JP2009051600A - Stocker device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stocker device capable of effectively using a space of a clean room, and being increased even if a vacant space is not available on a floor in the clean room and a storage shelf cannot be installed. <P>SOLUTION: The stocker device comprises a storage shelf portion 10 having the storage shelf 14 for storing a carrier in a flat state, a transfer handling portion 50 having a hoist mechanism portion 80 wherein chuck mechanism 81, 82 arranged above the storage shelf portion 10 and chucking the carrier 1 are driven in XY-axis directions, and hoist devices 142, 143 carrying the carrier 1 from a previous process to the storage shelf portion 10 or carrying the carrier 1 from the storage shelf portion 10 to the next process. A frame body 51 of the transfer handling portion 50 is integrally fixed on a frame body 13 of the storage shelf portion 10, and the frame body 51 of the transfer handling portion 50 is suspended from a ceiling 2. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a stocker device for temporarily storing a carrier.

Manufacture of semiconductor integrated circuits, liquid crystal display devices and the like is performed in a clean room. For example, a substrate or a semiconductor wafer product is stored in a carrier and sent to each process. When the carrier is transported from the previous process to the next process, it is temporarily stored in the stocker device for time adjustment or the like. The stocker device is composed of a storage shelf for storing the carrier and a hoist device for delivering the carrier to the storage shelf. Although there are various types of hoist devices, Patent Documents 1 to 3 and the like can be cited as examples using a ceiling transport vehicle.
JP 2004-14750 A JP 2005-150129 A JP 2007-22777 A

  In the above prior art, the storage shelves are vertical and are installed on the floor of a clean room. For this reason, it could not be installed if there was no empty space on the floor of the clean room.

  An object of the present invention is to provide a stocker device that can effectively utilize the space of a clean room, can be added even when a floor in the clean room has no empty space and a storage shelf cannot be installed.

  According to a first aspect of the present invention for solving the above-mentioned problems, a storage shelf having a storage shelf for storing the object to be transported in a plane and a chucking of the object to be transported are provided above the storage shelf. A transfer handling unit having a hoist mechanism that is driven in the X and Y axial directions and a transported object to the storage shelf from the previous process or a transported object from the storage shelf to the next process. A hoist device, and the chuck mechanism transfers the transferred object transferred from the hoist device to the storage / exit port of the storage shelf to the storage shelf or transfers the transferred object on the storage shelf to the input / output port. The frame of the transfer handling unit is integrally fixed on the frame of the storage shelf, and the frame of the transfer handling unit is suspended from the ceiling.

  Claim 2 of the present invention for solving the above-mentioned problem is that, in the above-mentioned claim 1, the entry / exit port is a delivery unit with a hoist device for delivering an object to be conveyed between the hoist device and the storage shelf. The hoist mechanism unit that delivers the object to be conveyed by the hoist mechanism unit, and the hoist device that positions and places the object to be conveyed in the loading / unloading port. And a slide table that is driven to reciprocate between the transfer section of the hoist mechanism section and the transfer section of the hoist mechanism section.

  Claim 3 of the present invention for solving the above-mentioned problem has a storage shelf for storing the object to be transported in a plane, a storage shelf suspended from the ceiling, and a ceiling above the storage shelf. A hoist mechanism unit that is disposed in a supported manner and chucks the object to be conveyed and is driven in the XY-axis direction, and the object to be conveyed is transported to the storage shelf part from the previous process or is conveyed from the storage shelf part. A hoist device for transporting an object to the next process, wherein the chuck mechanism transfers the object to be transported from the hoist device to an input / output port of a storage shelf to a storage shelf or a material to be transported on the storage shelf. Is transported to the loading / unloading port.

  According to claims 1 and 3, since the storage shelf is formed in a plane and is suspended from the ceiling, the space in the clean room can be used effectively, there is no empty space on the floor in the clean room, and the storage shelf cannot be installed. It can be expanded in some cases. According to the second aspect of the present invention, the carrier can be transferred by the slide table to the transfer section with the hoist device and the transfer section of the hoist mechanism section, so that the carrier can be transferred smoothly and efficiently.

  An embodiment of the stocker apparatus of the present invention will be described with reference to FIGS. As shown in FIGS. 1 and 2, the present embodiment includes a storage shelf 10 that stores the carrier 1, a transfer handling unit 50 that delivers the carrier 1 to the storage shelf 10, and a storage shelf 10. It consists of hoist devices 142 and 143 that deliver the carrier 1 to the warehousing ports 11A and 11B and the evacuation ports 12A and 12B. The storage shelf 10 and the transfer handling unit 50 are suspended from the ceiling 2.

  First, the structure of the storage shelf 10 will be described. The storage shelf 10 is a frame 13 that is completely open at the top and framed around the bottom and the bottom. The frame 13 is formed to have a height higher than that of the carrier 1, and the inside is a storage part of the carrier 1. In the present embodiment, the back sides of the four corners of the frame 13 are warehousing ports 11A and 11B, and the front side is warehousing ports 12A and 12B. Inner portions of the loading / unloading ports 11A, 11B and 12A, 12B are storage shelves 14. In the present embodiment, the storage shelves 14 are shelves on which 4 pieces in the X-axis direction (horizontal) and 12 pieces in the Y-axis direction (vertical) can be placed, for a total of 4 × 12 = 48 pieces.

  The entry / exit ports 11A, 11B and 12A, 12B have a structure shown in FIG. Although FIG. 3 shows the part of the exit port 12A, the other entrance / exit ports 11A, 11B, and 12B have the same structure. A movable slide table 20 is disposed at the loading / unloading ports 11A, 11B and 12A, 12B. A positioning hole (not shown) is formed at the bottom of the carrier 1, and the slide table 20 has a positioning pin 21 that engages with the positioning hole of the carrier 1 and a loading sensor 22 that detects the loading of the carrier 1. Is provided. Both lower side portions of the slide table 20 are slidably fitted into guide rails 23 and 24 arranged in parallel toward the storage shelf 14, and the guide rails 23 and 24 are fixed to the frame body 13. The rail fixing plates 25 and 26 are fixed. Pulley brackets 27 and 28 are fixed on both ends of the outer rail fixing plate 25, and timing pulleys 29 and 30 are rotatably supported on the pulley brackets 27 and 28. An output shaft of a drive motor 31 fixed to the rail fixing plate 25 is connected to the timing pulley 29. A timing belt 32 having both ends fixed to the slide table 20 is wound around the timing pulleys 29 and 30.

  A positioning detection plate 33 is fixed to the slide table 20, and table position sensors 34 and 35 for detecting the positioning detection plate 33 are fixed to the rail fixing plate 25. Here, the table position sensor 34 is provided so as to detect a case where the slide table 20 is located at a position where the carrier 1 is transferred to the slide table 20 and the hoist devices 142 and 143 shown in FIG. The table position sensor 35 is provided so as to detect a case where the slide table 20 is positioned at a position where the carrier 1 is transferred to the slide table 20 and a hoist mechanism 80 of the transfer handling unit 50 described later.

  On the bottom plate of the frame 13 of the storage shelf 14 shown in FIGS. 1 and 2, a fixed table 40 for positioning and mounting the four carriers 1 is laid down as shown in FIG. In the present embodiment, the storage shelf 14 is composed of 48 shelves, so that twelve fixed tables 40 are provided. The fixed table 40 is provided with positioning pins 41 that engage with the positioning holes of the carrier 1 and a loading sensor 42 that detects the loading of the carrier 1.

  Next, the structure of the transfer handling unit 50 will be described with reference to FIGS. 1, 2, and 6 to 8. As shown in FIG. 2, the frame body 51 of the transfer handling unit 50 is completely open at the lower side and is framed at the periphery and upper part, and is fixed to the upper end of the frame body 13 of the storage shelf unit 10. The frame 51 has a size excluding the travel path of the hoist devices 142 and 143 on the end side of the loading / unloading ports 11A and 11B and 12A and 12B. As shown in FIG. It is suspended from the ceiling 2.

  As shown in FIG. 5, Y-axis guide rails 53 and 54 extending in the Y-axis direction are fixed to the middle portion between the back side and the near side of the frame 51 shown in FIG. Y-axis sliders 55 and 56 are slidably inserted into the Y-axis guide rails 53 and 54. X-axis guide rails 57 and 58 extending in the X-axis direction are fixed to the Y-axis sliders 55 and 56, and a movable table 59 is slidably fitted into the X-axis guide rails 57 and 58. .

  Pulley support brackets 60 and 61 are fixed to the Y-axis sliders 55 and 56, and timing pulleys 62 and 63 are rotatably supported on the pulley support brackets 60 and 61, respectively. An output shaft of a drive motor 64 fixed to the Y-axis slider 55 is connected to the timing pulley 62. A timing belt 65 having both ends fixed to the movable table 59 is wound around the timing pulleys 62 and 63. Therefore, when the drive motor 64 is driven, the movable table 59 is moved in the X-axis direction by the timing belt 65 along the X-axis guide rails 57 and 58.

  A pulley support bracket 70 is fixed to the Y-axis slider 56, and a timing pulley 71 and idler pulleys 72 and 73 are rotatably supported on the pulley support bracket 70. An output shaft of a drive motor 74 fixed to the Y-axis slider 56 is connected to the timing pulley 71. Corresponding to the timing pulley 71, belt fixing plates 75 and 76 are fixed to both ends of the Y-axis guide rail 54, and both ends of the timing belt 77 are fixed to the belt fixing plates 75 and 76, respectively. A timing belt 77 having both ends fixed to belt fixing plates 75 and 76 is stretched between the timing pulley 71 and the idler pulleys 72 and 73. Therefore, when the drive motor 74 is driven, the movable table 59 is moved in the Y-axis direction.

  A hoist mechanism 80 is fixed to the movable table 59. The hoist mechanism 80 includes a chuck opening / closing mechanism 81 for chucking the carrier 1 and a chuck opening / closing mechanism 81, as shown in FIGS. It consists of a chuck vertical drive unit 82 that is driven up and down, and a flat cable mechanism unit 83.

  As shown in FIG. 6, the chuck opening / closing mechanism 81 has guide rails 85 and 86 arranged in parallel to the lower surface of the chuck support plate 84, and sliders 87, 88, 89 and 90, 91, 92 are slidably inserted. Chuck fixing plates 93 and 94 are fixed to the sliders 87, 88 and 90, and chuck fixing plates 95 and 96 are fixed to the sliders 89, 91 and 92. Chuckes 97 and 98 disposed opposite to each other are fixed to the chuck fixing plates 93, 94 and 95 and 96. Position detection plates 99 and 100 are fixed to the chucks 97 and 98, and chuck position sensors 101 and 102 are fixed to the chuck support plate 84 corresponding to the position detection plates 99 and 100.

  A chuck opening / closing motor 103 is fixed between the guide rails 85, 86 of the chuck support plate 84, and a pinion 104 is fixed to the output shaft of the chuck opening / closing motor 103. Racks 105 and 106 that mesh with the pinion 104 are fixed to the chuck fixing plates 93 and 96. FIG. 6 shows a state in which the chucks 97 and 98 are opened. When the chuck opening / closing motor 103 is driven from this state and the pinion 104 rotates in the direction of arrow A, the racks 105 and 106 move in the directions of opposite arrows B and B ′. Thus, the carrier 97 can be chucked by moving in the closing direction of the chucks 97 and 98 via the chuck fixing plates 93 and 96. When the chuck opening / closing motor 103 rotates in the opposite direction from this state, the chucks 97 and 98 move in the opening direction to release the chucked carrier 1.

  Next, the structure of the chuck vertical drive unit 82 will be described with reference to FIG. The lower ends of the steel belts 111 and 112 are fixed to the chuck support plate 84 shown in FIG. 6, and the upper ends of the steel belts 111 and 112 are belt take-up reels 114 disposed above the vertical drive unit support plate 113, 115 is wound around and fixed. The shaft portions of the belt take-up reels 114 and 115 are rotatably supported by support plates 116, 117, and 117 fixed to the vertical drive unit support plate 113, and one shaft portion of the belt take-up reels 114 and 115 is supported. The miter gears 118 and 119 are fixed to each other. On the miter gears 118 and 119 side, a gear shaft 120 is disposed at right angles to the axis of the belt take-up reels 114 and 115, and the gear shaft 120 is supported by support plates 121 and 121 fixed to the vertical drive unit support plate 113. , 121 is rotatably supported. Miter gears 122 and 123 that mesh with miter gears 118 and 119 and a miter gear 124 that meshes with a miter gear 125 described later are fixed to the gear shaft 120. The miter gear 125 is fixed to the output shaft of the belt winding drive motor 126 fixed to the vertical drive unit support plate 113.

  6 and 7 show a state where the chuck opening / closing mechanism 81, that is, the chucks 97 and 98 are lowered. When the belt take-up drive motor 126 is driven from this state and the miter gear 125 rotates in the arrow C direction, the miter gears 124, 122, 123 rotate in the arrow D direction, and the miter gears 118, 119 conflict with each other in the arrow E, E ′ directions. Rotate to. As a result, the belt take-up reels 114 and 115 wind up the steel belts 111 and 112, and the chuck opening / closing mechanism 81, that is, the chucks 97 and 98 are raised. In this state, when the belt take-up drive motor 126 rotates in the opposite direction, the chucks 97 and 98 are lowered in the opposite direction.

  Next, the structure of the flat cable mechanism 83 will be described with reference to FIGS. As described above, the chuck opening / closing mechanism 81 is moved up and down by the chuck vertical drive unit 82. For this reason, the flat cable 130 that distributes a signal for driving the chuck opening / closing motor 103 of the chuck opening / closing mechanism 81 is wound up. A connector (not shown) is provided at one end of the flat cable 130 on which the wiring is formed, and this connector is connected to a connector connected to the wiring of the chuck opening / closing motor 103. The other end of the flat cable 130 is wound around a cable take-up reel 131 disposed above the vertical drive unit support plate 113.

  The central shaft 132 of the cable take-up reel 131 is fixed to a support plate 133 that is fixed to the chuck support plate 84. One end of a leaf spring 134 is fixed to the central shaft 132, and the other end of the leaf spring 134 is fixed to the cable take-up reel 131. The other end portion of the flat cable 130 is fixed to the cable take-up reel 131, and the other end portion of the flat cable 130 is connected to the rotation side wiring of the slip ring 136 via the connector 135 to fix the slip ring 136. The side wiring 137 is connected to a control unit (not shown). The slip ring 136 is fixed to the support plate 138, and the support plate 138 is fixed to the chuck support plate 84.

  The flat cable 130 is also moved by the raising and lowering of the chuck opening / closing mechanism 81, and loosening occurs. This slack is removed by the leaf spring 134 being wound. That is, since one end of the flat cable 130 is fixed to the cable take-up reel 131, the flat cable 130 is taken up when the cable take-up reel 131 rotates counterclockwise of the leaf spring 134.

  Finally, the hoist devices 142 and 143 will be described with reference to FIG. The hoist devices 142 and 143 extend along the guide rails 144 and 145 that extend in the X-axis direction and are fixed to the ceiling 2. The hoist devices 142 and 143 have a known structure, and a chuck portion 146 that chucks the carrier 1 is driven up and down.

  Next, the operation will be described. First, a case will be described in which a certain process is finished and the carrier 1 conveyed by the hoist device 143 is supplied to the warehousing port 11A and the carrier 1 is stored in the storage shelf 14. In this case, the slide table 20 of the warehousing port 11A is in a state of being moved to the right side in FIGS. When the hoist device 143 moves along the guide rail 145 and is positioned above the warehousing port 11 </ b> A, the chuck portion 146 descends and positions a positioning hole (not shown) of the carrier 1 to the positioning pin 21. Next, the carrier 1 is placed on the slide table 20 by opening the chuck portion 146. Thereafter, the hoist device 143 rises.

  When the carrier 1 is placed on the slide table 20, the in-stock sensor 22 shown in FIG. 3 is turned on. As a result, the drive motor 31 is driven, the timing belt 32 rotates, and the slide table 20 moves along the guide rails 23 and 24 to the delivery position to the hoist mechanism 80 on the left side of the warehousing port 11A. Further, simultaneously with the carrier 1 being placed on the slide table 20, the drive motors 64 and 74 shown in FIG. 2 are driven. In this state, in the hoist mechanism 80, the chucks 97 and 98 are opened, and as described above, the belt take-up drive motor 126 rotates in the direction of arrow C and the steel belts 111 and 112 are moved to the belt take-up reels 114 and 115, respectively. The chucks 97 and 98 are in a state of being rolled up.

  When the drive motor 64 is driven, the timing pulley 65 rotates as described above, and the hoist mechanism 80 moves together with the movable table 59 in the X-axis direction. When the drive motor 74 is driven, the timing belt 77 rotates as described above, and the hoist mechanism 80 moves together with the movable table 59 in the Y-axis direction. In other words, the hoist mechanism 80 is moved to an arbitrary position by driving the drive motors 64 and 74. The drive motors 64 and 74 are driven, and the hoist mechanism 80 is located above the slide table 20 (the carrier 1 is placed on the slide table 20 as described above) located on the left side of the storage port 11A. To position.

  Next, in order to lower the chucks 97 and 98 that have been raised, the belt take-up drive motor 126 is driven as described above to rotate the miter gear 125 in the direction opposite to the arrow C direction, and the chucks 97 and 98 are moved to the slide table. The carrier 1 on 20 is lowered to a chucking position. Subsequently, the chuck opening / closing motor 103 is driven to rotate the pinion 104 in the direction of arrow A, and the chucks 97 and 98 are closed as described above. As a result, the carrier 1 on the slide table 20 is chucked by the chucks 97 and 98.

  Next, after the belt take-up drive motor 126 is driven to raise the chucks 97 and 98, the drive motors 64 and 74 are driven so that the carrier 1 is not placed on the fixed table 40 of the storage shelf 14, that is, It moves above the mounting position of the carrier 1 on the fixed table 40 where the in-stock sensor 42 is off. Subsequently, the belt take-up drive motor 126 is driven and the chucks 97 and 98 are lowered to position the positioning holes (not shown) of the carrier 1 on the positioning pins 41. Next, after the chuck opening and closing motor 103 is driven and the chucks 97 and 98 are opened, the chucks 97 and 98 are moved up while leaving the carrier 1 on the fixed table 40. Thereby, the storage of the carrier 1 in the storage shelf 14 is completed.

  Next, the case where the carrier 1 stored in the storage shelf 14 is delivered to the hoist device 143 from the exit port 12A position will be described. Since this operation is almost the same as the storage operation described above, it will be briefly described. In this case, the slide table 20 of the exit port 12 </ b> A is moved to the delivery position with the hoist mechanism 80 by the drive motor 31, that is, the left side. The chucks 97, 98 are open and in the raised position. The hoist mechanism 80 moves in the X-axis direction and the Y-axis direction, and is positioned above the carrier 1 on the fixed table 40 where the in-stock sensor 42 is on. Next, the chucks 97 and 98 are lowered and then closed, and the carrier 1 is chucked.

  After the chucks 97 and 98 are lifted, the chucks 97 and 98 are moved above the slide table 20 located at the delivery position on the left side of the delivery port 12A. Next, after the chucks 97 and 98 are lowered and the carrier 1 chucked by the chucks 97 and 98 is positioned on the positioning pins 21 of the slide table 20 of the delivery port 12A, the chucks 97 and 98 are opened. As a result, the carrier 1 is placed on the slide table 20. Thereafter, the chucks 97 and 98 are raised. Subsequently, the slide table 20 moves to the hoist device 143 and moves to the left, which is the delivery position, and waits.

  When there is a carrier 1 supply command from the next step, the hoist device 143 moves above the carrier 1 waiting at the delivery position of the delivery port 12A. Subsequently, the chuck portion 146 in the opened state is lowered and then closed, and the carrier 1 is chucked. Thereafter, the chuck portion 146 is raised, and the hoist device 143 is caused to travel to supply the carrier 1 to the next process. Thereby, the conveyance of the carrier 1 stored in the storage shelf 14 to the next process is completed.

  In the above description, the carrier 1 is supplied from the hoist device 143 to the warehousing port 11A, and the carrier 1 is stored in the storage shelf 14 by the hoist mechanism unit 80 from the warehousing port 11A. This operation is the same when the carrier 1 is supplied from the hoist device 143 to the warehousing port 11B and the carrier 1 is stored in the storage shelf 14 by the hoist mechanism unit 80 from the warehousing port 11B. Similarly, in the above description, the carrier 1 stored in the storage shelf 14 is supplied to the exit port 12A by the hoist mechanism unit 80, and the carrier 1 is delivered to the hoist device 143 from the exit port 12A. This operation is the same when the carrier 1 stored in the storage shelf 14 is supplied to the unloading port 12B by the hoist mechanism unit 80, and this carrier 1 is transferred from the unloading port 12B to the hoist device 143.

  Moreover, in the said embodiment, although the case where two warehousing ports 11A and 11B and two warehousing ports 12A and 12B were provided was demonstrated, one warehousing port or two or more, and one warehousing port is also provided. Or two or more may be provided. Further, the warehousing port and the warehousing port may be used together to form one warehousing / unloading port.

  In the above embodiment, the frame 51 of the transfer handling unit 50 is integrally fixed to the frame 13 of the storage shelf 10, and the frame 51 is suspended from the ceiling 2 via the suspension rod 52. In the present invention, the frame 13 of the storage shelf 10 is directly suspended from the ceiling 2 in addition to the above embodiment. A hoist mechanism 80 having a chuck opening / closing mechanism 81 and a chuck vertical drive unit 82 may be disposed above the storage shelf 10 so that the hoist mechanism 80 is driven on the ceiling in the XY axis direction.

  Thus, since the storage shelf 10 is formed in a plane and is suspended from the ceiling 2, the space in the clean room can be used effectively, and there is no empty space on the floor in the clean room and the storage shelf cannot be installed. Expansion is possible. In addition, in the loading / unloading ports 11A, 11B and 12A, 12B, the hoist devices 142, 143 and the storage shelf 10 deliver the carrier 1, and the hoist devices 142, 143 deliver the carrier 1, and the hoist mechanism 80 provides the carrier 1 And a delivery portion of the hoist mechanism portion 80 for delivering. And it has the slide table 20 by which the carrier 1 is positioned and mounted, and is reciprocally driven between the transfer part of the hoist devices 142 and 143 and the transfer part of the hoist mechanism part 80. That is, since the carrier 1 can be transported to the delivery part of the hoist devices 142 and 143 and the delivery part of the hoist mechanism part 80 by the slide table 20, the carrier 1 can be delivered smoothly and efficiently.

  FIG. 9 shows another embodiment of the chuck vertical drive unit 82 of the hoist mechanism unit 80 of the present invention. In the embodiment (FIGS. 6 and 7), the steel belts 111 and 112 are used for the chuck vertical drive unit 82. In the present embodiment, timing belts 150 and 151 are used instead of the steel belts 111 and 112. In the movable table 59 shown in FIG. 6, the two upper and lower drive unit support plates 152 and 153 are fixed at a predetermined interval, and support units 152 a and 153 a rising upward are formed at the opposite ends. . Belt take-up reels 154 and 155 are rotatably supported on the inner portions of the support portions 152a and 153a.

  On the outside of the belt take-up reels 154 and 155, take-up timing pulleys 156 and 157 are rotatably supported on the support portions 152a and 153a of the vertical drive unit support plates 152 and 153. One end of the timing belts 150 and 151 is fixed to the chuck support plate 84 (see FIG. 6), and the other end is hung on the take-up timing pulleys 156 and 157 and wound around the belt take-up reels 154 and 155 to be fixed. Has been. The timing belts 150 and 151 are pressed against the winding timing pulleys 156 and 157 by pressing rollers 158 and 159 so that the timing belts 150 and 151 are not separated from the winding timing pulleys 156 and 157.

  Gears 160 and 161 that mesh with each other are fixed to one ends of the shaft portions of the belt take-up reels 154 and 155. A slip clutch 162 is fixed to the other end of the shaft portion of the belt take-up reel 154, and the slip clutch 162 is connected to the output shaft of the belt take-up motor 163. The belt take-up motor 163 is fixed to a support plate 164 fixed to the vertical drive unit support plate 152. A slip ring 166 is fixed to the other end of the shaft portion of the belt take-up reel 155 via a coupling 165. The slip ring 166 is fixed to a support plate 167 fixed to the vertical drive unit support plate 152. Yes.

  A miter gear 170 is fixed to one end portion of the shaft portion of the winding drive timing pulley 156, and miter gears 171 and 172 are fixed to one end portion of the shaft portion of the winding drive timing pulley 157. Miter gears 173 and 174 mesh with the miter gears 170 and 171, and the miter gears 173 and 174 are fixed to both ends of the rotating shaft 175. The rotating shaft 175 is rotatably supported by support plates 176 and 177, and the support plates 176 and 177 are fixed to the vertical drive unit support plate 153. A miter gear 178 is engaged with the miter gear 172, and the miter gear 178 is fixed to an output shaft of a belt drive motor 179 fixed to the support plate 177.

  FIG. 9 shows a state where the chucks 97 and 98 are raised. When lowering the chucks 97 and 98, the belt drive motor 179 is driven and the miter gear 178 rotates in the direction of arrow F. As a result, the miter gears 171 and 172 rotate in the arrow G direction, the miter gears 173 and 174 rotate in the arrow F direction, and the miter gear 170 rotates in the arrow G ′ direction. When the miter gears 170 and 171 rotate in the directions indicated by the arrows G ′ and G, the winding timing pulleys 156 and 157 rotate in the directions indicated by the arrows G ′ and G to feed the timing belts 150 and 151 from the belt take-up reels 154 and 155. 97 and 98 descend. When the chucks 97 and 98 are raised, the belt drive motor 179 rotates the miter gear 178 in the reverse direction.

  By the way, the belt take-up reel 163 is configured to always drive the timing belts 150 and 151 in a direction to be wound around the belt take-up reels 154 and 155. When the belt take-up reel 163 is driven and the slip clutch 162 is rotated in the direction of arrow H, the belt take-up reel 154 and the gear 160 are also rotated in the direction of arrow H, and the gear 161 and the belt take-up reel 155 are in the direction of arrow H ′. Rotate. When the belt take-up reels 154 and 155 rotate in the directions of the arrows H and H ′, the timing belts 150 and 151 are wound around the belt take-up reels 154 and 155, and the belt take-up reel 154 and the take-up timing pulley 156 are connected to each other. The slack of the timing belts 150 and 151 does not occur between the reel 155 and the take-up timing pulley 157. As described above, when the timing belts 150 and 151 are fed out from the belt take-up reels 154 and 155, the slip clutch 162 and the slip ring 166 slip and no trouble occurs.

An embodiment of the stocker device of the present invention is shown, (a) is a plan view, (b) is a front view, and (c) is a right side view. The stocker apparatus of the state removed from the ceiling is shown, (a) is a whole perspective view, (b) is an exploded perspective view. It is a perspective view of a loading / unloading port part. It is a perspective view of the fixed table of a storage shelf. The drive part of a hoist mechanism part is shown, (a) is an expansion perspective view, (b) is a top view of a Y-axis drive part, (c) is a front view of (b). The hoist mechanism part is shown, (a) is a front view, (b) is a bottom view of the chuck opening and closing mechanism part. The chuck | zipper vertical drive part is shown, (a) is a top view, (b) is a front view. It is sectional drawing of a cable take-up reel. The other embodiment of a chuck | zipper vertical drive part is shown, (a) is a top view, (b) is a front view.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Carrier 2 Ceiling 10 Storage shelf part 11A, 11B Warehouse port 12A, 12B Delivery port 13 Frame 14 Storage shelf 20 Slide table 23, 24 Guide rail 29, 30 Timing pulley 31 Drive motor 32 Timing belt 40 Fixed table 50 Transfer handling Section 51 Frame 52 Suspension rod 53, 54 Y-axis guide rail 55, 56 Y-axis slider 57, 58 X-axis guide rail 59 Movable table 62, 63 Timing pulley 64 Drive motor 65 Timing belt 71 Timing pulley 72, 73 Idler pulley 74 Drive motors 75, 76 Belt fixing plate 77 Timing belt 80 Hoist mechanism 81 Chuck opening / closing mechanism 82 Chuck vertical drive 83 Flat cable mechanism 103 Chuck opening / closing motor 104 Pinion 111, 1 12 Steel belts 114, 115 Belt take-up reels 120, 122, 123, 124, 125 Miter gear 126 Belt take-up drive motor 130 Flat cable 131 Cable take-up reels 154, 155 Belt take-up reels 156, 157 Take-up timing pulley 170, 171 172 173 174 178 Miter gear 179 Belt drive motor

Claims (3)

  A storage shelf having a storage shelf for storing the object to be transported planarly, and a hoist mechanism which is disposed above the storage shelf and chucks the object to be transported and driven in the XY-axis direction. A transfer handling unit, and a hoist device that transports a transported object to the storage shelf from the previous process or transports a transported object to the next process from the storage shelf, and the chuck mechanism is more than the hoist device. The transferred object transferred to the storage shelf is transferred to the storage shelf, or the transferred object on the storage shelf is transferred to the input / output port, and the transfer handling unit is placed on the frame of the storage shelf. The frame is fixed integrally, and the frame of the transfer handling part is suspended from the ceiling.   The entry / exit port includes a delivery unit for a hoist device that delivers an object to be conveyed between the hoist device and the storage shelf, and a hoist mechanism that is adjacent to the delivery unit and delivers an object to be conveyed by the hoist mechanism unit. A transfer table, and the loading / unloading port includes a slide table that positions and places the object to be transported and reciprocates between the transfer unit with the hoist device and the transfer unit of the hoist mechanism unit. The stocker device according to claim 1.   A storage shelf that stores the object to be transported in a plane, a storage shelf that is suspended from the ceiling, and a chuck that is supported by the ceiling above the storage shelf and chucks the object to be transported The chuck comprises: a hoist mechanism unit that drives the mechanism in the XY axis direction; and a hoist device that conveys the object to be conveyed to the storage shelf from the previous process or conveys the object to be conveyed from the storage shelf to the next process. The mechanism transfers the object to be transferred, which is transferred from the hoist device to the storage / exit port of the storage shelf to the storage shelf, or transfers the object to be transferred on the storage shelf to the input / output port.

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