TWI406803B - Clean air ventilation of the items storage equipment - Google Patents
Clean air ventilation of the items storage equipment Download PDFInfo
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- TWI406803B TWI406803B TW096138641A TW96138641A TWI406803B TW I406803 B TWI406803 B TW I406803B TW 096138641 A TW096138641 A TW 096138641A TW 96138641 A TW96138641 A TW 96138641A TW I406803 B TWI406803 B TW I406803B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
- B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
- B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/02—Belt or chain conveyors
- B65G2812/02128—Belt conveyors
- B65G2812/02138—Common features for belt conveyors
- B65G2812/02158—Means preventing dust penetration
Abstract
Description
本發明係有關於在淨化空氣從天花板部被通風至地板部側的清淨空間內，具備在架橫向寬度方向並列的複數的物品收納部、在這些物品收納部的前方側的行走空間內移動的物品搬送裝置、以及被配置在相當於上述複數的物品收納部中的至少一部份的物品的下方的場所的物品搬出入部的物品保管架係被設置，在上述複數的物品收納部的後部，經由空氣淨化用過濾器、將淨化空氣通風的淨化空氣通風裝置，係通過上述物品收納部、在上述行走空間內將淨化空氣通風般被設置，在上述地板部中的上述行走空間對應的場所，將上述行走空間內的淨化空氣排出至下方的排出用開口部被設置的淨化空氣通風式之物品保管設備。In the clean space in which the purified air is ventilated from the ceiling portion to the floor portion side, the present invention includes a plurality of article storage portions that are arranged in the lateral width direction of the rack and that move in the traveling space on the front side of the article storage portion. The article transporting device and the article storage rack of the article loading/unloading portion disposed at a position below the article corresponding to at least one of the plurality of article storage portions are provided, and at the rear of the plurality of article storage portions The air-purifying filter and the purified air ventilating device that ventilates the purified air are provided in the space of the living space in the space by the article storage unit, and the space corresponding to the walking space in the floor portion is The purified air ventilated article storage facility in which the purified air in the traveling space is discharged to the lower discharge opening.
如上述般的淨化空氣通風式之物品保管設備係，在清淨室等的清淨空間內，淨化空氣通風裝置係藉由對於被收納在物品收納部的物品經由空氣淨化用過濾器、將淨化空氣通風，一邊防止塵埃附著在物品，一邊保管物品。In the clean air-ventilated article storage device as described above, the purified air ventilation device ventilates the purified air through the air purifying filter for the articles stored in the article storage portion in the clean space such as the clean room. Store the items while preventing dust from adhering to the items.
又，在地板部，不限於對應於行走空間的場所，在此以外的場所，將清淨空間內的淨化空氣排出至下方的開口部也被設置，從清淨空間的天花板部被通風至地板部側的淨化空氣係，從排出用開口部、以及地板部的排出用開口部以外的場所被設置的開口部被排出至下方。此被排出的淨化空氣係，由通風風扇以及循環路導引至清淨空間的上部，藉由空氣過濾器被清淨化，從清淨空間的天花板部被通風至地板部側。如上述，一邊循環淨化空氣，從清淨空間的天花板部使淨化空氣通風至地板部側。In addition, the floor portion is not limited to the place corresponding to the walking space, and the opening portion for discharging the purified air in the clean space to the lower portion is also provided, and is ventilated from the ceiling portion of the clean space to the floor portion side. The clean air system is discharged to the lower portion from the discharge opening portion and the opening portion provided at a place other than the discharge opening portion of the floor portion. The discharged purified air system is guided to the upper portion of the clean space by the ventilation fan and the circulation path, and is cleaned by the air filter, and is ventilated from the ceiling portion of the clean space to the floor portion side. As described above, the purified air is circulated, and the purified air is ventilated from the ceiling portion of the clean space to the floor portion side.
習知的淨化空氣通風式之物品保管設備係，在行走空間中的物品搬出入部的存在側相反側的非物品搬出入場所，在架橫向寬度方向以及架上下寬度方向並列的複數的物品收納部係被配設。又，在使物品收納部的背部場所、以及配置於非物品搬出入場所的物品收納部的背部場所和外部遮蔽般包圍的狀態下，空氣通風路被形成，使在對應於此空氣通風路中的行走空間的上部場所的部份中的清淨空間內的淨化空氣導入般(例如，參考專利文獻1)。The conventional air-purifying and air-contained article storage device is a plurality of article storage units that are arranged in the horizontal width direction and the vertical width direction of the rack in the non-article loading and unloading place on the side opposite to the side where the article is moved in and out of the article in the walking space. It is assigned. In the state in which the back portion of the article storage portion and the back portion of the article storage portion disposed in the non-article carrying-in/out place are surrounded by the outside, the air passage is formed so as to correspond to the air passage. The purified air in the clean space in the portion of the upper portion of the walking space is introduced (for example, refer to Patent Document 1).
在此習知的淨化空氣通風式之物品保管設備中，淨化空氣通風裝置係使在空氣通風路中的物品收納部的背面場所對應的部份內的淨化空氣通風般被構成，在配置於非物品搬出入場所的物品收納部的後部，使對應於空氣通風路中的非物品搬出入場所的背部場所的部份的淨化空氣經由空氣淨化用過濾器、使淨化空氣通風的非物品搬出入側的淨化空氣通風裝置被設置。In the conventional air-purifying article storage device, the air-purifying device is configured such that the purified air in the portion corresponding to the back surface of the article storage portion in the air ventilation passage is ventilated. In the rear part of the article storage unit where the article is carried in and out of the room, the purified air corresponding to the portion of the back site in which the non-articles are moved in and out of the air passage is moved through the air purifying filter and the non-objects that ventilate the purified air. The purifying air ventilation unit is set.
又，由淨化空氣通風裝置以及非物品搬出入側的淨化空氣通風裝置被通風的淨化空氣係，通過物品收納部而至行走空間，使行走空間從上方側向下方側流動，從排出用開口被排出至下方。此被排出的淨化空氣係，和從其他場所被排出至下方的淨化空氣一起，且藉由以通風風扇以及循環路導引至清淨空間的上部的空氣過濾器被清淨化後，作為淨化空氣，從清淨空間的天花板部被通風至地板部側。In addition, the purified air system that is ventilated by the air ventilating device and the ventilating air ventilating device on the non-removable air inlet and outlet side passes through the article accommodating portion to the traveling space, and the traveling space flows from the upper side to the lower side, and is discharged from the discharge opening. Drain to the bottom. The discharged purified air system is cleaned together with the purified air discharged from the other places to the lower side, and is purified by the air filter guided to the upper portion of the clean space by the ventilation fan and the circulation path, and is used as the purified air. The ceiling portion of the clean space is ventilated to the floor side.
[專利文獻1]日本特開2003－81406號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2003-81406
在上述習知的淨化空氣通風式之物品保管設備中，因為使行走空間從上方側向下方側流動的淨化空氣的全部量從排出用開口排出至下方，從排出用開口部向下方排出的淨化空氣的量多，排出至清淨空間的下方的淨化空氣中，從排出用開口部被排出的淨化空氣所佔的比例變大。因此，無法使朝其他場所的淨化空氣的下方的排出平順地進行，在清淨空間內，塵埃漂浮，有清淨空間的清淨度降低的疑慮。In the above-described conventional air-purifying article storage device, the entire amount of the purified air flowing from the upper side to the lower side of the traveling space is discharged from the discharge opening to the lower side, and the discharge is discharged downward from the discharge opening. When the amount of air is large, it is discharged to the purified air below the clean space, and the proportion of the purified air discharged from the discharge opening is increased. Therefore, the discharge below the purified air in other places cannot be smoothly performed, and in the clean space, the dust floats, and there is a concern that the cleanness of the clean space is lowered.
本發明係著眼於上述缺點，其目的係提供可確實地進行朝清淨空間的下方的淨化空氣的排出、可高度維持清淨空間的清淨度的淨化空氣通風式之物品保管設備。The present invention has been made in view of the above-described disadvantages, and an object of the present invention is to provide a purified air-ventilated article storage facility capable of reliably discharging clean air below a clean space and highly maintaining the cleanliness of a clean space.
為了達成此目的，有關本發明的淨化空氣通風式之物品保管設備的第一特徵構成係，在淨化空氣從天花板部通風至地板部側的清淨空間內，具備在架橫向寬度方向並列的複數的物品收納部、在這些物品收納部的前方側的行走空間內移動的物品搬送裝置、以及被配置在相當於上述複數的物品收納部中的至少一部份的物品的下方的場所的物品搬出入部的物品保管架被設置，在上述複數的物品收納部的後部，經由空氣淨化用過濾器、使淨化空氣通風的淨化空氣通風裝置係，通過上述物品收納部、在上述行走空間內使淨化空氣通風般被設置，在上述地板部中的上述行走空間對應的場所，使上述行走空間內的淨化空氣排出至下方的排出用開口部被設置的淨化空氣通風式之物品保管設備中，在使在上述行走空間中的上述物品搬出入部的存在側相反側的非物品搬出入場所、上述行走空間的上部場所、以及上述物品收納部的背部場所和外部遮蔽般包圍的狀態下被形成的空氣循環路係，將導入上述行走空間內的淨化空氣的行走空間內空氣導入用開口部、在對應於上述非物品搬出入場所的部份具備的狀態下，且將導入上述清淨空間內的淨化空氣的清淨空間內空氣導入用開口部、在其縱長方向中的至少一部份具備的狀態下被設置，上述淨化空氣通風裝置係，使在上述空氣循環路中的上述物品收納部的背部場所對應的部份內的淨化空氣通風般被構成。In order to achieve the object, the first characteristic structure of the air-purifying article storage device according to the present invention is provided in a clear space in which the purified air is ventilated from the ceiling portion to the floor portion side, and is provided in parallel in the lateral width direction of the frame. The article storage unit, the article transporting device that moves in the traveling space on the front side of the article storage unit, and the article loading and unloading portion that is disposed at a position below the article corresponding to at least one of the plurality of article storage units The article storage rack is provided, and the air purifying filter and the purified air ventilating device for ventilating the purified air are ventilated in the traveling space through the article accommodating portion in the rear portion of the plurality of article accommodating portions. In the clean air-ventilated article storage facility in which the discharge air in the travel space is discharged to the lower discharge opening, the above-mentioned space in the above-mentioned floor space is provided. Non-object moving on the opposite side of the presence side of the above-mentioned article in the walking space An air circulation path formed in a state in which the entrance space, the upper portion of the above-described walking space, and the back portion of the article storage portion are surrounded by the outside, and the air in the traveling space into which the purified air is introduced into the walking space The opening portion and the air introduction opening in the clean space of the purified air introduced into the clean space in a state in which the opening portion is provided in the portion corresponding to the non-article carrying-in/out place, and at least one of the longitudinal direction thereof The purified air ventilating device is configured to ventilate the purified air in a portion corresponding to the back portion of the article storage portion in the air circulation path.
亦即，因為空氣循環路係使非物品搬出入場所、行走空間的上部場所、以及物品收納部的背部場所和外部遮蔽般包圍，由空氣循環路，可使包含物品保管架的空間和外部遮蔽。在包含此物品保管架的空間內，由淨化空間通風裝置被通風的淨化空氣係，通過物品收納部至行走空間，使行走空間從上方側向下方側流動。因為在空氣循環路中的行走空間內空氣導入用開口部係在對應於非物品搬出入場所的部份被設置，行走空間內的淨化空氣係，其一部份從行走空間內空氣導入用開口部導入空氣循環路，殘餘的一部份從排出用開口部被排出至下方。導入空氣循環路的淨化空氣係，從清淨空間內空氣導入用開口部導入至空氣循環路的清淨空間內的淨化空氣的同時，經由空氣循環路而被流動至物品收納部的背部場所。由空氣循環路在對應於物品收納部的背部場所的部份被流動的淨化空氣係，由淨化空氣通風裝置經由空氣淨化用過濾器，通過物品收納部，在行走空間內通風。In other words, the air circulation path allows the non-articles to be moved in and out of the place, the upper part of the walking space, and the back place of the article storage unit to be shielded by the outside, and the air circulation path can shield the space including the article storage rack from the outside. . In the space including the article storage rack, the purified air that is ventilated by the clean space ventilation device passes through the article storage portion to the traveling space, and the traveling space flows from the upper side to the lower side. Since the air introduction opening in the walking space in the air circulation path is provided in a portion corresponding to the non-object loading and unloading place, the purified air system in the walking space is partially opened from the air introduction opening in the walking space. The portion is introduced into the air circulation path, and a part of the remaining portion is discharged to the lower side from the discharge opening portion. The purified air that is introduced into the air circulation path is introduced into the back space of the article storage unit via the air circulation path while being introduced into the clean air in the clean space of the air circulation path from the air introduction opening in the clean space. The purified air system in which the air circulation path flows in the portion corresponding to the back portion of the article storage portion is ventilated in the traveling space by the air purifying device through the air purifying filter through the article storage portion.
如上述，因為一邊使行走空間內的淨化空氣的至少一部份由空氣循環路被循環，一邊可在複數的物品收納部分別使淨化空氣被通風，可使從排出用開口部排出至下方的淨化空氣的量變少。因此，可使朝其他場所中的淨化空氣的下方的排出平順地進行，可確實地進行朝清淨空間的下方的淨化空氣的排出。As described above, since at least a part of the purified air in the traveling space is circulated by the air circulation path, the purified air can be ventilated in the plurality of article storage portions, and can be discharged from the discharge opening to the lower side. The amount of purified air is reduced. Therefore, the discharge to the lower side of the purified air in other places can be smoothly performed, and the discharge of the purified air below the clean space can be surely performed.
又，因為空氣循環路係使非物品搬出入場所、行走空間的上部場所、以及物品收納部的背部場所和外部遮蔽般包圍，行走空間內空氣導入用開口部係在對應於非物品搬出入場所的部份被設置，不需使相當於物品收納部的下方的場所作為為了設置空氣循環路的空間使用。因此，不需注意和物品搬出入部的設置空間的配合，又，因為一邊有效地活用障礙物少的行走空間的上部場所，可一邊設置空氣循環路，可使空氣循環路的設置容易。In addition, the air circulation path is such that the non-articles are moved in and out of the place, the upper part of the walking space, and the back of the article storage unit are surrounded by the outside, and the air introduction opening in the walking space is associated with the non-object moving in and out. The part is provided so that the space below the article storage unit does not need to be used as a space for installing the air circulation path. Therefore, it is not necessary to pay attention to the cooperation with the installation space of the article loading and unloading portion, and the air circulation path can be provided while the upper portion of the walking space with less obstacles can be effectively utilized, and the air circulation path can be easily installed.
從上述事項，達到可提供一邊確實地進行朝清淨空間的下方的淨化空氣的排出、可高度維持清淨空間的清淨度，可使空氣循環路的設置容易的淨化空氣通風式之物品保管設備。From the above-mentioned matters, it is possible to provide a clean air ventilated article storage facility that can provide a clean air level that can be cleaned to the clean space below the clean space and that can clean the clean space.
有關本發明的淨化空氣通風式之物品保管設備的第二特徵構成係，在上述非物品搬出入場所，在架橫向寬度方向並列的複數的物品收納部被配設，對應於上述空氣循環路中的上述非物品搬出入場所的部份係，以包圍配置於上述非物品搬出入場所的上述物品收納部的背部場所的狀態下被形成，上述行走空間內空氣導入用開口部係，在配置於上述非物品搬出入場所的上述物品收納部的下方被形成、對應於空氣導入用空間被形成，在上述非物品搬出入場所被配置的上述物品收納部的後部，經由淨化空氣用過濾器、使淨化空氣通風的非物品搬出入側的淨化空氣通風裝置係，使對應於上述空氣循環路中的上述非物品搬出入場所的背部場所的部份的淨化空氣通過上述物品收納部、在上述行走空間內通風般被設置。According to a second aspect of the present invention, in the non-art moving-in/out-place, a plurality of article storage units arranged in the lateral width direction of the rack are disposed, and correspond to the air circulation path. The portion of the non-article carrying-in/out place is formed in a state of surrounding the back of the article storage unit disposed in the non-article loading and unloading place, and the air introduction opening in the walking space is disposed in the living space. The lower side of the article storage unit in the non-article loading and unloading place is formed, and is formed in accordance with the air introduction space, and the rear portion of the article storage unit disposed in the non-article loading/unloading place is filtered through the air purifying filter. a purified air ventilating device that is ventilated by the ventilating air, and the purified air corresponding to a portion of the back portion of the air circulation path that is moved in and out of the air circulation path passes through the article accommodating portion in the walking space It is set inside ventilation.
亦即，由淨化空氣通風裝置以及非物品搬出入側的淨化空氣裝置被通風的淨化空氣係，通過物品收納部至行走空間，使行走空間從上方側向下方側流動。行走空間內的淨化空氣係，其一部份從形成於空氣導入用空間的行走空間內空氣導入用開口部被導入至空氣循環路，殘餘的一部份從排出用開口部被排出至下方。導入空氣循環路的淨化空氣係，由空氣循環路通過配置於非物品搬出入場所的物品收納部的背部場所，經過行走空間的上部場所，在物品收納部的背部場所流動。又，由空氣循環路通過配置於非物品搬出入場所的物品收納部的背部場所的淨化空氣係，其一部分由非物品搬出入側的淨化空氣通風裝置，通過配設於非物品搬出入場所的物品收納部，在行走空間內通風。In other words, the purified air system that is ventilated by the purified air ventilating device and the clean air device on the non-article carrying-in side passes through the article accommodating portion to the traveling space, and causes the traveling space to flow from the upper side to the lower side. A part of the purified air in the traveling space is introduced into the air circulation path from the air introduction opening in the traveling space formed in the air introduction space, and a remaining portion is discharged to the lower side from the discharge opening. The purified air system that is introduced into the air circulation path passes through the air circulation path through the back position of the article storage unit disposed in the non-article loading and unloading place, and passes through the upper portion of the walking space to flow in the back portion of the article storage unit. In addition, the purified air system that passes through the air circulation path and is disposed in the back of the article storage unit of the non-article loading and unloading place is partially disposed by the clean air ventilation device on the non-goods loading and unloading side, and is disposed in the non-goods loading and unloading place. The article storage unit is ventilated in the walking space.
因此，不僅配設於物品搬出入場所的上部的物品收納部，即使對於配設於非物品搬出入場所的物品收納部，一邊在複數的物品收納部全部使淨化空氣通風，可使行走空間內的淨化空氣的至少一部分由空氣循環路循環。Therefore, it is possible to ventilate the purified air in all of the plurality of article storage units even in the article storage unit that is disposed in the upper part of the article loading and unloading place, so that the air can be ventilated in the plurality of article storage units. At least a portion of the purified air is circulated by the air circulation path.
有關本發明的淨化空氣通風式之物品保管設備的第三特徵構成係，上述物品保管架的一對係，使這些上述非物品搬出入場所以鄰接的狀態下並列設置，一對的上述物品保管架中的一對上述空氣循環路係，以使對應於上述非物品搬出入場所的部份共用的狀態下被形成。According to a third aspect of the present invention, in the air-conditioning-type article storage device of the present invention, the pair of articles storage racks are arranged such that the non-objects are moved in and out in parallel, and the pair of the article storage racks are arranged in parallel. The pair of air circulation paths described above are formed in a state in which the portions corresponding to the non-articles moving in and out of the place are shared.
亦即，因為物品保管架的一對係，使這些非物品搬出入場所以鄰接的狀態下並列設置，一邊使一對物品保管架的設置空間盡量小，可設置一對物品保管架。又，一對物品保管架中的一對空氣循環路係，因為不使對應於非物品搬出入場所的部份分別形成，以使對應於非物品搬出入場所的部份共用的狀態下形成，可達到設置一對空氣循環路用的空間的減低以及構成的簡單化。In other words, the pair of articles storage racks are arranged such that the non-articles are moved in and out in parallel, and the installation space of the pair of article storage racks is made as small as possible, so that a pair of article storage racks can be provided. In addition, a pair of air circulation paths in the pair of article storage racks are formed separately in a state in which the portions corresponding to the non-articles are moved in and out, and are formed in a state in which the portions corresponding to the non-objects are moved in and out. The reduction in the space for providing a pair of air circulation paths and the simplification of the configuration can be achieved.
因此，可設置一邊有效地活用有限的空間，可使行走空間內的淨化空氣的至少一部分由空氣循環路循環的一對物品保管架。Therefore, it is possible to provide a pair of article storage racks in which at least a part of the purified air in the walking space is circulated by the air circulation path while effectively utilizing a limited space.
以下基於圖示說明有關本發明的淨化空氣通風式之物品保管設備的實施例。Hereinafter, an embodiment of the air-purifying article storage device according to the present invention will be described based on the drawings.
此淨化空氣通風式之物品保管設備係如第1~3圖所示般，在作為淨化空氣從天花板部被通風至地板部側的清淨空間的清淨室1內，具備在架橫向寬度方向以及架上下寬度方向並列的複數的物品收納部2、在這些物品收納部2的前方側的行走空間3內移動的物品搬送裝置4、以及在相當於複數的物品收納部2的下方的場所被配設的物品搬出入部5的物品保管架6係被設置一對。In the clean room 1 which is a clean space in which the purified air is ventilated from the ceiling portion to the floor portion side as shown in the first to third figures, the clean air ventilated article storage device is provided in the lateral width direction of the rack and the rack. A plurality of article storage units 2 that are arranged in the vertical direction and in the width direction, and an article transporting device 4 that moves in the traveling space 3 on the front side of the article storage unit 2 and a place below the plurality of article storage units 2 are disposed. The article storage rack 6 of the article loading and unloading unit 5 is provided in a pair.
一對物品保管架6係，以使行走空間3中的物品搬出入部5的存在側反對側的非物品搬出入場所7鄰接的狀態下並列設置。亦即，一對物品保管架6係，在使非物品搬出入場所7共用的狀態下被配設。又，在此非物品搬出入場所7，在和在相當於一對物品保管架6的一方(第1圖中下方側)的物品搬出入部5的上方的場所被配設的物品收納部2相對的狀態下，在架橫向寬度方向以及架上下寬度方向並列的複數的物品收納部2係被配設。The pair of article storage racks 6 are arranged side by side in a state in which the non-article loading and unloading places 7 on the side opposite to the side where the articles are carried out in the traveling space 3 are adjacent to each other. In other words, the pair of article storage racks 6 are disposed in a state in which the non-articles are moved in and out of the facility 7 in a shared state. In addition, the non-article loading/unloading place 7 is opposed to the article storage unit 2 disposed at a position above the article loading/unloading unit 5 (the lower side in the first drawing) of the pair of article storage racks 6 In the state of the rack, a plurality of article storage portions 2 that are juxtaposed in the lateral width direction of the rack and the vertical width direction of the rack are disposed.
上述清淨室1係，使其地板部以通氣孔被多數形成的多孔狀的格柵(grating)地板8般構成，從形成於其天花板的天花板吹出部9使淨化空氣向地板部側通風般被構成。又，在清淨室1，藉由房10，上部以及側周圍被包圍的空間被形成，在由此房10包圍的空間內，一對物品保管架6被配設。The clean room 1 is configured such that the floor portion is formed of a porous grating floor 8 which is formed by a plurality of vent holes, and the clean air is ventilated to the floor portion side from the ceiling blowing portion 9 formed in the ceiling. Composition. Further, in the clean room 1, a space surrounded by the upper portion and the side of the room 10 is formed, and a pair of article storage racks 6 are disposed in the space surrounded by the room 10.
上述複數的物品收納部2係分別由在架橫向寬度方向隔開間隔而被立設的前後一對的支柱11、以及在前後一對支柱11分別被支持且在架上下方向隔開間隔而被設置的載置支持部12所構成。又，物品收納部2係以由左右一對的載置支持部12載置支持物品的狀態下收納物品般被構成。又，各物品收納部2係，在架橫向寬度方向鄰接的物品彼此以及在架上下方向鄰接的物品彼此係可空氣流動般被連通。The plurality of article storage units 2 are respectively supported by a pair of front and rear pillars 11 that are erected at intervals in the lateral width direction of the rack, and are supported by the pair of front and rear pillars 11 and are spaced apart from each other in the vertical direction of the rack. The placement support unit 12 is provided. In addition, the article storage unit 2 is configured to store articles in a state in which the support articles are placed on the pair of left and right placement support portions 12 . Moreover, each of the article storage units 2 is configured such that articles adjacent to each other in the lateral width direction of the rack and articles adjacent to each other in the vertical direction of the rack are in air flow.
上述物品收納部2係，使可保持作為物品，如第4圖所示般，玻璃基板等的板狀物品13的物品保持體14可自由收納般被構成。上述物品保持體14係，由以格子狀被形成的上框體14a以及下框體14b、使上框體14a和下框體14b連結的複數的連結體14c、在連結體14c上下方向隔開間隔而被設置且使在水平方向相對的連結體14c彼此連結的線狀的支持部14d所構成。又，在由各支持部14d載置支持的狀態下，使板狀物品13在上下方向隔開間隔而並列保持，在物品保持體14的上部、下部、以及側部的全部中，可空氣流動般被構成。In the article storage unit 2, the article holder 14 of the plate-like article 13 such as a glass substrate can be stored as an article. The article holding body 14 is provided with an upper frame body 14a and a lower frame body 14b which are formed in a lattice shape, and a plurality of connecting bodies 14c that connect the upper frame body 14a and the lower frame body 14b, and are vertically spaced apart from each other in the connecting body 14c. A linear support portion 14d that is provided at intervals and that connects the connected bodies 14c that face each other in the horizontal direction is formed. In the state where the support members 14d are placed on the support, the plate-like articles 13 are arranged side by side at intervals in the vertical direction, and the air can flow through all of the upper portion, the lower portion, and the side portions of the article holding body 14. It is composed as usual.
在上述清淨室1，在循環淨化空氣的狀態下，使淨化空氣從天花板部通風至地板部側的清淨室通風裝置15被設置。此清淨室通風裝置15係使通過格柵地板8的空氣清淨化而作為淨化空氣，使此淨化空氣從天花板吹出部9吹出般被構成。In the clean room 1 described above, the clean room ventilation device 15 that ventilates the purified air from the ceiling portion to the floor portion side is provided in a state where the air is circulated and purified. The clean room ventilation device 15 is configured to purify the air passing through the grill floor 8 as purified air, and to purge the purified air from the ceiling blowing portion 9.
上述清淨室通風裝置15的構成係包括：吸氣室16，設置於格柵地板8的下方側；空氣腔室17，設置於天花板吹出部9的上方側；空氣過濾器18，由並設於天花板吹出部9的HEPA過濾器等構成；接續流路19，連通接續吸氣室16和空氣腔室17；循環用送風機20，設置於此接續流路19，在吸氣室16吸引作用；以及前過濾器(pre－filter)21，設置於接續流路19中的循環送風機20的空氣吐出側。The clean room ventilation device 15 is configured to include an air suction chamber 16 disposed on a lower side of the grill floor 8 , an air chamber 17 disposed on an upper side of the ceiling blowing portion 9 , and an air filter 18 disposed on the air filter 18 a HEPA filter or the like of the ceiling blowing portion 9; a connecting flow path 19 that communicates with the suction chamber 16 and the air chamber 17; and a circulation blower 20 that is provided in the connecting flow path 19 to attract the suction chamber 16; A pre-filter 21 is provided on the air discharge side of the circulation blower 20 in the connection flow path 19.
上述清淨室1內的空氣係，藉由循環用送風機20的通風作用，經由格柵地板8，被吸入至吸氣室16，流動於接續流路19，由前過濾器21被清淨化，而到空氣腔室17。又，到達空氣腔室17的空氣係，作為由空氣過濾器18被清淨化的淨化空氣，從天花板吹出部9向下吹出至清淨室1內。The air in the clean room 1 is sucked into the intake chamber 16 via the grill floor 8 by the ventilating action of the circulation blower 20, flows into the connecting flow path 19, and is cleaned by the front filter 21, and To the air chamber 17. Further, the air that has reached the air chamber 17 is blown downward from the ceiling blowing portion 9 into the clean room 1 as the purified air purified by the air filter 18.
如上述，藉由清淨室通風裝置15，清淨室1內的空氣係，一邊由前過濾器21以及空氣過濾器18被清淨化而被循環，使淨化空氣從天花板吹出部9向格柵地板8側而經常被通風。As described above, the air in the clean room 1 by the clean room ventilating device 15 is circulated by the front filter 21 and the air filter 18, and the purified air is supplied from the ceiling blowing portion 9 to the grill floor 8 Sideways and often ventilated.
在上述接續流路19的循環用送風機20的吸入側，外氣導入流路22被接續，在此外氣導入流路22，外氣導入量調節用擋板(dmaper)23被設置。又，在接續流路19的循環用送風機20的吐出側，排氣流路24被接續，在此排氣流路24，排氣量調節用擋板25被設置。The external air introduction flow path 22 is connected to the suction side of the circulation blower 20 of the connection flow path 19, and the external air introduction amount adjustment baffle 23 is provided in the additional air introduction flow path 22. Further, the exhaust flow path 24 is connected to the discharge side of the circulation blower 20 that connects the flow path 19, and the exhaust flow path 24 is provided in the exhaust flow path 24.
又，藉由調節外氣導入量調節用擋板23以及排氣量調節用擋板25的個別開度，由清淨室通風裝置15被循環的清淨室1內的空氣中的所定量係和新鮮空氣交換般被構成。Moreover, by adjusting the individual opening degrees of the outside air introduction amount adjusting flapper 23 and the exhaust gas amount adjusting flapper 25, the amount of the air in the clean room 1 circulated by the clean room ventilating device 15 is fresh and fresh. It is composed of air exchange.
在配設於上述物品搬出入部5的上部的複數的物品收納部2的後部，作為經由空氣淨化用過濾器、使淨化空氣通風的淨化空氣通風裝置的第一風扇過濾器單元(以下簡稱為第一FFU)26被設置。此第一FFU 26係，分別對應於複數的物品收納部2而被裝備。又，雖然此第一FFU 26係圖示省略，但以使在被收納於物品收納部2的物品保持體14被保持的板狀物品13彼此之間通過的狀態下，通過物品收納部2、在行走空間3內使淨化空氣通風般被設置。The first fan filter unit (hereinafter referred to as the first air filter unit) that vents the purified air through the air purifying filter and the rear portion of the plurality of article storage units 2 disposed in the upper portion of the article loading and unloading portion 5 An FFU) 26 is set. The first FFU 26 is equipped to correspond to a plurality of article storage units 2, respectively. In addition, the first FFU 26 is omitted, but the article storage unit 2 is passed through the state in which the sheet-like articles 13 held by the article holding body 14 housed in the article storage unit 2 are passed between each other. The purified air is ventilated in the walking space 3.
又，在配置於非物品搬出入場所7的物品收納部2的後部，作為經由空氣淨化用過濾器、使淨化空氣通風的非物品搬出入側的淨化空氣通風裝置的第二風扇過濾器單元(以下簡稱為第二FFU)27被設置。此第二FFU 27係，分別對應於複數的物品收納部2而被裝備。又，此第二FFU 27也和第一FFU 26相同，以使在被收納於物品收納部2的物品保持體14被保持的板狀物品13彼此之間通過的狀態下，通過物品收納部2，在行走空間3內使淨化空氣通風般被設置。In the rear part of the article storage unit 2, which is disposed in the non-article loading and unloading place 7, the second fan filter unit of the purified air ventilating device that is moved in and out of the non-articles that ventilate the purified air through the air purifying filter ( Hereinafter referred to as the second FFU 27 is set. The second FFU 27 is equipped to correspond to a plurality of article storage units 2, respectively. In addition, the second FFU 27 is also the same as the first FFU 26, and passes through the article storage unit 2 in a state where the sheet-like articles 13 held by the article holding body 14 housed in the article storage unit 2 pass between each other. In the walking space 3, the purified air is ventilated.
在對應於上述房10內的地板部中的行走空間3以及非物品搬出入場所7的場所，使行走空間3內的淨化空氣排出至下方的排出用開口部28被設置。此排出用開口部28係，藉由在格柵地板8設置板體，與格柵地板8相比，開口面積變小般被構成。The discharge opening portion 28 that discharges the purified air in the traveling space 3 to the lower side is provided in the space corresponding to the walking space 3 and the non-article loading/unloading place 7 in the floor portion in the room 10. In the discharge opening portion 28, a plate body is provided on the grill floor 8, and the opening area is reduced as compared with the grill floor 8.
又，對應於在房10內的地板部中的物品搬出入部5的場所係，使格柵地板8的開口以板狀體閉塞，房10內的行走空間3的淨化空氣係，從排出用開口部28被排出至其下方的吸氣室16般被構成。In addition, in the place where the article in the floor portion of the room 10 is carried in and out of the room 5, the opening of the grille floor 8 is closed by the plate-like body, and the air in the living space 3 in the room 10 is purged from the opening. The portion 28 is configured to be discharged to the suction chamber 16 below it.
又，例如，藉由使排出用開口部28的開口面積較小，或對應於地板部中的非物品搬出入場所7的場所的開口由板狀體閉塞等，可使行走空間3的淨化空氣排出至吸氣室16的排出量較少。In addition, for example, by making the opening area of the discharge opening portion 28 small or the opening corresponding to the place where the non-object carrying-in/out place 7 in the floor portion is closed by the plate-like body, the purified air of the walking space 3 can be made. The amount of discharge to the suction chamber 16 is small.
在上述房10內，因為藉由第一FFU 26以及第二FFU 27，淨化空氣被通風，其淨化空氣的壓力變高。對此，因為藉由設置地板部的排出用開口部28，淨化空氣被排氣，此淨化空氣的壓力變低。又，藉由此淨化空氣的壓力差，房10內的淨化空氣係，從物品收納部2的後部側向前部側流動，使行走空間3成為從上方側向下方側流動的向下流動(downflow)，使在物品收納部2或行走空間3等漂浮的塵埃排出至地板部的下方，提高房10內的清淨度。In the above-described room 10, since the purified air is ventilated by the first FFU 26 and the second FFU 27, the pressure of the purified air becomes high. On the other hand, since the discharge opening portion 28 of the floor portion is provided, the purified air is exhausted, and the pressure of the purified air is lowered. In addition, the purified air in the room 10 flows from the rear side to the front side of the article storage unit 2, and the traveling space 3 flows downward from the upper side to the lower side ( Downflow) discharges the floating dust in the article storage unit 2 or the walking space 3 to the lower side of the floor portion, thereby improving the cleanliness in the room 10.
在一對物品保管架6，分別使非物品搬出入場所7、行走空間3的上部場所、以及物品收納部2的背部場所和外部遮蔽般包圍的狀態下，空氣循環路40被形成。空氣循環路40係由，在配置於非物品搬出入場所7的物品收納部2的背部場所中、從下方側導引淨化空氣至上方側的直線狀的第一通路部分40a，使由此第一通路部分40a導引的淨化空氣以配置於非物品搬出入場所7的物品收納部2的上部場所、行走空間3的上部場所、物品收納部2的上部場所的順序導引的直線狀的第二通路部分40b，以及使由此第二通路部分40b導引的淨化空氣從物品收納部2的背部場所中的上方側導引至下方側的直線狀的第三通路部分40c構成。In the pair of article storage racks 6, the air circulation path 40 is formed in a state in which the non-article loading and unloading place 7, the upper position of the traveling space 3, and the back place of the article storage unit 2 are surrounded by the outside. The air circulation path 40 guides the purified air to the upper side linear first passage portion 40a from the lower side in the back position of the article storage unit 2 disposed in the non-article loading/unloading place 7 The purified air guided by the one passage portion 40a is linearly arranged in the order of the upper portion of the article storage unit 2, the upper portion of the traveling space 3, and the upper portion of the article storage unit 2, which are disposed in the non-article loading and unloading place 7 The two passage portions 40b and the purified air guided by the second passage portion 40b are guided from the upper side in the back position of the article storage portion 2 to the linear third passage portion 40c on the lower side.
上述第一通路部分40a、第二通路部分40b、以及第三通路部分40c係分別橫跨在架橫向寬度方向並列的複數的物品收納部2的全長而一連串地設置。The first passage portion 40a, the second passage portion 40b, and the third passage portion 40c are provided in series across the entire length of the plurality of article storage portions 2 that are aligned in the lateral width direction of the rack.
一對物品保管架6中的一對空氣循環路40係，以使對應於非物品搬出入場所7的第一通路部分40a共用的狀態下被形成。又，此第一通路部分40a係以包圍配置於非物品搬出入場所7的物品收納部2的背部場所的狀態下被形成。The pair of air circulation paths 40 in the pair of article storage racks 6 are formed in a state in which the first passage portions 40a corresponding to the non-article loading and unloading places 7 are shared. In addition, the first passage portion 40a is formed in a state of surrounding the back portion of the article storage unit 2 disposed in the non-article loading and unloading place 7.
在一對空氣循環路40，分別使行走空間3內的淨化空氣導入的行走空間內空氣導入用開口部41、使在房10外且清淨室1內的淨化空氣導入的清淨空間內空氣導入用開口部42係被設置。In the pair of air circulation paths 40, the air introduction opening 41 in the traveling space into which the purified air in the walking space 3 is introduced, and the air in the clean space in which the purified air in the clean room 1 is introduced outside the room 10 is introduced. The opening portion 42 is provided.
又，一對空氣循環路40中的行走空間內空氣導入用開口部41係分別，在和對應於非物品搬出入場所的地板部鄰接的部分被具備。又，在對應於一對物品保管架6的一方(第1圖中下方側)的空氣循環路40中的行走空間內空氣導入用開口部41係，在非物品搬出入場所7被配置的物品收納部2的下方被形成的空氣導入用空間43對應而被形成。亦即，空氣導入用空間43中，面對行走空間3的部份係作為行走空間內空氣導入用開口部41而被構成。In addition, the air introduction opening 41 in the traveling space in the pair of air circulation paths 40 is provided in a portion adjacent to the floor portion corresponding to the non-article loading and unloading place. In the air circulation passage 40 corresponding to one of the pair of article storage racks 6 (the lower side in the first drawing), the air introduction opening 41 in the walking space is placed in the non-article loading/unloading place 7 The air introduction space 43 formed below the storage unit 2 is formed corresponding to each other. In other words, in the air introduction space 43, the portion facing the traveling space 3 is configured as the air introduction opening portion 41 in the walking space.
一對空氣循環路40中的清淨空間內空氣導入用開口部42係，在相當於物品搬出入部5的上方的場所被配設的物品收納部2的背部場所中，在物品收納部2的後部被配置的第一FFU 26鄰接的場所被設置。The air introduction opening portion 42 in the clean space in the pair of air circulation passages 40 is in the rear portion of the article storage portion 2 disposed at a position above the article loading/unloading portion 5, and at the rear portion of the article storage portion 2 A place where the configured first FFU 26 is adjacent is set.
上述第一FFU 26係，以使對應於空氣循環路40中的物品收納部2的背部場所的第三部份40c內的淨化空氣通風的方式被構成。又，第一FFU 26係，使由行走空間內空氣導入用開口部41導入的行走空間3內的淨化空氣和由清淨空間內空氣導入用開口部42導入的房10外的清淨室1內的淨化空氣經由空氣淨化用過濾器而通風般被構成。The first FFU 26 is configured to ventilate the purified air in the third portion 40c corresponding to the back portion of the article storage unit 2 in the air circulation path 40. In addition, the first FFU 26 is configured to allow the purified air in the traveling space 3 introduced by the air introduction opening 41 in the traveling space and the clean room 1 outside the room 10 introduced by the air introduction opening 42 in the clean space. The purified air is configured to be ventilated via a filter for air purification.
又，第二FFU 27係，以使對應於空氣循環路40中的非物品搬出入場所7的第一部份40a內的淨化空氣通風的方式被構成。又，第二FFU 27係，使由行走空間內空氣導入用開口部41導入的行走空間3內的淨化空氣經由空氣淨化用過濾器而通風般被構成。Further, the second FFU 27 is configured to ventilate the purified air in the first portion 40a corresponding to the non-goods loading and unloading place 7 in the air circulation path 40. In addition, the second FFU 27 is configured such that the purified air in the traveling space 3 introduced by the air introduction opening 41 in the traveling space is ventilated via the air purifying filter.
在上述房10內，由第一FFU 26以及第二FFU 27被通風的淨化空氣係，通過物品收納部2而到行走空間3，使行走空間3從上方側向下方側流動。行走空間3內的淨化空氣係，其一部份從行走空間內空氣導入用開口部41被導入至空氣循環路40，殘餘的一部份從排出用開口部28被排出至下方。被導入至空氣循環路40的淨化空氣係，作為從清淨空間內空氣導入用開口部42導入至空氣循環路40的清淨室1內的淨化空氣的同時，經由空氣循環路40而流動至物品收納部2的背部場所。又，第一FFU 26係，使流動至物品收納部2的背部場所的淨化空氣經由空氣淨化用過濾器而通風至物品收納部2。又，第二FFU 27係，由空氣循環路40使在非物品搬出入場所7被配設的物品收納部2的背部場所流動的淨化空氣經由空氣淨化用過濾器而通風至物品收納部2。In the room 10, the purified air that is ventilated by the first FFU 26 and the second FFU 27 passes through the article storage unit 2 to the traveling space 3, and the traveling space 3 flows downward from the upper side. A part of the purified air in the traveling space 3 is introduced into the air circulation path 40 from the air introduction opening 41 in the walking space, and a remaining portion is discharged from the discharge opening 28 to the lower side. The purified air introduced into the air circulation path 40 flows into the air in the clean room 1 of the air circulation path 40 from the air introduction opening 42 in the clean space, and flows through the air circulation path 40 to the article storage. The back of the part 2. Further, the first FFU 26 is configured to ventilate the purified air flowing to the back portion of the article storage unit 2 to the article storage unit 2 via the air purifying filter. In addition, the second FFU 27 is configured to ventilate the purified air flowing through the air purifying filter to the article storage unit 2 via the air purifying filter, by the air circulation path 40, and the purified air flowing through the air purifying filter in the back portion of the article storage unit 2 disposed in the non-article loading and unloading place 7.
如上述，一邊使行走空間3內的淨化空氣的至少一部分由空氣循環路40循環，可在複數的物品收納部2分別使淨化空氣通風。As described above, at least a part of the purified air in the traveling space 3 is circulated by the air circulation path 40, and the purified air can be ventilated in each of the plurality of article storage units 2.
一對物品保管架6中的物品搬送裝置4係分別，由具備在設置於地板部的導軌32以及設置於上部的天花板側導軌33被導引而行走的行走台車34、沿著被立設於此行走台車34的升降柱(mast)35而可自由升降的升降台36、以及在此升降台36被裝備而對於物品收納部2以及物品搬出入部5進行物品保持體14的出入的物品移載裝置37的高架存取車(stacker crane)被構成。Each of the article transporting devices 4 in the pair of article storage racks 6 is provided with a traveling vehicle 34 that is guided by a guide rail 32 provided on the floor portion and a ceiling side rail 33 provided on the upper portion, and is provided along the traveling vehicle 34 The elevating table 36 that can be freely moved up and down by the mast 35 of the traveling trolley 34, and the article that is equipped with the elevating table 36 and that allows the article storage unit 2 and the article loading and unloading unit 5 to move in and out of the article holder 14 An overhead loader crane of the device 37 is constructed.
又，物品搬送裝置4係，使在物品搬出入部5被搬入的物品保持體14在複數的物品收納部2的任一個搬送，使在物品收納部2被收納的物品保持體14在物品搬出入部5搬送般被構成。In the article transporting device 4, the article holding body 14 carried in the article loading and unloading unit 5 is transported in any one of the plurality of article storage units 2, and the article holding body 14 accommodated in the article storage unit 2 is placed in the article loading and unloading section. 5 It is structured like transportation.
上述物品搬出入部5係，如第2圖所示般，在相當於架橫向寬度方向並列的複數的物品收納部2的全部物品的下方的場所分別被配設。又，在各物品搬出入部5，從物品保持體14將板狀物品13一個一個取出而供給至圖外的物品處理部，使從此物品處理部一個一個供給的板狀物品13被保持在物品保持體14般被構成。As shown in FIG. 2, the article loading/unloading unit 5 is disposed at a position below all the articles of the plurality of article storage units 2 that are aligned in the lateral width direction of the rack. In the article loading and unloading unit 5, the sheet-like articles 13 are taken out one by one from the article holding body 14 and supplied to the article processing unit outside the drawing, and the sheet-like article 13 supplied one by one from the article processing unit is held in the article holding unit. The body 14 is constructed in the same manner.
分別在上述物品搬出入部5，使物品保持體14可自由升降地載置支持的左右一對的升降支持體30、使板狀物品13可自由載置支持地且具備使載置支持的板狀物品13可自由搬送的複數的驅動滾子的搬送體31被設置。搬送體31係，在左右一對的升降支持體30之間被配置，對於物品保持體14在上下方向可自由插脫地被設置。In the article carrying-in/out portion 5, the article holding body 14 can be placed on the left and right pair of lifting support bodies 30 so as to be freely movable, and the plate-like article 13 can be placed on the support and can be placed on the support plate. The transport body 31 of the plurality of drive rollers to which the article 13 can be freely transported is provided. The conveyance body 31 is disposed between the pair of right and left lift supports 30, and is provided to be detachably attached to the article holding body 14 in the vertical direction.
又，在聯繫物品搬出入部5和物品處理部的連通路38，使板狀物品13在物品處理部和物品搬出入部5之間搬送的搬送運輸器39係被設置，此連通路38係被設置在房10內。又，在連通路38，經由空氣淨化用過濾器，使淨化空氣對於搬送運輸器39通風的第三風扇過濾器單元(以下簡稱為第三FFU)29被設置。In addition, in the communication path 38 that connects the article loading/unloading unit 5 and the article processing unit, the transport conveyor 39 that transports the plate-shaped article 13 between the article processing unit and the article loading/unloading unit 5 is provided, and the communication path 38 is provided. In the room 10. Further, the communication path 38 is provided by a third fan filter unit (hereinafter simply referred to as a third FFU) 29 that ventilates the purified air to the transport conveyor 39 via the air purifying filter.
由上述物品搬出入部5從物品保持體14使板狀物品13一個一個取出而供給至搬送運輸器39時，藉由以左右一對的升降支持體30使物品保持體14下降，搬送體31係進入物品保持體14內，從物品保持體14使一個板狀物品13在搬送體31被載置支持。之後，由搬送體31載置支持板狀物品13而在搬送運輸器39搬送。藉由重複此類的動作，從物品保持體14將板狀物品13一個一個取出，供給至搬送運輸器39。When the article loading/unloading unit 5 takes out the sheet-like articles 13 one by one from the article holding body 14 and supplies them to the transport conveyor 39, the article holding body 14 is lowered by the pair of right and left lifting supports 30, and the transport body 31 is attached. Inside the article holding body 14, one sheet-like article 13 is placed on the transport body 31 from the article holding body 14 to be supported. Thereafter, the support sheet-like article 13 is placed on the transport body 31 and transported by the transport conveyor 39. By repeating such an operation, the plate-like articles 13 are taken out one by one from the article holding body 14 and supplied to the transport conveyor 39.
使由上述搬送運輸器39被供給的板狀物品13由物品搬出入部5一個一個在物品保持體14被保持時，在由左右一對的升降支持體30使物品保持體14進入搬送體31的狀態下載置支持。之後，搬送體31使一個板狀物品13搬送至由物品保持體14可保持的位置為止，藉由以左右一對的升降支持體30將物品保持體14上升，使一個板狀物品13在物品保持體14被保持。藉由重複此類的動作，使從搬送運輸器39被供給的板狀物品13在一個一個物品保持體14在上下方向並列的狀態下順序保持。When the sheet-like articles 13 supplied from the transport conveyor 39 are held by the article carrying-in/out portion 5 one by one, the article holding body 14 enters the transport body 31 by the pair of right and left lifting supports 30. Status download support. After that, the transport body 31 transports one of the plate-like articles 13 to a position that can be held by the article holding body 14, and raises the article holding body 14 by the pair of right and left lifting supports 30, thereby causing one sheet-like article 13 to be in the article. The holder 14 is held. By repeating such an operation, the plate-like article 13 supplied from the transport conveyor 39 is sequentially held in a state in which the one article holding body 14 is juxtaposed in the vertical direction.
在上述第一實施例中，雖然使物品保管架6以一對設置的例子表示，但在此第二實施例中，如第5圖所示般，使物品保管架6以一個設置。In the first embodiment described above, the article storage rack 6 is shown as a pair of installation examples. However, in the second embodiment, as shown in Fig. 5, the article storage rack 6 is provided in one.
在此物品保管架6中，在非物品搬出入場所7不配設物品收納部2。又，在空氣循環路40中的行走空間內空氣導入用開口部41係，以和在非物品搬出入場所7中的地板部鄰接的狀態下被設置。In the article storage rack 6, the article storage unit 2 is not disposed in the non-article loading/unloading place 7. In the air intake opening portion 41 in the air circulation path 40, the air introduction opening portion 41 is provided in a state of being adjacent to the floor portion in the non-article loading/unloading place 7.
有關其他構成係因為和上述第一實施例相同而說明省略。The other configuration is the same as that of the first embodiment described above, and the description is omitted.
(1)在上述第一實施例中，雖然以在非物品搬出入場所7配設物品收納部2的例子表示，但也可在非物品搬出入場所7不配設物品收納部2而實施。即使在此情形，如在上述第一實施例表示，使一對物品保管架6中的一對空氣循環路40，以使對應於非物品搬出入場所7的第一通路部分40a共用的狀態下形成。(1) In the above-described first embodiment, the article storage unit 2 is disposed in the non-article loading and unloading place 7, but the article storage unit 2 may be disposed in the non-article loading/unloading place 7. Even in this case, as shown in the first embodiment described above, the pair of air circulation paths 40 in the pair of article storage racks 6 are made to be in a state of being shared by the first passage portions 40a corresponding to the non-object loading and unloading places 7. form.
(2)在上述第二實施例中，雖然以在非物品搬出入場所7不配設物品收納部2的例子表示，但也可在非物品搬出入場所7配設物品收納部2而實施。即使在此情形，使對應於空氣循環路40的非物品搬出入場所7的第一通路部分40a，以包圍配設於非物品搬出入場所7的物品收納部2的背部場所的狀態下形成。(2) In the second embodiment, the article storage unit 2 is not provided in the non-article loading/unloading place 7, but the article storage unit 2 may be disposed in the non-article loading/unloading place 7. In this case, the first passage portion 40a of the non-article carrying-in/out place 7 corresponding to the air circulation path 40 is formed in a state of surrounding the back position of the article storage unit 2 disposed in the non-article loading and unloading place 7.
(3)在上述第一實施例中，雖然使第二FFU 27分別對應於物品收納部2的後部中的物品收納部2而裝備，但可對於複數的物品收納部2，使第二FFU 27裝備處係可適當變更。(3) In the first embodiment described above, the second FFU 27 is provided corresponding to the article storage portion 2 in the rear portion of the article storage portion 2, but the second FFU 27 may be provided for the plurality of article storage portions 2. The equipment department can be changed as appropriate.
(4)在上述第一以及第二實施例，雖然使物品保管架6以一對以及一個設置的例子表示，但有關設置物品保管架6的數目係可適當變更。(4) In the first and second embodiments described above, the article storage rack 6 is shown as a pair and one example, but the number of the article storage racks 6 can be appropriately changed.
(5)在上述第一以及第二實施例，雖然在相當於架橫向寬度方向並列的複數的物品收納部2的全部的下方的場所分別配設物品搬出入部5，但在架橫向寬度方向並列的複數的物品收納部2的一部份的物品的下方相當的場所配設物品搬出入部5而實施也可。(5) In the above-described first and second embodiments, the article loading/unloading portion 5 is disposed in each of the plurality of article storage portions 2 that are aligned in the lateral width direction of the rack, but is juxtaposed in the lateral width direction of the rack. The article loading/unloading unit 5 may be disposed in a place corresponding to a part of the article storage unit 2 in a plurality of articles.
1．．．清淨空間1. . . Clean space
2．．．物品收納部2. . . Item storage department
3．．．行走空間3. . . Walking space
4．．．物品搬送裝置4. . . Item transport device
5．．．物品搬出入部5. . . Moving items into and out of the department
6．．．物品保管架6. . . Item storage rack
7．．．非物品搬出入場所7. . . Non-goods moving in and out of the place
8．．．格柵地板8. . . Grill floor
9．．．天花板吹出部9. . . Ceiling blowout
10．．．房10. . . room
11．．．支柱11. . . pillar
12．．．載置支持部12. . . Mounting support
14．．．物品保持體14. . . Item holder
15．．．清淨室通風裝置15. . . Clean room ventilation
16．．．吹氣室16. . . Blowing chamber
17．．．空氣腔室17. . . Air chamber
18．．．空氣過濾器18. . . air filter
19．．．接續流路19. . . Continuous flow path
20．．．循環送風機20. . . Circulating blower
21．．．前過濾器twenty one. . . Front filter
22．．．外氣導入流路twenty two. . . External air introduction flow path
24．．．排氣流路twenty four. . . Exhaust flow path
25．．．排氣量調節用擋板25. . . Exhaust volume adjustment baffle
26．．．淨化空氣通風裝置26. . . Purified air ventilation
28．．．排出用開口部28. . . Discharge opening
29．．．第三風扇過濾器單元29. . . Third fan filter unit
30．．．升降支持體30. . . Lifting support
31．．．搬送體31. . . Transport body
32、33．．．導軌32, 33. . . guide
34．．．行走台車34. . . Walking trolley
35．．．升降柱35. . . Lifting column
36．．．升降台36. . . Lifts
37．．．物品移載裝置37. . . Item transfer device
38．．．連通路38. . . Connected road
39．．．搬送運輸器39. . . Transport conveyor
40．．．空氣循環路40. . . Air circulation road
40a．．．第一通路部分40a. . . First passage section
40b．．．第二通路部分40b. . . Second passage section
40c．．．第三通路部分40c. . . Third passage section
43．．．空氣導入用空間43. . . Air introduction space
23．．．外氣導入量調節用擋板twenty three. . . External air introduction amount adjustment baffle
41．．．行走空間內空氣導入用開口部41. . . Air introduction opening in the walking space
42．．．清淨空間內空氣導入用開口部42. . . Air introduction opening in clear space
27．．．非物品搬出入側的淨化空氣通風裝置27. . . Purified air ventilation device for non-object moving in and out side
第1圖係為第一實施例中的清淨室的縱剖面圖；第2圖係為第1圖中的A－A剖面圖；第3圖係為第1圖中的B－B剖面圖；第4圖係為表示物品保持體的立體圖；以及第5圖係為第二實施例中的清淨室的縱剖面圖。1 is a longitudinal cross-sectional view of a clean room in the first embodiment; FIG. 2 is a cross-sectional view taken along line A-A in FIG. 1; and FIG. 3 is a cross-sectional view taken along line B-B in FIG. 1; Fig. 4 is a perspective view showing the article holding body; and Fig. 5 is a longitudinal sectional view showing the clean room in the second embodiment.
1．．．清淨空間1. . . Clean space
2．．．物品收納部2. . . Item storage department
3．．．行走空間3. . . Walking space
4．．．物品搬送裝置4. . . Item transport device
5．．．物品搬出入部5. . . Moving items into and out of the department
6．．．物品保管架6. . . Item storage rack
7．．．非物品搬出入場所7. . . Non-goods moving in and out of the place
8．．．格柵地板8. . . Grill floor
9．．．天花板吹出部9. . . Ceiling blowout
10．．．房10. . . room
11．．．支柱11. . . pillar
12．．．載置支持部12. . . Mounting support
14．．．物品保持體14. . . Item holder
15．．．清淨室通風裝置15. . . Clean room ventilation
16．．．吹氣室16. . . Blowing chamber
17．．．空氣腔室17. . . Air chamber
18．．．空氣過濾器18. . . air filter
19．．．接續流路19. . . Continuous flow path
20．．．循環送風機20. . . Circulating blower
21．．．前過濾器twenty one. . . Front filter
22．．．外氣導入流路twenty two. . . External air introduction flow path
23．．．外氣導入量調節用擋板twenty three. . . External air introduction amount adjustment baffle
24．．．排氣流路twenty four. . . Exhaust flow path
25．．．排氣量調節用擋板25. . . Exhaust volume adjustment baffle
26．．．淨化空氣通風裝置26. . . Purified air ventilation
27．．．非物品搬出入側的淨化空氣通風裝置27. . . Purified air ventilation device for non-object moving in and out side
28．．．排出用開口部28. . . Discharge opening
29．．．第三風扇過濾器單元29. . . Third fan filter unit
30．．．升降支持體30. . . Lifting support
31．．．搬送體31. . . Transport body
32、33．．．導軌32, 33. . . guide
34．．．行走台車34. . . Walking trolley
35．．．升降柱35. . . Lifting column
36．．．升降台36. . . Lifts
37．．．物品移載裝置37. . . Item transfer device
38．．．連通路38. . . Connected road
39．．．搬送運輸器39. . . Transport conveyor
40．．．空氣循環路40. . . Air circulation road
40a．．．第一通路部分40a. . . First passage section
40b．．．第二通路部分40b. . . Second passage section
40c．．．第三通路部分40c. . . Third passage section
43．．．空氣導入用空間43. . . Air introduction space
41．．．行走空間內空氣導入用開口部41. . . Air introduction opening in the walking space
42．．．清淨空間內空氣導入用開口部42. . . Air introduction opening in clear space
Claims (3)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007002545A JP4378652B2 (en) | 2007-01-10 | 2007-01-10 | Purified air ventilation-type goods storage facility |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200829489A TW200829489A (en) | 2008-07-16 |
| TWI406803B true TWI406803B (en) | 2013-09-01 |
Family
ID=39630969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096138641A TWI406803B (en) | 2007-01-10 | 2007-10-16 | Clean air ventilation of the items storage equipment |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4378652B2 (en) |
| KR (1) | KR101110541B1 (en) |
| CN (1) | CN101220978B (en) |
| TW (1) | TWI406803B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012056659A (en) * | 2010-09-07 | 2012-03-22 | Murata Machinery Ltd | Automated storage and retrieval warehouse and container of the same |
| CN102616576B (en) * | 2012-03-26 | 2014-04-16 | 深圳市华星光电技术有限公司 | Stacking equipment and air purifying system thereof |
| US9878353B2 (en) * | 2012-08-21 | 2018-01-30 | Murata Machinery, Ltd | Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas |
| CN105775534B (en) * | 2016-05-26 | 2017-12-26 | 新昌县沃克工具有限公司 | Self-cleaning dustless storage room |
| JP6631446B2 (en) * | 2016-09-09 | 2020-01-15 | 株式会社ダイフク | Article storage facility |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004101027A (en) * | 2002-09-06 | 2004-04-02 | Matsushita Electric Ind Co Ltd | Clean stocker |
| JP2004269214A (en) * | 2003-03-11 | 2004-09-30 | Daifuku Co Ltd | Purified air circulating type storage equipment |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1096332A (en) * | 1996-09-20 | 1998-04-14 | Mitsubishi Electric Corp | Clean room |
| CN1177711A (en) * | 1996-09-24 | 1998-04-01 | 三菱电机株式会社 | Purification room |
| JP3818434B2 (en) | 2001-09-10 | 2006-09-06 | 株式会社ダイフク | Purified air storage system |
| JP2006021913A (en) | 2004-07-09 | 2006-01-26 | Tohoku Univ | Clean stocker |
-
2007
- 2007-01-10 JP JP2007002545A patent/JP4378652B2/en not_active Expired - Fee Related
- 2007-10-16 TW TW096138641A patent/TWI406803B/en not_active IP Right Cessation
- 2007-11-22 KR KR1020070119651A patent/KR101110541B1/en not_active IP Right Cessation
- 2007-12-25 CN CN2007101598633A patent/CN101220978B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004101027A (en) * | 2002-09-06 | 2004-04-02 | Matsushita Electric Ind Co Ltd | Clean stocker |
| JP2004269214A (en) * | 2003-03-11 | 2004-09-30 | Daifuku Co Ltd | Purified air circulating type storage equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101110541B1 (en) | 2012-03-29 |
| CN101220978B (en) | 2013-11-06 |
| CN101220978A (en) | 2008-07-16 |
| KR20080065904A (en) | 2008-07-15 |
| TW200829489A (en) | 2008-07-16 |
| JP4378652B2 (en) | 2009-12-09 |
| JP2008168983A (en) | 2008-07-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |