KR20110020102A - A device for floating substrate, and a substrate transfer device and a coating apparatus having the same - Google Patents

Abstract

PURPOSE: A device for floating a substrate, and a substrate transfer device and a coating apparatus having the same are provided to minimize the deformation of a substrate or damage to the substrate by maintaining the lifting of the substrate in a coating area and an unloading area constant. CONSTITUTION: In a device for floating a substrate, and a substrate transfer device and a coating apparatus having the same, a loading area(276a) comprises a plurality of first air outlets and a plurality of first air inlets. A loading area unit provides a loading area(M1), and a coating domain unit(276b) comprises a plurality of second air outlets and a plurality of second air inlets. The coating domain unit provides a coating domain(M3). An unloading region part(276c) comprises a plurality of third air outlets and a plurality of third air inlets. The unloading region unit provides an unloading domain(M5).

Description

Substrate Floating Unit, A Substrate Transfer Device and A Coating Apparatus Having the Same

The present invention provides a substrate floating unit for applying a coating liquid on top of a flat panel display (hereinafter referred to as "FPD") manufacturing substrate, such as a PDP panel or LCD panel, and transporting a substrate having the same. A device and a coating device. More specifically, the present invention relates to the floating force of the air jets throughout the loading area, the coating area, and the unloading area so that the substrate is transported at a constant height throughout the loading area, the coating area, and the unloading area. A substrate floating unit having a configuration in which a balance between suction forces of an air intake port can be made constant, and a substrate transfer device and a coating device having the same.

In addition, the present invention by uniformly supplying air to achieve a balance between the floating force of the air jet port and the suction force of the air inlet port on the coating area and the unloading area to prevent the staining by coating the coating liquid applied on the substrate to a certain temperature And a substrate transfer device and a coating apparatus including the same.

In general, the manufacture of FPD requires the application of a coating liquid on a work piece, such as a glass substrate (hereinafter referred to as a "substrate"), for which a nozzle dispenser or slit die (hereinafter referred to as nozzle dispenser and A coating apparatus with a slit die collectively referred to as a "nozzle apparatus" is used. Such a coating apparatus performs a coating operation of various coating liquids while positioning a substrate on a stage and moving a nozzle apparatus attached to a gantry in a horizontal direction. Examples of the coating operation of the coating liquid include forming photoresist (PR), black matrix (BM), column space (CS), and the like on the LCD panel substrate when manufacturing the LCD panel. The coating liquid can be applied. In the case of manufacturing a PDP panel, a coating liquid may be applied to form a dielectric, a lower dielectric, and a partition on a PDP panel substrate.

However, in the above-described prior art, a structure in which a nozzle device installed on an upper portion of the substrate and a gantry to which the nozzle device is attached moves on the substrate after placing the substrate on the stage and then moving the stage to the coating position (hereinafter referred to as "nozzle movement"). Method ", which makes the coating device difficult to drive and complicated. More specifically, enormous energy is required for the movement of large, large nozzle devices, gantry and stages. In addition, after the coating liquid is applied, it is necessary to return to the original position and repeat the above-described operation, thereby causing a problem that the efficiency of the coating liquid coating operation is lowered. In addition, the nozzle device and the gantry must be enlarged according to the requirements of the large area FPD. The weight of the oversized gantry amounts to approximately 1 to 2 tons, making it difficult to implement a drive that precisely accelerates or decelerates while moving such a massive gantry.

As a way to solve the problems of the above-described conventional nozzle movement type coating apparatus, the floating substrate transfer apparatus for applying the coating liquid to the surface of the substrate while floating and transporting the substrate through the injection or spraying and suction of air is Proposed.

Figure 1a is a schematic view showing a perspective view of a substrate transfer apparatus and a coating apparatus of the prior art floating method according to the prior art, Figure 1b is a substrate transfer apparatus and the same of the conventional method shown in Figure 1a 1C schematically shows a front view of an application device, and FIG. 1C shows a part of an arrangement pattern of an air outlet port and an air inlet port in a loading area, a coating area, and an unloading area of a prior art floating substrate transfer device. One drawing. The substrate transfer apparatus of the floating method according to the related art shown in FIGS. 1A to 1C and the coating apparatus having the same are, for example, a "coating method and coating apparatus" by Tokyo Electron Co., Ltd. on March 20, 2006. It is disclosed in detail in Japanese Patent Application Laid-Open No. 2007-252971, filed under Japanese Patent Application No. 2006-76815 under the name of the invention, and published on October 4, 2007.

Referring back to Figures 1a to 1c, the coating device 40 according to the prior art is provided with a substrate transfer device 84 of the floating method. The substrate G is transferred onto the loading region of the stage 76 (M1 region in FIG. 1B) by, for example, a transfer arm (not shown). Thereafter, a plurality of lift pins 86 are lifted by the lift device (not shown) provided below the loading region M1 region of the stage 76 to support the substrate G. Subsequently, when the plurality of lift pins 86 are lowered, the substrate G is provided on the suction pad 104 on the support 102 provided on the pair of sliders 98 that are movable on the pair of linear motion guides 96. Is mounted in a vacuum adsorption manner. Only a plurality of air jets 88 are provided on the loading region M1 region. The substrate G, which is bent down by self-weight on the loading region M1 region, floats to a floating height Ha in the range of approximately 250 to 350 μm by air ejected through the air ejection opening 88. In the state, it is conveyed by the floating substrate transfer apparatus 84 onto the coating region (M3 region shown in Fig. 1B) (i.e., in the X direction) via the first interface region (M2 region). An air inlet 90 connected to a vacuum pumping device (not shown) is partially provided in the first interface region M2. When the substrate G enters the first interface region M2 region, the ejection output of the air ejection opening 88 is partially offset by the suction force of the air intake opening 90, so that the floating height of the substrate G gradually decreases. Enter the coating area (M3 area). In the coating area (M3 area), the number of air inlets 90 is provided more than the first interface area (M2 area), so that the substrate G is floated at a coating height Hb of approximately 50 mu m. Feed in the axial direction. In this coating area (M3 area), the nozzle device 78 receives a coating liquid (for example, a resist liquid) through the supply pipe 94 and applies the coating liquid onto the substrate G.

Thereafter, the substrate G coated with the coating liquid is transferred to the second interface region M4 region. Similarly to the first interface region M2 region, the second interface region M4 region is partially provided with an air inlet 90 connected to a vacuum pumping device (not shown) (see FIG. 1A). When the substrate G enters the second interface region M4 region, only part of the ejection output of the air ejection opening 88 is canceled by the suction force of the air intake opening 90, so that the floating height of the substrate G gradually increases. Subsequently, the substrate G enters the unloading region M5 region, and the unloading region M5 region is provided with only a plurality of air jets 88 similarly to the loading region M1 region. Therefore, the board | substrate G is a board | substrate G in the state which floated at the floating height Hc of the range of about 250-350 micrometers by the air which blows out through the some air ejection opening 88 provided in the unloading area | region M5 area | region. ) Is released from the vacuum adsorption provided from the adsorption pad 104. Thereafter, a plurality of lift pins 86 are raised by a lifting device (not shown) provided below the stage 76 of the unloading area M5 area to raise the substrate G, and then the robot arm (not shown). Is transferred to the next process position.

On the other hand, after the nozzle device 78 applies the coating liquid onto the substrate G, the nozzle device 78 should be cleaned as shown in FIG. 1B. For this purpose, the nozzle refresh member 210 is provided separately from the coating device 40 and is movable in the vertical direction (ie, Z direction), the left and right direction (ie, X direction), and the front and rear direction (ie, Y direction). Is conveyed to the lower part of the nozzle apparatus 78, and washing | cleaning is performed. The nozzle refreshing member 210 is a priming device (not shown) for cleaning the nozzle device 78 after the nozzle device 78 applies the coating liquid every time and the nozzle device 78 for example applying the coating liquid 20 times. And a nozzle cleaning member (not shown) for cleaning the nozzle unit 78 afterwards.

The above-mentioned substrate transfer apparatus 84 of the floating method according to the related art and the coating device 40 having the same can solve most of the disadvantages of the coating apparatus of the nozzle moving method in that the substrate G is moved in the floating manner. The advantage that it can be achieved.

However, the above-mentioned floating substrate transfer apparatus 84 and the coating apparatus 40 having the same according to the related art still have the following problems.

1. The arrangement patterns of the air ejection openings and the air intake openings in the loading region, the coating region, and the unloading region are different from each other. do. As a result, a temperature deviation occurs over the entire substrate G, resulting in a difference in thickness (that is, spots) while the coating solution is dried. Such staining causes a defect of the substrate G, which requires the disposal of the expensive substrate, thereby increasing the overall manufacturing cost and manufacturing time.

2. A first interface region (M2 region) exists between the loading region and the coating region, and a second interface region (M4 region) exists between the coating region and the unloading region, so that in the loading region, the coating region and the unloading region, The floating height of the substrate G is different. Such a difference in the height of injury causes a stress on the substrate G. When the substrate G is stressed, a deformation occurs or, in severe cases, an invisible breakage occurs to cause a problem such as a failure of the final product.

3. In addition, when the substrate G is moved, the possibility of a fluctuation due to the difference in the floating height is increased. Thus, while the front end of the substrate G is coated with the coating liquid in the coating area, the rear end of the substrate G is in the first interface area M2 area or while the rear end of the substrate G is coated with the coating liquid in the coating area. Since the front end portion of the substrate G is in the second interface region M4 region, if a vibration occurs due to the difference in the height of the substrate G, the coating liquid may not be applied accurately. In addition, in order to solve this problem, when the first interface region (M2 region) and the second interface region (M4 region) are increased by the length of the substrate G, the size of the entire floating substrate transfer apparatus is increased and the cost is increased. This increases and the problem of low space efficiency arises. This problem becomes more serious as the area of the substrate G becomes larger and higher.

4. In the prior art, since the nozzle refreshing member 210 is provided separately from the application device 40, a separate moving means for moving the nozzle refreshing member 210 for cleaning the nozzle device 78 should be provided. . Therefore, problems such as an increase in the size of the application device 40, complicated operation, and scattering of thinner during cleaning occur.

The present invention is to solve at least one or more of the problems of the prior art described above, a substrate floating unit for applying a coating liquid on the upper portion while floating and transporting the manufacturing substrate, and a substrate transfer apparatus and coating apparatus having the same It is about. More specifically, the present invention relates to the floating force of the air jets throughout the loading area, the coating area, and the unloading area so that the substrate is transported at a constant height throughout the loading area, the coating area, and the unloading area. It is to provide a substrate floating unit having a configuration in which the balance between the suction force of the air intake port can be made constant, and a substrate transfer device and a coating device having the same.

In addition, the present invention by uniformly supplying air to achieve a balance between the floating force of the air jet port and the suction force of the air inlet port on the coating area and the unloading area to prevent the staining by coating the coating liquid applied on the substrate to a certain temperature It is to provide a substrate floating unit capable of, and a substrate transfer device and a coating device having the same.

According to a first aspect of the present invention, there is provided a substrate floating unit comprising: a loading region portion having a plurality of first air ejection openings and a plurality of first air intake openings, the loading region providing a loading region M1; A coating region portion having a plurality of second air ejection openings and a plurality of second air intake openings and providing a coating region M3; And an unloading region portion having a plurality of third air ejection openings and a plurality of third air intake openings, the unloading region portion providing an unloading region M5, wherein the loading region portion is elongated in a direction in which the substrate G travels. Comprising a plurality of floating plate (P) provided spaced apart from each other, the substrate (G) is characterized in that it is maintained at a constant floating height (Hf).

According to a second aspect of the present invention, there is provided a substrate floating unit comprising: a loading area portion having a plurality of first air ejection openings and providing a loading area (M1); A coating area portion having a plurality of second air ejection openings and a plurality of second air intake openings and providing an interface region M2 and a coating region M3; And an unloading region portion having a plurality of third air ejection openings and a plurality of third air intake openings, the unloading region portion providing an unloading region M5, wherein the loading region portion is elongated in a direction in which the substrate G travels. The plurality of second air provided with a plurality of floating plate (P) provided spaced apart from each other, the density of the plurality of second air intake port provided to the interface area (M2) is provided to the coating area (M3) It is smaller than the density of the suction port, and the substrate G maintains a first floating height Ha in the loading area and a second floating height Hf in the coating area and the unloading area. do.

According to a third aspect of the present invention, there is provided a substrate transfer apparatus, comprising: a loading region portion having a plurality of first air ejection openings and a plurality of first air intake openings, the loading region providing a loading region M1; A coating region portion having a plurality of second air ejection openings and a plurality of second air intake openings and providing a coating region M3; And a unloading area portion having a plurality of third air blowing holes and a plurality of third air inlets, the unloading area portion providing an unloading area M5; And a pair of sliders having a support portion and a suction pad on the support portion, the pair of sliders on which the substrate G is mounted in a vacuum suction manner, and a pair of linear motions on which the pair of sliders are movably mounted. And a substrate transfer unit configured as a guide, wherein the loading area is formed of a plurality of floating plates P which are elongated in the direction in which the substrate G travels and are spaced apart from each other. It is characterized in that it is conveyed while maintaining a constant floating height (Hf) by a constant net floating force throughout the loading area (M1), the coating area (M3), and the unloading area (M5). .

According to a fourth aspect of the present invention, there is provided a substrate transfer apparatus, comprising: a loading region portion having a plurality of first air ejection openings and providing a loading region M1; A coating area portion having a plurality of second air minute outlets and a plurality of second air inlets, the interface area providing an interface area M2 and a coating area M3; And a unloading area portion having a plurality of third air blowing holes and a plurality of third air inlets, the unloading area portion providing an unloading area M5; And a pair of sliders having a support portion and a suction pad on the support portion, the pair of sliders on which the substrate G is mounted in a vacuum suction manner, and a pair of linear motions on which the pair of sliders are movably mounted. It includes a substrate transfer unit consisting of a guide, wherein the loading area portion is formed of a plurality of floating plate (P) which is provided to be spaced apart from each other extending in the direction in which the substrate (G) proceeds, the interface area (M2) The density of the plurality of second air inlets provided is less than the density of the plurality of second air inlets provided in the coating area M3, and the substrate G has a first floating height Ha in the loading area. ) And a second floating height Hf in the coating area and the unloading area.

According to a fifth aspect of the present invention, there is provided a coating apparatus, comprising: a loading region portion having a plurality of first air ejection openings and a plurality of first air intake openings, the loading region providing a loading region M1; A coating region portion having a plurality of second air ejection openings and a plurality of second air intake openings and providing a coating region M3; And a unloading area portion having a plurality of third air blowing holes and a plurality of third air inlets, the unloading area portion providing an unloading area M5; A substrate transfer unit which mounts and transfers the substrate G by mounting in a vacuum suction method; A nozzle device provided on the coating area and configured to apply a coating liquid onto the substrate (G); And a gantry on which the nozzle device is mounted, wherein the loading area is formed of a plurality of floating plates P which are elongated in the direction in which the substrate G travels and are spaced apart from each other. Is transported while maintaining a constant floating height Hf by a constant net floating force throughout the loading region M1, the coating region M3, and the unloading region M5. It is done.

According to a sixth aspect of the present invention, there is provided a coating apparatus, comprising: a loading region portion having a plurality of first air ejection openings and a plurality of first air intake openings, the loading region providing a loading region M1; A coating area portion having a plurality of second air ejection openings and a plurality of second air intake openings and providing an interface region M2 and a coating region M3; And a unloading area portion having a plurality of third air blowing holes and a plurality of third air inlets, the unloading area portion providing an unloading area M5; A substrate transfer unit which mounts and transfers the substrate G by mounting in a vacuum suction method; A nozzle device provided on the coating area and configured to apply a coating liquid onto the substrate (G); And a gantry on which the nozzle device is mounted, wherein the loading region is formed of a plurality of floating plates P which are elongated in the direction in which the substrate G travels and are spaced apart from each other, and the interface region M2. The density of the plurality of second air intake ports provided at) is smaller than the density of the plurality of second air intake ports provided at the coating region M3, and the substrate G has a first floating height at the loading region. Maintains (Ha), and maintains the second floating height (Hf) in the coating area and the unloading area.

The following advantages are achieved in the substrate floating unit of the present invention, and a substrate transfer device and a coating device having the same.

1. Balance of flotation force and suction force in the loading area, the coating area, and the entire unloading area or the coating area, and the unloading area, so that the coating liquid is applied onto the substrate G and then the temperature across the substrate G. Since the occurrence of deviation is minimized, the thickness of the coating liquid is dried to minimize the occurrence of the difference in thickness (ie, stain). Therefore, the occurrence of defects in the substrate G is remarkably lowered, thereby reducing the expensive substrate manufacturing cost and manufacturing time.

2. The floating height of the substrate G in the loading area, the coating area, and the entire unloading area or the coating area, and the unloading area is kept constant so that stress (stress) is not applied to the substrate G. Is minimized. Therefore, the possibility of deformation or breakage of the substrate G, or the like, and the defective rate of the final product are significantly reduced.

3. When the substrate G is moved, there is no possibility of occurrence of fluctuation due to the difference in the height of the float or it is considerably reduced, so that the precise coating of the coating liquid is possible.

4. When the nozzle refreshing member is provided under the substrate floating unit, a separate moving means or the like for moving the nozzle refreshing member is unnecessary, so that the size of the coating device is reduced, operation is simplified, and thinner during cleaning. ) Is prevented from scattering.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

Hereinafter, the present invention will be described in detail with reference to embodiments and drawings.

Figure 2a is a plan view of a substrate floating unit, a substrate transfer apparatus and a coating apparatus having the same according to an embodiment of the present invention, Figure 2b is a substrate floating unit, and a substrate transfer having the same according to an embodiment of the present invention 2C is a left side view of a substrate floating unit and a substrate transfer device and a coating apparatus having the same according to an embodiment of the present invention, and FIG. 2D is an embodiment of the present invention. FIG. 2E is a schematic plan view of a substrate floating unit according to a first embodiment of the present invention, and a floating force and an air suction port of an air jet port according to a first embodiment of the present invention. Is a front view schematically showing a constant balance between the suction forces of FIG. 2F shows the arrangement of the air jet port and the air suction port of the substrate floating unit according to the first embodiment of the present invention; It is a schematic plan view illustrating the air supply unit and the vacuum pumping unit.

First embodiment of the substrate floating unit

2A to 2F, the substrate floating unit 276 according to the first embodiment of the present invention includes a loading area portion 276a providing a loading area M1 and a coating area providing a coating area M3. Section 276b, and an unloading region portion 276c providing an unloading region M5. The loading region 276a extends in the direction in which the substrate G travels and includes a plurality of floating plates P spaced apart from each other. In the embodiment of FIG. 2E, the coating area 276b is made of one rectangular plate and the unloading area 276c is made of one square plate, but the scope of the present invention is limited thereto. It is not. Unlike the coating area 276b and the unloading area 276c, the loading area 276a is composed of a plurality of floating plates P provided spaced apart from each other, so that there is a space S. In this separation space S, a part of the plurality of substrate centering units 260, which are components of the coating apparatus 240, and a plurality of gap sensors 262 (see FIG. 2I to be described later) are located. Can be.

Meanwhile, referring to FIG. 2F, in the substrate floating unit 276 according to the first embodiment of the present invention, the loading area 276a includes a plurality of first air blowing holes 288a and a plurality of first air inlets 290a. ), The coating area portion 276b includes a plurality of second air blowing holes 288b and a plurality of second air intake ports 290b, and the unloading area portion 276c includes a plurality of third air blowing holes ( 288c) and a plurality of third air intake ports 290c (see FIG. 2F). The plurality of first air blowers 288a are connected to the air supply unit 250 through a first air supply regulator 250a, and the plurality of second air blowers 288b are connected to the second air supply regulator 250b. The air supply unit 250 is connected to each other, and the plurality of third air jet ports 288c are connected to the air supply unit 250 through the third air supply regulator 250c. In addition, the plurality of first air inlets 290a is connected to the vacuum pumping unit 254 through the first vacuum regulator 254a, and the plurality of second air inlets 290b are connected through the second vacuum regulator 254b. It is connected to the vacuum pumping unit 254, the plurality of third air inlet 290c is connected to the vacuum pumping unit 254 through the third vacuum regulator 254c. Here, the first to third air supply regulators 250a, 250b, and 250c respectively adjust the amount of air flowing into the plurality of first to third air ejection ports 288a, 288b, and 288c from the air supply unit 250. Thus, the floating force provided in the lower portion of the substrate G throughout the loading region M1, the coating region M3, and the unloading region M5 can be constantly provided (see FIG. 2E). In addition, the first to third vacuum regulators 254a, 254b, and 254c respectively adjust the amount of air sucked into the plurality of first to third air inlets 290a, 290b, and 290c from the vacuum pumping unit 250. The suction force provided at the bottom of the substrate G may be constantly provided throughout the loading region M1, the coating region M3, and the unloading region M5 (see FIG. 2E). As shown in FIG. 2E, the floating force is indicated by a solid upward arrow, the suction force is indicated by a downward dotted arrow, and the floating force has a value greater than the suction force. In this case, the net floating force (ie, the difference between the floating force and the suction force) maintains the substrate G at a constant floating height Hf in the range of approximately 40 to 50 μm on the substrate floating unit 276. It is controlled to have a possible value. The coating gap Hc between the nozzle device 278 and the substrate G maintains a constant height of about 100 μm. In the embodiment of FIG. 2E, the float height Hf is shown to be greater than the coating gap Hc for convenience of description, but in reality the float height Hf has a lower height than the coating gap Hc. Please note that.

In addition, in the embodiment of FIG. 2F, the density per unit area of the plurality of second air blowing holes 288b and the plurality of second air inlets 290b on the coating area portion 276b and the plurality of third of the unloading areas M3 are shown. Although the density per unit area of the air jet port 288c and the plurality of third air inlet ports 290c are shown to be different from each other, those skilled in the art will appreciate the plurality of second air jet ports 288b and the plurality of second air in the coating area M3. It is sufficient that the density per unit area of the inlet port 290b and the density per unit area of the plurality of third air inlet ports 288c of the unloading area M5 and the plurality of third air inlet ports 290c can be provided the same. I can understand. In this case, only one of the second and third air supply regulators 250b and 250c is connected to the plurality of second and third air ejecting ports 288b and 288c, respectively, and the second and third vacuum regulators 254b and 254c. It will be fully understood that any one of) may be connected to the plurality of second and third air inlets 290b and 290c, respectively. That is, the coating area 276b consists of one rectangular plate, and the unloading area 276c consists of one square plate, and the coating area 276b and the unloading area 276c have one rectangular plate. It may consist of a plate or one forward plate.

In addition, referring to FIG. 2F, in the region C (dotted region) in which the actual coating is performed in the coating region M3, the plurality of second air ejection openings 288b and the plurality of second air blowing holes 288b provided perpendicularly to the advancing direction of the substrate G are provided. It is preferable that the second air inlet 290b is not provided. If the area C (dashed line area) includes the plurality of second air ejection openings 288b and the plurality of second air intake openings 290b, the coating liquid may include the plurality of second air ejection openings 288b and the plurality of second air intake openings. 290b may be blocked. In this case, although the plurality of clogged second air blowing holes 288b may be removed by the supply of air, there is a disadvantage in that fine foreign matters are generated. In addition, when the plurality of blocked second air inlets 290b uses vacuum pumping to remove the coating liquid, the coating liquid may be introduced into the plurality of second air inlets 290b and cause the substrate floating unit 276 to malfunction.

Therefore, in the region C (dotted region), when the plurality of second air ejection openings 288b and the plurality of second air intake ports 290b which are provided perpendicular to the advancing direction of the substrate G are not provided, the region C ( In the dotted line region, the substrate G does not have a floating force and a suction force. Since the area of the area C (dotted area) is very small compared to the area of the entire substrate G to which the floating force and suction force are applied, the stress on the substrate G generated in the area C (dotted area) (stress: stress: stress) ) Is just a negligible value. On the other hand, in the region C (dashed line region), no floating force and no suction force exist, so that vibration of the substrate G and the like do not occur. Therefore, application of the coating liquid onto the substrate G by the nozzle device 278 can be made very stable. In addition, the coating liquid remaining in the nozzle apparatus 278 after the application of the coating liquid on the substrate G by the nozzle apparatus 278 can be applied onto the region C (dashed line region). In this case, since the area C (dotted area) does not have the plurality of second air blowing holes 288b and the plurality of second air intake ports 290b, cleaning can be easily performed.

Second embodiment of the substrate floating unit

FIG. 2G is a front view schematically showing a schematic plan view of a substrate floating unit according to a second embodiment of the present invention, and a constant balance between the floating force of the air ejection port and the suction force of the air inlet port, and FIG. 2H is a second embodiment of the present invention. It is a top view which shows schematically the arrangement | positioning of the air blower outlet and the air inlet of a board | substrate floating unit, and an air supply unit and a vacuum pumping unit according to an example.

Referring to FIGS. 2G and 2H together with FIGS. 2A to 2F, in the substrate floating unit 276 according to the second embodiment of the present invention, the loading area 276a may include only the plurality of first air ejecting holes 288a. And a substrate floating unit according to the first embodiment of the present invention shown in FIGS. 2E and 2F except that an interface region M2 and a coating region M3 are provided on the coating region portion 276b. 276). Therefore, hereinafter, the substrate floating unit 276 according to the second embodiment of the present invention which is different from the substrate floating unit 276 according to the first embodiment of the present invention shown in FIGS. 2E and 2F will be described. .

Referring again to FIGS. 2G and 2H together with FIGS. 2A to 2F, in the substrate floating unit 276 according to the second embodiment of the present invention, the loading region 276a includes a plurality of first air ejecting holes 288a. With only. The coating area portion 276b is provided with an interface area M2 and a coating area M3. The interface region M2 and the coating region M3 have a plurality of second air inlets 288b and a plurality of second air inlets 290b, but a plurality of second air inlets provided in the interface region M2. It should be noted that the number (or density) of 290b is less than the number (or density) of the plurality of second air inlets 290b provided in the coating area M3. The unloading area portion 276c includes a plurality of third air blowing holes 288c and a plurality of third air intake ports 290c (see FIG. 2H). The plurality of first air blowers 288a are connected to the air supply unit 250 through a first air supply regulator 250a, and the plurality of second air blowers 288b are connected to the second air supply regulator 250b. The air supply unit 250 is connected to each other, and the plurality of third air jet ports 288c are connected to the air supply unit 250 through the third air supply regulator 250c. In addition, the plurality of second air inlets 290b are connected to the vacuum pumping unit 254 through the second vacuum regulator 254b, and the plurality of third air inlets 290c connect the third vacuum regulator 254c. It is connected with the vacuum pumping unit 254 through. Here, the first to third air supply regulators 250a, 250b, and 250c respectively adjust the amount of air flowing into the plurality of first to third air ejection ports 288a, 288b, and 288c from the air supply unit 250. do. In addition, the second and third vacuum regulators 254b and 254c respectively adjust the amount of air sucked into the plurality of second and third air inlets 290b and 290c from the vacuum pumping unit 250. As a result, only the floating force is provided in the loading region 276a so that the substrate G can be transferred to the floating height Ha in the range of approximately 150 to 200 μm. In addition, in the interface region M2 on the coating region 276b, the floating height of the substrate G is lowered by the suction force of the plurality of second air inlets 290b. Thereafter, the floating force and the suction force provided at the lower portion of the substrate G are uniformly provided from the coating region M3 of the coating region portion 276b to the entire unloading region M5 (see FIG. 2G). Accordingly, the difference between the floating force and the suction force from the coating area M3 to the unloading area M5 is such that the substrate G is brought to a constant floating height Hf on the substrate floating unit 276 in the range of approximately 40-50 μm. It is controlled to have a sustainable value.

In addition, in the embodiment of FIG. 2H, the density per unit area of the plurality of second air blowing holes 288b and the plurality of second air inlets 290b of the coating area M3 and the plurality of third air of the unloading area M5 are shown. Although the density per unit area of the jet 288c and the plurality of third air inlets 290c are shown to be different from each other, those skilled in the art will appreciate that the plurality of second air jets 288b and the plurality of second air inlets of the coating area M3 will be different. It can be sufficiently understood that the density per unit area of 290b and the density per unit area of the plurality of third air blowing holes 288c and the plurality of third air inlets 290c of the unloading area M5 can be provided the same. There will be. In this case, only one of the second and third air supply regulators 250b and 250c is connected to the plurality of second and third air ejecting ports 288b and 288c, respectively, and the second and third vacuum regulators 254b and 254c. It will be fully understood that any one of) may be connected to the plurality of second and third air inlets 290b and 290c, respectively.

First embodiment of substrate transfer apparatus and coating apparatus

Referring to FIG. 2A, the substrate transfer apparatus 284 according to the first embodiment of the present invention includes the substrate floating unit 276 of the present invention shown in FIGS. 2E and 2F. Here, the substrate transfer apparatus 284 according to an embodiment of the present invention is substantially the same as the substrate transfer apparatus 84 of the conventional method shown in FIG. 1A except for the substrate floatation unit 276. .

More specifically, referring to FIG. 2A in conjunction with FIGS. 1A, 2E, and 2F, the substrate transfer apparatus 284 according to the first embodiment of the present invention may include a loading area portion 276a that provides a loading area M1. ), A substrate floating unit 276 composed of a coating region portion 276b providing a coating region M3, and an unloading region portion 276c providing an unloading region M5; And a pair of sliders having a support portion 102 and an adsorption pad 104 on the support portion 102 (see FIG. 1A), on which the substrate G is mounted in a vacuum suction manner. 298, and a substrate transfer unit 284a composed of a pair of liner motion guides 296 on which the pair of sliders 298 are movably mounted, wherein the substrate G includes the loading area. Constant floating height Hf due to a constant net floating force (i.e., the difference between the floating force and the suction force) throughout M1, the coating region M3, and the unloading region M5. It is characterized in that the conveyed while maintaining. Although not shown in the embodiment of FIG. 2A, referring to the prior art of FIG. 1A, the configuration and operation of a pair of sliders 298 with support 102 and suction pads 104 are fully understood at the level of those skilled in the art. It can be obvious.

Also, a loading area portion 276a providing a loading region M1, a coating area portion 276b providing a coating region M3, and an unloading region portion 276c providing an unloading region M5. Since the detailed configuration and operation of the substrate floating unit 276 is described in detail with reference to FIGS. 2E and 2F, a detailed description thereof will be omitted.

Meanwhile, referring to FIGS. 2A to 2D, the coating apparatus 240 according to the first embodiment of the present invention includes the substrate floating unit 276 of the present invention shown in FIGS. 2E to 2F. Here, the coating apparatus 240 according to the first embodiment of the present invention is substantially the same as the coating apparatus 40 of the floating method according to the prior art shown in FIG. 1A except for the substrate floating unit 276.

2I is a plan view schematically illustrating a plurality of substrate centering units and a plurality of gap sensors used in the coating apparatus 240 according to the first embodiment of the present invention.

Referring to FIGS. 2A-2D together with FIGS. 1A, 2E, 2F and 2I, the coating apparatus 240 according to the first embodiment of the present invention is a loading region portion 276a providing a loading region M1. ), A substrate floating unit 276 composed of a coating region portion 276b providing a coating region M3, and an unloading region portion 276c providing an unloading region M5; A substrate transfer unit 284a for mounting and transferring the substrate G by mounting in a vacuum suction method; A nozzle device 278 provided on the coating region 276b and applying a coating liquid onto the substrate G; And a gantry 230 on which the nozzle device 278 is mounted.

In addition, the coating apparatus 240 according to the first embodiment of the present invention includes a plurality of substrate centering units 260 provided in the loading region 276a; And a plurality of gap sensors 262. Here, some of the plurality of substrate centering units 260 may be provided in the separation space S of the loading region 276a including the plurality of floating plates P spaced apart from each other. These plurality of substrate centering units 260 control the alignment of the substrate G when the substrate G is mounted on the pair of sliders 298 of the substrate transfer unit 284a. In addition, the plurality of gap sensors 262 may include a pair of left and right gap sensors 262a; And one central gap sensor 262b. A pair of left and right gap sensors 262a of the plurality of gap sensors 262 is provided in the left and right separation spaces S near the front end of the loading area portion 276a, and the center gap sensor 262b is provided in the loading area portion ( In a space S of the central portion near the front end of 276a. The left and right gap sensors 262a preset the left and right vertical reference points (zero points) of the coating area 276b. As a result, the nozzle device 278 is controlled to apply the coating liquid at a specific height (coating height Hc) from the left and right vertical reference points preset by the left and right gap sensors 262a. The center gap sensor 262b is not necessarily required as an optional feature. As the nozzle unit 278 is used for a long time, the center portion may be bent downward by self weight. The center gap sensor 262b monitors whether the amount of warpage of the nozzle arrangement 278 is outside the acceptable error range.

In addition, referring to FIG. 2B, the coating apparatus 240 according to the first embodiment of the present invention further includes a nozzle refresh member 210 under the loading region 276a. Therefore, in the coating apparatus 240 according to the first embodiment of the present invention, the nozzle apparatus 278 is transferred onto the nozzle refresh member 210 to perform cleaning. The nozzle refreshing member 210 may include a priming device 212 for cleaning the nozzle device 278 after the nozzle device 278 applies the coating liquid every time, and the nozzle device 278 may use, for example, a coating liquid. And a nozzle cleaning member 214 for cleaning the nozzle device 278 after application. In the coating apparatus 240 according to the first embodiment of the present invention, since the nozzle apparatus 278 moves on the nozzle refresh member 210 by the gantry 230, the nozzle refresh member 210 unlike the prior art. ) Is not necessary to move a separate means for transferring the nozzle unit 278 below. Thus, the coating device 240 according to the first embodiment of the present invention has the advantage that the size is reduced, the operation is simplified.

2J schematically shows a front view of the coating apparatus according to an alternative embodiment of the first embodiment of the present invention.

Referring to FIG. 2J, the coating apparatus 240 according to an alternative embodiment of the first embodiment of the present invention further includes a nozzle refresh member 210 on the loading area portion 276a. Therefore, in the coating apparatus 240 according to the alternative embodiment of the first embodiment of the present invention, the nozzle refreshing member 210 is transferred to the lower part of the nozzle apparatus 278 to be cleaned as in the prior art. In this case, since the nozzle refreshing member 210 is transferred to the lower portion of the nozzle apparatus 278 and the cleaning of the nozzle apparatus 278 is performed, the substrate G may be loaded onto the loading area portion 276a. Loading time can be shortened. That is, in the coating apparatus 240 according to the alternative embodiment of the first embodiment of the present invention shown in FIG. 2J, the coating apparatus 240 has the disadvantages of an increase in size, complexity of operation, and scattering of thinner. The advantage of shortening the loading time is achieved. On the other hand, the coating apparatus 240 according to the first embodiment of the present invention shown in Figure 2i has a disadvantage in that the loading time of the substrate is long, but the size of the coating apparatus 240, simplification of operation and thinner scattering The advantage of prevention is achieved.

Second Embodiment of Substrate Transfer Device and Coating Device

Referring to FIG. 2A, the substrate transfer apparatus 284 according to the second embodiment of the present invention includes the substrate floating unit 276 of the present invention shown in FIGS. 2G to 2H. Here, the substrate transfer apparatus 284 according to an embodiment of the present invention is substantially the same as the substrate transfer apparatus 84 of the conventional method shown in FIG. 1A except for the substrate floatation unit 276. .

More specifically, referring to FIG. 2A together with FIGS. 1A, 2G, and 2H, the substrate transfer apparatus 284 according to the second embodiment of the present invention may include a loading region portion 276a that provides a loading region M1. A substrate floating unit 276 consisting of a coating area portion 276b providing an interface region M2 and a coating area M3, and an unloading region portion 276c providing an unloading region M5; And a pair of sliders having a support portion 102 and an adsorption pad 104 on the support portion 102 (see FIG. 1A), on which the substrate G is mounted in a vacuum suction manner. 298, and a substrate transfer unit 284a composed of a pair of linear motion guides 296 to which the pair of sliders 298 are movably mounted, wherein the substrate G includes the loading area ( The first floating height Ha is maintained at M1 and the second floating height Hf is maintained at the coating area M3 and the unloading area M5.

Further, a loading area portion 276a providing a loading area M1, a coating area portion 276b providing an interface area M2 and a coating area M3, and an unloading providing an unloading area M5. Since the detailed configuration and operation of the substrate floating unit 276 composed of the area portion 276c have been described in detail with reference to FIGS. 2G and 2H, the detailed description thereof will be omitted.

Meanwhile, referring to FIGS. 2A to 2D, the coating apparatus 240 according to the second embodiment of the present invention includes the substrate floating unit 276 of the present invention shown in FIGS. 2G to 2H. Here, the coating apparatus 240 according to the second embodiment of the present invention is substantially the same as the coating apparatus 40 of the floating method according to the prior art shown in FIG. 1A except for the substrate floating unit 276.

Referring to FIGS. 2A-2D together with FIGS. 1A, 2G, 2H and 2I, the coating apparatus 240 according to the second embodiment of the present invention has a loading region portion 276a providing a loading region M1. A substrate floating unit 276 consisting of a coating area portion 276b providing an interface area M2 and a coating area M3, and an unloading area portion 276c providing an unloading area M5; A substrate transfer unit 284a for mounting and transferring the substrate G by mounting in a vacuum suction method; A nozzle device 278 provided on the coating area portion 276b and applying a coating liquid on a substrate G; And a gantry 230 on which the nozzle device 278 is mounted.

In addition, the coating apparatus 240 according to the second embodiment of the present invention includes a plurality of substrate centering units 260 provided in the loading region 276a; And a plurality of gap sensors 262. Here, some of the plurality of substrate centering units 260 may be provided in the separation space S of the loading region 276a including the plurality of floating plates P spaced apart from each other. Specific configurations and operations of the plurality of substrate centering units 260 and the plurality of gap sensors 262 are described in detail in the coating apparatus 240 according to the first embodiment of the present invention.

In addition, referring to FIG. 2B, the coating apparatus 240 according to the second embodiment of the present invention further includes a nozzle refresh member 210 under the loading area portion 276a, and thus, its specific configuration and operation diagram. Since it is described in detail in the coating apparatus 240 according to the first embodiment of the present invention described above it will be omitted.

In the coating apparatus 240 according to the first and second embodiments of the present invention described above, air in the loading area, the coating area, and the unloading area is constantly ejected. Accordingly, since the temperature of the substrate G is uniformly maintained throughout the substrate G until the unloading area is unloaded after the coating liquid is applied, the thickness of the coating liquid does not occur while the coating liquid is dried.

In addition, in the coating apparatus 240 according to the first and second embodiments of the present invention described above, the floating height of the substrate G is the same throughout the loading area, the coating area, and the unloading area. Therefore, since there is no difference in the height of the float during the movement of the substrate G, the stress is not applied to the substrate G, and thus the possibility of deformation or breakage of the substrate G is significantly reduced, and the possibility of vibration is significantly lowered. Precision coating becomes possible.

In addition, in the coating apparatus 240 according to the first and second embodiments of the present invention described above, advantages of reducing the size of the coating apparatus 240, simplifying operation, and preventing thinner scattering are achieved.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

Figure 1a is a schematic view showing a perspective view of a substrate transfer apparatus of the floating method and a coating apparatus having the same according to the prior art.

FIG. 1B schematically illustrates a front view of a substrate transfer apparatus of a floating method according to the related art shown in FIG. 1A and a coating apparatus having the same.

FIG. 1C is a view showing a part of an arrangement pattern of air ejection openings and air intake openings in a loading region, a coating region, and an unloading region of a conventional substrate transfer apparatus.

2A is a plan view of a substrate floating unit, and a substrate transfer apparatus and a coating apparatus including the same according to an embodiment of the present invention.

FIG. 2B is a schematic front view of a substrate floating unit, and a substrate transfer apparatus and a coating apparatus including the same, according to an embodiment of the present invention.

2C is a left side view of the substrate floating unit, and the substrate transfer apparatus and the coating apparatus including the same according to an embodiment of the present invention.

Figure 2d is a right side view of the substrate floating unit, and the substrate transfer apparatus and coating apparatus having the same according to an embodiment of the present invention.

FIG. 2E is a front view schematically showing a schematic plan view of a substrate floating unit according to the first embodiment of the present invention, and a constant balance between the floating force of the air jet and the suction force of the air inlet;

FIG. 2F is a plan view schematically illustrating the arrangement of the air jet port and the air inlet port of the substrate floating unit and the air supply unit and the vacuum pumping unit according to the first embodiment of the present invention.

FIG. 2G is a front view schematically showing a schematic plan view of a substrate floating unit according to a second embodiment of the present invention, and a constant balance between the floating force of the air jet and the suction force of the air inlet; FIG.

FIG. 2H is a plan view schematically showing the arrangement of the air jet port and the air inlet port of the substrate floating unit and the air supply unit and the vacuum pumping unit according to the second embodiment of the present invention.

2I is a plan view schematically illustrating a plurality of substrate centering units and a plurality of gap sensors used in the coating apparatus 240 according to the first embodiment of the present invention.

FIG. 2J schematically illustrates a front view of a coating apparatus according to an alternative embodiment of the first embodiment of the present invention. FIG.

Claims (28)

In the substrate floating unit, A loading region portion having a plurality of first air ejection openings and a plurality of first air intake openings and providing a loading region M1; A coating region portion having a plurality of second air ejection openings and a plurality of second air intake openings and providing a coating region M3; And An unloading area portion having a plurality of third air blowing holes and a plurality of third air intake ports and providing an unloading area M5. Including, The loading area portion is formed of a plurality of floating plate (P) which is extended in the direction in which the substrate (G) proceeds and spaced apart from each other, The substrate G is maintained at a constant floating height Hf Substrate floating unit. The method of claim 1, And said constant float height (Hf) is in the range of 40-50 μm on said substrate float unit. The method of claim 1, Substrate flotation unit, in which the plurality of second air blowing holes and the plurality of second air intake ports are not provided in the area (C) where the actual coating is applied in the coating area (M3). The method according to any one of claims 1 to 3, The plurality of first to third air blower outlets are connected to the air supply unit by first to third air supply regulators, The plurality of first to third air inlets are connected to the vacuum pumping unit by first to third vacuum regulators, The first to third air supply regulators respectively adjust the amount of air flowing into the plurality of first to third air blowing holes, The first to third vacuum regulators respectively adjust the amount of air sucked into the plurality of first to third air inlets. Substrate floating unit. The method of claim 4, wherein Density per unit area of the plurality of second air inlets and the plurality of second air inlets of the coating region M3 and the plurality of third air outlets of the unloading region M5 and the plurality of third air inlets When the density per unit area of is equal to each other, only one of the second and third air supply regulators are connected to the plurality of second and third air outlets, respectively, and only one of the second and third vacuum regulators is And a substrate floating unit respectively connected to the plurality of second and third air inlets. In the substrate floating unit, A loading area unit having a plurality of first air blowing holes and providing a loading area M1; A coating area portion having a plurality of second air ejection openings and a plurality of second air intake openings and providing an interface region M2 and a coating region M3; And An unloading area portion having a plurality of third air blowing holes and a plurality of third air intake ports and providing an unloading area M5. Including, The loading area portion is formed of a plurality of floating plate (P) which is extended in the direction in which the substrate (G) proceeds and spaced apart from each other, The density of the plurality of second air inlets provided in the interface region M2 is less than the density of the plurality of second air inlets provided in the coating region M3, The substrate G maintains a first floating height Ha in the loading area and maintains a second floating height Hf in the coating area and the unloading area. Substrate floating unit. The method of claim 6, The first floating height Ha has a range of 150 to 200 μm on the substrate floating unit, The second floating height Hf has a range from 40 to 50 μm on the substrate floating unit. Substrate floating unit. The method according to claim 6 or 7, The plurality of first to third air blower outlets are connected to the air supply unit by first to third air supply regulators, The plurality of second and third air inlets are connected to the vacuum pumping unit by second and third vacuum regulators, The first to third air supply regulators respectively adjust the amount of air flowing into the plurality of first to third air blowing holes, The second and third vacuum regulators respectively adjust the amount of air sucked into the plurality of second and third air inlets. Substrate floating unit. The method of claim 8, Density per unit area of the plurality of second air inlets and the plurality of second air inlets of the coating region M3 and the plurality of third air outlets of the unloading region M5 and the plurality of third air inlets When the density per unit area of is equal to each other, only one of the second and third air supply regulators are connected to the plurality of second and third air outlets, respectively, and only one of the second and third vacuum regulators is And a substrate floating unit respectively connected to the plurality of second and third air inlets. In the substrate transfer apparatus, A loading region portion having a plurality of first air ejection openings and a plurality of first air intake openings and providing a loading region M1; A coating region portion having a plurality of second air ejection openings and a plurality of second air intake openings and providing a coating region M3; And a unloading area portion having a plurality of third air blowing holes and a plurality of third air inlets, the unloading area portion providing an unloading area M5; And A pair of sliders having a support portion and a suction pad on the support portion, on which the substrate G is mounted in a vacuum suction manner, and a pair of linear motion guides on which the pair of sliders are movable; Substrate transfer unit composed of Including, The loading area portion is formed of a plurality of floating plate (P) which is extended in the direction in which the substrate (G) proceeds and spaced apart from each other, The substrate G maintains a constant floating height Hf by a constant net floating force over the loading region M1, the coating region M3, and the unloading region M5. Transported while Substrate transfer device. The method of claim 10, And said constant float height (Hf) is in the range of 40-50 μm on said substrate float unit. The method of claim 10, Substrate transfer unit in which the plurality of second air blowout ports and the plurality of second air intake ports are not provided in the area (C) where the actual coating is applied in the coating area (M3). The method according to any one of claims 10 to 12, The plurality of first to third air blower outlets are connected to the air supply unit by first to third air supply regulators, The plurality of first to third air inlets are connected to the vacuum pumping unit by first to third vacuum regulators, The first to third air supply regulators respectively adjust the amount of air flowing into the plurality of first to third air blowing holes, The first to third vacuum regulators respectively adjust the amount of air sucked into the plurality of first to third air inlets. Substrate transfer device. The method of claim 13, Density per unit area of the plurality of second air inlets and the plurality of second air inlets of the coating region M3 and the plurality of third air outlets of the unloading region M5 and the plurality of third air inlets When the density per unit area of is equal to each other, only one of the second and third air supply regulators are connected to the plurality of second and third air outlets, respectively, and only one of the second and third vacuum regulators is And a substrate transfer device connected to a plurality of second and third air inlets, respectively. In the substrate transfer apparatus, A loading area unit having a plurality of first air blowing holes and providing a loading area M1; A coating area portion having a plurality of second air ejection openings and a plurality of second air intake openings and providing an interface region M2 and a coating region M3; And a unloading area portion having a plurality of third air blowing holes and a plurality of third air inlets, the unloading area portion providing an unloading area M5; And A pair of sliders having a support portion and a suction pad on the support portion, on which the substrate G is mounted in a vacuum suction manner, and a pair of linear motions on which the pair of sliders are movably mounted; Substrate transfer unit composed of guide Including, The loading area portion is formed of a plurality of floating plate (P) which is extended in the direction in which the substrate (G) proceeds and spaced apart from each other, The density of the plurality of second air inlets provided in the interface region M2 is less than the density of the plurality of second air inlets provided in the coating region M3, The substrate G maintains a first floating height Ha in the loading area and maintains a second floating height Hf in the coating area and the unloading area. Substrate transfer device. The method of claim 15, The first floating height Ha has a range of 150 to 200 μm on the substrate floating unit, The second floating height Hf has a range from 40 to 50 μm on the substrate floating unit. Substrate transfer device. The method according to claim 15 or 16, The plurality of first to third air blower outlets are connected to the air supply unit by first to third air supply regulators, The plurality of second and third air inlets are connected to the vacuum pumping unit by second and third vacuum regulators, The first to third air supply regulators respectively adjust the amount of air flowing into the plurality of first to third air blowing holes, The second and third vacuum regulators respectively adjust the amount of air sucked into the plurality of second and third air inlets. Substrate transfer device. The method of claim 17, Density per unit area of the plurality of second air inlets and the plurality of second air inlets of the coating region M3 and the plurality of third air outlets of the unloading region M5 and the plurality of third air inlets When the density per unit area of is equal to each other, only one of the second and third air supply regulators are connected to the plurality of second and third air outlets, respectively, and only one of the second and third vacuum regulators is And a substrate transfer device connected to a plurality of second and third air inlets, respectively. In the coating apparatus, A loading area portion having a plurality of first air ejection openings and a plurality of first air intake openings and providing a loading area M1; A coating region portion having a plurality of second air ejection openings and a plurality of second air intake openings and providing a coating region M3; And a unloading area portion having a plurality of third air blowing holes and a plurality of third air inlets, the unloading area portion providing an unloading area M5; A substrate transfer unit which mounts and transfers the substrate G by mounting in a vacuum suction method; A nozzle device provided on the coating area and configured to apply a coating liquid onto the substrate (G); And Gantry to which the nozzle device is mounted Including, The loading area portion is formed of a plurality of floating plate (P) which is extended in the direction in which the substrate (G) proceeds and spaced apart from each other, The substrate G maintains a constant floating height Hf by a constant net floating force over the loading region M1, the coating region M3, and the unloading region M5. Transported while Coating device. The method of claim 19, The coating device A plurality of substrate centering units provided in the loading area to control alignment of the substrate when the substrate is mounted on the substrate transfer unit; A pair of left and right gap sensors for presetting left and right vertical reference points (0 point) of the coating area; And A nozzle refreshing member provided below the loading region and having a priming device and a nozzle cleaning member In addition, Some of the plurality of substrate centering units are provided in the spaces S of the plurality of floating plates P, The pair of left and right gap sensors are provided in the separation space S near the front end of the loading area portion, The nozzle device moves on the nozzle refreshing member to perform cleaning. Coating device. The method of claim 20, The coating apparatus further comprises a central gap sensor provided in the spacing space S of the central portion near the front end of the loading region portion and monitoring whether the amount of deflection of the nozzle apparatus is outside the allowable error range. Coating device comprising. The method of claim 19, The coating device A plurality of substrate centering units provided in the loading area to control alignment of the substrate when the substrate is mounted on the substrate transfer unit; A pair of left and right gap sensors for presetting left and right vertical reference points (0 point) of the coating area; And A nozzle refresh member provided above the loading region and having a priming device and a nozzle cleaning member In addition, Some of the plurality of substrate centering units are provided in the spaces S of the plurality of floating plates P, The pair of left and right gap sensors are provided in the separation space S near the front end of the loading area portion, In the nozzle apparatus, the nozzle refresh member is moved to the lower part of the nozzle apparatus to perform cleaning. Coating device. The method according to any one of claims 19 to 22, The substrate transfer unit A pair of sliders having a support and adsorption pads on the support, on which the substrate G is mounted in a vacuum adsorption manner; And A pair of linear motion guides to which the pair of sliders are movably mounted Coating device composed of. In the coating apparatus, A loading region portion having a plurality of first air ejection openings and a plurality of first air intake openings and providing a loading region M1; A coating area portion having a plurality of second air ejection openings and a plurality of second air intake openings and providing an interface region M2 and a coating region M3; And A substrate floating unit having a plurality of third air blowing holes and a plurality of third air intake ports, the substrate floating unit comprising an unloading area portion for providing an unloading area M5; A substrate transfer unit which mounts and transfers the substrate G by mounting in a vacuum suction method; A nozzle device provided on the coating area and configured to apply a coating liquid onto the substrate (G); And Gantry to which the nozzle device is mounted Including, The loading area portion is formed of a plurality of floating plate (P) which is extended in the direction in which the substrate (G) proceeds and spaced apart from each other, The density of the plurality of second air inlets provided in the interface region M2 is less than the density of the plurality of second air inlets provided in the coating region M3, The substrate G maintains a first floating height Ha in the loading area and maintains a second floating height Hf in the coating area and the unloading area. Coating device. The method of claim 24, The coating device A plurality of substrate centering units provided in the loading area to control alignment of the substrate when the substrate is mounted on the substrate transfer unit; A pair of left and right gap sensors for presetting left and right vertical reference points (0 point) of the coating area; And A nozzle refreshing member provided below the loading region and having a priming device and a nozzle cleaning member In addition, Some of the plurality of substrate centering units are provided in the spaces S of the plurality of floating plates P, The pair of left and right gap sensors are provided in the separation space S near the front end of the loading area portion, The nozzle device moves on the nozzle refreshing member to perform cleaning. Coating device. 26. The method of claim 25, The coating apparatus further comprises a central gap sensor provided in the spacing space S of the central portion near the front end of the loading region portion and monitoring whether the amount of deflection of the nozzle apparatus is outside the allowable error range. Coating device comprising. The method of claim 24, The coating device A plurality of substrate centering units provided in the loading area to control alignment of the substrate when the substrate is mounted on the substrate transfer unit; A pair of left and right gap sensors for presetting left and right vertical reference points (0 point) of the coating area; And A nozzle refresh member provided above the loading region and having a priming device and a nozzle cleaning member In addition, Some of the plurality of substrate centering units are provided in the spaces S of the plurality of floating plates P, The pair of left and right gap sensors are provided in the separation space S near the front end of the loading area portion, In the nozzle apparatus, the nozzle refresh member is moved to the lower part of the nozzle apparatus to perform cleaning. Coating device. The method according to any one of claims 24 to 27, The substrate transfer unit A pair of sliders having a support and adsorption pads on the support, on which the substrate G is mounted in a vacuum adsorption manner; And A pair of linear motion guides to which the pair of sliders are movably mounted Coating device composed of.

Images