. A plurality of pillars 62 are erected on the base member 61, and the pillars 62 are support base members 51. The pillar 62 is, for example, composed of a cylinder and a rod, and is expandable and contractible in the Z direction. The base member 61 is provided with a motor 63 and a pair of cam plates 64 that are rotated by the driving of the motor 63. The cam surface of the cam plate 64 abuts against the lower surface of the base member 51, and the base member 51 is raised and lowered by the rotation thereof. The pillar 62 is stretched and contracted as the base member 51 is lifted and lowered. In the present embodiment, the lifting operation of the two lifting units 60 is performed in synchronization to move the moving unit 50 up and down. Thereby, the placing members 56 and 57 are moved up and down in the Z direction, and the placing members 56 and 57 and the individual conveyance belt 31 are relatively moved in the Z direction. However, the individual conveyance belts 3 1 may be moved up and down in the Z direction, and the placing members 56 and 57 and the individual conveyance belts 3 1 may be relatively moved in the Z direction. Fig. 10 is a view showing the elevating operation of the elevating unit 60 and the elevating and lowering of the placing member 56 therewith. Further, the lifting and lowering of the placing member 57 is also the same. In Fig. 10, only the main part of the lifting unit 60 is shown. The elevating unit 6 is configured to elevate and lower the placing member 56 between the lowered position and the raised position. The left side of Fig. 10 shows the case of -18-200922851 in which the placing member 56 is at the lowered position. In this case, the elevating unit 60 is in a state in which the top of the cam plate 64 faces in the direction. The placing member 56 is such that the roller 1 〇 1 constituting the roller conveyor belt unit 1 of the individual conveying belt is located lower than the conveying height L of the conveying glass base W. The right side of Fig. 10 shows the case where the placing member 56 is at the raised position. In this case, the elevating unit 60 is in a state in which the top of the cam plate 64 faces in the direction. That is, the base member 51 is lifted by rotating the drive cam plate 64 of up to 63 by 90 degrees from the state shown in the left side view of the first turn. Thereby the moving assembly 50 rises. The protruding portion 56a of the placing member 56 is at a position higher than the conveying height L. The glass substrate W is placed on the protruding portion 56a away from the roller 101. Further, the belt 55 is located at a position lower than the conveyance degree L. When the glass substrate W on the individual conveyance belt 31 is moved in the Y direction by the moving member 50, the glass substrate W is placed on both the mounting structure 56 and the placing member 57. Further, the placing member 56 is placed in the mutually opposite directions (directions close to each other), and the glass substrate W is held by the positioning members 56b and 57b. In the state of the right side of the figure, for example, the positioning member 56b is moved in the _Y direction, and the positioning member 56b abuts against the edge of the glass substrate W. At this time, the glass sheet W is slid on the projection 56a. The glass substrate W is held by the positioning members 56b and 57b, and the direction of the glass base W is adjusted (defined). Thereby, when the direction of the glass base W is inclined during the conveyance, the direction can be corrected. Next, the mounting member 56 and the placing member 57 are moved in the same direction, and the glass plate of the Y 3 1 plate is pressed and the component is moved and the substrate is driven by the glass plate -19- 200922851 substrate. w is moved in the Y direction while keeping the positioned members 57b and 57b held. [Control Device] Fig. 1 is a block diagram showing the configuration of the control device 200 of the substrate transfer system A. The control device 200 includes a CPU 203 for controlling the entire substrate transport system A, a RAM 202 for providing a CPU 203 operating area for storing variable data, and a memory control program and control data. The fixed data is used in ROM203. The RAM 202 and the ROM 20 3 can use other memory means. The input interface (I/F) 204 is an interface between the CPU 201 and various sensors (e.g., sensors 81a, 1 1 3, etc.), and the CPU 201 obtains the detection results of various sensors through the input I/F 204. The output interface (I/F) 205' is an interface between the CPU 201 and various motors (for example, motors 52, 63, 87a, motors in the drive boxes 102, and 1 12), and the CPU 2 0 1 is controlled by the output I/F 204. motor. The communication interface (I/F) 206 is an interface for controlling the host computer 300 and the CPU 201 of the entire substrate processing apparatus including the substrate transfer system A, and the CPU 106 controls the substrate transfer system A according to the command from the host computer 300. . [Example of conveyance of the substrate of the substrate transfer system A] [Example of conveyance of the conveyance conveyor at the same time] Figs. 12 and 13 show the conveyance of the glass substrate from the transfer conveyor belt 32 to the same time -20- 200922851 A diagram of an example of the case of W 1 . By sequentially driving each of the "roller belt assembly groups", a plurality of glass substrates W1 can be simultaneously transported in parallel in the X direction. The example of Fig. 12 shows an example in which the glass substrate W1 on the transfer conveyor 32 is transported at the same time two times. In the example of Fig. 2, the two glass substrates W1 on the -X side are transported from the transfer conveyor 32 to the simultaneous conveyance belt 30. Then, the conveyance belt 30 is conveyed at the same time, and the two glass substrates W1 are simultaneously conveyed in the +X direction. On the other hand, the transfer conveyance belt 32 conveys the two glass substrates W1 on the -X side toward the simultaneous conveyance belt 30. Finally, four glass substrates W1 are placed on the conveyor belt 30 at the same time. In the example of Fig. 3, the glass substrate W1 on the transfer conveyor 32 is simultaneously conveyed in four cases. In the example of Fig. 13, the transfer conveyance belt 32 is conveyed in the +X direction while the glass substrate W1 is transported in the +X direction while the glass substrate W1 is transported in the +X direction. Finally, four glass substrates W1 are placed on the simultaneous conveyance belt 30. In the twelfth and thirteenth drawings, an example of transporting the glass substrate W1 will be described. However, the glass substrate W2 having a smaller size than the glass substrate W1 may be transported in the same manner. In addition, in FIGS. 12 and 13 , the case where the glass substrate W 1 is carried out from the transfer conveyance belt 32 to the conveyance belt 30 at the same time will be described, but the conveyance belt 30 is simultaneously conveyed toward the transfer conveyance belt 32. When the glass substrate W1 is conveyed, a plurality of glass substrates wi may be simultaneously transported in parallel in the γ direction. In the present embodiment, between the conveyance belt 30 and the transfer belt - 21 - 200922851 conveyor belt 32, a plurality of glass substrates can be simultaneously transported in parallel in the Y direction, and the glass for storing the cassette 1 〇 The efficiency of loading and unloading the substrate can be improved. In the present embodiment, the conveyor belt 32 to which the conveyor belt 30 is transported at the same time is constituted by the independently driven plurality of roller conveyor belt assemblies 100 and 110, but a plurality of glass substrates are juxtaposed in the Υ direction. In the case of transportation, the transfer conveyor belt 70 may be constituted by a single roller conveyor belt unit, and the conveyance belt 30 and the transfer conveyor belt 32 may be simultaneously conveyed. However, as in the present embodiment, the conveyor belt 30 and the transfer conveyor belt 32 are simultaneously conveyed, and the plurality of roller conveyor belt assemblies 1〇〇 and 110 are driven independently, and there is a handling aspect. The advantages of the variant can be increased. For example, a transport pattern in which a glass substrate is transported one at a time can also be selectively used. Further, for example, the glass substrate may be oriented in the +? direction on the +Υ side, and the glass substrate may be selectively moved in the X direction on the -Υ side, that is, the plurality of glass substrates may be transported in the opposite direction. [Example of transport of individual transport conveyor belts] In the present embodiment, a plurality of glass substrates that are carried out from the storage cassette 10 can be transported in parallel by transporting the transport belt 30 at the same time. That is, a plurality of glass substrates are arranged in parallel in the direction of the crucible, and these glass substrates can be simultaneously transported. Thereby, the carrying ability can be improved during transportation of the glass substrate. On the other hand, the processing apparatus 20 carries and removes the glass substrate one at a time. Therefore, it is necessary to convert the number of transports from a complex number to a single one. The individual transport conveyor belt 3 1, the moving unit 50 and the lifting unit 60 are converted into -22-200922851. Thereby, in the processing apparatus 20, the glass substrate can be transferred one at a time. [Loading of the glass substrate into the processing apparatus] Figs. 14 to 16 are diagrams showing an example in which one glass substrate W1 is transported from the individual transporting conveyor 31 to the processing apparatus 20 every time. The upper side of Fig. 4 shows a state in which two glass substrates W1 are simultaneously conveyed to the individual conveyance belts 31. Two glass substrates W 1 are placed on three "roller belt assembly groups" on the -X side. In this state, the glass substrate W1 of one of the two glass substrates W1 is conveyed in the +X direction as shown in the lower side of Fig. 4 . At this time, each of the roller conveyor belt assemblies 100 and 110 is selectively driven in accordance with the size of the glass substrate W1. For example, when the glass substrate W1 is transported from the upper side of the first aspect of Fig. 4, the six roller conveyor belt assemblies 1 and the six roller conveyor belt assemblies 1 1 on the + Y side driven. Next, the glass substrate W1 is moved in the Y direction to a position corresponding to the loading/unloading position of the processing apparatus 2A. Therefore, first, as shown in the upper side of Fig. 15, the placing members 56 and 57 located at the lowered position are located near the edge of the glass substrate W1. In the vicinity of the edge of the glass substrate W1 on the +Y direction side, the mounting member 56 is placed in the vicinity of the edge on the -Y direction side of the glass substrate W1. At this time, a part of the plurality of projections 56a and 57a is located below the glass substrate W1, and the positioning members 56b and 57b are not located below the glass substrate W1. Then, the mounting members -23-200922851 members 56 and 57 are raised to the raised position by the driving of the lifting unit 60 (not shown). Thereby, the glass substrate W1 is in a state of being located on the mounting members 56 and 57 away from the rollers 101 and 111 (the aspect on the right side of Fig. 10). After the placing members 56 and 57 are raised to the raised position, the placing member 56 is moved in the -Y direction by the placing member 56 in the -Y direction, and the glass is held by the positioning member 56b and the positioning member 57b. Substrate W1 (the lower side of Fig. 15). Thereby, the direction of the glass substrate W1 is adjusted. Further, at this time, the interval between the contact member 56b and the side surface of the positioning member 57b (the surface of the edge of the glass substrate W1) is preferably the same as or slightly wider than the width of the glass substrate W1. Then, the placing members 56 and 57 are moved in the same direction in the Y direction, and the glass substrate W1 is transported to the position corresponding to the loading/unloading position of the processing apparatus 20 (the upper side of Fig. 6). Thereby, the positioning of the glass substrate W1 of the processing device 20 is performed. In the case of the present embodiment, the position of the loading/unloading position of the processing device 20 is slightly centered in the Y direction of the individual transporting belt 31. However, the present invention is not limited thereto. For example, the end portion in the Y direction may be the loading/unloading position. . Next, the mounting members 56 and 57 are lowered to the lowered position by the driving of the elevating unit 60 (not shown). Further, as shown in the lower side of Fig. 6, the six roller conveyor belt assemblies 110' located below the glass substrate W1 and the transfer conveyor belt 7' are driven to convey the glass substrate W1 toward the processing apparatus 20. The other glass substrate W 1 remaining on the individual conveyance belt 31 is also conveyed toward the processing apparatus 20. Thus, the glass substrate W1 can be transported to the processing apparatus 20 one at a time. -24- 20 200922851 It is possible to use the same procedure, such as the first case, if the glass substrate W2 shown in the following figure of Fig. 5 is moved to the processing device by the 20 pieces of the 20 pieces that are moved. Programs from 1 7 to 2 0 can also be used. Figs. 17 to 20 are views showing an example in which one glass substrate W2 is transported from the individual transport belt 31 to the processing device 20 at a time. The upper side of Fig. 17 shows a state in which three glass substrates W2 are simultaneously conveyed on the individual conveyance belts 31. The three glass substrates W2 are placed on three "roller belt assembly groups" placed on the -X side. From this state, the three glass substrates W2 are simultaneously transported in the +X direction as shown on the lower side of Fig. 17. Next, the center glass substrate W2 is positioned at a position corresponding to the loading/unloading position of the processing apparatus. Therefore, the mounting structures 56 and 57 located at the lowering position are placed near the edge of the center glass substrate W2, and then the center glass substrate W2 is placed on the mounting member and 57 by the rising to the rising position. Further, as shown in the upper side of FIG. 18, the mounting member 56 is moved in the +Y direction by moving the mounting member 56 in the -Y direction, and the glass substrate W2 is held by the positioning member 56b and the positioning member 57b. Positioning into the glass substrate W 2 . Then, by the driving of the lifting unit 60 (not shown), the carrier members 56 and 57 are lowered to the lowered position. Further, as shown in Fig. 18 below, the six roller conveyor belts 110 located below the glass substrate W2 and the transfer conveyor belt 7 are driven to convey the glass substrate W2 toward the processing apparatus. Then, the two glass-25-200922851 sheets W2 remaining on the individual conveyance belts 31 are sequentially conveyed toward the processing apparatus 20. First, one of the plates W2 is placed on the placing members 56 and 57, and the positioning member 57b is gripped as shown in the upper side of Fig. 9 and moved to the position corresponding to the loading/unloading position of the process|. Thereafter, the six roller conveyor belt units and the transfer conveyor belt 70, which are moved below the glass substrate W2 on the lower side of the ninth drawing, carry the glass substrate W2 toward the processing apparatus 20, and remain in the individual conveyance conveyance. One plate W2 on the belt 31 is conveyed toward the processing device 20. First, the glass substrate W2 is placed on the placing members 56 and 57, and moved to the position where the processing device 20 is carried in, as shown by the upper side of the positioning members 56b and 57b. Thereafter, the six roller conveyor belt units 110 that are positioned below the glass base on the lower side of the second drawing and the glass substrate W2 that transports the conveyor belt 70 are conveyed toward the processing apparatus 20. [Removal from the glass substrate of the processing apparatus] Figs. 21 to 24 show that one glass substrate W1 is transported from the processing apparatus 20 to the transport belt 31 every time, and is juxtaposed in the Y direction on the individual transport belt 31. The upper side of Fig. 21 of the example of the plurality of glass substrates W1 is a view showing that the first glass substrate W1 is carried out by the apparatus 20. In this case, drive: 6 roller conveyor belt assemblies on the +X side of the transfer conveyor belt individual transport conveyor belt 3 1 such that the glass substrate W 1 is positioned on the +X side of the individual transport conveyor belt 3 1 0 on. Next, the glass substrate W1 is moved in the Y direction. Therefore, the glass base 56b and the special 20 show, drive 110, and transport. The glass base is placed on the first position plate W2, and the glass is transported separately. From the processing 70, and 110, 6 rolls, first, -26-200922851, as shown on the lower side of Fig. 2, is placed in the vicinity of the edge of the glass substrate W1 at the lowered position. The drive of the member 60 (not shown) will place the member at a position of 65 liters. Thereby, the glass substrate W1 is in a state of being located away from the mounting members 56 and 57. After the load is raised to the rising position, the mounting member 57 is placed in the +Y direction, and the glass substrate W1 is held by the positioning member 57b (the upper side of FIG. 22, the direction of the glass substrate W1 is adjusted) .

接著，將載置構件5 6及5 7朝Y方 移動，將玻璃基板W1朝Y方向移動。班 依據其尺寸，移動至可並列搬運複數玻璃 。如第22圖的下側所示的例中，將玻璃3 向移動，移動至個別搬運輸送帶3 1的+Y 接著，藉由昇降組件60 (無圖示） 構件56及57下降至下降位置。且、如第 示將玻璃基板W 1 -朝X方向移動，使玻璃 別搬運輸送帶3 1的-X側且+Y側的3個滚 及3個滾子輸送帶件110上。當此移動 側的6個滾子輸送帶組件100及6個滾子 接著，如第23圖的下側所示，第2 是從處理裝置20搬出。與第1枚玻璃基 樣，驅動移載輸送帶70、及個別搬運輸丢 勺載置構件5 6及 且，藉由昇降組 及5 7上昇至上 滾子1 01及11 1 置構件56及57 朝-Y方向，將載 56b及定位構件 的態樣）。由此 向彼此朝同方向 ?璃基板w1，是 基板W1的位置 S板W1朝+ Y方 方向的端部。 的驅動，將載置 ;23圖的上側所 基板W1位於個 ;子輸送帶件100 時，驅動位於+Y 輸送帶組件1 1 0 枚玻璃基板W 1 板W1的搬運同 S帶31的+X側 -27- 200922851 的6個滾子輸送帶組件1 1 〇 ’使第2枚玻璃基板W1位於 個別搬運輸送帶3 1的+X側的6個滾子輸送帶組件1 1 0上 〇 接著，藉由昇降組件6 0 (無圖示）及移動組件5 0的 驅動，將第2枚玻璃基板W1朝Y方向移動。第2枚玻璃 基板W1，是如第24圖的上側所示’朝第1枚玻璃基板 W1相反方向（-Y方向）移動。接著’將第2枚玻璃基板 Wl-朝X方向移動’使玻璃基板W1位於個別搬運輸送帶 3 1的-X側且-Y側的3個滾子輸送帶件1 0 0及3個滾子輸 送帶件i丨〇上。由此，2枚玻璃基板W1，是在個別搬運 輸送帶31上，成爲並列於Y方向的載置狀態。之後，成 爲可在同時搬運輸送帶30同時搬運2枚玻璃基板W1。 將第5圖的下圖所示的玻璃基板W2從處理裝置20 搬出情況也可以採用同樣的程序’如第2 5圖至第2 8圖所 示的程序也可以採用。第25圖至第28圖，是從處理裝置 2〇朝個別搬運輸送帶31每次搬運一枚玻璃基板W2，在 個別搬運輸送帶3 1上’朝Y方向並列複數玻璃基板W 2 的例的圖。 首先，如第2 5圖的上側所示’第1枚玻璃基板W 2 是從處理裝置20搬出。此情況’驅動移載輸送帶7〇、及 個別搬運輸送帶3 1的+ X側的6個滾子輸送帶組件1 1 0， 使第1枚玻璃基板W2位於個別搬運輸送帶3 1的+X側的 6個滾子輸送帶組件1 1 〇上。 接著，藉由昇降組件60 (無圖示）及移動組件5 0的 -28- 200922851 驅動，如第2 5圖的下側所示，調整第1枚玻璃基板W2 的方向。而且，如第26圖的上側所示，藉由移動組件50 的驅動，玻璃基板W2將朝Y方向移動。在第26圖的上 側的例中朝+Y方向移動，3個滾子輸送帶件1 〇〇上在第1 枚玻璃基板W2將位置。 接著，如第26圖的下側所示，第2枚玻璃基板W2 是從處理裝置20搬出。與第1枚玻璃基板W2的搬運同 樣，驅動移載輸送帶70、及個別搬運輸送帶3 1的+X側 的6個滾子輸送帶組件1 10，使第2枚玻璃基板W2位於 個別搬運輸送帶3 1的+ X側的6個滾子輸送帶組件1 1 〇上 〇 接著，藉由昇降組件6 0 (無圖示）及移動組件5 0的 驅動，如第27圖的上側所示，調整第2枚玻璃基板W2 的方向。而且，如第27圖的下側所示，藉由移動組件50 的驅動，將第2枚玻璃基板W2朝Y方向移動。在第27 圖的下側的例中朝+Y方向移動，使第2枚玻璃基板W2 位於3個滾子輸送帶件1 〇〇上。 接著’如第2 8圖的上側所示，3枚第的玻璃基板W 2 是從處理裝置20搬出。與第1枚及第2枚玻璃基板W2 的搬運同樣’驅動移載輸送帶70、及個別搬運輸送帶31 的+X側的6個滾子輸送帶組件1 1 〇，使3枚第的玻璃基 板W2位於個別搬運輸送帶3 1的+ X側的6個滾子輸送帶 組件1 1 〇上。 接著，藉由昇降組件60及移動組件50的驅動，如第 -29- 200922851 28圖的下側所示，調整3枚第的玻璃基板W2的方向。由 此，3枚玻璃基板W2，是在個別搬運輸送帶3 1上，成爲 並列於Y方向的載置狀態。3枚玻璃基板W2，是載置於 + X側的3個「滾子輸送帶組件組」上。之後，3枚玻璃 基板W2，是經由-X側的3個「滾子輸送帶組件組」，同 時被同時搬運輸送帶30搬運。 又，本實施例的情況，對應處理裝置2 0的搬入出位 置的位置，雖爲個別搬運輸送帶31的Y方向的略中央， 但不限定於此，搬例如Y方向的端部的入出位置也可以 [玻璃基板的尺寸的界定] 在本實施例中，如上述，可以進行不同尺寸的玻璃基 板W1及W 2的搬運。這是依據玻璃基板的尺寸、及搬運 位置，藉由選擇性地驅動構成個別搬運輸送帶3 1的滾子 輸送帶組件100及110、以及驅動移動組件50而可實現 。進行不同尺寸的玻璃基板的搬運的情況，有需要界定其 玻璃基板的尺寸，控制裝置2 0 0的控制上有需要設定尺寸 〇 設定玻璃基板的尺寸的第1方法，在一個收納卡匣 1 0中，只收納相同尺寸的玻璃基板，以收納卡匣1 0單位 ，在控制裝置200的控制上設定玻璃基板的尺寸。此情況 ，前提是搬運基板搬運系統 A上的玻璃基板是全部相同 尺寸的玻璃基板。 -30- 200922851 設定玻璃基板的尺寸的第2方法，是在個別 帶31，逐一檢出玻璃基板的尺寸，在控制裝置 制上，個別設定玻璃基板的尺寸。此情況，搬運 系統A上的玻璃基板是全部相同尺寸的玻璃基 ，例如在收納卡匣1 〇的各槽收納不同尺寸的玻 可能。且，將不同尺寸的玻璃基板收納於一條槽 〇 檢出玻璃基板的尺寸用的感測器，可以設於 輸送帶31的X方向的兩端部。例如可以設置第 的感測器90、9 1。感測器90，是檢出從處理裝肩 的玻璃基板的尺寸。在第1圖，感測器90是於 離地設置一對，玻璃基板W1被搬出的情況，雙 通（ON )，玻璃基板W2被搬出的情況，只有一 通（ON )或雙方成爲斷開（OFF )。感測器91 從同時搬運輸送帶3 0朝個別搬運輸送帶3 1搬運 板的尺寸。感測器9 1也是於Y方向分離地設置 璃基板W1被搬運的情況，雙方成爲導通（ON) 板W2被搬運的情況，只有一方成爲導通（ON ) 成爲斷開（0 F F )。 [第2實施例] 在上述第1實施例中，雖說明在一個收納_ 及一個處理裝置20之間搬運玻璃基板的例’但 收納卡匣1 0、及一個處理裝置2 0之間搬運玻璃 搬運輸送 200的控 基板搬運 板也可以 璃基板也 內也可能 個別搬運 1圖所示 ^ 20搬出 Y方向分 方成爲導 方成爲導 ，是檢出 的玻璃基 一對，玻 ，玻璃基 或是雙方 e 匣 1〇、 是在複數 基板也可 -31 - 200922851 以。第29圖是本發明的其他的實施例的基板搬運系統b 的佈局配置的平面圖。在同圖中，對於與基板搬運系統A 相同的結構’是附加相同參照符號省略說明，只有說明不 同的結構。 在基板搬運系統B中，並設2個收納卡匣10。2個收 納卡匣10是並列配置於Y方向。昇降裝置80，移載輸送 帶32、同時搬運輸送帶30及個別搬運輸送帶31，是在各 收納卡匣1 〇並列配置於X方向。移載輸送帶70及處理 裝置2 0，是與各收納卡匣1 〇在X方向分離配置，配置於 —方的個別搬運輸送帶3 1的+X方向的端部側。 移動組件5 0 ’是橫跨2個個別搬運輸送帶3 1配置。 即’在一對的基座構件5 1之間配置2個個別搬運輸送帶 31，各皮帶55，是橫斷2個個別搬運輸送帶31。由此， 固定於各皮帶55上的合計4個載置構件56及57，可以 移動於2個個別搬運輸送帶31上。又，在各基座構件51 的下方，配設未圖示的昇降組件60。 在基板搬運系統B，移動組件5 0，在個別搬運輸送帶 3 1上不只朝Y方向移動玻璃基板，在2個個別搬運輸送 帶3 1之間也將玻璃基板朝γ方向移動。第3 〇圖，是在2 個個別搬運輸送帶3 1上的玻璃基板W的搬運態樣的說明 圖。 如同圖所示，個別搬運輸送帶3 1，是將玻璃基板W 朝X方向搬運，移動組件5 0，是將玻璃基板W朝Y方向 移動。移動組件5 0，是也在個別搬運輸送帶31間移動玻 -32- 200922851 璃基板W。在個別搬運輸送帶31上的搬運枚數的變換， 是與上述第1實施例同樣。 在本實施例中，移動組件5 0是藉由橫跨2個個別搬 運輸送帶31移動玻璃基板W，就可在處理裝置20、及2 個收納卡匣1 0之間各別搬運玻璃基板W，玻璃基板W的 搬運能力可以更提高。 又’在本實施例中，收納卡匣10雖爲2個，但是收 納卡匣1 0爲3個以上也可以。此情況，同時搬運輸送帶 3 0、個別搬運輸送帶3 1等可以設在各收納卡匣1 〇。而且 ’移動組件，可以橫跨各個別搬運輸送帶31移動玻璃基 板W。 [第3實施例] 在上述第2實施例中，移動組件5 0，是將玻璃基板 W每次一枚地朝Y方向移動的結構，但是將複數枚玻璃 基板W同時朝Y方向移動的結構也可以。 第31圖是本發明的其他的實施例的基板搬運系統B’ 的佈局配置的平面圖。在同圖中，對於與基板搬運系統B 相同結構，是附加相同參照符號省略說明，只有說明不同 的結構。 如上述，個別搬運輸送帶31可朝X方向載置複數枚 玻璃基板W ( 2枚）。本實施例的移動組件50’，是將朝 X方向並列的複數枚玻璃基板w同時朝Y方向移動。 移動組件5 0 ’，是設有合計8條皮帶5 5，+X側的4 -33- 200922851 條皮帶55，是被載置於+X側的6個滾子輸送帶. 個滾子輸送帶110上供搬運玻璃基板W所使用， 4條皮帶55，是被載置於-X側的6個滾子輸送帶 個滾子輸送帶1 1 0上供移動玻璃基板W所使用。 在各皮帶55上，分別設置1個載置構件56 ，對於一枚玻璃基板W使用2個載置構件56及2 構件57。本實施例的情況，各載置構件56是同時 且，各載置構件57也同時移動。但是，也可採用 動的結構。 移動組件5 0 ’的基座構件5 1 ’，是X方向的長 上述基座構件5 1更擴大，分別搭載有··馬達52、 動帶輪53及4個從動帶輪54。又，在各基座構γ 下方配設有未圖示的昇降組件60。 第32圖及第33圖，是在2個個別搬運輸送窄 的玻璃基板W的搬運態樣的說明圖。如第3 2圖所 本實施例中，在個別搬運輸送帶31及處理裝置20 可進行朝X方向連續的複數玻璃基板W的搬入出 ，如第3 3圖所示’移動組件5 0 ’，可以在個別搬 帶31之間’將朝X方向並列的複數枚玻璃基板W Υ方向移動。 在本實施例中’藉由將朝X方向並列的複數 基板W同時朝Υ方向移動，玻璃基板W的搬運能 更提高。 100 及 6 -X側的 100 及 6 或是57 個載置 F移動， 丨個別移 :度是比 4個驅 戶51’的 费31上 示，在 之間， 。而且 運輸送 同時朝 枚玻璃 力可以 -34- 200922851 [第4實施例] 在上述第2實施例中，藉由移動組件5 0及昇降組件 6 0，在個別搬運輸送帶3 1之間將玻璃基板W朝Y方向移 動的結構，且，在同時搬運輸送帶3 0之間將玻璃基板w 朝Y方向移動的結構也可以。 第3 4圖是本發明的其他的實施例的基板搬運系統B” 的佈局配置的平面圖。在同圖中，對於與基板搬運系統B 相同的結構，是附加相同參照符號省略說明，只有說明不 同的結構。 在本實施例中，在同時搬運輸送帶30也設置上述第 3實施例所說明的移動組件50’。又，設在同時搬運輸送 帶3 0的移動組件5 0 ’的各基座構件5 1 ’的下方是配設有未 圖示的昇降組件6 0。且，可取代移動組件5 0 ’，將上述第 1及第2實施例的移動組件5 0設在同時搬運輸送帶3 0也 可以。 在本實施例中，因爲在同時搬運輸送帶30之間也可 以將玻璃基板W朝Y方向移動，所以例如在收納卡匣1 0 之間移載玻璃基板W的情況時，不需經由個別搬運輸送 帶31就可以搬運玻璃基板W。且，在本實施例中藉由使 用移動組件50’，在同時搬運輸送帶30之間，可將朝X 方向並列的複數枚玻璃基板W同時朝Y方向移動，玻璃 基板W的搬運能力可以更提高。 又，對於以上說明的第2實施例至第4實施例的基板 搬運系統B、B’、B”，是2個個別搬運輸送帶31之中不 -35- 200922851 鄰接於處理裝置20的+Y側的個別搬運輸送帶3 1非必定 會要求將玻璃基板個別搬運。因此’可取代+Υ側的個別 搬運輸送帶31，使具有可並列搬運複數枚玻璃基板W的 寬度，但是不具有將玻璃基板W個別搬運的功能的輸送 帶（只有作爲同時搬運輸送帶的功能的輸送帶）也可以。 此情況，該輸送帶，即使是由單一個滾子輸送帶組件所構 成也可以，由並列於X方向的複數滾子輸送帶組件所構 成也可以。 [第5實施例] 在上述第1實施例中，收納卡匣1 0是由Υ方向收納 複數玻璃基板，移載輸送帶32是朝Υ方向載置複數玻璃 基板同時搬運的結構，但是每次1枚地搬運的結構也可以 。但是，此情況，需要變換玻璃基板的搬運枚數。第3 5 圖是本發明的其他的實施例的基板搬運系統C的佈局配置 的平面圖。在同圖中，對於與基板搬運系統Α相同的結 構，是附加相同參照符號省略說明，只有說明不同的結構 。且，在同圖中，是省略處理裝置20、移載輸送帶70、 移動個別搬運輸送帶3 1及個別搬運輸送帶3 1上的玻璃基 板的移動組件50及昇降組件60。 本實施例的收納卡匣1 0 ’，是在各槽收納1枚玻璃基 板W。從收納卡匣1 〇，進行玻璃基板w的搬出/搬入的移 載輸送帶32’是由3個滾子輸送帶件1〇〇所構成，將玻璃 基板W每次1枚地搬運。 -36- 200922851 在移載輸送帶32,及同時搬運輸送帶3〇之間設有 別搬運輸送帶31’。個別搬運輸送帶31，，是與上述個 搬運輸送帶3 1相同的結構。在個別搬運輸送帶3丨，中 有移動組件5 0 ’。移動組件5 〇，，是與上述移動組件5 〇 同的結構。在各移動組件5 0 ’的基座構件5 1的下方設 與上述昇降組件60相同結構的昇降組件（未圖示）。 即’本實施例’也在基板搬運系統A，將上述個別 運輸送帶3 1、移動組件5 0及昇降組件6 0設在收納卡 側。且’從收納卡匣1 0，搬出玻璃基板W的情況，是藉 移載輸送帶3 2 ’每次一枚地搬出玻璃基板w，在個別搬 輸送帶31’上朝Y方向並列載置複數枚玻璃基板w，朝 時搬運輸送帶30被並列搬運。朝收納卡匣1〇,搬入玻 基板W的情況，是從個別搬運輸送帶3 1 ’每次一枚地將 璃基板W搬運至移載輸送帶32，，朝收納卡匣10,搬入' [第6實施例] 在上述第1至第5實施例中，雖是藉由皮帶傳導機 將移動組件5 0、5 0 ’的載置構件5 6及5 7移動的結構， 是其他的機構也可以採用。第3 6圖，是顯示載置構件 及57的移動機構的其他例的圖。第36圖的移動機構， 使用滾珠螺桿機構。在Y方向配設有軌道構件5 0 1、滾 螺桿5 02，這些是限定載置構件56及57的移動軌道。 滾珠螺桿502中，球螺帽5 03螺合，並且球螺帽5 03可 軌道構件501上滑動。載置構件56及57是固定於球螺 個 別 設 相 有 搬 匣 由 運 同 璃 玻 構 但 56 是 珠 在 在 帽 -37- 200922851 503 上。 且’是藉由未圖示的馬達使滾珠螺桿5〇2旋轉，載置 構件50及57會朝Y方向移動。另外，使用線形馬達的 移動機構也可以採用。 且’在上述第1實施例中，昇降組件60是昇降移動 組件5 0、5 0 ’整體的結構，但是載置構件5 6及5 7可昇降 即可。例如第3 6圖的移動機構的例，在載置構件5 6及 5 7及球螺帽5 0 3之間朝Z方向設置伸縮致動器，使載置 構件56及57昇降的結構也可以。 【圖式簡單說明】 [第1圖]本發明的一實施例的基板搬運系統A的佈局 配置的平面圖。 [第2圖]基板搬運系統A的側面圖。 [第3圖]收納卡匣10的立體圖。 [第4圖]構成各輸送帶30、31及32的滾子輸送帶組 件100及1 10的立體圖。 [第5圖]收納卡匣1 0中的玻璃基板W的收納態樣及 移載輸送帶3 2上的玻璃基板W的位置的例（2例）的平 面圖。 [第6圖]一對的昇降裝置80的立體圖。 [第7圖]昇降裝置80的分解立體圖。 [第8圖]將玻璃基板W從收納卡匣1 0搬出的情況時 的由昇降裝置8 0所產生的收納卡匣1 0的昇降動作的圖。 -38- 200922851 [第9圖]載置構件56及57的立體圖。 [第10圖]昇降組件60的昇降動作、及隨其之載置構 件56的昇降的圖。 [第11圖]基板搬運系統A的控制裝置200的結構的 方塊圖。 [第12圖]從移載輸送帶32朝同時搬運輸送帶3〇搬 運玻璃基板W 1的情況的態樣的例的圖。 [第13圖]從移載輸送帶32朝同時搬運輸送帶搬 運玻璃基板W 1的情況的態樣的其他例的圖。 [第14圖]從朝個別搬運輸送帶31處理裝置20每次 搬運一枚玻璃基板W1的例的圖。 [第15圖]從朝個別搬運輸送帶31處理裝置20每次 搬運一枚玻璃基板W 1的例的圖。 [第16圖]從朝個別搬運輸送帶31處理裝置20每次 搬運一枚玻璃基板W 1的例的圖。 [第17圖]從朝個別搬運輸送帶31處理裝置20每次 搬運一枚玻璃基板W2例的圖。 [第18圖]從朝個別搬運輸送帶31處理裝置20每次 搬運一枚玻璃基板W2例的圖。 [第19圖]從朝個別搬運輸送帶31處理裝置20每次 搬運一枚玻璃基板W2例的圖。 [第20圖]從朝個別搬運輸送帶31處理裝置20每次 搬運一枚玻璃基板W2例的圖。 [第21圖]從處理裝置20朝個別搬運輸送帶31每次 -39- 200922851 搬運一枚玻璃基板W1，在個別搬運輸送帶31上，朝γ 方向並列複數玻璃基板W 1的例的圖。 [第22圖]從處理裝置20朝個別搬運輸送帶31每次 搬運一枚玻璃基板W1，在個別搬運輸送帶31上，朝γ 方向並列複數玻璃基板W1的例的圖。 [第23圖]從處理裝置20朝個別搬運輸送帶31每次 搬運一枚玻璃基板W1，在個別搬運輸送帶31上，朝γ 方向並列複數玻璃基板W 1的例的圖。 [第24圖]從處理裝置20朝個別搬運輸送帶31每次 搬運一枚玻璃基板W1，在個別搬運輸送帶31上，朝γ 方向並列複數玻璃基板W 1的例的圖。 [第25圖]從處理裝置20朝個別搬運輸送帶31每次 搬運一枚玻璃基板W2，在個別搬運輸送帶3 1上，朝γ 方向並列複數玻璃基板W2的例的圖。 [第26圖]從處理裝置20朝個別搬運輸送帶31每次 搬運一枚玻璃基板W2，在個別搬運輸送帶3 1上，朝γ 方向並列複數玻璃基板W2的例的圖。 [第27圖]從處理裝置20朝個別搬運輸送帶31每次 搬運一枚玻璃基板W2，在個別搬運輸送帶3 1上，朝γ 方向並列複數玻璃基板W2的例的圖。 [第28圖]從處理裝置20朝個別搬運輸送帶31每次 搬運一枚玻璃基板W2，在個別搬運輸送帶31上，朝γ 方向並列複數玻璃基板W2的例的圖。 [第2 9圖]本發明的其他的實施例的基板搬運系統β -40- 200922851 的佈局配置的平面圖。 [第3 0圖]在2個個別搬運輸送帶31上的玻璃基板W 的搬運態樣的說明圖。 [第3 1圖]本發明的其他的實施例的基板搬運系統B ’ 的佈局配置的平面圖。Next, the placing members 56 and 57 are moved toward the Y side, and the glass substrate W1 is moved in the Y direction. The shift is based on its size and can be moved to carry multiple glass in parallel. In the example shown on the lower side of Fig. 22, the glass 3 is moved and moved to +Y of the individual conveyance belt 3 1 and then lowered to the lowered position by the lifting unit 60 (not shown) members 56 and 57. . Further, as shown in the above, the glass substrate W 1 - is moved in the X direction, and the glass is conveyed on the -X side of the conveyor belt 31 and the three rolls on the +Y side and the three roller conveyor belt members 110. The six roller conveyor belt assemblies 100 and the six rollers on the moving side are then carried out from the processing device 20 as shown in the lower side of Fig. 23. And the first glass base, driving the transfer conveyor 70, and the individual transporting and transporting member 56, and rising to the upper rollers 1 01 and 11 by the lifting and lowering members and the members 56 and 57 In the -Y direction, the 56b and the positioning member will be loaded). Thereby, the glass substrate w1 is in the same direction, and the position of the substrate W1 is the end of the S plate W1 in the +Y direction. The drive is to be placed; the substrate W1 on the upper side of the figure 23 is located; and the sub-belt 100 is driven to drive the +Y conveyor belt assembly 1 10 glass substrates W 1 the transport of the plate W1 is +X of the S-band 31 Side -27-200922851 6 roller conveyor belt assemblies 1 1 〇 'The second glass substrate W1 is placed on the 6 roller conveyor belt assembly 1 1 0 on the +X side of the individual conveying conveyor belt 3 1 The second glass substrate W1 is moved in the Y direction by the driving of the lifting unit 60 (not shown) and the moving unit 50. The second glass substrate W1 is moved toward the opposite direction (-Y direction) of the first glass substrate W1 as shown in the upper side of Fig. 24. Next, 'moving the second glass substrate W1- toward the X direction', the glass substrate W1 is positioned on the -X side of the individual conveyance belt 31 and on the -Y side, three roller conveyor belt members 100 and three rollers Conveyor belt member i. As a result, the two glass substrates W1 are placed on the individual conveyance belts 31 in a state of being placed in the Y direction. Thereafter, it is possible to convey the two glass substrates W1 while conveying the conveyor belt 30 at the same time. The same procedure can be applied to the case where the glass substrate W2 shown in the lower diagram of Fig. 5 is carried out from the processing apparatus 20, and the program shown in Figs. 25 to 28 can also be employed. Figs. 25 to 28 are diagrams in which one glass substrate W2 is transported from the processing device 2 to the individual transport belt 31, and the glass substrate W 2 is stacked in the Y direction on the individual transport belt 31. Figure. First, as shown in the upper side of Fig. 25, the first glass substrate W 2 is carried out from the processing apparatus 20. In this case, the 6 transfer roller belts 7〇 and the 6 roller conveyor belt assemblies 1 1 0 on the +X side of the individual conveyance belts 3 1 are driven, and the first glass substrate W2 is placed in the individual conveyance belts 3 1 + The six roller conveyor belt assemblies 1 on the X side are on top. Next, the lifting unit 60 (not shown) and the moving unit 308 of -28-200922851 are driven, and the direction of the first glass substrate W2 is adjusted as shown in the lower side of Fig. 25. Further, as shown in the upper side of Fig. 26, the glass substrate W2 is moved in the Y direction by the driving of the moving unit 50. In the upper example of Fig. 26, the movement is moved in the +Y direction, and the three roller conveyor members 1 are placed on the first glass substrate W2. Next, as shown in the lower side of FIG. 26, the second glass substrate W2 is carried out from the processing apparatus 20. Similarly to the conveyance of the first glass substrate W2, the transfer conveyor belt 70 and the six roller conveyor belt units 1 on the +X side of the individual conveyance belts 31 are driven to separate the second glass substrate W2. The six roller conveyor belt assemblies 1 1 on the + X side of the conveyor belt 3 1 are then driven by the lifting assembly 60 (not shown) and the moving assembly 50, as shown on the upper side of Fig. 27. The direction of the second glass substrate W2 is adjusted. Further, as shown in the lower side of Fig. 27, the second glass substrate W2 is moved in the Y direction by the driving of the moving unit 50. In the example of the lower side of Fig. 27, the movement is performed in the +Y direction, and the second glass substrate W2 is placed on the three roller conveyor members 1A. Next, as shown in the upper side of Fig. 28, the three first glass substrates W 2 are carried out from the processing apparatus 20. Similarly to the conveyance of the first and second glass substrates W2, the transfer conveyor belt 70 and the six roller conveyor belt units 1 1 on the +X side of the individual conveyance belt 31 are driven to make three glass sheets. The substrate W2 is located on the six roller conveyor belt assemblies 1 1 + on the +X side of the individual conveying conveyor belt 3 1 . Next, by the driving of the elevating unit 60 and the moving unit 50, the directions of the three glass substrates W2 are adjusted as shown in the lower side of the drawing of Figs. -29-200922851. As a result, the three glass substrates W2 are placed on the individual conveyance belts 31, and are placed in the Y direction. The three glass substrates W2 are placed on three "roller belt assembly groups" on the +X side. Thereafter, the three glass substrates W2 are conveyed by the simultaneous conveyance belt 30 via the three "roller belt assembly groups" on the -X side. In the case of the present embodiment, the position of the loading/unloading position of the processing device 20 is slightly centered in the Y direction of the individual transporting belt 31. However, the present invention is not limited thereto, and the position of the end portion in the Y direction is carried out. [Definition of Dimensions of Glass Substrate] In the present embodiment, as described above, conveyance of glass substrates W1 and W 2 of different sizes can be performed. This is achieved by selectively driving the roller conveyor belt assemblies 100 and 110 constituting the individual conveyance belts 31 and driving the movement unit 50 depending on the size of the glass substrate and the conveyance position. In the case of transporting glass substrates of different sizes, it is necessary to define the size of the glass substrate, and the first method of setting the size and setting the size of the glass substrate is required for the control of the control device 2000, in one storage cassette 10 In the case, only the glass substrate of the same size is accommodated, and the cassette is accommodated in units of 10 units, and the size of the glass substrate is set under the control of the control device 200. In this case, the premise is that the glass substrate on the substrate transport system A is a glass substrate of the same size. -30- 200922851 The second method of setting the size of the glass substrate is to individually measure the size of the glass substrate in the individual tape 31, and to individually set the size of the glass substrate in the control device. In this case, the glass substrates on the transport system A are all glass substrates of the same size, and for example, different sizes of glass may be accommodated in the respective slots of the cassette 1 . Further, the glass substrates of different sizes are housed in one groove. The sensor for detecting the size of the glass substrate may be provided at both end portions of the conveyor belt 31 in the X direction. For example, the first sensors 90, 91 can be provided. The sensor 90 is for detecting the size of the glass substrate from the processing shoulder. In the first embodiment, the sensor 90 is provided in a pair on the ground, and the glass substrate W1 is carried out. When the double-pass (ON) and the glass substrate W2 are carried out, only one pass (ON) or both sides are turned off ( OFF). The sensor 91 transports the size of the transport plate from the simultaneous transport conveyor 30 to the individual transport conveyor 31. In the sensor 91, the glass substrate W1 is transported separately in the Y direction, and both of the ON (W) plates W2 are transported, and only one of them is turned ON (OFF). [Second Embodiment] In the first embodiment, an example in which a glass substrate is transported between one storage unit and one processing apparatus 20 is described, but the storage cassette 10 and the processing unit 20 are transported between the glass sheets. The control substrate transporting plate for transporting the transport 200 may be transported in the glass substrate as well or in a separate manner. 1 Figure 20 The unloading of the Y-direction is the guide, which is the glass-based pair, glass, glass-based or Both sides e 匣1〇, is in the plural substrate can also be -31 - 200922851. Fig. 29 is a plan view showing the layout of the substrate transfer system b according to another embodiment of the present invention. In the same drawing, the same components as those of the substrate transfer system A are denoted by the same reference numerals, and the description is omitted. In the substrate transfer system B, two storage cassettes 10 are provided in parallel. The two receiving cassettes 10 are arranged side by side in the Y direction. The lifting device 80, the transfer conveyor 32, the simultaneous conveyance belt 30, and the individual conveyance belt 31 are arranged side by side in the X direction in each of the storage cassettes 1 . The transfer conveyance belt 70 and the processing apparatus 20 are disposed apart from each storage cassette 1 in the X direction, and are disposed on the end side of the individual conveyance belt 3 1 in the +X direction. The moving assembly 50' is disposed across two individual transport conveyors 31. That is, two individual conveyance belts 31 are disposed between the pair of base members 51, and each of the belts 55 traverses the two individual conveyance belts 31. Thereby, the total of four placing members 56 and 57 fixed to the respective belts 55 can be moved to the two individual conveying belts 31. Further, a lifting assembly 60 (not shown) is disposed below each of the base members 51. In the substrate conveyance system B, the moving unit 50 moves the glass substrate not only in the Y direction but also in the γ direction between the two individual conveyance belts 31 on the individual conveyance belts 31. The third drawing is an explanatory view of the conveyance pattern of the glass substrate W on the two individual conveyance belts 31. As shown in the figure, the individual conveyance belts 31 are conveyed by moving the glass substrate W in the X direction and moving the assembly 50 in the Y direction. The moving unit 50 moves the glass substrate -32 - 200922851 between the individual conveyance belts 31. The conversion of the number of conveyances on the individual conveyance belt 31 is the same as that of the first embodiment described above. In the present embodiment, the moving unit 50 moves the glass substrate W across the two individual transporting belts 31, so that the glass substrate W can be transported between the processing device 20 and the two storage cassettes 10, respectively. The handling ability of the glass substrate W can be further improved. Further, in the present embodiment, the number of the storage cassettes 10 is two, but the number of the cassettes 10 may be three or more. In this case, at the same time, the conveyance belt 30, the individual conveyance belt 31, and the like may be provided in each of the storage cassettes 〇1. Further, the mobile unit can move the glass substrate W across the individual transport belts 31. [Third Embodiment] In the second embodiment, the moving unit 50 is configured to move the glass substrate W one by one in the Y direction, but the plurality of glass substrates W are simultaneously moved in the Y direction. Also. Fig. 31 is a plan view showing the layout of the substrate transfer system B' according to another embodiment of the present invention. In the same drawing, the same components as those of the substrate transfer system B are denoted by the same reference numerals, and the description is omitted. As described above, the individual conveyance belts 31 can mount a plurality of glass substrates W (two pieces) in the X direction. In the moving unit 50' of the present embodiment, a plurality of glass substrates w arranged in the X direction are simultaneously moved in the Y direction. The moving component 5 0 ' is a 4-33-200922851 belt 55 with a total of 8 belts 5 5 and +X sides, which are 6 roller conveyor belts placed on the +X side. Roller conveyor belts 110 is used for transporting the glass substrate W, and four belts 55 are used for moving the glass substrate W on the six roller conveyor belts 1 to 10 on the -X side. One mounting member 56 is provided on each of the belts 55, and two mounting members 56 and two members 57 are used for one glass substrate W. In the case of this embodiment, each of the placing members 56 is simultaneously and each of the placing members 57 is simultaneously moved. However, an active structure can also be employed. The base member 5 1 ' of the moving unit 50' is elongated in the X direction. The base member 5 1 is further enlarged, and the motor 52, the moving pulley 53, and the four driven pulleys 54 are mounted. Further, a lifting assembly 60 (not shown) is disposed below each of the base structures γ. Fig. 32 and Fig. 33 are explanatory views of the conveyance pattern of the glass substrate W which is conveyed and conveyed in a narrow manner. In the present embodiment, as shown in FIG. 3, the individual conveyance belts 31 and the processing apparatus 20 can carry in and out the plurality of glass substrates W continuous in the X direction, as shown in FIG. 3, 'moving components 50'. It is possible to move the plurality of glass substrates W 并 in the X direction between the individual belts 31. In the present embodiment, the transporting of the glass substrate W is further improved by simultaneously moving the plurality of substrates W aligned in the X direction in the x direction. 100 and 6 or X side of the 100 and 6 or 57 placement F movement, 丨 individual shift: the degree is shown in the 31 of the 4 drivers 51', between. Moreover, the transporting of the glass to the glass at the same time can be -34-200922851. [Fourth Embodiment] In the second embodiment described above, the glass is transported between the individual transporting belts 31 by moving the assembly 50 and the lifting unit 60. The structure in which the substrate W is moved in the Y direction may be configured to move the glass substrate w in the Y direction between the conveyance belts 30 at the same time. Fig. 3 is a plan view showing a layout of a substrate transfer system B" according to another embodiment of the present invention. In the same figure, the same components as those of the substrate transfer system B are denoted by the same reference numerals, and the description is omitted. In the present embodiment, the moving unit 50' described in the third embodiment is also provided in the simultaneous conveyance belt 30. Further, each of the bases of the moving unit 50' that carries the conveyor belt 30 at the same time is provided. The lower part of the member 5 1 ' is provided with a lifting unit 60 (not shown). Instead of the moving unit 50', the moving unit 50 of the first and second embodiments is provided at the same time to carry the conveyor belt 3. In the present embodiment, since the glass substrate W can be moved in the Y direction while the conveyance belt 30 is being conveyed at the same time, for example, when the glass substrate W is transferred between the storage cassettes 10, The glass substrate W can be transported by separately transporting the transport belt 31. Further, in the present embodiment, by using the moving unit 50', a plurality of glass substrates W juxtaposed in the X direction can be transported between the transport belts 30 at the same time. At the same time towards Y Further, the transportability of the glass substrate W can be further improved. Further, the substrate transfer systems B, B', and B" of the second to fourth embodiments described above are among the two individual transport conveyors 31. No-35-200922851 The individual transport conveyors 31 adjacent to the +Y side of the processing apparatus 20 are not necessarily required to individually transport the glass substrates. Therefore, the individual transport conveyance belt 31 which can replace the + Υ side has a width capable of transporting a plurality of glass substrates W in parallel, but does not have a function of transporting the glass substrates W individually (only as a function of simultaneously transporting the conveyor belt) Conveyor belt) is also available. In this case, the conveyor belt may be constituted by a single roller conveyor belt unit, and may be constituted by a plurality of roller conveyor belt assemblies arranged in the X direction. [Fifth Embodiment] In the first embodiment, the storage cassette 10 is configured to accommodate a plurality of glass substrates in the Υ direction, and the transfer conveyance belt 32 is configured to carry a plurality of glass substrates in the Υ direction while transporting them. The structure that can be transported by one piece can also be used. However, in this case, it is necessary to change the number of conveyance of the glass substrate. Fig. 3 is a plan view showing the layout of the substrate transfer system C of another embodiment of the present invention. In the same drawing, the same components as those of the substrate transporting system are denoted by the same reference numerals, and only the different structures are explained. Further, in the same drawing, the moving unit 50 and the elevating unit 60 of the glass substrate on the processing device 20, the transfer conveyor 70, the individual transport conveyance belt 31, and the individual conveyance belt 31 are omitted. In the storage cassette 10' of the present embodiment, one glass substrate W is accommodated in each groove. The transfer conveyor belt 32' for carrying out/loading the glass substrate w from the storage cassette 1 is composed of three roller conveyor belts 1', and the glass substrate W is conveyed one at a time. -36- 200922851 A transfer conveyor belt 31' is provided between the transfer conveyor belt 32 and the simultaneous conveyance belt 3〇. The individual conveyance belts 31 have the same structure as the above-described conveyance belts 31. In the individual transport conveyor belt 3, there is a moving component 50'. The moving component 5 〇 is the same structure as the moving component 5 described above. A lifting unit (not shown) having the same configuration as that of the lifting unit 60 is provided below the base member 51 of each moving unit 50'. That is, the present embodiment also provides the above-described individual transporting belts 31, moving components 50, and lifting assemblies 60 on the storage card side in the substrate transport system A. In the case where the glass substrate W is carried out from the storage cassette 10, the glass substrate w is carried out one by one by the transfer conveyance belt 3 2 ', and the plural number is placed in the Y direction on the individual conveyance belt 31'. The glass substrate w is transported in parallel by the transport conveyor 30. When the storage tray 1 is moved into the glass substrate W, the glass substrate W is transported to the transfer conveyor belt 32 one by one from the individual conveyance belts 3 1 ', and is carried into the cassette 10, and is carried in [ Sixth Embodiment In the first to fifth embodiments, the mounting members 56 and 57 of the moving unit 50, 50' are moved by a belt conveyor, and other mechanisms are also used. Can be used. Fig. 36 is a view showing another example of the moving mechanism of the placing member 57. The moving mechanism of Fig. 36 uses a ball screw mechanism. A rail member 501 and a rolling screw 502 are disposed in the Y direction, which are moving rails that define the placing members 56 and 57. In the ball screw 502, the ball nut 503 is screwed, and the ball nut 503 is slidable on the rail member 501. The mounting members 56 and 57 are fixed to the ball screw, and each of the components is moved by the same glass frame, but 56 is the bead on the cap -37-200922851 503. Further, the ball screw 5〇2 is rotated by a motor (not shown), and the placing members 50 and 57 are moved in the Y direction. In addition, a moving mechanism using a linear motor can also be employed. Further, in the first embodiment described above, the elevating unit 60 is configured as a whole of the elevating and moving unit 50, 50', but the placing members 56 and 57 can be moved up and down. For example, in the example of the moving mechanism of Fig. 3, a telescopic actuator is provided between the placing members 56 and 57 and the ball nut 503 in the Z direction, and the mounting members 56 and 57 can be moved up and down. . BRIEF DESCRIPTION OF THE DRAWINGS [FIG. 1] A plan view showing a layout of a substrate transfer system A according to an embodiment of the present invention. [Fig. 2] A side view of the substrate transport system A. [Fig. 3] A perspective view of the storage cassette 10. [Fig. 4] A perspective view of the roller conveyor belt assemblies 100 and 110 constituting each of the conveyor belts 30, 31 and 32. [Fig. 5] A plan view of an example (two examples) of the storage state of the glass substrate W in the cassette 10 and the position of the glass substrate W on the transfer belt 32. [Fig. 6] A perspective view of a pair of lifting devices 80. [Fig. 7] An exploded perspective view of the lifting device 80. [Fig. 8] A view of the lifting operation of the storage cassette 10 generated by the lifting device 80 when the glass substrate W is carried out from the storage cassette 10; -38- 200922851 [Fig. 9] A perspective view of the placing members 56 and 57. [Fig. 10] A diagram showing the lifting operation of the lifting unit 60 and the lifting and lowering of the mounting member 56 therewith. [Fig. 11] A block diagram showing the configuration of a control device 200 of the substrate transfer system A. [Fig. 12] Fig. 12 is a view showing an example of a case where the glass substrate W1 is transported from the transfer conveyance belt 32 to the conveyance belt 3 at the same time. [Fig. 13] Fig. 13 is a view showing another example of a case where the glass substrate W1 is transported from the transfer conveyor 32 to the conveyance belt at the same time. [Fig. 14] A view showing an example in which the glass substrate W1 is transported one by one to the processing device 20 for transporting the transport belt 31 individually. [Fig. 15] A view showing an example of transporting one glass substrate W1 each time from the processing device 20 to the individual transporting conveyor 31. [Fig. 16] A view showing an example in which one glass substrate W1 is transported each time the processing device 20 is transported toward the individual transporting belt 31. [Fig. 17] A view showing an example of transporting one glass substrate W2 each time from the processing device 20 to the individual conveyance belt 31. [Fig. 18] A view showing an example of transporting one glass substrate W2 each time from the processing device 20 to the individual conveyance belt 31. [Fig. 19] A view in which a single glass substrate W2 is transported from the processing device 20 to the individual transporting conveyor 31. [Fig. 20] A view showing an example of transporting one glass substrate W2 each time from the processing device 20 to the individual transporting belt 31. [21] A diagram in which a plurality of glass substrates W1 are conveyed in the γ direction from the processing device 20 to the individual conveyance belt 31 every time -39-200922851, and one glass substrate W1 is conveyed in the γ direction. [Fig. 22] A view in which the glass substrate W1 is transported one by one from the processing apparatus 20 to the individual conveyance belt 31, and the glass substrate W1 is stacked in the γ direction on the individual conveyance belt 31. [Fig. 23] A view in which a plurality of glass substrates W1 are transported in the γ direction from the processing device 20 to the individual conveyance belt 31, and a plurality of glass substrates W1 are arranged in the γ direction. [Fig. 24] A view in which a plurality of glass substrates W1 are transported from the processing apparatus 20 to the individual conveyance belts 31, and a plurality of glass substrates W1 are arranged in the γ direction on the individual conveyance belts 31. [Fig. 25] A view in which a plurality of glass substrates W2 are conveyed from the processing apparatus 20 toward the individual conveyance belt 31, and a plurality of glass substrates W2 are arranged in the γ direction on the individual conveyance belts 31. [Fig. 26] A view in which a plurality of glass substrates W2 are conveyed from the processing apparatus 20 toward the individual conveyance belt 31, and a plurality of glass substrates W2 are arranged in the γ direction on the individual conveyance belts 31. [Fig. 27] A view in which a plurality of glass substrates W2 are conveyed from the processing apparatus 20 toward the individual conveyance belt 31, and a plurality of glass substrates W2 are arranged in the γ direction on the individual conveyance belts 31. [Fig. 28] A view in which the glass substrate W2 is transported from the processing apparatus 20 to the individual conveyance belt 31, and the glass substrate W2 is stacked in the γ direction on the individual conveyance belt 31. [Fig. 29] Fig. 2 is a plan view showing the layout configuration of the substrate conveyance system β - 40 - 200922851 of another embodiment of the present invention. [Fig. 30] An explanatory view of a conveyance pattern of the glass substrate W on the two individual conveyance belts 31. [Fig. 3] Fig. 3 is a plan view showing a layout arrangement of a substrate transfer system B' according to another embodiment of the present invention.

[第32圖]在2個個別搬運輸送帶31上的玻璃基板W 的搬運態樣的說明圖。[Fig. 32] An explanatory view of a conveyance pattern of the glass substrate W on the two individual conveyance belts 31.

[第33圖]在2個個別搬運輸送帶31上的玻璃基板W 的搬運態樣的說明圖。 [第34圖]本發明的其他的實施例的基板搬運系統B” 的佈局配置的平面圖。[Fig. 33] An explanatory view of a conveyance pattern of the glass substrate W on the two individual conveyance belts 31. [FIG. 34] A plan view showing a layout configuration of a substrate transfer system B" according to another embodiment of the present invention.

[第3 5圖]本發明的其他的實施例的基板搬運系統C 的佈局配置的平面圖。 [第36圖]載置構件56及57的移動機構的其他例的 圖。 【主要元件符號說明】 1 〇 :收納卡匣 I 0 ’ ：收納卡匣 II :柱構件 1 2 :樑構件 1 3 :鋼絲 20 :處理裝置 3 〇 :同時搬運輸送帶 -41 - 200922851 3 1 :個別搬運輸送帶 3 1 ’ ：個別搬運輸送帶 32 :輸送帶 5 0 :移動組件 5 0 ’ ：移動組件 5 1 :基座構件 5 2 :馬達 5 3 :驅動帶輪 54 :從動帶輪 5 5 :皮帶 5 6 :載置構件 56a :突出 5 6 b :定位構件 5 7 :載置構件 57a :突起 5 7b :定位構件 60 :昇降組件 6 1 :基座構件 6 2 :支柱 6 3 :馬達 64 :凸輪板 70 :移載至輸送帶 80 :昇降裝置 8 0 a :樑構件 -42- 200922851 8 1 :樑構件 8 1 a :感測器 8 2 :支柱 83 :軌道構件 84 :齒條 8 5 :支撐板 85a :托架 86 :滑動構件 8 7 :驅動組件 87a :馬達 87b :減速機 8 8 :支撐板 8 9 a :小齒輪 8 9 b :小齒輪 8 9 c :小齒輪 8 9 d :小齒輪 90 :感測器 9 1 :感測器 1〇〇 :滾子輸送帶組件 1 0 1 :滾子 1 0 2 :驅動盒 103 :感測器 1 1 〇 :滾子輸送帶組件 1 1 1 :滾子 -43 200922851 11 2 :驅動盒 1 1 3 :感測器 200 :控制裝置 3 00 :主機電腦 5 0 1 :軌道構件 502 :滾珠螺桿 5 0 3 :球螺帽[Fig. 3] Fig. 5 is a plan view showing a layout arrangement of a substrate transfer system C according to another embodiment of the present invention. [Fig. 36] Fig. 36 is a view showing another example of the moving mechanism of the placing members 56 and 57. [Description of main component symbols] 1 〇: Storage cassette I 0 ' : Storage cassette II: Column member 1 2 : Beam member 1 3 : Wire 20 : Treatment device 3 〇: Simultaneous handling of conveyor belt -41 - 200922851 3 1 : Individual handling conveyor belt 3 1 ': individual handling conveyor belt 32: conveyor belt 50: moving assembly 5 0 ': moving assembly 5 1 : base member 5 2 : motor 5 3 : drive pulley 54 : driven pulley 5 5: belt 5 6 : mounting member 56 a : projection 5 6 b : positioning member 5 7 : mounting member 57 a : projection 5 7b : positioning member 60 : lifting assembly 6 1 : base member 6 2 : strut 6 3 : motor 64: Cam plate 70: Transfer to the conveyor belt 80: Lifting device 80a: Beam member-42-200922851 8 1 : Beam member 8 1 a : Sensor 8 2: Pillar 83: Track member 84: Rack 8 5: support plate 85a: bracket 86: sliding member 8 7 : drive assembly 87a: motor 87b: reducer 8 8 : support plate 8 9 a : pinion 8 9 b : pinion 8 9 c : pinion 8 9 d : pinion 90: sensor 9 1 : sensor 1 〇〇: roller conveyor belt assembly 1 0 1 : roller 1 0 2 : drive box 103: sensor 1 1 〇: roller conveyor belt assembly 1 1 1 : Roller -43 200922851 11 2 : Drive box 1 1 3 : Sensor 200 : Control unit 3 00 : Main computer 5 0 1 : Track member 502 : Ball screw 5 0 3 : Ball nut

Claims (1)

200922851 十、申請專利範圍 1. 一種基板搬運系統，是在收納基板的收 及處理前述基板的處理裝置之間搬運基板，其特 備： 第1輸送帶，配置於前述收納卡匣側，在與 的搬運方向垂直的方向具有可並列載置複數枚前 寬度，可將前述複數枚前述基板朝前述搬運方向 ;及 第2輸送帶，在前述處理裝置側與前述第1 續配置，在與前述搬運方向垂直的方向具有可並 前述複數枚前述基板的寬度，可將前述複數枚基 前述搬運方向搬運；及 移動組件，具有載置前述第2輸送帶上的前 載置部，在前述第2輸送帶上朝與前述搬運方向 向移動前述基板；及 昇降組件，將前述載置部及前述第2輸送帶 降。 2. 如申請專利範圍第1項的基板搬運系統 更具備：與前述第1輸送帶連續且配置於前述收 下部並載置被收納於前述收納卡匣的前述基板朝 方向搬運的第3輸送帶、及使前述收納卡匣和前 送帶相對地昇降的昇降裝置， 前述收納卡匣，是在上下方向具備複數供收 板用的槽， 納卡匣、 徵爲，具 前述基板 述基板的 同時搬運 輸送帶連 列載置將 板個別朝 述基板的 垂直的方 相對地昇 ，其中， 納卡匣的 前述搬運 述第3輸 納前述基 -45 - 200922851 各槽是在與前述搬運方向垂直的方向可收納前述複數 枚前述基板， 前述第3輸送帶，是在與前述搬運方向垂直的方向具 有可並列載置前述複數枚前述基板的寬度，將前述複數枚 前述基板朝前述搬運方向同時搬運。 3 .如申請專利範圍第1項的基板搬運系統，其中， 前述第2輸送帶，是具備依據前述基板的尺寸選擇性地驅 動的複數輸送帶組件，前述移動組件，是將前述基板移動 至對應前述基板的尺寸的位置。 4.如申請專利範圍第1項的基板搬運系統，其中， 前述移動組件，是移動前述基板並且調整前述基板的方向 〇 5 .如申請專利範圍第1項的基板搬運系統，其中， 前述第1輸送帶，是在前述搬運方向具有可並列載置複數 枚前述基板的長度。 6.如申請專利範圍第1項的基板搬運系統，其中， 前述第1及第2輸送帶是由複數滾子輸送帶組件所構成。 7 ·如申請專利範圍第2項的基板搬運系統，其中， 前述第3輸送帶是由複數滾子輸送帶組件所構成。 8 ·如申請專利範圍第1項的基板搬運系統，其中， 前述收納卡匣及前述處理裝置是在前述搬運方向分離配置 〇 9 · 一種基板搬運系統，是在收納基板的第1及第2 收納卡匣、及與前述第1及第2收納卡匣分離配置供處理 -46 - 200922851 前述基板用的處理裝置之間搬運基板，其特徵爲，具 第1同時搬運輸送帶，配置於前述第1收納卡匣 在與前述基板的搬運方向垂直的方向具有可並列載置 枚前述基板的寬度，可將前述複數枚前述基板朝前述 方向同時搬運；及 第2同時搬運輸送帶，配置於前述第2收納卡匣 在與前述搬運方向垂直的方向具有可並列載置複數枚 基板的寬度，可將前述複數枚前述基板朝前述搬運方 時搬運；及 第1個別搬運輸送帶，在前述處理裝置側與前述 同時搬運輸送帶連續配置，在與前述搬運方向垂直的 具有可並列載置前述複數枚前述基板的寬度，可將前 數枚基板個別朝前述搬運方向搬運；及 第2個別搬運輸送帶，在前述處理裝置側對於前 2同時搬運輸送帶連續配置，在與前述搬運方向垂直 向具有可並列載置前述複數枚前述基板的寬度，可將 複數枚基板個別朝前述搬運方向搬運；及 移動組件，具有供載置前述第1及第2個別搬運 帶上的前述基板用的載置部，橫跨前述第1及第2個 運輸送帶，朝與前述搬運方向垂直的方向移動前述基 及 昇降組件，將前述載置部及前述第1及2個別搬 送帶相對地昇降。 10.如申請專利範圍第9項的基板搬運系統，其 /-ff· · 備. 側， 複數 搬運 側， 前述 向同 第1 方向 述複 述第 的方 前述 輸送 別搬 板； 運輸 中， -47- 200922851 更具備： 第2移動組件，具有供載置前述第1及第2同時搬運 輸送帶上的前述基板用的第2載置部’橫跨前述第1及第 2同時搬運輸送帶，朝與前述搬運方向垂直的方向移動前 述基板；及 第2昇降組件，將前述第2載置部及前述第1及2同 時搬運輸送帶相對地昇降。 11.如申請專利範圍第9項的基板搬運系統，其中， 前述第1及第2個別搬運輸送帶，是在前述搬運方向具有 可並列載置複數枚前述基板的長度， 前述載置部，是對於在前述第1及第2個別搬運輸送 帶上在前述搬運方向並列載置的複數枚每一前述基板設置 前述移動組件，是在前述搬運方向並列載置複數枚前 述基板，朝與前述搬運方向垂直的方向同時搬運。 1 2 ·如申請專利範圍第9項的基板搬運系統，其中， 前述第1及第2收納卡匣，是在與前述搬運方向垂直的方 向並列配置， 前述處理裝置，是與前述第1及第2收納卡匣在前述 搬運方向分離配置。 1 3 . —種基板搬運系統，是在收納基板的第i及第2 收納卡匣、及與前述第1及第2收納卡匣分離配置供處理 前述基板用的處理裝置之間搬運基板，其特徵爲，具備： 第1同時搬運輸送帶，配置於前述第1收納卡匣側， -48- 200922851 在與前述基板的搬運方向垂直的方向具有可並列載置複數 枚前述基板的寬度，可將前述複數枚前述基板朝前述搬運 方向同時搬運；及 第2同時搬運輸送帶，配置於前述第2收納卡匣側， 在與前述搬運方向垂直的方向具有可並列載置複數枚前述 基板的寬度，可將前述複數枚前述基板朝前述搬運方向同 時搬運；及 個別搬運輸送帶，在前述處理裝置側與前述第1同時 搬運輸送帶連續配置，在與前述搬運方向垂直的方向具有 可並列載置前述複數枚前述基板的寬度，可將前述複數枚 基板個別朝前述搬運方向搬運；及 第3同時搬運輸送帶，在前述處理裝置側與前述第2 同時搬運輸送帶連續配置，在與前述搬運方向垂直的方向 具有可並列載置前述複數枚前述基板的寬度；及 移動組件，具有載置前述個別搬運輸送帶及前述第3 同時搬運輸送帶上的前述基板用的載置部，橫跨前述個別 搬運輸送帶及前述第3同時搬運輸送帶，朝與前述搬運方 向垂直的方向移動前述基板；及 昇降組件，將前述載置部及前述個別搬運輸送帶及前 述第3同時搬運輸送帶相對地昇降。 -49-200922851 X. Patent Application No. 1. A substrate transport system that transports a substrate between processing devices that receive and process the substrate, and that is provided with a first conveyor belt disposed on the storage cassette side. The vertical direction of the conveyance direction has a plurality of front widths that can be placed in parallel, and the plurality of substrates can be placed in the conveyance direction; and the second conveyor is disposed on the processing apparatus side and the first one, and the conveyance is performed The direction perpendicular to the direction has a width of the plurality of substrates, and the plurality of substrates can be transported in the transport direction; and the moving unit has a front mounting portion on the second conveyor, and the second transport The tape moves the substrate toward the conveyance direction; and the lifting unit lowers the placing portion and the second conveyor. 2. The substrate transport system according to the first aspect of the invention, further comprising: a third conveyor belt that is continuous with the first conveyor belt and disposed on the lower portion and that carries the substrate stored in the storage cassette in a direction And a lifting device for raising and lowering the storage cassette and the front feed belt, wherein the storage cassette is provided with a plurality of grooves for the upper and lower sheets in the vertical direction, and the nano cassette is provided with the substrate described above. The conveyance belt is placed in a row, and the plates are raised relative to each other in a vertical direction of the substrate. The third carriage of the nano cassettes is transported in the third direction of the base-45 - 200922851 in a direction perpendicular to the conveyance direction. The plurality of the substrates are accommodated in the direction, and the third conveyor has a width in which the plurality of substrates are placed in parallel in a direction perpendicular to the conveyance direction, and the plurality of substrates are simultaneously conveyed in the conveyance direction. The substrate transfer system according to claim 1, wherein the second conveyor belt includes a plurality of conveyor belt assemblies that are selectively driven in accordance with the size of the substrate, and the moving assembly moves the substrate to correspond to The position of the size of the aforementioned substrate. 4. The substrate transfer system of claim 1, wherein the moving component is a substrate transporting system that moves the substrate and adjusts the substrate. The substrate transporting system according to claim 1 is the first The conveyor belt has a length in which a plurality of the substrates can be placed in parallel in the conveyance direction. 6. The substrate transfer system according to claim 1, wherein the first and second conveyor belts are constituted by a plurality of roller conveyor belt assemblies. 7. The substrate transfer system of claim 2, wherein the third conveyor belt is composed of a plurality of roller conveyor belt assemblies. The substrate transfer system according to the first aspect of the invention, wherein the storage cassette and the processing device are disposed apart from each other in the transport direction. The substrate transport system is the first and second storage units of the storage substrate. The cassette is transported between the processing device for the substrate and the processing device for the substrate-46-200922851, and the substrate is transported between the first and second storage cassettes. The storage cassette has a width in which the plurality of substrates can be placed in parallel in a direction perpendicular to a conveyance direction of the substrate, and the plurality of substrates can be simultaneously conveyed in the direction; and the second simultaneous conveyance belt is disposed in the second The storage cassette has a width in which a plurality of substrates can be placed in parallel in a direction perpendicular to the conveyance direction, and the plurality of substrates can be conveyed while being conveyed; and the first individual conveyance belt is on the processing apparatus side. The conveyance conveyor is continuously disposed, and the plurality of substrates are vertically arranged in parallel with the conveyance direction. The width of the first plurality of substrates can be individually transported in the transport direction; and the second individual transport conveyor is continuously disposed on the processing device side for the first two simultaneous transport belts, and can be placed in parallel with the transport direction. The plurality of substrates may be individually transported in the transport direction, and the movable unit may have a mounting portion for mounting the substrate on the first and second individual transport belts. The first and second transport belts move the base and the elevating unit in a direction perpendicular to the transport direction, and the mounting portion and the first and second individual transport belts are relatively raised and lowered. 10. In the substrate transport system according to the ninth aspect of the patent application, the side of the substrate is transferred to the side of the plurality of transport sides, and the transporting board is transported to the first side in the first direction. - 200922851 Further, the second moving unit includes a second placing unit for carrying the substrate on the first and second simultaneous conveyance belts, and traversing the first and second simultaneous conveyance belts. The substrate is moved in a direction perpendicular to the conveyance direction; and the second lifting unit vertically moves the second placement portion and the first and second simultaneous conveyance belts up and down. The substrate transporting system according to claim 9, wherein the first and second individual transporting belts have a length in which the plurality of substrates are placed in parallel in the transport direction, and the mounting portion is The moving unit is provided in each of the plurality of substrates that are placed in parallel in the transport direction on the first and second individual transport conveyors, and a plurality of the substrates are placed in parallel in the transport direction, and the transport direction is Carry it in the vertical direction at the same time. The substrate transfer system according to claim 9, wherein the first and second storage cassettes are arranged side by side in a direction perpendicular to the conveyance direction, and the processing device is the first and the first 2 The storage cassettes are disposed apart from each other in the transport direction. A substrate transport system that transports a substrate between an i-th and a second storage cassette that accommodates a substrate, and a processing device that is disposed separately from the first and second storage cassettes for processing the substrate. The first delivery conveyance belt is disposed on the first storage cassette side, and -48-200922851 has a width in which a plurality of the substrates can be placed in parallel in a direction perpendicular to the conveyance direction of the substrate. The plurality of substrates are simultaneously conveyed in the conveyance direction; and the second simultaneous conveyance belt is disposed on the second storage cassette side, and has a width in which a plurality of the substrates can be placed in parallel in a direction perpendicular to the conveyance direction. The plurality of substrates may be simultaneously transported in the transport direction; and the individual transport belts may be continuously disposed on the processing device side and the first simultaneous transport belt, and may be placed in parallel in a direction perpendicular to the transport direction. a plurality of the widths of the plurality of substrates, wherein the plurality of substrates can be individually transported in the transport direction; and the third simultaneous transport The belt is continuously disposed on the processing device side and the second simultaneous conveyance belt, and has a width in which the plurality of substrates can be placed in parallel in a direction perpendicular to the conveyance direction; and a moving unit having the individual conveyance transported thereon And a mounting portion for the substrate on the third simultaneous conveyance belt, and the substrate is moved in a direction perpendicular to the conveyance direction across the individual conveyance belt and the third simultaneous conveyance belt; and the lifting assembly The loading unit and the individual conveyance belt and the third simultaneous conveyance belt are relatively raised and lowered. -49-
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