KR102611190B1 - Logistics system in manufacturing facility - Google Patents

Abstract

Embodiments of the present invention seek to provide a logistics system that can prevent congestion of transport trucks from occurring in specific sections of a manufacturing plant. The logistics system of a manufacturing plant according to the present invention includes a stocker facility located adjacent to the central passage and storing goods, and a rail that provides a travel path for a transport cart that transfers and loads goods to the stocker facility. The stocker facility includes a load port disposed on the opposite side of the central passage, and a rack providing a space for storing the article, and the rail includes a central rail formed along the central passage, and a branch from the central passage. and includes a branch rail formed along the periphery of the load port.

Description

Logistics system in manufacturing plant {LOGISTICS SYSTEM IN MANUFACTURING FACILITY}

The present invention relates to a logistics system in a manufacturing plant for efficient transport of goods.

The semiconductor or display manufacturing process is a process of manufacturing a final product through dozens to hundreds of processing steps on a substrate (wafer or glass), and can be performed by manufacturing equipment that performs the corresponding process for each process. When the process at a specific manufacturing facility is completed, the product (substrate) can be returned to the next manufacturing facility to proceed with the next process, and can be stored in a storage facility for a certain period of time.

As described above, the logistics system of a manufacturing plant refers to a system that transports or stores products for the manufacturing process, and can be largely divided into transport facilities that transport products and storage facilities that store products. In the logistics system, the overhead hoist transport (OHT) system, which runs along rails installed on the ceiling, is being applied to manufacturing plants.

Meanwhile, it has become important to quickly transport goods between manufacturing facilities in order to increase the production efficiency of manufacturing plants. In order to quickly return goods, it is necessary to increase the speed of the transport cart that transports the goods, as well as to efficiently configure the travel path along which the transport cart travels. In particular, when designing a driving route, it is necessary to eliminate sections where transport carts are congested.

Embodiments of the present invention seek to provide a logistics system that can prevent congestion of transport trucks from occurring in specific sections of a manufacturing plant.

The logistics system of a manufacturing plant according to the present invention includes a stocker facility located adjacent to the central passage and storing goods, and a rail that provides a travel path for a transport cart that transfers and loads goods to the stocker facility. The stocker facility includes a load port disposed on the opposite side of the central passage, and a rack providing a space for storing the article, and the rail includes a central rail formed along the central passage, and a branch from the central passage. and includes a branch rail formed along the periphery of the load port.

According to an embodiment of the present invention, the branch rail may be configured to branch from the central passage, form along the periphery of the load port, and join the central passage.

According to an embodiment of the present invention, the transport cart may travel from the central rail to the branch rail to transfer and load goods to the load port.

According to an embodiment of the present invention, the central rail may be composed of a plurality of tracks along the horizontal direction.

According to an embodiment of the present invention, the central rail and the branch rail may be configured as a multi-layer track along the vertical direction.

According to an embodiment of the present invention, the load port may be configured at the bottom of the lower layer track of a multi-layer branch rail.

The logistics system of a manufacturing plant according to another aspect of the present invention includes a plurality of stocker facilities arranged on both sides of a central passage, and a rail that provides a travel path for a transport truck that transfers and loads goods to the stocker facility. do. The stocker facility includes a load port disposed on the opposite side of the central passage, and a rack providing a space for storing the article, and the rail includes a central rail formed along the central passage, and a branch from the central passage. and includes a branch rail formed along the periphery of the load port.

According to an embodiment of the present invention, the branch rail may be configured to branch from the central passage, form along the periphery of the load port, and join the central passage.

According to an embodiment of the present invention, the transport cart may travel from the central rail to the branch rail to transfer and load goods to the load port.

According to an embodiment of the present invention, the central rail may be composed of a plurality of tracks along the horizontal direction.

According to an embodiment of the present invention, the central rail and the branch rail may be configured as a multi-layer track along the vertical direction.

According to an embodiment of the present invention, the load port may be configured at the bottom of the lower layer track of a multi-layer branch rail.

The logistics system of a manufacturing plant according to another aspect of the present invention includes a plurality of stocker facilities arranged on both sides of a central passage, a rail that provides a travel path for a transport truck that transfers and loads goods to the stocker facility, and and an interface module formed across the central passageway to transport the items between the stocker facilities. The stocker facility includes a load port disposed on the opposite side of the central passage, and a rack providing a space for storing the article, and the rail includes a central rail formed along the central passage, and a branch from the central passage. and includes a branch rail formed along the periphery of the load port. The interface module is configured to transfer the article inserted into the load port of the stocker facility to the opposite stocker facility.

According to an embodiment of the present invention, the branch rail may be configured to branch from the central passage, form along the periphery of the load port, and join the central passage.

According to an embodiment of the present invention, the transport cart may travel from the central rail to the branch rail to transfer and load goods to the load port.

According to an embodiment of the present invention, the central rail may be composed of a plurality of tracks along the horizontal direction.

According to an embodiment of the present invention, the interface module may include a pair of conveyors that transport the goods in opposite directions.

According to an embodiment of the present invention, the central rail and the branch rail may be configured as a multi-layer track along the vertical direction.

According to an embodiment of the present invention, the load port may be configured at the bottom of a lower layer track of the branch rail of a multi-layer branch rail.

According to an embodiment of the present invention, the interface module may be configured at the bottom of the lower layer line of the branch rail.

In the logistics system of the manufacturing plant according to the present invention, the load port of the stocker facility is located on the opposite side of the central passage and the branch rail branches off from the central rail to form along the periphery of the load port, thereby transferring goods from the center passage to the stocker facility. Congestion caused by the transport cart can be prevented.

1 shows a logistics system of a manufacturing plant to which the present invention can be applied.
Figure 2 is a diagram to explain the congestion that occurs in the process of transporting goods to the stocker facility.
3 and 4 show the configuration of a logistics system of a manufacturing plant according to one aspect of the present invention.
Figures 5 and 6 show the configuration of a logistics system of a manufacturing plant according to another aspect of the present invention.
Figures 7 and 8 show the configuration of a logistics system of a manufacturing plant according to another aspect of the present invention.
9-12 show embodiments for transporting articles through a central passageway.
Figure 13 shows a case of transporting goods between bays using a stocker facility.
Figure 14 shows a case where goods are transported between lines using a stocker facility.

Hereinafter, with reference to the attached drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily practice the present invention. The invention may be implemented in many different forms and is not limited to the embodiments described herein.

In order to clearly explain the present invention, parts that are not relevant to the description are omitted, and identical or similar components are assigned the same reference numerals throughout the specification.

Additionally, in various embodiments, components having the same configuration will be described using the same symbols only in the representative embodiment, and in other embodiments, only components that are different from the representative embodiment will be described.

Throughout the specification, when a part is said to be "connected (or combined)" with another part, this means not only "directly connected (or combined)" but also "indirectly connected (or combined)" with another member in between. Also includes “combined” ones. Additionally, when a part "includes" a certain component, this means that it may further include other components, rather than excluding other components, unless specifically stated to the contrary.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person of ordinary skill in the technical field to which the present invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related technology, and unless explicitly defined in the present application, should not be interpreted in an ideal or excessively formal sense. No.

Hereinafter, a logistics test system for efficient return of goods from a manufacturing plant according to the present invention will be described.

1 shows a logistics system of a manufacturing plant to which the present invention can be applied. Hereinafter, a semiconductor manufacturing plant manufacturing semiconductor products will be described as an example as a manufacturing plant to which the present invention is applied. However, the scope of manufacturing plants to which the present invention can be applied is not limited to a specific type and can be applied to manufacturing plants in various industries. For example, the product transport system of the present invention can be applied to other types of manufacturing plants that produce products such as display panels, electronic devices, automobiles, or secondary batteries.

The manufacturing plant 1 consists of one or more clean rooms, and manufacturing facilities 25 for performing a semiconductor manufacturing process may be installed in each clean room. In general, the final processed substrate can be completed by repeatedly performing a plurality of manufacturing processes on a substrate (e.g., a wafer). Once the manufacturing process is completed in a specific semiconductor manufacturing facility 25, a manufacturing facility for the next manufacturing process ( 25) The substrate is transported. Here, the wafer may be transported while stored in a transport container (eg, front opening unified pod, FOUP) that can accommodate a plurality of substrates. The transfer container containing the wafers may be transferred by the transfer cart 300. The transport cart 300 may be referred to as an overhead hoist transport (OHT) that runs along a rail 200 installed on the ceiling.

Referring to FIG. 1, a manufacturing facility 25 is installed to perform a process within a manufacturing plant 1, and a transport cart 300 and a traveling path of the transport cart 300 transport goods between the manufacturing facilities 25. A rail 200 that provides is provided. Here, when the transport truck 300 transports goods between manufacturing facilities 25, the goods may be directly transferred from a specific manufacturing facility 25 to another manufacturing facility 25, or the goods may be transferred to the stocker facility 100. ) and then returned to another manufacturing facility. In Figure 1, based on the central passage 10, the upward direction (Y direction) may be referred to as the north direction, the downward direction (-Y direction) may be referred to as the south direction, and the left direction (-X direction) corresponding to the north-south direction. may be referred to as the west direction, and the right direction (X direction) may be referred to as the east direction.

Meanwhile, referring to FIG. 1, a rail 200 forming a circulation path is installed along the central passage 10, and rails 200 branching from the central passage 10 again form a circulation path. One bay 20 is formed by arranging manufacturing facilities 25 along the circumference of the circulation path of the branched rail 200. That is, a central passage 10 is formed in the center of the manufacturing plant 1, and a plurality of bays 20 are formed around the central passage 10. Here, semiconductor manufacturing facilities 25 for performing the same or similar semiconductor processing processes may be arranged in each bay 20 or a set of adjacent bays 20. For example, an etch process facility is installed in the bay 20 located in the northwest, an exposure process facility is installed in a bay 20 located in the northeast, a deposition process facility is installed in a bay 20 located in the southwest, and an oxide film process facility is installed in the bay 20 located in the southeast. Equipment can be placed.

Meanwhile, a stocker facility 100 for storing goods may be placed around the central passage 10. The stocker facility 100 is a warehouse that stores goods, and is set to store containers containing wafers whose processes have been completed in a specific manufacturing facility 25 before they are transferred to another manufacturing facility 25. The stocker facility 100 largely includes a load port 110 where goods are loaded and a rack 120 that provides a space for storing goods. The load port 110 receives items from the transport cart 300 located at the top or discharges items to be picked up by the transport cart 300. The rack 120 is composed of a plurality of shelves that store items received at the load port 110. They are arranged in vertical and horizontal directions in the internal space of the rack 120, and a crane or robot for transporting goods therein may be provided inside the rack 120.

Meanwhile, the stocker facility 100 is generally disposed around the central passage 10, and the transport truck 300 stops around the stocker facility 100 to transfer and load goods into the stocker facility 100. Goods are loaded into the load port 110 or goods are unloaded from the load port 110 . At this time, as shown in FIG. 2, congestion may occur in the area A around the stocker facility 100 due to the stop of the transport cart 300. Referring to FIG. 2, when the transfer truck 300A is stopped to transfer and load goods to the stocker facility 100, the transfer truck 300B located at the rear of the transfer truck 300A transfers the goods of the return truck 300A. You must wait until the review is complete. Meanwhile, many transport carts 300A run in the central passage 10. The transport carts 300A moving from a specific bay 20 to another bay 20 run on the rails 200 around the central passage 10. It must come through. In particular, the transfer cart 300 moving from the south bay 20 to the north bay 20 must move through the rail 200 around the central passage 10. In other words, many transport carts 300 must run on the rail 200 around the central passage 10, but because the transport cart 300 stops to transfer and load goods to the stocker facility 100, the central passage ( Congestion occurs on the rail 200 of 10).

If congestion occurs on the rail 200 of the central passage 10, the overall logistics flow may be delayed, which may cause a decrease in production efficiency of the manufacturing plant 1. Accordingly, an embodiment of the present invention provides a logistics system that can prevent congestion on the rail 200 of the central passage 10. Additionally, an embodiment of the present invention provides a logistics system that can smoothly transfer goods between the South and North sides based on the central passage 10.

The logistics system of the manufacturing plant (1) according to one aspect of the present invention includes a stocker facility (100) located adjacent to the central passage (10) and storing goods, and a transport system for transferring and loading goods to the stocker facility (100). It includes a rail 200 that provides a travel path for the bogie 300. The stocker facility 100 includes a load port 110 disposed on the opposite side of the central passage 10 and a rack 120 that provides a space for storing articles. The rail 200 includes a central rail 210 formed along the central passage 10, and a branch rail 220 branched from the central passage 10 and formed along the periphery of the load port 110.

Referring to FIG. 3, the load port 110 of the stocker facility 100 is not located around the central passage 10, but is located on the opposite side of the central passage 10. A central rail 210 is formed around the central passage 10, and a branch rail 220 branched from the central rail 210 extends to the opposite side of the central passage 10 to load port 110 of the stocker facility 100. ) and is configured to join the central passage 10 again.

As shown in FIG. 3, the transport cart 300A, which transfers and loads goods to the stocker facility 100, travels from the central rail 210 to the branch rail 220 and stops around the load port 110, Items can be loaded or unloaded using the load port 110. Accordingly, the transfer cart 300B running through the central passage 10 can run without being blocked by the conveyance truck 300A, which transfers and loads goods to the stocker facility 100, and avoids congestion around the central passage 10. can be prevented from occurring.

According to an embodiment of the present invention, the central rail 210 is composed of a plurality of tracks along the horizontal direction (Y direction). Referring to FIGS. 3 and 4 , the central rail 210 may be composed of tracks arranged in parallel around the central passage 10. By configuring a plurality of tracks around the central passage 10, where there is a lot of traffic for the transport bogie 300, even if congestion occurs on one track, the transport cart 300 can be driven through an additional track. 3 and 4, by configuring a plurality of tracks along the horizontal direction (Y direction), congestion in the central passage 10 is prevented and rapid conveyance of goods is possible.

According to an embodiment of the present invention, the central rail 210 and the branch rail 220 are composed of a multi-layer track along the vertical direction (Z direction). Referring to FIG. 4, the central rail 210 and the branch rail 220 may be composed of tracks arranged in parallel along the vertical direction (Z direction) around the central passage 10. That is, the central rail 210 and the branch rail 220 may be composed of multiple layers. By configuring the central rail 210 and the branch rail 220 with a plurality of tracks not only in the horizontal direction (Y direction) but also in the vertical direction (Z direction), even if congestion occurs on one track, the conveyance cart 300 is transported through an additional track. ) can be driven. By configuring a plurality of tracks along the horizontal direction (Y direction) as shown in FIG. 4, congestion in the central passage 10 is prevented and rapid transport of goods is possible.

According to an embodiment of the present invention, the load port 110 may be configured at the bottom of the lower layer line in the branch rail 220 composed of multiple layers. As shown in FIG. 4, the load port 110 is located at the bottom of the lower layer line of the branch rail 220. The transport truck 300A, which wishes to transfer or load goods to the load port 110, may enter the branch rail 220 of the lower layer track, stop around the load port 110, and then load or unload the goods. Meanwhile, the load port 110 may be located at a lower level of the branch rail 220 of the upper floor, and the transport cart 300 running on the branch rail 220 of the upper floor transfers goods to the load port 110 of the upper floor. It can be transferred.

Meanwhile, in the logistics system of a manufacturing plant according to another aspect of the present invention, stocker facilities 100 are arranged on both sides of the central passage 10, and each stocker facility 100 has a load port 110 on the opposite side of the central passage 10. ) can be located respectively.

The logistics system of the manufacturing plant (1) according to another aspect of the present invention includes a plurality of stocker facilities (100) arranged on both sides of the central passage (10) and transferring and loading goods into the stocker facilities (100). It includes a rail 200 that provides a travel path for the transport cart 300. The stocker facility 100 includes a load port 110 disposed on the opposite side of the central passage 10 and a rack 120 that provides a space for storing articles. The rail 200 includes a central rail 210 formed along the central passage 10, and a branch rail 220 branched from the central passage 10 and formed along the periphery of the load port 110.

Referring to FIG. 5, the load ports 110 of the stocker equipment 100 arranged on both sides around the central passage 10 are not disposed toward the central passage 10, but on the opposite side of the central passage 10. are placed respectively. A central rail 210 is formed around the central passage 10, and a branch rail 220 branched from the central rail 210 extends to the opposite side of the central passage 10 to load port 110 of the stocker facility 100. ) and is configured to join the central passage 10 again.

As shown in FIG. 5, the transport cart 300A, which transfers and loads goods to the stocker facility 100, travels from the central rail 210 to the branch rail 220 and stops around the load port 110, Items can be loaded or unloaded using the load port 110. Accordingly, the transfer cart 300B running through the central passage 10 can run without being blocked by the conveyance truck 300A, which transfers and loads goods to the stocker facility 100, and avoids congestion around the central passage 10. can be prevented from occurring.

According to an embodiment of the present invention, the central rail 210 is composed of a plurality of tracks along the horizontal direction (Y direction). Referring to Figures 5 and 6, the central rail 210 may be composed of tracks arranged in parallel around the central passage 10. By configuring a plurality of tracks around the central passage 10, where there is a lot of traffic for the transport bogie 300, even if congestion occurs on one track, the transport cart 300 can be driven through an additional track. By configuring a plurality of tracks along the horizontal direction (Y direction) as shown in FIGS. 5 and 6, congestion in the central passage 10 is prevented and rapid transport of goods is possible.

According to an embodiment of the present invention, the central rail 210 and the branch rail 220 are composed of a multi-layer track along the vertical direction (Z direction). Referring to FIG. 6, the central rail 210 and the branch rail 220 may be composed of tracks arranged in parallel along the vertical direction (Z direction) around the central passage 10. That is, the central rail 210 and the branch rail 220 may be composed of multiple layers. By configuring the central rail 210 and the branch rail 220 with a plurality of tracks not only in the horizontal direction (Y direction) but also in the vertical direction (Z direction), even if congestion occurs on one track, the conveyance cart 300 is transported through an additional track. ) can be driven. By configuring a plurality of tracks along the horizontal direction (Y direction) as shown in FIG. 6, congestion in the central passage 10 is prevented and rapid transport of goods is possible.

According to an embodiment of the present invention, the load port 110 may be configured at the bottom of the lower layer line in the branch rail 220 composed of multiple layers. As shown in FIG. 6, the load port 110 is located at the bottom of the lower layer line of the branch rail 220. The transport truck 300A, which wishes to transfer or load goods to the load port 110, may enter the branch rail 220 of the lower layer track, stop around the load port 110, and then load or unload the goods. Meanwhile, the load port 110 may be located at a lower level of the branch rail 220 of the upper floor, and the transport cart 300 running on the branch rail 220 of the upper floor transfers goods to the load port 110 of the upper floor. It can be transferred.

Meanwhile, in the logistics system of a manufacturing plant according to another aspect of the present invention, stocker facilities 100 are disposed on both sides of the central passage 10 and an interface module 250 for transporting goods between the stocker facilities 100 on both sides is provided. It can be configured. Goods can be directly transferred through the interface module 250 in the north-south direction (Y direction).

The logistics system of the manufacturing plant (1) according to another aspect of the present invention includes a plurality of stocker facilities (100) arranged on both sides of the central passage (10) and transferring and loading goods into the stocker facilities (100). It includes a rail 200 that provides a travel path for the transport cart 300, and an interface module 250 formed across the central passage 10 to transport goods between the stocker facilities 100. The stocker facility 100 includes a load port 110 disposed on the opposite side of the central passage 10 and a rack 120 that provides a space for storing articles. The rail 200 includes a central rail 210 formed along the central passage 10, and a branch rail 220 branched from the central passage 10 and formed along the periphery of the load port 110. The interface module 250 is configured to transfer the article inserted into the load port 110 of the stocker facility 100 to the stocker facility 100 on the opposite side.

According to an embodiment of the present invention, when transferring goods from the bay 20 in the south to the bay 20 in the north (or when transferring in the opposite direction), after unloading the goods in the stocker facility 100 in the north Through the interface module 250, the goods can be delivered to the stocker facility 100 in the south, and the transport truck 300 located around the stocker facility 100 in the south can pick up and transport the goods. In this case, since there is no need for the transport cart 300 to travel in circulation around the rail 200 around the central passage 10, the number of transport carts 300 traveling around the central passage 10 can be reduced. . By reducing the number of transport carts 300 running around the central passage 10, congestion in the central passage 10 can be prevented.

Referring to FIG. 7, the load ports 110 of the stocker equipment 100 arranged on both sides around the central passage 10 are not disposed toward the central passage 10, but on the opposite side of the central passage 10. are placed respectively. A central rail 210 is formed around the central passage 10, and a branch rail 220 branched from the central rail 210 extends to the opposite side of the central passage 10 to load port 110 of the stocker facility 100. ) and is configured to join the central passage 10 again. The interface module 250 is configured to transfer goods between the northern stocker facility 100 and the southern stocker facility 100.

As shown in FIG. 7, the transport cart 300A, which transfers and loads goods to the stocker facility 100, travels from the central rail 210 to the branch rail 220 and stops around the load port 110, Items can be loaded or unloaded using the load port 110. Accordingly, the transfer cart 300B running through the central passage 10 can run without being blocked by the conveyance truck 300A, which transfers and loads goods to the stocker facility 100, and avoids congestion around the central passage 10. can be prevented from occurring.

According to an embodiment of the present invention, the central rail 210 is composed of a plurality of tracks along the horizontal direction (Y direction). Referring to FIGS. 7 and 8 , the central rail 210 may be composed of tracks arranged in parallel around the central passage 10. By configuring a plurality of tracks around the central passage 10, where there is a lot of traffic for the transport bogie 300, even if congestion occurs on one track, the transport cart 300 can be driven through an additional track. By configuring a plurality of tracks along the horizontal direction (Y direction) as shown in FIGS. 7 and 8, congestion in the central passage 10 is prevented and rapid transport of goods is possible.

According to an embodiment of the present invention, the interface module 250 may include a pair of conveyors that transport goods in opposite directions. That is, a pair of conveyors configured to transport goods in opposite directions may be coupled to the stocker facility 100 located on opposite sides of the central passage 10. The interface module 250 is connected to the load port 110 of each stocker facility 100 and can transfer goods to the stocker facility 100 on the opposite side. The form of the conveyor that can be applied as the interface module 250 of the present invention is not limited, and the interface module 250 can be implemented in the form of a saddle that individually receives and moves items as well as a conveyor.

According to an embodiment of the present invention, the central rail 210 and the branch rail 220 are composed of a multi-layer track along the vertical direction (Z direction). Referring to FIG. 8, the central rail 210 and the branch rail 220 may be composed of tracks arranged in parallel along the vertical direction (Z direction) around the central passage 10. That is, the central rail 210 and the branch rail 220 may be composed of multiple layers. By configuring the central rail 210 and the branch rail 220 with a plurality of tracks not only in the horizontal direction (Y direction) but also in the vertical direction (Z direction), even if congestion occurs on one track, the conveyance cart 300 is transported through an additional track. ) can be driven. By configuring a plurality of tracks along the horizontal direction (Y direction) as shown in FIG. 8, congestion in the central passage 10 is prevented and rapid transport of goods is possible.

According to an embodiment of the present invention, the load port 110 may be configured at the bottom of the lower layer line in the branch rail 220 composed of multiple layers. As shown in FIG. 8, the load port 110 is located at the bottom of the lower layer line of the branch rail 220. The transport truck 300A, which wishes to transfer or load goods to the load port 110, may enter the branch rail 220 of the lower layer track, stop around the load port 110, and then load or unload the goods. Meanwhile, the load port 110 may be located at a lower level of the branch rail 220 of the upper floor, and the transport cart 300 running on the branch rail 220 of the upper floor transfers goods to the load port 110 of the upper floor. It can be transferred.

According to an embodiment of the present invention, the interface module 250 may be configured below the lower layer line of the branch rail 220. As shown in FIG. 8, the interface module 250 is installed at the same or similar height as the load port 110 and can transfer the article loaded on the load port 110 to the stocker facility 100 on the opposite side. Meanwhile, the interface module 250 is located at a lower level of the upper layer rail 220 and can transfer goods delivered from the transport cart 300 running on the upper layer rail to the stocker facility 100 on the opposite side.

Meanwhile, the scope of the present invention is not only the conveyor 250 of the type shown in FIG. 8, but also various embodiments for transporting goods through the central passage 10 can be applied to the present invention.

9-12 show embodiments for transporting articles through the central passageway 10.

As shown in FIG. 9, the circular conveyor 400 may be configured to circulate the stocker facility 100 with the central passage 10 in between. The circular conveyor 400 is connected to the load ports 110 of the stocker facilities 100 across the central passage 10 and allows goods to be transferred to the stocker facility 100 on the opposite side. The article seated in the load port 110 of the stocker facility 100 moves clockwise or counterclockwise along the circular conveyor 400 and is delivered to the opposite stocker facility 100. You can.

In addition, as shown in FIG. 10, goods can be transported using a mobile robot 500 that moves back and forth between the stocker facilities 100 across the central passage 10. Referring to FIG. 10 , the mobile robot 500 can travel along a path on the ground 50 and can be equipped with a mechanism for transferring and loading goods. The mobile robot 500 is configured to pass through the central passage 10 and move back and forth between the stocker facilities 100, and can transfer goods from the stocker facility 100 on one side to the stocker facility 100 on the opposite side.

Meanwhile, as shown in FIG. 11, goods can be transferred between the stocker facilities 100 through the central passage 10 using a crane 600 installed on the ceiling 60. The crane 600 is configured to move along a path installed on the ceiling 60, and the pickup mechanism 610 coupled to the crane 600 picks up the article seated in the load port 110 of the stocker facility 100 and Goods can be transferred to the load port 110 of the stocker facility 100 located on the opposite side.

In addition, as shown in FIG. 12, goods can be transported along the underground path 70 formed between the stocker facilities 100 with the central passage 10 in between. Referring to FIG. 12, the lifting mechanism 700 is connected to the load port 110 of the stocker facility 100, and the article (F) seated in the load port 110 is lowered by the lifting mechanism 700 and lowers itself. It is possible to move to the stocker facility 100 on the opposite side along the path 70. The underground path 70 may be implemented by conveyors or saddles provided underground.

Meanwhile, the scope of the present invention is to transfer goods from one bay to another bay using the interface conveyance path of the stocker facility 100, or to transfer goods from a specific production line in the manufacturing plant 1 to another production line partitioned by a wall. It can be transported.

As shown in FIG. 13, goods are transferred through the interface module 250 connected between the stocker facility 100 located in the first bay (BAY1) and the stocker facility 100 located in the second bay (BAY2). You can.

In addition, in order to transfer goods between the first production line (LINE1) and the second production line (LINE2) partitioned by the wall 5 as shown in FIG. 14, a product located in the first production line (LINE1) An interface module 250 may be configured between the stocker facility 100 and the stocker facility 100 located on the second production line (LINE2). Goods can be moved between the first production line (LINE1) and the second production line (LINE2) through the interface module 250 provided between the stocker equipment 100.

Meanwhile, the scope of the present invention can be applied not only to the load port 110 of the stocker facility 100 but also to the case of transferring goods using the load port of other facilities.

This embodiment and the drawings attached to this specification only clearly show a part of the technical idea included in the present invention, and those skilled in the art can easily infer within the scope of the technical idea included in the specification and drawings of the present invention. It will be apparent that all possible modifications and specific embodiments are included in the scope of the present invention.

Therefore, the spirit of the present invention should not be limited to the described embodiments, and the scope of the patent claims described below as well as all things that are equivalent or equivalent to the scope of the claims will be said to fall within the scope of the spirit of the present invention. .

1: Manufacturing factory
10: Central aisle
20: Bay
25: Manufacturing equipment
100: Stalker equipment
110: load port
120: rack
200: rail
210: central rail
220: branch rail
250: interface module
300: Return truck

Claims (20)

In the logistics system of a manufacturing plant consisting of a central passage at the center and a plurality of bays with semiconductor manufacturing facilities arranged around the central passage,
a stocker facility located adjacent to the central passage and storing goods;
a first rail that provides a travel path for a transport cart that transfers and loads goods to the stocker facility and forms a circulation path along the central passage; and
a second rail branching from the central passage to form a circulation path of the bay;
The stoker equipment is,
a load port disposed on the opposite side of the central passage; and
Includes a rack that provides a space for storing the items,
The first rail is,
a central rail formed along the central passage; and
A distribution system in a manufacturing plant, comprising a branch rail configured to branch from the central rail, extend parallel to the central rail along the periphery of the load port on the opposite side of the central passage, and rejoin the central rail.
delete According to paragraph 1,
The transport cart travels from the central rail to the branch rail to transfer and load goods to the load port.
According to paragraph 1,
The central rail is comprised of a plurality of tracks along a horizontal direction. A logistics system for a manufacturing plant.
According to paragraph 1,
The distribution system of a manufacturing plant, wherein the central rail and the branch rail are composed of a double-layer track along a vertical direction.
According to clause 5,
The load port is a logistics system in a manufacturing plant, wherein the load port is configured at the bottom of a lower layer track of a double-layered branch rail.
In the logistics system of a manufacturing plant consisting of a central passage at the center and a plurality of bays with semiconductor manufacturing facilities arranged around the central passage,
A plurality of stocker facilities arranged on both sides of the central passage;
a first rail that provides a travel path for a transport cart that transfers and loads goods to the stocker facility and forms a circulation path along the central passage; and
a second rail branching from the central passage to form a circulation path of the bay;
The stoker equipment is,
a load port disposed on the opposite side of the central passage; and
Includes a rack that provides a space for storing the items,
The rail is,
a central rail formed along the central passage; and
A distribution system in a manufacturing plant, comprising a branch rail configured to branch from the central rail, extend parallel to the central rail along the periphery of the load port on the opposite side of the central passage, and rejoin the central rail.
delete In clause 7,
The transport cart travels from the central rail to the branch rail to transfer and load goods to the load port.
In clause 7,
The central rail is comprised of a plurality of tracks along a horizontal direction. A logistics system for a manufacturing plant.
In clause 7,
The distribution system of a manufacturing plant, wherein the central rail and the branch rail are composed of a double-layer track along a vertical direction.
According to clause 11,
The load port is a logistics system in a manufacturing plant, wherein the load port is configured at the bottom of a lower layer track of a double-layered branch rail.
In the logistics system of a manufacturing plant consisting of a central passage at the center and a plurality of bays with semiconductor manufacturing facilities arranged around the central passage,
A plurality of stocker facilities arranged on both sides of the central passage;
a first rail that provides a travel path for a transport cart that transfers and loads goods to the stocker facility and forms a circulation path along the central passage; and
a second rail branching from the central passage to form a circulation path of the bay;
an interface module formed across the central passageway to transport the articles between the stocker facilities;
The stoker equipment is,
a load port disposed on the opposite side of the central passage; and
Includes a rack that provides a space for storing the items,
The rail is,
a central rail formed along the central passage; and
a branch rail configured to branch from the central rail and extend parallel to the central rail along the periphery of the load port on an opposite side of the central passage, and to join the central rail again;
The interface module is configured to transfer the article inserted into the load port of the stocker facility to the opposite stocker facility.
delete According to clause 13,
The transport cart travels from the central rail to the branch rail to transfer and load goods to the load port.
According to clause 13,
The central rail is comprised of a plurality of tracks along a horizontal direction. A logistics system for a manufacturing plant.
According to clause 13,
The interface module includes a pair of conveyors that transport the goods in opposite directions.
According to clause 13,
The distribution system of a manufacturing plant, wherein the central rail and the branch rail are composed of a double-layer track along a vertical direction.
According to clause 18,
The distribution system of a manufacturing plant, wherein the load port is configured at the lower part of a lower layer track of the branch rail of a double-layered branch rail.
According to clause 18,
The interface module is configured at the bottom of the lower layer track of the branch rail.