TWI407094B - Solar wafer speed photoelectric detection system, detection methods and testing machine - Google Patents

Abstract

Disclosed is a solar wafer speed-up photoelectric inspection system, inspection method and inspection machine, which is used for inspecting a plurality of solar wafers to be tested. The machine includes one base, on which a plurality of conveyers are arranged, which conveyers are intended for simultaneously bearing and moving multiple solar wafers to be tested for inspection. The machine is further installed with an optical inspection system and a speed-up photoelectric inspection system. After the optical inspection system simultaneously performs inspection operations to the surfaces and colors of the wafers bore by each of the conveyers, the speed-up photoelectric inspection system then performs photoelectric inspection through the same light source, such that data of each wafer obtained after the photoelectric inspection has the same comparison value, and an inspection line is planned so as to increase the inspection efficiency. Finally, the inspection data is transmitted to a classification system as a reference of classification.

Description

Solar wafer double-speed photoelectric detection system, detection method and detection machine

The invention relates to a solar wafer double-speed photoelectric detecting system, a detecting method and a detecting machine, in particular to a double-speed photoelectric detecting system which is detected by timing switching during detection.

The demand for clean energy such as solar energy is increasing. At present, the main conversion method of solar energy is to convert solar energy into electrical energy through solar cells. With the popularization of solar cells, it must be strictly before being packaged into solar battery modules. Quality inspection and detection of solar cells have also become important issues in the industry.

The defects of solar cells can be generally divided into internal defects and external flaws. Internal defects mainly refer to micro-crakes caused by slight fractures of structures, although the crack width of such micro-cracks may be very small, or even exist only in parts. The height range, but because the micro-crack will block the transmission of photoelectrons inside the solar cell, it will significantly reduce the transmission efficiency of the energy generated by the solar cell. Even if the internal defect size is very small, it may affect the output power, especially during installation and use. After that, due to the irradiation of sunlight and the change of temperature, the micro-gap will continue to expand, and the influence on the output electric energy will also increase. If external pollution such as water (H ₂ O) and hydrogen (H ₂ ) invade, Overall it will cause more damage.

Therefore, the micro-cracking problem of solar cells will become a problem in the industry. The earlier detection method is shown in Figure 1. The experienced operator holds the solar wafer 11 slightly shaken, using the solar cell with internal cracking. When shaking, there will be some strange sounds, which are judged by the operator's ear. Of course, the detection is limited by the fact that the shaking force is not consistent. What is the abnormal sound is not uniform, and the human hearing is very limited. Once the shaking force is too large, it is more likely to directly damage the solar wafer 11 to be tested, resulting in cracking. The credibility of the test is quite questionable.

As shown in FIG. 2, the light-receiving surface 111 of the solar wafer 11 has a set of conductive bus bars 112 for converting the received light into an electrical energy output. To provide rapid and automated detection, the applicant has also proposed in the prior application. As shown in FIG. 3, the detecting machine is stacked with a plurality of loading cassettes 21 of the solar wafers 11 to be tested, and the solar wafers 11 to be tested are taken out through the transfer device 22 and placed on the conveyor belt 31. An optical detection system 4 and a photodetection system 3 are sequentially disposed on the same transport path. The optical detection system 4 captures an image of the surface topography of the solar wafer 11 to be tested by a group of photographing devices to identify the presence or absence of the image. The surface is paralyzed; the photodetection system 3 contacts the conductive bus bar 112 with a probe, and the light source is irradiated with a strong light source to simulate the light-receiving surface 111 of the solar wafer 11 to be tested, and the detection data is used as a solar wafer. The basis for classification.

Since the optical detection system only needs to perform image capturing on the appearance of the solar wafer to be tested, the speed is very fast; and the photoelectric detection system needs to increase the guiding of the probe to the guiding busbar of the solar wafer to be tested. The mechanism moves and illuminates the light source onto the light-receiving surface, and then the probe measures the amount of electricity generated by the solar wafer to be tested, and finally waits for the probe to leave the solar wafer to be tested, and then removes the measured Wafer. Therefore, in the photoelectric detection system part, it is necessary to additionally add two mechanical actions of the probe pressing and lifting, which is undoubtedly taking a long time compared with the electronic signal action in which the optical detecting part only captures the image, if the same detection is performed When the detection is performed on the path, the photoelectric detection system with a slow detection time will inevitably delay the optical detection system with a fast detection time, so that the overall operation efficiency cannot be improved.

On the other hand, if two complete photoelectric detection systems are set up to improve the detection speed, the optically detected solar wafers to be tested are shunted, which not only increases the cost, but also causes the use of photoelectric detection. Different sets of light sources, as the use time increases, the light bulb as the light source also aging and the brightness of the light is different. When performing photoelectric detection, a unified comparison standard cannot be obtained, which causes difficulty and inconvenience in detection. . Therefore, how to improve the solar energy detecting machine to improve efficiency is the focus of the present invention.

An object of the present invention is to provide a double speed detecting machine for detecting a plurality of solar wafers to be tested through a plurality of sets of detecting devices.

Still another object of the present invention is to provide a double speed detecting machine that uses a detection time difference of each detection item to plan a flow of detection with fluency

Another object of the present invention is to provide a double-speed photodetection system that shares the same light source for performing photodetection operations of all solar wafers to be tested, and for which the photoelectrically detected data has a uniform standard.

A further object of the present invention is to provide a detection process that utilizes the detection time difference of each detection item to plan an efficient detection process, and to perform detection of other wafers to other detection positions before photoelectric detection of one of the solar wafers to be tested. method.

A solar wafer double-speed photoelectric detection system according to the present invention is provided for a solar wafer inspection machine for detecting at least one solar wafer to be tested, wherein the solar wafer to be tested has a light-receiving surface and a a set of conductive busbars for converting received light into electrical energy output, and the machine has a base, the detection system comprising: a set of mobile devices disposed on the base, the set of mobile devices comprising a plurality of transporting members And each of the transport members respectively has a detection position for the solar wafer to be tested to be tested; a set of illumination switching devices, comprising: a light source; and a switch to switch the light source to the detection positions The detection system further includes a set of driving and guiding devices, including: a complex array corresponding to each of the detecting electrodes of the detecting position; and a complex array respectively driving the guiding electrodes to conduct and de-conduct the to-be-tested The solar wafer guides the driver of the bus bar.

The present invention also discloses the use of the above-mentioned detection machine with a solar wafer double-speed photoelectric detection system for detecting a plurality of solar wafers to be tested, wherein the waiting solar wafers respectively have a light-receiving surface and a group for converting the received light into a conductive busbar for electrical energy output, the machine comprises: a base; a set of feeding systems disposed on the base; a set of optical detection systems; and a set of multiple speed photoelectric detection systems, comprising: a set of the bases disposed on the base The mobile device includes a plurality of transporting members, and each of the transporting members respectively has a detecting position for the solar wafer to be tested; a set of illumination switching devices having a light source; a switch for switching the light source to the detection position; and a set of driving and guiding devices having a plurality of conductive electrodes respectively corresponding to the detection positions; and the plurality of arrays respectively driving the conductive electrodes And guiding the driving component of the solar wafer guiding bus bar; and the machine further comprises a group according to the optical detecting system and the double speed photoelectric detecting The measurement results of the detection system and the like of the completion of the solar wafer sort classification system.

According to the solar wafer detecting method disclosed in the present invention, a detecting machine detects a plurality of solar wafers to be tested, wherein the waiting solar wafers respectively have a light collecting surface and a group for converting the received light into a conductive busbar for electrical energy output, and the testing machine includes a base, a set of feeding systems disposed on the base, a set of optical detection systems, a set of multiple speed photoelectric detection systems, and a set of optical detection systems in accordance with the optical detection system And a classification system for classifying the detection results of the double-speed photoelectric detection system, and the double-speed photoelectric detection system comprises a set of mobile devices disposed on the base and having a plurality of conveying members respectively corresponding to one detection position, the group having one a light source and a switch light switching device, a set of drive guiding devices having a plurality of array conducting electrodes and a plurality of array driving members, and a set of control devices, the method comprising the steps of: a) being Waiting for the solar wafer to be input into the optical inspection system for optical detection; b) using the one of the transport members of the mobile device, the test is too The solar energy wafer is transported to a corresponding one of the detection locations; c) the corresponding one of the driving members drives the set of conductive electrodes corresponding to the detected position to conduct the solar wafer guiding busbar to be tested, And driving the illumination switching device such that the light emitted by the light source will correspond to the detected position; d) illuminating the light source and receiving the detection result with the set of conductive electrodes, and driving the other of the transport members by the control device One, transporting one piece of the tested solar wafer to the other detecting position; e) driving the set of guiding electrodes corresponding to the detecting position by the corresponding one of the driving members to decouple from the solar crystal to be tested Circularly guiding the bus bar and driving the illumination switching device such that the light emitted by the light source will correspond to another detection position; and f) detecting the measured solar wafer according to the optical detection system and the double speed photoelectric detection system The knot is classified.

The solar wafer double-speed photoelectric detection system, the detection method and the detection machine disclosed in the present invention are for detecting a plurality of solar wafers to be tested, wherein the waiting solar wafers respectively have a light-receiving surface and a group for receiving The light is converted into a conductive busbar of electrical energy output, and the characteristics of the received light energy of the solar wafer are utilized, and the light source for detecting is irradiated onto the light collecting surface of the solar wafer, and then converted from the conductive busbar. Therefore, the detection machine of the present invention is provided with a plurality of conveyor belts as conveying members on the base, and simultaneously carries and moves a plurality of solar wafers to be tested on each group of conveyor belts, and is detected by multiple groups. The device performs detection, and the light source used in the photodetection is transmitted through the switch of the illumination switching device so that the light emitted by the light source is switched between the photodetection positions because the same light source is used to detect the light. So that the data of each solar wafer is photometrically tested to the same comparative standard, and the difference in time spent on each test item is obtained. Planning the movable efficient detection line to increase the detection efficiency, according to the final classification system classifies each detection means for detecting the transmitted data, and so as to achieve all of the above purposes.

The foregoing and other objects, features, and advantages of the invention are set forth in the <RTIgt;

Referring to FIG. 4 and FIG. 5, the detecting machine of the first preferred embodiment of the present invention is also used for detecting the conductive surface 111 having the light-receiving surface 111 and forming the output electric energy on the light-receiving surface 111. The detecting unit of the bus bar 112 has characteristics of the solar cell 11 to be tested, and the detecting machine in the embodiment mainly includes a base 5, and a feeding system 6 and an optical detecting system 7 which are arranged on the base 5 for automatic operation. Double speed photoelectric detection system 8, and classification system 9. In this example, the feeding system 6 includes a plurality of pick-and-place devices 62 and at least two disposal positions, each of which is placed for a set of loading cassettes 61 on which a plurality of solar wafers 11 to be tested are stacked, The discharge device 62 is responsible for taking out the solar wafer 11 to be tested one by one from the feed cassette 61.

Referring to the flowchart of FIG. 6, in step 101, the solar wafers 11 to be tested are taken out from the respective loading ports 61 by the respective groups of pick-and-place devices 62, and placed on the optical detecting conveyor belt 70 for transport to The image capturing position corresponding to the optical detecting system 7 captures the light-receiving surface image of the solar wafer by, for example, the camera as the first image capturing device 71, and confirms whether the solar wafer 11 to be tested has surface defects or poor layout. The problem is followed by color detection of the solar wafer 11 to be tested by the camera as the second color capture device 72, and the data of the detection result is transmitted to a group of processing systems to drive the subsequent classification system 9 classification.

As shown in FIG. 7, the double-speed photoelectric detecting system 8 includes a set of moving devices 80, a light switching device 82, a driving guiding device 83, and a control device 84. As shown in FIG. 8, the mobile device 80 mainly includes two in this example. The groups are respectively located on the upper and lower sides of the drawing for receiving the solar wafer 11 from the optical detecting conveyor belt 70 in the optical detecting system 7 for shunting the upstream solar wafer 11 to be transported and transporting it to the downstream photodetection. Belts 801, 802. Therefore, at step 102, the two sets of photodetection conveyor belts 801, 802 are respectively transported to the double-speed photodetection system 8 and the two photodetection positions 811, 812 in turn. As shown in FIG. 9, each of the photodetecting positions 811, 812 is correspondingly provided with, for example, two sets of probes 831 as driving electrodes in the driving and guiding device 83, and the two sets of probes 831 are simultaneously released into a machine by a group. The drive of the arm 832 is driven. Therefore, referring back to FIG. 8, in step 103, when the solar wafer 11 to be tested above the pattern reaches the upper photodetection positions 811, 812, the probe 831 at that position is then pressed down and firmly guided to the sheet. The conduction busbar 112 of the solar wafer 11 to be tested is to be tested.

Referring to FIG. 10 together, in the present embodiment, the high-intensity light source 821 simulating sunlight is moved between the two photo-detecting positions 811, 812 by the carrier 822, and is defined herein for convenience of explanation. The group device is the illumination switching device 82. Therefore, in step 104, the control device 84 drives the carrier 822 to move the light source 821 directly above the solar wafer 11 to be tested, and in step 105, the light source 821 is driven by the control device 84 to emit light; At this time, the light-receiving surface 111 of the solar wafer 11 to be tested is irradiated by the light emitted by the light source 821, and the light energy is converted into electric energy and outputted through the conductive bus bar 112 and the probe 831 for detection. At this time, the photodetection conveyance belt 802 on the lower side of the drawing can use the neutral to send the next piece of the solar wafer 11 to be tested to its photodetection positions 811, 812.

Then, in step 106, when the classification system 9 for which the solar wafer 12 is to be transported by the photodetection conveyor belt 801 to be downstream is to be driven, the robot arm 832 must be driven first to press against the solar wafer guide busbar 112. The upper probe 831 is moved up to allow the photodetection conveyor belt 801 to send the solar wafer 12 to the sorting position of the corresponding sorting system 9 according to the direction of the thick arrow of the figure; at this time, another photodetection transport The belt 802 has alternately sent the next untested solar wafer 11 to the corresponding photodetection locations 811, 812, and is similarly contacted by another set of corresponding robots 832. The guiding bus bar 112 is connected to the solar wafer, and the carrier 822 of the illumination switching device 82 can also move the light source 821 to the photoelectric corresponding to the photodetecting and conveying belt 802 at the lower position of FIG. 8 . Locations 811, 812 are detected.

Therefore, the detection workflow is repeated, and the two photoelectric detection conveyor belts 801 and 802 are sequentially inserted into the solar wafer 11 to be tested. When the corresponding robot arm 832 drives the group of probes 831 to move downward, the light source 821 is also Continued to be driven by the carrier 822, the photodetection is completed, the light source 821 and the carrier 822 will be separated from the probe 831 and the solar wafer 12 and the solar wafer are sent back. The same detection procedure is performed to another set of photodetection positions 811, 812; therefore, the same detection source can be utilized for each detection position, and the difference in brightness caused by using the same group of light sources can be avoided, so that the detection values have the same comparison standard. Reduce unnecessary errors in detection. On the other hand, expensive and high-heating devices such as light sources do not have to be doubled, and the overall price and performance of the overall detection system and machine are more market-acceptable. Finally, in step 107, according to the analysis of the detection results of the optical detection system 7 and the double-speed photoelectric detection system 8, the classification system 9 is used as the basis for completing the classification of the solar wafer 12, and is completed by one of the plurality of sets of pick-and-placers 91. The solar wafer 12 is placed in a corresponding sorting magazine 92.

Of course, as can be easily understood by those skilled in the art, the switching mode of the light source in this example is not limited. For example, as shown in the second preferred embodiment of the present invention, for example, a set of optical mirrors 82' is provided. A mirror 823' rotating along the switching axis 822' turns the light beam emitted by the light source 821' into two mirrors 824' respectively fixed corresponding to the two photodetection positions, and is alternately irradiated to each photodetection. The position can be achieved by using the detection light for photoelectric detection in two separate directions.

When the solar wafer double-speed photoelectric detecting system, the detecting method, and the detecting machine of the present invention are compared with the conventional technology, the inconsistency speed difference between the optical detecting and the photoelectric detecting is considered in advance, and when the photoelectric detecting is performed, the detection is also required. The emitted light energy is truly level, and there is no need to set double the light source to add cost pressure. Not only can the solar wafers be more uniform in photoelectric detection data, but also easy to compare and screen, and optical detection and photoelectric detection projects. At the time, it is necessary to break through the limitation of photoelectric detection for a long time, effectively use the time difference of detection to complete the pre-operation, plan an efficient detection moving line, and accelerate the detection efficiency of the whole machine, thereby achieving all the above purposes.

However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications according to the scope of the present invention and the description of the invention are still It is within the scope of the patent of the present invention.

11. . . Solar wafer to be tested

12. . . Finishing solar wafers

111. . . Light-receiving surface

112. . . Conductive busbar

21, 61. . . Feeding

twenty two. . . Transfer device

31. . . conveyor

4. . . Optical inspection system

3. . . Photoelectric detection system

5. . . Pedestal

6. . . Feeding system

61. . . Feeding

62. . . Pick and place device

7. . . Optical inspection system

70. . . Optical inspection conveyor belt

71. . . Image capture device

72. . . Color capture device

8. . . Double speed photoelectric detection system

80. . . Mobile device

801, 802. . . Photoelectric detection conveyor belt

811, 812. . . Photoelectric detection position

82. . . Light switching device

82’. . . Optical mirror

821, 821’. . . light source

823’, 824’. . . Reflector

822. . . vehicle

822’. . . Switching axis

83. . . Drive guide

831. . . Probe

832. . . Robotic arm

84. . . Control device

9. . . Classification system

91. . . Pick and place

92. . . Classification

Fig. 1 is a schematic view showing a manner of detecting a shaking sound by an operator.

2 is a schematic top view of a conventional solar wafer receiving surface.

Figure 3 is a schematic view of the structure of the front machine that has been proposed by the applicant of the present application.

4 is a top plan view of the machine of the first preferred embodiment of the present invention.

Figure 5 is a side elevational view of the embodiment of Figure 4.

Figure 6 is a flow chart showing the detection method of the first preferred embodiment of the present invention.

Figure 7 is a block diagram showing the structure of the double speed photoelectric detecting system of the embodiment of Figure 4.

8 is a top plan view of the embodiment of FIG. 4 illustrating a photodetection system in which the solar wafers to be tested are interleaved input and output.

9 is a perspective schematic view of a guide bus that drives a corresponding probe in the guiding and guiding device to contact the solar wafer to be tested.

Fig. 10 is a schematic diagram of switching of the illumination switching device.

Figure 11 is a front elevational view of the illumination switching device of the second preferred embodiment of the present invention.

11‧‧‧Solar wafers to be tested

12‧‧‧Complete solar wafers

6‧‧‧Feed system

61‧‧‧Feeding

62‧‧‧ pick and place device

70‧‧‧Optical inspection conveyor belt

7‧‧‧ Optical Inspection System

71‧‧‧Image capture device

72‧‧‧Color capture device

8‧‧‧ Double speed photoelectric detection system

80‧‧‧Mobile devices

801, 802‧‧‧photodetection conveyor belt

811, 812‧‧‧photodetection position

9‧‧‧Classification system

91‧‧‧ picker

92‧‧‧category

Claims (10)

A solar wafer double-speed photodetection system for use in a solar wafer inspection machine for detecting at least one solar wafer to be tested, wherein the solar wafer to be tested has a light-receiving surface and a set for receiving The light is converted into a conductive busbar of the electrical energy output, and the machine has a base, the detection system comprising: a set of mobile devices disposed on the base, the set of mobile devices comprising a plurality of transport members, and each of the The conveying members respectively have a detecting position for the solar wafer to be tested to be tested; a set of illumination switching devices comprising: a light source; and a switch for switching the light source to emit the detection position; and The group driving guiding device comprises: a complex array corresponding to each of the detecting electrodes of the detecting position; and a complex array driving the guiding electrodes to guide and deducting the driving device of the solar wafer guiding bus bar to be tested . The detection system of claim 1, further comprising: when one of the plurality of conductive electrodes of the plurality of arrays is driven to conduct the solar wafer to be tested, driving the switch to switch the light source of the light source to correspondingly a detection location of the tested solar wafer; and when the converted solar wafer is sensed, driving the other of the transport members to transport the next piece of the tested solar wafer to the other A control device that detects the position. The detection system of claim 1 or 2, wherein the switch is a carrier that moves the light source between a plurality of illumination positions respectively corresponding to the detection positions. The detection system of claim 1 or 2, wherein the switch is an optical lens set that illuminates the light emitted by the light source to the detection positions. The detection system of claim 1 or 2, wherein the conductive electrodes are a plurality of probe sets. The detection system of claim 5, wherein the plurality of driving members are respectively used to drive the robot arms of the probe sets for lifting. A detection machine having a solar wafer double-speed photoelectric detection system for detecting a plurality of solar wafers to be tested, wherein the waiting solar wafers respectively have a light-receiving surface and a group for converting the received light into an electrical energy output. a conductive bus bar, the machine comprises: a base; a feeding system disposed on the base; a set of optical detecting systems; and a set of double speed photoelectric detecting systems, comprising: a set of movements disposed on the base The device, the set of mobile devices includes a plurality of transport members, and each of the transport members respectively has a detection position for the solar wafer to be tested; a set of illumination switching devices having a light source; and a switch a switch capable of emitting light to the detection positions; and a set of driving and guiding devices having a plurality of connection electrodes respectively corresponding to the detection positions; and the plurality of arrays respectively driving the conduction and conduction of the conductive electrodes Receiving a driving member for waiting for the solar wafer to guide the bus bar; and a group of the measuring device according to the optical detecting system and the double-speed photoelectric detecting system Energy classification system Wafer Sort of. For example, in the testing machine of claim 7, wherein the optical detecting system comprises: a set of solar wafer receiving surface image capturing device; and a set of solar wafer color capturing devices. The detecting machine of claim 7, wherein the double speed photoelectric detecting system further has a set of driving when the one of the plurality of conductive electrodes of the plurality of arrays is driven to guide the solar wafers to be tested; The light source can be switched to the detection position where the tested solar wafers are located; and when the converted electrical energy of the tested solar wafers is sensed, driving the other of the transport members, the delivery time A piece of solar wafer under test to the control device of the other detection location. A solar wafer inspection method for detecting a plurality of solar wafers to be tested by a detecting machine, wherein the waiting solar wafers respectively have a light collecting surface and a set of conductive bus bars for converting the received light into an electrical energy output And the detecting machine comprises a base, a set of feeding systems disposed on the base, a set of optical detecting systems, a set of double-speed photoelectric detecting systems, and a set according to the optical detecting system and the double-speed photoelectric detecting system a classification system for classifying the detection result, and the double-speed photoelectric detection system comprises a set of moving devices disposed on the base and having a plurality of conveying members respectively corresponding to one detecting position, the group having a light source and a switcher A lighting switching device, a set of driving guiding devices having a plurality of array conducting electrodes and a plurality of array driving members, and a set of control devices, the method comprising the steps of: a) inputting the waiting solar wafers by the feeding system The optical detection system of the group performs optical detection; b) transporting the solar wafer to be tested to the one of the transporting members of the mobile device Corresponding to the detection position; c) driving the set of conductive electrodes corresponding to the detection position with the corresponding one of the driving members to guide the solar wafer guiding busbar to be tested, and driving the illumination switching device to enable The light emitted by the light source will correspond to the detected position; d) the light source is illuminated and the detection result is received by the set of conductive electrodes, and the other of the transport members is driven by the control device to deliver the next one Detecting the solar wafer to the other detection location; e) driving the set of conductive electrodes corresponding to the detected position by the corresponding one of the driving members to decouple from the solar wafer guiding busbar to be tested, and Driving the illumination switching device such that the light emitted by the light source will correspond to another detection location; and f) classifying the measured solar wafer according to the optical detection system and the double-speed photodetection system detection junction.