JP4950297B2 - Substrate transfer system - Google Patents

Description

  The present invention relates to a transport system that transports a substrate between a storage cassette that stores a substrate such as a glass substrate, a liquid crystal substrate, and a PDP substrate and a processing apparatus that processes the substrate.

  In a manufacturing facility such as a thin display, a substrate such as a glass substrate is stored in a storage cassette. Then, when the substrate is processed, the substrate is transferred to the processing apparatus, and when the processing is completed, it is stored again in the storage cassette. Such a manufacturing facility requires a transport system for transporting the substrate between the storage cassette and the processing apparatus. The substrate transfer system is required to have a transfer capability in accordance with the substrate processing capability of the processing apparatus. For example, when the processing capability of the substrate of the processing apparatus exceeds the transfer capability of the transfer system, a waiting time for transferring the substrate occurs in the processing apparatus, resulting in poor manufacturing efficiency. Therefore, it is desirable that the substrate transfer capability of the transfer system exceeds the substrate processing capability of the processing apparatus.

  Japanese Patent Laid-Open No. 2005-60110 discloses a system for selectively transferring a substrate from a plurality of storage cassettes to a processing apparatus. In this system, the substrate carrying capacity depends on the number of storage cassettes. Therefore, for example, when a substrate is transported between one storage cassette and the processing apparatus, the substrate transport capacity may be inferior to the processing capacity of the processing apparatus.

  Japanese Laid-Open Patent Publication No. 9-132309 discloses a system for simultaneously transporting a plurality of substrates and processing the plurality of substrates in the course of transport. In this system, it is necessary that the processing apparatus can deliver a plurality of substrates simultaneously. However, in a manufacturing facility such as a thin display, a processing apparatus that transfers substrates one by one is often employed. This system is difficult to apply to a manufacturing facility that employs a processing apparatus that transfers substrates one by one.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transfer system that has improved substrate transfer capability while supporting a processing apparatus that transfers substrates one by one.

  According to the present invention, there is provided a substrate transport system for transporting a substrate between a storage cassette for storing a substrate and a processing apparatus for processing the substrate, the substrate transport system being disposed on the storage cassette side and transporting the substrate A first conveyor having a width that allows a plurality of the substrates to be placed side by side in a direction orthogonal to the first substrate and capable of simultaneously transporting the plurality of substrates in the transport direction, and the first on the processing apparatus side. A width that allows the plurality of substrates to be placed side by side in a direction orthogonal to the transport direction, and allows the plurality of substrates to be transported individually in the transport direction. And a moving unit that moves the substrate in a direction perpendicular to the transport direction on the second conveyor, and a front unit. Description section and second conveyor A lifting unit for relatively lifting, the substrate transport system comprising the is provide.

  In the substrate transfer system of the present invention, by providing the first conveyor, a plurality of substrates can be transferred in parallel during the transfer of the substrate, and the transfer capability can be improved. And by providing the said 2nd conveyor, the said moving unit, and the said raising / lowering unit, a board | substrate can be delivered to the said processing apparatus one sheet at a time. Therefore, it is possible to cope with a processing apparatus that transfers substrates one by one.

  In addition, according to the present invention, the first and second storage cassettes for storing the substrates, and the first and second storage cassettes are separated from each other in a direction perpendicular to the arrangement direction of the first and second storage cassettes. A substrate transfer system for transferring a substrate to and from a processing apparatus for processing the substrate, wherein the substrate transfer system is arranged on the first storage cassette side and is arranged in a direction orthogonal to the substrate transfer direction. A plurality of the substrates having a width that can be placed side by side, arranged on the second storage cassette side, and a first simultaneous transport conveyor that can transport the plurality of substrates simultaneously in the transport direction; A second simultaneous transport conveyor having a width that allows the plurality of substrates to be placed side by side in a direction orthogonal to the transport direction, and capable of transporting the plurality of substrates simultaneously in the transport direction; and the processing apparatus side In the first simultaneous conveyance co A first width that is arranged continuously with the bearer, has a width that allows the plurality of substrates to be placed side by side in a direction orthogonal to the transport direction, and can transport the plurality of substrates individually in the transport direction. Each of the individual transport conveyors, and the processing apparatus side is arranged continuously with the second simultaneous transport conveyor, and has a width that allows the plurality of substrates to be placed side by side in a direction orthogonal to the transport direction, A second individual transport conveyor capable of individually transporting the plurality of substrates in the transport direction; and a placement section for placing the substrates on the first and second individual transport conveyors, The moving unit that moves the substrate in a direction orthogonal to the transport direction, the placement unit, and the first and second individual transport conveyors are moved up and down relatively across the first and second individual transport conveyors. And a lifting unit. Substrate transfer system according to is provided.

  In the substrate transfer system of the present invention, by providing the first and second simultaneous transfer conveyors, it is possible to transfer a plurality of substrates in parallel during the transfer of the substrates, and the transfer capability can be improved. Then, by providing the first and second individual conveyors, the moving unit, and the lifting unit, substrates can be transferred to the processing apparatus one by one. Therefore, it is possible to cope with a processing apparatus that transfers substrates one by one. Further, the moving unit moves the substrate across the first and second individual transfer conveyors to transfer the substrate between the processing apparatus and the first and second storage cassettes, respectively. And the substrate transfer capability can be improved.

  According to the present invention, between the first and second storage cassettes that store the substrate and the processing apparatus that is disposed apart from the first and second storage cassettes and processes the substrate. A substrate transfer system for transferring a substrate, the substrate transfer system being disposed on the first storage cassette side, having a width that allows a plurality of the substrates to be placed side by side in a direction orthogonal to the substrate transfer direction. The first simultaneous transfer conveyor capable of simultaneously transferring the substrates in the transfer direction and the second storage cassette side, and a plurality of the substrates can be placed side by side in a direction perpendicular to the transfer direction. A second simultaneous transport conveyor having a wide width and capable of simultaneously transporting the plurality of substrates in the transport direction, and the first simultaneous transport conveyor on the processing apparatus side, and the transport. Forward in the direction perpendicular to the direction A width of a plurality of the substrates that can be placed side by side, an individual conveyance conveyor that can individually convey the plurality of substrates in the conveyance direction, and the second simultaneous conveyance conveyor on the processing apparatus side. And a third simultaneous transport conveyor having a width capable of arranging and mounting the plurality of substrates in a direction orthogonal to the transport direction, the individual transport conveyor and the third simultaneous transport conveyor A moving unit that has a placement unit for placing the substrate and moves the substrate in a direction orthogonal to the transport direction across the individual transport conveyor and the third simultaneous transport conveyor; And a lifting / lowering unit that relatively moves up and down the individual transport conveyor and the third simultaneous transport conveyor.

  In the substrate transfer system of the present invention, by providing the first and second simultaneous transfer conveyors, it is possible to transfer a plurality of substrates in parallel during the transfer of the substrates, and the transfer capability can be improved. And by providing the said individual conveyance conveyor, the said moving unit, and the said raising / lowering unit, a board | substrate can be delivered to the said processing apparatus one by one. Therefore, it is possible to cope with a processing apparatus that transfers substrates one by one. Further, the moving unit moves the substrate across the individual transport conveyor and the third simultaneous transport conveyor, so that the substrate is respectively transferred between the processing apparatus and the first and second storage cassettes. The substrate can be transported and the substrate transport capability can be improved.

It is a top view which shows the layout of the board | substrate conveyance system A which concerns on one Embodiment of this invention. It is a side view of the substrate transfer system A. 3 is a perspective view of the storage cassette 10. FIG. It is a perspective view which shows the roller conveyor units 100 and 110 which comprise each conveyor 30, 31, and 32. FIG. It is a top view which shows the example (2 examples) of the storage mode of the glass substrate W in the storage cassette 10, and the position of the glass substrate W on the transfer conveyor 32. FIG. 2 is a perspective view of a pair of lifting devices 80. FIG. 3 is an exploded perspective view of the lifting device 80. FIG. It is a figure which shows the raising / lowering operation | movement of the storage cassette 10 by the raising / lowering apparatus 80 in the case of carrying out the glass substrate W from the storage cassette 10. FIG. 5 is a perspective view of mounting members 56 and 57. FIG. It is a figure which shows the raising / lowering operation | movement of the raising / lowering unit 60, and the raising / lowering of the mounting member 56 accompanying this. It is a block diagram which shows the structure of the control apparatus 200 of the board | substrate conveyance system A. It is the figure which showed the example of the aspect in the case of conveying the glass substrate W1 from the transfer conveyor 32 to the simultaneous conveyance conveyor 30. FIG. It is the figure which showed the other example of the aspect in the case of conveying the glass substrate W1 from the transfer conveyor 32 to the simultaneous conveyance conveyor 30. FIG. It is the figure which showed the example which conveys the glass substrate W1 one by one from the separate conveyance conveyor 31 to the processing apparatus. It is the figure which showed the example which conveys the glass substrate W1 one by one from the separate conveyance conveyor 31 to the processing apparatus. It is the figure which showed the example which conveys the glass substrate W1 one by one from the separate conveyance conveyor 31 to the processing apparatus. It is the figure which showed the example which conveys the glass substrate W2 to the processing apparatus 20 from the separate conveyance conveyor 31 one by one. It is the figure which showed the example which conveys the glass substrate W2 to the processing apparatus 20 from the separate conveyance conveyor 31 one by one. It is the figure which showed the example which conveys the glass substrate W2 to the processing apparatus 20 from the separate conveyance conveyor 31 one by one. It is the figure which showed the example which conveys the glass substrate W2 to the processing apparatus 20 from the separate conveyance conveyor 31 one by one. It is the figure which showed the example which conveys the glass substrate W1 one by one to the individual conveyance conveyor 31 from the processing apparatus 20, and arranges the several glass substrate W1 in the Y direction on the separate conveyance conveyor 31. FIG. It is the figure which showed the example which conveys the glass substrate W1 one by one to the individual conveyance conveyor 31 from the processing apparatus 20, and arranges the several glass substrate W1 in the Y direction on the separate conveyance conveyor 31. FIG. It is the figure which showed the example which conveys the glass substrate W1 one by one to the individual conveyance conveyor 31 from the processing apparatus 20, and arranges the several glass substrate W1 in the Y direction on the separate conveyance conveyor 31. FIG. It is the figure which showed the example which conveys the glass substrate W1 one by one to the individual conveyance conveyor 31 from the processing apparatus 20, and arranges the several glass substrate W1 in the Y direction on the separate conveyance conveyor 31. FIG. It is the figure which showed the example which conveys the glass substrate W2 one by one to the separate conveyance conveyor 31 from the processing apparatus 20, and arranges the several glass substrate W2 in the Y direction on the separate conveyance conveyor 31. FIG. It is the figure which showed the example which conveys the glass substrate W2 one by one to the separate conveyance conveyor 31 from the processing apparatus 20, and arranges the several glass substrate W2 in the Y direction on the separate conveyance conveyor 31. FIG. It is the figure which showed the example which conveys the glass substrate W2 one by one to the separate conveyance conveyor 31 from the processing apparatus 20, and arranges the several glass substrate W2 in the Y direction on the separate conveyance conveyor 31. FIG. It is the figure which showed the example which conveys the glass substrate W2 one by one to the separate conveyance conveyor 31 from the processing apparatus 20, and arranges the several glass substrate W2 in the Y direction on the separate conveyance conveyor 31. FIG. It is a top view which shows the layout of the board | substrate conveyance system B which concerns on other embodiment of this invention. It is explanatory drawing of the conveyance aspect of the glass substrate W on the two separate conveyance conveyors 31. FIG. It is a top view which shows the layout of the board | substrate conveyance system B 'which concerns on other embodiment of this invention. It is explanatory drawing of the conveyance aspect of the glass substrate W on the two separate conveyance conveyors 31. FIG. It is explanatory drawing of the conveyance aspect of the glass substrate W on the two separate conveyance conveyors 31. FIG. It is a top view which shows the layout of the board | substrate conveyance system B "which concerns on other embodiment of this invention. It is a top view which shows the layout of the board | substrate conveyance system C which concerns on other embodiment of this invention. It is a figure which shows the other example of the moving mechanism of the mounting members 56 and 57. FIG.

<First Embodiment>
<Overall configuration>
FIG. 1 is a plan view showing a layout of a substrate transfer system A according to an embodiment of the present invention, and FIG. 2 is a side view of the substrate transfer system A. In each figure, arrows X and Y indicate horizontal directions orthogonal to each other, and arrow Z indicates a vertical direction (vertical direction). In the case of this embodiment, the substrate transport system A includes a storage cassette 10 that stores a rectangular thin glass substrate W, a processing apparatus 20 that processes the glass substrate W (only a part of which is shown), and the like. A glass substrate is conveyed between the two. The glass substrate W is indicated by a broken line in FIG. 2 and is not shown in FIG.

  For example, the processing apparatus 20 performs cleaning, drying, and other processing of the glass substrate. The processing apparatus 20 can store therein a plurality of glass substrates, for example, a number of glass substrates W that can be stored in the storage cassette 10. However, the processing apparatus 20 carries in and out the glass substrates W one by one.

  The storage cassette 10 and the processing apparatus 20 are spaced apart in the X direction. Therefore, in the present embodiment, the substrate transport direction of the substrate transport system A is the X direction, and the direction orthogonal to the transport direction is the Y direction. Further, the storage cassette 10 and the processing apparatus 20 are arranged so that the carry-in / out portions of these glass substrates W face each other.

  The substrate transfer system A includes a simultaneous transfer conveyor 30, an individual transfer conveyor 31, a moving unit 50, a lifting unit 60, transfer conveyors 32 and 70, and a pair of lifting devices 80.

<Storage cassette>
FIG. 3 is a perspective view of the storage cassette 10. The storage cassette 10 is a cassette that can store the glass substrates W in multiple stages in the Z direction. FIG. 3 shows a state where the glass substrate W is not stored. In the case of this embodiment, the storage cassette 10 forms a substantially rectangular parallelepiped frame body by the plurality of column members 11 and the beam members 12. The arrangement intervals of the column members 11 and the arrangement intervals of the beam members 12 are set so that the transfer conveyor 32 can enter the storage cassette 10 from below the storage cassette 10.

  A plurality of the column members 11 are arranged in the X direction, and the same number of the column members 11 are arranged in parallel in the Y direction. Between the pair of column members 11 separated in the Y direction, wires 13 are stretched in a line at a predetermined pitch in the Z direction. The space between the upper and lower sides of each wire 13 forms a slot for accommodating the glass substrate W, and the glass substrate W is placed on the wire 13 in a substantially horizontal posture. Then, as many slots as the number of wires 13 arranged in the Z direction are formed.

  In the case of the present embodiment, a plurality of glass substrates W are accommodated in one slot side by side in the Y direction or the X direction. However, one glass substrate W may be accommodated in one slot. In the present embodiment, the slot is formed by a wire, but other methods can of course be employed. However, by using the wire, the interval between the substrates to be stored can be reduced, and the storage efficiency of the storage cassette 10 can be increased.

<Conveyor>
Next, the structure of the simultaneous conveyance conveyor 30, the individual conveyance conveyor 31, and the transfer conveyor 32 is demonstrated. In the case of this embodiment, each of these conveyors is configured by arranging a plurality of roller conveyors in a matrix. However, other types of conveyors such as a belt conveyor may be used.

  FIG. 4 is a perspective view showing the roller conveyor units 100 and 110 constituting the conveyors 30, 31 and 32. As shown in the figure, in this embodiment, by using two types of roller conveyor units 100 and 110 having different sizes, glass substrates W having different sizes can be transported by the same system.

  The roller conveyor unit 100 detects a plurality of rollers 101 on which a glass substrate W (not shown in FIG. 4) is placed, a drive box 102 in which a driving device for the roller 101 is built, and a glass substrate W on the roller 101. Sensor 103. The roller 101 rotates around the rotation axis in the Y direction and conveys the glass substrate W in the X direction.

  The roller conveyor unit 110 includes a plurality of rollers 111 on which the glass substrate W is placed, a drive box 112 incorporating a driving device for the roller 111, and a sensor 113 that detects the glass substrate W on the roller 111. The roller 111 rotates around the rotation axis in the Y direction and conveys the glass substrate W in the X direction. The width of the roller conveyor unit 110 in the Y direction is about half of the width of the roller conveyor unit 100 in the Y direction. Each roller conveyor unit 100 and each roller conveyor unit 110 can be driven independently.

  In the case of the present embodiment, one roller conveyor unit 100 is disposed at each end in the Y direction, and two roller conveyor units 110 are disposed between these roller conveyor units 100. These four roller conveyor units 100 and 110 arranged in the Y direction are also referred to as a “set of roller conveyor units”. FIG. 4 shows a mode in which three “sets of roller conveyor units” are arranged in the X direction.

  With reference to FIG. 1 and FIG. 2, in this embodiment, the simultaneous conveyance conveyor 30, the individual conveyance conveyor 31, and the transfer conveyor 32 are all configured by arranging six "sets of roller conveyor units" in the X direction. Yes. The simultaneous conveyance conveyor 30 and the transfer conveyor 32 are continuously arranged in the X direction, and can continuously convey the glass substrate W in the X direction.

  In addition, the simultaneous conveyance conveyor 30, the individual conveyance conveyor 31, and the transfer conveyor 32 all have a width (in which a plurality of glass substrates W can be placed side by side in the Y direction orthogonal to the conveyance direction (X direction) of the glass substrate W ( Width in the Y direction). Furthermore, the simultaneous conveyance conveyor 30, the individual conveyance conveyor 31, and the transfer conveyor 32 all have a length (length in the X direction) in which a plurality of glass substrates W can be arranged and placed in the conveyance direction (X direction) of the glass substrate W. A). FIG. 5 is a plan view showing an example (two examples) of the storage mode of the glass substrate W in the storage cassette 10 and the position of the glass substrate W (W1, W2) on the transfer conveyor 32. FIG.

  The upper example of FIG. 5 is an example in which four glass substrates W1 are stored in each slot of the storage cassette 10, and the transfer conveyor 32 has two glass substrates W1 in the X direction and two in the Y direction. Can be placed. The lower example in FIG. 5 is an example in which six glass substrates W2 are stored in each slot of the storage cassette 10, and the transfer conveyor 32 has two glass substrates W2 in the X direction and three in the Y direction. Can be placed. The glass substrate W2 is a glass substrate having a smaller width in the Y direction than the glass substrate W1.

  When the glass substrate W <b> 1 is to be transported, two glass substrates W <b> 1 can be placed in the Y direction on the simultaneous transport conveyor 30 and the individual transport conveyor 31 as with the transfer conveyor 32. In addition, when the glass substrate W <b> 2 is to be transported, three glass substrates W <b> 2 can be placed in the Y direction on the simultaneous transport conveyor 30 and the individual transport conveyor 31 as with the transfer conveyor 32.

  In the present embodiment, a plurality of glass substrates can be placed on the simultaneous conveyance conveyor 30 in the X direction and the Y direction, respectively. By enabling a large number of glass substrates to be placed on the simultaneous conveyance conveyor 30 in this way, it is possible to prevent waiting for conveyance of the glass substrate with respect to the processing apparatus 20. Further, when it is desired to replace the storage cassette 10 after emptying it, the glass substrate can be once taken out to the simultaneous transfer conveyor 30 and then transferred again into the storage cassette 10 after replacement. Can be planned.

  Returning to FIG. 1 and FIG. 2, the transfer conveyor 70 is a roller conveyor constituted by a single roller conveyor unit. The transfer conveyor 70 delivers the glass substrate W between the processing apparatus 20 and the individual conveyance conveyor 31. In addition, you may make it deliver the glass substrate W directly between the separate conveyance conveyor 31 and the processing apparatus 20, without providing the transfer conveyor 70. FIG.

<Elevating device>
FIG. 6 is a perspective view of the pair of lifting devices 80, and FIG. 7 is an exploded perspective view of the lifting device 80. In the present embodiment, the storage cassette 10 and the transfer conveyor 32 are relatively moved in the Z direction by moving the storage cassette 10 in the Z direction by the lifting device 80. However, the transfer conveyor 32 may be configured to move up and down in the Z direction. In addition, when it is set as the structure which raises / lowers the transfer conveyor 32, it will be set as the structure which the simultaneous conveyance conveyor 30 also raises / lowers.

  In the case of this embodiment, the elevating device 80 is disposed on both sides of the storage cassette 10 facing each other in the Y direction so as to sandwich the storage cassette 10, and cantileverly supports the storage cassette 10. According to this configuration, the lifting device 80 can be made thinner.

  The lifting device 80 includes a beam member 81 on which the beam member 12 at the bottom of the storage cassette 10 is placed. The storage cassette 10 is moved up and down as each beam member 81 of each lifting device 80 moves in the Z direction synchronously. The elevating device 80 includes a column 82 extending in the Z direction, and a pair of rail members 83 and a rack 84 extending in the Z direction are fixed to the inner surface of the column 82. A beam member 80 a is installed on the upper end of the column 82 between the lifting devices 80.

  The beam member 81 is supported by being fixed to one side surface of the support plate 85 via a bracket 85a. Four slide members 86 that can move along the rail member 83 are fixed to the other side surface of the support plate 85, and the beam member 81 and the support plate 85 move up and down by the guide of the rail member 83. The drive unit 87 includes a motor 87a and a speed reducer 87b, and is fixed to and supported by one side surface of the support plate 88. The output shaft of the speed reducer 87 b passes through the support plate 88 and is connected to a pinion 89 a disposed on the other side of the support plate 88.

  The support plate 85 and the support plate 88 are fixed to each other at a predetermined interval, and pinions 89b to 89d are disposed in the gap between the support plate 85 and the support plate 88. The pinions 89b to 89d are rotatably supported between the support plate 85 and the support plate 88, and the pinion 89b and the pinion 89c rotate following the rotation of the pinion 89a. The pinion 89d rotates following the rotation of the pinion 89c. The pinions 89b to 89d are pinions having the same specifications, and the two pinions 89b and 89d mesh with the racks 84.

  Thus, when the drive unit 87 is driven, the pinion 89a rotates, and the drive unit 87, the support plates 85 and 88, the slide member 86, and the beam member 81 move together upward or downward by the drive force. As a result, the storage cassette 10 placed on the beam member 81 can be moved up and down. Each lifting device 80 is provided with a sensor 81 a at the end of the beam member 81 for detecting a shift in the lifting height of the beam members 81.

  The sensor 81a is, for example, an optical sensor including a light emitting unit and a light receiving unit, and determines whether or not the light is received by irradiating light in the Y direction as shown in FIG. When the light is received, there is no deviation in the elevation height of the beam members 81. When there is no light reception, there is a deviation in the elevation height. When the shift in the elevation height is detected by the sensor 81a, the control is performed so that the shift is eliminated by the control of the motor 87a. By providing the sensor 81a to control the shift in the height of the beam member 81, the storage cassette 10 can be prevented from being tilted during the lift and the storage cassette 10 can be lifted and lowered more stably.

  The two sensors 81a provided in each beam member 81 may have a configuration in which one of the light emitting unit and the light receiving unit is provided and the other has the other of the light emitting unit and the light receiving unit. Moreover, it is not restricted to an optical sensor, Other sensors are also employable.

  FIG. 8 is a view showing the lifting / lowering operation of the storage cassette 10 by the lifting device 80 when the glass substrate W is carried out of the storage cassette 10. In the figure, the lifting device 80 is not shown. The glass substrate W is unloaded in order from the glass substrate W stored in the lowermost slot among the slots in which the glass substrate W is stored.

  First, as shown in the upper left diagram of FIG. 8, from the state where the storage cassette 10 is positioned above the transfer conveyor 32, the storage cassette 10 is lowered by an elevating device 80 (not shown in FIG. 8), and the upper right of FIG. As shown in the figure, the glass substrate W to be transported is placed on the transfer conveyor 32. At this time, the transfer conveyor 32 enters the storage cassette 10 from below, and the glass substrate W to be transported floats from the wire 13 of the storage cassette 10 and is supported only by the transfer conveyor 32. Subsequently, the transfer conveyor 32 is driven, and the glass substrate W to be transported is unloaded from the storage cassette 10 as shown in the lower left diagram of FIG. Hereinafter, similarly, the lowering of the storage cassette 10 and the driving of the transfer conveyor 32 are repeated (the lower right diagram in FIG. 8), and the glass substrates W are sequentially carried out from the lower side.

  The roller conveyor units 100 and 110 constituting the transfer conveyor 32 are selectively driven according to the position and size of the glass substrate to be transported. For example, in the upper example of FIG. 5, when two glass substrates W1 positioned on the + X side are carried out, three “sets of roller conveyor units” positioned below these glass substrates W1 are driven. Become. Further, for example, in the example of the upper side of FIG. 5, when one glass substrate W1 located on the + X side and located on the + Y side is carried out, three “roller conveyors located under the glass substrate W1” Of the “unit set”, the three roller conveyor units 100 and 110 located on the + Y side are driven.

  When the glass substrate W is carried into the storage cassette 10, the operation is almost the reverse of the operation at the time of carrying out described above. The glass substrate W is carried in in order from the lowermost slot among the slots in which the glass substrate W is not accommodated.

<Moving unit and lifting unit>
With reference to FIGS. 1 and 2, the moving unit 50 includes base members 51 provided on both sides of the individual conveyance conveyor 31 in the Y direction. On each base member 51, a motor 52, a pair of drive pulleys 53 that are rotationally driven by the motor 52, and a pair of driven pulleys 54 are mounted. There are a total of four sets of the drive pulley 53 and the driven pulley 54, and the belt 55 is wound between the drive pulley 53 and the driven pulley 54 of each set. By driving the motor 52, the drive pulley 53 rotates and the belt 55 travels.

  The belts 55 extend across the individual conveyance conveyor 31 in the Y direction, and pass through a space between two “sets of roller conveyor units” that are adjacent to each other. A mounting member 56 or 57 is fixed on each belt 55. FIG. 9 is a perspective view of the mounting members 56 and 57. The mounting members 56 and 57 are formed by forming hemispherical protrusions 56 a and 57 a on a plate-like member having substantially the same width as the belt 55. A rectangular parallelepiped positioning member 56b protruding from the protrusion 56a is formed at the + Y side end of the mounting member 56, and a rectangular parallelepiped protruding from the protrusion 57a at the −Y side end of the mounting member 57. A positioning member 57b having a shape is formed.

  The mounting members 56 and 57 function as a mounting unit for mounting the glass substrate W on the individual transport conveyor 31 and support the glass substrate W from below. The placement members 56 and 57 move in the Y direction as the belt 55 travels. The glass substrate W is placed on the protrusions 56a and 57a. By making the protrusions 56a and 57a hemispherical, the contact area between the glass substrate W and the protrusions 56a and 57a is reduced, and the glass substrate W is less damaged.

  The positioning members 56b and 57b perform positioning of the glass substrate W (adjustment of the direction and position of the glass substrate W) by the side surfaces of the positioning members 56b and 57b coming into contact with the edge of the glass substrate W. In the case of this embodiment, since one of the placement members 56 or 57 is provided on each of the four belts 55, there are a total of four positioning members 56b and 57b, which are in the X direction and the Y direction. The glass substrate W is positioned at four locations spaced apart from each other.

  Next, the lifting unit 60 will be described with reference to FIG. The elevating unit 60 is disposed below each base member 51 for each base member 51. Therefore, in the case of this embodiment, the raising / lowering unit 60 is provided in the Y direction both sides of the separate conveyance conveyor 31, respectively, and two in total are provided.

  Each lifting unit 60 includes a base member 61. A plurality of support columns 62 are erected on the base member 61, and the support columns 62 support the base member 51. The support 62 is composed of, for example, a cylinder and a rod, and can extend and contract in the Z direction. On the base member 61, a motor 63 and a pair of cam plates 64 that are rotated by driving the motor 63 are provided. The cam surface of the cam plate 64 is in contact with the lower surface of the base member 51, and the base member 51 is raised and lowered by the rotation. As the base member 51 moves up and down, the support 62 is expanded and contracted.

  In the present embodiment, the moving unit 50 is lifted and lowered by performing the lifting and lowering operations by the two lifting units 60 synchronously. Thereby, the mounting members 56 and 57 are moved up and down in the Z direction, and the mounting members 56 and 57 and the individual transport conveyor 31 are relatively moved in the Z direction. However, the individual conveyor 31 may be moved up and down in the Z direction so that the placing members 56 and 57 and the individual conveyor 31 are moved relatively in the Z direction.

  FIG. 10 is a diagram showing the lifting operation of the lifting unit 60 and the lifting and lowering of the mounting member 56 accompanying this. The same applies to the raising and lowering of the mounting member 57. In FIG. 10, only the main part of the elevating unit 60 is shown. The raising / lowering unit 60 raises / lowers the mounting member 56 between two positions, a lowered position and an elevated position.

  The left side of FIG. 10 shows a case where the mounting member 56 is in the lowered position. In this case, the lifting unit 60 is in a state where the top of the cam plate 64 faces the Y direction. The mounting member 56 is at a position where the rollers 101 of the roller conveyor unit 100 constituting the individual transport conveyor 31 are lower than the transport height L for transporting the glass substrate W.

  The right side of FIG. 10 shows a case where the mounting member 56 is in the raised position. In this case, the lifting unit 60 is in a state where the top of the cam plate 64 faces the + Z direction. That is, the cam plate 64 is rotated 90 degrees by driving the motor 63 from the state shown on the left side of FIG. 10, and the base member 51 is pushed up. Thereby, the movement unit 50 rises. The protruding portion 56 a of the mounting member 56 is located at a position higher than the conveyance height L. The glass substrate W is placed on the protrusion 56a away from the roller 101. The belt 55 is at a position lower than the conveyance height L.

  When the glass substrate W on the individual transport conveyor 31 is moved in the Y direction by the moving unit 50, the glass substrate W is placed on both the placement member 56 and the placement member 57. And the glass substrate W is pinched by the positioning members 56b and 57b by moving the mounting member 56 and the mounting member 57 in directions opposite to each other (directions approaching each other). For example, in the state on the right side of FIG. 10, the positioning member 56 b is moved in the −Y direction, and the positioning member 56 b is brought into contact with the edge of the glass substrate W. At that time, the glass substrate W slides on the protrusion 56a.

  By sandwiching the glass substrate W by the positioning members 56b and 57b, the orientation of the glass substrate W is adjusted (defined). Thereby, when the direction of the glass substrate W inclines in the process of conveyance, direction correction can be performed. Subsequently, by moving the mounting member 56 and the mounting member 57 in the same direction, the glass substrate W moves in the Y direction while being held by the positioning members 56b and 57b.

<Control device>
FIG. 11 is a block diagram illustrating a configuration of the control device 200 of the substrate transfer system A. The control device 200 provides a CPU 201 that controls the entire substrate transfer system A, a work area for the CPU 201, a RAM 202 that stores variable data and the like, and fixed data such as control programs and control data. ROM 203. The RAM 202 and the ROM 203 can employ other storage means.

  An input interface (I / F) 204 is an interface between the CPU 201 and various sensors (for example, the sensors 81a and 113), and the CPU 201 acquires detection results of various sensors via the input I / F 204. An output interface (I / F) 205 is an interface between the CPU 201 and various motors (for example, motors 52, 63, 87a, motors in the drive boxes 102, 112, etc.). The CPU 201 is connected via the output I / F 204. Control various motors.

  A communication interface (I / F) 206 is an interface between the host computer 300 that controls the entire substrate processing equipment including the substrate transfer system A and the CPU 201, and the CPU 201 controls the substrate transfer system A according to a command from the host computer 300. To control.

<Example of substrate transfer by substrate transfer system A>
<Conveyance example of simultaneous conveyor>
12 and 13 are views showing an example of a mode in the case where the glass substrate W1 is transported from the transfer conveyor 32 to the simultaneous transport conveyor 30. FIG. By driving each “set of roller conveyor units” synchronously, a plurality of glass substrates W1 can be arranged in the X direction and simultaneously conveyed.

  The example of FIG. 12 shows an example in which two glass substrates W1 on the transfer conveyor 32 are simultaneously conveyed. In the example of FIG. 12, two glass substrates W <b> 1 positioned on the −X side are first transported from the transfer conveyor 32 to the simultaneous transport conveyor 30. Subsequently, the simultaneous conveyance conveyor 30 simultaneously conveys two glass substrates W1 in the + X direction, while the transfer conveyor 32 conveys two glass substrates W1 positioned on the −X side to the simultaneous conveyance conveyor 30. Yes. Finally, four glass substrates W1 are located on the simultaneous conveyance conveyor 30.

  The example of FIG. 13 shows an example in which four glass substrates W1 on the transfer conveyor 32 are simultaneously conveyed. In the example of FIG. 13, the transfer conveyor 32 conveys four glass substrates W1 simultaneously in the + X direction, and the simultaneous conveyer 30 also conveys four glass substrates W1 simultaneously in the + X direction. Finally, four glass substrates W1 are located on the simultaneous conveyance conveyor 30.

  12 and 13, the example of transporting the glass substrate W1 has been described. However, the same transport is possible for the glass substrate W2 having a smaller size than the glass substrate W1. 12 and 13, the case where the glass substrate W1 is carried out from the transfer conveyor 32 to the simultaneous transfer conveyor 30 has been described. However, when the glass substrate W1 is transferred from the simultaneous transfer conveyor 30 to the transfer conveyor 32, A plurality of glass substrates W1 can be arranged and transported simultaneously in the Y direction.

  In this embodiment, a plurality of glass substrates can be arranged and conveyed simultaneously in the Y direction between the simultaneous conveyance conveyor 30 and the transfer conveyor 32 as described above, and the glass substrate is carried out and carried into the storage cassette 10. Can improve the efficiency.

  In the present embodiment, the simultaneous conveyance conveyor 30 and the transfer conveyor 32 are configured by a plurality of roller conveyor units 100 and 110 that are driven independently, but only a plurality of glass substrates are arranged in the Y direction and simultaneously conveyed. If so, the simultaneous transfer conveyor 30 and the transfer conveyor 32 can be configured by a single roller conveyor unit like the transfer conveyor 70, respectively.

  However, as in the present embodiment, the simultaneous conveyance conveyor 30 and the transfer conveyor 32 are configured by a plurality of roller conveyor units 100 and 110 that are independently driven. is there. For example, a conveyance mode in which glass substrates are conveyed one by one can be selectively employed. Further, for example, a transport mode in which a plurality of glass substrates are transported in a reverse direction, such as a glass substrate in the + X direction on the + Y side and a glass substrate in the −X direction on the −Y side, can be selectively employed. .

<Conveying example of individual conveyor>
In the present embodiment, a plurality of glass substrates carried out from the storage cassette 10 can be transported in parallel by the simultaneous transport conveyor 30. That is, it is possible to arrange a plurality of glass substrates in the Y direction and to simultaneously convey these glass substrates. Thereby, conveyance capability can be improved in the middle of conveyance of a glass substrate.

  On the other hand, the processing apparatus 20 carries in and carries out the glass substrates one by one. Therefore, it is necessary to convert the number of conveyed sheets from a plurality of sheets to one. The individual transport conveyor 31, the moving unit 50, and the lifting unit 60 convert the number of transported sheets. Thereby, the glass substrate can be delivered to the processing apparatus 20 one by one.

<Carrying glass substrate into processing equipment>
14 to 16 are diagrams illustrating an example in which the glass substrates W1 are conveyed one by one from the individual conveyor 31 to the processing apparatus 20. The upper side of FIG. 14 shows a mode in which two glass substrates W1 are simultaneously transferred onto the individual transfer conveyor 31. The two glass substrates W1 are placed on three “sets of roller conveyor units” on the −X side.

  From this state, one of the two glass substrates W1 is transported in the + X direction as shown on the lower side of FIG. At that time, the roller conveyor units 100 and 110 are selectively driven according to the size of the glass substrate W1. For example, when the glass substrate W1 is transported from the upper side to the lower side in FIG. 14, the six roller conveyor units 100 and the six roller conveyor units 110 located on the + Y side are driven.

  Subsequently, the glass substrate W1 is moved in the Y direction to a position corresponding to the loading / unloading position of the processing apparatus 20. For this reason, first, as shown in the upper side of FIG. 15, the mounting members 56 and 57 in the lowered position are positioned in the vicinity of the edge of the glass substrate W1. The mounting member 56 is positioned near the + Y direction side edge of the glass substrate W1, and the mounting member 57 is positioned near the −Y direction side edge of the glass substrate W1. At this time, a part of the plurality of protrusions 56a and 57a is positioned below the glass substrate W1, and the positioning members 56b and 57b are not positioned below the glass substrate W1.

  Subsequently, the mounting members 56 and 57 are raised to the raised position by driving the lifting unit 60 (not shown). Thereby, the glass substrate W1 is separated from the rollers 101 and 111 and is positioned on the mounting members 56 and 57 (right side in FIG. 10). After raising the placement members 56 and 57 to the raised position, the placement member 56 is moved in the −Y direction and the placement member 57 is moved in the + Y direction, whereby the positioning member 56b and the positioning member 57b move the glass substrate W1. Is held (the lower side of FIG. 15). Thereby, the direction of the glass substrate W1 is adjusted. At this time, it is desirable that the distance between the side surfaces of the positioning member 56b and the positioning member 57b (surface contacting the edge of the glass substrate W1) is substantially the same as or slightly wider than the width of the glass substrate W1.

  Subsequently, the mounting members 56 and 57 are moved in the same direction in the Y direction, and the glass substrate W1 is transported to a position corresponding to the loading / unloading position of the processing apparatus 20 (the upper diagram in FIG. 16). Thereby, positioning of the glass substrate W1 with respect to the processing apparatus 20 is made. In the case of the present embodiment, the position corresponding to the carry-in / out position of the processing device 20 is the approximate center in the Y direction of the individual transport conveyor 31, but is not limited to this. Also good.

  Subsequently, the mounting members 56 and 57 are lowered to the lowered position by driving the elevating unit 60 (not shown). Then, as shown in the lower side of FIG. 16, the six roller conveyor units 110 located below the glass substrate W <b> 1 and the transfer conveyor 70 are driven to transport the glass substrate W <b> 1 to the processing apparatus 20.

  The other glass substrate W1 remaining on the individual transfer conveyor 31 is also transferred to the processing apparatus 20 in the same manner. In this way, the glass substrates W1 can be transferred to the processing apparatus 20 one by one.

  When the glass substrate W2 shown in the lower diagram of FIG. 5 is carried into the processing apparatus 20, the same procedure can be adopted, but the procedure shown in FIGS. 17 to 20 can also be adopted. 17 to 20 are diagrams showing an example in which the glass substrates W2 are transported one by one from the individual transport conveyor 31 to the processing apparatus 20.

  The upper side of FIG. 17 shows a mode in which three glass substrates W2 are simultaneously conveyed onto the individual conveyor 31. The three glass substrates W2 are placed on three “sets of roller conveyor units” on the −X side. From this state, the three glass substrates W2 are simultaneously transported in the + X direction as shown in the lower side of FIG.

  Subsequently, the central glass substrate W <b> 2 is positioned at a position corresponding to the loading / unloading position of the processing apparatus 20. For this reason, after placing the placing members 56 and 57 in the lowered position in the vicinity of the edge of the central glass substrate W2, they are raised to the raised position and the central glass substrate W2 is placed by the placing members 56 and 57. Put. Then, as shown in the upper side of FIG. 18, the glass substrate W2 is held between the positioning member 56b and the positioning member 57b by moving the mounting member 56 in the -Y direction and the mounting member 57 in the + Y direction. Then, the glass substrate W2 is positioned.

  Next, the mounting members 56 and 57 are lowered to the lowered position by driving an elevating unit 60 (not shown). Then, as shown on the lower side of FIG. 18, the six roller conveyor units 110 positioned below the glass substrate W <b> 2 and the transfer conveyor 70 are driven to transport the glass substrate W <b> 2 to the processing apparatus 20.

  Next, the two glass substrates W2 remaining on the individual conveyance conveyor 31 are sequentially conveyed to the processing apparatus 20. First, one glass substrate W2 is placed on the placement members 56 and 57, and is sandwiched by the positioning members 56b and 57b to correspond to the loading / unloading position of the processing apparatus 20 as shown in the upper side of FIG. Move to position. Thereafter, as shown in the lower side of FIG. 19, the six roller conveyor units 110 located below the glass substrate W <b> 2 and the transfer conveyor 70 are driven to convey the glass substrate W <b> 2 to the processing apparatus 20.

  Subsequently, the one glass substrate W <b> 2 remaining on the individual transport conveyor 31 is transported to the processing apparatus 20. First, the glass substrate W2 is placed on the placement members 56 and 57, and is sandwiched between the positioning members 56b and 57b, so that the glass substrate W2 is positioned at a position corresponding to the loading / unloading position of the processing apparatus 20 as shown in the upper side of FIG. Moving. Thereafter, the six roller conveyor units 110 located below the glass substrate W2 and the transfer conveyor 70 are driven on the lower side of FIG. 20 to convey the glass substrate W2 to the processing apparatus 20.

<Unloading glass substrate from processing equipment>
FIGS. 21 to 24 are diagrams illustrating an example in which the glass substrates W1 are conveyed one by one from the processing apparatus 20 to the individual conveyance conveyor 31 and a plurality of glass substrates W1 are arranged in the Y direction on the individual conveyance conveyor 31. .

  The upper side of FIG. 21 shows a mode in which the first glass substrate W1 is unloaded from the processing apparatus 20. In this case, the transfer conveyor 70 and the six roller conveyor units 110 on the + X side of the individual transport conveyor 31 are driven, and the glass substrate W1 is placed on the six roller conveyor units 110 on the + X side of the individual transport conveyor 31. Position.

  Subsequently, the glass substrate W1 is moved in the Y direction. For this reason, first, as shown in the lower side of FIG. 21, the mounting members 56 and 57 in the lowered position are positioned in the vicinity of the edge of the glass substrate W1. And the mounting members 56 and 57 are raised to a raise position by the drive of the raising / lowering unit 60 (not shown). As a result, the glass substrate W1 is located on the mounting members 56 and 57 apart from the rollers 101 and 111. After raising the placement members 56 and 57 to the raised position, the placement member 56 is moved in the −Y direction and the placement member 57 is moved in the + Y direction, whereby the positioning member 56b and the positioning member 57b move the glass substrate W1. Is held (upper mode in FIG. 22). Thereby, the direction of the glass substrate W1 is adjusted.

  Subsequently, the mounting members 56 and 57 are moved in the same direction in the Y direction, and the glass substrate W1 is moved in the Y direction. The glass substrate W1 moves to a position where the plurality of glass substrates W1 can be conveyed in parallel according to the size. In the example shown in the lower side of FIG. 22, the glass substrate W <b> 1 is moved in the + Y direction and is moved to the + Y direction end of the individual transport conveyor 31.

  Subsequently, the mounting members 56 and 57 are lowered to the lowered position by driving the elevating unit 60 (not shown). Then, as shown in the upper side of FIG. 23, the glass substrate W1 is moved in the −X direction, and the three roller conveyor units 100 and the three rollers that are positioned on the −X side and the + Y side of the individual transport conveyor 31 are moved. It is located on the conveyor unit 110. During this movement, the six roller conveyor units 100 and the six roller conveyor units 110 located on the + Y side are driven.

  Next, as shown in the lower side of FIG. 23, the second glass substrate W <b> 1 is unloaded from the processing apparatus 20. Similarly to the conveyance of the first glass substrate W1, the transfer conveyor 70 and the six roller conveyor units 110 on the + X side of the individual conveyance conveyor 31 are driven to individually convey the second glass substrate W1. Positioned on the six roller conveyor units 110 on the + X side of the conveyor 31.

  Subsequently, the second glass substrate W <b> 1 is moved in the Y direction by driving the elevating unit 60 (not shown) and the moving unit 50. As shown in the upper side of FIG. 24, the second glass substrate W1 moves in the opposite direction (−Y direction) to the first glass substrate W1. Subsequently, the second glass substrate W1 is moved in the −X direction, and the three roller conveyor units 100 and the three roller conveyor units are positioned on the −X side and the −Y side of the individual transport conveyor 31. 110. As a result, the two glass substrates W1 are placed side by side in the Y direction on the individual conveyor 31. Thereafter, the two glass substrates W1 are simultaneously transported to the simultaneous transport conveyor 30.

  When the glass substrate W2 shown in the lower diagram of FIG. 5 is unloaded from the processing apparatus 20, the same procedure can be adopted, but the procedure shown in FIGS. 25 to 28 can also be adopted. 25 to 28 are diagrams showing an example in which the glass substrates W2 are conveyed one by one from the processing apparatus 20 to the individual conveyance conveyor 31 and a plurality of glass substrates W2 are arranged in the Y direction on the individual conveyance conveyor 31. .

  First, as shown in the upper side of FIG. 25, the first glass substrate W2 is unloaded from the processing apparatus 20. In this case, the transfer conveyor 70 and the six roller conveyor units 110 on the + X side of the individual transport conveyor 31 are driven to transfer the first glass substrate W2 to the six roller conveyors on the + X side of the individual transport conveyor 31. Position on unit 110.

  Subsequently, the direction of the first glass substrate W2 is adjusted by driving the elevating unit 60 (not shown) and the moving unit 50 as shown in the lower side of FIG. 26, the glass substrate W2 is moved in the Y direction by driving the moving unit 50. In the example on the upper side of FIG. 26, the first glass substrate W2 is positioned on the three roller conveyor units 100 by moving in the + Y direction.

  Next, as shown in the lower side of FIG. 26, the second glass substrate W <b> 2 is unloaded from the processing apparatus 20. Similarly to the conveyance of the first glass substrate W2, the transfer conveyor 70 and the six roller conveyor units 110 on the + X side of the individual conveyance conveyor 31 are driven to individually convey the second glass substrate W2. Positioned on the six roller conveyor units 110 on the + X side of the conveyor 31.

  Subsequently, the direction of the second glass substrate W2 is adjusted by driving the elevating unit 60 (not shown) and the moving unit 50, as shown in the upper side of FIG. 27, the second glass substrate W2 is moved in the Y direction by driving the moving unit 50. In the lower example in FIG. 27, the second glass substrate W2 is positioned on the three roller conveyor units 100 by moving in the + Y direction.

  Next, as shown in the upper side of FIG. 28, the third glass substrate W <b> 2 is unloaded from the processing apparatus 20. Similarly to the conveyance of the first and second glass substrates W2, the transfer conveyor 70 and the six roller conveyor units 110 on the + X side of the individual conveyance conveyor 31 are driven to provide a third glass substrate. W2 is positioned on the six roller conveyor units 110 on the + X side of the individual conveyor 31.

  Subsequently, the direction of the third glass substrate W2 is adjusted by driving the elevating unit 60 and the moving unit 50 as shown in the lower side of FIG. As a result, the three glass substrates W2 are placed side by side in the Y direction on the individual conveyor 31. The three glass substrates W2 are placed on three “sets of roller conveyor units” on the + X side. Thereafter, the three glass substrates W2 are simultaneously transferred to the simultaneous transfer conveyor 30 via the three “sets of roller conveyor units” on the −X side.

  In the present embodiment, the position corresponding to the loading / unloading position of the processing device 20 is set to the approximate center of the individual conveyor 31 in the Y direction. However, the present invention is not limited to this. It is good also as a position.

<Specification of glass substrate size>
In the present embodiment, as described above, the glass substrates W1 and W2 having different sizes can be transported. This is realized by selectively driving the roller conveyor units 100 and 110 constituting the individual transfer conveyor 31 and driving the moving unit 50 according to the size of the glass substrate and the transfer position. is doing. When carrying glass substrates having different sizes, it is necessary to specify the size of the glass substrate and set the size for the control of the control device 200.

  The first method for setting the size of the glass substrate is to store only glass substrates of the same size in one storage cassette 10, and the size of the glass substrate is controlled by the control device 200 in units of the storage cassette 10. Set. In this case, it is a premise that all glass substrates transported on the substrate transport system A are glass substrates of the same size.

  In the second method of setting the size of the glass substrate, the size of the glass substrate is detected one by one in the individual transport conveyor 31 and the size of the glass substrate is individually set for the control of the control device 200. In this case, it is not necessary for all the glass substrates conveyed on the substrate conveyance system A to be the same size glass substrate. For example, it is possible to store a different size glass substrate for each slot of the storage cassette 10. It becomes. It is also possible to store glass substrates of different sizes in one slot.

  Sensors for detecting the size of the glass substrate can be provided at both ends of the individual conveyance conveyor 31 in the X direction. For example, sensors 90 and 91 can be provided as shown in FIG. The sensor 90 detects the size of the glass substrate carried out from the processing apparatus 20. In FIG. 1, a pair of sensors 90 are provided apart from each other in the Y direction. When the glass substrate W1 is unloaded, both are turned on, and when the glass substrate W2 is unloaded, only one is ON or both. Is turned off. The sensor 91 detects the size of the glass substrate transported from the simultaneous transport conveyor 30 to the individual transport conveyor 31. A pair of sensors 91 are also provided apart from each other in the Y direction. When the glass substrate W1 is transported, both are turned on. When the glass substrate W2 is transported, only one is turned on or both are turned off. .

Second Embodiment
In the first embodiment, the example in which the glass substrate is transported between one storage cassette 10 and one processing apparatus 20 has been described. However, between the plurality of storage cassettes 10 and one processing apparatus 20. Thus, the glass substrate can be transported. FIG. 29 is a plan view showing a layout of a substrate transfer system B according to another embodiment of the present invention. In the figure, the same components as those of the substrate transfer system A are denoted by the same reference numerals, description thereof is omitted, and only different components are described.

  In the substrate transfer system B, two storage cassettes 10 are arranged side by side. The two storage cassettes 10 are arranged side by side in the Y direction. The elevating device 80, the transfer conveyor 32, the simultaneous transfer conveyor 30, and the individual transfer conveyor 31 are arranged side by side in the X direction for each storage cassette 10. The transfer conveyor 70 and the processing apparatus 20 are arranged apart from each storage cassette 10 in the X direction, and are arranged on the end side in the + X direction of one individual conveyance conveyor 31.

  The moving unit 50 is disposed across the two individual conveyors 31. That is, two individual conveyance conveyors 31 are arranged between the pair of base members 51, and each belt 55 crosses the two individual conveyance conveyors 31. Thereby, a total of four mounting members 56 and 57 fixed on each belt 55 can move on the two individual conveyors 31. A lifting unit 60 (not shown) is disposed below each base member 51.

  In the substrate transport system B, the moving unit 50 not only moves the glass substrate in the Y direction on the individual transport conveyor 31, but also moves the glass substrate in the Y direction between the two individual transport conveyors 31. FIG. 30 is an explanatory diagram of a transport mode of the glass substrate W on the two individual transport conveyors 31.

  As shown in the figure, the individual transport conveyor 31 transports the glass substrate W in the X direction, and the moving unit 50 moves the glass substrate W in the Y direction. The moving unit 50 also moves the glass substrate W between the individual conveyors 31. Conversion of the number of transported sheets on the individual transport conveyor 31 is the same as in the first embodiment.

  In the present embodiment, the glass substrate W can be transported between the processing apparatus 20 and the two storage cassettes 10 by moving the glass substrate W across the two individual transport conveyors 31 by the moving unit 50. It is possible to further improve the conveyance capability of the glass substrate W.

  In this embodiment, two storage cassettes 10 are used, but three or more storage cassettes 10 may be used. In this case, a simultaneous transfer conveyor 30, an individual transfer conveyor 31 and the like can be provided for each storage cassette 10. And a movement unit can be made to move the glass substrate W across each separate conveyance conveyor 31. FIG.

<Third Embodiment>
In the second embodiment, the moving unit 50 is configured to move the glass substrates W one by one in the Y direction. However, the moving unit 50 may be configured to simultaneously move a plurality of glass substrates W in the Y direction. .

  FIG. 31 is a plan view showing a layout of a substrate transfer system B ′ according to another embodiment of the present invention. In the figure, the same components as those of the substrate transfer system B are denoted by the same reference numerals, description thereof is omitted, and only different components are described.

  As described above, the individual conveyor 31 can place a plurality of glass substrates W (two) in the X direction. The moving unit 50 ′ of the present embodiment simultaneously moves a plurality of glass substrates W arranged in the X direction in the Y direction.

  The moving unit 50 ′ is provided with a total of eight belts 55, and the + X side four belts 55 are placed on the + X side six roller conveyors 100 and the six roller conveyors 110, respectively. The four belts 55 on the −X side are used to move the glass substrate W placed on the six roller conveyors 100 and the six roller conveyors 110 on the −X side. It is done.

  One mounting member 56 or 57 is provided on each belt 55, and two mounting members 56 and two mounting members 57 are used for one glass substrate W. In the case of this embodiment, each mounting member 56 moves simultaneously, and each mounting member 57 also moves simultaneously. However, it is also possible to adopt a configuration that moves individually.

  The base member 51 ′ of the moving unit 50 ′ has a length in the X direction that is larger than that of the base member 51 described above, and includes a motor 52, four drive pulleys 53, and four driven pulleys 54, respectively. ing. A lifting unit 60 (not shown) is disposed below each base member 51 '.

  32 and 33 are explanatory diagrams of a mode of transporting the glass substrate W on the two individual transport conveyors 31. FIG. As shown in FIG. 32, in this embodiment, it is possible to carry in and out a plurality of glass substrates W continuously between the individual transport conveyor 31 and the processing apparatus 20 in the X direction. As shown in FIG. 33, the moving unit 50 ′ can simultaneously move a plurality of glass substrates W arranged in the X direction between the individual transport conveyors 31 in the Y direction.

  In the present embodiment, the plurality of glass substrates W arranged in the X direction can be simultaneously moved in the Y direction, so that the conveyance capability of the glass substrate W can be further improved.

<Fourth embodiment>
In the second embodiment, the moving unit 50 and the lifting unit 60 are configured to move the glass substrate W in the Y direction between the individual transport conveyors 31. In addition, the glass substrate W is also moved between the simultaneous transport conveyors 30. W may be configured to move in the Y direction.

  FIG. 34 is a plan view showing a layout of a substrate transfer system B ″ according to another embodiment of the present invention. In FIG. Only different configurations will be described.

  In the present embodiment, the simultaneous conveyance conveyor 30 is also provided with the moving unit 50 ′ described in the third embodiment. A lifting unit 60 (not shown) is disposed below each base member 51 ′ of the moving unit 50 ′ provided on the simultaneous conveyance conveyor 30. Further, instead of the moving unit 50 ′, the moving unit 50 according to the first and second embodiments may be provided on the simultaneous transfer conveyor 30.

  In the present embodiment, since the glass substrate W can be moved in the Y direction even between the simultaneous conveyance conveyors 30, for example, when the glass substrate W is transferred between the storage cassettes 10, without passing through the individual conveyance conveyor 31. The glass substrate W can be conveyed. Further, in the present embodiment, by using the moving unit 50 ′, a plurality of glass substrates W arranged in the X direction can be simultaneously moved in the Y direction between the simultaneous transfer conveyors 30. The carrying capacity can be further improved.

  In addition, about the board | substrate conveyance system B, B ', B' 'as described in 2nd Embodiment thru | or 4th Embodiment demonstrated above, it is not adjoining to the processing apparatus 20 among the two separate conveyance conveyors 31. The individual conveyance conveyor 31 is not necessarily required to individually convey the glass substrate. Therefore, instead of the + Y-side individual conveyor 31, a conveyor that has a width capable of conveying a plurality of glass substrates W in parallel but does not have a function of individually conveying the glass substrates W (a conveyor that functions only as a simultaneous conveyor) ). In this case, the conveyor may be composed of a single roller conveyor unit or a plurality of roller conveyor units arranged in the X direction.

<Fifth Embodiment>
In the first embodiment, the storage cassette 10 stores a plurality of glass substrates in the Y direction, and the transfer conveyor 32 mounts the plurality of glass substrates in the Y direction and simultaneously conveys them. It can also be set as the structure conveyed one by one. However, in this case, it is necessary to convert the number of transported glass substrates. FIG. 35 is a plan view showing a layout of a substrate transfer system C according to another embodiment of the present invention. In the figure, the same components as those of the substrate transfer system A are denoted by the same reference numerals, description thereof is omitted, and only different components are described. Further, in the figure, the processing unit 20, the transfer conveyor 70, the individual transport conveyor 31, and the moving unit 50 and the lifting unit 60 that move the glass substrate on the individual transport conveyor 31 are omitted.

  The storage cassette 10 ′ of this embodiment stores one glass substrate W in each slot. The transfer conveyor 32 ′ for carrying out and carrying in the glass substrate W from the storage cassette 10 ′ is composed of three roller conveyor units 100, and conveys the glass substrates W one by one.

  An individual transfer conveyor 31 ′ is provided between the transfer conveyor 32 ′ and the simultaneous transfer conveyor 30. Individual conveyance conveyor 31 'is the same structure as the individual conveyance conveyor 31 mentioned above. The individual transport conveyor 31 ′ is provided with a moving unit 50 ′. The moving unit 50 ′ has the same configuration as the moving unit 50 described above. Below the base member 51 of each moving unit 50 ′, an elevating unit (not shown) having the same configuration as the elevating unit 60 described above is provided.

  That is, in the present embodiment, the substrate transport system A is provided with the above-described individual transport conveyor 31, the moving unit 50, and the lifting unit 60 on the storage cassette side. Thus, when the glass substrates W are unloaded from the storage cassette 10 ′, the glass substrates W are unloaded one by one by the transfer conveyor 32 ′, and a plurality of glass substrates W are arranged in the Y direction on the individual transfer conveyor 31 ′. They are placed side by side and transported in parallel to the simultaneous transport conveyor 30. When the glass substrates W are carried into the storage cassette 10 ′, the glass substrates W are transferred from the individual transfer conveyor 31 ′ to the transfer conveyor 32 ′ one by one and are carried into the storage cassette 10 ′.

<Sixth Embodiment>
In the first to fifth embodiments, the placing members 56 and 57 of the moving units 50 and 50 ′ are moved by the belt transmission mechanism. However, other mechanisms can be adopted. FIG. 36 is a view showing another example of the moving mechanism for the mounting members 56 and 57. The moving mechanism of FIG. 36 uses a ball screw mechanism. In the Y direction, a rail member 501 and a ball screw 502 are disposed, and these define the movement track of the mounting members 56 and 57. A ball nut 503 is screwed onto the ball screw 502, and the ball nut 503 is slidable on the rail member 501. The mounting members 56 and 57 are fixed on the ball nut 503.

  Accordingly, the mounting members 56 and 57 are moved in the Y direction by rotating the ball screw 502 by a motor (not shown). In addition, a moving mechanism using a linear motor can be employed.

  In the first embodiment, the elevating unit 60 is configured to elevate and lower the entire moving units 50 and 50 ′, but it is only necessary that the mounting members 56 and 57 can elevate. For example, in the example of the moving mechanism shown in FIG. 36, an actuator that expands and contracts in the Z direction is provided between the mounting members 56 and 57 and the ball nut 503, and the mounting members 56 and 57 are configured to move up and down. Also good.

Claims (13)

A substrate transport system for transporting a substrate between a storage cassette for storing a substrate and a processing apparatus for processing the substrate,
A plurality of the substrates disposed on the storage cassette side and having a width that allows the plurality of substrates to be placed side by side in a direction perpendicular to the substrate transport direction; and the plurality of the substrates can be transported simultaneously in the transport direction. 1 conveyor,
The processing apparatus side is arranged continuously with the first conveyor, has a width that allows the plurality of substrates to be placed side by side in a direction orthogonal to the transport direction, and individually separates the plurality of substrates. A second conveyor that can be transported in the transport direction;
A moving unit that has a placement unit for placing the substrate on the second conveyor, and moves the substrate in a direction perpendicular to the transport direction on the second conveyor;
An elevating unit that elevates and lowers the placing portion and the second conveyor relatively;
A substrate transfer system comprising: A third conveyor that is continuous with the first conveyor and is disposed in a lower portion of the storage cassette and places the substrate stored in the storage cassette and transports the substrate in the transport direction;
An elevating device that relatively elevates and lowers the storage cassette and the third conveyor;
Further comprising
The storage cassette includes a plurality of slots in the vertical direction for storing the substrate,
Each slot can store the plurality of substrates in a direction perpendicular to the transport direction,
The third conveyor has a width that allows the plurality of substrates to be placed side by side in a direction orthogonal to the transport direction, and simultaneously transports the plurality of substrates in the transport direction. The substrate transfer system according to claim 1. The second conveyor includes a plurality of conveyor units that are selectively driven according to the size of the substrate,
The substrate transfer system according to claim 1, wherein the moving unit moves the substrate to a position corresponding to a size of the substrate.   The substrate transfer system according to claim 1, wherein the moving unit moves the substrate and adjusts the orientation of the substrate.   The substrate transport system according to claim 1, wherein the first conveyor has a length that allows a plurality of the substrates to be placed side by side in the transport direction.   2. The substrate transfer system according to claim 1, wherein the first and second conveyors are constituted by a plurality of roller conveyor units.   The substrate transfer system according to claim 2, wherein the third conveyor includes a plurality of roller conveyor units.   The substrate transfer system according to claim 1, wherein the storage cassette and the processing apparatus are spaced apart from each other in the transfer direction. A substrate transport system for transporting a substrate between first and second storage cassettes for storing a substrate, and a processing apparatus for processing the substrate, which is disposed apart from the first and second storage cassettes. There,
The substrate is disposed on the first storage cassette side, has a width that allows a plurality of the substrates to be placed side by side in a direction orthogonal to the substrate transport direction, and simultaneously transports the plurality of substrates in the transport direction. A possible first simultaneous conveyor,
It is disposed on the second storage cassette side, has a width that allows a plurality of the substrates to be placed side by side in a direction orthogonal to the transport direction, and can simultaneously transport the plurality of substrates in the transport direction. A second simultaneous transfer conveyor;
The processing apparatus side is arranged continuously with the first simultaneous transfer conveyor, has a width that allows the plurality of substrates to be placed side by side in a direction orthogonal to the transfer direction, and the plurality of substrates A first individual transport conveyor that can be individually transported in the transport direction;
The processing apparatus side is arranged continuously with the second simultaneous transport conveyor, has a width that allows the plurality of substrates to be placed side by side in a direction orthogonal to the transport direction, and the plurality of substrates A second individual transport conveyor that can be individually transported in the transport direction;
A placement unit for placing the substrate on the first and second individual transport conveyors, and the substrate in a direction orthogonal to the transport direction across the first and second individual transport conveyors; A moving mobile unit;
A lifting unit that relatively lifts and lowers the placing portion and the first and second individual conveyors;
A substrate transfer system comprising: A second placement section for placing the substrate on the first and second simultaneous transport conveyors, across the first and second simultaneous transport conveyors, in a direction perpendicular to the transport direction; A second moving unit for moving the substrate;
A second lifting / lowering unit that relatively lifts and lowers the second placement unit and the first and second simultaneous transfer conveyors;
The substrate transfer system according to claim 9, further comprising: The first and second individual transport conveyors have a length that allows a plurality of the substrates to be placed side by side in the transport direction,
The placement section is provided for each of the plurality of substrates placed side by side in the transport direction on the first and second individual transport conveyors,
The substrate transport system according to claim 9, wherein the moving unit simultaneously transports the plurality of substrates placed side by side in the transport direction in a direction orthogonal to the transport direction. The first and second storage cassettes are arranged side by side in a direction orthogonal to the transport direction,
The substrate transfer system according to claim 9, wherein the processing apparatus is disposed apart from the first and second storage cassettes in the transfer direction. A substrate transport system for transporting a substrate between first and second storage cassettes for storing a substrate, and a processing apparatus for processing the substrate, which is disposed apart from the first and second storage cassettes. There,
The substrate is disposed on the first storage cassette side, has a width that allows a plurality of the substrates to be placed side by side in a direction orthogonal to the substrate transport direction, and simultaneously transports the plurality of substrates in the transport direction. A possible first simultaneous conveyor,
It is disposed on the second storage cassette side, has a width that allows a plurality of the substrates to be placed side by side in a direction orthogonal to the transport direction, and can simultaneously transport the plurality of substrates in the transport direction. A second simultaneous transfer conveyor;
The processing apparatus side is arranged continuously with the first simultaneous transfer conveyor, has a width that allows the plurality of substrates to be placed side by side in a direction orthogonal to the transfer direction, and the plurality of substrates An individual conveyor that can be individually conveyed in the conveying direction;
A third simultaneous transfer conveyor that is arranged continuously with the second simultaneous transfer conveyor on the processing apparatus side and has a width that allows the plurality of substrates to be placed side by side in a direction perpendicular to the transfer direction;
A direction perpendicular to the conveying direction across the individual conveying conveyor and the third simultaneous conveying conveyor, having a placement unit for placing the substrate on the individual conveying conveyor and the third simultaneous conveying conveyor. A moving unit for moving the substrate to
A lifting unit that relatively moves up and down the placement unit, the individual transport conveyor and the third simultaneous transport conveyor;
A substrate transfer system comprising:

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