TWI224576B - Substrate transporting device for sequential cassette - Google Patents
Substrate transporting device for sequential cassette Download PDFInfo
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- TWI224576B TWI224576B TW092122005A TW92122005A TWI224576B TW I224576 B TWI224576 B TW I224576B TW 092122005 A TW092122005 A TW 092122005A TW 92122005 A TW92122005 A TW 92122005A TW I224576 B TWI224576 B TW I224576B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Supply And Installment Of Electrical Components (AREA)
Abstract
Description
1224576 五、發明說明（1) 【發明所屬之技術領域】 本發明係有關於一種液晶顯示器玻璃基板之搬運裝置及 方法，尤其係有關於一種用於序列式基板匣之液晶顯示器 玻璃基板之搬運裝置及方法。 【先前技術】 隨者電子科技的進步，尤其在日常生活中隨身電子產品 的盛行，對於輕薄短小、耗電量低的顯示器的需求日益增 加。液晶顯示器（L i q u i d C r y s t a 1 D i s p 1 a y ; L C D )由於具 有耗電力低、發熱量少、重量輕、以及非發光型顯示器等 等的優點，經常被用於此類的電子產品中，甚至已逐步取 代傳統的陰極射線管顯示器。 _ 液晶顯示器裝置通常包括一對基板，相互平行並保持一 _ 空隙隔開。兩基板間之空隙一般稱為單元間隙（c e 1 1 g a p )’且其間會放入液晶材料。液晶材料會隨者所施加的 電子訊號而改變其光學特性。以薄膜電晶體液晶顯示器為 例，複數個像素電極係配置於一基板上，以將預定的電子 訊號施加於該液晶材料上，於另一基板上配置彩色濾光 片，而藉此使該液晶顯示器顯示影像。該基板係由高品質 之透明材料所製造，諸如玻璃、壓克力（Ρ Μ Μ A )等等。 於製造液晶顯示器之製程中，需將玻璃基板從一工作台 移動或搬運至另一工作台。業者通常利用一玻璃基板匣， 以承載及搬運玻璃基板，並配合機械手臂從該玻璃基板g m 中裝卸及拾取每一玻璃基板。 液晶顯示器製造者之玻璃基板匣通常可區分為隨機式基1224576 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a liquid crystal display glass substrate conveying device and method, and particularly relates to a liquid crystal display glass substrate conveying device for a serial substrate box. And methods. [Previous technology] With the advancement of accompanying electronic technology, especially the prevalence of portable electronic products in daily life, the demand for thin, thin, short, and low power consumption displays is increasing. Liquid crystal displays (Liquid Crysta 1 D isp 1 ay; LCD) are often used in such electronic products because they have the advantages of low power consumption, low heat generation, light weight, and non-light-emitting displays. Has gradually replaced traditional cathode ray tube displays. _ Liquid crystal display devices usually include a pair of substrates, which are parallel to each other and maintained with a gap. The gap between the two substrates is generally referred to as a cell gap (c e 1 1 g a p) 'and a liquid crystal material is placed therebetween. Liquid crystal materials change their optical characteristics with the applied electronic signals. Taking a thin film transistor liquid crystal display as an example, a plurality of pixel electrodes are arranged on a substrate to apply a predetermined electronic signal to the liquid crystal material, and a color filter is arranged on the other substrate, thereby making the liquid crystal The display shows the image. The substrate is made of high-quality transparent materials, such as glass, acrylic (PMMA), and so on. In the manufacturing process of the liquid crystal display, the glass substrate needs to be moved or carried from one workbench to another workbench. Manufacturers usually use a glass substrate box to carry and carry glass substrates, and cooperate with a robotic arm to load and unload each glass substrate from the glass substrate gm. Liquid crystal display manufacturers' glass substrate cassettes can usually be divided into random
00775.ptd 第6頁 1224576 五、發明說明（2) 板匣（random cassette)30，如第la及lb圖所示，及序列 式或線支標基板 g(sequential or wire cassette )40， 如第2a及2b圖所示。隨機式基板匣30包括一框架32，且具 有複數個支撐銷3 4，配置於該框架上，用以支撐玻璃基板 2 6。序列式基板匣4 〇亦具有一框架4 2，且另包括複數個支 撐線4 4，支撐破璃基板2 6。於製造過程中，如第3圖所 示，隨機式基板匣3 〇係利用一機械手臂3 6，插入其中，隨 機地取出玻璃基板2 6，移動至一製程設備3 8中。如第4圖 所示’序列式基板匣4 〇係利用滾輪4 6 ，序列地由其下方取 出玻璃基板2 6，移動至一製程設備4 8中。因此，於隨機式 基板H 3 0中之鄰近玻璃基板2 6間必須提供較大的間隔空 隙’以利機械手臂3 6之操作。而序列式基板匣4 0則不需預 留機械手臂3 6的取放空間，因此序列式基板匣4 〇中鄰近玻 璃基板2 6間的間隔空隙遠小於隨機式基板匣3 〇，通常可以 多容納一倍的玻璃基板量。 然而’如第1圖所示，某些現存的真空製程設備1 〇 (如虛 線所不），具有一載入口（ L 〇 a d L 〇 c k ) 1 2，係藉由機械手臂 2 〇載入一工件，亦即一基板。於此情況下，複數個序列式 ^板£座2 2係成列的配置，並具有個別的接收輸送器2 4， 並藉此界定一緩衝區域（buffer zone)或一過渡區域 (tTansi tional zone)。該序列式基板£座係序 J式基㈣座22上，且該基板"之基板係藉/該序列序式 二，S座22輸迗至該接收輸送器24上。該機械手臂2〇係可 著α亥序列式基板g座2 2之配置方向移動，或利用較長的00775.ptd Page 6 1224576 V. Description of the invention (2) Random cassette 30, as shown in Figures la and lb, and sequential or wire cassette substrate g (sequential or wire cassette) 40, as shown in Figure 2a and 2b. The random substrate cassette 30 includes a frame 32 and a plurality of supporting pins 34, which are arranged on the frame to support the glass substrate 26. The serial substrate box 40 also has a frame 42 and further includes a plurality of support wires 4 4 to support the broken glass substrate 26. In the manufacturing process, as shown in FIG. 3, the random substrate cassette 30 is inserted by using a robot arm 36, and the glass substrate 26 is randomly taken out and moved to a process equipment 38. As shown in FIG. 4, the 'sequential substrate cassette 40' uses a roller 4 6 to sequentially take out the glass substrate 26 from below and move it to a process equipment 48. Therefore, a large space must be provided between adjacent glass substrates 26 in the random substrate H 3 0 ′ to facilitate the operation of the robot arm 36. The serial substrate cassette 40 does not need to reserve a pick-and-place space for the robotic arm 36, so the gap between the adjacent glass substrates 26 in the serial substrate cassette 40 is much smaller than the random substrate cassette 30, which can usually be more. Holds twice the amount of glass substrate. However, 'as shown in Figure 1, some existing vacuum process equipment 1 〇 (not shown by the dotted line), has a loading port (L 〇ad L 〇ck) 12, which is loaded by the robot arm 2 〇 A workpiece, that is, a substrate. In this case, a plurality of serially arranged plates 2 and 2 are arranged in a row, and have individual receiving conveyors 24, thereby defining a buffer zone or a transition zone (tTansi tional zone). ). The serial substrate is seated on the J-type base seat 22, and the substrate of the substrate is borrowed / the serial sequence is second, and the S seat 22 is input to the receiving conveyor 24. The robotic arm 20 can move in the arrangement direction of the α-hai serial substrate g-seat 22, or use a longer
1224576 五、發明說明（3) 機械手臂，將該接收輸送器2 4上之基板載入該製程設備1 0 之該載入口 1 2中。然而，此一配置下，該製程設備1 0連同 該序列式基板匣座2 2、該接收輸送器2 4、及該機械手臂2 0 會佔據較大的空間，而使無塵室之空間效能降低。 綜前所述，便有需要提供一種基板搬運裝置，用以將序 列式基板匣中之基板取出載入製程設備中，且具有較小的 空間。 【發明内容】 - 本發明之目的係提供一種基板搬運裝置，用以將序列式 基板匣中之基板取出載入製程設備中，且具有較小的空 間。 為達上述目的，本發明提供一種基板搬運裝置用以搬運 複數個序列式基板匣中之複數個基板。該基板搬運裝置包 含複數個基板E座、一移動執道、以及一輸送器。該基板 E座係以用以容納該序列式基板S ’且可將該序列式基板 匣中之該基板輸出。該移動軌道係沿該複數個基板匣座配 置。該輸送器係沿著該第一移動軌道移動，用以承載該輸 出之基板。 根據本發明之基板搬運裝置，其係佔據較小的體積，而 進一步增加無塵室之空間效能。 為了讓本發明之上述和其他目的、特徵、和優點能更明 顯特徵，下文特舉本發明較佳實施例，並配合所附圖示， 作詳細說明如下。 【實施方式】 ~1224576 V. Description of the invention (3) The robot arm loads the substrate on the receiving conveyor 24 into the loading port 12 of the process equipment 10. However, in this configuration, the process equipment 10 together with the serial substrate holder 2 2, the receiving conveyor 24, and the robotic arm 20 will occupy a larger space, making the space efficiency of the clean room reduce. In summary, there is a need to provide a substrate handling device for taking out substrates from a serial substrate cassette and loading them into a process equipment with a small space. [Summary of the Invention]-The object of the present invention is to provide a substrate handling device for taking out the substrates in the serial substrate cassette and loading them into the processing equipment with a small space. In order to achieve the above object, the present invention provides a substrate carrying device for carrying a plurality of substrates in a plurality of sequential substrate cassettes. The substrate conveying device includes a plurality of substrate E seats, a moving lane, and a conveyor. The substrate E seat is used to accommodate the serial substrate S 'and output the substrate in the serial substrate box. The moving track is arranged along the plurality of substrate holders. The conveyor moves along the first moving track to carry the output substrate. The substrate conveying device according to the present invention occupies a small volume, and further increases the space efficiency of the clean room. In order to make the above and other objects, features, and advantages of the present invention more obvious, the following describes the preferred embodiments of the present invention in detail with reference to the accompanying drawings. [Embodiment] ~
00775.ptd 第8頁 1224576 五、發明說明（4) 現參考第6圖，其顯示根據本發明之第一實施例之一基 板搬運裝置5 0 ’用以將複數個序列式基板[£中之基板，載 入至一製程設備之一載入口 62。該基板搬運裝置50具有 複數個序列式基板匣座7 2，用以容納該序列式基板匣。該 序列式基板匣座7 2具有驅動滾輪（圖中未示），用以依序地 將該序列式基板匣中之基板輸出。該基板搬運裝置5 〇另具 有 移動執道7 6，沿著該複數個序列式基板匣座7 2配置、 二接收輪送器7 4 ( r e c e p t ^ 〇 n c 〇 n v e y〇r )，可沿著該移動執 逼丨6移動、以及一機械手臂7 〇配置於該移動執道7 6之一 端。 於操作時，容納複數個基板之該序列式基板匣係個別地 放置^該序列式基板匣座7 2。該接收輸送器7 4可為一自動 $制敦置（圖中未示）所控制，而於該移動執道7 6上移動。 ^ ^序列式基板匣座7 2中之一者欲輸出基板時，該接收輸 $ & 會移動至該者處，用以承接該者輸出之基板。該機 械手臂7 〇可進一步被操作，而將該接收輸送器74上之該基 板移動至該製程設備6 0之該載入口 6 2。不同之該序列式其 二# 2可依序或隨機的輸出基板至該接收輸送器7 4上， 亚 藉由該機械手臂7 0搬運至該載入口 6 2中。00775.ptd Page 8 1224576 V. Description of the invention (4) Reference is now made to FIG. 6, which shows a substrate handling device 50 according to a first embodiment of the present invention, which is used to transfer a plurality of serial substrates [ The substrate is loaded into a loading port 62 of a process device. The substrate carrying apparatus 50 has a plurality of serial substrate holders 72 for accommodating the serial substrate holder. The serial substrate holder 72 has a driving roller (not shown) for sequentially outputting the substrates in the serial substrate holder. The substrate conveying device 5 has a moving guide 76, which is arranged along the plurality of serial substrate holders 72 and two receiving rollers 7 4 (recept ^ 〇nc 〇nvey〇r), which can be moved along the The moving force 丨 6 moves, and a robot arm 70 is arranged at one end of the moving force tract 76. In operation, the serial-type substrate cassette accommodating a plurality of substrates is individually placed ^ the serial-type substrate cassette holder 72. The receiving conveyor 74 can be controlled by an automatic parking system (not shown), and moves on the moving lane 76. ^ ^ When one of the serial substrate holders 72 wants to output a substrate, the receiving input $ & will be moved to that person to receive the substrate output by that person. The robot arm 70 can be further operated, and the substrate on the receiving conveyor 74 is moved to the loading port 62 of the process equipment 60. Different from the serial formula, the second # 2 can output the substrates to the receiving conveyor 74 sequentially or randomly, and the sub-arms can be carried to the loading port 62 by the robot arm 70.
JdE- +人 的了 ；本技藝者將可瞭解，該接收輸送器7 4係為可旋轉 該機^此可於不同的角度輸入或輪出該基板，或者有助於 ^ /械手臂70自接收輸送器70上取出該基板。 置5 0 於先前技術中之該搬運裝置，本發明之基板搬運裝 佔據較小的體積，而進一步增加無塵室之空間效能。JdE- + people; the artist will understand that the receiving conveyor 74 is a rotatable machine ^ This can input or wheel out the substrate at different angles, or help The substrate is taken out from the receiving conveyor 70. By placing 50 in the handling device in the prior art, the substrate handling device of the present invention occupies a smaller volume, and further increases the space efficiency of the clean room.
00775.ptd 第9頁 1224576 五、發明說明（5) 現請參考第7圖，其顯示根據本發明之一第二實施例之 一基板搬運裝置5 0’ 。該基板搬運裝置5 0 ’係類似於該基板 板運裝置5 0，其中相似的元件標示相同的圖號。該基板搬 運裝置5 0 ’具有一機械手臂7 0，配置於該移動執道7 6上， 且可沿著該移動軌道7 6移動。 現請參考第8圖，其顯示根據本發明之一第三實施例之 一基板搬運裝置5 0’ ’ 。該基板搬運裝置5 0’ ’係類似於該基 板板運裝置5 0，其中相似的元件標示相同的圖號。該基板 搬運裝置5 0 ’’具有一第一移動軌道7 6，沿著該複數個序列 式基板匣座72配置，以及一第二移動執道76’ ，平行於該 第一移動執道7 6。一接收輸送器7 4係配置於該第一移動執 道7 6上，並沿著該移動執道7 6移動。一機械手臂7 0係配置 於該第二移動執道7 6 ’上，且可沿著該移動執道7 6移動。 於此配置下，該接收輸送器7 4可與該機械手臂7 0共同作 用，而將該序列式基板匣中之基板搬運至該製程設備6 0之 該載入口 6 2中。 現請參考第9圖，其顯示根據本發明之一第四實施例之 一基板搬運裝置5 0 ’’’ 。該基板搬運裝置5 0’ ’’係類似於該 基板板運裝置5 0 ’，其中相似的元件標示相同的圖號。該 基板搬運裝置5 0 ’’’具有兩個接收輸送器7 4，分別配置於 該機械手臂7 0之兩端，藉以迅速的將該序列式基板匣中之 基板搬運至該製程設備6 0之該載入口 6 2中。 再請參考第1 0圖，其顯示根據本發明之一實施例之一多 層接收輸送器1 0 0。該多層接收輸送器1 0 0具有一底座00775.ptd Page 9 1224576 V. Description of the invention (5) Please refer to FIG. 7 which shows a substrate handling device 50 ′ according to a second embodiment of the present invention. The substrate carrying device 50 'is similar to the substrate carrying device 50, in which similar components are marked with the same drawing numbers. The substrate carrying device 50 'has a robot arm 70, which is arranged on the moving lane 76, and can move along the moving track 76. Reference is now made to Fig. 8, which shows a substrate carrying apparatus 50 'according to a third embodiment of the present invention. The substrate carrying device 50 'is similar to the substrate carrying device 50, in which similar components are marked with the same drawing numbers. The substrate handling device 50 '' has a first moving track 76, which is arranged along the plurality of serial substrate holders 72, and a second moving track 76 'parallel to the first moving track 76. . A receiving conveyor 74 is arranged on the first moving lane 76 and moves along the moving lane 76. A robot arm 70 is disposed on the second moving lane 76 and can move along the moving lane 76. In this configuration, the receiving conveyor 74 can work with the robot arm 70 to transfer the substrates in the serial substrate cassette to the loading port 62 of the process equipment 60. Reference is now made to Fig. 9, which shows a substrate carrying apparatus 50 '' 'according to a fourth embodiment of the present invention. The substrate carrying device 50 'is similar to the substrate carrying device 50', in which similar components are marked with the same drawing numbers. The substrate conveying device 50 '' 'has two receiving conveyors 74, which are respectively arranged at both ends of the robot arm 70, so as to quickly transfer the substrates in the serial substrate cassette to the process equipment 60 The loading port 62 is provided. Please refer to FIG. 10 again, which shows a multi-layer receiving conveyor 100 according to an embodiment of the present invention. The multilayer receiving conveyor 100 has a base.
00775.ptd 第10頁 1224576 五、發明說明（6) 110、一升降裝置112，配置於該底座110上、一第一層接 收器1 1 4配置於該升降裝置1 1 2上、以及一第二層接收器 1 1 6藉由複數個支柱1 1 8，穩固地加裝於該第一層接收接收 輸送器1 1 4上。該第一層接收器1 1 4及該第二層接受器1 1 6 個別的具有兩個凹槽1 2 0。該機械手臂7 0之支撐臂（圖中未 示）可插入該凹槽1 2 0中，用以取出該基板。又，該第一層 接收器1 1 4及該第二層接受器1 1 6具有複數個滾輪1 2 2，用 以承接該序列式基板匡所輸出之該基板。 於操作時，該多層接收輸送器1 0 0係與該序列式基板匣 座7 2相對齊，藉此該序列式基板匣座7 2可將一基板輸出至 該第一層接收器1 1 4上。之後，該液壓裝置1 1 2將該第一層 接收器1 1 4及該第二層接收器降低，如此使得該序列式基 板匣座7 2可輸出另一基板至該第二層接受器1 1 6上。 精於本技藝者將可瞭解，該多層接收輸送器1 0 0係可用 以取代該接收輸送器7 4。又，若需要，該多層接收輸送器 1 0 0亦可提供更多層之接收器。舉例而言，若該製程裝置 6 0每一批次加工1 0片基板，則該多層接收輸送器1 0 0可具 有1 0層之接收器。 再次參考第1 1圖，其顯示根據本發明之另一實施例之兩 基板搬運裝置2 5 0，用以將複數個序列式基板匣中之基 板，載入至一製程設備2 6 0中，以及將複數個基板自該製 程設備2 6 0中載出至複數個序列式基板匣中。 該製程設備2 6 0係為一輸送帶型式之製程設備，具有一 製程輸送帶2 6 2。該基板板運裝置2 5 0具有複數個序列式基00775.ptd Page 10 1224576 V. Description of the invention (6) 110, a lifting device 112 arranged on the base 110, a first-level receiver 1 1 4 arranged on the lifting device 1 1 2 and a first The two-layer receiver 1 1 6 is stably installed on the first-layer receiving and receiving conveyor 1 1 4 through a plurality of pillars 1 1 8. The first-layer receiver 1 1 4 and the second-layer receiver 1 1 6 each have two grooves 1 2 0. A support arm (not shown) of the robot arm 70 can be inserted into the groove 120 to take out the substrate. In addition, the first-layer receiver 1 1 4 and the second-layer receiver 1 1 6 have a plurality of rollers 1 2 2 to receive the substrate output by the serial-type substrate. In operation, the multi-layer receiving conveyor 100 is aligned with the serial substrate holder 72, whereby the serial substrate holder 72 can output a substrate to the first-layer receiver 1 1 4 on. After that, the hydraulic device 1 1 2 lowers the first layer receiver 1 1 4 and the second layer receiver, so that the serial substrate holder 7 2 can output another substrate to the second layer receiver 1 1 on 6. Those skilled in the art will understand that the multi-layer receiving conveyor 100 can be used in place of the receiving conveyor 74. Also, if needed, the multi-layer receiving conveyor 100 can also provide more layers of receivers. For example, if the processing device 60 processes 10 substrates in each batch, the multi-layer receiving conveyor 100 may have 10-layer receivers. Referring again to FIG. 11, it shows a two substrate handling device 2 50 according to another embodiment of the present invention, which is used to load substrates in a plurality of serial substrate cassettes into a process equipment 2 60. And, a plurality of substrates are carried out from the process equipment 260 into a plurality of serial substrate cassettes. The process equipment 2600 is a process equipment of a conveyor belt type, and has a process conveyor 2262. The substrate board transport device 2 50 has a plurality of sequential basis
00775.ptd 第11頁 1224576 五、發明說明（7) 板S座2 7 2 ’用以容納該序列式基板匡。該序列式基板匡 座2 7 2用以依序地將該序列式基板匣中之基板輸出，或將 該基板輸入至該序列式基板匣中。該基板搬運裝置2 5 0另 具有一移動軌道2 7 6，沿著該複數個序列式基板匣座2 72配 置、以及一接收輸送器274 (reception conveyor)，可沿 著該移動執道2 7 6移動，用以輸出該基板至該製程設備2 6 0 之該製程輸送帶2 6 2，或由該製程設備2 6 0之該製程輸送帶 2 6 2 ’將該基板輸出至該序列式基板昆。 雖然本發明已以前述較佳實施例揭示，然其並非用以限 定本發明，任何熟習此技藝者，在不脫離本發明之精神和 範圍内，當可作各種之更動與修改。因此本發明之保護範 圍當視後附之申請專利範圍所界定者為準。00775.ptd Page 11 1224576 V. Description of the invention (7) The board S seat 2 7 2 ′ is used to accommodate the serial base board. The serial substrate mount 2 7 2 is used to sequentially output the substrates in the serial substrate box, or input the substrates into the serial substrate box. The substrate conveying device 2 50 has a moving track 2 7 6, which is arranged along the plurality of serial substrate holders 2 72 and a receiving conveyor 274 (reception conveyor), which can be moved along the moving path 2 7 6 moves to output the substrate to the process conveyor 2 6 2 of the process equipment 2 6, or the process conveyor 2 6 2 'to output the substrate to the serial substrate by the process equipment 2 6 0 Kun. Although the present invention has been disclosed in the foregoing preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the scope of the appended patent application.
00775.ptd 第12頁 1224576 圖式簡單說明 【圖式簡單說明】 第la及lb圖係為先前技術中之一隨機式基板匣之立體及 剖面示意圖。 第2 a及2 b圖係為先前技術中之一序列式基板匣之立體及 剖面示意圖。 第3圖係為一示意圖，顯示先前技術中之一隨機式基板 匣之基板之搬運作業。 第4圖係為一示意圖，顯示先前技術中之一序列式基板 匣之基板之搬運作業。 第5圖係為先前技術中之一基板搬運裝置之示意圖。 第6圖係為根據本發明之一第—實施例之一基板搬運裝 置之示意圖。 第7圖係為根據本發明之一第二實施例之一基板搬運裝 置之示意圖。 第8圖係為根據本發明之一第三實施例之一基板搬運裝 置之示意圖。 第9圖係為根據本發明之一第四實施例之一基板搬運裝 置之示意圖。 第1 0圖係為根據本發明之一實施例之一多層接收輸送器 之立體透視示意圖。 第1 1圖係為根據本發明之另一實施例之一基板搬運裝置 之示意圖。 圖號說明：00775.ptd Page 12 1224576 Brief description of the drawings [Simplified description of the drawings] Figures la and lb are three-dimensional and cross-sectional views of a random substrate box in the prior art. Figures 2a and 2b are three-dimensional and cross-sectional views of a serial substrate cassette in the prior art. FIG. 3 is a schematic diagram showing a substrate transfer operation of a random substrate cassette in the prior art. FIG. 4 is a schematic diagram showing a substrate handling operation of a serial substrate cassette in the prior art. FIG. 5 is a schematic diagram of a substrate handling device in the prior art. Fig. 6 is a schematic diagram of a substrate handling apparatus according to a first embodiment of the present invention. Fig. 7 is a schematic diagram of a substrate handling apparatus according to a second embodiment of the present invention. Fig. 8 is a schematic diagram of a substrate handling apparatus according to a third embodiment of the present invention. Fig. 9 is a schematic diagram of a substrate handling apparatus according to a fourth embodiment of the present invention. Fig. 10 is a schematic perspective view of a multilayer receiving conveyor according to an embodiment of the present invention. FIG. 11 is a schematic diagram of a substrate carrying apparatus according to another embodiment of the present invention. Figure number description:
00775.ptd 第13頁 122457600775.ptd Page 13 1224576
IHli!IHli!
圖式簡單說明 10 製程設備 12 載入口 20 機械手臂 22 序列式基板E座 24 接收輸送器 26 玻璃基板 30 隨機式基板匣 32 框架 34 支撐銷 36 機械手臂 38 製程設備 40 序列式基板匣 42 框架 44 支撐線 46 滾輪 48 製程設備 50 基板搬運裝 置 50, 基板搬運裝置 50,， 基板搬運裝 置 50,， ’該基板搬運裝置 60 製程設備 62 載入口 70 機械手臂 V 7 2 序列式基板匣座 74 接收輸送器 76 移動軌道 76’ 移動執道 100 多層接收輸送器 1 1 0 底座 1 12 液壓裝置 114 第一層接收 器 1 16 第二層接收器 118 支柱 120 凹槽 122 滾輪 250 基板搬運裝置 260 製程設備 262 製程輸送帶 272 序列式基板匣座 274 接收輸送器 2 7 6移動軌道 00775.ptd 第14頁Brief description of the drawings 10 Process equipment 12 Loading port 20 Robot arm 22 Sequential substrate E seat 24 Receiving conveyor 26 Glass substrate 30 Random substrate box 32 Frame 34 Support pin 36 Robot arm 38 Process equipment 40 Sequential substrate box 42 Frame 44 Support line 46 Roller 48 Process equipment 50 Substrate transfer device 50, Substrate transfer device 50, Substrate transfer device 50 ,, 'The substrate transfer device 60 Process equipment 62 Loading port 70 Robot arm V 7 2 Serial substrate holder 74 Receiving Conveyor 76 Moving Track 76 'Moving Steering 100 Multi-layer Receiving Conveyor 1 1 0 Base 1 12 Hydraulic Unit 114 First-level Receiver 1 16 Second-level Receiver 118 Pillar 120 Groove 122 Roller 250 Substrate Handling Device 260 Process Equipment 262 Process conveyor 272 Serial substrate holder 274 Receiving conveyor 2 7 6 Moving rail 00775.ptd Page 14
Claims (1)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW092122005A TWI224576B (en) | 2003-08-11 | 2003-08-11 | Substrate transporting device for sequential cassette |
| KR1020040059098A KR20050018598A (en) | 2003-08-11 | 2004-07-28 | Panel transper apparatus of sequential cassette |
| JP2004227587A JP4440032B2 (en) | 2003-08-11 | 2004-08-04 | Substrate transfer device for sequential substrate cassette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW092122005A TWI224576B (en) | 2003-08-11 | 2003-08-11 | Substrate transporting device for sequential cassette |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TWI224576B true TWI224576B (en) | 2004-12-01 |
| TW200505772A TW200505772A (en) | 2005-02-16 |
Family
ID=34374576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092122005A TWI224576B (en) | 2003-08-11 | 2003-08-11 | Substrate transporting device for sequential cassette |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4440032B2 (en) |
| KR (1) | KR20050018598A (en) |
| TW (1) | TWI224576B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008129603A1 (en) * | 2007-04-05 | 2008-10-30 | Hirata Corporation | Substrate conveyance system |
| JP4950297B2 (en) * | 2007-09-19 | 2012-06-13 | 平田機工株式会社 | Substrate transfer system |
| KR101215591B1 (en) | 2007-09-19 | 2012-12-26 | 히라따기꼬오 가부시키가이샤 | substrate transfer system |
| JP5218000B2 (en) * | 2008-12-12 | 2013-06-19 | 株式会社Ｉｈｉ | Substrate storage and supply system |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0680242A (en) * | 1992-09-04 | 1994-03-22 | Hitachi Electron Eng Co Ltd | Work conveyance process line |
| JP3563851B2 (en) * | 1995-12-05 | 2004-09-08 | 大日本スクリーン製造株式会社 | Substrate transfer device |
| JPH1179389A (en) * | 1997-09-16 | 1999-03-23 | Mitsui Eng & Shipbuild Co Ltd | Substrate glass inspection processing system |
| JPH1179388A (en) * | 1997-09-16 | 1999-03-23 | Mitsui Eng & Shipbuild Co Ltd | Glass sheet handling device |
| JP2002167038A (en) * | 2000-11-30 | 2002-06-11 | Ishikawajima Harima Heavy Ind Co Ltd | Board transfer device |
| JP4458694B2 (en) * | 2001-02-26 | 2010-04-28 | 株式会社日立ハイテクノロジーズ | Substrate transport apparatus and exposure apparatus |
| JP2003086659A (en) * | 2001-09-11 | 2003-03-20 | Hirata Corp | Substrate transfer device |
-
2003
- 2003-08-11 TW TW092122005A patent/TWI224576B/en not_active IP Right Cessation
-
2004
- 2004-07-28 KR KR1020040059098A patent/KR20050018598A/en not_active Application Discontinuation
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Also Published As
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| TW200505772A (en) | 2005-02-16 |
| JP4440032B2 (en) | 2010-03-24 |
| KR20050018598A (en) | 2005-02-23 |
| JP2005060110A (en) | 2005-03-10 |
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