JP2012182273A - Method of in-line inspection of glass substrate and device of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve production efficiency by improving the throughput of a whole inspection device by reducing as much as possible the waiting time of each inspection device in an in-line production process.SOLUTION: A device for in-line inspection of glass substrates comprises: stage means for floating the glass substrate by blowing air from beneath the glass substrate; transport means for transporting the floated glass substrate along the stage means; and inspection means for inspecting the glass substrate passing by in the middle of transport by the transport means. The transport means comprises: a first transport part that transports the first substrate floated by the stage means by holding it and passing it through the inspection means; and a second transport part that transports the second substrate floated by the stage means by holding it and passing it through the inspection means. The second transport part is constructed so that while the first transport part is moving, the second transport part moves in the direction opposite to that of the first transport part crossing over or under the first transport part.

Description

  The present invention relates to a device for inspecting a glass substrate of a liquid crystal display device, a glass substrate for a plasma display panel, a glass substrate for an organic EL, and the like, and in particular, a glass substrate suitable for transporting and inspecting a glass substrate by air levitation. The present invention relates to an in-line inspection method and apparatus.

  Manufacture of a TFT (Thin Film Transistor) substrate, a color filter substrate, an EL (Electro Luminescence) display panel substrate, and the like used as a display panel is performed by forming a pattern on a glass substrate by photolithography. At that time, if a defect such as a scratch or a foreign substance exists on the surface of the glass substrate, the pattern is not formed well, which causes a defect. For this reason, conventionally, inspection of defects such as scratches and foreign matters on the surface of the glass substrate has been performed using a defect inspection apparatus.

  Robots and roller conveyors are used in the process of transporting glass substrates to defect inspection equipment, but the materials used for robot suction pads and rollers of roller conveyors are transferred to the glass substrate during transport. It becomes a factor of the defect of the foreign material. For this reason, Patent Document 1 describes a configuration in which a substrate held by suction is air-lifted and transported as a technique for transporting a glass substrate in a non-contact manner.

  As a glass substrate driving method by air levitation, a roller feeding method, a chuck method, a tray conveying method, and the like are known as known techniques.

  The defect inspection apparatus irradiates a glass substrate with inspection light such as a laser beam and receives reflected light or scattered light from the front or back surface of the glass substrate to detect defects such as scratches and foreign matter. As a method for determining whether a detected defect is a scratch or a foreign substance in an inspection of a glass substrate using a defect inspection apparatus, a technique described in Patent Document 2 is known.

  Further, as a method for identifying whether the detected defect exists on the front surface or the back surface of the glass substrate, a technique described in Patent Document 3 is known.

JP 2006-188313 A Japanese Patent Laid-Open No. 9-257642 JP-A-9-258197

  In the method of adsorbing and holding the substrate described in Patent Document 1, if the substrate transfer line is long, it takes time to reciprocate the adsorption holding unit, and if this is applied to inline production as it is, throughput decreases. There was a problem that.

  Patent Documents 2 and 3 disclose optical inspection apparatuses, but are not considered for application to in-line production.

  An object of the present invention is to solve the above-described problems of the prior art, to reduce the waiting time of each inspection apparatus in the in-line production process as much as possible, to improve the throughput of the entire inspection apparatus, and to improve the production efficiency. .

  In order to solve the above problems, in the present invention, a stage unit that floats the glass substrate by blowing air from below to the glass substrate, a transport unit that transports the floated glass substrate along the stage unit, and the transport In an apparatus for in-line inspecting a glass substrate having an inspection means for inspecting a passing glass substrate in the middle of being conveyed by means, the first glass substrate floated by the stage means is held on the conveying means and inspected. A second transport unit comprising: a first transport unit that transports through the means; and a second transport unit that holds and transports the second glass substrate levitated by the stage unit and passes through the inspection unit. Is configured to move so as to straddle or submerge the first transport unit in a direction opposite to the first transport unit when the first transport unit is moving.

  In order to solve the above-mentioned problem, in the present invention, air is blown onto the first glass substrate from below to hold the first glass substrate on the stage and hold the first glass substrate along the stage. The first glass substrate is inspected by passing through the inspection means in the middle of the conveyance by the first conveyance unit, and the second glass substrate is blown onto the stage by blowing air from below to the second glass substrate. In the glass substrate in-line inspection method in which the second glass substrate in the middle of conveyance is inspected by passing through the inspection means while being floated and held by the second conveyance unit and conveyed along the stage. When the first glass substrate held by the first transport unit is inspected by passing the inspection means and then the second glass substrate held by the second transport portion is inspected by passing the inspection means, the first glass substrate is inspected. The first gas inspected from the transport section of The first transport unit is moved in the opposite direction to the second transport unit that is transporting the second glass substrate in a state where the second substrate is removed, and the second transport unit is crossed over or across the second transport unit. To return to the position in front of the inspection means.

  According to the present invention, it is possible to continuously inspect the substrates being transported by the respective transport units so as to minimize the waiting time of each inspection apparatus, thereby improving the throughput of the entire inspection apparatus and improving the production efficiency. I was able to plan.

It is a top view which shows a part of structure of the glass substrate in-line conveyance and apparatus by the Example of this invention. It is a front view which shows a part of structure of the glass substrate in-line conveyance and apparatus by the Example of this invention. It is a block diagram which shows the system configuration | structure of the glass substrate in-line conveyance and apparatus by the Example of this invention. It is a front view which shows the structure of the 1st conveyance unit by the Example of this invention, and a 2nd conveyance unit. It is a side view which shows the structure of the 2nd conveyance unit by the Example of this invention. It is a perspective view explaining the detail of the board | substrate chuck | zipper alignment mechanism of the 1st conveyance unit by the Example of this invention. It is a flowchart which shows the flow of a process of glass substrate conveyance by the Example of this invention. It is a figure which shows the time chart of the glass substrate conveyance by the Example of this invention. It is a flowchart which shows the flow of a process of the transfer of the glass substrate between the conveyance units by the Example of this invention.

  Embodiments of the present invention will be described with reference to the drawings.

  1A and 1B show the configuration of a glass substrate inline conveyance / inspection apparatus according to an embodiment of the present invention.

  FIG. 1A is a plan view showing an overall configuration of a glass substrate inline conveyance / inspection apparatus 100 according to an embodiment of the present invention. FIG. 1B is a front view of the glass substrate inline conveyance / inspection apparatus 100.

  In FIG. 1A, 110 is an inline conveyance unit, 120 is a first conveyance unit, 130 is a second conveyance unit, 140 is an optical inspection unit, 170 is an overall control unit, and 180 is an air supply source. Reference numeral 10 denotes a glass substrate to be inspected.

  FIG. 1B shows a front view of the glass substrate inline conveyance / inspection apparatus 100. The glass substrate 10 is transported along the air floating surface 111 of the inline transport unit 110.

  The glass substrate 10 to be inspected is increased in size and has a different size depending on the type, and the glass substrates of various sizes are inspected by one glass substrate in-line conveyance / inspection apparatus 100. In order to inspect the entire surface of such a large glass substrate 10 having a different size with a single optical inspection apparatus, the inspection apparatus must be matched with the largest glass substrate, which increases in size and throughput. Resulting in. Therefore, in the in-line type inspection apparatus shown in FIGS. 1A and 1B according to the present invention, the inspection area of the glass substrate 10 is divided into a plurality of sizes so as to correspond to the sizes of various glass substrates. A plurality of inspection devices installed along the transport line are sequentially inspected.

  As described above, in a configuration in which a plurality of inspection apparatuses are arranged along the conveyance line, it is important to reduce the waiting time of each inspection apparatus as much as possible in order to increase the throughput of the line. In this embodiment, a plurality of substrate transfer units are arranged between the inspection apparatuses, and the substrates being transferred are alternately inspected by the respective transfer units so as to minimize the waiting time of each inspection apparatus. did.

  That is, in the present embodiment, in the configuration shown in FIGS. 1A and 1B, the glass substrate 10 to be inspected is placed on the air floating surface 111 of the inline transport unit 110 by the first transport unit 120 or the second transport unit 130. It is conveyed along and the surface scratches and defects are detected while passing through the optical inspection unit 140. The glass substrate 100 that has passed through the optical inspection unit 140 is configured to be transferred to the third transport unit by the first substrate transfer unit 211 between the adjacent optical inspection unit 141.

  FIG. 2 is a block diagram showing a defect inspection line system according to the present invention. The optical inspection unit 140 includes a transmitted light detection type inspection optical system 1401 that detects light transmitted through the inspection target substrate using an LED as a light source, and transmitted scattered light detection that detects scattered light transmitted through the inspection target substrate using a laser as a light source. The inspection optical system 1402 is provided, and the inspection optical system 1402 is configured to inspect with any inspection optical system according to the type and process of the inspection target glass substrate 10. The control unit 170 includes a signal processing unit 171 that receives and processes a signal detected by inspecting the inspection target substrate by the inspection unit 140, and a control unit 172 that controls the entire defect inspection line. The air supply source unit 180 includes a vacuum exhaust unit 181 that performs vacuum exhaust for vacuum suction of the substrate to be inspected by the inline transport unit 110 and a compressed air supply that supplies high-pressure air to be used for transporting the substrate to be inspected by the inline transport unit 110 A source 182 is provided.

  Next, detailed configurations of the inline conveyance unit 110, the first conveyance unit 120, and the second conveyance unit 130 will be described with reference to FIG.

  FIG. 3A is a cross-sectional view showing a detailed configuration of the first transport unit 120 and the second transport unit 130 according to the present invention. FIG. 3B is a cross-sectional view showing a detailed configuration of the second transport unit 130 according to the present invention. FIG. 4 is a detailed view showing a detailed configuration of the first transport unit 120 and glass substrate holding / alignment according to the present invention.

  The first transport unit 120 includes an X stage 121, a Y stage 122, and a Z stage 123. The X stage 121 is driven in the X-axis direction by a linear guide 121a and a linear motor 121b, and moves along the inline transfer unit 110 to transfer the glass substrate 10 in the X direction (direction perpendicular to the drawing of FIG. 3A). be able to. The drive source of the X stage 121 may be driven by a ball screw and a motor or a belt and a motor in addition to the combination of the linear guide 121a and the linear motor 121b. Further, a pulse motor or a servo motor may be used as a drive source. Furthermore, a combination of various motors and a rack and pinion may be used.

  A linear guide 122a is fixed to the Y stage 122, and the linear guide 122a is engaged with a ball screw 122b installed along the Y-axis direction. The ball screw 122b is connected to a motor 122c fixed to the X stage. By driving the motor 122c in this state, the ball screw 122b is rotationally driven, and the linear guide 122a moves along the axial direction (Y direction) of the ball screw 122b, whereby the Y stage 122 to which the linear guide 122a is fixed is moved. It is driven in the Y-axis direction on the X stage 121.

  A linear guide 123a is fixed to the Z stage 123, and the linear guide 123a is engaged with a ball screw 123b installed along the Z-axis direction. The ball screw 123b is connected to a motor 123c fixed to the Y stage. When the motor 123c is driven in this state, the ball screw 123b is rotationally driven and the linear guide 123a moves along the axial direction (Y direction) of the ball screw 122b, whereby the Z stage 123 to which the linear guide 123a is fixed is moved. Driven in the Z-axis direction on the Y stage 122.

  When the glass substrate 10 is received, the ball screw 123b is rotationally driven by the motor 123c to raise the Z stage 123, and when the glass substrate 10 is delivered, the ball screw 123b is rotationally driven in the reverse direction by the motor 123c to lower the Z stage 123.

  A chuck base 124 is fixed to the Z stage 123. As shown in FIG. 4, the chuck base 124 has a plate 125 for holding a guide 125d for pressing the end surface along the X-axis direction in order to align the glass substrate 10 in the X direction, and this plate 125 in the Y-axis direction. A ball screw 125b for driving, a linear guide 125a fixed to the plate 125 and engaged with the ball screw 125b, and a motor 125c for rotating the ball screw 125b are provided.

  Further, as shown in FIG. 4, the chuck base 124 has a plate 126 for holding a guide 126d for pressing the end surface along the Y-axis direction in order to align the glass substrate 10 in the Y direction, and this plate 126 is attached to the X-axis. A ball screw 126b for driving in the direction, a linear guide 126a fixed to the plate 126 and engaged with the ball screw 126b, and a motor 126c for rotating the ball screw 126b are provided. The glass substrate 10 pushed in the X-axis direction by the guide 126d has its opposite end face pressed against the positioning pin 126e and the position in the X-axis direction is fixed.

  Thus, by positioning the glass substrate 10 by pressing the end face of the glass substrate 10 against the positioning pins with the guides 125d and 126d in the X direction and the Y direction, the length of the X direction and the Y direction depending on the type of the glass substrate 10 can be increased. Can respond to changes. For example, it is possible to automatically change the setup from the G5 size to the G6 size, and it is possible to deal with various types of glass substrates. The chuck base 124 has a plurality of suction holes 124d for sucking and holding the glass substrate 10 connected to the vacuum exhaust unit 181 shown in FIG. It can prevent that position shift generate | occur | produces in the glass substrate 10 in the middle of conveyance by fixing to. Depending on the conveyance speed, the adsorption may not be used.

  The guides 125d and 126e may be rollers, pins or blocks.

  The second transport unit 130 includes an X stage 131, a Z stage 133, and a Y stage 134. The X stage 131 is driven in the X-axis direction by a linear guide 131a and a linear motor 131b, and runs along the inline conveyance unit 110 and along with the first conveyance unit 120, so that the second conveyance unit 130 performs the first conveyance. By arranging so as to cover the unit 120, the glass substrate 10 can be transported in the X direction. As a driving source in the X direction, a combination of a ball screw and a motor or a combination of a belt and a motor may be used in addition to the linear guide 131a and the linear motor 131b. Further, a pulse motor or a servo motor may be used as a drive source. Furthermore, a combination of various motors and a rack and pinion may be used.

  A Z stage attachment plate 132 for attaching the Z stage is fixed to the X stage 131.

  A linear guide 133a is fixed to the Z stage 133, and the linear guide 133a is engaged with a ball screw 133b installed along the Z-axis direction. The ball screw 133b is connected to a motor 133c fixed to the Z stage mounting plate 132. By driving the motor 133c in this state, the ball screw 133b is rotationally driven, and the linear guide 133a moves along the axial direction (Y direction) of the ball screw 133b, whereby the Z stage 133 to which the linear guide 133a is fixed is moved. It is driven on the X stage 131 in the Z-axis direction.

  When the glass substrate 10 is received, the ball screw 133b is rotationally driven by the motor 133c to raise the Z stage 133, and when the glass substrate 10 is delivered, the motor 133c rotationally drives the ball screw 133b in the reverse direction to lower the Z stage 133.

  A Y stage support plate 137 is fixed to the Z stage 133, and a block 138 is fixed to the Y stage support plate 137. A linear guide 134a is fixed to the Y stage 134, and the linear guide 134a is engaged with a ball screw 134b installed along the Y-axis direction. The ball screw 134b is connected to a motor 134c fixed to the block 138. When the motor 134c is driven in this state, the ball screw 134b is rotationally driven and the linear guide 134a moves along the axial direction (Y direction) of the ball screw 134b, whereby the Y stage 134 to which the linear guide 134a is fixed is moved. It is driven on the Z stage 133 in the Y-axis direction.

  The Y stage 134 operates in the same manner as the chuck base 124 of the first transport unit 120. The Y stage 134 includes a plate 135 for holding a guide 135d for pressing the end surface along the X-axis direction in order to align the glass substrate 10 in the X direction, and a ball screw 135b for driving the plate 135 in the Y-axis direction. A linear guide 135a fixed to the plate 135 and engaged with the ball screw 135b, and a motor 135c for rotating the ball screw 135b are provided. The motor 135c is fixed to the Y stage 134.

  Further, as shown in FIG. 3B, the Y stage 134 has a plate 136 for holding a guide 136d for pressing the end surface along the Y-axis direction in order to align the glass substrate 10 in the Y-direction, and the plate 136 as the X-axis. A ball screw 136b for driving in the direction, a linear guide 136a fixed to the plate 136 and engaged with the ball screw 136b, and a motor 136c for rotating the ball screw 136b are provided. The glass substrate 10 pushed in the X-axis direction by the guide 136d has its opposite end face pressed against the positioning pin 136e, and the position in the X-axis direction is fixed.

  Thus, by positioning the glass substrate 10 by pressing the end face of the glass substrate 10 against the positioning pins with the guides 135d and 136d in the X direction and the Y direction, the length of the X direction and the Y direction depending on the type of the glass substrate 10 can be increased. Can respond to changes. For example, it is possible to automatically change the setup from the G5 size to the G6 size, and it is possible to deal with various types of glass substrates. In addition, a large number of suction holes 134d for sucking and holding the glass substrate 10 are provided at the front end portion of the Y stage 134. The suction holes 134d are connected to the vacuum exhaust unit 181 shown in FIG. It can prevent that position shift generate | occur | produces in the glass substrate 10 in the middle of conveyance by fixing to. Depending on the conveyance speed, the adsorption may not be used. The guides 135d and 136e may be rollers, pins or blocks.

  The first transport unit 120 and the second transport unit 130 described with reference to FIG. 3A are installed on both sides of the in-line transport unit 110 with target-shaped transport units disposed thereon. The linear motor 121b for driving the X stage 121 of the first transport unit 120 and the linear motor 131b for driving the X stage 131 of the second transport unit 130 installed on both sides of the inline transport unit 110 are respectively disposed on both sides of the inline transport unit 110. By carrying out synchronous operation, it becomes possible to carry while holding both ends of the glass substrate 10.

  A large number of air ejection holes 111 are provided on the upper surface of the inline conveyance unit 110. The glass substrate 10 can be floated and transported from the upper surface of the inline transport unit 110 along the upper surface of the inline transport unit 110 by the first transport unit 120 or the second transport unit 130 in a state where air is ejected from the hole 111. it can.

  In the present embodiment, when the first transport unit 120 and the second transport unit 130 intersect, the glass substrate 10 is transported at a constant time interval by intersecting at a position where the Z stage and the Y stage do not contact each other. And made it possible to inspect. For example, when the second transport unit 130 is holding the glass substrate 10, the Z stage 123 of the first transport unit 120 is lowered so as to cross the second transport unit 130, and conversely, When the first transport unit 120 is holding the glass substrate 10, the Z stage 133 of the second transport unit 130 is raised and intersected so as to pass over the first transport unit 120. Thus, when the glass substrate 10 being transported by one transport unit is inspected by the optical inspection device, the other transport unit moving in the opposite direction does not buffer the glass substrate with the transport unit transporting the glass substrate. It was configured to be able to cross.

FIG. 5 shows the flow of the substrate transfer operation of the present invention.
The glass substrate 10 is put into the glass substrate inline conveyance / inspection apparatus 100 by a robot or a conveyor (S501), and is conveyed onto the air floating stage 110. At this time, the first transport unit 120 stands by at a position where the glass substrate 10 is inserted. After the glass substrate 10 is detected and chucked and held by the first transfer unit 120 (S502), the first transfer unit 120 advances along the in-line transfer unit 100 while holding the glass substrate 10 and is moved to the first transfer unit 120. 1 inspection unit 140 passes. When the 1st conveyance part 120 passes the 1st test | inspection part 140, the 1st test | inspection is performed for the glass substrate 10 hold | maintained at the 1st conveyance unit 120 by the 1st test | inspection part 140 (S503). . The first transport unit 120 that has passed through the first inspection unit 140 stops between the first inspection unit 140 and the second inspection unit 141, and the first inspection unit 140, the second inspection unit 141, The glass substrate 10 is delivered to the third transport unit 150 that is waiting between them (S504).

  The third transport unit 150 that has passed the glass substrate 10 that has undergone the first inspection proceeds along the in-line transport unit 100 while holding the glass substrate 10 in a chucked state, and passes through the second inspection unit 141. pass. When the third transport unit 150 passes through the second inspection unit 141, the glass substrate 10 held by the third transport unit 150 is subjected to a second inspection by the second inspection unit 141 (S506). .

  The first transport unit 120 that has delivered the glass substrate 10 subjected to the first inspection to the third transport unit 150 is a glass substrate while the third transport unit 150 is moving along the inline transport unit 100. 10 is returned to the position where it was received, and the glass substrate 12 to be inspected next is received.

  On the other hand, the second inspection unit 130 performs inline conveyance in the opposite direction to the first inspection unit 120 when the first inspection unit 120 that has received the glass substrate in S502 is moving along the inline conveyance unit 100. It progresses along the part 100, reaches | attains the receiving position of the glass substrate 11, and receives the glass substrate 11 next test | inspected.

Furthermore, while the first transport unit 120 is performing the return operation, the second transport unit 130 that has received the glass substrate 11 to be inspected next proceeds along the in-line transport unit 100 and performs the first inspection. The glass substrate 11 is inspected through the section 140. The second transport unit 130 that has passed through the first inspection unit 140 stops between the first inspection unit 140 and the second inspection unit 141, and the first inspection unit 140 and the second inspection unit 141. The glass substrate 11 is delivered to the fourth transport unit 160 that is waiting between the two.
FIG. 6 shows a time chart of the operations of the first transport unit 120 to the fourth transport unit 160 described above. The first transport unit 120 and the second transport unit 130 include a first substrate delivery unit 211 that is intermediate between the substrate carry-in unit 210 (see FIG. 1A), the first inspection unit 140, and the second inspection unit 141. The third transport unit 150 and the fourth transport unit 160 are alternately in the middle of the first substrate delivery unit 211, the second inspection unit 141, and the third inspection unit 142. 2 reciprocates alternately between the two substrate transfer sections 212. The first transport unit 120 delivers the substrate to the third substrate transport unit 150, and the second transport unit 130 delivers the substrate to the fourth substrate transport unit 160. In the drawing, the portion indicated by a thick line indicates a state in which the inspection of the glass substrate 10 is performed in each inspection unit.

  When the first transport unit 120 transports the glass substrate 10 from the substrate carry-in unit 210 to the first substrate delivery unit 211 through the first inspection unit 140, the substrate carry-in unit 210 is transferred from the first substrate delivery unit 211. Since the second transport unit 130 that is not transporting the glass substrate 10 at this time is in a state where the Z stage 133 is raised from the transport position of the glass substrate 10. The first transport unit 120 and the second transport unit 130 can cross without buffering.

  Similarly, when the first transport unit 120 that has moved the glass substrate 10 to the third transport unit 150 in the first substrate delivery section 211 moves to the substrate transport section 210 through the first inspection section 140. Crossing with the second transport unit 130 that transports the glass substrate 11 from the substrate carry-in section 210 through the first inspection section 140 to the first substrate delivery section 211, but at this time the second transport unit 130 that does not transport the glass substrate Since one transport unit 120 is in a state in which the Z stage 123 is lowered from the transport position of the glass substrate 10, the first transport unit 120 and the second transport unit 130 can intersect without being buffered.

  Since the third transport unit 150 and the fourth transport unit 160 move in the same manner, they can intersect without buffering.

  Next, an operation of transferring the glass substrate 10 carried by the first transfer unit 120 in the first transfer unit 211 to the third transfer unit 150 will be described with reference to FIG.

  First, the first transport unit 120 that has transported the glass substrate 10 reaches the first substrate delivery section 211 and stops. At this time, the third transport unit 150 also reaches the first substrate transfer section 211 and stops. In this state, the first transport unit 120 releases the vacuum suction of the glass substrate 10 from the suction hole 124a provided in the chuck base 124 (S711). Next, the ball screws 125b and 126b are driven by the motor 125c and the motor 126c, respectively, to retract the guides 125d and 126e, thereby releasing the chuck of the glass substrate 10 (S720). Next, the ball screw 122b is driven by the motor 122c to retract the Y stage 122 to a position completely removed from the glass substrate 10 (S713), and the ball screw 123b is driven by the motor 123c to lower the Z stage 123 (S714). As a result, the first transport unit 120 is in a state of opening the glass substrate 10 and retracting to the standby position.

  Next, the ball screw 133b is driven by the motor 133c of the second transport unit 130 to lower the Z stage 133 to a height where the upper surface of the Y stage 134 coincides with the substrate transport surface (S721), and the upper surface of the Y stage 134 is the substrate. The ball screw 134b is driven by the motor 134c in a state where the height coincides with the transport surface to advance the Y stage 134 (S722). Next, the ball screws 135b and 136b are driven by the motors 135c and 136c to press the guides 135b and 136 against the glass substrate 10 to perform alignment of the glass substrate 10 in the X direction and the Y direction (S723). Next, the glass substrate 10 in an aligned state is evacuated from the suction hole 134d provided in the Y stage, and is vacuum-sucked to the Y stage 134 (S724), and the transfer of the glass substrate 10 is completed.

  After the transfer of the glass substrate 10 is completed, the first transfer unit 120 is driven by the linear motor 121b while the Y stage 122 and the Z stage 123 are stopped at the retracted position, and the substrate carrying-in unit The movement to 210 is started (S715).

  On the other hand, the third transport unit 150 that has received the glass substrate 10 starts moving to the second substrate delivery section 211 when the X stage 131 is driven by the linear motor 131b while the glass substrate 10 is chucked ( S725).

  The above-described series of operations are repeated with the fifth, sixth,... Transport unit, and the third, fourth,... Inspection section, so that the inspection over the entire surface of the glass substrate is performed (S507). Is discharged (S508). The defect coordinates of the glass substrate are not described in the figure, but the defect coordinates of the glass substrate can be accurately managed by collating the linear scale signal with the inspection data.

  According to the present invention, it is possible to transport a substrate in a non-contact manner, and it is possible to transport the substrate without degrading the throughput and without contaminating the substrate. It becomes possible.

  DESCRIPTION OF SYMBOLS 10 ... Glass substrate 100 ... Glass substrate inline conveyance / inspection apparatus 110 ... Inline conveyance part 120 ... 1st conveyance unit 130 ... 2nd conveyance unit 140 ... Inspection part 150 ... 3rd conveyance unit 160 ... 4th conveyance unit 170: Control unit 180 ... Air supply source section.

Claims (10)

An apparatus for inspecting a glass substrate in-line,
Stage means for floating the glass substrate by blowing air from below to the glass substrate;
Conveying means for conveying the floated glass substrate along the stage means;
Inspection means for inspecting the glass substrate that is passing through the conveying means, and the conveying means comprises:
A first transport unit that holds the first glass substrate levitated by the stage means and transports it through the inspection means;
Holding a second glass substrate levitated by the stage means and carrying the second glass substrate through the inspection means, and the second carrier is moved by the first carrier. A glass substrate in-line inspection apparatus configured to move so as to straddle or submerge the first transport unit in a direction opposite to the first transport unit.   A plurality of the inspection means are arranged along the stage means, and the first glass substrate is conveyed by the first conveyance unit through the first inspection means among the plurality of inspection means arranged. A second transport unit that receives the second test unit disposed adjacent to the first test unit and transports the second test unit through the second test unit, and the second transport unit. The second glass substrate transported through the first inspection means is received between the first inspection means and the second inspection means and transported through the second inspection means. The glass substrate in-line inspection apparatus according to claim 1, further comprising: a fourth transporting unit.   The first transport unit and the second transport unit are respectively a glass substrate holding unit that holds the glass substrate, and a glass substrate holding unit that is higher than the glass substrate that is floated and transported by the stage means. The glass substrate in-line inspection apparatus according to claim 1, further comprising a drive unit that drives in the vertical direction.   The glass substrate in-line inspection apparatus according to claim 1, wherein the inspection unit is an optical inspection unit that detects transmitted light of the glass substrate that is passing through the conveyance unit.   2. The first transfer unit and the second transfer unit of the transfer unit are each configured by a pair of transfer units arranged to face each other with the stage unit interposed therebetween. Glass substrate in-line inspection equipment.   Each pair of transport units of the first transport unit and the second transport unit disposed so as to face each other with the stage unit interposed therebetween includes a linear motor as a drive unit along the stage unit. The glass substrate in-line inspection apparatus according to claim 5. Air is blown onto the first glass substrate from below and the first glass substrate is lifted on the stage while being held by the first transport unit and transported along the stage,
Inspecting the first glass substrate through the inspection means in the middle of conveyance by the first conveyance unit,
Air is blown onto the second glass substrate from below and the second glass substrate is lifted on the stage while being held by the second transport unit and transported along the stage,
A method for inspecting the second glass substrate in the middle of conveyance by the second conveyance unit by passing the inspection means,
After inspecting the first glass substrate held by the first transport unit through inspection means, the second glass substrate held by the second transport unit is inspected by passing through the inspection means. When the first glass substrate inspected is removed from the first transport unit, the first transport unit is moved in the opposite direction to the second transport unit that is transporting the second glass substrate. Then, the glass substrate inline inspection method is characterized by returning to a position in front of the inspection means by crossing the second transport section or diving below. After inspecting the first glass substrate held by the first transport unit through inspection means, the inspected first glass substrate is transferred to the third transport unit and then transferred to the third transport unit. Holding the first glass substrate held by the third holding means along the stage, and passing the second inspection means in the middle of the transfer to pass the second inspection means by the second inspection means. The method for inspecting a glass substrate according to claim 7, wherein the first glass substrate is inspected.   Moving the first transport unit in a direction opposite to the second transport unit and crossing the second glass substrate across the second transport unit being transported or under the crossing, The second transport in a state in which the height of the holding unit that holds the first glass substrate of the first transport unit is changed higher or lower than the height when the first glass substrate is transported. The in-line inspection method for a glass substrate according to claim 7, wherein the in-line inspection method is performed by intersecting with the portion.   Each of the first transport unit and the second transport unit is composed of a pair of transport units arranged to face each other with the stage interposed therebetween, and the first transport unit and the second transport unit. The glass substrate in-line inspection method according to claim 7, wherein each pair of transport units is driven in a direction along the stage by a linear motor that is operated synchronously.

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