JP2009035414A - Inter-process conveying system between different stories - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inter-process conveying system between different stories capable of efficiently performing story-to-story conveyance without causing delay in the work by a stacker crane by arranging a story-to-story conveying lifter capable of performing story-to-story conveyance separately from the stacker crane between a storage line and a delivery line inside of a stocker. <P>SOLUTION: This process-to-process conveying system is structured one in a plurality of stories by arranging stacker cranes S capable of travelling to convey and transfer cassettes K to a predetermined position inside of stockers arranged along the conveyance line and respectively comprising a storage/delivery opening on the conveyance line side thereof, and arranging conveyors C for temporarily storing the cassettes K. A story-to-story conveying lifter 4 capable of conveying cassettes between different stories is arranged separately from the stacker crane S between the storage line L1 and the delivery line L0 for temporarily storage and line-conveyance of the cassettes K inside of the stocker. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a transport system between different tiers, and in particular, an inter-layer transport lifter that enables transport between different tiers is provided between a warehousing line and a delivery line in a stocker, and this can be transported between different tiers. Thus, the present invention relates to a transport system between different levels, which does not hinder the work by the stacker crane and can perform the transport between levels quickly and efficiently.

Conventionally, in a manufacturing plant for liquid crystal substrates and semiconductors, liquid crystal substrates and semiconductors are used by using an automatic guided vehicle that travels along the transfer line to a plurality of manufacturing apparatuses arranged along a looped transfer line. A conveyed product (hereinafter referred to as a “cassette”) such as a cassette containing parts is conveyed. In addition, a stocker is provided separately from the manufacturing apparatus in the transport line as necessary, and thereby the transport cassette is temporarily stored as needed until it is supplied to the manufacturing apparatus, and the cassette required in the manufacturing apparatus. Is supplied from the stocker.
The automatic guided vehicle is not particularly limited, and for example, an OHV (tracked ceiling transport vehicle) that runs on the ceiling of a factory is used.
Further, the stocker disposed along the transport line is not particularly limited. For example, the stocker is provided with a loading / unloading port on the transport line side, and is disposed so as to be able to run in the stocker. A stacker crane for transporting and transferring to the storage, a storage shelf for temporarily storing the cassette, a transport conveyor, and the like are arranged.

In addition, in manufacturing factories such as liquid crystal substrates and semiconductors, in order to improve manufacturing efficiency even in narrow factories, manufacturing factories and stockers are arranged in each level with manufacturing factories as multiple levels, and cassettes are not limited to the same level. In addition, transport is performed between different levels, for example, between an upper level and a lower level.
However, in the case of cassette conveyance between different levels, it is conveyed using a stacker crane arranged in the stocker, or using an inter-level conveyance device such as a lifter arranged at a specific location on the conveyance line. Is going.

  Therefore, when carrying in / out of cassettes between different levels using a stacker crane between the transfer line and the stocker, the other work of the stacker crane is interrupted during this time, especially the number of storage boards in the cassette When the number of treatments is about the same as that of the existing equipment, there is a problem that the conveyance capacity is lowered.

  In addition, when using an inter-level transfer device such as a lifter disposed at a specific location on the transfer line, the transfer line of the in-process transfer facility that transfers the cassette containing the liquid crystal substrate due to the upsizing of the liquid crystal substrate as in recent years. When the length is increased, the time for transporting the cassette to the inter-layer transport device (inter-layer transport lifter) arranged at a fixed position is increased, and there is a problem that the transport capability between the layers is lowered.

  In view of the problems of the transport system between different hierarchies, the present invention provides an inter-layer transport lifter that enables transport between different tiers between the warehousing line and the unloading line in the stocker and separately from the stacker crane. It is an object of the present invention to provide a transport system between different tiers that can be efficiently transported between tiers without causing any trouble to the work by the stacker crane.

  In order to achieve the above object, the inter-process transport system of another hierarchy according to the present invention is a stocker provided along a transport line and provided with a loading / unloading port on the transport line side. In an inter-process transport system in which a stacker crane capable of traveling so as to perform transport and transfer and a transport conveyor for temporarily storing the cassette are arranged to have the same structure in a plurality of layers, the cassette is stored in the stocker. It is characterized in that an inter-layer transfer lifter that enables cassette transfer between different tiers is provided between the warehousing line and the evacuation line for temporary storage and line transportation. .

  In this case, the inter-level transfer lifter can be disposed between the warehousing line and the warehousing line, and at a position where the lifter entry port of the warehousing line and the lifter exit port of the evacuation line face each other.

  Further, the transfer lift between layers can be configured to have a transfer function.

  Moreover, the transfer machine which delivers the conveyance vehicle by the side of a conveyance line and a cassette can be arrange | positioned and comprised at the entrance / exit of a warehousing line and a warehousing line.

  Moreover, a warehousing line and a warehousing line can be comprised from the conveyance conveyor which consists of a cassette mounting base and a cassette transfer trolley | bogie.

  According to the transport system between different hierarchies of the present invention, the cassette is transported and transferred to a predetermined location in the stocker by being arranged along the transport line and having a loading / unloading port on the transport line side. In an inter-process transport system in which a stacker crane that can be run as it is and a transport conveyor for temporarily storing the cassette are arranged to have the same configuration in a plurality of layers, the cassette is temporarily stored and lined in the stocker. Inter-level transfer lifter that enables cassette transfer between different levels between the input and output lines for transfer and separate from the stacker cranes, hinders work by the stacker crane. And transport between tiers can be performed quickly and efficiently.

  In addition, the inter-level transfer lifter is disposed between the warehousing line and the warehousing line and at a position where the lifter entrance of the warehousing line and the lifter exit of the evacuation line face each other. It is possible to smoothly and reliably transfer the warehousing line and the warehousing line at different levels simply by moving up and down.

  Further, by configuring the transfer lift between layers so as to have a transfer function, transfer can be performed smoothly without using another transfer machine.

  In addition, the transfer line side and the loading / unloading line side are configured by disposing a transfer machine for transferring the transfer vehicle and cassette on the transfer line side at the loading / unloading port of the loading line and the unloading line. Can be done reliably.

  In addition, by configuring the warehousing line and the warehousing line from a conveyance conveyor composed of a cassette placing table and a cassette transfer carriage, not only cassette conveyance but also a plurality of cassettes can be temporarily stored using this line. .

  DESCRIPTION OF EMBODIMENTS Hereinafter, an embodiment of a transport system between different hierarchies of the present invention will be described based on the drawings.

1 to 3 show an embodiment of the transport system between different hierarchies of the present invention.
The inter-process transport system of another hierarchy according to the present invention includes one or a plurality of stockers along the transport lines R1 and R2 that are looped for the forward path and the return path that travel around the unmanned transport vehicle V. In the stocker, the incoming line LI and the outgoing line LO are paired, and at least one pair (two pairs in the illustrated embodiment is not particularly limited) is arranged in parallel with each other. A stacker crane S that travels along the line between the pair of warehousing lines LI and the warehousing line LO is disposed, and one pair of the warehousing lines LI and the other lining line adjacent thereto are arranged. An inter-level transfer lifter 4 is disposed between the pair of delivery lines LO.
In addition, although the full length of these warehousing line LI and shipping line LO is made to be equal in the illustrated embodiment, this is not particularly limited, and each length is as required. Can be set.

  A line entry port La and a delivery port Lb are arranged at positions in contact with the delivery line R2 of the entry line LI and the delivery line LO, and the carriage travels along the delivery line R2 at the entry port La and the delivery port Lb. The transfer machine 1 for transferring the cassette K between the vehicle V side and the warehousing line LI or the warehousing line LO side is respectively arranged.

In addition, the warehousing line LI and the warehousing line LO are configured by arranging the transfer machine 1 at the end and the transport conveyor C so as to be adjacent to the transfer machine 1.
The conveyor C includes a plurality of cassettes K, for example, three cassettes K in the embodiment shown in FIG. 1 and four cassettes K in the embodiment shown in FIG. The cassette transfer carriage 3 is configured to move along the longitudinal direction of the cassette table at a position 2 below. In addition, the full length of this cassette mounting base 2 is not limited.

  The cassette mounting table 2 is not particularly limited. For example, as shown in the figure, two cassette mounting bars may be arranged in parallel, and a plurality of cassettes K may be placed on the cassette mounting bar. Alternatively, four pillars capable of supporting the bottom four corners of the cassette K can be established and adjacently arranged according to the number of cassettes on which the pillars are placed. At least one cassette transfer carriage 3 arranged to run along the cassette table 2 is provided. Each cassette transfer carriage 3 is provided with an elevator 31, and the cassette is transferred by raising the elevator 31. After being lifted slightly from the mounting bar, it is supported by the cassette transfer carriage 3 and moved in this state to a predetermined position, and then the elevator 31 is lowered to mount the cassette on the cassette mounting table 2. To place. By repeating this operation, the cassette is moved on the cassette table 2 by tact feed.

  In addition, the cassette transfer carriage 3 is not particularly limited. For example, the cassette transfer carriage 3 can stand by in a state where the lifting platform 31 is lowered at any position on the entry line LI or the exit line LO. As in the embodiment, a cassette transfer carriage standby zone can be formed adjacent to the cassette table 2 of the incoming line LI or the outgoing line LO.

  Further, the inter-level transfer lifter 4 is disposed between the parallel warehousing line LI and the warehousing line LO. In this case, the lifter warehousing port Lc disposed on the warehousing line LI and the lifter unloading disposed on the warehousing line LO are arranged. The mouth Ld is confronted and matched so that it is the same whether it is the same hierarchy or a different hierarchy. Thereby, the lifter entrance Lc and the lifter exit Ld at different levels face each other and are mounted on the interlevel transport lifter 4 simply by moving the cassette up and down with the interlevel transport lifter 4 and moving between cassettes. Smooth transfer can be performed by the cassette transfer device 41.

  In this way, the warehousing line LI and the warehousing line LO formed with the warehousing port on the transport line R2 side, and the stacker crane S that is configured to travel along the warehousing line LI and the warehousing line LO, and a different pair of warehousing lines LI. One level of stocker is configured by the inter-level transfer lifter 4 arranged between the delivery line LO and the delivery line LO. However, when a plurality of levels are arranged in the stocker, this arrangement may be applied to either the upper level or the lower level. In addition to the same arrangement, an inter-layer transport lifter 4 is disposed so as to be inserted from the lower layer to the upper layer, thereby enabling transport between the upper layer and the lower layer of the cassette K.

Next, the operation of the transport system between different hierarchies of the present invention will be described.
When the cassette K is stored or received at the same level, the transport vehicle V is stopped at the position of the storage port La of the storage line LI of the paired storage lines, and the cassette K transported by the transport vehicle V is stopped. It is received by the transfer machine 1 disposed at the warehousing port La of the warehousing line LI, is placed on the cassette stage 2 of the conveyor C adjacent to this, and the cassette stage 2 is placed on the cassette stage 2 as necessary. Further, the cassette K on the cassette table 2 is transferred onto the cassette table 2 on the output line LO side by the stacker crane S, and the cassette K is transferred to the output line LO as necessary. The plurality of cassettes K are stored by moving on the cassette table 2.

  In order to unload the cassette K, the cassette K is sequentially moved on the cassette table 2 in the direction opposite to the time of loading by the cassette transfer carriage 3 on the unloading line LO side, and the transfer machine 1 is moved from the unloading port Lb of the unloading line LO. To transfer to the transport vehicle V.

  When transferring between lower tiers to upper tiers and from upper tiers to lower tiers, the predetermined cassette K in the warehousing line LI was moved to the lifter warehousing port Lc of the line using the cassette transfer carriage 3 After that, it is transferred to the transfer lift 4 between layers in the same layer. This is performed by using a cassette transfer device 41 mounted on the inter-level transfer lifter 4.

After the predetermined cassette K is transferred to the inter-level transfer lifter 4, the inter-level transfer lifter 4 is lifted or lowered to move up and down to the predetermined level, and then transferred using the cassette transfer device 41. The cassette mounted on the cassette transfer device 41 is paid out to the lifter exit Ld in the exit line LO at a predetermined level. At this time, the cassette is placed on the cassette table at the lifter outlet Ld, and the cassette transfer carriage 3 is moved to be placed on the predetermined cassette table 2, thus carrying the cassettes between the layers. .
In addition, when the cassette K being transported by the transport vehicle on the transport line is directly transported from a specified level to a different level, it is received by the transfer machine 1 from the position a of the transport conveyor C shown in FIG. After transferring to the transfer lift 4 between the levels using the transfer conveyor C at the level, transfer to a different level with the transfer lift 4 between the levels and then transferring to the exit side on the transfer conveyor C at the different level. Then, it is transferred from the position b to the transport vehicle side.
In the embodiment described above, the tracked overhead transport vehicle (OHV) traveling on the ceiling of the factory is used as the transport vehicle V, but the tracked ground traveling on the floor of the factory is used instead of the OHV. It is also possible to employ a transport vehicle (RGV).

  As mentioned above, although the transport system between different hierarchy process of this invention was demonstrated based on the Example, this invention is not limited to the structure described in the said Example, The structure suitably in the range which does not deviate from the meaning. Can be changed.

  Since the transport system between different levels of the present invention has the characteristic that the work by the stacker crane is not hindered and the transport between levels can be performed efficiently, a liquid crystal substrate having a plurality of levels, In addition to being suitable for use in the production of semiconductors and the like, it can also be used in, for example, automatic warehouse applications.

It is a top view which shows one Example of the conveyance system between different hierarchy processes of this invention. It is a top view of a conveyance conveyor. It is a side view of a transfer trolley.

Explanation of symbols

C Conveyor K Cassette LI Incoming Line LO Outlet Line R1 Conveying Line R2 Conveying Line V Conveyor Vehicle S Stacker Crane La Inlet Lb Outlet Lc Lifter Inlet Ld Lifter Outlet 1 Transfer Machine 2 Cassette Placement 3 Cassette Transfer Cart 31 Lift Stand 4 Lifter for transport between layers 41 Cassette transfer device

Claims (5)

  A stacker crane disposed along the transport line and having a loading / unloading port on the transport line side, and capable of traveling so as to transport and transfer the cassette to a predetermined location in the stocker, and the cassette In the inter-process transport system in which a plurality of hierarchies are arranged in the same configuration by arranging a transport conveyor for temporarily storing, between the warehousing line and the unloading line for performing temporary storage of the cassette and line transportation in the stocker, In addition, a transport system between different hierarchies, which is configured by arranging a lifter for transport between layers which enables cassette transport between different layers separately from the stacker crane.   The lifter for inter-layer transportation is disposed between the warehousing line and the warehousing line, and at a position where the lifter entrance of the warehousing line and the lifter exit of the evacuation line face each other. Another hierarchical inter-process transfer system.   3. The inter-layer transport system according to claim 1 or 2, wherein the inter-layer transport lifter is configured to have a transfer function.   4. The separate hierarchy process according to claim 1, 2 or 3, wherein a transfer machine for transferring a transfer vehicle and a cassette on the transfer line side is disposed at an entrance / exit of the entry line and the exit line. Inter-transport system.   2. The inter-tier inter-process transport system according to claim 1, wherein the warehousing line and the warehousing line are constituted by a transport conveyor including a cassette mounting base and a cassette transfer carriage.

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