CN114104635A - Automatic wafer carrying crown block - Google Patents
Automatic wafer carrying crown block Download PDFInfo
- Publication number
- CN114104635A CN114104635A CN202111620293.XA CN202111620293A CN114104635A CN 114104635 A CN114104635 A CN 114104635A CN 202111620293 A CN202111620293 A CN 202111620293A CN 114104635 A CN114104635 A CN 114104635A
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- Prior art keywords
- frame
- driving
- connecting rod
- top platform
- walking
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- 230000007246 mechanism Effects 0.000 claims abstract description 61
- 239000000463 material Substances 0.000 claims description 6
- 239000002994 raw material Substances 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 18
- 238000000034 method Methods 0.000 description 5
- 238000005303 weighing Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/901—Devices for picking-up and depositing articles or materials provided with drive systems with rectilinear movements only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0208—Control or detection relating to the transported articles
- B65G2203/0216—Codes or marks on the article
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/042—Sensors
Abstract
The invention discloses an automatic wafer carrying crown block, which comprises a frame, a mobile driving mechanism and a multi-stage grabbing mechanism, wherein the frame is provided with a plurality of supporting columns; the frame comprises a top platform, a front vertical frame and a rear vertical frame, wherein the front vertical frame and the rear vertical frame are respectively positioned at the front end and the rear end of the lower side of the top platform; the moving driving mechanism is arranged on the upper side of the top platform and used for driving the frame to travel along the track; the multi-stage grabbing mechanism is arranged on the lower side of the top platform and is positioned between the front vertical frame and the rear vertical frame, and the multi-stage grabbing mechanism is used for grabbing an object below in a telescopic and lifting manner; the scheme optimizes the integral frame structure, so that the whole crown block is more balanced, optimizes the movement driving mechanism of the crown block, improves the running stability of the crown block, can properly improve the running speed of the crown block and improves the wafer carrying efficiency; and the antenna telescopic anti-falling mechanism is designed, so that the antenna is normally folded in the frame, the device and raw material damage caused by the interference with an object during carrying is avoided, and the cost and the safety risk are reduced.
Description
Technical Field
The invention relates to an automatic wafer carrying crown block, and belongs to the technical field of semiconductor carrying and processing equipment.
Background
In a semiconductor process, a transfer wafer is required to be transported between different stations, and the wafer is usually carried by a wafer cassette and transferred by an oht (overhead hook transfer) method; the OHT generally includes a head rail and a carrier, which is called a crown block for short, and the crown block is provided with a retractable and liftable gripping device, and the crown block moves along the rail to drive the gripping device to carry and transfer the wafer.
Because the crown block is of a suspension structure, the operation stability of the crown block is influenced by more factors, the structural requirement on the crown block is higher, the existing crown block still has an unreasonable structure, so that the operation stability is influenced, the position precision of wafer conveying is poor, and the subsequent processing of the wafer is influenced; and the conveying efficiency is low.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide the automatic wafer carrying crown block with optimized structure, stable operation and high conveying efficiency.
In order to achieve the purpose, the invention adopts the technical scheme that: an automatic wafer carrying crown block comprises a frame, a mobile driving mechanism and a multi-stage grabbing mechanism; the frame comprises a top platform, a front vertical frame and a rear vertical frame, and the front vertical frame and the rear vertical frame are respectively positioned at the front end and the rear end of the lower side of the top platform; the moving driving mechanism is arranged on the upper side of the top platform and used for driving the frame to travel along the track; the multistage grabbing mechanism is arranged on the lower side of the top platform and located between the front vertical frame and the rear vertical frame, and the multistage grabbing mechanism is used for stretching and lifting to grab objects below.
Preferably, both ends all are provided with anticollision roof beam and anticollision buffer around the top platform, and the anticollision roof beam floats and sets up on the top platform, and the anticollision buffer adopts and touches the structure with anticollision roof beam complex.
Preferably, the mobile driving mechanism comprises a walking frame, a walking motor, a driving wheel, an upper guide wheel and a lower guide wheel, wherein the walking motor, the driving wheel, the upper guide wheel and the lower guide wheel are arranged on the walking frame; the driving wheels are arranged on the left side and the right side of the walking frame, the walking motor drives the driving wheels to rotate, and the driving wheels drive the walking frame to walk along the track; the upper side of walking frame is provided with the change rail subassembly, goes up the guide pulley setting on the change rail subassembly, and lower guide pulley setting is in the downside of walking frame.
Preferably, a front group of moving driving mechanisms and a rear group of moving driving mechanisms which are symmetrical to each other are arranged on the top platform, the bottoms of the walking frames of the two groups of moving driving mechanisms are provided with the turntable connecting assemblies, and the walking frames are in running fit with the top platform through the turntable connecting assemblies.
Preferably, the walking frame is provided with an anti-tilting frame, the anti-tilting frame is provided with an anti-tilting driving device and an anti-tilting sliding plate, the anti-tilting driving device drives the anti-tilting sliding plate to slide left and right, anti-tilting hooks are arranged at the left end and the right end of the anti-tilting sliding plate, and the anti-tilting hooks are used for blocking the track.
Preferably, the frame is provided with an antenna telescopic anti-falling mechanism, and the antenna telescopic anti-falling mechanism comprises an anti-falling bracket, an anti-falling sliding table, a sliding table driving mechanism, a driving connecting rod, an intermediate connecting rod and an antenna connecting rod; the sliding table driving mechanism drives the anti-falling sliding table to slide on the anti-falling bracket, and an anti-falling material fork and a connecting rod deflector rod are arranged on the anti-falling sliding table; the anti-falling material fork is used for clamping a grabbed object, and the connecting rod deflector rod is used for driving the driving connecting rod to rotate; the driving connecting rod drives the antenna connecting rod to rotate through the middle connecting rod, the antenna connecting rod is provided with an RFID antenna, and the RFID antenna is used for identifying the label of the grabbed object.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
according to the automatic wafer carrying crown block provided by the scheme of the invention, the overall frame structure is optimized, so that the overall crown block is more balanced, and the stability of the crown block in no-load and load states is facilitated; the moving driving mechanism of the crown block is optimized, the running stability of the crown block is improved, the running speed of the crown block can be properly improved, and the wafer carrying efficiency is improved; and the antenna telescopic anti-falling mechanism is designed, so that the antenna is normally folded in the frame, the device and raw material damage caused by the interference with an object during carrying is avoided, and the cost and the safety risk are reduced.
Drawings
The technical scheme of the invention is further explained by combining the accompanying drawings as follows:
FIG. 1 is a schematic perspective view of an automatic wafer handling crown block according to the present invention;
FIG. 2 is a schematic perspective view of a frame according to the present invention;
FIG. 3 is a schematic perspective view of the movement driving mechanism according to the present invention;
FIG. 4 is a rear side view of the mobile drive mechanism of the present invention;
FIG. 5 is a schematic diagram of the retracted state of the antenna telescoping fall prevention mechanism of the present invention;
FIG. 6 is a schematic diagram of the extending state of the antenna telescopic anti-falling mechanism of the invention.
Detailed Description
The invention is described in further detail below with reference to the figures and the embodiments.
As shown in fig. 1 and 2, the crown block for automatically transporting wafers according to the present invention includes a frame 1, a moving driving mechanism 2 and a multi-stage grabbing mechanism 3; the frame 1 comprises a top platform 11, a front vertical frame 12 and a rear vertical frame 13, wherein the front vertical frame 12 and the rear vertical frame 13 are respectively positioned at the front end and the rear end of the lower side of the top platform 11; the moving driving mechanism 2 is arranged on the upper side of the top platform 11, and the multi-stage grabbing mechanism 3 is arranged on the lower side of the top platform 11 and is positioned between the front vertical frame 12 and the rear vertical frame 13; the multi-stage grabbing mechanism 3 is used for stretching and lifting to grab objects below.
The space in the front mullion 12 and the rear mullion 13 can be used for setting an electric control system and a telescopic driving mechanism of the multi-stage grabbing mechanism 3, so that the weights of the front mullion 12 and the rear mullion 13 are basically kept consistent, and the integral balance is favorably kept.
The front end and the rear end of the top platform 11 are respectively provided with an anti-collision beam 14 and an anti-collision buffer 15, the anti-collision beams 14 are arranged on the top platform 11 in a floating manner, and anti-collision sensors 16 are arranged on the anti-collision beams 14, so that an anti-collision buffer effect can be achieved; upon impact, the crash sensors 16 may feed back a signal to stop the system control from advancing.
As shown in fig. 3 and 4, the movement driving mechanism 2 includes a walking frame 21, and a walking motor 22, a driving wheel 23, an upper guide wheel 24 and a lower guide wheel 25 which are arranged on the walking frame 21; the driving wheels 23 are arranged on the left side and the right side of the walking frame 21, the walking motor 22 drives the driving wheels 23 to rotate through the speed reducing mechanism, and the driving wheels 23 drive the walking frame 21 to walk along the track.
A rail-changing assembly 26 is arranged on the upper side of the traveling frame 21, the upper guide wheel 24 is arranged on the rail-changing assembly 26, and the rail-changing assembly 26 can drive the upper guide wheel 24 to change positions, so that rail-changing action of the overhead travelling crane during traveling is realized; four corners of the bottom of the walking frame 21 are provided with fixed lower guide wheels 25, and the axes of the upper guide wheels 24 and the lower guide wheels 25 are vertical to the axis of the driving wheel 23, so that the walking guide function can be achieved.
Referring to fig. 1, a front group and a rear group of mutually symmetrical movement driving mechanisms 2 are arranged on the top platform 11 to improve the walking stability and ensure sufficient walking power; the bottoms of the walking frames 21 of the two groups of the mobile driving mechanisms 2 are respectively provided with a turntable connecting component 27, and the walking frames 21 are in running fit with the top platform 11 through the turntable connecting components 27; when the crown block passes through a turning position, the mobile driving mechanism 2 can rotate in a self-adaptive manner in time, and the stability of the turning is ensured.
The walking frame 21 is further provided with an anti-tilting frame 31, the anti-tilting frame 31 is provided with an anti-tilting driving device 32 and an anti-tilting sliding plate 33, the anti-tilting driving device 32 can adopt a motor, a gear is arranged at the output end, a rack is arranged on the anti-tilting sliding plate 33, the motor can rotate forwards and backwards to drive the anti-tilting sliding plate 33 to slide left and right through a gear-rack structure, and anti-tilting clamping hooks 34 are arranged at the left end and the right end of the anti-tilting sliding plate 33.
As shown in fig. 1, an antenna telescoping anti-falling mechanism 4 is arranged on the frame 1, and the antenna telescoping anti-falling mechanism 4 is located at the bottom of the frame 1, which is an optimized scheme for driving the antenna to telescope by utilizing the action of the existing anti-falling mechanism.
As shown in fig. 5 and 6, the antenna telescoping anti-falling mechanism 4 comprises an anti-falling bracket 41, an anti-falling sliding table 42, a sliding table driving mechanism 43, a driving connecting rod 44, an intermediate connecting rod 45 and an antenna connecting rod 46; prevent weighing down support 41 fixed mounting in frame 1's bottom, slip table actuating mechanism 43 can adopt motor lead screw structure, and slip table actuating mechanism 43 drives prevents weighing down slip table 42 and slides on preventing weighing down support 41, prevents weighing down to be provided with on the slip table 42 and prevents weighing down material fork 47 and connecting rod driving lever 48.
After the anti-falling sliding table 42 extends out, the anti-falling material fork 47 can clamp the bottom of the wafer box to prevent the wafer box from falling; meanwhile, in the process of extending the anti-falling sliding table 42, the connecting rod deflector rod 48 drives the driving connecting rod 44 to rotate; specifically, a long slotted hole structure is formed in the middle of the connecting rod deflector rod 48, one end of the connecting rod deflector rod 48 enters the slotted hole structure, the rear end of the driving connecting rod 44 is hinged to the anti-falling bracket 41, and the connecting rod deflector rod 48 can drive the driving connecting rod 44 to rotate in the process of moving along with the anti-falling sliding table 42.
The front end of the active connecting rod 44 is hinged with one end of the middle connecting rod 45, the other end of the middle connecting rod 45 is hinged with the middle part of the antenna connecting rod 46, the rear end of the antenna connecting rod 46 is hinged on the anti-falling support 41, and then the active connecting rod 44 can drive the antenna connecting rod 46 to rotate through the middle connecting rod 45.
The front end of the antenna connecting rod 46 is provided with an RFID antenna 49, and after the antenna connecting rod 46 extends out, the front end of the antenna connecting rod is located at the label of the wafer box, so that the RFID antenna 49 can identify the label of the grabbed object.
The anti-falling bracket 41 can also be provided with an obstacle sensor 40, and the obstacle sensor 40 feeds back a signal to the system when sensing an obstacle, so that the system can control the crown block and the anti-falling mechanism to stop.
The above-mentioned embodiments are merely illustrative of the technical idea and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered in the scope of the present invention.
Claims (6)
1. The utility model provides a wafer automatic handling overhead traveling crane which characterized in that: comprises a frame (1), a mobile driving mechanism (2) and a multi-stage grabbing mechanism (3); the frame (1) comprises a top platform (11), a front vertical frame (12) and a rear vertical frame (13), wherein the front vertical frame (12) and the rear vertical frame (13) are respectively positioned at the front end and the rear end of the lower side of the top platform (11); the moving driving mechanism (2) is arranged on the upper side of the top platform (11) and used for driving the frame (1) to travel along the track; the multistage grabbing mechanism (3) is arranged on the lower side of the top platform (11) and located between the front vertical frame (12) and the rear vertical frame (13), and the multistage grabbing mechanism (3) is used for stretching and lifting to grab objects below.
2. The automated wafer handling overhead traveling crane of claim 1, wherein: the front end and the rear end of the top platform (11) are provided with an anti-collision beam (14) and an anti-collision buffer (15), the anti-collision beam (14) is arranged on the top platform (11) in a floating mode, and the anti-collision buffer (15) adopts a touch structure matched with the anti-collision beam (14).
3. The automated wafer handling overhead traveling crane of claim 1, wherein: the mobile driving mechanism (2) comprises a walking frame (21), a walking motor (22), a driving wheel (23), an upper guide wheel (24) and a lower guide wheel (25), wherein the walking motor (22), the driving wheel (23), the upper guide wheel (24) and the lower guide wheel (25) are arranged on the walking frame (21); the driving wheels (23) are arranged on the left side and the right side of the walking frame (21), the walking motor (22) drives the driving wheels (23) to rotate, and the driving wheels (23) drive the walking frame (21) to walk along the track; the upper side of the walking frame (21) is provided with a track-changing assembly (26), an upper guide wheel (24) is arranged on the track-changing assembly (26), and a lower guide wheel (25) is arranged on the lower side of the walking frame (21).
4. The automated wafer handling overhead traveling crane of claim 3, wherein: the top platform (11) is provided with a front group of moving driving mechanisms (2) and a rear group of moving driving mechanisms (2) which are symmetrical mutually, the bottoms of the walking frames (21) of the two groups of moving driving mechanisms (2) are provided with turntable connecting components (27), and the walking frames (21) are in running fit with the top platform (11) through the turntable connecting components (27).
5. The automated wafer handling crown block of claim 3 or 4, wherein: the anti-tilt track is characterized in that an anti-tilt frame (31) is arranged on the walking frame (21), an anti-tilt driving device (32) and an anti-tilt sliding plate (33) are arranged on the anti-tilt frame (31), the anti-tilt driving device (32) drives the anti-tilt sliding plate (33) to slide left and right, anti-tilt clamping hooks (34) are arranged at the left end and the right end of the anti-tilt sliding plate (33), and the anti-tilt clamping hooks (34) are used for clamping a track.
6. The automated wafer handling overhead traveling crane of claim 1, wherein: an antenna telescopic anti-falling mechanism (4) is arranged on the frame (1), and the antenna telescopic anti-falling mechanism (4) comprises an anti-falling bracket (41), an anti-falling sliding table (42), a sliding table driving mechanism (43), a driving connecting rod (44), an intermediate connecting rod (45) and an antenna connecting rod (46); the sliding table driving mechanism (43) drives the anti-falling sliding table (42) to slide on the anti-falling bracket (41), and the anti-falling sliding table (42) is provided with an anti-falling material fork (47) and a connecting rod shifting lever (48); the anti-falling material fork (47) is used for clamping a grabbed object, and the connecting rod deflector rod (48) is used for driving the driving connecting rod (44) to rotate; the active connecting rod (44) drives the antenna connecting rod (46) to rotate through the middle connecting rod (45), the antenna connecting rod (46) is provided with an RFID antenna (49), and the RFID antenna (49) is used for identifying the label of the grabbed object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111620293.XA CN114104635B (en) | 2021-12-28 | 2021-12-28 | Automatic wafer carrying crown block |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111620293.XA CN114104635B (en) | 2021-12-28 | 2021-12-28 | Automatic wafer carrying crown block |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114104635A true CN114104635A (en) | 2022-03-01 |
| CN114104635B CN114104635B (en) | 2024-01-26 |
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ID=80363250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111620293.XA Active CN114104635B (en) | 2021-12-28 | 2021-12-28 | Automatic wafer carrying crown block |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114104635B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114890122A (en) * | 2022-04-01 | 2022-08-12 | 冰轮环境技术股份有限公司 | Mechanical grabbing device and pipe fitting handling system |
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| CN113682751A (en) * | 2021-08-11 | 2021-11-23 | 弥费实业(上海)有限公司 | Air carrying device and carrying system |
| CN113719595A (en) * | 2021-08-11 | 2021-11-30 | 弥费实业(上海)有限公司 | Transmission, double-linkage and anti-shaking and anti-falling device, crown block system and wafer carrying method |
| CN113830664A (en) * | 2021-09-18 | 2021-12-24 | 上海应用技术大学 | Intelligent suspension type automatic handling dolly in duplex position |
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|---|---|---|---|---|
| CN108789423A (en) * | 2017-04-28 | 2018-11-13 | 上海微电子装备（集团）股份有限公司 | Film magazine transfer robot |
| CN108987318A (en) * | 2017-05-31 | 2018-12-11 | 上海微电子装备（集团）股份有限公司 | Handling device and its method for carrying |
| CN208120098U (en) * | 2018-03-21 | 2018-11-20 | 云南昆岭薄膜工业有限公司 | A kind of heavy automatic loading and unloading AGV transport device of trackless intelligence |
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| KR102243555B1 (en) * | 2020-01-03 | 2021-04-22 | 신중태 | OHT having belt type steering unit |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114890122A (en) * | 2022-04-01 | 2022-08-12 | 冰轮环境技术股份有限公司 | Mechanical grabbing device and pipe fitting handling system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114104635B (en) | 2024-01-26 |
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