CN106794944A - Vacuum treatment installation - Google Patents

Vacuum treatment installation Download PDF

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Publication number
CN106794944A
CN106794944A CN201580048885.5A CN201580048885A CN106794944A CN 106794944 A CN106794944 A CN 106794944A CN 201580048885 A CN201580048885 A CN 201580048885A CN 106794944 A CN106794944 A CN 106794944A
Authority
CN
China
Prior art keywords
tank
mounting device
vacuum
mounting
rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201580048885.5A
Other languages
Chinese (zh)
Other versions
CN106794944B (en
Inventor
益山纯
益山纯一
胁田伸市
内山丰司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of CN106794944A publication Critical patent/CN106794944A/en
Application granted granted Critical
Publication of CN106794944B publication Critical patent/CN106794944B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G9/00Apparatus for assisting manual handling having suspended load-carriers movable by hand or gravity
    • B65G9/002Load-carriers, rollers therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G9/00Apparatus for assisting manual handling having suspended load-carriers movable by hand or gravity
    • B65G9/008Rails or switches
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0235Containers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Freezing, Cooling And Drying Of Foods (AREA)
  • Drying Of Solid Materials (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

There is provided a kind of vacuum treatment installation for moving into of taking out of that can simply carry out loading device.The guide portion (48) of rail set (10) is clipped using the traveling portion (32) for being loaded in the loading device (30) for carrying car (40), so that it is mobile to carry car (40).Decline lifting unit (23), loading device (30) is set to be suspended to groove outside (16) of rail set (10), retreat carrying car (40) and lifting unit (23) and chassis (22) are taken out from immediately below loading device (30), by the connecting portion (14) of connection status, it is suspended to groove inside (15) being connected with groove outside (16), loading device (30) is transferred to the inside of vacuum tank (8), make connecting portion for released state and by lid arrangement (9) airtight vacuum groove (8).Taking out of for loading device (30) can be carried out in narrow and small place to move into.

Description

Vacuum processing apparatus
Technical Field
The present invention relates to a vacuum apparatus, and more particularly to a technique for carrying a mounting device on which an object to be processed is mounted into and out of a vacuum chamber.
Background
Reference numeral 101 of fig. 23 shows a vacuum processing apparatus of the related art.
The vacuum processing apparatus 101 includes a vacuum chamber 108, a guide rail 115 fixed to a ceiling of the vacuum chamber 108, and a travel rail 148 fixed to a floor surface of the vacuum chamber 108.
A plurality of processing objects 130 to be vacuum-processed by the vacuum processing apparatus 101 are arranged in the mounting apparatus 132. The traveling wheels 135 are provided on the bottom surface of the mounting device 132, and the guide wheels 103 are provided on the upper portion. The mounting device 132 is configured to be guided in the movement direction by the guide wheels 103 moving along the guide rails 115, and to be moved on the travel rails 148 by the travel wheels 135.
The plurality of mounting devices 132 are disposed on the travel rail 148 inside the vacuum chamber 108, and the opening of the vacuum chamber 108 is sealed by the cover device 109, so that the inside of the vacuum chamber 108 is vacuum-exhausted and the processing object 130 is vacuum-processed.
When the vacuum processing is completed, as shown in fig. 24 and 25, the cover device 109 is moved to open the opening, the guide rail 115 inside the vacuum chamber 108 and the guide rail 113 outside the vacuum chamber 108 are connected by the connecting guide rail 114, and the mounting device 132 is moved on the travel rail 148 while guiding the moving direction by the guide rails 113 to 115, and is carried out from the opening of the vacuum chamber 108.
At this time, the elevating mechanism 142 provided in the vicinity of the opening of the vacuum chamber 108 is raised, the mounting device 132 is mounted on the elevating mechanism 142, and when the elevating mechanism 142 is lowered, the travel wheels 135 of the mounting device 132 come into contact with the floor surface 105. Outside the vacuum chamber 108, the moving direction is guided by the guide rail 113, and the mounting device 132 is caused to travel on the travel rail 138 or the floor.
Documents of the prior art
Patent document
Patent document 1: WO2009/060805 publication;
patent document 2: japanese patent laid-open publication No. 2002-147023;
patent document 3: japanese patent laid-open No. 2001-39667.
Disclosure of Invention
Problems to be solved by the invention
In the above-described conventional technique, since both the running rails 138 and 148 and the guide rails 113 to 115 are provided, the apparatus is complicated.
Further, since the lifting mechanism 142 is required, the cost is high, a large force is required to move the mounting device 132 on the floor surface 105, and a large space is required to raise and lower the mounting device.
The invention provides a technology for carrying a carrying device into and out of a vacuum tank by using a small-area place.
Further, when the vacuum vessel is opened and closed by the lid device, the mounting device is prevented from falling off the travel rail or becoming immovable.
Means for solving the problems
In order to solve the above problems, a vacuum processing apparatus according to the present invention includes: a vacuum tank having an opening for carrying in and out on a side surface thereof; a mounting device for mounting the object to be processed in the vacuum chamber; and a rail device that is horizontally disposed and suspends the mounting device, the rail device including: a tank interior which is a portion disposed inside the vacuum tank; a tank exterior portion which is a portion disposed outside the vacuum tank; and a connection portion which is disposed between one end of the inside of the tank and one end of the outside of the tank and is configured to be capable of rotating, the connection portion rotating in a horizontal plane, the connection portion being configured to be capable of switching between a connection state in which the outside of the tank and the inside of the tank are connected and a disconnection state in which the outside of the tank and the inside of the tank are disconnected and a gap for a cover is formed between the inside of the tank and the outside of the tank, the carry-in and carry-out opening being configured to be capable of being closed by a cover device disposed in the gap for a cover when the connection portion is in the disconnection state, guide portions which guide a moving direction of the mounting device and suspension wheels which are included in a traveling portion provided on an upper portion of the mounting device being provided on the inside of the tank, the outside of the tank, and the connection portion, respectively, to suspend the mounting device on a track portion, wherein the suspended wheel is configured to rotate on the rail portion in a state where one of the guide portion and the traveling portion is sandwiched by the other, the carrying device is configured to be movable along the guide portion, the vacuum device configured to be suspended in the vacuum tank sealed by the cover device and evacuated by vacuum is configured to subject the object to be processed carried by the carrying device to vacuum processing, the tank is configured to have a straight portion extending linearly from the guide portion and a curved portion curved from the guide portion on an outer side thereof, and the carrying device is configured to be lifted on a vertically movable lifting portion provided on a horizontally movable carrying vehicle and configured to support the weight of the carrying device on the lifting portion and the object to be processed carried by the carrying device by the carrying vehicle, the suspension wheel of the mounting device supported by the vehicle is moved onto the rail portion of the linear portion from an end portion of the linear portion opposite to a portion connected to the curved portion, in a state where the other one is sandwiched by the guide portion of the linear portion and the traveling portion of the mounting device supported by the vehicle.
The present invention is a vacuum processing apparatus in which the mounting device is linearly moved in a certain direction along the guide portion of the linear portion by linearly moving the mounting vehicle in the certain direction, and then the lifting portion is lowered to suspend the mounting device on the lifting portion from the rail portion of the linear portion, and the mounting device is spaced apart from the lifting portion.
The present invention is the vacuum processing apparatus in which the elevating unit is moved to the outside directly below the mounting device when the elevating unit is moved in the predetermined direction after the mounting device is spaced apart from the elevating unit.
The present invention is a vacuum processing apparatus in which the mounting device located outside the vacuum tank is carried into the vacuum tank when the suspension wheel of the mounting device suspended from the rail portion of the linear portion rolls on the rail portion of the curved portion and the rail portion of the connecting portion in a connected state from the rail portion of the linear portion and then reaches the rail portion inside the tank.
The present invention provides a vacuum processing apparatus in which a stopper member for preventing the mounting device suspended from the linear portion from coming off is provided at an end portion of the rail portion of the linear portion opposite to a portion connected to the curved portion.
The present invention is a vacuum processing apparatus including an in-tank-side-drop preventing device and an out-tank-side-drop preventing device in the rail apparatus, wherein the in-tank-side-drop preventing device is brought into contact with the traveling portion of the mounting apparatus suspended in the tank to prevent the mounting apparatus from dropping from the tank to the cover gap when the connecting portion is in the separated state, and the out-tank-side-drop preventing device is brought into contact with the traveling portion of the mounting apparatus suspended outside the tank to prevent the mounting apparatus from dropping from the tank to the cover gap.
The present invention is a vacuum processing apparatus in which one of the connecting portion and the outside of the groove is provided with a convex portion, the other is provided with a concave portion, the convex portion and the concave portion are fitted to maintain the connected state when the connecting portion is in the connected state, and the fitting of the convex portion and the concave portion is released to allow the connecting portion to rotate when the connecting portion is changed from the connected state to the separated state.
The vacuum treatment of the present invention includes various vacuum treatments such as vacuum firing, vacuum annealing, and vacuum surface treatment, in addition to vacuum drying.
The object to be processed includes articles of various materials and shapes such as semiconductors, glass substrates, and machine parts, in addition to foods.
Effects of the invention
The carrying device can be carried in and out from the vacuum tank by using a small-area place.
When the connection rail is rotated to form a gap between the rail inside and outside the groove, the drop-off prevention mechanism operates, and the mounting device does not drop off from the rail device.
Drawings
FIG. 1 is a front view of a vacuum vessel for explaining a vacuum processing apparatus of the present invention (1);
FIG. 2 is a front view (2) of a vacuum vessel for explaining the vacuum processing apparatus of the present invention;
FIG. 3 is a front view (3) of a vacuum vessel for explaining the vacuum processing apparatus of the present invention;
FIG. 4 is a front view (4) of a vacuum vessel for explaining the vacuum processing apparatus of the present invention;
FIG. 5 is a front view (5) of a vacuum vessel for explaining the vacuum processing apparatus of the present invention;
FIG. 6 is a front view (6) of a vacuum vessel for explaining the vacuum processing apparatus of the present invention;
FIG. 7 is a side view (1) of the inside of a vacuum chamber for explaining the vacuum processing apparatus of the present invention;
FIG. 8 is a side view (2) of the inside of a vacuum vessel for explaining the vacuum processing apparatus of the present invention;
FIG. 9 is a plan view (1) for explaining a vacuum processing apparatus of the present invention;
FIG. 10 is a plan view (2) for explaining a vacuum processing apparatus of the present invention;
FIG. 11 is a plan view (3) for explaining a vacuum processing apparatus of the present invention;
FIG. 12 is a plan view (4) for explaining a vacuum processing apparatus of the present invention;
FIG. 13 is a plan view (5) for explaining a vacuum processing apparatus of the present invention;
FIG. 14 is a plan view (6) for explaining a vacuum processing apparatus of the present invention;
fig. 15 is a view for explaining the mounting device prevented from falling by the groove inner side falling-off prevention device;
FIG. 16 is an internal plan view for explaining the inside of the vacuum vessel (1);
FIG. 17 is an internal plan view (2) for explaining the inside of the vacuum vessel;
FIG. 18 is an internal plan view for explaining the inside of the vacuum vessel (3);
in fig. 19, (a) is a plan view of the connecting portion for explaining the connected state, and (b) is a plan view of the connecting portion for explaining the separated state;
in fig. 20, (a) is a front view for explaining a connecting portion of the traveling portion, (b) is a plan view thereof, (c) is a sectional view of the rail device, (d) is a front view for explaining traveling of the traveling portion, and (e) is a plan view thereof;
FIGS. 21(a) and (b) are views for explaining the operation of the tank inside dropout prevention means;
FIG. 22 is a view for explaining an aligning apparatus;
FIG. 23 is a view (1) for explaining the prior art;
FIG. 24 is a view for explaining a prior art (2);
fig. 25 is a diagram (3) for explaining the prior art.
Detailed Description
Fig. 1 shows a vacuum processing apparatus 2 of the present invention.
The vacuum processing apparatus 2 has a vacuum chamber 8, and a carrying-in/out opening 7 for carrying the object to be processed into/out of the vacuum chamber 8 is provided on a side surface of the vacuum chamber 8. Reference numeral 9 denotes a lid device for closing the opening 7 for carrying in and out to seal the inside of the vacuum chamber 8, and when the vacuum exhaust device 29 is operated to vacuum-exhaust the inside of the vacuum chamber 8 sealed by the lid device 9, the inside of the vacuum chamber 8 can be made to be a vacuum atmosphere. Here, the object to be processed is a food loaded on a tray, and is subjected to vacuum drying (freeze drying) in the vacuum chamber 8.
Fig. 1 is a state where the cover device 9 is opened, and a plan view of the state is shown in fig. 9.
A concave portion as shown in fig. 7 is formed in the floor surface 5 of the clean room where the vacuum chamber 8 is disposed, and the vacuum chamber 8 and the lid device 9 are disposed in the concave portion so as not to form a convex portion due to the bottom surface of the vacuum chamber 8 in the floor surface 5 of the clean room.
On the ceiling of the vacuum chamber 8, from the outside to the inside of the vacuum chamber 8, an elongated rail device 10 is provided.
Referring to fig. 9, the rail device 10 has an elongated groove outer portion 16 disposed outside the vacuum groove 8 and an elongated groove inner portion 15 disposed inside the vacuum groove 8. The tank outer 16 is fixed to a ceiling of the clean room, and the tank inner 15 is fixed to a ceiling of the vacuum tank 8.
The tank inner portion 15 and the tank outer portion 16 are disposed in a spaced-apart manner. The rail device 10 has a connection portion 14, and is configured such that the groove inner portion 15 and the groove outer portion 16 can be connected by the connection portion 14. Which is connected in fig. 9.
Fig. 2 is a reference numeral of a mounting device suspended from the rail device 10. In fig. 2, the mounting device 30 is not suspended, but is mounted on the mounting vehicle 40 and moved to a position near the vacuum chamber 8. Fig. 10 is a plan view of this state.
The mounting device 30 includes a housing 31 and a plurality of mounting wheels 35 provided on a bottom surface of the housing 31.
The cart 40 includes a main body 21 and a chassis 22 fixed to a frame of the main body 21, and a driving device such as a motor for traveling is provided inside the main body 21.
The body 21 is positioned at one end of the chassis 22, and two or more rear wheels 26 are mounted on the bottom surface of the body 21 and at positions near the body of the chassis 22. On the opposite side of the chassis 22 from the body 21, two or more front wheels 25 are mounted.
When the front wheels 25 and the rear wheels 26 are mounted on the floor surface 5 of the clean room and the driving device inside the main body 21 is operated to rotate the rear wheels 26, the carrying vehicle 40 travels on the floor surface 5 of the clean room.
The front wheels 25 rotate in respective planes that are vertical and parallel to each other, and the rear wheels 26 rotate in respective planes that are vertical and parallel to each other.
The plane in which each front wheel 25 rotates is fixed relative to the chassis 22.
The body 21 is provided with an operation device 55. The rear wheels 26 can be changed in orientation with respect to the chassis 22 by the operating device 55 in a state of being parallel to each other, the front wheels 25 are oriented in the traveling direction when the vehicle 40 linearly travels, and the orientation of the front wheels 25 is fixed with respect to the chassis 22. The operator 6 can change the direction in which the vehicle 40 travels by operating the operation device 55 to change the direction of the rear wheels 26 relative to the chassis 22.
When the plane on which the front wheels 25 rotate and the plane on which the rear wheels 26 rotate are made parallel to each other by the operating device 55, the chassis 22 moves linearly, and when the plane on which the front wheels 25 rotate and the plane on which the rear wheels 26 rotate are made non-parallel to each other, the moving direction of the chassis 22 turns.
Inside the main body 21, a lifting device including a motor and the like is provided, and in this lifting device, a plate-like lifting unit 23 is attached to an upper portion of the base 22 in parallel with the base 22.
When the front wheels 25 and the rear wheels 26 are mounted on the floor surface 5, the chassis 22 and the elevating unit 23 become horizontal, and when the elevating device is operated, the elevating unit 23 can move in the vertical direction on the chassis 22 while maintaining the horizontal state.
The bottom surface of the frame 31 is located above the mounting wheels 35, and the width of the elevating unit 23 and the chassis 22 is shorter than the interval between the mounting wheels 35.
When the chassis 22 and the elevating unit 23 are inserted between the bottom surface of the frame body 31 of the mounting device 30 in which the mounting wheels 35 are in contact with the floor surface 5 of the clean room and the floor surface 5 and the elevating unit 23 is operated to elevate the elevating unit 23, the bottom surface of the frame body 31 of the mounting device 30 is in contact with the surface of the elevating unit 23 and the mounting device 30 is mounted on the elevating unit 23.
At this time, the mounting wheels 35 are exposed from the elevating portion 23, and when the elevating portion 23 is further elevated, the mounting wheels 35 are spaced apart from the floor surface 5.
In this state, the bottom surface of the housing 31 of the mounting device 30 is mounted on the elevating portion 23. When the lifting device is operated, the mounting device 30 mounted on the lifting unit 23 can move in the upward direction and the downward direction in accordance with the vertical movement of the lifting unit 23.
A plurality of processing target objects 33 to be vacuum-processed are arranged in the mounting device 30, and the weight of the mounting device 30 and the weight of the processing target objects 33 arranged in the mounting device 30 are supported by the front wheels 25 and the rear wheels 26 of the mounting vehicle 40 in a state where the mounting device 30 is mounted on the elevating portion 23.
The frame 31 of the mounting device 30 is provided with a traveling unit 32 at an upper portion.
Fig. 20(a) is a front view of the traveling unit 32, and fig. (b) is a plan view thereof.
The traveling unit 32 has a bottom plate 44 fixed to a top plate portion of the frame 31, two mounting plates 41a and 41b are fixed to the bottom plate 44 in parallel with a space therebetween on the bottom plate 44, and suspension wheels 42a and 42b are provided on mutually facing side surfaces of the two mounting plates 41a and 41b, respectively. Here, the suspension wheels 42a and 42b are provided on the one mounting plate 41a and the other mounting plate 41b in two, and the suspension wheel 42a of the one mounting plate 41a and the suspension wheel 42b of the other mounting plate 41b are disposed at positions facing each other. The suspension wheels 42a and 42b are the same size.
The groove outer portion 16, the connection portion 14, and the groove inner portion 15 of the rail device 10 are metal rails having an H-shaped cross section, and as shown in fig. 20(c), each of the rails includes an attachment portion 46 and a rail portion 47 which are elongated flat plates and parallel to each other, and a guide portion 48 which is elongated plate-shaped, and has an upper end fixed to a widthwise central position of the attachment portion 46 and a lower end fixed to a widthwise central position of the rail portion 47 and is disposed vertically. In the rail device 10, the mounting portion 46 is directly or indirectly fixed to a ceiling of the vacuum chamber 8 or a ceiling of a clean room.
Gaps 49 are provided between the suspension wheels 42a, 42b and the bottom plate 44, and as described later, when the track portion 47 and the guide portion 48 are inserted between the gaps 49 and the two suspension wheels 42a, 42b facing each other, and then the traveling portion 32 is lowered, the suspension wheels 42a, 42b are mounted on the track portion 47, as shown in fig. 20 (d). The same drawing (e) is a plan view of the same drawing (d). The rail portion 47 is planar and horizontal.
The plane on which each suspension wheel 42a, 42b rotates is vertical, and as shown in fig. 20(d), (e), when the guide portion 48 extends linearly, the plane on which each suspension wheel 42a, 42b rotates is parallel to the plane on which the guide portion 48 is located, and when the guide portion 48 bends in a vertical state, the plane on which each suspension wheel 42a, 42b rotates circles along the curve of the guide portion 48, and in either case, the traveling portion 32 and the mounting device 30 provided with the traveling portion 32 can move along the guide portion 48.
In the state shown in fig. 2 and 10, the mounting device 30 is mounted on the mounting vehicle 40, and first, a procedure for suspending the mounting device 30 on the mounting vehicle 40 from the rail device 10 will be described.
As shown in fig. 9 to 14, the groove outer portion 16 includes a linear portion 12 in which the guide portion 48 linearly extends, and a curved portion 13 which is curved in a horizontal plane in a state in which the guide portion 48 is vertical and the rail portion 47 is horizontal.
The end of the linear portion 12 opposite to the portion connected to the curved portion is open, and the open portion of the linear portion 12 can be inserted into the gap 49.
Near the open portion of the linear portion 12, a stopper member 90 protruding from the surface of the rail portion 47 is provided on the rail portion 47. The surface of the rail portion 47 provided with the stopper member 90 is a surface with which the suspended wheels 42a, 42b are contacted.
First, the lifting device is operated to raise the lifting unit 23 until the lower ends of the suspension wheels 42a and 42b of the mounting device 30 on the lifting unit 23 become higher than the upper end of the stopper 90.
An installation rod 11 and a plurality of guide devices 19 are installed at one open end of the linear part 121~193(3 pieces in this case) are vertically provided downward on the mounting rod 11.
Each guide device 191~193Is elongated and is arranged linearly so as to be positioned in the plane in which the guide portion 48 of the linear portion 12 is positioned.
From the state shown in fig. 2 and 10, the operator 6 drives the vehicle 40 by setting the main body 21 and the rear wheels 26 of the vehicle 40 on which the mounting device 30 is mounted to the forefront and the front wheels 25 to the rearmost.
At this time, the operator 6 observes the guide device 191~193And the traveling unit 32 during the movement, the operation device 55 is operated to correct the movement direction of the carrier 40 so that the guide device 19 moves1~193Between the opposite suspension wheels 42a, 42 b.
Each guide device 191~193Is narrower than the width between the suspended wheels 42a, 42b, and the guide device 19 is located at the center1~193Can pass between the suspension wheels 42a, 42 b. Fig. 3 and 11 show a guide device 192By suspending the state between the wheels 42a, 42 b.
In the guide device 191~193Composed of a "rope", a "bar" which can be bent and mounted, and the like, a guide device 191~193When the suspension wheels 42a and 42b cannot pass through and collide with the traveling unit 32, the guide device 191~193Bending or bending the carrying vehicle 40 in the guide 191~193The vehicle travels without interfering with the travel of the traveling unit 32.
In the guide device 191~193When the vehicle collides with the traveling unit 32, the vehicle reaches the next guide device 192、193Before the end of the rail device 10, the moving direction of the carrier 40 is corrected so that the next guide device 19 is moved2、193The guide portion 48 at the end of the track device 10 may pass between the opposing suspension wheels 42a and 42b in sequence.
When the operator 6 controls the moving direction of the carrier 40 to cause the plurality of guide devices 19 to move1~193When the mount 40 is caused to travel on the floor surface 5 while passing sequentially between the opposing suspension wheels 42a, 42b, the movement direction of the mount 40 is parallel to the direction in which the guide portion 48 of the linear portion 12 extends, and the plane in which the guide portion 48 of the linear portion 12 extends is positioned between the opposing suspension wheels 42a, 42b and intersects with the travel portion 32.
In this state, the plane on which the front wheels 25 of the vehicle 40 rotate is parallel to the plane on which the rear wheels 26 rotate, and when the vehicle 40 is moved by rotating the rear wheels 26 and bringing the main body 21 and the rear wheels 26 forward, the suspension wheels 42a and 42b pass above the stopper member 90, the guide portions 48 of the linear portion 12 are inserted between the opposing suspension wheels 42a and 42b, and the guide portions 48 are sandwiched between the traveling portions 32. In this state, the suspended wheels 42a and 42b are positioned on the exposed rail portion 47.
A plurality of aligning devices 17 are provided on the linear part 121~173(3 stations here), by means of an alignment device 171~173The carrier 40 is moved so that the guide portion 48 of the linear portion 12 is positioned at the center of the opposing suspension wheels 42a and 42 b.
Here, as shown in FIG. 22, the aligning device 171~173When the traveling unit 32 passes between the array members 37a and 37b, and the traveling unit 32 comes into contact with one of the array members 37a and 37b, the two array members 37a and 37b having a plate shape receive a force from the array member 37a or 37b in the center direction of the array member 37a or 37b, and the carrier 40 moves in the center direction.
The interval between the aligning members 37a and 37b is gradually narrowed in the order of passing of the traveling section 32, and the aligning devices 17 are used1~173The carrier 40 is moved in a direction perpendicular to the guide portions 48 of the linear portions 12 so that the guide portions 48 of the linear portions 12 are positioned at the centers of the two suspension wheels 42a, 42b facing each other.
Then, it is passed through the final arranging device 173Next, after the mounting device 30 is linearly moved, as shown in fig. 4 and 12, when the suspension wheels 42a and 42b are positioned on the rail portion 47 of the linear portion 12, the elevating portion 23 is lowered, and the suspension wheels 42a and 42b are mounted on the rail portion 47 of the linear portion 12.
When the elevating unit 23 is further lowered, the elevating unit 23 is spaced apart from the frame 31 of the mounting device 30 as shown in fig. 5. At this time, the lower end of the mounting wheel 35 of the mounting device 30 suspended from the linear portion 12 of the rail device 10 is positioned above the floor surface 5, and the mounting wheel 35 does not contact the floor surface 5.
Therefore, the weight of the mounting device 30 including the weight of the object 33 to be processed is suspended and supported by the linear portion 12, and the mounting device 30 is suspended from the rail device 10.
Since the mount 40 does not contact the mount device 30 and the mount 40 can be moved without moving the mount device 30, if the mount 40 is moved in the same direction as when the guide portion 48 of the straight portion 12 is positioned between the suspension wheels 42a and 42b and the mount device 30 is moved linearly, the mount device 30 is stationary and the distance between the main body 21 and the mount device 30 becomes large as shown in fig. 6 and 13.
In fig. 6 and 13, the carrier 40 is moved until the elevating unit 23 and the base 22 move to the outside of the position directly below the housing 31 of the mounting device 30.
The linear portion 12 is connected to the groove interior 15 by the bent portion 13 and the connecting portion 14. The curved portion 13 is curved in a quarter circle, and the connecting portion 14 and the groove inner portion 15 are linear and connected in a straight line. The linear portion 12 connected to one end of the bent portion 13 and the connecting portion 14 connected to the other end are arranged to extend in directions perpendicular to each other.
Since the groove interior 15 is disposed inside the vacuum groove 8 so that the extending direction thereof is perpendicular to the carry-in/out opening 7, when the elevating portion 23 and the chassis 22 are moved to the outside from the position directly below the frame body 31 of the mounting device 30, the mounting vehicle 40 moves parallel to the carry-in/out opening 7, and therefore the mounting vehicle 40 does not enter the vacuum groove 8.
The straight portion 12, the curved portion 13, the connecting portion 14, and the rail portion 47 of the groove inner portion 15 are located at the same height.
In the mounting device 30, the guide portions 48 are sandwiched by the traveling portions 32, and when the guide portions 48 of the respective portions 12 to 16 are sandwiched by the traveling portions 32 and a force is applied to the mounting device 30 to rotate the suspension wheels 42a and 42b on the rail portions 47 of the respective portions 12 to 16, the mounting device 30 moves along the rail device 10 in the order of the linear portion 12, the curved portion 13, the connecting portion 14, and the groove inner portion 15, and thus the mounting device 30 moves along the guide portions 48. At this time, the guide unit 48 is positioned in the traveling unit 32, but may be configured such that the traveling unit is positioned in the guide unit.
Here, when the operator 6 manually pushes or pulls the mounting device 30 to rotate the suspension wheels 42a and 42b and moves the mounting device 30 along the rail device 10, the mounting device 30 moves in accordance with the curved shape of the curved portion 13 when traveling in the curved portion 13, passes through the connection portion 14, and then moves into the vacuum chamber 8 while being suspended in the chamber interior 15 as shown in fig. 14. In the vacuum chamber 8, the vehicle wheel 35 does not contact the floor surface of the vacuum chamber 8.
As described above, when the plurality of mounting devices 30 are mounted on the respective mounting vehicles 40, suspended one by one on the rail device 10, and carried into the vacuum chamber 8, the plurality of mounting devices 30 suspended in the chamber interior 15 can be disposed in the vacuum chamber 8 as shown in fig. 7 and 16.
Fig. 7 and 16 show a state in which a predetermined number of mounting devices 30 are suspended in the vacuum chamber 8, and in order to close the lid device 9 and vacuum-exhaust the vacuum chamber 8 by the vacuum-exhaust device 29, first, the connection portion 14 is rotated to form a lid gap 38 for positioning the lid device 9 as shown in fig. 17 at a position before the carrying-in/out opening 7. The lid gap 38 is located between the tank inside 15 and the tank outside 16 and is located at a position where the opening for carrying in and out is inserted.
Fig. 19(a) and (b) are enlarged plan views of the connection portion 14 and its surrounding portion.
The connection portion 14 is attached to a rotation shaft 64 provided vertically in the tank outside 16 so as to be horizontally rotatable, and in the same drawing (a), the tank outside 16 and the tank inside 15 are connected by the connection portion 14, and in this connected state, the suspended mounting device 30 can be moved between the tank outside 16 and the tank inside 15 by the connection portion 14.
The connecting portion 14 can rotate both in the clockwise direction and the counterclockwise direction with the rotation shaft 64 as a center. Here, the connection portion 14 in the connected state is rotated counterclockwise as viewed from above, and a lid gap 38 is formed between the groove inner portion 15 and the groove outer portion 16. Fig. 19(b) shows the connecting portion 14 in a separated state.
Further, in order to enable the rotation of the connection portion 14, the length of the connection portion 14 is made larger as the distance between the contact surface of the connection portion 14 and the groove outer portion 16 and the contact surface of the connection portion 14 and the groove inner portion 15 is made larger in the counterclockwise direction of travel.
When the connection portion 14 is in the connected state, the lid device 9 is disposed on any one of the left side, the right side, and the upper side of the carrying-in/out opening 7, and the inside of the vacuum chamber 8 is in an open state through the carrying-in/out opening 7.
When the connection portion 14 is in the separated state and the lid gap 38 is formed between the tank outer portion 16 and the tank inner portion 15 as shown in fig. 17, the lid device 9 can be positioned in the lid gap 38, and therefore when the lid device 9 is moved in this manner, the lid device 9 is positioned on the front surface of the carrying-in/out opening 7 as shown in fig. 8 and 18, and when the lid device 9 is in close contact with the vacuum tank 8, the vacuum tank 8 is sealed by the lid device 9.
When the vacuum exhaust device 29 is operated in a state where the vacuum vessel 8 is sealed, the inside of the vacuum vessel 8 can be evacuated.
Further, since the connection portion 14 is attached to the rotary shaft 64 provided on the tank outside 16, the connection portion 14 is located outside the vacuum tank 8 when the connection portion 14 is in the separated state and the vacuum tank 8 is closed by the cover device 9.
The groove outside dropout-preventing means 61 shown in fig. 19(b) is provided in the connecting portion 14.
The groove outside separation preventing device 61 is located on the side surface of the rail device 10 when the connecting portion 14 is in the connected state, and the groove outside separation preventing device 61 does not contact the mounting device 30 when the mounting device 30 suspended from the rail device 10 moves, but the groove outside separation preventing device 61 moves by the rotation of the connecting portion 14 to be located near the end portion of the groove outside 16 where the rotation shaft 64 is provided in the separated state.
When the connection portion 14 is in the separated state, the outside-slot-out-preventing device 61 is located at a position where it can come into contact with the traveling portion 32 of the mounting device 30 suspended from the slot exterior 16, and when the suspended mounting device 30 moves toward the end portion of the slot exterior 16 connected to the connection portion 14, the outside-slot-out-preventing device 61 comes into contact with the traveling portion 32 before the traveling portion 32 falls from the end portion of the slot exterior 16, and the traveling of the traveling portion 32 on the rail portion 47 is stopped before the falling to prevent the falling.
Further, a pressing member 54 is provided at an end of the cap 69 which is a portion of the connection portion 14 connected to the groove interior 15, and an in-groove separation prevention device 51 is provided at a position of the groove interior 15 connected to the connection portion 14.
Fig. 21(a) and (b) show front views of cross sections of the groove inside 15 corresponding to fig. 19(a) and (b).
The mounting portion 46 of the tank interior 15 is provided with a mounting device 52, and the tank interior separation preventing device 51 is rotatably mounted on a rotating shaft 53 horizontally provided in the mounting device 52.
The pressing member 54 is disposed so as to be located at a position where the in-slot dropout-preventing means 51 is pressed when the connection portion 14 is in the connected state, the pressed in-slot dropout-preventing means 51 is located outside the rail portion 47 of the slot interior 15, and the suspension wheels 42a, 42b rotate on the rail portion 47 so as to be free from an obstacle to the movement of the mounting device 30 suspended from the rail device 10 between the slot interior 15 and the connection portion 15.
When the connection unit 14 is shifted from the connected state to the disconnected state, the pressing member 54 moves in a direction away from the in-groove dropout-preventing means 51 when the connection unit 14 rotates, and when the pressing member 54 and the in-groove dropout-preventing means 51 do not come into contact, the in-groove dropout-preventing means 51 is positioned on the track portion 47 of the in-groove portion 15 and is positioned in a place where it comes into contact with the mounting device 30 suspended from the in-groove portion 15.
Before the mounting device 30 suspended in the tank interior 15 moves and the end portion of the tank interior 15 connected to the connection portion 14 falls into the cover gap 38, the tank interior separation preventing device 51 comes into contact with the traveling portion 32 of the mounting device 30 to stop the traveling of the mounting device 30 in the tank interior 15 and prevent the falling. Fig. 15 shows the mounting device 30 in which the drop-off prevention device 51 is prevented from coming into contact with the suspension wheels 42a and 42 b.
When the connection portion 14 rotates to transition from the disconnected state to the connected state, the pressing member 54 moves in a direction approaching the inside-groove dropout-preventing means 51, the pressing member 54 abuts against the inside-groove dropout-preventing means 51, and when the pressing member 54 moves further, the pressing member 54 presses the inside-groove dropout-preventing means 51.
The groove inner slip-off preventing device 51 is rotated by the pressing, and is removed from the rail portion 47 of the groove inner portion 15, so that the movement of the suspension wheels 42a and 42b traveling on the rail portion 47 is prevented from being hindered.
The locking member 70 is fixed to the groove outer portion 16, and a concave portion 65 is provided on one of the locking member 70 and the connecting portion 14, and a convex portion 66 is provided on the other. The convex portion 66 is provided on either one of the locking member 70 and the connecting portion 14 in a state of being attached to the convex portion main body 68, and when the convex portion 66 is pressed by a spring disposed in the convex portion main body 68, the convex portion 66 moves in an inner direction of the convex portion main body 68 and is buried. The projection body 68 and the cap 69 are fixed to each other by the relay 60, and the relay 60 is attached to the rotary shaft 64.
The concave portion 65 is provided on a flat plane, and when the connection portion 14 is changed from the separated state to the connected state, the convex portion 66 protruding from the convex portion main body 68 by the rotation of the connection portion 14 is pressed by the plane provided with the concave portion 65 and buried in the convex portion main body 68. When the connection portion 14 comes to a standstill at a position where the groove outer portion 16 and the groove inner portion 15 are connected to each other, the buried convex portion 66 and the concave portion 65 face each other, the facing portions are not flat, and the convex portion 66 is not pushed at the concave portion 65, so that the convex portion 66 returns to a position protruding from the convex portion main body 68, and as a result, the convex portion 66 is fitted into the concave portion 65.
In the state where the convex portion 66 and the concave portion 65 are fitted, the connection portion 14 does not rotate, and the connection state is maintained.
Further, symbols 67a, 67b of fig. 19(a), (b) are ropes for rotating the connecting portion 14, and the extending direction is changed by the roller 71. The operator 6 can switch the state of the connecting portion 14 between the connected state and the disconnected state by operating the rope at a place spaced apart from the connecting portion 14 to rotate the connecting portion 14.
When the string 67a is pulled to change the connection unit 14 from the connected state to the disconnected state, the protrusion 66 is pulled into the protrusion body 68, the engagement between the protrusion 66 and the recess 65 is released, and the connection unit 14 is rotated by the traction force applied to the connection unit 14 by the string 67a, thereby changing the connection unit 14 from the connected state to the disconnected state. The string 67a is pulled to change from the detached state to the attached state.
Further, although the connection portion 14 connects the curved portion 13 of the groove outer portion 16 and the groove inner portion 15, a linear portion may be provided between the curved portion 13 and the connection portion 14 and connected to the groove inner portion 15. In this case, the rotation shaft to which the connection portion 14 is rotatably attached is provided in the linear portion.
When the vacuum processing of the processing object 33 mounted on the mounting device 30 in the vacuum chamber 8 is started and ended, the mounting device 30 is taken out from the inside of the vacuum chamber 8. For example, when the object to be processed 33 is food (or a tray on which food is loaded), a cold trap (not shown) is connected to the vacuum chamber 8, and after vacuum processing for vacuum drying by the cold trap, the mounting device 30 is taken out from the vacuum chamber 8.
When taking out the article, first, the inside of the vacuum chamber 8 is set to the atmospheric pressure and the lid device 9 is opened, and after the lid device 9 is moved from the lid gap 38, the connection unit 14 is rotated to change the connection unit 14 from the disconnected state to the connected state. When the connection state is established, the convex portion 66 and the concave portion 65 are fitted to maintain the connection state. The mounting device 30 located in front of the inside of the vacuum chamber 8 and closest to the carry-in/out opening 7 is moved from the inside of the vacuum chamber 8 to the outside in a suspended state by applying a force so as to move in the order of the chamber inside 15, the connection portion 14, and the chamber outside 16. Here, the mounting device 30 is stopped when it reaches the linear portion 12 of the slot outer 16.
The mounting vehicle 40 is disposed in advance directly below the linear portion 12 or directly below a line or a plane extending the guide portion 48 of the linear portion 12, with the front wheel 25 facing a portion where the linear portion 12 and the curved portion 13 are connected, and the rear wheel 26 and the main body 21 facing opposite sides thereof.
The lift unit 23 is lowered to a position lower than the bottom surface of the frame 31 of the mounting device 30 suspended from the rail device 10 (here, the linear portion 12), the mounting vehicle 40 is moved in the direction in which the suspended mounting device 30 is located, the lift unit 23 and the portion of the chassis 22 on the front wheel 25 side are inserted between the bottom surface of the frame 31 of the mounting device 30 suspended from the linear portion 12 and the floor surface 5, and then the lift unit 23 is raised, the suspended mounting device 30 is mounted on the lift unit 23, and the mounting device 30 is transferred from the rail device 10 to the mounting vehicle 40.
The mounting device 30 mounted on the elevating portion 23 is raised so that the lower ends of the suspension wheels 42a and 42b are higher than the upper ends of the stopper members 90, and when the mounting vehicle 40 is moved in the direction in which the linear portion 12 extends toward the open end portion of the linear portion 12, the guide portions 48 are pulled out from between the opposing suspension wheels 42a and 42b and between the two mounting plates 41a and 41b of the mounting device 30.
Next, when the elevating portion 23 is lowered to mount the mounting wheels 35 on the floor surface 5, and the elevating portion 23 is further lowered to space the elevating portion 23 from the bottom surface of the frame body 31 and move the mounting vehicle 40 in the direction of the rear wheel 26, the mounting vehicle 40 can be separated from the mounting device 30 mounted on the floor surface 5.
In the above example, the mounting device 30 is moved along the guide portion 48 with the guide portion 48 interposed therebetween by the traveling portion 32, but the configuration of the traveling portion and the guide portion may be changed so that the mounting device is moved along the guide portion with the guide portion interposed therebetween.
Description of the symbols
8 vacuum groove
9 cover device
10 track device
12 straight line part
13 bending part
14 connecting part
15 inside the groove
16 groove outside
171~173Arranging device
30 mounting device
33 object to be processed
40 carrying vehicle
23 lifting part
46 mounting part
47 track part
48 guide part
65 concave part
66 convex parts.

Claims (7)

1. A vacuum processing apparatus includes:
a vacuum tank having an opening for carrying in and out on a side surface thereof;
a mounting device for mounting the object to be processed in the vacuum chamber; and
a rail device which is horizontally arranged and suspends the mounting device,
wherein,
the rail device has:
a tank interior which is a portion disposed inside the vacuum tank;
a tank exterior portion which is a portion disposed outside the vacuum tank; and
a connecting portion which is disposed between one end inside the groove and one end outside the groove and is configured to be rotatable,
wherein,
the connection part rotates in a horizontal plane, the state of the connection part is configured to be capable of switching between a connection state of connecting the groove outside and the groove inside and a separation state of separating the groove outside and the groove inside and forming a gap for a cover between the groove inside and the groove outside,
wherein the carrying-in/out opening is configured to be closable by a cover device disposed in the cover gap when the connection portion is in the separated state,
a guide portion for guiding a moving direction of the mounting device and a rail portion for suspending the mounting device by being mounted on a suspension wheel provided in a traveling portion provided at an upper portion of the mounting device are provided in the tank interior, the tank exterior, and the connection portion, respectively,
wherein the suspension wheel is configured to rotate on the rail portion with the carrying device guided in the moving direction by the guide portion, and the carrying device is configured to be movable along the guide portion, if one of the guide portion and the traveling portion is sandwiched between the other,
a vacuum apparatus for subjecting the object to be processed mounted on the mounting apparatus suspended in the tank to vacuum processing in the vacuum tank sealed by the lid apparatus and vacuum-exhausted,
the groove has a straight portion outside which the guide portion extends linearly and a curved portion outside which the guide portion is curved,
the load carrier is arranged on a load carrier which can move along the horizontal direction, and the load carrier is used for supporting the load of the load carrier on the lifting part and the object to be processed on the load carrier by lifting the lifting part,
the suspension wheel of the mounting device supported by the vehicle is moved onto the rail portion of the linear portion from an end portion of the linear portion opposite to a portion connected to the curved portion, in a state where the other one is sandwiched by the guide portion of the linear portion and the traveling portion of the mounting device supported by the vehicle.
2. The vacuum processing apparatus according to claim 1, wherein after the mounting device is linearly moved in a certain direction by linearly moving the mounting vehicle in the certain direction along the guide portion of the linear portion, the elevating portion is lowered and the mounting device on the elevating portion is suspended from the rail portion of the linear portion, so that the mounting device is spaced apart from the elevating portion.
3. The vacuum processing apparatus according to claim 2, wherein when the elevating unit is moved in the certain direction after the mounting apparatus is spaced apart from the elevating unit, the elevating unit moves to an outside directly below the mounting apparatus.
4. The vacuum processing apparatus according to claim 2, wherein the mounting device located outside the vacuum chamber is carried into the vacuum chamber when the suspended wheel of the mounting device suspended from the rail portion of the linear portion reaches the rail portion inside the chamber after rolling on the rail portion of the curved portion and the rail portion of the connecting portion in the connected state from the rail portion of the linear portion.
5. The vacuum processing apparatus according to claim 1, wherein a stopper member for preventing the mounting device suspended from the linear portion from coming off is provided at an end portion of the rail portion of the linear portion opposite to a portion connected to the curved portion.
6. The vacuum processing apparatus according to claim 1, wherein an inner-tank-side drop-off prevention device and an outer-tank-side drop-off prevention device are provided in the rail device, the inner-tank-side drop-off prevention device is configured to contact the traveling portion of the mounting device suspended in the tank to prevent the mounting device from dropping off from the tank to the cover gap when the connection portion is in the separated state, and the outer-tank-side drop-off prevention device is configured to contact the traveling portion of the mounting device suspended outside the tank to prevent the mounting device from dropping off from the tank to the cover gap.
7. The vacuum processing apparatus according to claim 1, wherein a convex portion is provided on one of the connecting portion and the outside of the groove, and a concave portion is provided on the other, and when the connecting portion is in the connected state, the convex portion and the concave portion are fitted to maintain the connected state, and when the connecting portion is changed from the connected state to the disconnected state, the fitting of the convex portion and the concave portion is released, and the connecting portion becomes rotatable.
CN201580048885.5A 2014-09-12 2015-09-04 Vacuum treatment installation Active CN106794944B (en)

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JP2014-187038 2014-09-12
JP2014187038 2014-09-12
PCT/JP2015/075177 WO2016039261A1 (en) 2014-09-12 2015-09-04 Vacuum processing device

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JP6322716B2 (en) 2018-05-09
CN106794944B (en) 2019-07-09
WO2016039261A1 (en) 2016-03-17
KR20170041875A (en) 2017-04-17
KR101931039B1 (en) 2018-12-19

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