CN106369955B - Film dries machine support and film dryer - Google Patents
Film dries machine support and film dryer Download PDFInfo
- Publication number
- CN106369955B CN106369955B CN201610786193.7A CN201610786193A CN106369955B CN 106369955 B CN106369955 B CN 106369955B CN 201610786193 A CN201610786193 A CN 201610786193A CN 106369955 B CN106369955 B CN 106369955B
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- CN
- China
- Prior art keywords
- film
- air inlet
- group
- support
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
- F26B9/10—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in the open air; in pans or tables in rooms; Drying stacks of loose material on floors which may be covered, e.g. by a roof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/06—Chambers, containers, or receptacles
- F26B25/14—Chambers, containers, receptacles of simple construction
- F26B25/18—Chambers, containers, receptacles of simple construction mainly open, e.g. dish, tray, pan, rack
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Drying Of Solid Materials (AREA)
Abstract
A kind of film drying machine support, including column and multiple support portions.Multiple support portions are set at the different height for being connected to the column, are used to support film to be dried.Spacer portion is provided between the every two adjacent support portion, the spacer portion is used for the film to be dried being spaced on the adjacent support portion, and the film of top is avoided to be fallen on the film of lower section because of fragmentation.The invention further relates to a kind of film dryers with film drying machine support.By the way that the spacer portion is arranged between the adjacent support portion, film fragments fall to lower film and damage and/or pollute to lower film when can prevent fragmentation from occurring.
Description
Technical field
The present invention relates to display pannel production field more particularly to a kind of film drying machine supports and film dryer.
Background technique
In display pannel manufacturing process, needs for the film after exposure development to be placed in dryer and dry, by institute
Pattern (pattern) solidification formed on film is stated, the dryer dries equipment after being generally piece leaf formula, and the dryer opens up
Ventilation window.But as film substrate is more and more thinner, size is increasing, the risk of substrate fragmentation is also being continued to increase.It is right
For film dryer, inner space is limited, once in the film dryer fragmentation occurs for substrate, then fragment is clear
It is very big to manage difficulty, it is time-consuming and laborious.
Summary of the invention
In view of this, it is necessary to provide the film of fragment easy to clean drying machine support and film dryers.
A kind of film drying machine support, including column and multiple support portions.Multiple support portions, which are set to, to be connected to
At the different height of the column, it is used to support film to be dried.Interval is provided between the every two adjacent support portion
Portion, the spacer portion are used for the film to be dried being spaced on the adjacent support portion, avoid the film of top because of fragmentation
And it falls on the film of lower section.
Further, each described spacer portion includes plate portion and the exhaust portion that is set in the plate portion.
Further, the area in the plate portion be greater than the corresponding spacer portion institute energy support film maximum area.
Further, the use stainless steel in the plate portion is made.
Further, the material in the plate portion is SUS 403.
Further, each described exhaust portion includes two exhaust pipes, and two exhaust pipes are respectively arranged at
On two opposing surfaces in the corresponding plate portion.
Further, multiple air inlets are opened on each described exhaust pipe, the air inlet is along the exhaust pipe
Spaced lengthwise is simultaneously respectively communicated to exhaust equipment.
Further, the air inlet is divided into first group of air inlet, second group of air inlet, third group air inlet and the 4th
Group air inlet, first group of air inlet and the 4th group of air inlet are located at the both ends of the exhaust pipe, and described the
Two groups of air inlets and the third group air inlet are described between first group of air inlet and the 4th group of air inlet
First group of air inlet, second group of air inlet, the third group air inlet and the 4th group of air inlet are with side in parallel
Formula is connected to the exhaust equipment.
A kind of film dryer, it is characterised in that including cabin and be set to the intracorporal above-mentioned film drying in the cabin
Machine support.
Further, the cabin is provided with the window, and the exhaust portion is arranged close to the window.
Compared with the existing technology, by the way that the spacer portion is arranged between the adjacent support portion, fragmentation can be prevented
Film fragments fall to lower film and damage and/or pollute to lower film when generation.
Detailed description of the invention
Fig. 1 is the schematic diagram of the film dryer of embodiment of the present invention.
Fig. 2 is the perspective view of the bracket of the film dryer of Fig. 1.
Fig. 3 is the schematic diagram of the exhaust portion of the film dryer of embodiment of the present invention.
Fig. 4 is the top view of the exhaust portion of Fig. 3.
Specific embodiment
Fig. 1-4 is please referred to, a kind of film dryer 100 of embodiment of the present invention offer is provided.In present embodiment,
The film dryer 100 is color film (Color Filter:CF) dryer of TFT type LCD display panel.It is appreciated that institute
Stating film dryer 100 can be used for drying other kinds of film, repeat no more.
The film dryer 100 includes cabin 10 and the bracket 20 being set in the cabin 10.
The cabin 10 is for providing and keeping scheduled drying environment, for example, temperature environment, air pressure environment and gas
Environment etc..Specifically, the cabin 10 may include pedestal 11 and side wall 14, and hatch door 141 can be set on the side wall 14
And window (shutter) 142.By the hatch door 141, film can be picked and placed；By the window 142, the cabin 10
Interior gas can be discharged, and/or by the window 142, can be passed through scheduled gas into the cabin 10.The cabin
Door 141 and the window 142 are respectively arranged on the opposite side wall 14 of the cabin 10.
The bracket 20 is used to support diaphragm (not shown) to be dried, including column 21, support portion 22 and spacer portion
23.The column 21 is set on the pedestal 11 of the cabin 10.In present embodiment, the quantity of the column 21 be it is multiple,
And multiple columns 21 are in array-like arrangement, more specifically, the column 21 is arranged in 2 × 2 array-likes.
The support portion 22 is used to support film to be dried.In present embodiment, the support portion 22 is multiple, Duo Gesuo
It states support portion 22 to be connected at the different height of the column 21, therefore, the different support portions 22 will be different to be dried
Film support is at different height.In other words, the film dryer 100 can support the film to be dried of multilayer simultaneously, more
It is spaced apart from each other between layer film to be dried.
Each described support portion 22 includes multiple cross bars 221, and the cross bar 221 connects the adjacent column 21 and receives
Tail connects in frame shape.The cross bar 22 is substantially vertical with the column 21 to be connected.In present embodiment, the number of the cross bar 221
Amount is four, four connected rectangular frame-shapeds of the composition of cross bar 221 ending.
Each described support portion 22 further includes multiple support columns 222, and the support column 222 is formed in the cross bar 221
On, the support column 222 can support film to be dried.In present embodiment, the support column 222 be formed in two it is opposite
On the cross bar 221, each of described opposite cross bar 221 is equipped with multiple support columns 222, the support column
222 along the corresponding cross bar 221 length direction uniform intervals arrange.In present embodiment, each described support portion 222
End claim cone cell to shrink, to reduce the contact area between its film to be dried for supporting, guarantee the effect and effect of drying
Rate.
The spacer portion 23 is set between the adjacent support portion 22, for preventing the film fragments pair of fragmentation
Lower film is damaged and/or is polluted.Each described spacer portion 23 is including plate portion 231 and is set to the plate portion 231
On exhaust portion 232.The area in the plate portion 231 be greater than the corresponding spacer portion 23 institute energy support film maximum area,
When fragmentation occurs for film above it, the plate portion 231 film fragments that top fragmentation generates can all be caught without
Fragment can be made to proceed on the film of lower section, therefore can prevent fragment from underlying film is damaged and/or being polluted.
In present embodiment, the plate portion 231 is generally rectangular shaped, it will be understood that the shape in the plate portion 231 can foundation
Actual conditions make any appropriate variation, for example, the shape in the plate portion 231 can for round, ellipse, polygon and other
Regularly or irregularly shape.
The plate portion 231 is good using stability, high temperature resistant, temperature distortion is small and corrosion-resistant material is made, this embodiment party
In formula, the plate portion 231 is made of stainless steel, and specifically, the material in the plate portion 231 is SUS 403.
In present embodiment, the plate portion 231 above it adjacent support portion 22 and be arranged.Present embodiment
In, the plate portion 231 is fixedly connected on the support portion 22 and the column 21.Specifically, the plate portion 231 passes through spiral shell
Bolt fastener (not shown) is connected with the cross bar 221, for example, passing through the spiral shell after punching on the lower surface of the cross bar 221
Bolt fastener is connected with the plate portion 231；It is connected with each other between the plate portion 231 and the column 21 using the fixed bracket of L shape.
Certainly, in other embodiments, the plate portion 231 can use any conjunction with the support portion 22 and/or the column 21
Suitable mode is connected, such as the modes such as engaging, glued, welding, is no longer described in detail one by one.
The exhaust portion 232 is set to the plate portion 231 close to the side of the window 142, and being used for will be in drying course
The sublimate of the photoresist (PR) of generation etc. is discharged, and prevents the sublimate from directly passing through the exclusion of window 142 and pollutes
And equipment is run and generates adverse effect.
In present embodiment, each described exhaust portion 232 includes two exhaust pipes 2321, two exhaust pipes
2321 are respectively arranged on two opposing surfaces in the corresponding plate portion 231.In present embodiment, the exhaust pipe 231 is
Hollow elongated rod shape, the exhaust pipe 2321 are connected on exhaust equipment.It is opened on each described exhaust pipe 2321 multiple
The spaced lengthwise of air inlet 2321a, the air inlet 2321a along the exhaust pipe 2321.It is described in present embodiment
Air inlet 2321 divides for multiple groups, specifically, the air inlet 2321 be divided into first group of air inlet g1, second group of air inlet g2,
Third group air inlet g3 and the 4th group of air inlet g4, first group of air inlet g1 and the 4th group of air inlet g4 distinguishes position
In the both ends of the exhaust pipe 2321, second group of air inlet g2 and the third group air inlet g3 are located at described first
Between group air inlet g1 and the 4th group of air inlet g4.First group of air inlet g1 and the 4th group of air inlet g4 packet
The quantity of the air inlet 2321 contained is two, second group of air inlet g3 and institute book third group air inlet g3 included into
The quantity of port 231 is three.
First group of air inlet g1, second group of air inlet g2, the third group air inlet g3 and the described 4th
Group air inlet g4 can be interconnected or not be connected to.In present embodiment, first group of air inlet g1, it is described second group into
Port g2, the third group air inlet g3 and the 4th group of air inlet g4 are respectively communicated to exhaust equipment, i.e., and described first
Group air inlet g1, second group of air inlet g2, the third group air inlet g3 and the 4th group of air inlet g4 are with parallel connection
Mode be connected to the exhaust equipment.
In present embodiment, fluted 2321b is set between the air inlet of 2321 adjacent sets of exhaust pipe.
When work, film to be dried is placed on the support portion 22, keeps scheduled temperature in the film dryer 100
Environment, in drying course, the exhaust portion 232 can exclude in time sublimate, prevent the sublimate to be expelled directly out described
Window 142 pollutes and/or equipment damage；In addition, by the way that the spacer portion is arranged between the adjacent support portion 22
23, film fragments fall to lower film and damage and/or pollute to lower film when can prevent fragmentation from occurring.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (8)
1. a kind of film dries machine support, including column and multiple support portions, multiple support portions are connected to the column
Different height at, be used to support film to be dried, it is characterised in that: between being provided between the every two adjacent support portion
Every portion, the spacer portion is used for the film to be dried being spaced on the adjacent support portion, avoids the film of top because broken
Piece and fall to lower section the film on；Each described spacer portion includes plate portion and the exhaust that is set in the plate portion
Portion；Each described exhaust portion includes two exhaust pipes, and two exhaust pipes are respectively arranged at the corresponding plate portion
Two opposing surfaces on.
2. film as described in claim 1 dries machine support, it is characterised in that: the area in the plate portion is greater than corresponding described
Spacer portion can support film maximum area.
3. film as described in claim 1 dries machine support, it is characterised in that: the plate portion is made of stainless steel.
4. film as claimed in claim 2 dries machine support, it is characterised in that: the material in the plate portion is SUS 403.
5. film as described in claim 1 dries machine support, it is characterised in that: opened on each described exhaust pipe it is multiple into
Port, the air inlet along the exhaust pipe spaced lengthwise and be respectively communicated to exhaust equipment.
6. film as claimed in claim 5 dries machine support, it is characterised in that: the air inlet be divided into first group of air inlet,
Second group of air inlet, third group air inlet and the 4th group of air inlet, first group of air inlet and the 4th group of air inlet
The both ends of the exhaust pipe are located at, second group of air inlet and the third group air inlet are located at described first group
Between air inlet and the 4th group of air inlet, first group of air inlet, second group of air inlet, the third group air inlet
Mouth and the 4th group of air inlet are connected to the exhaust equipment in parallel.
7. a kind of film dryer, which is characterized in that including cabin and be set to intracorporal such as claim 1-6 of the cabin
Film described in one dries machine support.
8. film dryer as claimed in claim 7, it is characterised in that: the cabin is provided with window, and the exhaust portion is leaned on
The nearly window setting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610786193.7A CN106369955B (en) | 2016-08-31 | 2016-08-31 | Film dries machine support and film dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610786193.7A CN106369955B (en) | 2016-08-31 | 2016-08-31 | Film dries machine support and film dryer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106369955A CN106369955A (en) | 2017-02-01 |
| CN106369955B true CN106369955B (en) | 2019-08-16 |
Family
ID=57899609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610786193.7A Active CN106369955B (en) | 2016-08-31 | 2016-08-31 | Film dries machine support and film dryer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106369955B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109177486A (en) * | 2018-10-22 | 2019-01-11 | 刘景江 | A kind of printed matter airing rest |
| CN109801862A (en) * | 2019-01-16 | 2019-05-24 | 惠科股份有限公司 | Method and system for cleaning broken pieces of substrate baking machine table |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1379455A (en) * | 2001-03-30 | 2002-11-13 | 三井金属矿业株式会社 | Film carrying belt for electron spare parts assembling and its making method |
| CN1576199A (en) * | 2003-06-25 | 2005-02-09 | 显示器生产服务株式会社 | Apparatus for conveying substrate in horizontal and verticle direction |
| CN1762772A (en) * | 2004-10-20 | 2006-04-26 | 奇菱科技股份有限公司 | Carrier tool for containing laminate |
| CN200972555Y (en) * | 2006-07-19 | 2007-11-07 | 陈美妹 | Device for cleaning carriage of glass substrate of liquid crystal display |
| CN101673665A (en) * | 2008-09-12 | 2010-03-17 | 大日本网屏制造株式会社 | Substrate processing apparatus and substrate conveying apparatus for use in the same |
| CN101801815A (en) * | 2007-09-19 | 2010-08-11 | 平田机工株式会社 | Substrate transfer system |
| CN102491090A (en) * | 2007-09-19 | 2012-06-13 | 平田机工株式会社 | Substrate conveying system |
| CN103443913A (en) * | 2011-04-13 | 2013-12-11 | 夏普株式会社 | Substrate support device, and drying device |
| CN106794944A (en) * | 2014-09-12 | 2017-05-31 | 株式会社爱发科 | Vacuum treatment installation |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105091506A (en) * | 2015-08-31 | 2015-11-25 | 武汉华星光电技术有限公司 | Vacuum drying device |
-
2016
- 2016-08-31 CN CN201610786193.7A patent/CN106369955B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1379455A (en) * | 2001-03-30 | 2002-11-13 | 三井金属矿业株式会社 | Film carrying belt for electron spare parts assembling and its making method |
| CN1576199A (en) * | 2003-06-25 | 2005-02-09 | 显示器生产服务株式会社 | Apparatus for conveying substrate in horizontal and verticle direction |
| CN1762772A (en) * | 2004-10-20 | 2006-04-26 | 奇菱科技股份有限公司 | Carrier tool for containing laminate |
| CN200972555Y (en) * | 2006-07-19 | 2007-11-07 | 陈美妹 | Device for cleaning carriage of glass substrate of liquid crystal display |
| CN101801815A (en) * | 2007-09-19 | 2010-08-11 | 平田机工株式会社 | Substrate transfer system |
| CN102491090A (en) * | 2007-09-19 | 2012-06-13 | 平田机工株式会社 | Substrate conveying system |
| CN101673665A (en) * | 2008-09-12 | 2010-03-17 | 大日本网屏制造株式会社 | Substrate processing apparatus and substrate conveying apparatus for use in the same |
| CN103443913A (en) * | 2011-04-13 | 2013-12-11 | 夏普株式会社 | Substrate support device, and drying device |
| CN106794944A (en) * | 2014-09-12 | 2017-05-31 | 株式会社爱发科 | Vacuum treatment installation |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106369955A (en) | 2017-02-01 |
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