CN112320339A - Storage system - Google Patents
Storage system Download PDFInfo
- Publication number
- CN112320339A CN112320339A CN202110010483.3A CN202110010483A CN112320339A CN 112320339 A CN112320339 A CN 112320339A CN 202110010483 A CN202110010483 A CN 202110010483A CN 112320339 A CN112320339 A CN 112320339A
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- China
- Prior art keywords
- axis
- station
- locked
- slide rail
- storage system
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/905—Control arrangements
Abstract
The invention relates to a storage system, which comprises a SEMI E84 (Specification for improved Carrier Handoff Parallel I/O communication rule) system, an RFID (Radio Frequency Identification) system, a workpiece storage station, an arm structure, a two-axis module structure, an electric control cabinet and an outer frame rear aluminum profile, wherein the workpiece storage station comprises a station positioning pin, a microswitch, a photoelectric switch, a station supporting rod and a station supporting plate, and the two-axis module structure internally comprises a Z-axis motor, a Z-axis speed reducer, a Z-axis main driving motor support, a Z-axis driving sliding rail and a Z-axis driven sliding rail. Has the advantages that: the NTB (Near Tool Buffer storage system) can move materials from the storage position of the NTB to the machine table through a self arm, and an intermediate storage machine table is added, so that the purposes of reducing the transmission time, increasing the utilization rate of the machine table, improving the yield of the single machine table and reducing the use amount of OHT (Overhead hook Transfer) under the condition of not additionally arranging the machine table and not increasing the use amount of OHT (Overhead hook Transfer) are achieved.
Description
Technical Field
The invention relates to the technical field of intelligent transportation, the field of extra storage of a machine station and the field of non-calibrated manufacturing equipment, in particular to a function of increasing extra stations of the machine station, reducing idle time of the station of the machine station, realizing maximization of working time of the machine station, increasing stored stations in a factory and reducing use amount of OHT (Overhead Hoist Transfer unmanned transport vehicle).
Background
The maximum amount of available OHT in an automated semiconductor fab after initial planning of an OHT track is fixed, so the average handling time cannot be reduced by increasing the OHT; the semiconductor factory is a high-grade dust-free room, the existing space is used, and no space is provided for adding a machine; in order to overcome the bottleneck of breaking through the utilization rate of the original machine under the condition of limited resources, the transmission time is reduced and the utilization rate of the machine is increased under the conditions of not additionally arranging the machine and not increasing the use amount of OHT by increasing the intermediate storage machine.
At present, in an automated semiconductor factory, an OHT is used for automated transfer, in order to maximize the utilization rate of a machine, an OHB (Over Head Buffer overhead storage bit) is added under a track above the machine, materials are transported to the OHB by the OHT, and the materials are transported to the machine by the OHT after the machine is idle; the disadvantage is that a batch of material is transported by using two OHT, and the time from the idle of the machine station to the transportation of the material from the OHB to the machine station by the OHT is about 45 s; through NTB (Near Tool Buffer storage system), only need OHT to carry once, NTB can remove the material to the board from NTB self storage bit through self arm, and its time is about 12s, can realize increasing extra station of board, reduces board station idle time, realizes the board operating time maximize, increases the storage station in the factory, reduces the function of OHT use amount.
Disclosure of Invention
It is an object of the present invention to provide a memory system to solve the problems set forth in the background art described above.
In order to achieve the purpose, the invention provides the following technical scheme: the storage system comprises a SEMI E84 (Specification for improved Carrier handling Parallel I/O communication rule) system, an RFID (Radio Frequency Identification) system, a workpiece storage station, an arm structure, a two-axis module structure, an electric control cabinet and an outer frame rear aluminum profile, and is characterized in that the two-axis module structure consists of a Z-axis module and an X-axis module, the workpiece storage station comprises a station positioning pin, a microswitch, a photoelectric switch, a station supporting rod and a station supporting plate, the station positioning pin is locked on the workpiece storage station in a tail screw mode, the microswitch is locked on the microswitch support in a screw and nut mode, the microswitch is locked on the workpiece storage station in a screw mode, the photoelectric switch is locked on the workpiece storage station;
the arm structure comprises a clamping jaw positioning pin, a clamp, a right sensor mounting block, an optical fiber sensor transmitting end, an optical fiber sensor receiving end, a left sensor mounting block, an upper clamp sealing plate and a clamping jaw connecting plate, wherein the clamping jaw positioning pin is locked on a bottom tray of the clamp through tail threads;
the Z-axis driving slide rail and the Z-axis driven slide rail are arranged on the outer frame, the Z-axis speed reducer is arranged on the Z-axis main driving motor support, the Z-axis speed reducer is connected with the Z-axis driven slide rail through a connecting shaft rod, the X-axis driven slide rail and the Z-axis driven slide rail are arranged on the X-axis main driving motor support, and the X-axis speed reducer is arranged on the X-axis main driving motor support.
Furthermore, the outside of the aluminum profile behind the outer frame is made of aluminum profile and baking finish stainless steel plate materials.
Furthermore, the two station supporting rods are connected with the workpiece storage station through a perforated screw and the station supporting plate, and the station supporting plate is locked on the outer frame rear aluminum profile frame through a T-shaped nut.
Furthermore, the upper limit stop strip of the Z-axis slide rail and the lower limit stop strip of the Z-axis slide rail are arranged at the upper end and the lower end of the slide rail, and the Z-axis tank is connected with and arranged at the side edge of the Z-axis driving slide rail.
Furthermore, the X-axis right limit position barrier strip and the X-axis left limit position barrier strip are arranged at two ends of the X-axis sliding rail.
Furthermore, the transmitting end of the optical fiber sensor is locked on the right sensor mounting block in a threaded manner, and the receiving end of the optical fiber sensor is locked on the left sensor mounting block in a threaded manner.
Furthermore, the left sensor mounting block is locked on the clamp upper sealing plate and on the clamping jaw connecting plate through screws, and the clamping jaw connecting plate is locked on the X-axis module.
Furthermore, the X-axis motor support is installed at the right side end of the X-axis slide rail, and the clamping jaw installation plate is driven to move left and right on the X-axis slide rail through the belt.
Further, a motor Controller, a power module, a PLC (Programmable Logic Controller) and other control parts are installed in the electric control cabinet to provide control for power supply and system operation of the whole system.
Compared with the prior art, the invention has the following beneficial effects: the NTB can move the material from the storage position of the NTB to the machine table through an arm of the NTB, and the time is about 12 s; through increasing the middle storage board, reach and not add the board, do not increase under the condition of OHT use amount, reduce the transfer time, increase the board utilization ratio, improve the single-machine platform profit, reduce the OHT use amount.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic top plan view of a workpiece storage station configuration of a storage system implemented in accordance with the present invention;
FIG. 2 is a bottom view of a schematic of the workpiece storage station configuration of a storage system implemented in accordance with the present invention;
FIG. 3 is a schematic diagram of an arm structure of a storage system implemented in accordance with the present invention;
FIG. 4 is a schematic diagram of a two-axis module configuration for a memory system implemented in accordance with the present invention;
FIG. 5 is a schematic diagram of an external frame structure of a storage system implemented in accordance with the present invention;
FIG. 6 is a schematic top view of an outer frame structure of a storage system implemented in accordance with the invention;
reference numerals:
3. a workpiece storage station; 4. an arm structure; 5. a Z-axis module; 6. an X-axis module; 7. an electric control cabinet; 8. an outer frame rear aluminum section; 9. a station positioning pin; 10. a microswitch; 11. a microswitch bracket; 12. a photoelectric switch; 13. a station support rod; 14. a station support plate; 15. a clamping jaw positioning pin; 16. a clamp; 17. a right sensor mounting block; 18. an optical fiber sensor transmitting end; 19. a receiving end of the optical fiber sensor; 20. a left sensor mounting block; 21. an upper sealing plate of the clamp; 22. a clamping jaw connecting plate; 23. a Z-axis motor; 24. a Z-axis reducer; 2401. an X-axis reducer; 25. a Z-axis main drive motor support; 26. the Z axis is driven by the motor bracket; 27. a Z-axis active sliding rail; 28. a Z-axis passive slide rail; 29. a limit position stop bar on the Z-axis slide rail; 30. a Z-axis slide rail lower limit position gear bar; 31. a Z-axis tank is connected; 32. an X-axis motor; 33. an X-axis reducer; 34. an X-axis main drive motor support; 35. an X-axis slide rail; 36. an X-axis right limit stop bar; 37. an X-axis left limit stop bar; 38. a clamping jaw; 39. an X-axis slider; 40. a two-axis module structure; 41. the outer frame is an aluminum profile.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative efforts based on the embodiments of the present invention belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "top", "bottom", "one side", "the other side", "front", "back", "middle part", "inside", "top", "bottom", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1-6, according to the storage system implemented by the present invention, the station positioning pins 9 are locked to the workpiece storage station 3 by means of tail screws, and these three positioning pins ensure the accuracy of the workpiece when stored in the station; the micro switch 10 is locked on the micro switch bracket 11 in a screw-nut mode, the micro switch bracket 11 is locked on the workpiece storage station 3 through screws, and the two micro switches are used for confirming whether the workpiece sits better than the station; the photoelectric switch 12 is locked on the workpiece storage station 3 and used for detecting whether a workpiece exists in the station; the two station support rods 13 are connected with the workpiece storage station 3 and the station support plate 14 through perforated screws; the station support plate 14 is locked on the outer frame rear aluminum profile 8 frame through a T-shaped nut.
The clamping jaw positioning pin 15 is locked on a tray at the bottom of the clamp 16 through tail threads, and the two positioning pins ensure the stability of products in the transportation process; the transmitting end 18 of the optical fiber sensor is locked on the right sensor mounting block 17 in a thread mode; the receiving end 19 of the optical fiber sensor is locked on the left sensor installation 20 in a threaded mode, the three groups of optical fiber sensors can ensure that a workpiece is immediately detected when shaking in the transportation process, and the whole equipment stops running by triggering an emergency stop mode through the PLC; the tray at the bottom of the clamp 16 is locked on the right sensor mounting block 17 through screws; the right sensor mounting block 17 is locked on the clamp upper sealing plate 21 through a screw; the tray at the bottom of the clamp 16 is locked on the left sensor mounting block 20 through screws; the left sensor mounting block 20 is locked on the clamp upper sealing plate 21 and the clamping jaw connecting plate 22 through screws; the jaw connecting plate 22 is locked to the X-axis module 6.
The Z-axis motor 23 is connected to a Z-axis reducer 24, and the Z-axis reducer 24 is mounted to a Z-axis main drive motor bracket 25; the Z-axis main driving motor bracket 25 is connected with a Z-axis auxiliary driving motor bracket 26 through a connecting shaft rod so as to ensure that the driving slide block and the driven slide block synchronously move up and down; the Z-axis driving slide rail 27 and the Z-axis driven slide rail 28 are arranged on the outer frame front aluminum profile 41; an upper limit stop strip 29 and a lower limit stop strip 30 of the Z-axis slide rail are arranged at the upper end and the lower end of the slide rail, and hardware ensures that the slide block cannot slide out of the slide rail; the Z-axis tank connection 31 is arranged on the side edge of the Z-axis driving slide rail 27; the X-axis motor 32 is connected to an X-axis reducer 33, and the X-axis reducer 33 is mounted on an X-axis main drive motor bracket 34; the X-axis motor bracket 34 is arranged at the right side end of the X-axis slide rail 35, and the belt drives the clamping jaw 38 installation plate to move left and right on the X-axis slide rail 35 through the X-axis slide block 39; the X-axis right limit stop strip 36 and the X-axis left limit stop strip 37 are arranged at two ends of the X-axis slide rail 35, and the sliding block cannot slide out of the slide rail under the guarantee of hardware.
In specific application, in order to ensure the safety in the process of carrying with an OHT and a machine station end, the storage system is used, and the next step can be executed only if a correct IO signal is obtained in the execution process of each step according to the SEMI E84 standard; the device is a standard product, one end of the device is connected to a track and is opposite to the OHT of the goods taking and placing, and the other end of the device is connected to the PLC of the device to control the time sequence of the device; each material is provided with an RFID, and the system ensures the accuracy of incoming materials and the correctness of going to a machine station; the device uses OMRON standard V640-HAM11, the reading head end is installed on the OHT inlet workpiece plate, the other end is connected to the exchanger through network cable to transmit the read data to the general control software by TCP/IP protocol; the grid for placing the workpiece comprises an inlet and an outlet which are butted with the OHT and a self storage grid, the number of the grids contained by products with different sizes is different, but the hardware structure contained by each grid is the same in the assembling mode; the sensors, the positioning pins and the clamping plates are connected with one another, so that the workpieces are grabbed, the grabbing process is safe, if the workpieces are greatly shaken and collided in the carrying process, the sensors arranged on the arms can timely detect and trigger the emergency stop of the whole equipment, and the workpieces are damaged or secondarily damaged when the sensors are placed; through the Z-axis module, the X-axis and the arm can reach the vertical coordinate of a station which can grab the workpiece; through the X-axis module, the arm reaches the abscissa of a station where the arm can grab a workpiece; a motor controller, a power supply module, a PLC and other control parts are arranged in the electric control cabinet; the system is used for controlling the power supply of the whole system and the operation of the system; the aluminum profile and baking varnish stainless steel plate is used as the outer frame outside the aluminum profile behind the outer frame, so that the stability and the attractiveness of the equipment are guaranteed.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (9)
1. The storage system comprises a SEMI E84 system, an RFID system, a workpiece storage station (3), an arm structure (4), a two-axis module structure (40), an electric control cabinet (7) and an outer frame rear aluminum profile (8), and is characterized in that the two-axis module structure (40) consists of a Z-axis module (5) and an X-axis module (6), the workpiece storage station (3) comprises a station positioning pin (9), a microswitch (10), a microswitch bracket (11), a photoelectric switch (12), a station supporting rod (13) and a station supporting plate (14), the station positioning pin (9) is locked on the workpiece storage station (3) in a tail screw mode, the microswitch (10) is locked on the microswitch bracket (11) in a screw and nut mode, the bracket of the microswitch (10) is locked on the workpiece storage station (3) through a screw, the photoelectric switch (12) is locked on the workpiece storage station (3);
the arm structure (4) comprises a clamping jaw positioning pin (15), a clamp (16), a right sensor mounting block (17), an optical fiber sensor transmitting end (18), an optical fiber sensor receiving end (19), a left sensor mounting block (20), an upper clamp sealing plate (21) and a clamping jaw connecting plate (22), the clamping jaw positioning pin (15) is locked on a bottom tray of the clamp (16) through tail threads, the bottom tray of the clamp (16) is locked on the right sensor mounting block (17) through screws, the right sensor mounting block (17) is locked on the upper clamp sealing plate (21) through screws, and the bottom tray of the clamp (16) is locked on the left sensor mounting block (20) through screws;
the two-axis module structure (40) comprises a Z-axis motor (23), a Z-axis speed reducer (24), a Z-axis main driving motor support (25), a Z-axis driving slide rail (27), a Z-axis driven slide rail (28), a Z-axis slide rail upper limit stop strip (29), a Z-axis slide rail lower limit stop strip (30), a clamping jaw (38), an X-axis sliding block (39), an X-axis slide rail (35), an X-axis speed reducer (33), an X-axis right limit stop strip (36) and an X-axis left limit stop strip (37), the Z-axis motor (23) is connected to the Z-axis speed reducer (24), the Z-axis speed reducer (24) is installed on the Z-axis main driving motor support (25), the Z-axis main driving motor support (25) is connected with a Z-axis driven motor support (26) through a connecting rod, the Z-axis driving slide rail (27) and the Z-axis driven slide rail (28) are installed on an outer frame aluminum section bar front (41), the X-axis motor (32) is connected to the X-axis reducer (33), and the X-axis reducer (33) is mounted on an X-axis main drive motor support (34).
2. The storage system according to claim 1, characterized in that the outer frame rear aluminum profile (8) is externally made of aluminum profile plus baking finish stainless steel plate.
3. The storage system as claimed in claim 1, characterized in that two of the station support rods (13) are connected to the work storage station (3) and the station support plate (14) by means of a screw, the station support plate (14) being locked to the outer frame rear aluminum profile (8) frame by means of a T-nut.
4. The storage system according to claim 1, wherein the upper limit stop strip (29) and the lower limit stop strip (30) are mounted on the upper end and the lower end of the Z-axis slide rail, and the Z-axis tank (31) is mounted on the side of the Z-axis active slide rail (27).
5. Storage system according to claim 1, characterized in that the X-axis right limit stop bar (36) and the X-axis left limit stop bar (37) are mounted at both ends of the X-axis slide rail (35).
6. The storage system of claim 1 wherein the fiber sensor launch end (18) is threadably locked to the right sensor mounting block (17) and the fiber sensor receive end (19) is threadably locked to the left sensor mounting block (20).
7. The storage system according to claim 1, wherein the left sensor mounting block (20) is locked to the clamp upper closure plate (21) and to the jaw connection plate (22) by screws, the jaw connection plate (22) being locked to the X-axis module (6).
8. The storage system according to claim 1, wherein the X-axis motor (32) is mounted on the right side end of the X-axis slide rail (35) in a bracket manner, and the clamping jaw (38) mounting plate is driven to move left and right on the X-axis slide rail (35) through the X-axis slide block (39) by a belt.
9. The storage system according to claim 1, wherein a motor Controller, a power module, a PLC (Programmable Logic Controller) and other control parts are installed in the electric control cabinet (7) to provide control for power supply and system operation of the whole system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110010483.3A CN112320339A (en) | 2021-01-06 | 2021-01-06 | Storage system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110010483.3A CN112320339A (en) | 2021-01-06 | 2021-01-06 | Storage system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112320339A true CN112320339A (en) | 2021-02-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110010483.3A Withdrawn CN112320339A (en) | 2021-01-06 | 2021-01-06 | Storage system |
Country Status (1)
| Country | Link |
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| CN (1) | CN112320339A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113682751A (en) * | 2021-08-11 | 2021-11-23 | 弥费实业(上海)有限公司 | Air carrying device and carrying system |
| CN114518724A (en) * | 2022-01-28 | 2022-05-20 | 弥费实业(上海)有限公司 | Communication device and communication mode suitable for AMHS |
| CN114715588A (en) * | 2022-06-02 | 2022-07-08 | 弥费实业(上海)有限公司 | Storage library |
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| CN211589382U (en) * | 2019-12-28 | 2020-09-29 | 宇山自动化技术(深圳)有限公司 | Clamping jaw mechanism with collision protection alarm function |
| CN111863681A (en) * | 2019-04-26 | 2020-10-30 | 台湾积体电路制造股份有限公司 | Conveying device, conveying system using same and prediction maintenance method of conveying system |
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- 2021-01-06 CN CN202110010483.3A patent/CN112320339A/en not_active Withdrawn
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| JP2010062322A (en) * | 2008-09-03 | 2010-03-18 | Ryusyo Industrial Co Ltd | Semiconductor wafer transfer system |
| JP5332930B2 (en) * | 2009-06-15 | 2013-11-06 | 村田機械株式会社 | Automatic warehouse |
| CN102484091A (en) * | 2009-07-31 | 2012-05-30 | 村田自动化机械有限公司 | Buffered Storage And Transport Device For Tool Utilization |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113682751A (en) * | 2021-08-11 | 2021-11-23 | 弥费实业(上海)有限公司 | Air carrying device and carrying system |
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| CN114715588A (en) * | 2022-06-02 | 2022-07-08 | 弥费实业(上海)有限公司 | Storage library |
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Application publication date: 20210205 |