JPS60161825A - Automatic conveying device for semiconductor wafer housing cassette - Google Patents
Automatic conveying device for semiconductor wafer housing cassetteInfo
- Publication number
- JPS60161825A JPS60161825A JP1548084A JP1548084A JPS60161825A JP S60161825 A JPS60161825 A JP S60161825A JP 1548084 A JP1548084 A JP 1548084A JP 1548084 A JP1548084 A JP 1548084A JP S60161825 A JPS60161825 A JP S60161825A
- Authority
- JP
- Japan
- Prior art keywords
- loading
- semiconductor wafer
- wafer storage
- transport vehicle
- unloading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/60—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type
- B65G47/61—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type for articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Intermediate Stations On Conveyors (AREA)
- Specific Conveyance Elements (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は半導体装置を製造する際に、半導体ウェハーを
収納したウェハー収納カセットを一つの製造工程から次
の製造工程へ自動搬送する装置の改良に関する。Detailed Description of the Invention [Technical Field of the Invention] The present invention relates to an improvement in an apparatus for automatically transporting a wafer storage cassette containing semiconductor wafers from one manufacturing process to the next manufacturing process when manufacturing semiconductor devices. .
ＩＣやＬＳＩ等の半導体装置は多数の複雑な製造工程を
経て製造されるが、特に、半導体ウェハー内にトランジ
スタ等の素子を形成する最も重要な工程はウェア・一工
程と呼ばれる。このウニハーニ程も、リソグラフィ一工
程、熱酸化工程、不純物拡散工程等の多数の工程からな
っておυ、これらウェア・一工程中の一つの工程を終了
した半導体ウェア・−は、ウェア・−収納カセットに収
納して次工程に搬送される。そして、この搬送を自動的
に行なう為に、第１図に示す搬送装置が従来から用いら
れている。Semiconductor devices such as ICs and LSIs are manufactured through a large number of complicated manufacturing processes, and the most important process for forming elements such as transistors in a semiconductor wafer is called a ware process. This process also consists of many processes such as a lithography process, a thermal oxidation process, an impurity diffusion process, etc. After completing one of these processes, the semiconductor ware is stored as a ware. It is stored in a cassette and transported to the next process. In order to carry out this conveyance automatically, a conveyance device shown in FIG. 1 has been conventionally used.
第１図に於て、１は搬送レールである。該搬送レールは
半導体ウニ／・−を搬送する位置に亘って張設されてお
シ、搬送車２を走行させる様になっている。搬送車２か
らはベルト３を介して荷物ハンド部４が吊設されており
、ベルト３は搬送車２に設けられた図示しない原動機に
よシ巻取シ及び巻戻しされるようになっている。In FIG. 1, 1 is a conveyance rail. The transport rail is stretched over the position where the semiconductor sea urchins are transported, and the transport vehicle 2 is made to travel on the transport rail. A cargo hand section 4 is suspended from the transport vehicle 2 via a belt 3, and the belt 3 is wound up and rewound by a motor (not shown) provided on the transport vehicle 2. .
また、荷物ハンド部４には把持アーム５が設けられてお
シ、該把持アーム５は図示しない駆動モータにより図中
矢印で示すように開閉駆動される様になっている。そし
て、荷物ノ・ンド部４によるウェハー収納カセットの受
渡し及び搬送車の送行により、半導体ウェア・−の搬送
が行なわれる。Further, the baggage hand section 4 is provided with a gripping arm 5, which is driven to open and close as shown by arrows in the figure by a drive motor (not shown). Then, the semiconductor wafers are transported by the delivery section 4 of the wafer storage cassette and the transportation of the transport vehicle.
ウェハー収納カセットの受渡しについて説明すると、搬
送車２はレール１に設置された図示しないリミットスイ
ッチの作動によシ、ウエノ１−収納カセット６を載置し
た移載機荷台７の直上に停止する。続いて、原動機を作
動させてベルト３の巻戻しを行なうことに↓り荷物ノ・
ンド部４を所定の位置まで下降させる。その際、移載機
荷台７及び搬送車２に設けられたＩＪ ミツトスイッチ
によシ原動機を停止させ、荷物／・ンド部４の下降位置
を制御する。そして、把持アーム５の駆動によシウエノ
・−収納カセットを把持した後、今度はベルト３を巻取
ることによシ、荷物ハンド部４を所定の位置まで上昇さ
せる。To explain the delivery of the wafer storage cassettes, the transport vehicle 2 is stopped directly above the transfer machine loading platform 7 on which the wafer storage cassettes 6 are placed by the operation of a limit switch (not shown) installed on the rail 1. Next, the prime mover is activated to rewind the belt 3.
lower the hand portion 4 to a predetermined position. At this time, the IJ switch provided on the transfer machine loading platform 7 and the transport vehicle 2 stops the prime mover and controls the lowering position of the load/end section 4. After gripping the storage cassette by driving the gripping arm 5, the belt 3 is then wound up to raise the baggage hand portion 4 to a predetermined position.
上記の操作を逆に行なうことにニジ、荷物ノ１ンド部４
に把持されているウェハー収納カセット６は移載機荷台
７の上に荷降ろしされる。If you do the above operation in reverse, then the luggage compartment 4
The wafer storage cassette 6 held by the wafer storage cassette 6 is unloaded onto the loading platform 7 of the transfer machine.
第１図の従来の搬送装置は、荷物ハンド部４の昇降距離
（通常は２００ｍ）の長短によっては荷物ハンド部４に
横プレが生じ、位置ずれを生じるという問題があった。The conventional conveyance device shown in FIG. 1 has a problem in that depending on the vertical distance (usually 200 m) of the cargo hand section 4, the cargo hand section 4 is laterally bent, resulting in positional deviation.
また、昇降距離が一般には比較的長い為、荷物の受渡し
に要する時間が長くなって円滑な自動搬送が出来ないと
いう問題があった。更に、ベルト駆動による昇降機構を
用いているため、発塵量や耐久性の点で問題があった。In addition, since the vertical distance is generally relatively long, there is a problem in that the time required to deliver the cargo increases, making it impossible to carry out smooth automatic transportation. Furthermore, since a lifting mechanism driven by a belt is used, there are problems with the amount of dust generated and durability.
本発明は上記事情に鑑みて為されたもので、正確且つ極
めて効率的に半導体ウェハー収納カセットの受渡しを行
なうことが出来る自動搬送装置を提供するものである。The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide an automatic transport device that can accurately and extremely efficiently deliver and deliver semiconductor wafer storage cassettes.
本発明による半導体ウェハー収納カセットの自動搬送装
置は、搬送レールを走行する搬送車と、搬送車に固定し
て設けられ半導体ウエノ翫−収納カセットを保持する荷
物ノ・ンド部と、搬送レールの下方に設けられ搬送車か
ら半導体ウェハー収納カセットを受取り、あるいは搬送
車に半導体ウェハーを受渡すエレベータとを具備してい
る。The automatic transport device for semiconductor wafer storage cassettes according to the present invention includes a transport vehicle that travels on a transport rail, a baggage nod section that is fixed to the transport vehicle and holds the semiconductor wafer storage cassette, and a lower part of the transport rail. The elevator is equipped with an elevator for receiving semiconductor wafer storage cassettes from the transport vehicle or delivering semiconductor wafers to the transport vehicle.
上記の様に、本発明による搬送装置は、エレベータを備
えているためベルト駆動で荷物ハンド部を昇降させる従
来の搬送装置のように荷物ハンド部の横プレを生じるこ
とはない。As described above, since the conveyance apparatus according to the present invention is equipped with an elevator, the conveyance apparatus according to the present invention does not cause lateral play of the load hand part unlike the conventional conveyance apparatus in which the load hand part is raised and lowered by a belt drive.
更にベルトを廃止したことによシ、発塵の問題や耐久性
の問題でも大幅な改善効果が得られる。Furthermore, by eliminating the belt, significant improvements can be made in the problems of dust generation and durability.
以下、第２図及び第３図を参照して本発明の一実施例を
説明する。An embodiment of the present invention will be described below with reference to FIGS. 2 and 3.
第２図は本発明の一実施例として構成された半導体ウェ
ハー収納カセットの自動搬送装置を示す説明図である。FIG. 2 is an explanatory diagram showing an automatic transport device for semiconductor wafer storage cassettes constructed as an embodiment of the present invention.
同図に於て、１１は搬送レールであυ、１２は搬送レー
ルを走行する搬送車である。該搬送車１２の下面には荷
物ハンド部１３が固定して設けられておシ、該荷物ハン
ド部１３には半導体ウェハーが収納されたウェハー収納
カセットを把持する為の把持アーム１４が設けられてい
る。そして、搬送車１２は荷降ろしステーションでウェ
ハー収納カセットを荷降ろしした後、荷積みステーショ
ンまで走行してウェハー収納カセットを荷積みする。In the figure, 11 is a transport rail υ, and 12 is a transport vehicle that runs on the transport rail. A baggage hand section 13 is fixedly provided on the lower surface of the transport vehicle 12, and a gripping arm 14 is provided on the baggage hand section 13 for gripping a wafer storage cassette in which semiconductor wafers are stored. There is. After unloading the wafer storage cassettes at the unloading station, the transport vehicle 12 travels to the loading station and loads the wafer storage cassettes.
その際、搬送車１２はレール１ノに配設されたリミット
スイッチによって所定の荷積みステーション及び荷降ろ
しステーションで停止される様になっている。荷降ろし
ステーション下には、昇降荷台Ｊ５を備えた荷降ろしエ
レベータ工」及び矢印方向に駆動されるストレージ１７
が設置されでいる。他方、荷積みステーション下には昇
降荷台１８を有する荷積みエレベータｎ及び矢印方向に
駆動されるストレージ２ｏが設置されている。At that time, the conveyance vehicle 12 is stopped at a predetermined loading station and unloading station by a limit switch provided on the rail 1. Under the unloading station, there is an unloading elevator facility equipped with a lifting platform J5 and a storage 17 that is driven in the direction of the arrow.
has been installed. On the other hand, a loading elevator n having a lifting platform 18 and a storage 2o driven in the direction of the arrow are installed below the loading station.
上記荷降ろしエレベータ１６及び荷積みエレベータ工１
９は、第３図に示す様にして搬送車の荷物ハンド部１３
との間でウェハー収納カセット６の受渡しを行なう。The above-mentioned unloading elevator 16 and loading elevator work 1
9 is a cargo hand section 13 of the transport vehicle as shown in FIG.
The wafer storage cassette 6 is transferred between the wafer storage cassette 6 and the wafer storage cassette 6.
上記荷降ろしエレベータ工互及び荷積みエレベータ上互
には、第３図に示す様に、昇降荷台１５．１８が停止さ
れる三種類の停止定点Ａ。As shown in FIG. 3, between the unloading elevator and the loading elevator, there are three types of fixed stopping points A at which the lifting platform 15 and 18 are stopped.
Ｂ、Ｃが設けられている。即ち、Ａは待機点、Ｂは荷降
ろしまたは荷積み定点、Ｃはストレージ荷渡し定点また
はストレージ荷受は定点である。B and C are provided. That is, A is a waiting point, B is an unloading or loading fixed point, and C is a storage delivery fixed point or a storage receiving fixed point.
上記実施例の搬送装置に於て、ウェハー収納カセット６
の荷積み及び荷降ろしは次の様にして行なわれる。先ず
、荷降ろしについて説明すると、荷降ろしエレベータ土
工の昇降荷台１５は予め荷降ろし待機点Ａまで上昇され
て搬送車１２の入車を待つ。そして、荷物ハンド部１３
にウェハー収納カセット６を把持した搬送車１２が荷降
ろしステーションに入車停止すると、昇降荷台１５は荷
降ろし定点Ｂまで上昇し、把持アーム１４が開かれてウ
ェハー収納カセット６は荷物ハンド部１３から昇降荷台
１５上に荷降ろしされる。続いて、昇降荷台１５はスト
レージ荷渡し定点Ｃｔで下降し、ウェハー収納カセット
６はストレージ１７上に荷渡しする。ウェハー収納カセ
ット６はストレージ１７によシ熱酸化等の所定の処理が
行なわれる場所まで移送される。In the transfer device of the above embodiment, the wafer storage cassette 6
Loading and unloading will be carried out as follows. First, unloading will be explained. The lifting platform 15 of the unloading elevator earthwork is raised to the unloading standby point A in advance and waits for the transport vehicle 12 to enter. And the luggage hand section 13
When the transport vehicle 12 holding the wafer storage cassette 6 enters the unloading station and stops, the elevating loading platform 15 rises to the unloading fixed point B, the gripping arm 14 is opened, and the wafer storage cassette 6 is removed from the cargo hand section 13. The cargo is unloaded onto the elevating loading platform 15. Subsequently, the elevating platform 15 descends at the storage delivery fixed point Ct, and the wafer storage cassette 6 is delivered onto the storage 17. The wafer storage cassette 6 is transferred to a storage 17 to a location where a predetermined process such as thermal oxidation is performed.
次に、ウェハー収納カセット６の荷積みについて説明す
ると、荷降ろしを終えて空になった搬送車１２はレール
１１に沿って走行し、図示しないリミットスイッチによ
シ所定の荷積みステーションで停止する。このとき、荷
積みエレベータ上玉の昇降荷台１８はストレー・ゾ荷受
は定点Ｃに於て予めストレージ２０からウェハー収納カ
セット６を荷受けし更に荷積み待機点Ａまで上昇して待
機している。そして、搬送車１２が荷積みステーション
に停止すると、昇降荷台１８は荷積み定点Ｂまで上昇す
る。続いて把持アーム１４が閉じ、ウェハー収納カセッ
ト６は荷物ハンド部１３に荷積みされる。こうしてウェ
ハー収納カセットを荷積みされた搬送車１２はレール１
１に沿って次の処理工程位置まで走行し、上述したのと
同様にしてウェハー収納カセット６を荷降ろしする。Next, the loading of the wafer storage cassette 6 will be explained. After unloading, the empty transport vehicle 12 travels along the rails 11 and is stopped at a predetermined loading station by a limit switch (not shown). . At this time, the lifting platform 18 of the upper loader of the loading elevator receives the wafer storage cassette 6 from the storage 20 at a fixed point C, and then ascends to the loading standby point A and waits. Then, when the transport vehicle 12 stops at the loading station, the elevating platform 18 rises to the fixed loading point B. Subsequently, the gripping arm 14 is closed, and the wafer storage cassette 6 is loaded onto the baggage hand section 13. The transport vehicle 12 loaded with wafer storage cassettes is moved to the rail 1.
1 to the next processing step position, and the wafer storage cassette 6 is unloaded in the same manner as described above.
上記のように、この実施例に成る半導体ウェハー収納カ
セットの自動搬送装置では、荷降ろしエレベータ１６及
び荷積みエレベータ１９の両者共、昇降荷台１５．１８
を予め待機位置まで上昇させて搬送車１２を待っている
から、搬送車１２が入車停止すると殆ど瞬ＴＲ（約３秒
）に荷降ろしまたは荷積み作業を完了することが出来る
。因みに、ベルト、駆動による昇降機構を用いた第１図
の従来の搬送装置では荷降ろしあるいは荷積みの作業に
約３０秒を要していたことを考慮すれば、上記実施例で
は作業時間を著しく短縮されることが理解できる。As described above, in the automatic conveyance device for semiconductor wafer storage cassettes according to this embodiment, both the unloading elevator 16 and the loading elevator 19 are equipped with lifting platforms 15 and 18.
Since the transport vehicle 12 is raised to the standby position in advance and is waiting for the transport vehicle 12, the unloading or loading work can be completed almost instantaneously (about 3 seconds) once the transport vehicle 12 enters and stops. Incidentally, considering that it takes about 30 seconds to unload or load in the conventional conveying device shown in FIG. I can understand that it will be shortened.
また、昇降機構としてのベルトを廃止したことによシ、
上記実施例の搬送装置では搬送車の荷物ハンド部１３と
エレベータの昇降荷台１５゜１８との間の位置合せを容
易且つ正確に行なうことが出来、更に１発塵や耐久性の
問題も解消する。In addition, by eliminating the belt as a lifting mechanism,
The transport device of the above embodiment allows easy and accurate positioning between the cargo hand section 13 of the transport vehicle and the lifting platform 15° 18 of the elevator, and also eliminates the problems of single dust and durability. .
以上詳述したように、本発明による半導体ウェハー収納
カセットの自動搬送装置にあっては、正確且つ極めて効
率的にウェハー収納カセットの受渡しを行なうことが出
来る等、顕著な効果が得られるものである。As described in detail above, the automatic transport device for semiconductor wafer storage cassettes according to the present invention provides remarkable effects such as being able to transfer wafer storage cassettes accurately and extremely efficiently. .
第１図は従来用いられている半導体ウェハー収納カセッ
トの自動搬送装置を示す説明図、第２図及び第３図は本
発明の一実施例になる半導体ウェハー収納力七ットの自
動搬送装置を示す説明図である。
１１・・・搬送レール、１２・・・搬送車、１３・・・
荷物ハンド部、１４・・・把持アーム、１５．１８・・
・昇降荷台、１６・・・荷降ろしエレベータ、１７゜２
０・・・ストレージ、１９・・・荷積ミエレベータ、６
・・・ウェハー収納カセット。
出願人代理人 弁理士 鈴 斤 武 彦第２図
第３図FIG. 1 is an explanatory diagram showing a conventionally used automatic transport device for semiconductor wafer storage cassettes, and FIGS. 2 and 3 show an automatic transport device with a semiconductor wafer storage capacity of 7 tons, which is an embodiment of the present invention. FIG. 11...Transportation rail, 12...Transportation vehicle, 13...
Luggage hand section, 14...Gripping arm, 15.18...
・Lifting loading platform, 16...Loading elevator, 17゜2
0...Storage, 19...Loading elevator, 6
...Wafer storage cassette. Applicant's agent Patent attorney Takehiko Suzu Figure 2 Figure 3
Claims (2)
して設けられ半導体ウェハー収納カセットを保持する荷
物ハンド部と、前記搬送レールの下方に設けられ前記搬
送車から前記半導体ウェハー収納カセットを荷降ろしし
、あるいは前記搬送車に前記半導体ウェハー収納カセッ
トを荷積みするエレベータとを具備する半導体ウェハー
収納カセットの自動搬送装置。(1) A transport vehicle that runs on a transport rail, a baggage hand section that is fixedly provided to the transport vehicle and holds the semiconductor wafer storage cassette, and a luggage hand section that is provided below the transport rail and carries the semiconductor wafer storage cassette from the transport vehicle. and an elevator for unloading the semiconductor wafer storage cassettes or loading the semiconductor wafer storage cassettes onto the transport vehicle.
積みステーションで停止する搬送車と、該搬送車に固定
して設けられ半導体ウェハー収納カセットを保持する荷
物ハンド部と、前記荷降ろしステーション下に設けられ
た荷降ろしエレベータと、前記荷積みステーション下に
設けられた荷積みエレベータとを具備し、荷降ろしエレ
ベータの昇降荷台は半導体ウェハ収納カセットを保持し
ている搬送車が荷降ろしステーションで停止すると荷降
ろし待機点から荷降ろし定点まで上昇して前記半導体ウ
ェハー収納カセットを前記搬送車から受取シ、次に荷渡
し定点まで下降して前記半導体ウエノ・−収納カセット
を降ろし、一方荷積みエレベータの昇降荷台は荷受は定
点で半導体ウェハー収納カセットを積み込んだ後荷積み
待機点まで上昇し、次に搬送車が荷積みステーションで
停止すると、荷積み待機点から荷積み定点まで上昇して
前記半導体ウェハー収納カセットを前記搬送車に受渡す
ことを特徴とする半導体ウェハー収納カセットの自動搬
送装置。(2) A transport vehicle that runs on a transport rail and stops at an unloading station and a loading station, a cargo hand section that is fixed to the transport vehicle and holds a semiconductor wafer storage cassette, and a cargo hand section that is installed below the unloading station. and a loading elevator provided below the loading station, and the lifting platform of the unloading elevator lifts the load when the carrier vehicle holding the semiconductor wafer storage cassette stops at the unloading station. It ascends from the unloading standby point to a fixed unloading point to receive the semiconductor wafer storage cassette from the transport vehicle, then descends to the fixed loading point to unload the semiconductor wafer storage cassette, while moving up and down the loading platform of the loading elevator. After loading the semiconductor wafer storage cassette at a fixed point, the cargo receiver rises to the loading waiting point, and then when the transport vehicle stops at the loading station, it rises from the loading waiting point to the fixed loading point and loads the semiconductor wafer storage cassette. An automatic transport device for semiconductor wafer storage cassettes, characterized in that the semiconductor wafer storage cassettes are delivered to the transport vehicle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1548084A JPS60161825A (en) | 1984-01-31 | 1984-01-31 | Automatic conveying device for semiconductor wafer housing cassette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1548084A JPS60161825A (en) | 1984-01-31 | 1984-01-31 | Automatic conveying device for semiconductor wafer housing cassette |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60161825A true JPS60161825A (en) | 1985-08-23 |
Family
ID=11889952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1548084A Pending JPS60161825A (en) | 1984-01-31 | 1984-01-31 | Automatic conveying device for semiconductor wafer housing cassette |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60161825A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS638116A (en) * | 1986-06-30 | 1988-01-13 | Toshiba Corp | Elevating and shifting device |
| JPH0556835U (en) * | 1992-01-13 | 1993-07-27 | 村田機械株式会社 | Overhead type article carrier for clean room |
| US5284412A (en) * | 1990-08-17 | 1994-02-08 | Tokyo Electron Sagami Limited | Stock unit for storing carriers |
| US5344365A (en) * | 1993-09-14 | 1994-09-06 | Sematech, Inc. | Integrated building and conveying structure for manufacturing under ultraclean conditions |
| US5547329A (en) * | 1994-06-22 | 1996-08-20 | Kirin Beer Kabushiki Kaisha | Roller bottle handling system |
| EP1463107A2 (en) * | 2003-03-28 | 2004-09-29 | Integrated Dynamics Engineering GmbH | Apparatus and method for handling and conveying wafers |
| US7137769B2 (en) | 2001-07-24 | 2006-11-21 | Honda Giken Kogyo Kabushiki Kaisha | Workpiece feeding apparatus |
| CN113998403A (en) * | 2020-07-28 | 2022-02-01 | 长鑫存储技术有限公司 | Transfer system and transfer method |
-
1984
- 1984-01-31 JP JP1548084A patent/JPS60161825A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS638116A (en) * | 1986-06-30 | 1988-01-13 | Toshiba Corp | Elevating and shifting device |
| US5284412A (en) * | 1990-08-17 | 1994-02-08 | Tokyo Electron Sagami Limited | Stock unit for storing carriers |
| JPH0556835U (en) * | 1992-01-13 | 1993-07-27 | 村田機械株式会社 | Overhead type article carrier for clean room |
| US5344365A (en) * | 1993-09-14 | 1994-09-06 | Sematech, Inc. | Integrated building and conveying structure for manufacturing under ultraclean conditions |
| US5547329A (en) * | 1994-06-22 | 1996-08-20 | Kirin Beer Kabushiki Kaisha | Roller bottle handling system |
| US7137769B2 (en) | 2001-07-24 | 2006-11-21 | Honda Giken Kogyo Kabushiki Kaisha | Workpiece feeding apparatus |
| EP1463107A2 (en) * | 2003-03-28 | 2004-09-29 | Integrated Dynamics Engineering GmbH | Apparatus and method for handling and conveying wafers |
| EP1463107A3 (en) * | 2003-03-28 | 2006-06-28 | Integrated Dynamics Engineering GmbH | Apparatus and method for handling and conveying wafers |
| CN113998403A (en) * | 2020-07-28 | 2022-02-01 | 长鑫存储技术有限公司 | Transfer system and transfer method |
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