CN1721302B - Substrate conveying apparatus for sequence type substrate box - Google Patents
Substrate conveying apparatus for sequence type substrate box Download PDFInfo
- Publication number
- CN1721302B CN1721302B CN 200410069624 CN200410069624A CN1721302B CN 1721302 B CN1721302 B CN 1721302B CN 200410069624 CN200410069624 CN 200410069624 CN 200410069624 A CN200410069624 A CN 200410069624A CN 1721302 B CN1721302 B CN 1721302B
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- substrate
- sequence type
- conveyer
- box
- type substrate
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Abstract
Base plate conveyer for sequence base plate box comprises multiple base plate box bases, mobile track and one conveyer. The box base is used to accommodate base plate box and output the base plate in box. The mobile track is allocated along multiple box bases. The conveyer runs along the first mobile track to bear the output base plate.
Description
Technical field
The present invention relates to a kind of Handling device and method of LCD glass substrate, especially relate to a kind of Handling device and method that is used for the LCD glass substrate of sequence type substrate box.
Background technology
With the progress of person's electronics technology, the accompanied electronic product is in vogue especially in daily life, increases day by day for the demand of the telltale compact, that consumption of current is low.Liquid Crystal Display (LCD) (Liquid CrystalDisplay; LCD) because have that power consumption power is low, cal val is few, the advantage of in light weight and non-light emitting type display or the like, be often used in this type of the electronic product, even progressively replace traditional cathode-ray tube display.
LCD device generally includes a pair of substrate, and described a pair of substrate is parallel to each other and keeps a space to separate.Space between two substrates is commonly referred to as box gap (cell gap), and puts into liquid crystal material therebetween.Liquid crystal material can change its photometric characteristics along with the electric signal that is applied.With the Thin Film Transistor-LCD is example, and a plurality of pixel electrodes are configured on the substrate, so that predetermined electric signal is applied on this liquid crystal material, disposes colored filter on another substrate, and makes this liquid crystal display displays image whereby.This substrate is by high-quality transparent material manufacturing, such as glass, polymethyl acrylate (PMMA) etc.
In making the process of Liquid Crystal Display (LCD), need glass substrate from a movable workbench or be carried to another bench board.The dealer utilizes a glass substrate box usually, and with carrying and carrying glass substrate, and the cooperative mechanical arm loads and unloads and pick up each glass substrate from this glass substrate box.
Liquid Crystal Display (LCD) builder's glass substrate box can be divided into random mode substrate box (randomcassette) 30 usually, shown in Fig. 1 a and 1b, and list type or line supporting substrate box (sequential or wirecassette) 40, shown in Fig. 2 a and 2b.Random mode substrate box 30 comprises a framework 32, and has a plurality of supporting pins 34, and described a plurality of supporting pins 34 are configured on this framework, in order to support glass substrate 26.Sequence type substrate box 40 also has a framework 42, and also comprises a plurality of anchor wires 44, described a plurality of anchor wire 44 support glass substrates 26.In manufacturing process, as shown in Figure 3, random mode substrate box 30 utilizes a mechanical arm 36, inserts wherein, takes out glass substrate 26 randomly, moves in the flowing water implement 38.As shown in Figure 4, sequence type substrate box 40 utilizes roller 46, and sequence ground takes out glass substrate 26 by its below, moves in the flowing water implement 48.Therefore, 26 of the adjacent glass substrates in random mode substrate box 30 must provide bigger space, interval, in order to the operation of mechanical arm 36.Sequence type substrate box 40 then need not reserved the space that picks and places of mechanical arm 36, so the space, interval of 26 of adjacent glass substrates can hold one times glass substrate amount much smaller than random mode substrate box 30 usually in the sequence type substrate box 40.
Yet as shown in Figure 1, the vacuum flowing water implement 10 (shown in dotted line) that some is existing has a load ports (Load Lock) 12, is written into a workpiece by mechanical arm 20, also is a substrate.In the case, the configuration of 22 one-tenth row of a plurality of sequence type substrate cassette holders, and have the individual conveyer 24 of reception else, and define a buffer area (buffer zone) or a transitional region (transitional zone) whereby.This sequence type substrate cassette holder is placed on this sequence type substrate cassette holder 22, and the substrate in this substrate box is delivered on this reception conveyer 24 by this sequence type substrate cassette holder 22.This mechanical arm 20 can move along the configuration direction of this sequence type substrate cassette holder 22, or utilizes long mechanical arm, and this that the substrate on this receptions conveyer 24 is loaded this Detroit automation equipment 10 is written in the mouth 12.Yet, under this configuration, this Detroit automation equipment 10 together with this sequence type substrate cassette holder 22, this receptions conveyer 24, and this mechanical arm 20 can occupy bigger space, and make the space usefulness reduction of dust free room.
Described before combining, just need to provide a kind of substrate transfer apparatus, this substrate transfer apparatus loads in the Detroit automation equipment in order to the substrate in the sequence type substrate box is taken out, and has less space.
Summary of the invention
The purpose of this invention is to provide a kind of substrate transfer apparatus, this substrate transfer apparatus loads in the Detroit automation equipment in order to the substrate in the sequence type substrate box is taken out, and has less space.
For reaching above-mentioned purpose, the invention provides a kind of substrate transfer apparatus, this substrate transfer apparatus is in order to carry a plurality of substrates in a plurality of sequence type substrate boxes.This substrate transfer apparatus comprises: a plurality of substrate cassette holders, a moving track and a conveyer.This substrate cassette holder is with in order to holding this sequence type substrate box, and can be with this substrate output in this sequence type substrate box.This moving track is along described a plurality of substrate cassette holder configurations.This conveyer moves along this first moving track, in order to carry the substrate of this output.
It occupies smaller volume substrate transfer apparatus of the present invention, and can further increase the space usefulness of dust free room.
In order to make above and other objects of the present invention, feature and the advantage can be clearer,, and in conjunction with the accompanying drawings, be described in detail below below especially exemplified by preferred embodiment of the present invention.
Description of drawings
Fig. 1 a and 1b are the solid and the generalized sections of the random mode substrate box in the prior art.
Fig. 2 a and 2b are the solid and the generalized sections of the sequence type substrate box in the prior art.
Fig. 3 one shows the scheme drawing of transport operation of the substrate of the random mode substrate box in the prior art.
Fig. 4 one shows the scheme drawing of transport operation of the substrate of the sequence type substrate box in the prior art.
Fig. 5 is the scheme drawing of the substrate transfer apparatus in the prior art.
Fig. 6 is the scheme drawing according to the substrate transfer apparatus of one first embodiment of the present invention.
Fig. 7 is the scheme drawing according to the substrate transfer apparatus of one second embodiment of the present invention.
Fig. 8 is the scheme drawing according to the substrate transfer apparatus of one the 3rd embodiment of the present invention.
Fig. 9 is the scheme drawing according to the substrate transfer apparatus of one the 4th embodiment of the present invention.
Figure 10 is the volume rendering scheme drawing that receives conveyer according to a multilayer of one embodiment of the invention.
Figure 11 is the scheme drawing of a substrate transfer apparatus according to another embodiment of the present invention.
The reference numeral explanation:
10 Detroit automation equipment: 12 are written into mouth
20 mechanical arms, 22 sequence type substrate cassette holders
24 receive conveyer 26 glass substrates
30 random mode substrate boxes, 32 frameworks
34 supporting pins, 36 mechanical arms
38 Detroit automation equipment, 40 sequence type substrate boxes
42 frameworks, 44 anchor wires
46 rollers, 48 Detroit automation equipment
50 substrate transfer apparatus, 50 ' substrate transfer apparatus
50 " substrate transfer apparatus 50
Substrate transfer apparatus
60 Detroit automation equipment 62 are written into mouth
70 mechanical arms, 72 sequence type substrate cassette holders
74 receive conveyer 76 moving tracks
76 ' moving track
100 multilayers receive conveyer 110 bases
112 hydraulic efficiency gear, 114 ground floor receptors
116 second layer receptors, 118 pillars
120 grooves, 122 rollers
250 substrate transfer apparatus, 260 Detroit automation equipment
262 Detroit automation load-transfer devices, 272 sequence type substrate cassette holders
274 receive conveyer 276 moving tracks
The specific embodiment
Refer now to Fig. 6, Fig. 6 shows the substrate transfer apparatus 50 according to the first embodiment of the present invention, and this substrate transfer apparatus 50 is loaded into one of a flowing water implement 60 and is written into mouth 62 in order to the substrate in a plurality of sequence type substrate boxes.This substrate transfer apparatus 50 has a plurality of sequence type substrate cassette holders 72, in order to hold this sequence type substrate box.This sequence type substrate cassette holder 72 has the driving rolls (not shown), in order in order the substrate in this sequence type substrate box is exported.This substrate transfer apparatus 50 also has the mechanical arm 70 that a moving track 76, along described a plurality of sequence type substrate cassette holder 72 configurations can be disposed at an end of this moving track 76 along the reception conveyer 74 (reception conveyor) and that this moving track 76 moves.
When operation, this sequence type substrate box that holds a plurality of substrates individually is positioned over this sequence type substrate cassette holder 72.This reception conveyer 74 can be an automatic control device (not shown) and controls, and moves on this moving track 76.When needing the output substrate one of in this sequence type substrate cassette holder 72, this receptions conveyer 74 can move to this substrate cassette holder place, in order to accept the substrate that this person exports.This mechanical arm 70 can further be operated, and will receive that this substrate on the conveyer 74 moves to this Detroit automation equipment 60 this be written into mouthfuls 62.This different sequence type substrate cassette holders 72 can be in regular turn or ccasual output substrate receive on conveyer 74 to this, and be carried to this by this mechanical arm 70 again and be written in mouthfuls 62.
Those skilled in the art should understand, and this reception conveyer 74 is rotatable, so can input or output this substrate from different angles, perhaps help this mechanical arm 70 to take out this substrate from receiving conveyer 70.
Compare with this Handling device in the prior art, substrate transfer apparatus 50 of the present invention occupies smaller volume, and further increases the space usefulness of dust free room.
Refer now to Fig. 7, Fig. 7 show a substrate transfer apparatus 50 according to one second embodiment of the present invention '.This substrate transfer apparatus 50 ' be similar to this substrate plate shipping unit 50, wherein similar assembly indicates identical figure number.This substrate transfer apparatus 50 ' have a mechanical arm 70, this mechanical arm 70 is configured on this moving track 76, and can move along this moving track 76.
Refer now to Fig. 8, Fig. 8 shows the substrate transfer apparatus 50 according to one the 3rd embodiment of the present invention "." be similar to this substrate plate shipping unit 50, wherein similar assembly indicates identical figure number to this substrate transfer apparatus 50.This substrate transfer apparatus 50 " have: first moving track 76 along described a plurality of sequence type substrate cassette holders 72 configurations, and second moving track 76 that is parallel to this first moving track 76 '.One receives conveyer 74 is configured on this first moving track 76, and moves along this moving track 76.One mechanical arm 70 be configured in this second moving track 76 ' on, and can move along this moving track 76.Under this configuration, this receive conveyer 74 can with these mechanical arm 70 combineds action, and the board carrying in this sequence type substrate box to this of this Detroit automation equipment 60 is written in mouthfuls 62.
Refer now to Fig. 9, Fig. 9 shows the substrate transfer apparatus 50 according to one the 4th embodiment of the present invention
This substrate transfer apparatus 50
Be similar to this substrate plate shipping unit 50 ', wherein similar assembly indicates identical figure number.This substrate transfer apparatus 50
Have two reception conveyers 74, described two reception conveyers 74 are disposed at the two ends of this mechanical arm 70 respectively, rapidly the board carrying in this sequence type substrate box to this of this Detroit automation equipment 60 are written into whereby in mouthfuls 62.
With reference to Figure 10, Figure 10 shows that the multilayer according to one embodiment of the invention receives conveyer 100 again.This multilayer receives conveyer 100 to be had: a base 110, is configured in jacking system 112, on this base 110 and is configured in ground floor receptor 114 and on this jacking system 112 and firmly is installed at this ground floor by a plurality of pillars 118 and receives second layer receptor 116 on conveyer 114.116 of this ground floor receptor 114 and this second layer receivers else have two grooves 120.The hold-down arm (not shown) of this mechanical arm 70 can insert in this groove 120, in order to take out this substrate.Again, this ground floor receptor 114 and this second layer receiver 116 have a plurality of rollers 122, in order to accept this substrate that this sequence type substrate box is exported.
When operation, this multilayer receives conveyer 100 and aligns with this sequence type substrate cassette holder 72, and this sequence type substrate cassette holder 72 can export a substrate on this ground floor receptor 114 to whereby.Afterwards, this hydraulic efficiency gear 112 reduces this ground floor receptor 114 and this second layer receptor, so makes these sequence type substrate cassette holder 72 exportable another substrates to this second layer receiver 116.
Those skilled in the art should understand, and this multilayer receives conveyer 100 can be in order to replace this reception conveyer 74.Again, if need, this multilayer receives conveyer 100 also can provide more multi-layered receptor.For example, if these Detroit automation device 60 each lots processed 10 plate bases, then this multilayer receives the receptor that conveyer 100 can have 10 layers.
Again with reference to Figure 11, Figure 11 shows two substrates Handling device 250 according to another embodiment of the present invention, in order to the substrate in a plurality of sequence type substrate boxes, be loaded in the flowing water implement 260, and a plurality of substrates are carried to a plurality of sequence type substrate boxes from this Detroit automation equipment 260.
This Detroit automation equipment 260 is the Detroit automation equipment of a load-transfer device pattern, has a flowing water operation load-transfer device 262.This substrate plate shipping unit 250 has a plurality of sequence type substrate cassette holders 272, in order to hold this sequence type substrate box.This sequence type substrate cassette holder 272, maybe inputs to this substrate in this sequence type substrate box the output of the substrate in this sequence type substrate box in order in order.This substrate transfer apparatus 250 also has a moving track 276 and along described a plurality of sequence type substrate cassette holder 272 configurations and receives conveyer 274 (reception conveyor), this reception conveyer 274 can move along this moving track 276, in order to export this substrate this Detroit automation load-transfer device 262 to this Detroit automation equipment 260, or, export this substrate to this sequence type substrate box by this Detroit automation load-transfer device 262 of this Detroit automation equipment 260.
Though the present invention discloses with above-mentioned preferred embodiment, so it is not that any those skilled in the art without departing from the spirit and scope of the present invention, can do various changes and modification certainly in order to qualification the present invention.Therefore protection scope of the present invention should be with being as the criterion that claims scope is defined.
Claims (4)
1. substrate transfer apparatus that is used for sequence type substrate box, this substrate transfer apparatus comprises in order to carry a plurality of substrates in a plurality of sequence type substrate boxes:
A plurality of substrate cassette holders, described a plurality of substrate cassette holders are in order to holding this sequence type substrate box, and can be with this substrate output in this sequence type substrate box;
One first moving track along described a plurality of substrate cassette holder configurations; And
One first conveyer, this first conveyer moves along this first moving track, in order to carry the substrate of this output;
One flowing water apparatus for work, this Detroit automation device have a flowing water operation load-transfer device, and wherein the board carrying that will export of this first conveyer is to this Detroit automation load-transfer device.
2. the substrate transfer apparatus that is used for sequence type substrate box as claimed in claim 1 is characterized in that also comprising:
One second conveyer, this second conveyer moves along this first moving track, in order to carry the substrate of this output.
3. the substrate transfer apparatus that is used for sequence type substrate box as claimed in claim 1 is characterized in that: this first conveyer has the conveyer of multilayer, in order to carry the substrate of a plurality of these outputs.
4. the substrate transfer apparatus that is used for sequence type substrate box as claimed in claim 1 is characterized in that: this first conveyer is rotatable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410069624 CN1721302B (en) | 2004-07-15 | 2004-07-15 | Substrate conveying apparatus for sequence type substrate box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410069624 CN1721302B (en) | 2004-07-15 | 2004-07-15 | Substrate conveying apparatus for sequence type substrate box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1721302A CN1721302A (en) | 2006-01-18 |
| CN1721302B true CN1721302B (en) | 2011-02-23 |
Family
ID=35911990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410069624 Expired - Fee Related CN1721302B (en) | 2004-07-15 | 2004-07-15 | Substrate conveying apparatus for sequence type substrate box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1721302B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101673699B (en) * | 2009-09-03 | 2011-05-11 | 东莞宏威数码机械有限公司 | Carrying platform of substrate box |
| JP5704261B2 (en) * | 2012-01-25 | 2015-04-22 | 株式会社島津製作所 | Substrate transfer system and substrate transfer method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5919529A (en) * | 1995-02-13 | 1999-07-06 | Dainippon Screen Mfg. Co., Ltd. | Apparatus for and method of processing substrate |
| CN1461726A (en) * | 2002-05-30 | 2003-12-17 | 东京毅力科创株式会社 | Fragile sheel transporting device and fragile sheet processing |
| CN2608460Y (en) * | 2003-01-14 | 2004-03-31 | 东捷半导体科技股份有限公司 | Liquid crystal base plate transport loading device |
-
2004
- 2004-07-15 CN CN 200410069624 patent/CN1721302B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5919529A (en) * | 1995-02-13 | 1999-07-06 | Dainippon Screen Mfg. Co., Ltd. | Apparatus for and method of processing substrate |
| CN1461726A (en) * | 2002-05-30 | 2003-12-17 | 东京毅力科创株式会社 | Fragile sheel transporting device and fragile sheet processing |
| CN2608460Y (en) * | 2003-01-14 | 2004-03-31 | 东捷半导体科技股份有限公司 | Liquid crystal base plate transport loading device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1721302A (en) | 2006-01-18 |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110223 Termination date: 20160715 |