TWI484581B - Substrate handling device - Google Patents

Description

Substrate handling device

The present invention relates to an apparatus for transporting substrates.

In an FPD (flat panel display) manufacturing line such as a liquid crystal display or a plasma display, it is necessary to transport a substrate between a cassette for receiving a substrate and a processing device or between processing devices.

In the apparatus for transporting a substrate, it is disclosed in Japanese Laid-Open Patent Publication No. 2005-64432 that the apparatus includes a mounting table on which a substrate carried out from the cassette is placed, and a substrate that can be carried out from the mounting table. A substrate transfer device of the processing device. However, in this device, since the substrate cannot be carried out from the mounting table to the substrate transfer device during the substrate transfer of the substrate transfer device, the substrate transfer efficiency is low.

In Japanese Laid-Open Patent Publication No. 2004-292094, the device disclosed is provided with a roller conveyor, and the substrate on the roller conveyor can be carried into a cassette, and the substrate can be carried out from the cassette to the roller conveyor. Transfer device. In this apparatus, even in the substrate conveyance of the roller conveyor, the substrate can be carried out from the cassette on the roller conveyor by the transfer device. However, since a part of the transfer device needs to be located on the side of the roller conveyor, in order to secure the installation space of the transfer device, the overall size of the device is increased.

In the eleventh and twelfth drawings of Japanese Laid-Open Patent Publication No. 2004-284772, there are disclosed a device in which two sets of roller conveyors having orthogonal conveyance directions are arranged to be vertically overlapped, and one of them is raised and lowered. The device, too, even In the substrate conveyance of one of the roller conveyors, the substrate can be carried out from the cassette on the one roller conveyor, and the substrate can be carried by the other roller conveyor by the lifting and lowering of the other roller conveyor. Handling. Moreover, since the two sets of roller conveyors orthogonal to the conveyance direction are arranged to overlap each other, it is also possible to reduce the size of the entire apparatus. However, the roller conveyor is required to have a roller driving device, so the roller conveyor is not easily lightened. Therefore, the lifting and lowering of the roller conveyor is time consuming, and the substrate transportation efficiency may be lowered.

An object of the present invention is to provide a substrate transfer device capable of improving substrate transfer efficiency while reducing the size of the entire device.

According to the present invention, the substrate transfer device provided includes: a first conveyance means capable of supporting the substrate from the lower side thereof and horizontally conveyed in the first conveyance direction; and the first conveyance means The second conveyance means that supports the substrate to be horizontally conveyed in the second conveyance direction orthogonal to the first conveyance direction, and the first conveyance means are spaced apart from each other in the first conveyance direction. The first transport unit is configured by a plurality of first transport units, and the second transport unit is configured by a plurality of second transport units that are spaced apart from each other in the second transport direction, and each of the second transport units is disposed in the first a gap between the transport units, a support unit for supporting the substrate from the lower side thereof, a support unit disposed below the support unit, and a connection unit provided on the support unit to enable the support The support unit is raised and lowered by the support unit to raise the substrate on the first transport unit from the first transport unit, and the support unit does not interfere with the lowered position of the substrate on the first transport unit. And a lifting unit that is disposed between the support unit and the lifting unit in the second conveying direction at a position lower than the first conveying unit.

According to the above configuration, the second conveying means is disposed below the first conveying means, so that the entire apparatus can be downsized. Further, the lifting unit performs the lifting and lowering of the support unit to raise and lower the substrate. The support unit may have a function of supporting the substrate from the lower side, and does not require the drive mechanism for moving the substrate. Therefore, the support unit can be made lighter. Therefore, it is possible to increase the speed of the substrate as described above, and it is possible to improve the substrate transfer efficiency.

[Best Embodiment of the Invention]

<All Structures>

1 is a plan view showing a substrate transfer device A according to an embodiment of the present invention. FIG. 2 is a cross-sectional view showing the structure of the orthogonal transfer device 1 taken along line I-I of FIG. 1, and FIG. 3 is a first view. Fig. II - II is a cross-sectional explanatory view showing the structure of the orthogonal conveying device 1. In each of the figures, the arrow symbols X and Y are horizontal directions orthogonal to each other. When the forward and reverse directions in the X and Y directions are specifically described, the arrow symbols +X and +Y are positive directions, and the arrow symbols -X and -Y are opposite directions. The arrow symbol Z indicates the up and down direction (vertical direction). Distinguish In the description, the upper direction is called +Z, and the lower direction is called -Z.

The substrate conveyance device A includes a cross conveyance device 1 and conveyance devices 2, 3, a conveyance device 4, a plurality of conveyance devices 5, and a plurality of lifting devices 80. In the substrate transfer device A, the glass substrate W is transported from a storage cassette 70 for accommodating the rectangular thin glass substrate W to a processing device (not shown), and the glass substrate W is transferred from the processing device to the storage cassette 70. The processing apparatus performs cleaning, drying, and other processing of the glass substrate W.

<Orthogonal handling device 1>

The orthogonal conveying device 1 includes a first conveying device 10 that can horizontally convey the glass substrate W in the X direction, and a second conveying device 20 that can horizontally convey the glass substrate W on the first conveying device 10 in the Y direction; 1 The gantry 500 for supporting the transport device 10 and the second transport device 20 is supported. The gantry 500 is constituted by a leg portion 502 for supporting the gantry main body portion 501 and the gantry main body portion 501.

<First transport device 10>

The first conveying device 10 is constituted by a plurality of first conveying units 11 that are spaced apart from each other in the X direction. In the case of this embodiment, the first transport unit 11 is provided in four rows.

The first transport unit 11 is further configured by a plurality of roller transport units 60 arranged in the Y direction. As shown in FIGS. 1 to 3, each of the roller transport units 60 includes a plurality of rollers 61 on which the glass substrate W can be placed, a drive case 62 in which the roller 61 driving device is housed, and a glass substrate W that can be attached thereto. A sensor 63 such as a photosensor that performs detection is referred to (see FIG. 3). Roller 61 is arranged to be wound The driven roller that is rotatable in the Y-direction rotating shaft is configured to be capable of transporting the glass substrate W in both the +X direction and the -X direction from the lower side of the glass substrate W while supporting the glass substrate W. Each of the roller conveyor units 60 is independently driven, and each of the roller conveyor units 60 is supported by the leg portion 601 on the gantry body 501 of the gantry 500.

In the present embodiment, the first transport unit 11 is configured by the roller transport unit 60. However, another transport unit that supports the glass substrate W from the lower side of the glass substrate W and is transported, for example, a belt conveyor or the like may be used.

<Second transport device 20>

As shown in FIG. 2, the second conveying device 20 is configured by a plurality of second conveying units 21 that are controlled to be synchronized with each other in the X direction, and are provided on each of the gantry main portions 501. In the case of this embodiment, three second transport units 21 are provided. Hereinafter, the configuration of each of the second transport units 21 will be described in detail with reference to FIGS. 2 to 4 . Fig. 4 is a perspective view of the second transport unit 21. The second transport unit 21 includes a support unit 30 , an elevation unit 40 , and a drive unit 50 .

<Support unit 30>

The support unit 30 extends in the Y direction, and its length in the Y direction is somewhat longer than the width of the glass substrate W in the Y direction. Therefore, the glass substrate W can be stably supported by the support unit 30 of each of the second transport units 21.

The support unit 30 includes a support member 31 that extends in the Y direction. In the case of this embodiment, the support member 31 is a hollow angular steel pipe. The support member 31 is provided in plural in the Y direction with a gap therebetween, and is transmitted through The bracket 33 is supported by the roller 32 of the support member 31. The roller 32 is rotatably attached to the bracket 33 and rotatable about an axis in the X direction. When the glass substrate W is transported by the second transport unit 21, the glass substrate W is placed on the roller 32, and the roller 32 supports the glass substrate W from the lower side of the glass substrate W against the lower surface of the glass substrate W. In the present embodiment, the case where the roller 32 is provided on the support member 31 through the bracket 33 has been described as an example. However, the present invention is not limited thereto. For example, the support member 31 may be provided with a latch member having a rotatable bearing at the tip end.

The support unit 30 includes a pair of substrate holding units 34 arranged in the Y direction with a space therebetween. In the state of the present embodiment, the substrate holding unit 34 is disposed at both ends of the support member 31 in the Y direction in a state in which the respective rollers 32 are sandwiched. The substrate holding unit 34 includes an abutting member 35 that can abut against the end edge of the glass substrate W, a moving unit 36 that can reciprocate the abutting member 35 in the Y direction, and a cover member 37 that covers the moving unit 36.

The moving unit 36 is a pneumatic cylinder in the present embodiment, and includes a main body portion 36a and a movable portion 36b. The movable portion 36b is reciprocally moved in the Y direction by air supply and conversion to the main body portion 36a.

In the state of the present embodiment, the contact member 35 is a roller that is rotatably supported by the movable portion 36b around the axis in the Z direction, and is configured to be able to abut against the end edge of the glass substrate W on the circumferential surface thereof. The cover member 37 is dust that prevents the movement of the moving unit 36, and a slit 371 is provided on the upper surface of the cover member 37 in order to avoid interference with the connecting shaft of the abutting member 35 and the movable portion 36.

FIG. 5 is an operation explanatory view of the substrate holding unit 34. In the form of the upper side of Fig. 5, the glass substrate W is placed on the roller 32, and the substrate holding unit is shown. The abutment member 34 of 34 is in a retracted position. When the respective abutting members 35 are moved in the approaching direction to the abutting position by the operation of each of the moving units 36, the abutting members 35 abut against the glass substrate W as shown in the lower side of Fig. 5 . The glass substrate W is held at each end of the direction. Further, the holding of the glass substrate W by the substrate holding unit 34 can also obtain the positioning of the glass substrate W in the Y direction. The glass substrate W can be positioned and held by the substrate holding unit 34 during the conveyance period when the second conveyance device 20 conveys the glass substrate W. In addition, the pair of substrate holding units 34 of the second transport unit 21 provided in the plurality of rows are simultaneously driven in all directions (moving in the approach direction), and the rows to be driven may be appropriately selected depending on the size of the glass substrate W.

When the glass substrate W is held by the substrate holding unit 34, the glass substrate W may slightly move in the Y direction. However, since the rolling 32 is rotatable about the axis in the X direction, the movement of the glass substrate W can prevent the glass substrate W and The roller 32 is rubbed to prevent damage to the glass substrate W.

Next, as shown in FIG. 2, the support unit 30 is a space which is disposed between the first conveyance units 11. In the case of the present embodiment, since the first transport unit 11 is provided in four rows as described above, there are three gaps between the first transport units 11. In the present embodiment, since the support unit 30 is disposed in all the gaps, three of the second transport units 21 are provided. However, it is not necessary to provide the second transport unit 21 in accordance with the total number of gaps. For example, in the case of the present embodiment, two second transport units 21 may be provided corresponding to two gaps on both sides in the X direction.

<lifting unit 40>

In the state of the present embodiment, the lifting unit 40 is a pneumatic cylinder, and as shown in FIG. 4, it includes a main body portion 42 and a movable portion 41. The movable portion 41 can be reciprocated in the Z direction by air supply and conversion to the main body portion 42. The lifting unit 40 is disposed below the support unit 30, and the movable portion 41 is coupled to the lower surface of the support member 31 of the support unit 30.

Fig. 2 is a view showing a lifting operation when the lifting unit 40 lifts and lowers the support unit 30. The upper side of the second figure shows a state in which the support unit 30 is located at a lowered position where the glass substrate W on which the roller 61 of the first transport unit 11 can be placed and the support unit 30 do not interfere. When the support unit 30 is raised by the operation of the elevation unit 40 in this manner, the glass substrate W placed on the roller 61 of the first conveyance unit 11 is placed on the roller 32 of the support unit 30, so that the support unit 30 is formed. The rising position of the glass substrate W from the first conveyance unit 11 (the form of the lower side of the second drawing).

Then, the glass substrate W is held by the substrate holding unit 34, and the glass substrate W can be transported by the second transport unit 21 instead of the first transport unit 11.

<Drive unit 50>

As shown in FIGS. 2 and 3, the drive unit 50 is disposed below the first transport unit 11, and the drive unit 30 and the lift unit 40 are driven to move toward the Y side. By arranging the drive unit 50 in the space below the first transport unit 11, it is possible to reduce the size of the entire orthogonal transport device 1.

The driving unit 50 is provided with a support plate 51, a sliding member 52, and a rail member 53. . The support plate 51 is equipped with the elevation unit 40, whereby the elevation unit 40 and the support unit 30 are mounted on the drive unit 50. Further, a control valve that can convert the air supply of the lifting unit 40 can be mounted on the support plate 51. According to this configuration, since the control valve can be disposed close to the elevation unit 40, the lifting operation of the elevation unit 40 can be made more reliable.

The sliding member 52 is fixedly mounted under the support plate 51, and a plurality of them are arranged in the Y direction at a predetermined interval. Each of the sliding members 52 is provided to be slidably movable on the rail member 53, and the support plate 51 and the sliding member 52 are configured as slides that are slidably movable on the rail member 53. The rail member 53 is extended in the Y direction, and as shown in FIG. 3, is provided so as to extend from the one end portion of the first transport unit 11 in the Y direction to the other end portion. A face of the sliding member (linear guide block) 52 and the rail member 53 are opposed to each other, and a bearing (or a roller) is housed therein. The bearings are circulated inside the linear guide block while rotating in the groove (contact surface) of the rail member 53 (or the rollers are in contact with the contact surface of the rail member 53 on the inner side of the linear guide block). While turning sideways). Based on this, the sliding member 52 can slide down on the rail member 53 in a state where it hardly receives frictional resistance.

End members 53a are respectively provided at both end portions of the rail member 53 in the Y direction, and a bearing 54a is fixed to each end member 53a. A shaft 54 extending in the X direction is supported by the bearing 54a, and one shaft 54 is provided at each end portion of the rail member 53 in the Y direction. In the case of the present embodiment, all of the second conveying units 21 are common to the shaft 54, and the shafts 54 provided at the respective end portions are connected to each other.

Pulleys 55 are provided in the vicinity of the rail members 53 around the respective shafts 54, each of which is provided The rail member 53 is provided with a pair of pulleys 55. The belt 56 is wound around the pair of pulleys 55 in the Y direction with a gap therebetween, and both end portions of the belt 56 are fixed to the front and rear of the support plate 51 (see Fig. 4).

One of the two shafts 54 is provided with a drive source 58. The drive source 58 includes a motor 58a and a speed reducer 58b, and can rotate the shaft 54. As a result of the rotation of the one shaft 54 driven by the drive source 58, the pulley 54 fixed to the one shaft 54 can be rotated to operate the belt 56. As a result, the support plate 51 and the slide member 53 can be slidably moved on the rail member 53, and the support unit 30 and the elevating unit 40 can be moved in the Y direction and stopped at an arbitrary position.

The weight of the support unit 30 and the lifting unit 40 is borne by the rail member 53. Therefore, the drive source 58 that rotates the pulley 55 to operate the belt 56 is only required to generate a moving force in the Y direction, so that the drive can be satisfied with a drive source of less power.

The Y-direction moving position of the support unit 30 and the lifting unit 40 caused by the driving of the driving source 58 can be controlled by, for example, feedback control. In this case, the motor 58a is controlled based on the detection result of the sensor for detecting the number of revolutions of the motor 58a or the sensor for detecting the position of the sliding member 52 on the rail member 53.

Further, in the present embodiment, the motor 58a may be other mechanism using a belt transmission mechanism, and for example, a mechanism using a ball screw mechanism or a linear motor may be employed.

Further, in the present embodiment, a common drive source 58 is used for each of the second transport units 21. However, it is also possible to provide a drive for each of the second transport units 21. The source 58, constructed as a synchronous control. In particular, when the drive sources 58 are common, cost reduction, control simplicity, and simplification of the configuration can be achieved.

The drive unit 50 is provided with a pair of cover members 57. As shown in FIG. 2, the pair of cover members 57 are formed in a C shape which is disposed on the +X side and the -X side of the rail member 53, respectively, and are formed in the hollow spaces S1 and S2. A pulley 55 and a belt 56 are housed in the space S1, and wirings and pipes (not shown) are disposed in the space S2. Next, the rail member 53, the support plate 51, the slide member 52, the pulley 55, and the belt 56 are surrounded by the cover members 57, thereby preventing the drive unit 50 from driving the generated dust. The cover member 57 is provided with a plurality of suction and exhaust means 57a (Fig. 3) capable of sucking air in the internal spaces S1, S2 to discharge the air to the outside. In this way, it is possible to surely prevent the generation of dust.

<Conveyor 2 and 3>

Referring to Fig. 1, the conveying devices 2 and 3 are both constituted by a plurality of roller conveying units 60 in the state of the present embodiment. The transport device 2 is disposed on the side of the first transport device 10 in the +X direction, and transports the glass substrate W from the transport device 4 to the orthogonal transport device 1 . The transport device 3 is disposed on the +X side of the first transport device 10, and transports the glass substrate W from the orthogonal transport device 1 to the transport device 4.

<Handling device 4>

In the transport device 4, the glass substrate W transported by the transport device 3 is transported to a processing device (not shown), and the glass substrate W transported by the processing device is transported to the transport device 2. The configuration of the transport device 4 is, for example, The same configuration as the orthogonal conveying device 1 may be a articulated robot that can move in the Y direction or the like.

(Storage Box 70)

Fig. 6 is a perspective view of the storage cassette 70. The storage cassette 70 is a cassette that is disposed above the transport device 5 and that can accommodate the substrate W in the Z direction in a plurality of stages in a horizontal posture. In addition, FIG. 6 is a view showing a state in which the glass substrate W is not housed. In the state of the present embodiment, the storage case 70 is a frame body having a substantially rectangular parallelepiped shape formed by a plurality of column members 71 and beam members 72. The arrangement of the beam members 72 is set such that the transport device 5 can enter the storage cassette 70 from below the storage cassette 70, and the beam member 72 is formed with an opening through which the transport device 5 can be accessed from below.

The column member 71 is disposed in the Y direction while being disposed in plural in the X direction. A wire 73 arranged in the Z direction and separated by a predetermined pitch is provided between the pair of column members 71 spaced apart in the Y direction. The space between the upper and lower sides of each of the steel wires 73 is formed as a notch for accommodating the glass substrate W, and the glass substrate W is placed on the wire 73 one by one in a horizontal posture. Next, the number of the slits is constituted by the number of the wires 73 arranged in the Z direction.

In the present embodiment, the notch is formed by the steel wire, but it is a matter of course that other methods can be employed. However, the use of the steel wire can reduce the interval between the substrates to be housed, and the storage efficiency of the storage cassette 70 can be improved.

<Conveyor device 5>

The conveyor device 5, the state of the embodiment is conveyed by a plurality of rollers Unit 60 is constructed. The transport device 5 is provided below each of the storage cassettes 70 for each of the storage cassettes 70. In addition, as shown in FIG. 1, the conveyance device 5 is disposed on the side in the -X direction of the first conveyance device 10, and conveys the glass substrate W between the conveyance device 5 and the orthogonal conveyance device 1. The substrate W is carried into the storage cassette 70 and conveyed from the storage cassette 70.

<lifting device>

When the cassette 70 is lifted and lowered in the Z direction by the pair of lifting devices 80, the storage cassette 70 and the conveying device 5 can be relatively moved in the Z direction. However, instead of this configuration, the pair of lifting devices 8 may be configured to elevate and transport the device 5 in the Z direction. Further, when the pair of lifting devices 80 are configured to elevate and lower the conveying device 5, the first conveying device 10 may be configured to be used for lifting and lowering.

In the state of the present embodiment, each of the lifting and lowering devices 80 is disposed on both sides in the Y direction in which the storage cassettes 70 face each other in a state in which the storage cassettes 70 are interposed therebetween, and each of the lifting and lowering devices 80 supports the storage cassette 70 by cantilever support. . According to this configuration, the lifting device 80 can be made thinner.

The lifting device 80 is provided with a crossbar member 81 on which the bottom beam member 72 of the storage cassette 70 can be placed. Each of the crossbar members 81 of each of the lifting and lowering devices 80 moves the lifting and receiving cassette 70 in the Z direction in synchronization. The lifting device 80 includes a driving device (not shown), and the traveling device lifts and lowers the rail member 81 to lift and store the cassette 70. A beam member 80a is placed between the lifting devices 80 at the upper end of the pillar.

FIG. 7 is a lifting operation diagram of the lifting device 80 lifting and storing the cassette 70 when the glass substrate W is carried out from the storage cassette 70. In addition, the figure is omitted in the figure. Drop device 80. When the glass substrate W is carried out from the storage cassette 70, the glass substrate W is sequentially carried out from the glass substrate W accommodated in the lowest notch among the notches in which the glass substrate W is accommodated.

First, as shown in the upper left diagram of Fig. 7, the storage cassette 70 is lowered by the elevating device 80 (not shown in Fig. 7) from the state in which the storage cassette 70 is positioned above the transport device 5, as shown in the upper right diagram of Fig. 7. The glass substrate W to be transported is placed on the transport device 5. At this time, the transport device 5 enters the storage cassette 70 from below, and the glass substrate W to be transported is in a state of being floated from the wire 73 of the storage cassette 70, and is supported only by the transport device 5. Next, the conveyance device 5 is driven, and as shown in the lower left diagram of FIG. 7, the glass substrate W to be conveyed is carried out from the storage cassette 70. In the same manner, in the same manner, the lowering of the cassette 70 and the driving of the transport device 5 (the lower right diagram of Fig. 7) are carried out, and the glass substrate W is sequentially carried out from the lower side.

When the glass substrate W is carried into the storage cassette 70, an operation substantially opposite to that at the time of carrying out is taken. The loading of the glass substrate W is carried out in order from the uppermost slot of the notch in which the glass substrate W is not accommodated.

<Control device>

Fig. 8 is a block diagram showing the configuration of a control device 200 of the substrate transfer device A. The control device (control means) 200 includes a CPU 201 that can perform overall control of the substrate transfer device A, a RAM 202 for storing data such as variable data while providing a working area of the CPU 201, and a fixed data memory such as a control program and control data. ROM 203. For RAM202, The ROM 203 can also employ other memory means.

The input interface (I/F) 204 is an interface belonging to the CPU 201 and various sensors (for example, the sensor 63, etc.), and the CPU 201 obtains detection results of various sensors through the input I/F. The output interface (I/F) 205 is an interface belonging to the CPU 201 and various motors (for example, the motor 58a, the motor in the drive box 62, and the control valve (the control valve for the substrate holding unit 34 and the lifting unit 40), and the CPU 201 is Various motors and control valves are controlled through an output (I/F) 205.

The communication interface (I/F) 206 is an interface belonging to the host computer 300 and the CPU 201 for controlling the entire substrate processing apparatus including the substrate transport apparatus A, and the CPU 201 controls the board transport apparatus A based on a command from the host computer 300.

<Example of Glass Substrate Transfer of Substrate Transfer Device A>

Next, a glass substrate transport example of the substrate transfer device A will be described with reference to FIGS. 9 to 16 . In the present embodiment, as shown in FIG. 9, the storage cassette 70 in which the glass substrate W is housed in the +Y direction is disposed, and the empty storage cassette 70 is disposed in the -Y direction, and the storage cassette 70 is located on the +Y side. The case where the unprocessed glass substrate W is carried to the processing apparatus and the processed glass substrate W is carried by the processing apparatus to the storage cassette 70 located on the -Y side will be described. First, a state in which the unprocessed glass substrate W is carried to the processing apparatus from the storage cassette 70 located on the +Y side will be described with reference to Figs. 10 to 12 .

As shown in Fig. 10, the operation of the conveying device 5 and the lifting device 80 is utilized. One glass substrate W is conveyed from the storage cassette 70 on the +Y side in the X direction. At the same time, the orthogonal conveyance device 1 transports the glass substrate W conveyed from the storage cassette 70 to the +X side by the operation of the first conveyance unit 11 of the first conveyance device 10, and the glass substrate W is positioned in the orthogonal conveyance device. The position of 1 in the X direction is approximately the center. At this time, the support unit 30 is placed at the lowered position, and is located at a position directly below the conveyed glass substrate W. The abutment member 35 of the substrate holding unit 34 is located at the retracted position.

Whether or not the support unit 30 is located directly below the glass substrate W is basically such that the support unit 30 is positioned at a predetermined position so that the support unit 30 is located directly under the glass substrate W. However, the glass substrate W may be detected by the sensor for detecting the glass substrate W in the support unit 30, thereby controlling the position of the support unit 30.

Next, the support unit 30 is moved to the raised position by the lifting unit 40, so that the glass substrate W can be supported by the support unit 30 instead of the first conveying device 10. Next, the glass substrate W is held by the movement of the substrate holding unit 34 so that the contact member 35 is moved to the abutting position.

Next, as shown in Fig. 11, the support unit 30 is moved in the -Y direction by the operation of the drive unit 50, and the glass substrate W is moved to the position on the -X side of the transport device 3. The movement of the glass substrate W causes the orthogonal conveyance device 1 to vacate the area on the side of the storage cassette 70 on the +Y side. Therefore, the second glass substrate W can be carried out from the storage cassette 70 on the +Y side.

Next, the abutment member 35 of the substrate holding unit 35 is placed at the retracted position, and the support unit 30 is moved to the lowered position. In this way, the first glass substrate W can be placed on the first conveying device 10 again. Then, like As shown in Fig. 12, the first sheet glass substrate W is conveyed in the +X direction by the first conveying device 10 and the conveying device 3, and the first sheet glass substrate W is transferred to the conveying device 4. The conveying device 4 carries the first glass substrate W to the processing device.

At the same time, the support unit 30 is moved in the +Y direction by the action of the drive unit 50, and the support unit 30 is positioned directly below the second glass substrate W. In this case, even when the second sheet glass substrate W is carried out from the storage cassette 70 by the first conveyance device 10, the support unit 30 can be placed in the immediately below position of the conveyed glass substrate W (the position of FIG. 9). ), so it can improve handling efficiency. Hereinafter, by repeating the same procedure, the unprocessed glass substrate W can be continuously transported to the processing apparatus from the storage cassette 70 located on the +Y side in order. Since the conveyance of the glass substrate W of the orthogonal conveyance apparatus 1 in the X direction and the Y direction can be performed simultaneously, the conveyance efficiency of the glass substrate W can be improved.

Next, the conveyance state of the processed glass substrate W from the processing apparatus to the storage cassette 70 located on the -Y side will be described with reference to Figs. 13 to 16 .

As shown in Fig. 13, the processed glass substrate W is transferred from the processing device to the transport device 2 by the transport device 4, and the transport device 2 transports the glass substrate W to the orthogonal transport conveyor 1. At the same time, the orthogonal conveyance device 1 is operated by the first conveyance unit 11 of the first conveyance device 10, and conveys the glass substrate W conveyed by the conveyance device 2 to the -X side, and the glass substrate W is placed in the orthogonal conveyance device 1 The approximate central position of the X direction (Fig. 14). At this time, the support unit 30 is placed at the lowered position, and is located directly below the conveyed glass substrate W. Abutment of the substrate holding unit 34 Member 34 is in the retracted position.

Next, the support unit 30 is moved up and down by the elevation unit 40, whereby the glass substrate W is supported by the support unit 30 instead of the first conveyance device 10. Next, the glass substrate W is held by moving the contact member 35 to the abutting position by the operation of the substrate holding unit 34.

Next, in Fig. 15, the support unit 30 is moved in the -Y direction by the operation of the drive unit 50, and the glass substrate W is moved to the +X side position of the -Y side storage cassette 70. The movement of the glass substrate W causes the orthogonal conveying device 1 to vacate the area on the side of the conveying device 2. Therefore, the conveyance device 4 and the second glass substrate W of the conveyance device 2 can be conveyed.

Next, the abutment member 35 of the substrate holding unit 35 is placed at the retracted position, and the support unit 30 is moved to the lowered position. In this way, the first glass substrate W can be placed on the first conveying device 10 again. Then, as shown in FIG. 16, the first sheet glass substrate W is carried into the -Y side storage cassette 70 by the operation of the first conveying device 10, the conveying device 5, and the lifting device 80.

At the same time, the support unit 30 is moved in the +Y direction by the action of the drive unit 50, and the support unit 30 is positioned directly below the second glass substrate W. In this case, even when the second glass substrate W is transported to the first transport device 10 by the transport device 2, the support unit 30 can be placed immediately below the glass substrate W that is transported (the position of FIG. 13). ), so it can improve handling efficiency. Hereinafter, by repeating the same procedure, the processed glass substrate W can be continuously transferred from the processing apparatus to the storage cassette 70 located on the +Y side. Since the conveyance of the glass substrate W of the orthogonal conveyance device 1 in the X direction and the Y direction can be performed simultaneously, it can improve Glass substrate W conveyance efficiency.

As described above, in the present embodiment, since the conveyance in the X direction and the Y direction of the glass substrate W of the orthogonal conveying device 1 can be simultaneously performed, the transportation efficiency of the glass substrate W can be improved. In particular, since it takes a long time for the glass substrate W to be carried into the storage cassette 70 and carried out from the storage cassette 70, the glass substrate W of the orthogonal conveying device 1 is simultaneously executed as in the present embodiment. The transportation in the X direction and the Y direction can shorten the production interval.

Then, since the second conveyance device 20 is disposed below the first conveyance device, it is possible to reduce the size of the entire device. Further, the glass substrate W is lifted and lowered by the elevating unit 40 lifting and lowering support unit 30, and the supporting unit 30 does not need to have a driving mechanism for transporting the glass substrate W itself, as long as it has a function of supporting the glass substrate W from the lower side. Therefore, the support unit 30 can be made lighter. Therefore, it is possible to increase the speed of the glass substrate W, and it is possible to improve the transportation efficiency of the glass substrate W.

Further, since the support unit 30 can be made lighter, the support unit 30 can be moved in the Y direction at a higher speed, and the efficiency of transporting the glass substrate W can be further improved. In addition, since the transport distance of the glass substrate W in the Y direction is defined by the total length of the drive unit 50 in the Y direction, the transport distance can be lengthened or shortened, and the plane arrangement degree of the apparatus can be improved. .

Further, since the transport devices 2, 3, and 5 can be disposed on the +X side and the -X side of the orthogonal transport device 1, the glass substrate W can be transferred between the transport device and the orthogonal transport device 1, and thus the device Plane Increased freedom. Further, the second transport unit 21 can be stopped at an arbitrary position in the Y direction of the first transport unit 11. Further, the first transport unit 11 is constituted by a plurality of roller transport units 60 that can be independently driven. As described above, when the transport device 5 is disposed and connected to the side of the orthogonal transport device 1 in the X direction, the connection position in the Y direction is selectively increased. Therefore, the degree of freedom in the plane configuration of the device can be further improved.

In the present embodiment, each of the roller transport units 60 of the first transport unit 11 is disposed at substantially equal intervals in the Y direction, but the present invention is not limited thereto. The roller transport unit 60 may be located at least at the side of the transport devices 2, 3, and 5 disposed on the side of the orthogonal transport device 1.

1‧‧‧Orthogonal handling device

2‧‧‧Conveyor

3‧‧‧Conveyor

4‧‧‧Transportation device

5‧‧‧Conveyor

10‧‧‧1st handling device

11‧‧‧1st handling unit

20‧‧‧2nd handling device

21‧‧‧2nd handling unit

30‧‧‧Support unit

31‧‧‧Support members

32‧‧‧Roller

33‧‧‧ bracket

34‧‧‧Substrate holding unit

35‧‧‧Abutment components

36‧‧‧Mobile unit

36a‧‧‧ Body Department

36b‧‧‧ Activities Department

37‧‧‧Caps

371‧‧‧ notch

40‧‧‧ Lifting unit

41‧‧‧ Activities Department

42‧‧‧ Body Department

50‧‧‧ drive unit

51‧‧‧Support board

52‧‧‧Sliding members

53‧‧‧ Track members

53a‧‧‧End members

54‧‧‧Axis

54a‧‧‧ bearing

55‧‧‧ Pulley

56‧‧‧Land

57‧‧‧Cover components

57a‧‧‧Attracting means of exhaust

58‧‧‧ drive source

58a‧‧‧Motor

58b‧‧‧Reducer

60‧‧‧Roller conveyor unit

61‧‧‧roll

62‧‧‧ drive box

63‧‧‧ Sensors

70‧‧‧ Storage box

71‧‧‧column components

72‧‧‧beam components

73‧‧‧Steel wire

80‧‧‧ lifting device

80a‧‧‧beam components

81‧‧‧cross member

200‧‧‧Control device

201‧‧‧CPU

202‧‧‧RAM

203‧‧‧ROM

204‧‧‧Input interface

205‧‧‧ Output interface

206‧‧‧Communication interface

300‧‧‧Main computer

500‧‧‧ 台台

501‧‧‧The platform body

502‧‧‧ feet

601‧‧ ‧foot

A‧‧‧Substrate handling device

S1‧‧‧ space

S2‧‧‧ space

W‧‧‧ glass substrate

Fig. 1 is a plan view showing a substrate transfer device A according to an embodiment of the present invention.

Fig. 2 is a cross-sectional explanatory view showing the structure of the orthogonal conveying device 1 taken along the line I-I of Fig. 1.

Fig. 3 is a cross-sectional explanatory view showing the structure of the orthogonal conveying device 1 taken along the line II-II of Fig. 1.

Fig. 4 is a perspective view of the second transport unit 21.

FIG. 5 is an operation explanatory view of the substrate holding unit 34.

Fig. 6 is a perspective view of the storage cassette 70.

Fig. 7 is an operation explanatory view when the glass substrate W is carried out from the storage cassette 70.

Fig. 8 is a block diagram of a control device 200 of the substrate transfer device A.

Fig. 9 is an operation explanatory view of the substrate transfer device A.

Fig. 10 is an operation explanatory view of the substrate transfer device A.

Fig. 11 is an operation explanatory view of the substrate transfer device A.

Fig. 12 is an explanatory view of the operation of the substrate transfer device A.

Fig. 13 is an operation explanatory view of the substrate transfer device A.

Fig. 14 is an operation explanatory view of the substrate transfer device A.

Fig. 15 is an explanatory view of the operation of the substrate transfer device A.

Fig. 16 is an operation explanatory view of the substrate transfer device A.

1‧‧‧Orthogonal handling device

11‧‧‧1st handling unit

20‧‧‧2nd handling device

21‧‧‧2nd handling unit

30‧‧‧Support unit

31‧‧‧Support members

32‧‧‧Roller

33‧‧‧ bracket

40‧‧‧ Lifting unit

50‧‧‧ drive unit

51‧‧‧Support board

52‧‧‧Sliding members

53‧‧‧ Track members

54‧‧‧Axis

55‧‧‧ Pulley

56‧‧‧Land

57‧‧‧Cover components

58‧‧‧ drive source

60‧‧‧Roller conveyor unit

61‧‧‧roll

500‧‧‧ 台台

501‧‧‧The platform body

502‧‧‧ feet

601‧‧ ‧foot

S1‧‧‧ space

S2‧‧‧ space

W‧‧‧ glass substrate

Claims (10)

A substrate transporting apparatus comprising: a first transporting means capable of supporting a substrate from a lower side thereof and horizontally transporting the first transporting direction; and the substrate on the first transporting means The second conveyance means that supports the horizontal conveyance in the second conveyance direction in the direction orthogonal to the first conveyance direction, the first conveyance means is the first conveyance in a plurality of rows spaced apart from each other in the first conveyance direction In the second transport means, the second transport means is formed by a plurality of second transport units that are spaced apart from each other in the first transport direction, and each of the second transport units is disposed between the first transport units. a gap, a support unit for supporting the substrate from the lower side thereof; disposed under the support unit and connected to the support unit, wherein the support unit can be lifted and lowered on the first transport unit by the support unit The rising position of the substrate from the first transport unit and the support unit do not interfere with the lowering of the substrate on the first transport unit a lifting unit between the positions; and a driving unit that is disposed at a position lower than the first conveying unit and that reciprocates the support unit and the lifting unit in the second conveying direction; and is provided in the supporting unit a pair of substrate holding units disposed in the second conveyance direction with a space therebetween, wherein the pair of substrate holding units each include: An abutting member for abutting the edge of the substrate; and a moving unit capable of reciprocating the abutting member in the second conveying direction; and abutting each of the moving units of the pair of substrate holding units The members are moved toward each other to maintain the above substrate. The substrate transfer device according to claim 1, wherein the first transport unit is provided with a plurality of roller transport units that can be independently driven. The substrate transfer device according to the first aspect of the invention, wherein the support unit includes: a support member that extends in the second conveyance direction; and is provided in the second conveyance direction at a plurality of intervals, and is capable of abutting The lower surface of the substrate is rotatably supported by the roller of the support member via a bracket supporting a shaft parallel to the direction orthogonal to the second conveyance direction. The substrate transfer device according to the first aspect of the invention, wherein the drive unit includes: a rail member extending in the second conveyance direction; and the rail member is slidably movable along the rail member to mount the lift The slider of the unit. The substrate transfer device according to claim 4, wherein the drive unit includes a pair of pulleys that are spaced apart from each other in the second conveyance direction, and are coupled to the slider while being wound around the pair of pulleys Belt a pair of shafts that respectively rotate and drive the pair of pulleys in the first conveyance direction; and a drive source for one of the pair of shafts to be rotationally driven, and one of the pair of shafts of each of the drive units Each of the shaft and the other shaft are connected to each other, and one of the above-mentioned driving sources is connected to the one shaft. The substrate transfer device according to claim 5, wherein the substrate member further includes a cover member that surrounds the rail member and the slider and the pair of pulleys and the belt. The substrate transfer device according to the first aspect of the invention, further comprising: the first conveyance means disposed on the side of the first conveyance direction, wherein the substrate can be supported from the lower side of the substrate to perform the first conveyance The third conveyance means for conveying the substrate between the first conveyance means and the first conveyance means. The substrate transfer device according to the seventh aspect of the invention, further comprising: a lifting device that is disposed above the third conveying means and has an opening into which the third conveying means can enter In the vertical direction, a plurality of storage cassettes having the above-described substrate horizontal posture storage notches are provided, and the third conveyance means is moved up and down. The substrate transfer device according to the first aspect of the invention, wherein the substrate conveyance device is disposed on the other side of the first conveyance means in the first conveyance direction, and the substrate is supported from the lower side of the substrate. The first conveyance direction is conveyed horizontally, whereby the third conveyance means for conveying the substrate between the first conveyance means and the first conveyance means; The other side of the first conveyance means is disposed on the other side of the first conveyance direction, and the substrate is supported by the lower side of the substrate to perform horizontal conveyance in the first conveyance direction, thereby being between the first conveyance means and the first conveyance means The fourth transport means for transporting the substrate. The substrate transfer device according to the first aspect of the invention, wherein the length of the support unit in the second conveyance direction is longer than a width of the substrate.