200904728 九、發明說明： 【發明所屬之技術領域】 本發明係關於-種將藉由從天花板懸吊之搬運台車所搬 運之物品予以收納之物品收納裝置。 【先前技術】 Γ。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Prior Art] Γ
在專利文獻1中係揭示有在液晶顯示裝置之製造工廠中 與各製造步驟對應而設有用以保存製造途中之基板等之自 動倉庫（物品收納裝置），而在各製造步驟中所製造之基板 (物。口）係藉由無人搬運車（搬運台車）而搬運至對應之自動 层庫’且藉由设於自動倉庫内之在自動倉庫間搬運基板之 天化板搬運車’而搬運至與其他製造步驟對應之自動倉 庫，且從該自動倉庫將基板搬運至其他製造步驟者。 [專利文獻1]曰本特開200^59^4號公報（圖υ 【發明内容】 在專利文獻1中，雖係將自動倉庫接近各製造步驟而設 置It由於生產能力之提升等而產生須增強自動倉庫之收 容能力時，若欲將自動倉庫設於與製造步驟相同樓層，則 由於空間之關係會有無法將製造步驟與自動倉庫接近配置 凊开V S者’右將製造步驟與自動倉庫分開配置，則益 人搬運車在製造步驟與自動倉庫之間耗費在搬運基板之時 間將會增加。 本發明之目的係在提供一種增強物品之收納能力，並且 使藉由搬運台車之搬運時間較少之物品收响裝置。 本發明之物品收納裝置係W納由搬運台車所搬運 122968.doc 200904728Patent Document 1 discloses an automatic warehouse (item storage device) for storing a substrate or the like in the middle of manufacturing in accordance with each manufacturing step in a manufacturing plant of a liquid crystal display device, and a substrate manufactured in each manufacturing step. (objects) are transported to the corresponding automatic floor store by an automated guided vehicle (transportation trolley) and transported to and from the automated pallet truck that transports the substrates between the automated warehouses in the automated warehouse. Other manufacturing steps correspond to the automated warehouse, and the substrate is transported from the automated warehouse to other manufacturing steps. [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. 200-59 No. 4 (Patent Document 1) In Patent Document 1, it is necessary to set an automatic warehouse close to each manufacturing step to provide an increase in productivity due to improvement in productivity. When the capacity of the automatic warehouse is enhanced, if the automatic warehouse is to be placed on the same floor as the manufacturing step, the manufacturing steps and the automatic warehouse cannot be configured close to each other due to the space relationship. The right manufacturing step is separated from the automatic warehouse. In the configuration, the time between the manufacturing process and the automated warehouse is increased during the process of transporting the substrate. The object of the present invention is to provide a storage capacity for the enhanced article and to reduce the handling time by the handling trolley. The article absorbing device of the present invention. The article accommodating device of the present invention is carried by the transport trolley 122968.doc 200904728
之物品者，該搬運台車係沿著從天花板懸吊所舖設之搬運 軌道行車。再者，包含有：收納空間，設於天花板内面； 收納棚，設於收納空間内且供物品收納；及搬出入裝置， 用以進行從搬運台車將物品搬入至收納棚及從收納棚將物 品搬出至搬運台車；且搬出入裝置係包含：升降搬運裝 置，將天花板貫通而朝垂直方向升降，且將物品搬運至收 納空間之内部及收納空間之外部，並且在與搬運台車之間 進行物品之收付；及收納搬運裝置，配置於收納空間内， 且移動於升降搬運裝置與前述收納棚之間，並且在與升降 搬運裝置之間及與收納棚之間進行物品之收付。 藉由如此，即可使用天花板内面之空間作為用以收納物 品之收納空間，而增強物品之收納能力’並且在工廠設備 等可有效活用空間。再者，由於升降搬運裝置可設於天花 板之任意位置，因此藉由將升降搬運裝置接近物品之搬運 目的地及搬運來源進行配i，而可縮短藉由搬$台車搬運 物品之時間。 此外，在本發明之物品收納裝置中，係將複數個收納棚 :著-方向排列成相互平行’而收納搬運裝置亦可包含： 弟1打車軌道，在鄰接之收納棚之間沿著收納棚之延伸方 向配設；及第1收納台車，行車於第u亍車軌道，且在與收 、，内棚之間進行前述物品之收付。 ....t y < 精由如此，當複數個收納 棚沿著一方向配置成相互平并 — 十仃時，藉由將第1收納台車沿 著配設於鄰接之收納棚之間 昂1仃車軌道行車，以進行 與收納棚之物品之收付，即可右 有效率地進行物品對於收納 I22968.doc 200904728 棚之收付。For the item, the transport trolley is driven along the transport track laid from the ceiling. Furthermore, the storage space is provided on the inner surface of the ceiling; the storage shed is provided in the storage space and is provided for storing the articles; and the loading and unloading device is configured to carry the articles from the transport trolley to the storage shed and to carry the articles from the storage shed The loading and unloading device includes an elevating and conveying device that passes through the ceiling and moves up and down in a vertical direction, and conveys the article to the inside of the storage space and the outside of the storage space, and carries the article between the transportation and the transportation vehicle. The storage and transportation device is disposed in the storage space, and is moved between the lifting and lowering device and the storage shed, and collects and pays the articles between the transportation device and the storage shed. In this way, the space inside the ceiling can be used as a storage space for accommodating articles, and the storage capacity of the articles can be enhanced, and the space can be effectively utilized in factory equipment and the like. Further, since the elevating and transporting device can be installed at any position of the ceiling, it is possible to shorten the time for transporting the articles by moving the cart by arranging the elevating and transporting device close to the destination of the article and the source of the transport. Further, in the article storage device of the present invention, the plurality of storage sheds are arranged in parallel with each other in the direction of the direction, and the storage and transport device may include: a younger car 1 track, which is accommodated between adjacent storage sheds. The shed is extended in the direction of the shed; and the first storage trolley is driven on the u-car track, and the receipt and payment of the above items are carried out between the shed and the shed. ....ty < Fine, when a plurality of storage sheds are arranged in a direction to be mutually flat--the tenth, by placing the first storage trolley along the adjacent storage sheds 1 Driving on the track, in order to carry out the collection and payment of the items in the storage shed, you can efficiently carry out the goods for the storage of I22968.doc 200904728.
此外’在本發明之物品收納裝置中，收納搬運裝置亦可 進-步包含：第2行車執道，以包圍複數個收納棚之方式 配設’及第2收納台車’沿著第2行車軌道行車，且在與升 降搬運裝置之間及在與第丨收納台車之間進行物品之收 付。藉由如此，由於可藉由沿著包圍複數個收納棚之第2 行車軌道行車之第2收納台4，而在搬出入裝置及與任意 之收納棚對應之第1收納台車之間進行物品之收付，因此 可增加收納棚及對應之第W納台車之數量，且可更增強 收納空間之物品之收納能力。再者，由於第“欠納台車與 第2收納台車係可獨立進行移動，因此可有效率地進行將 物品收納於收納棚及將物品從收納棚取出。 此外，在本發明之物品收納裝置中，收納搬運裝置進— 步包含：第1輸送帶（conveyer)，以包圍複數個收納棚之方 式配設而用以搬運物品；及第2輸送帶，從第丨輸送帶分歧 而延伸*至收納位置附近；升降搬運裝置亦可在與第2輸送 帶之間進行物品之收付，而第丨收納台車亦可在與第〗輸送 苹之間進行物品之收付。藉由如此，由於可經由以包圍複 數個收納棚之方式配設之第丨輸送帶而在搬出入裝置及與 任意之收納棚對應之第1收納台車之間進行物品之收付， 因此可增加收納棚及對應之第1收納台車之數量，且可更 提升收納空間之物品之收納能力。再者，由於第〗收納台 車與第1、第2輸送帶係獨立進行動作，因此可有效率地進 行將物品收納至收納棚及將物品從收納棚取出。再加上， 122968.doc 200904728 由於藉由設置有第卜第2輸送帶，而在搬出入裝置盘第2 輪送帶之間及第m送帶與第2輸送帶之間立刻進行物品之 收付’因此可更有效率地進行將物品收納至收納棚及將物 品從收納棚取出。 【實施方式】 以下說明本發明之較佳實施形態。 圖1係本實施形態之搬運系統10之除了天花板内面之部 分之俯視圖。圖2係為圖丨之升降器單元（lifter unh)2之一 個及天花板内面之與該升降器單元2對應之部分之立體 圖13係為圖2之天花板内面之部分之俯視圖。搬運系統 10係叹於半導體製造工廠之無塵室内者，如圖i至圖3所 不，包含4個機架（bay)7、4個儲料器（st〇cker)20、搬運軌 道 10、OHT(〇verhead Hoist Transport U 式搬運車輛） 搬運台車17及收納裝置（物品收納裝置）1〇1。 4個機架7係於圖丨之上下方向各2個，於圖丨之左右方向 配置成2列。在各機架7中係設有4個半導體製造裝置μ， 且藉由半導體製造裝置14進行半導體製造之各步驟。在各 半導體製造裝置14中係設有用以搬運製造途中之製品等之 用乂搬入載體（carrier)(物品）18之搬入埠口（㈣川5及用以 搬出載體18之搬出埠口 16。 4個儲料器20係分別與4個機架7鄰接而配置，且於内部 收肩有載體1 8。在各儲料器2()中係設有用以搬人載體1 8之 搬入埠口 21及用以搬出載體18之搬出埠口 U。 運軌道1 0係為從天花板懸吊所舖設之軌道，從搬運軌 122968.doc 200904728 道10懸吊之OHT搬運台車17係沿著搬運軌道1〇而行車 (ΟΗΤ搬運台車17係被支撐為可沿著搬運軌道1〇移動）。再 者，藉由ΟΗΤ搬運台車17—面搭載載體18，一面沿著搬運 執道1〇行車，將載體18搬運至半導體製造裝置“、儲料器 20及收納裝置ιοί之後述之升降器單元2。 搬運軌道1〇係由步驟間軌道丨丨、分歧軌道12及步驟内軌 道13所構成。步驟間軌道U係為朝圖丨之上下方向延伸之 環狀之軌道，藉由OHT搬運台車17沿著步驟間軌道丨丨行 車，而在機架7之間及機架7與儲料器2〇之間搬運載體18。 分歧轨道12係為與4個機架7及4個儲料器2〇對應而從步 驟間軌道11分歧之軌道。0HT搬運台車17係經由分歧軌道 12而移動於步驟間軌道u與步驟内軌道13之間。或者， OHT搬運台車17係沿著分歧軌道12移動至儲料器之搬入 埠口 21之上方而將載體18移載置搬入埠口以，且移動至搬 出埠口 22之上方而將搭載於搬出埠口 22之載體18移載至 OHT搬運台車17。 步驟内軌道1 3係為配設於各機架7之上方之環狀之軌 道，而OHT搬運台車17係在將載體18搬入至半導體製造裝 置14時，係沿著步驟内軌道丨3行車，且移動至半導體製造 裝置14之搬入埠口 15之上方以將載體18搭載於搬入埠口 15，而在從半導體製造裝置14將載體18予以搬出時，係沿 者步驟内幸九道13行車，且移動至半導體製造裝置14之搬出 埠口 16之上方，以將搭載於搬出埠口 16之載體18移載至 OHT搬運台車1 7。 122968.doc 200904728 收納農置101係為除儲料器20之外另行設置之用以收納 載體1 8之裝置’其由設於無塵室之天花板内面之收納空間 1、叹於收納空間丄之4個收納棚U、2條導軌（1^1)(第丄行車 執道）25、2個移載機械臂（robot)(第1搬運台車）24及作業架 台4〇、及升降器單元2所構成。 收納空間1係為以天花板5之上面為地板面之空間。4個 收納棚23係為用以收納載體18之大致長方體形狀之棚，且 於收納空間1内沿著圖3之左右方向排列成相互平行。2條 ^軌25係分別在從圖3之左起第1個與第2個收納棚23之間 及左起第3個與第4個收納棚23之間與收納棚23平行延伸。 2個移載機械臂24係分別沿著2條導軌25而行車於收納棚23 與收納埠口 32(升降器30)之間，以將載體18搭載於收納棚 23或將搭載於收納棚23之載體18移載至移載機械臂24(在 與收納棚23之間進行載體丨8之收付）。此外，移載機械臂 24係沿著導軌25而移動至後述之收納埠口 η附近，且將載 體18移載至收納埠口 32，或將搭載於收納埠口 32之載體工8 移載至移載機械臂24。作業架台40係設於圖2之升降器單 兀2之前方側，其成為作業者用以進行維修檢查所使用之 架台。 如此，藉由將用以收納載體18之收納空間丨設於無塵室 之天花板内面，即可增強載體18之收納能力，並且可有效 利用無塵室之空間。此外，在收納空間1中，可將收納棚 23排列成相互平行，且沿著配置於鄰接之收納棚23之間之 導軌25而移動移載機械臂24，以於收納棚23與移載機械臂 122968.doc -10- 200904728 24之間有效率地進行載體〗8之收付。另外，導軌25與移載 機械臂24係相當於本發明之收納搬運裝置。 升降器單元2係為具有大致長方體之外形形狀之筒狀 體，其貫通天花板5之各機架7之上方之部分而朝垂直方向 延伸。在此，由於升降器單元2係可設於天花板5之任意位 置，因此如圖1、圖2所示，藉由接近各機架7而設置，即 可縮短藉由OHT搬運台車17在半導體製造裝置“與升降器 單元2之間搬運載體18所需花費之時間。另外，升降器單 元2係為2個升降器（升降搬運裝置）3〇形成一體者。各升降 器30係包含升降台6、移載裝置34、搬出人瑋心、收納 埠口 32及地上埠口 8。升降台6係在升降器3〇(升降器單元 之内部空間内’藉由搭載載體18而朝垂直方向升降而將載 體18搬運至搬出入埠口 26及收納埠口 32(貫通天花板5而升 降，以將載體18搬運至收納空間丨之内部及收納空間丨之外 部）。移載裝置34係配置於升降台6之上面，用以將載體18 搭載於升降台6’或將搭載於升降台6之載體18移載至搬出 入埠口 2 6及收納璋口 3 2。 搬出入埠口 26係在行車於步驟内軌道13之〇11丁搬運台車 17之下方，從形成於升降器單元2之搬出搬出入口以向外 側朝大致水平方向延伸。將載體18從〇1^丁搬運台車I?移載 至搬出入埠口 26，而移載至搬出入埠口 26之載體18進一步 移載至升降台6。或者，將載體18從升降台6移載至搬出入 埠26而移載至搬出入埠口 26之載體18進一步移載至 OHT搬運台車17。亦即，經由搬出入埠口 ％在搬運台 122968.doc -11- 200904728 車1 7與升降台6 (升降<5 n、Α ηβ 窃30)之間進行載體18之收付。 收納埠口 32係從形成 乂瓦开降器皁兀2之上端部附近之收 納口 35向外側朝大致水 八十方向延伸。將載體18從升降台6 移載至收納埠口 3 2，而教井^ 移载至收納埠口 32之載體1 8係進一 步移載至移載機械臂24。赤 _ ^ 或者，將載體18從移載機械臂24 移載至收納埠口 3 2，而弒番 移载至收納埠口 32之載體丨8係進一 步移載至升降台6。亦y丄 P 、，坐由收納埠口 32而在升降台6盥 移載機械臂24之間進行载體18之收付。 〃 地上蟑口8餘形成於料器單元2之下端部之地上搬入 出口 9向外側朝大致水平方向延伸。藉由作業者ρ將載體18 移載至地上蟑口 8，而孩并s , 移载至地上埠口 8之載體ls係進一步 移載至升降台6。或者，益山 <丨 者藉由升降台6將載體18移載至地上 埠口 8,而移載至地上埠口 — 旱8之载體18係由作業者p取出。 亦即，經由地上埴n s = I ,, 在作業者Ρ與升降台6之間進行載 體1 8之收付。 另卜纟相田於本發明之收納搬運裝置之導軌25及移載 :械臂24f加上升降器單元2者即相當於本發明之搬出入 、* X搬出入裝置係進行將載體18從OHT搬運台車17 搬入至收納棚23、及將恭驷！ 0… 、載體18從收納棚23搬出至OHT搬運 台車17。 在此，兹說明將葡!# 1 r ^ i 8收肩於收納棚23之方法及將收納 於收納棚2 3之載體1 8予以取出之方法。 為了要將載體1 8收納於收响 叹、、，内棚23 ’係將OHT搬運台車17 移動至包含要收納至收納 、棚23之載體18之半導體製造裝置 122968.doc -12- 200904728Further, in the article storage device of the present invention, the storage and transport device may further include: a second lane, and a second storage rail is disposed along the second lane to surround the plurality of storage booths. Driving, and collecting and paying items between the lifting and lowering device and the second storage vehicle. By doing so, the article can be placed between the loading and unloading device and the first storage cart corresponding to any storage shed by the second storage table 4 that travels along the second road that surrounds the plurality of storage sheds. By collecting and paying, the number of the storage sheds and the corresponding W-th trolleys can be increased, and the storage capacity of the articles in the storage space can be further enhanced. Further, since the "an undercarriage trolley and the second storage trolley system can be independently moved, the articles can be efficiently stored in the storage shed and the articles can be taken out from the storage shed. Further, in the article storage device of the present invention The accommodating and conveying device further includes: a first conveyor belt (conveyer) for arranging a plurality of storage sheds for transporting articles; and a second conveyor belt extending from the ninth conveyor belt to a storage unit* In the vicinity of the position, the lifting and lowering device can also collect and pay for the articles between the second conveyor and the second conveyor, and the second storage trolley can also collect and pay for the articles between the transportation and the transportation. The first conveyor belt that is disposed so as to surround a plurality of storage sheds can be used to collect and pay articles between the loading and unloading device and the first storage trolley corresponding to any storage shed. Therefore, the storage shed and the corresponding first one can be added. The number of storage trolleys is increased, and the storage capacity of the articles in the storage space can be further improved. Furthermore, since the first storage trolley and the first and second conveyor belts operate independently, the efficiency can be efficiently entered. The article is stored in the storage shed and the article is taken out from the storage shed. In addition, 122968.doc 200904728 is provided between the second transfer belt of the loading and unloading device tray and the m by the second conveyor belt The delivery of the article is immediately performed between the tape and the second conveyor belt. Therefore, the article can be stored in the storage shed and the article can be taken out from the storage shed more efficiently. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described. Fig. 1 is a plan view of a portion of the conveying system 10 of the present embodiment except for the inner surface of the ceiling. Fig. 2 is a diagram of one of the lifter units 2 of the figure and the portion of the inner surface of the ceiling corresponding to the lifter unit 2. The perspective view 13 is a plan view of a portion of the inner surface of the ceiling of Fig. 2. The transport system 10 is sighed by a clean room of a semiconductor manufacturing factory, as shown in Figures i to 3, including four bays 7, 4 Storing device 20, transport rail 10, OHT (〇verhead Hoist Transport U type transport vehicle) transport carriage 17 and storage device (item storage device) 1〇1. 4 racks 7 are attached to the map. Up and down direction 2 In the left and right directions of the figure, two rows are arranged. Four semiconductor manufacturing apparatuses μ are provided in each of the racks 7, and each step of semiconductor manufacturing is performed by the semiconductor manufacturing apparatus 14. In each semiconductor manufacturing apparatus 14. There is a loading port for transporting a carrier (article) 18 for transporting products in the middle of manufacturing ((4) Chuan 5 and a carry-out port 16 for carrying out the carrier 18. The four stockers 20 are respectively It is disposed adjacent to the four frames 7 and has a carrier 18 at the inner receiving shoulder. A loading port 21 for carrying the carrier 18 and a carrier 18 for carrying out the carrier 18 are provided in each of the stockers 2 (). Move out of the mouth U. The track 10 is a track laid from the ceiling, and the OHT transport trolley 17 that is suspended from the transport rail 122968.doc 200904728 Road 10 is driven along the transport rail (ΟΗΤ) It is supported to be movable along the transport rail 1). Further, by carrying the carrier 18 on the side of the transport trolley 17, the vehicle is transported along the transport lane 1 to transport the carrier 18 to the semiconductor manufacturing apparatus, the stocker 20, and the storage unit ιοί. The transport rail 1 is composed of an inter-step track 丨丨, a bifurcated track 12, and a step inner track 13. The inter-step U is an annular track extending upward and downward in the figure, by the OHT transport trolley 17 The inter-step track travels while the carrier 18 is transported between the racks 7 and between the rack 7 and the hopper 2. The bifurcated track 12 is associated with 4 racks 7 and 4 stockers 2 Correspondingly, the track is branched from the inter-step track 11. The 0HT transport carriage 17 is moved between the inter-step track u and the in-step track 13 via the branch track 12. Alternatively, the OHT transport carriage 17 moves along the branch track 12 to the store. The feeder 18 is placed above the magazine 21, and the carrier 18 is transferred and loaded into the pocket, and moved to the upper side of the carry-out port 22 to transfer the carrier 18 mounted on the carry-out port 22 to the OHT transport carriage 17. The inner rail 13 is arranged on each rack 7 When the carrier 18 is carried into the semiconductor manufacturing apparatus 14, the OHT transport carriage 17 is driven along the in-track rail 3 and moved to the loading port 15 of the semiconductor manufacturing apparatus 14 to When the carrier 18 is mounted on the carry-in port 15 and the carrier 18 is carried out from the semiconductor manufacturing apparatus 14, the carriage 13 is driven by the carriageway 13 and moved to the upper side of the carry-out port 16 of the semiconductor manufacturing apparatus 14. The carrier 18 mounted on the carry-out port 16 is transferred to the OHT transport carriage 17. 122968.doc 200904728 The storage farm 101 is a device for storing the carrier 18 separately from the stocker 20 The storage space provided on the inner surface of the ceiling of the clean room, the four storage compartments U and the two guide rails (1^1) (the second lane) 25 and the two transfer robots ( The robot (the first transport trolley) 24, the work rack 4, and the lifter unit 2. The storage space 1 is a space on the floor surface of the ceiling 5. The four storage compartments 23 are for storing the carrier. 18-small box-shaped shed, and is empty 1 is arranged parallel to each other in the left-right direction of Fig. 3. The two rails 25 are respectively between the first and second storage booths 23 from the left of Fig. 3 and the third and fourth from the left The storage sheds 23 extend parallel to the storage shed 23. The two transfer robots 24 are respectively driven between the storage shed 23 and the accommodating shed 32 (lifter 30) along the two guide rails 25 to support the carrier 18 The carrier 18 is mounted on the storage shed 23 or the carrier 18 mounted on the storage shed 23 is transferred to the transfer robot 24 (the carrier 丨 8 is received and received between the storage shed 23). The guide rail 25 is moved to the vicinity of the storage port η to be described later, and the carrier 18 is transferred to the storage port 32 or the carrier 8 mounted on the storage port 32 is transferred to the transfer robot 24 . The work stand 40 is provided on the front side of the lifter unit 2 of Fig. 2, and serves as a stand for the operator to perform maintenance inspection. Thus, by arranging the storage space for accommodating the carrier 18 on the inner surface of the ceiling of the clean room, the storage capacity of the carrier 18 can be enhanced, and the space of the clean room can be effectively utilized. Further, in the storage space 1, the storage shelves 23 can be arranged in parallel to each other, and the transfer robot 24 can be moved along the guide rails 25 disposed between the adjacent storage shelves 23 to accommodate the storage shelves 23 and the transfer machinery. The carrier of the carrier 8 is efficiently carried out between the arms 122968.doc -10- 200904728 24. Further, the guide rail 25 and the transfer robot 24 correspond to the storage and conveyance device of the present invention. The lifter unit 2 is a cylindrical body having a substantially rectangular parallelepiped shape, and extends in a vertical direction through a portion above the respective frames 7 of the ceiling 5. Here, since the lifter unit 2 can be disposed at any position of the ceiling 5, as shown in FIG. 1 and FIG. 2, by being disposed close to each of the frames 7, the manufacturing of the OHT transport trolley 17 can be shortened in semiconductor manufacturing. The apparatus "the time required to transport the carrier 18 with the elevator unit 2. In addition, the elevator unit 2 is formed by two elevators (elevating and conveying means) 3". Each of the lifters 30 includes a lifting platform 6 The transfer device 34, the unloading person, the storage port 32, and the ground crotch 8. The elevating table 6 is lifted in the vertical direction by the mounting carrier 18 in the lifter 3 (in the internal space of the lifter unit) The carrier 18 is transported to the carry-in port 26 and the accommodating port 32 (lifting up and down through the ceiling 5 to transport the carrier 18 to the inside of the storage space and outside the storage space )). The transfer device 34 is disposed on the lift table. 6 is used to mount the carrier 18 on the lifting platform 6' or to transfer the carrier 18 mounted on the lifting platform 6 to the loading and unloading port 26 and the storage port 32. The loading and unloading port 26 is driven by Step 11 of the track 13 in the step of transporting the trolley 17 The side is extended from the loading/unloading port formed in the lifter unit 2 to the outside in a substantially horizontal direction. The carrier 18 is transferred from the transporting carriage I to the loading and unloading port 26, and is transferred to the loading and unloading port. The carrier 18 of the port 26 is further transferred to the lifting platform 6. Alternatively, the carrier 18, which is transferred from the lifting platform 6 to the loading/unloading port 26 and transferred to the loading and unloading port 26, is further transferred to the OHT transporting carriage 17. That is, the carrier 18 is received and transported between the transport table 122968.doc -11-200904728, the vehicle 1 7 and the lift table 6 (lifting < 5 n, η ηβ stealing 30) via the carry-in port. The 32-series extends from the storage opening 35 near the upper end portion of the upper portion of the tile saponin 2 to the outside in the direction of the water. The carrier 18 is transferred from the elevating table 6 to the storage port 3 2, and the well is drilled. The carrier 18 transferred to the storage port 32 is further transferred to the transfer robot 24. Red or ^, the carrier 18 is transferred from the transfer robot 24 to the storage port 32, and the transfer is repeated. The carrier 8 to the storage port 32 is further transferred to the lifting platform 6. Also y丄P, sitting by the storage port 32 The carrier 18 is received and received between the lifting table 6 and the transfer robot 24. 8 The ground floor 8 is formed on the ground at the lower end of the feeder unit 2, and the loading port 9 extends outward in a substantially horizontal direction. The operator ρ transfers the carrier 18 to the ground cornice 8, and the carrier s transferred to the ground cornice 8 is further transferred to the lifting platform 6. Alternatively, Yishan<丨 by the lifting platform 6 The carrier 18 is transferred to the above ground cornice 8 and transferred to the above ground cornice - the carrier 18 of the dry 8 is taken out by the operator p. That is, the carrier 18 is paid and received between the operator Ρ and the elevator 6 via the ground 埴n s = I . In addition, the guide rail 25 of the storage and transportation device of the present invention and the transfer: the arm 24f and the lifter unit 2 correspond to the carry-in/out of the present invention, and the *X carry-in and pull-out device carries the carrier 18 from the OHT. The trolley 17 is moved into the storage shed 23, and will be complimented! 0... The carrier 18 is carried out from the storage shed 23 to the OHT transport carriage 17. Here, a method of taking the Portuguese! #1 r ^ i 8 to the storage booth 23 and a method of taking out the carrier 18 accommodated in the storage booth 23 will be described. In order to accommodate the carrier 18 in the sigh, the inner shed 23' moves the OHT transport carriage 17 to the semiconductor manufacturing apparatus including the carrier 18 to be stored in the storage and the shed 23. 122968.doc -12- 200904728
14之搬出埠口 16之上方，以將載體18從搬出埠口 16移載至 OHT搬運厶_ !， ^ L 口單17。再者’將〇HT搬運台車丨7移動至設於相 5機末7内之升降器3Q(升降器單元2)之搬出人埠口 ％之上 乂將载體18移載至搬出入埠口 26。此時，升降器3〇係 貫通天化板5之各機架7之上方之部分而朝垂直方向延伸， 由於位於接近各機架7之位置，因此可減少將OHT搬運台 車17從搬出埠口 16移動至搬出入蟑口 26所需花費之時間。 接著，將升降台6移動至與搬出入口 28相同高度，再藉 由移載裝置34將移載至搬出入埠口 26之載體18移載至升降 口 再者，將升降台6移動至與收納口 3 5相同高度，且藉 由移載裝置34將載體1 8從升降台6移載至收納埠口 32。 接著，將移載機械臂24移動到沿著導執25而接近收納埠 口 32之位置，且將移載至收納埠口 32之載體18移載至移載 機械’ 24。再者，將移載機械臂24沿著導軌25移動至與應 收納收納棚23之載體18之位置相對向之位置，且將載體18 從移載機械臂24移載至收納棚23，卩將載體18收納於收納 棚 23。 ' 另一方面，為了要將收納於收納棚23之載體18取出，係 將移載機械’ 24/¾•著導執25移動至與收納有收納棚23之應 取出之載體18之部分相對向之位置，以將載體18從收納棚 23移載至移載機械臂24。接著，將移載機械臂^沿著導執 25移動至接近收納埠口 32之位置，以將載體18從移載機械 臂24移載至收納埠口 μ。 接著，將升降台6移動至與收納口 35相同高度，且藉由 122968.doc 13- 200904728 移載裝置34將載體1 8從收納埠口 32移載至升降台6。再 者，將升降台6移動至與搬出入口 28相同高度，且藉由移 載裝置34將載體18從升降台6移載至搬出入埠口 26。 接著，將OHT搬運台車17移動至搬出入埠口 26之上方， 以將載體18從搬出入埠口 26移載至OHT搬運台車17。再 者，將OHT搬運台車17移動至搬運目的地之半導體製造裝 置14之搬入埠口 15之上方，以將載體18從〇11丁搬運台車口 移載至搬入埠口 15。此時，升降器3〇係貫通天花板5之各 機架7之上方之部分而朝垂直方向延伸，由於位於接近各 機架7之位置，因此可減少將〇HT搬運台車17從搬出入埠 口 26移動至搬入埠口丨5所需花費之時間。 另外，將載體18從地上蟑口 8收納至收納裝置1 〇丨之方 法、及將收納於收納裝置1〇1之載體18在地上埠口 8予以取 出之方法亦與上述者相同，故在此省略說明。 依據以上所說明之實施形態，藉由將無塵室之天花板内 面之空間作為用以收納載體18之收納空間丨來使用，即可 增強載體18之收納能力，並且可在無塵室有效活用空間。 再者由於升降器單元2係可設於天花板5之任意位置，因 此藉由將升降器單元2接近包含作為搬運目的地及搬運來 源之半導體製造裝置I4之機架7而加以配置，即可縮短藉 由OHT搬運台車17搬運載體18所需花費之時間。 此外，在收納空間〗中，藉由將收納棚23排列成相互平 行，且在鄰接之收納棚23之間沿著沿收納棚23之延伸方向 延伸之導軌25而移動移載機械臂24，即可在收納棚^與移 122968.doc •14- 200904728 載機械臂24之間有效率地進行載體18之收付。 接著，說明對本實施形態施加各種變更之變形例。惟針 對具有與本實施形態相同之構成者係賦予相同符號，且適 當省略其說明。 在一變形例中，如圖4所示，在收納空間3，將6個收納 棚23沿著圖4之左右方向排列成相互平行，其係以左起第i 個與第2個收納棚23之間、左起第3個與第4個收納棚以之 間、及左起第5個與第6個收納棚23之間分別舖設有導執 25，使移載機械臂24沿著導執25行車之方式構成。再者， 以包圍該等6個收納棚23及3條導軌25之方式舖設導軌（第2 行車路徑）50，以使0HS(0ver Head处加❿，天井式無人 搬運車）搬運台車（第2收納台車）51沿著導軌5〇行車（變形例 1)。 此時，在將載體18收納於收納空間3之際，係與前述者 相同’將搭載有載體18之升降台6移動至與收納口”(參照 圖2)相同高度。再者’從升降台6藉由移載裝置34將載體 18移載至移動到接近該升降台6之位置之〇則搬運台車 51且將QHS搬運纟車51移動^_與帛於該1納載體18之收 納棚23對應之移载機械臂24所行車之導軌25之-方之端附 近，且在此位置，將載體18從OHS搬運台車51移載至移載 機械臂24。 另一方面，將收納於收納空間3之載體18取出之際，係 將OHS搬運台車51移動至與收納有應取出之載體u之收納 棚23對應之移載機械臂24所行車之導軌25之-方之端附 122968.doc -15- 200904728 近’且將載體18從移載機械臂24移載至〇Hs搬運台車η。 再者將OHS搬運台車51沿著導軌5〇而移動至與升降器單 兀2接近之位置，且藉由移載裝置％將載體18從⑽搬運 台車51移載至升降台6。 此時，由於經由沿著以包圍複數個收納棚23之方式舖設 之導軌50行車之0HS搬運台車51，進行料台6與移載機 械臂24之間之載體18之收付，因此升降器單元2與導軌乃 亦可以分離配置，可增加收納棚23、導軌25及移載機械臂 24之數量，並增強收納空間3之載體18之收納能力。 此外，由於移載機械臂24與〇HS搬運台車5〗係可獨立移 動，因此在移載機械臂24與收納棚23之間進行載體18之收 付之間，亦可在OHS搬運台車51與升降台6之間進行載體 18之收付，且可有效率地進行將載體18收納於收納空間3 及從收納空間3將載體18取出。 另外，在變形例1中，雖係將收納棚23之數量設為6個、 導執25及移載機械臂24之數量設為3條，惟收納棚23、導 軌25及移載機械臂24之數量亦可配合收納空間3之大小而 適當增加。此外，在變形例！中，導軌25、移載機械臂 24、導軌5〇及0HS搬運台車51係相當於本發明之收納搬運 裝置。 在另一變形例中’如圖5所示，在收納空間4與變形例1 相同，6個收納棚23係沿著圖5之左右方向而排列成相互平 行’其係以左起第1個與第2個收納棚23之間、左起第3個 與第4個收納棚23之間、及左起第5個與第6個收納棚23之 122968.doc • 16 - 200904728 門刀別舖„又有導軌25，使移載機械臂μ沿著導軌Μ行車之 方式構成#者’以包圍該等6個收納棚23及3條導軌25之 方式舖設輸送帶（conveyer)Ul輸送帶）52，此外，從輸送 帶52分歧之輸送帶（第2輸送帶）53係延伸至接近升降器翠元 2之位置。再者’在輸送帶如輸送帶似分歧點、輸送 帶53之升降器單元2附近、及輸送帶52之導執”之兩端附 近係分別設有旋轉台（turn table)55、 56、57(變形例2)。 此時，在將載體18收納於收納空間4之際，如前所述， 係㈣載有載體18之升降台6移動至與收納口 35(參照圖2) 相同同度。再者，從升降台6，冑由移載裝置Μ將載體ΜThe 14 is moved out of the cornice 16 to transfer the carrier 18 from the carry-out port 16 to the OHT transport 厶 _ !, ^ L port 17 . Furthermore, 'the 〇HT transport trolley 丨7 is moved to the top of the lifter 3Q (lifter unit 2) provided in the end of the phase 5, and the carrier 18 is transferred to the carry-in port. 26. At this time, the lifter 3 is extended in the vertical direction through the upper portion of each of the frames 7 of the weathering plate 5, and since it is located close to each of the frames 7, the OHT transport trolley 17 can be reduced from the carry-out port. 16 The time it takes to move to and from the port 26. Next, the lifting platform 6 is moved to the same height as the loading and unloading port 28, and the carrier 18 transferred to the loading/unloading port 26 is transferred to the lifting port by the transfer device 34, and the lifting table 6 is moved and stored. The port 3 5 has the same height, and the carrier 18 is transferred from the lifting table 6 to the storage port 32 by the transfer device 34. Next, the transfer robot 24 is moved to a position along the guide 25 close to the storage port 32, and the carrier 18 transferred to the storage port 32 is transferred to the transfer machine '24. Further, the transfer robot arm 24 is moved along the guide rail 25 to a position facing the position where the carrier 18 of the storage booth 23 should be accommodated, and the carrier 18 is transferred from the transfer robot 24 to the storage booth 23, The carrier 18 is housed in the storage booth 23. On the other hand, in order to take out the carrier 18 stored in the storage shed 23, the transfer machine '24/3⁄4• guide 25 is moved to face the portion of the carrier 18 to be taken out of the storage shed 23 The position is to transfer the carrier 18 from the storage shed 23 to the transfer robot 24 . Next, the transfer robot arm 2 is moved along the guide 25 to a position close to the receiving pocket 32 to transfer the carrier 18 from the transfer robot 24 to the storage port. Next, the lifting table 6 is moved to the same height as the receiving opening 35, and the carrier 18 is transferred from the receiving port 32 to the lifting table 6 by the transfer device 34 122968.doc 13-200904728. Further, the elevating table 6 is moved to the same height as the carry-in/out port 28, and the carrier 18 is transferred from the elevating table 6 to the carry-in port 26 by the transfer device 34. Next, the OHT transport carriage 17 is moved above the carry-in port 26 to transfer the carrier 18 from the carry-in port 26 to the OHT transport carriage 17. Further, the OHT transport carriage 17 is moved to the upper side of the carry-in port 15 of the semiconductor manufacturing apparatus 14 of the transport destination to transfer the carrier 18 from the 〇11丁移车口口 to the carry-in port 15. At this time, the lifter 3 extends through the upper portion of each of the frames 7 of the ceiling 5 and extends in the vertical direction. Since it is located close to each of the frames 7, the 〇HT transport trolley 17 can be reduced from being carried out into the cornice. 26 Move to the time it takes to move into the port. In addition, the method of accommodating the carrier 18 from the floor sill 8 to the accommodating device 1 and the method of taking out the carrier 18 stored in the accommodating device 1 在 1 in the ground sill 8 are also the same as the above. The description is omitted. According to the embodiment described above, by using the space on the inner surface of the ceiling of the clean room as the storage space for housing the carrier 18, the storage capacity of the carrier 18 can be enhanced, and the space can be effectively utilized in the clean room. . Further, since the lifter unit 2 can be disposed at any position of the ceiling 5, it can be shortened by arranging the lifter unit 2 to the rack 7 including the semiconductor manufacturing apparatus I4 as a transport destination and a transport source. The time it takes to transport the carrier 18 by the OHT transport trolley 17. Further, in the storage space, the storage shelves 23 are arranged in parallel with each other, and the transfer robot 24 is moved between the adjacent storage shelves 23 along the guide rails 25 extending in the extending direction of the storage shelves 23, that is, The carrier 18 can be efficiently disposed between the storage shed and the transfer robot 122968.doc • 14-200904728. Next, a modification in which various modifications are applied to the present embodiment will be described. The same components as those of the embodiment are denoted by the same reference numerals, and the description thereof will be appropriately omitted. In a modified example, as shown in FIG. 4, in the storage space 3, six storage shelves 23 are arranged in parallel to each other in the horizontal direction of FIG. 4, and the i-th and second storage booths 23 from the left are attached. A guide 25 is placed between the third and fourth storage sheds from the left, and between the fifth and sixth storage sheds 23 from the left, so that the transfer robot 24 follows the guide. 25 driving style. Furthermore, the guide rail (second driving path) 50 is laid so as to surround the six storage compartments 23 and the three guide rails 25, so that the 0HS (the crowning of the 0ver head, the patio type unmanned transport vehicle) transports the trolley (the second The storage cart) 51 travels along the guide rail 5 (variation 1). At this time, when the carrier 18 is stored in the storage space 3, the same as the above, the lifting table 6 on which the carrier 18 is mounted is moved to the same height as the storage opening (see FIG. 2). 6 Transfer the carrier 18 by the transfer device 34 to the position that is close to the lifting platform 6, and then transport the trolley 51 and move the QHS handling brake 51 to and from the storage compartment 23 of the 1 carrier 18 Corresponding to the vicinity of the end of the rail 25 of the vehicle on which the transfer robot 24 is traveling, and at this position, the carrier 18 is transferred from the OHS transport carriage 51 to the transfer robot 24. On the other hand, it is stored in the storage space. When the carrier 18 of the 3 is taken out, the OHS transport carriage 51 is moved to the end of the guide rail 25 of the transport robot 24 corresponding to the storage compartment 23 in which the carrier u to be taken out is stored. 15-200904728 Nearly and transferring the carrier 18 from the transfer robot 24 to the 〇Hs transport carriage η. Further moving the OHS transport carriage 51 along the guide rail 5〇 to a position close to the lift unit 2, and The carrier 18 is transferred from the (10) transport carriage 51 to the lift table 6 by the transfer device %. The 0HS transport carriage 51 that travels along the guide rail 50 that surrounds the plurality of storage compartments 23 carries out the receipt and payment of the carrier 18 between the loading table 6 and the transfer robot 24, so that the lifter unit 2 and the guide rail are The arrangement can also be separated, and the number of the storage shed 23, the guide rail 25, and the transfer robot 24 can be increased, and the storage capacity of the carrier 18 of the storage space 3 can be enhanced. Further, since the transfer robot 24 and the 〇HS transport trolley 5 are It can be moved independently. Therefore, between the transfer robot 24 and the storage shed 23, the carrier 18 can be collected and paid between the OHS transport carriage 51 and the lift platform 6, and the carrier 18 can be efficiently transported. The carrier 18 is housed in the storage space 3 and the carrier 18 is taken out from the storage space 3. Further, in the first modification, the number of the storage shelves 23 is six, the guide 25, and the transfer robot 24 are provided. The number of the storage sheds 23, the guide rails 25, and the transfer robot 24 can be appropriately increased in accordance with the size of the storage space 3. Further, in the modification, the guide rail 25 and the transfer robot 24 are provided. , guide rail 5 〇 and 0HS transport trolley 51 is equivalent to this hair In another modification, as shown in FIG. 5, in the storage space 4, as in the first modification, the six storage compartments 23 are arranged in parallel to each other in the left-right direction of FIG. Between the first and second storage sheds 23 from the left, between the third and fourth storage sheds 23 from the left, and from the fifth and sixth storage sheds 23 from the left, 122968.doc • 16 - 200904728 Door knives „ „ 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 The Ul conveyor belt 52 is further extended from the conveyor belt (second conveyor belt) 53 that is different from the conveyor belt 52 to a position close to the elevator cylinder 2. Further, 'turn table 55, 56, 57 is provided in the vicinity of both ends of the conveyor belt such as the conveyor belt like the branch point, the riser unit 2 of the conveyor belt 53, and the guide of the conveyor belt 52. (Modification 2) At this time, when the carrier 18 is housed in the storage space 4, as described above, the elevating table 6 carrying the carrier 18 is moved to the same degree as the storage opening 35 (see Fig. 2). Furthermore, from the lifting platform 6, the carrier is transported by the transfer device.
移載至旋轉台56。如此—來，载體18即沿著輸送帶53而被 搬運至設於與輸送帶52之分歧點之旋轉台55。再者，載體 18係沿著輸送帶52而搬運至配置在與用於收納該載體此 收納棚23對應之導軌25之-方之端附近之旋轉台57上，且 :由該旋轉台57而停留在其位置。再者，將停留於該旋轉 台57上之被搬運之載體18移載至移載機械臂μ。 另一方面，在將收納於收納空間4之載體18取出之際， 係由與收納有要取出之載體18之收納棚23對應之移載機械 臂24將載體18搭載於配置在導執25之—方之端附近之旋轉 台55。如此-來，載體18即沿著輸送帶加被搬運至位於 與輸送帶53之分歧點之旋轉台55，且藉由旋轉心而被搬 運至輸送帶52，該輸送帶53係在與具有搬送目的地之半導 體製造裝置14(參照圖υ之機架7(參照圖”對應之升降器單 元2與輸送帶52之間延伸。再者’载體_藉由輸送帶52 122968.doc -17- 200904728 之旋轉台56 ’以藉由旋轉 由移載裝置34將停留於該 6 〇 而搬運至位於升降器單元2附近 台56而停留在其位置。再者，藉 旋轉台5 6之載體18移載至升降台 此時’由於經由以包圍複數個收納棚23之方式舖設之輸 送帶52、及從輸送帶52分歧之輸送帶53，而進行升降^ 與移載機械臂24之間之載體18之收付，因此升降器單元2 與導軌25亦可以分離配置，可增加收納油、導軌25及移 载機械臂24之數量，並增強收納空間4之载體以之收納能 力。 此外，由於移載機械臂24與輸送帶52、53係可獨立動 作，因此在移載機械臂24與收納棚23之間進行載體18之收 付之間，亦可在升降台6與輪送帶53之間進行載體18之收 付，且可有效率地進行將載體18收納於收納空間4及從收 納空間4將載體18取出。再者，由於將載體18從升降台6搬 運至移載機械臂24者係為輸送帶52、53 ,因此在與升降台 6之間進行載體1 8之收付之際，不須如變形例丨所示要等到 OHS搬運台車51(參照圖4)來到升降台6之附近，而可於升 降台6與輸送帶53之間立刻進行載體18之收付，以搬運至 輸送帶52，因此可更有效率地進行將載體丨8收納於收納空 間4及從收納空間4將載體18取出。 另外’在變形例2中，亦與變形例1相同，收納棚23、導 軌25及移載機械臂24之數量可配合收納空間4之大小而適 當增加。此外’在變形例2中，導軌25、移載機械臂24、 輸送帶52、53及旋轉台55〜57係相當於本發明之收納搬運 122968.doc -18- 200904728 裝置。 此外，在本發明之形態中，雖係說明使用OUT搬運台車 17作為搬運台車之例，惟亦可使用OHS搬運台車等〇HT搬 運台車17以外者作為搬運台車。 此外，在本實施形態中，雖係使用構成升降器單元2之2 個升降器30之雙方，用以將載體18收納至收納空間！、及 將載體18從收納空間i取出，惟將2個升降器3〇中之一方僅 使用於用以將載體18收納至收納空間丨，而將另—方僅使 用於用以將載體18從收納空間上取出，且將氣浴室（ah> shwer)设於用以將载體18從收納空間【取出所使用之升降 器30之收納埠σ32附近亦可。此時，即使於收納空間w 具有些微之塵埃等，且該塵埃附著於载體18，亦可藉由氣 洛室去除該塵埃，而防止塵埃被帶入無塵室内。 此外，在收納空間1連通於外氣時，亦可設置過滅器， 用以將收納空間内包含於外氣巾之塵埃等去除，㈣止塵 埃進入收納空間1之内部。 成 為 此外，天花板5除了如本實施形態之情形所示上面 平面之結構之外，亦可作成格栅（grating)g構等。 【圓式簡單說明】 之天花板内 天花板内面 圖1係為本發明之實施形態之除了搬運系統 面之部分之概略構成圖。 圖2係為圖1之搬運系統之1個升降器單元及 之與該升降器單元對應之部分之立體圖。 圖3係為圖2之天花板内面之部分之俯視圖 122968.doc -19- 200904728 圖4係為變形例1之相當於圖3之俯視圖。 圖5係為變形例2之相當於圖3之俯視圖。 【主要元件符號說明】 1 收納空間 2 升降器單元 5 天花板 6 升降台 10 搬運系統 17 OHT搬運台車 18 載體 23 收納棚 24 移載機械臂 25 導執 30 升降器 50 導軌 5 1 OHS搬運台車 52 ' 53 輸送帶 55 〜57 旋轉台 101 收納裝置 122968.doc 20-Transfer to the rotary table 56. In this manner, the carrier 18 is carried along the conveyor belt 53 to the rotary table 55 provided at a point of divergence with the conveyor belt 52. Further, the carrier 18 is transported along the conveyor belt 52 to a rotary table 57 disposed near the end of the guide rail 25 for accommodating the storage compartment 23, and is: Stay in its place. Further, the carried carrier 18 staying on the rotary table 57 is transferred to the transfer robot μ. On the other hand, when the carrier 18 accommodated in the storage space 4 is taken out, the carrier 18 is mounted on the guide 25 by the transfer robot 24 corresponding to the storage booth 23 in which the carrier 18 to be taken out is stored. - Rotating table 55 near the end of the square. In this manner, the carrier 18 is transported along the conveyor belt to the rotary table 55 located at a point of divergence from the conveyor belt 53, and is transported to the conveyor belt 52 by the rotating core, and the conveyor belt 53 is transported and transported. The semiconductor manufacturing device 14 of the destination (refer to the rack 7 of the drawing (refer to the figure) extends between the elevator unit 2 and the conveyor belt 52. Further, the carrier is transported by the conveyor belt 52 122968.doc -17- The rotary table 56' of 200904728 is moved to its position by being moved by the transfer device 34 to stay at the 6 〇 to the table 56 located near the elevator unit 2. Further, the carrier 18 of the rotary table 56 is moved. At the time of carrying the lifting platform, the carrier 18 between the lifting and lowering robots 24 is carried out by the conveyor belt 52 which is laid so as to surround the plurality of storage compartments 23 and the conveyor belt 53 which is branched from the conveyor belt 52. Therefore, the lift unit 2 and the guide rail 25 can also be disposed separately, and the number of the storage oil, the guide rail 25, and the transfer robot 24 can be increased, and the carrier of the storage space 4 can be enhanced to accommodate the storage capacity. The robot arm 24 and the conveyor belts 52, 53 can be moved independently Therefore, between the transfer robot 24 and the storage shed 23, the carrier 18 can be collected and paid between the lift table 6 and the transfer belt 53, and can be efficiently carried out. The carrier 18 is stored in the storage space 4 and the carrier 18 is taken out from the storage space 4. Further, since the carrier 18 is transported from the elevating table 6 to the transfer robot 24 as the conveyor belts 52 and 53, the elevating table is When the carrier 18 is received and received between the six, it is not necessary to wait for the OHS transport carriage 51 (refer to FIG. 4) to come to the vicinity of the lift table 6 as shown in the modification, but to lift the table 6 and the conveyor belt 53. Immediately after the carrier 18 is transported and transported to the transport belt 52, the carrier 8 can be more efficiently stored in the storage space 4 and the carrier 18 can be taken out from the storage space 4. Further, in the second modification Similarly to the first modification, the number of the storage shed 23, the guide rails 25, and the transfer robot 24 can be appropriately increased in accordance with the size of the storage space 4. Further, in the second modification, the guide rail 25, the transfer robot 24, The conveyor belts 52, 53 and the rotary tables 55 to 57 are equivalent to the storage and handling of the present invention 122968.doc -18-200904728. In the embodiment of the present invention, the example in which the OUT transporting carriage 17 is used as the transporting trolley is described, but the transporting trolley may be used other than the HT transporting carriage 17 such as an OHS transporting trolley. In the present embodiment, both of the two lifters 30 constituting the lifter unit 2 are used to store the carrier 18 in the storage space! and the carrier 18 is taken out from the storage space i, but two lifters are used. One of the three sides is only used to store the carrier 18 into the storage space, and the other is only used to take the carrier 18 out of the storage space, and the air bath (ah>shwer) is used. It is also possible to take the carrier 18 from the storage space [to take out the vicinity of the storage 埠 σ 32 of the lifter 30 used. At this time, even if the storage space w has a slight amount of dust or the like and the dust adheres to the carrier 18, the dust can be removed by the air chamber to prevent the dust from being carried into the clean room. Further, when the storage space 1 is connected to the outside air, a damper may be provided to remove dust or the like contained in the outer air towel in the storage space, and (4) the dust-preventing dust enters the inside of the storage space 1. Further, the ceiling 5 may be formed as a grating or the like in addition to the structure of the upper plane as shown in the case of the present embodiment. [Flat Description] The ceiling inside the ceiling Fig. 1 is a schematic configuration diagram of a portion of the embodiment of the present invention except the conveying system. Fig. 2 is a perspective view showing a lifter unit of the transport system of Fig. 1 and a portion corresponding to the lifter unit. Figure 3 is a plan view of a portion of the inner surface of the ceiling of Figure 2 122968.doc -19- 200904728 Figure 4 is a plan view corresponding to Figure 3 of Modification 1. Fig. 5 is a plan view corresponding to Fig. 3 in a second modification. [Description of main components] 1 Storage space 2 Lifter unit 5 Ceiling 6 Lifting platform 10 Transport system 17 OHT transport trolley 18 Carrier 23 Storage shed 24 Transfer robot 25 Guide 30 Lifter 50 Guide rail 5 1 OHS transport trolley 52 ' 53 Conveyor belt 55 ~ 57 Rotary table 101 Storage device 122968.doc 20-