JP2010080647A - Storage cabinet and conveying system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a storage cabinet for storing and delivering cargos such as an FOUP (Front Opening Unified Pod) for storing, for example, various substrates for manufacturing semiconductor elements with a conveying vehicle such as OHT (Overhead Hoist Transport) efficiently by a simple configuration. <P>SOLUTION: The storage cabinet (10) includes: a body unit whose inside is vertically divided in a plurality of stages, and which has entrances capable of taking out and putting in the cargos (3) at respective stages of the plurality of stages so that they are aligned in the vertical direction; a plurality of mounting parts (21) capable of mounting the cargos at the plurality of stages in the body unit and moving the cargos horizontally between the stages; a common storing and delivering port for the plurality of stages which vertically moves along the entrances at the plurality of states; a vertically moving means (12) that can vertically move the storing and delivering port; and an outside/inside moving means (16) for horizontally moving the cargos between the one mounting part adjacent to the entrance at the plurality of stages and the storing and delivering port moved to the position opposite to the mounting part. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention includes, for example, a storage in which cargo is loaded and unloaded such as FOUP (Front Opening Unified Pod) that accommodates various substrates for manufacturing semiconductor elements with a transport vehicle such as a vehicle, and the storage. The present invention relates to the technical field of transport systems.

  This type of storage is provided with, for example, a plurality of shelves, and a carry-in port and a carry-out port, and through these carry-in ports and carry-out ports, loading and unloading of cassettes placed on or placed on a plurality of shelves is performed. (See Patent Document 1).

  In addition, there is a transport system in which the FOUP can be transferred to or from the conveyor by moving the load port up and down by a FOUP advance plate assembly (see Patent Document 2).

JP 2006-049454 A International Publication WO2007 / 091593

  However, according to the storage of Patent Document 1 described above, when the storage includes a large number of shelves, and a large number of cassettes can be accommodated or placed on the large number of shelves, a large number of cassettes are loaded and unloaded. Is carried out through only two ports, the carry-in port and the carry-out port, and therefore has a technical problem that the carrying efficiency is low.

  In addition, according to the transport system of Patent Document 2 described above, even when a single FOUP is quickly transferred to and from the conveyor when the lift distance of the load port is relatively long, a large number of FOUPs can be transferred. In transfer, the raising / lowering time increases in proportion to the number of loads, and there exists a technical subject that conveyance efficiency falls.

  The present invention has been made in view of the above-described problems, for example, a storage that enables efficient loading and unloading of cassettes, FOUPs, and the like with a simple configuration, and a transport system including such a storage. It is an issue to provide.

  In order to solve the above-mentioned problem, the first storage of the present invention is divided into a plurality of stages in the vertical direction, and an inlet / outlet capable of loading and unloading is arranged in each of the plurality of stages in the vertical direction. Each of the plurality of stages is arranged so as to spread in two horizontal directions, and each of the loads can be accommodated or placed, and the load can be placed between each other. A plurality of mounting portions each configured to be horizontally movable, and a loading / unloading port common to the plurality of stages that can be moved up and down along the entrance / exit in each of the plurality of stages outside the main body part, The vertical movement means for moving the loading / unloading port up and down, and one of the plurality of loading sections in each of the plurality of stages is moved to a position opposite to the one loading section and the one loading section. The entry / exit port when Between, and a horizontal movable outer and inner moving means said load via said doorway.

  According to the first storage of the present invention, for example, loading and unloading of a load such as FOUP is performed with a transport vehicle such as a vehicle. The transport vehicle includes elevating means such as a hoist mechanism, and the elevating means includes holding means such as a gripper. The transport vehicle travels along a track, for example, and transports the load held by the holding means to the first storage, for example, a semiconductor device manufacturing apparatus, another storage, or a stocker. The transport vehicle lifts and lowers the holding means or the load held by the holding means by the lifting / lowering means at the time of loading / unloading, and loads the cargo to / from the loading / unloading port in the first storage box or the manufacturing apparatus. Is transferred.

  The 1st storage of this invention is arrange | positioned above processing apparatuses, such as a manufacturing apparatus with comparatively short height, for example. However, a space corresponding to the storage (that is, for arranging the storage) is required between the processing apparatus and the track. The present invention is also a storage that can effectively use a space that is not originally used, for example, above a processing apparatus.

  The 1st storage of this invention is provided with a main-body part, a some mounting part, a loading / unloading port, an up-and-down moving means, and an outer / inner moving means. The inside of the main body is divided into a plurality of stages in the vertical direction. Here, “multiple stages” corresponds to, for example, the height of the interior, and in fact, the vertical length in the space above the processing apparatus described above. It is set larger than the height. In the present invention, for example, a group, a type, or the like is assigned to each stage, and a plurality of loads of a predetermined section can be stored in each stage. In particular, the present invention is a storage that can be efficiently loaded and unloaded when two loads are loaded or unloaded in succession, and when a load to be unloaded immediately after a load to be loaded is unloaded. . Further, such a storage may be called a stocker.

  In each of the plurality of stages in the main body, the entrances and exits are provided so as to be arranged in the vertical direction. The plurality of placement portions in each of the plurality of stages are arranged in a range extending in two horizontal directions, for example, one horizontal direction parallel to the track and one horizontal direction orthogonal to the track. The plurality of placement units include, for example, a roller conveyor including a plurality of rollers and a conveyor such as a belt conveyor. The plurality of placement units convey the load in the storage by horizontally moving the load between each other by the conveyor. The entry / exit port in the storage is a port common to a plurality of stages. The vertical movement means moves the loading / unloading port up and down along the doorway in each stage outside the main body. By this vertical movement, the loading / unloading port is moved to a position facing one mounting portion adjacent to the entrance / outlet among the plurality of mounting portions in each of the plurality of stages. The outer / inner moving means includes, for example, a mechanism that rotates a transfer surface on which a load is transferred from a transport vehicle, a mechanism that slides, and a robot that can transfer the load between the transfer surface and one placement unit. An arm or a conveyor that is the same as or different from the placement unit is provided. The outer / inner moving means horizontally moves the load between the one placing portion and the loading / unloading port located at a position facing the one placing portion via the entrance / exit.

  In such a first storage of the present invention, at the time of warehousing, for example, the load to be garnished from the transport vehicle is opposed to one mounting portion in any one of the plurality of tiers (hereinafter simply referred to as “tier”). Are transferred (warehousing) to a loading / unloading port at a position corresponding to “. Next, if the level where the load should be stored is different from the level corresponding to the time of warehousing, the position corresponding to the level where the load should be stored with the loading / unloading port placed on the load by the vertical movement means Moved to. Contrary to this order, even if the loading / unloading port is moved up and down without change to the position corresponding to the stage to be stored first, the load is transferred from the transport vehicle onto the loading / unloading port. Good.

  Next, the outer / inner moving means horizontally moves the load from the loading / unloading port to one loading section on the same stage. Then, the plurality of placement units are moved from the one placement unit to a desired placement unit in the same stage (that is, transported in the storage).

  At the time of delivery, for example, a load to be delivered is moved from a desired placement unit to one placement unit in the same stage (that is, transported in the storage). Next, if the loading / unloading port is not at the position corresponding to the stage storing the load to be unloaded, the position of the loading / unloading port corresponding to the stage storing the load to be unloaded by the vertical movement means. Moved to. Next, the load is horizontally moved to the loading / unloading port by one loading unit. Next, the load on the loading / unloading port is transferred (shipped) from the loading / unloading port to the transport vehicle. In addition, before the transfer to the transport vehicle, for example, when there is an up / down position where the transfer to the transport vehicle is easy (for example, the uppermost position), After being moved up and down to the vertical position, the load may be transferred from the loading / unloading port to the transport vehicle.

  The warehousing operation and the warehousing operation described above are performed via a single warehousing / unloading port that is common to a plurality of stages. At the time of warehousing, for example, a load transferred (warehousing) from a transport vehicle immediately after warehousing is performed. Is moved to one loading part in any one of the plurality of stages, and the loading / unloading port becomes empty in a short time after loading, so the loading time required for one load at the loading / unloading port Is shortened. Also, at the time of unloading, for example, if the load to be unloaded on one loading part at any stage is moved to the unloading port immediately after being moved to the unloading / unloading port, the load to be unloaded Since the loading / unloading port is in an empty state in a short period of time after loading, the unloading time required for one load at the loading / unloading port is shortened. Accordingly, in the present invention, one placement section in each of the plurality of stages functions as a temporary entry / exit port for placing the received goods or the goods to be delivered immediately after entry or just before delivery. As a result, since the original loading / unloading port only has to deliver the load to / from the transport vehicle or one placement unit, the loading / unloading time required for one load at the original loading / unloading port is greatly reduced. Is done.

  In addition, the loading / unloading port common to the plurality of stages can transfer the load from any of the plurality of stages stacked in the vertical direction or to any stage. Or the load which should be delivered is independently conveyed in a storage. For this reason, in the case of a series of loading / unloading in which a load to be unloaded after a load to be unloaded by a single transport vehicle is unloaded, and a continuous storage or unloading by a plurality of transport vehicles, The in-storage transport time for the load (that is, the loaded load and / or the load to be unloaded) is minimized.

  As described above, loads can be efficiently loaded and unloaded by shortening the loading and unloading times at the loading / unloading port and minimizing the transfer time in the storage.

  In addition, the 1st storage of this invention may be provided with two or more entrance / exit ports, for example. When two entry / exit ports are provided, for example, one entry / exit port provided corresponding to one row of entrances / exits is a dedicated port for entry / exit, and the other entry / exit port provided corresponding to the other row of entrances / exits Functions as a dedicated port for shipping. Thereby, a large number of loads can be received or delivered via a port dedicated to entry or delivery. Such two entry / exit ports may be provided side by side or adjacent to each other, or may be provided at both ends or in the vicinity thereof so as to be separated from each other.

  In order to solve the above-described problem, the second storage of the present invention is internally divided into a plurality of stages in the vertical direction, and an inlet / outlet capable of loading and unloading is arranged in each of the plurality of stages in the vertical direction. A plurality of mounting portions that are arranged in the main body portion so as to spread in two horizontal directions in each of the plurality of stages, and each of which can receive or load the load, Inside the main body part, internal moving means capable of horizontally moving the load between the plurality of mounting parts in each of the plurality of stages, and up and down along the doorway in each of the plurality of stages outside the main body part. Entry / exit port common to the plurality of movable stages, vertical movement means for moving the entry / exit port up and down, and one placement adjacent to the entrance / exit among the plurality of placement sections in each of the plurality of stages And the one mounting part Between the pre-inlet-outlet port at the time that has been moved to location, and an outer and inner moving means horizontally movable with the load through the doorway.

  Similar to the first storage of the present invention, the second storage of the present invention comprises a main body, a loading / unloading port, vertical movement means, and outer / internal movement means, but in the case of the first storage. A plurality of placement portions having partially different functions and an internal movement means are further provided.

  The plurality of placement units in the second storage of the present invention are arranged in each stage, for example, in a range extending in two horizontal directions, one horizontal direction parallel to the track and one horizontal direction orthogonal to the track, Each can simply contain or place a load.

  The internal movement means includes, for example, a support unit that supports a load from the bottom instead of the placement unit, and a moving mechanism such as a robot arm that horizontally moves the support unit. Or you may provide the mechanism which moves a load between mounting parts by conveyor mechanisms, such as a roller conveyor and a belt conveyor. The internal moving means can horizontally move the load by horizontally moving the support portion between the plurality of placement portions by using these mechanisms, for example.

  In such a second storage of the present invention, at the time of warehousing, for example, a load to be admitted is admitted from a transport vehicle to a warehousing port at a position corresponding to any one of the plurality of tiers. Next, if the level where the load should be stored is different from the level corresponding to the time of warehousing, the position corresponding to the level where the load should be stored with the loading / unloading port placed on the load by the vertical movement means Moved to. Next, the outer / inner moving means horizontally moves the load from the loading / unloading port to one loading section on the same stage. Then, the internal moving means transports the storage unit from the one mounting unit to a desired mounting unit in the same stage.

  At the time of delivery, for example, a load to be delivered is transported in the storage from a desired placement unit to one placement unit in the same stage. Next, if the loading / unloading port is not at the position corresponding to the stage storing the load to be unloaded, the position of the loading / unloading port corresponding to the stage storing the load to be unloaded by the vertical movement means. Moved to. Next, the load is horizontally moved from one loading section to the loading / unloading port by the internal movement means. Next, the load on the loading / unloading port is unloaded from the loading / unloading port to the transport vehicle.

  As described above, in the present invention, the one loading unit in each of the plurality of stages functions as a temporary loading / unloading port for loading the loaded load or the load to be unloaded immediately after loading or just before unloading. . As a result, since the original loading / unloading port only has to deliver the load to / from the transport vehicle or one placement unit, the loading / unloading time required for one load at the original loading / unloading port is greatly reduced. Is done. In addition, during a series of loading / unloading in which a load to be unloaded after a load to be loaded is unloaded by a single transport vehicle, and a continuous loading or unloading by multiple transport vehicles, The in-storage transport time for the load (that is, the loaded load and / or the load to be unloaded) is minimized.

  As described above, loads can be efficiently loaded and unloaded by shortening the loading and unloading times at the loading / unloading port and minimizing the transfer time in the storage.

  In one aspect of the first storage and the second storage of the present invention, the outer / inner moving means is provided at the storage / exit port.

  According to this aspect, the outer / inner moving means includes, for example, a support portion that supports a load from the bottom side instead of the loading / unloading port, and a moving mechanism such as a robot arm that horizontally moves the support portion. Or you may provide the mechanism which moves a load between a loading / unloading port and one mounting part by conveyor mechanisms, such as a roller conveyor and a belt conveyor. The outer / inner moving means can horizontally move the load by horizontally moving the support portion between the loading / unloading port and the one placement portion by using these mechanisms, for example.

  In another aspect of the first storage and the second storage according to the present invention, the outer / inner moving means is provided on the one mounting portion.

  According to this aspect, the outer / inner moving means includes, for example, a support portion that supports a load from the bottom side instead of the loading / unloading port, and a moving mechanism such as a robot arm that horizontally moves the support portion. The outer / inner moving means can move the load horizontally by moving the support portion horizontally between the loading / unloading port and the one loading portion, for example, by this moving mechanism. In addition, when the outer / inner moving hand is provided in one loading part (that is, the main body part), the entry / exit port is reduced in weight. The vertical movement speed of the port can be increased. Therefore, the warehousing time and the warehousing time at the warehousing / exiting port can be further shortened.

  In another aspect of the first storage and the second storage of the present invention, the loading / unloading port can be moved up and down beyond the position facing the doorway outside the main body, and the vertical movement means Is configured to move the entry / exit port up and down beyond a position facing the entrance and exit, and a path provided outside the main body when the entry / exit port is moved beyond the position facing the entrance and exit. The loading / unloading port and the route are configured so that the load can be transferred between the two.

  According to this aspect, the route is, for example, a moving route of the load conveyed by the conveyor, and is set so as to pass below the loading / unloading port. For example, a portion corresponding to the lower portion of the route (hereinafter referred to as “route portion”) and a loading / unloading port support different portions (typically, the central portion and the peripheral portion) on the bottom surface of the load. It is possible to support the load on either side. The up-and-down moving means moves the loading / unloading port between the loading / unloading port and the path by moving the loading / unloading port between the upper and lower sides via the path portion, for example.

  For example, at the time of transfer from the route to the entry / exit port, the entry / exit port is moved downward along the route by the vertical movement means. Next, the load conveyed on the route is conveyed to a route portion located below the loading / unloading port. Next, the loading / unloading port is moved by the vertical movement means until it becomes higher than the vertical position of the route portion via the route portion, so that the load on the route portion becomes the entry / exit port instead of the route portion. Supported (ie, transferred).

  At the time of transfer from the loading / unloading port to the route, the vertical position of the route portion passes through the route portion in a state where the loading / unloading port in which the load is placed is not supporting the load by the vertical movement means. Moved until lower. Thereby, the load on the loading / unloading port is supported (that is, transferred) on the route portion instead of the loading / unloading port.

  With the transfer operation as described above, the load is quickly transferred between the entry / exit port and the route while using the space below the storage for the transfer and the buffer, so that it is transferred on the route. It is possible to efficiently load and unload cargo.

  In this aspect, the path extends along the side wall of the main body, and the plurality of steps are arranged in the vertical direction so that a plurality of arrays arranged in the vertical direction are present at a predetermined horizontal distance from the side wall. A plurality of the vertical movement means may be provided corresponding to the plurality of arrays.

  With this configuration, when a plurality of entrances / exits are provided in each of the plurality of stages, and a plurality of vertical movement means are provided corresponding to the arrangement of the entrances / exits, for example, a plurality of entry / exit ports are provided along the entrance / exit. . Specifically, at least one entry / exit port among a plurality of entry / exit ports is used as a dedicated entry port, and at least one entry / exit port is excluded from a plurality of entry / exit ports excluding the entry / exit port. If it functions as a dedicated port, it becomes possible to transfer the load from the port dedicated for unloading to the transport vehicle immediately after being transferred to the port dedicated to warehousing that has transported the load. Therefore, the conveyance efficiency by a conveyance vehicle is improved. At the same time, it is possible to shorten the distance for transporting the load in the storage, and the transfer time in the storage is reduced in each of the plurality of stages. In addition, a plurality of loads are transferred at the same time between a plurality of loading / unloading ports and routes. Therefore, a large number of loads can be efficiently loaded and unloaded at the same time.

  In order to solve the above-mentioned problem, the first transport system of the present invention has a storage that can transfer the load to and from the path, the path, and a transport unit that transports the load on the path. The loading / unloading port has a first support part capable of supporting the load from the bottom side thereof, and at least one of the path and the transport means is for supporting the load in the at least one. The second support part is provided with a mouth or a notch that allows the first support part to move to a position below the second support part, and the vertical movement means is provided from above the second support part. By moving the first support part downward, the load is transferred from the first support part to the second support part, and the first support part is moved upward from below the second support part. The load is transferred from the second support portion to the first support portion.

  According to the first transport system of the present invention, for example, a load can be transferred between a path laid in a factory for manufacturing a semiconductor element or the like, and a manufacturing apparatus or a stocker installed along the path. is there.

  The first transport system of the present invention is, for example, a DLT (Direct Load Transport), and includes the above-described first or second storage, a route, and a transport unit. The entry / exit port in the 1st or 2nd storage has a 1st support part. The route is, for example, a moving route of the load conveyed by the conveying means. A conveyance means is conveyor mechanisms, such as a roller conveyor and a belt conveyor, for example, and conveys a load on a path | route. The conveying means has a second support part provided with a mouth or a cut. For example, the first and second support portions are configured to support different portions (typically, the central portion and the peripheral portion) on the bottom surface of the load, and support the load on either side. Is possible. The vertical movement means transfers the load between the first and second support parts by moving the first support part between the upper and lower parts of the second support part through a mouth or a cut, for example.

  For example, at the time of transfer from the second support part to the first support part, the first support part is moved below the second support part by the vertical movement means. Next, the load transported on the route is transported by the transport means to the second support section located below the first support section (that is, the loading / unloading port). Next, the load on the second support part is moved by the vertical movement means until the first support part is moved to be higher than the vertical position of the second support part through the mouth or the cut. Instead, it is supported (that is, transferred) by the first support portion.

  At the time of transfer from the first support part to the second support part, the first support part that is in a state of supporting the load by the up-and-down moving means is the mouth or notch of the second support part that is not supporting the load. Is moved until it becomes lower than the vertical position of the second support part. Thereby, the load on the first support part is supported (that is, transferred) to the second support part instead of the first support part. In this way, the load is quickly transferred between the first and second support portions.

  By the transfer operation as described above, the load is quickly transferred between the first and second support portions, so that the load conveyed on the route can be efficiently loaded and unloaded.

  In addition, although the 1st conveyance system of this invention is provided with the 1st or 2nd storage, you may apply processing apparatuses, such as a manufacturing apparatus, instead of a 1st or 2nd storage.

  In order to solve the above problems, the second transport system of the present invention is provided with a main body provided with an entrance through which a load can be taken in and out, and disposed in the main body, and each of the loads can be accommodated or placed. A plurality of placement units, an entry / exit port that can move up and down beyond the position facing the entrance / exit outside the main body, and the entrance / exit port is moved up and down beyond the position facing the entrance / exit A first support part that includes a vertically moving means, a path provided outside the main body part, and a transport means for transporting the load on the path, wherein the loading / unloading port can support the load from the bottom side thereof; And at least one of the path and the transport means, the first support part moves to a second support part for supporting the load in at least one of the path and the conveying means to a position below the second support part. There is a mouth or notch that allows The vertical movement means moves the first support part from above to below the second support part, thereby transferring the load from the first support part to the second support part, The load is transferred from the second support portion to the first support portion by moving the first support portion from below to above the second support portion.

  According to the second transport system of the present invention, the load is quickly transferred by the DLT method, that is, between the first and second support portions, as in the first transport system of the present invention described above. It is possible to efficiently load and unload the cargo transported above.

  According to another aspect of the first and second transport systems of the present invention, the transport means includes a plurality of rollers that are driven when moving along the path as the second support portion.

  According to this aspect, the conveying means is, for example, a roller conveyor, and includes a plurality of rollers as the second support portion. Specifically, a plurality of first rollers for supporting the entire bottom surface of the load (that is, the portion near the center and the portion near the periphery) are arranged as the second support portion in the path not related to the mouth or the notch. . In the route related to the mouth or notch, a plurality of pairs of second rollers for supporting the peripheral portions of the bottom surface of the load are arranged as second support parts on both sides of the mouth or the notch in the load conveying direction. Yes. The width of each first roller coincides with the width of each of the pair of second rollers arranged in the path. By providing such a pair of second rollers, a DLT transfer mechanism between the loading / unloading port (ie, the first support portion) and the path (ie, the second support portion) can be provided with a relatively simple configuration. Can be provided.

  In the first and second transport systems of the present invention, various aspects similar to the various aspects of the first and second storages of the present invention described above can be employed.

  The operation and other advantages of the present invention will become apparent from the best mode for carrying out the invention described below.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<First Embodiment>

  A configuration of the storage according to the first embodiment will be described with reference to FIGS. 1 to 5.

  First, the outline | summary of the conveyance system which has the storage which concerns on 1st Embodiment is demonstrated with reference to FIG. FIG. 1 shows an appearance of a transport system including a storage according to the first embodiment.

  In FIG. 1, the transport system 100 includes a rail 1, a vehicle 2, a stocker 10, and a controller 201. The rail 1 serves as a track for the vehicle 2 to travel. The controller 201 includes a processor, a memory, and the like as an example of control means, and is connected to each part of the transport system 100. In the semiconductor element manufacturing process, the controller 201 transports and transfers the FOUP 3 by the vehicle 2 and inside and outside the stocker 10. The listing is managed or controlled as described in detail later.

  The vehicle 2 is, for example, an OHT (Overhead Hoist Transport) (overhead traveling vehicle) driven by a linear motor as an example of a “conveyance vehicle”. The vehicle 2 is used as a FOUP 3 in a stocker 10, a manufacturing apparatus (not shown), an OHT buffer, a large stocker, or the like. Transport. The vehicle 2 has a hoist mechanism 2a, can hold the FOUP 3, and can move the held FOUP 3 up and down.

  As an example of the “load” according to the present invention, the FOUP 3 can store a plurality of various substrates (not shown) therein. The FOUP 3 has a flange portion 4 held by the hoist mechanism 2a on the upper surface, and a recess (not shown) engaged with a positioning pin 11a described later on the bottom surface.

  The stocker 10 includes a main body 10a, loading / unloading ports P1 and P2, an elevating mechanism 12, an in-storage conveyance unit 20, and a slide mechanism 16.

  FIG. 2 schematically shows the front of the storage of FIG. In FIG. 2, the main body portion 10 a is divided into four steps F <b> 1 to F <b> 4 equally in the vertical direction, and a plurality of openings H <b> 1 are formed on the side surface along the rail 1 (that is, the front surface in FIG. 1). And H2. In FIG. 2, each of the openings H1 and H2 is formed to a size that allows the FOUP 3 to be taken in and out of the main body 10a as an example of the “entrance / exit” according to the present invention. Each of the four openings H1 and H2 is arranged in the vertical direction at a predetermined horizontal distance, the four openings H1 are arranged along the same vertical direction G1, and the four openings H2 are the same vertical. They are lined up along the direction G2. FIG. 3 schematically shows the upper surface of the storage of FIG. In FIG. 3, the openings H1 and H2 are arranged along the rail 1 (that is, the alternate long and short dash line R1 in FIG. 3).

  As shown in FIGS. 2 and 3, in the present embodiment, the stocker 10 includes two entry / exit ports P <b> 1 and P <b> 2. With respect to the two loading / unloading ports P1 and P2, the loading / unloading port P1 is installed on the upstream side in the traveling direction of the vehicle 2, and the loading / unloading port P2 is installed at a predetermined horizontal distance downstream thereof. Each entry / exit port P1 and P2 is a port common to the four stages F1 to F4. Outside the main body 10a, the loading / unloading port P1 is moved up and down along the four openings H1, and the loading / unloading port P2 is moved up and down along the four openings H2. Each loading / unloading port P1 and P2 has a transfer surface 11 on which the FOUP 3 is transferred from the vehicle 2 at the center. Positioning pins 11 a are attached to the transfer surface 11. The positioning pin 11a is engaged with the recess of the FOUP 3 to be loaded / unloaded.

  A plurality of lifting mechanisms 12 are provided as an example of the “vertical moving means” according to the present invention, corresponding to the arrangement by the openings H1 and H2. The lifting mechanism 12 includes, for example, a pair of rails 13, a support portion 14, and an actuator (not shown) for each of the loading / unloading ports P <b> 1 and P <b> 2. The pair of rails 13 are attached to both sides of the four openings H1 or H2 on the outer wall of the main body 10a (that is, the front surface in FIG. 1) so that the longitudinal direction thereof is parallel to the vertical direction. The support part 14 supports the transfer surface 11 in the loading / unloading port P1 or P2. One end of the support portion 14 is fitted to the pair of rails 13. The elevating mechanism 12 drives the actuator to move the support part 14 up and down along the pair of rails 13 so that each of the loading / unloading ports P1 and P2 faces a first mounting part 21a or 21d described later. Move independently to position.

  The in-storage transport unit 20 includes a plurality of placement units 21 in the main body unit 10a, and controls the plurality of placement units 21 in a general manner so that a plurality of FOUPs 3 are provided in each stage F1 to F4. Transport independently, that is, transport in the storage. In the present embodiment, two entry / exit ports P1 and P2 are provided, and two first placement portions 21a and 21d are set for the plurality of placement portions 21 in each stage F1 to F4.

  In FIG. 3, the slide mechanism 16 is provided in each of the entry / exit ports P1 and P2 as an example of the “outside / inside movement means” according to the present invention. The slide mechanism 16 includes a pair of rollers (not shown), a ring-shaped rotation band, and an actuator for each of the entry / exit ports P1 and P2. The pair of rollers is configured to surround a ring-shaped rotation band. A part of the ring-shaped rotation band functions as the transfer surface 11 at the loading / unloading port P1 or P2. The slide mechanism 16 drives the actuator to rotate the pair of rollers to rotate the ring-shaped rotation band. By this rotation, the slide mechanism 16 is connected to the first placement portion 21a or 21d adjacent to the opening H1 or H2 and the loading / unloading port P1 or P2 at the position facing the first placement portion 21a or 21d. The FOUP 3 is moved horizontally between.

  Regarding the horizontal movement by the slide mechanism 16, specifically, when the FOUP 3 is moved from the loading / unloading port P1 or P2 to the first placement part 21a or 21d, the actuator rotates the pair of rollers to the right by a predetermined angle. With this rotation, when the rotation band is rotated to the right by a predetermined distance, the rotation band portion functioning as the transfer surface 11 becomes a groove on the opening H1 or H2 side (that is, the arrow D2 in FIG. 3 indicates Are drawn in order in the place) and placed below the entry / exit port P1 or P2. As a result, the FOUP 3 on the transfer surface 11 (that is, the entry / exit port P1 or P2) is horizontally moved to the first placement part 21a or 21d through the opening H1 or H2, and is moved to the first placement part 21a or 21d. Contained or placed. In addition, when the FOUP 3 is moved from the first placement part 21a or 21d to the loading / unloading port P1 or P2, the actuator moves a pair of rollers in accordance with the movement of the FOUP 3 from the first placement part 21a or 21d. Rotate the angle left. With this rotation, when the rotation band is rotated to the left by a predetermined distance, the rotation band portion functioning as the transfer surface 11 becomes a groove on the opening H1 or H2 side (that is, the arrow D2 in FIG. 3 indicates Are pulled out in order from the location) and placed in the center of the upper surface of the loading / unloading port P1 or P2. As a result, the FOUP 3 from the first placement portion 21a or 21d is horizontally moved to the transfer surface 11 (that is, the entry / exit port P1 or P2) through the opening H1 or H2 and placed on the entry / exit port P1 or P2. Is done. As this placement state, the recess of the FOUP 3 is engaged with the positioning pin 11 a of the transfer surface 11.

  Next, the configuration of the in-storage transport unit 20 will be described in detail with reference to FIGS. 4 and 5. FIG. 4 shows an arrangement of a plurality of placement units according to the first embodiment, and FIG. 5 shows a state after rotation of the plurality of placement units of FIG. 4 and 5 specifically correspond to the A1-A1 cross section in FIG. 2, and show the eight placement portions 21 arranged in the uppermost stage F1 of the stocker 10.

  In FIG. 4, the in-storage transport unit 20 moves the FOUP 3 horizontally in the transport direction D <b> 3 by the plurality of placement units 21, and performs in-storage transport independently on each floor F <b> 1 to F <b> 4. Eight mounting parts 21 are arranged so as to spread in two horizontal directions (that is, the horizontal direction and the vertical direction in FIG. 4) on each floor F1 to F4. The eight placement parts 21 are arranged at four corners in the main body part 10a, and include four rotary placement parts 21a to 21d including two first placement parts 21a and 21d, and these rotational placement parts 21a to 21a. It is comprised from four non-rotating mounting parts 21e-21h other than 21d.

  Each of the eight placement units 21 includes a plurality of rollers 23 and an actuator (not shown), and horizontally moves the FOUP 3 between the eight placement units 21. The plurality of rollers 23 are rotated by an actuator (not shown). The upper surface of each roller 23 functions as a placement surface on which the FOUP 3 is accommodated or placed. Regarding the horizontal movement of the FOUP 3, specifically, when the FOUP 3 is accommodated or placed on the placement portion 21e, when the plurality of rollers 23 in the placement portion 21e are rotated to the right, the FOUP 3 is placed on the placement portion 21e. Is moved horizontally to the right-side mounting portion 21f. In this case, when the plurality of rollers 23 in the mounting portion 21e are rotated counterclockwise, the FOUP 3 is horizontally moved to the mounting portion 21b adjacent to the left of the mounting portion 21e. In addition, each mounting part 21 may be provided with a belt conveyor instead of the plurality of rollers 23. For example, in this case, when the roller on which the belt is hung is rotated to the right, the FOUP 3 placed on the belt is horizontally moved to the right-side mounting portion, and when the roller is rotated to the left, The FOUP 3 is horizontally moved to the placement unit on the left side.

Each of the four rotary mounting portions 21a to 21d further includes a turntable 24 and an actuator (not shown), and rotates the moving direction and posture of the FOUP 3 by 90 degrees. The turntable 24 is disposed below the plurality of rollers 23 and is connected to a bearing (not shown) in the plurality of rollers 23. The turntable 24 is rotated 90 degrees in the horizontal plane by the actuator, and the plurality of rollers 23 are rotated 90 degrees in the horizontal plane. Regarding the rotation of the FOUP 3, specifically, when the turntable 24 is rotated 90 degrees to the right in the four rotation mounting portions 21a to 21d in the state of FIG. 4, as shown in FIG. Are rotated 90 degrees clockwise. By this rotation, the moving direction and posture of the FOUP 3 accommodated or placed in the rotary placement units 21a to 21d are rotated 90 degrees to the right. When the turntable 24 is rotated 90 degrees counterclockwise, the plurality of rollers 23 are integrally rotated 90 degrees counterclockwise as shown in FIG. By this rotation, the moving direction and posture of the FOUP 3 accommodated or placed in the rotary placement units 21a to 21d are rotated 90 degrees to the left.
(Incoming / outgoing operation between transport vehicle and storage)

  Next, the storage operation and the storage operation of the storage according to the present embodiment will be described with reference to FIGS. 1 and 4. In the following description, as an initial setting, the entry / exit port P1 functions as a dedicated port for entry and the entry / exit port P2 functions as a dedicated port for delivery.

  In FIG. 1, when the vehicle 2 enters the stocker 10, first, the vehicle 2 holding the FOUP 3 travels in the traveling direction D1 and stops at a position corresponding to the storage port P1 that is a storage target. Then, the arrival of the vehicle 2 holding the FOUP 3 is detected by the controller 201, and the lifting / lowering mechanism 12 moves the loading / unloading port P1 to a height at which the FOUP 3 can be horizontally moved to the stage to be loaded. When the stage to be stored is the uppermost stage F1, the incoming / outgoing port P1 is moved to a position corresponding to the first placement portion 21a adjacent to the opening H1 in the uppermost stage F1. Thereafter, the FOUP 3 to be received is lowered by the hoist mechanism 2a in the vehicle 2 and transferred (that is, received) to the transfer surface 11 in the loading / unloading port P1. At this time, the positioning pin 11a is engaged with the recess of the FOUP 3.

  When the FOUP 3 is received, the transfer surface 11 is rotated by the slide mechanism 16, and the FOUP 3 on the transfer surface 11 is placed on the first placement portion 21a through the opening H1. Thereafter, the FOUP 3 on the first placement unit 21a is moved to the desired placement unit (that is, transported in the storage unit) by the in-storage unit transport unit 20.

  In FIG. 4, let the rotation mounting part 21c which is the mounting part furthest from the 1st mounting part 21a be a desired mounting part. In this case, a transport path from the first mounting unit 21a to the rotary mounting unit 21c is set by the in-storage transport unit 20 based on the storage or mounting status of the FOUP 3 or the like. When the set conveyance path is a path from the first placement unit 21a to the rotation placement unit 21c via the rotation placement unit 21b, the non-rotation placement unit 21e, and the non-rotation placement unit 21f. The plurality of rollers 23 in each of these placement portions 21a, 21b, 21e, and 21f are rotated in order of distance from the rotation placement portion 21c. However, in each of the rotary mounting part 21b and the rotary mounting part 21c, the moving direction of the FOUP 3 and the plurality of rollers are moved before the FOUP 3 is moved from the first mounting part 21a or the non-rotating mounting part 21f. The plurality of rollers 23 are integrally rotated by 90 degrees in the horizontal plane by the turntable 24 so that the rotation direction of the rotation lines 23 coincides. Further, before the plurality of rollers 23 in the rotary mounting portion 21b are rotated, the front surface in the moving direction of the FOUP 3 is directed toward the non-rotating mounting portion 21e on the downstream side of the transport path. 24, the plurality of rollers 23 are integrally rotated 90 degrees in the horizontal plane, and the posture of the FOUP 3 is rotated 90 degrees in the horizontal plane. As a result, the received FOUP 3 is moved to the desired placement unit 21c, and is stored or placed in a predetermined posture on the desired placement unit 21c. Thereby, a series of warehousing operations are completed.

  At the time of delivery from the stocker 10 to the vehicle 2, the empty vehicle 2 that has finished receiving is first traveled further downstream in the traveling direction D <b> 1 and stopped at a position corresponding to the entry / exit port P <b> 2 to be delivered. Then, the arrival of the empty vehicle 2 is detected by the controller 201 in the same manner as at the time of warehousing, and the lifting / lowering mechanism 12 can place the FOUP 3 that is moved horizontally from the stage where the warehousing port P2 should be unloaded. Moved to height. When the stage to be delivered is the third stage F3, the third stage from the top, the entry / exit port P2 is moved to a position corresponding to the first placement portion 21d adjacent to the opening H2 in the third stage F3. In parallel with or before or after this movement, the FOUP 3 to be unloaded that is accommodated or placed in any of the placement units 21 is moved to the first placement unit 21d by the in-storage transport unit 20 (i.e., Transported in storage).

  The placement unit 21 in which the FOUP 3 to be delivered is accommodated or placed is referred to as a rotation placement unit 21b. In this case, the transport path 20 in the storage box sets a transport path from the rotary mounting unit 21b to the first mounting unit 21d adjacent to the opening H2 based on the storage or mounting status of the FOUP 3. The set conveyance path is transferred from the rotary mounting unit 21b to the first mounting unit 21d via the rotary mounting unit (first mounting unit) 21a, the non-rotating mounting unit 21h, and the non-rotating mounting unit 21g. In the case of the reaching path, the plurality of rollers 23 in each of the placement portions 21b, 21a, 21h, and 21g are rotated in order from the first placement portion 21d. However, in each of the rotary mounting part 21a and the first mounting part 21d, before the FOUP 3 is moved from the rotary mounting part 21c or the non-rotating mounting part 21g, the moving direction of the FOUP 3 and the plurality of rollers The plurality of rollers 23 are integrally rotated by 90 degrees by the turntable 24 so that the rotation direction of the rollers 23 coincides. Furthermore, before the plurality of rollers 23 in each of the rotary mounting portion 21a and the first mounting portion 21d are rotated, the non-rotating mounting portion 21h in which the front surface in the moving direction of the FOUP 3 is downstream of the transport path. Alternatively, the plurality of rollers 23 are integrally rotated 90 degrees by the turntable 24 so that the FOUP 3 is rotated 90 degrees so as to be directed toward the loading / unloading port P2. As a result, the FOUP 3 to be delivered is moved to the first placement unit 21d and is stored or placed in a predetermined posture on the first placement unit 21d. Then, the plurality of rollers 23 in the first loading portion 21d are rotated toward the loading / unloading port P2, and the FOUP 3 on the first loading surface 21d is moved to the transfer surface 11 in the loading / unloading port P2. At this time, the transfer surface 11 is rotated by the slide mechanism 16 in synchronization with the rotation of the plurality of rollers 23 in the first placement portion 21d, and the concave portion of the FOUP 3 from the first placement portion 21d becomes the positioning pin 11a. Engaged.

  Thereafter, the FOUP 3 on the transfer surface 11 is held by the hoist mechanism 2a in the vehicle 2, and the FOUP 3 is raised into the main body 2 in the held state. As a result, the FOUP 3 to be delivered is transferred from the stocker 10 to the vehicle 2 (ie, delivered).

  Thus, according to the stocker 10 of the present embodiment, the FOUP 3 is horizontally placed between the loading / unloading port P1 or P2 common to the plurality of stages F1 to F4 and the first placement part 21a or 21d in each stage F1 to F4. Since they are moved, the loading / unloading ports P1 and P2 can be in an empty state immediately after loading and immediately before loading. Moreover, since each in-stage F1 to F4 is independently transported in the storage, a plurality of FOUPs 3 can be transported in the storage in a short time. As a result, the warehousing time and the warehousing time required for one FOUP 3 at the warehousing / unloading ports P1 and P2 are shortened, and the transport time in the storage is shortened, so that the FOUP 3 can be efficiently loaded and unloaded.

  In the present embodiment, as shown in FIG. 1, the stocker 10 is provided with two loading / unloading ports P1 or P2. For example, two new loading / unloading ports are provided between the loading / unloading ports P1 and P2. P3 and P4 are provided. In this case, the FOUP 3 is transferred to the loading / unloading port P1 by the vehicle 2, the FOUP 3 is picked up from the loading / unloading port P3 by the vehicle 2 which is empty by the transfer, and the FOUP 3 is transferred to the loading / unloading port P4 by the subsequent vehicle 2. The FOUP 3 is lowered to the loading / unloading port at a more upstream position, that is, the FOUP 3 is picked up from the loading / unloading port P2 by the subsequent vehicle 2 that has become empty by the transfer, and the lowered state (ie, FOUP3 is picked up at a downstream entry / exit port. If such conveyance and operation control are performed, efficient loading and unloading using the limited vehicle 2 becomes possible.

  In addition, in this embodiment, although the four rotation mounting parts 21a-21d arrange | positioned at four corners are provided with the turntable 24, all the eight mounting parts 21 may be provided with the turntable 24. FIG.

  FIG. 6 is a cross-sectional view illustrating an arrangement of a plurality of placement units 121 included in the in-storage transport unit 120. In FIG. 6, the in-storage conveyance unit 120 includes eight placement units 121 each having a turntable 124. While the non-rotating mounting parts 21e to 21h shown in FIG. 4 move the FOUP 3 only in one direction, the mounting parts 121e to 121h corresponding to the non-rotating mounting parts 21e to 21h The FOUP 3 can be moved in two directions by rotation. The in-storage transport unit 120 moves the FOUP 3 from the first mounting unit 121a adjacent to the opening H11 to the desired mounting unit 121g, for example. At this time, when another FOUP 3 is already placed on the placement portion 121h between the first placement portion 121a and the desired placement portion 121g, an arrow D4 indicates the shortest transport path. Set the transport route. The set conveyance path is a path from the first placement unit 121a to the desired placement unit 121g via the placement unit 121b, the placement unit 121e, and the placement unit 121f. Time can be further shortened.

  In this embodiment, each of the plurality of placement units 21 has the same area, and one FOUP 3 can be stored or placed in one placement unit 21. At least two of the plurality of non-rotating mounting parts 21e to 21h arranged between 21a to 21d may be combined to constitute one mounting part having an increased area.

  FIG. 7 is a cross-sectional view illustrating an arrangement of a plurality of placement units 221 provided in the in-storage transport unit 220. In FIG. 7, the in-storage transport unit 220 includes two placement units 221 e and 221 f having eight rollers 223. While the non-rotating mounting parts 21e to 21h shown in FIG. 4 accommodate or place one FOUP 3, the mounting parts 221e and 221f corresponding to these non-rotating mounting parts 21e to 21h have a maximum of three. The FOUP 3 can be accommodated or placed. For example, the in-storage transport unit 220 moves the FOUP 3 from the first mounting unit 221a to the desired mounting unit 221c. In this case, the conveyance path indicated by the arrow D5 is set as the shortest conveyance path. The set conveyance route is a route from the first placement unit 221a to the desired placement unit 221c via the placement unit 221b and the placement unit 221e. When the FOUP 3 moves the mounting unit 221e, the eight rollers 223 in the mounting unit 221e are rotated at a high speed, and the moving time is longer than when the two non-rotating mounting units 21e and 21f illustrated in FIG. 4 are moved. Is shortened. Thereby, while being able to shorten the conveyance time of conveyance in a storage, more FOUP3 can be accommodated or mounted in the main-body part 210a.

  In the present embodiment, the slide mechanism 16 is provided as the outer / inner moving means. Instead of the slide mechanism 16, a mechanism that moves between the first placement portion 21a or 21d and the loading / unloading port P1 or P2 is provided. You may prepare.

  FIG. 8 is a cross-sectional view showing the transfer mechanism 330 provided in the stocker 310. In FIG. 8, the stocker 310 includes a transfer mechanism 330 that moves between the first placement unit 321a or 321d and the loading / unloading port P1 or P2. The transfer mechanism 330 includes a support plate 331 and a vertical and horizontal movement unit 332. The support plate 331 supports the FOUP 3 from the bottom side, and is moved by the vertical horizontal moving unit 332 between the first placement unit 321a or 321d and the loading / unloading port P1 or P2 through the opening H31 or 32. Is done. The support plate 331 moved to the first placement portion 321a is indicated by a two-dot chain line in FIG. The plurality of rollers 323a in the first placement unit 321a are arranged so as not to contact the support plate 331 moved to the first placement unit 321a or 321d, and the arrangement and form thereof are different from those of the other placement unit 321b. ˜321c and 321e˜321h differ from those of the plurality of rollers 323. Further, the support plate 331 moved to the loading / unloading port P1 or P2 is at a position corresponding to the transfer surface 11 on which the FOUP 3 is transferred from the transport vehicle 2 (that is, indicated by a solid line in FIG. 8). The transfer mechanism 330 moves the support plate 331 in the vertical direction and the horizontal direction, and similarly to the slide mechanism 16 shown in FIG. 4, the first placement unit 321 a or 321 d, the loading / unloading port P 1 or P 2, The FOUP 3 can be moved horizontally through the opening H31 or H32.

  In the present embodiment, the plurality of placement units 21 are configured to be able to horizontally move the FOUP 3 between each other. However, apart from the plurality of placement units that house or place the FOUP 3, a plurality of placement units 21 An internal movement mechanism for horizontally moving the FOUP 3 may be provided.

  FIG. 9 is a cross-sectional view showing a plurality of placement units 421 and an internal movement mechanism 430 included in the in-storage transport unit 420. In FIG. 9, like the plurality of placement units 21 shown in FIG. 4, the placement unit 421 has eight placements arranged so as to spread in two horizontal directions (that is, the horizontal direction and the vertical direction in FIG. 9). Although each of the placement units 421a to 421h includes a plurality of rollers 23, each of the eight placement units 421a to 421h includes a shelf for accommodating or placing the FOUP 3. 422. The shelf 422 includes two shelf portions 422a so as to support both ends of the FOUP 3.

  The internal movement mechanism 430 includes, for example, a support plate 431, a support plate slide portion 432, a movement portion 433, and a movement rail 434 as an example of the “internal movement means” according to the present invention, and a plurality of placement portions. By lifting the FOUP 3 between the 421, the FOUP 3 can be moved horizontally between the plurality of placement units 421. The support plate 431 is formed in a size that can be arranged between the two shelf portions 422a in the respective placement portions 421a to 421h, and instead of the shelf 422 when moving horizontally, FOUP3 (specifically, FOUP3 (Center part) is supported from the bottom side. The support plate slide part 432 can slide the support plate 431 in one horizontal direction (that is, the vertical direction in FIG. 9). For example, the support plate 431 (that is, a solid line in FIG. 9) disposed on the placement part 421b. Is slid (horizontally moved) to the first placement portion 421a arranged in one horizontal direction of the placement portion 421b (that is, the downward direction in FIG. 9), and placed on the first placement portion 421a. (That is, the support plate 431 indicated by a two-dot chain line in FIG. 9). Such a support plate slide part 432 is fixed to the upper surface of the moving part 433. The moving unit 433 moves along the moving rail 434 extending in one horizontal direction orthogonal to the sliding direction of the support plate slide unit 432 (that is, the left and right direction in FIG. 9), thereby moving the support plate slide unit 432 horizontally. . During the horizontal movement, the moving unit 434 moves the support plate slide unit 432 up and down. Specifically, for example, when moving the FOUP 3 accommodated or placed in any of the placement units 421, the movement unit 434 supports the support plate 431 so that the height of the support plate 431 is higher than the shelf 422. The plate slide part 432 is raised. As a result of this rise, the FOUP 3 is supported by the support plate 431 instead of the placement portion 421. In addition, when the FOUP 3 supported by the support plate 431 is stored or placed on any of the placement units 421, the moving unit 434 supports the support plate 431 so that the height of the support plate 431 is lower than the shelf 422. The plate slide part 432 is lowered. By this lowering, the FOUP 3 supported by the support plate 431 is transferred to one of the placement units 421.

  Thus, the support plate 431 is horizontally moved between the plurality of placement portions 421a to 421h by the support plate slide portion 433 and the moving portion 434, so that the FOUP 3 is horizontally moved between the plurality of placement portions 421a to 421h. Is done. Accordingly, the internal movement mechanism 430 can shorten the transport time for transport in the storage, as in the present embodiment. As a means for horizontally moving the FOUP 3 between the first placement unit 421a or 421d and the loading / unloading port P1 or P2, there is a mechanism such as a robot arm that moves while holding the upper surface of the FOUP 3.

In addition, as shown in FIG. 10, it is also possible to construct the stocker 10 by building each stage of the stocker 10 in advance as stocker elements 10e independent of each other and stacking them in the desired number of stages. More specifically, as shown in FIG. 10A, for example, when the height L1 of the space between the rail 1 and the manufacturing apparatus 101 disposed below the rail 1 is relatively wide, the stocker element 10e ( That is, by stacking four stages (indicated by dotted lines in FIG. 10A), a four-stage stocker 10 similar to that shown in FIG. 1 can be constructed. Alternatively, as shown in FIG. 10B, for example, when the height L2 of the space between the rail 1 and the manufacturing apparatus 501 disposed below it is relatively narrow, the stocker element 10e (that is, FIG. 10). By stacking two stages (indicated by dotted lines in (b)), a two-stage, ie, relatively thin stocker 50 can be constructed. In any case, if the stocker element 10e is mass-produced, a stocker having a height suitable for a space of an arbitrary height can be easily constructed, which is very advantageous in practice.
<Second Embodiment>

  Next, the configuration of the transport system according to the second embodiment will be described with reference to FIGS. 11 to 13.

  First, an outline of a transport system according to the second embodiment will be described with reference to FIG. FIG. 11 shows the appearance of the transport system according to the second embodiment. The transport system includes a storage box that is substantially the same type as the storage box (ie, stocker 10) shown in FIG. The second embodiment differs from the first embodiment in that the FOUP 3 is loaded and unloaded with a later-described transport unit instead of the transport vehicle. In the second embodiment, elements that are configured in the same manner as in the first embodiment are denoted by the same reference numerals, and description of the elements is omitted.

  In FIG. 11, the transport system 600 includes a stocker 60, a manufacturing apparatus 101, a path 70, a conveyor 71, and a controller 202. The path 70 extends along the side wall of the main body 60a of the stocker 60 (that is, the front surface in FIG. 11). The controller 202 includes a processor, a memory, and the like as an example of a control unit and is connected to each part of the transport system 600. In the semiconductor element manufacturing process, the controller 202 transports the FOUP 3 by the conveyor 71 and inside and outside the stocker 60. Manage or control the transfer. Particularly in the present embodiment, the controller 202 controls the conveyor 71 to carry the FOUP 3 on the path 70 in the DLT method as described in detail below.

  Similar to the stocker 10 shown in FIG. 1, the stocker 60 includes a main body 60 a, loading / unloading ports P <b> 1 and P <b> 2, an elevating mechanism 62, an in-storage transport unit 20, and a slide mechanism 16. The entry / exit ports P1 and P2 have a transfer surface 11 as in the stocker 10 shown in FIG. The transfer surface 11 supports the central portion of the bottom surface of the FOUP 3 as an example of the “first support portion” according to the present invention.

  The elevating mechanism 62 includes, for example, a pair of rails 63, a support portion 64, and an actuator (not shown). However, unlike the pair of rails 13 shown in FIG. 1, the pair of rails 63 extends to the lower part of the path 70 beyond the position facing the opening H1 or H2. In addition, the support portion 14 illustrated in FIG. 1 has a portion surrounding the periphery of the transfer surface 11, whereas the support portion 64 is a portion for supporting the transfer surface 11 (that is, in the transfer surface 11). Only the portion connected to the end on the main body 60a side). The elevating mechanism 62 drives the actuator to move the support portion 64 up and down along the pair of rails 63. By this vertical movement, the lifting mechanism 62 moves the transfer surface 11 between the upper part and the lower part of the conveyor part 72 via a conveyor part 72 described later.

  The manufacturing apparatus 101 includes a main body 101a, a loading / unloading port P3, an elevating mechanism 62, and a slide mechanism 16. The manufacturing apparatus 101 performs a predetermined process related to semiconductor element manufacturing on the FOUP 3 in the main body 101a. The raising / lowering mechanism 62 and the slide mechanism 16 are equivalent to those provided in the stocker 60 described above, and the transfer surface 11 in the loading / unloading port P3 is moved from a position facing the opening H3 to below the conveyor portion 72 described later. It is movable.

  The conveyor 71 includes a plurality of conveyor portions 72, a pair of support walls (not shown), and an actuator as an example of the “conveying means” according to the present invention. The plurality of conveyor portions 72 are attached inside the pair of support walls so as to form a pair along the path 70 (indicated by a one-dot chain line in FIG. 11) and on both sides of the path 70. Each of the plurality of conveyor portions 72 is, for example, a Caterpillar (registered trademark) type conveyor. As an example of the “second support portion” according to the present invention, both end portions on the bottom surface of the FOUP 3 (that is, left and right end portions with respect to the path 70). Support. Each of the pair of conveyor portions 72 located on both sides of the path 70 is configured so that one FOUP 3 can be placed thereon. The conveyor 71 conveys the FOUP 3 in the conveyance direction D6 by simultaneously rotating the pair of conveyor portions 72 on which the FOUP 3 is placed by driving the actuator.

  FIG. 12 schematically shows the upper surface of the storage of FIG. In FIG. 12, the plurality of conveyor portions 72 are configured of a first conveyor portion 72 a and a second conveyor portion 72 b having different lengths along the path 70 in the present embodiment. In the conveyor 71, for example, an area A1 corresponding to the vertical direction of the loading / unloading port P1 (that is, indicated by a one-dot chain line in FIG. 12) includes one first conveyor portion 72a and two second conveyor portions 72b. ing. These two second conveyor portions 72b are attached to a support wall (not shown) with a through-hole C1 (indicated by a one-dot chain line in the area A1 in FIG. 12) between them. The through-hole C <b> 1 is an opening through which the loading / unloading port P <b> 1 (in other words, the transfer surface 11) penetrates the second conveyor portion 72 as an example of “mouth or notch” according to the present invention. The lifting mechanism 62 moves the transfer surface 11 between above and below the conveyor part 72 (that is, the first conveyor part 72a and the two second conveyor parts 72b) in the area A1 through the through-hole C1. . In addition, about the conveyor 71, the conveyor part 72 corresponding to these entrance / exit ports P2 and P3 is comprised also about the entrance / exit ports P2 and P3 similarly to the entrance / exit port P1.

  Next, transfer of the FOUP 3 will be described with reference to FIGS. FIG. 13 schematically shows one side of the storage of FIG. 11 (that is, the right side in FIG. 11). In FIG. 13, when transferring the FOUP 3 from the conveyor 71 to the loading / unloading port (that is, the loading / unloading port P 1, P 2, or P 3), the lifting mechanism 62 moves the transfer surface 11 from below the conveyor portion 72 upward. Let At this time, the transfer surface 11 enters between the first conveyor portion 72a and the second conveyor portion 72b, and the support portion 64 in the lifting mechanism 62 enters between the two second conveyor portions 72b. Subsequently, the transfer surface 11 is further moved upward, and the central portion of the FOUP 3 that is not supported by the first conveyor portion 72a and the second conveyor portion 72b is supported by the transfer surface 11, so that the FOUP 3 is a conveyor. It is transferred from the part 72 (namely, conveyor 71) to the transfer surface 11 (namely, loading / unloading port).

When transferring the FOUP 3 from the loading / unloading port to the conveyor 71, the lifting mechanism 62 moves the transfer surface 11 supporting the FOUP 3 from above the conveyor portion 72 to below. At this time, the transfer surface 11 supporting the central part of the FOUP 3 enters between the first conveyor part 72a and the second conveyor part 72b, and the support part 64 in the lifting mechanism 62 is between the two second conveyor parts 72b. Get in. Subsequently, the transfer surface 11 is further moved downward, and both ends of the FOUP 3 not supported by the transfer surface 11 are supported by the first conveyor portion 72a and the second conveyor portion 72b, so that the FOUP 3 is transferred. It is transferred to the conveyor part 72 (namely, conveyor 71) from the mounting surface 11 (namely, entrance / exit port).
(Incoming / outgoing operation between transport means and storage)

  Next, the loading / unloading operation between the transfer means and the storage in the transfer system according to the present embodiment will be described with reference to FIGS. In the following description, as with the stocker 10 shown in FIG. 1, as an initial setting, the entry / exit port P1 functions as a dedicated port for entry and the entry / exit port P2 functions as a dedicated port for delivery. Has been.

  In FIG. 11, when entering the stocker 60 from the conveyor 71, first, the controller 202 enters the entry / exit port P <b> 1 upstream of the area A <b> 1 in the path 70 (that is, indicated by a one-dot chain line in FIG. 12). Power FOUP3 is detected. In this case, before the FOUP 3 to be stored is placed in the area A1, the transfer mechanism 11 at the storage port P1 is moved below the conveyor portion 72 via the through-hole C1 by the lifting mechanism 62. Is done. Thereafter, the conveyor 71 places the FOUP 3 to be received in the area A1. Then, the transfer mechanism 11 is moved above the conveyor part 72 via the through-hole C1 by the elevating mechanism 62, and the FOUP 3 to be stored is transferred from the conveyor part 72 to the transfer surface 11 (that is, stored). . Subsequently, when the stage where the FOUP 3 is to be received is the uppermost stage F1, the transfer surface 11 is moved to a position corresponding to the uppermost stage F1 by the elevating mechanism 62. Thereafter, the transfer mechanism 11 is rotated by the slide mechanism 16, and the FOUP 3 on the transfer surface 11 is mounted on the first mounting portion 21a through the opening H1. Thereafter, the FOUP 3 on the first placement unit 21a is moved to the desired placement unit (that is, transported in the storage unit) by the in-storage unit transport unit 20. Thereby, a series of warehousing operations are completed.

  At the time of delivery from the stocker 60 to the conveyor 71, first, the FOUP 3 on the desired placement unit is moved to the first placement unit 21d (that is, transported in the storage unit) by the transport unit 20 in the storage unit. In parallel or before or after this movement, the transfer mechanism 11 at the loading / unloading port P2 is moved to a position corresponding to the stage to be unloaded by the lifting mechanism 12. Then, the FOUP 3 is horizontally moved from the first placement unit 21d to the transfer surface 11 by the transport unit 20 in the storage, and the FOUP 3 to be delivered is placed on the transfer surface 11. Thereafter, the controller 202 detects that the FOUP 3 is not present on the conveyor 71 in the area A2 corresponding to the vertical direction of the loading / unloading port P2 (that is, indicated by a one-dot chain line in FIG. 12). Then, the transfer mechanism 11 on which the FOUP 3 to be unloaded is moved by the elevating mechanism 62 is moved below the conveyor portion 72 via the through-hole C1, and the FOUP 3 to be unloaded is transferred from the transfer surface 11 to the conveyor portion. 72 (i.e., delivery). Then, the FOUP 3 to be delivered is transported to the downstream side of the path 70 by the conveyor 71. Thereafter, the transfer surface 11 is moved above the conveyor portion 72 via the through-hole C1 by the elevating mechanism 62 while avoiding the time when the FOUP 3 is conveyed in the area A2. Thereby, a series of leaving operations are completed.

  Thus, according to the conveyance system 600 of this embodiment, the transfer surface 11 is moved between the upper part and the lower part of the conveyor part 72 via the through-hole C1. Thereby, since the FOUP 3 is quickly transferred between the transfer surface 11 and the conveyor portion 72, the FOUP 3 conveyed on the path 70 can be efficiently loaded and unloaded.

  In the present embodiment, the conveyor 71 includes a plurality of conveyor portions 72, but may include a plurality of rollers instead of the plurality of conveyor portions 72.

  FIG. 14 is a diagram having the same concept as in FIG. 12, and schematically shows an upper surface of a conveyor 771 which is a modified example of the conveyor 71 shown in FIG. 12. In FIG. 14, the conveyor 771 includes a plurality of rollers 772 and an actuator. The conveyor 771 conveys the FOUP 3 in the conveyance direction D7 by rotating a plurality of rollers 772 on which the FOUP 3 is mounted by driving an actuator.

  The plurality of rollers 772 are arranged along the path 70, and include a first roller 772a and a second roller 772b having different widths. As shown in FIG. 14, on the conveyor 771, for example, five second rollers 772b are hung on an area A11 corresponding to the vertical direction of the loading / unloading port P1 (that is, indicated by a one-dot chain line in FIG. 14). These five second rollers 772b are installed so as to surround the through-hole C11 (that is, indicated by a one-dot chain line in the area A11 in FIG. 14). The through-hole C11 is an opening through which the loading / unloading port P1 (in other words, the transfer surface 11) passes through the second roller 772b as an example of the “mouth or cut” according to the present invention. The lifting mechanism 62 moves the transfer surface 11 between the upper and lower portions of the plurality of rollers 772 (that is, the five second rollers 772b) in the area A11 through the through-hole C11.

  In the transport system 700 including such a conveyor 771, the transfer surface 11 is moved between the upper and lower portions of the plurality of rollers 772 through the through-hole C11, similarly to the transport system 600 shown in FIG. Thus, since the FOUP 3 is quickly transferred between the loading / unloading port and the conveyor 772, the FOUP 3 conveyed on the path 70 can be efficiently loaded / unloaded.

  The present invention is not limited to the above-described embodiments, and can be changed as appropriate without departing from the spirit or concept of the invention that can be read from the claims and the entire specification, and storage and transport accompanying such changes. The system is also included in the technical scope of the present invention.

It is a perspective view which shows the external appearance of a conveyance system provided with the storage which concerns on 1st Embodiment. It is a front view which shows the front of the storage of FIG. 1 typically. It is the top view which looked at the storage of FIG. 1 from the upper surface side. It is sectional drawing which shows the arrangement | sequence of the some mounting part which concerns on 1st Embodiment. It is sectional drawing which shows the state after rotation of the some mounting part of FIG. It is sectional drawing which shows the modification of the some mounting part of FIG. It is sectional drawing which shows the modification of the some mounting part of FIG. It is sectional drawing which shows the modification of the outer / inner moving means of FIG. It is sectional drawing which shows an example of the some mounting part which concerns on this invention. It is a perspective view which shows the external appearance of the storehouse set formed by stacking a plurality of storehouses according to the present invention. It is a perspective view which shows the external appearance of the conveyance system which concerns on 2nd Embodiment. It is the top view which looked at the storage of FIG. 11 from the upper surface side. It is a side view which shows typically the side of the storage of FIG. It is the upper side figure which looked at the modification of the conveyance system concerning a 2nd embodiment from the upper surface side.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Rail, 2 ... Vehicle (ceiling traveling vehicle), 3 ... FOUP (load), 10 ... Stocker (storage), 12 ... Lifting mechanism, 16 ... Slide mechanism, 21 ... Loading part, 100 ... Conveyance system

Claims (9)

A main body portion that is divided into a plurality of stages in the vertical direction, and an inlet / outlet capable of loading and unloading is provided so as to be arranged in each of the plurality of stages in the vertical direction;
In the main body, each of the plurality of stages is arranged so as to spread in two horizontal directions, and each of the loads can be accommodated or placed, and the load can be horizontally moved between each other. A plurality of mounting units,
Outside the main body part, a storage port common to the plurality of stages that can move up and down along the doorway in each of the plurality of stages, and
A vertically moving means for vertically moving the loading / unloading port;
In each of the plurality of stages, among the plurality of placement units, between the one placement unit adjacent to the entrance and the entry / exit port when moved to a position facing the one placement unit, An outside / inside moving means capable of horizontally moving the load through the entrance / exit. A main body portion that is divided into a plurality of stages in the vertical direction, and an inlet / outlet capable of loading and unloading is provided so as to be arranged in each of the plurality of stages in the vertical direction;
In the main body portion, each of the plurality of stages is arranged so as to spread in two horizontal directions, and a plurality of placement portions capable of accommodating or placing the load, respectively.
In the main body, internal movement means capable of horizontally moving the load between the plurality of placement portions in each of the plurality of stages,
Outside the main body part, a storage port common to the plurality of stages that can move up and down along the doorway in each of the plurality of stages, and
A vertically moving means for vertically moving the loading / unloading port;
In each of the plurality of stages, among the plurality of placement units, between the one placement unit adjacent to the entrance and the entry / exit port when moved to a position facing the one placement unit, An outside / inside moving means capable of horizontally moving the load through the entrance / exit.   The storage according to claim 1 or 2, wherein the outer / inner moving means is provided in the storage / exit port.   The storage according to claim 1 or 2, wherein the outer / inner moving means is provided in the one mounting portion. The loading / unloading port can be moved up and down beyond the main body, beyond the position facing the doorway,
The vertical movement means moves the entry / exit port up and down beyond a position facing the entrance / exit,
The loading / unloading port and the path so that the load can be transferred between the loading / unloading port and the path provided outside the main body when moved beyond the position facing the doorway. The storage according to any one of claims 1 to 4, wherein the storage is configured. The path extends along a side wall of the main body;
A plurality of the entrances are provided in each of the plurality of stages so that a plurality of arrays arranged in the vertical direction are present on the side wall at a predetermined horizontal distance,
The storage according to claim 5, wherein a plurality of the vertical movement means are provided corresponding to the plurality of arrays. The storage according to claim 5 or 6,
The pathway;
Transport means for transporting the load on the route,
The entry / exit port has a first support part capable of supporting the load from the bottom side thereof,
At least one of the path and the transport means allows the first support part to move to a second support part for supporting the load in at least one of the path and below the second support part. A mouth or cut is provided,
The vertical movement means moves the first support portion from above to below the second support portion, thereby transferring the load from the first support portion to the second support portion, and the second support portion. The load is transferred from the second support part to the first support part by moving the first support part from below to above. A main body provided with a doorway for loading and unloading; and
A plurality of placement portions arranged in the main body portion, each of which can receive or place the load;
Outside of the main body, a loading / unloading port that can move up and down beyond the position facing the doorway,
A vertically moving means for vertically moving the entry / exit port beyond a position facing the entrance / exit, a path provided outside the main body,
Transport means for transporting the load on the route,
The entry / exit port has a first support part capable of supporting the load from the bottom side thereof,
At least one of the path and the transport means allows the first support part to move to a second support part for supporting the load in at least one of the path and below the second support part. A mouth or cut is provided,
The vertical movement means moves the first support portion from above to below the second support portion, thereby transferring the load from the first support portion to the second support portion, and the second support portion. The load is transferred from the second support part to the first support part by moving the first support part from below to above.   9. The transport system according to claim 7, wherein the transport unit includes a plurality of rollers that are driven when the second support unit is moved along the path.

Images