CN113682751A - Air carrying device and carrying system - Google Patents
Air carrying device and carrying system Download PDFInfo
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- CN113682751A CN113682751A CN202110918467.4A CN202110918467A CN113682751A CN 113682751 A CN113682751 A CN 113682751A CN 202110918467 A CN202110918467 A CN 202110918467A CN 113682751 A CN113682751 A CN 113682751A
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- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 5
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- 238000000034 method Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000005034 decoration Methods 0.000 description 2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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Abstract
The invention provides an aerial carrying device and a carrying system, wherein the aerial carrying device comprises a vehicle body, the vehicle body is arranged on a travelling guide rail and can travel along the extending direction of the travelling guide rail, and the aerial carrying device also comprises: a steering guide rail that is erected above a steering area of the travel guide rail; the steering guide assembly is arranged at the upper end of the vehicle body, can slide relative to the vehicle body, and has an included angle between the sliding direction of the steering guide assembly and the advancing direction of the vehicle body, the included angle is an inferior angle, and the steering guide assembly can be abutted with the steering guide rail in a matched mode to conduct reversing guide on the vehicle body. The steering guide rail is arranged above the steering area of the travelling guide rail, and when the vehicle body needs to be steered, the steering guide assembly can slide relative to the vehicle body, so that the position of the steering guide assembly relative to the vehicle body is changed, namely the abutting position of the steering guide assembly and the steering guide rail is changed, the reversing guide of the vehicle body is realized, and the vehicle body can be steered in the travelling process.
Description
Technical Field
The invention belongs to the field of material handling systems, particularly relates to a semiconductor manufacturing technology, and particularly relates to an aerial handling device and a handling system.
Background
With the widespread use of integrated circuits in daily life, semiconductors are becoming more and more important in products, and their demand is also greatly increased, thereby promoting the global explosion of the semiconductor market. In order to meet the large demand of integrated circuits, most semiconductor manufacturing enterprises have the priority to improve the productivity and yield. In a semiconductor manufacturing enterprise, wafers are generally transported in a batch manner, but the transportation by manpower is not only inefficient, but also is prone to danger, and there are uncertain factors such as chip contamination and chip collision and breakage during the transportation process. In order to solve the risk and uncertain factors caused by manual Handling, an Automatic Material Handling System (AMHS) has been developed and widely used in the semiconductor manufacturing industry.
An air transport system (OHT) is a material handling system (Foup) often used in automated material handling systems due to its greater freedom of space. Currently, wafer transfer between fabs (fabs) generally uses an OHT cart as a carrier to complete the connection between each process. Carrying with an OHT vehicle as a carrier requires precise positioning at a designated location of the equipment and requires travel and reversing turns on the track, but OHT vehicles in the prior art do not achieve the above functions.
Based on the above, the present application provides a technical solution to solve the above technical problems.
Disclosure of Invention
The invention mainly aims to overcome the defects of the prior art, provides an air handling device and a handling system, solves the problem that the trolley of the conventional air transportation system cannot realize the steering function, and improves the steering capacity of the air handling device.
The technical scheme provided by the invention is as follows: an aerial delivery device, including the automobile body, the automobile body sets up and can advance along the extending direction of advancing the guide rail on advancing the guide rail, aerial delivery device still includes: a steering guide rail that is erected above a steering area of the travel guide rail; the steering guide assembly is arranged at the upper end of the vehicle body, can slide relative to the vehicle body, and has an included angle between the sliding direction of the steering guide assembly and the advancing direction of the vehicle body, the included angle is an inferior angle, and the steering guide assembly can be abutted with the steering guide rail in a matched mode to conduct reversing guide on the vehicle body.
Further, the steering guide assembly includes: the linear guide rail is fixedly arranged at the upper end of the vehicle body, and the extension direction of the linear guide rail is vertical to the advancing direction of the vehicle body; the sliding block is arranged on the linear guide rail and can slide relative to the vehicle body along the extending direction of the linear guide rail; the turning upper guide wheel set is arranged on the upper end surface of the sliding block and can be matched and abutted with the steering guide rail; and the turning guide driving assembly is arranged at the upper end of the vehicle body and can drive the sliding block to slide along the linear guide rail.
Further, the turn guide drive assembly includes: the rotary electromagnet is fixedly arranged at the upper end of the vehicle body; and one end of the rotating arm is fixedly connected with a rotating shaft of the rotating electromagnet, the other end of the rotating arm is hinged with the sliding block, and the rotating electromagnet drives the rotating arm to rotate so as to drive the sliding block to slide.
Further, the steering guide assembly further comprises: the in-place limiting blocks are symmetrically arranged at two ends of the linear guide rail and limit the sliding position of the sliding block; and the position detection assembly is arranged at the upper end of the vehicle body, is used for detecting the position of the rotating arm and/or the position of the sliding block and transmitting a corresponding position detection signal through the position detection assembly.
Further, the direction drive assembly that turns still includes direction wheelset under the turn, sets up the lower extreme at the automobile body, and direction wheelset can cooperate with the inside wall butt of the guide rail of marcing under the turn.
Further, the automobile body includes first automobile body and the second automobile body that the structure is the same, and the tail end of first automobile body is connected with the head end of second automobile body, and the upper end of first automobile body and the upper end of second automobile body all are provided with and turn to guide assembly.
Further, the first vehicle body includes: a body; the traveling wheel sets are symmetrically arranged on two sides of the body and can be abutted against the upper end faces of the traveling guide rails; the parallel shaft speed reducer is arranged on the body, and an output shaft of the parallel shaft speed reducer is connected with the traveling wheel set; and the servo motor is arranged on the body and is connected with the input shaft of the parallel shaft speed reducer.
Furthermore, the aerial carrying device also comprises an anti-collision assembly, and the anti-collision assembly is arranged at the head end of the first vehicle body and the tail end of the second vehicle body.
Furthermore, the anti-collision assembly comprises an anti-collision block and an anti-collision detection unit, the anti-collision block is arranged at the head end of the first vehicle body, and the anti-collision detection unit is arranged at the tail end of the second vehicle body; or the anti-collision block is arranged at the tail end of the second vehicle body, and the anti-collision detection unit is arranged at the head end of the first vehicle body; wherein, anticollision detecting element includes: one end of the anti-collision barrel is fixedly connected with the corresponding first vehicle body or the second vehicle body, and the other end of the anti-collision barrel is an opening end; the spring is arranged in the anti-collision barrel; the compression detection block is clamped with the opening end, one end of the compression detection block is abutted against the spring, and the other end of the compression detection block is arranged on the outer side of the opening end and can be abutted against an anti-collision block arranged on an adjacent vehicle body; and the impact detection sensor is arranged in the anti-collision barrel and can detect the displacement of the compression detection block and correspondingly send an impact feedback signal.
Further, the lower surface of the advancing guide rail is provided with a plurality of position bar codes arranged at intervals, the air carrying device further comprises a bar code reading feedback assembly arranged at the lower end of the vehicle body, and the bar code reading feedback assembly can read position information of the position bar codes and send corresponding position signals.
Further, the aerial carrying device further comprises a wireless power taking device which is arranged on the vehicle body and electrically connected with the vehicle body and the steering guide assembly.
The invention also provides a carrying system which comprises the aerial carrying device, a transport bin and a carrying assembly, wherein the aerial carrying device is the aerial carrying device, the transport bin is suspended below the vehicle body, the carrying assembly is arranged on one side of the aerial carrying device, and the carrying assembly can carry the semiconductor equipment to be carried into the transport bin.
The aerial carrying device provided by the invention can bring at least one of the following beneficial effects: the steering guide rail is arranged above the steering area of the travelling guide rail, and when the vehicle body needs to be steered, the steering guide assembly can slide relative to the vehicle body, so that the position of the steering guide assembly relative to the vehicle body is changed, namely the abutting position of the steering guide assembly and the steering guide rail is changed, the reversing guide of the vehicle body is realized, and the vehicle body can be steered in the travelling process.
Drawings
The foregoing features, technical features, advantages and embodiments are further described in the following detailed description of the preferred embodiments, which is to be read in connection with the accompanying drawings.
FIG. 1 is a schematic view of an overall assembly structure of an embodiment of the present invention;
FIG. 2 is a schematic structural view of a vehicle body according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of a steering guide assembly according to an embodiment of the present invention;
FIG. 4 is an assembled top view of a lower turning guide wheel set in accordance with an embodiment of the present invention;
FIG. 5 is an assembled side view of a lower cornering guide wheel set according to an embodiment of the invention;
fig. 6 is an assembly view of the collision avoidance assembly in an embodiment of the present invention;
FIG. 7 is a schematic view showing an assembly structure of a steering guide rail and a vehicle body according to an embodiment of the present invention;
FIG. 8 is a schematic diagram of an assembly structure of a position barcode and a barcode reading feedback component in an embodiment of the present invention.
Reference numbers in the figures: 11. a first vehicle body; 111. a servo motor; 112. a parallel axis reducer; 113. a traveling wheel set; 12. a steering guide assembly; 121. rotating the electromagnet; 122. a rotating arm; 123. a linear guide rail; 124. an in-place sensing piece; 125. a groove-shaped detection sensor; 126. a positioning limiting block; 127. turning an upper guide wheel set; 128. a slider; 13. a turning lower guide wheel set; 14. an anti-collision block; 16. a location barcode; 17. a bar code reading feedback component; 21. a second vehicle body; 24. an anti-collision detection unit; 25. a wireless power taking device; 31. a straight guide rail; 32. and turning to the guide rail.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following description will be made with reference to the accompanying drawings. It is obvious that the drawings in the following description are only some examples of the invention, and that for a person skilled in the art, other drawings and embodiments can be derived from them without inventive effort.
As shown in fig. 1 to 8, an embodiment of the present invention provides an air handling device including a vehicle body that is provided on a travel rail and is capable of traveling in an extending direction of the travel rail, and a steering rail and steering guide assembly 12. The steering guide rail is erected above a steering area of the advancing guide rail; the steering guide assembly 12 is arranged at the upper end of the vehicle body, the steering guide assembly 12 can slide relative to the vehicle body, an included angle is formed between the sliding direction of the steering guide assembly 12 and the advancing direction of the vehicle body, the included angle is an inferior angle, and the steering guide assembly 12 can be abutted with the steering guide rail in a matched mode to conduct reversing guide on the vehicle body.
The steering guide rail is arranged above the steering area of the travelling guide rail, when the vehicle body needs to be steered, the steering guide assembly 12 can slide relative to the vehicle body, so that the position of the steering guide assembly 12 relative to the vehicle body is changed, namely the abutting position of the steering guide assembly 12 and the steering guide rail is changed, the steering guide of the vehicle body is realized, and the vehicle body can be steered in the travelling process.
In the present embodiment, the turning guide rails are distributed in a stepwise manner, that is, only above the turning area of the traveling guide rail, and are not provided in the other straight traveling area of the traveling guide rail. The travel track is provided with a bifurcation at the turn-around area, the bifurcation having a track section that remains straight and a track section that makes a turn. The turning guide rail has the same structure as the running rail at the branch point, and includes a straight guide rail 31 and a turning guide rail 32, the straight guide rail 31 corresponds to the position of the rail segment for keeping straight, and the turning guide rail 32 corresponds to the position of the rail segment for turning.
When the steering operation is required, the steering guide assembly 12 changes the position relative to the vehicle body before reaching the steering guide rail according to a corresponding command of the control assembly, so that the steering guide assembly 12 is changed from the original contact with the straight guide rail 31 to the contact of the steering guide assembly 12 with the steering guide rail 32, and the vehicle body can be guided to move along the extending direction of the steering guide rail 32, namely, the vehicle body enters a rail section for steering, so that the steering operation is completed.
Of course, the steering guide rail in the present embodiment is not limited to the above structure, and may have more steering guide rails 32, so as to achieve the requirement of multi-directional steering. And no interference is generated between the multi-directional steering guide rails 32 and between the multi-directional steering guide rails 31.
Referring to FIG. 3, in one embodiment of the present application, the steering guide assembly 12 includes a linear guide rail 123, a slider 128, a turn upper guide wheel set 127, and a turn guide drive assembly. The linear guide rail 123 is fixedly arranged at the upper end of the vehicle body, and the extending direction of the linear guide rail 123 is vertical to the advancing direction of the vehicle body; the slider 128 is provided on the linear guide 123, and the slider 128 is slidable relative to the vehicle body in the extending direction of the linear guide 123; the turning upper guide wheel set 127 is arranged on the upper end face of the sliding block 128, and the turning upper guide wheel set 127 can be matched and abutted with the steering guide rail; the turning guide driving assembly is provided at the upper end of the vehicle body, and the turning guide driving assembly can drive the slider 128 to slide along the linear guide 123.
The turning upper guide wheel set 127 at least comprises two symmetrically arranged upper guide wheels, and the distribution direction of the upper guide wheels is parallel to the advancing direction of the vehicle body on the guide rail, so that the vehicle can steer more stably.
The turning guide driving assembly in this embodiment drives the slider 128 to realize the sliding of the slider 128 itself with respect to the vehicle body, and since the linear guide 123 is disposed perpendicular to the traveling direction of the vehicle body, the slider 128 can move to a set position on the other side by the shortest traveling distance to realize the steering guide. And after the sliding block 128 moves, the vehicle body in this embodiment can be smoothly inserted into the steering rail without causing an impact to the steering rail itself or the vehicle body itself by the arrangement of the turning upper guide wheel set 127. Meanwhile, the turning upper guide wheel set 127 can also reduce the friction between the turning guide driving assembly and the steering guide rail, and the service life of the whole lifting device is prolonged.
The range of the inferior angle is 0 ° to 180 °, and both end points are not included. That is, the angle between the extending direction of the linear guide 123 and the traveling direction is in the range of 0 ° to 180 °, and both end points are not included.
In an embodiment, not shown, the angle between the extending direction of the linear guide 123 and the traveling direction may be 30 °, 60 °, or 135 °, and when the slider 128 moves, the movement displacement of the slider 128 in the embodiment, not shown, is slightly longer than that in the embodiment in which the extending direction of the linear guide 123 and the traveling direction are perpendicular to each other. In the embodiment not shown, the slide block 128 can also perform a sliding operation with respect to the vehicle body, thereby achieving the purpose of steering.
In the present embodiment, the turn guide driving assembly includes a rotary electromagnet 121 and a tumbler 122. The rotary electromagnet 121 is fixedly arranged at the upper end of the vehicle body; one end of the rotating arm 122 is fixedly connected with a rotating shaft of the rotating electromagnet 121, the other end of the rotating arm 122 is hinged with the sliding block 128, and the rotating electromagnet 121 can drive the rotating arm 122 to rotate so as to drive the sliding block 128 to slide.
Rotatory electro-magnet 121 control system compares simply relatively with other drive assembly, and the opening of rotatory electro-magnet 121 stops can realize through simple electric current break-make, and the slew velocity of rotatory electro-magnet 121 also can be through the control of coil number of turns and current flow size, compares in the drive assembly of other categories, and this application adopts rotatory electro-magnet 121 can simplify the control assembly who corresponds, makes this application overall arrangement can realize miniaturized design demand.
Of course, the rotary electromagnet 121 may be replaced by a rotary driving component such as a rotary servo motor, and any driving component that can drive the rotating arm 122 to rotate should be within the scope of the present application.
The present application is not limited to the above-described embodiments, and for example, in an embodiment not shown in the drawings, the turning guide driving unit may include a slider on which a driving pulley is provided and a servo driving motor, and the driving pulley abuts against the corresponding linear guide. The servo driving motor is arranged in the sliding block and can drive the driving pulley to rotate, so that the sliding of the sliding block relative to the vehicle body is realized.
In another embodiment, not shown, the steering guide assembly 12 includes a rotary lead screw, a nut, and a drive motor. The extending direction of the rotating lead screw is vertical to the advancing direction of the vehicle body, the nut is arranged on the rotating lead screw, a turning upper guide wheel set 127 with enough height is arranged above the nut, and the driving motor is arranged on the vehicle body and connected with the rotating lead screw. When the electric bicycle works, the driving motor drives the rotary screw rod to rotate so as to drive the nut to slide relative to the bicycle body. In the sliding process, the nut can drive the turning upper guide wheel set 127 fixedly connected with the nut to realize the sliding relative to the vehicle body, thereby achieving the purpose of reversing guide.
In this embodiment, the distance between the turning upper guide wheel set 127 and the rotating lead screw is large enough to avoid interference between the steering guide rail and the rotating lead screw when the turning upper guide wheel set 127 abuts against the steering guide rail.
In a third, not shown embodiment of the present application, the slider 128 may be made of a permanent magnet having a fixed magnetic pole or a magnetic sheet having a corresponding fixed magnetic pole may be provided on both sides of the slider 128. Accordingly, electromagnets having variable magnetic poles are provided at both ends of the linear guide 123, and when the slider 128 is required to slide, the slider 128 is slid in one direction by energizing the electromagnets having variable magnetic poles. When the slide block 128 is required to slide towards the other side, the magnetic pole direction of the electromagnet with the variable magnetic pole is changed, and the purpose of reversing sliding of the slide block 128 can be achieved.
Of course, the present application shall include further embodiments, and any technical solutions that can realize the reciprocating sliding of the sliding block 128 relative to the vehicle body shall be within the protection scope of the present application, and the applicant does not list them here.
As shown in fig. 3, the steering guide assembly 12 in the embodiment of the present invention further includes a positioning stopper 126 and a position detecting assembly. The in-place limiting blocks 126 are symmetrically arranged at two ends of the linear guide rail 123 and can limit the sliding position of the sliding block 128; a position detection assembly is provided at the upper end of the vehicle body and is used to detect the position of the swivel arm 122 and/or the position of the slide 128, and the position detection assembly is capable of sending a corresponding position detection signal.
The purpose of the positioning limiting block 126 is to limit the sliding position of the sliding block 128, so that the sliding block 128 is prevented from being separated from the linear guide rail 123 during operation, and the operation risk of the device is reduced. In this embodiment, a buffer, such as a rubber pad, may be disposed inside the positioning limiting block 126, and when the sliding block 128 slides to a set position, the buffer may buffer the sliding block 128 and the positioning limiting block 126 to avoid damage to the sliding block 128 and the positioning limiting block 126.
The position detection assembly is arranged to detect the position of the rotating arm 122 and/or the position of the slider 128 so as to determine whether the rotating arm 122 and/or the slider 128 is moved in place according to a set requirement, so that the error of the rotating arm 122 and/or the slider 128 can be corrected through the feedback information of the position detection signal, and the purpose of accurate steering can be achieved.
As shown in fig. 3, the position detecting assembly in this embodiment includes a groove-shaped detecting sensor 125 and an in-place sensing piece 124, and both the groove-shaped detecting sensor 125 and the in-place sensing piece 124 are disposed at the upper end of the bracket of the rotary electromagnet 121. The in-position sensing piece 124 is distributed within the rotation range of the rotation arm 122 and is located at a set angle. The groove type detection sensor 125 is provided at one side of the rotation arm 122 and can detect a distance from the rotation arm 122.
During operation, when the rotating arm 122 rotates to a set position, the in-place sensing piece 124 at the position is triggered to send a corresponding position signal to the control assembly, and meanwhile, the groove type detection sensor 125 detects the rotating distance of the rotating arm and sends the rotating distance to the control assembly to be compared with the set position, so that the specific rotating angle of the rotating arm 122 is known, and the control assembly can correct the position of the rotating arm 122 to achieve the purpose of accurate rotation.
When the position detection is performed on the schemes in other embodiments not shown in the drawings, the specific selection and distribution position setting of the position detection components can be adjusted according to different requirements.
As shown in fig. 4 and 5, the turning guide driving assembly further includes a turning lower guide wheel set 13 provided at a lower end of the vehicle body, and the turning lower guide wheel set 13 can be in abutting engagement with an inner sidewall of the travel rail. The turning lower guide wheel set 13 is arranged to be close to the inner side walls of the advancing guide rails on two sides in the moving driving process, so that the stability of the driving and steering process of the vehicle body is ensured.
The lower turning guide wheel set 13 in the embodiment comprises at least four lower turning guide wheels, and the four lower turning guide wheels are respectively arranged at four corners of the vehicle body so as to realize turning support of the vehicle body. Of course, the number of the turning lower guide wheels can also be an even number larger than four, namely the turning lower guide wheels are distributed along two side edges of the vehicle body parallel to the traveling guide rail in a mirror symmetry mode, so that the vehicle body can be kept stable when turning.
More preferably, in this embodiment, a positioning clamping groove may be formed in an inner side wall of the traveling guide rail, and even if the cross section of the traveling guide rail is in an i-shaped structure, the turning lower guide wheel is correspondingly clamped in the positioning clamping groove to prevent derailment of the vehicle body when the steering force is too large.
The embodiment of the invention also provides an embodiment which is not shown in the drawing, wherein each turning lower guide wheel is independently connected with the vehicle body through a connecting rod with certain elasticity, and the connecting rod can apply pressure towards the inner side wall of the travelling guide rail to the turning lower guide wheel under normal conditions, so that the turning lower guide wheel can be tightly attached to the inner side wall of the travelling guide rail under the pressure, and the turning stability of the vehicle body is ensured.
The vehicle body comprises a first vehicle body 11 and a second vehicle body 21 which are identical in structure, the tail end of the first vehicle body 11 is connected with the head end of the second vehicle body 21, and the steering guide assembly 12 is arranged at the upper end of the first vehicle body 11 and the upper end of the second vehicle body 21.
The steering guide assemblies 12 are arranged on the first vehicle body 11 and the second vehicle body 21 which are identical in structure, steering guide can be carried out on the first vehicle body 11 and the second vehicle body 21, accidents that the vehicle bodies provided with the steering guide assemblies 12 complete steering and the vehicle bodies not provided with the steering guide assemblies 12 continue to keep straight running are avoided, and therefore safety during operation of the embodiment is guaranteed.
In the present embodiment, the basic structures of the first vehicle body 11 and the second vehicle body 21 are the same, but the respective accessories mounted on the first vehicle body 11 and the second vehicle body 21 are allowed to be different according to different requirements, so that the application range of the present embodiment is widened.
Referring to fig. 1 and 2, the applicant herein will explain only the first vehicle body 11, since the basic structures of the first vehicle body 11 and the second vehicle body 21 are the same. The first vehicle body 11 of the embodiment of the invention includes a body, a road wheel set 113, a parallel shaft speed reducer 112, and a servo motor 111. The traveling wheel sets 113 are symmetrically arranged on two sides of the body and can be abutted against the upper end faces of the traveling guide rails; the parallel shaft speed reducer 112 is arranged on the body, and an output shaft of the parallel shaft speed reducer 112 is connected with the travelling wheel set 113; the servo motor 111 is provided on the body and connected to an input shaft of a parallel shaft reducer 112.
The parallel shaft speed reducer 112 is arranged, so that the problems of overlarge volume and overweight weight of OHT trolley manufacturing production in the prior art can be solved, and the positioning requirement in the embodiment can be realized by arranging the servo motor 111. In this embodiment, the first vehicle body 11 and the second vehicle body 21 are both provided with the servo motors 111, so as to achieve a positioning effect more accurate than that of the prior art through a dual-servo motor structure.
Of course, the present invention may be used with other vehicle body structures, such as the vehicle body structure commonly used in OHT devices, and the specific embodiments are not explained and illustrated herein, but the vehicle capable of performing the vehicle body function in the present application should be within the scope of the present application.
The air handling device further comprises an anti-collision assembly, and the anti-collision assembly is arranged at the head end of the first vehicle body 11 and the tail end of the second vehicle body 21.
The anti-collision function of the trolley can be realized by arranging the anti-collision assembly, and when the front and the rear trolleys collide due to misoperation, the front and the rear trolleys can be protected by arranging the anti-collision assembly, so that the durability and the service life of the embodiment are improved; further reducing the damage of the wafers transported in the trolley.
Referring to fig. 1 and 6, the anti-collision assembly includes an anti-collision block 14 and an anti-collision detection unit 24, the anti-collision block 14 is disposed at the head end of the first vehicle body 11, and the anti-collision detection unit 24 is disposed at the tail end of the second vehicle body 21; alternatively, the crash block 14 is provided at the rear end of the second vehicle body 21, and the crash detection unit 24 is provided at the head end of the first vehicle body 11.
In this embodiment, by arranging the anti-collision block 14 and the anti-collision detection unit 24, when the vehicle bodies of two adjacent air handling devices collide, the anti-collision block 14 can extrude the anti-collision detection unit 24, the anti-collision detection unit 24 feeds back the detected collision to the control system, and the vehicle bodies of two adjacent air handling devices start an automatic braking state, so that the safety of the vehicle bodies of two adjacent air handling devices is improved.
Specifically, the collision detection unit 24 includes a collision cylinder, a spring, a compression detection block, and a collision detection sensor. One end of the anti-collision cylinder is fixedly connected with the corresponding first vehicle body 11 or the second vehicle body 21, and the other end of the anti-collision cylinder is an opening end. The spring sets up in the anticollision barrel. The compression detects the piece and sets up with the open end joint, and the one end and the spring butt of compression detection piece, the other end that the compression detected the piece is arranged in the open end outside and can with the 14 butts of anticollision pieces that set up on the adjacent automobile body. The impact detection sensor is arranged in the anti-collision barrel and can detect the displacement of the compression detection block and correspondingly send an impact feedback signal.
During collision, the anti-collision block 14 and the anti-collision detection unit 24 are extruded to enable the compression detection block to move towards the spring direction, the spring correspondingly retracts to enable the compression detection block to retract into the anti-collision barrel, the collision detection sensor can detect the displacement of the compression detection block at the moment, so that a collision feedback signal is correspondingly sent to the control assembly, and the control assembly controls the corresponding vehicle body to start an automatic braking state to ensure the driving safety.
The present embodiment may also adopt an embodiment scheme, for example, an elastic buffer component for buffering, such as a rubber pad or a sponge, is disposed at the collision end of the collision-proof block 14 and the collision-proof detection unit 24, so as to reduce the instant impulsive force of the collision and avoid the damage to the collision-proof block 14 or the collision-proof detection unit 24 due to the excessive impulsive force.
Or only the front and rear ends of the first vehicle body 11 and the second vehicle body 21 are provided with elastic buffer components, and the inner sides of the elastic buffer components are provided with trigger control buttons for controlling the vehicle body to start a braking state.
As shown in fig. 8, the lower surface of the traveling guide rail is provided with a plurality of position barcodes 16 arranged at intervals, the air handling device further comprises a barcode reading feedback assembly 17 arranged at the lower end of the vehicle body, and the barcode reading feedback assembly 17 can read the position information of the position barcodes 16 and send corresponding position signals.
In this embodiment, it is considered that the barcode reading feedback component 17 is disposed below the first vehicle body 11 or the second vehicle body 21, when the barcode reading feedback component 17 moves to the position barcode 16 along with the first vehicle body 11 or the second vehicle body 21, the barcode reading feedback component 17 can automatically read the position information and send a corresponding position signal, and the control component can receive the position signal to accurately control the position of the first vehicle body 11 or the second vehicle body 21.
Specifically, at the beginning of the run, the upper control assembly has issued the run path to the corresponding aerial conveyance device, which is controlled by the servo motor 111 to achieve a coarse positioning and, when the set position has not been reached, to perform a moderate deceleration, which is controlled by the program. The precise positioning control is performed by the position bar code 16 slowly when it arrives.
The position barcode 16 in this embodiment may be made by an RFID chip, and the barcode reading feedback component 17 may be an RFID reader.
Preferably, the aerial delivery device further comprises a wireless power take-off 25 disposed on the vehicle body and electrically connected to the vehicle body and the steering guide assembly 12. In the present embodiment, the wireless power-taking device 25 is disposed on the second vehicle body 21 and is used for supplying power to the first vehicle body 11 and the second vehicle body 21 and other devices requiring power supply. Simultaneously, above-mentioned wireless electric installation 25 of getting can realize wireless charging, when the automobile body moves to the settlement position, need not to connect the charging circuit and can accomplish charging, can improve this application technical scheme's the convenience of charging.
The embodiment also provides a carrying system, which comprises the aerial carrying device, the transport bin and the carrying assembly, wherein the transport bin is suspended below the vehicle body, the carrying assembly is arranged on one side of the aerial carrying device, and the carrying assembly can carry the semiconductor equipment to be carried into the transport bin.
The carrying system in the embodiment is provided with the aerial carrying device in the embodiment, so that the functions of operation steering and accurate positioning can be realized, and the carrying system in the embodiment is wider in applicable range.
The handling system in this embodiment further includes a complete set of control system, and the control system can control components such as the aerial handling device to perform corresponding transportation operations, and can adjust and correct the operating state of each device according to the feedback signals of each component.
It should be noted that the above embodiments can be freely combined as necessary. The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (12)
1. An aerial delivery device comprising a vehicle body disposed on a travel rail and capable of traveling in a direction of extension of the travel rail, characterized by further comprising:
a steering guide rail that is erected above a steering area of the travel guide rail;
turn to the guide subassembly, set up and be in the upper end of automobile body, turn to the guide subassembly can for the automobile body slides, just turn to the guide subassembly the slip direction with the contained angle has between the advancing direction of automobile body, the contained angle is the inferior angle, turn to the guide subassembly can with it is right to turn to guide rail cooperation butt the automobile body carries out the direction changing guide.
2. The aerial conveyance device of claim 1, wherein the divert guide assembly comprises:
the linear guide rail is fixedly arranged at the upper end of the vehicle body, and the extending direction of the linear guide rail is vertical to the advancing direction of the vehicle body;
the sliding block is arranged on the linear guide rail and can slide relative to the vehicle body along the extending direction of the linear guide rail;
the turning upper guide wheel set is arranged on the upper end surface of the sliding block and can be matched and abutted with the steering guide rail;
and the turning guide driving assembly is arranged at the upper end of the vehicle body and can drive the sliding block to slide along the linear guide rail.
3. The aerial transport device of claim 2, wherein the turn guide drive assembly comprises:
the rotary electromagnet is fixedly arranged at the upper end of the vehicle body;
and one end of the rotating arm is fixedly connected with a rotating shaft of the rotating electromagnet, the other end of the rotating arm is hinged with the sliding block, and the rotating electromagnet drives the rotating arm to rotate so as to drive the sliding block to slide.
4. The aerial conveyance device of claim 3, wherein the divert guide assembly further comprises:
the in-place limiting blocks are symmetrically arranged at two ends of the linear guide rail and limit the sliding position of the sliding block;
and the position detection assembly is arranged at the upper end of the vehicle body, is used for detecting the position of the rotating arm and/or the position of the sliding block and transmits a corresponding position detection signal through the position detection assembly.
5. The aerial conveyance device of claim 1, wherein the turn guide drive assembly further comprises a turn lower guide wheel set disposed at a lower end of the vehicle body, the turn lower guide wheel set being abuttable to an inner sidewall of the travel rail.
6. The aerial conveyance device of any one of claims 1 to 5, wherein the vehicle body comprises first and second vehicle bodies of identical construction, the trailing end of the first vehicle body being connected to the leading end of the second vehicle body, and the upper end of the first vehicle body and the upper end of the second vehicle body each being provided with the steering guide assembly.
7. The aerial transport device of claim 6, wherein the first body comprises: a body;
the traveling wheel groups are symmetrically arranged on two sides of the body and can be abutted against the upper end faces of the traveling guide rails;
the parallel shaft speed reducer is arranged on the body, and an output shaft of the parallel shaft speed reducer is connected with the travelling wheel set;
and the servo motor is arranged on the body and is connected with the input shaft of the parallel shaft speed reducer.
8. The aerial transport device of claim 6, further comprising a collision avoidance assembly disposed at the head end of the first vehicle body and the tail end of the second vehicle body.
9. The aerial conveyance device of claim 8, wherein the collision avoidance assembly includes a collision avoidance mass and a collision avoidance detection unit,
the anti-collision block is arranged at the head end of the first vehicle body, and the anti-collision detection unit is arranged at the tail end of the second vehicle body;
or the anti-collision block is arranged at the tail end of the second vehicle body, and the anti-collision detection unit is arranged at the head end of the first vehicle body;
wherein, anticollision detecting element includes:
one end of the anti-collision barrel is fixedly connected with the corresponding first vehicle body or the second vehicle body, and the other end of the anti-collision barrel is an opening end;
the spring is arranged in the anti-collision barrel;
the compression detection block is clamped with the opening end, one end of the compression detection block is abutted to the spring, and the other end of the compression detection block is arranged on the outer side of the opening end and can be abutted to the anti-collision block arranged on the adjacent vehicle body;
and the impact detection sensor is arranged in the anti-collision barrel body and can detect the displacement of the compression detection block and correspondingly send an impact feedback signal.
10. The aerial carrier device of claim 1, wherein a plurality of spaced position barcodes are disposed on a lower surface of the travel rail, the aerial carrier device further comprising a barcode reading feedback assembly disposed at a lower end of the vehicle body, the barcode reading feedback assembly being capable of reading position information of the position barcodes and transmitting corresponding position signals.
11. The aerial transport device of claim 1, further comprising a wireless power take-off device disposed on the vehicle body and electrically connected to the vehicle body and the steering guide assembly.
12. A handling system comprising an aerial handling device according to any one of claims 1 to 11, a transport bin suspended below the vehicle body, and a handling assembly arranged at one side of the aerial handling device, the handling assembly being capable of handling semiconductor equipment to be handled into the transport bin.
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| CN202110918467.4A CN113682751B (en) | 2021-08-11 | 2021-08-11 | Overhead conveying device and conveying system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114104635A (en) * | 2021-12-28 | 2022-03-01 | 成川科技(苏州)有限公司 | Automatic wafer carrying crown block |
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Cited By (2)
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| CN114104635A (en) * | 2021-12-28 | 2022-03-01 | 成川科技(苏州)有限公司 | Automatic wafer carrying crown block |
| CN114104635B (en) * | 2021-12-28 | 2024-01-26 | 成川科技(苏州)有限公司 | Automatic wafer carrying crown block |
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