CN101220978A - Air purifying ventilation type article storing equipment - Google Patents
Air purifying ventilation type article storing equipment Download PDFInfo
- Publication number
- CN101220978A CN101220978A CNA2007101598633A CN200710159863A CN101220978A CN 101220978 A CN101220978 A CN 101220978A CN A2007101598633 A CNA2007101598633 A CN A2007101598633A CN 200710159863 A CN200710159863 A CN 200710159863A CN 101220978 A CN101220978 A CN 101220978A
- Authority
- CN
- China
- Prior art keywords
- article
- air
- mentioned
- place
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
- B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
- B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/02—Belt or chain conveyors
- B65G2812/02128—Belt conveyors
- B65G2812/02138—Common features for belt conveyors
- B65G2812/02158—Means preventing dust penetration
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ventilation (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a ventilated type object keeping device for rarefying air which surely preforms a discharge for rarefied air to the lower of a cleaning space and is capable of highly keeping the cleanliness of the cleaning space. An air cycle path formed in an enclosure state of a non object moving out of/in place at an opposite side of an object moving out of/into place in a moving space, an upper place of the moving space, the back place of an object containing part and an exterior is an opening part for introducing the rarefying air into the moving space. In a partial available state according to the non object moving out of/in place, an opening part for introducing the rarefying air into the cleaning space is disposed in at least a partial available state in a lengthwise direction. At the back of the object containing part, A rarefying air ventilation installation for aerating the rarefied air in a corresponding part of the back of the object containing part in the air cycle path is disposed.
Description
Technical field
The present invention relates to be vented to from the smallpox board in the peace and quiet space of ground panel part side purifying air, possess in frame transverse width direction a plurality of article storing portion arranged side by side, the article conveying device that in the walking space of the front side of these article storing portions, moves, and the article keeping frame that the article in place that are configured in the below of the article that are equivalent at least a portion in the above-mentioned a plurality of article storing portion are taken out of into portion is set up, rear portion in above-mentioned a plurality of article storing portion, via air cleaning filter, ventilating purifying air. ventilation unit purifies air, by above-mentioned article storing portion, in above-mentioned walking space, will purify air and be set up as ventilating, the place of the above-mentioned walking space correspondence in above-mentioned ground board is expelled to purifying air in the above-mentioned walking space article storage apparatus of the ventilated type that purifies air that the discharge of below is set up with peristome.
Background technology
Article storage apparatus as the ventilated type that purifies air as above-mentioned, be in the peace and quiet space of clean room etc., purify air ventilation unit by for the article that are incorporated in article storing portion via air cleaning filter, ventilation will purify air, prevent dust attached to article on one side, on one side custody articles.
Again, at the ground board, be not limited to place corresponding to the walking space, place beyond this, the peristome that purifying air in the peace and quiet space is expelled to the below also is set up, being vented to purifying air of ground panel part side from the smallpox board in peace and quiet space, is to be discharged to the below from the discharge of discharging with peristome and ground board with the peristome that peristome place in addition is set up.Purifying air that this is discharged from is the top that is directed to peace and quiet space by draught fan and circulation road, by peace and quietization, is vented to ground panel part side from the smallpox board in peace and quiet space by air cleaner.As above-mentioned, on one side the circularly purifying air, make to purify air from the smallpox board in peace and quiet space to be vented to the ground panel part side.
The article storage apparatus of the existing ventilated type that purifies air is taken out of into the non-article that have the side opposition side of portion at the article of walking in the space and is taken out of into the place, frame transverse width direction and frame up and down width a plurality of article storing portion arranged side by side set.Again, in the place, back that makes article storing portion and be configured in non-article and take out of under the state that surrounds as the place, back of article storing portion in place and outside the covering, the air draught road is formed, make as importing (for example, referring to Patent Document 1) corresponding to purifying air in the peace and quiet space in the part in the place, top in the walking space in this air draught road.
In the article storage apparatus of this existing ventilated type that purifies air, the ventilation unit that purifies air is configured purifying air in the pairing part of back surface field of the article storing portion in the air draught road as ventilating, take out of rear portion being disposed at non-article, the ventilation unit that purifies air that purifies air via air cleaning filter, the non-article that ventilate of purifying air are taken out of into side of taking out of into the part in the place, back in place corresponding to the non-article in the air draught road is set up into the article storing portion in place.
Again, take out of purifying air that the ventilation unit that purifies air into side ventilated by purify air ventilation unit and non-article, the space of walking that arrives by article storing portion makes the walking space flow to the lower side from upper side, is discharged to the below from discharging with opening.This is discharged from purifies air and is discharged to purifying air together of below from other places, and the air cleaner on the top by being directed to peace and quiet space with draught fan and circulation road is by after peace and quietization, as purifying air, be vented to the ground panel part side from the smallpox board in peace and quiet space.
[patent documentation 1] TOHKEMY 2003-81406 communique
Summary of the invention
The problem that invention institute desire solves
In the article storage apparatus of the above-mentioned existing ventilated type that purifies air, because make the walking space be expelled to the below from discharging with opening from the whole amounts that purify air that upper side flows to the lower side, many from discharging the amount that purifies air of discharging downwards with peristome, be expelled in the purifying air of below in peace and quiet space, become big from discharging the ratio that purifies air shared that is discharged from peristome.Therefore, can't make towards the discharge of the below that purifies air in other places and carry out smooth-goingly, in peace and quiet space, dust is floating, the doubt that has the cleanliness factor in peace and quiet space to reduce.
The present invention is conceived to above-mentioned shortcoming, its objective is the article storage apparatus of the ventilated type that purifies air of the cleanliness factor that the discharge that purifies air that can positively carry out towards the below in peace and quiet space is provided, can highly keeps peace and quiet space.
The technological means of dealing with problems
In order to reach this purpose, first feature of the article storage apparatus of the relevant ventilated type that purifies air of the present invention constitutes, be vented to from the smallpox board in the peace and quiet space of ground panel part side purifying air, possess in frame transverse width direction a plurality of article storing portion arranged side by side, the article conveying device that in the walking space of the front side of these article storing portions, moves, and the article keeping frame that the article in place that are configured in the below of the article that are equivalent at least a portion in the above-mentioned a plurality of article storing portion are taken out of into portion is set up, rear portion in above-mentioned a plurality of article storing portion, via air cleaning filter, make the ventilation unit that purifies air that purifies air and ventilate, by above-mentioned article storing portion, making in above-mentioned walking space purifies air is set up as ventilating, the place of the above-mentioned walking space correspondence in above-mentioned ground board, in the article storage apparatus of the ventilated type that purifies air that the discharge that makes purifying air in the above-mentioned walking space be expelled to the below is set up with peristome
In that being taken out of into the non-article that have the side opposition side of portion, above-mentioned article in above-mentioned walking space take out of into the place, the place, top in above-mentioned walking space, and the air circulation road that is formed under the state that surrounds as the place, back of above-mentioned article storing portion and outside the covering, with air importing peristome in the walking space that purifies air that imports in the above-mentioned walking space, under the state that the part of taking out of the place corresponding to above-mentioned non-article possesses, and will import air importing peristome in the peace and quiet space that purifies air in the above-mentioned peace and quiet space, be set up under the state that at least a portion in its longitudinally possesses, the above-mentioned ventilation unit that purifies air is configured purifying air in the part of place, back correspondence of the above-mentioned article storing portion in above-mentioned air circulation road as ventilating.
That is, because making non-article take out of the place, back of place, the walking place, top in space and article storing portion and outside, the air circulation road surrounds as covering, by the air circulation road, the space and the outside that comprise the article storage rack are covered.In the space that comprises this article keeping frame,, to the space of walking, flowed to the lower side in the walking space from upper side by article storing portion by purifying air that the better purifying space ventilation unit is ventilated.Because air imports and is set up in the part of taking out of into the place corresponding to non-article with peristome in the walking space in the air circulation road, purifying air in the walking space, its part air in the walking space imports with peristome and imports the air circulation road, and a remaining part is discharged to the below from discharging with peristome.When in the peace and quiet space air of purifying air that imports the air circulation road imports and is directed into purifying air in the peace and quiet space on air circulation road with peristome, flowed to the place, back of article storing portion via the air circulation road.By the air circulation road corresponding to the part in the place, back of article storing portion by purifying air of flowing,,, in the walking space, ventilate via air cleaning filter by the ventilation unit that purifies air by article storing portion.
As above-mentioned,, can make the quantitative change that purifies air below being expelled to peristome from discharge few on one side Yi Bian, can make respectively to purify air in a plurality of article storing portion and be ventilated because walking at least a portion that purifies air in the space is recycled by the air circulation road.Therefore, the discharge of the below that purifies air in other places is carried out smooth-goingly, can positively be carried out towards the discharge that purifies air of the below in peace and quiet space.
Again, because the air circulation road makes non-article take out of the place, back of place, the walking place, top in space and article storing portion and outside and surrounds as covering, air imports and is set up in the part of taking out of into the place corresponding to non-article with peristome in the walking space, and the place that need not make the below that is equivalent to article storing portion is as using for the space that the air circulation road is set.Therefore, do not note with article and take out of the cooperation that the space is set into portion, again, Yi Bian,, can make being provided with easily of air circulation road on one side the air circulation road can be set because apply flexibly the place, top in the few walking space of barrier effectively.
From above-mentioned item, the discharge that purifies air positively carried out towards the below in peace and quiet space can be provided, can highly keep the cleanliness factor in peace and quiet space Yi Bian reach, can make being provided with of air circulation road be easy to the to purify air article storage apparatus of ventilated type.
What second feature of the article storage apparatus of the relevant ventilated type that purifies air of the present invention constituted is, take out of into the place at above-mentioned non-article, the a plurality of article storing portion arranged side by side in frame transverse width direction set, take out of corresponding to the above-mentioned non-article in the above-mentioned air circulation road and to be into the part in place, being configured in above-mentioned non-article with encirclement takes out of under the state in place, back of above-mentioned article storing portion in place and is formed, air imports and uses peristome in the above-mentioned walking space, be disposed at above-mentioned non-article take out of the place above-mentioned article storing portion below be formed, be formed with the space corresponding to the air importing, take out of the rear portion of the above-mentioned article storing portion that is configured into the place at above-mentioned non-article, use filter via purifying air, the non-article that making purifies air ventilates are taken out of the ventilation unit that purifies air into side, make corresponding to the above-mentioned non-article in the above-mentioned air circulation road and take out of purifying air by above-mentioned article storing portion into the part in the place, back in place, be set up as in above-mentioned walking space, ventilating.
That is, take out of purifying air that cleaner air package into side ventilated by purify air ventilation unit and non-article, to the space of walking, flowed in the walking space by article storing portion to the lower side from upper side.Purifying air in the walking space, its part is fed to air circulation road with air importing in the walking space in space with peristome from being formed at the air importing, and a remaining part is discharged to the below from discharging with peristome.Import purifying air of air circulation road, take out of place, back by being disposed at non-article,, flow in the place, back of article storing portion through the place, top in walking space into the article storing portion in place by the air circulation road.Again, take out of purifying air by the air circulation road by being disposed at non-article into the place, back of the article storing portion in place, its part is taken out of the ventilation unit that purifies air into side by non-article, takes out of article storing portion into the place by being equipped on non-article, ventilates in the walking space.
Therefore, not only be equipped on article and take out of article storing portion into the top in place, even take out of article storing portion into the place for being equipped on non-article, on one side all make ventilations that purify air, at least a portion that purifies air in the space of walking is circulated by the air circulation road in a plurality of article storing portion.
What the 3rd feature of the article storage apparatus of the relevant ventilated type that purifies air of the present invention constituted is, above-mentioned article keeping frame a pair of, so these above-mentioned non-article are taken out of under the state of admission adjacency to be set up in parallel, a pair of above-mentioned air circulation road in a pair of above-mentioned article keeping frame is so that take out of corresponding to above-mentioned non-article under the state of partial common in place and be formed.
That is, so because a pair of article keeping frame is taken out of under the state of admission adjacency these non-article to be set up in parallel, Yi Bian make a pair of article keeping frame that the space is set is as far as possible little, a pair of article keeping frame can be set.Again, a pair of air circulation road in a pair of article keeping frame, because the part of taking out of into the place corresponding to non-article is formed respectively, so that the state of taking out of into the partial common in place corresponding to non-article forms down, can reach the attenuating that the space of using on a pair of air circulation road is set and the simplification of formation.
Therefore, apply flexibly limited space effectively, a pair of article keeping frame that at least a portion that purifies air in the walking space is circulated by the air circulation road Yi Bian can be provided with.
Description of drawings
Fig. 1 is the longitudinal section of the clean room among first embodiment;
Fig. 2 is the A-A cutaway view among Fig. 1;
Fig. 3 is the B-B cutaway view among Fig. 1;
Fig. 4 keeps the stereogram of body for the expression article; And
Fig. 5 is the longitudinal section of the clean room among second embodiment.
The main element symbol description
1～peace and quiet space; 2～article storing portion;
3～walking space; 4～article conveying device;
5～article are taken out of into portion; 6～article keeping frame;
7～non-article are taken out of into the place; 8～grating panel;
9～ceiling blows out portion; 10～room;
11～pillar; 12～mounting support sector;
14～article keep body; 15～clean room ventilation unit;
16～air blowing chamber; 17～air chamber;
18～air cleaner; 19～stream continues;
20～circulation pressure fan; 21～front filter;
22～outer conductance is gone into stream; 24～exhaust flow path;
25～capacity is regulated and is used baffle plate; 26～ventilation unit purifies air;
28～discharge and use peristome; 29～the three fan filter units;
30～lifting support; 31～conveyance body;
32,33～guide rail; 34～walking carriage;
35～lifting column; 36～lifting platform;
37～article transfer device; 38～access;
39～conveyance carrier; 40～air circulation road;
40a～first passage portion; 40b～alternate path part;
40c～the 3rd path part; 43～air imports uses the space;
23～outer gas import volume is regulated and is used baffle plate;
Air imports and uses peristome in 41～walking space;
Air imports and uses peristome in the 42～peace and quiet space;
27～non-article are taken out of the ventilation unit that purifies air into side.
The specific embodiment
Below based on the embodiment of the article storage apparatus that illustrates the relevant ventilated type that purifies air of the present invention.
First embodiment
As the article storage apparatus of this ventilated type that purifies air such as Fig. 1～shown in Figure 3, in the clean room 1 in the peace and quiet space that is vented to the ground panel part side as purifying air from the smallpox board, possess frame transverse width direction and frame up and down in width a plurality of article storing portion 2 arranged side by side, the walking space 3 at the front side of these article storing portions 2 mobile article conveying device 4 and be equivalent to a plurality of article storing portion 2 below the article that set of the place article keeping frame 6 of taking out of into portion 5 be set up a pair of.
A pair of article keeping frame 6, be so that the article of walking in the space 3 take out of portion 5 exist side to oppose that the non-article of side are taken out of under the state of place 7 adjacency to be set up in parallel.That is a pair of article keeping frame 6 is set in that non-article are taken out of under the shared state in place 7.Again, take out of into place 7 at these non-article, taking out of under the relative state of article storing portion that the place of the top of portion 5 set 2 with a side's who is being equivalent to a pair of article keeping frame 6 (lower side among Fig. 1) article, frame transverse width direction and frame up and down width a plurality of article storing portion 2 arranged side by side set.
Constitute as cavernous grid (grating) floor 8 that above-mentioned clean room 1 makes its ground board be formed by majority with passage, blow out portion 9 from the ceiling that is formed at its ceiling and make to purify air and be configured as ventilating to the ground panel part side.Again, at clean room 1, by room 10, besieged space is formed around top and the side, and in the space that room 10 surrounds thus, a pair of article keeping frame 6 is set.
Above-mentioned a plurality of article storing portion 2 is respectively by being constituted by a pair of pillar 11 in upright front and back of establishing and in the mounting support sector 12 that front and back pair of posts 11 is supported respectively and is set up in frame above-below direction devices spaced apart in frame transverse width direction devices spaced apart.Again, article storing portion 2 is configured as the article to take under the state of being supported article by mounting support sector 12 mountings of pair of right and left.Again, each article storing portion 2, but be connected as air flows each other each other and at the article of frame above-below direction adjacency at the article of frame transverse width direction adjacency.
Above-mentioned article storing portion 2 makes can keep as article, as shown in Figure 4 as, the article of the plate-like articles 13 of glass substrate etc. keep body 14 to be configured as can freely taking in.Above-mentioned article keep body 14, by upper frame body 14a that is formed with clathrate and lower frame body 14b, make a plurality of union body 14c that upper frame body 14a and lower frame body 14b link, be set up and make the 14d of support sector of relative in the horizontal direction union body 14c wire connected to each other to be constituted in union body 14c above-below direction devices spaced apart.Again, under the state of supporting by each 14d of support sector mounting, plate-like articles 13 is kept side by side in the above-below direction devices spaced apart, keep among top, bottom and sidepiece whole of body 14, but air is configured as mobile at article.
At above-mentioned clean room 1, under the circularly purifying air state, make purify air from the smallpox board be vented to ground panel part side clean room ventilation unit 15 be set up.This clean room ventilation unit 15 makes by the air cleaningization of grating panel 8 as purifying air, and this is purified air blow out portion 9 from ceiling and be configured as blowing out.
The formation of above-mentioned clean room ventilation unit 15 comprises: induction chamber 16 is arranged at the lower side of grating panel 8; Air chamber 17 is arranged at the upper side that ceiling blows out portion 9; Air cleaner 18, by and be located at HEPA filter that ceiling blows out portion 9 etc. and constitute; The stream 19 that continues is communicated with continue induction chamber 16 and air chamber 17; Circulation is arranged at this stream 19 that continues, at induction chamber 16 sucking actions with pressure fan 20; And front filter (pre-filter) 21, be arranged on the air exhaust end of the circulation pressure fan 20 in the stream 19 that continues.
Air in the above-mentioned clean room 1 by the draught effect of circulation with pressure fan 20, via grating panel 8, is sucked into induction chamber 16, flows in the stream 19 that continues, by front filter 21 by peace and quietization, and to air chamber 17.Again, arrive the air of air chamber 17, as by air cleaner 18 by the purifying air of peace and quietization, blow out portion 9 from ceiling and blow out downwards to clean room 1.
As above-mentioned, by clean room ventilation unit 15, the air in the clean room 1, by front filter 21 and air cleaner 18 by peace and quietization be recycled on one side, making purifies air blows out portion 9 from ceiling and is often ventilated to grating panel 8 sides.
In the circulation of the above-mentioned stream 19 that the continues suction side with pressure fan 20, outer conductance is gone into stream 22 and is continued, and goes into stream 22 in conductance in addition, and outer gas import volume is regulated and is set up with baffle plate (dmaper) 23.Again, at the circulation of the stream 19 that the continues exhaust end with pressure fan 20, exhaust flow path 24 is continued, and at this exhaust flow path 24, capacity is regulated and is set up with baffle plate 25.
Again, regulate with baffle plate 23 and capacity and regulate indivedual apertures with baffle plate 25 by regulating outer gas import volume, the airborne institute in the clean room 1 that is recycled by clean room ventilation unit 15 quantitatively and fresh air be configured as exchanging.
Take out of rear portion being equipped on above-mentioned article into a plurality of article storing portion 2 on the top of portion 5, as via air cleaning filter, first fan filter unit (being designated hereinafter simply as a FFU) 26 of the ventilation unit that purifies air that ventilates of purifying air is set up.This FFU26 corresponds respectively to a plurality of article storing portion 2 and is equipped with.Again, though this FFU26 diagram is omitted, but so that under the article that are incorporated in article storing portion 2 keep state that body 14 maintained plate-like articles 13 pass through each other, making by article storing portion 2, in walking space 3 purifies air is set up as ventilating.
Again, take out of rear portion being disposed at non-article into the article storing portion 2 in place 7, as via air cleaning filter, second fan filter unit (being designated hereinafter simply as the 2nd FFU) 27 that the non-article that ventilate of purifying air are taken out of into the ventilation unit that purifies air of side is set up.This 2nd FFU27 corresponds respectively to a plurality of article storing portion 2 and is equipped with.Again, this the 2nd FFU27 is also identical with a FFU26, so that under the article that are incorporated in article storing portion 2 keep state that body 14 maintained plate-like articles 13 pass through each other, by article storing portion 2, making in walking space 3 purifies air is set up as ventilating.
In the place of taking out of corresponding to the walking space 3 in the ground board in the above-mentioned room 10 and non-article, the discharge that is expelled to the below that purifies air in the walking space 3 is set up with peristome 28 into place 7.This discharges with peristome 28, by at grating panel 8 plate body being set, compares with grating panel 8, is configured as aperture area diminishes.
Again, take out of place into portion 5 corresponding to the article in the ground board in room 10, the opening that makes grating panel 8 is with the plate body obturation, and the purifying air of the walking space 3 in the room 10 is to be configured as the induction chamber 16 below it from discharging to be discharged to peristome 28.
Again, for example, by making the aperture area of discharging with peristome 28 less, or take out of into the opening in the place in place 7 by the plate body obturation etc. corresponding to the non-article in the ground board, the discharge rate that can make purifying air of walking space 3 be expelled to induction chamber 16 is less.
In above-mentioned room 10, because by a FFU26 and the 2nd FFU27, purify air and ventilated, its pressure that purifies air uprises.To this, because by the discharge peristome 28 of ground board is set, purifying air is deflated, the pressure step-down that this purifies air.Again, by this pressure differential that purifies air, purifying air in the room 10, flow from the rear side toe lateral of article storing portion 2, make walking space 3 become flow downward (downflow) that flows to the lower side from upper side, make floating dust such as article storing portion 2 or walking space 3 etc. be expelled to the ground board below, improve the cleanliness factor in the room 10.
At a pair of article keeping frame 6, non-article are taken out of under the state that surrounds as the place, back of place 7, the walking place, top in space 3 and article storing portion 2 and outside the covering, air circulation road 40 is formed.Air circulation road 40 is by taking out of in the place, back of article storing portion 2 in place 7 being disposed at non-article, purify air to the first passage portion 40a of the linearity of upper side from lower side guiding, make purifying air of the guiding of the first passage portion 40a thus take out of place, top into the article storing portion 2 in place 7 to be disposed at non-article, the place, top in walking space 3, the alternate path part 40b of the linearity of the order in the place, top of article storing portion 2 guiding, and the 3rd path part 40c that makes the upper side from the place, back of article storing portion 2 of purifying air of alternate path part 40b guiding thus be directed to the linearity of lower side constitutes.
The above-mentioned first passage portion 40a, alternate path part 40b and the 3rd path part 40c are respectively across in the total length of frame transverse width direction a plurality of article storing portion 2 arranged side by side and be provided with a succession ofly.
A pair of air circulation road 40 in a pair of article keeping frame 6 is so that take out of under the shared state of the first passage portion 40a in place 7 corresponding to non-article and to be formed.Again, this first passage portion 40a is disposed at non-article with encirclement and takes out of under the state in place, back of article storing portion 2 in place 7 and be formed.
On a pair of air circulation road 40, make air in the walking space that imports that purifies air in the walking space 3 import respectively, make that the air importing is set up with peristome 42 in the peace and quiet space of the importing that purifies air outside room 10 and in the clean room 1 with peristome 41.
Again, air imports with peristome 41 respectively in the walking space in a pair of air circulation road 40, is being possessed with the part of taking out of corresponding to non-article into the ground board adjacency in place.Again, air imports with peristome 41 in corresponding to the walking space in the side's (lower side among Fig. 1) of a pair of article keeping frame 6 the air circulation road 40, non-article take out of article storing portion 2 that place 7 is configured below the air that is formed import with space 43 correspondences and be formed.That is air imports with in the space 43, and the part of facing walking space 3 imports as air in the walking space and is configured with peristome 41.
Air imports with peristome 42 in the peace and quiet space in a pair of air circulation road 40, be equivalent to article take out of portion 5 above the place, back of the article storing portion 2 that set of place in, the place of a FFU26 adjacency that is configured at the rear portion of article storing portion 2 is set up.
An above-mentioned FFU26 is so that be configured corresponding to the mode of ventilating that purifies air in the third part 40c in the place, back of the article storing portion 2 in the air circulation road 40.Again, the one FFU26 makes to import purifying air and being imported interior the purifying air of clean room 1 outside the room 10 that imports with peristome 42 by air in the peace and quiet space in the walking space 3 that imports with peristome 41 by air in the walking space and be configured as ventilating via air cleaning filter.
Again, the 2nd FFU27 is so that the mode of ventilating that purifies air of taking out of corresponding to the non-article in the air circulation road 40 in the 40a of first in place 7 is configured.Again, the 2nd FFU27 makes to import interior the purifying air in the walking space that imports with peristome 41 3 by air in the walking space and be configured as ventilating via air cleaning filter.
In above-mentioned room 10, by purifying air that a FFU26 and the 2nd FFU27 are ventilated, arrive walking space 3 by article storing portion 2, flowed to the lower side from upper side in walking space 3.Purifying air in the walking space 3, its part air in the walking space imports and is fed to air circulation road 40 with peristome 41, a remaining part from discharge be discharged to peristome 28 below.Be fed to purifying air of air circulation road 40, as air in peace and quiet space import with peristome 42 be directed into the clean room 1 on air circulation road 40 interior purify air the time, flow to the place, back of article storing portion 2 via air circulation road 40.Again, a FFU26 makes purifying air of the place, back that flows to article storing portion 2 be vented to article storing portion 2 via air cleaning filter.Again, the 2nd FFU27 is made non-article purifying air of taking out of that the place, back of the article storing portion 2 that is set into place 7 flows by air circulation road 40 to be vented to article storing portion 2 via air cleaning filter.
As above-mentioned,, can make the ventilation that purifies air respectively in a plurality of article storing portion 2 Yi Bian make at least a portion that purify air in the walking space 3 by 40 circulations of air circulation road.
Again, article conveying device 4 makes and takes out of the article of being moved into into portion 5 at article and keep body 14 any conveyance in a plurality of article storing portion 2, makes the article that are contained in article storing portion 2 keep body 14 to take out of at article and is configured as portion's 5 conveyances.
Above-mentioned article are taken out of into portion 5, as shown in Figure 2 as, the place below the storewide that is equivalent to frame transverse width direction a plurality of article storing portion 2 arranged side by side is set respectively.Again, take out of into portion 5 at each article, keep body 14 that plate-like articles 13 is taken out one by one and be supplied to article handling part figure outside from article, the plate-like articles 13 that article handling part is from then on supplied with one by one is maintained at and is configured as the article maintenance body 14.
Take out of into portion 5 at above-mentioned article respectively, but make article keep the pair of right and left of body 14 free lifting ground mounting supports lifting support 30, make plate-like articles 13 can free mounting support and the conveyance body 31 that possesses a plurality of driven rollers that the plate-like articles 13 that makes the mounting support can free conveyance be set up.Conveyance body 31 is configured between the lifting support 30 of pair of right and left, keeps body 14 can freely insert at above-below direction for article with taking off and is set up.
Again, take out of access 38 into portion 5 and article handling part at the contact article, the conveyance carrier 39 that makes plate-like articles 13 take out of conveyance between the portion 5 at article handling part and article is set up, and this access 38 is set in the room 10.At access 38,, the three fan filter unit (being designated hereinafter simply as the 3rd FFU) 29 that ventilates for conveyance carrier 39 that purifies air is set up via air cleaning filter again.
Take out of into portion 5 by above-mentioned article and to keep body 14 that plate-like articles 13 is taken out one by one and when being supplied to conveyance carrier 39 from article, make article keep body 14 to descend by lifting support 30 with pair of right and left, conveyance body 31 enters article and keeps in the body 14, keeps body 14 that a plate-like articles 13 is supported by mounting at conveyance body 31 from article.Afterwards, support plate-like articles 13 by conveyance body 31 mountings and in 39 conveyances of conveyance carrier.By repeating this type of action, keep body 14 that plate-like articles 13 is taken out one by one from article, be supplied to conveyance carrier 39.
The plate-like articles 13 that is supplied to by above-mentioned conveyance carrier 39 is taken out of into portion 5 one by one when article keep body 14 to be held by article, make article keep body 14 to enter mounting support under the state of conveyance body 31 at lifting support 30 by pair of right and left.Afterwards, conveyance body 31 makes plate-like articles 13 conveyances to by till the article maintenance body 14 retainable positions, keeps body 14 to rise article by the lifting support 30 with pair of right and left, makes a plate-like articles 13 keep body 14 to be held at article.By repeating this type of action, make the plate-like articles 13 that is supplied to from conveyance carrier 39 keep body 14 order under above-below direction state arranged side by side to keep at article one by one.
Second embodiment
In above-mentioned first embodiment, though article keeping frame 6 is represented with the example of a pair of setting, in this second embodiment, as shown in Figure 5 as, make article keeping frame 6 with a setting.
In this article keeping frame 6, take out of into place 7 at non-article and not set article storing portion 2.Again, air imports with peristome 41 in the walking space in air circulation road 40, with the state of taking out of the ground board adjacency in the place 7 at non-article under be set up.
About other constitute because and explanation omission identical with above-mentioned first embodiment.
Other embodiment
(1) in above-mentioned first embodiment,, also can take out of into place 7 and do not set article storing portion 2 and implement at non-article though represent to take out of the example that sets article storing portion 2 into place 7 at non-article.Even in this situation, as representing, make a pair of air circulation road 40 in a pair of article keeping frame 6, so that take out of shared state formation down into the first passage portion 40a in place 7 corresponding to non-article at above-mentioned first embodiment.
(2) in above-mentioned second embodiment,, also can take out of into place 7 and set article storing portion 2 and implement at non-article though represent to take out of the example that does not set article storing portion 2 into place 7 at non-article.Even in this situation, make corresponding to the non-article on air circulation road 40 and take out of the first passage portion 40a into place 7, be equipped on the state that non-article take out of into the place, back of the article storing portion 2 in place 7 with encirclement and form down.
(3) in above-mentioned first embodiment,, can the 2nd FFU27 equipment place can suitably be changed for a plurality of article storing portion 2 though make the 2nd FFU27 correspond respectively to the article storing portion 2 in the rear portion of article storing portion 2 and equip.
(4) at above-mentioned first and second embodiment, though article keeping frame 6 is represented with example a pair of and a setting, the relevant number that article keeping frame 6 is set can suitably change.
(5) at above-mentioned first and second embodiment, though set article respectively and take out of into portion 5 being equivalent to place below frame transverse width direction a plurality of article storing portion 2 arranged side by side whole, suitable place sets article and takes out of into portion 5 and implement also can below the article of the part of frame transverse width direction a plurality of article storing portion 2 arranged side by side.
Claims (3)
1. the article storage apparatus of the ventilated type that purifies air, be vented to from the smallpox board in the peace and quiet space of ground panel part side purifying air, possess the article conveying device that moves in frame transverse width direction a plurality of article storing portion arranged side by side, the walking space at the front side of these article storing portions and be equivalent at least a portion in the above-mentioned a plurality of article storing portion article below the article that are configured of the place article keeping frame of taking out of into portion be set up
At the rear portion of above-mentioned a plurality of article storing portion via air cleaning filter, make the ventilation unit that purifies air that purifies air and ventilate, by above-mentioned article storing portion, in above-mentioned walking space, make to purify air and be set up as ventilating,
In place corresponding to the above-mentioned walking space in the above-mentioned ground board, in the article storage apparatus of the ventilated type that purifies air that the discharge that makes purifying air in the above-mentioned walking space be expelled to the below is set up with peristome,
In that being taken out of into the non-article that have the side opposition side of portion, above-mentioned article in above-mentioned walking space take out of into the place, the place, top in above-mentioned walking space, and the air circulation road that is formed under the state that surrounds as the place, back of above-mentioned article storing portion and outside the covering, it is air importing peristome in the walking space that purifies air that will import in the above-mentioned walking space, taking out of corresponding to above-mentioned non-article under the state that the pairing part of admission possesses, and will import air importing peristome in the peace and quiet space that purifies air in the above-mentioned peace and quiet space, be provided with under the state that at least a portion in its longitudinally possesses
The above-mentioned ventilation unit that purifies air is to make as ventilating corresponding to purifying air in the part in the place, back of the above-mentioned article storing portion in the above-mentioned air circulation road to be configured.
2. the article storage apparatus of the ventilated type that purifies air as claimed in claim 1 is wherein taken out of into the place at above-mentioned non-article, and a plurality of article storing portion arranged side by side in frame transverse width direction set,
Taking out of part into the place corresponding to the above-mentioned non-article in the above-mentioned air circulation road, is to be configured in above-mentioned non-article with encirclement to take out of under the state in place, back of above-mentioned article storing portion in place and be formed,
Air imports and use peristome in the above-mentioned walking space, be configured in above-mentioned non-article take out of the place above-mentioned article storing portion below be formed, be formed with the space corresponding to the air importing,
Take out of the rear portion of the above-mentioned article storing portion that is configured into the place at above-mentioned non-article, use filter via purifying air, the non-article that making purifies air ventilates are taken out of the ventilation unit that purifies air into side, make corresponding to the above-mentioned non-article in the above-mentioned air circulation road and take out of, be set up as in above-mentioned walking space, ventilating into the purifying air of the part in the place, back in place by above-mentioned article storing portion.
3. the article storage apparatus of the ventilated type that purifies air as claimed in claim 1 or 2, thus be set up in parallel under a pair of state that makes these above-mentioned non-article take out of the admission adjacency of wherein above-mentioned article keeping frame,
A pair of above-mentioned air circulation road in a pair of above-mentioned article keeping frame is so that take out of corresponding to above-mentioned non-article under the state of partial common in place and be formed.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP002545/07 | 2007-01-10 | ||
| JP2007002545A JP4378652B2 (en) | 2007-01-10 | 2007-01-10 | Purified air ventilation-type goods storage facility |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101220978A true CN101220978A (en) | 2008-07-16 |
| CN101220978B CN101220978B (en) | 2013-11-06 |
Family
ID=39630969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101598633A Expired - Fee Related CN101220978B (en) | 2007-01-10 | 2007-12-25 | Air purifying ventilation type article storing equipment |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4378652B2 (en) |
| KR (1) | KR101110541B1 (en) |
| CN (1) | CN101220978B (en) |
| TW (1) | TWI406803B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102431754A (en) * | 2010-09-07 | 2012-05-02 | 村田机械株式会社 | Automated storage and retrieval warehouse, and container of the same |
| WO2013143153A1 (en) * | 2012-03-26 | 2013-10-03 | 深圳市华星光电技术有限公司 | Stacking apparatus and air purifying system thereof |
| CN104603032A (en) * | 2012-08-21 | 2015-05-06 | 村田机械株式会社 | Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas |
| CN105775534A (en) * | 2016-05-26 | 2016-07-20 | 马人欢 | Self-cleaning dustless storage room |
| CN107804638A (en) * | 2016-09-09 | 2018-03-16 | 株式会社大福 | Article container equipment |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1096332A (en) * | 1996-09-20 | 1998-04-14 | Mitsubishi Electric Corp | Clean room |
| CN1177711A (en) * | 1996-09-24 | 1998-04-01 | 三菱电机株式会社 | Purification room |
| JP3818434B2 (en) | 2001-09-10 | 2006-09-06 | 株式会社ダイフク | Purified air storage system |
| JP4265179B2 (en) * | 2002-09-06 | 2009-05-20 | パナソニック株式会社 | Clean stocker |
| JP2004269214A (en) * | 2003-03-11 | 2004-09-30 | Daifuku Co Ltd | Purified air circulating type storage equipment |
| JP2006021913A (en) | 2004-07-09 | 2006-01-26 | Tohoku Univ | Clean stocker |
-
2007
- 2007-01-10 JP JP2007002545A patent/JP4378652B2/en not_active Expired - Fee Related
- 2007-10-16 TW TW096138641A patent/TWI406803B/en not_active IP Right Cessation
- 2007-11-22 KR KR1020070119651A patent/KR101110541B1/en not_active IP Right Cessation
- 2007-12-25 CN CN2007101598633A patent/CN101220978B/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102431754A (en) * | 2010-09-07 | 2012-05-02 | 村田机械株式会社 | Automated storage and retrieval warehouse, and container of the same |
| WO2013143153A1 (en) * | 2012-03-26 | 2013-10-03 | 深圳市华星光电技术有限公司 | Stacking apparatus and air purifying system thereof |
| CN104603032A (en) * | 2012-08-21 | 2015-05-06 | 村田机械株式会社 | Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas |
| CN105775534A (en) * | 2016-05-26 | 2016-07-20 | 马人欢 | Self-cleaning dustless storage room |
| CN107804638A (en) * | 2016-09-09 | 2018-03-16 | 株式会社大福 | Article container equipment |
| TWI725221B (en) * | 2016-09-09 | 2021-04-21 | 日商大福股份有限公司 | Article storage facility |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4378652B2 (en) | 2009-12-09 |
| CN101220978B (en) | 2013-11-06 |
| KR20080065904A (en) | 2008-07-15 |
| TWI406803B (en) | 2013-09-01 |
| TW200829489A (en) | 2008-07-16 |
| KR101110541B1 (en) | 2012-03-29 |
| JP2008168983A (en) | 2008-07-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101097734B1 (en) | Method for processing substrates | |
| JP4688000B2 (en) | Goods storage equipment | |
| KR100870610B1 (en) | Article storage facility | |
| KR101178787B1 (en) | Substrate storage facility, substrate processing facility and method of operating substrate storage facility | |
| CN101220978B (en) | Air purifying ventilation type article storing equipment | |
| KR100524359B1 (en) | Storage facility for use in a clean-room | |
| TWI408090B (en) | Article storage | |
| JP4378659B2 (en) | Goods storage facilities and goods storage facilities for clean rooms | |
| JP2018039658A (en) | Article storage facility | |
| TW201344122A (en) | Storage warehouse | |
| KR100834243B1 (en) | Article storage system | |
| JP4780401B2 (en) | Goods storage equipment for clean rooms | |
| JP2007230748A (en) | Article storage apparatus and article storage facility for clean room | |
| TWI412477B (en) | Article storage facility | |
| JP4183976B2 (en) | Storage body environment improvement device | |
| CN101004281B (en) | Warehouse for product ,especially for liquid crystal screen glass panel, to be processed in cleaning room, and method for keeping clean in the warehous | |
| ES2387178T3 (en) | Storage arrangement with a preset storage atmosphere | |
| JP4811677B2 (en) | Goods storage equipment | |
| TWI408091B (en) | Article storage facility | |
| JP2009007125A (en) | Article carrier | |
| JP2008007225A (en) | Article storage facility |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131106 Termination date: 20181225 |