JP2008007225A - Article storage facility - Google Patents

Article storage facility Download PDF

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JP2008007225A
JP2008007225A JP2006176718A JP2006176718A JP2008007225A JP 2008007225 A JP2008007225 A JP 2008007225A JP 2006176718 A JP2006176718 A JP 2006176718A JP 2006176718 A JP2006176718 A JP 2006176718A JP 2008007225 A JP2008007225 A JP 2008007225A
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article
storage
purified air
width direction
article storage
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JP4623381B2 (en
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Shiro Kuwahata
司郎 桑畑
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Daifuku Co Ltd
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Daifuku Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an article storage facility, maintaining high cleanliness of an article in a storage part of an article storage body. <P>SOLUTION: The article storage facility comprises: an article storage body 3 having a plurality of storage parts 2 arranged vertically and horizontally; article carrying apparatus 5 respectively arranged in front and rear moving spaces 4 of the article storage body 3 and moved in the moving spaces 4 to take out and put articles B from/in the storage parts 2; downflow type cleaning air ventilating means 6 flowing cleaning air from upper sides to lower sides in the moving spaces 4. Storage part cleaning air ventilating means 34 are respectively provided for each of the plurality of storage parts 2, to make the cleaning air pass from side parts of the storage parts 2 toward a width direction and flow the cleaning air from an upper side to the lower side between neighboring storage parts 2 in the width direction. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、収納部を横幅方向に複数並べて備えた物品収納体と、前記物品収納体の前後の移動空間の夫々に配置されて、前記移動空間を移動して前記収納部に対する物品の出し入れを行う物品搬送装置と、前記移動空間において浄化空気を上方側から下方側に流動させるダウンフロー式の浄化空気通風手段とが設けられている物品収納設備に関する。   The present invention is arranged in each of an article storage body provided with a plurality of storage units arranged in the width direction and a moving space before and after the article storage body, and moves the moving space to put articles into and out of the storage unit. The present invention relates to an article storage facility provided with an article conveying device to be performed and a downflow type purified air ventilation means for flowing purified air from the upper side to the lower side in the moving space.

上記のような物品収納設備は、例えば、プラズマディスプレイ用のガラス基板などの板状の物品を塵埃の少ない清浄な環境において収納するために用いられている。そして、物品収納体の前後の移動空間の夫々に配置された物品搬送装置のうち、一方の物品搬送装置が物品収納体の収納部に物品を収納して、他方の物品搬送装置がその物品を収納部から取り出すようにしており、物品収納体を用いながら一方の物品搬送装置と他方の物品搬送装置との間での物品の受け渡しを行うようにしている。   The above-described article storage equipment is used, for example, for storing plate-like articles such as glass substrates for plasma displays in a clean environment with little dust. Of the article transport devices arranged in the moving spaces before and after the article storage body, one of the article transport devices stores the article in the storage portion of the article storage body, and the other article transport device stores the article. The article is taken out from the storage unit, and the article is transferred between one article conveying apparatus and the other article conveying apparatus while using the article container.

従来の物品収納設備は、物品収納体の収納部として、一方の物品搬送装置との間での移載位置と他方の物品搬送装置との間での移載位置とに移動自在で且つ物品を載置支持自在な移動体が設けられ、物品収納体の上方の天井部に、移動空間において上方側から下方側に浄化空気を通風させる浄化空気通風手段が配置されている(例えば、特許文献1参照。)   A conventional article storage facility is a storage unit for an article storage body, which is movable between a transfer position between one article transfer apparatus and a transfer position between the other article transfer apparatus and A movable body that can be placed and supported is provided, and purified air ventilation means for allowing purified air to flow from the upper side to the lower side in the moving space is disposed in the ceiling portion above the article storage body (for example, Patent Document 1). reference.)

また、別の従来の物品収納設備は、物品収納体が、収納部を横幅方向及び上下方向に複数並べて備えた物品収納棚にて構成され、物品収納棚及び移動空間の上方の天井部に、移動空間において上方側から下方側に浄化空気を通風させる浄化空気通風手段の複数が並ぶ状態で配置されている(例えば、特許文献2参照。)。   In another conventional article storage facility, the article storage body is configured by an article storage shelf provided with a plurality of storage units arranged in the horizontal width direction and the vertical direction, and the article storage shelf and the ceiling portion above the moving space, A plurality of purified air ventilation means for passing purified air from the upper side to the lower side in the moving space are arranged in a line (see, for example, Patent Document 2).

特開2002−370804号公報JP 2002-370804 A 特開平8−71872号公報JP-A-8-71872

上記従来の物品収納設備では、浄化空気が浄化空気通風手段によって移動空間において上方側から下方側に通風されるだけであるので、物品収納体の各収納部に収納されている物品の清浄度を高く保つことができない虞がある。
説明を加えると、上記従来の物品収納設備では、浄化空気通風手段が物品収納体の上方の天井部に配置されているので、物品収納体に対して浄化空気を上方側から通風させることができる。したがって、複数の収納部の夫々に対して上方側から下方側に浄化空気を通風させることができる可能性がある。しかしながら、例えば、ガラス基板などの板状の物品は、一般的に、上下方向に間隔を隔てて並べる状態で物品保持体に保持されて各収納部に収納されており、各収納部に対して浄化空気を上方側から下方側に通風させても、各収納部に収納されている物品の清浄度を高く保つように浄化空気を通風させることができない。
また、特許文献2に記載の物品収納設備では、物品収納体が収納部を上下方向に複数並べた物品収納棚にて構成されているので、物品収納体に対して浄化空気を上方側から通風させるだけでは、下方側に位置する収納部に対して浄化空気を通風させることが難しく、その下方側に位置する収納部に収納されている物品の清浄度を高く保つことができない虞がある。
In the above-described conventional article storage facility, the purified air is only ventilated from the upper side to the lower side in the moving space by the purified air ventilation means. Therefore, the cleanliness of the articles stored in the respective storage portions of the article storage body is increased. There is a possibility that it cannot be kept high.
In other words, in the conventional article storage facility, the purified air ventilation means is disposed on the ceiling portion above the article storage body, so that the purified air can be ventilated from above on the article storage body. . Therefore, there is a possibility that purified air can be passed from the upper side to the lower side with respect to each of the plurality of storage units. However, for example, a plate-shaped article such as a glass substrate is generally held in each storage unit and held in each storage unit in a state of being arranged at intervals in the vertical direction. Even if the purified air is ventilated from the upper side to the lower side, the purified air cannot be ventilated so as to keep the cleanliness of the articles stored in the storage units high.
In the article storage facility described in Patent Document 2, the article storage body is configured by an article storage shelf in which a plurality of storage units are arranged in the vertical direction. It is difficult to allow purified air to flow through the storage unit located on the lower side only by doing so, and there is a possibility that the cleanliness of the articles stored in the storage unit located on the lower side cannot be kept high.

本発明は、かかる点に着目してなされたものであり、その目的は、物品収納体の各収納部に収納されている物品の清浄度を高く保つことができる物品収納設備を提供する点にある。   The present invention has been made paying attention to this point, and an object thereof is to provide an article storage facility capable of keeping the cleanliness of articles stored in each storage section of the article storage body high. is there.

この目的を達成するために、本発明にかかる物品収納設備の第1特徴構成は、収納部を横幅方向に複数並べて備えた物品収納体と、前記物品収納体の前後の移動空間の夫々に配置されて、前記移動空間を移動して前記収納部に対する物品の出し入れを行う物品搬送装置と、前記移動空間において浄化空気を上方側から下方側に流動させるダウンフロー式の浄化空気通風手段とが設けられている物品収納設備において、
前記複数の収納部の夫々に対して、浄化空気を前記収納部の横側部から前記横幅方向に前記収納部を通過させて前記横幅方向に隣接する前記収納部との間において上方側から下方側に流動させる収納部浄化空気通風手段が設けられている点にある。
In order to achieve this object, the first characteristic configuration of the article storage facility according to the present invention is arranged in each of an article storage body provided with a plurality of storage portions arranged in the lateral width direction and a moving space before and after the article storage body. And an article conveying apparatus that moves the moving space to put in and out the article and a downflow type purified air ventilation means for flowing the purified air from the upper side to the lower side in the moving space. In the goods storage facility
For each of the plurality of storage units, purified air passes through the storage unit in the lateral width direction from the lateral side portion of the storage unit, and downward from the upper side between the storage units adjacent in the lateral width direction. The storage portion purified air ventilation means for flowing to the side is provided.

前記収納部浄化空気通風手段が、複数の収納部の夫々に対して、浄化空気を収納部の横側部から横幅方向に収納部を通過させるので、複数の収納部の夫々に対して水平方向に浄化空気を通風させることができる。したがって、例えば、ガラス基板などの板状の物品のように、上下方向に間隔を隔てて並べる状態で物品保持体に保持されて収納部に収納されている物品であっても、その物品に対して浄化空気を的確に通風させることができることになる。そして、浄化空気が通風される方向が収納部の横側部から横幅方向に収納部を通過させる方向であるので、収納部浄化空気通風手段を収納部に対して物品収納体の横幅方向に配置させることができる。したがって、移動空間の夫々に配置される物品搬送装置が、収納部に対する物品の出し入れを物品収納体の前後幅方向で行うことができ、収納部浄化空気通風手段が邪魔になるのを防止できる。また、収納部浄化空気通風手段は、収納部を通過した浄化空気を横幅方向に隣接する収納部との間において上方側から下方側に流動させるので、浄化空気通風手段にて移動空間を上方側から下方側に流動させる浄化空気の流動を妨げずに、浄化空気を流動させることができる。
以上のことから、物品搬送装置による物品の出し入れを邪魔することなく、物品収納体の収納部に収納されている物品の清浄度を高く保つことができる物品収納設備を提供できるに至った。
Since the storage section purified air ventilation means allows the purified air to pass through the storage section in the lateral width direction from the lateral side of the storage section to each of the plurality of storage sections, the horizontal direction relative to each of the plurality of storage sections Purified air can be ventilated. Therefore, for example, even if the article is held by the article holder and stored in the storage unit in a state of being arranged at intervals in the vertical direction, such as a plate-like article such as a glass substrate, Thus, the purified air can be accurately ventilated. Since the direction in which the purified air is vented is the direction in which the storage portion passes from the lateral side portion of the storage portion in the lateral width direction, the storage portion purified air ventilation means is disposed in the lateral width direction of the article storage body with respect to the storage portion. Can be made. Therefore, the article transporting device disposed in each of the moving spaces can take in and out the articles in the storage unit in the front-rear width direction of the article storage body, and can prevent the storage unit purified air ventilation means from interfering. Further, the storage unit purified air ventilation means causes the purified air that has passed through the storage part to flow from the upper side to the lower side between the storage units adjacent in the lateral width direction. The purified air can be made to flow without hindering the flow of the purified air that is made to flow downward.
From the above, it has become possible to provide an article storage facility that can keep the cleanliness of articles stored in the storage section of the article storage body high without interfering with the loading and unloading of articles by the article transporting apparatus.

本発明にかかる物品収納設備の第2特徴構成は、前記収納部浄化空気通風手段が、前記横幅方向に隣接する前記収納部同士の間において、前記収納部の横側部から前記横幅方向に浄化空気を通風させる通風手段と前記物品収納体を上下方向に通過させる形態で空気を流動可能とする空気流動空間とを前記横幅方向に交互に配置させるように構成されている点にある。   According to a second characteristic configuration of the article storage facility according to the present invention, the storage unit purified air ventilation means purifies from the lateral side of the storage unit in the lateral width direction between the storage units adjacent to each other in the lateral width direction. Ventilation means for ventilating air and an air flow space in which air can flow in a form in which the article storage body is passed in the vertical direction are alternately arranged in the lateral width direction.

前記複数の収納部の夫々に対して、前記収納部同士の間に配置される通風手段が、収納部の横側部から横幅方向に収納部を通過させるように浄化空気を積極的に通風させることができる。そして、収納部を通過した浄化空気は、横幅方向に隣接する収納部同士の間に配置された空気流動空間を上方側から下方側に流動することになる。
このように、物品収納体の横幅方向において、収納部同士の間に通風手段と空気流動空間とが交互に配置されるだけで、収納部浄化空気通風手段を構成することができ、構成の簡素化を図りながら、物品の清浄度を的確に高く保つことができる。
For each of the plurality of storage units, the ventilation means disposed between the storage units actively vents the purified air so that the storage unit passes through the storage unit in the lateral width direction from the lateral side of the storage unit. be able to. And the purified air which passed the accommodating part flows in the air flow space arrange | positioned between the accommodating parts adjacent to a horizontal width direction from the upper side to the downward side.
As described above, the storage unit purified air ventilation unit can be configured simply by arranging the ventilation unit and the air flow space alternately between the storage units in the lateral width direction of the article storage body. It is possible to keep the cleanliness of the article accurately high while making it easy.

本発明にかかる物品収納設備の第3特徴構成は、前記物品収納体が、前記収納部を横幅方向及び上下方向に複数並べて備えた物品収納棚にて構成されている点にある。   A third characteristic configuration of the article storage facility according to the present invention is that the article storage body is configured by an article storage shelf provided with a plurality of the storage units arranged in a horizontal width direction and a vertical direction.

前記物品収納体を物品収納棚にて構成することにより、簡素な構成の物品収納棚を用いながら、収納部を横幅方向及び上下方向に複数並べて効率よく配設することができる。したがって、限られたスペースに複数の収納部を効率よく配設することができながら、構成の簡素化を図ることができる。   By configuring the article storage body with an article storage shelf, it is possible to efficiently arrange a plurality of storage units in the horizontal width direction and the vertical direction while using an article storage shelf with a simple configuration. Therefore, it is possible to simplify the configuration while efficiently arranging a plurality of storage units in a limited space.

本発明にかかる物品収納設備の第4特徴構成は、前記収納部は、上下方向に間隔を隔てて並べる状態で板状の物品の複数を保持した物品保持体を収納可能に構成され、前記収納部浄化空気通風手段が、前記収納部に収納された前記物品保持体に対して上下方向における板状の物品の間隙に浄化空気を通過させる形態で浄化空気を前記収納部の横側部から前記横幅方向に前記収納部を通過させるように構成されている点にある。   According to a fourth characteristic configuration of the article storage facility according to the present invention, the storage unit is configured to be capable of storing an article holder that holds a plurality of plate-like articles in a state of being arranged in the vertical direction with an interval therebetween. The purified air ventilation means passes purified air from the lateral side of the storage part in a form that allows the purified air to pass through the gap between the plate-like articles in the vertical direction with respect to the article holder stored in the storage part. In the point which is comprised so that the said storage part may be allowed to pass through in the width direction.

前記収納部浄化空気通風手段は、物品保持体に対して上下方向における板状の物品の間隙に浄化空気を積極的に通風させることができるので、複数の板状の物品に浄化空気を的確に通風させることができる。したがって、物品保持体に保持された複数の板状の物品の清浄度を的確に高く保つことができる。   The storage section purified air ventilation means can positively vent the purified air through the gap between the plate-like articles in the vertical direction with respect to the article holder, so that the purified air is accurately supplied to the plurality of plate-like articles. It can be ventilated. Therefore, the cleanliness of the plurality of plate-like articles held by the article holder can be kept accurately high.

本発明にかかる物品収納設備の第5特徴構成は、前記物品収納体の前後の前記移動空間の夫々において前記物品収納体とは反対側に、対向用収納部を横幅方向に複数並べて備え且つ前記物品搬送装置にて前記対向用収納部に対する物品の出し入れを可能とする対向用物品収納体が設けられ、前記浄化空気通風手段が、浄化空気を前記移動空間とは反対側から前記対向用物品収納体の前後幅方向に前記対向用収納部を通過させて前記移動空間を上方側から下方側に流動させるように構成されている点にある。   According to a fifth characteristic configuration of the article storage facility according to the present invention, a plurality of opposing storage sections are arranged in the width direction on the opposite side of the article storage body in each of the moving spaces before and after the article storage body, and An article storage body for allowing an article to be taken in and out of the opposing storage section in the article transport device is provided, and the purified air ventilation means stores the purified article from the side opposite to the moving space. The moving space is made to flow from the upper side to the lower side by passing the opposing storage portion in the front-rear width direction of the body.

前記移動空間の夫々において物品収納体とは反対側にも、物品搬送装置にて物品の出し入れが可能な対向用収納部を備えた対向用物品収納体を設けることにより、物品収納体だけでなく、対向用物品収納体にも物品を収納することができ、限られたスペースに物品を効率よく収納させることができる。そして、物品収納体に対する物品の出し入れと対向用物品収納体に対する物品の出し入れとを物品搬送装置が兼用するので、構成の簡素化を図ることができる。
しかも、浄化空気通風手段が、浄化空気を移動空間とは反対側から対向用物品収納体の前後幅方向に対向用収納部を通過させて移動空間を上方側から下方側に流動させるので、対向用収納部に対しても水平方向に浄化空気を通風させることができ、対向用収納部に収納される物品の清浄度も高く保つことができる。
In each of the moving spaces, not only the article storage body but also the opposite article storage body provided with an opposing storage section capable of taking in and out the article by the article transporting device is provided. The article can be stored in the opposite article storage body, and the article can be efficiently stored in a limited space. Since the article transporting apparatus also serves as both the loading and unloading of articles with respect to the article storing body and the loading and unloading of articles with respect to the opposing article storing body, the configuration can be simplified.
In addition, the purified air ventilation means allows the purified air to flow from the upper side to the lower side by allowing the purified air to pass from the opposite side to the moving space in the front-rear width direction of the facing article storage body and from the upper side to the lower side. Purified air can be blown in the horizontal direction also for the storage section, and the purity of the articles stored in the counter storage section can be kept high.

本発明にかかる物品収納設備の第6特徴構成は、前記対向用物品収納体の夫々において前記移動空間とは反対側に、物品に対する処理を施す物品処理部が配置されている点にある。   A sixth characteristic configuration of the article storage facility according to the present invention is that an article processing unit that performs processing on an article is disposed on each of the opposed article storage bodies on the side opposite to the moving space.

前記移動空間の夫々に配置される物品搬送装置は、対向用物品収納体において移動空間とは反対側に配置された物品処理部から搬入される物品を物品収納体の収納部に収納したり、物品収納体の収納部に収納されている物品を対向用物品収納体において移動空間とは反対側に配置された物品処理部に搬出することができる。そして、移動空間の夫々に配置される物品搬送装置の間での物品の受け渡しを物品収納体を用いて行うことができる。したがって、一方の物品収納部から搬入された物品を、物品収納体を用いて一方の物品搬送装置から他方の物品搬送装置に受け渡すことができ、他方の物品搬送装置は、受け渡された物品を他方の物品収納部に搬出させることができる。このように、物品収納体を用いることにより、物品の清浄度を高く保ちながら、一方の物品処理部と他方の物品処理部との間での物品の受け渡しを行うことができる。   The article conveying device arranged in each of the moving spaces stores the articles carried from the article processing unit arranged on the opposite side of the moving space in the opposing article storage body in the storage part of the article storage body, Articles stored in the storage section of the article storage body can be carried out to the article processing section disposed on the opposite side of the moving space in the opposing article storage body. And the delivery of the articles | goods between the articles | goods conveying apparatuses arrange | positioned at each of movement space can be performed using an article | item storage body. Therefore, an article carried in from one article storage unit can be delivered from one article transport apparatus to the other article transport apparatus using the article storage body, and the other article transport apparatus receives the delivered article. Can be carried out to the other article storage unit. As described above, by using the article storage body, it is possible to deliver the article between the one article processing unit and the other article processing unit while keeping the cleanness of the article high.

本発明にかかる物品収納設備の実施形態について図面に基づいて説明する。
この物品収納設備は、図1〜図3に示すように、クリーンルーム1内に設置されており、収納部2を横幅方向に複数並べて備えた物品収納体3と、物品収納体3の前後の移動空間4の夫々に配置されて、移動空間4を移動して収納部2に対する物品Bの出し入れを行う物品搬送装置5と、移動空間4において浄化空気を上方側から下方側に流動させるダウンフロー式の浄化空気通風手段6とを備えて構成されている。
そして、物品収納体3の前後の移動空間4の夫々において物品収納体3とは反対側に、対向用収納部7を横幅方向に複数並べて備え且つ物品搬送装置5にて対向用収納部7に対する物品Bの出し入れを可能とする対向用物品収納体8が設けられている。
また、対向用物品収納体8の夫々において移動空間4とは反対側に、物品Bに対する処理を施す物品処理部9が配置されている。
An embodiment of an article storage facility according to the present invention will be described with reference to the drawings.
As shown in FIGS. 1 to 3, the article storage facility is installed in a clean room 1, and includes an article storage body 3 including a plurality of storage units 2 arranged in the width direction, and movement of the article storage body 3 in the front-rear direction. An article conveying device 5 that is arranged in each of the spaces 4 and moves the moving space 4 to move the article B in and out of the storage unit 2, and a downflow type in which the purified air flows from the upper side to the lower side in the moving space 4 The purified air ventilation means 6 is provided.
In each of the moving spaces 4 before and after the article storage body 3, a plurality of opposing storage sections 7 are arranged in the width direction on the opposite side of the article storage body 3, and the article transporting device 5 is provided with respect to the opposing storage section 7. An opposing article storage body 8 that allows the article B to be taken in and out is provided.
In addition, an article processing unit 9 that performs processing on the article B is disposed on the opposite side of the moving space 4 in each of the opposing article storage bodies 8.

前記クリーンルーム1は、その床部を通気孔が多数形成された多孔状のグレーティング床10にて構成してあり、その天井に形成された天井吹出部11から浄化空気を床側に向けて通風させるように構成されている。そして、クリーンルーム1には、ブース12により上部及び側周囲が囲まれた空間が形成され、そのブース12にて囲まれた空間内に物品収納体3、対向用物品収納体8及び物品搬送装置5が設置されている。   The clean room 1 is composed of a porous grating floor 10 in which a large number of air holes are formed in the floor portion, and the purified air is vented toward the floor side from a ceiling blowing portion 11 formed in the ceiling. It is configured as follows. In the clean room 1, a space surrounded by the booth 12 is formed with an upper portion and a side periphery. The article storage body 3, the opposing article storage body 8, and the article transport device 5 are included in the space surrounded by the booth 12. Is installed.

前記物品収納体3は、収納部2を横幅方向及び上下方向に複数並べて備えた物品収納棚13にて構成されている。前記物品収納棚13は、グレーティング床10上に設置され、棚横幅方向に間隔を隔てて立設された前後一対の支柱14と、前後一対の支柱9の夫々に支持されて上下方向に間隔を隔てて設けられた載置支持部15とから構成されている。そして、前後一対の支柱14と左右一対の載置支持部15とにより1つの収納部2が形成され、この収納部2が縦横に複数並べて設けられている。各収納部2は、棚横幅方向に隣接するもの同士及び上下方向に隣接するもの同士が空気流動可能に連通されている。
また、最下段の収納部2は、設定高さよりも上方側に位置するように設けられ、その最下段の収納部2の下方には、浄化空気が流動する下方流動空間16が形成されている。ちなみに、最下段の収納部2の高さは、物品処理部9に物品Bを搬送する高さよりも高くしている。
The article storage body 3 includes an article storage shelf 13 provided with a plurality of storage sections 2 arranged in the horizontal width direction and the vertical direction. The article storage shelves 13 are installed on the grating floor 10 and supported by a pair of front and rear columns 14 and a pair of front and rear columns 9 that are erected at intervals in the width direction of the shelf, and are spaced apart in the vertical direction. It is comprised from the mounting support part 15 provided apart. A pair of front and rear columns 14 and a pair of left and right mounting support portions 15 form a single storage portion 2, and a plurality of the storage portions 2 are arranged side by side in the vertical and horizontal directions. In each storage unit 2, those adjacent to each other in the horizontal direction of the shelf and those adjacent to each other in the vertical direction communicate with each other so as to allow air flow.
The lowermost storage section 2 is provided so as to be located above the set height, and a lower flow space 16 in which purified air flows is formed below the lowermost storage section 2. . Incidentally, the height of the lowermost storage unit 2 is higher than the height at which the article B is conveyed to the article processing unit 9.

前記対向用物品収納体8は、移動空間4を挟んで物品収納体3と対向する状態でグレーティング床10上に設置されており、物品収納体3の前後幅方向の両側に設けられている。そして、対向用物品収納体8は、物品収納体3と同様に、対向用収納部7を横幅方向及び上下方向に複数並べて備えた対向用物品収納棚にて構成されている。この対向用物品収納体8の構成は、物品収納体3と同様の構成であるので、詳細な説明は省略する。   The opposing article storage body 8 is installed on the grating floor 10 so as to face the article storage body 3 with the moving space 4 interposed therebetween, and is provided on both sides of the article storage body 3 in the front-rear width direction. The opposing article storage body 8 is constituted by an opposing article storage shelf provided with a plurality of opposing storage sections 7 arranged in the horizontal width direction and the vertical direction, similarly to the article storage body 3. Since the configuration of the opposing article storage body 8 is the same as that of the article storage body 3, detailed description thereof is omitted.

前記収納部2及び対向用収納部7は、図4に示すように、物品Bとして、例えば、ガラス基板などの板状の物品17を保持可能な物品保持体18を収納自在に構成されている。前記物品保持体18は、格子状に形成された上枠体18a及び下枠体18bと、上枠体18aと下枠体18bとを連結する複数の連結体18cと、その連結体18cの上下方向に間隔を隔てて水平方向に延びる状態で設けられた棒状の支持部18dとから構成されている。そして、各支持部18dにて載置支持する状態で板状の物品17を上下方向に間隔を隔てて並べて保持しており、物品保持体18の上部、下部、及び、側部の全てにおいて空気流動可能に構成されている。このように、物品保持体18は、上下方向に間隔を隔てて並べる状態で板状の物品17の複数を保持するように構成されている。   As shown in FIG. 4, the storage unit 2 and the opposing storage unit 7 are configured to be capable of storing an article holder 18 that can hold, for example, a plate-like article 17 such as a glass substrate as the article B. . The article holder 18 includes an upper frame body 18a and a lower frame body 18b formed in a lattice shape, a plurality of coupling bodies 18c that couple the upper frame body 18a and the lower frame body 18b, and upper and lower sides of the coupling body 18c. It is comprised from the rod-shaped support part 18d provided in the state extended in the horizontal direction at intervals in the direction. And the plate-shaped article | item 17 is hold | maintained side by side at intervals in the up-down direction in the state mounted and supported by each support part 18d, and air in all of the upper part of the article | item holding body 18, and a side part. It is configured to be flowable. As described above, the article holder 18 is configured to hold a plurality of plate-like articles 17 in a state where the article holders 18 are arranged in the vertical direction at intervals.

前記浄化空気通風手段6は、図2の矢印で示すように、対向用物品収納体8の夫々に対して、浄化空気を移動空間4とは反対側から対向用物品収納体8の前後幅方向に対向用収納部7を通過させて移動空間4を上方側から下方側に流動させるように構成されている。
そして、浄化空気通風手段6は、クリーンルーム1内に浄化空気を循環させる形態で供給するクリーンルーム通風手段19と、ブース12内に設けられた対向用物品収納体8の各対向用収納部7に浄化空気を通風する収納部通風手段20と、ブース12内の空気をブース11外のクリーンルーム内1に排気する排気用開口部21とを備えて構成されている。
As shown by the arrows in FIG. 2, the purified air ventilation means 6 sends purified air to the opposite article storage body 8 from the side opposite to the moving space 4 in the front-rear width direction of the opposite article storage body 8. The moving space 4 is made to flow from the upper side to the lower side by passing through the opposing storage portion 7.
The purified air ventilation means 6 purifies the clean room ventilation means 19 that supplies the purified air in a form that circulates in the clean room 1 and the opposing storage portions 7 of the opposing article storage body 8 provided in the booth 12. A storage unit ventilation means 20 for ventilating air and an exhaust opening 21 for exhausting the air in the booth 12 to the clean room 1 outside the booth 11 are configured.

前記クリーンルーム通風手段19は、グレーティング床10を通過した空気を清浄化して浄化空気として天井吹出部11から吹き出す形態で浄化空気をクリーンルーム1に循環させるように構成されている。
前記クリーンルーム通風手段19は、グレーティング床10の下方側に設けられた吸気室22、天井吹出部11の上方側に設けられた空気チャンバ室23、天井吹出部11に並設されたHEPAフィルタなどからなるエアーフィルタ24、吸気室22と空気チャンバ室23とを連通接続する接続流路25、その接続流路25に設けられて吸気室22に吸引作用する循環用送風機26、接続流路25において循環用送風機26の空気吐出側に設けられたプレフィルタ27から構成されている。
The clean room ventilation means 19 is configured to circulate the purified air to the clean room 1 in a form in which the air that has passed through the grating floor 10 is purified and blown out from the ceiling blowing section 11 as purified air.
The clean room ventilation means 19 includes an intake chamber 22 provided on the lower side of the grating floor 10, an air chamber chamber 23 provided on the upper side of the ceiling outlet 11, a HEPA filter provided in parallel with the ceiling outlet 11, and the like. The air filter 24, the connection flow path 25 that connects the intake chamber 22 and the air chamber 23, the circulation fan 26 that is provided in the connection flow path 25 and sucks the intake chamber 22, and circulates in the connection flow path 25. It is comprised from the pre filter 27 provided in the air discharge side of the air blower 26.

前記クリーンルーム1内の空気は、循環用送風機26の通風作用によってグレーティング床10を通して吸気室22に吸い込まれて接続流路25を流動し、プレフィルタ27にて清浄化されて空気チャンバ室23に至る。そして、空気チャンバ室23に到達した空気は、エアーフィルタ24にて清浄化されて浄化空気として、天井吹出部11からクリーンルーム1内に向けて下向きに吹き出される。
このようにして、クリーンルーム1内の空気が、プレフィルタ27及びエアーフィルタ24にて清浄化されながら循環されて、浄化空気を天井吹出部11から下方側に吹き出す形態でクリーンルーム1に常時供給するように構成されている。
The air in the clean room 1 is sucked into the intake chamber 22 through the grating floor 10 by the ventilation action of the circulation fan 26, flows through the connection flow path 25, is cleaned by the prefilter 27, and reaches the air chamber chamber 23. . Then, the air that has reached the air chamber chamber 23 is purified by the air filter 24 and blown downward from the ceiling blowing section 11 into the clean room 1 as purified air.
In this way, the air in the clean room 1 is circulated while being cleaned by the pre-filter 27 and the air filter 24 so that the purified air is constantly supplied to the clean room 1 in a form of blowing downward from the ceiling blowing portion 11. It is configured.

前記接続流路25の循環用送風機26の吸い込み側には、外気取入流路28が接続されており、その外気取入流路28に外気取入量調節用ダンパ29が設けられている。また、接続流路25の循環用送風機26の吐出側には、排気流路30が接続されており、その排気流路30に排気量調節用ダンパ31が設けられている。
そして、外気取入量調節用ダンパ29及び排気量調節用ダンパ31の夫々の開度を調節することにより、クリーンルーム通風手段19にて循環されるクリーンルーム1内の空気のうちの所定量が新鮮な空気と交換されるように構成されている。
An outside air intake passage 28 is connected to the suction side of the circulation fan 26 of the connection passage 25, and an outside air intake amount adjusting damper 29 is provided in the outside air intake passage 28. An exhaust passage 30 is connected to the discharge side of the circulation fan 26 in the connection passage 25, and an exhaust amount adjustment damper 31 is provided in the exhaust passage 30.
A predetermined amount of the air in the clean room 1 circulated by the clean room ventilation means 19 is fresh by adjusting the respective opening degrees of the outside air intake amount adjusting damper 29 and the exhaust amount adjusting damper 31. It is configured to be exchanged with air.

前記収納部通風手段20は、複数の対向用収納部7の夫々に対応してブース12の側壁部12aに装備されている。そして、収納部通風手段20は、クリーンルーム1内の浄化空気を清浄化してブース12内に通風させる状態で浄化空気を移動空間4とは反対側から対向用収納部7を通過させるように構成されている。
前記収納部通風手段20は、塵埃を除去する除塵フィルタ32と、ブース12外の浄化空気を吸引して除塵フィルタ32を通過させる状態で移動空間4とは反対側から対向用収納部7を通過させるように浄化空気を通風させる送風ファン33とから構成されている。
前記送風ファン33によってブース12内に通風される浄化空気は、移動空間4とは反対側から対向用収納部7を通過するように対向用物品収納体8の前後幅方向に沿って通風され、対向用収納部7に収納された物品保持体18に対して上下方向における板状の物品17の間隙に通過する状態で対向用収納部7を通過する。
The storage portion ventilation means 20 is provided on the side wall portion 12 a of the booth 12 corresponding to each of the plurality of opposing storage portions 7. The storage unit ventilation means 20 is configured to allow the purified air to pass through the opposing storage unit 7 from the side opposite to the moving space 4 in a state where the purified air in the clean room 1 is purified and ventilated in the booth 12. ing.
The storage section ventilation means 20 passes through the opposing storage section 7 from the side opposite to the moving space 4 in a state in which the dust removal filter 32 for removing dust and the purified air outside the booth 12 is sucked and passed through the dust removal filter 32. It is comprised from the ventilation fan 33 which allows purified air to ventilate.
The purified air ventilated in the booth 12 by the blower fan 33 is ventilated along the front-rear width direction of the opposing article storage body 8 so as to pass through the opposing storage section 7 from the side opposite to the moving space 4. It passes through the opposing storage part 7 in a state of passing through the gap between the plate-like articles 17 in the vertical direction with respect to the article holder 18 stored in the opposing storage part 7.

前記排気用開口部21は、物品収納体3の前後両側に配置された対向用物品収納体8の一方に対向するブース12の側壁部12aのみに設けられている。そして、排気用開口部21は、下方流動空間16に対向する状態でブース12の側壁部12aの下端部に配設されている。   The exhaust opening 21 is provided only on the side wall 12 a of the booth 12 facing one of the opposing article storage bodies 8 disposed on the front and rear sides of the article storage body 3. The exhaust opening 21 is disposed at the lower end of the side wall 12 a of the booth 12 so as to face the lower flow space 16.

前記ブース12内では、送風ファン33により浄化空気が通風されるのでその浄化空気の圧力が高くなる。それに対して、排気用開口部21により浄化空気が排気されるので、その浄化空気の圧力が低くなる。そして、この浄化空気の圧力差により、ブース12内の空気は、移動空間4とは反対側から対向用収納部7を通過して移動空間4を上方側から下方側に向けて流動するダウンフローとなる。移動空間4を上方側から下方側に向けて流動する浄化空気は、その一部が、排気用開口部21に向けて流動してブース12外に排気されたのち、下方側に向けて流動してグレーティング床10を通して吸気室22に至る。残りの一部が、そのまま下方側に流動してグレーティング床10を通して吸気室22に至る。   In the booth 12, the purified air is ventilated by the blower fan 33, so that the pressure of the purified air is increased. On the other hand, since the purified air is exhausted through the exhaust opening 21, the pressure of the purified air is lowered. Then, due to the pressure difference of the purified air, the air in the booth 12 passes through the opposing storage portion 7 from the side opposite to the moving space 4 and flows down the moving space 4 from the upper side to the lower side. It becomes. A part of the purified air flowing from the upper side to the lower side of the moving space 4 flows toward the exhaust opening 21 and is exhausted outside the booth 12 and then flows downward. To the intake chamber 22 through the grating floor 10. The remaining part flows downward as it is and reaches the intake chamber 22 through the grating floor 10.

前記物品収納体3においては、図1及び図2に図5及び図6に示すように、複数の収納部2の夫々に対して、浄化空気を収納部2の横側部から物品収納体3の横幅方向に収納部2を通過させて横幅方向に隣接する収納部2との間において上方側から下方側に流動させる収納部浄化空気通風手段34が設けられている。
前記収納部浄化空気通風手段34は、図5及び図6に示すように、横幅方向に隣接する収納部2同士の間において、収納部2の横側部から横幅方向に浄化空気を通風させる通風手段35と物品収納体3を上下方向に通過させる形態で空気を流動可能とする空気流動空間36とを横幅方向に交互に配置させるように構成されている。
そして、収納部浄化空気通風手段34は、収納部2に収納された物品保持体18に対して上下方向における板状の物品17の間隙に浄化空気を通過させる形態で浄化空気を収納部2の横側部から横幅方向に収納部2を通過させるように構成されている。
As shown in FIGS. 1 and 2 in FIGS. 5 and 6, in the article storage body 3, purified air is supplied from the lateral side portion of the storage section 2 to each of the plurality of storage sections 2. The storage section purified air ventilation means 34 is provided for allowing the storage section 2 to pass in the horizontal width direction and flowing from the upper side to the lower side between the storage sections 2 adjacent in the horizontal width direction.
As shown in FIGS. 5 and 6, the storage section purified air ventilation means 34 ventilates the purified air in the lateral width direction from the lateral side of the storage section 2 between the storage sections 2 adjacent in the lateral width direction. The air flow space 36 in which the air can flow in a form in which the means 35 and the article storage body 3 are passed in the vertical direction is alternately arranged in the horizontal width direction.
The storage section purified air ventilation means 34 allows the purified air to pass through the gap between the plate-shaped articles 17 in the vertical direction with respect to the article holder 18 stored in the storage section 2 in the storage section 2. It is comprised so that the accommodating part 2 may be allowed to pass from a horizontal side part to a horizontal width direction.

説明を加えると、物品収納体3の横幅方向に隣接する収納部2同士の間の夫々には、上端部がブース12内に開口され且つ下端部がグレーティング床10に接続されて、物品収納体3を上下方向に貫通する貫通路37が設けられている。そして、物品収納体3の横幅方向に並ぶ貫通路37に対して、通風手段35と空気流動空間36とを交互に配置させる。
前記通風手段35は、貫通路37において、浄化空気を通風させる方向が互いに反対側となる状態で2つ配置されている。そして、通風手段35は、収納部用除塵フィルタ38と、貫通路37内の空気を吸引して収納部用除塵フィルタ38を通過させる状態で収納部2の横側部から横幅方向に浄化空気を通風させる収納部用送風ファン39とから構成されている。
前記空気流動空間36は、貫通路37をそのまま利用して構成されており、収納部2を通過した浄化空気を貫通路37の収納部2に対向する部分に形成された複数の通気孔37aを通して貫通路37内に流動させて物品収納体3を上下方向に通過させるように構成されている。
In other words, each of the storage units 2 adjacent to each other in the widthwise direction of the article storage body 3 has an upper end opened in the booth 12 and a lower end connected to the grating floor 10. A through passage 37 is provided to penetrate 3 in the vertical direction. And the ventilation means 35 and the air flow space 36 are alternately arrange | positioned with respect to the through-passage 37 lined up in the horizontal width direction of the article | item storage body 3. As shown in FIG.
Two ventilation means 35 are arranged in the through-passage 37 in a state where the directions in which the purified air is passed are opposite to each other. The ventilation means 35 sucks the air in the storage portion dust removal filter 38 and the through-passage 37 and passes the storage portion dust removal filter 38 through the storage portion 2 from the lateral side of the storage portion 2 in the lateral width direction. It is comprised from the ventilation fan 39 for the accommodating part which ventilates.
The air flow space 36 is configured using the through passage 37 as it is, and the purified air that has passed through the storage portion 2 passes through a plurality of ventilation holes 37 a formed in a portion of the through passage 37 that faces the storage portion 2. It is comprised so that it may flow in the through-passage 37 and the article | item storage body 3 may pass in an up-down direction.

各収納部2では、収納部用送風ファン39により浄化空気が通風されるのでその浄化空気の圧力が高くなる。それに対して、空気流動空間36に流動する浄化空気は、グレーティング床10により排気されるので、空気流動空間36の下端部での浄化空気の圧力が低くなる。この浄化空気の圧力差により、浄化空気は、複数の収納部2の夫々において、収納部2の横側部から物品収納体3の横幅方向に収納部2を通過し、横幅方向に隣接する収納部2との間の空気流動空間36を上方側から下方側に流動する。   In each storage unit 2, the purified air is ventilated by the storage unit blower fan 39, so the pressure of the purified air increases. On the other hand, since the purified air flowing into the air flow space 36 is exhausted by the grating floor 10, the pressure of the purified air at the lower end of the air flow space 36 is lowered. Due to the pressure difference of the purified air, the purified air passes through the storage portion 2 in the lateral width direction of the article storage body 3 from the lateral side portion of the storage portion 2 in each of the plurality of storage portions 2 and is stored adjacent to the lateral width direction. The air flow space 36 between the parts 2 flows from the upper side to the lower side.

前記対向用物品収納体8の夫々には、図1〜図3に示すように、物品処理部9に対する板状の物品17の搬出又は物品処理部9からの板状の物品17の搬入を行う物品搬出入部40が複数設けられている。この物品搬出入部40では、物品保持体18から板状の物品17を1つずつ取り出して物品処理部9に供給する、又は、物品処理部9から1つずつ供給される板状の物品17を物品保持体18に保持させるように構成されている。
各物品搬出入部40には、物品保持体18を昇降自在に載置支持する左右一対の昇降支持体41と、板状の物品17を載置支持自在で且つ載置支持した板状の物品17を搬送自在な複数の駆動ローラを備えた搬送体42とが設けられている。搬送体42は、左右一対の昇降支持体41の間に配置されている。
そして、物品搬出入部40と物品処理部9とを連通する連通部分もブース12にて囲まれており、その連通部分に浄化空気を上方側から下方側に向けて通風させる搬出入用浄化空気通風手段43が設けられている。
As shown in FIGS. 1 to 3, the plate-shaped article 17 is carried out from the article processing section 9 or the plate-shaped article 17 is carried from the article processing section 9 to each of the opposing article storage bodies 8. A plurality of article carry-in / out sections 40 are provided. In the article carry-in / out section 40, the plate-like articles 17 are taken out one by one from the article holder 18 and supplied to the article processing section 9, or the plate-like articles 17 supplied one by one from the article processing section 9 are supplied. The article holder 18 is configured to be held.
In each article loading / unloading section 40, a pair of left and right lifting support bodies 41 for placing and supporting the article holding body 18 so as to be movable up and down, and a plate-like article 17 on which the plate-like article 17 can be placed and supported. And a transport body 42 having a plurality of drive rollers that can freely transport the transport roller. The transport body 42 is disposed between a pair of left and right lifting support bodies 41.
The communicating part that communicates the article carry-in / out part 40 and the article processing part 9 is also surrounded by the booth 12, and purified air ventilation for carrying in and out is made to vent the purified air from the upper side to the lower side through the communicating part. Means 43 are provided.

前記物品搬出入部40にて物品処理部9に板状の物品17を1つずつ供給するときには、左右一対の昇降支持体41にて物品保持体18を下降させることにより、物品保持体18から1つの板状の物品17を搬送体42に載置支持させる。その後、搬送体42にて板状の物品17を載置支持して物品処理部9に搬送する。このような動作を繰り返すことによって、物品保持体18から板状の物品17を1つずつ取り出して物品処理部9に供給する。
前記物品処理部9から1つずつ供給される板状の物品17を物品搬出入部40にて物品保持体18に保持させるときには、搬送体42が1つの板状の物品17を物品保持体18にて保持可能な位置まで搬送して、左右一対の昇降支持体41にて物品保持体18を上昇させることにより、1つの板状の物品17を物品保持体18に保持させる。このような動作を繰り返すことによって、物品処理部9から1つずつ供給される板状の物品17を物品保持体18に上下方向に並べる状態で順次保持させる。
When the plate-like article 17 is supplied to the article processing unit 9 one by one in the article carry-in / out unit 40, the article holder 18 is moved down by the pair of left and right lifting support bodies 41, so that Two plate-like articles 17 are placed and supported on the carrier 42. Thereafter, the plate-like article 17 is placed and supported by the carrier 42 and conveyed to the article processing unit 9. By repeating such an operation, the plate-like articles 17 are taken out one by one from the article holder 18 and supplied to the article processing unit 9.
When the plate-like article 17 supplied one by one from the article processing unit 9 is held on the article holder 18 by the article carry-in / out unit 40, the carrier 42 puts one plate-like article 17 on the article holder 18. The plate-shaped article 17 is held by the article holder 18 by lifting the article holder 18 by the pair of right and left lifting supports 41. By repeating such an operation, the plate-like articles 17 supplied one by one from the article processing unit 9 are sequentially held on the article holder 18 in a state of being arranged in the vertical direction.

前記物品搬送装置5の夫々は、移動空間4のグレーティング床10に設けられたガイドレール44及びブース12の上部に設けられた天井側ガイドレール45に案内されて走行する走行台車46と、その走行台車46に立設された昇降マスト47に沿って昇降自在な昇降台48と、その昇降台48に装備されて物品保持体18の移載を行う物品移載装置49とを備えたスタッカークレーンにて構成されている。
そして、図示は省略するが、物品搬送装置5の作動を制御する制御装置が設けられている。
Each of the article conveying devices 5 includes a traveling carriage 46 that travels while being guided by a guide rail 44 provided on the grating floor 10 of the moving space 4 and a ceiling-side guide rail 45 provided on the booth 12. A stacker crane including an elevator 48 that can be raised and lowered along an elevator mast 47 provided on a carriage 46 and an article transfer device 49 that is mounted on the elevator 48 and transfers an article holder 18. Configured.
And although illustration is abbreviate | omitted, the control apparatus which controls the action | operation of the article conveyance apparatus 5 is provided.

前記物品移載装置49は、図7及び図8に示すように、上下軸芯P1周りに旋回自在な旋回台50、及び、その旋回台50上に設けられた載置部51を出退移動自在に支持するリンク機構52から構成されている。そして、物品移載装置49は、旋回台50及びリンク機構52により載置部51を旋回移動可能でかつ出退移動可能に構成されている。
前記リンク機構52は、その基端部が上下軸芯P2周りで回動自在に旋回台50に連結された一対の操作リンク53と、操作リンク53の先端部に対して上下軸芯P3周りで回動自在に連結されかつ載置部51に対して上下軸芯P4周りで回動自在に連結された揺動リンク54とから構成されている。
図外の移載用電動モータにて一対の操作リンク53を連動して上下軸芯周りに揺動操作することにより、載置部51を昇降台48に対して突出させる突出状態と載置部51を昇降台48に対して引退させる引退状態とに切り換え自在に構成されている。そして、物品移載装置49は、突出状態(図8参照)と引退状態(図7参照)とに切り換えることによって、収納部2、対向用収納部7及び物品搬出入部40の昇降支持体41に対する物品Bの移載を行うように構成されている。
As shown in FIGS. 7 and 8, the article transfer device 49 moves in and out of a swivel base 50 that can swivel around the vertical axis P <b> 1 and a mounting portion 51 provided on the swivel base 50. The link mechanism 52 is supported freely. The article transfer device 49 is configured such that the placing unit 51 can be swiveled and moved back and forth by the swivel base 50 and the link mechanism 52.
The link mechanism 52 has a pair of operation links 53 whose base end portions are connected to the swivel base 50 so as to be rotatable about the vertical axis P2 and about the vertical axis P3 with respect to the distal end of the operation link 53. The swing link 54 is pivotably connected and is pivotally connected to the mounting portion 51 around the vertical axis P4.
A protruding state in which the mounting portion 51 protrudes from the lifting platform 48 and the mounting portion by interlocking the pair of operation links 53 with a transfer electric motor (not shown) and swinging them around the vertical axis. It is configured to be switchable to a retreat state in which 51 is retreated with respect to the lift 48. Then, the article transfer device 49 switches between the protruding state (see FIG. 8) and the retracted state (see FIG. 7), so that the storage unit 2, the opposing storage unit 7 and the article loading / unloading unit 40 with respect to the lifting support body 41. The article B is configured to be transferred.

例えば、一方の物品処理部9から搬入された板状の物品17を一時保管して、他方の物品処理部9に搬出する場合において、物品搬送装置5の動作について説明する。
まず、一方の物品処理部9から搬入された板状の物品17を一時保管するときについて説明する。
一方の物品処理部9から1つずつ供給される板状の物品17を物品搬出入部40にて物品保持体18に保持させると、一方の物品搬送装置5が、走行台車46の走行、昇降台48の昇降、及び、物品移載装置49の作動によって、物品搬出入部40の昇降支持体41まで昇降台48を移動させて昇降支持体41から物品保持体18を受け取る。その後、複数の収納部2から物品保持体18を収納すべき移載対象の収納部を選択して、一方の物品搬送装置5は、走行台車46の走行、昇降台48の昇降、及び、物品移載装置49の作動によって、移載対象の収納部2まで昇降台48を移動させて受け取った物品保持体18を移載対象の収納部2に収納する。
また、一方の物品搬送装置5は、一方の物品処理部9から搬入された板状の物品17を保持した物品保持体18を一方の対向用物品収納体8の対向用収納部7に収納させることもできる。
For example, when the plate-shaped article 17 carried in from one article processing unit 9 is temporarily stored and carried out to the other article processing unit 9, the operation of the article conveying device 5 will be described.
First, the case where the plate-shaped article 17 carried in from one article processing unit 9 is temporarily stored will be described.
When the plate-like articles 17 supplied one by one from one article processing section 9 are held by the article holder 18 in the article carry-in / out section 40, the one article transport device 5 moves the traveling carriage 46 on the traveling platform. The lifting / lowering table 48 is moved to the lifting / lowering support body 41 of the article loading / unloading section 40 and the article holder 18 is received from the lifting / lowering support body 41 by the lifting / lowering 48 and the operation of the article transfer device 49. Thereafter, a storage target storage unit in which the article holder 18 is to be stored is selected from the plurality of storage units 2, and the one article transport device 5 is configured to run the traveling carriage 46, raise and lower the lifting platform 48, and the article. By the operation of the transfer device 49, the lifting / lowering table 48 is moved to the transfer target storage unit 2, and the received article holder 18 is stored in the transfer target storage unit 2.
The one article transporting device 5 stores the article holder 18 holding the plate-like article 17 carried in from the one article processing section 9 in the opposing storage section 7 of the one opposing article storage body 8. You can also

次に、収納部2に収納されている物品保持体18に保持された板状の物品17を他方の物品処理部9に搬出するときについて説明する。
前記複数の収納部2から他方の物品処理部9に搬出する板状の物品17を保持した物品収納体18が収納されている収納部2を移載対象の収納部2と選択して、他方の物品搬送装置5が、走行台車46の走行、昇降台48の昇降、及び、物品移載装置49の作動によって、移載対象の収納部2まで昇降台48を移動させて移載対象の収納部2に収納されている物品保持体18を取り出す。その後、他方の物品搬送装置5が、走行台車46の走行、昇降台48の昇降、及び、物品移載装置49の作動によって、他方の物品処理部9に板状の物品17を搬出する物品搬出入部40の昇降支持体41に物品保持体18を移載する。そして、物品搬出入部40にて、物品処理部9に板状の物品17を1つずつ供給する。
また、他方の物品搬送装置5は、収納部2に収納されている物品保持体18を対向用物品収納体8の対向用収納部7に収納させることもできる。
Next, a case where the plate-like article 17 held by the article holder 18 stored in the storage unit 2 is carried out to the other article processing unit 9 will be described.
The storage unit 2 in which the article storage body 18 holding the plate-like article 17 carried out from the plurality of storage units 2 to the other article processing unit 9 is stored is selected as the storage unit 2 to be transferred, and the other The article transport device 5 moves the lifting platform 48 to the storage section 2 to be transferred by moving the traveling carriage 46, raising and lowering the lifting platform 48, and operating the article transfer device 49. The article holder 18 stored in the section 2 is taken out. Thereafter, the other article transporting device 5 carries out the article carrying out the plate-like article 17 to the other article processing unit 9 by the traveling of the traveling carriage 46, the raising / lowering of the elevator 48, and the operation of the article transfer device 49. The article holder 18 is transferred to the elevating support 41 of the entrance 40. Then, the article carrying-in / out unit 40 supplies the plate-like articles 17 to the article processing unit 9 one by one.
The other article transporting device 5 can also store the article holding body 18 stored in the storage section 2 in the opposing storage section 7 of the opposing article storage body 8.

〔別実施形態〕
(1)上記実施形態では、収納部浄化空気通風手段34が、通風手段35と空気流動空間36とを備えて構成されているが、収納部浄化空気通風手段34は、複数の収納部2の夫々に対して、浄化空気を収納部2の横側部から横幅方向に収納部2を通過させて横幅方向に隣接する収納部2との間において上方側から下方側に流動させるものであればよく、どのような構成とするかは適宜変更が可能である。
[Another embodiment]
(1) In the above embodiment, the storage section purified air ventilation means 34 includes the ventilation means 35 and the air flow space 36, but the storage section purified air ventilation means 34 includes a plurality of storage sections 2. As long as the purified air is allowed to flow from the upper side to the lower side between the storage units 2 adjacent to each other in the horizontal width direction through the storage unit 2 in the horizontal width direction from the horizontal side portion of the storage unit 2, respectively. In many cases, the configuration can be appropriately changed.

(2)上記実施形態では、物品収納体3の横幅方向に隣接する収納部2同士の間の夫々に貫通路37を設け、その貫通路37に対して通風手段35と空気流動空間36とを物品収納体3の横幅方向に交互に配置させているが、通風手段35及び空気流動空間36を物品収納体3の横幅方向に隣接する収納部2同士の間にどのようにして配置させるかは適宜変更が可能である。
例えば、物品収納体3の横幅方向に隣接する収納部2同士の間の夫々に、物品収納体3を上下方向に連通させる一連の空間を設け、その空間に対して通風手段35と空気流動空間36とを物品収納体3の横幅方向に交互に配置させることもできる。この場合、通風手段35は支柱14などに固定支持する。
(2) In the above embodiment, the through passage 37 is provided between the storage portions 2 adjacent to each other in the width direction of the article storage body 3, and the ventilation means 35 and the air flow space 36 are provided to the through passage 37. Although it arrange | positions alternately in the width direction of the article | item storage body 3, how to arrange | position the ventilation means 35 and the air flow space 36 between the storage parts 2 adjacent in the width direction of the article | item storage body 3 is determined. Changes can be made as appropriate.
For example, a series of spaces that allow the article storage body 3 to communicate in the vertical direction are provided between the storage portions 2 adjacent to each other in the lateral width direction of the article storage body 3, and the ventilation means 35 and the air flow space are provided in the space. 36 can be alternately arranged in the width direction of the article storage body 3. In this case, the ventilation means 35 is fixedly supported on the column 14 or the like.

(3)上記実施形態では、物品収納体3が、収納部2を横幅方向及び上下方向に複数並べた物品収納棚13にて構成しているが、単に、収納部2を横幅方向に複数並べたものを物品収納体3とすることもでき、物品収納体3をどのような構成とするかは適宜変更が可能である。 (3) In the above embodiment, the article storage body 3 is configured by the article storage shelf 13 in which a plurality of storage units 2 are arranged in the horizontal width direction and the vertical direction, but simply a plurality of storage units 2 are arranged in the horizontal width direction. The article storage body 3 can also be used, and the configuration of the article storage body 3 can be changed as appropriate.

(4)上記実施形態では、収納部2が、物品Bとして、複数の板状の物品17を保持した物品保持体18を収納可能に構成されているが、どのような物品を収納可能とするかは適宜変更が可能である。また、物品保持体18は、板状の物品17を保持する枚数については適宜変更が可能である。また、物品保持体18は、上下方向に間隔を隔てて並べる状態で板状の物品17の複数を保持しているが、どのような状態で複数の板状の物品17を保持するかは適宜変更が可能である。 (4) In the above-described embodiment, the storage unit 2 is configured to store the article holding body 18 holding the plurality of plate-like articles 17 as the article B. However, any article can be stored. This can be changed as appropriate. Further, the number of the article holders 18 holding the plate-like articles 17 can be changed as appropriate. Further, the article holder 18 holds a plurality of the plate-like articles 17 in a state where the article holders 18 are arranged at intervals in the vertical direction, but in what state the plurality of plate-like articles 17 are held appropriately. It can be changed.

(5)上記実施形態では、移動空間4の夫々において物品収納体3とは反対側に、対向用物品収納体8を設けているが、この対向用物品収納体8を設けずに実施することも可能である。また、対向用物品収納体8の夫々において移動空間4とは反対側に、物品処理部9を設けているが、この物品処理部9についても設けずに実施することも可能である。 (5) In the above-described embodiment, the opposing article storage body 8 is provided on the opposite side of the article storage body 3 in each of the moving spaces 4, but this is performed without providing the opposing article storage body 8. Is also possible. In addition, although the article processing unit 9 is provided on the opposite side of the moving space 4 in each of the opposing article storage bodies 8, it is also possible to carry out without providing the article processing unit 9.

(6)上記実施形態では、浄化空気通風手段6が、クリーンルーム通風手段19、収納部通風手段20、排気用開口部21を備えることにより、浄化空気を移動空間4とは反対側から対向用物品収納体8の前後幅方向に対向用収納部7を通過させて移動空間4を上方側から下方側に流動させているが、このように浄化空気を流動させるために、どのような構成を備えるかは適宜変更が可能である。 (6) In the above embodiment, the purified air ventilation means 6 includes the clean room ventilation means 19, the storage part ventilation means 20, and the exhaust opening 21, thereby allowing the purified air to flow from the opposite side to the moving space 4. The moving space 4 is caused to flow from the upper side to the lower side by passing through the opposing storage portion 7 in the front-rear width direction of the storage body 8, but in order to make the purified air flow in this way, any configuration is provided. This can be changed as appropriate.

物品収納設備の平面図Top view of goods storage equipment 図1のA−A断面図AA sectional view of FIG. 図1のD−D断面図DD sectional view of FIG. 物品保持体の斜視図Perspective view of article holder 物品収納体の平面図Top view of the article container 物品収納体の側面図Side view of article storage 引退状態における物品搬送装置の平面図Top view of the article transport device in the retired state 突出状態における物品搬送装置の平面図Top view of the article conveying device in the protruding state

符号の説明Explanation of symbols

2 収納部
3 物品収納体
4 移動空間
5 物品搬送装置
6 浄化空気通風手段
7 対向用収納部
8 対向用物品収納体
9 物品処理部
13 物品収納棚
17 板状の物品
18 物品保持体
34 収納部浄化空気通風手段
35 通風手段
36 空気流動空間
DESCRIPTION OF SYMBOLS 2 Storage part 3 Article storage body 4 Moving space 5 Article conveyance apparatus 6 Purified air ventilation means 7 Opposite storage part 8 Opposite article storage body 9 Article processing part 13 Article storage shelf 17 Plate-shaped article 18 Article holding body 34 Storage part Purified air ventilation means 35 Ventilation means 36 Air flow space

Claims (6)

収納部を横幅方向に複数並べて備えた物品収納体と、
前記物品収納体の前後の移動空間の夫々に配置されて、前記移動空間を移動して前記収納部に対する物品の出し入れを行う物品搬送装置と、
前記移動空間において浄化空気を上方側から下方側に流動させるダウンフロー式の浄化空気通風手段とが設けられている物品収納設備であって、
前記複数の収納部の夫々に対して、浄化空気を前記収納部の横側部から前記横幅方向に前記収納部を通過させて前記横幅方向に隣接する前記収納部との間において上方側から下方側に流動させる収納部浄化空気通風手段が設けられている物品収納設備。
An article storage body provided with a plurality of storage sections arranged in the width direction;
An article transporting device that is disposed in each of the moving spaces before and after the article storage body and moves the moving space to put in and out the articles to and from the storage section;
An article storage facility provided with downflow type purified air ventilation means for flowing purified air from the upper side to the lower side in the moving space,
For each of the plurality of storage units, purified air passes through the storage unit in the lateral width direction from the lateral side portion of the storage unit, and downward from the upper side between the storage units adjacent in the lateral width direction. An article storage facility provided with storage section purified air ventilation means for flowing to the side.
前記収納部浄化空気通風手段が、前記横幅方向に隣接する前記収納部同士の間において、前記収納部の横側部から前記横幅方向に浄化空気を通風させる通風手段と前記物品収納体を上下方向に通過させる形態で空気を流動可能とする空気流動空間とを前記横幅方向に交互に配置させるように構成されている請求項1に記載の物品収納設備。   The storage section purified air ventilation means causes the ventilation means and the article storage body to vertically move the purified air in the lateral width direction from the lateral side portion of the storage section between the storage sections adjacent to each other in the lateral width direction. The article storage facility according to claim 1, wherein air flow spaces in which air can flow in a form that is allowed to pass through are alternately arranged in the lateral width direction. 前記物品収納体が、前記収納部を横幅方向及び上下方向に複数並べて備えた物品収納棚にて構成されている請求項1又は2に記載の物品収納設備。   The article storage facility according to claim 1, wherein the article storage body is configured by an article storage shelf including a plurality of the storage units arranged in a horizontal width direction and a vertical direction. 前記収納部は、上下方向に間隔を隔てて並べる状態で板状の物品の複数を保持した物品保持体を収納可能に構成され、
前記収納部浄化空気通風手段が、前記収納部に収納された前記物品保持体に対して上下方向における板状の物品の間隙に浄化空気を通過させる形態で浄化空気を前記収納部の横側部から前記横幅方向に前記収納部を通過させるように構成されている請求項1〜3のいずれか一項に記載の物品収納設備。
The storage unit is configured to be capable of storing an article holding body that holds a plurality of plate-like articles in a state of being arranged at intervals in the vertical direction,
The storage section purified air ventilation means allows the purified air to pass through the gap between the plate-shaped articles in the vertical direction with respect to the article holder stored in the storage section. The article storage facility according to any one of claims 1 to 3, wherein the storage unit is configured to allow the storage unit to pass through in the horizontal width direction.
前記物品収納体の前後の前記移動空間の夫々において前記物品収納体とは反対側に、対向用収納部を横幅方向に複数並べて備え且つ前記物品搬送装置にて前記対向用収納部に対する物品の出し入れを可能とする対向用物品収納体が設けられ、
前記浄化空気通風手段が、浄化空気を前記移動空間とは反対側から前記対向用物品収納体の前後幅方向に前記対向用収納部を通過させて前記移動空間を上方側から下方側に流動させるように構成されている請求項1〜4のいずれか一項に記載の物品収納設備。
In each of the moving spaces before and after the article storage body, a plurality of opposing storage sections are arranged in the widthwise direction on the opposite side of the article storage body, and the article is transferred to and from the opposing storage section by the article transport device. An opposing article storage body is provided,
The purified air ventilation means allows the purified air to flow from the upper side to the lower side by allowing the purified air to pass through the opposing storage portion in the front-rear width direction of the opposing article storage body from the side opposite to the moving space. The article storage facility according to any one of claims 1 to 4, which is configured as described above.
前記対向用物品収納体の夫々において前記移動空間とは反対側に、物品に対する処理を施す物品処理部が配置されている請求項5に記載の物品収納設備。   The article storage facility according to claim 5, wherein an article processing unit that performs processing on an article is disposed on each of the opposing article storage bodies on the side opposite to the moving space.
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JP2009249053A (en) * 2008-04-01 2009-10-29 Murata Mach Ltd Automated warehouse

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JP2009249053A (en) * 2008-04-01 2009-10-29 Murata Mach Ltd Automated warehouse
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