JP2548081Y2 - Clean transfer system - Google Patents

Description

[Detailed description of the invention]

[0001]

[Industrial application] This invention is designed to clean
For multiple article transfer stations where air flows,
To transfer the goods by the
It relates to a lean transfer system .

[0002]

2. Description of the Related Art Conventional overhead-type article conveying apparatuses are conventionally known as overhead-type article conveying apparatuses used in clean rooms. That is, a traveling vehicle that can travel along an upper track that is installed close to the ceiling of the clean room or the like, a lifting frame that is provided to be able to move up and down the traveling vehicle, and a lower portion of the lifting frame that is provided. It is an overhead-type article transport device having an article hanging tool provided. In addition, this article-holding device is of a type in which an article is grasped, a type in which part or all of an article is hooked and lifted, or a basket in accordance with the size, shape, material, characteristics, etc. of the article. There are various types, such as a type in which articles are stored in a shape. By the way, in the case where the traveling vehicle is stopped above the article transfer station and the lift frame is lowered, in order for the lowered lift frame to have a predetermined position with respect to the article transfer station, the following is performed. I was That is, the diagonal part 2 of the article transfer station
The positioning poles are erected at two places, and the positioning poles are fitted into the corresponding diagonal portions of the lifting frame.
The number of pole through holes was provided.

[0003]

Disadvantages of the prior art The above-mentioned conventional overhead type article conveying apparatus has the following disadvantages. That is, when the lifting frame is raised or lowered, the inner peripheral surface of the pole through-hole and the outer peripheral surface of the positioning pole rub against each other, and a small amount of dust may be generated. When the article to be transported by the article transport apparatus is a wafer or the like, the above-mentioned dust is not preferable in product management even though it is in a very small amount, and may lead to a defective product or a low-grade product. was there.

[0004]

The present invention employs the following means to solve the above-mentioned drawbacks. This idea
Is the transfer of multiple items where clean air flows in a predetermined direction.
Overhead type article transfer device for station
Therefore, it is a clean transport system for delivering goods,
Each article transfer station has an article transfer station
Position so that it is located on the downwind side of the clean air
Decision poles are erected, and overhead-type article transfer devices
The positioning frame of each article transfer station
That have multiple pole holes into which
You.

[0005]

The operation of the present invention is as follows. Positioning poles are mounted on multiple
Can fit into the desired through hole
The goods side on the goods transfer station is
Upwind of the clean air flowing through the
Position so that the pole side is downwind of clean air
The position of the pole can be determined, and as a result, goods transfer
The direction of the vehicle passing through the station and the transfer
In the direction of clean air flow
That is, the overhead type article conveying device
On the upper track of
Always take poles without regard to the air flow direction.
The inner peripheral surface of the through hole rubs against the outer peripheral surface of the positioning pole
The generated dust can be prevented from covering the goods.
You.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to an embodiment shown in the drawings. As shown in FIG. 1, a lifting frame 3 provided to be suspended from a traveling vehicle 2 in the article transport device 1.
The upper horizontal plate 5 is provided on the upper side of the fan device 4 for blowing clean air, and the lower horizontal plate 6 is provided on the lower side. The article hanger 11 is provided on the lower surface side of the lower horizontal plate 6 among them. The article hanging tool 11 has a plurality of rake frames 8, 8,... And an enclosure wall 7 that covers the outer peripheral portion of the rake frames. In the figure, reference numeral 20 denotes an upper track installed so as to be close to the ceiling of the clean room.

As shown in FIG. 2, the article transfer station 13 uses a drive roller conveyor. Therefore, when the lifting frame 3 is lowered at the upper part, the rake frames 8, 8,... Of the article hanging tool 11 are fitted between the rollers 14 in parallel with each other as shown in FIG. Thereafter, articles 16, 16 conveyed on the rollers 14 can be received. The enclosure 7 of the article hanging tool 11 is provided with a shutter (not shown) that opens when the article 16 is carried into the enclosure.

As shown in FIG. 1, the lower horizontal plate 6 of the lift frame 3
Are provided with pole through holes 10 at the four corners thereof, and boss members 9 are provided so as to correspond directly below these, respectively.
Needless to say, the pole through hole 10 and the boss member 9 are also provided at the corner on the back side. As shown in FIG. 3, positioning poles 15, 15 erected around the article transfer station 13 fit into the pole through holes 10. Further, the boss member 9 is provided with a guide hole 12 that penetrates vertically and communicates with the pole through hole 9. The guide hole 12 has a medium aperture shape in which the upper and lower openings have a large diameter and the middle has a small diameter.

As shown in FIG. 2, FIG. 4, and FIG. 5, a plurality of article transfer stations 13 for different purposes are installed in a clean room.
The standing position of the positioning pole 15 is variously changed for each of the article transfer stations 13. That is, as shown in FIG. 2, when the article transfer station 13 is provided exclusively for unloading as shown in FIG. 2, the positioning poles 15 are located at two positions on both sides of one end of the end (the right side in FIG. 2). ing. Also, as shown in FIG. 4, when the article transfer station 13 is provided only for carrying in,
There are two places on both sides of one side of the start end side (left side in FIG. 4). Furthermore, when the article transfer station 13 is provided exclusively for article exchange, there are two locations (lower side in FIG. 5) where the maintenance opening 17 for the operator is provided. The positioning position of the positioning pole 15 is such that clean air (see arrow A) flowing horizontally (horizontally) through the article transfer station 13 is positioned.
It is determined based on the mutual positional relationship with the article 16 when sprayed. That is, the article 16 is on the leeward side and the positioning pole 15 is on the leeward side. By doing so, the positioning pole 15
In contrast, dust generated when the pole through hole 10 of the lifting frame 3 is fitted does not adversely affect the article 16. As shown in FIGS. 2, 4, and 5, each conveying path of the article 16 is surrounded on both sides and the upper part by the ventilation dome 19, and the flow direction of the clean air (arrow A) is maintained in a predetermined direction. It is made to drip. An opening (not shown) through which the lifting frame 3 and the article suspending tool 11 pass is formed in the blow dome 19 at a position directly above the article transfer station 13.

In FIGS. 2, 4 and 5, the part where the transport path of the article 16 is bent at a right angle in the middle is shown in FIG.
A belt conveyor 18 (see FIG. 2) which can be moved up and down freely is provided.

[0011]

Next, the operation of the embodiment will be described. The lifting frame 3 is provided with pole through holes 10 at its four corners.
Therefore, as shown in FIG. 2, FIG. 4, and FIG. 5, even if the standing position of the positioning pole 15 is variously changed in each of the various article transfer stations 13, the lifting frame When lowering the position 3, the position between them can be adjusted as predetermined. In other words, the positioning pole 15 can be arranged at an optimum position (further leeward when clean air is blown onto the article 16). Therefore, dust generated by friction between the positioning pole 15 and the pole through hole 10 of the lifting frame 3 can be discharged without affecting the article 16 at all.

[0012]

[Effects of the Invention] This invention has the following structure.
The following effects are obtained. Positioning pole
Fits the desired one of the plurality of pole through holes provided in the lifting frame
Because it can be rounded, the goods transfer station
Clean the product side on the product flowing through the product transfer station
Upwind of air, clean air on positioning pole side
Position the positioning pole so that it is downwind of the
And, as a result, pass the goods transfer station
The direction of the traveling vehicle and the clearance at each article transfer station
Without being restricted by the flow direction of the air
The upper trajectory of the overhead type article transfer device and each article transfer
Consider the flow direction of the clean air at the loading station.
Always position the inner peripheral surface of the pole through hole without planning
Dust generated by rubbing against the outer surface of the pole
You can avoid blurring.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view showing an overhead type article conveying apparatus according to the present invention.

FIG. 2 is a cross-sectional plan view showing an article transfer station dedicated to unloading.

FIG. 3 is an enlarged side sectional view taken along line II-II of FIG. 2;

FIG. 4 is a schematic plan cross-sectional view showing an article transfer station dedicated to carry-in;

FIG. 5 is a schematic plan sectional view showing an article transfer station dedicated to article exchange.

FIG. 6 is an enlarged front sectional view taken along line III-III of FIG. 2;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Article conveyance apparatus 2 Traveling vehicle 3 Elevating frame 10 Pole through-hole 11 Article hanger 13 Article transfer station 15 Positioning pole 16 Article 20 Upper track

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification code Agency reference number FI Technical display location H01L 21/68 H01L 21/68 G

Claims (1)

(57) [Scope of request for utility model registration] A plurality of clean air flowing in a predetermined direction.
Overhead type goods for the goods transfer station
Clean transfer system for transferring goods by transfer device
Each article transfer station has an article transfer step.
Located on the downwind side of the clean air
The positioning pole is erected so that the overhead type
In the lifting frame of the product transfer device, the position of each article transfer station is
There are multiple pole holes where the positioning pole fits.
Clean transfer system.