CN101220978B - Air purifying ventilation type article storing equipment - Google Patents
Air purifying ventilation type article storing equipment Download PDFInfo
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- CN101220978B CN101220978B CN2007101598633A CN200710159863A CN101220978B CN 101220978 B CN101220978 B CN 101220978B CN 2007101598633 A CN2007101598633 A CN 2007101598633A CN 200710159863 A CN200710159863 A CN 200710159863A CN 101220978 B CN101220978 B CN 101220978B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
- B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
- B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/02—Belt or chain conveyors
- B65G2812/02128—Belt conveyors
- B65G2812/02138—Common features for belt conveyors
- B65G2812/02158—Means preventing dust penetration
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ventilation (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
An object of the present invention is to provide a cleaned air ventilation type article storage facility that exactly discharges cleaned air toward a lower side of a clean space and maintains high cleanness of the clean space. The solution of the present invention is that an air circulating passage 40, which is formed in a surrounding state for shielding a non-article carrying-in/out portion 7 on an opposite side of the existence side of an article carrying-in/out part 5 in a traveling space 3, an upper part of the traveling space 3 and a back part of an article storing part 2 from the outside, is provided with an opening part 41 for air intake in the traveling space for taking in the cleaned air in the traveling space 3 in a state provided in a part corresponding to the non-article carrying-in/out portion 7, and an opening part 42 for air intake in the clean space 1 for taking in cleaned air in the clean space 1 in a state provided in at least a part in the longitudinal direction. In a rear part of the article storing part 2, a cleaned air ventilation means 26 for ventilating cleaned air in a part corresponding to the back part of the article storing part 2 in the air circulating passage 40 is provided.
Description
Technical field
the present invention relates to purify air be vented to from the smallpox board ground panel part side peace and quiet space in, possess in frame transverse width direction a plurality of article storing section arranged side by side, mobile article conveying device in the walking space of the front side of these article storings sections, and the article keeping frame that the article in place that are configured in the below of the article that are equivalent at least a portion in above-mentioned a plurality of article storing section are removed access unit is set up, rear portion in above-mentioned a plurality of article storing section, via air cleaning filter, with the ventilation unit that purifies air that purifies air and ventilate, by above-mentioned article storing section, to purify air in above-mentioned walking space and be arranged to and to ventilate, the place of the above-mentioned walking space corresponding in above-mentioned ground board, the article storage apparatus of the ventilated type that purifies air that the discharge that purifying air in above-mentioned walking space is expelled to the below is set up with peristome.
Background technology
Article storage apparatus as the ventilated type that purifies air as above-mentioned, in the peace and quiet space of clean room etc., purify air ventilation unit by for the article that are incorporated in article storing section via air cleaning filter, ventilation will purify air, prevent that dust is attached to article on one side, on one side custody articles.
Again, at the ground board, be not limited to the place corresponding to the walking space, place beyond this, the peristome that purifying air in peace and quiet space is expelled to the below also is set up, being vented to purifying air of ground panel part side from the smallpox board in peace and quiet space, is below being discharged to from the peristome that the discharge of discharging with peristome and ground board is set up with the place beyond peristome.This is discharged from purifies air is to be directed to the top in peace and quiet space by draught fan and circulation road, by peace and quietization, is vented to ground panel part side from the smallpox board in peace and quiet space by air cleaner.As above-mentioned, on one side the circularly purifying air, make to purify air from the smallpox board in peace and quiet space to be vented to the ground panel part side.
The non-article that have the side opposition side that the article storage apparatus of the existing ventilated type that purifies air is removed access unit at the article of walking in the space are taken out of into the place, are set in frame transverse width direction and frame up and down width a plurality of article storing section arranged side by side.Again, in the place, back that makes article storing section and be configured in place, back and outside the covering under the state of encirclement that non-article are taken out of the article storing section in place, the air draught road is formed, make as importing corresponding to purifying air in the peace and quiet space in the part in the place, top in the walking space in this air draught road (for example, referring to Patent Document 1).
In the article storage apparatus of this existing ventilated type that purifies air, the ventilation unit that purifies air makes purifying air in the corresponding part of back surface field of the article storing section in the air draught road constitute and can ventilate, take out of rear portion into the article storing section in place being disposed at non-article, the ventilation unit that purifies air that purifies air via air cleaning filter, the non-article that ventilate of purifying air are taken out of into side of taking out of into the part in the place, back in place corresponding to the non-article in the air draught road is set up.
Again, take out of by purify air ventilation unit and non-article purifying air that the ventilation unit that purifies air into side ventilated, the space of walking that arrives by article storing section makes the walking space flow to the lower side from upper side, is discharged to the below from discharging with opening.What this was discharged from purifies air and is discharged to purifying air together of below from other places, and the air cleaner on the top by being directed to peace and quiet space with draught fan and circulation road is by after peace and quietization, as purifying air, be vented to the ground panel part side from the smallpox board in peace and quiet space.
[patent documentation 1] TOHKEMY 2003-81406 communique
Summary of the invention
The problem that invention institute wish solves
In the article storage apparatus of the above-mentioned existing ventilated type that purifies air, because make the space of walking be expelled to the below from the whole amounts that purify air that upper side flows to the lower side from discharging with opening, many from discharging the amount that purifies air of discharging with peristome downwards, be expelled in the purifying air of below in peace and quiet space, become large from discharging the ratio that purifies air shared that is discharged from peristome.Therefore, can't make towards the discharge of the below that purifies air in other places and smoothly carry out, in peace and quiet space, dust is floating, the doubt that has the cleanliness factor in peace and quiet space to reduce.
The present invention is conceived to above-mentioned shortcoming, its objective is the article storage apparatus of the ventilated type that purifies air of the cleanliness factor that the discharge that purifies air that can positively carry out towards the below in peace and quiet space is provided, can highly keeps peace and quiet space.
The technological means of dealing with problems
in order to reach this purpose, the First Characteristic of the article storage apparatus of the relevant ventilated type that purifies air of the present invention consists of, purify air be vented to from the smallpox board ground panel part side peace and quiet space in, possess in frame transverse width direction a plurality of article storing section arranged side by side, mobile article conveying device in the walking space of the front side of these article storings sections, and the article keeping frame that the article in place that are configured in the below of the article that are equivalent at least a portion in above-mentioned a plurality of article storing section are removed access unit is set up, rear portion in above-mentioned a plurality of article storing section, via air cleaning filter, make the ventilation unit that purifies air that purifies air and ventilate, by above-mentioned article storing section, make to purify air in above-mentioned walking space and be arranged to and ventilate, the place of the above-mentioned walking space corresponding in above-mentioned ground board, be provided with the discharge peristome below being expelled to of purifying air that makes in above-mentioned walking space in the article storage apparatus of ventilated type that purifies air,
take out of into the place at the non-article that have the side opposition side that make above-mentioned article in above-mentioned walking space remove access unit, the place, top in above-mentioned walking space, and place, back and the outside air circulation road that forms under the state of encirclement of covering of above-mentioned article storing section, that air imports with under the state of peristome in the part of taking out of the place corresponding to above-mentioned non-article has the walking space that purifies air that will import in above-mentioned walking space, and air imports and to have air in the peace and quiet space that purifies air that will import in above-mentioned peace and quiet space with at least a portion in the longitudinally of peristome and import and form with setting under the state of peristome in peace and quiet space, the above-mentioned ventilation unit that purifies air, make purifying air in the corresponding part in field, back of the above-mentioned article storing section in above-mentioned air circulation road constitute and to ventilate.
That is, because taking out of into place, back and the outside of the place, top in place, walking space and article storing section non-article, the air circulation road covers encirclement, by the air circulation road, the space and the outside that comprise the article storage rack are covered.In the space that comprises this article keeping frame, by purifying air that the better purifying space ventilation unit is ventilated, to the space of walking, flowed to the lower side in the walking space by article storing section from upper side.Because in the walking space in the air circulation road, air imports and is set up in the part of taking out of into the place corresponding to non-article with peristome, purifying air in the walking space, its part air in the walking space imports with peristome and imports the air circulation road, and a remaining part is discharged to the below from discharging with peristome.In the peace and quiet space air of purifying air that imports the air circulation road imports when being directed into purifying air in the peace and quiet space on air circulation road with peristome, is flowed to the place, back of article storing section via the air circulation road., via air cleaning filter, by article storing section, ventilated in the walking space by the ventilation unit that purifies air purifying air that the part corresponding to the place, back of article storing section is flowed by the air circulation road.
As above-mentioned, Yi Bian because walking at least a portion that purifies air in the space is recycled by the air circulation road, can makes respectively to purify air in a plurality of article storing section and be ventilated, can make the quantitative change that purifies air below being expelled to peristome from discharge few on one side.Therefore, the discharge of the below that purifies air in other places is smoothly carried out, can positively be carried out towards the discharge that purifies air of the below in peace and quiet space.
Again, because taking out of into the place, top in place, walking space and place, back and the outside of article storing section non-article, the air circulation road covers encirclement, in the walking space, air imports and to be set up in the part of taking out of into the place corresponding to non-article with peristome, need not make the place conduct of the below that is equivalent to article storing section for the space use on air circulation road is set.Therefore, not should be noted the cooperation that the space is set of removing access unit with article, again, Yi Bian because effectively apply flexibly the place, top in the few walking space of barrier, on one side the air circulation road can be set, can make arranging easily of air circulation road.
From above-mentioned item, the discharge that purifies air positively carried out towards the below in peace and quiet space can be provided, can highly keep the cleanliness factor in peace and quiet space Yi Bian reach, can make arranging of air circulation road be easy to the to purify air article storage apparatus of ventilated type.
what the Second Characteristic of the article storage apparatus of the relevant ventilated type that purifies air of the present invention consisted of is, take out of into the place at above-mentioned non-article, a plurality of article storing section arranged side by side in frame transverse width direction set, take out of corresponding to the above-mentioned non-article in above-mentioned air circulation road and into the part in place be, being configured in above-mentioned non-article with encirclement takes out of under the state in place, back of above-mentioned article storing section in place and is formed, in above-mentioned walking space, air imports and uses peristome, be disposed at above-mentioned non-article take out of the place above-mentioned article storing section below be formed, import corresponding to air and be formed with the space, take out of the rear portion of the above-mentioned article storing section that is configured into the place at above-mentioned non-article, use filter via purifying air, the non-article that making purifies air ventilates are taken out of the ventilation unit that purifies air into side, make corresponding to the above-mentioned non-article in above-mentioned air circulation road and take out of purifying air by above-mentioned article storing section into the part in the place, back in place, be arranged to and ventilate in above-mentioned walking space.
That is, take out of by purify air ventilation unit and non-article purifying air that cleaner air package into side ventilated, to the space of walking, flowed to the lower side in the walking space by article storing section from upper side.Walking purifying air in the space, its part imports to import with peristome with air in the walking space in space and is fed to the air circulation road from being formed at air, below a remaining part is discharged to peristome from discharge.Import purifying air of air circulation road, take out of place, back into the article storing section in place by the air circulation road by being disposed at non-article, through the place, top in walking space, flow in the place, back of article storing section.Again, take out of purifying air into the place, back of the article storing section in place by the air circulation road by being disposed at non-article, its part is taken out of the ventilation unit that purifies air into side by non-article, takes out of article storing section into the place by being equipped on non-article, ventilates in the walking space.
Therefore, not only be equipped on article and take out of article storing section into the top in place, even take out of article storing section into the place for being equipped on non-article, on one side all make in a plurality of article storing section ventilations that purify air, at least a portion that purifies air in the walking space is circulated by the air circulation road.
What the 3rd feature of the article storage apparatus of the relevant ventilated type that purifies air of the present invention consisted of is, above-mentioned article keeping frame a pair of, so these above-mentioned non-article are taken out of under the state of admission adjacency to be set up in parallel, a pair of above-mentioned air circulation road in a pair of above-mentioned article keeping frame is so that take out of corresponding to above-mentioned non-article under the state of partial common in place and be formed.
That is, so because a pair of article keeping frame is taken out of under the state of admission adjacency these non-article to be set up in parallel, Yi Bian make a pair of article keeping frame that the space is set is as far as possible little, a pair of article keeping frame can be set.Again, a pair of air circulation road in a pair of article keeping frame, because the part of taking out of into the place corresponding to non-article is formed respectively, form so that take out of corresponding to non-article under the state of partial common in place, can reach attenuating that the space of a pair of air circulation road using is set and the simplification of formation.
Therefore, effectively apply flexibly limited space Yi Bian can arrange, a pair of article keeping frame that walking at least a portion that purifies air in the space is circulated by the air circulation road.
Description of drawings
Fig. 1 is the longitudinal section of the clean room in the first embodiment;
Fig. 2 is the A-A cutaway view in Fig. 1;
Fig. 3 is the B-B cutaway view in Fig. 1;
Fig. 4 is the stereogram of expression article holder; And
Fig. 5 is the longitudinal section of the clean room in the second embodiment.
The main element symbol description
1～peace and quiet space; 2～article storing section;
3～walking space; 4～article conveying device;
5～article are removed access unit; 6～article keeping frame;
7～non-article are taken out of into the place; 8～grating panel;
9～ceiling blows out section; 10～room;
11～pillar; 12～mounting support sector;
14～article holder; 15～clean room ventilation unit;
16～air blowing chamber; 17～air chamber;
18～air cleaner; 19～stream continues;
20～circulation pressure fan; 21～front filter;
22～outer conductance enters stream; 24～exhaust flow path;
25～capacity is regulated and is used baffle plate; 26～ventilation unit purifies air;
28～discharge and use peristome; 29～the three fan filter units;
30～lifting support; 31～conveyance body;
32,33～guide rail; 34～walking carriage;
35～lifting column; 36～lifting platform;
37～article transfer device; 38～access;
39～conveyance carrier; 40～air circulation road;
40a～first passage portion; 40b～alternate path part;
40c～three-way part; 43～air imports uses the space;
23～outer gas import volume is regulated and is used baffle plate;
In 41～walking space, air imports and uses peristome;
In 42～peace and quiet space, air imports and uses peristome;
27～non-article are taken out of the ventilation unit that purifies air into side.
The specific embodiment
Below based on the embodiment of the article storage apparatus that illustrates the relevant ventilated type that purifies air of the present invention.
The first embodiment
As the article storage apparatus of this ventilated type that purifies air such as Fig. 1～shown in Figure 3, be vented to from the smallpox board in the clean room 1 in peace and quiet space of ground panel part side as purifying air, possess frame transverse width direction and frame up and down width a plurality of article storing section 2 arranged side by side, the article conveying device 4 of the walking space 3 interior movements of the front side of these article storings section 2 and be equivalent to a plurality of article storing section 2 below the article that set of the place article keeping frame 6 of removing access unit 5 be set up a pair of.
A pair of article keeping frame 6, be so that the article of walking in space 3 remove access unit 5 exist side to oppose that the non-article of side are taken out of under the state of place 7 adjacency to be set up in parallel.That is a pair of article keeping frame 6 is set non-article are taken out of under the state that place 7 shares.Again, take out of into place 7 at these non-article, under the relative state of the article storing section 2 that removes that the place of the top of access unit 5 set with a side's who is being equivalent to a pair of article keeping frame 6 (lower side in Fig. 1) article, set in frame transverse width direction and frame up and down width a plurality of article storing section 2 arranged side by side.
Consist of as above-mentioned clean room 1 makes that its ground board forms by majority with passage cavernous grid (grating) floor 8, blow out section 9 from the ceiling that is formed at its ceiling and make to purify air and constitute and to ventilate to the ground panel part side.Again, at clean room 1, by room 10, around top and side, besieged space is formed, and in the space that room 10 surrounds thus, a pair of article keeping frame 6 is set.
Above-mentioned a plurality of article storing section 2 is made of the mounting support sector 12 that is supported respectively and is set up in frame above-below direction devices spaced apart by a pair of pillar 11 in vertical front and back of establishing and in front and back pair of posts 11 in frame transverse width direction devices spaced apart respectively.Again, article storing section 2 is configured as article to take under the state of being supported article by mounting support sector 12 mountings of pair of right and left.Again, each article storing section 2, but be connected as Air Flow each other each other and at the article of frame above-below direction adjacency at the article of frame transverse width direction adjacency.
Above-mentioned article storing section 2 makes can keep as article, as shown in Figure 4 as, be configured as the article holder 14 of the plate-like articles 13 of glass substrate etc. can freely be taken in.Above-mentioned article holder 14 is by the upper frame body 14a that is formed with clathrate and lower frame body 14b, make a plurality of union body 14c that upper frame body 14a and lower frame body 14b link, be set up and make in the horizontal direction the 14d of support sector of relative union body 14c wire connected to each other to be consisted of in union body 14c above-below direction devices spaced apart.Again, under the state of being supported by the 14d of each support sector mounting, make plate-like articles 13 in the above-below direction devices spaced apart and keep side by side, in top, bottom and the sidepiece of article holder 14 whole, but be configured as Air Flow.
At above-mentioned clean room 1, under the state of circularly purifying air, make purify air from the smallpox board be vented to ground panel part side clean room ventilation unit 15 be set up.This clean room ventilation unit 15 makes by the air cleaning of grating panel 8 as purifying air, and this is purified air blow out section 9 from ceiling and be configured as blowing out.
The formation of above-mentioned clean room ventilation unit 15 comprises: induction chamber 16 is arranged at the lower side of grating panel 8; Air chamber 17 is arranged at the upper side that ceiling blows out section 9; Air cleaner 18, by and be located at HEPA filter that ceiling blows out section 9 etc. and consist of; The stream 19 that continues is communicated with continue induction chamber 16 and air chamber 17; Circulation is arranged at this stream 19 that continues, at induction chamber 16 sucking actions with pressure fan 20; And front filter (pre-filter) 21, be arranged on the air exhaust end of the circulation pressure fan 20 in the stream 19 that continues.
Air in above-mentioned clean room 1 is used the draught effect of pressure fan 20 by circulation, via grating panel 8, be sucked into induction chamber 16, flows in the stream 19 that continues, and by peace and quietization, and arrives air chamber 17 by front filter 21.Again, arrive the air of air chamber 17, as by air cleaner 18 by the purifying air of peace and quietization, blow out section 9 from ceiling and blow out downwards to clean room 1.
As above-mentioned, by clean room ventilation unit 15, the air in clean room 1, by front filter 21 and air cleaner 18 by peace and quietization be recycled on one side, making purifies air blows out section 9 from ceiling and is often ventilated to grating panel 8 sides.
In the circulation of the above-mentioned stream 19 that the continues suction side with pressure fan 20, outer conductance enters stream 22 and is continued, and enters stream 22 in conductance in addition, and outer gas import volume is regulated and is set up with baffle plate (dmaper) 23.Again, use the exhaust end of pressure fan 20 in the circulation of the stream 19 that continues, exhaust flow path 24 is continued, and at this exhaust flow path 24, capacity is regulated and is set up with baffle plate 25.
Again, regulate with baffle plate 23 and capacity and regulate indivedual apertures with baffle plate 25 by regulating outer gas import volume, the airborne institute in the clean room 1 that is recycled by clean room ventilation unit 15 quantitatively and fresh air be configured as exchanging.
At the rear portion of a plurality of article storing section 2 that is equipped on above-mentioned article and removes the top of access unit 5, as via air cleaning filter, first fan filter unit (being designated hereinafter simply as a FFU) 26 of the ventilation unit that purifies air that ventilates of purifying air is set up.This FFU 26 corresponds respectively to a plurality of article storing section 2 and is equipped with.Again, although these FFU 26 diagrams are omitted, but so that under the state that the maintained plate-like articles 13 of article holder 14 that is incorporated in article storing section 2 passes through each other, make to purify air by article storing section 2, in walking space 3 and be arranged to and ventilate.
Again, take out of rear portion into the article storing section 2 in place 7 being disposed at non-article, as via air cleaning filter, the second fan filter unit (being designated hereinafter simply as the 2nd FFU) 27 that the non-article that ventilate of purifying air are taken out of into the ventilation unit that purifies air of side is set up.This 2nd FFU 27 corresponds respectively to a plurality of article storing section 2 and is equipped with.Again, these the 2nd FFU 27 the also with one FFU 26 are identical, so that under the state that the maintained plate-like articles 13 of article holder 14 that is incorporated in article storing section 2 passes through each other, by article storing section 2, make to purify air in walking space 3 and be arranged to and ventilate.
In the place of taking out of corresponding to the walking space 3 in the ground board in above-mentioned room 10 and non-article into place 7, the discharge that is expelled to the below that purifies air in walking space 3 is set up with peristome 28.This discharges with peristome 28, by at grating panel 8, plate body being set, compares with grating panel 8, is configured as aperture area diminishes.
Again, remove the place of access unit 5 corresponding to the article in the ground board in room 10, the opening that makes grating panel 8 is inaccessible with plate body, and the purifying air of the walking space 3 in room 10 is to be configured as induction chamber 16 below it from discharging to be discharged to peristome 28.
Again, for example, by making the aperture area of discharging with peristome 28 less, or take out of into the opening in the place in place 7 by the plate body obturation etc. corresponding to the non-article in the ground board, the discharge rate that can make purifying air of walking space 3 be expelled to induction chamber 16 is less.
In above-mentioned room 10, because by a FFU 26 and the 2nd FFU 27, purify air and ventilated, its pressure that purifies air uprises.To this, because by the discharge peristome 28 of ground board is set, purifying air is deflated, the pressure step-down that this purifies air.Again, by this pressure differential that purifies air, purifying air in room 10, flow from the rear side toe lateral of article storing section 2, make the space 3 of walking become flow downward (downflow) that flows to the lower side from upper side, make the floating dust such as article storing section 2 or walking space 3 be expelled to the ground board below, improve the cleanliness factor in room 10.
At a pair of article keeping frame 6, non-article are taken out of under the state that surrounds as the place, back of the place, top in place 7, walking space 3 and article storing section 2 and outside covering, air circulation road 40 is formed.air circulation road 40 is by in being disposed at non-article and taking out of the place, back of article storing section 2 in place 7, purify air to the first passage portion 40a of the linearity of upper side from lower side guiding, make thus the first passage portion 40a guiding purify air be disposed at non-article and take out of place, top into the article storing section 2 in place 7, the place, top in walking space 3, the alternate path part 40b of the linearity of the order guiding in the place, top of article storing section 2, and the three-way part 40c that the upper side from the place, back of article storing section 2 of purifying air that makes the guiding of alternate path part 40b thus is directed to the linearity of lower side consists of.
Above-mentioned the first passage portion 40a, alternate path part 40b and three-way part 40c are respectively across in the total length of frame transverse width direction a plurality of article storing section 2 arranged side by side and arrange a succession ofly.
A pair of air circulation road 40 in a pair of article keeping frame 6 is so that take out of under the state that the first passage portion 40a in place 7 shares corresponding to non-article and be formed.Again, this first passage portion 40a is disposed at non-article with encirclement and takes out of under the state in place, back of article storing section 2 in place 7 and be formed.
On a pair of air circulation road 40, in the walking space that makes respectively that purifying air in walking space 3 import, air imports with peristome 41, makes that in the peace and quiet space of the importing that purifies air outside room 10 and in clean room 1, the air importing is set up with peristome 42.
Again, in the walking space in a pair of air circulation road 40, air imports with peristome 41 respectively, is being possessed with the part of taking out of corresponding to non-article into the ground board adjacency in place.Again, air imports with peristome 41 in corresponding to the walking space in the side's (lower side in Fig. 1) of a pair of article keeping frame 6 air circulation road 40, and the air that is formed below non-article take out of that place 7 is configured article storing section 2 imports with space 43 correspondences and is formed.That is air imports with in space 43, and the part of facing the space 3 of walking imports as air in the space of walking and is configured with peristome 41.
In peace and quiet space in a pair of air circulation road 40, air imports with peristome 42, be equivalent to article remove access unit 5 above the place, back of the article storing section 2 that set of place in, the place of FFU 26 adjacency that are configured at the rear portion of article storing section 2 is set up.
An above-mentioned FFU 26 is so that be configured corresponding to the mode of ventilating that purifies air in the third part 40c in the place, back of the article storing section 2 in air circulation road 40.Again, the one FFU 26 makes walking space 3 interior the purifying air and imported with outer clean room 1 interior the purifying air in the room 10 of peristome 42 importings by air in peace and quiet space that imported with peristome 41 importings by air in the space of walking constitute via air cleaning filter and can ventilate.
Again, the 2nd FFU 27 is so that the mode of ventilating that purifies air of taking out of corresponding to the non-article in air circulation road 40 in the 40a of first in place 7 is configured.Again, the 2nd FFU 27 makes walking space 3 interior the purifying air that imported with peristome 41 importings by air in the space of walking constitute via air cleaning filter and can ventilate.
In above-mentioned room 10, by purifying air that a FFU 26 and the 2nd FFU 27 are ventilated, arrive walking space 3 by article storing section 2, make walking space 3 mobile to the lower side from upper side.Purifying air in walking space 3, its part air in the walking space imports with peristome 41 and is fed to air circulation road 40, a remaining part from discharge be discharged to peristome 28 below.Be fed to purifying air of air circulation road 40, as air in peace and quiet space import with peristome 42 be directed into the clean room 1 on air circulation road 40 interior purify air the time, flow to the place, back of article storing section 2 via air circulation road 40.Again, a FFU 26 makes purifying air of the place, back that flows to article storing section 2 be vented to article storing section 2 via air cleaning filter.Again, the 2nd FFU 27 is made non-article purifying air of taking out of that the place, back of the article storing section 2 that is set into place 7 flows by air circulation road 40 and is vented to article storing section 2 via air cleaning filter.
As above-mentioned, Yi Bian make at least a portion that purifies air in walking space 3 by air circulation road 40 circulations, can make respectively the ventilation that purifies air in a plurality of article storing section 2.
Again, article conveying device 4 makes at article and removes article holder 14 that access unit 5 moved in any conveyance of a plurality of article storing section 2, the article holder 14 that is contained in article storing section 2 is removed at article be configured as access unit 5 conveyances.
Above-mentioned article are removed access unit 5, as shown in Figure 2 as, the place below the storewide that is equivalent to frame transverse width direction a plurality of article storing section arranged side by side 2 is set respectively.Again, remove access unit 5 at each article, from article holder 14, plate-like articles 13 taken out one by one and be supplied to article handling part outside figure, plate-like articles 13 that article handling part is from then on supplied with one by one is maintained at is configured as article holder 14.
Remove access unit 5 at above-mentioned article respectively, but make the pair of right and left that article holder 14 free lifting ground mountings support lifting support 30, plate-like articles 13 can freely be loaded support ground and possesses the conveyance body 31 of a plurality of driven rollers that plate-like articles 13 that the mounting of making supports can free conveyance to be set up.Conveyance body 31 is configured between the lifting support 30 of pair of right and left, can freely insert at above-below direction for article holder 14 to be set up with taking off.
Again, remove the access 38 of access unit 5 and article handling part at the contact article, the conveyance carrier 39 that makes plate-like articles 13 remove conveyance between access unit 5 at article handling part and article is set up, and this access 38 is arranged in room 10.At access 38, via air cleaning filter, the three fan filter unit (being designated hereinafter simply as the 3rd FFU) 29 that ventilates for conveyance carrier 39 that purifies air is set up again.
Removing access unit 5 by above-mentioned article takes out plate-like articles 13 and when being supplied to conveyance carrier 39 from article holder 14 one by one, by the lifting support 30 with pair of right and left, article holder 14 is descended, conveyance body 31 enters in article holder 14, from article holder 14, a plate-like articles 13 is supported by mounting at conveyance body 31.Afterwards, support plate-like articles 13 by conveyance body 31 mounting and in 39 conveyances of conveyance carrier.By repeating this type of action, from article holder 14, plate-like articles 13 is taken out one by one, be supplied to conveyance carrier 39.
Make the plate-like articles 13 that is supplied to by above-mentioned conveyance carrier 39 remove access unit 5 one by one when article holder 14 is held by article, make article holder 14 enter under the state of conveyance body 31 mounting at the lifting support 30 by pair of right and left and support.Afterwards, conveyance body 31 makes plate-like articles 13 conveyances to by till article holder 14 retainable position, by the lifting support 30 with pair of right and left, article holder 14 is risen, and a plate-like articles 13 is held in article holder 14.By repeating this type of action, the plate-like articles 13 that is supplied to from conveyance carrier 39 is kept in article holder 14 order under above-below direction state arranged side by side one by one.
The second embodiment
In above-mentioned the first embodiment, although article keeping frame 6 is represented with the example of a pair of setting, in this second embodiment, as shown in Figure 5 as, make article keeping frame 6 with a setting.
In this article keeping frame 6, take out of into place 7 at non-article and do not set article storing section 2.Again, in the walking space in air circulation road 40, air imports with peristome 41, with the state of taking out of the ground board adjacency in place 7 at non-article under be set up.
About other consist of because and explanation omission identical with above-mentioned the first embodiment.
Other embodiment
(1) in above-mentioned the first embodiment, although represent to take out of the example that sets article storing section 2 into place 7 at non-article, also can take out of into place 7 at non-article and do not set article storing section 2 and implement.Even in this situation, as representing at above-mentioned the first embodiment, make a pair of air circulation road 40 in a pair of article keeping frame 6, form so that take out of under the state that the first passage portion 40a in place 7 shares corresponding to non-article.
(2) in above-mentioned the second embodiment, although represent to take out of the example that does not set article storing section 2 into place 7 at non-article, also can take out of into place 7 at non-article and set article storing section 2 and implement.Even in this situation, make corresponding to the non-article on air circulation road 40 and take out of the first passage portion 40a into place 7, be equipped on non-article with encirclement and take out of under the state in place, back of article storing section 2 in place 7 and form.
(3) in above-mentioned the first embodiment, although make the 2nd FFU27 correspond respectively to the article storing section 2 in the rear portion of article storing section 2 and equip, can be for a plurality of article storing section 2, the 2nd FFU27 equipment place can suitably be changed.
(4) at the above-mentioned first and second embodiment, although article keeping frame 6 is represented with example a pair of and a setting, the relevant number that article keeping frame 6 is set can suitably change.
(5) at the above-mentioned first and second embodiment, although set respectively article and remove access unit 5 being equivalent to place below frame transverse width direction a plurality of article storing section arranged side by side 2 whole, suitable place sets that article are removed access unit 5 and implements also can below the article of the part of frame transverse width direction a plurality of article storing section 2 arranged side by side.
Claims (3)
1. the article storage apparatus of the ventilated type that purifies air, purify air be vented to from the smallpox board ground panel part side peace and quiet space in, possess at article conveying device mobile in the direction of travel of article transfer device a plurality of article storing section arranged side by side, walking space at the front side of these article storings sections and the article of at least a portion in being equivalent to above-mentioned a plurality of article storing section below the article that are configured of the place article keeping frame of removing access unit be set up
At the rear portion of above-mentioned a plurality of article storing section via air cleaning filter, make the ventilation unit that purifies air that purifies air and ventilate, make to purify air by above-mentioned article storing section, in above-mentioned walking space and be arranged to and can ventilate,
In the place corresponding to the above-mentioned walking space in above-mentioned ground board, be provided with the discharge peristome below being expelled to of purifying air that makes in above-mentioned walking space in the article storage apparatus of the described ventilated type that purifies air,
non-article are being taken out of into the place, the upper field in above-mentioned walking space and place, back and the outside air circulation road that forms under the state of encirclement of covering of above-mentioned article storing section, be with above-mentioned non-article take out of the corresponding part in place have under in the walking space, air imports with the state of peristome and in peace and quiet space air import and have in peace and quiet space the air importing with at least a portion in the longitudinally of peristome and use under the state of peristome, setting forms, wherein, described non-article are taken out of place, place side and the above-mentioned article in above-mentioned walking space, and to remove access unit place side opposite, in described walking space, air imports with peristome and is used for and will purifies air from above-mentioned walking space importing, in described peace and quiet space, air imports with peristome and is used for importing from above-mentioned peace and quiet space purifying air,
The above-mentioned ventilation unit that purifies air is to make constituting and can ventilate corresponding to purifying air in the part in the place, back of the above-mentioned article storing section in above-mentioned air circulation road.
2. the article storage apparatus of the ventilated type that purifies air as claimed in claim 1, wherein take out of into the place at above-mentioned non-article, and a plurality of article storing section arranged side by side at the direction of travel of article transfer device set,
Taking out of part into the place corresponding to the above-mentioned non-article in above-mentioned air circulation road, is to surround to be configured in above-mentioned non-article and to take out of under the state in place, back of above-mentioned article storing section in place and be formed,
In above-mentioned walking space, air imports and use peristome, be configured in above-mentioned non-article take out of the place above-mentioned article storing section below be formed, be formed with the space corresponding to the air importing,
Above-mentioned non-article take out of the above-mentioned article storing section that is configured into the place the rear portion, use filter via purifying air, the non-article that making purifies air ventilates are taken out of the ventilation unit that purifies air into side, make corresponding to the above-mentioned non-article in above-mentioned air circulation road and take out of into the purifying air by above-mentioned article storing section of the part in the place, back in place, be arranged to and ventilate in above-mentioned walking space.
3. the article storage apparatus of the ventilated type that purifies air as claimed in claim 1 or 2, thus wherein be set up in parallel under a pair of state that makes these above-mentioned non-article take out of the admission adjacency of above-mentioned article keeping frame,
A pair of above-mentioned air circulation road in a pair of above-mentioned article keeping frame is so that take out of corresponding to above-mentioned non-article under the state of partial common in place and be formed.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP002545/07 | 2007-01-10 | ||
| JP2007002545A JP4378652B2 (en) | 2007-01-10 | 2007-01-10 | Purified air ventilation-type goods storage facility |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101220978A CN101220978A (en) | 2008-07-16 |
| CN101220978B true CN101220978B (en) | 2013-11-06 |
Family
ID=39630969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101598633A Expired - Fee Related CN101220978B (en) | 2007-01-10 | 2007-12-25 | Air purifying ventilation type article storing equipment |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4378652B2 (en) |
| KR (1) | KR101110541B1 (en) |
| CN (1) | CN101220978B (en) |
| TW (1) | TWI406803B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012056659A (en) * | 2010-09-07 | 2012-03-22 | Murata Machinery Ltd | Automated storage and retrieval warehouse and container of the same |
| CN102616576B (en) * | 2012-03-26 | 2014-04-16 | 深圳市华星光电技术有限公司 | Stacking equipment and air purifying system thereof |
| KR101679734B1 (en) * | 2012-08-21 | 2016-11-25 | 무라다기카이가부시끼가이샤 | Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas |
| CN105775534B (en) * | 2016-05-26 | 2017-12-26 | 新昌县沃克工具有限公司 | Self-cleaning dustless storage room |
| JP6631446B2 (en) * | 2016-09-09 | 2020-01-15 | 株式会社ダイフク | Article storage facility |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1177711A (en) * | 1996-09-24 | 1998-04-01 | 三菱电机株式会社 | Purification room |
| CN1177709A (en) * | 1996-09-20 | 1998-04-01 | 三菱电机株式会社 | Punification room |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3818434B2 (en) | 2001-09-10 | 2006-09-06 | 株式会社ダイフク | Purified air storage system |
| JP4265179B2 (en) * | 2002-09-06 | 2009-05-20 | パナソニック株式会社 | Clean stocker |
| JP2004269214A (en) * | 2003-03-11 | 2004-09-30 | Daifuku Co Ltd | Purified air circulating type storage equipment |
| JP2006021913A (en) | 2004-07-09 | 2006-01-26 | Tohoku Univ | Clean stocker |
-
2007
- 2007-01-10 JP JP2007002545A patent/JP4378652B2/en not_active Expired - Fee Related
- 2007-10-16 TW TW096138641A patent/TWI406803B/en not_active IP Right Cessation
- 2007-11-22 KR KR1020070119651A patent/KR101110541B1/en not_active IP Right Cessation
- 2007-12-25 CN CN2007101598633A patent/CN101220978B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1177709A (en) * | 1996-09-20 | 1998-04-01 | 三菱电机株式会社 | Punification room |
| CN1177711A (en) * | 1996-09-24 | 1998-04-01 | 三菱电机株式会社 | Purification room |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200829489A (en) | 2008-07-16 |
| CN101220978A (en) | 2008-07-16 |
| KR20080065904A (en) | 2008-07-15 |
| JP4378652B2 (en) | 2009-12-09 |
| JP2008168983A (en) | 2008-07-24 |
| TWI406803B (en) | 2013-09-01 |
| KR101110541B1 (en) | 2012-03-29 |
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