TW200424109A - Carrier system of production equipment - Google Patents

Abstract

The object of the present invention is to provide a carrier system of production equipment having an elevator which is provided in the production equipment by providing a ceiling conveying mechanism capable of delivery so as to decrease the number of stockers and the number of conveying mechanisms in the process. Between the ceiling conveying mechanism and stockers is provided with a cassette station having a conveyer and a station elevator. The conveyor is able to deliver the cassette between the stocker lifter and the station elevation.

Description

2. Description of the invention: [Technical field to which the invention belongs] Field of the invention The present invention relates to a conveying system for manufacturing equipment, and more particularly to a conveying system for manufacturing equipment for semiconductor products installed in a clean room. L 先 ^ 尔 Γ] Background of the Invention In most liquid crystal display devices, especially liquid crystal panels (especially thin-film transistor substrates and 1TFT substrates) and semi-manufactured products, they are manufactured using a production room, and the studio is It is composed of a device group having the same function, or a larger device group combining a plurality of such device groups. Place the device of this group or the loader / unloader installed in it (with the card g station of Kakun's removal and moving port), and arrange it in the cubicles with equal partitions. 2 :: General device group management. For the entire transportation system, the booth knows the composition of the production line, and it is arranged at the center of the station (system: main: road), and each station (process) is set around the main path at this time, This stocker will carry out the transportation within each platform. Function 2 is used as a buffer for the transportation within the platform and between the platforms = the transportation between the central platforms (the main path). Both sides of the platform method. Card 11 to each platform, usually enter ^. S is mounted in the _ fixed direction to move through the transport machine in each circuit to the X side station to the special situation is relative to the central platform between The main batch is only a single-sided platform. It is only used on a single ship. The station table ..., if the method is not the same, it is wide. ② If the length of the passage is in the material storage of the platform side stockers ... The number of the storage state is reduced. The end of the storage state and the under-floor transfer during the process. Pick up the top of the 〆σ 9 of the cassette or between the top transfers. The person picks up the line. And unloading under the board, in the storage _: =: " Stop the method of laying the conveyor belt. Read 4 cars and transfer 10 systems =. In the above method, increase the force, transfer the feeder and the top, and-when the transfer load is from Guangnei, the number of stockers must be increased. In response to this, the number of stockers is increased unnecessarily. Methods to avoid this problem include a method in which most cranes walk on one stocker (for example, refer to Patent Document 1). The method of penetrating the platform method is the method of constructing the production line of the work chamber method (for example, refer to Supplementary Reading 2). This method is a configuration in which the platform's auxiliary transportation path is crossed with respect to the main path for transport between the central stations. There is a small number, and the advantage is that the distance from the main frame between the processes to the back side of the platform is short. 20 (Patent Document 1) Japanese Patent Application Publication No. 7-179293. (Patent Document 2) US Patent No. 6,089,811. In In the method of making most cranes walk in the above-mentioned stocker, although the load of the crane 6 200424109 can be distributed, the control method of the stocker crane is very complicated, so there is control software The problem of increased cost and increased maintenance hours. Furthermore, it is impossible to avoid a large accident due to the out of control of the control system. Moreover, because the cassette must be transferred between two cranes, 5 will occur. Excessive transportation.

In addition, in the configuration of the production line where the trolley is transported in parallel with the stocker during the manufacturing process, when the stocker is picked up with the transport trolley on both sides, the trolley can only pick up the cassette with the device on one side, and The walking length of the transport trolley will increase when most equipment is picked up, making the average cycle time longer, and the number of equipment that can be transported is limited. Therefore, when the number of transfer carts is one RGV, there is a problem that the number of transfer lines increases, and when most of the carts are trackless transfer carts (AGV) that can travel, the number of transfer carts increases.

In addition, in the above-mentioned through-platform method, in the main path for transferring 15 between the central platforms, the return path of the loop will form an invalid transfer without the device to cooperate with the pick-up. In addition, the size difference of the devices in each process becomes larger, and the space efficiency is reduced due to the imbalance of each station. In order to avoid this situation, if the stocker is made into two parallel central stockers at the center, the length of the stockers will be incomplete and the necessary number of racks cannot be ensured. 20 The present invention was developed in view of the above points, and its purpose is to provide a storage container crane which can be picked up in cooperation with a top conveying mechanism because the storage container crane and the station elevator can be picked up together. Number of manufacturing equipment transfer systems. [Summary of the Invention] 7 200424109 Summary of the Invention In order to solve the above-mentioned problem, the present invention provides a conveying system for manufacturing equipment, including: a stocker, which is used to store and transfer the transfer mechanism between a plurality of racks arranged in the upper and lower rows. Incoming transport; 5 transport mechanisms in the first process, which can be moved up and down and the row of the rack in the stocker, to move the transport objects to the majority of the rack; transport mechanism in the second process, It is arranged along most of the devices for arranging and processing the conveyed materials, and can transfer the conveyed materials to the device; and the transfer mechanism is provided between the aforementioned process-to-process conveying mechanism and the aforementioned stocker. The aforementioned transfer mechanism includes: 10 a horizontal transfer mechanism configured to transfer objects between the process mechanism and the aforementioned transfer mechanism; and a lifting mechanism capable of transferring the material up and down, and the horizontal transfer mechanism may be configured to communicate with The conveying mechanism is transferred between the conveying mechanism and the lifting mechanism in the first process. According to the above-mentioned invention, a lifting mechanism can be used for the transfer mechanism in the second process 15 with respect to the transfer mechanism between processes to directly transfer the transfer object. Therefore, the load of the transfer mechanism in the first process will not increase, and the transfer mechanism in the second process can transfer a large number of objects, which can increase the operating rate of the transfer mechanism in the second process. As a result, the efficiency of the entire transfer system can be improved, and the number of transfer mechanisms and the number of accumulators in the second process of the manufacturing equipment can be reduced. In the above invention, the transfer mechanism has a storage place for temporarily storing the transported object, and the transported object can be transferred to the storage place by the lifting mechanism. By this, temporarily placing the transported goods in the storage place can achieve the buffer function of absorbing the deviation between the transport time point and the transporting mechanism between processes 8 200424109. In an embodiment of the present invention, preferably, the transfer mechanism between processes is a top transfer mechanism or an underfloor transfer mechanism, the transfer mechanism in the first process is a stocker crane, and the transfer mechanism in the second process In order to carry out the transport mechanism of the road 5, the horizontal transfer mechanism is a conveyor belt provided between the process transfer mechanism and the stocker crane, and the lifting mechanism can transfer the conveyance between the conveyor and the conveyor belt. elevator. Preferably, the conveyor belt is horizontally extended to the first position where the conveyance of the conveyance is performed between the conveyance system and the inter-process conveyance system, and the conveyance of the conveyance is performed between the conveyer and the stocker crane. Between the second position, and between the first position and the second position, there is provided a third position capable of transferring the conveyed material to and from the elevator. In addition, the present invention provides a conveying system for manufacturing equipment, including: a stocker for storing the conveyed items transferred by the transfer mechanism between the manufacturing processes; 15 a first-process transfer mechanism that is movable in the stocker To transfer the conveyed objects to the plurality of racks respectively; and the conveying mechanism in the second process is arranged along most devices arranged in an array and used to process the conveyed objects, and can convey the conveyed objects to the apparatus. In addition, a part of the plurality of devices is arranged between the stocker and the transport mechanism in the first process, and is provided to transport between the stocker and the transport mechanism in the second process. Object level transfer mechanism. According to the invention described above, since the devices can be arranged on both sides of the conveying mechanism in the second process, more devices can be arranged for one conveying mechanism in the second process, and the operating rate of the conveying mechanism in the second process can be improved. And 9 200424109 can reduce the number of transfer mechanisms in the second process. Brief Description of Drawings Fig. 1 is a diagram showing the arrangement and configuration of manufacturing equipment of a liquid crystal display device as an example of the manufacturing equipment. 5 Figure 2 is a diagram of the conveying mechanism of the conveyed material between each stocker and the top conveying mechanism of Figure 1. FIG. 3 is a diagram of a stocker of a cassette station elevator according to the present invention.

Fig. 4 is a structural diagram of the cassette station shown in Fig. 3 when the center top conveying mechanism is viewed from the side. 10 Fig. 5 is an example of a channel conveying mechanism provided on both sides of the stocker. Fig. 6 is a diagram showing a configuration example in which the structure shown in Fig. 5 is improved according to the present invention. Fig. 7 is a diagram showing the configuration of the cassette station shown in Fig. 3 and the arrangement and configuration of the manufacturing equipment incorporating the RGV transfer belt shown in Fig. 6.

Fig. 8 is a graph showing the operating rates of the stocker crane and the rail transport mechanism (RGV) of the manufacturing equipment before the application of the present invention and the manufacturing equipment after the application of the present invention. FIG. 9 is a result of calculating the investment amount of 20 funds for the entire transfer system for the configuration example of FIG. 8. L implementation :! Detailed Description of the Preferred Embodiment Next, the embodiment of the present invention will be described with reference to the drawings. First, the configuration of the manufacturing equipment before applying the present invention will be described. Fig. 1 is a diagram showing an arrangement configuration of manufacturing equipment of a liquid crystal display device as an example of the manufacturing equipment. In the manufacturing equipment shown in FIG. 1, a process of forming a thin film transistor on a liquid crystal substrate is performed. In Fig. 1, the film forming apparatuses M ~ b4 and cl ~ c8 are arranged in a row with two stockers 5 AC. Further, a lane transfer mechanism (RGV) Rb is provided along the stocker a, and two lane transfer mechanisms (RGV) RC1 and Rc2 are provided along the stocker C. The light surname engraving devices cJl ~ d5, el ~ e5, and gl ~ g5 are respectively arranged along the stockers D, E, and G, and a road transport mechanism (RGV) Rd, Re, and Rg are provided between them. The inspection devices hi ~ h6, il ~ i6 are installed along the two stockers H, I, and a lane transfer mechanism (RGV) Rh, Ri is provided between them. The etching devices ji to j9 and kl to k9 are arranged along the stockers j and κ, respectively. Two jicking conveying mechanisms (RGV) Rji, Rj2 are provided between the etching devices ji to j9 and the stocker j, and two jicking conveying mechanisms 15 are provided between the etching devices kl to k9 and the stocker K (RGV) Rkl, Rk2. The test apparatuses 11 to 118 are arranged along the stocker 1, and two rail transfer mechanisms ($ 0R) 1111 and R12 are provided between them. The above stockers A, C, D, E, G, H, I, J, K, and L have one end side connected to the central top transfer mechanism (LIM) MC, and the top transfer machine 20 structures MC and is installed at each The conveyance crane (cartridge which accommodates a liquid crystal substrate) is conveyed between the conveyance cranes in a stocker. The liquid crystal substrates are distributed from each stocker through a rail transfer mechanism (RGV) provided along them. The configuration of the device shown in Fig. 1 'In the central process transfer loop (top transfer mechanism Mc), because the return path of the loop can be effectively used, 11 5 乂 can be divided into the number of process stations The size of the uneven sowing, τ, and the length of the clothes, can ensure the necessary number of shelves.

Here, the above-mentioned top transfer mechanism constitutes an inter-process transfer machine. P The cranes for transportation in the storage tank constitute the first process, and the forced transport mechanism (RGV) constitutes the transport mechanism in the second process. Reading materials between the top of the miscellaneous state — ’privately-owned pictures. The second picture is from the top when looking at the stocker 丨 10 ⑥, the towel center. The transfer of the wire transfer crane crane 2 secret. At the position = Γ ', in addition to the separator crane 2 which is normally operated, the stocker 2A is provided at the end. In addition, the storage material 111 is as shown in the first figure, the storage material ☆ crane 2 and the top conveyance mechanism, and the conveyance of the conveyance is through the two conveyor belts 3 constituting the horizontal conveyance mechanism. The square of conveyor 3 is toward the moving side of the stocker, and the side of conveyor 3 is the moving side. Carousel belt The transfer of the transported material between the Angstrom stocker crane 2 is performed in the transfer position (i.e., the private load position). In addition, the transfer of the conveyed material between the conveyor belt 3 and the top conveying mechanism is performed in the transfer position 5 (the i-th transfer position). The invention provides a diagram of a stocker constituting the card_1A constituting the transfer mechanism. In the example shown in Fig. 3, instead of providing the preliminary crane 2A, a station elevator 6 constituting a lifting mechanism is provided instead of the constitution of the preliminary crane 2A. The station elevator 6 is a mechanism for lifting and lowering a conveyed object (hereinafter, referred to as a cassette), and the cassette can be transferred between the conveyor 12 and the conveyor belt 3 in the transfer device 7 (the third transfer position). Therefore, the cassette transferred by the top transfer mechanism MC to the conveyor belt 3 can be transferred to both the stocker crane 2 and the station elevator 6. In addition, on the contrary, the cassette 2 can be delivered to the carousel 3 by both the stocker crane 2 and the station elevator 6. Fig. 4 is a structural diagram of the cassette station 1A shown in Fig. 3 as viewed from the center top conveying mechanism side. The station elevator 6 is a lifting mechanism for moving the conveyed material to the vertical direction, and the conveyed material is received by the card S conveyor 3, and can be transferred to the transfer position 8 provided on the lower side of the carousel 3. The cassettes transferred to the transfer position 8 can be transferred to the stocker 1 in the flat position 10 and can be transferred to the RGV shuttle 9 of the set transfer mechanism (RGV). Alternatively, the cassette can also be transferred to the transfer position 8 by the rgv shuttle 9. Therefore, without using the stocker crane 2, the cassette can be transferred from the top transfer mechanism MC to the RGV shuttle 9 through the conveyor belt 3 and the station elevator 6. On the other hand, by contrast, through the conveyor belt 3 and the station elevator 6, the caliper can be transferred from the rgV shuttle 9 to the top conveying mechanism ^ 1 (:: through the cassette transfer between the conveyor belt 3 and the stocker crane 2 It can be carried out in the transfer position 4 so far. That is, for the cassettes that are not necessary to be stored temporarily in the stocker 1, the selection station elevator 6 is directly transferred to the rgv shuttle 9, and the cassettes stored in the stocker are selected. 2 Select the stocker 9 and transfer it to the storage place in the stocker. This eliminates the need to use the cassette crane 2 to transfer the cassette transferred by the top transfer mechanism MC to the ruler shuttle 9. Since it can be transferred to each device Therefore, the load of the stocker crane 2 can be reduced. In addition, the conveyance of the cassettes of the top conveying mechanism ^^^ from each device is also forced: the optional use of the stocker 2 and the station lift 6 can reduce the storage Loader 13 200424109 Load of crane 2. Also, the card £ storage position displayed above transfer position 8 is a position where card can be temporarily withdrawn in advance at Card Station 1A. That is, a station elevator 6You can move the card £ to the card storage location 10. 10. Borrow temporarily 5 Kuang kept in the card storage position with a (), the adjustment can be achieved with the storage system 2 crane rail transport mechanism _V) and the top of the transport delivery transfer between the card transfer mechanism Marina MC deviation point buffering function. Secondly, the transfer of the cassette between one person at the cassette station of the stocker 丨 and 11 (} ¥ shuttle 9 will be described. Figure 5 shows the arrangement of 10 on both sides of the stocker i as shown in figure 丄. An example of a rail transport mechanism. In Fig. 5, RGV path 15 of the moving path of the RGV shuttle is provided on both sides of the stocker. RGV path 15 is equivalent to the rail transport mechanism (RGV) Rcl, Rc2b, etc. The device 16 is arranged along the RGV; diameter. The device 16 is equivalent to the film forming device, photoetching device, inspection device, etching 15 etching device, test device, etc. shown in FIG. 1. The structure shown in FIG. The RGV path 15 is arranged on each side of the stocker i, and the device 16 is arranged on the outer side thereof. Here, FIG. 6 is an example of a configuration in which the structure shown in FIG. 5 is improved according to the present invention. As shown in the configuration example, two rows of devices 16 ′ are arranged on one side of the stocker 丨 and the RGV path 15 is provided between the rows of the devices. Therefore, since the ^^ 20 road 20 and the diameter 15 are separated by the stocker 1, There are two RGV transfer belts 17 constituting a horizontal transfer mechanism between them. One is transferred from the stocker i to the RGV shuttle 9 It is used to transfer the rGV shuttle 9 to the stocker 1. In the structure shown in Fig. 5, the RGV shuttle 9 is stopped at the transfer port of the stocker ^, and the transfer mechanism of the RGV shuttle 9 is borrowed. (Robot arm, etc.) is directly moved to the cassette 14. For the configuration shown in FIG. 6, the cassette is transferred between the stocker i and the rGv shuttle 9 through the rGV transfer belt 17 .Although the RGV transfer belt 17 is added, the configuration shown in FIG. 5 is provided with two rail conveyance mechanisms (RGV) for the device 16, and the configuration shown in FIG. 5 is the same as the number shown in FIG. The device 16 has only one rail transport mechanism (RGV), which can reduce the high-priced rail transport mechanism (RGV). Figure 7 shows the structure and assembly of the cassette station ία shown in Figure 3 and the combination shown in Figure 6 The layout of the manufacturing equipment of the RGV transfer belt 17 is shown in Figure 7. The example shown in Figure 7 is an example where the configuration of the manufacturing equipment 10 shown in Figure 1 is applied to the improvement of the present invention. In Figure 7 In the figure, the same components as those shown in Fig. 1 are assigned the same reference numerals, and descriptions thereof are omitted. In Fig. 7, The stockers C, D, and Η are provided with the cassette station 1A shown in FIG. 3. In addition, the stockers C, J, K, and L are provided with the RGV 15 transfer conveyor 17 shown in FIG. In the first figure, two of the road transport mechanisms (RGV) Rcl and Rc2 form one road transport mechanism (RGV) Rc, and two track transport mechanisms (RGV) Ri and Rh form one road transport. Institutions (RGV) Rh, 2 gangway transfer agencies (RGV) Rj and RJ2 to form 1 orbital transport mechanism (RGV) Rj, 2 gangway transfer agencies (RGV) Rkl, Rk2 20 to form 1 gangster Road transport mechanism (RGV) Rk, two road transport mechanisms (RGV) R11, R12 form one road transport mechanism (RGV) Rl, and the number of track transport mechanisms (RGV) is reduced from 14 to 9. A large reduction in the installation area of manufacturing equipment can be achieved. In addition, along with this, it is possible to significantly reduce manufacturing equipment costs. 15 200424109 For example, the footprint of the manufacturing equipment shown in Figure 1 is 18〇111 > < 14m 'and the installation area is 25200m2, while the footprint of the manufacturing equipment shown in Figure 7 is 160x140m and the installation area is reduced To 22400m2, the area is reduced by about 3000m2. The above 5 effects are those who have a cassette station with a station elevator 6 and who set up a cassette transfer belt 17 to increase the transfer rate of the rail transfer mechanism (RGV). Fig. 8 is a 10 diagram of the operating rates of the stocker crane and the rail transport mechanism (RGV) of the manufacturing equipment before the application of the present invention and the manufacturing equipment after the application of the present invention. In FIG. 8, the operation rate is shown for two configuration examples of a and b, which are different configuration configurations of manufacturing equipment. As can be understood from Fig. 8, neither of the construction examples A and B to which the present invention is applied changes the average operation rate of the crane, and the average operation rate of the rail transport mechanism (RGV) can be increased from 12% to 13%. FIG. 9 is a result of calculating the investment amount for the entire transportation system 15 for the configuration examples A and B of FIG. 8. In the case where the present invention is applied, it can be understood that both of the construction examples A and B can achieve an investment amount reduction of about 200 million yuan. As explained above, 'if the storage mechanism of the platform and the conveying mechanism between the conveying mechanism (RGV) and the central conveying mechanism are improved according to the present invention, the installation area of the manufacturing equipment can be reduced, and the conveying can be reduced. The total amount of investment for the entire system. Moreover, in the above-mentioned embodiment, although the top conveyance mechanism is described as a central inter-process conveyance mechanism, it is not limited to this, and a conveyance mechanism such as a mobile crane on the floor, and conveyance by walking in a clean room may be used. Various transport mechanisms such as under-floor transport mechanisms of cars. 16 200424109 In addition, even if a small stocker with a crane with two functions of lifting and moving is provided instead of the station elevator 6 shown in FIG. Further, for example, the preparatory crane 28 shown in Fig. 2 may be used instead of the lowering station 6. 5 Effects of the Invention As described above, according to the present invention, the cassette can be directly transferred from the top conveying mechanism to the road conveying mechanism (RGV) using a station elevator. Therefore, it is not necessary to increase the load of the material storage crane, and it is possible to transfer a large number of objects by the rail transport mechanism (RGV). The operating rate of the Southern Rail Transport System (RGV) can be raised. In this way, the efficiency of the entire transfer system can be achieved, and the number of rail transfer mechanisms (RGV) and the number of accumulators arranged in manufacturing equipment can be reduced. In addition, according to the above-mentioned invention, since the devices can be arranged on both sides of the road carrying mechanism (RGV), more devices can be provided for one road carrying mechanism (RGV), and the rail carrying mechanism (RGV) can be improved. ) Can reduce the number of RGVs. c Brief Description of Drawings 3 FIG. 1 is a diagram showing the arrangement and configuration of manufacturing equipment of a liquid crystal display device as an example of the manufacturing equipment. Fig. 2 is a diagram of a transfer mechanism for transferring 20 objects between each stocker and the top transfer mechanism in Fig. 1. FIG. 3 is a diagram of a stocker of a cassette station elevator according to the present invention. Fig. 4 is a diagram showing the structure of the card station shown in Fig. 3 as viewed from the center of the top conveying mechanism. Fig. 5 is a diagram showing an example in which a lane conveying mechanism is provided on both sides of the stocker. 17 200424109 FIG. 6 is a diagram illustrating a configuration example in which the structure shown in FIG. 5 is improved according to the present invention. Fig. 7 is a diagram showing the configuration of the cassette station shown in Fig. 3 and the arrangement and configuration of the manufacturing equipment incorporating the RGV transfer belt shown in Fig. 6. Fig. 8 is a graph showing the operating rates of the stocker crane and the rail transport mechanism (RGV) of the manufacturing equipment before the invention is applied and the manufacturing equipment after the invention is applied.

FIG. 9 is a result of calculating the investment amount of the entire transfer system for the configuration example of FIG. 8. [Representative symbol table of the main components of the figure] 1 ... stocker 2 ... stocker crane 3 ... conveyor belt 6 ... station elevator 10 ... carton storage position 16 ... device 1A-^ carton station 2A ... preparation Crane 4,5,7,8 ... Transfer position 9. " RGV shuttle

15 ... RGV path 17 ... RGV transfer belt 18

Claims (1)

200424109 Scope of patent application: 1. A conveying system for manufacturing equipment, including: a stocker, which is used to store the conveyed items transferred by the conveying mechanism of the production process on a plurality of racks arranged in the upper and lower rows; 5 the first The conveying mechanism in the process can be moved along the up and down and the rack in the stocker to move the conveyed objects to the plurality of racks respectively. The conveying mechanism in the second process is arranged along the line and arranged. Most of the devices that handle the conveyed material are set up and can move the conveyed material to the device; and 10 transfer mechanisms are provided between the aforementioned process transfer mechanism and the stocker, and the aforementioned transfer mechanism includes: horizontal transfer The mechanism is configured to be able to transfer the conveyed object with the above-mentioned inter-process transfer mechanism; and 15 the lifting mechanism is capable of transferring the conveyed object up and down, and the horizontal transfer mechanism is configured to be capable of transferring the mechanism and the lifting within the first process. Transfers between the two agencies. 2. For the transfer system of manufacturing equipment in the first scope of the application for a patent, the transfer mechanism mentioned above has a storage place for temporarily storing the transfer material, and 20 the transfer material can be transferred to the storage location by the aforementioned lifting mechanism. 3. For the transfer system of manufacturing equipment in the scope of application for patents 1 or 2, wherein the transfer mechanism between the processes is a top transfer mechanism or an underfloor transfer mechanism, and the transfer mechanism in the first process is a stocker crane, and the aforementioned The transport mechanism in the second process is a rail transport mechanism. The above-mentioned horizontal 19 200424109 transport mechanism is a conveyor belt provided between the transport mechanism in the process and the stocker crane, and the lifting mechanism can be connected with the conveyor belt. A lift that transfers goods between them. 4. The conveying system of the manufacturing equipment according to item 3 of the patent application scope, wherein the above-mentioned five conveyor belts extend horizontally between the conveying system of the above-mentioned process and the conveying system. A first position for transferring the conveyed material between the first position and a second position for transferring the conveyed material to and from the stocker crane is provided between the first position and the second position. The third position that can transfer the conveyed material to and from the elevator. 10 5. — A conveying system for manufacturing equipment, including: a stocker, used to store the goods conveyed by the conveying mechanism borrowed between the processes; a conveying mechanism in the first process, which can be moved in the stocker, and used To transfer the objects to the plurality of racks respectively; and 15 the transport mechanism in the second process is arranged along the line and used for processing Most of the devices to be transported are installed, and the objects can be transported to the device. In addition, a part of the majority of the devices is disposed between the stocker and the transport mechanism in the first process, and is provided to store the objects in the storage. Level 20 transport mechanism for transporting objects between the feeder and the transport mechanism in the second process. 20