CN206293457U - Equipment and system for manufacturing solar cell for processing solar cell - Google Patents

Equipment and system for manufacturing solar cell for processing solar cell Download PDF

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Publication number
CN206293457U
CN206293457U CN201621194051.3U CN201621194051U CN206293457U CN 206293457 U CN206293457 U CN 206293457U CN 201621194051 U CN201621194051 U CN 201621194051U CN 206293457 U CN206293457 U CN 206293457U
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China
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transportation route
solar cell
equipment
station
process stations
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CN201621194051.3U
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Chinese (zh)
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G·塞勒尔
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Applied Materials Italia SRL
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Applied Materials Baccini SpA
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Priority to CN201621194051.3U priority Critical patent/CN206293457U/en
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Publication of CN206293457U publication Critical patent/CN206293457U/en
Priority to EP17193467.2A priority patent/EP3316318A1/en
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Abstract

It is used to process the equipment (100) of solar cell (10) there is provided one kind.The equipment (100) includes:Two-wire transport arrangement (110), the two-wire transport arrangement has the first transportation route (112) and the second transportation route (114) and is configured for transporting the solar cell (10);At least one first process stations (120), described at least one first process stations are at two-wire transport arrangement (110) place;Single line transport arrangement (130), the single line transport arrangement has the 3rd transportation route (132) and is configured for transporting the solar cell (10);At least one second process stations (122), described at least one second process stations are at single line transport arrangement (130) place;And delivery module (140), the delivery module is between described at least one first process stations (120) and described at least one second process stations (122).The delivery module (140) is configurable for for solar cell (10) being sent to the 3rd transportation route (132) from first transportation route (112) and second transportation route (114).

Description

Equipment and system for manufacturing solar cell for processing solar cell
Technical field
Implementation method of the present utility model is related to a kind of equipment for processing solar cell and a kind of for manufacturing too The system of positive energy battery.Specifically, implementation method of the present utility model is related to a kind of electric test for solar cell With the equipment and system of optical check.
Background technology
Solar cell is photovoltaic (PV) device that sunlight is converted directly into electric power.One kind is for processing solar cell Equipment can have linear configurations, the linear configurations have multiple transportation routes, and plurality of process stations can be along supply line Road provides.In order to increase equipment yield, multiple transportation routes abreast arrange that each transportation route has corresponding process stations. This equipment expends sizable installing space.In addition, producing such as cost on operation and maintenance.
In view of above-mentioned, overcome the new equipment for processing solar cell of at least some problems of this area and be used for It is beneficial to manufacture the system of solar cell.The utility model be intended in particular for providing a kind of achievable floor space reduce with And the equipment and system of at least one of high yield are provided.
Utility model content
In view of above-mentioned, the utility model provides a kind of equipment for processing solar cell and a kind of for manufacturing too The system of positive energy battery.Further aspect of the present utility model, advantages and features from claims, specific embodiment and Accompanying drawing is apparent.
According to one side of the present utility model, there is provided a kind of equipment for processing solar cell.The equipment bag Include:Two-wire transport arrangement, the two-wire transport arrangement has the first transportation route and the second transportation route and is configured for fortune The defeated solar cell;At least one first process stations, described at least one first process stations are transported in the two-wire and arranged Place;Single line transport arrangement, the single line transport arrangement has the 3rd transportation route and is configured for transporting the solar-electricity Pond;At least one second process stations, described at least one second process stations are at single line transport arrangement;And transmission mould Block, the delivery module is between described at least one first process stations and at least one second process stations.The transmission Module is configurable for for the solar cell being sent to institute from first transportation route and second transportation route State the 3rd transportation route, or vice versa it is as the same.
According to further aspect of the present utility model, there is provided a kind of system for manufacturing solar cell.The system System includes:One or more production stations, described one or more production stations are used to produce solar cell;And according to reality described herein Apply the equipment for processing solar cell of mode.The equipment is configurable for testing and/or checks by one or more The solar cell of production stations production.
Brief description of the drawings
Therefore, in order to mode used by features described above structure of the present utility model is understood in detail, summarized above More specifically description of the present utility model may be referred to each implementation method and draw.Accompanying drawing is related to embodiment party of the present utility model Formula, and it is described below:
Figure 1A shows the schematic plan of the equipment for processing solar cell according to implementation method described herein;
Figure 1B and Fig. 1 C are shown solar cell from the first transportation route and second according to implementation method described herein Transportation route is sent to the schematic diagram of the 3rd transportation route;
Fig. 2 shows the transmission mould for transmitting solar cell between transportation route according to implementation method described herein The schematic side elevation of block;
Fig. 3 shows the schematic of the equipment for processing solar cell according to further embodiment described herein Top view;
Fig. 4 shows the signal of the equipment for processing solar cell according to further embodiment as herein described Property top view;And
Fig. 5 shows the schematic plan of the system for manufacturing solar cell according to implementation method described herein.
Specific embodiment
With detailed reference to various implementation methods of the present utility model, their one or more examples are shown in the drawings. In the following description to accompanying drawing, same reference numerals refer to same components.In general, only describe relative to individually implementation The difference of mode.Each example is provided as explanation of the present utility model, and is not intended to as limitation of the present utility model.This Outward, the feature for being illustrated and described as a part for implementation method can be used for other embodiment or be combined with other embodiment To produce further embodiment.Description is intended to include such modifications and variations.
In for the equipment for processing solar cell, two transportation routes can be provided for the parallel processing multiple sun Can battery.Multiple process stations are provided along each transportation route.Each process stations can be provided twice, i.e. two transportation routes Each of be respectively provided a process stations.Increase occupation area of equipment for each transportation route provides corresponding process stations, And expend sizable installing space.Further, since each process stations occur twice, therefore produce for example on operation and maintenance Cost.
The utility model has used two-wire to transport the combination of arrangement and single line transport arrangement, and delivery module is arranged in both Between.Two-wire transport arrangement and single line transport arrangement can sequentially arrange that wherein delivery module transports solar cell from two-wire Defeated arrangement is moved to single line transport arrangement.Occupation area of equipment, installing space and/or cost can be reduced.In addition, can be along single line Transport arrangement arrangement has one or more process stations of higher productivity and/or can have relatively low life along two-wire transport arrangement arrangement One or more process stations of yield.Thus, the total output of equipment can be high.
Figure 1A shows the schematic diagram of the equipment 100 for processing solar cell 10 according to implementation method described herein.
Equipment 100 includes:Two-wire transport arrangement 110, the two-wire transport arrangement has the first transportation route 112 and second Transportation route 114 and be configured for transport solar cell 10;At least one first process stations 120, described at least one One process stations are at two-wire transport arrangement 110;Single line transport arrangement 130, the single line transport arrangement has the 3rd transportation route 132 and be configured for transport solar cell 10;At least one second process stations 122, described at least one second process stations At single line transport arrangement 130;And delivery module 140, the delivery module is at least one first process stations 120 and at least Between one the second process stations 122.Delivery module 140 is configurable for solar cell 10 from the first transportation route 112 The 3rd transportation route 132 is transmitted or is moved to the second transportation route 114, and/or vice versa.
According to some implementation methods, the first transportation route 112 and the second transportation route 114 are at least in part (for example, completely Ground) extend through at least one the first process stations 120.Equally, the 3rd transportation route 132 is at least in part (for example, fully) Extend through at least one the second process stations 122.For example, the first transportation route 112, the second transportation route 114 and/or Three transportation routes 132 can be conveying device, such as lace conveying device.First transportation route 112 and the second transportation route 114 can To follow one another and/or substantially parallel extend.In some embodiments, the first transportation route 112 and the second transport At least one of circuit 114 can substantially parallel extend with the 3rd transportation route 132.For example, for by extremely The transporting direction of the solar cell 10 that few some transportation routes are provided is substantially parallel.First transportation route 112, second is transported The transportation route 132 of defeated circuit 114 and/or the 3rd can be linear transportation route.
Term " substantially parallel " is related to being oriented substantially parallel for such as transportation route and/or transporting direction, wherein with accurately Parallel-oriented several years deviation (for example, up to 1 ° or even up to 5 °) is regarded as " substantially parallel ".For example, it is described inclined Difference can be caused by device fabrication tolerance.
According to some implementation methods that can be combined with other embodiment described herein, at least one first process stations 120 can be selected from the group being made up of following item:Electric test station, optical inspection station, printing station, dry station, sorting station and they Any combinations.Equally, at least one second process stations 122 can be selected from the group being made up of following item:Electric test station, optics Inspection post, printing station, dry station, sorting station and any combination of them.For example, at least one first process stations 120 can Can such as be automated optics and examine including optical inspection station with including electric test station, and at least one second process stations 122 (AOI) is looked into stand.At least one first process stations 120 can be one or more first process stations.At least one second process stations 122 can It is one or more the second process stations.Especially, the first more than one process stations can be disposed with two-wire transport arrangement 110. Equally, the second more than one process stations can be provided with single line transport arrangement 130.
Electric test station can be configured to the test and/or inspection performed to solar cell 10.According to some implementation methods, Electric test station can be configured to determination solar energy parameter, including but not limited to:It is the open-circuit voltage (Voc) of solar cell 10, short At least one of road electric current (Isc), peak power (Pmax), efficiency and fill factor, curve factor.
Electric test station can include light source, and such as solar simulator, the light source is configured as electromagnetic radiation court Launch to solar cell 10.Light source includes being divided into the radiant panel of multiple units, and each unit includes multiple light-emitting components, Such as LED, the light-emitting component launches different wave length to provide the output spectrum of solar simulating radiation spectrum.Light source controller can It is connected to light source.According to some implementation methods, light source controller is configured as example (such as to be measured based on pre-conditioned or parameter Species, test condition of the solar cell of examination etc.) control light source.
According to some implementation methods, electric test station includes contact element, is used to provide electric to solar cell 10 Connection.For example, two pairs of contact elements 250 can be provided, wherein each pair can be included for distinguishing contact solar cell 10 Above with the front contact and back contact at the back side.First pair can be configured to measurement voltage or voltage drop, and second pair can be configured to Measurement electric current, to realize that such as electronic load I-V is measured.
In some embodiments, optical inspection station can stand for AOI, be configured to perform the optics inspection to solar cell Look into.For example, optical inspection station includes one or more cameras, such as high resolution camera, these cameras are configured as being used for The image of the solar cell of optical check.Optical inspection station is configurable for checking determining for the conducting wire of solar cell At least one of position, the printing quality of conducting wire, the geometry of conducting wire, the constructional aspect of solar cell, institute State constructional aspect to include but is not limited to, the slight crack or fine fisssure and solar cell of solar cell or solar cell wafer Color.
Printing station be configurable on solar cell substrate print (such as silk-screen printing) conductive pattern, it is described too Positive energy cell substrates are used to manufacture solar cell.Conductive pattern can be selected from the group being made up of following item:Finger piece, busbar And any combination of them.For example, printing station is configurable for dual printing.Dry station is configurable for drying The material on solar cell substrate is deposited in printing station.For example, dry station can be baking oven.Sorting station can be configured to use In based on the test result for for example being obtained by electric test station and/or optical inspection station come to solar cell classify.
Figure 1B and Fig. 1 C are shown solar cell from the first transportation route 112 and according to implementation method described herein Two transportation routes 114 are sent to the schematic diagram of the 3rd transportation route 132.Delivery module 140 has at least one transmission element, all Such as holder fixed by vacuum, electrostatic chuck holder or electronic clamper, the transmission element is configurable for solar cell from the One transportation route 112 and the second transportation route 114 are moved to the 3rd transportation route 132.
Two-wire transport arrangement (that is, the first transportation route 112 and the second transportation route 114) and single line transport arrange (that is, the Three transportation routes 132) corresponding transporting direction for solar cell is provided.By the first transportation route 112, the second transportation route 114 and the transporting direction that provides of the 3rd transportation route 132 can be substantially parallel (hereinafter be generally called " transporting direction 1 ").One In a little implementation methods, transporting direction 1 is horizontally oriented.
According to some implementation methods that can be combined with other embodiment described herein, the 3rd transportation route 132 can position Between the first transportation route 112 and the second transportation route 114.In some embodiments, the first transportation route 112 and second Transportation route 114 on transporting direction 1 with the 3rd transportation route 132 overlap (Figure 1B).In other embodiments, the first transport The transportation route 114 of circuit 112 and second on transporting direction 1 not with the 3rd transportation route 132 overlap (Fig. 1 C).In other words, First transportation route 112 and the second transportation route 114 are spaced apart on transporting direction 1 with the 3rd transportation route 132.
As Figure 1B shows that, according to an implementation method, the first transportation route 112 and the second transportation route 114 are in transporter To overlap with the 3rd transportation route 132 on 1.Delivery module 140 and specifically at least one conveyer can be configured to use In by solar cell from the first transportation route 112 and the transverse shift of the second transportation route 114 to the 3rd transportation route 132, instead It is as the same.Delivery module 140 can move up or transmit solar cell to incite somebody to action in the side substantially perpendicular to transporting direction 1 On solar cell transverse shift to the 3rd transportation route 132.
As Fig. 1 C show that, according to another implementation method, the first transportation route 112 and the second transportation route 114 are in transporter It is spaced apart with the 3rd transportation route 132 on 1.Delivery module 140 and specifically at least one conveyer can be configured to Solar cell is moved parallel or perpendicular to transporting direction 1 to be transported from the first transportation route 112 and second with by solar cell Circuit 114 moves or is sent to the 3rd transportation route 132.It is simultaneously or suitable that delivery module 140 can be parallel and perpendicular to transporting direction 1 Sequence ground is mobile or transmission solar cell is moved to the 3rd transportation route 132 with by solar cell.Fig. 1 C show wherein to transmit Module 140 is parallel and perpendicular to the example that transporting direction 1 sequentially moves solar cell.
Fig. 2 shows the transmission for transmitting solar cell 10 between transportation route according to implementation method described herein The schematic side elevation of module 240.In fig. 2, for exemplary purposes, illustrate only the first transportation route of two-wire transport arrangement 210 and single line transport arrangement the 3rd transportation route 230.
Delivery module 240 has at least one conveyer 244, and the conveyer 244 is configurable for the sun Can battery 10 be moved to the 3rd transportation route 230 from the first transportation route 210 and the second transportation route, or vice versa it is as the same.According to Some implementation methods that can be combined with other embodiment described herein, at least one conveyer 244 is the first transmission dress Put and second conveyer.Second conveyer is configurable for moving solar cell 10 from the first transportation route 210 To the 3rd transportation route 230.Second conveyer is configurable for being moved to solar cell 10 from the second transportation route 3rd transportation route 230.Second conveyer and second conveyer can be configured to essentially identical.In some embodiments, Synchronously operate second conveyer and second conveyer.According to some implementation methods, at least one conveyer 244 can match somebody with somebody Be set to carries out the alignment of solar cell and releasing for solar cell for the pre-position on the 3rd transportation route 230 At least one of.
According to some implementation methods that can be combined with other embodiment described herein, at least one conveyer 244 Selected from the group being made up of following item:Clamper, mechanical gripper, holder fixed by vacuum, Bernoulli Jacob's (Bernoulli) type holder, Electrostatic chuck holder, electronic clamper and any combination of them.Mechanical gripper can be used the mechanical device (such as fixture) will too Positive energy battery is retained on clamper.Holder fixed by vacuum can be used suction that solar cell is retained on clamper.Bernoulli Jacob Type holder can be used air-flow and be retained on folder with by solar cell producing the pressure of reduction on the surface of solar cell In holder.Solar cell is retained on clamper by electrostatic chuck holder and electronic clamper using electrostatic force and electric power respectively On.
In some embodiments, at least one conveyer 244 and specifically clamper include one or more folder Element 246 is held, the clamping element is configurable for contacting and clamping solar cell 10.For example, clamper includes Two or more, such as three, four, five or six holder elements, the holder elements are configurable for contacting and clamp Solar cell.For example, one or more holder elements 246 can be sucker, and the sucker is configured as in solar-electricity Low pressure (under-pressure) is provided on the surface in pond and is retained on one or more holder elements 246 with by solar cell On.
At least one conveyer 244 is configurable for solar cell from the first transportation route 210 and the second fortune Defeated circuit movement is sent to the 3rd transportation route 230.In some embodiments, at least one conveyer 244 can be basic Simultaneously from the first transportation route 210 and the clamping of the second transportation route or pickup solar cell 10, for example, when at least one transmission Device 244 includes the first transmission for solar cell 10 to be moved to the 3rd transportation route 230 from the first transportation route 210 Device and for by solar cell 10 from the second transportation route be moved to the second conveyer of the 3rd transportation route 230 when. In other embodiments, at least one conveyer 244 is alternately pressed from both sides from the first transportation route 210 and the second transportation route Solar cell 10 is held or picks up, for example, when at least one conveyer 244 only includes being used for solar cell 10 from the When one transportation route 210 and the second transportation route are moved to a conveyer of the 3rd transportation route 230.
According to some implementation methods, equipment includes controller 242, and the controller is configured as controlling at least one transmission Device 244.Specifically, controller 242 can be controlled for solar cell 10 to be sent into single line from two-wire transport arrangement Transport the movement of at least one conveyer 244 of arrangement.
In some embodiments, at least one conveyer 244 can in a first direction (correspond to transporting direction 1), At least one of second direction 2 and third direction 3 are upper to be moved.First direction and third direction 3 can be horizontal direction.Change Sentence is talked about, and first direction and second direction 2 can restriction level faces.Second direction 2 can be vertical direction.At least one transmission dress Putting 244 can sequentially or simultaneously move in a first direction, at least one of second direction 2 and third direction 3.By Moved on one direction, second direction 2 and third direction 3, the solar cell 10 held by least one conveyer 244 can be from First transportation route 210 and the second transportation route are moved to the 3rd transportation route 230.
For example, at least one conveyer 244 can be moved in second direction 2 (for example, upwards), be transported with from first The transportation route of defeated circuit 210 or second picks up solar cell 10.Then, at least one conveyer 244 can be sequentially or simultaneously It is mobile with (for example, in the horizontal plane) on third direction 3 in a first direction, solar battery sheet is moved to the 3rd supply line Road 230.At least one conveyer 244 can be moved in second direction 2 (for example, downwards), and solar cell 10 is placed On the 3rd transportation route 230.Then, at least one conveyer 244 can be in second direction 2 (for example, upwards), first direction It is mobile with third direction 3 to return to the first transportation route 210 or the second transportation route, with from the first transportation route 210 or the second Transportation route picks up another solar cell 10.It should be noted that movement should include forwardly and rearwardly moving on " first direction " Dynamic, movement should include moving up and down in " second direction ", and in " third direction " movement should include to It is left and move right.These movements can be limited relative to forwards transportation direction.
Term " vertical direction " is interpreted as being distinguished with " horizontal direction ".That is, " vertical direction " refers to generally vertical It is mobile, wherein being still considered " generally vertical with the several years deviation (for example, up to 5 ° or even up to 10 °) of accurate vertical direction Direction ".Vertical direction may be approximately parallel to gravity.
In some embodiments, delivery module 240 and specifically at least one conveyer 244 can be configured to use In being directed at what is held by least one conveyer 244 before solar cell 10 is positioned on the 3rd transportation route 230 Solar cell.The equipment can use the information obtained by detecting system (not shown), for example, the detecting system Including one or more cameras, the camera is configured as the solar cell 10 that detection is held by least one conveyer 244 Position and/or orientation.
In some embodiments, at least one conveyer 244 be configured as plane (such as basic horizontal it is flat Face) middle alignment solar cell 10.This movement is alternatively referred to as " Θ movements " or " Θ alignments ".For example, at least one pass Device 244 is sent to can be configured to the solar cell 10 that adjustment in the planes or alignment are held by least one conveyer 244 Angular orientation.
According to some implementation methods that can be combined with other embodiment described herein, the first fortune of two-wire transport arrangement The transportation route of defeated circuit 210 and/or second can include or lace conveying device, the lace conveying device have around One or more bands 212 of the roller 214 and offer of the rotation of rotation axis 216 on roller 214.One or more bands 212 are configured as using In the support solar cell 10 during along the transport of transporting direction 1 solar cell 10, the transporting direction is basic horizontal Direction.
According to some implementation methods that can be combined with other embodiment described herein, the 3rd fortune of single line transport arrangement Defeated circuit 230 can include or lace conveying device that the lace conveying device has around the rotation of rotation axis 236 One or more bands 232 of roller 234 and offer on roller 234.One or more bands 232 are configured in be transported along transporting direction 1 Support solar cell 10 during defeated solar cell 10, the transporting direction can be generally horizontal direction.
In some embodiments, at least one of two-wire transport arrangement and single line transport arrangement are led including one or more Rail and the shuttle that can be moved along one or more guide rails.The shuttle is configurable for along guide supporting and transport solar-electricity Pond.For example, the first transportation route, the second transportation route and/or the 3rd transportation route are provided by respective track.Conveyer It is configurable for for solar cell being sent to the 3rd transportation route from the shuttle of the first transportation route and the second transportation route Shuttle.
Fig. 3 shows the equipment 300 for processing solar cell according to further embodiment as herein described Schematic plan.
Equipment 300 includes at least one first process stations 320, the process stations 122 of delivery module 140 and at least one second. At least one first process stations 320, the process stations 122 of delivery module 140 and at least one second can be arranged sequentially, for example, edge Transporter is always arranged.According to some implementation methods, the first transportation route 112, the second transportation route 114 and/or the 3rd transport Circuit may extend to delivery module 140.
In some embodiments, equipment 300 is included in the further technique in the downstream of at least one second process stations 122 Stand 124.For example, at least one first process stations 320, delivery module 140, at least one second process stations 122 and one is entered The process stations 124 of step can be arranged sequentially, for example, always being arranged along transporter.According to some implementation methods, at least one first Process stations 320 can be electric test station, and at least one second process stations 122 include or optical inspection station, and further Process stations 124 can be sorting station.
In the example of fig. 3, at least one first process stations 320 are included in the first substation at the first transportation route 112 322 and the second substation 324 at the second transportation route 114.First substation 322 and the second substation 324 are to separate or independent Process stations.Specifically, the first substation 322 and the second substation 324 can be configured to essentially identical.For example, the first substation 322 and second each of substation 324 can include corresponding light source (such as solar simulator) and contact element to provide To the electrical connection of solar cell, for example, for I/V tests.
At least one first process stations 320 can have for every in the first transportation route 112 and the second transportation route 114 First yield of person.Second process stations can have the second yield for the 3rd transportation route 132.First yield is produced less than second Rate.Transported using two-wire at least one first process stations 320 with low-yield and arranged and for higher yields At least one second process stations 122 (and optional further process stations 124) using single line transport arrangement can reduce The floor space and complexity of equipment 300, while providing the total output high of equipment 300.Specifically, in the first transportation route 112 and the first yield of the second at least one first process stations 320 at transportation route 114 can add up, such as matching substantially Second yield of at least one second process stations 122.
Fig. 4 shows the equipment 400 for processing solar cell according to implementation method further as herein described Schematic plan.
In the example in figure 4, at least one first process stations 420 for being provided are across the first transportation route 112 and second The single station that transportation route 114 extends.For example, at least one first process stations 420 can include a single light source, all Such as in the first transportation route 112 and the top of the second transportation route 114 and/or across the first transportation route 112 and the second transportation route 114 solar simulators for extending.Specifically, same light source or lamp can be used in the first transportation route 112 and the second fortune The upper test solar cells of both defeated circuits 114.
Schematic plans of the Fig. 5 according to the system 500 for manufacturing solar cell of implementation method described herein.
According to implementation method described herein, system 500 includes one or more production stations 510 for producing solar cell With the equipment 520 for processing solar cell.Equipment 520 is configurable for testing and/or checking by one or more productions Stand 510 production solar cells.First transportation route 112 and the second transportation route 114 of two-wire transport arrangement can extend Through at least one of one or more production stations 510 production stations.
According to some implementation methods, one or more production stations are selected from the group being made up of following item:It is printing station, dry station, slow Punching station and any combination of them.For example, one or more production stations 510 include printing station and optionally include dry station. Then, the solar cell with the conducting wire being printed thereon can be incorporated among equipment 520, with to be tested and/or inspection Look into.After test and/or inspection, then, solar cell can be provided to sorting station 530, be used to be based on testing and/or checking The result that period obtains to classify solar cell.
In the following, it is described that the programme of work of the equipment according to implementation method of the present utility model.
Device configuration of the present utility model is used for the first transportation route and the second transport to being arranged in two-wire transport arrangement Solar cell on circuit performs the first test program, will be positioned in the sun on the first transportation route and the second transportation route Energy battery is moved to the 3rd transportation route in single line transport arrangement, and the solar-electricity to being arranged on the 3rd transportation route Pond performs the second test program.
In some implementations, the first test program includes using the first work in such as at least one first process stations Skill station measures the electrical characteristic of solar cell, and first process stations can be electric test station.For example, the first test journey Sequence can be tested including I/V.Second test program can include using the second technique in such as at least one second process stations Stand optical check solar cell, second process stations can be optical inspection station.
The utility model has used two-wire to transport the combination of arrangement and single line transport arrangement, and delivery module is arranged in both Between.Two-wire transport arrangement and single line transport arrangement can sequentially arrange that wherein delivery module transports solar cell from two-wire Defeated arrangement is moved to single line transport arrangement.Occupation area of equipment, installing space, and/or cost can be reduced.In addition, can be along list Line transport arrangement arrangement has one or more process stations of high yield and/or can have compared with low-yield along two-wire transport arrangement arrangement One or more process stations.Thus, the total output of equipment can be high.
Although the above is directed to implementation method of the present utility model, without departing substantially from base region of the present utility model In the case of, can design other and further embodiment of the present utility model, and scope of the present utility model be by Appended claims determine.

Claims (15)

1. a kind of equipment for processing solar cell, the equipment includes:
Two-wire transport arrangement, the two-wire transport arrangement has the first transportation route and the second transportation route and is configured for fortune The defeated solar cell;
At least one first process stations, described at least one first process stations are at two-wire transport arrangement;
Single line transport arrangement, the single line transport arrangement has the 3rd transportation route and is configured for transporting the solar-electricity Pond;
At least one second process stations, described at least one second process stations are at single line transport arrangement;And
Delivery module, the delivery module described at least one first process stations and described at least one second process stations it Between, wherein the delivery module is configurable for the solar cell from first transportation route and second fortune Defeated circuit is sent to the 3rd transportation route, or vice versa it is as the same.
2. equipment as claimed in claim 1, it is characterised in that the delivery module has at least one conveyer, described At least one conveyer is configurable for the solar cell from first transportation route and second transport Circuit is moved to the 3rd transportation route, or vice versa it is as the same.
3. equipment as claimed in claim 2, it is characterised in that at least one conveyer is configurable for will be described Solar cell from first transportation route and the second transportation route transverse shift to the 3rd transportation route, or instead It is as the same.
4. equipment as claimed in claim 2, it is characterised in that at least one conveyer is second conveyer and Two conveyers, wherein the second conveyer is configurable for moving solar cell from first transportation route It is configurable for solar cell from described second to the 3rd transportation route, and wherein described second conveyer Transportation route is moved to the 3rd transportation route.
5. equipment as claimed in claim 2, it is characterised in that at least one conveyer is selected from what is be made up of following item Group:Clamper, mechanical gripper, holder fixed by vacuum, Bernouilly type holder, electrostatic chuck holder, electronic clamper and they Any combinations.
6. equipment as claimed in claim 1, it is characterised in that described at least one first process stations are selected from and are made up of following item Group:Electric test station, optical inspection station, printing station, dry station, sorting station and any combination of them.
7. equipment as claimed in claim 1, it is characterised in that described at least one second process stations are selected from and are made up of following item Group:Electric test station, optical inspection station, printing station, dry station, sorting station and any combination of them.
8. equipment as claimed in claim 1, it further includes the sorting station in described at least one second process stations downstreams.
9. equipment as claimed in claim 1, it is characterised in that first transportation route and second transportation route are with that This extends with mode at least one of parallel to each other in succession.
10. equipment as claimed in any one of claims 1-9 wherein, it is characterised in that the device configuration is used for being arranged in The solar cell stated on first transportation route and second transportation route of two-wire transport arrangement performs first Test program;The solar cell that will be positioned on first transportation route and second transportation route is moved to institute State the 3rd transportation route in single line transport arrangement;And the solar energy to being arranged on the 3rd transportation route Battery performs the second test program.
11. equipment as claimed in claim 10, it is characterised in that first test program includes the measurement solar-electricity The electrical characteristic in pond.
12. equipment as claimed in claim 10, it is characterised in that second test program includes the sun described in optical check Can battery.
A kind of 13. systems for manufacturing solar cell, the system includes:
One or more production stations, described one or more production stations are used to produce the solar cell;And
Equipment as claimed in claim 1, wherein the equipment be configurable for it is at least one of following:Test and inspection The solar cell produced by described one or more production stations.
14. systems as claimed in claim 13, it is characterised in that first transportation route of two-wire transport arrangement and Second transportation route extends through at least one of one or more production stations production stations.
15. system as described in claim 13 or 14, it is characterised in that described one or more production stations are selected from by following item group Into group:Printing station, dry station, buffered station and any combination of them.
CN201621194051.3U 2016-10-28 2016-10-28 Equipment and system for manufacturing solar cell for processing solar cell Active CN206293457U (en)

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EP17193467.2A EP3316318A1 (en) 2016-10-28 2017-09-27 Apparatus for processing of solar cells, system for the manufacture of solar cells, and method for testing solar cells

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019063083A1 (en) * 2017-09-28 2019-04-04 Applied Materials Italia S.R.L. Apparatus for manufacture of a solar cell arrangement having two or more overlapping solar cell pieces, system for manufacture of a solar cell arrangement, and method for assembling a solar cell arrangement
CN111801805A (en) * 2018-03-08 2020-10-20 应用材料意大利有限公司 Apparatus and method for manufacturing a solar cell arrangement
US11624110B2 (en) 2016-05-02 2023-04-11 Applied Materials, Inc. Method of coating a substrate and coating apparatus for coating a substrate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11624110B2 (en) 2016-05-02 2023-04-11 Applied Materials, Inc. Method of coating a substrate and coating apparatus for coating a substrate
WO2019063083A1 (en) * 2017-09-28 2019-04-04 Applied Materials Italia S.R.L. Apparatus for manufacture of a solar cell arrangement having two or more overlapping solar cell pieces, system for manufacture of a solar cell arrangement, and method for assembling a solar cell arrangement
TWI692880B (en) * 2017-09-28 2020-05-01 義大利商應用材料意大利有限公司 Solar cell arrangement, apparatus for manufacture of a solar cell arrangement, system for manufacture of a solar cell arrangement, and method for assembling a solar cell arrangement
CN111801805A (en) * 2018-03-08 2020-10-20 应用材料意大利有限公司 Apparatus and method for manufacturing a solar cell arrangement

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