JP4378652B2 - Purified air ventilation-type goods storage facility - Google Patents

Description

  The present invention relates to a plurality of article storage units arranged in the width direction of a shelf in a clean space in which purified air is ventilated from the ceiling to the floor side, and an article transport device that moves in a traveling space on the front side of these article storage units And an article storage shelf including an article carry-in / out section disposed at a position corresponding to a lower part of at least a part of the plurality of article storage sections, and an air purification filter is passed through the rear of the plurality of article storage sections. Purified air ventilation means for passing purified air is provided so as to pass purified air through the article storage portion and into the traveling space, and at the location corresponding to the traveling space in the floor portion, the traveling space. The present invention relates to a purified air ventilation type article storage facility provided with a discharge opening for discharging the purified air inside.

The purified air ventilation type article storage facility as described above is configured such that, in a clean space such as a clean room, the purified air ventilation means ventilates the purified air through the air purification filter with respect to the articles stored in the article storage unit. The article is stored while preventing dust from adhering to the article.
The floor portion is not limited to the location corresponding to the traveling space, and other locations are provided with openings for discharging the purified air in the clean space downward from the ceiling portion of the clean space to the floor portion. The purified air that is ventilated to the side is discharged downward from an opening provided at a location other than the discharge opening and the floor opening. The exhausted purified air is guided to the upper part of the clean space by the ventilation fan and the circulation path, is purified by the air filter, and is ventilated from the ceiling portion of the clean space to the floor portion side. Thus, the purified air is passed from the ceiling portion of the clean space to the floor side while circulating the purified air.

  In the conventional purified air ventilation type article storage facility, a plurality of article storage units arranged in the width direction of the shelf and in the vertical direction of the shelf are arranged at the non-article loading / unloading location on the opposite side of the article loading / unloading portion in the traveling space. It is installed. And the air ventilation path is formed in a state surrounding the back part of the article storage part and the back part of the article storage part arranged at the non-article carry-in / out place so as to shield it from the outside. Purified air in the clean space is taken in a portion corresponding to the upper portion of the traveling space (see, for example, Patent Document 1).

In this conventional purified air ventilation type article storage facility, the purified air ventilation means is configured to vent the purified air in a portion corresponding to the back portion of the article storage portion in the air ventilation path, and the non-article carrying in / out location Purified air ventilation on the non-article carry-in / out side where the purified air in the portion corresponding to the back portion of the non-goods carry-in / out place in the air ventilation passage is passed through the air purification filter at the rear of the article storage unit disposed in Means are provided.
Then, the purified air ventilated by the purified air ventilation means and the purified air ventilation means on the non-article carry-in / out side passes through the article storage section and reaches the traveling space, and flows from the upper side toward the lower side. And discharged downward from the discharge opening. The exhausted purified air, together with the purified air discharged downward from other locations, is guided to the upper part of the clean space by a ventilation fan and a circulation path and purified by an air filter, and then purified air is used as the purified air. Is ventilated from the ceiling to the floor.

JP 2003-81406 A

  In the above conventional purified air ventilation type article storage facility, the entire amount of the purified air flowing from the upper side to the lower side in the traveling space is discharged downward from the discharge opening, so that it is discharged downward from the discharge opening. The amount of purified air to be discharged is large, and the proportion of the purified air discharged from the discharge opening in the purified air discharged below the clean space increases. Accordingly, the purified air cannot be smoothly discharged downward at other locations, and dust may float in the clean space, which may reduce the cleanliness of the clean space.

  The present invention has been made paying attention to such a point, and an object of the present invention is to provide purified air ventilation that accurately discharges purified air below the clean space and maintains the cleanliness of the clean space high. It is to provide an article storage facility.

In order to achieve this object, the first characteristic configuration of the purified air ventilation type article storage facility according to the present invention is arranged in the width direction of the shelf in the clean space in which the purified air is ventilated from the ceiling to the floor. A plurality of article storage units, an article transport device that moves in a traveling space on the front side of the article storage units, and an article carry-in / out unit that is disposed at a position below at least a part of the plurality of article storage units Purified air ventilation means for ventilating purified air through an air purification filter at the rear of the plurality of article storage units, and passing purified goods into the traveling space through the article storage unit. In a purified air ventilation type article storage facility provided to ventilate and provided with a discharge opening for discharging the purified air in the traveling space downward at a location corresponding to the traveling space in the floor portion
It is formed in a state of surrounding the non-article carry-in / out location on the opposite side of the article carrying-in / out portion in the traveling space, the upper portion of the traveling space, and the back portion of the article storage portion so as to be shielded from the outside. The air circulation path includes a traveling space air intake opening for taking in purified air in the traveling space at a portion corresponding to the non-article carrying in / out position, and the purified air in the clean space. The air circulation passage is purified from the lower side to the upper side at the back portion of the non-article loading / unloading portion. A first passage portion for guiding air, a second passage portion for guiding purified air guided in the first passage portion in order of an upper portion of the traveling space and an upper portion of the article storage portion, and a second passage portion thereof At It consists from above purified air with him in the back portion of the article storage portion and the third passage portion for guiding the lower side, the purified air ventilation means, corresponding to the back portion of the article storage unit in the air circulation path It is in the point comprised so that the purified air in the part to perform may be ventilated.

That is, since the air circulation path surrounds the non-article carry-in / out place, the upper part of the traveling space, and the back part of the article storage unit so as to shield the outside, the space including the article storage shelf in the air circulation path Can be shielded from the outside. In the space including the article storage shelf, the purified air ventilated by the purified air ventilation means passes through the article storage unit to reach the traveling space and flows from the upper side toward the lower side. Since the opening for air intake in the traveling space in the air circulation path is provided with a portion corresponding to the non-article carrying in / out position, a part of the purified air in the traveling space is the air intake opening in the traveling space. Is taken into the air circulation path from the part, and the remaining part is discharged downward from the discharge opening. The purified air taken into the air circulation path flows along with the purified air in the clean space taken into the air circulation path from the air intake opening in the clean space to the back portion of the article storage section through the air circulation path. . The purified air that has flowed to the portion corresponding to the back portion of the article storage section in the air circulation path passes through the article storage section through the air purification filter by the purified air ventilation means and is ventilated into the traveling space.
In this way, the purified air can be ventilated through each of the plurality of article storage portions while circulating at least a part of the purified air in the traveling space in the air circulation path. The amount of purified air discharged can be reduced. Accordingly, the purified air can be smoothly discharged downward at other locations, and the purified air can be accurately discharged downward of the clean space.

  The air circulation path surrounds the non-article carry-in / out location, the upper portion of the traveling space, and the back portion of the article storage portion so as to shield from the outside, and the air intake opening in the traveling space has a non-article. Since the portion corresponding to the carry-in / out location is provided, the location corresponding to the lower part of the article storage portion is not used as a space for installing the air circulation path. Therefore, the air circulation path can be installed without worrying about the installation space with the article carry-in / out section, and while effectively utilizing the upper part of the traveling space with few obstacles. Can be easily installed.

  From the above, the purified air ventilation type can be used to accurately discharge the purified air below the clean space and maintain the cleanliness of the clean space high, while facilitating the installation of the air circulation path. We have been able to provide goods storage equipment.

  According to a second characteristic configuration of the purified air ventilation type article storage facility according to the present invention, a plurality of article storage units arranged in a lateral width direction of the shelf are arranged at the non-article carry-in / out location, A portion corresponding to the non-article carry-in / out location is formed in a state of surrounding a back portion of the article storage unit disposed at the non-goods carry-in / out location, and the air intake opening in the travel space is formed of the non-goods A purifier air filter formed below the article storage portion disposed at the carry-in / out location and formed corresponding to the air intake space, and at the rear of the article storage portion disposed at the non-article carry-in / out location. Purified air ventilation means on the non-article carry-in / out side through which the purified air is ventilated through the portion of the air circulation path corresponding to the back portion of the non-article carry-in / out portion passes through the article storage portion and travels. Provided to ventilate the space It lies in the fact that is.

That is, the purified air ventilated by the purified air ventilation means and the purified air ventilation means on the non-article carry-in / out side passes through the article storage section and reaches the traveling space, and flows from the upper side toward the lower side. . A part of the purified air in the travel space is taken into the air circulation path from the air intake opening in the travel space formed in the air intake space, and the remaining part is downward from the discharge opening. Discharged. The purified air taken into the air circulation path passes through the back part of the article storage unit arranged at the non-article loading / unloading point in the air circulation path and flows to the back part of the article storage part through the upper part of the traveling space. Is done. The purified air that passes through the back portion of the article storage unit disposed in the non-article carrying-in / out location in the air circulation path is partially non-article carrying-in / out location by the purified air ventilation means on the non-article carrying-in / out side. Is passed through the article storage section disposed in the interior of the traveling space.
Accordingly, not only the article storage unit disposed at the upper part of the article carry-in / out location, but also the article storage unit provided at the non-article carry-in / out location, the purified air is supplied to all of the plurality of article storage units. Thus, at least a part of the purified air in the traveling space can be circulated in the air circulation path.

  According to a third characteristic configuration of the purified air ventilation-type article storage facility according to the present invention, a pair of the article storage shelves are provided side by side with the non-article carry-in / out places adjacent to each other, and the pair of the articles The pair of air circulation paths in the storage shelf is formed in a state in which a portion corresponding to the non-article carry-in / out location is shared.

That is, since a pair of article storage shelves are provided side by side with their non-article carry-in / out places adjacent to each other, a pair of article storage shelves is installed while minimizing the installation space of the pair of article storage shelves can do. The pair of air circulation paths in the pair of article storage shelves are not formed separately in the parts corresponding to the non-article carry-in / out places, but are formed in a state of sharing the parts corresponding to the non-article carry-in / out places. Therefore, the space for installing the pair of air circulation paths can be reduced and the configuration can be simplified.
Therefore, it is possible to install a pair of article storage shelves that can circulate at least a part of the purified air in the traveling space in the air circulation path while effectively utilizing the limited space.

An embodiment of a purified air ventilation type article storage facility according to the present invention will be described with reference to the drawings.
[First Embodiment]
As shown in FIGS. 1 to 3, this purified air ventilation type article storage facility has a shelf width direction and a shelf vertical width in a clean room 1 as a clean space in which purified air is ventilated from the ceiling to the floor. A plurality of article storage units 2 arranged in the direction, an article transport device 4 that moves in a traveling space 3 on the front side of the article storage units 2, and an article carry-out disposed at a position corresponding to the lower side of the plurality of article storage units 2 A pair of article storage shelves 6 provided with the entrance 5 is provided.
The pair of article storage shelves 6 are provided side by side in a state where the non-article carrying in / out place 7 on the opposite side of the article carrying in / out section 5 in the traveling space 3 is adjacent. That is, the pair of article storage shelves 6 are arranged in a state in which the non-article carrying in / out place 7 is shared. And the non-article carrying in / out place 7 is in a state of facing the article storage unit 2 disposed at a place corresponding to the upper part of the article carrying in / out part 5 of one of the pair of article storage shelves 6 (lower side in FIG. 1). Thus, a plurality of article storage units 2 arranged in the shelf width direction and the shelf vertical width direction are arranged.

  The clean room 1 is composed of a porous grating floor 8 in which a large number of ventilation holes are formed in the floor, and the purified air is ventilated from the ceiling outlet 9 formed in the ceiling toward the floor. It is configured to let you. In the clean room 1, a space surrounded by the booth 10 at the upper part and the side is formed, and a pair of article storage shelves 6 are disposed in the space surrounded by the booth 10.

  Each of the plurality of article storage units 2 is supported by a pair of front and rear columns 11 erected at intervals in the lateral width direction of the shelf and a pair of front and rear columns 11 and spaced from each other in the vertical direction of the shelf. It is comprised from the mounting support part 12 made. The article storage unit 2 is configured to store the article in a state where the article is placed and supported by the pair of left and right placement support parts 12. Moreover, as for each article | item storage part 2, what adjoins in the shelf width direction and what adjoins in the shelf up-down direction are connected so that air flow is possible.

  As shown in FIG. 4, the article storage unit 2 is configured to freely store an article holder 14 that can hold a plate-like article 13 such as a glass substrate. The article holding body 14 includes an upper frame body 14a and a lower frame body 14b formed in a lattice shape, a plurality of connection bodies 14c that connect the upper frame body 14a and the lower frame body 14b, and a connection body 14c. It is comprised from the wire-shaped support part 14d which connects the connection bodies 14c which are installed in the up-down direction at intervals and which oppose a horizontal direction. The plate-like article 13 is held side by side in the vertical direction while being placed and supported by each support part 14d, and air flows in all of the upper part, the lower part, and the side part of the article holder 14. It is configured to be possible.

The clean room 1 is provided with clean room ventilation means 15 for circulating the purified air from the ceiling to the floor in a form in which the purified air is circulated. The clean room ventilation means 15 is configured to purify the air that has passed through the grating floor 8 into purified air, and to blow out the purified air from the ceiling blowing section 9.
The clean room ventilation means 15 includes an intake chamber 16 provided on the lower side of the grating floor 8, an air chamber chamber 17 provided on the upper side of the ceiling outlet 9, a HEPA filter provided in parallel with the ceiling outlet 9, and the like. An air filter 18, a connection flow path 19 that connects the intake chamber 16 and the air chamber 17 to each other, a circulation fan 20 that is provided in the connection flow path 19 and sucks the intake chamber 16, and a connection flow path 19. The pre-filter 21 provided on the air discharge side of the circulation fan 20 is provided.

The air in the clean room 1 is sucked into the intake chamber 16 through the grating floor 8 by the ventilation action of the circulation fan 20, flows through the connection flow path 19, is cleaned by the prefilter 21, and reaches the air chamber chamber 17. . Then, the air that has reached the air chamber 17 is purified by the air filter 18 to be purified air, and blown downward into the clean room 1 from the ceiling blowing portion 9.
In this way, the air in the clean room 1 is circulated while being cleaned by the pre-filter 21 and the air filter 18 by the clean room ventilation means 15, and the purified air is directed from the ceiling outlet 9 toward the grating floor 8 side. Ventilated at all times.

An outside air intake passage 22 is connected to the suction side of the circulation fan 20 in the connection passage 19, and an outside air intake amount adjustment damper 23 is provided in the outside air intake passage 22. Further, an exhaust passage 24 is connected to the discharge side of the circulation fan 20 in the connection passage 19, and an exhaust amount adjusting damper 25 is provided in the exhaust passage 24.
A predetermined amount of the air in the clean room 1 circulated by the clean room ventilation means 15 is fresh by adjusting the respective opening degrees of the outside air intake amount adjusting damper 23 and the exhaust amount adjusting damper 25. It is configured to be exchanged with air.

A rear part of the plurality of article storage units 2 disposed above the article carry-in / out unit 5 has a first fan filter unit (hereinafter referred to as a first FFU) as purified air ventilation means for passing purified air through an air purification filter. (Abbreviated) 26 is provided. The first FFU 26 is provided corresponding to each of the plurality of article storage units 2. And although illustration is abbreviate | omitted, 1st FFU26 passes the articles | goods storage part 2 in the form which passes between the plate-shaped articles | goods 13 hold | maintained at the article | item holding body 14 accommodated in the article | item storage part 2, and is a running space. 3 is provided to allow purified air to flow.
In addition, a second fan filter unit (hereinafter referred to as purified air ventilation means on the non-article loading / unloading side) for passing purified air through a filter for purified air is provided at the rear of the article storage unit 2 disposed at the non-item carrying-in / out location 7. , Abbreviated as second FFU) 27. The second FFU 27 is provided corresponding to each of the plurality of article storage units 2. Then, the second FFU 27 also travels through the article storage unit 2 in the form of passing between the plate-like articles 13 held by the article holder 14 stored in the article storage unit 2, similarly to the first FFU 26. It is provided in the space 3 so as to ventilate the purified air.

A discharge opening 28 for discharging the purified air in the traveling space 3 downward is provided at a location corresponding to the traveling space 3 and the non-article loading / unloading location 7 in the floor portion in the booth 10. The discharge opening 28 is configured to have a smaller opening area than the grating floor 8 by providing a plate on the grating floor 8.
And the location corresponding to the goods carrying in / out part 5 in the floor part in the booth 10 has obstruct | occluded the opening of the grating floor 8 with a plate-shaped object, and the purified air of the movement space 3 in the booth 10 is an opening for discharge | emission. The unit 28 is configured to be discharged to the intake chamber 16 below the portion 28.
Moreover, for example, the travel space 3 is purified by reducing the opening area of the discharge opening 28 or by closing the opening of the floor corresponding to the non-article carrying in / out place 7 with a plate-like body. It is also possible to reduce the amount of air discharged into the intake chamber 16.

  In the booth 10, since the purified air is ventilated by the first FFU 26 and the second FFU 27, the pressure of the purified air increases. On the other hand, since the purified air is exhausted through the discharge opening provided in the floor, the pressure of the purified air is lowered. Then, due to the pressure difference of the purified air, the purified air in the booth 10 flows down from the rear side to the front side of the article storage unit 2 and flows down the traveling space 3 from the upper side to the lower side. Dust floating in the article storage unit 2 and the traveling space 3 is discharged below the floor to increase the cleanliness in the booth 10.

In each of the pair of article storage shelves 6, an air circulation path 40 is provided so as to surround the non-article carrying in / out place 7, the upper part of the traveling space 3, and the back part of the article storage unit 2 so as to be shielded from the outside. Is formed. The air circulation path 40 includes a linear first passage portion 40a that guides purified air from the lower side to the upper side at the back portion of the article storage portion 2 disposed at the non-article carry-in / out location 7, and the first passage portion 40a. The second linear passage portion that guides the purified air guided in step 1 in the order of the upper part of the article storage unit 2, the upper part of the traveling space 3, and the upper part of the article storage part 2. 40b, and a linear third passage portion 40c that guides the purified air guided by the second passage portion 40b from the upper side to the lower side at the back portion of the article storage portion 2.
Each of the first passage portion 40a, the second passage portion 40b, and the third passage portion 40c is provided in a series over the entire length of the plurality of article storage portions 2 arranged in the shelf width direction.

  A pair of air circulation paths 40 in the pair of article storage shelves 6 are formed in a state in which the first passage portion 40 a corresponding to the non-article carrying in / out place 7 is shared. And the 1st channel | path part 40a is formed in the state surrounding the back part location of the articles | goods storage part 2 arrange | positioned in the non-article carrying in / out location 7. FIG.

In each of the pair of air circulation paths 40, a running space air intake opening 41 for taking in purified air in the running space 3, and a clean space air intake outside the booth 10 for taking in purified air in the clean room 1. An entry opening 42 is provided.
And each of the opening part 41 for air intake in driving | running | working space in a pair of air circulation path 40 is provided in the part adjacent to the floor part corresponding to a non-article carrying in / out place. Moreover, the air intake opening 41 in the air circulation path 40 corresponding to one of the pair of article storage shelves 6 (the lower side in FIG. 1) is an article storage section disposed at the non-article loading / unloading location 7. 2 is formed corresponding to the air intake space 43 formed below 2. In other words, the portion of the air intake space 43 that faces the travel space 3 is configured as the air intake opening 41 in the travel space.
The air intake opening 42 in the clean space in the pair of air circulation paths 40 is the rear part of the article storage part 2 among the back parts of the article storage part 2 disposed at a position corresponding to the upper part of the article carry-in / out part 5. It is provided in the location adjacent to 1st FFU26 arrange | positioned.

The first FFU 26 is configured to vent purified air in the third portion 40 c corresponding to the back portion of the article storage unit 2 in the air circulation path 40. And the 1st FFU26 is in the clean room 1 outside the booth 10 taken in the purified air in the running space 3 taken in the opening 41 for taking in air in the running space and the opening 42 for taking in air in the clean space. It is comprised so that purified air may be ventilated through the air purification filter.
Further, the second FFU 27 is configured to vent the purified air in the first passage portion 40 a corresponding to the non-article carrying in / out place 7 in the air circulation path 40. And 2nd FFU27 is comprised so that the purified air in the driving | running | working space 3 taken in in the opening 41 for air intake in driving | running | working space may be ventilated through the filter for air purification | cleaning.

In the booth 10, the purified air ventilated by the first FFU 26 and the second FFU 27 passes through the article storage unit 2, reaches the traveling space 3, and flows through the traveling space 3 from the upper side toward the lower side. A part of the purified air in the travel space 3 is taken into the air circulation path 40 from the air intake opening 41 in the travel space, and the remaining part is discharged downward from the discharge opening 28. The purified air taken into the air circulation path 40 is connected to the back of the article storage section 2 through the air circulation path 40 together with the purified air in the clean room 1 taken into the air circulation path 40 from the air intake opening 42 in the clean space. Fluidized to the place. Then, the first FFU 26 passes the purified air that has flowed to the back portion of the article storage unit 2 through the air purification filter to the article storage unit 2. Further, the second FFU 27 vents the purified air flowing through the back portion of the article storage unit 2 disposed at the non-article carry-in / out location 7 in the air circulation path 40 to the article storage unit 2 through the air purification filter.
Thus, the purified air can be passed through each of the plurality of article storage units 2 while circulating at least a part of the purified air in the traveling space 3 in the air circulation path 40.

Each of the article conveying devices 4 in the pair of article storage shelves 6 includes a traveling carriage 34 that travels while being guided by a guide rail 32 provided on the floor and a ceiling-side guide rail 33 provided on the upper part, and the traveling carriage 34. A lifting table 36 that can be moved up and down along a lifting mast 35 that is erected on the product, and an article transfer device 37 that is mounted on the lifting table 36 and that loads and removes the article holder 14 with respect to the article storage unit 2 and the article loading / unloading unit 5. It is composed of a stacker crane equipped with.
Then, the article transporting device 4 transports the article holder 14 carried into the article carry-in / out section 5 to any of the plurality of article storage sections 2 or the article holder 14 stored in the article storage section 2 as an article. It is configured to be conveyed to the carry-in / out unit 5.

As shown in FIG. 2, the article carry-in / out section 5 is disposed at each of the locations corresponding to the lower side of all of the plurality of article storage sections 2 arranged in the shelf width direction. In each article carry-in / out section 5, the plate-like articles 13 are taken out one by one from the article holder 14 and supplied to an article processing section (not shown), or are supplied one by one from the article processing section. Is held by the article holder 14.
Each of the article loading / unloading sections 5 includes a pair of left and right lifting support bodies 30 for placing and supporting the article holding body 14 so as to be movable up and down, and a plate-like article 13 on which the plate-like article 13 can be placed and supported. And a transport body 31 having a plurality of drive rollers that can transport the transport roller. The conveyance body 31 is disposed between a pair of left and right lifting support bodies 30 and is provided so as to be detachable in the vertical direction with respect to the article holding body 14.
The communication path 38 that connects the article carry-in / out section 5 and the article processing section is provided with a transport conveyor 39 that conveys the plate-like article 13 between the article processing section and the article carry-in / out section 5. 38 is provided in the booth 10. The communication path 38 is provided with a third fan filter unit (hereinafter abbreviated as a third FFU) 32 for passing the purified air through the air purification filter to the transport conveyor 39.

When taking out the plate-like articles 13 one by one from the article holder 14 at the article carry-in / out section 5 and supplying them to the conveyor conveyer 39, the article holder 14 is lowered by the pair of left and right lifting / lowering supports 30, thereby conveying the article. The body 31 enters the article holder 14, and one plate-like article 13 is placed and supported on the transport body 31 from the article holder 14. Thereafter, the plate-like article 13 is placed and supported by the conveyance body 31 and conveyed to the conveyance conveyor 39. By repeating such an operation, the plate-like articles 13 are taken out one by one from the article holder 14 and supplied to the transport conveyor 39.
When the plate-like article 13 supplied by the conveyance conveyor 39 is held by the article holding body 14 one by one in the article carry-in / out section 5, the article holding body 14 is transferred to the conveyance body 31 by a pair of left and right lifting support bodies 30. Place and support in the state of entering. Thereafter, the conveyance body 31 conveys one plate-like article 13 to a position where it can be held by the article holding body 14, and the article holding body 14 is raised by the pair of left and right lifting support bodies 30, thereby obtaining one plate. The article 13 is held on the article holder 14. By repeating such an operation, the plate-like articles 13 supplied from the transfer conveyor 39 are sequentially held one by one on the article holder 14 in the vertical direction.

[Second Embodiment]
In the first embodiment, an example in which a pair of article storage shelves 6 is provided has been described. However, in the second embodiment, as shown in FIG. 5, one article storage shelf 6 is provided.
In the article storage shelf 6, the article storage unit 2 is not disposed at the non-article carrying in / out place 7. The air intake opening 41 in the travel space in the air circulation path 40 is provided adjacent to the floor at the non-article carry-in / out location 7.
Since other configurations are the same as those in the first embodiment, description thereof will be omitted.

[Another embodiment]
(1) In the first embodiment, the example in which the article storage unit 2 is disposed at the non-article carrying in / out place 7 has been described. It is also possible. Even in this case, as shown in the first embodiment, the pair of air circulation paths 40 in the pair of article storage shelves 6 are formed in a state in which the first passage portion 40a corresponding to the non-article carrying in / out place 7 is shared. .

(2) In the second embodiment, the example in which the article storage unit 2 is not disposed at the non-article carry-in / out location 7 has been shown. It is also possible to do. In this case, the first passage portion 40 a corresponding to the non-article carry-in / out location 7 in the air circulation path 40 is formed so as to surround the back portion of the article storage unit 2 disposed at the non-article carry-in / out location 7.

(3) In the first embodiment, the second FFU 27 is installed in the rear part of the article storage unit 2 corresponding to each of the article storage units 2. It can be changed as appropriate.

(4) In the first and second embodiments, an example in which a pair and one article storage shelf 6 are provided has been described. However, the number of article storage shelves 6 can be changed as appropriate.

(5) In the first and second embodiments, the article carry-in / out section 5 is disposed at each of the locations corresponding to the lower side of all of the plurality of article storage sections 2 arranged in the shelf width direction. It is also possible to arrange and carry out the article carry-in / out section 5 at a position corresponding to the lower part of a part of the plurality of article storage sections 2 arranged in the direction.

Longitudinal sectional view of the clean room in the first embodiment AA sectional view in FIG. BB sectional view in FIG. Perspective view showing article holder Longitudinal sectional view of a clean room in the second embodiment

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Clean space 2 Goods storage part 3 Traveling space 4 Goods conveying apparatus 5 Goods carrying in / out part 6 Goods storage shelf 7 Non-goods carrying in / out place 26 Purified air ventilation means 27 Purified air ventilation means 28 on the non-goods loading / unloading side 28 Ejection opening 40 Air circulation path 41 Opening part for air intake in traveling space 42 Opening part for air intake in clean space

Claims (3)

In a clean space in which purified air is ventilated from the ceiling to the floor, a plurality of article storage units arranged in the width direction of the shelf, an article transfer device that moves in a traveling space in front of the article storage units, and the plurality of An article storage shelf provided with an article carry-in / out section disposed at a position corresponding to the lower part of at least a part of the article storage section;
Purified air ventilation means for passing purified air through the air purifying filter at the rear of the plurality of article storage units is provided to pass purified air through the article storage unit and into the traveling space.
Purified air ventilation type article storage facility provided with a discharge opening for discharging the purified air in the traveling space downward at a location corresponding to the traveling space in the floor portion,
It is formed in a state of surrounding the non-article carry-in / out location on the opposite side of the article carrying-in / out portion in the traveling space, the upper portion of the traveling space, and the back portion of the article storage portion so as to be shielded from the outside. The air circulation path includes a traveling space air intake opening for taking in purified air in the traveling space at a portion corresponding to the non-article carrying in / out position, and the purified air in the clean space. Is provided in a state provided with at least a part in the longitudinal direction of the air intake opening in the clean space.
The air circulation path includes a first passage portion that guides purified air from a lower side to an upper side at a back portion of the non-article carry-in / out portion, and the purified air guided by the first passage portion at an upper portion of the traveling space. A second passage portion that leads in order of the location, the upper portion of the article storage portion, and a third passage portion that guides the purified air guided in the second passage portion from the upper side to the lower side in the back portion of the article storage portion And consists of
A purified air ventilation type article storage facility configured such that the purified air ventilation means ventilates purified air in a portion corresponding to a back portion of the article storage section in the air circulation path. A plurality of article storage units arranged in the width direction of the shelf are disposed at the non-article carry-in / out location,
A portion corresponding to the non-article carry-in / out location of the air circulation path is formed in a state of surrounding a back portion of the article storage unit disposed at the non-article carry-in / out location,
The travel space air intake opening is formed below the article storage portion disposed at the non-article carry-in / out location and formed corresponding to the air intake space,
Purified air ventilation means on the non-article loading / unloading side for ventilating purified air through a filter for purified air, the rear portion of the article storage unit arranged at the non-article loading / unloading position, 2. The purified air ventilation type article storage facility according to claim 1, wherein the purified air in a portion corresponding to a back portion of the article is provided so as to pass through the article storage portion and into the traveling space. A pair of the article storage shelves are provided side by side with the non-article carry-in / out places adjacent to each other,
The pair of said air circulation paths in a pair of said goods storage shelf are formed in the state which shares the part corresponding to the said non-goods carrying in / out place, The purified air ventilation type article storage equipment of Claim 1 or 2 .

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