JP4378659B2 - Goods storage facilities and goods storage facilities for clean rooms - Google Patents

Description

  The present invention relates to an article storage shelf provided with article storage sections arranged in the width direction of the shelf and the vertical direction of the shelf, and a lifting / lowering for supporting an article that can move up and down in the width direction of the transportation vehicle in the width direction of the shelf and move up and down freely. An article storage vehicle provided with an article transport vehicle provided with a table, and purified air flow means for allowing purified air to flow through the article storage section from the rear side of the article storage shelf and flow into the transport vehicle moving space; and The present invention relates to an article storage facility for a clean room in which the article storage is provided in a downflow clean room.

Such an article storage unit moves articles transporting vehicles in the width direction of the shelf and moves the lifting platform up and down in the vertical direction of the shelf to transport articles such as work-in-process products of semiconductor products and liquid crystal display elements to the article storage unit. Then, the article stored in the article storage unit is conveyed to an article processing apparatus for processing the article or to the outside.
Then, the purified air flow means causes the purified air to flow from the rear side of the article storage shelf through the article storage portion to flow into the transport vehicle moving space, thereby conveying dust that is easily generated when the article transport vehicle travels. It is configured such that air does not easily flow from the vehicle movement space to the article storage section side, and the article storage section is maintained in an environment with little dust (see, for example, Patent Document 1).

Japanese Patent Laid-Open No. 2003-081406

By the way, when the article transport vehicle moves in the transport vehicle moving space, the purified air on the front side in the vehicle traveling direction of the lifting platform becomes compressed, and the compressed purified air travels as the article transport vehicle decelerates or stops. It expands to the front side in the direction, and a part of the expanded purified air flows to the article storage rack side as well as the flow of the purified air by the purified air flow means.
Therefore, conventionally, as the article transport vehicle decelerates or stops, a part of the compressed air in the compressed state on the front side in the vehicle traveling direction of the lifting platform flows to the article storage shelf side. When the purified air flows backward from the moving space to the article storage section, the cleanliness of the article storage section decreases.

  The present invention has been made in view of the above circumstances, and is for an article storage that can improve the cleanliness of the article storage unit, and for a clean room in which the article storage is provided in a downflow clean room. It is in the point which provides the article storage equipment.

In order to achieve this object, an article storage according to the present invention includes an article storage shelf including article storage units arranged in a shelf width direction and a shelf vertical direction, and a transport vehicle moving space in front of the article storage shelf. Article transportation vehicle having an article support lifting platform that moves in the direction and is movable up and down, and purified air that causes purified air to flow from the rear side of the article storage shelf through the article storage portion to the transport vehicle moving space The first feature of the present invention is that the center of the carriage in the vehicle lateral direction at both ends in the vehicle traveling direction of the lifting platform can be raised and lowered individually. A pair of front and rear central struts for guiding and supporting are provided, and a flat rectifier body in a posture along the vehicle traveling direction and the vehicle up-and-down direction is out of the vehicle traveling direction from each of the lift platform and the pair of front and rear central strut bodies. Away and forward In the vehicle width direction from the elevator platform in a state positioned away said article storage rack side, and, in that provided the pair back and forth in a state along the vertical direction of the vehicle over the entire length or substantially the entire length of the central strut .

That is, flat rectifying body posture along the vehicle traveling direction and the vehicle vertical direction, away from the lifting platform to the vehicle traveling direction outer side and the vehicle width direction from the elevator platform in a state positioned away article storage shelf side since being kicked setting, clean air flowing in the article storage rack side from the vehicle traveling direction front side of the lifting platform is, regardless of the lifting table of the lifting position, received in the vehicle traveling direction front side of the article transport vehicle by rectifying body The purified air that is guided and flows from the front side in the vehicle traveling direction of the lifting platform to the rear side in the vehicle traveling direction flows between the lifting platform and the rectifier to the rear side in the vehicle traveling direction of the lifting platform.

Therefore, when the article transport vehicle moves in the transport vehicle moving space, the purified air on the front side in the vehicle traveling direction of the lifting platform is compressed, and the compressed purified air is reduced or stopped as the article transport vehicle decelerates or stops. Even if it diffuses forward in the vehicle traveling direction and flows to the article storage shelf side, the purified air flowing to the article storage shelf side is driven by the rectifier in the vehicle traveling direction of the article transport vehicle regardless of the lift position of the lifting platform. Since the purified air is restrained from flowing toward the article storage shelf rather than the rectifier, the purified air can be prevented from flowing backward from the transport vehicle moving space to the article storage portion. it can.
Further, when the article transport vehicle moves in the transport vehicle moving space, the purified air on the front side in the vehicle traveling direction of the lifting platform can be caused to flow to the rear side in the vehicle traveling direction of the lifting platform through the space between the lifting platform and the rectifier. Therefore, even if a rectifying body is provided, the purified air on the front side in the vehicle traveling direction of the lifting platform is difficult to be compressed, and the diffusion of the purified air is suppressed, so that the purified air flows backward from the transport vehicle moving space to the article storage unit. Can be suppressed.
Accordingly, the purified air can be prevented from flowing back to the article storage unit, so that the cleanliness of the article storage unit can be improved, thereby providing an article storage that can improve the cleanliness of the article storage unit. I was able to do it.

Further, the rectifying body provided in a state along the vehicle vertical direction over the entire length or substantially the entire length of the central column body is located farther outward in the vehicle traveling direction than each of the pair of front and rear central column bodies. Even if the article transport vehicle reciprocates in the width direction of the shelf in the transport vehicle moving space, the goods are stored from the front side of the central prop body in the vehicle travel direction, regardless of the travel direction of the article transport vehicle. The purified air that flows to the shelf side is received and guided by the rectifier to the front side in the running direction of the article transport vehicle, and the purified air that flows from the front side in the vehicle running direction of the central column body to the rear side in the vehicle running direction of the central column body. The air flows between the central column body and the rectifier to the rear side in the vehicle traveling direction of the central column body.

Therefore, when the article transport vehicle moves in the transport vehicle moving space, the purified air is compressed by the central column body on the front side in the vehicle traveling direction of the central column body, and the compressed air compressed by the central column body is compressed. Even if the article transport vehicle decelerates or stops, the purified air flowing to the article storage shelf side is diffused to the front side in the vehicle traveling direction and flows to the article storage shelf side by the rectifier. Since it is received and guided to the front side in the vehicle traveling direction, it is possible to prevent the purified air from flowing to the article storage shelf side in the width direction of the vehicle from the rectifier, so that the purified air flows backward from the transport vehicle moving space to the article storage section. Can be suppressed.
Further, when the article transport vehicle moves in the transport vehicle moving space, the purified air on the front side in the vehicle traveling direction of the central column body flows to the rear side in the vehicle traveling direction of the central column body between the central column body and the rectifying body. Therefore, if the rectifying body is provided, the purified air on the front side in the vehicle traveling direction of the central column body is difficult to be compressed, and the diffusion of the purified air is suppressed. It is possible to prevent the purified air from flowing backward.
And even if the article transport vehicle reciprocates in the width direction of the shelf in the transport vehicle moving space, the purified air is prevented from flowing back from the transport vehicle moving space to the product storage section regardless of the travel direction of the transport vehicle. Can do.
By the way, the rectifier is provided in a state along the vertical direction of the vehicle over the entire length or substantially the entire length of the central column body, so that the rectifier is positioned corresponding to the lifting platform in the entire range of the lifting movement of the lifting platform. It has been.
Accordingly, since the purified air can be prevented from flowing back to the article storage section regardless of the traveling direction of the article transport vehicle, the cleanliness of the article storage section can be improved. It has become possible to provide an article storage room that can improve the quality.

A second characteristic configuration of the article storage according to the present invention is that, in the first characteristic configuration, each of the pair of front and rear columns supporting and supporting the lifting platform is formed from the central column body and the vehicle width direction outward from the lifting platform. A pair of left and right auxiliary struts that are separated from each other and away from the center strut body in the vehicle traveling direction, and the central strut body and the pair of left and right auxiliary strut bodies are connected at a plurality of locations in the vertical direction. A plurality of rod-shaped members, and a rectifying member supported by the auxiliary strut body in a state of projecting from the auxiliary strut body to one side or both sides in the vehicle traveling direction. It is in the point comprised by the said auxiliary | assistant support | pillar body and the said rectification | straightening member supported by it.

That is, a pair of left and right auxiliary support columns connected to the central support column by a plurality of rod-shaped members are positioned away from the lifting platform to the vehicle lateral direction outward side and away from the central support column to the vehicle travel direction outward side. Accordingly, the strength of the pair of front and rear columns in the vehicle lateral width direction and the vehicle traveling direction is increased, so that a heavy object can be supported as an article on the lifting platform.
And since the rectifying body is composed of the auxiliary strut body and the rectifying member supported by the auxiliary strut body, and the rectifying body is constructed using the auxiliary strut body, the rectifying member newly provided to form the rectifying body is provided. Since the rectifying body can be easily provided in a state along the vehicle vertical direction over the entire length or substantially the entire length of the central support body, the configuration of the rectifying body can be simplified.
In addition, since the central strut body and the pair of left and right auxiliary strut bodies are connected by bar-shaped members at a plurality of positions in the vertical direction, purified air can be ventilated between the central strut body and the pair of left and right auxiliary strut bodies. Since the purified air is less likely to be compressed on the front side in the running direction of the central column body, the purified air is prevented from flowing to the article storage shelf side, and the purified air is prevented from flowing back from the transport vehicle moving space to the article storage section. Can be suppressed.
Therefore, by providing a rectifying body using a pair of left and right auxiliary struts provided to increase the strength of the struts, the structure of the rectifying body can be simplified, and the center strut body and the pair of left and right By allowing the purified air to be ventilated between the auxiliary support columns, it has become possible to provide an article storage that can improve the cleanliness of the article storage section.

An article storage facility for a clean room according to the present invention is such that an article storage with the first or second characteristic configuration is provided in a downflow type clean room, and the first characteristic configuration is the purified air. The flow means is configured to cause the purified air to flow downward through the floor portion of the transport vehicle moving space.

  That is, the purified air flow means causes the purified air to flow from the rear side of the article storage shelf through the article storage portion to the transport vehicle moving space, and from the transport vehicle moving space to the transport vehicle moving space. Since it flows downward through the floor portion, it is possible to suppress the purified air from flowing back to the article storage section from the transporting vehicle moving space where dust is likely to be generated, so that the cleanliness of the article storage section can be improved. Accordingly, it has become possible to provide an article storage facility for a clean room in which an article storage that can improve the cleanliness of the article storage unit is provided in a downflow clean room.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
As shown in FIGS. 1 and 2, the clean room article storage facility (hereinafter sometimes simply referred to as an article storage facility) according to the present invention has a purified air in which the article storage cabinet W is cleaned on the ceiling side. Installed in a downflow clean room 1 that flows downward from the floor to the floor side, for example, in a state where a plate-like body such as a work product of a product such as a semiconductor product or a liquid crystal display element is stored in a container C It is designed to be stored in a dust-free environment. Incidentally, in this embodiment, the container C is configured to be transported or stored as an article.
FIG. 2 is a view taken along the line II in FIG.

  The downflow clean room 1 will be described. As shown in FIG. 2, the floor of the clean room 1 is formed as a porous grating floor 2 having a large number of air holes, and the ceiling blows out to the ceiling of the clean room 1. A clean room circulation ventilation means F for circulating the purified air to the clean room 1 is provided in a form in which the suction air sucked through the grating floor 2 is blown out from the ceiling blowing part 3 by forming the part 3.

The clean room circulation ventilation means F will be described below. An air intake chamber 4 is provided below the grating floor 2, an air filter 5 made of a HEPA filter or the like is provided in parallel to the ceiling outlet 3, and the ceiling outlet is provided. An air chamber chamber 6 is provided on the upper side of the section 3, and the intake chamber 4 and the air chamber chamber 6 are connected to each other through a connection flow path 7.
A circulation fan 8 is provided in the connection flow path 7 so as to suck the intake chamber 4, and a pre-filter 9 is provided in a portion of the connection flow path 7 on the air discharge side of the circulation fan 8. .
That is, the clean room circulation ventilation means F is connected to the grating floor 2, the intake chamber 4, the connection flow path 7, the circulation fan 8, the prefilter 9, the air chamber chamber 6, the ceiling outlet 3, and the An air filter 5 and the like are provided.

Then, due to the ventilation action of the circulation fan 8, the air in the clean room 1 is sucked into the intake chamber 4 through the grating floor 2, and the air sucked into the intake chamber 4 flows through the connection flow path 7 to pass through the prefilter 9. After passing through and being cleaned, it flows into the air chamber chamber 6 and further passes through the air filter 5 provided in the ceiling outlet 3 to be cleaned, and then is directed from the ceiling outlet 3 into the clean room 1. It is configured to blow out downward.
Accordingly, the air in the clean room 1 is circulated through the above-mentioned path while passing through the pre-filter 9 and the air filter 5, so that the purified air is always supplied to the clean room 1 in a state of being blown downward from the ceiling blowing part 3. Thus, the interior of the clean room 1 is maintained in a highly clean state.

Furthermore, an outside air intake passage 10 is connected to a portion of the connection passage 7 on the suction side of the circulation fan 8, and an outside air intake amount adjusting damper 11 is provided in the outside air intake passage 10, and the connection An exhaust passage 12 is connected to the discharge side portion of the circulation fan 8 in the passage 7, and an exhaust amount adjusting damper 13 is provided in the exhaust passage 12.
A predetermined amount of the purified air in the clean room 1 circulated by the clean room circulation ventilation means F by adjusting the opening degree of the outside air intake amount adjusting damper 11 and the exhaust amount adjusting damper 13. Is configured to be replaced with fresh air.

Next, the structure of the article storage facility will be described with reference to FIGS.
The article storage W moves an article storage shelf S provided with a plurality of article storage units 14 arranged in the shelf width direction and the shelf vertical direction, and a transport vehicle moving space 15 in front of the article storage shelf S in the shelf width direction. A stacker crane (corresponding to an article transport vehicle) V and purified air flow from the rear side of the article storage shelf S through the article storage portion 14 to flow into the transport vehicle moving space 15 and the transport vehicle moving space 15. Purified air flow means B for flowing the purified air downward through the floor portion of the grating floor 2 (the floor portion of the grating floor 2 corresponding to the transport vehicle moving space 15). It is provided.
FIG. 3 is a view taken in the direction of arrows in FIG.

In this embodiment, the article storage rack S is in a state where the front sides of the article storage shelves face each other and at a distance from each other so as to form the carriage movement space 15 between them. Are provided on both sides in the vehicle width direction.
Incidentally, the pair of article storage shelves S is provided on the grating floor 2 of the clean room 1.

Then, around the side of the pair of article storage shelves S provided in this manner, the transport vehicle moves from the both ends in the lateral width direction of each article storage shelf S at the rectangular cylindrical peripheral wall 25 opened at both ends in the vertical direction of the shelf. In order to form an air circulation space 19 which will be described later, the outer projecting portion 15t of the space 15 and the exhaust space 16 are spaced apart from each other and the rear end of each article storage shelf S in the longitudinal direction of the shelf. Surrounded by a gap.
That is, the transport vehicle moving space 15 is provided so as to protrude outward in the width direction of the shelf from the article storage shelf S, and the exhaust space 16 is provided on the lateral side portion of the article storage shelf S. An outward projecting portion 15t projecting outward from the article storage shelf S in the lateral direction of the shelf and the exhaust space 16 are communicated with each other so as to allow air flow. In addition, an air circulation space 19 for guiding the purified air blown from the ceiling outlet 3 of the clean room 1 to the article storage 14 is provided at the rear of each article storage shelf S. Each article storage shelf S and the exhaust space 16 are partitioned by a plate-like body 17.

As shown in FIG. 1, an exhaust space door 26 that opens and closes an opening for entering and exiting the exhaust space 16 is provided at a portion corresponding to each exhaust space 16 in the peripheral wall 25. A portion corresponding to one outward projecting portion 15 t of the transport vehicle moving space 15 is provided with a moving space door 27 that opens and closes an opening for entering and exiting the transport vehicle moving space 15.
Although not shown, the exhaust space 16 is provided with a control device for controlling the operation of the article storage facility, a distribution board, and the like for the purified air from the outward projecting portion 15t of the transport vehicle moving space 15. It is provided in a state that does not hinder the flow.

The purified air flow means B guides the purified air blown from the ceiling blowing section 3 of the clean room 1 through the air circulation space 19 and supplies the purified air to the article storage section 14 and transports it through the article storage section 14. The purified air flowing in the vehicle moving space 15 is configured to flow in such a manner that the purified air flowing in the vehicle moving space 15 flows downward from the transport vehicle moving space 15 through the grating floor 2.
That is, the purified air ventilation means B includes the air circulation space 19, the grating floor 2, the connection flow path 7, the circulation fan 8, and the like to constitute the clean room circulation ventilation means F. The circulation fan 8 is configured to be used as a fan for the purified air ventilation means B.

As shown in FIG. 4, each article storage shelf S has a pair of front and rear shelf columns 21 arranged in the width direction of the shelf, and supports a plurality of article support frames 22 in the vertical direction of the shelf across the pair of front and rear shelf columns 21. In this state, a plurality of article storage units 14 are arranged in the shelf width direction and the shelf vertical direction, and the container C is placed and supported by a pair of left and right article support frames 22 adjacent in the shelf width direction. The container C is configured to be stored in a form. In addition, the upper ends of a pair of front and rear shelf columns 21 arranged in a plurality in the width direction of the shelf are integrally connected by a rectangular upper frame body 23.
Then, by configuring each article storage shelf S as described above, the article storage section 14 is configured so that the ones adjacent to each other in the horizontal direction of the shelf and the ones adjacent to each other in the vertical direction of the shelf communicate with each other so as to allow air flow. A plurality of items are arranged side by side in the width direction and the vertical direction of the shelf to improve the article storage efficiency.
Although illustration is omitted, a carry-in entrance for carrying the container C from the clean room 1 to the article storage shelf S is formed using one of the plurality of article storage units 14 provided in the article storage shelf S. The other one is used to form a carry-out port for carrying out the container C from the article storage shelf S to the clean room 1.

The floor area corresponding to the installation location of each article storage shelf S on the grating floor 2 and the opening ratio of the floor section corresponding to the air circulation space 19 are represented by the floor area corresponding to the transport vehicle moving space 15 on the grating floor 2. And the opening ratio of the floor portion corresponding to the exhaust space 16 is smaller.
Specifically, the opening ratio of the floor portion corresponding to the installation location of each article storage shelf S in the grating floor 2 and the floor portion corresponding to the air circulation space 19 is 18%, and the conveyance vehicle moving space 15 in the grating floor 2 is The opening ratio of the corresponding floor portion and the floor portion corresponding to the exhaust space 16 is set to 50%.
In addition, an opening portion that opens in the lateral width direction of the shelf between the front end edge portion and the peripheral wall 25 in each lateral side portion of the article storage shelf S is closed in a state in which air flow is possible. A porous plate-like body 29 is provided.

Next, the stacker crane V will be described.
As shown in FIGS. 5 and 6, the stacker crane V is provided for each of a pair of left and right traveling rails 32 (corresponding to tracks) installed on the floor surface (the upper surface of the grating floor 2) in a state of being aligned in the lateral direction of the vehicle. The traveling carriage 34 configured to have a pair of traveling wheels 31 in the vehicle traveling direction (the same direction as the width of the shelf) is lifted and lowered separately at both ends in the vehicle traveling direction of the article supporting lift 36. A pair of front and rear struts 35 are provided upright to freely support and support.
The upper ends of the pair of front and rear support columns 35 are connected by an upper frame 37. Further, a mounting body 57 for transferring articles that moves in and out in the lateral direction of the vehicle is provided on the lifting platform 36.
In addition, FIG. 5 has shown the side view of the stacker crane, and the left part on drawing is a longitudinal cross-sectional view.

  As shown in FIG. 5, the traveling carriage 34 is made up of a pair of front and rear end frame bodies 34a formed in a U-shape opening inward in the vehicle traveling direction, and a pair of front and rear end frame bodies 34a. A pair of left and right intermediate frame members 34b that connect the ends on the lateral width direction outer sides to each other, and a pair of front and rear connections that connect the end portions on the inner side in the vehicle running direction of the end frame members 34a. It is provided with a frame 34c and is formed in a letter shape in plan view. A support frame 34d is installed over the end frame 34a and the connecting frame 34c at the center of the traveling carriage 34 in the vehicle width direction.

The traveling wheels 31 and the traveling motors 38 that rotate and drive the traveling wheels 31 are provided at both ends in the lateral width direction of the shelf in each of the pair of front and rear end frames 34a. By driving the four traveling wheels 31 to be individually rotated by the motor 38, the traveling carriage 34 is configured to travel along the shelf width direction.
Further, the intermediate frame 34b is provided with a fan for sucking the purified air from the outer side in the lateral direction of the vehicle and discharging the purified air downward.

Each of the pair of front and rear columns 35 is provided with a central column body 41 for guiding and supporting a central portion in the vehicle lateral width direction of the lifting platform 36, and the central column body 41 is separated from the lifting platform 36 outward in the vehicle lateral width direction. A pair of left and right auxiliary strut bodies 42 that are located away from the vehicle traveling direction are connected by a connecting body 43.
As shown in FIG. 6, the pair of left and right auxiliary column bodies 42 are provided so as to be located on the vehicle body inner side with respect to the left and right traveling wheels 31 in the vehicle traveling direction view.

The central column body 41 is raised and lowered to guide and support the central portion of the lifting platform 36 in the lateral direction of the vehicle by being erected on a support frame 34d located in the central portion of the traveling vehicle 34 in the lateral direction of the vehicle. The base 36 is located at a position adjacent to the outer side in the vehicle traveling direction.
The pair of left and right auxiliary column bodies 42 are erected at both ends in the vehicle width direction of the portion extending in the vehicle width direction of the end frame 34a that is U-shaped in plan view, so that It is located away from the outer side in the lateral width direction and away from the central support column 41 toward the outer side in the vehicle traveling direction.
The connecting body 43 is composed of a plurality of rod-like members 43a that connect the central column body 41 and the pair of left and right auxiliary column bodies 42 at a plurality of locations in the vertical direction.

  Guide rails 45 for slidably guiding the engaging members 44 provided at the ends of the elevating platform 36 at the outer side in the vehicle traveling direction and at the center in the vehicle lateral direction in the pair of front and rear central column bodies 41, respectively. A linear guide is constituted by each set of the guide rail 45 and the engaging member 44.

As shown in FIGS. 5 and 6, each of the pair of front and rear support frames 34 d in the traveling carriage 34 includes a pair of left and right lifting motors 46, and a left and right rotationally driven by the lifting motors 46. A pair of drive rotators 47 are provided, and a pair of left and right driven rotators 48 are provided at each of the upper ends of the support columns 35.
Then, a lower raising / lowering belt 49 is wound around each of the drive rotating bodies 47, and an upper raising / lowering belt 49 is wound around each of the driven rotating bodies 48.
One end of each of the two lower elevating belts 49 and the two upper elevating belts 49 located on one side in the vehicle traveling direction is connected to one end of the elevating platform 36 in the vehicle traveling direction, and The other end is connected to a balance weight 50 located on one side in the vehicle traveling direction with respect to the pair of front and rear central support columns 41. Each of the two lower lifting belts 49 and the two upper lifting belts 49 located on the other side in the vehicle traveling direction is connected to the other end of the lifting platform 36 in the vehicle traveling direction. The other end is connected to the balance weight 50 located on the other side in the vehicle traveling direction from the pair of front and rear central support columns 41.
That is, the four lift motors 46 are rotated and driven separately by the four lift motors 46 so that the lift 36 is moved up and down along the vertical direction of the shelf.

As shown in FIG. 8, the inner cover 51 that covers the elevating path of the engaging member 44 and the guide rail 45 is arranged on the inner side in the vehicle traveling direction of each of the pair of front and rear central column bodies 41 in a state along the vehicle vertical direction. The outer side cover 52 that covers the lifting path of the balance weight 50 is supported on the outer side in the vehicle traveling direction of each of the pair of front and rear central support columns 41.
As shown in FIG. 6, a fan filter unit 53 that introduces purified air in the clean room 1 into the outer cover 52 is provided in the outer cover 52.

As shown in FIG. 9, a fork-type article transfer device 55 capable of transferring a container C between the article storage section 14 and itself is supported on the lifting platform 36.
The article transfer device 55 includes a swivel base 56 that can swivel around a vertical axis P1 and a link mechanism 58 that supports a mounting body 57 provided on the swivel base 56 so as to be movable in and out. ing. Then, the article transfer device 55 can turn the placement body 57 by turning the turntable 56 and retract the placement body 57 on the lift table 36 by expansion and contraction of the link mechanism 58 (FIG. 7). (See FIG. 9) and the mounting body 57 projecting toward the article storage unit 14 side.

As shown in FIGS. 5 and 7, the stacker crane V has a flat rectifier 59 in a posture along the vehicle traveling direction and the vehicle up-down direction, separated from the lifting platform 36 outward in the vehicle traveling direction and It is provided in a state of being located away from the elevator table 36 toward the article storage shelf S in the vehicle width direction, and in a state of being positioned corresponding to the elevator table 36 in the entire range of the elevator movement of the elevator table 36. is there.
In other words, the rectifying body 59 is positioned farther outward in the vehicle travel direction than the pair of front and rear central support bodies 41 and extends over the entire length or substantially the entire length of the central support body 41. A pair of front and rear is provided in a state along the vehicle vertical direction.
Further, a pair of right and left rectifiers 59 are provided at positions farther outward in the lateral direction of the vehicle than the lift 36.

A rectifying member 59a supported by the auxiliary strut body 42 in a state of projecting from the auxiliary strut body 42 to both sides in the vehicle traveling direction is provided, and the rectifying body 59 is supported by the auxiliary strut body 42 and the auxiliary strut body 42. And the rectifying member 59a.
In other words, as shown in FIG. 8, each of the auxiliary support bodies 42 is formed in a flat shape with a posture along the vehicle traveling direction and the vehicle vertical direction, and in a plan view, the flat rectangular shape with a posture along the vehicle traveling direction is formed. It is formed into a shape.
Further, as the rectifying member 59a supported by each of the auxiliary column bodies 42, an inward rectifying member 59a supported by the auxiliary column body 42 in a state of protruding inward in the vehicle traveling direction, and the vehicle traveling direction A rectifying member 59a on the outer side supported by the auxiliary column body 42 in a state of protruding outward is supported.
The inward rectifying member 59a is formed in a tapered shape that gradually decreases toward the inner side end in the vehicle traveling direction in plan view, and the outer rectifying member 59a in the vehicle traveling direction in plan view. It is formed in a semicircular shape that bulges toward the outer side end, and is formed so that both ends of the rectifier 59 in the vehicle traveling direction have a tapered shape in plan view.
Further, the inner rectifying member 59a is configured to have such a length that an end on the inner side in the vehicle traveling direction is aligned with the central column body 41 in the vehicle lateral width direction, and the outer rectifying member 59a is formed. The outer end in the vehicle traveling direction is configured to have a length that is slightly located on the inner side in the vehicle traveling direction from the rear end of the traveling carriage 34.
Incidentally, the side surfaces on both sides of the auxiliary support body 42 in the vehicle lateral width direction and the side surfaces on both sides in the vehicle lateral width direction of the inner and outer rectifying members 59a are configured to be flush with each other. Further, the rectifying body 59 is configured to be slightly shorter in the vehicle vertical direction than the central column body 41 and to be the same length as the auxiliary column body 42 in the vehicle vertical direction.

[Another embodiment]
( 1 ) In the above-described embodiment, the rectifying body 59 is provided in a state of being positioned farther outward in the vehicle traveling direction than each of the pair of front and rear central column bodies 41. 41 may be provided so as to be lined up in the vehicle lateral width direction, and the rectifying body 59 may be provided at a position adjacent to the outer side in the vehicle traveling direction from the central column body 41. As long as it is located away from the vehicle in the vehicle traveling direction.

( 2 ) In the above embodiment, the pair of front and rear columns 35 are connected to the central column body 41, the pair of left and right auxiliary column bodies 42, the center column body 41, and the pair of left and right auxiliary column bodies 42, respectively. However, each of the pair of front and rear columns 35 may be configured by the central column body 41.
Further, in the above-described embodiment, the pair of left and right auxiliary column bodies 42 are provided so as to be separated from the lifting platform 36 outward in the vehicle lateral direction and away from the central column body 41 outward in the vehicle traveling direction. However, the pair of left and right auxiliary column bodies 42 may not be provided so as to be located away from the central column body 41 in the vehicle traveling direction. For example, the pair of left and right auxiliary column bodies 42 may be provided in the central column body 41. And may be provided in a position adjacent to the outer side in the vehicle traveling direction from the central column body 41.

( 3 ) In the above embodiment, the rectifying body 59 is composed of the auxiliary strut body 42 and the rectifying member 59a supported by the auxiliary strut body 42. However, without providing the rectifying member 59a, the rectifying body 59 is replaced with the auxiliary strut body. 42, and when the rectifying body 59 is provided at a location away from the auxiliary strut body 42 or when the auxiliary strut body 42 is not provided, the rectifying body 59 is replaced with the rectifying member 59a. You may comprise.
Incidentally, when the rectifying body 59 is composed of the auxiliary support body 42 and the rectifying member 59a supported by the auxiliary strut body 42, the rectifying member 59a is made of a resin material so that the rectifying body 59 can be reduced in weight. Also good.

( 4 ) In the above embodiment, the article storage shelves S are provided on both sides in the vehicle lateral width direction of the transport vehicle moving space 15, but the article storage shelves S are provided only on one side of the transport vehicle moving space 15 in the vehicle lateral width direction. You may comprise so that it may provide.
In this way, when the article storage shelf S is provided only on one side in the vehicle lateral width direction of the transport vehicle moving space 15, the article storage shelf S is provided on the outer side in the vehicle lateral width direction of the rectifier 59 with respect to the lifting platform 36. You may comprise so that it may provide only in one side.
Incidentally, even when the article storage shelf S is provided only on one side in the vehicle lateral width direction of the transport vehicle moving space 15, the rectifying body 59 may be provided on both sides on the vehicle lateral width direction outer side than the lifting platform 36.

( 5 ) In the above embodiment, the article storage W is provided in the clean room 1 in a downflow manner. However, the article storage W is installed in a simple clean space with a cross tension that is not a downflow type. It may also be installed in an unclean space.

Plan view showing goods storage equipment for clean rooms Fig. 1 is a view taken along the arrow II. Figure 1 The perspective view which shows the principal part of the article storage equipment for clean rooms Side view showing a stacker crane Front view showing a stacker crane Plan view showing the traveling cart Cross-sectional plan view showing struts Top view showing a stacker crane

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Clean room 14 Goods storage part 15 Carriage moving space 35 Support | pillar 36 Lifting stand 41 Central support | pillar body 42 Auxiliary support | pillar member 43a Bar-shaped member 59 Rectifier 59a Rectification member B Purified air flow means S Article storage shelf V Article transport vehicle W Article Storehouse

Claims (4)

An article storage shelf provided with article storage sections arranged side by side in the width direction of the shelf and the vertical direction of the shelf;
An article transport vehicle provided with a lifting platform for supporting an article that moves in the width direction of the shelf and moves up and down the transport vehicle moving space in front of the article storage shelf; and
An article storage provided with purified air flow means for allowing purified air to flow from the rear side of the article storage shelf to the transport vehicle moving space through the article storage section,
The article transport vehicle is provided with a pair of front and rear central support bodies that guide and support the central part in the vehicle width direction at each of both ends in the vehicle traveling direction of the lifting platform so as to be movable up and down separately,
A flat rectifier body in a posture along the vehicle traveling direction and the vehicle vertical direction is separated from each of the lifting platform and the pair of front and rear central column bodies outwardly in the vehicle traveling direction, and from the lifting platform in the vehicle lateral direction. A pair of article storage units provided in a front-rear direction in a state of being separated from the article storage shelf and in a state along the vehicle vertical direction over the entire length or substantially the entire length of the central support body . Each of the pair of front and rear columns supporting and supporting the lifting platform is located apart from the central column body and from the lifting platform to the outer side in the lateral direction of the vehicle and from the central column body to the outer side in the vehicle running direction. A pair of left and right auxiliary struts, and a plurality of rod-like members that connect the central strut body and the pair of left and right auxiliary struts at a plurality of locations in the vertical direction,
A rectifying member supported by the auxiliary strut body in a state of protruding from the auxiliary strut body to one side or both sides in the vehicle traveling direction is provided,
The article storage according to claim 1 , wherein the rectifying body includes the auxiliary column body and the rectifying member supported by the auxiliary strut body . The article storage shelves are provided on both sides in the vehicle lateral direction of the transport vehicle moving space;
The article storage according to claim 1 or 2, wherein a pair of left and right rectifiers are provided at positions farther outward in the lateral direction of the vehicle than the lifting platform . The article storage facility according to any one of claims 1 to 3 is an article storage facility for a clean room provided in a downflow clean room,
An article storage facility for a clean room, wherein the purified air flow means is configured to cause the purified air to flow downward through the floor portion of the transport vehicle moving space.

Images