JP7399552B2 - Container transport device and laser processing device - Google Patents

Description

TECHNICAL FIELD The present invention relates to a storage body transport device and a laser processing device that transport a substrate, for example, to supply a substrate as a workpiece to a laser processing device and take out the processed substrate.

In manufacturing factories for semiconductors, FPDs (flat panel displays), printed wiring boards, etc., storage bodies (magazines, cassettes, carriers, FOUPs (Front Opening Unify Pods): cassettes for wafers, etc.) are used to store multiple boards. Transport the board. In factories, AGVs (Automated Guided Vehicles) and the like are used to transport storage objects between devices or between locations where a plurality of storage objects are set within the same device.

For example, in Patent Document 1, two storage bodies are set in a processing device, a substrate is taken out from one of the storage bodies set at a position on the substrate input side, and after the substrate is processed by the processing device, it is placed in a position on the substrate output side. It is described that the board is stored in the other set storage body. Furthermore, a technique is known in which a conveyor is used to transport a processing device between two positions (see Patent Document 2).

Japanese Patent Application Publication No. 2018-098363 Japanese Unexamined Patent Publication No. 4-313212

In the configuration described in Patent Document 1, when one of the storage bodies set at the substrate input side position becomes empty, the AGV needs to receive this storage body from the processing device and move it to the substrate output side position. There is. However, one storage unit cannot be transported to the substrate unloading position until the other storage unit that was previously set is full, so the next new storage unit cannot be set, and the waiting time is arise. In particular, when a lot is produced that spans multiple storage bodies, one of the empty storage bodies must be temporarily stored, the other fully loaded storage body must be transported to the next process, and the substrates of one of the temporarily stored storage bodies must be stored. There is a problem in that the AGV is frequently occupied in order to be set at the unloading position, and the conductor wires of the AGV are complicated. In the case of Patent Document 2, a transport device for storage objects that does not use an AGV is shown, but it cannot solve the problem that the transport of storage objects that occurs in the configuration described in Patent Document 1 is complicated.

Therefore, an object of the present invention is to provide a storage object transport device and a laser processing device that can efficiently transport storage objects.

The present invention provides a storage body transport unit that transports a storage body capable of storing a plurality of substrates each having a processed layer formed thereon, and positions the storage bodies at a set first position to a fourth position, respectively;
The substrate taken out from the first storage body located at the first position is transported to the substrate processing apparatus, and the substrate is processed into the second storage body located at the second position set on the downstream side of the first position. and a delivery device for storing the board taken out from the device,
During the period of transporting the substrates from the first storage body to the substrate processing apparatus, a third storage body containing the substrates is carried into a third position set upstream of the first position,
During the period in which the substrates taken out from the substrate processing apparatus are stored in the second storage body, the fourth storage unit stores the processed substrates at a fourth position set on the downstream side of the second position. The body is removed from the storage body transport unit,
After a period of storing the substrate taken out from the substrate processing apparatus in the second storage body, the second storage body is transported from the second position to the fourth position,
After a period of transporting the substrate from the first storage body to the substrate processing apparatus, the first storage body is transported from the first position to the second position , and the third storage body is transported from the third position. transported to the first position
This is a container conveying device.

According to at least one embodiment, it is not necessary to wait for a destination to become available in order to move the storage object, and the storage object can be moved within the storage object transport unit without using an AGV. Therefore, it has the advantage of improving productivity. Note that the effects described here are not necessarily limited, and may be any of the effects described in this specification or effects different from them.

FIG. 1 is a diagram showing a schematic front configuration of a first embodiment of the present invention. FIG. 2 is a diagram showing a schematic planar configuration of the first embodiment of the present invention. FIG. 3 is a schematic diagram for explaining the operation of the first embodiment of the present invention. FIG. 4 is a diagram showing a schematic planar configuration of a storage object transport unit according to a second embodiment of the present invention. FIG. 5 is a schematic diagram for explaining a modification of the present invention. FIG. 6 is a schematic diagram for explaining a modification of the present invention.

Embodiments of the present invention will be described below with reference to the drawings. Note that the embodiments described below are preferred specific examples of the present invention, and the content of the present invention is not limited to these embodiments.

FIG. 1 is a schematic front configuration diagram of a first embodiment of the present invention. Further, FIG. 2 is a schematic plan configuration diagram of the first embodiment. In the first embodiment, a laser processing apparatus 1 includes a storage body conveyance device 2 that conveys a storage body (hereinafter referred to as a magazine as appropriate) in which a plurality of substrates each having a layer to be processed are stored therein. The storage object conveyance device 2 includes an X-direction linear motion mechanism 10 such as a guide rail extending in the horizontal direction (X direction) as a storage object transportation unit, and a magazine locking unit H on the moving part of the X-direction translation mechanism 10. is installed. The X-direction linear motion mechanism 1 and the magazine locking unit H are provided so as to be suspended from the ceiling of the air conditioning chamber (exterior frame of the storage object transport device 2). However, the container transport unit may be attached to the inner surface or bottom surface of the air conditioning chamber. Furthermore, a plurality of magazine locking units may be provided.

The magazine locking unit H can be moved horizontally from side to side (X-axis direction), and its movement amount and stop position can be controlled. A clamp mechanism C for connecting the magazine locking unit and the magazine is provided at the lower end of the magazine locking unit H. The magazine locking unit H has a Z direction translation mechanism for moving the clamp mechanism C in the Z direction (vertical direction). The clamp mechanism C connects the magazine locking unit H and the magazine. This connected state and non-connected state can be controlled.

A base B extending in the X direction is disposed at the bottom of the storage object conveying unit. Magazine mounting tables T1, T2, T3, and T4 are attached to a plurality of locations on the base B, for example, four locations. Each magazine mounting table T1 to T4 has a positioning mechanism for positioning the magazine on which it is mounted.

Relief grooves 2a and 2b for forks provided in the AGV are provided on the lower sides of the magazine mounting tables T1 and T4. Further, the magazine mounting tables T2 and T3 can be raised and lowered by table raising and lowering mechanisms 3a and 3b.

In FIG. 1, magazines M1, M2, M3, and M4 are shown placed on magazine placement tables T1 to T4, respectively. A plurality of substrates are stored at intervals in each magazine, as shown by broken lines. The substrate is, for example, an organic substrate for a printed wiring board, and a layer to be processed by laser processing is formed on the surface. The layer to be processed is, for example, a resin film or a metal foil, and is formed of a material that can be processed such as via formation using a laser.

The respective positions of the magazine mounting tables T1 to T4 are referred to as P1, P2, P3 and P4. Position P2 is the first position and position P3 is the second position. At the first position P2, the unprocessed substrate taken out from the magazine is transported to a substrate processing device (hereinafter appropriately referred to as a processing device) that performs processing (laser via processing, exposure processing, etc.) on the substrate, and the second At position P3, the processed substrate taken out from the processing device is stored in the magazine. Further, at the third position P1, a magazine storing unprocessed substrates is arranged so as to be transportable by the AGV to the storage body transport unit (magazine mounting table T1). Furthermore, at the fourth position P4, the magazine in which processed substrates are stored is placed on standby for being removed from the container transport unit by the AGV.

As shown in FIG. 1, in a state where the maximum number of magazines is set, magazine M4 containing unprocessed substrates is set at position P1 (magazine mounting table T1), and magazine M4 containing unprocessed substrates is set at position P2 (magazine mounting table T2). ) is set to the magazine M3 containing the substrate before processing, an empty magazine M2 containing the substrate after processing is set to the position P3 (magazine mounting table T3), and an empty magazine M2 containing the board after processing is set to the position P4 (magazine mounting table T4). A magazine M1 containing processed substrates is set.

The operation of the first embodiment will be explained. In an initial state in which no magazines are set on each magazine mounting table, an empty magazine M1 for storing processed substrates is set by the AGV at position P1 (magazine mounting table T1).
Next, the clamp mechanism C of the magazine locking unit H clamps the upper hook of the magazine M1, and the Z direction translation mechanism of the magazine locking unit H operates in the Z+ direction (upward) to lift the magazine M1. The X-direction linear motion mechanism 1 operates in the X+ direction and transports the magazine M1 onto the magazine mounting table T2. The Z-direction linear motion mechanism of the magazine locking unit H operates in the Z-direction (downward) to place the magazine M1 on the magazine mounting table T2. In this way, magazine M1 is moved from position P1 to position P2. The clamp mechanism C of the magazine locking unit H is released, and the magazine locking unit H is retracted in the Z+ direction (upward) by the Z direction translation mechanism.

Furthermore, the magazine M1 is conveyed from position P2 (magazine mounting table T2) to position P3 (magazine mounting table T3) by the same operation as described above. However, when no other magazine exists, magazine M1 may be transported from position P1 to position P3.

Next, the magazine M2 containing the substrate to be processed is set at position P1 (magazine mounting table T1) by the AGV, and this magazine M2 is moved to position P2 (magazine mounting table T2) by the magazine locking unit H. transport. Therefore, the magazine M2 storing unprocessed substrates is located at position P2, and the empty magazine M1 is located at position P3.

Next, the substrate transfer robot 13 serving as a delivery device takes out the unprocessed substrate from the magazine M2 and inserts it into a processing device, such as a laser processing device. For example, a substrate transfer robot takes out substrates one by one from the upper opening of the magazine M2 and sets them on a processing stage (not shown) of a processing device.

The processed substrates processed by the processing device are stored one by one in the magazine M1 by the substrate transfer robot 13. In this way, the substrate transfer robot 13 takes out one substrate from the magazine M2 at position P2, sets it on the processing stage (not shown) of the processing device, receives the processed substrate from the processing stage, and transfers it to position P3. The processed substrate is stored in the magazine M1. The substrate transfer robot is configured with a known mechanism, for example, a combination of a SCARA robot and a linear motion mechanism.

While the unprocessed substrates of the magazine M2 are loaded into the processing device and processed, the magazine M3 is set at position P1 (magazine mounting table T1) by the AGV. Then, the magazine M1 storing the processed substrates is transported from the position P3 (magazine mounting table T3) to the position P4 (magazine mounting table T4). Then, the magazine M1 is taken out from the storage body conveyance unit by the AGV and conveyed to the next process. Furthermore, the empty magazine M2 is moved from position P2 to position P3, and waits for the start of storing processed substrates. Further, the magazine M3 moves from position P1 (magazine mounting table T1) to position P2 (magazine mounting table 2) and waits for removal of the unprocessed substrate.

While the unprocessed substrates of the magazine M3 are put into the processing device and processed, the magazine M4 is set at the position P1 (magazine mounting table T1) by the AGV. FIG. 1 shows the state before the magazine M1 is taken out by the AGV.
3A, 3B, and 3C schematically illustrate the flow of the above processing.

According to the first embodiment described above, there is no need to wait for a destination to become vacant in order to move a magazine as a storage object, and the magazine can be moved within the storage object transport unit without using an AGV. This has the advantage of improving productivity.

A second embodiment of the present invention will be described with reference to FIG. As shown in FIG. 4, a storage conveyance unit 11 such as a roller chain or a belt conveyor is used to convey the magazine in the X direction. Similar to the first embodiment, the storage unit transport unit 11 is capable of transporting magazines to positions P1 to P4. Further, it is possible to displace the magazine in the Z direction.

According to the second embodiment, there is no need to wait for a destination to become vacant in order to move a magazine, and the magazine can be moved within the storage object transport unit without using an AGV, so productivity can be improved. This has the advantage of improving

FIG. 5 is a plan view of a modified example of the storage object transport unit. A semicircular conveyance path connects the magazine set position P1 and the processing position P2, and connects the board storage position P3, where the processed board is stored, and the position P4, where the magazine waits for the AGV for removal. It has a configuration in which they are connected by a semicircular conveyance path. Furthermore, the conveyance path may be configured in a circular shape.

Furthermore, the path of the container transport unit is not limited to the horizontal (X) direction, but may extend in the vertical (Z) direction. For example, as shown in the front view of a modified example of the container transport unit in FIG. 6, the path between position P1 and position P2 extends upward, and the path connecting position P2 and position P3 extends horizontally. , and the path connecting position P3 and position P4 may extend downward.

In the above explanation, four positions from position P1 to position P4 are set, but it is possible to set position P1 and position P2 as the same position, or position P3 and position P4 as the same position, and set a total of three positions. You may also set it. Furthermore, it may be located at two locations in total. Alternatively, a position for waiting an empty magazine may be provided between the positions P2 and P3 for a total of five positions.

Although the embodiments of the present invention have been specifically described above, the present invention is not limited to the above-described embodiments, and various modifications can be made based on the technical idea of the present invention. Furthermore, the configurations, methods, processes, shapes, materials, numerical values, etc. mentioned in the above-mentioned embodiments are merely examples, and different configurations, methods, processes, shapes, materials, numerical values, etc. may be used as necessary. Good too.

1 0 ...X direction linear motion mechanism, 2...Storage body conveyance device, 3a, 3b...Z direction linear motion mechanism, H...Magazine locking unit, C...Clamp mechanism, M1~ M4...Magazine, T1-T4...Magazine mounting table, P1-P4...Position, 11...Storage body transfer unit, 12...Processing device, 13...Substrate transfer robot

Claims (4)

a storage body transport unit that transports a storage body capable of storing a plurality of substrates each having a processed layer formed thereon, and positions the storage bodies at a set first position to a fourth position, respectively;
The substrate taken out from the first storage body located at the first position is transported to a substrate processing apparatus, and the substrate is transferred to a second storage body located at the second position set on the downstream side of the first position. a delivery device for storing the substrate taken out from the substrate processing device therein;
During a period of transporting the substrates from the first storage body to the substrate processing apparatus, a third storage body containing the substrates is transported to a third position set upstream of the first position. is,
During a period in which the substrate taken out from the substrate processing apparatus is stored in the second storage body, the processed substrate is stored in a fourth position set downstream of the second position. the fourth storage body is carried out from the storage body conveyance unit,
After a period of storing the substrate taken out from the substrate processing apparatus in the second storage, the second storage is transported from the second position to the fourth position,
After a period of transporting the substrate from the first storage to the substrate processing apparatus, the first storage is transported from the first position to the second position , and the third storage a body is transported from the third location to the first location
A storage object conveying device. The storage object transporting device according to claim 1, wherein the storage object transport unit has a transport path for transporting the storage object in a substantially horizontal direction. The storage object transporting device according to claim 1, wherein the storage object transport unit has a transport path for transporting the storage object in a substantially vertical direction. a substrate processing device that processes a substrate with a laser beam;
a storage body transport unit that transports a storage body capable of storing a plurality of substrates each having a processed layer formed thereon, and positions the storage bodies at a set first position to a fourth position, respectively;
The substrate taken out from the first storage body located at the first position is transported to a substrate processing apparatus, and the substrate is transferred to a second storage body located at the second position set on the downstream side of the first position. a delivery device for storing the substrate taken out from the substrate processing device therein;
During a period of transporting the substrates from the first storage body to the substrate processing apparatus, a third storage body containing the substrates is transported to a third position set upstream of the first position. is,
During a period in which the substrate taken out from the substrate processing apparatus is stored in the second storage body, the processed substrate is stored in a fourth position set downstream of the second position. the fourth storage body is carried out from the storage body conveyance unit,
After a period of storing the substrate taken out from the substrate processing apparatus in the second storage, the second storage is transported from the second position to the fourth position,
After a period of transporting the substrate from the first storage to the substrate processing apparatus, the first storage is transported from the first position to the second position , and the third storage a body is transported from the third location to the first location
A laser processing device designed to

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