JP4154269B2 - Manufacturing equipment transfer system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a transport system for manufacturing equipment, and more particularly, to a transport system for manufacturing equipment for semiconductor products installed in a clean room.
[0002]
[Prior art]
Liquid crystal panels (especially thin film transistor substrates: TFT substrates) of many liquid crystal display devices and semiconductor product manufacturing facilities are composed of a device group having the same function or a larger device group in which a plurality of such device groups are combined. The production form using a job shop is adopted. It is common to manage a group of devices by arranging such a group of devices or a loader / unloader (a cassette station having a cassette loading / unloading port) provided in a group of small rooms partitioned by partitions or the like. Has been done. This small room is called a bay for the entire transport system.
[0003]
The most common configuration of the conventional production line is that a main passage for transporting between bays (processes) is arranged at the center, and one stocker is provided for each bay (process) around the main passage. This is a method for carrying in each bay from the stocker. In this case, the stocker functions as a buffer for transport within and between bays.
[0004]
A system in which bays are arranged on both sides with respect to the central inter-bay transport (main passage) is generally referred to as a double-sided bay system. The conveyance of the cassette to each bay is usually performed by mounting the cassette on a conveyance machine that moves in each loop in a certain direction. As a special case of the both-side bay system, a system in which bays are arranged only on one side with respect to the main passage for transporting between the central bays is referred to as a one-side bay system. If the length of the conveyance path between bays is equivalent to that of the double-sided bay system, the length of the bay is increased and the number of bays is decreased.
[0005]
In the configuration of the transfer line where the stocker connects the cassettes at the ceiling or under the floor between the processes and between the stockers and the end of the stocker, the cassette connection between the stocker and the ceiling transfer is from the conventional ceiling or under floor transfer. The unloading port was held in the stocker, and a conveyor was laid from the unloading port to the delivery port with the stocker crane and delivered to the stocker crane.
[0006]
However, in the above-described method, when the delivery load between the stocker, the ceiling transport, and the in-process transport increases, it is necessary to increase the number of stockers, and the number of stockers increases. As a method for avoiding this problem, a cell method has been proposed in which a plurality of cranes are run in one stocker (see, for example, Patent Document 1).
[0007]
Further, as a method for configuring a job shop type production line, a method called a through-bay type has been proposed (see, for example, Patent Document 2). In this system, the sub-transport path of the bay intersects the main path for transport between the central bays. This method has the advantage that the number of bays is small and the distance from the main transfer between processes to the back of the bay is short.
[0008]
[Patent Document 1]
JP-A-7-179293 [0009]
[Patent Document 2]
US Pat. No. 6,089,811
[Problems to be solved by the invention]
In the above-described method of running a plurality of cranes on one stocker, the load on the crane can be distributed, but the control method of the stocker crane is extremely complicated, and there is a problem that the cost of the control software increases and the maintenance man-hours increase. Furthermore, there is no denying the possibility that a control system runaway will lead to a major accident. And since the delivery of a cassette is also needed between two cranes, extra conveyance will generate | occur | produce.
[0011]
In addition, in the production line configuration in which the in-process conveyance carriage conveys in parallel with the stocker, when the stocker is engaged with the conveyance carriage on both sides, the carriage and the cassette can only be engaged with the carriage on one side, When dealing with a large number of devices, the travel length of the transport carriage increases, the average cycle time increases, and the number of devices that can be transported is limited. Therefore, the number of transport lines increases when the transport cart is a single track automatic transport cart (RGV), and the number of transport carts increases when it is a trackless transport cart (AGV) that can run multiple carts. There was a problem.
[0012]
Further, in the above-described through-bay method, the loop return path becomes a wasteful conveyance without the apparatus connection in the main passage for the conveyance between the central bays. Moreover, the difference in the size of the apparatus for each process becomes large, and the space efficiency decreases due to the unbalance for each bay. In order to avoid this, if the central stocker system with stockers arranged in two rows at the center is used, there is a problem that the length of the stocker becomes halfway and the required number of shelves cannot be secured.
[0013]
The present invention has been made in view of the above points, and by enabling both the stocker crane and the station lifter to engage with the ceiling transport mechanism, a manufacturing facility capable of reducing the number of stockers provided in the manufacturing facility. An object of the present invention is to provide a transfer system.
[0014]
[Means for Solving the Problems]
In order to solve the above-described problems, according to the present invention, a stocker that stores a transported object transported by an inter-process transport mechanism on a plurality of shelves arranged in a plurality of rows vertically, A first in-process transport mechanism that is movable in the stocker up and down and along the row of shelves for transporting the transported goods to each of them, and arranged to align and process the transported goods A second in-process transport mechanism for transporting a transported object to the apparatus, and a transfer mechanism provided between the inter-process transport mechanism and the stocker. The transfer system includes a horizontal transfer mechanism configured to be able to deliver a transferred object to and from the inter-process transfer mechanism, and a lifting mechanism that can transfer the transferred object up and down. The horizontal transfer mechanism is transported in the first process Transport system of the manufacturing facility, wherein the transfer of the transfer material between both structure and the lifting mechanism is configured to be provided.
[0015]
According to the above-described invention, the transported object can be directly transferred from the inter-process transport mechanism to the second in-process transport mechanism using the lifting mechanism. Therefore, it is possible to transfer a large amount of transported goods by the second in-process transport mechanism without increasing the load on the first in-process transport mechanism, and it is possible to increase the operating rate of the second in-process transport mechanism. . Thereby, the efficiency improvement of the whole conveyance system is achieved, and the number of second in-process conveyance mechanisms and the number of stockers arranged in the manufacturing facility can be reduced.
[0016]
In the above-described invention, the transfer mechanism may have a storage place for temporarily storing the transported object, and the lifting mechanism may be configured to transfer the transported object to the storage place. Accordingly, it is possible to achieve a buffer function for temporarily placing the transported object in a storage place and absorbing a shift in transport timing with the inter-process transport mechanism.
[0017]
In one embodiment of the present invention, the inter-process transport mechanism is a ceiling transport mechanism or an underfloor transport mechanism, the first in-process transport mechanism is a stocker crane, and the second in-process transport mechanism is a track transport mechanism. The horizontal transfer mechanism is a conveyor provided between the inter-process transport mechanism and the stocker crane, and the lifting mechanism is a lifter capable of delivering a transported object to and from the conveyor. preferable.
[0018]
Furthermore, the conveyor is horizontally between a first position where the conveyed product is transferred to and from the inter-process conveying system and a second position where the conveyed item is transferred to and from the stocker crane. It is preferable that a third position is provided between the first position and the second position that extends and delivers a conveyed product to and from the lifter.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described with reference to the drawings.
[0021]
First, the arrangement configuration of manufacturing equipment before applying the present invention will be described. FIG. 1 is a diagram showing an arrangement configuration of manufacturing equipment for a liquid crystal display device as an example of manufacturing equipment. In the manufacturing facility shown in FIG. 1, a step of forming a thin film transistor on a liquid crystal substrate is performed.
[0022]
In FIG. 1, the film forming apparatuses b1 to b4 and c1 to c8 are arranged in alignment with the two stockers A and C. A track transport mechanism (RGV) Rb is provided along the stocker A, and two track transport mechanisms (RGV) Rc1 and Rc2 are provided along the stocker C. Photolithographic apparatuses d1 to d5, e1 to e5, and g1 to g5 are arranged along stockers D, E, and G, respectively, and orbital transport mechanisms (RGV) Rd, Re, and Rg are provided therebetween.
[0023]
The inspection devices h1 to h6 and i1 to i6 are provided along the two stockers H and I, and the track transport mechanisms (RGV) Rh and Ri are provided between them. Etching apparatuses j1 to j9 and k1 to k9 are arranged along stockers J and K, respectively. Two orbital transport mechanisms (RGV) Rj1 and Rj2 are provided between the etching apparatuses j1 to j9 and the stocker J, and two orbital transport mechanisms (RGV) are provided between the etching apparatuses k1 to k9 and the stocker K. ) Rj1 and Rj2 are provided.
[0024]
The test apparatuses 11 to 118 are arranged along the stocker L, and two track transport mechanisms (RGV) R11 and R12 are provided between them.
[0025]
The above stockers A, C, D, E, G, H, I, J, K, and L are connected to a central ceiling transport mechanism (LIM) MC on one end side, and the ceiling transport mechanism MC and Delivery of a transported object (a cassette in which a liquid crystal substrate is accommodated) is performed with a transport crane provided in each stocker. A liquid crystal substrate is delivered from each stocker via a track transport mechanism (RGV) provided along the stocker.
[0026]
In the arrangement configuration of the apparatus shown in FIG. 1, since the return path of the loop can be used effectively in the central inter-process transfer loop (ceiling transfer mechanism MC), the unbalance of the apparatus size for each process is reduced to the bay for each process. Can be adjusted by assigning the number of. In addition, since the stocker is arranged in parallel with the bay, there are few restrictions on the length of the stocker, and the necessary number of shelves can be secured.
[0027]
Here, the above-described ceiling transport mechanism constitutes an inter-process transport mechanism. Moreover, the crane for conveyance provided in the above-mentioned stocker comprises the 1st in-process conveyance mechanism, and a track conveyance mechanism (RGV) comprises the 2nd in-process conveyance mechanism.
[0028]
FIG. 2 is a diagram showing a transporting mechanism transfer mechanism transfer mechanism between each stocker and the ceiling transport mechanism in FIG. FIG. 2 is a view of the inside of the stocker 1 as viewed from above, and the dotted line in the center indicates the moving path of the stocker crane 2. In the example illustrated in FIG. 2, a spare stocker crane 2 </ b> A is arranged at the end in addition to the stocker crane 2 that is normally operated. It should be noted that the stocker 1 represents the stocker in FIG. 1 as a representative.
[0029]
Delivery of the conveyed product between the stocker crane 2 and the ceiling conveyance mechanism is performed via two conveyors 3 constituting a horizontal transfer mechanism. One of the conveyors 3 is a carry-in side to the stocker 1, and the other is a carry-out side. The transfer of the conveyed product between the conveyor 3 and the stocker crane 2 is performed at the transfer position 4 (second transfer position). Moreover, transfer of the conveyed product between the conveyor 3 and the ceiling conveyance mechanism MC is performed in the transfer position 5 (1st transfer position).
[0030]
FIG. 3 is a view corresponding to FIG. 2 and shows a stocker provided with a cassette station 1A constituting a transfer mechanism according to the present invention. In the example shown in FIG. 3, a configuration is provided in which a station lifter 6 constituting an elevating mechanism is provided instead of the spare crane 2 </ b> A without providing the spare crane 2 </ b> A.
[0031]
The station lifter 6 is a mechanism for moving up and down a conveyed product (hereinafter referred to as a cassette), and can transfer the cassette to and from the conveyor 3 at a transfer position 7 (third transfer position). Therefore, the cassette transferred from the ceiling transport mechanism MC to the conveyor 3 can be delivered to both the stocker crane 2 and the station lifter 6. Conversely, cassettes can be transferred from both the stocker crane 2 and the station lifter 6 to the conveyor 3.
[0032]
FIG. 4 is a configuration diagram of the cassette station 1A shown in FIG. 3 as viewed from the center ceiling transport mechanism side. The station lifter 6 is an elevating mechanism for moving a conveyed product (a cassette indicated by a dotted line in the figure) in the vertical direction. The station lifter 6 receives the conveyed product from the cassette conveyor 3 and transfers it to a transfer position 8 provided below the conveyor 3. can do. The cassette transferred to the transfer position 8 can be transferred to the RGV shuttle 9 of the orbital transport mechanism (RGV) provided in parallel with the stocker 1. Conversely, the cassette can be transferred from the RGV shuttle 9 to the transfer position 8.
[0033]
Therefore, the cassette can be transferred from the ceiling transport mechanism MC to the RGV shuttle 9 via the conveyor 3 and the station lifter 6 without using the stocker crane 2. Conversely, the cassette can be transferred from the RGV shuttle 9 to the ceiling transport mechanism MC via the conveyor 3 and the station lifter 6. Delivery of cassettes between the conveyor 3 and the stocker crane 2 can be performed at the transfer position 4 as before.
[0034]
That is, for a cassette that does not need to be temporarily stored in the stocker 1, the station lifter 6 is selected and directly transferred to the RGV shuttle 9, and the cassette stored in the stocker 1 is selected in the stocker crane 9 and stored in the stocker. Transfer to place. As a result, the cassette transferred from the ceiling transfer mechanism MC can be transferred to the RGV shuttle 9 without using the cassette crane 2 and transferred to each device, so that the load on the stocker crane 2 can be reduced. Moreover, the transfer of the cassette from each apparatus to the ceiling transport mechanism MC can also selectively use the stocker crane 2 and the station lifter 6, and the load on the stocker crane 2 can be reduced.
[0035]
The cassette storage position 10 shown above the transfer position 8 is a position where the cassette can be temporarily retracted in the cassette station 1A. That is, the station lifter 6 can move the cassette to the cassette storage position 10. By temporarily storing the cassette in the cassette storage position 10, a buffering function is achieved that adjusts the timing of cassette delivery between the stocker crane 2 or the track transport mechanism (RGV) and the ceiling transport mechanism MC. be able to.
[0036]
Next, delivery of a cassette between the cassette station 1A of the stocker 1 and the RGV shuttle 9 will be described. FIG. 5 shows an example in which track transport mechanisms are provided on both sides of the stocker 1 as shown in FIG.
[0037]
In FIG. 5, RGV lanes 15 that are RGV shuttle movement paths are provided on both sides of the stocker 1. The RVG lane 15 corresponds to the orbital transport mechanism (RGV) Rc1, Rc2b, etc. in FIG. A device 16 is aligned along the RGV lane 15. The apparatus 16 corresponds to the film forming apparatus, the photographic apparatus, the inspection apparatus, the etching apparatus, the test apparatus, etc. in FIG. In the configuration shown in FIG. 5, the RGV lanes 15 are arranged on both sides of the stocker 1, and the devices 16 are arranged in alignment on the outside thereof.
[0038]
Here, FIG. 6 shows a configuration example in which the configuration shown in FIG. 5 is improved by the present invention. In the configuration example shown in FIG. 6, the devices 16 are arranged in two rows on one side of the stocker 1, and the RGV lane 15 is provided between the device rows. Therefore, since the RGV lane 15 is separated from the stocker 1, two RGV transfer conveyors 17 constituting a horizontal transport mechanism are provided between them. One unit is for transfer from the stocker 1 to the RGV shuttle 9, and one unit is for transfer from the RGV shuttle 9 to the stocker 1.
[0039]
In the configuration shown in FIG. 5, the RGV shuttle 9 stops near the transport port of the stocker 1, and the cassette is directly transferred by the transfer mechanism (robot arm or the like) of the RGV shuttle 9. On the other hand, in the configuration shown in FIG. 6, the cassette is transferred between the stocker 1 and the RGV shuttle 9 via the RGV transfer conveyor 17. Although the RGV transfer conveyor 17 is added, in the configuration shown in FIG. 5, two orbital transport mechanisms (RGV) are provided for the device 16, whereas in the configuration shown in FIG. On the other hand, there is only one orbital transport mechanism (RGV), and the expensive orbital transport mechanism (RGV) can be reduced.
[0040]
FIG. 7 is a diagram showing an arrangement configuration of manufacturing equipment incorporating the above-described cassette station 1A shown in FIG. 3 and the RGV transfer conveyor 17 shown in FIG. The example shown in FIG. 7 is an example in which the present invention is applied to the arrangement configuration of the manufacturing equipment shown in FIG. 7, parts that are the same as the parts shown in FIG. 1 are given the same reference numerals, and descriptions thereof will be omitted.
[0041]
In FIG. 7, a cassette station 1A shown in FIG. 3 is provided for stockers C, D, and H. Further, an RGV transfer conveyor 17 shown in FIG. 6 is provided for the stockers C, J, K, and L. Thereby, the two track transport mechanisms (RGV) Rc1 and Rc2 in FIG. 1 become one track transport mechanism (RGV) Rc, and the two track transport mechanisms (RGV) Ri and Rh become one track transport mechanism (RGV) Rh. The two track transport mechanisms (RGV) Rj1, Rj2 become one track transport mechanism (RGV) Rj, and the two track transport mechanisms (RGV) Rk1, Rk2 become one track transport mechanism (RGV) Rk. The track transport mechanisms (RGV) Rl1 and Rl2 become one track transport mechanism (RGV) Rl, the number of track transport mechanisms (RGV) is reduced from 14 to 9, and a large reduction in the installation area of the manufacturing facility is achieved. ing. Further, the stockers E and I in FIG. 1 are reduced, and the installation area is further reduced. Along with this, manufacturing equipment costs are also greatly reduced.
[0042]
For example, the footprint of the manufacturing facility shown in FIG. 1 is 180 m × 140 m and the installation area is 25200 m ² , whereas the footprint of the manufacturing facility shown in FIG. 7 is 160 × 140 m and the installation area is reduced to 22400 m ^2. Yes. In terms of area, the reduction is about 3000 m ² .
[0043]
The above effect is mainly due to the increase in the operating rate of the track transport mechanism (RGV) by providing the cassette station 1A having the station lifter 6 and providing the cassette transfer conveyor 17.
[0044]
FIG. 8 shows the operation rate of the stocker crane and the track transport mechanism (RGV) in the manufacturing facility before the present invention is applied and in the manufacturing facility after the present invention is applied. In FIG. 8, the operation rate is shown for two configuration examples A and B having different arrangement configurations of the manufacturing equipment. As can be seen from FIG. 8, both the configuration examples A and B to which the present invention is applied can increase the average operation rate of the track transport mechanism (RGV) by 12 to 13% without changing the average operation rate of the crane. .
[0045]
FIG. 9 is a diagram showing the result of calculating the investment amount for the entire transport system for the configuration examples A and B in FIG. When the present invention is applied, it can be seen that a reduction in investment amount of about 200 million yen has been achieved in both configuration examples A and B.
[0046]
As described above, according to the present invention, the delivery mechanism for transported objects between the stocker constituting the bay, the track transport mechanism (RGV), and the central transport mechanism is improved, and the installation area of the manufacturing facility is reduced. It is possible to reduce the investment amount of the entire transport system.
[0047]
In the above-described embodiment, the ceiling transport mechanism has been described as the central inter-process transport mechanism. However, the present invention is not limited to this, and the transport mechanism such as a transport crane on the floor, or the underfloor transport by the transport vehicle that travels under the floor of the clean room. Various transport mechanisms such as a mechanism can be used.
[0048]
Moreover, it is good also as providing the small stocker which provided the crane which has both a raising / lowering and a movement function instead of the station lifter 6 shown in FIG. Further, for example, the spare crane 2 </ b> A shown in FIG. 2 can be used instead of the station lifter 6.
【The invention's effect】
As described above, according to the present invention, the cassette can be directly transferred from the ceiling transfer mechanism to the track transfer mechanism (RGV) using the station lifter. Therefore, it is possible to transfer a large amount of transported goods by the track transport mechanism (RGV) without increasing the load on the stocker crane, and the operating rate of the track transport mechanism (RGV) can be increased. Thereby, the efficiency improvement of the whole conveyance system is achieved, and the number of track conveyance mechanisms (RGV) and the number of stockers arranged in the manufacturing facility can be reduced .
[Brief description of the drawings]
FIG. 1 is a diagram illustrating an arrangement configuration of manufacturing equipment for a liquid crystal display device as an example of manufacturing equipment.
FIG. 2 is a diagram illustrating a delivery mechanism for a transported object between each stocker and the ceiling transport mechanism in FIG.
FIG. 3 is a view showing a stocker provided with a cassette station lifter according to the present invention.
4 is a configuration diagram of the cassette station shown in FIG. 3 as viewed from the center ceiling transport mechanism side.
FIG. 5 is a diagram showing an example in which a track transport mechanism is provided on both sides of a stocker.
6 is a diagram showing a configuration example obtained by improving the configuration shown in FIG. 5 according to the present invention. FIG.
7 is a diagram showing an arrangement configuration of manufacturing equipment incorporating the configuration having the cassette station shown in FIG. 3 and the RGV transfer conveyor shown in FIG. 6;
FIG. 8 is a diagram showing operating rates of a stocker crane and a track transport mechanism (RGV) in a manufacturing facility before applying the present invention and a manufacturing facility after applying the present invention.
FIG. 9 is a diagram illustrating a result of calculating an investment amount for the entire transport system in the configuration example in FIG. 8;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Stocker 1A Cassette station 2 Stocker crane 2A Preliminary crane 3 Conveyor 4, 5, 7, 8 Transfer position 6 Station lifter 9 RGV shuttle 10 Cassette storage position 15 RGV lane 16 Apparatus 17 RGV transfer conveyor

Claims (4)

A stocker for storing the conveyed items conveyed by the inter-process conveying mechanism in a plurality of shelves arranged in a plurality of rows vertically;
A first in-process transport mechanism that is movable up and down and along the row of shelves in the stocker to transport the transported goods to each of the plurality of shelves;
A second in-process transport mechanism provided along a plurality of devices arranged in alignment and for processing the transported material for transferring the transported material to the device;
A transfer system for a manufacturing facility having a transfer mechanism provided between the inter-process transfer mechanism and the stocker,
The transfer mechanism includes a horizontal transfer mechanism configured to be able to deliver a transferred object to and from the inter-process transfer mechanism, and an elevating mechanism capable of transferring the transferred object up and down,
The horizontal transfer mechanism performs delivery of a transported object between both the first in-process transport mechanism and the lifting mechanism ,
Transporting a transported object between the inter-process transport mechanism and the second in-process transport mechanism via the horizontal transport mechanism and the elevating mechanism
Transport system of production equipment which is characterized a call. A transport system for manufacturing equipment according to claim 1,
The transfer mechanism has a storage place for temporarily storing a transported object, and the transporting system is configured to be able to transfer the transported object to the storage place by the lifting mechanism. A transport system for manufacturing equipment according to claim 1 or 2,
The inter-process transport mechanism is a ceiling transport mechanism or an underfloor transport mechanism, the first in-process transport mechanism is a stocker crane, the second in-process transport mechanism is a track transport mechanism, and the horizontal transfer mechanism is Conveyance of manufacturing equipment, characterized in that it is a conveyor provided between the inter-process conveyance mechanism and the stocker crane, and the lifting mechanism is a lifter capable of delivering a conveyed product to and from the conveyor. system. A transport system for manufacturing equipment according to claim 3,
The conveyor extends horizontally between a first position for delivering a conveyed product to and from the inter-process conveyance system and a second position for delivering a conveyed product to and from the stocker crane. And the 3rd position which delivers a conveyed product between the said lifters between the said 1st position and the said 2nd position was provided, The conveyance system of the manufacturing facility characterized by the above-mentioned.

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