TW200424109A - Carrier system of production equipment - Google Patents
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- TW200424109A TW200424109A TW93104775A TW93104775A TW200424109A TW 200424109 A TW200424109 A TW 200424109A TW 93104775 A TW93104775 A TW 93104775A TW 93104775 A TW93104775 A TW 93104775A TW 200424109 A TW200424109 A TW 200424109A
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玖、發明說明: 【發明所屬之技術領域】 發明領域 本發明係有關於製造設備之搬送系統,特別是有關於 設置在清潔室内之半導體製品之製造設備等之搬送系統。 L先^爾Γ 】 發明背景 在多數液晶顯示裝置之液晶面板(特別是薄膜電晶體 基板1TFT基板)與半_製品的製造設射,係採用使用 ^作室之生產形態,且該工作室係由具有同種功能之裝置 群、或組合多數個如此之裝置群之更大裝置群所構成。將 々此群之裝置或設置於其中之裝載器/卸載器(具有卡昆 之搬出搬人埠之卡g站),配置於以間隔壁等間隔之小室 二::一般的裝置之群管理。該小室對於全體之搬送系 敢¥見之€知生產線的構成,係在巾央配置站臺(製 之:主:路’且在主通路之周圍於每-站臺(製程)各設 此時,,由該儲料器進行各站臺内之搬送之方式。 功二 作為對站臺内及站臺間之搬送之緩衝之 =於中央之站臺間搬送(主通路)在兩側配置站臺之方 ^將卡為兩側站臺方式。卡11對各站臺之搬送,通常 進^。S搭載於於_定方向移動通過各迴路内之搬送機來 X側站至方式之特殊的情形係相對於中央之站臺間 搬狀主批,僅在單舰置以之 為單側站臺方式。站表…、 沒種方式稱 式相同的話广②通路之長度若與兩側站臺方 儲料器在儲料…長,站堂的數目變少。 隹儲枓态的端部與製程間 地板下搬送配合拿起卡匣之 〆σ 9之頂部或 頂部搬送之間之卡㈣人拿起= 線之構成中,該儲料器與 板下之卸貨,在儲_:=:"知頂部或地 吊車之傳遞口為止敷設輸送帶 之方法來進行。 讀㈣4車進行傳遞 10 制=,在上述之方法,增力,料器與頂部搬送、及- 广内r送之傳遞負荷時,必須增加儲料器台數加以因 應’亚使儲料器台數不必要地增加。可迴避該問題之方法 包括使多數吊車行走於丨個之儲料器之方法(例如,參照專 利文獻1)。 15 料,有以被稱為貫通站臺方式之方法作為工件室方 式之生產線之構成方法(例如,參照補讀2)。該方式係 相對中央之站臺間搬送之主通路,站臺副搬送路形成交叉 之構成。該方式具有站臺的數目較少,由製程間之主㈣ 到站臺之裏側為止之距離較短之優點。 20 (專利文獻1) 特開平7-179293號公報。 (專利文獻2) 美國專利第6,089,811號說明書。 在使多數吊車行走於上述丨個之儲料器之方法中,吊車 6 200424109 的負荷雖可以分散,不過儲料器吊車的控制方法極為複 雜,因此有控制軟體的成本增加、與維修工時增加之問題。 進一步,亦無法避免有可能因控制系之失控等而產生較大 之事故。而且,由於必須在2個吊車之間傳遞卡匣,所以會 5 產生多餘的搬送。2. Description of the invention: [Technical field to which the invention belongs] Field of the invention The present invention relates to a conveying system for manufacturing equipment, and more particularly to a conveying system for manufacturing equipment for semiconductor products installed in a clean room. L 先 ^ 尔 Γ] Background of the Invention In most liquid crystal display devices, especially liquid crystal panels (especially thin-film transistor substrates and 1TFT substrates) and semi-manufactured products, they are manufactured using a production room, and the studio is It is composed of a device group having the same function, or a larger device group combining a plurality of such device groups. Place the device of this group or the loader / unloader installed in it (with the card g station of Kakun's removal and moving port), and arrange it in the cubicles with equal partitions. 2 :: General device group management. For the entire transportation system, the booth knows the composition of the production line, and it is arranged at the center of the station (system: main: road), and each station (process) is set around the main path at this time, This stocker will carry out the transportation within each platform. Function 2 is used as a buffer for the transportation within the platform and between the platforms = the transportation between the central platforms (the main path). Both sides of the platform method. Card 11 to each platform, usually enter ^. S is mounted in the _ fixed direction to move through the transport machine in each circuit to the X side station to the special situation is relative to the central platform between The main batch is only a single-sided platform. It is only used on a single ship. The station table ..., if the method is not the same, it is wide. ② If the length of the passage is in the material storage of the platform side stockers ... The number of the storage state is reduced. The end of the storage state and the under-floor transfer during the process. Pick up the top of the 〆σ 9 of the cassette or between the top transfers. The person picks up the line. And unloading under the board, in the storage _: =: " Stop the method of laying the conveyor belt. Read 4 cars and transfer 10 systems =. In the above method, increase the force, transfer the feeder and the top, and-when the transfer load is from Guangnei, the number of stockers must be increased. In response to this, the number of stockers is increased unnecessarily. Methods to avoid this problem include a method in which most cranes walk on one stocker (for example, refer to Patent Document 1). The method of penetrating the platform method is the method of constructing the production line of the work chamber method (for example, refer to Supplementary Reading 2). This method is a configuration in which the platform's auxiliary transportation path is crossed with respect to the main path for transport between the central stations. There is a small number, and the advantage is that the distance from the main frame between the processes to the back side of the platform is short. 20 (Patent Document 1) Japanese Patent Application Publication No. 7-179293. (Patent Document 2) US Patent No. 6,089,811. In In the method of making most cranes walk in the above-mentioned stocker, although the load of the crane 6 200424109 can be distributed, the control method of the stocker crane is very complicated, so there is control software The problem of increased cost and increased maintenance hours. Furthermore, it is impossible to avoid a large accident due to the out of control of the control system. Moreover, because the cassette must be transferred between two cranes, 5 will occur. Excessive transportation.
另外,在製程内搬送台車進行與儲料器平行搬送之生 產線之構成中,儲料器在兩側與搬送台車配合拿起時,台 車只能在單側與裝置配合拿起卡匣,且與多數裝置配合拿 起時搬送台車的行走長度將增加,使平均循環時間變長, 10 並且可以搬送之裝置數有限。從而,搬送台車為1台有執道 汽車搬送台車(RGV)時,有搬送線數目增加之問題,且多數 台車為可以行走之無軌道搬送台車(AGV)時,具有搬送台 車數增加之問題。In addition, in the configuration of the production line where the trolley is transported in parallel with the stocker during the manufacturing process, when the stocker is picked up with the transport trolley on both sides, the trolley can only pick up the cassette with the device on one side, and The walking length of the transport trolley will increase when most equipment is picked up, making the average cycle time longer, and the number of equipment that can be transported is limited. Therefore, when the number of transfer carts is one RGV, there is a problem that the number of transfer lines increases, and when most of the carts are trackless transfer carts (AGV) that can travel, the number of transfer carts increases.
另外,在上述之貫通站臺方式,在中央之站臺間搬送 15 之主通路中,迴路之歸路將形成沒有裝置配合拿起之無效 搬送。另外,每一製程之裝置之大小差變大,且因每一站 臺之不平衡,使空間效率降低。為了迴避此情形,若在中 央將儲料器作成2列平行之中央儲料器方式,則具有儲料器 的長度將不完整,無法確保必要之架數之問題。 20 本發明乃是鑒於上述諸點而研發者,且其目的係提供 一種由於儲料器吊車與站升降機兩者可以與頂部搬送機構 配合拿起,故可降低設置於製造設備之儲料器的數目之製 造設備的搬送系統。 【發明内容】 7 200424109 發明概要 為了解決上述之課題,本發明提供一種製造設備之搬 送系統,包含:儲料器,係用以於配置成上下多數行之多 數架上保管藉製程間搬送機構搬送來之搬送物;第1製程内 5 搬送機構,係可以在該儲料器内沿著上下及該架之行移動 ,用以分別對該多數架移送該搬送物;第2製程内搬送機構 ,係沿著用以排列配置並處理搬送物之多數裝置設置,且 可對該裝置移送搬送物;及移載機構,係設置於前述製程 間搬送機構與前述儲料器之間。又前述移載機構包含有: 10 水平移送機構,係構成可以在與前述製程間搬送機構之間 傳遞搬送物;及升降機構,係可以上下移送搬送物,且前 述水平移送機構係構成可以在與前述第1製程内搬送機構 及前述升降機構兩者之間傳遞搬送物。 若依據上述之發明,可相對製程間搬送機構對第2製程 15 内搬送機構使用升降機構,以直接移送搬送物。從而,第1 製程内搬送機構之負荷不會增大,藉第2製程内搬送機構可 以移送較多之搬送物,可以提高第2製程内搬送機構之運轉 率。藉此,可以使搬送系統全體的效率化,且可以減低配 置於製造設備之第2製程内搬送機構之數目及儲料器的數 20 目。 在上述之發明中,前述移載機構具有用以暫時地保管 搬送物之保管場所,且可以藉前述升降機構將搬送物移送 至該保管場所。藉此,將搬送物暫時放置於保管場所,可 以達成用以吸收與製程間搬送機構之間之搬送時點之偏差 8 200424109 之緩衝功能。 在本發明之一實施例中,較佳地,前述製程間搬送機 構為頂部搬送機構或地板下搬送機構,且前述第1製程内搬 送機構為儲料器吊車,並且前述第2製程内搬送機構為執道 5 搬送機構,又,前述水平移送機構係設置於前述製程間搬 送機構與前述儲料器吊車之間之輸送帶,而前述升降機構 係可在與前述輸送帶之間傳遞搬送物之升降機。 又,較佳地,前述輸送帶係水平地延伸於在與前述製 程間搬送系統之間進行搬送物的傳遞之第1位置,與在與前 10 述儲料器吊車之間進行搬送物的傳遞之第2位置之間,又, 在前述第1位置與前述第2位置之間,設置有可在與前述升 降機之間進行搬送物之傳遞之第3位置。 另外,本發明提供一種製造設備之搬送系統,包含: 儲料器,係用以保管藉製程間搬送機構搬送來之搬送物; 15 第1製程内搬送機構,係在該儲料器内可以移動,用以分別 對該多數架移送該搬送物;及第2製程内搬送機構,係沿著 排列配置並用以處理搬送物之多數裝置設置,且可對該裝 置移送搬送物。又,在前述儲料器與前述第1製程内搬送機 構之間配置有前述多數裝置的一部份,且設置有用以在前 20 述儲料器與前述第2製程内搬送機構之間搬送搬送物之水 平搬送機構。 依據上述之發明,由於可以在第2製程内搬送機構之兩 側配置裝置,所以對1個第2製程内搬送機構可以配置更多 之裝置,且可以提高第2製程内搬送機構之運轉率,並且可 9 200424109 以削減第2製程内搬送機構的數目。 圖式簡單說明 第1圖為作為製造設備的一例之液晶顯示裝置之製造 設備的配置構成之圖。 5 第2圖為第1圖之各儲料器與頂部搬送機構之間之搬送 物之傳遞機構之圖。 第3圖為依本發明設置卡匣站升降機之儲料器之圖。In addition, in the above-mentioned through-platform method, in the main path for transferring 15 between the central platforms, the return path of the loop will form an invalid transfer without the device to cooperate with the pick-up. In addition, the size difference of the devices in each process becomes larger, and the space efficiency is reduced due to the imbalance of each station. In order to avoid this situation, if the stocker is made into two parallel central stockers at the center, the length of the stockers will be incomplete and the necessary number of racks cannot be ensured. 20 The present invention was developed in view of the above points, and its purpose is to provide a storage container crane which can be picked up in cooperation with a top conveying mechanism because the storage container crane and the station elevator can be picked up together. Number of manufacturing equipment transfer systems. [Summary of the Invention] 7 200424109 Summary of the Invention In order to solve the above-mentioned problem, the present invention provides a conveying system for manufacturing equipment, including: a stocker, which is used to store and transfer the transfer mechanism between a plurality of racks arranged in the upper and lower rows. Incoming transport; 5 transport mechanisms in the first process, which can be moved up and down and the row of the rack in the stocker, to move the transport objects to the majority of the rack; transport mechanism in the second process, It is arranged along most of the devices for arranging and processing the conveyed materials, and can transfer the conveyed materials to the device; and the transfer mechanism is provided between the aforementioned process-to-process conveying mechanism and the aforementioned stocker. The aforementioned transfer mechanism includes: 10 a horizontal transfer mechanism configured to transfer objects between the process mechanism and the aforementioned transfer mechanism; and a lifting mechanism capable of transferring the material up and down, and the horizontal transfer mechanism may be configured to communicate with The conveying mechanism is transferred between the conveying mechanism and the lifting mechanism in the first process. According to the above-mentioned invention, a lifting mechanism can be used for the transfer mechanism in the second process 15 with respect to the transfer mechanism between processes to directly transfer the transfer object. Therefore, the load of the transfer mechanism in the first process will not increase, and the transfer mechanism in the second process can transfer a large number of objects, which can increase the operating rate of the transfer mechanism in the second process. As a result, the efficiency of the entire transfer system can be improved, and the number of transfer mechanisms and the number of accumulators in the second process of the manufacturing equipment can be reduced. In the above invention, the transfer mechanism has a storage place for temporarily storing the transported object, and the transported object can be transferred to the storage place by the lifting mechanism. By this, temporarily placing the transported goods in the storage place can achieve the buffer function of absorbing the deviation between the transport time point and the transporting mechanism between processes 8 200424109. In an embodiment of the present invention, preferably, the transfer mechanism between processes is a top transfer mechanism or an underfloor transfer mechanism, the transfer mechanism in the first process is a stocker crane, and the transfer mechanism in the second process In order to carry out the transport mechanism of the road 5, the horizontal transfer mechanism is a conveyor belt provided between the process transfer mechanism and the stocker crane, and the lifting mechanism can transfer the conveyance between the conveyor and the conveyor belt. elevator. Preferably, the conveyor belt is horizontally extended to the first position where the conveyance of the conveyance is performed between the conveyance system and the inter-process conveyance system, and the conveyance of the conveyance is performed between the conveyer and the stocker crane. Between the second position, and between the first position and the second position, there is provided a third position capable of transferring the conveyed material to and from the elevator. In addition, the present invention provides a conveying system for manufacturing equipment, including: a stocker for storing the conveyed items transferred by the transfer mechanism between the manufacturing processes; 15 a first-process transfer mechanism that is movable in the stocker To transfer the conveyed objects to the plurality of racks respectively; and the conveying mechanism in the second process is arranged along most devices arranged in an array and used to process the conveyed objects, and can convey the conveyed objects to the apparatus. In addition, a part of the plurality of devices is arranged between the stocker and the transport mechanism in the first process, and is provided to transport between the stocker and the transport mechanism in the second process. Object level transfer mechanism. According to the invention described above, since the devices can be arranged on both sides of the conveying mechanism in the second process, more devices can be arranged for one conveying mechanism in the second process, and the operating rate of the conveying mechanism in the second process can be improved. And 9 200424109 can reduce the number of transfer mechanisms in the second process. Brief Description of Drawings Fig. 1 is a diagram showing the arrangement and configuration of manufacturing equipment of a liquid crystal display device as an example of the manufacturing equipment. 5 Figure 2 is a diagram of the conveying mechanism of the conveyed material between each stocker and the top conveying mechanism of Figure 1. FIG. 3 is a diagram of a stocker of a cassette station elevator according to the present invention.
第4圖為由中央之頂部搬送機構側看第3圖所顯示之卡 匣站之構成圖。 10 第5圖為在儲料器的兩側設置執道搬送機構之例之圖。 第6圖為依本發明改善第5圖所顯示之構成之構成例之 圖。 第7圖為具有第3圖所顯示之卡匣站之構成與組入第6 圖所顯示之RGV移載用輸送帶之製造設備之配置構成之 15 圖。Fig. 4 is a structural diagram of the cassette station shown in Fig. 3 when the center top conveying mechanism is viewed from the side. 10 Fig. 5 is an example of a channel conveying mechanism provided on both sides of the stocker. Fig. 6 is a diagram showing a configuration example in which the structure shown in Fig. 5 is improved according to the present invention. Fig. 7 is a diagram showing the configuration of the cassette station shown in Fig. 3 and the arrangement and configuration of the manufacturing equipment incorporating the RGV transfer belt shown in Fig. 6.
第8圖為適用本發明前之製造設備與適用本發明後之 製造設備之儲料器吊車與軌道搬送機構(RGV)之運轉率之 圖。 第9圖為針對第8圖之構成例算出對搬送系統全體之投 20 資金額之結果之圖。 L實施方式:! 較佳實施例之詳細說明 其次,隨著圖面針對本發明之實施形態加以說明。 首先,針對適用本發明前之製造設備之配置構成加以 10 200424109 說明。第1圖為作為製造設備的一例之液晶顯示裝置之製造 設備的配置構成之圖。在第1圖所顯示之製造設備,進行形 成薄膜電晶體於液晶基板上之製程。 第1圖中,成膜裝置Μ〜b4及cl〜c8係對2台之儲料器 5 AC排列配置。另外,沿著儲料器a設置執道搬送機構 (RGV)Rb,沿著儲料器C設置2個執道搬送機構(RGV)RC1、 Rc2。光姓刻裝置cJl〜d5、el〜e5、gl〜g5係分別沿著儲料 器D、E、G排列,在彼等之間設置著執道搬送機構 (RGV)Rd、Re、Rg 〇 10 檢查裝置hi〜h6、il〜i6係沿著2台之儲料器H、I設置, 在彼等之間設置著執道搬送機構(RGV)Rh、Ri。蝕刻裝置ji 〜j9、kl〜k9係分別沿著儲料器j、κ配置。在蝕刻裝置ji 〜j9與儲料器j之間設置2個之執道搬送機構(RGV)Rji、 Rj2,在蝕刻裝置kl〜k9與儲料器K之間設置2個之執道搬送 15 機構(RGV)Rkl、Rk2。 試驗裝置11〜118係沿著儲料器l配置,在彼等之間設置 著2個軌道搬送機構$〇乂)1111、R12。 以上之儲料器A、C、D、E、G、H、I、J、K、L,其 一端側連接中央之頂部搬送機構(LIM)MC,在頂部搬送機 20構MC與設置於各儲料器内之搬送用吊車之間進行搬送物 (收容液晶基板之卡匣)的傳遞。由各儲料器透過沿著彼等設 置之軌道搬送機構(RGV)配送液晶基板。 第1圖所顯示裝置之配置構成’在中央之製程間搬送迴 路(頂部搬达機構Mc)中,由於可以有效利用迴路之歸路, 11 5 乂可以W對製程之站臺數之分關整每 大小之不平播 、 τ、衣置的 丁t时的長度,可以確保必要之架數。Fig. 8 is a graph showing the operating rates of the stocker crane and the rail transport mechanism (RGV) of the manufacturing equipment before the application of the present invention and the manufacturing equipment after the application of the present invention. FIG. 9 is a result of calculating the investment amount of 20 funds for the entire transfer system for the configuration example of FIG. 8. L implementation :! Detailed Description of the Preferred Embodiment Next, the embodiment of the present invention will be described with reference to the drawings. First, the configuration of the manufacturing equipment before applying the present invention will be described. Fig. 1 is a diagram showing an arrangement configuration of manufacturing equipment of a liquid crystal display device as an example of the manufacturing equipment. In the manufacturing equipment shown in FIG. 1, a process of forming a thin film transistor on a liquid crystal substrate is performed. In Fig. 1, the film forming apparatuses M ~ b4 and cl ~ c8 are arranged in a row with two stockers 5 AC. Further, a lane transfer mechanism (RGV) Rb is provided along the stocker a, and two lane transfer mechanisms (RGV) RC1 and Rc2 are provided along the stocker C. The light surname engraving devices cJl ~ d5, el ~ e5, and gl ~ g5 are respectively arranged along the stockers D, E, and G, and a road transport mechanism (RGV) Rd, Re, and Rg are provided between them. The inspection devices hi ~ h6, il ~ i6 are installed along the two stockers H, I, and a lane transfer mechanism (RGV) Rh, Ri is provided between them. The etching devices ji to j9 and kl to k9 are arranged along the stockers j and κ, respectively. Two jicking conveying mechanisms (RGV) Rji, Rj2 are provided between the etching devices ji to j9 and the stocker j, and two jicking conveying mechanisms 15 are provided between the etching devices kl to k9 and the stocker K (RGV) Rkl, Rk2. The test apparatuses 11 to 118 are arranged along the stocker 1, and two rail transfer mechanisms ($ 0R) 1111 and R12 are provided between them. The above stockers A, C, D, E, G, H, I, J, K, and L have one end side connected to the central top transfer mechanism (LIM) MC, and the top transfer machine 20 structures MC and is installed at each The conveyance crane (cartridge which accommodates a liquid crystal substrate) is conveyed between the conveyance cranes in a stocker. The liquid crystal substrates are distributed from each stocker through a rail transfer mechanism (RGV) provided along them. The configuration of the device shown in Fig. 1 'In the central process transfer loop (top transfer mechanism Mc), because the return path of the loop can be effectively used, 11 5 乂 can be divided into the number of process stations The size of the uneven sowing, τ, and the length of the clothes, can ensure the necessary number of shelves.
.在此,上述之頂部搬送機構構成製程間搬送機槿。P 於均t儲㈣内之搬送用吊車構成第1製程内ΐ 、—執逼搬运機構(RGV)構成第2製程内搬送機構。 讀料㈣頂雜關狀間之— ’遞機構私載之圖。第2圖係由上方看儲料器丨 10 ⑥,巾央之.轉絲轉料器吊車2之移祕。在第 置=Γ’除了通常運轉之除料器吊車2之外,在端部酉曰己 之儲料車2Α。又,儲料111係作為代表第1圖 、儲料☆吊車2與頂部搬送機構之間之搬送物之傳遞,係 ,過構成水平移送機構之2台之輸送帶3來進行。輸送帶3之 —方係朝儲料器丨之搬人側,另外_方則為搬出側。輪送帶 埃儲料器吊車2之間之搬送物之移載,係在移載位㈣幻 私載位置)中進行。另外,輸送帶3與頂部搬送機構之 間之搬送物之移載,係在移載位置5(第i之移載位置)中進 行0 *第3圖係對應第2®之圖’顯示依本發明設置構成移載 機構之卡_1A之儲料器之圖。在第3圖所顯示之例,係不 設置預備吊車2A,而是設置構成升降機構之站升降機6來替 代預備吊車2A之構成。 站升降機6係升降搬送物(以下,稱卡匣)之機構,在移 12 載裝置7(第3之移載位置)中,在與輸送帶3之間可以進行卡 匣的傳遞。從而,由頂部搬送機構MC移載至輸送帶3之卡 匣,可以傳遞於儲料器吊車2與站升降機6的兩方。另外, 相反的,可以由儲料器吊車2與站升降機6的兩方將卡匣交 5 給輪送帶3。 第4圖為由中央之頂部搬送機構側看第3圖所顯示之卡 匣站1A之構成圖。站升降機6係將搬送物移動至垂直方向之 升P牛機構,由卡S輸送帶3接受搬送物,可以移送至設置於 輪送帶3的下側之移載位置8。移送至移載位置8之卡匣,平 1〇行於儲料器1可以移載於所設置之執道搬送機構(RGV)之 RGV梭9。另外,反之也可以由rgv梭9將卡匣移送至移載 位置8。 從而,不必使用儲料器吊車2,就可以透過輸送帶3與 站升降機6,將卡匣由頂部搬送機構MC移送至RGV梭9。另 15 卜反之,透過輸送帶3與站升降機6,可以將卡厘由rgV 梭9移送至頂部搬送機構^1(::。透過輸送帶3與儲料器吊車2 之間之卡匣的傳遞,可以如迄今在移載位置4中進行。 也就是,針對在儲料器1沒有必要一時保管之卡匣,選 擇站升降機6直接移送至rgv梭9,保管於儲料器丨之卡匣選 2〇擇儲料器9移送至儲料器内之保管場所。藉此,不必使用卡 匣吊車2將由頂部搬送機構MC所移送之卡匣移送至尺以^梭 9,由於可以搬送至各裝置,所以可以減低儲料器吊車2的 負荷。另外,由各裝置朝頂部搬送機構^^^之卡匣的移送, 也了以逼:擇的使用儲料器2與站升降機6,可以減低儲料器 13 200424109 吊車2的負荷。 又,顯示於移載位置8的上方之卡£保管位㈣,係在 卡ϋ站1A中可以預先使卡更暫時地退避之位置。也就是, 藉站升降機6可以將卡£移動至卡匡保管位置1〇。藉暫時地 5將卡匡保管於相保管位置1(),可以達成調整儲制吊車2 與軌道搬送機構_V)與頂部搬送機構MC之間之卡匡的傳 遞之時點的偏差之緩衝功能。 其次,針對儲料器丨之卡匣站1人與11(}¥梭9之間之卡匣 的傳遞加以說明。第5圖為如第丄圖所顯示在儲料器i的兩側 10 設置軌道搬送機構之例。 第5圖中,在儲料器丨的兩側設置RGV梭的移動路徑之 RGV路徑15。RGV路徑15係相當於第丨圖之軌道搬送機構 (RGV)Rcl、Rc2b等。裝置16沿著RGV;^徑排列配置。裝 置16係相當於第1圖之成膜裝置、光蝕裝置、檢查裝置、蝕 15刻裝置、試驗裝置等。在第5圖所顯示之構成,在儲料器i 的兩側分別配置RGV路徑15,在其外側排列配置著裝置16。 在此,第6圖為依本發明改善第5圖所顯示之構成之構 成例。在第6圖所顯示之構成例,在儲料器丨的單側配置二列 裝置16 ’在裝置之列之間設置RGV路徑15。從而,汉^^乂路 20 徑15由於由儲料器1離開,所以在彼等之間設置2台構成水 平搬送機構之R G V移載用輸送帶17。一台係由儲料器i朝 RGV梭9之移載用,一台係由rGV梭9朝儲料器1之移戴用。 在第5圖所顯示之構成,RGV梭9接近停止於儲料器^ 之搬送口,藉RGV梭9的移載機構(機械手臂等)直接移在卡 14 匣。對於此’在第6圖所顯示之構成,儲料器i與rGv梭9 之間之卡匣的移送,係透過rGV移載用輸送帶17進行。雖 追加RGV移載用輸送帶17,不過在第5圖所顯示之構成,對 於對裝置16設置2個之軌道搬送機構(RGV),而在第6圖所顯 5示之構成對同數之裝置16只有一個軌道搬送機構(RGV),可 以削減高價之軌道搬送機構(RGV)。 第7圖為具有上述第3圖所顯示之卡匣站ία之構成與組 入第6圖所顯示之RGV移載用輸送帶17之製造設備之配置 構成之圖。第7圖所顯示之例,係在第1圖所顯示之製造設 10 備之配置構成適用本發明改善之例。在第7圖中,在與第1 圖所顯示之構成零件相同之零件賦予相同符號,並省略其 說明。 在第7圖中,對儲料器C、D、Η設置第3圖所顯示之卡 匣站1Α。另外,對儲料器C、J、K、L設置第6圖所顯示RGV 15 移載用輸送帶17。藉此,第1圖之2個之執道搬送機構 (RGV)Rcl、Rc2形成1個之執道搬送機構(RGV)Rc,2個之 軌道搬送機構(RGV)Ri、Rh形成1個之執道搬送機構 (RGV)Rh,2個之執道搬送機構(RGV)Rj卜RJ2形成1個之軌 道搬送機構(RGV)Rj,2個之執道搬送機構(RGV)Rkl、Rk2 20 形成1個之執道搬送機構(RGV)Rk,2個之執道搬送機構 (RGV)Rll、R12形成1個之執道搬送機構(RGV)Rl,軌道搬 送機構(RGV)之數目由14台減少至9台,可以達成製造設備 的設置面積之較大之削減。另外,伴隨此,也可以大幅減 低製造設備成本。 15 200424109 例如,對於第1圖所顯示之製造設備之足跡為18〇111>< 14〇m ’且設置面積為25200m2,而第7圖所顯示之製造設備 之足跡為160x 140m且設置面積減少至22400m2,以面積而 言削減約3000m2。 5 以上之效果,係設置具有站升降機6之卡匣站丨人,且藉 設置卡匣移載輸送帶17,主要提高軌道搬送機構(RGV)之運 轉率者。 第8圖為適用本發明前之製造設備與適用本發明後之 製造設備之儲料器吊車與軌道搬送機構(RGV)之運轉率之 10圖。第8圖中,針對不同製造設備的配置構成之a及b之2個 之構成例顯示運轉率。如由第8圖可以了解,適用本發明之 構成例A及B兩者都不改變吊車的平均運轉率,軌道搬送機 構(RGV)的平均運轉率可以由12%提升至13%。 第9圖為針對第8圖之構成例A、B算出對搬送系統全體 15 之投資金額之結果之圖。在適用本發明的情形,可以了解 構成例A、B都可以達成削減約2億元的投資金額。 如以上之說明’若依據本明改善構成站臺之儲料哭與 執道搬送機構(RGV)及中央之搬送機構之間之搬适物之傳 遞機構,可以減低製造設備的設置面積,可以削减搬送系 20 統全體的投資金額。 又,在上述之實施例,雖針對頂部搬送機構作為中央 之製程間搬送機構加以說明,不過並不限制於此,亦可以 使用如地板上移動吊車之搬送機構、與藉行走於清潔室之 搬送車之地板下搬送機構等之種種之搬送機構。 16 200424109 另外,即使設置具有升降與移動之兩功能之吊車之小 型之儲料器來替代第3圖所顯示之站升降機6亦可。進一 步,例如亦可以使用第2圖所顯示之預備吊車2八來替代站 降機6。 5 發明之效果 如上述,若依據本發明,由頂部搬送機構對執道送機 構(RGV)可以使用站升降機直接移送卡匣。從而,不必增大 儲料為吊車的負荷,就可以藉軌道搬送機構(RGV)移送較多 之搬送物。可以提南軌道搬送機構(RGV)的運轉率。藉此可 10 以達成搬送系統全體的效率化,可以減低配置於製造設備 之軌道搬送機構(RGV)的數目及儲料器的數目。另外,若依 據上述之發明,由於可以在執道搬送機構(RGV)的兩側配置 裝置,所以對於1個之執道搬送機構(RGV)可以配置更多之 裝置,可以提高軌道搬送機構(RGV)之運轉率,可以削減執 15 道搬送機構(RGV)的數目。 c圖式簡單說明3 第1圖為作為製造設備的一例之液晶顯示裝置之製造 設備的配置構成之圖。 第2圖為第1圖之各儲料器與頂部搬送機構之間之搬送 20 物之傳遞機構之圖。 第3圖為依本發明設置卡匣站升降機之儲料器之圖。 第4圖為由中央之頂部搬送機構側看第3圖所顯示之卡 臣站之構成圖。 第5圖為在儲料器的兩側設置執道搬送機構之例之圖。 17 200424109 第6圖為依本發明改善第5圖所顯示之構成之構成例之 圖。 第7圖為具有第3圖所顯示之卡匣站之構成與組入第6 圖所顯示之RGV移載用輸送帶之製造設備之配置構成之 5 圖。 第8圖為適用本發明前之製造設備與適用本發明後之 製造設備之儲料器吊車與軌道搬送機構(RGV)之運轉率之 圖。Here, the above-mentioned top transfer mechanism constitutes an inter-process transfer machine. P The cranes for transportation in the storage tank constitute the first process, and the forced transport mechanism (RGV) constitutes the transport mechanism in the second process. Reading materials between the top of the miscellaneous state — ’privately-owned pictures. The second picture is from the top when looking at the stocker 丨 10 ⑥, the towel center. The transfer of the wire transfer crane crane 2 secret. At the position = Γ ', in addition to the separator crane 2 which is normally operated, the stocker 2A is provided at the end. In addition, the storage material 111 is as shown in the first figure, the storage material ☆ crane 2 and the top conveyance mechanism, and the conveyance of the conveyance is through the two conveyor belts 3 constituting the horizontal conveyance mechanism. The square of conveyor 3 is toward the moving side of the stocker, and the side of conveyor 3 is the moving side. Carousel belt The transfer of the transported material between the Angstrom stocker crane 2 is performed in the transfer position (i.e., the private load position). In addition, the transfer of the conveyed material between the conveyor belt 3 and the top conveying mechanism is performed in the transfer position 5 (the i-th transfer position). The invention provides a diagram of a stocker constituting the card_1A constituting the transfer mechanism. In the example shown in Fig. 3, instead of providing the preliminary crane 2A, a station elevator 6 constituting a lifting mechanism is provided instead of the constitution of the preliminary crane 2A. The station elevator 6 is a mechanism for lifting and lowering a conveyed object (hereinafter, referred to as a cassette), and the cassette can be transferred between the conveyor 12 and the conveyor belt 3 in the transfer device 7 (the third transfer position). Therefore, the cassette transferred by the top transfer mechanism MC to the conveyor belt 3 can be transferred to both the stocker crane 2 and the station elevator 6. In addition, on the contrary, the cassette 2 can be delivered to the carousel 3 by both the stocker crane 2 and the station elevator 6. Fig. 4 is a structural diagram of the cassette station 1A shown in Fig. 3 as viewed from the center top conveying mechanism side. The station elevator 6 is a lifting mechanism for moving the conveyed material to the vertical direction, and the conveyed material is received by the card S conveyor 3, and can be transferred to the transfer position 8 provided on the lower side of the carousel 3. The cassettes transferred to the transfer position 8 can be transferred to the stocker 1 in the flat position 10 and can be transferred to the RGV shuttle 9 of the set transfer mechanism (RGV). Alternatively, the cassette can also be transferred to the transfer position 8 by the rgv shuttle 9. Therefore, without using the stocker crane 2, the cassette can be transferred from the top transfer mechanism MC to the RGV shuttle 9 through the conveyor belt 3 and the station elevator 6. On the other hand, by contrast, through the conveyor belt 3 and the station elevator 6, the caliper can be transferred from the rgV shuttle 9 to the top conveying mechanism ^ 1 (:: through the cassette transfer between the conveyor belt 3 and the stocker crane 2 It can be carried out in the transfer position 4 so far. That is, for the cassettes that are not necessary to be stored temporarily in the stocker 1, the selection station elevator 6 is directly transferred to the rgv shuttle 9, and the cassettes stored in the stocker are selected. 2 Select the stocker 9 and transfer it to the storage place in the stocker. This eliminates the need to use the cassette crane 2 to transfer the cassette transferred by the top transfer mechanism MC to the ruler shuttle 9. Since it can be transferred to each device Therefore, the load of the stocker crane 2 can be reduced. In addition, the conveyance of the cassettes of the top conveying mechanism ^^^ from each device is also forced: the optional use of the stocker 2 and the station lift 6 can reduce the storage Loader 13 200424109 Load of crane 2. Also, the card £ storage position displayed above transfer position 8 is a position where card can be temporarily withdrawn in advance at Card Station 1A. That is, a station elevator 6You can move the card £ to the card storage location 10. 10. Borrow temporarily 5 Kuang kept in the card storage position with a (), the adjustment can be achieved with the storage system 2 crane rail transport mechanism _V) and the top of the transport delivery transfer between the card transfer mechanism Marina MC deviation point buffering function. Secondly, the transfer of the cassette between one person at the cassette station of the stocker 丨 and 11 (} ¥ shuttle 9 will be described. Figure 5 shows the arrangement of 10 on both sides of the stocker i as shown in figure 丄. An example of a rail transport mechanism. In Fig. 5, RGV path 15 of the moving path of the RGV shuttle is provided on both sides of the stocker. RGV path 15 is equivalent to the rail transport mechanism (RGV) Rcl, Rc2b, etc. The device 16 is arranged along the RGV; diameter. The device 16 is equivalent to the film forming device, photoetching device, inspection device, etching 15 etching device, test device, etc. shown in FIG. 1. The structure shown in FIG. The RGV path 15 is arranged on each side of the stocker i, and the device 16 is arranged on the outer side thereof. Here, FIG. 6 is an example of a configuration in which the structure shown in FIG. 5 is improved according to the present invention. As shown in the configuration example, two rows of devices 16 ′ are arranged on one side of the stocker 丨 and the RGV path 15 is provided between the rows of the devices. Therefore, since the ^^ 20 road 20 and the diameter 15 are separated by the stocker 1, There are two RGV transfer belts 17 constituting a horizontal transfer mechanism between them. One is transferred from the stocker i to the RGV shuttle 9 It is used to transfer the rGV shuttle 9 to the stocker 1. In the structure shown in Fig. 5, the RGV shuttle 9 is stopped at the transfer port of the stocker ^, and the transfer mechanism of the RGV shuttle 9 is borrowed. (Robot arm, etc.) is directly moved to the cassette 14. For the configuration shown in FIG. 6, the cassette is transferred between the stocker i and the rGv shuttle 9 through the rGV transfer belt 17 .Although the RGV transfer belt 17 is added, the configuration shown in FIG. 5 is provided with two rail conveyance mechanisms (RGV) for the device 16, and the configuration shown in FIG. 5 is the same as the number shown in FIG. The device 16 has only one rail transport mechanism (RGV), which can reduce the high-priced rail transport mechanism (RGV). Figure 7 shows the structure and assembly of the cassette station ία shown in Figure 3 and the combination shown in Figure 6 The layout of the manufacturing equipment of the RGV transfer belt 17 is shown in Figure 7. The example shown in Figure 7 is an example where the configuration of the manufacturing equipment 10 shown in Figure 1 is applied to the improvement of the present invention. In Figure 7 In the figure, the same components as those shown in Fig. 1 are assigned the same reference numerals, and descriptions thereof are omitted. In Fig. 7, The stockers C, D, and Η are provided with the cassette station 1A shown in FIG. 3. In addition, the stockers C, J, K, and L are provided with the RGV 15 transfer conveyor 17 shown in FIG. In the first figure, two of the road transport mechanisms (RGV) Rcl and Rc2 form one road transport mechanism (RGV) Rc, and two track transport mechanisms (RGV) Ri and Rh form one road transport. Institutions (RGV) Rh, 2 gangway transfer agencies (RGV) Rj and RJ2 to form 1 orbital transport mechanism (RGV) Rj, 2 gangway transfer agencies (RGV) Rkl, Rk2 20 to form 1 gangster Road transport mechanism (RGV) Rk, two road transport mechanisms (RGV) R11, R12 form one road transport mechanism (RGV) Rl, and the number of track transport mechanisms (RGV) is reduced from 14 to 9. A large reduction in the installation area of manufacturing equipment can be achieved. In addition, along with this, it is possible to significantly reduce manufacturing equipment costs. 15 200424109 For example, the footprint of the manufacturing equipment shown in Figure 1 is 18〇111 > < 14m 'and the installation area is 25200m2, while the footprint of the manufacturing equipment shown in Figure 7 is 160x140m and the installation area is reduced To 22400m2, the area is reduced by about 3000m2. The above 5 effects are those who have a cassette station with a station elevator 6 and who set up a cassette transfer belt 17 to increase the transfer rate of the rail transfer mechanism (RGV). Fig. 8 is a 10 diagram of the operating rates of the stocker crane and the rail transport mechanism (RGV) of the manufacturing equipment before the application of the present invention and the manufacturing equipment after the application of the present invention. In FIG. 8, the operation rate is shown for two configuration examples of a and b, which are different configuration configurations of manufacturing equipment. As can be understood from Fig. 8, neither of the construction examples A and B to which the present invention is applied changes the average operation rate of the crane, and the average operation rate of the rail transport mechanism (RGV) can be increased from 12% to 13%. FIG. 9 is a result of calculating the investment amount for the entire transportation system 15 for the configuration examples A and B of FIG. 8. In the case where the present invention is applied, it can be understood that both of the construction examples A and B can achieve an investment amount reduction of about 200 million yuan. As explained above, 'if the storage mechanism of the platform and the conveying mechanism between the conveying mechanism (RGV) and the central conveying mechanism are improved according to the present invention, the installation area of the manufacturing equipment can be reduced, and the conveying can be reduced. The total amount of investment for the entire system. Moreover, in the above-mentioned embodiment, although the top conveyance mechanism is described as a central inter-process conveyance mechanism, it is not limited to this, and a conveyance mechanism such as a mobile crane on the floor, and conveyance by walking in a clean room may be used. Various transport mechanisms such as under-floor transport mechanisms of cars. 16 200424109 In addition, even if a small stocker with a crane with two functions of lifting and moving is provided instead of the station elevator 6 shown in FIG. Further, for example, the preparatory crane 28 shown in Fig. 2 may be used instead of the lowering station 6. 5 Effects of the Invention As described above, according to the present invention, the cassette can be directly transferred from the top conveying mechanism to the road conveying mechanism (RGV) using a station elevator. Therefore, it is not necessary to increase the load of the material storage crane, and it is possible to transfer a large number of objects by the rail transport mechanism (RGV). The operating rate of the Southern Rail Transport System (RGV) can be raised. In this way, the efficiency of the entire transfer system can be achieved, and the number of rail transfer mechanisms (RGV) and the number of accumulators arranged in manufacturing equipment can be reduced. In addition, according to the above-mentioned invention, since the devices can be arranged on both sides of the road carrying mechanism (RGV), more devices can be provided for one road carrying mechanism (RGV), and the rail carrying mechanism (RGV) can be improved. ) Can reduce the number of RGVs. c Brief Description of Drawings 3 FIG. 1 is a diagram showing the arrangement and configuration of manufacturing equipment of a liquid crystal display device as an example of the manufacturing equipment. Fig. 2 is a diagram of a transfer mechanism for transferring 20 objects between each stocker and the top transfer mechanism in Fig. 1. FIG. 3 is a diagram of a stocker of a cassette station elevator according to the present invention. Fig. 4 is a diagram showing the structure of the card station shown in Fig. 3 as viewed from the center of the top conveying mechanism. Fig. 5 is a diagram showing an example in which a lane conveying mechanism is provided on both sides of the stocker. 17 200424109 FIG. 6 is a diagram illustrating a configuration example in which the structure shown in FIG. 5 is improved according to the present invention. Fig. 7 is a diagram showing the configuration of the cassette station shown in Fig. 3 and the arrangement and configuration of the manufacturing equipment incorporating the RGV transfer belt shown in Fig. 6. Fig. 8 is a graph showing the operating rates of the stocker crane and the rail transport mechanism (RGV) of the manufacturing equipment before the invention is applied and the manufacturing equipment after the invention is applied.
第9圖為針對第8圖之構成例算出對搬送系統全體之投 10 資金額之結果之圖。 【圖式之主要元件代表符號表】 1…儲料器 2···儲料器吊車 3…輸送帶 6···站升降機 10…卡匣保管位置 16…裝置 1A—^匣站 2A…預備吊車 4、5、7、8···移載位置 9."RGV 梭FIG. 9 is a result of calculating the investment amount of the entire transfer system for the configuration example of FIG. 8. [Representative symbol table of the main components of the figure] 1 ... stocker 2 ... stocker crane 3 ... conveyor belt 6 ... station elevator 10 ... carton storage position 16 ... device 1A-^ carton station 2A ... preparation Crane 4,5,7,8 ... Transfer position 9. " RGV shuttle
15…RGV路徑 17…RGV移載用輸送帶 1815 ... RGV path 17 ... RGV transfer belt 18
Claims (1)
Applications Claiming Priority (1)
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JP2003097108A JP4154269B2 (en) | 2003-03-31 | 2003-03-31 | Manufacturing equipment transfer system |
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TW200424109A true TW200424109A (en) | 2004-11-16 |
TWI245737B TWI245737B (en) | 2005-12-21 |
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TW93104775A TWI245737B (en) | 2003-03-31 | 2004-02-25 | Carrier system of production equipment |
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TW (1) | TWI245737B (en) |
Families Citing this family (3)
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JPWO2008142752A1 (en) * | 2007-05-18 | 2010-08-05 | 株式会社アドバンテスト | Tray storage device and electronic component testing device |
JP5307992B2 (en) * | 2007-07-27 | 2013-10-02 | 株式会社半導体エネルギー研究所 | Display device production method |
JP5583935B2 (en) * | 2009-08-19 | 2014-09-03 | 株式会社アルバック | Manufacturing system and manufacturing method for inline type substrate processing apparatus |
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2003
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TWI245737B (en) | 2005-12-21 |
JP4154269B2 (en) | 2008-09-24 |
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