KR20130017443A - Substrate coating apparatus, substrate conveyance apparatus having the function for floating the surface and the method of conveying floating the substrate - Google Patents
Substrate coating apparatus, substrate conveyance apparatus having the function for floating the surface and the method of conveying floating the substrate Download PDFInfo
- Publication number
- KR20130017443A KR20130017443A KR1020110079854A KR20110079854A KR20130017443A KR 20130017443 A KR20130017443 A KR 20130017443A KR 1020110079854 A KR1020110079854 A KR 1020110079854A KR 20110079854 A KR20110079854 A KR 20110079854A KR 20130017443 A KR20130017443 A KR 20130017443A
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- South Korea
- Prior art keywords
- substrate
- stage
- conveying
- floating
- unit
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
- B65G23/02—Belt- or chain-engaging elements
- B65G23/18—Suction or magnetic elements
- B65G23/19—Suction elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Coating Apparatus (AREA)
Abstract
Description
Embodiments of the present invention relate to a substrate applying apparatus, a floating substrate conveying apparatus and a substrate conveying method, and more particularly, to a floating substrate conveying apparatus and a substrate conveying method for lifting and conveying a substrate.
LCDs have advantages of small size, thinness, and low power consumption, and are used in notebook PCs, office automation devices, and audio / video devices. In particular, an active matrix type liquid crystal display device using a thin film transistor (hereinafter referred to as "TFT") as a switching element is suitable for displaying dynamic images.
The liquid crystal display device includes a backlight unit, a liquid crystal panel, and a driving circuit unit, and a backlight unit is disposed on a rear surface of the liquid crystal panel in which upper and lower substrates interpose liquid crystal, and a driving circuit unit for controlling each of the liquid crystal panel and the backlight unit. The module is installed and completed.
The manufacturing process of the liquid crystal display device may be divided into three processes, a substrate manufacturing process, a liquid crystal cell manufacturing process, and a module process.
In particular, the substrate manufacturing process of the liquid crystal display device is similar to the silicon semiconductor manufacturing process, and is made of unit processes such as photolithography, etching, and cleaning to pattern thin films deposited on the substrate. In this unit process, a plurality of repetitive operations are required depending on the formation of the thin film.
In this case, the substrate is not only to be safely transported for each photo, etching, cleaning and deposition, but also the etching and cleaning process may be performed simultaneously with the conveyance to increase the efficiency of the process during the etching and cleaning process.
Therefore, such a substrate transfer device is an indispensable device in the liquid crystal display device manufacturing process.
1 is a schematic perspective view showing a conventional floating substrate transport apparatus.
The floating substrate conveying apparatus includes a plurality of
And the floating substrate conveying apparatus is disposed above the
At this time, the
In addition, a means for floating by using a conveyor belt or air is formed on the
Here, the
And the said board |
In addition, the
On the other hand, the
Next, operation | movement of the floating board | substrate conveying apparatus comprised as mentioned above is demonstrated.
First, when the board |
The conveying arm then retracts outward from the
Next, the board |
At this time, the
Then, the
On the other hand, the operation of the floating substrate conveying device is a guide rail after loading (loading) one
At this time, since the
Therefore, this has the problem of increasing the time spent on making one product (tact time).
In addition, there was a problem with the coating liquid at the discharge portion of the nozzle, which will be described with reference to the drawings.
Figure 2 shows a cross-sectional view of the nozzle and the coating liquid when the coating liquid is not applied to the substrate.
During the delay, the
This result may prevent the
Accordingly, in order to solve the above problem, embodiments of the present invention have an object to achieve a reduction in tack time by alternately conveying the substrate from one of two axes to one axis of the substrate.
In order to achieve such a problem of the present invention, the floating substrate conveying apparatus according to an embodiment of the present invention is a predetermined number of substrates by discharging and sucking air through a plurality of discharge holes and suction holes formed on the upper surface. A stage to rise to a height; Guide rails disposed along the longitudinal direction of the stage at both sides of the stage; And a first conveying unit and a second conveying unit for fixing each of the plurality of substrates from different sides to convey along the guide rails, wherein the first and second conveying units alternately convey the substrates. It is characterized by.
Preferably, the upper surface of the stage is divided into two sides corresponding to the guide rail and a central region except for both sides, the central region includes a plurality of discharge holes and suction holes, and both sides of the stage are discharge holes. Characterized in that it comprises a.
In addition, the discharge holes distributed on both sides of the upper surface of the stage is characterized in that formed in a plurality of rows.
In addition, the first conveying unit and the second conveying unit are each characterized in that after unloading one substrate to move to the original position on the same guide rail to convey another substrate.
The first and second conveying units may each include a slider, a height adjusting means, and a substrate fixing member provided on an upper surface of the height adjusting means, and the height adjusting means and the substrate fixing member are at least one of an upper surface or a side surface of the slider. Characterized in that is formed.
The substrate fixing member may include an adsorption unit for adsorbing the vacuum on the lower surface of the substrate and a clamp for pressing and fixing the substrate to a region overlapping with the adsorption unit on the upper surface of the substrate.
On the other hand, the floating substrate conveying method according to another embodiment of the present invention is a stage in which the discharge hole and the suction hole for discharging and suctioning air is formed on the upper surface, disposed on both sides of the stage along the longitudinal direction of the stage Providing a floating substrate conveying device comprising two guide rails, a first conveying unit and a second conveying unit disposed on different guide rails of the two guide rails; Loading a substrate onto a stage of the substrate transfer device; Floating the loaded substrate on the stage through the discharge hole and the suction hole; Fixing one side of the substrate via the first conveying unit; Conveying the substrate along the guide rail by a first conveying unit; And after another substrate is loaded on the stage, fixing the another substrate to a second conveying unit disposed on the other side of the first conveying unit and conveying the substrate apart from the substrate of the first conveying unit. It is characterized by.
Preferably, after the substrates of the first and second conveying units are unloaded, the first and second conveying units move horizontally on the same guide rail to fix and convey another loaded substrate; Characterized in that it further comprises.
In addition, the step of floating the substrate, the upper surface of the stage is divided into a central region except the both sides and the both sides corresponding to the guide rail, the central region includes a plurality of discharge holes and suction holes, Both side surfaces include discharge holes, and the air is discharged and sucked under the central area of the substrate, and the air is floated by discharging the air under the both side surfaces of the substrate.
In addition, the step of floating the substrate further comprises a vacuum suction hole in one region of the stage, it characterized in that to adjust the height of the substrate.
The first and second conveying units may be configured to fix the substrate by using an adsorption unit for adsorbing vacuum on the lower surface of the substrate and a clamp for pressing the substrate in an area overlapping with the adsorption unit of the substrate. It features.
On the other hand, the substrate coating apparatus according to another embodiment of the present invention includes a stage for causing a plurality of substrates to be raised to a predetermined height by ejecting and sucking air through a plurality of discharge holes and suction holes formed on the upper surface; A guide rail disposed along a longitudinal direction of the stage from a side surface; A first conveying unit and a second conveying unit which fix each of the plurality of substrates from different sides to convey along the guide rail; And a nozzle for applying a coating liquid to the substrate that is disposed and conveyed in one area of the upper surface of the stage, wherein the first and second conveying units alternately convey the substrate from the lower surface of the nozzle to convey the substrate. It is characterized in that the coating continuously.
In the substrate applying apparatus, the floating substrate conveying apparatus, and the floating substrate conveying method according to at least one embodiment of the present invention configured as described above, by changing the conveying unit to one axis,
This has the effect of reducing the Tact Time.
Also. There is an effect of preventing contamination of the coating liquid in the discharge portion of the nozzle.
In addition, there is an effect of reducing the loss of the substrate as a large amount of substrate is provided in a short time.
Further, by preventing contamination of the coating liquid generated at the discharge portion of the nozzle and reducing the tack time, there is an effect of increasing the process yield of the substrate.
1 is a schematic perspective view showing a conventional floating substrate transport apparatus.
Figure 2 shows a cross-sectional view of the nozzle and the coating liquid when the coating liquid is not applied to the substrate.
3A is a schematic perspective view of a floating substrate conveying apparatus according to an embodiment of the present invention.
Figure 3b shows a front side view of a floating substrate transfer apparatus according to an embodiment of the present invention.
3C is a right side view of the floating substrate conveying apparatus according to an embodiment of the present invention.
4A shows a cross-sectional view of a conveying unit according to an embodiment of the present invention.
It is sectional drawing which shows the support pin and the adsorption part of a conveyance unit.
5A is a side cross-sectional view illustrating a process of transferring a substrate on a stage.
Fig. 5B shows a cross sectional view of the discharge hole and the suction hole formed in the stage in the loading and unloading areas.
Fig. 5C shows a cross-sectional view of the discharge hole and the vacuum suction hole formed in the stage in the application area.
6 is a plan view of the stage as viewed from the top.
7 is a partial cross-sectional view of the floating substrate conveying apparatus according to one embodiment of the present invention.
8A to 8D are plan views illustrating a method of transporting a substrate by a floating substrate transport apparatus according to an embodiment of the present invention.
EMBODIMENT OF THE INVENTION Hereinafter, the board | substrate coating apparatus, the floating board | substrate conveying apparatus, and the floating board | substrate conveying method which concern on the Example of this invention are demonstrated in detail with reference to drawings.
In the present specification, the same or similar reference numerals are given to different embodiments in the same or similar configurations.
As used herein, the singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise.
Figure 3a is a schematic perspective view of a floating substrate transfer apparatus according to an embodiment of the present invention, Figure 3b is a front side view of a floating substrate transfer apparatus according to an embodiment of the present invention, Figure 3c is a The right side view of the floating substrate conveyance apparatus which concerns on one Example is shown.
As shown in FIG. 3A, the floating substrate conveying apparatus according to an embodiment of the present invention includes a
In the following description, as shown to FIG. 3A, the extending direction of the upper surface of the
In the figure, the coating apparatus is located in the vertical direction Z on the upper surface of the floating substrate conveying apparatus. The coating device includes a
The
In addition, the
However, one embodiment of the present invention is not limited to the type of the
The
Here, a plurality of lift pins 160 for loading and unloading the
And the width of the air
The air
The air
On the other hand, the pair of
A guide
Moreover, the
In this case, the first and
In other words, the operation manner of the conveying
In FIG. 3B, it can be seen that the
In this case, the floating of the
And when the
Here, the conveying
That is, the conveying
In FIG. 3C, the plurality of
However, the exemplary embodiment of the present invention is not limited thereto, and the
The conveying
One
At this time, the number of arrangement of the
Although not shown in the drawings, a linear motor (not shown) may be disposed on one side of the
In the floating substrate conveying apparatus according to an embodiment of the present invention, since the conveying
Figure 4a is a cross-sectional view of the conveying unit according to an embodiment of the present invention and Figure 4b is a cross-sectional view showing the support pin and the suction portion of the conveying unit.
Four
As shown in FIGS. 4A and 4B, the
The
And the
In this case, a stopper (not shown) and a speed controller (not shown) may be further configured to adjust the speed of the
As shown in FIG. 4B, the
The
The
In addition, a height adjusting means 340 is formed at a lower portion of the
The height adjusting means 340 may include a
In addition, the height adjustment means 340 may form a
Here, the operation principle and the steps of conveying the substrate by discharging and sucking air in the stage will be described in detail with reference to the drawings.
FIG. 5A is a side cross-sectional view illustrating a process of transferring a substrate on a stage, and FIG. 5B is a cross-sectional view of a discharge hole and a suction hole formed in the stage in the loading and unloading region, and FIG. The cross section of a vacuum suction hole is shown.
In FIG. 5A, the arrow indicates the advancing direction of the substrate.
First, the
The
In the application area, a large number of discharge holes and vacuum suction holes are provided in a zigzag shape on the surface of the
As the
Moreover, the connection area | region which connects the gap of a height between both is provided between the carry-in area | region and an application | coating area | region, and between an application | coating area and a carrying area | region, respectively.
In these connection regions, a plurality of jetting holes and suction holes are provided, and the
In the carrying out area, the
The
In the carry-in area and the carry-out area on the
In the connection area and the application area, the
Since an air pressure smaller than atmospheric pressure is formed in the
6 is a plan view of the stage as viewed from the top. 6 in the above
The disposition of the discharge hole and the suction hole (or the vacuum suction hole) formed in the sheet was shown.
The edge portion of the
However, the arrangement of the
In this case, when a surface facing the first axis on which a transfer unit is disposed on one substrate is referred to as a first side surface, a surface facing the second axis on which the transfer unit is not arranged is referred to as a second side surface. In this case, only the discharge holes 171 are formed in both rows on both side surfaces 180 of the
In one embodiment of the invention the substrate is lifted by air and the conveying unit is only responsible for conveying the substrate. However, when the conveying unit plays a role of fixing on the first side of the substrate, there is a possibility that there is no fixture on the second side of the substrate, so that the second side region of the substrate may bend down. Therefore, in order to prevent this, only the
The reason for forming the discharge holes 171 on both
Therefore, only the discharge holes 171 are formed in both side surfaces 180 on the
7 is a partial cross-sectional view of the floating substrate conveying apparatus according to one embodiment of the present invention.
Here, the solid arrow indicates the discharge direction of the air and the dotted arrow indicates the suction direction of the air. One side of the
Here, the floating force caused by air on one side of the
8A to 8D are plan views illustrating a method of transporting a substrate by a floating substrate transport apparatus according to an embodiment of the present invention.
In the drawing, the
In FIG. 8A, the
After the lift pin (not shown) receives the
In this case, the floating height of the
In this case, an alignment unit (not shown) for aligning the
The first conveying
Thereafter, as shown in FIG. 8B, the first conveying
At this time, vacuum suction holes are formed in the connection region and the application region. remind
The vacuum suction hole serves to lift the
At this time, the floating height of the
In this case, the height of the
Since the floating height of the
In this case, a feedback control mechanism including an altitude detection sensor (not shown) that detects the height position of the
In addition, the second conveying
At this time, the structure of the
Here, the warp of the board |
In FIG. 8C, the coating liquid is coated on the
At this time, the
As for the board |
The first conveying
Then, the
Then, the
Floating substrate conveying apparatus and substrate conveying method according to an embodiment of the present invention as described above to operate the conveying unit disposed on the two axes independently, so that the coating liquid coating process of the substrate on one stage As it is made continuously, the tack time can be reduced.
In addition, the continuous coating of the substrate can be performed to remove contamination that may be a problem in the discharge portion of the nozzle. This may improve the yield during the substrate coating process.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments.
Therefore, the scope of the present invention is not limited thereto, and various modifications and improvements of those skilled in the art using the basic concept of the present invention defined in the following claims are also within the scope of the present invention.
100: stage 150: air discharge suction mechanism
200: guide rail 300: conveying unit
310: slider 350: substrate holding member
400: substrate 500: nozzle
Claims (12)
Guide rails disposed along the longitudinal direction of the stage at both sides of the stage; And
And a first conveying unit and a second conveying unit which fix each of the plurality of substrates from different sides to convey along the guide rails.
The first and second conveying units alternately convey the substrates.
The upper surface of the stage is divided into a central region excluding both side surfaces corresponding to the guide rail and the both sides,
The central region includes a plurality of discharge holes and suction holes,
Floating substrate conveying apparatus, characterized in that the both sides include a discharge hole.
Floating substrate conveying apparatus, characterized in that the discharge holes distributed on both sides of the upper surface of the stage is formed of a plurality of rows.
And the first conveying unit and the second conveying unit each unload one substrate and then move to the original position on the same guide rail to convey another substrate.
The first and second conveying units each include a slider, a height adjusting means and a substrate fixing member provided on an upper surface of the height adjusting means, and at least one of the height adjusting means and the substrate fixing member is formed on an upper surface or a side of the slider. Floating substrate conveying apparatus, characterized in that.
The substrate fixing member includes an adsorption unit for adsorbing vacuum on the lower surface of the substrate and a clamp for pressing and fixing the substrate to a region overlapping with the adsorption unit on the upper surface of the substrate. .
Loading a substrate onto a stage of the substrate transfer device;
Floating the loaded substrate on the stage through the discharge hole and the suction hole;
Fixing one side of the substrate via the first conveying unit;
Conveying the substrate along the guide rail by a first conveying unit; And
Fixing another substrate to a second conveying unit disposed on the other side of the first conveying unit and conveying the substrate apart from the substrate of the first conveying unit after another substrate is loaded on the stage;
Floating substrate conveying method comprising a
After the substrates of the first and second conveying units are unloaded, the first and second conveying units move horizontally on the same guide rail to fix and convey another loaded substrate;
Floating substrate transfer method characterized in that it further comprises.
Floating the substrate,
The upper surface of the stage is divided into a central region excluding both side surfaces corresponding to the guide rail and the both sides,
The central area includes a plurality of discharge holes and suction holes, and both sides include discharge holes,
And floating by discharging and sucking air in a lower portion of the center area of the substrate, and by discharging air in lower portions of both sides of the substrate.
The floating of the substrate further includes a vacuum suction hole in one region of the stage, thereby adjusting the floating height of the substrate.
The first and second conveying units may fix the substrate by using an adsorption unit for adsorbing vacuum on the lower surface of the substrate and a clamp for pressing the substrate in an area overlapping with the adsorption unit of the substrate. Floating substrate conveying method.
Guide rails disposed along the longitudinal direction of the stage at both sides of the stage;
A first conveying unit and a second conveying unit which fix each of the plurality of substrates from different sides to convey along the guide rail; And
And a nozzle for applying a coating liquid to the substrate, which is disposed in one area of the upper surface of the stage and is conveyed.
The said 1st and 2nd conveyance unit conveys the said board | substrate alternately from the lower surface of the nozzle, and coat | covers the said board | substrate continuously, The substrate coating apparatus characterized by the above-mentioned.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020110079854A KR20130017443A (en) | 2011-08-10 | 2011-08-10 | Substrate coating apparatus, substrate conveyance apparatus having the function for floating the surface and the method of conveying floating the substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020110079854A KR20130017443A (en) | 2011-08-10 | 2011-08-10 | Substrate coating apparatus, substrate conveyance apparatus having the function for floating the surface and the method of conveying floating the substrate |
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KR20130017443A true KR20130017443A (en) | 2013-02-20 |
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KR1020110079854A KR20130017443A (en) | 2011-08-10 | 2011-08-10 | Substrate coating apparatus, substrate conveyance apparatus having the function for floating the surface and the method of conveying floating the substrate |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101460235B1 (en) * | 2013-12-11 | 2014-11-10 | 강창수 | separation distance keeping type transport device for flexible plate |
KR20160038993A (en) * | 2014-09-30 | 2016-04-08 | 주식회사 제우스 | Multisubstrate processing apparatus |
KR20160038992A (en) * | 2014-09-30 | 2016-04-08 | 주식회사 제우스 | Tabbing apparatus |
KR20160038991A (en) * | 2014-09-30 | 2016-04-08 | 주식회사 제우스 | Tabbing apparatus and controlling method thereof |
CN107814199A (en) * | 2017-10-25 | 2018-03-20 | 郑州旭飞光电科技有限公司 | Airfloat equipment and its airflow guiding device and glass substrate transmission system |
-
2011
- 2011-08-10 KR KR1020110079854A patent/KR20130017443A/en not_active Application Discontinuation
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101460235B1 (en) * | 2013-12-11 | 2014-11-10 | 강창수 | separation distance keeping type transport device for flexible plate |
KR20160038993A (en) * | 2014-09-30 | 2016-04-08 | 주식회사 제우스 | Multisubstrate processing apparatus |
KR20160038992A (en) * | 2014-09-30 | 2016-04-08 | 주식회사 제우스 | Tabbing apparatus |
KR20160038991A (en) * | 2014-09-30 | 2016-04-08 | 주식회사 제우스 | Tabbing apparatus and controlling method thereof |
CN107814199A (en) * | 2017-10-25 | 2018-03-20 | 郑州旭飞光电科技有限公司 | Airfloat equipment and its airflow guiding device and glass substrate transmission system |
CN107814199B (en) * | 2017-10-25 | 2023-11-07 | 日本电气硝子株式会社 | Air floatation device, air flow guiding device thereof and glass substrate conveying system |
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