TW200829489A - Cleaned air ventilation type article storage facility - Google Patents
Cleaned air ventilation type article storage facility Download PDFInfo
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- TW200829489A TW200829489A TW096138641A TW96138641A TW200829489A TW 200829489 A TW200829489 A TW 200829489A TW 096138641 A TW096138641 A TW 096138641A TW 96138641 A TW96138641 A TW 96138641A TW 200829489 A TW200829489 A TW 200829489A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
- B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
- B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/02—Belt or chain conveyors
- B65G2812/02128—Belt conveyors
- B65G2812/02138—Common features for belt conveyors
- B65G2812/02158—Means preventing dust penetration
Abstract
Description
200829489 九、發明說明： 【發明所屬之技術領域】 本發明係有關於在淨化空氣從天花板部被通風至地板 部側的清淨空間内，具備在架橫向寬度方向並列的複數的 物品收納部、在這些物品收納部的前方侧的行走空間内移 動的物品搬送裝置、以及被配置在相當於上述複數的物品 .收納部中的至少—部份的物品的下方的場所的物品搬出入 部的物品保管架係被設置，在上述複數的物品收納部的後 部，經由空氣淨化用過濾器、將淨化空氣通風的淨化空氣 通風襄置，係通過上述物品收納部、在上述行走空間内將 淨化空氣通風般被設置，在上述地板部中的上述行走空間 對應的場所，將上述行走空間内的淨化空氣排出至下方的 排出用開口部被設置的澡u /_ I攸又置的乎化工軋通風式之物品保管設備。 【先前技術】 淨室般Γ淨化空氣通風式之物品保管設備係，在清 :的…間内’淨化空氣通風裝置係 納在物品收納部的物品經由空氣淨化用過據器、將淨化空 礼通風，-邊防止塵埃附著在物品，一邊保管物品。 又’在地板部’不限於對應於行走空間的場所，在此 Γ場所，將料空間㈣淨化空氣排^下方的開口 部也被設置，從清淨空間的天花板部被 ^ AV ^ ^ 门1至地板部側的 乳係’賴“開口部、以及地板部的排出用門 部以外的場所被設置的開口部广 主卜方。此被排出的 7037~9196-PF;Tungming 5 200829489 淨化空氣係，由通風風扇以及循環路導引至清淨空間的上 部，藉由空氣過濾器被清淨化，從清淨空間的天花板部被 通風至地板部側。如上述，—邊循環淨化空氣，從清淨空 間的天花板部使淨化空氣通風至地板部側。。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The article transporting device that moves in the traveling space on the front side of the article storage unit, and the article storage rack that is disposed in the article loading/unloading portion of the site below the article that is at least part of the plurality of articles and storage portions In the rear part of the plurality of article storage units, the air purifying filter and the purified air that ventilates the purified air are ventilated, and the purified air is ventilated in the walking space through the article storage unit. In the place corresponding to the above-mentioned walking space in the floor portion, the cleaning air in the traveling space is discharged to the lower discharge opening portion, and the chemically ventilated article is placed. Keep the equipment. [Prior Art] The clean room air-cleaning item storage facility is a clean room air-conditioning device that is installed in the article storage unit through the air purification device. Ventilation, while keeping dust attached to items, store items. Further, the 'floor portion' is not limited to the place corresponding to the walking space, and the opening portion of the material space (4) purifying air row is also provided in this place, and the ceiling portion of the clean space is from the AV ^ ^ door 1 to The opening of the milk system on the side of the floor portion and the opening portion of the door for the discharge of the floor portion are widely used. The 7037 to 9196-PF that is discharged; Tungming 5 200829489 It is guided by the ventilation fan and the circulation path to the upper part of the clean space, and is cleaned by the air filter, and is ventilated from the ceiling of the clean space to the floor side. As described above, the air is circulated and purified from the ceiling of the clean space. The part ventilates the purified air to the floor side.
習知的淨化空氣通風式之物品保管設備係，在行走空 間中的物品搬出人部的存在侧相反側的非物品搬出入場 所，在架橫向寬度方向以及架上下寬度方向並列的複數的 物品收納部係被配設。x，在使物品收納部的背部場所、 以及配置於非物品搬出人場所的物品收納部的背部場所和 外部遮蔽般包圍的狀態下’空氣通風路被形成，使在對應 於此空氣通風路中的行走空間的上部場所的部份中的清淨 工間内的#化空氣導人般（例如’參考專利文獻丨）。 产在此習知的淨化空氣通風式之物品保管設備中，淨化 空氣通職置錢在Μ通風路巾的物品收納部的背面場 斤 '寸應的。Ρ伤内的淨化空氣通風般被構成，在配置於非物 如搬出人~所的物品收納部的後部，使對應於空氣通風路 中的非物搬出入場所的背部場所的部份的淨化空氣姐由 空氣淨化用過據器、使淨化空氣通風的非物品搬出入：的 淨化空氣通風裝置被設置。 田淨化空氣通風裝置以及非物 -v ,, 口口 1 肌 Οι ，、ti、J 、乎 >(匕 空氣通風裝置被通風的淨化空氣係，通過物品收納部而至 4亍走空間’使行击介I* + / 丁定二間伙上方侧向下方側流動，從排出用 開口被排出至下方。士扯4 μ 卜方此被排出的淨化空氣係，和從其他妒 所被排出至下方的潘於* > 、 苟 淨玉乳一起，且藉由以通風風扇以及 7 037-9196-PF; Tu： ngming 6 200829489 循環路導引至清淨空間的上部㈣氣過濾器被清淨化後 作為淨化空氣，從清淨空間的天花板部被通風至地板部侧 [專利文獻1]日本特開2003-81406號公報 【發明内容】 [發明所欲解決之問題] 在上述習知的淨化空氣通風式之物品保管設備中，因In the conventional air-purifying air-storage article storage device, a plurality of articles are placed in the horizontal width direction and the vertical width direction of the rack in the non-article loading and unloading place on the side opposite to the side where the article is carried out in the living space. The department is assigned. x. The air passage is formed in a state in which the back portion of the article storage portion and the back portion of the article storage portion disposed in the non-article carry-out site are surrounded by the outside, and the air passage is formed in the air passage corresponding thereto. In the clean room of the upper part of the walking space, the air is inductive (for example, 'Reference Patent Literature'). In the conventional air purifying item storage device, the purifying air is placed in the back of the article storage portion of the ventilated road towel. In the rear part of the article storage unit where the non-objects are carried out, the clean air of the part corresponding to the back place of the air ventilation path is placed in the back part of the air venting path. The clean air ventilation device that is installed by the air purification use device and the non-goods that ventilate the clean air is installed. The field purifies the air ventilation device and the non-object-v, the mouth 1 muscle tendon i, ti, J, and ≥ (the air ventilating device is ventilated and purifying the air, through the article storage portion to the space) The row hitting I* + / Ding Ding two squad flowed from the side to the lower side, and was discharged from the discharge opening to the lower side. The 4 μ 卜 此 此 此 此 此 此 此 此 此 净化 净化 净化 净化 净化 净化 净化 净化The following Pan is * > , 苟 玉 玉 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The air is ventilated from the ceiling portion of the clean space to the floor portion side. [Patent Document 1] JP-A-2003-81406 SUMMARY OF INVENTION [Problems to be Solved by the Invention] The above-described conventional air-purifying articles are cleaned. In the storage equipment,
$使订走空間從上方側向下方側流動的淨化空氣的全部量 攸排出用開口排出牵下古 /AA 、 下方，攸排出用開口部向下方排出的 >r化空氣的量多，M山 主 排出至清淨空間的下方的淨化空氣中， 從排出用開口部被排出的淨化空氣所佔的比例變大。因 此無法使朝其他場所的淨化办气沾π十^ 行，在清淨空間内，塵埃二：：的排出平順地進 的疑慮。 …予“淨空間的清淨度降低 :發明係著眼於上述缺點’其目的係提供可確實地進 行朝清淨空間的下方的潘^ *門的…： 氣的排出、可高度維持清淨 :…乎度的淨化空氣通風式之物品保管設備。 [解決問題之技術手段] 為了達成此目的，有關本發明的淨化空氣 品保管設備的第一特徵構成係，在淨化空氣從： 風至地板部側的清淨空間 化反权 的it私从仏 爾在木检向寬度方向並列 的複數的物品收納部、在這些物品 空間内移動的物品搬送裝置、以及被配置在;j::的二 數的物品收納部中的物 目虽於上述複 / μ的物品的下方的場所的物 7037-9196-PF；Tungming η 200829489 品搬出入部的物品保管架被設置，在上述複數的物品收納 邻的後部，經由空氣淨化用過濾器、使淨化空氣通風的淨 化玉氣通風裝置係，通過上述物品收納部、在上述行走空 間内使淨化空氣通風般被設置，在上述地板部中的上述行 走空間對應的場所，使上述行走空間内的淨化空氣排出至 下方的排出關Π部被設置的淨化空氣通風式之物品保管 設備中， 在使在上述行走空間中的上述物品搬出入部的存在侧 相反侧的非物品搬出入場所、上述行走空間的上部場所、 以及上述物品收納部的背部場所和外部遮蔽般包圍的狀離 下被形成的空氣循環路係，將導入上述行走空間内的淨化 空氣的行走空間内空氧莫Λ田„ 亂蛉入用開口部、在對應於上述非物 品搬出入場所的部份具備的狀態下，且將導入上述清淨* 間内的淨化空氣的清淨空間内空氣導入用開口部、在其: 長方向中的至少-部份具備的狀態下被設置，上述 ί通風裝置係’使在上m循環路中的上述物品收^ 的背部場所對應的部份内的淨化空氣通風般被構成。 办亦即^為空氣循環路係使非物品搬出入場所 二間的上部場所、以及物σ # 走The total amount of the purified air that flows through the opening from the upper side to the lower side, the discharge opening is taken out, and the amount of air that is discharged downward is reduced. In the purified air discharged to the lower side of the clean space, the proportion of the purified air discharged from the discharge opening is increased. Therefore, it is impossible to dilute the purification gas to other places, and in the clean space, the dust 2:: discharges smoothly into doubt. ...to the "decrease in the cleanliness of the clean space: the invention focuses on the above-mentioned shortcomings", the purpose of which is to provide a pan-gate that can be reliably moved toward the clean space...: The discharge of gas can be highly maintained and cleaned: [Technical means for solving the problem of air venting] [Technical means for solving the problem] In order to achieve the object, the first characteristic structure of the purified air product storage device according to the present invention is that the clean air is cleaned from the wind to the floor side. It is a plurality of article storage units that move in the width direction, and an article transport device that moves in the space of the article, and a plurality of article storage units that are disposed in the j:: In the article 7037-9196-PF; the Tungming η 200829489 article loading and unloading part storage item is installed in the place below the above-mentioned item, and the object is stored in the rear part of the above-mentioned plural items. A purifying and purifying ventilation device for ventilating the purified air by the filter, and the ventilating air is ventilated in the walking space by the article accommodating portion In the space corresponding to the traveling space in the floor portion, the purified air in the traveling space is discharged to the clean air ventilating article storage device provided in the lower discharge port, and is placed in the walking space. The non-article loading and unloading place on the opposite side to the side where the article carrying-in/out portion is present, the upper portion of the traveling space, and the air-circulating path formed by the back portion of the article storage portion and the outside of the article storage portion are introduced. In the walking space of the clean air in the living space, the air ventilating space is opened in a portion corresponding to the non-object loading and unloading place, and is introduced into the clean* room. The air introduction opening in the clean space of the clean air is provided in a state in which at least a part of the long direction is provided, and the il ventilation device is configured to 'receive the article in the upper m circulation path The purified air in the corresponding part of the place is ventilated. It is also the air circulation system that allows non-goods to move out of the place, the upper part of the two places, and the object σ#
^ , 、、σ的背部場所和外部遮U 般包圍，由空氣循環路，可使包含物品 = 部遮蔽…含此物品保管架的空間内，由淨= 卜 裝置被通風的淨化空氣係，通過物品收納部至行二風 使仃走空間從上方側向下方側流動。因為 ：：中 的行走空間内空氣導入用開口部 …循衣路中 ’、對應於非物品搬出入 7037-9196-PF;Tungining 8 200829489 « & 場所的部份被設置，行走空間内的淨化空氣係，其一部份 從行走空間内空氣導入用開口部導入空氣循環路，殘餘的 一部份從排出用開口部被排出至下方。導入空氣循環路的 淨化空氣係，從清淨空間内空氣導入用開口部導入至空氣 循環路的清淨空間内的淨化空氣的同時，經由空氣循環路 而被流動至物品收納部的背部場所。由空氣循環路在對應 於物品收納部的背部場所的部份被流動的淨化空氣係，由 淨化空氣通風裝置經由空氣淨化用過濾器，通過物品收納 • 部，在行走空間内通風。 如上述，因為一邊使行走空間内的淨化空氣的至少一 部份由空氣循環路被循環，一邊可在複數的物品收納部分 別使淨化空氣被通風，可使從排出用開口部排出至下方的 淨化空氣的量變少。因此，可使朝其他場所中的淨化空氣 的下方的排出平順地進行，可確實地進行朝清淨空間的下 方的淨化空氣的排出。 又，因為空氣循環路係使非物品搬出入場所、行走空 間的上部場所、以及物品收納部的背部場所和外部遮蔽般 包圍，行走空間内空氣導入用開口部係在對應於非物品搬 出入場所的部份被設置，不需使相當於物品收納部的下方 的場所作為為了設置空氣循環路的空間使用。因此，不需 注意和物品搬出入部的設置空間的配合，又，因為一邊有 效地活用障礙物少的行走空間的上部場所，可一邊設置空 氣循環路，可使空氣循環路的設置容易。 從上述事項，達到可提供一邊確實地進行朝清淨空間 7037-9196-PF;Tungming 9 200829489 . 的下方的淨化空氣的排出、可古声雜4± 度，可使空氣循广& 间又、准持清淨空間的清淨 孔痛％路的設置容易的淨化空氣通風 保管設備。 二虱通風式之物品 有關本I明的淨化空氣通風式之物品 特徵構成係，在上H、非l 什G叹備的弟二 a、 逃非物品搬出入場所，在架橫向穿声古 向並列的複數的物σ从見度方 物叩收納部被配設，對應於上 路中的上述非物品搬出 二乳猶壤 述非物品搬出入場所的知、° 1係’ ^包圍配置於上 Κ入琢所的上述物品收納部的背部場 下被形成，上述行走空間内空氣導入用開 ㈣ 於上述非物品搬出入 糸在配置 ®八豕所的上逑物品收納部的下 成、對應於空氣導入用空 ^ 锣私； 間被形成，在上述非物品搬出入 二广配置的上述物品收納部的後部，經由淨化空尚 使淨化空氣通風的非物品搬出入侧 二 置係，使對應於上述空氣循環路中的上述非物品= %所的背部場所的部份的淨 在上述行走空間内通風般被設置風通過“物品收納部、 亦即，由淨化空氣通風裝置以及非物品搬出入侧的淨 化空氣裝置被通風的淨化空氣係’通過物品收納部至行走 空；’使行走空間從上方侧向下方側流動。行走空間内； 淨化空氣係’其—部份從形成於空氣導人心間的行走* 間内空氣導入用開口部被導入至空氣循環路，殘餘的一部 份從排出用開口部被排出至下方。導入空氣循環路的淨化 空乳係’由空氣循環路通過配置於非物品搬出入場所的物 品收納部的背部場所，經過行走空間的上部場所，在物品 7037-9196-PF;Tungming 10 200829489 收納部的背部場所流動。又，由空氣循環路通過配置於非 物品搬出入場所的物品收納部的背部場所的淨化空氣係， 2-部分由非物品搬出入側的淨化空氣通風裝置，通過配 设於非物品搬出入場所的物品收納部，在行走空間内通風。 A因此，不僅配設於物品搬出入場所的上部的物品收納 心即使料配設於非物品搬出人場所的物品收納部，一 邊在複數的物品收納部全部使淨化空氣通風，可* 間内的淨化空氣的至少—部分由空氣循環路循環。工 2本發明的淨化空氣通風式之物品保管設備的第三 上述物品保管架的-對係，使這些上述非物 場所以鄰接的狀態下並列設置，一對的上述物品 的一對上迷空氣循環路係，以使對應於上述非物 时搬出入場所的部份共用的狀態下被形成。 入^即’因為物品保管架的一對係’使這些非物品搬出 “以鄰接的狀態下並列設置’ 一邊使— 加 又置玉間盡置小，可設置一對物品保管架。又， 品保管架中的一對空氣循環路 搬屮入θ π 局不使對應於非物品 所的部份分別形成，以使對應於非物品搬出入場 心共用的狀態下形成’可達到設置—對空 用的空間的減低以及構成的簡單化。 ’、衣 因此，可攻置一邊有效地活用有限的处 _ 空間内的淨化空氣的至少一部分由空 二^°行走 物品保管帛。 4麵判環的-對 7〇37-9196-PF；Tungming 200829489 【實施方式】 以下基於ϋ tf說明有關本發明的淨化空氣通風式之物 品保管設備的實施例。 [第一實施例]^ , , , σ The back of the place and the external cover are surrounded by U, and the air circulation path can make the included items = part of the shelter... The space containing the storage rack of this item is passed by the clean air system that is ventilated by the net The article storage unit to the second wind causes the walking space to flow from the upper side to the lower side. Because:: the opening of the air in the walking space in the middle of the road...the middle of the road, corresponding to the non-objects moving in and out 7037-9196-PF;Tungining 8 200829489 « & part of the place is set, the purification in the walking space In the air system, a part of the air is introduced into the air circulation path from the air introduction opening in the walking space, and a remaining portion is discharged to the lower side from the discharge opening. The purified air introduced into the air circulation path is introduced into the back space of the article storage unit via the air circulation path while being introduced into the clean space in the clean space of the air circulation path from the air introduction opening in the clean space. The purified air system in which the air circulation path flows in the portion corresponding to the back portion of the article storage portion is ventilated in the walking space by the air purifying device through the air purifying filter through the article storage portion. As described above, since at least a part of the purified air in the traveling space is circulated by the air circulation path, the purified air can be ventilated in the plurality of article storage portions, and can be discharged from the discharge opening to the lower side. The amount of purified air is reduced. Therefore, the discharge to the lower side of the purified air in other places can be smoothly performed, and the discharge of the purified air below the clean space can be surely performed. In addition, the air circulation path is such that the non-articles are moved in and out of the place, the upper part of the walking space, and the back of the article storage unit are surrounded by the outside, and the air introduction opening in the walking space is associated with the non-object moving in and out. The part is provided so that the space below the article storage unit does not need to be used as a space for installing the air circulation path. Therefore, it is not necessary to pay attention to the cooperation with the installation space of the article loading and unloading portion, and the air circulation path can be provided while the air circulation path can be easily installed, because the upper portion of the walking space with less obstacles can be effectively utilized. From the above matters, it is possible to provide a clean air discharge at the bottom of the clean space 7037-9196-PF; Tungming 9 200829489. The air can be circulated and the sound can be 4± degrees. It is easy to clean air ventilation storage device by setting of clear hole pain % road of clear space. Second ventilated items related to the characteristics of the air-air ventilated items of this I, in the upper H, non-l 什 sigh of the second brother, a escaping non-objects moving into and out of the place, in the horizontal direction of the frame The parallel object σ is arranged from the visibility object storage unit, and the non-articles in the road are carried out, and the non-objects are moved out of the place. The back of the article storage unit of the entrance is placed in the back of the article, and the air introduction in the walking space is opened (4) in the lower part of the storage item of the placement of the non-articles, and the air is corresponding to the air. In the rear part of the article storage unit in which the non-articles are transported into the second and wide places, the non-articles that ventilate the purified air are moved into and out of the second side by the purifying air, so as to correspond to the above-mentioned In the air circulation path, the portion of the back portion of the non-item=% is ventilated in the walking space, and the wind is passed through the "item storage portion, that is, the air-purifying device and the non-item are removed. The purified air device on the side is ventilated and cleaned by the article storage portion to the walking space; 'the walking space flows from the upper side to the lower side. The inside of the walking space; the purified air system' is partially formed from the air. The inter-indoor air introduction opening is introduced into the air circulation path, and the remaining part is discharged to the lower side from the discharge opening. The purified empty milk system that is introduced into the air circulation path is disposed by the air circulation path. The back site of the article storage unit where the non-articles are moved in and out of the place passes through the upper part of the walking space, and flows through the back of the article 7037-9196-PF; Tungming 10 200829489, and is placed in the non-item by the air circulation path. The purified air system in the back area of the article storage unit of the entrance, the 2-part part of the air-purifying device that is moved in and out of the non-articles, is ventilated in the walking space by the article storage unit disposed in the non-article loading and unloading place. Therefore, not only the article storage core disposed at the upper portion of the article loading and unloading place but also the material that is disposed in the non- article carrying place is disposed. In the accommodating portion, all of the plurality of article accommodating portions ventilate the purified air, and at least a portion of the purified air in the accommodating portion is circulated by the air circulation path. The third aspect of the air ventilated article storage device of the present invention In the item storage rack, the above-mentioned non-objective places are arranged side by side in an adjacent state, and a pair of the above-mentioned articles are connected to the air circulation path so that the parts corresponding to the non-objects are moved in and out of the place. In the state of sharing, it is formed. In the case of 'a pair of articles of the article storage rack', these non-objects are carried out "set in parallel in the adjacent state" while the side is set to be small. Keep the shelf for items. Moreover, the pair of air circulation paths in the product storage rack are moved into the θ π, and the portions corresponding to the non-articles are not separately formed, so that the corresponding settings are formed in a state corresponding to the non-objects moving out of the entrance core. The reduction of space and the simplification of the space. ‘, clothing, therefore, can be used to effectively use a limited area _ at least a part of the purified air in the space is stored in the air. 4-faceted ring-pair 7〇37-9196-PF; Tungming 200829489 [Embodiment] Hereinafter, an embodiment of the air-purifying article storage device according to the present invention will be described based on ϋtf. [First Embodiment]
此）r化空氣通風式之物品保管設備係如第丨〜3圖所示 般’在作為淨化空氣從天花板部被通風至地板部側的清淨 空間的清淨室1内，具備在架橫向寬度方向以及架上下寬 度方向並列的複數的物品收納部2、在這些物品收納部2 的前方侧的行走空間3内移動的物品搬送裝置4、以及在 相當於複數的物品收納部2的下方的場所被配設的物品搬 出入部5的物品保管架6係被設置一對。 一對物品保管架6係，以使行走空間3中的物品搬出 入。卩5的存在側反對侧的非物品搬出入場所7鄰接的狀態 下並列設置。亦即，一對物品保管架6係，在使非物品搬 出入場所7共用的狀態下被配設。又，在此非物品搬出入 場所7,在和在相當於一對物品保管架6的一方（第ι圖中 下方側）的物品搬出入部5的上方的場所被配設的物品收 納部2相對的狀態下，在架橫向寬度方向以及架上下寬度 方向並列的複數的物品收納部2係被配設。 上述清淨室1係’使其地板部以通氣孔被多數形成的 多孔狀的格柵（grating)地板8般構成，從形成於其天花板 的天花板吹出部9使淨化空氣向地板部側通風般被構成。 又，在清竽室1，藉由房1 0，上部以及側周圍被包圍的空 一對物品保管架6 間被形成，在由此房1 0包圍的空間内 7037-9196-PF;Tungming 12 200829489 被配設。 係分別由在架橫向寬度方向In the clean room 1 which is a clean space in which the purified air is ventilated from the ceiling portion to the floor portion side, as shown in the first to third figures, the r-air ventilated article storage device is provided in the lateral width direction of the rack. The article storage unit 2 that is arranged in the vertical direction of the rack, and the article transporting device 4 that moves in the traveling space 3 on the front side of the article storage unit 2 and the place below the plurality of article storage units 2 are A pair of articles storage racks 6 are provided in the article loading and unloading unit 5 to be disposed. A pair of article storage racks 6 are provided to carry the articles in the walking space 3 out. In the state where the non-article loading and unloading place 7 on the opposite side of the presence side of the crucible 5 is adjacent to each other, it is arranged side by side. In other words, the pair of article storage racks 6 are disposed in a state in which the non-article loading and unloading places 7 are shared. In addition, the non-article loading/unloading place 7 is opposed to the article storage unit 2 disposed at a position above the article loading/unloading unit 5 (the lower side of the first image) of the pair of article storage racks 6 In the state of the rack, a plurality of article storage portions 2 that are juxtaposed in the lateral width direction of the rack and the vertical width direction of the rack are disposed. The clean room 1 is configured such that the floor portion is formed of a porous grating floor 8 which is formed by a plurality of vent holes, and the clean air is ventilated to the floor portion side from the ceiling blowing portion 9 formed in the ceiling. Composition. Further, in the clearing room 1, an empty pair of article storage racks 6 surrounded by the upper side and the side of the room 10 are formed, and 7037-9196-PF is enclosed in the space surrounded by the room 10; Tungming 12 200829489 was assigned. The width direction of the frame
被連通。 上述複數的物品收納部 隔開間隔而被立設的前後一 支柱11分別被Φ接H A如 上述物品收納部2係，使可保持作為物品，如第4圖 所示般，玻璃基板蓉的始处私1 1 Q k e ^ d…Being connected. The front and rear pillars 11 that are erected at intervals by the plurality of article storage portions are respectively Φ-connected to the HA as the article storage portion 2, so that the article can be held as an article. As shown in Fig. 4, the glass substrate is the first one. Private 1 1 Q ke ^ d...
、在連結體14c上下方向隔開 間隔而被設置且使在水平方向相對的連結體Uc彼此連結 • 的線狀的支持部Ud所構成。又，在由各支持部14d載置 支持的狀態下，使板狀物品13在上下方向隔開間隔而並列 保持，在物品保持體丨4的上部、下部、以及侧部的全部中， 可空氣流動般被構成。 在上述清淨室1，在循環淨化空氣的狀態下，使淨化 空氣從天花板部通風至地板部側的清淨室通風裝置1 5被 設置。此清淨室通風裝置15係使通過格柵地板8的空氣清 淨化而作為淨化空氣，使此淨化空氣從天花板吹出部9吹 出般被構成。 13 7〇37-9196-PF;Tungining 200829489 上述清淨室通風裝置15的構 設置於格栅地板8的下方側；空脒系匕括·吸乳至1 6， 吹出部9的上方側；空氣過‘18室1?’設置於天花板 A rv ’由並設於天花板吹出 部Θ的IIEPA過濾器等構成；接續峰 化板人出 -1R . ^ ^ 、〜路19，連通接續吸氣 至16和空氣腔室17;循環用送風 ^ 10 , 笺20，扠置於此接續流 路19，在吸氣室16吸引竹 r ,、 用；以及前過濾器 (pre-fUterWl，設置於接續流路 认一 19中的循壞送風機20 的空氣吐出側。 上述清淨室1内的空氣係，難士 & 精由循環用送風機20的通 風作用，經由格栅地板8，被吸入至 — 主及 >乳至1 6，流動於接 續流路19，由前過濾器21被清淨化，而y办尸 巧T化，而到空氣腔室17。 又，到達空氣腔室17的空氣係，作. 彳乍為由空氣過濾器18被 清淨化的淨化空氣，從天花板吹出 人卬砕9向下吹出至清淨室 1内。The connecting body 14c is provided at an interval in the vertical direction, and is formed by a linear support portion Ud that connects the connected bodies Uc facing each other in the horizontal direction. In the state in which the support members 14d are placed on the support, the plate-like articles 13 are arranged side by side at intervals in the vertical direction, and air is provided in the upper portion, the lower portion, and the side portions of the article holding body 4 It is formed like a flow. In the clean room 1 described above, the clean room ventilation means 15 for ventilating the purified air from the ceiling portion to the floor portion side is provided in a state where the air is circulated and purified. The clean room ventilating device 15 is configured to purify the air passing through the grill floor 8 as purified air, and to circulate the purified air from the ceiling blowing portion 9. 13 7〇37-9196-PF;Tungining 200829489 The above-mentioned clean room ventilation device 15 is disposed on the lower side of the grill floor 8; the air system is connected to the upper side of the blow-out portion 9; '18th room 1?' is installed in the ceiling A rv ' consisting of a IIEPA filter installed in the ceiling blowing section ;; the gradual grading plate is -1R. ^ ^, ~ road 19, connected and inhaled to 16 and Air chamber 17; circulating air supply 10, 笺20, fork placed in this connecting flow path 19, attracting bamboo r in the suction chamber 16, and a front filter (pre-fUterWl, set in the connecting flow path The air discharge side of the circumventing blower 20 in the first half of the air. The air in the clean room 1 is ventilated by the circulation blower 20, and is sucked into the main and > The milk reaches 1.6, flows to the connecting flow path 19, is cleaned by the front filter 21, and y is smashed into the air chamber 17. Again, the air system that reaches the air chamber 17 is made.乍 is the purified air purified by the air filter 18, and blows out the ceiling 9 from the ceiling to the clean room 1 .
〃如上述，藉由清淨室通風裝ϊ15，清淨^内的空氣 係’-邊由前過濾器21以及空氣過濾器18被清淨化而被 循環，使淨化空氣從天花板吹㈣9向格栅地板8側而經 常被通風。 在上述接續流路19的循環用送風機2〇的吸入側，外 氣導入流路22被接續，在此外氣導入流路22，外氣導入 量調節用播板（dmaper)23被設置。又，在接續流路19的 循環用送風機20的吐出側，排氣流路24被接續，在此排 氣流路24，排氣量調節用擋板25被設置。 又，藉由調節外氣導入量調節用擋板23以及排氣量調 7 037-9196-PF;Tungming 14 200829489 ’由清淨室通風裝置15被循環的 所定量係和新鮮空氣交换般被構For example, as described above, the air system is cleaned by the clean room venting device 15, and the front air filter 21 and the air filter 18 are cleaned and circulated, so that the purified air is blown from the ceiling (four) 9 to the grill floor 8 Sideways and often ventilated. On the suction side of the circulation blower 2A of the above-described connecting flow path 19, the external air introduction flow path 22 is connected, and the external air introduction flow path 22 is provided, and an external air introduction amount adjusting dapper 23 is provided. Further, the exhaust flow path 24 is connected to the discharge side of the circulation blower 20 of the connecting flow path 19, and the exhaust gas flow path 24 and the exhaust gas amount adjusting baffle 25 are provided. Further, by adjusting the external air introduction amount adjusting baffle 23 and the exhaust amount adjustment 7 037-9196-PF; Tungming 14 200829489 'constructed by the clean room ventilation device 15 and the fresh air exchange
在配設於上述物品搬出入部5的上部的複數的物品收 納邛2的後部’作為經由空氣淨化用過濾器、使淨化空氣 通風的淨化空氣通風裝置的第_風扇過濾器單元（以下簡 稱為第FFU)26被設置。此第_刚26係，分別對應於 稷數的物品收納部2而被裝備。又，雖然此第_刚26係 圖不省略，但以使在被收納於物品收納部2的物品保持體 14被保持的板狀物品13彼此之間通過的狀態下，通過物 品收納部2、在行走空間3内使淨化空氣通風般被設置。The rear portion of the plurality of article storage cassettes 2 disposed in the upper portion of the article loading/unloading portion 5 is a first fan filter unit (hereinafter referred to as a first embodiment) of the air purifying device that ventilates the purified air via the air purifying filter. FFU) 26 is set. This first _26 series is equipped corresponding to the number of articles storage unit 2. In addition, in the state in which the sheet-like article 13 held by the article holder 14 accommodated in the article storage unit 2 passes between the articles, the article storage unit 2 is passed through. The purified air is ventilated in the walking space 3.
郎用播板25的個別開度 清淨室1内的空氣中的 成0 又，在配置於非物品搬出入場所7的物品收納部2的 後部，作為經由空氣淨化用過濾器、使淨化空氣通風的非 物品搬出入側的淨化空氣通風裝置的第二風扇過濾器單元 (以下簡稱為第二FFU)27被設置。此第二FFU 27係，分別 對應於複數的物品收納部2而被裝備。又，此第二J? F U 2 7 也和第一 FFU 26相同，以使在被收納於物品收納部2的物 品保持體14被保持的板狀物品13彼此之間通過的狀態 下，通過物品收納部2，在行走空間3内使淨化空氣通風 般被設置。 在對應於上述房10内的地板部中的行走空間3以及非 物品搬出入場所7的場所，使行走空間3内的淨化空氣排 出至下方的排出用開口部28被設置。此排出用開口部28 係，藉由在格栅地板8設置板體，與格栅地板8相比，開 7037-9196-PF;Tungming 15 200829489 - 口面積變小般被構成。 又’對應於在房彳n # ^ 場所係，使袼拇=地板部中的物一 走空…的淨化板狀體閉塞，…的行 方的吸氣室16般㈣％。 #28被排出至其下 又’例如，藉由使排出用開口 或對隸地板部中㈣物品心 面積較小， 板狀體閉塞等，可使行走 續7的％所的開口由 16的排出量較少。 、耗空氣排出至吸氣室 …m。内’因為藉由第—ffu26以及第二刚 A从工風子通風’其淨化空氣的壓力變高。對此，因 =;置地板部的排出用開口部⑼，淨化空氣被排氣， 此化空氣的壓力變低。又 自ln 文低又猎由此淨化空氣的壓力差， 房0内的淨化空氣係，從物品收納部2的後部側向前部側 流動，使行走空間3成為從上方側向下方侧流動的向下流 動（d〇Wnfl〇W)，使在物品收納部2或行走空間3等漂浮的 塵埃排出至地板部的下方，提高房1()内的清淨度。 在一對物品保管架6 ’分別使非物品搬出入場所7、行 走空間3的上部場所、以及物品收納部2的背部場所和外 部遮蔽般包圍的狀態下，空氣循環路4〇被形成。空氣循環 路40係由’在配置於非物品搬出人場所7的物品收納部2 的背部場所中'從下方側導引淨化空氣至上方侧的直線狀 的第一通路部分40a，使由此第一通路部分4〇a導引的淨 化空氣以配置於非物品搬出入場所7的物品收納部2的上 7037-9196-PF;Tungming 16 200829489 ;::ΓΓ仃走空間3的上部場所、物品收納部2的上部場 :的力序導引的直線狀的第二通路料傷，以及使由此 弟一通路部分40b導引的淨化空氣從物口 工虱攸物σσ收納部2的背部 场所中的上方側導引至下方側 40c構成。 …直線狀的弟二通路部分 、上述第一通路部分4Ga、第二通路部分40b、以及第三 通路邠分4 0 c係分別橫跨在架橫向寬产 %卞L门見度方向亚列的複數的 口口納部2的全長而一連串地設置。 一對物品保管架6中的-對空氣循環路40係，以使對 應於非物品搬出入場所7的第一甬 们弟通路部分40a共用的狀態 下被形成。又，此第-通路部分心係以包圍配置於非物 :搬出入場所7的物品收納部2的背部場所的狀態下被形 成0 在一對空氣循環路40,分別使行走空間3内的淨化空 氣導入的行走空間内空氣導入用開口部“、使在房ι〇外 且清淨室1内的淨化空氣導入的清淨空間内空氣導入用開 口部42係被設置。 又’一對线循環路40中的行走空間内空氣導入用開 口部係分別’在和對應於非物品搬出入場所的地板部鄰 接的部分被具備。X，在對應對物品保管架6的一方 (第1圖中下方側）的空氣循環路4〇中的行走空間内空氣導 入用開口部41係，在非物品搬出入場所7被配置的物品收 納部2的下方被形成的空氣導入用空間43對應而被形成。 亦即，空氣導入用空間43中’面對行走空間3的部份係作 17 7037-9196-PF；Tungming 200829489 ^行走氣“用開口部41而被構成。 -對空氣循環路4〇中的清淨空間内空氣導入用開口 :42係，在相當於物品搬出入部5的上方的場所被配設的 納部2的背部場所中，在物品收納部2的後部被配 置的弟一 FFU 26鄰接的場所被設置。 上述第- FFU 26係’以使對應於空氣循環路4〇中的 物品收納部2的背部場所的第三部份恢内的淨化空氣通 風的方式被構成。又，第_ FFU26係’使由行走空間内空 氣導入用開口部41導入的行走空間3内的淨化空氣和由； 乎空間内空氣導人用開口部42導人的房1()外的清淨室丄 内的淨化空氣經由空氣淨化用過濾器而通風般被構成。 又’第二 27係，以使對應於空氣循環路4〇中的 =物品搬出入場所7的第一部份術内的淨化空氣通風的 方式被構成。又，第二剛27係，使由行走空間内空 入用開口部41導入的行走空間3内的淨化空氣經由空氣淨 化用過濾器而通風般被構成。 在上述房Π)内，由第-刚26以及第二削2?被通 風的淨化空氣係’通過物品收納部2而到行走空間3，使 空間3從上方側向下方侧流動。行走空間3内的淨化 工氣係，其-部份從行走空間内空氣導人用開口部41被導 入至空氣循環路40,殘餘的一部份從排出用開口部Μ被 排出至下方。被導人至空氣循環路4G的淨化空氣:，作^ 從清淨空間内空氣導入用開口部4導 ^ , 守八至空氣循環路40 的'淨室1内的淨化空氣的同時’經由空氣德環路40而流 7〇37-9196-PF;Tungming 18 200829489 ^ 動至物品收納部2的背部場所。又，第一 FFU26係，使流 動至物收納部2的背部場所的淨化空氣經由空氣淨化用 過濾器而通風至物品收納部2。又，第二FFU 27係，由空 氣循％路4 0使在非物品搬出入場所7被配設的物品收納部 2的月部場所流動的淨化空氣經由空氣淨化用過濾器而通 風至物品收納部2。 如上述’一邊使行走空間3内的淨化空氣的至少一部 为由空氣循環路4〇循環，可在複數的物品收納 • 淨化空氣通風。 使 一對物品保管架6中的物品搬送裝置4係分別，由具 備在没置於地板部的導軌32以及設置於上部的天花板側 導執33被導弓丨而行走的行走台車34、沿著被立設於此行 走台車34的升降柱化“七）”而可自由升降的升降台％、 以及在此升降台3 6被裝備而對於物品收納部2以及物品搬 出入部5進行物品保持體14的出入的物品移載裝置37的 _ 尚架存取車（stacker crane)被構成。 又，物品搬送裝置4係，使在物品搬出入部5被搬入 的物品保持體14在複數的物品收納部2的任一個搬送，使 在物品收納部2被收納的物品保持體14在物品搬出入部5 搬送般被構成。 上述物品搬出入部5係，如第2圖所示般，在相當於 架橫向寬度方向並列的複數的物品收納部2的全部物品的 下方的場所分別被配設。又，在各物品搬出入部5，從物 品保持體1 4將板狀物品1 3 —個一個取出而供給至圖外的 7037-9196-PF;Tungming 19 200829489 " 物處理部，使從此物品處理部一個一個供給的板狀物品 13被保持在物品保持體14般被構成。 分別在上述物品搬出入部5，使物品保持體14可自由 升降地載置支持的左右一對的升降支持體3〇、使板狀物品 13可自由載置支持地且具備使載置支持的板狀物品13可 自由搬送的複數的驅動滾子的搬送體31被設置。搬送體 31係，在左右一對的升降支持體3〇之間被配置，對於物 品保持體14在上下方向可自由插脫地被設置。 _ 又，在聯繫物品搬出入部5和物品處理部的連通路 38 ’使板狀物品丨3在物品處理部和物品搬出入部5之間搬 达的搬送運輸器39係被設置，此連通路38係被設置在房 1 〇内。又，在連通路38，經由空氣淨化用過濾器，使淨化 空氣對於搬送運輸器39通風的第三風扇過濾器單元（以下 簡稱為第三F F U) 2 9被設置。 由上述物品搬出入部5從物品保持體14使板狀物品 φ 13 一個—個取出而供給至搬送運輸器39時，藉由以左右 對的升降支持體30使物品保持體14下降，搬送體Μ係 進入物品保持體14内，從物品保持體14使—個板狀物品 13在搬运體31被載置支持。之後，由搬送體31載置支持 板狀物品13而在搬送運輸器39搬送。藉由重複此類的動 作，從物品保持體14將板狀物品13 一個— 至搬送運輸器39。 使由上述搬送運輸器39被供給的板狀物品13由物品 搬出入部5 一個一個在物品保持體14被保持時，在由左右 20 7037-9196>PF；Tungming 200829489 一對的升降支持體30使物品保持體ι4進入搬送體31的狀 態下載置支持。之後，搬送體31使一個板狀物品1 3搬送 至由物品保持體14可保持的位置為止，藉由以左右一對的 升降支持體3 G將物品保持體14上升，使一個板狀物品13 在物品保持體14被保持。藉由重複此類的動作，使從搬送 運輸器39被供給的板狀物品13在一個一個物品保持體14 在上下方向並列的狀態下順序保持。 [弟二實施例] 在上述第一實施例中，雖然使物品保管架6以一對設 置的例子表示’但在此第二實施例中，如第5圖所示般， 使物品保管架6以一個設置。 在此物品保管架6中，在非物品搬出入場所7不配設 物品收納部2°又’在空氣循環路40中的行走空間内空氣 導入用開口部41係，以和在非物品搬出入場所7中的地板 部鄰接的狀態下被設置。 有關其他構成係因為和上 ^ ^ t ^ 不上遮弟一貫施例相同而說明省 [其他實施例] (1)在上述第一實施例φ 祕扯、、 雖以在非物品搬出入場所 7配設物品收納部2的例子矣+ … 例子表不’但也可在非物品搬出入 #所7不配设物品收納部？ 丨2而貫施。即使在此情形，如在 上述第一實施例表示，使一斟铷σ y如在 矿丁使對物品保管架6中的一對允 循環路以使對應於非物品搬 分40a共用的狀態下形成。 w所7的第一通路部 7037-9196-PF;Tungming 21 200829489 ^ (2)在上述第二實施例中，雖然以在非物品搬出入場所 7不配設物品收納部2的例子表示，但也可在非物品搬出 入場所7配設物品收納部2而實施。即使在此情形，使對 應於空氣循環路40的非物品搬出入場所7的第一通路部分 4Oa，以包圍配設於非物品搬出入場所7的物品收納部2的 背部場所的狀態下形成。 (3) 在上述第一實施例中，雖然使第二FFU 27分別對 應於物品收納部2的後部中的物品收納部2而裝備，但可 馨 對於複數的物品收納部2，使第二FFU 27裝備處係可適當 變更。 (4) 在上述弟一以及弟二實施例，雖然使物品保管架6 以一對以及一個設置的例子表示，但有關設置物品保管架 6的數目係可適當變更。 (5 )在上述弟一以及弟二實施例，雖然在相當於架橫向 寬度方向並列的複數的物品收納部2的全部的下方的場所 _ 分別配設物品搬出入部5，但在架橫向寬度方向並列的複 數的物品收納部2的一部份的物品的下方相當的場所配設 物品搬出入部5而實施也可。 .【圖式簡單說明】 第1圖係為第一實施例中的清淨室的縱剖面圖； 第2圖係為第1圖中的A—A剖面圖； 第3圖係為第1圖中的Β—β剖面圖； 第4圖係為表示物品保持體的立體圖；以及 7037-9196-PF;Tungming 22 200829489 第5圖係為第二實施例中的清淨室的縱剖面圖。In the air in the clean room 1 of the individual slats 25, the air is ventilated through the filter for air purification, and is disposed in the rear of the article storage unit 2 of the non-goods loading and unloading place 7 A second fan filter unit (hereinafter simply referred to as a second FFU) 27 of the clean air ventilating device of the non-object moving-in side is provided. The second FFU 27 is equipped to correspond to the plurality of article storage units 2, respectively. In addition, the second J? FU 2 7 is the same as the first FFU 26, and passes through the article in a state where the sheet-like articles 13 held by the article holding body 14 housed in the article storage unit 2 pass between each other. The accommodating portion 2 is provided with ventilation air in the walking space 3 as well. The discharge opening portion 28 for discharging the purified air in the traveling space 3 to the lower side is provided in the space corresponding to the walking space 3 and the non-goods loading and unloading place 7 in the floor portion in the room 10. This discharge opening portion 28 is formed by providing a plate body on the grill floor 8, and opening 7037-9196-PF as compared with the grill floor 8, and Tungming 15 200829489 - the port area is reduced. In addition, in the case of the house n n ^ ^, the cleaned plate-like body in which the object in the floor portion is empty is closed, and the suction chamber 16 of the row is (four)%. #28 is discharged to the lower side. For example, by making the discharge opening or the (4) item in the floor portion smaller, the plate body is closed, etc., the opening of the % of the running 7 can be discharged by 16 Less quantity. Air consumption is exhausted to the suction chamber ...m. Because the inner air is ventilated by the first ffu26 and the second rigid A, the pressure of purifying the air becomes high. On the other hand, because of the discharge opening portion (9) for the floor portion, the purified air is exhausted, and the pressure of the compressed air is lowered. In addition, the air pressure in the room 0 flows from the rear side to the front side of the article storage unit 2, and the traveling space 3 flows from the upper side to the lower side. The downward flow (d〇Wnfl〇W) causes the floating dust in the article storage unit 2 or the walking space 3 to be discharged below the floor portion, thereby improving the cleanness in the room 1 (). The air circulation path 4 is formed in a state where the pair of article storage racks 6' respectively surrounds the non-article loading and unloading place 7, the upper portion of the traveling space 3, and the back portion of the article storage portion 2 and the outer portion. The air circulation path 40 guides the purified air from the lower side to the linear first passage portion 40a on the upper side in the back position of the article storage unit 2 disposed in the non-removable person's place 7 The purified air guided by the one passage portion 4A is disposed on the upper 7037-9196-PF of the article storage portion 2 of the non-article loading and unloading place 7; Tungming 16 200829489;:: the upper place and the article storage of the space 3 The upper field of the portion 2: the linear second path of the force guided by the force sequence, and the purified air guided by the passage portion 40b of the portion 2 from the back portion of the object storage σσ housing portion 2 The upper side is guided to the lower side 40c. The linear two-passage portion, the first passage portion 4Ga, the second passage portion 40b, and the third passage portion 40c are respectively spanned in the lateral direction of the frame width-producing The entire length of the mouth portion 2 is set in series. The air circulation path 40 in the pair of article storage racks 6 is formed in a state in which the first child passage portions 40a corresponding to the non-article loading and unloading place 7 are shared. In addition, the first passage portion is formed in a state in which the center of the article storage unit 2 disposed in the non-object: loading and unloading place 7 is formed in a pair of air circulation paths 40, and the inside of the traveling space 3 is cleaned. The air introduction opening portion 42 in the space to be introduced into the air, and the air introduction opening portion 42 in the clean space in which the clean air in the clean room 1 is introduced outside the room is provided. Further, the pair of line circulation paths 40 The air introduction opening portion in the traveling space is provided in a portion adjacent to the floor portion corresponding to the non-article loading and unloading place. X is associated with one of the article storage racks 6 (lower side in the first drawing) The air introduction opening 41 in the walking space of the air circulation path 4 is formed corresponding to the air introduction space 43 formed below the article storage unit 2 in which the non-article loading/unloading place 7 is disposed. In the air introduction space 43, the portion facing the walking space 3 is referred to as 17 7037-9196-PF; Tungming 200829489 ^ traveling gas is configured by the opening portion 41. - the air introduction opening in the clean space in the air circulation path 4: 42, in the back position of the intermediate portion 2 disposed at a position above the article loading and unloading portion 5, at the rear of the article storage portion 2 A place where the adjacent one of the FFU 26 is placed is set. The first FFU 26 system is configured such that the purified air in the third portion corresponding to the back portion of the article storage unit 2 in the air circulation path 4 is ventilated. In addition, the _FFU 26 is a clean air in the living space 3 that is introduced by the air introduction opening 41 in the walking space, and the room 1 () that is guided by the air guiding opening 42 in the space. The purified air in the chamber is configured to be ventilated via a filter for air purification. Further, the second 27 series is configured to ventilate the purified air corresponding to the first portion of the air circulation path 4 to the first portion of the air. In addition, the second air 27 is configured such that the purified air in the traveling space 3 introduced by the opening portion 41 in the traveling space is ventilated via the air purifying filter. In the above-mentioned room, the air-purifying air system that has been ventilated by the first-neck 26 and the second-cut 2 is passed through the article storage unit 2 to the traveling space 3, and the space 3 flows from the upper side to the lower side. The purification system in the traveling space 3 is partially guided from the air guiding opening portion 41 in the traveling space to the air circulation path 40, and a remaining portion is discharged from the discharge opening portion to the lower side. Purified air that is led to the air circulation path 4G: from the air inlet opening 4 in the clean space, to the air in the clean room 1 of the air circulation path 40 Loop 40 and flow 7〇37-9196-PF; Tungming 18 200829489 ^ Move to the back of the article storage unit 2. Further, the first FFU 26 is configured to ventilate the purified air flowing to the back portion of the object storage unit 2 to the article storage unit 2 via the air purifying filter. In addition, the second FFU 27 is configured to ventilate the purified air flowing through the air purification filter to the article storage by the air purification filter by the air circulation path 40. Department 2. As described above, at least one portion of the purified air in the traveling space 3 is circulated by the air circulation path 4, so that it can be stored in a plurality of articles. Each of the article transporting devices 4 in the pair of article storage racks 6 is provided with a traveling carriage 34 that is guided by a guide rail 32 that is not placed on the floor portion and a ceiling side guide 33 that is provided on the upper portion, and The elevating table % that is erected on the lifting column "7" of the traveling trolley 34 and that can be freely moved up and down, and the lifting table 36 are equipped to carry out the article holding body 14 for the article storage unit 2 and the article loading and unloading portion 5 The _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In the article transporting device 4, the article holding body 14 carried in the article loading and unloading unit 5 is transported in any one of the plurality of article storage units 2, and the article holding body 14 accommodated in the article storage unit 2 is placed in the article loading and unloading section. 5 It is structured like transportation. As shown in Fig. 2, the article loading and unloading portion 5 is disposed at a position below all the articles of the plurality of article storage portions 2 that are aligned in the lateral width direction of the rack. Further, in each of the article loading and unloading portions 5, the sheet-like articles 13 are taken out one by one from the article holding body 14 and supplied to the 7037-9196-PF outside the figure; the Tungming 19 200829489 " object processing unit is processed from the article The plate-like articles 13 supplied one by one are held in the same manner as the article holding body 14. In the above-described article loading and unloading portion 5, the article holding body 14 can be placed on the left and right pair of lifting support bodies 3 θ so that the support member 14 can be freely moved up and down, and the plate-like article 13 can be placed on the support and can be placed on the support plate. The transport body 31 of the plurality of drive rollers that can be freely transported is provided. The transport body 31 is disposed between the pair of right and left lift supports 3A, and is provided so that the article holding body 14 can be freely inserted and removed in the vertical direction. _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The system is set in the room 1 。. Further, the communication path 38 is provided by a third fan filter unit (hereinafter simply referred to as a third F F U) 219 that ventilates the purified air to the transport conveyor 39 via the air purifying filter. When the article loading/unloading unit 5 takes out the sheet-like articles φ 13 one by one from the article holding body 14 and supplies them to the transport conveyor 39, the article holding body 14 is lowered by the right and left lifting support bodies 30, and the transport body Μ is transported. The article holder 13 is placed in the article holder 14, and the plate-like article 13 is placed on the carrier 31 by the article holder 14. Thereafter, the support sheet-like article 13 is placed on the conveyance body 31 and conveyed by the conveyance conveyor 39. By repeating such an action, the plate-like article 13 is transferred from the article holding body 14 to the transporter 39. When the sheet-like article 13 supplied from the transport conveyor 39 is carried by the article carrying-in/out portion 5 one by one, when the article holding body 14 is held, the pair of right and left sides 20 7037-9196 >PF; Tungming 200829489 The article holding body ι4 enters the state of the transport body 31 and is supported by downloading. After that, the conveyance body 31 conveys one sheet-like article 13 to a position that can be held by the article holder 14, and raises the article holder 14 by the pair of right and left lift supports 3 G to form one sheet-like article 13 The article holder 14 is held. By repeating such an operation, the sheet-like article 13 supplied from the transport conveyor 39 is sequentially held in a state in which the one article holder 14 is juxtaposed in the vertical direction. [Second Embodiment] In the first embodiment described above, the article storage rack 6 is shown as a pair of installation examples. However, in the second embodiment, as shown in Fig. 5, the article storage rack 6 is provided. Take a setting. In the article storage rack 6, the article storage unit 2 is not disposed in the non-article loading/unloading place 7 and the air introduction opening 41 in the walking space of the air circulation path 40 is used. The floor portions in 7 are placed adjacent to each other. The other components are explained in the same way as the above-mentioned method of the above-mentioned method. [Other embodiments] (1) In the above-described first embodiment, the φ secret, and the non-object moving in and out of the place 7 Example of arranging the article storage unit 2 ...+ ... The example is not shown, but the article storage unit may not be provided in the non-article loading/unloading #7.丨2 and apply. Even in this case, as shown in the above-described first embodiment, a 斟铷 σ y is made such that, in the case where the mineralizer makes a pair of circulation paths in the article storage rack 6 so as to be shared by the non-object moving parts 40a form. The first passage portion 7037-9196-PF of the w-station 7; Tungming 21 200829489 (2) In the second embodiment, the article storage unit 2 is not provided in the non-article loading/unloading place 7, but It can be implemented by disposing the article storage unit 2 in the non-article loading and unloading place 7. In this case, the first passage portion 40a of the non-article loading/unloading place 7 corresponding to the air circulation path 40 is formed in a state of surrounding the back position of the article storage unit 2 disposed in the non-article loading and unloading place 7. (3) In the first embodiment described above, although the second FFUs 27 are respectively provided corresponding to the article storage portions 2 in the rear portion of the article storage portion 2, the second FFU may be provided for the plurality of article storage portions 2 27 Equipment department can be changed as appropriate. (4) In the above-described first and second embodiments, the article storage rack 6 is shown as a pair and one example, but the number of the article storage racks 6 can be appropriately changed. (5) In the above-described first and second embodiments, the article loading/unloading portion 5 is disposed in each of the plurality of article storage portions 2 that are arranged in the lateral width direction of the rack, but in the lateral width direction of the rack. The item loading/unloading unit 5 may be disposed in a place corresponding to a part of the article in the plurality of article storage units 2 in parallel. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a longitudinal sectional view of a clean room in the first embodiment; Fig. 2 is a cross-sectional view taken along line A-A in Fig. 1; and Fig. 3 is a first figure Fig. 4 is a perspective view showing the article holder; and 7037-9196-PF; Tungming 22 200829489 Fig. 5 is a longitudinal sectional view of the clean room in the second embodiment.
擋板； 23 【主要元件符號說明】 1〜清淨空間； 3〜行走空間； 5〜物品搬出入部； 7〜非物品搬出入場所； 9〜天花板吹出部； 11〜支柱； 14〜物品保持體； 16〜吹氣室； 〜空氣過濾器； 2 〇〜循環送風機； 22〜外氣導入流路； 25〜排氣量調節用擋板； 28〜排出用開口部； 30〜升降支持體； 3 2 ' 3 3〜導執； 3 5〜升降柱； 37〜物品移載裝置； 3 9〜搬送運輸器； 40a〜第一通路部分； 40c〜第三通路部分； 23〜外氣導入量調節用 7037-9196-PF；Tungiaing 2〜物品收納部； 4〜物品搬送裝置； 6〜物品保管架； 8〜格拇地板； 10〜房； 12〜載置支持部； 15〜清淨室通風裝置； 17〜空氣腔室； 19〜接續流路； 21〜前過濾器； 24〜排氣流路； 26〜淨化空氣通風裝置； 29〜第三風扇過濾器單元； 31〜搬送體； 34〜行走台車； 3 6〜升降台， 3 8〜連通路； 40〜空氣循環路； 40b〜第二通路部分； 43〜空氣導入用空間； 200829489 41〜行走空間内空氣導入用開口部； %? 42〜清淨空間内空氣導入用開口部； 27〜非物品搬出入侧的淨化空氣通風裝置。Baffle; 23 [Description of main component symbols] 1~clear space; 3~walking space; 5~objects moving in and out; 7~non-objects moving in and out; 9~ceiling blowing part; 11~piling; 14~ article holding body; 16 ~ blowing chamber; ~ air filter; 2 〇 ~ circulating blower; 22 ~ external air introduction flow path; 25 ~ exhaust volume adjustment baffle; 28 ~ discharge opening; 30 ~ lifting support; ' 3 3 ~ guide; 3 5 ~ lifting column; 37 ~ item transfer device; 3 9 ~ transport conveyor; 40a ~ first passage portion; 40c ~ third passage portion; 23 ~ external air introduction amount adjustment 7037 -9196-PF;Tungiaing 2~ article storage unit; 4~ article transport device; 6~ article storage rack; 8~ grid floor; 10~ room; 12~ mount support; 15~ clean room ventilation; 17~ Air chamber; 19~Continuous flow path; 21~ front filter; 24~ exhaust flow path; 26~ clean air ventilation unit; 29~third fan filter unit; 31~transport body; 34~ walking trolley; 6 ~ lifting platform, 3 8 ~ connecting road; 40 ~ air circulation road; 40b to the second passage portion; 43 to the air introduction space; 200829489 41 to the air introduction opening portion in the walking space; %? 42 to the air introduction opening portion in the clean space; 27~ the clean air ventilation for the non-object moving in and out side Device.
7 037-9196-PF;Tungming 247 037-9196-PF; Tungming 24
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007002545A JP4378652B2 (en) | 2007-01-10 | 2007-01-10 | Purified air ventilation-type goods storage facility |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200829489A true TW200829489A (en) | 2008-07-16 |
| TWI406803B TWI406803B (en) | 2013-09-01 |
Family
ID=39630969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096138641A TWI406803B (en) | 2007-01-10 | 2007-10-16 | Clean air ventilation of the items storage equipment |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4378652B2 (en) |
| KR (1) | KR101110541B1 (en) |
| CN (1) | CN101220978B (en) |
| TW (1) | TWI406803B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012056659A (en) * | 2010-09-07 | 2012-03-22 | Murata Machinery Ltd | Automated storage and retrieval warehouse and container of the same |
| CN102616576B (en) * | 2012-03-26 | 2014-04-16 | 深圳市华星光电技术有限公司 | Stacking equipment and air purifying system thereof |
| WO2014030421A1 (en) * | 2012-08-21 | 2014-02-27 | 村田機械株式会社 | Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas |
| CN105775534B (en) * | 2016-05-26 | 2017-12-26 | 新昌县沃克工具有限公司 | Self-cleaning dustless storage room |
| JP6631446B2 (en) * | 2016-09-09 | 2020-01-15 | 株式会社ダイフク | Article storage facility |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1096332A (en) * | 1996-09-20 | 1998-04-14 | Mitsubishi Electric Corp | Clean room |
| CN1177711A (en) * | 1996-09-24 | 1998-04-01 | 三菱电机株式会社 | Purification room |
| JP3818434B2 (en) | 2001-09-10 | 2006-09-06 | 株式会社ダイフク | Purified air storage system |
| JP4265179B2 (en) * | 2002-09-06 | 2009-05-20 | パナソニック株式会社 | Clean stocker |
| JP2004269214A (en) * | 2003-03-11 | 2004-09-30 | Daifuku Co Ltd | Purified air circulating type storage equipment |
| JP2006021913A (en) | 2004-07-09 | 2006-01-26 | Tohoku Univ | Clean stocker |
-
2007
- 2007-01-10 JP JP2007002545A patent/JP4378652B2/en not_active Expired - Fee Related
- 2007-10-16 TW TW096138641A patent/TWI406803B/en not_active IP Right Cessation
- 2007-11-22 KR KR1020070119651A patent/KR101110541B1/en not_active IP Right Cessation
- 2007-12-25 CN CN2007101598633A patent/CN101220978B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101220978A (en) | 2008-07-16 |
| KR20080065904A (en) | 2008-07-15 |
| CN101220978B (en) | 2013-11-06 |
| JP4378652B2 (en) | 2009-12-09 |
| TWI406803B (en) | 2013-09-01 |
| JP2008168983A (en) | 2008-07-24 |
| KR101110541B1 (en) | 2012-03-29 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |