JP5332930B2 - Automatic warehouse - Google Patents

Description

  The present invention relates to an automatic warehouse, and more particularly to an automatic warehouse that stores articles between a transfer device and a processing device.

  In semiconductor and liquid crystal manufacturing factories, semiconductor devices and liquid crystal devices are formed on a substrate through various processing configurations such as thin film formation, oxidation, and etching on a substrate such as a silicon wafer and a glass plate. Between this type of processing apparatus, the substrate is stored in a cassette (an example of an article) and conveyed by an automatic conveyance carriage in units of cassettes. In order to adjust the processing time between the transport device and the processing device, a buffer called a pre-device automatic warehouse is provided at the delivery place between the processing device and the transport device (see, for example, Patent Document 1).

  A conventional automatic warehouse in front of a device includes a plurality of cassette storage fixed shelves arranged at intervals in the vertical direction, and a transfer device capable of delivering articles between the fixed shelves. The fixed shelves are arranged at intervals in the vertical direction, and the uppermost fixed shelf is a cassette delivery place with the automatic conveyance carriage as a conveyance device. And the cassette delivery port with a processing apparatus is arrange | positioned under the lowermost fixed shelf. The substrate is taken out from the cassette by the processing device at this transfer port, and the substrate is processed by the processing device.

  The transfer device is arranged facing the side opposite to the fixed shelf processing device, and transfers the cassette between the fixed shelves and between each fixed shelf and the delivery port. By providing such a pre-device automatic warehouse, it is possible to carry in and carry out articles continuously without system failure even if the supply or unloading of the cassette is delayed due to a trouble with the processing device or the transport device.

JP 2001-298069 A

  In such an automatic warehouse, it is conceivable to provide a manual port through which a cassette can be manually transferred to a fixed shelf in order to deal with prototypes and limited express products. However, in the conventional automatic warehouse, since the transfer device moves on the front surface of the fixed shelf, the distance to the fixed shelf becomes long. For this reason, an operator has to extend his / her arm and put in / out the article, which makes it difficult to put in / out the article.

  An object of the present invention is to enable an operator to easily put in and take out articles in an automatic warehouse.

The automatic warehouse according to the present invention includes a plurality of fixed shelves, a transfer device, and a slide shelf. The plurality of fixed shelves can place articles. The transfer device moves along a plurality of fixed shelves and transfers articles between the plurality of fixed shelves. The slide shelf includes a mounting table on which an article can be mounted, and a telescopic rail provided with the mounting table and movable in a horizontal direction that approaches and moves away from a position at which the transfer device can transfer the mounting table. Have.
In this automatic warehouse, articles are supplied from the transfer device to the fixed shelf and transferred to the fixed shelf. Further, the article is transferred between the fixed shelves by the transfer device. When an article such as a prototype or an express product is generated, the slide shelf mounting table is pulled out. Then, the mounting table moves in a direction away from the position where the transfer device can be transferred by the telescopic rail. Thus, the article can be brought closer to the worker. Here, since the mounting table on which the article can be placed is configured to approach and separate from the position where the article can be transferred, the article can be taken in and out of the automatic warehouse. it can. For this reason, the operator can easily take in and out the article.

The automatic warehouse faces the outer periphery of a processing apparatus that performs processing related to articles, and a plurality of fixed shelves are arranged in the vicinity of the transfer section with the processing apparatus, so that the transfer apparatus can transfer articles to the transfer section. It may be an automatic warehouse. The telescopic rail may extend and contract across the movement path of the transfer device that connects the delivery unit and the plurality of fixed shelves.
In this case, since the mounting table crosses the movement path of the transfer device, the mounting table can be brought closer to the operator even if the mounting table is arranged at a position accessible by the transfer device in the automatic warehouse. .

You may further provide the outer wall panel which arrange | positions so that a fixed shelf and a transfer apparatus may be enclosed, and has an opening which can mount the mounting base in which the expansion-contraction rail and the article | item were mounted.
In this case, even if the outer wall panel is provided to protect the article, the opening formed in the outer wall panel can be minimized.
Furthermore, the automatic warehouse receives a sliding door that can be opened and closed in the opening, an electromagnetic door lock that locks and unlocks the slide door, and a retraction process of the transfer device and an instruction to unlock the door lock. The door opening command button may be provided.

  According to the present invention, since the mounting table on which the article can be placed is configured to approach and separate from the position where the article can be transferred, the placing table is taken in and out of the automatic warehouse, and the article is loaded and unloaded. can do. For this reason, the operator can easily take in and out the article.

The perspective view of the automatic warehouse by one Embodiment of this invention. The front view except the outer wall panel. FIG. The front enlarged view of a transfer apparatus. The perspective view of a slide shelf. The block diagram of the control system of an automatic warehouse. The flowchart of a slide shelf process. The flowchart of a cassette interruption process.

(1) Overall Configuration of Automatic Warehouse In FIGS. 1 to 3, an automatic warehouse 10 according to an embodiment of the present invention includes, for example, an unillustrated overhead traveling cart and a semiconductor processing apparatus 12 as an example of a processing apparatus (see FIG. It is an automatic warehouse in front of the device arranged between 3). The automatic warehouse 10 is arranged so as to overlap a delivery port (an example of a delivery unit) 14 arranged on the outer periphery of the semiconductor processing apparatus 12. The delivery port 14 has, for example, four cassette mounting tables 14a.

  The automatic warehouse 10 stores a cassette (an example of an article) C that stores a plurality of unprocessed substrates that are loaded from an automatic conveyance cart and processed by the semiconductor processing apparatus 12. In addition, the cassette C storing the processed substrates processed by the semiconductor processing apparatus 12 and carried out by the automatic transfer cart is stored. The automatic warehouse 10 includes a frame 20, an outer wall panel 22 disposed so as to surround the outer surface of the frame 20, a fixed shelf 24 for placing a cassette C, a slide shelf 25, and a transfer device 26. ing. The slide shelf 25 is used by an operator to carry the cassette C into and out of the automatic warehouse 10 manually. The transfer device 26 is controlled by the warehouse control unit 100 shown in FIG. The transfer device 26 conveys the cassette C among the plurality of fixed shelves 24, the slide shelves 25, and the plurality of cassette mounting tables 14a.

(2) Configuration of Frame and Outer Wall Panel As shown in FIG. 2, the frame 20 includes, for example, four column members 20 a arranged at four corners, and a connecting member 20 b that connects the column members 20 a in the front, rear, left, and right directions. Have. The column member 20a on the left side in FIG. 2 is provided with a door opening command button 102 for outputting to the warehouse control unit 100 when the slide shelf 25 is used. Note that the connecting member 20b that connects the left and right is mainly disposed on the back surface on the semiconductor processing apparatus 12 side, and is not disposed on the front surface. The two column members 20a on the left and right sides of the frame 20 can be fixed to the floor surface. A delivery port 14 of the semiconductor processing apparatus 12 is disposed below the frame 20. The delivery port 14 can be loaded with the cassette C. In the semiconductor processing apparatus 12, the cassette C is opened, a processing is performed on, for example, a circular substrate stored inside, and the processed substrate is stored in the cassette C.

  The outer wall panel 22 is formed so as to cover the front and left and right side surfaces of the automatic warehouse 10 and to cover the upper part of the back surface. In the lower part of the front surface of the outer wall panel 22, an opening 22a for allowing the slide shelf 25 and the cassette C placed thereon to pass therethrough is formed. The opening 22a is closed by slide doors 28 on the left and right sides that can be manually opened and closed. The sliding door 28 is detected by the door sensor 90 shown in FIG. Further, the electromagnetic door lock 92 locks and unlocks the door. The slide door 28 has a transparent window in which the inside can be visually confirmed. Thereby, the operator can determine whether or not the cassette C is transferred to the slide shelf 25.

(3) Structure of fixed shelf The fixed shelf 24 is arrange | positioned at the up-down direction and the left-right direction. In this embodiment, a total of 12 columns are provided in four rows on the left and right and three rows on the top and bottom. The fixed shelf 24 can be placed by positioning the cassette C on the upper surface. The fixed shelf 24 is fixed to the left and right connecting members 20 b of the frame 20. In the left-right direction, a vertical passage 30 a through which the transfer device 26 can pass up and down is provided between the fixed shelves 24. In this embodiment, the fixed shelves 24 are arranged in the order of the fixed shelf 24, the vertical passage 30a, the fixed shelf 24, the fixed shelf 24, the vertical passage 30a, and the fixed shelf 24 in the left-right direction. Facing the passage 30a. Thereby, the transfer device 26 can transfer the cassette C between all the fixed shelves 24 and the delivery port 14. The fixed shelf 24 is provided with a cassette reader (not shown) for identifying the cassette C. The uppermost fixed shelf 24 is used for delivery of the cassette C to and from the automatic conveyance carriage. A horizontal passage 30 b is provided between the lowermost fixed shelf 24 and the delivery port 14.

(4) Configuration of Slide Shelf As shown in FIG. 5, the slide shelf 25 is provided on a pedestal 74 that can be fixed to the floor, an extendable rail 76 provided on the pedestal 74, and the extendable rail 76. And a mounting table 78. The gantry part 74 is formed in a rectangular parallelepiped frame shape having four leg parts 74a.
The telescopic rail 76 extends and contracts in the horizontal direction in which the mounting table 78 approaches and separates from a position where the transfer device 26 can be transferred. Further, it extends and contracts in the horizontal direction (front-rear direction) across the horizontal passage (an example of the transfer path) 30b of the transfer device 26. The telescopic rail 76 includes a first rail portion 80 and a second rail portion 82 supported by the first rail portion 80 so as to be able to advance and retract. The first rail portion 80 includes two first rail members 84 that fix the gantry 74 to the upper surface, and a movable base 86 that is mounted on the first rail member 84 so as to be horizontally movable. The 1st rail member 84 is being fixed to the upper surface of the mount frame part 74, and is arrange | positioned along the front-back direction. The first rail member 84 is, for example, a member having a C-shaped cross section. The movable stand 86 is a plate-like member, and has a plurality of rollers (not shown) guided by the first rail member 84 on the lower surface.

  The second rail portion 82 includes two second rail members 88 that are disposed on the movable table 86 at intervals in the left-right direction. The second rail member 88 is a member having a C-shaped cross section, for example, and the mounting table 78 is guided by the second rail member 88 so as to be movable in the front-rear direction.

  The mounting table 78 is a table for mounting a cassette C for an operator to carry out and carry in. The mounting table 78 is movably guided by the telescopic rail 76 between a first position drawn out of the frame 20 shown in FIG. 5 and a second position arranged in the frame 20 shown in FIG. . The mounting table 78 has a plurality of rollers guided by the second rail member 88 on the inner surface. The height of the upper surface of the mounting table is adjusted to be the same height as the cassette mounting table 14 a of the delivery port 14. The mounting table 78 is provided with, for example, three positioning pins 78a for positioning the cassette C. The positioning pins 78a are also provided on the fixed shelf 24.

  The slide shelf 25 is provided with two mechanical latches (not shown) for locking the mounting table 78 at the first position and the second position so that the mounting table 78 is difficult to move. Further, as shown in FIG. 6, the slide shelf 25 has a shelf sensor 94 that detects that it is in a closed position, and an electromagnetic shelf lock 96 that can lock and unlock the mounting table 78 in the closed position. Is provided. Further, the mounting table 78 is provided with a first cassette sensor 98 for determining whether or not the cassette C is normally mounted. The gantry 74 is provided with a second cassette sensor 99 for detecting whether or not the cassette C is on the mounting table 78 at the second position. The first cassette sensor 98 determines whether the cassette C is correctly on the mounting table 78 regardless of the position of the first position or the second position. The second cassette sensor 99 roughly detects whether or not the cassette C is in the frame 20 regardless of whether or not it is positioned at the second position.

(5) Configuration of Transfer Device The transfer device 26 includes a horizontal rail 32, a vertical rail 34 that moves along the horizontal rail 32, and a transfer head 36 that moves separately along the vertical rail 34. ing. The horizontal rail 32 is arranged in the horizontal direction with a gap from the fixed shelf 24 on the front side of the fixed shelf 24. The transfer device 26 is a device having two axes of a horizontal axis and a vertical axis along the left-right direction, and can hold the cassette C by moving in the horizontal axis direction.

As shown in FIG. 2, the horizontal rail 32 is disposed along the left-right direction. As shown in FIG. 4, the horizontal rail 32 includes an upper rail member 40a and a lower rail member 40b, a horizontal drive motor 44 for driving the vertical rail 34 in the horizontal direction, an upper drive pulley 46a and a lower drive pulley 46b. The upper driven pulley 48a and the lower driven pulley 48b, and the upper toothed belt 50a and the lower toothed belt 50b are provided. The upper rail member 40a and the lower rail member 40b are connected to each other by connecting members 41 arranged in the vertical direction at both ends.
The horizontal drive motor 44 is a motor with a speed reducer fixed to the left end of FIG. 4 (the right end of FIG. 2) of the upper rail member 40a, and can output a rotation by bending 90 degrees. The output of the horizontal drive motor 44 is transmitted to the horizontal drive pulley 46 and is transmitted to the lower drive pulley 46 b via the connecting shaft 54. The upper drive pulley 46a and the lower drive pulley 46b are disposed at the right end in FIG. 2 (the left end in FIG. 4) of the upper rail member 40a and the lower rail member 40b. The upper driven pulley 48a and the lower driven pulley 48b are disposed at the left end in FIG. 2 (the right end in FIG. 4) of the upper rail member 40a and the lower rail member 40b. The upper toothed belt 50a is wound around an upper drive pulley 46a and an upper driven pulley 48a. An upper slider 52a guided in the horizontal direction by the upper rail member 40a is fixed to the upper toothed belt 50a. A lower slider 52b guided in the horizontal direction by the lower rail member 40b is fixed to the lower toothed belt 50b. The vertical rail 34 is fixed to the upper slider 52a and the lower slider 52b.

  As shown in FIG. 4, the vertical rail 34 includes a vertical rail member 60, a vertical drive motor 64 for driving the transfer head 36 in the vertical direction, a drive pulley 66, a driven pulley 68, and a toothed belt 70. And have. These structures are the same as those of the upper rail member 40a of the horizontal rail 32. The transfer head 36 is fixed to a slider 72 fixed to the toothed belt 70.

  As shown in FIG. 3, the transfer head 36 has a pair of holding portions 36 a that can hold a protrusion C <b> 1 that protrudes from the upper surface of the cassette C and can be opened and closed in the left-right direction (the direction perpendicular to the plane of FIG. 3). Is arranged. A cassette identification sensor 36b for identifying the cassette C is provided at a position where the transfer head 36 can face the cassette C. The transfer head 36 has a head motor 104 (FIG. 6) that opens and closes the holding portion 36a. The transfer head 36 opens and closes the holding portion 36 a and releases and holds the protrusion C <b> 1 when carrying in and out of the fixed shelf 24. The transfer head 36 is guided by the horizontal rail 32 and the vertical rail 34 and moves in the two vertical passages 30a and 30b.

(6) Configuration of control system The warehouse control unit 100 has, for example, a microcomputer. The warehouse control unit 100 controls the horizontal drive motor 44, the vertical drive motor 64, and the head motor 104 of the transfer device 26 by software. Further, the warehouse control unit 100 controls the door lock 92 of the frame 20 and the shelf lock 96 of the slide shelf 25. For this reason, as shown in FIG. 6, a door opening command button 102, a door sensor 90, a shelf sensor 94, a first cassette sensor 98, and a second cassette sensor 99 are connected to the warehouse control unit 100. Has been. The warehouse control unit 100 also inputs and outputs data to and from the horizontal drive motor 44, the vertical drive motor 64, the head motor 104, other sensors such as the cassette identification sensor 36b, and external devices such as the semiconductor processing device 12. The other input / output unit 106 that performs the above is connected.

(7) Operation of Automatic Warehouse In the automatic warehouse 10 configured as described above, an automatic conveyance cart (not shown) carries the cassette C into one of the uppermost fixed shelves 24. The loaded cassette C is transferred from the vertical passage 30a facing the loaded uppermost fixed shelf 24 to one of the two fixed rows 24 in the lower row. Then, it is further transferred to the delivery port 14 or the slide shelf 25 in response to a request from the semiconductor processing apparatus 12. At the time of transfer, the transfer head 36 is moved above the center of the cassette C to be transferred with the holding portion 36a opened. At this time, the transfer head 36 is moved to the vertical passage 30 a facing the cassette C to be transferred and moved up and down along the vertical rail 34. Then, when reaching above the cassette C, the cassette C is moved horizontally along the horizontal rail 32 to the center of the cassette C. Then, the transfer head 36 is lowered, the holding portion 36a is closed by the head motor 104, and the protrusion C1 is held by the holding portion 36a. Thereby, the protrusion C1 is held, and the cassette C can be transferred. Then, the cassette C is transferred from the uppermost fixed shelf 24 to one of the two lower fixed shelves 24. Further, depending on the transfer instruction, the transfer is directly performed on the cassette mounting table 14 a or the slide shelf 25 of the delivery port 14. The cassette C carried into the slide shelf 25 may be transferred to the cassette mounting table 14a. On the contrary, when carrying out from the cassette mounting base 14a or the slide shelf 25, it is transferred to each fixed shelf 24 by the reverse procedure.

  On the other hand, when the operator manually carries the cassette C into and out of the slide shelf 25, the door opening command button 102 is pressed. The slide shelf processing of the warehouse control unit 100 related to the slide shelf 25 will be described with reference to the flowcharts shown in FIGS.

  In step S <b> 1 of FIG. 7, it is determined whether or not a cassette unloading command for unloading the cassette C from the slide shelf 25 is received. This cassette carry-out command is output from an operation panel (not shown) of the semiconductor processing apparatus 12 or the automatic warehouse 10. In step S2, it is determined whether or not the door opening command button 102 has been operated. When there is a carry-out command, the operator operates the door open command button 102 when there is a cassette C from the slide door 28 to the slide shelf 25. When there is a carry-in command, the operator operates the door open command button 102 after confirming the carry-in command. In step S3, it is determined whether or not the DO flag is set. This DO flag is set until the sliding door 28 is opened and closed again when the door opening command button 102 is operated.

  When a cassette carry-out command is received, the process proceeds from step S1 to step S10. In step S10, it is determined whether both the first cassette sensor 98 and the second cassette sensor 99 are off. That is, it is determined whether or not there is a cassette C on the slide shelf 25. If there is a cassette C on the slide shelf 25, the process proceeds to step S2. If there is no cassette C on the slide shelf 25, the process proceeds from step S10 to step S11, the designated cassette C is taken to the fixed shelf 24 or the cassette mounting table 14a, and is transferred to the slide shelf 25.

  When the door opening command button 102 is operated, the process proceeds from step S2 to step S12. In step S12, the DO flag is set. In step S13, the cassette interruption process shown in FIG. 8 is executed. When step S3 and step S13 are completed, the process returns to step S1.

  In the cassette interruption process in step S13, it is determined in step S21 in FIG. 8 whether or not the current operation has ended. The current operation is a transfer operation that is currently being processed. In step S22, it is determined whether or not the slide door 28 is open. This determination is made based on whether or not the door sensor 90 is off. In step S23, it is determined whether or not the shelf sensor 23 is turned off. Initially, since the mounting table 78 is arranged at the second position, this determination is No.

  If the current operation is finished, the process proceeds from step S21 to step S25. In step S25, a retreat process for moving the vertical rail 34 to a predetermined position where it does not interfere with the slide shelf 25, for example, the position of the vertical passage 30a on the right side of FIG. In step S26, the door lock 92 is released so that the slide door 28 can be opened. In step S27, the operator is notified that the sliding door 28 can be opened by an appropriate means such as a lamp, and the process proceeds to step S22. The operator opens the slide door 28 by the notification. This is determined in step S22.

  When the slide door 28 is opened and the door sensor 90 is turned off, the process proceeds from step S22 to step S28. In step S29, the shelf lock 96 is unlocked, and the process proceeds to step S23.

  In step S23, it is determined whether or not the shelf sensor 94 is turned off for the operator to pull out the slide shelf 25. When the operator pulls out the slide shelf 25 and the shelf sensor 94 is turned off, the process proceeds to step S28, and when it is turned on, the process returns to the slide shelf process. In step S28, it is determined whether or not the shelf sensor 94 is turned on. The shelf sensor 94 is turned on after the shelf sensor 94 is turned off when the operator operates the placing table 78 to the second position after carrying the cassette C from the placing table 78 or after placing the cassette C on the placing table 78. is there. If it is determined that the shelf sensor 94 is turned on, the process proceeds to step S30. If the shelf sensor 94 is not turned on, the process returns to the slide shelf process. In step S30, it is determined whether the door sensor 90 is turned on and the slide door 28 is closed. When the transfer of the cassette C is completed, the operator closes the slide door 28, so that it can be determined that the cassette C is transferred and the slide door 28 is closed. When the door sensor 90 is turned on, the process proceeds from step S30 to step S31. When the door sensor 90 is turned off, the process returns to the slide shelf process. In step S31, the DO flag is reset, the slide shelf process is terminated, and the process proceeds to step S32. In step S32, the process returns to the normal transfer process.

(8) Features (A) The automatic warehouse 10 includes a plurality of fixed shelves 24, a transfer device 26, and a slide shelf 25. The plurality of fixed shelves 24 can be loaded with cassettes C. The transfer device 26 moves along the plurality of fixed shelves 24 and transfers the cassette C between the plurality of fixed shelves 24. The slide shelf 25 is provided with a mounting table 78 on which the cassette C can be mounted and a mounting table 78, and the mounting table 78 expands and contracts in a horizontal direction that approaches and moves away from a position where the transfer device 26 can be transferred. Telescopic rail 76.
In the automatic warehouse 10, the cassette C is supplied from the automatic transport cart to the fixed shelf 24 and transferred to the fixed shelf 24. Further, the cassette C is transferred between the fixed shelves 24 by the transfer device 26. When a cassette C such as a prototype or a limited express product is generated, the mounting table 78 of the slide shelf 25 is pulled out. Then, the mounting table 78 slides in a direction away from the position where the transfer device 26 can be transferred by the telescopic rail 76. Thus, the cassette C can be brought closer to the worker. Here, since the mounting table 78 on which the cassette C can be mounted is configured to slide toward and away from the transferable position, the mounting table 78 is taken in and out of the automatic warehouse 10, and the cassette C can be issued and received. For this reason, the operator can easily insert and remove the cassette C.

(B) The automatic warehouse 10 faces the outer periphery of the semiconductor processing apparatus 12 that performs processing related to the cassette C, and a plurality of fixed shelves 24 are arranged in the vicinity of the delivery port 14 with the semiconductor processing apparatus 12. Is an automatic warehouse in front of the apparatus capable of transferring the cassette C to the transfer port 14, and the telescopic rail 76 extends and contracts across the horizontal passage 30b of the transfer apparatus 26 connecting the transfer port 14 and the plurality of fixed shelves 24. I am doing so.
For this reason, since the mounting table 78 crosses the horizontal passage 30b of the transfer device 26, even if the mounting table 78 is arranged at a position accessible by the transfer device 26 in the automatic warehouse 10, the mounting table 78 is used as an operator. Can be approached.

(C) The outer wall panel 22 further includes an opening 22a that is disposed so as to surround the fixed shelf 24 and the transfer device 26 and through which the mounting rail 78 on which the telescopic rail 76 and the cassette C are mounted can pass.
In this case, even if the outer wall panel 22 is provided to protect the cassette C, the opening 22a formed in the outer wall panel 22 can be minimized.

(9) Other Embodiments Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention.

(A) The present invention is not limited to the automatic warehouse in front of the apparatus to be transferred to the semiconductor processing apparatus, but can be applied to all automatic warehouses having slide shelves.
(B) The structure of the rail member of a slide shelf is not limited to the said embodiment. For example, it may be cylindrical.

  The present invention has a fixed shelf and a transfer device, and can be widely applied to automatic warehouses that store articles.

DESCRIPTION OF SYMBOLS 10 Automatic warehouse 12 Semiconductor processing apparatus 14 Delivery port 14a Cassette mounting base 20 Frame 20a Column member 20b Connecting member 22 Outer wall panel 22a Opening 24 Fixed shelf 25 Slide shelf 26 Transfer device 28 Slide door 30a Vertical passage 30b Horizontal passage 32 Horizontal rail 34 Vertical rail 36 Transfer head 36a Holding portion 36b Cassette identification sensor 40a Upper rail member 40b Lower rail member 41 Connection member 44 Horizontal drive motor 46a Upper drive pulley 46b Lower drive pulley 48a Upper driven pulley 48b Lower driven pulley 50a Upper toothed belt 50b Lower toothed belt 52a Upper slider 52b Lower slider 54 Connecting shaft 60 Vertical rail member 64 Vertical drive motor 66 Drive pulley 68 Driven pulley 70 Toothed belt 72 Slider 74 Mounting unit 74 Leg part 76 Telescopic rail 78 Mounting base 78a Positioning pin 80 First rail part 82 Second rail part 84 First rail member 86 Movable base 88 Second rail member 90 Door sensor 92 Door lock 94 Shelf sensor 96 Shelf lock 98 First cassette Sensor 99 Second cassette sensor 100 Warehouse control unit 102 Door open command button 104 Head motor 106 Other input / output unit C Cassette C1 Projection

Claims (1)

A plurality of fixed shelves on which articles can be placed;
A transfer device that moves along the plurality of fixed shelves and transfers the article between the plurality of fixed shelves;
A mounting table on which the article can be mounted; and a telescopic rail that is provided with the mounting table and is movable in a horizontal direction that approaches and separates the mounting table from a position at which the transfer device can be transferred. A slide shelf having,
Equipped with a,
The plurality of fixed shelves face the outer periphery of a processing apparatus that performs processing related to the article and are near the transfer section with the processing apparatus, and the transfer apparatus can transfer the article to the transfer section Automatic warehouse in front of the equipment,
The telescopic rail expands and contracts across a movement path of the transfer device that connects the delivery unit and the plurality of fixed shelves,
An outer wall panel disposed so as to surround the fixed shelf and the transfer device, and having an opening through which the mounting table on which the telescopic rail and the article are placed can pass;
A sliding door provided in the opening so as to be openable and closable;
An electromagnetic door lock for locking and unlocking the sliding door;
A door opening command button for accepting an instruction to retreat the transfer device and unlock the door lock;
Further equipped with automatic warehouse.

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