JP3818434B2 - Purified air storage system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a storage facility for storing an article such as a liquid crystal display element or a semiconductor product in a clean environment with little dust, and more specifically, an outside air in a state provided with an opening for taking in / out the article and an outside air intake. An installation space that is partitioned and formed in a shielded state is provided, and a shelf body provided with a plurality of storage units arranged in the vertical direction with storage spaces for storing articles in the installation space, and the front surface of the shelf body An article carrying means for carrying the article between the opening for carrying in / out the article and the plurality of storage units, and a back side formed at a back side portion of the shelf body A purification air ventilation path and a front-side purification air ventilation path where the article conveying means is arranged at the front side of the shelf main body are provided in a state of communicating with each other through a communication path at the lower end of the shelf main body. Air purification filter A plurality of purified air blowing units equipped with a blower sucks air in the back side purification air ventilation path from the back side to the front side with respect to the storage spaces of the plurality of storage parts, respectively. in a state where ventilating cleaning air toward said installed on the back side of the shelf body, the ventilation of the serial plurality of clean air blowing unit, the front-side cleaning air ventilation passage and said back-side cleaning air ventilation passage The present invention relates to a purified air ventilation type storage facility in which an exhaust part for discharging a part of the purified air circulated through the outside of the installation space is formed at a lower end part of the shelf body .
[0002]
[Prior art]
In the purified air ventilation type storage facility having the above-described configuration, conventionally, as shown in, for example, Japanese Patent Laid-Open No. 6-345206, a plurality of purified air blowing units installed on the back side of the shelf main body are used for back side purification. The air in the air ventilation path is sucked into the storage space of the plurality of storage units, and purified air is passed from the back side to the front side of each of the storage spaces. Circulation ventilation is provided to the back side purification air ventilation path through the front side purification air ventilation path where the means is provided and the communication path formed in the lower part of the shelf body. A part of the circulated air is supplied to the outside of the apparatus through an outlet formed at the lower end of the shelf body and an opening for carrying in / out the article to / from the outside. It is configured to be discharged.
In addition, this storage facility is configured to be installed in a clean room, and a clean air blown downward from the ceiling in the clean room through the outside air intake formed in the upper end of the back side purification air ventilation path. It is configured to take in the air.
[0003]
[Problems to be solved by the invention]
In the conventional configuration, for example, fine dust generated by the conveying operation of the article conveying means by passing purified air through the plural purified air blowing units as described above while circulating the air as described above. Etc. and fine dust floating in the air is removed, and the storage space of each storage part where articles are stored is always supplied with purified air so that a clean environment with little dust is achieved. I have to.
[0004]
However, in the above conventional configuration, the purified air is ventilated by the plurality of purified air blowing units, and the air ventilated from all the purified air blowing units is the front side purification air ventilation path, that is, the article conveying means. Since the air is gathered and circulated in the moving space, the internal air pressure inside the front side purification air ventilation path may increase. For example, if the air volume adjustment amount of each of the plurality of purified air blowing units is set to be a little larger, the internal air pressure inside the front side purification air ventilation path where those supply air gathers becomes too high. For example, there is a possibility that a large amount of air flows out of the apparatus through the opening for carrying in / out the article opened for carrying in / out the article. In particular, when the number of storage units in the shelf body is increased in order to increase the amount of stored articles, the amount of external exhaust air as described above increases. As described above, when a large amount of air flows out of the apparatus through the opening for carrying in / out the article, there is a disadvantage that dust adhering to the external apparatus is wound up in the air, and improvement has been desired. For example, if it is installed in a clean room, the flow of purified air blown downward from the ceiling of the clean room may be disturbed to cause turbulence, and dust may rise.
[0005]
The present invention has been made paying attention to such a point, and the purpose thereof is, for example, an opening for carrying in / out the article as described above even when the number of storage units in the shelf body is increased. The point is to provide a storage facility of purified air ventilation type that can avoid a large amount of air flowing out of the apparatus through the section.
[0006]
[Means for Solving the Problems]
According to the first aspect, the installation space that is partitioned and formed in the outside air shielding state with the opening for taking in and out the article and the outside air intake is provided, and the storage space for storing the article is provided in the installation space. shelf body with a state arranged a plurality of storage portions in the vertical direction, and, located on the front side of the shelf body, the article transport between the said article unloading needful openings and the plurality of accommodating portions And a front side purification in which the article conveyance means is disposed in the front side of the shelf main body. use air ventilation passage is the provided in a state of communicating with each other at the communicating passage of the lower end of the shelf body, a plurality of purified air blowing unit with an air purifying filter and blower, said back-side cleaning air ventilation passage Multiple air storage by sucking in air Against husband in the housing space people, with the ventilating cleaning air toward the front side from the back side, placed on the back side of the shelf body, the ventilation of the serial plurality of purified air blower unit, Purification in which an exhaust part for discharging a part of the purification air circulated through the front side purification air ventilation path and the back side purification air ventilation path to the outside of the installation space is formed at the lower end of the shelf body In air-ventilated storage facilities,
An intake room is provided below the grating floor in the clean room.
An air chamber chamber is formed above the ceiling surface of the clean room,
The air in the clean room is sucked by the ventilation fan through the space and the circulation path in the suction room, and the sucked air passes through the chamber room and passes through the air filter provided on the ceiling surface of the clean room. Configured to be blown downward toward the
A cover body that covers the installation space so as to partition and form an outside air shielding state is provided through an insertion hole formed in the grating floor,
A partition member that divides the back side purification air ventilation path into an upper ventilation region located on the upper side and a lower ventilation region located on the lower side is provided below the grating floor;
The outside air intake is provided at a location corresponding to a lower end side location below the grating floor in the upper ventilation region,
Each storage provided corresponding to the upper ventilation area and the upper ventilation area by taking in air outside the installation space from the outside air inlet by the ventilation operation of each purified air blowing unit provided corresponding to the upper ventilation area. Ventilate the front side purification air ventilation path through the section,
Due to the ventilation operation of each of the purified air blowing units provided corresponding to the lower ventilation region, a part of the purified air that is ventilated to the front-side purification air ventilation path is transferred to the lower ventilation region and its Circulating and ventilating the front-side purification air ventilation path through the storage portions provided corresponding to the lower ventilation areas, and removing the remaining part of the purification air to be ventilated through the front-side purification air ventilation path It is configured to be discharged out of the installation space through the exhaust part,
A part of the purification air circulated through the front side purification air ventilation path and the back side purification air ventilation path is sucked by the ventilation of the plurality of purified air blowing units, and discharged outside the installation space. A ventilating means for exhaust is provided at the location.
[0007]
That is, the exhaust ventilation means sucks a part of the purification air circulated through the front side purification air ventilation path and the back side purification air ventilation path by the ventilation of the plurality of purification air blowing units. It discharges to the discharge location outside the installation space. Then, when the air ventilated by the plurality of purified air blowing units is collected and circulated through the front side purification air ventilation path, the internal air pressure inside the front side purification air ventilation path becomes high. If so, the exhaust air ventilation means lowers the internal air pressure inside the front-side purification air ventilation path by sucking a part of the purification air circulated and flowing and discharging it to the discharge location outside the installation space. Therefore, a large amount of air can be prevented from flowing out of the apparatus through the opening for carrying in / out the article.
[0008]
Therefore, for example, when the air volume adjustment amount of each of the plurality of purified air blowing units is set slightly larger than the appropriate value, or in order to increase the storable number of articles, the storage portion of the shelf body Even if the number of the air is increased, the internal air pressure inside the air passage for purification on the front side is suppressed from increasing, and a large amount of air passes through the opening for carrying in / out the goods. It has become possible to provide a storage facility of purified air ventilation type that can avoid the disadvantage of flowing out.
In addition, the back side purification air ventilation path is vertically divided by a partition member, and air outside the installation space is taken in from the outside air intake by the ventilation operation of each purified air blowing unit provided corresponding to the upper ventilation region. Thus, the air is passed through the upper ventilation region to the front-side purification air ventilation path through the storage portions provided corresponding to the upper ventilation region. On the other hand, by the ventilation operation of each of the purified air blowing units provided corresponding to the lower ventilation region, a part of the purified air that is ventilated through the front-side purification air ventilation path is passed through the lower ventilation region. Circulation ventilation is performed through the storage portions provided corresponding to the lower ventilation regions to the front-side purification air ventilation path.
Since the remaining part of the purification air that is ventilated through the front side purification air ventilation path is discharged out of the installation space, each purified air blowing unit provided corresponding to the upper ventilation region It is possible to prevent the air ventilated by the ventilating operation from staying in the front side purification air ventilation path and increasing the internal pressure of the internal space.
For example, when the number of storage parts is increased in order to increase the storage capacity, all the purified air that is ventilated to the front side purification air ventilation path by all the purified air blowing units is used for the back side purification. If it is configured to circulate and flow to each purified air blowing unit through the air ventilation path, the vertical ventilation path in the back side purification air ventilation path becomes longer and the ventilation resistance increases accordingly, and the air pressure in the installation space is high. However, as described above, each purified air blowing unit provided corresponding to the lower ventilation region is circulated and ventilated, and for each purified air blowing unit provided corresponding to the upper ventilation region, By ventilating the air taken from the outside air intake after being discharged out of the installation space, it is possible to avoid increasing the air pressure in the installation space, and all Is supplied enough air to clean the air blower unit, it is possible to ventilate sufficiently cleaning air to each compartment.
[0009]
According to a second aspect of the present invention, in the first aspect, the exhaust ventilation means is configured to be capable of changing and adjusting the ventilation amount.
[0010]
That is, since the exhaust ventilation means can change and adjust the ventilation amount, for example, the internal air pressure inside the front side purification air ventilation path changes according to the use situation etc. by changing and adjusting the ventilation amount. Even in such a case, it is possible to maintain an appropriate state by always changing to an appropriate internal air pressure, and a suitable means for carrying out claim 1 can be obtained.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the purified air ventilation type storage facility according to the present invention will be described with reference to the drawings.
FIG. 1 shows a storage facility of purified air ventilation type installed in a clean indoor space with little dust for manufacturing semiconductor products, liquid crystal display elements, and the like. In-process products such as those mentioned above and semi-finished products in the middle of production must be stored in an environment where there is little dust, such as fine dust. The articles are stored in a clean space with little dust.
[0015]
The installation space in which the storage facility is installed will be described. As described above, the chamber in which the manufacturing apparatus and the transfer apparatus for the product as described above are installed is configured as a so-called clean room, and the clean room R1. The floor portion is formed in a mesh-like grating floor 1 in which a large number of ventilation holes are formed, and an intake room R2 in which an intake space Q is formed is provided below the grating floor 1. As shown in FIG. 2, the air in the clean room R1 is sucked by the ventilation fan F through the space in the intake room R2 and the circulation path Q, and the sucked air is air formed above the ceiling surface 2 of the clean room R1. Via the chamber 3, an air filter comprising, for example, a HEPA filter provided on the ceiling surface 2 of the clean room R 1. After being cleaned through terpolymers 4, it is configured to be supplied balloon down towards the clean room R1. Accordingly, the air in the clean room R1 is circulated through the path as described above, and the purified air is always supplied in a state where the air is blown downward from the ceiling surface 2 to maintain a high clean state. It has become.
[0016]
The storage facility is installed in a state of being placed on the floor portion 5 in the air intake room R2, and is inserted through the insertion hole 6 formed in the grating floor 1 and close to the ceiling surface 2 of the clean room R1. Thus, it is formed so as to be long in the vertical direction, and is configured to increase the storable number of articles as much as possible.
[0017]
Next, the configuration of the storage facility will be described.
As shown in FIGS. 2, 3, and 4, the substantially box-shaped cover body 7 covering the outer peripheral portion forms an installation space that is partitioned in the outside air shielding state, and the partition formation is performed in the outside air shielding state. A pair of shelf bodies 9A, 9B provided with a plurality of storage portions 8 for storing articles C in a state of being arranged in the vertical direction and the horizontal direction in the installed space are arranged in a horizontal direction at a predetermined interval. In addition, a stacker crane 10 serving as an article conveying means for conveying articles between the plurality of storage units 8 and the conveyor device 11 described later is disposed in an intermediate portion between the pair of shelf main bodies 9A and 9B. Yes. This stacker crane 10 is moved on a traveling rail 10a installed on the floor surface, and is guided along a guide rail 10b installed on the ceiling at the upper end portion thereof, and can move in a lateral direction. A transfer device 10d for transferring an article between the plurality of storage units 8 and between a conveyor device 11 described later is provided to be movable up and down.
Then, as shown in FIG. 2, the article C is received from the stacker crane 10 using a part of the plurality of storage portions 8 of the one shelf body 9A, and the article carrying in / out formed on the cover is carried out. A conveyor device 11 for conveying the article C through the opening K is provided.
[0018]
Each shelf body 9A, 9B is a side where they face each other, that is, the stacker crane 10 side is the front side, and the opposite side is the back side. Between the shelf bodies 9A, 9B and the cover body 7, back side purification air ventilation paths L (hereinafter referred to as back side ventilation paths) are formed, respectively, and the front surfaces of the respective shelf bodies 9A, 9B. A front side purification air ventilation path M (hereinafter referred to as a front side ventilation path), which is a space in which the stacker crane 10 is provided, is formed at the side portion.
[0019]
And the front side of each said storage part 8 is an open state in order to put in and take out goods C by the stacker crane 10, and as shown in the figure, the back side side ventilation | gas_flowing is carried out to the back side of each said storage part 8. A fan filter unit as a plurality of purified air blowing units that sucks air in the path L and passes purified air from the back side toward the front side in the storage spaces of the plurality of storage units 8 respectively. 12 are installed respectively.
As shown in FIG. 5, the fan filter unit 12 includes an air purification filter 14 that cleans air in a support case 13, and a motor-driven blower 15 that ventilates air from the back side toward the front side. By sucking the air in the back side ventilation passage L by the blower 15 and venting the air from the back side to the front side of the storage space of the storage unit 8 respectively. The air purified by removing dust such as fine dust contained in the passing air by the air purification filter 14 is supplied to the storage space of the storage unit 8. Each of the plurality of fan filter units 12 is configured to be able to change and adjust the air flow rate by changing and adjusting the rotational speed of each of the blowers 15.
[0020]
As shown in FIG. 2, the pair of back-side ventilation paths L includes an upper ventilation area L <b> 1 that positions the back-side ventilation paths L on the upper side and a lower ventilation area L <b> 2 that is positioned on the lower side, respectively. A partition member 16 is provided, and an outside air intake port 17 is formed in each of the intermediate portions of the side surfaces of the cover body 7 located on both sides in the shelf arrangement direction. And each outside air intake 17 is provided in the location corresponding to the lower end side location of the said upper side ventilation area | region L1 of a pair of back part side ventilation path L, respectively. Further, at the lower end of each of the shelf main bodies 9A and 9B, a communication passage 18 for communicating the front side ventilation passage M and the pair of back side ventilation passages L and L, respectively, and a part of the circulating ventilation air An exhaust part 19 is formed for discharging the gas to the outside of the apparatus.
[0021]
Therefore, as shown in FIG. 6, when each fan filter unit 12 performs a blowing operation, air outside the installation space is taken in from the outside air intake port 17, and enters the upper ventilation region L <b> 1 through the upper ventilation region L <b> 1. The air is sucked into the corresponding fan filter units 12 and passes through the storage portions 8 corresponding to the fan filter units 12, and then is ventilated toward the front side ventilation path M. On the other hand, by the ventilation operation of each fan filter unit 12 provided corresponding to the lower ventilation region L2, a part of the purified air that is ventilated to the front ventilation passage M is changed to the lower ventilation region L2 and the lower ventilation region L2. Circulation is ventilated to the front side ventilation path M through the storage portions 8 provided corresponding to the side ventilation regions L2. Then, the remaining part of the purified air that is ventilated through the front side ventilation path M is exhausted outside the installation space through the exhaust unit 19. By taking in outside air as mentioned above, it can suppress that the temperature of the air in installation space raises with the heat | fever etc. which a stacker crane generate | occur | produces.
[0022]
In this storage facility, a part of the purification air circulated through the front-side ventilation path M and the back-side ventilation path L is sucked by the ventilation of the plurality of fan filter units 12, and the outside of the installation space. A forced exhaust fan 20 is provided as exhaust ventilation means for discharging to the discharge location. The forced exhaust fan 20 is configured to suck the air inside the front-side ventilation path M through the intake path 21 and discharge it into the space inside the intake room R2 as a discharge location outside the installation space.
Further, the forced exhaust fan 20 is configured so that the air flow rate can be changed and adjusted, and the internal air pressure in the installation space can be adjusted to an appropriate value by changing and adjusting the air flow rate. ing. Appropriate internal air pressure in the installation space is a state in which the pressure is slightly higher than that in the external space so that air is not exhausted through the opening and dust is not sucked from the external space through the gap.
By sucking the air inside the front side ventilation path M and discharging it to the outside of the installation space in this way, for example, the internal air pressure in the installation space becomes high and the air passes through the opening K for carrying in / out the article. It can be prevented in advance that the flow of clean air that is blown out vigorously and blown downward in the clean room R1 is disturbed, or that dust adhering to an external device is blown into the air.
[0023]
[Another embodiment]
Hereinafter, other embodiments are listed.
[0026]
(3) In the above embodiment, the exhaust ventilation means is exemplified so that the ventilation amount can be changed and adjusted. However, the present invention is not limited to such a configuration, and the ventilation operation is performed with a predetermined constant value. It is good also as composition to do.
[0027]
(4) In the above embodiment, a stacker crane is exemplified as the article transporting means, but the invention is not limited to a stacker crane. A conveying device provided with an article transfer device that can be freely transferred between each storage unit and a container device for unloading on the elevator table so as to be movable along the width direction. It can be implemented in various forms.
[0028]
(5) In the above embodiment, the pair of shelf main bodies are provided to face each other. However, the present invention is not limited to such a configuration, and only one shelf main body may be provided. The present invention can be applied to any configuration in which a back-side purification air ventilation path is formed at the back side of the rack and a front-side purification air ventilation path is formed at the front side of the shelf body. Further, the shelf body is not limited to a configuration in which a plurality of storage units are provided in parallel in the vertical direction and in the horizontal direction, and may be provided in a state of being arranged in a row in the vertical direction. Can be implemented.
[Brief description of the drawings]
[Fig. 1] Side view showing the installation state of the storage facility [Fig. 2] Side view showing the configuration of the storage facility [Fig. 3] Plan view showing the configuration of the storage facility [Fig. 4] Front view showing the configuration of the storage facility [ FIG. 5 is a diagram showing the configuration of a fan filter unit. FIG. 6 is a diagram showing the flow of air.
8 Storage portions 9A, 9B Shelf body 10 Article conveying means 12 Purified air blowing unit 14 Air purifying filter 15 Blower 16 Partition member 17 Outside air intake 20 Exhaust ventilation means K Opening L Back side purification air ventilation path L1 Upper ventilation area L2 Lower ventilation area M Front air purification air ventilation path

Claims (2)

An installation space is provided that is partitioned into an outside air shielding state with an opening for loading and unloading articles and an outside air intake port.
In the installation space, a shelf body provided with a plurality of storage units provided with storage spaces for storing articles in a vertically aligned state, and the opening for carrying in / out the article located on the front side of the shelf body Article conveying means for conveying an article between the unit and the plurality of storage units is provided,
The back side purification air ventilation path formed in the back side portion of the shelf main body, and the front side purification air ventilation path in which the article conveying means is arranged in the shelf main body front side portion, Provided in a state of communicating with each other in the communication path at the lower end ,
A plurality of purified air blowing units including an air purification filter and a blower suck the air in the back side purification air ventilation path from the back side to each of the storage spaces of the plurality of storage units. in a state where ventilating cleaning air toward the part side, it is installed in the back side of the shelf body,
An exhaust section for discharging a part of the purification air circulated through the front side purification air ventilation path and the back side purification air ventilation path to the outside of the installation space by the ventilation of the plurality of purified air blowing units. Purified air ventilation storage equipment formed at the lower end of the shelf body ,
An intake room is provided below the grating floor in the clean room.
An air chamber chamber is formed above the ceiling surface of the clean room,
The air in the clean room is sucked by the ventilation fan through the space and the circulation path in the suction room, and the sucked air passes through the chamber room and passes through the air filter provided on the ceiling surface of the clean room. Configured to be blown downward toward the
A cover body that covers the installation space so as to partition and form an outside air shielding state is provided through an insertion hole formed in the grating floor,
A partition member that divides the back side purification air ventilation path into an upper ventilation region located on the upper side and a lower ventilation region located on the lower side is provided below the grating floor;
The outside air intake is provided at a location corresponding to a lower end side location below the grating floor in the upper ventilation region,
Each storage provided corresponding to the upper ventilation area and the upper ventilation area by taking in air outside the installation space from the outside air inlet by the ventilation operation of each purified air blowing unit provided corresponding to the upper ventilation area. Ventilate the front side purification air ventilation path through the section,
Due to the ventilation operation of each of the purified air blowing units provided corresponding to the lower ventilation region, a part of the purified air that is ventilated to the front-side purification air ventilation path is transferred to the lower ventilation region and its Circulating and ventilating the front-side purification air ventilation path through the storage portions provided corresponding to the lower ventilation areas, and removing the remaining part of the purification air to be ventilated through the front-side purification air ventilation path It is configured to be discharged out of the installation space through the exhaust part,
A part of the purification air circulated through the front side purification air ventilation path and the back side purification air ventilation path is sucked by the ventilation of the plurality of purified air blowing units, and discharged outside the installation space. Purified air ventilated storage facility with exhaust ventilation means to discharge to the location.   The purified air ventilation type storage facility according to claim 1, wherein the exhaust ventilation means is configured to be able to change and adjust the ventilation volume.

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