201020185 4 六、發明說明： 【發明所屬之技術領域】 本發明，是有關於清浄室用自動倉庫中的物品的保管 【先前技術】 如專利文獻1 (日本專利2 8 1 7 6 0 5 )所揭示，在清浄室 φ 用自動倉庫中，在倉庫的中央設置塔式起重機的行走路徑 ，在左右兩側設置一對的棚。棚是在行走路徑側開口，藉 由從棚朝行走路徑吹出的清淨空氣的流動，將自動倉庫的 整體保持在較高的清淨度。 但是在專利文獻1中’爲了將自動倉庫整體保持在較 高的清淨度’需要大量的清淨空氣。且因爲塔式起重機的 行走風等，所以空氣會從行走路徑朝棚內侵入，而使棚內 的物品具有被污染的可能性。特別是在平面顯示器（FPD) φ 的製造中，因爲收容各面在開口的骨架狀的卡匣的基板， 所以有需要確實地防止空氣從行走路徑朝棚内侵入，而使 清淨空氣的消耗量變多。因此有需要一邊減少清淨空氣的 消耗量，一邊防止保管物品的污染。 [專利文獻1]日本專利第2817605號 【發明內容】 (本發明所欲解決的課題） 本發明的課題’是由更少量的清淨空氣防止保管物品 -5- 201020185 的污染。 . 本發明的追加的課題，是使棚側的設備的增加在最小 限度。 本發明的追加的課題，是在棚及塔式起重機之間收授 物品時’使物品不被行走路徑的空氣所污染。 (用以解決課題的手段） 本發明是一種自動倉庫，是沿著塔式起重機的行走路 @ 徑設有棚，其特徵爲：在塔式起重機的昇降台，設置：物 品的移載裝置、及包圍藉由前述移載裝置而被引進至昇降 台上的物品的殼、及朝殼內供給清淨空氣的第1風扇過濾 器組件、及容許前述移載裝置將物品從殼出入且遮斷朝殼 內的行走路徑的空氣的侵入用的第1遮斷手段，在前述棚 中，設置：朝棚內供給清淨空氣用的第2風扇過濾器組件 、及容許朝棚的由前述移載裝置所進行的物品出入且遮斷 朝棚內的行走路徑的空氣的侵入用的第2遮斷手段。 _ 且本發明是一種自動倉庫中的物品保管方法，是由沿 著塔式起重機的行走路徑設有棚的自動倉庫保管物品的方 法，其特徵爲：在塔式起重機的昇降台設置物品的移載裝 置，並且將昇降台上的物品由殼包圍，從第1風扇過濾器 組件朝殼內供給清淨空氣，進一步遮斷朝殻內的行走路徑 的空氣的侵入，且藉由從第2風扇過濾器組件朝前述棚的 內部供給清淨空氣，並且遮斷朝棚的內部的行走路徑的空 氣的侵入，將殼的內部及棚的內部’與外部相比局部地保201020185 4 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to the storage of articles in an automatic warehouse for a clean room. [Prior Art] As disclosed in Patent Document 1 (Japanese Patent No. 2 8 1 7 6 5) It is revealed that in the automatic warehouse of the clean room φ, the traveling path of the tower crane is installed in the center of the warehouse, and a pair of sheds are provided on the left and right sides. The shed is opened on the side of the walking path, and the whole of the automatic warehouse is maintained at a high degree of cleanliness by the flow of clean air blown from the shed toward the walking path. However, in Patent Document 1, a large amount of clean air is required in order to maintain the entire automatic warehouse at a high degree of cleanliness. Moreover, because of the traveling wind of the tower crane, etc., the air intrudes into the shed from the traveling path, and the articles in the shed have the possibility of being contaminated. In particular, in the manufacture of a flat panel display (FPD) φ, since a substrate having a skeleton-like shape in which each surface is opened is accommodated, it is necessary to reliably prevent air from entering the shed from the traveling path, and the consumption of clean air is changed. many. Therefore, it is necessary to reduce the amount of clean air consumed while preventing contamination of stored articles. [Patent Document 1] Japanese Patent No. 2817605 [Disclosure] (Problems to be Solved by the Invention) The problem of the present invention is to prevent contamination of a stored article -5 - 201020185 by a smaller amount of clean air. An additional problem of the present invention is to minimize the increase in equipment on the side of the shed. An additional problem of the present invention is to prevent the article from being contaminated by the air of the traveling path when the article is received between the shed and the tower crane. (Means for Solving the Problem) The present invention relates to an automatic warehouse which is provided with a shed along a walking path of a tower crane, and is characterized in that: in a lifting platform of a tower crane, a transfer device for articles is provided, And a casing surrounding the article introduced to the lifting platform by the transfer device, a first fan filter assembly that supplies clean air into the casing, and a transfer device that allows the article to be ejected from the casing and blocked The first blocking means for invading the air in the traveling path in the casing, the second fan filter unit for supplying clean air into the shed, and the transfer device for allowing the shed to be placed in the shed The second blocking means for intrusion of the air that enters and blocks the traveling path in the shed. _ The present invention is a method for storing articles in an automatic warehouse, and is a method for storing articles by an automatic warehouse provided with a shed along a traveling path of a tower crane, characterized in that items are moved on a lifting platform of a tower crane. The device is mounted, and the articles on the lifting platform are surrounded by the casing, and the clean air is supplied from the first fan filter assembly into the casing to further block the intrusion of air into the traveling path in the casing, and is filtered by the second fan. The device assembly supplies clean air to the inside of the shed, and blocks the intrusion of air into the traveling path inside the shed, and partially protects the interior of the casing and the interior of the shed from the outside.
-6- 201020185 . 持在高清淨度。 又在此說明書中’有關於清浄室用自動倉庫的記載’ 也直接適用於自動倉庫中的物品保管方法。 遮斷手段，是使用可開閉自如的門或是空氣閥（air shutter)等即可。 較佳是，第1遮斷手段及第2遮斷手段各是可開閉自 如的第1門及第2門’且在塔式起重機的昇降台，設置將 φ 第1門開閉用的第1開閉手段及將第2門開閉用的第2開 閉手段。 特別是較佳是，控制第1及第2開閉手段，使第1門 及第2門的一方的門比另一方的門先行打開’將棚及殼之 間的空氣藉由清淨空氣淨化’接著藉由打開前述另一方的 門，將可進行由前述移載裝置所進行的物品的收授的控制 部設在塔式起重機。 最佳是在門的開閉時，增加來自先行打開的具備第1 φ 門的側的風扇過濾器組件的清淨空氣的流量，防止棚及殼 之間的空氣從門逆流。 [發明的效果] 在本發明中，在昇降台上，物品是被殼包圍，清淨空 氣是從第1風扇過濾器組件被供給至殼內。且藉由第1遮 斷手段，遮斷朝殼內的行走路徑的空氣的侵入。且空氣是 從第2風扇過濾器組件清淨朝棚的內部被供給，使來自朝 棚內的行走路徑的空氣的侵入被遮斷。因此，只要使塔式 -7- 201020185 起重機的昇降台上的殼的內部及棚的內部的局部比外部清 _ 淨，就可防止保管物品的污染。 第1遮斷手段及第2遮斷手段是各別可開閉自如的第 1門及第2門，由設在塔式起重機的昇降台的第1開閉手 段將第1門開閉，由第2開閉手段將設在棚的第2門開閉 的話，在棚中就不需要設置將門開閉用的驅動機構。 將第1門及第2門的一方比另一方的門先行打開’將 棚及殼之間的空氣由清淨空氣淨化。接著將另一方的門打 @ 開的話，因爲從第1門側吹出的清淨空氣的流動、及從第 2門側吹出的清淨空氣的流動的關係，空氣會在殼的內部 或是棚的內部逆流。但是此空氣是清淨空氣，將保管物品 污染的可能性少。 【實施方式】 以下顯示實施供本發明用的最適的實施例。-6- 201020185 . Holding in high definition clarity. In addition, in this specification, "the description of the automatic warehouse for clean rooms" is also directly applicable to the article storage method in the automatic warehouse. The means for blocking is to use a door that can be opened and closed or an air shutter. Preferably, each of the first blocking means and the second blocking means is a first door and a second door that are openable and closable, and the first opening and closing of the first door is provided in the lifting table of the tower crane. The means and the second opening and closing means for opening and closing the second door. In particular, it is preferable to control the first and second opening and closing means such that one of the first door and the second door opens earlier than the other door, and the air between the shed and the casing is cleaned by clean air. The control unit that can carry out the collection of the articles by the transfer device is provided in the tower crane by opening the other door. It is preferable to increase the flow rate of the clean air from the fan filter unit having the first φ gate side that is opened first when the door is opened and closed, and to prevent the air between the shed and the casing from flowing back from the door. [Effects of the Invention] In the present invention, on the elevating table, the article is surrounded by the casing, and the clean air is supplied from the first fan filter unit to the casing. Further, by the first blocking means, the intrusion of air into the traveling path in the casing is blocked. Further, the air is supplied from the second fan filter unit to the inside of the shed, and the intrusion of air from the traveling path in the shed is blocked. Therefore, as long as the inside of the casing on the lifting platform of the tower -7-201020185 crane and the inside of the shed are cleaned from the outside, contamination of the stored articles can be prevented. The first blocking means and the second blocking means are the first door and the second door which are openable and closable, respectively, and the first door is opened and closed by the first opening and closing means provided on the lifting platform of the tower crane, and the second door is opened and closed by the second opening and closing means. When the second door of the shed is opened and closed, it is not necessary to provide a drive mechanism for opening and closing the door in the shed. Open one of the first door and the second door ahead of the other door. 'The air between the shed and the case is cleaned by clean air. Then, if the other door is opened @, the air will flow inside the casing or inside the shed because of the flow of the clean air blown from the first door side and the flow of the clean air blown from the second door side. countercurrent. However, this air is clean air and there is less possibility of contamination of stored items. [Embodiment] The most preferred embodiment for carrying out the invention is shown below.
[實施例] 在第1圖〜第7圖中，顯示實施例及其變形。第1圖 是顯示實施例的自動倉庫2的槪要。4是塔式起重機’走 行於設在地面的例如左右一對的軌道6、6上，塔式起重 機4行走的空間是走行路徑8。1 〇是台車’將例如前後一 對的柱12支撐，沿著柱12使昇降台14昇降。在昇降台 14上設有例如固定的殻16，殼16的上面及第1圖中的前 後雙面是氣密，在例如殻1 6的上部具備風扇過濾器組件[Embodiment] In the first to seventh drawings, the embodiment and its modifications are shown. Fig. 1 is a summary showing the automatic warehouse 2 of the embodiment. 4 is a tower crane 'walking on a pair of left and right rails 6, 6 provided on the ground, and the space in which the tower crane 4 travels is a running path 8. 1 〇 is a trolley 'supporting, for example, a pair of front and rear pillars 12, The lifting platform 14 is raised and lowered along the column 12. The lifting table 14 is provided with, for example, a fixed casing 16, and the upper surface of the casing 16 and the front and rear sides in Fig. 1 are airtight, and a fan filter assembly is provided, for example, at the upper portion of the casing 16.
-8 - 201020185 - 18。且在殻16的左右兩側具有一對的門20、20，門20 是只有設在左右的任一方也可以。殼16是在下部具有開 口’來自風扇過瀘器組件18的清淨空氣是如第1圖的中 空箭頭，從殻16內朝昇降台14側流動。 安裝於例如殼16的左右一對的驅動部22、22，是將 左右的棚3 0、3 0側的門3 5開閉。且在柱12的上部具有 左右一對的通訊部24、24，在棚30的風扇過濾器組件36 φ 側的通訊部3 8之間，由可視光和紅外光等進行通訊。通 訊部24，是藉由驅動部22將棚30側的門35開閉時，將 該訊號朝風扇過瀘器組件3 6側送出。風扇過濾器組件3 6 ’是若將門3 5打開的訊號被輸入的話，增加清淨空氣的 送風量。又風扇過濾器組件36是在第1圖的深度方向被 配置複數個。且塔式起重機4是在將門35開閉的位置的 附近，增加例如1台〜3台程度的風扇過濾器組件3 6的送 風量。可取代通訊部24、28，將光電感測器等設在門35 0 的附近，將門3 5的開閉檢出，使變化風扇過濾器組件36 的送風量也可以。但是如此的話，朝棚30內的配線會增 加。 在行走路徑8的例如左右兩側具有一對的棚3 0、3 0 ，在棚3 0的例如上部被設置複數個風扇過濾器組件3 6。 又風扇過濾器組件36，不是設在棚30的上部，而是在各 開口寬的背面各設置1個也可以。且在棚30中使朝向行 走路徑8側的門3 5被各設於開口寬。開口寬是卡匣的保 管場所的單位，例如卡匣1個分的保管場所是1個開口寬 -9 - 201020185 。且在風扇過濾器組件36的附近設有通訊部38，與塔式 起重機4側的通訊部24之間進行通訊，控制來自風扇過 濾器組件3 6的清淨空氣的風量。 32是作爲保管物品的卡匣，在此是將平面顯示器的 基板收容的骨架狀的卡匣。可取代平面顯示器用的卡匣， 而使用半導體晶圓用的卡匣、或是將藥品或是食品等收容 的卡匣也可以。34是棚架，被安裝於無圖示的支柱，將 卡匣32支撐。且在棚30的一部分的開口寬設置滾子輸送 機等，作爲朝自動倉庫2的內外將卡匣32搬出/搬入的平 台。 來自風扇過濾器組件36的空氣，是在棚30內如第1 圖的中空箭頭朝下方地流動。來自風扇過濾器組件36的 空氣，是從例如開口 40朝塔式起重機4的下部的台車10 的高度位置附近流出，經過開口 42、44朝周圍被排氣。 且殻16的內部及棚30的內部，是藉由風扇過濾器組件 1 8、3 6被保持在C-1 0等級，行走路徑8是被保持在例如 C-1000等級等。又自動倉庫2的周圍的空氣是更被污染 的情況，在行走路徑8的上部設置氣密的頂棚等，從周圍 的空氣將行走路徑8遮斷也可以。且此情況，藉由從棚 3〇等漏出的清淨空氣，使行走路徑8的清淨度，成爲棚 以及殼16及自動倉庫的周圍的中間的値。 在第2圖中，顯示棚的門35的開閉機構。又在第2 圖中顯示各構件是間隔有間隔。門3 5是由例如氣密且可 撓性的薄片所構成，由被軸承46、46支撐的滾子45所導 -10- 201020185 .引。在滾子45的軸中安裝有例如皮帶48 ’藉由帶輪49、 50使皮帶48循環。且藉由可前後退自如地安裝於昇降台 側的驅動部的摩擦車58，藉由使滾子45的軸轉動’將皮 帶48驅動。且將門35的例如上端的一方由固定部51安 裝在皮帶48，藉由導引52~54’由門35的下端的兩側及 門35的上端導引與皮帶48相反側的位置。在這些的導引 中，使用被導引體56等。 φ 藉由摩擦車58使滾子45旋轉的話’皮帶48會循環 ，固定部51會水平動作。且門35的其他的3頂點是藉由 被導引體56等，由導引5 2〜54被導引。且由門35的自重 或是設在門35的下端的桿等的重量，使門35不會彎曲， 固定部51靠近滾子54側的話，門35的下端會下降。因 此，由摩擦車5 8使門3 5開閉。 在實施例中門3 5雖是上下打開，但是左右打開也可 以，該情況，以開口寬的中央爲境設置左右一對的門，使 φ 這些一起開閉也可以。或是在各開口寬設置1片的門，使 門朝左右任一方打開也可以。將門35由滾子45等捲取的 話’門35的薄片的前面（朝向行走路徑的面）及背面（朝向 棚的內部的面）會接觸’會使背面側被污染。在此在實施 例中雖未使用捲取的方式，但是爲了省空間將門35採用 捲取的方式也可以。 門35的開閉機構可以進行各種變形，在例如第3圖 中對於風車60，藉由從設在昇降台側的—對的噴嘴61、 6 2的任一供給空氣’使風車旋轉使門3 5開閉。又風車6 〇 -11 - 201020185 是被安裝在第2圖中的滾子45的軸。64是配管，對於噴 - 嘴61、62供給清淨空氣等的空氣。 在第4圖的變形例中，在門3 5的下端設置例如突起 65，由昇降台側的保持構件66挾持進行昇降。67是電磁 線圈，使保持構件66進退，且在將突起65保持的位置、 及不與突起65干渉的位置之間往復。且將電磁線圈67安 裝在昇降構件68，使沿著昇降導引69昇降。第3圖、第 4圖的變形例中，其他的部分是與中第2圖的實施例同樣 ⑩ 〇 在第5圖中顯示昇降台14側的結構。前述的摩擦車 58是藉由驅動部22被驅動，且在將棚側的門驅動的位置 及後退位置之間，藉由無圖示的出退機構可出退自如。驅 動部26是將殼16的門20開閉。70是滾子，72a、72b是 皮帶。帶輪73a是被安裝於第5圖的右側的皮帶72a，帶 輪73b是被安裝於左側的皮帶72b。且門20是藉由固定 部74被安裝於皮帶72a、72b。藉由設在驅動部26的無 @ 圖示的馬達，將滾子70旋轉的話，隨此使皮帶72a或是 72b被驅動。且，被安裝於皮帶的固定部74也移動，使 門20開閉。且門20的下端是藉由導引71被導引。其他 的部分是與第2圖同樣的機構。 如第5圖所示，在昇降台14中設有滑動叉或是平面 關節型機械手臂等的移載裝置80。在實施例中，移載裝 置80雖是左右兩側移載卡匣32，但是只有片側移載也可 以。來自風扇過濾器組件1 8的清淨空氣，是從昇降台1 4 -12- 201020185 . 的間隙朝下部流出。如第5圖所示，在昇降台14設置排 氣風扇82，使清淨空氣的排氣量可變也可以。84是控制 部，設在例如昇降台14，將驅動部2 2、2 6驅動，控制門 2 〇、3 5的開閉。 在第6圖、第7圖中，顯示實施例中的卡匣的收授。 塔式起重機停止，昇降台面對於目的開口寬停止的話，透 過通訊部要求增加朝棚的風扇過濾器組件的清淨空氣的風 φ 量。在實施例中棚的風扇過濾器組件，是比昇降台的風扇 過濾器組件，在清淨空氣的供給能力具有多餘的能力，將 棚的門35比昇降台的殼的門20先行打開。藉此如第7圖 的1)所示，殼16及棚30的間隙是由清淨空氣被淨化。 接著如第7圖的2)，將塔式起重機的昇降台的殼的 門2〇打開。此時較佳是增加昇降台側的風扇過濾器組件 的風量，或是增加昇降台側的排氣風扇的排氣量。來自昇 降台的風扇過濾器組件的清淨空氣的流量增加的話，可防 φ 止清淨空氣從棚側侵入殼內。且來自昇降台的排氣風量增 加的話，從棚側侵入的清淨空氣是從殼被迅速排氣。藉此 ，隨著來自棚的清淨空氣，即使灰塵只有些微也可防止侵 入殼16內。接著藉由塔式起重機的移載裝置移載卡匣32 〇 移載完成的話，如第7圖的3)，由殼側及棚側將門 例如同時或是隔某一定時間地開閉。且將昇降台側的風扇 過濾器組件的風量等返回至原來的値，透過通訊部要求棚 的風扇過濾器組件的風量回復至原來的値。 -13- 201020185 在實施例中可獲得以下的效果。 - (1) 將殼的內部及棚的內部，與外部相比較可局部地 保持在高清淨度即可，可以減少清淨空氣的消耗量。在此 所指的外部，是對於殻的內部及棚的內部的外部，例如對 於行走路徑8及自動倉庫2的外部，使殼的內部及棚的內 部保持在高清淨度。 (2) 由設在昇降台側的驅動部22將棚的門35開閉的 話，不需要在各棚的開口寬分別設置門的開閉驅動部。 @ (3 )棚及殼內之間的卡匣3 2的收授路徑，可以藉由清 淨空氣形成空氣隧道。 (4) 在此使一方的門先行打開，將殻及棚之間的空氣 由清淨空氣淨化的話，可更確實地防止殼內和棚內的污染 。即將雙方的門同時打開的話，藉由來自左右兩側的清淨 空氣的氣流的平衡等，棚及殼之間的空氣是有侵入棚內或 是殼內的可能性。 (5) 將物品收授時，增加來自棚和塔式起重機的風扇 @ 過濾器組件的清淨空氣的供給量的話，可更確實地防止棚 和殼內的污染。 (6) 藉由設在柱的上部的通訊部，由風扇過濾器組件 側的通訊部及光通訊等進行通訊的話，與將門的開閉由光 電感測器等檢出來改變風扇過濾器組件的風量的情況時相 比，配線容易。 在實施例中，門雖是使用可開閉自如的薄片狀的擋板 ，但是使用清淨空氣的下流等的空氣閥也可以。進一步爲 -14- 201020185 .了形成殻及棚之間的空氣隧道，在殼16側設置空氣隧道 形成用的清淨空氣的噴嘴等也可以。 在實施例中，昇降台是在停止於目的開口寬之後，將 棚的門及昇降台的門打開。但是在各棚的開口寬分別設置 門35的開閉驅動部，藉由從昇降台停止於目的開口寬之 前，增加風扇過濾器組件18、38的風量，防止來自行走 路徑8的空氣的侵入的狀態下，將門20、35打開也可以 φ 。如此的話，在昇降台的停止之前因爲門開始打開，所以 卡匣的移載可以更迅速地進行。 【圖式簡單說明】 [第1圖]將實施例的自動倉庫從正面所見的意示圖 [第2圖]實施例中的被設在隔有間隔形成的構件之間 的棚的門的開閉機構的立體圖 [第3圖]使用風壓的開閉機構的變形例的圖 ❹ [第4圖]將門挾持開閉的開閉機構的變形例的圖 [第5圖]實施例中的塔式起重機的昇降台的實施例的 部分前視圖 [第6圖]顯示實施例中的卡匣的收授規則的流程圖 [第7圖]實施例中，在塔式起重機及棚之間的卡匣的 收授的平面圖，1)是顯示最初將棚的門開放的狀態，2)是 顯示將昇降台及棚的雙方的門開放的狀態，3)是顯示結束 卡匣的收授，將昇降台及棚的雙方的門關閉的狀態。 -15- 201020185 【主要元件符號說明】 - 2 :自動倉庫 4 :塔式起重機 6 :.軌道 8 :行走路徑 10 :台車 12 :柱 14 :昇降台 @ 1 6 :殼 18、36:風扇過濾器組件（FFU) 20 、 35 ：門 22、26 :驅動部 24、38 :通訊部 30 :棚 3 2 :卡匣 34 :棚架 ⑩ 40 、 42 、 44 :開口 4 5、7 0 :滾子 46 :軸承 48 、 72 :皮帶 49、50 :帶輪 51、74 :固定部 52〜54 :導引 56 =被導引體 -16- 201020185 . 58 :摩擦車 60 :風車 61、 62 ：噴嘴 64 :配管 65 :突起 66 :保持構件 67 :電磁線圈 ❹ 6 8 :昇降構件 69 :昇降導引 71 :導弓[ 73a 、 b :帶輪 80 :移載裝置 8 2 :排氣風扇 8 4 :控制部-8 - 201020185 - 18. Further, a pair of doors 20 and 20 are provided on the left and right sides of the casing 16, and the door 20 may be provided on only one of the left and right sides. The casing 16 has an opening at the lower portion. The clean air from the fan filter unit 18 is a hollow arrow as shown in Fig. 1, and flows from the inside of the casing 16 toward the side of the lifting platform 14. The pair of left and right drive portions 22 and 22 attached to, for example, the casing 16 open and close the door 35 on the left and right sheds 30 and 30. Further, a pair of left and right communication portions 24 and 24 are provided at the upper portion of the column 12, and communication between visible light and infrared light is performed between the communication portions 38 on the fan filter unit 36 φ side of the shed 30. When the drive unit 22 opens and closes the door 35 on the side of the shed 30, the communication unit 24 sends the signal to the side of the fan filter unit 36. The fan filter unit 3 6 ' increases the amount of air supplied to the clean air if a signal to open the door 35 is input. Further, the fan filter unit 36 is disposed in plural in the depth direction of Fig. 1 . In the vicinity of the position where the door 35 is opened and closed, the tower crane 4 is provided with a blower amount of, for example, one to three sets of the fan filter unit 36. Instead of the communication units 24 and 28, a photodetector or the like may be provided in the vicinity of the door 35 0 to detect the opening and closing of the door 35, and the amount of air blown by the fan filter unit 36 may be changed. However, the wiring in the shed 30 will increase. A pair of sheds 30 and 30 are provided on the left and right sides of the traveling path 8, for example, and a plurality of fan filter units 36 are provided on the upper portion of the shed 30, for example. Further, the fan filter unit 36 may be provided not only on the upper portion of the shed 30 but also on the back surface of each of the openings. Further, in the shed 30, the doors 35 which are directed toward the traveling path 8 side are each provided at the opening width. The opening width is the unit of the storage area of the cassette. For example, the storage location of the card is 1 opening width -9 - 201020185. Further, a communication unit 38 is provided in the vicinity of the fan filter unit 36 to communicate with the communication unit 24 on the side of the tower crane 4 to control the amount of clean air from the fan filter unit 36. Reference numeral 32 denotes a cassette for storing articles, and is a skeleton-shaped cassette for accommodating the substrate of the flat display. Instead of a cassette for a flat panel display, it is also possible to use a cassette for a semiconductor wafer or a cassette for containing a medicine or a food. The 34 is a scaffolding and is attached to a pillar (not shown) to support the cassette 32. In addition, a roller conveyor or the like is provided in the opening of a part of the shed 30 as a platform for carrying in/out the cassette 32 to the inside and outside of the automatic warehouse 2. The air from the fan filter assembly 36 flows downward in the shed 30 as indicated by the hollow arrow of Fig. 1. The air from the fan filter unit 36 flows out from, for example, the opening 40 toward the height position of the bogie 10 at the lower portion of the tower crane 4, and is exhausted toward the surroundings through the openings 42 and 44. Further, the inside of the casing 16 and the inside of the shed 30 are maintained at the C-1 0 level by the fan filter assemblies 18, 36, and the traveling path 8 is maintained at, for example, the C-1000 level. Further, the air around the automatic warehouse 2 is more contaminated, and an airtight ceiling or the like is provided on the upper portion of the traveling path 8, and the traveling path 8 may be blocked from the surrounding air. In this case, the cleanliness of the traveling path 8 is caused by the clean air leaking from the shed or the like, and becomes the middle of the shed and the casing 16 and the periphery of the automatic warehouse. In Fig. 2, the opening and closing mechanism of the door 35 of the shed is shown. Also shown in Fig. 2 is that the members are spaced apart. The door 35 is composed of, for example, an airtight and flexible sheet guided by a roller 45 supported by bearings 46, 46. In the shaft of the roller 45, for example, a belt 48' is mounted to circulate the belt 48 by the pulleys 49, 50. Further, the belt 48 is driven by rotating the shaft of the roller 45 by the friction motor 58 which is detachably attached to the driving portion on the lift side. Further, for example, one of the upper ends of the door 35 is attached to the belt 48 by the fixing portion 51, and the guides 52 to 54' are guided by the opposite sides of the lower end of the door 35 and the upper end of the door 35 to the position opposite to the belt 48. In the guidance of these, the guided body 56 or the like is used. When the roller 45 is rotated by the friction carriage 58, the belt 48 is circulated, and the fixing portion 51 is horizontally operated. The other three vertices of the door 35 are guided by the guides 5 2 to 54 by the guided body 56 or the like. Further, the weight of the door 35 or the weight of the rod provided at the lower end of the door 35 prevents the door 35 from being bent. When the fixing portion 51 approaches the side of the roller 54, the lower end of the door 35 is lowered. Therefore, the door 35 is opened and closed by the friction motor 58. In the embodiment, the door 35 is opened up and down, but may be opened to the left or the right. In this case, a pair of right and left doors may be provided around the center of the opening width, and φ may be opened and closed together. Or, set one door wide at each opening, and open the door to either the left or the right. When the door 35 is taken up by the roller 45 or the like, the front surface (the surface facing the traveling path) and the back surface (the surface facing the inside of the shed) of the sheet 35 of the door 35 are brought into contact with each other, and the back side is contaminated. Here, although the winding method is not used in the embodiment, the door 35 may be wound in order to save space. The opening and closing mechanism of the door 35 can be variously deformed. For example, in the third drawing, the windmill 60 rotates the windmill by supplying air 'from any of the nozzles 61 and 62 provided on the lift table side to the door 35. Opening and closing. Windmill 6 〇 -11 - 201020185 is the shaft of the roller 45 attached to Fig. 2. 64 is a pipe, and air such as clean air is supplied to the nozzles 61 and 62. In the modification of Fig. 4, for example, a projection 65 is provided at the lower end of the door 35, and is lifted by the holding member 66 on the lifting table side. 67 is an electromagnetic coil that advances and retracts the holding member 66, and reciprocates between a position at which the projection 65 is held and a position where the projection 65 is not dried. Further, the electromagnetic coil 67 is mounted on the elevating member 68 so as to be raised and lowered along the elevating guide 69. In the modification of Figs. 3 and 4, the other portions are the same as those of the embodiment of Fig. 2, and the structure of the lifting platform 14 is shown in Fig. 5. The friction car 58 described above is driven by the driving unit 22, and is retractable by a retracting mechanism (not shown) between the position where the door on the side of the shed is driven and the retracted position. The drive unit 26 opens and closes the door 20 of the case 16. 70 is a roller, and 72a, 72b are belts. The pulley 73a is a belt 72a attached to the right side of Fig. 5, and the pulley 73b is a belt 72b attached to the left side. The door 20 is attached to the belts 72a, 72b by a fixing portion 74. When the roller 70 is rotated by the motor (not shown) provided in the drive unit 26, the belt 72a or 72b is driven. Further, the fixing portion 74 attached to the belt also moves to open and close the door 20. The lower end of the door 20 is guided by the guide 71. The other part is the same organization as in Figure 2. As shown in Fig. 5, a transfer fork 80 or a transfer device 80 such as a planar articulated robot arm is provided in the lift table 14. In the embodiment, the transfer device 80 transfers the cassette 32 to the left and right sides, but only the sheet side transfer is possible. The clean air from the fan filter assembly 18 flows out from the gap of the lifting platform 1 4 -12- 201020185 . As shown in Fig. 5, an exhaust fan 82 is provided on the elevating table 14 to change the amount of exhaust air to be cleaned. Reference numeral 84 denotes a control unit which is provided, for example, on the elevating table 14, drives the driving units 2 2 and 26, and controls the opening and closing of the doors 2 and 35. In Figs. 6 and 7, the reception of the cassette in the embodiment is shown. When the tower crane is stopped and the lifting table surface is stopped for the purpose of opening the width, the amount of wind φ of the clean air of the fan filter unit toward the shed is increased by the communication unit. In the embodiment, the fan filter assembly of the shed is a fan filter assembly that is more than the fan filter assembly of the elevating table, and has an excess capacity for the supply of clean air, and the door 35 of the shed is opened earlier than the door 20 of the casing of the elevating table. Thereby, as shown in 1) of Fig. 7, the gap between the casing 16 and the shed 30 is purified by the clean air. Next, as in 2) of Fig. 7, the door 2 of the casing of the tower crane is opened. At this time, it is preferable to increase the air volume of the fan filter unit on the side of the elevating table or to increase the exhaust amount of the exhaust fan on the side of the elevating table. When the flow rate of the clean air from the fan filter unit of the escalator is increased, it is possible to prevent the φ air from entering the casing from the side of the shed. When the amount of exhaust air from the hoistway increases, the clean air that enters from the shed side is quickly exhausted from the casing. Thereby, with the clean air from the shed, even if the dust is only slightly weak, it can be prevented from invading into the casing 16. Then, if the transfer is completed by the transfer device of the tower crane, if the transfer is completed, as in the case of 3) in Fig. 7, the door is opened and closed, for example, at the same time or at a certain time. The air volume of the fan filter unit on the elevator side is returned to the original 値, and the air volume of the fan filter unit of the shed is restored to the original 透过 through the communication unit. -13-201020185 The following effects can be obtained in the examples. - (1) The inside of the case and the inside of the shed can be partially maintained in high-definition clarity compared with the outside, which can reduce the consumption of clean air. The exterior referred to herein is for the interior of the casing and the exterior of the interior of the shed, for example, for the outside of the traveling path 8 and the automated warehouse 2, so that the interior of the casing and the interior of the shed are maintained at a high definition. (2) When the door 35 of the shed is opened and closed by the driving unit 22 provided on the side of the hoisting platform, it is not necessary to provide the opening and closing driving unit of the door in the opening width of each shed. @ (3) The path of the cassette 32 between the shed and the casing can form an air tunnel by clean air. (4) Here, if one of the doors is opened first, and the air between the casing and the shed is cleaned by the clean air, the pollution inside the casing and the shed can be more reliably prevented. When both doors are opened at the same time, the air between the shed and the shell may be invaded into the shed or inside the casing by the balance of the airflow from the clean air on the left and right sides. (5) When the article is received, the supply of clean air from the fan and filter unit of the shed and the tower crane can be more reliably prevented from being contaminated in the shed and the casing. (6) When the communication unit provided on the upper part of the column communicates with the communication unit on the fan filter unit side and the optical communication, etc., the opening and closing of the door is detected by a photo-electric sensor or the like to change the air volume of the fan filter unit. In the case of the case, the wiring is easy. In the embodiment, the door is a sheet-like baffle that can be opened and closed, but an air valve such as a downflow of clean air may be used. Further, it is also possible to form an air tunnel between the casing and the shed, and to provide a nozzle for clean air for air tunnel formation on the side of the casing 16 or the like. In the embodiment, the lifting platform opens the door of the shed and the door of the lifting platform after stopping at the opening of the destination. However, the opening and closing drive unit of the door 35 is provided in each of the opening widths of the sheds, and the air volume of the fan filter units 18 and 38 is increased to prevent the intrusion of air from the traveling path 8 before the elevating table is stopped at the target opening width. Next, opening the doors 20, 35 can also be φ. In this case, since the door starts to open before the stop of the elevator, the transfer of the cassette can be performed more quickly. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] A view of a door of a shed provided between a member formed with a gap between members of an embodiment in which an automatic warehouse of an embodiment is seen from the front side [Fig. 2] FIG. 3 is a view showing a modification of the opening and closing mechanism that uses the wind pressure. FIG. 4 is a view showing a modification of the opening and closing mechanism that opens and closes the door [Fig. 5]. Partial front view of the embodiment of the station [Fig. 6] Flow chart showing the admission rule of the cassette in the embodiment [Fig. 7] In the embodiment, the cassette between the tower crane and the shed is accepted. The plan view, 1) is the state in which the door of the shed is opened first, 2) the state in which the doors of both the lift and the shed are opened, and 3) the display of the end of the card, the lift and the shed The state of the door closed by both sides. -15- 201020185 [Explanation of main component symbols] - 2 : Automatic warehouse 4: Tower crane 6 :. Track 8 : Walking path 10 : Pallet 12 : Column 14 : Elevator @ 1 6 : Shell 18, 36: Fan filter Module (FFU) 20, 35: Doors 22, 26: Drive unit 24, 38: Communication unit 30: Shed 3 2: cassette 34: Shelving 10 40, 42 , 44: Opening 4 5, 7 0: Roller 46 : Bearings 48, 72: Belts 49, 50: Pulleys 51, 74: Fixing portions 52 to 54: Guide 56 = Guided body-16- 201020185 . 58 : Friction wagon 60: Windmills 61, 62: Nozzle 64: Piping 65: protrusion 66: holding member 67: electromagnetic coil ❹ 6 8 : lifting member 69: lifting guide 71: guide bow [73a, b: pulley 80: transfer device 8 2: exhaust fan 8 4 : control unit